A near-field optical microscope system and imaging method

Abstract

This invention provides a near-field optical microscope system and imaging method, comprising at least: a micromirror array, an optical path module, and a microscope module, wherein the micromirror array and the optical path module are both connected to the microscope module; the micromirror array receives the laser signal generated by the optical path module, and adjusts the wavefront information generated by the laser signal on the optical path module by adjusting the direction of each micromirror in the micromirror array; adjusting the rotation angle of each mirror reflects the laser signal to the microscope module, so that the microscope module generates a detection signal that meets the contrast and resolution requirements, and detects the near-field optical information of the sample. Using a micromirror array to assist in detecting the near-field optical information of the sample can effectively suppress background noise, enhance the intensity of reflected light, and greatly improve the resolution and contrast of the imaging; it has a simple structure, is easy to operate, and has wide applicability.

Description

Technical Field

[0001] This invention relates to the field of microscope imaging technology, and in particular to a near-field optical microscope system and imaging method. Background Technology

[0002] Near-field optical microscopy is one of the fastest-developing microscopy techniques of the 21st century. It expands the field of view to less than one-tenth of the wavelength, achieving nanometer precision. In near-field optical microscopy systems, probes with apertures much smaller than the wavelength of light are used instead of optical lenses. When such sub-wavelengths are placed within one wavelength of the object's surface—that is, within the near-field region—rich submicron optical information can be detected by probing non-radiative sources confined to the object's surface.

[0003] The conventional optical microscope (also known as the far-field optical microscope) is the oldest member of the microscope family, and it was once the only means of observing minute structures. A conventional optical microscope consists of optical lenses that utilize changes in refractive index and lens curvature to magnify the observed object and obtain its detailed information. However, the diffraction limit of light restricts further improvements in the resolving power of optical microscopes. According to the Rayleigh resolution limit, the magnification of an optical microscope cannot be arbitrarily increased. The Rayleigh criterion is based on the assumption of propagating waves; if we can detect evanescent waves carrying detailed information about an object, we can circumvent the Rayleigh criterion and overcome the diffraction limit.

[0004] Near-field optical imaging differs from classical optics in that it involves optical theories and phenomena within a wavelength range. The so-called "near-field" region includes: (i) a radiative field, which is a field component that can propagate outwards; and (ii) a non-radiative field, which is a field component confined to the sample surface and decays rapidly at a distance. Because near-field waves reflect transient changes in the spatial optical properties encountered by light during propagation, the subwavelength structure and optical information of a sample can be detected by probing its evanescent waves. In recent years, near-field optical microscopy has achieved groundbreaking developments in both theory and practice.

[0005] Typically, near-field optical microscopy utilizes the infrared to terahertz wavelength range, combining with platforms such as atomic force microscopy (AFM) or scanning tunneling microscopy (STM) to achieve resolution exceeding the optical diffraction limit. The principle can be summarized as follows: on the AFM or STM probe, the electromagnetic field distribution is confined to the tip, thus the optical diffraction limit is broken, and the obtained microscopic resolution and contrast depend solely on the scattered signal at the tip. However, since the excitation light emitted from the infrared / terahertz laser illuminates non-probe locations, it reduces excitation efficiency and generates background signals. Therefore, how to enhance the intensity of scattered light and suppress background signals has always been a pressing problem to be solved in near-field optical microscopy systems. Summary of the Invention

[0006] In view of the shortcomings of the prior art described above, the purpose of this invention is to provide a near-field optical microscope system and imaging method to solve the problem that it is difficult to suppress background noise and enhance the intensity of scattered light in the prior art.

[0007] To achieve the above and other related objectives, the present invention provides a near-field optical microscope system, which includes at least: a micromirror array, an optical path module, and a microscope module, wherein:

[0008] The micromirror array and the optical path module are both connected to the microscope module;

[0009] The micromirror array receives the laser signal generated by the optical path module. By adjusting the direction of each micromirror in the micromirror array, the wavefront information generated by the laser signal on the optical path module is adjusted. The rotation angle of each mirror is adjusted to reflect the laser signal to the microscope module, so that the microscope module generates a detection signal that meets the contrast and resolution requirements to detect the near-field optical information of the sample. The wavefront information includes the amplitude and phase of the laser signal.

[0010] The micromirror array is expressed as X[n, m, d], where n is equal to the number of horizontal micromirrors (n is a natural number greater than or equal to 2), m is equal to the number of vertical micromirrors (m is a natural number greater than or equal to 2), and d is the rotation angle of the micromirrors.

[0011] Optionally, the optical path module includes: a first laser, a second laser, a first off-axis parabolic mirror, a second off-axis parabolic mirror, a third off-axis parabolic mirror, a first beam splitter, a second beam splitter, a third beam splitter, and a photodetector, wherein:

[0012] The first laser emits a first laser signal, which is directly incident on the micromirror array after passing through the first off-axis parabolic mirror; reflected by the micromirror array, it reaches the third off-axis parabolic mirror; and focused by the third off-axis parabolic mirror, it reaches the microscope module.

[0013] The second laser emits a second laser signal, which is directly incident on the first beam splitter after passing through the second off-axis parabolic mirror, splitting into a first beam and a second beam. The first beam is directly incident on the third beam splitter. The second beam is reflected by the micromirror array, reaches the second beam splitter, and is reflected again by the second beam splitter to reach the third beam splitter. The first beam and the second beam that reach the third beam splitter are transmitted to the photodetector, generating regular interference fringes on the photodetector. The detection signal generated by the microscope module is based on the interference fringes to detect the near-field optical information of the sample. The photodetector is connected to and controlled by the microscope module.

[0014] The second laser, the second off-axis parabolic mirror, the first beam splitter, the micromirror array, the second beam splitter, the third beam splitter, and the photodetector together constitute a Michelson interferometer.

[0015] Optionally, the light source of the first laser is an infrared laser or a terahertz laser; the light source of the second laser is visible light.

[0016] Optionally, the mirror surfaces of the first off-axis parabolic mirror, the second off-axis parabolic mirror, and the third off-axis parabolic mirror are gold-plated or silver-plated.

[0017] Optionally, the microscope module includes: a computer and a scanning probe platform, wherein the scanning probe platform is connected to the computer, outputs a detection signal based on the computer's control, receives the first laser signal focused by the third off-axis parabolic mirror, detects the near-field optical information of the sample, and inputs the detection results into the computer.

[0018] Optionally, the scanning probe platform is a pinhole near-field optical microscope scanning probe platform or a scattering near-field optical microscope scanning probe platform.

[0019] This invention provides a near-field optical microscopy imaging method, which includes at least:

[0020] The near-field optical microscope system is provided, and the orientation of the micromirror array is adjusted so that the optical path module produces regular interference fringes;

[0021] Iterate through each micromirror in the micromirror array and adjust the rotation angle of the mirror to make the power of the detection signal reach the peak value. Store the angle of each micromirror in X[n, m, d].

[0022] The second laser signal is turned off to detect the near-field optical information of the sample. Turning off the second laser signal means turning off the Michelson interferometer.

[0023] Optionally, by synchronously adjusting the orientation of each micromirror in the micromirror array, the optical path module can generate regular interference fringes.

[0024] Optionally, the relationship between the detection signal and the micromirror array is as follows: Where Γ1 represents the incident matrix of each micromirror, Γ2 represents the output matrix of each micromirror, I represents the first laser signal, and X is the abbreviation of X[n, m, d].

[0025] As described above, the near-field optical microscope system and imaging method of the present invention have the following beneficial effects:

[0026] 1) The near-field optical microscope system and imaging method of the present invention utilize a micromirror array to assist in the detection of near-field optical information of the sample, which can effectively suppress background noise, enhance the intensity of reflected light, and greatly improve the resolution and contrast of the imaging.

[0027] 2) The near-field optical microscope system and imaging method of the present invention have a simple structure, are easy to operate, and have wide applicability. Attached Figure Description

[0028] Figure 1 The diagram shown is a functional structure diagram of the near-field optical microscope system of the present invention.

[0029] Figure 2 The diagram shows the functional structure of the Michelson interferometer in the near-field optical microscope system of the present invention.

[0030] Figure 3 The diagram shows a functional flow chart of the near-field optical microscope imaging method of the present invention.

[0031] Explanation of reference numerals in the attached figures

[0032] 1. Micromirror array

[0033] 2 Optical Path Module

[0034] 3. Microscope Module

[0035] 4. Michelson interferometer

[0036] 21 First Laser

[0037] 22 Second Laser

[0038] 23 First Off-Axis Parabolic Mirror

[0039] 24 Second Off-Axis Parabolic Mirror

[0040] 25 Third off-axis parabolic mirror

[0041] 26 First beam splitter

[0042] 27 Second beam splitter

[0043] 28 Third beam splitter

[0044] 29. Photodetector

[0045] 31 Computers

[0046] 32 Scanning probe platform

[0047] Steps S1 to S3 Detailed Implementation

[0048] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0049] Please see Figures 1 to 3 It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of the present invention. The illustrations only show components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0050] like Figure 1 and Figure 2 As shown, this embodiment provides a near-field optical microscope system, which includes at least: a micromirror array 1, an optical path module 2, and a microscope module 3, wherein:

[0051] The micromirror array 1 and the optical path module 2 are both connected to the microscope module 3;

[0052] The micromirror array 1 receives the laser signal generated by the optical path module 2. By adjusting the direction of each micromirror in the micromirror array 1, the wavefront information generated by the laser signal on the optical path module 2 is adjusted. The rotation angle of each mirror is adjusted to reflect the laser signal to the microscope module 3, so that the microscope module 3 generates a detection signal that meets the contrast and resolution requirements to detect the near-field optical information of the sample. The wavefront information includes the amplitude and phase of the laser signal. For the sample, the near-field optical information is the optical constant of the sample at the microscale, including the real and imaginary parts of the dielectric constant. For electromagnetic waves, the near-field optical information is the amplitude and phase of the electromagnetic wave. In this embodiment, the electromagnetic wave refers to the laser signal, including the first laser signal and the second laser signal.

[0053] The expression for the micromirror array 1 is X[n, m, d], where n is equal to the number of horizontal micromirrors and is a natural number greater than or equal to 2; m is equal to the number of vertical micromirrors and is a natural number greater than or equal to 2; and d is the rotation angle of the micromirrors.

[0054] Specifically, as an example, such as Figure 1 and Figure 2 As shown, the optical path module 2 includes: a first laser 21, a second laser 22, a first off-axis parabolic mirror 23, a second off-axis parabolic mirror 24, a third off-axis parabolic mirror 25, a first beam splitter 26, a second beam splitter 27, a third beam splitter 28, and a photodetector 29, wherein:

[0055] like Figure 1 and Figure 2 As shown, the first laser 21 emits a first laser signal, which is directly incident on the micro-mirror array 1 after passing through the first off-axis parabolic mirror 23. The signal is then reflected by the micro-mirror array 1 and reaches the third off-axis parabolic mirror 25. The signal is then focused by the third off-axis parabolic mirror 25 and reaches the microscope module 1.

[0056] More specifically, the light source of the first laser 21 is an infrared laser or a terahertz laser, and the mirror surfaces of the first off-axis parabolic mirror 23 and the third off-axis parabolic mirror 25 are gold-plated or silver-plated. It should be noted that for the first laser 21, higher coherence and power are desirable. Infrared lasers or terahertz lasers are suitable as light sources because they are miniaturized, have high power, high integration, output power reaching the watt level, and strong coherence. The off-axis parabolic mirrors require high reflectivity; therefore, they need to have high transmittance and low reflection for the first laser, especially the infrared or terahertz laser. Thus, gold-plated or silver-plated mirror surfaces are chosen for the first off-axis parabolic mirror 23 and the third off-axis parabolic mirror 25. It should be further explained that the light source of the first laser 21 includes, but is not limited to, infrared laser or terahertz laser, and the mirror surfaces of the first off-axis parabolic mirror 23 and the third off-axis parabolic mirror 25 include, but are not limited to, gold-plated mirror surfaces or silver-plated mirror surfaces. As long as the power of the first laser signal is higher and the correlation is stronger, and the off-axis parabolic mirror has high transmittance and low reflection of the first laser, any light source of the first laser 21 and mirror surface settings of the first off-axis parabolic mirror 23 and the third off-axis parabolic mirror 25 are applicable, and will not be elaborated here.

[0057] like Figure 1 and Figure 2 As shown, the second laser 22 emits a second laser signal, which is directly incident on the second off-axis parabolic mirror 24 and reaches the first beam splitter 26, where it is split into a first beam and a second beam. The first beam is directly incident on the third beam splitter 28. The second beam is reflected by the micro-mirror array 1 and reaches the second beam splitter 27. After being reflected by the second beam splitter 27, it reaches the third beam splitter 28. The first beam and the second beam that reach the third beam splitter 28 are transmitted to the photodetector 29, where regular interference fringes are generated. The photodetector 29 is connected to the microscope module 3 and controlled by the microscope module 3. Specifically, the photodetector 29 is connected to the computer 31.

[0058] Among them, such as Figure 1 and Figure 2 As shown, the second laser 22, the second off-axis parabolic mirror 24, the first beam splitter 26, the micro-mirror array 1, the second beam splitter 27, the third beam splitter 28, and the photodetector 29 constitute the Michelson interferometer 4.

[0059] More specifically, the light source of the second laser 22 is visible light. It should be noted that the second laser 22, as a reference light source, is required to have high coherence and low power, while visible light meets the requirements of high coherence and low power. The parameters of the second off-axis parabolic mirror 24 are the same as those of the first off-axis parabolic mirror 23 and the third off-axis parabolic mirror 25, and will not be elaborated here. A beam splitter is an optical device that can split a beam of light into two or more beams. It is usually a key component of an interferometer. Interferometers are not limited to optical interferometers; they utilize the superposition of waves to obtain wave phase information and have wide applications in precision measurement fields such as astronomy, optics, engineering surveying, oceanography, seismology, spectral analysis, quantum physics experiments, remote sensing, and radar.

[0060] It should be further explained that, in this embodiment, the Michelson interferometer 4 generates regular interference fringes on the photodetector 29 by adjusting the beam, achieving good interference conditions. In this state, the micromirror array 1 can effectively reflect the beam (here referring to the second beam), functioning as a plane mirror and facilitating the construction of the near-field optical microscope system. Simultaneously, the Michelson interferometer 4 can synchronously detect changes in the phase of the second laser signal when the micromirror array 1 is altered, adding a detection dimension to the near-field optical microscope imaging and significantly increasing the signal-to-noise ratio and resolution.

[0061] Specifically, as an example, such as Figure 1 and Figure 2 As shown, the microscope module 3 includes a computer 31 and a scanning probe platform 32. The scanning probe platform 32 is connected to the computer 31, outputs a detection signal based on the computer's control, receives a first laser signal focused by the third off-axis parabolic mirror 25, detects the near-field optical information of the sample, and inputs the detection results into the computer 31.

[0062] More specifically, the scanning probe platform 32 is either a pinhole-type near-field optical microscope scanning probe platform or a scattering-type near-field optical microscope scanning probe platform. It should be noted that the pinhole-type near-field optical microscope scanning probe platform can directly input the detection signal into the computer 31; the scattering-type near-field optical microscope scanning probe platform also includes: a scattering-type near-field optical microscope scanning probe, a fourth off-axis parabolic mirror, and a first laser signal detector. However, the scattering-type near-field optical microscope scanning probe, the fourth off-axis parabolic mirror, and the first laser signal detector are not located in... Figure 1 and Figure 2As shown, a scattering-type near-field optical microscope scanning probe generates a scattered signal, which is then converged by a fourth off-axis parabolic mirror into a first laser signal detector, and finally input into computer 31. It should be further noted that the scanning probe platform 32 includes, but is not limited to, a pinhole near-field optical microscope scanning probe platform or a scattering-type near-field optical microscope scanning probe platform. Any scanning probe platform capable of generating a detection signal that meets the contrast and resolution requirements of the microscope module and detecting the morphological image information of the sample is applicable; these will not be elaborated upon here. Specifically, as an example, such as... Figure 1 and Figure 2 As shown, the micromirror array 1 is an array of mirrors fabricated using micro-electro-mechanical systems (MEMS) technology. Each mirror is digitally controlled by a computer 31 to adjust its reflection angle and the first and second laser signals. In this embodiment, the application of the micromirror array 1 in a near-field optical microscope system fills a current technological gap. The contrast and resolution of the detected signal can reach orders of magnitude one-thousandth or more of the wavelength, resulting in a significant improvement in resolution and demonstrating considerable application value.

[0063] like Figure 3 As shown, this embodiment also provides a near-field optical microscopy imaging method, which includes:

[0064] S1: As Figure 1 , Figure 2 and Figure 3 As shown, the near-field optical microscope system described in this embodiment is provided, and the direction of the micromirror array 1 is adjusted so that the optical path module 2 produces regular interference fringes.

[0065] Specifically, as an example, by synchronously adjusting the orientation of each micromirror in the micromirror array 1, regular interference fringes are generated in the optical path module 2. It should be noted that synchronously adjusting the orientation of each micromirror is equivalent to coarsely adjusting the micromirror array 1. Adjustment is stopped when interference fringes appear in the optical path module 2, and regular interference fringes are generated on the photodetector 29.

[0066] S2: As Figure 1 , Figure 2 and Figure 3 As shown, each micromirror in the micromirror array 1 is traversed, and the rotation angle of the mirror is adjusted to make the power of the detection signal reach its peak. The angle of each micromirror is stored in X[n, m, d]. Specifically, as an example, the relationship between the detection signal and the micromirror array is as follows: Wherein, Γ1 represents the incident matrix of each micromirror, Γ2 represents the output matrix of each micromirror, I represents the first laser signal, and X is an abbreviation of X[n, m, d]. It should be noted that step S2 is to fine-tune each micromirror in the micromirror array 1. When the power of the detection signal reaches its peak, the position and rotation angle of the micromirror are recorded.

[0067] S3: As Figure 1 , Figure 2 and Figure 3 As shown, the second laser signal is turned off to detect the near-field optical information of the sample. Turning off the second laser signal means turning off the Michelson interferometer 4.

[0068] Specifically, as an example, based on the Michelson interferometer 4, the photodetector 29 generates regular interference fringes. These interference fringes indicate the surface deviation of the micromirror array 1 from a flat plane. When the micromirror array 1 rotates at a uniform angle, the interference fringes appear as uniform, parallel, and equally spaced straight fringes. By adjusting the rotation angle of each micromirror in the micromirror array 1, the interference fringes become curved, and the power of the detection signal reaches its peak. The Michelson interferometer 4 is used to observe and adjust the wavefront information generated by the laser signal on the optical path module 2. When the Michelson interferometer 4 is turned off, only the near-field optical information of the sample is detected. This operation aims to eliminate the interference of the second laser 22 (i.e., the reference light source) and the first beam splitter 26, the second beam splitter 27, and the third beam splitter 28 on the scanning probe platform 32, thereby affecting the resolution of the near-field optical microscope system. It should be noted that the near-field optical microscope system and imaging method based on this embodiment can achieve a sample resolution of one-thousandth or more of the wavelength.

[0069] In summary, the near-field optical microscope system and imaging method of the present invention includes at least: a micromirror array, an optical path module, and a microscope module, wherein: the micromirror array and the optical path module are both connected to the microscope module; the micromirror array receives the laser signal generated by the optical path module, and adjusts the wavefront information generated by the laser signal on the optical path module by adjusting the direction of each micromirror in the micromirror array; adjusting the rotation angle of each mirror to reflect the laser signal to the microscope module, so that the microscope module generates a detection signal that meets the contrast and resolution requirements to detect the near-field optical information of the sample; wherein, the wavefront information includes the amplitude and phase of the laser signal; wherein, the expression of the micromirror array is X[n, m, d], where n is equal to the number of transverse micromirrors, and n is a natural number greater than or equal to 2; m is equal to the number of longitudinal micromirrors, and m is a natural number greater than or equal to 2; d is the rotation angle of the micromirrors. The near-field optical microscope system and imaging method of this invention utilize a micromirror array to assist in detecting the near-field optical information of a sample, effectively suppressing background noise, enhancing the intensity of reflected light, and greatly improving the resolution and contrast of the image. The near-field optical microscope system and imaging method of this invention have a simple structure, are easy to operate, and have excellent applicability. Therefore, this invention effectively overcomes the various shortcomings of the prior art and has high industrial application value.

[0070] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A near-field optical microscope system, characterized by, The near-field optical microscope system includes at least: a micromirror array, an optical path module, and a microscope module, wherein: The micromirror array and the optical path module are both connected to the microscope module; The micromirror array receives the laser signal generated by the optical path module. By adjusting the direction of each micromirror in the micromirror array, the wavefront information generated by the laser signal on the optical path module is adjusted. The rotation angle of each mirror is adjusted to reflect the laser signal to the microscope module, so that the microscope module generates a detection signal that meets the contrast and resolution requirements to detect the near-field optical information of the sample. The wavefront information includes the amplitude and phase of the laser signal. The micromirror array is expressed as X[n, m, d], where n is equal to the number of horizontal micromirrors (n is a natural number greater than or equal to 2), m is equal to the number of vertical micromirrors (m is a natural number greater than or equal to 2), and d is the rotation angle of the micromirrors. The optical path module includes: a first laser, a second laser, a first off-axis parabolic mirror, a second off-axis parabolic mirror, a third off-axis parabolic mirror, a first beam splitter, a second beam splitter, a third beam splitter, and a photodetector, wherein: The first laser emits a first laser signal, which is directly incident on the micromirror array after passing through the first off-axis parabolic mirror; reflected by the micromirror array, it reaches the third off-axis parabolic mirror; and focused by the third off-axis parabolic mirror, it reaches the microscope module. The second laser emits a second laser signal, which is directly incident on the first beam splitter after passing through the second off-axis parabolic mirror, splitting into a first beam and a second beam. The first beam is directly incident on the third beam splitter. The second beam is reflected by the micromirror array, reaches the second beam splitter, and is reflected again by the second beam splitter to reach the third beam splitter. The first beam and the second beam that reach the third beam splitter are transmitted to the photodetector, generating regular interference fringes on the photodetector. The detection signal generated by the microscope module is based on the interference fringes to detect the near-field optical information of the sample. The photodetector is connected to and controlled by the microscope module. The second laser, the second off-axis parabolic mirror, the first beam splitter, the micromirror array, the second beam splitter, the third beam splitter, and the photodetector together constitute a Michelson interferometer.

2. The near-field optical microscope system of claim 1, wherein: The light source of the first laser is an infrared laser or a terahertz laser; the light source of the second laser is visible light.

3. The near-field optical microscope system of claim 1, wherein: The mirror surfaces of the first off-axis parabolic mirror, the second off-axis parabolic mirror, and the third off-axis parabolic mirror are gold-plated or silver-plated.

4. The near-field optical microscope system of claim 1, wherein: The microscope module includes a computer and a scanning probe platform. The scanning probe platform is connected to the computer, outputs a detection signal based on the computer's control, receives the first laser signal focused by the third off-axis parabolic mirror, detects the near-field optical information of the sample, and inputs the detection results into the computer.

5. The near-field optical microscope system according to claim 4, characterized in that: The scanning probe platform is either a pinhole near-field optical microscope scanning probe platform or a scattering near-field optical microscope scanning probe platform.

6. A near-field optical microscope imaging method, implemented based on the near-field optical microscope system according to any one of claims 1-5, characterized in that: The near-field optical microscopy imaging method includes at least the following: The near-field optical microscope system is provided, and the orientation of the micromirror array is adjusted so that the optical path module produces regular interference fringes; Iterate through each micromirror in the micromirror array and adjust the rotation angle of the mirror to make the power of the detection signal reach the peak value. Store the angle of each micromirror in X[n, m, d]. The second laser signal is turned off to detect near-field optical information. Turning off the second laser signal means turning off the Michelson interferometer.

7. The near-field optical microscope imaging method according to claim 6, characterized in that: By synchronously adjusting the orientation of each micromirror in the micromirror array, the optical path module generates regular interference fringes.

8. The near-field optical microscope imaging method according to claim 6, characterized in that: The relationship between the detection signal and the micromirror array is: Detection signal = Γ1 represents the incident matrix of each micromirror, Γ2 represents the output matrix of each micromirror, I represents the first laser signal, and X is the abbreviation of X[n, m, d].

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