Electroforming apparatus and method, system, electronic device

Abstract

The application relates to the technical field of electroforming, and provides an electroforming device and method, a system and electronic equipment, wherein the electroforming device comprises an electroforming module, a circulating module, a liquid storage module and a waste gas treatment module; the liquid storage module is used for storing an electroforming solution; the circulating module comprises a first vacuum tank and a second vacuum tank, the second vacuum tank is connected with the liquid storage module; the electroforming module is connected with the first vacuum tank and the second vacuum tank, and is used for electroforming after the electroforming solution is introduced; the waste gas treatment module is connected with the circulating module, and is used for discharging waste gas generated by the electroforming module after the waste gas is treated. The defects that the waste gas generated in the electroforming process is difficult to collect in the prior art are solved, and the purpose of zero-pollution discharge of the waste gas is achieved.

Description

Technical Field

[0001] This invention relates to the field of electroforming technology, and more particularly to an electroforming apparatus, method, system, and electronic equipment. Background Technology

[0002] Electroforming, like electroplating, is a processing method that uses the principle of electrochemical deposition to create a layer of metal on a metal surface. The main difference lies in the fact that electroplating typically creates a metal coating on the surface of a part, while electroforming involves demolding the plating layer to obtain a part in its original shape. Due to the simple structure of ordinary electroforming tanks, collecting the waste gas generated during the electroforming process is challenging. This waste gas can escape into the working environment, causing both health hazards and environmental impacts.

[0003] To address this issue, researchers both domestically and internationally have proposed various solutions. A common approach involves using exhaust systems and suction hoods to draw exhaust gases into or into a waste gas treatment device, thereby purifying the gases. However, since electroforming tanks are typically open in the working environment, ventilation systems or suction devices cannot completely remove all exhaust gases, leaving some escaping gases in the working environment. Summary of the Invention

[0004] This invention provides an electroforming apparatus, method, system, and electronic device to solve the problem of difficulty in collecting waste gas generated during the electroforming process in the prior art, and to achieve the goal of zero pollution emission of waste gas.

[0005] The electroforming apparatus provided by this invention includes an electroforming module, a circulation module, a liquid storage module, and a waste gas treatment module;

[0006] The liquid storage module is used to store the electroforming solution;

[0007] The circulation module includes a first vacuum tank and a second vacuum tank, the second vacuum tank being connected to the liquid storage module;

[0008] The electroforming module is connected to the first vacuum tank and the second vacuum tank and is used to perform electroforming after the electroforming solution is introduced;

[0009] The exhaust gas treatment module is connected to the circulation module. The exhaust gas treatment module is used to treat the exhaust gas generated by the electroforming module before discharging it.

[0010] The electroforming apparatus provided by the present invention further includes a vacuum pump, which is connected to a circulation module via a second vacuum reversing valve. The second vacuum reversing valve is used to control the connection of the vacuum pump to the first vacuum tank or to control the connection of the vacuum pump to the second vacuum tank.

[0011] The electroforming apparatus provided by the present invention further includes a gas storage tank, which is used in conjunction with a vacuum pump to form a pressure difference within the circulation module, and the electroforming solution circulates within the circulation module under the action of the pressure difference.

[0012] According to the electroforming apparatus provided by the present invention, when the vacuum pump is connected to the first vacuum tank, the gas storage tank is connected to the second vacuum tank, and the electroforming solution flows from the second vacuum tank to the first vacuum tank.

[0013] When the vacuum pump is connected to the second vacuum tank, the gas storage tank is connected to the first vacuum tank, and the electroforming solution flows from the first vacuum tank to the second vacuum tank.

[0014] According to the electroforming apparatus provided by the present invention, the first vacuum tank and the second vacuum tank are connected by a first vacuum reversing valve, and the first vacuum reversing valve changes the flow direction of the electroforming solution between the first vacuum tank and the second vacuum tank by energizing and de-energizing.

[0015] According to the electroforming apparatus provided by the present invention, the circulation module further includes a vacuum ball valve. The second vacuum tank is connected to the electroforming module through the vacuum ball valve. The vacuum ball valve is opened before the electroforming solution is circulated and closed after the electroforming solution is circulated.

[0016] According to the electroforming apparatus provided by the present invention, the circulation module further includes a temperature controller, which is disposed inside the second vacuum chamber. The temperature controller is used to start heating when the temperature inside the second vacuum chamber is lower than the first temperature, and to stop heating when the temperature inside the second vacuum chamber is higher than the second temperature.

[0017] The present invention also provides an electroforming method, applied to any of the above-mentioned electroforming apparatus, comprising:

[0018] After loading the workpiece into the electroforming module, turn off the electroforming module;

[0019] The electroforming solution in the storage module is injected into the electroforming module through the circulation module;

[0020] The electroforming solution is controlled to circulate between the first and second vacuum tanks in the circulation module, and the electroforming solution in the circulation module is heated.

[0021] The workpiece to be processed is electroformed within the electroforming module;

[0022] After electroforming is completed, the electroforming solution is drained back into the storage module and the workpiece to be processed is taken out.

[0023] The present invention also provides an electroforming system, comprising:

[0024] The pre-processing unit is used to load the workpiece to be processed into the electroforming module and then shut down the electroforming module;

[0025] The liquid injection unit is used to inject the electroforming solution in the liquid storage module into the electroforming module through the circulation module;

[0026] The circulation unit is used to control the circulation of the electroforming solution between the first vacuum tank and the second vacuum tank in the circulation module, and to heat the electroforming solution in the circulation module.

[0027] An electroforming unit is used to electroform the workpiece to be processed within an electroforming module;

[0028] The post-processing unit is used to drain the electroforming solution back into the storage module after electroforming is completed and then remove the workpiece to be processed.

[0029] The present invention also provides an electronic device, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the program to implement any of the electroforming methods described above.

[0030] The present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements any of the electroforming methods described above.

[0031] The present invention also provides a computer program product, including a computer program that, when executed by a processor, implements any of the electroforming methods described above.

[0032] The electroforming apparatus provided by this invention includes a circulation module, which allows the solution from the storage module to be introduced into the electroforming module for electroforming. The electroforming process is completed in the electroforming module. The apparatus also includes a waste gas treatment module, which uses a corresponding waste gas treatment process to achieve zero-pollution emissions of waste gas. Attached Figure Description

[0033] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0034] Figure 1 This is a schematic diagram of the electroforming apparatus provided by the present invention;

[0035] Figure 2 This is a schematic flowchart of the electroforming method provided by the present invention;

[0036] Figure 3 This is a schematic diagram of the electroforming system provided by the present invention;

[0037] Figure 4 This is a schematic diagram of the structure of the electronic device provided by the present invention.

[0038] 1-Electroforming zone; 2-Electroforming power supply; 3-First vacuum reversing valve;

[0039] 4-First vacuum tank; 5-Liquid level sensor; 6-First vacuum gauge;

[0040] 7-First pressure relief valve; 8-Waste gas treatment tower; 9-Vacuum pump;

[0041] 10-Gas dryer; 11-Second vacuum reversing valve; 12-Gas storage tank;

[0042] 13-Second vacuum chamber; 14-Second pressure relief valve; 15-Second vacuum gauge;

[0043] 16-First ball valve; 17-Relief valve; 18-Magnetic pump;

[0044] 19-First filter; 20-Liquid storage tank; 21-Temperature controller;

[0045] 22-Second ball valve; 23-Second filter; 24-Vacuum ball valve;

[0046] 25 - Electroformed anode; 26 - Electroformed cathode. Detailed Implementation

[0047] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0048] Figure 1 This is a schematic diagram of the electroforming apparatus provided by the present invention;

[0049] like Figure 1 As shown, this embodiment provides an electroforming apparatus, including: an electroforming module, a circulation module, a liquid storage module, and a waste gas treatment module;

[0050] The liquid storage module is used to store the electroforming solution;

[0051] The circulation module includes a first vacuum tank 4 and a second vacuum tank 13, with the second vacuum tank 13 connected to the liquid storage module.

[0052] The electroforming module is connected to the first vacuum tank 4 and the second vacuum tank 13, and is used to perform electroforming after the electroforming solution is introduced;

[0053] The exhaust gas treatment module is connected to the circulation module. The exhaust gas treatment module is used to treat the exhaust gas generated by the electroforming module before discharging it.

[0054] In practice, the liquid storage module includes a liquid storage tank 20, a magnetic pump 18, a first filter 19, a first ball valve 16, an overflow valve 17, and a second ball valve 22. The outlet of the liquid storage tank 20 is connected to the inlet of the magnetic pump 18 through the first filter 19. The outlet of the magnetic pump 18 is divided into two paths. The first path is connected to the auxiliary solution inlet of the second vacuum tank 13 of the circulation module through the first ball valve 16. The second path is connected to the liquid storage tank 20 through the overflow valve 17.

[0055] The electroforming module includes an electroforming zone 1, an electroforming power supply 2, an electroforming anode 25, and an electroforming cathode 26; solution inlets and outlets are provided on both sides of the electroforming zone.

[0056] The circulation module includes a first vacuum reversing valve 3, a first vacuum tank 4, a liquid level sensor 5, a first vacuum gauge 6, a first pressure relief valve 7, a second vacuum tank 13, a second pressure relief valve 14, a second vacuum gauge 15, a temperature controller 21, a second filter 23, and a vacuum ball valve 24. Both the first vacuum tank 4 and the second vacuum tank 13 have gas inlets at the top of the tank and solution inlets at the bottom. The second vacuum tank 13 also has an auxiliary solution inlet / outlet. One side of the first vacuum reversing valve 3 is connected to the lower solution inlet / outlet of the first vacuum tank 4 and the second vacuum tank 13, and the other side is connected to both sides of the electroforming module.

[0057] The waste gas treatment module includes a waste gas treatment tower 8, a gas dryer 10, and a second vacuum reversing valve 11.

[0058] In this embodiment, by setting up two vacuum tanks, the first vacuum tank 4 and the second vacuum tank 13, the solution can be circulated. If only one vacuum tank is set up, it is not possible to perform electroforming for a long time due to the limited volume. The two vacuum tanks need to be alternated to realize the reverse circulation of the solution.

[0059] In practice, the electroforming device provided in this embodiment also includes a vacuum pump. The vacuum pump is connected to the circulation module through a second vacuum reversing valve. The second vacuum reversing valve is used to control the connection between the vacuum pump and the first vacuum tank, or to control the connection between the vacuum pump and the second vacuum tank. Specifically, the suction port of the vacuum pump 9 is connected to the upper outlet of the second vacuum reversing valve 11 through the gas dryer 10, and the exhaust port is connected to the atmosphere through the waste gas treatment tower 8. The gas storage tank 12 is connected to the upper inlet of the second vacuum reversing valve 11.

[0060] In practice, the electroforming device provided in this embodiment also includes a gas storage tank. The gas storage tank is used to work with the vacuum pump to form a pressure difference in the circulation module. The electroforming solution circulates in the circulation module under the action of the pressure difference. Specifically, when the vacuum pump is connected to the first vacuum tank, the gas storage tank is connected to the second vacuum tank, and the electroforming solution flows from the second vacuum tank to the first vacuum tank.

[0061] When the vacuum pump is connected to the second vacuum tank, the gas storage tank is connected to the first vacuum tank, and the electroforming solution flows from the first vacuum tank to the second vacuum tank.

[0062] The second vacuum reversing valve 11 in the exhaust gas treatment module receives an electrical signal from the liquid level sensor 5 in the circulation module and changes the valve core position. When the solution in the first vacuum tank 4 reaches the set low liquid level, the valve core position is changed. The first vacuum tank 4 is connected to the vacuum pump 9, and the second vacuum tank 13 is connected to the gas storage tank 12. Under the action of the vacuum pump, the pressure in the first vacuum tank 4 becomes negative pressure. Under the action of gas pressure, the solution is forced from the second vacuum tank 13 into the first vacuum tank 4. When the solution in the first vacuum tank 4 reaches the set high liquid level, the valve core position is changed. The core position connects the second vacuum tank 13 to the vacuum pump 9, and the first vacuum tank 4 to the gas storage tank 12. At this time, the pressure inside the second vacuum tank 13 is negative, and the solution is forced from the first vacuum tank 4 into the second vacuum tank 13 to achieve solution circulation. The highest liquid level of both the first vacuum tank 4 and the second vacuum tank 13 is a certain distance away from the gas inlet and outlet above the tank body to prevent the solution from being drawn into the vacuum pump 9. The waste gas treatment tower 8 can use the waste gas treatment process corresponding to the electroforming solution to harmlessly treat the waste gas extracted by the vacuum pump before discharging it, achieving zero waste gas emission.

[0063] In the exemplary embodiment, the temperature controller 21 in the circulation module is also connected to a corresponding control device. When the temperature is higher than the upper limit of the set temperature, heating is stopped, and when the temperature is lower than the lower limit of the set temperature, heating is started. The heating device should always be in the solution, and the temperature control sensor should be far away from the heating device and the vacuum tank wall. The control device is located outside the vacuum tank.

[0064] In the exemplary embodiment, the gas storage tank 12 may contain a gas at a certain pressure, or it may be removed, i.e., connected to the atmosphere and driven only by atmospheric pressure difference; the gas may be ordinary compressed air or an inert gas as a protective gas for easily oxidized solutions.

[0065] In an exemplary embodiment, the liquid storage module can serve as a temporary solution buffer for solution replacement and routine cleaning of the vacuum system.

[0066] In an exemplary embodiment, the first vacuum reversing valve 3 in the solution heating and circulating filtration module can change the flow direction of the solution in the electroforming zone in real time by controlling the on and off of power.

[0067] In an exemplary embodiment, the vacuum ball valve 24 in the solution heating circulation filtration module can be closed before electroforming begins, thereby vacuum degassing the electroforming zone to improve the wetting effect of the solution.

[0068] The electroforming method provided by the present invention is described below. The electroforming method described below can be referred to in correspondence with the electroforming system described above.

[0069] Figure 2This is a schematic flowchart of the electroforming method provided by the present invention.

[0070] like Figure 2 As shown, the electroforming method provided in this embodiment includes:

[0071] Step 201: After loading the workpiece to be processed into the electroforming module, turn off the electroforming module;

[0072] Step 202: The electroforming solution in the storage module is injected into the electroforming module through the circulation module;

[0073] Step 203: Control the electroforming solution to circulate between the first vacuum tank and the second vacuum tank in the circulation module, and heat the electroforming solution in the circulation module;

[0074] Step 204: Electroform the workpiece to be processed within the electroforming module;

[0075] Step 205: After electroforming is completed, the electroforming solution is drained back into the storage module and the workpiece to be processed is taken out.

[0076] Specifically, in step 202, the first ball valve 16, overflow valve 17, and vacuum ball valve 24 can be opened, the second ball valve 22 can be closed, and the magnetic pump 18 can be turned on. At this time, the electroforming solution in the storage tank 20 will be injected into the second vacuum tank 13 sequentially through the first filter 19, the magnetic pump 18, and the first ball valve 16. Then, the electroforming solution in the second vacuum tank 13 continues to flow into the electroforming zone 1 after passing through the first vacuum reversing valve 3, the second filter 23, and the vacuum ball valve 24. By adjusting the first ball valve 16, the solution is adjusted until the electroforming zone 1 is full and the solution in the second vacuum tank 13 is sufficient to cover the temperature controller 21, and then the vacuum ball valve 24 is closed. After the solution in the second vacuum tank 13 reaches the appropriate volume, the magnetic pump 18 and the first ball valve 16 are turned off.

[0077] In step 203, vacuum pump 9 can be turned on, vacuum ball valve 24 can be opened, and gas storage tank 12 can be connected. At this time, a negative pressure is formed in the first vacuum tank 4. Under the action of the pressure difference, the electroforming solution in the second vacuum tank 13 enters the first vacuum tank 4 after passing through the second filter 23, vacuum ball valve 24, and electroforming zone 1. When the electroforming solution in the first vacuum tank 4 reaches the high position set by the liquid level sensor 5, the first vacuum reversing valve 3 and the second vacuum reversing valve 11 simultaneously change the valve core position. At this time, vacuum pump 9 is directly connected to the second vacuum tank 13, and gas storage tank 12 is connected to the first vacuum tank 4. A negative pressure is formed in the second vacuum tank 13, and the electroforming solution flows back from the first vacuum tank 4 through electroforming zone 1, vacuum ball valve 24, and second filter 23 to the second vacuum tank 13. When the electroforming solution in the first vacuum tank 4 reaches the low position set by the level sensor 5, the valve core position is changed again to create a negative pressure in the first vacuum tank 4. The solution flows from the second vacuum tank 13 to the first vacuum tank and continues to circulate. During the circulation, the temperature controller 21 is turned on to wait for the electroforming solution to be heated to the temperature required by the process.

[0078] After confirming that the temperature has reached the required process temperature, step 204 can be performed. Specifically, the waste gas treatment tower 8 and the electroforming power supply 2 can be turned on for electroforming. The vacuum ball valve 24 is closed, and the electroforming zone 1 is connected to the vacuum pump 9 via the first vacuum tank 4 to draw negative pressure and degas the electroforming zone 1. When the pressure value in the electroforming zone reaches the set pressure value, the vacuum ball valve 24 is opened to introduce the electroforming solution in the second vacuum tank 13 into the electroforming zone 1. The waste gas generated in the electroforming zone 1 during the electroforming process is discharged to the waste gas treatment tower 8 through the vacuum pump 9 and discharged after treatment.

[0079] Finally, after the expected casting thickness is achieved, the electroforming power supply 2, temperature controller 21, vacuum pump 9, and exhaust gas treatment tower 8 are turned off in sequence. Then, the first pressure relief valve 7 and the second pressure relief valve 14 are opened. After the pressure returns to normal, the first pressure relief valve 7 and the second pressure relief valve 14 are closed. Then, the valve core position of the second vacuum reversing valve 11 can be manually changed so that the gas storage tank 12 is connected to the first vacuum tank 4. The second ball valve 22 and the vacuum ball valve 24 are opened. The high-pressure gas in the gas storage tank 12 is used to discharge the first vacuum tank 4, the electroforming area 1, the second vacuum tank 13, and the electroforming solution in the pipeline back to the liquid storage tank 20 through the second ball valve 22. Finally, the second ball valve 22 can be closed, the gas storage tank 12 can be removed, and the first pressure relief valve 7 and the second pressure relief valve 14 can be opened. The electroforming area 1 can be opened, the workpiece can be taken out, and the electroforming process is completed.

[0080] Figure 3 This is a schematic diagram of the electroforming system provided by the present invention.

[0081] like Figure 3 As shown, the present invention also provides an electroforming system, comprising:

[0082] The pre-processing unit 301 is used to load the workpiece to be processed into the electroforming module and then turn off the electroforming module.

[0083] The liquid injection unit 302 is used to inject the electroforming solution in the liquid storage module into the electroforming module through the circulation module;

[0084] The circulation unit 303 is used to control the circulation of the electroforming solution between the first vacuum tank and the second vacuum tank in the circulation module, and to heat the electroforming solution in the circulation module.

[0085] Electroforming unit 304 is used to electroform the workpiece to be processed within the electroforming module;

[0086] The post-processing unit 305 is used to drain the electroforming solution back into the storage module after electroforming is completed and then take out the workpiece to be processed.

[0087] The specific implementation method of the electroforming system provided in this embodiment can be implemented with reference to the above embodiments, and will not be repeated here.

[0088] Figure 4 An example is a schematic diagram of the physical structure of an electronic device, such as... Figure 4 As shown, the electronic device may include: a processor 410, a communication interface 420, a memory 430, and a communication bus 440, wherein the processor 410, the communication interface 420, and the memory 430 communicate with each other through the communication bus 440. The processor 410 can call logical instructions in the memory 430 to execute an electroforming method, which includes:

[0089] After loading the workpiece into the electroforming module, turn off the electroforming module;

[0090] The electroforming solution in the storage module is injected into the electroforming module through the circulation module;

[0091] The electroforming solution is controlled to circulate between the first and second vacuum tanks in the circulation module, and the electroforming solution in the circulation module is heated.

[0092] The workpiece to be processed is electroformed within the electroforming module;

[0093] After electroforming is completed, the electroforming solution is drained back into the storage module and the workpiece to be processed is taken out.

[0094] Furthermore, the logical instructions in the aforementioned memory 430 can be implemented as software functional units and, when sold or used as independent products, can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, essentially, or the part that contributes to the prior art, or a part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods of the various embodiments of the present invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0095] On the other hand, the present invention also provides a computer program product, which includes a computer program that can be stored on a non-transitory computer-readable storage medium. When the computer program is executed by a processor, the computer is able to perform the electroforming method provided by the above methods, the method comprising:

[0096] After loading the workpiece into the electroforming module, turn off the electroforming module;

[0097] The electroforming solution in the storage module is injected into the electroforming module through the circulation module;

[0098] The electroforming solution is controlled to circulate between the first and second vacuum tanks in the circulation module, and the electroforming solution in the circulation module is heated.

[0099] The workpiece to be processed is electroformed within the electroforming module;

[0100] After electroforming is completed, the electroforming solution is drained back into the storage module and the workpiece to be processed is taken out.

[0101] In another aspect, the present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, is implemented to perform the electroforming method provided by the methods described above, the method comprising:

[0102] After loading the workpiece into the electroforming module, turn off the electroforming module;

[0103] The electroforming solution in the storage module is injected into the electroforming module through the circulation module;

[0104] The electroforming solution is controlled to circulate between the first and second vacuum tanks in the circulation module, and the electroforming solution in the circulation module is heated.

[0105] The workpiece to be processed is electroformed within the electroforming module;

[0106] After electroforming is completed, the electroforming solution is drained back into the storage module and the workpiece to be processed is taken out.

[0107] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without any creative effort.

[0108] Through the above description of the embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by means of software plus necessary general-purpose hardware platforms, and of course, it can also be implemented by hardware. Based on this understanding, the above technical solutions, in essence or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., including several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute the methods of various embodiments or some parts of embodiments.

[0109] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An electroforming apparatus, characterized in that, This includes an electroforming module, a circulation module, a liquid storage module, a waste gas treatment module, a vacuum pump, and a gas storage tank; The liquid storage module is used to store the electroforming solution; The circulation module includes a first vacuum tank and a second vacuum tank. The second vacuum tank is connected to the liquid storage module. Gas interfaces are provided on the top of both the first vacuum tank and the second vacuum tank. The electroforming module is connected to the first vacuum tank and the second vacuum tank, and is used to perform electroforming after the electroforming solution is introduced; The waste gas treatment module is connected to the circulation module through the gas interface, and the waste gas treatment module is used to treat the waste gas generated by the electroforming module and then discharge it. The vacuum pump is connected to the circulation module through a second vacuum reversing valve. The second vacuum reversing valve is used to control the connection of the vacuum pump to the first vacuum tank or to control the connection of the vacuum pump to the second vacuum tank. The gas storage tank is used in conjunction with the vacuum pump to create a pressure difference within the circulation module, and the electroforming solution circulates within the circulation module under the action of the pressure difference.

2. The electroforming apparatus according to claim 1, characterized in that, When the vacuum pump is connected to the first vacuum tank, the gas storage tank is connected to the second vacuum tank, and the electroforming solution flows from the second vacuum tank to the first vacuum tank; When the vacuum pump is connected to the second vacuum tank, the gas storage tank is connected to the first vacuum tank, and the electroforming solution flows from the first vacuum tank to the second vacuum tank.

3. The electroforming apparatus according to claim 1, characterized in that, The first vacuum tank and the second vacuum tank are connected by a first vacuum reversing valve, which changes the flow direction of the electroforming solution between the first vacuum tank and the second vacuum tank by energizing and de-energizing.

4. The electroforming apparatus according to claim 1, characterized in that, The circulation module also includes a vacuum ball valve. The second vacuum tank is connected to the electroforming module through the vacuum ball valve. The vacuum ball valve is opened before the electroforming solution is circulated and closed after the electroforming solution is circulated.

5. The electroforming apparatus according to claim 1, characterized in that, The circulation module also includes a temperature controller, which is located inside the second vacuum chamber. The temperature controller is used to start heating when the temperature inside the second vacuum chamber is lower than a first temperature, and to stop heating when the temperature inside the second vacuum chamber is higher than a second temperature.

6. An electroforming method, characterized in that, The electroforming apparatus according to any one of claims 1 to 5 comprises: After loading the workpiece into the electroforming module, the electroforming module is turned off. The electroforming solution in the storage module is injected into the electroforming module through the circulation module; The electroforming solution is controlled to circulate between the first vacuum tank and the second vacuum tank in the circulation module, and the electroforming solution in the circulation module is heated; The workpiece to be processed is electroformed within the electroforming module; After electroforming is completed, the electroforming solution is drained back into the storage module and the workpiece to be processed is taken out.

7. An electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the program, it implements the electroforming method as described in claim 6.

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