Fast multi-degree of freedom correction mechanism

Abstract

The present application relates to a kind of fast multi-degree-of-freedom deviation rectification mechanism, including mechanism base plate, deviation rectification unit, Y direction camera unit, X direction camera unit and grabbing unit, deviation rectification unit is set on mechanism base plate, deviation rectification unit is provided with Y direction camera unit on the mechanism base plate along the negative direction side of Y axis, deviation rectification unit is provided with X direction camera unit on the mechanism base plate along the negative direction side of X axis, the top of deviation rectification unit is provided with grabbing unit.The present application is cooperated with the use of grabbing gripper cylinder, deviation rectification positioning gripper cylinder and deviation rectification positioning table, so that material positioning on deviation rectification positioning table can be well coordinated to rectify in multiple angles, and loading and unloading before and after rectification is relatively convenient.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing, in particular to a rapid multi-degree-of-freedom correction mechanism. BACKGROUND

[0002] In the semiconductor industry, when small components are transported, processed, and the like, there is a need for accurate positioning and correction of the components in multiple degrees of freedom.

[0003] After a large amount of retrieval, it was found that the prior art with publication number CN218039141U discloses a semiconductor component multi-degree-of-freedom positioning mechanism, which comprises a fixed base plate, a correction mechanism, an X-direction correction camera module, a Z-direction correction camera module and a Y-direction correction camera module. The correction mechanism, the X-direction correction camera module, the Z-direction correction camera module and the Y-direction correction camera module are all installed on the fixed base plate. The X-direction correction camera module is located on one side of the correction mechanism along the negative direction of the Y axis. The Z-direction correction camera module is located directly above the correction mechanism. The Y-direction correction camera module is located on one side of the correction mechanism along the negative direction of the X axis. The present application can accurately correct and position the micro component in six degrees of freedom in a small space under the control of visual positioning in three directions through the cooperation of the correction mechanism, the X-direction correction camera module, the Z-direction correction camera module and the Y-direction correction camera module.

[0004] In summary, the existing problems in the prior art are:

[0005] The positioning mechanism in the prior art is placed and positioned on the correction adsorption base by an external transport mechanism during use. Therefore, the material cannot be well matched for correction in multiple angles after being positioned on the correction adsorption base, and the feeding and discharging before and after correction is relatively inconvenient.

[0006] In view of the above-mentioned defects, the present design person actively researches and innovates to create a rapid multi-degree-of-freedom correction mechanism, so as to make it more useful in industry. SUMMARY

[0007] To solve the above technical problems, the purpose of the present application is to provide a rapid multi-degree-of-freedom correction mechanism.

[0008] To achieve the above-mentioned purpose, the present application adopts the following technical solutions:

[0009] The rapid multi-degree-of-freedom correction mechanism comprises a mechanism base plate, a correction unit, a Y-direction camera unit, an X-direction camera unit and a grabbing unit. The correction unit is arranged on the mechanism base plate. The Y-direction camera unit is arranged on the mechanism base plate on one side of the correction unit along the negative direction of the Y axis. The X-direction camera unit is arranged on the mechanism base plate on one side of the correction unit along the negative direction of the X axis. The grabbing unit is arranged above the correction unit.

[0010] The deviation rectifying unit comprises a deviation rectifying base plate, a deviation rectifying positioning table and a deviation rectifying positioning clamping jaw cylinder, a deviation rectifying movement module on the deviation rectifying base plate is connected with the deviation rectifying positioning table above, a deviation rectifying positioning clamping jaw cylinder is installed on one side of the deviation rectifying positioning table along the positive direction of the Y axis, a deviation rectifying positioning fixed clamping jaw is installed in the deviation rectifying positioning table, a deviation rectifying positioning movable clamping jaw on the deviation rectifying positioning clamping jaw cylinder cooperates with the deviation rectifying positioning fixed clamping jaw, and the deviation rectifying positioning fixed clamping jaw and the deviation rectifying positioning movable clamping jaw are sequentially arranged along the positive direction of the X axis.

[0011] The grabbing unit comprises a grabbing Z-direction module and a grabbing clamping jaw cylinder, the grabbing Z-direction module is installed on the top beam, the grabbing Z-direction module can drive the grabbing clamping jaw cylinder below to move along the Z-axis direction, and a grabbing positioning clamping jaw and a grabbing flat clamping jaw are sequentially installed on the bottom of the grabbing clamping jaw cylinder along the positive direction of the X axis.

[0012] As a further improvement of the present application, the deviation rectifying movement module comprises, from bottom to top, a deviation rectifying Z-axis module, a deviation rectifying rotating table, a deviation rectifying Y-direction module, a deviation rectifying X-direction module, a deviation rectifying first arc swing table and a deviation rectifying second arc swing table.

[0013] As a further improvement of the present application, the deviation rectifying rotating table can rotate in the XY plane, the deviation rectifying first arc swing table can swing in the YZ plane, and the deviation rectifying second arc swing table can swing in the XZ plane.

[0014] As a further improvement of the present application, a deviation rectifying backlight source is further installed on one side of the deviation rectifying positioning table along the positive direction of the X axis.

[0015] As a further improvement of the present application, the Y-direction camera unit comprises a Y-direction camera support, a Y-direction camera X-direction module, a Y-direction camera Y-direction module, a Y-direction camera Z-direction module and a Y-direction camera, the Y-direction camera support is installed on the mechanism base plate, and the Y-direction camera X-direction module, the Y-direction camera Y-direction module, the Y-direction camera Z-direction module and the Y-direction camera are sequentially installed on the Y-direction camera support from bottom to top.

[0016] As a further improvement of the present application, the X-direction camera support, the X-direction camera Y-direction module, the X-direction camera X-direction module, the X-direction camera Z-direction module and the X-direction camera, the X-direction camera support is installed on the mechanism base plate, and the X-direction camera X-direction module, the X-direction camera Z-direction module and the X-direction camera are sequentially installed on the X-direction camera support from bottom to top.

[0017] As a further improvement of the present application, a Z-direction camera is further installed on the driving end of the grabbing Z-direction module along the negative direction of the X axis.

[0018] By the above scheme, the present application has at least the following advantages:

[0019] The application can well cooperate with the deviation correction in multiple angles after the material is positioned on the deviation correction positioning table, and the feeding and discharging before and after the deviation correction is relatively convenient.

[0020] Compared with the same type of multi-freedom deviation correction mechanism, the mechanism only needs to automatically position and correct in one direction during normal operation, avoids the behavior that all positioning and correction axes participate in positioning and correction, avoids the system error caused by the hardware positioning accuracy of each correction axis, and the increase of the number and time of setting actions caused thereby, thereby greatly optimizing the beat.

[0021] The above description is only a summary of the technical scheme of the application, in order to more clearly understand the technical means of the application, and can be implemented according to the content of the specification, as follows. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical scheme of the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments, it should be understood that the following drawings only show some embodiments of the application, therefore should not be regarded as a limitation on the scope, for those skilled in the art, without creative labor, can also obtain other related drawings according to these drawings.

[0023] Figure 1 is a structural schematic diagram of a fast multi-freedom deviation correction mechanism of the application;

[0024] Figure 2 is Figure 1 a structural schematic diagram of a deviation correction unit in the application;

[0025] Figure 3 is Figure 1 a structural schematic diagram of a Y-direction camera unit in the application;

[0026] Figure 4 is Figure 1 a structural schematic diagram of an X-direction camera unit in the application;

[0027] Figure 5 is Figure 1 a structural schematic diagram of a material grabbing unit in the application;

[0028] Figure 6 is Figure 1 a structural schematic diagram of a material grabbing unit and a deviation correction positioning clamping cylinder at the deviation correction positioning clamping cylinder;

[0029] Figure 7 is Figure 6 a local enlarged structural schematic diagram of A.

[0030] In the drawings, the meaning of each reference sign is as follows.

[0031] Mechanism base plate 1, deviation correction unit 2, Y-direction camera unit 3, X-direction camera unit 4, grabbing unit 5, deviation correction base plate 6, deviation correction Z-axis module 7, deviation correction rotary table 8, deviation correction Y-direction module 9, deviation correction X-direction module 10, deviation correction first arc swing table 11, deviation correction second arc swing table 12, deviation correction positioning table 13, deviation correction backlight 14, deviation correction positioning clamping cylinder 15, deviation correction positioning movable clamping jaw 16, deviation correction positioning fixed clamping jaw 17, Y-direction camera support 18, Y-direction camera X-direction module 19, Y-direction camera Y-direction module 20, Y-direction camera Z-direction module 21, Y-direction camera 22, X-direction camera support 23, X-direction camera Y-direction module 24, X-direction camera X-direction module 25, X-direction camera Z-direction module 26, X-direction camera 27, grabbing Z-direction module 28, Z-direction camera 29, grabbing clamping cylinder 30, grabbing positioning clamping jaw 31, grabbing flat clamping jaw 32, element 33. DETAILED DESCRIPTION

[0032] The specific embodiments of the present application will be further described in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present application, but are not used to limit the scope of the present application.

[0033] In order for those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be described clearly and completely in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the accompanying drawings can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0034] Embodiments

[0035] As Figures 1-7 shown,

[0036] A fast multi-degree-of-freedom deviation correction mechanism, comprising a mechanism base plate 1, a deviation correction unit 2, a Y-direction camera unit 3, an X-direction camera unit 4, and a grabbing unit 5, the deviation correction unit 2 is arranged on the mechanism base plate 1, the Y-direction camera unit 3 is arranged on the mechanism base plate 1 on the negative side of the Y-axis of the deviation correction unit 2, the X-direction camera unit 4 is arranged on the mechanism base plate 1 on the negative side of the X-axis of the deviation correction unit 2, and the grabbing unit 5 is arranged above the deviation correction unit 2.

[0037] The deviation rectifying unit 2 comprises a deviation rectifying base plate 6, a deviation rectifying positioning table 13 and a deviation rectifying positioning clamping jaw cylinder 15, and the deviation rectifying motion module on the deviation rectifying base plate 6 is connected with the deviation rectifying positioning table 13 above. The deviation rectifying motion module comprises, from bottom to top, a deviation rectifying Z-axis module 7, a deviation rectifying rotary table 8, a deviation rectifying Y-direction module 9, a deviation rectifying X-direction module 10, a deviation rectifying first arc swing table 11 and a deviation rectifying second arc swing table 12. The deviation rectifying rotary table 8 can rotate in the XY plane, the deviation rectifying first arc swing table 11 can swing in the YZ plane, and the deviation rectifying second arc swing table 12 can swing in the XZ plane. The deviation rectifying positioning clamping jaw cylinder 15 is installed on one side of the deviation rectifying positioning table 13 along the positive direction of the Y axis, the deviation rectifying positioning fixed clamping jaw 17 is installed in the deviation rectifying positioning table 13, the deviation rectifying positioning movable clamping jaw 16 on the deviation rectifying positioning clamping jaw cylinder 15 cooperates with the deviation rectifying positioning fixed clamping jaw 17, and the deviation rectifying positioning fixed clamping jaw 17 and the deviation rectifying positioning movable clamping jaw 16 are arranged along the positive direction of the X axis in sequence. The deviation rectifying back light source 14 is also installed on one side of the deviation rectifying positioning table 13 along the positive direction of the X axis.

[0038] The grabbing unit 5 comprises a grabbing Z-direction module 28 and a grabbing clamping jaw cylinder 30, the grabbing Z-direction module 28 is installed on the top beam, the grabbing Z-direction module 28 can drive the grabbing clamping jaw cylinder 30 below to move along the Z-axis direction, and the bottom of the grabbing clamping jaw cylinder 30 is sequentially provided with a grabbing positioning clamping jaw 31 and a grabbing flat clamping jaw 32 along the positive direction of the X axis. The driving end of the grabbing Z-direction module 28 on one side of the grabbing clamping jaw cylinder 30 along the negative direction of the X axis is also provided with a Z-direction camera 29.

[0039] The Y-direction camera unit 3 comprises a Y-direction camera support 18, a Y-direction camera X-direction module 19, a Y-direction camera Y-direction module 20, a Y-direction camera Z-direction module 21 and a Y-direction camera 22, the Y-direction camera support 18 is installed on the mechanism base plate 1, and the Y-direction camera support 18 is sequentially provided, from bottom to top, with the Y-direction camera X-direction module 19, the Y-direction camera Y-direction module 20, the Y-direction camera Z-direction module 21 and the Y-direction camera 22.

[0040] The X-direction camera support 23, an X-direction camera Y-direction module 24, an X-direction camera X-direction module 25, an X-direction camera Z-direction module 26 and an X-direction camera 27, the X-direction camera support 23 is installed on the mechanism base plate 1, and the X-direction camera support 23 is sequentially provided, from bottom to top, with the X-direction camera X-direction module 25, the X-direction camera Z-direction module 26 and the X-direction camera 27.

[0041] The above X-direction, Y-direction and Z-direction can be linear driving structures such as linear sliding tables commonly used in the art.

[0042] The relationship between the components of the rapid multi-degree-of-freedom correction mechanism is as follows: the Y-direction camera 22 is used to position the to-be-positioned element 33 in the Y direction; the X-direction camera 27 is used to position the to-be-positioned element 33 in the X direction; and the Z-direction camera 29 is used to position the to-be-positioned element 33 in the Z direction; thus, the Y-direction camera 22, the X-direction camera 27, and the Z-direction camera 29 constitute the XYZ three-axis vision positioning system of the entire mechanism.

[0043] The correction Z-axis module 7 of the present application is fixed to the correction base plate 6 by screws, and is connected to the correction Z-axis module 7, the correction rotary table 8, the correction Y-direction module 9, the correction X-direction module 10, the correction first arc swing table 11, and the correction second arc swing table 12 in sequence, thereby constituting three linear correction axes and three angle correction axes of XYZ to realize the hardware environment for manual / automatic correction of the to-be-positioned element 33 in six degrees of freedom.

[0044] The correction positioning fixed jaw 17 is fixed to the correction positioning table 13 by screws, and the correction positioning movable jaw 16 used in pairs is fixed to the correction positioning jaw cylinder 15 by screws, and the correction positioning jaw cylinder 15 is also fixed to the correction positioning table 13 by screws. The grabbing positioning jaw 31 and the grabbing flat jaw 32 are fixed to the grabbing jaw cylinder 30 by screws, and are used to carry and position the to-be-positioned element 33.

[0045] The rapid multi-degree-of-freedom correction mechanism needs to be calibrated in position when the system is assembled / maintained. The to-be-positioned element 33 is clamped by the correction positioning movable jaw 16 and the correction positioning fixed jaw 17, the offset angle of the to-be-positioned element 33 in the camera field of view is observed by the Y-direction camera 22, the X-direction camera 27, and the Z-direction camera 29, the positions of the correction Z-axis module 7, the correction rotary table 8, the correction X-direction module 10, the correction first arc swing table 11, and the correction second arc swing table 12 are adjusted in the software setting interface, the to-be-positioned element 33 is positioned in the position during automatic operation, the position parameters of the five correction axes at this time are saved, and thus the position calibration of the rapid multi-degree-of-freedom correction mechanism is completed.

[0046] When the rapid multi-degree-of-freedom correction mechanism is working normally, the correction positioning movable jaw 16 is controlled by the correction positioning jaw cylinder 15 to open slightly with a gap slightly larger than the to-be-positioned element 33, and to ensure that it does not deviate from the bottom plane of the correction positioning fixed jaw 17 in the top view direction, so that the to-be-positioned element 33 can be stably placed in the gap and will not slide in the Z direction. Then, the grabbing positioning jaw 31 and the grabbing flat jaw 32 are controlled by the grabbing jaw cylinder 30 to clamp the to-be-positioned element 33, and to place it in the gap between the correction positioning movable jaw 16 and the correction positioning fixed jaw 17, so as to ensure that the bottom surface of the to-be-positioned element 33 is slightly higher than the bottom plane of the correction positioning fixed jaw 17.

[0047] Then, the deviation positioning clamping jaw cylinder 15 controls the deviation positioning movable clamping jaw 16 to clamp the to-be-positioned element 33 with a small torque, and then the grabbing Z-direction module 28 moves downward to a set working height, so that the positioning surface of the grabbing positioning clamping jaw 31 presses the to-be-positioned element 33 downward and breaks the friction of the deviation positioning movable clamping jaw 16 and the deviation positioning fixed clamping jaw 17 to the to-be-positioned element 33 in a small torque state, ensures that the bottom surface of the to-be-positioned element 33 is in close and complete contact with the bottom plane of the deviation positioning fixed clamping jaw 17, and through the accuracy of the five degrees of freedom directions of the mechanism calibration, the accurate positioning of the to-be-positioned element 33 in five degrees of freedom except the Y direction is ensured, and then the deviation positioning clamping jaw cylinder 15 controls the deviation positioning movable clamping jaw 16 to clamp the to-be-positioned element 33 with a large torque.

[0048] Then, the X-direction camera 27 performs deviation positioning on the to-be-positioned element 33, and the deviation Y-direction module 9 performs deviation positioning on the to-be-positioned element 33 according to the positioning result, and the last degree of freedom deviation positioning of the to-be-positioned element 33 is completed.

[0049] At this point, the to-be-positioned element 33 has completed the six-degree-of-freedom positioning deviation process, and according to the subsequent process requirements, the device can continue to perform cyclic operation on the remaining to-be-positioned elements 33.

[0050] The present application cooperates the use of the grabbing clamping jaw cylinder, the deviation positioning clamping jaw cylinder and the deviation positioning table, so that the material positioning on the deviation positioning table can be well matched for deviation in multiple angles, and the feeding and discharging before and after deviation is relatively convenient.

[0051] Compared with the same type of multi-degree-of-freedom deviation mechanism, the present application only needs to perform automatic visual positioning deviation in one direction during normal work, avoids the behavior that all positioning and deviation axes participate in positioning and deviation, avoids introducing system errors caused by the hardware positioning accuracy of each deviation axis, and increases the number and time of setting actions, thereby greatly optimizing the beat.

[0052] In the description of the application, it is to be understood by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, only for the convenience of describing the application and simplifying the description, and not indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore cannot be understood as a limitation on the application. In addition, the terms "first", "second" and the like are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features referred to. Therefore, the features defined with "first", "second" and the like can explicitly or implicitly include one or more of the features. In the description of the application, unless otherwise specified and limited, the term "a plurality of" means two or more.

[0053] In the description of the application, it should be noted that unless otherwise specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the application can be understood through specific circumstances.

[0054] The above is only the preferred embodiment of the application, and is not used to limit the application, it should be pointed out that for ordinary skilled in the art, without departing from the technical principles of the application, a number of improvements and modifications can be made, these improvements and modifications should be considered as the protection scope of the application.

Claims

1. Quick multi-degree-of-freedom deviation rectification mechanism, comprising a mechanism base plate (1), a deviation rectification unit (2), a Y-direction camera unit (3), an X-direction camera unit (4) and a grabbing unit (5), the deviation rectification unit (2) is arranged on the mechanism base plate (1), the deviation rectification unit (2) is provided with the Y-direction camera unit (3) on the mechanism base plate (1) on the negative side of the Y axis, the deviation rectification unit (2) is provided with the X-direction camera unit (4) on the mechanism base plate (1) on the negative side of the X axis, and the deviation rectification unit (2) is provided with the grabbing unit (5) above. Characterized in that: The deviation rectification unit (2) comprises a deviation rectification base plate (6), a deviation rectification positioning table (13) and a deviation rectification positioning clamp jaw cylinder (15), the deviation rectification movement module on the deviation rectification base plate (6) is connected with the deviation rectification positioning table (13) above, the deviation rectification positioning clamp jaw cylinder (15) is installed on the positive side of the Y axis of the deviation rectification positioning table (13), the deviation rectification positioning fixed clamp jaw (17) is installed in the deviation rectification positioning table (13), the deviation rectification positioning movable clamp jaw (16) on the deviation rectification positioning clamp jaw cylinder (15) is matched with the deviation rectification positioning fixed clamp jaw (17), and the deviation rectification positioning fixed clamp jaw (17) and the deviation rectification positioning movable clamp jaw (16) are sequentially arranged along the positive direction of the X axis. The grabbing unit (5) comprises a grabbing Z-direction module (28) and a grabbing clamp jaw cylinder (30), the grabbing Z-direction module (28) is installed on the top beam, the grabbing Z-direction module (28) can drive the grabbing clamp jaw cylinder (30) below to move along the Z axis direction, and the bottom of the grabbing clamp jaw cylinder (30) is sequentially provided with a grabbing positioning clamp jaw (31) and a grabbing flat clamp jaw (32) along the positive direction of the X axis.

2. The rapid multi-degree of freedom correction mechanism of claim 1, wherein, The deviation rectification movement module comprises, from bottom to top, a deviation rectification Z-axis module (7), a deviation rectification rotating table (8), a deviation rectification Y-direction module (9), a deviation rectification X-direction module (10), a deviation rectification first arc swing table (11) and a deviation rectification second arc swing table (12).

3. The fast multi-degree-of-freedom correction mechanism according to claim 2, wherein The deviation rectification rotating table (8) can rotate in the XY plane, the deviation rectification first arc swing table (11) can swing in an arc shape in the YZ plane, and the deviation rectification second arc swing table (12) can swing in an arc shape in the XZ plane.

4. The rapid multi-degree-of-freedom correction mechanism according to claim 1, wherein A deviation rectification backlight source (14) is also installed on the positive side of the X axis of the deviation rectification positioning table (13).

5. The rapid multi-degree-of-freedom correction mechanism according to claim 1, wherein The Y-direction camera unit (3) comprises a Y-direction camera support (18), a Y-direction camera X-direction module (19), a Y-direction camera Y-direction module (20), a Y-direction camera Z-direction module (21) and a Y-direction camera (22), the Y-direction camera support (18) is installed on the mechanism base plate (1), and the Y-direction camera support (18) is sequentially provided, from bottom to top, with the Y-direction camera X-direction module (19), the Y-direction camera Y-direction module (20), the Y-direction camera Z-direction module (21) and the Y-direction camera (22).

6. The rapid multi-degree-of-freedom correction mechanism according to claim 1, wherein The X-direction camera unit (4) comprises an X-direction camera support (23), an X-direction camera Y-direction module (24), an X-direction camera X-direction module (25), an X-direction camera Z-direction module (26) and an X-direction camera (27), the X-direction camera support (23) is mounted on the mechanism bottom plate (1), and the X-direction camera support (23) is sequentially provided with the X-direction camera Y-direction module (24), the X-direction camera X-direction module (25), the X-direction camera Z-direction module (26) and the X-direction camera (27) from bottom to top.

7. The rapid multi-degree-of-freedom correction mechanism according to claim 1, wherein The grabbing claw cylinder (30) is further provided with a Z-direction camera (29) on the driving end of the grabbing Z-direction module (28) on the negative side of the X-axis.

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