An optical element online dismounting and cleaning transfer device and an optical element dismounting method

Abstract

The application discloses an optical element online dismounting, cleaning and transferring device and an optical element dismounting method, relates to the technical field of dismounting, maintaining and repairing optical elements, and discloses the optical element online dismounting, cleaning and transferring device, which comprises a top-mounted clean box, a first translation mechanism, a second translation mechanism and a grabbing mechanism. The first translation mechanism is located outside the top-mounted clean box, the second translation mechanism and the grabbing mechanism are located inside the clean box, the first translation mechanism can drive the second translation mechanism and the grabbing mechanism to move up and down, the second translation mechanism can drive the grabbing mechanism to move up and down, and the grabbing mechanism is used for grabbing and releasing optical elements. The first translation mechanism, the second translation mechanism and the grabbing mechanism are used for realizing accurate positioning and adjustment of the position of the optical element, so as to solve the problems of precise installation and online cleaning and replacement of the optical element.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of dismounting and maintaining optical elements, and particularly relates to an online dismounting and cleaning transfer device for optical elements and a dismounting method for optical elements. BACKGROUND

[0002] Currently, in optical research projects such as laser inertial confinement large solid-state laser devices, online dismounting of terminal optical elements is particularly crucial after laser damage to the optical elements.

[0003] These large-aperture optical elements usually have large sizes and weights, and need to achieve multi-degree-of-freedom attitude adjustment in the optical path. However, the traditional manual and electric guide rail docking mechanisms have some problems in the dismounting process of large-aperture optical elements. On the one hand, the reliability of the manual mechanism is poor, and its structure is complex and the operation is cumbersome. Manual operation is easily limited by the operator's technical level, causing instability in the dismounting process, and the optical element is more likely to be damaged. On the other hand, although the electric mechanism can provide a higher level of automation, it is difficult to meet the requirements of rapid dismounting of large-aperture optical elements due to the limitation of space size. In large optical research equipment, the dismounting of optical elements often needs to be operated in a small space, which makes it difficult for the traditional electric mechanism to adapt. In addition, the requirement for a clean environment during the dismounting process of optical elements is also increasing. Especially for high-precision optical systems and sensitive optical elements, contamination can have a serious impact on their performance and service life. Therefore, during the dismounting process of large-aperture optical elements, not only the stability and reliability of the docking need to be ensured, but also the cleanliness of the dismounting environment needs to be maintained to avoid damage or performance degradation of the optical element caused by contamination. SUMMARY

[0004] The purpose of the present application is to provide an online dismounting and cleaning transfer device for optical elements and a dismounting method for optical elements, which realizes precise positioning and adjustment of the position of the optical element through a first translation mechanism, a second translation mechanism and a grabbing mechanism, to solve the problems of precise installation and online clean replacement of optical elements.

[0005] To achieve the above-mentioned purpose, the present application provides the following solutions:

[0006] The present application provides an online dismounting and cleaning transfer device for optical elements, comprising an upper-mounted clean box, a first translation mechanism, a second translation mechanism and a grabbing mechanism. The first translation mechanism is located outside the upper-mounted clean box, the second translation mechanism and the grabbing mechanism are both located inside the clean box, the first translation mechanism can drive the second translation mechanism and the grabbing mechanism to move up and down, the second translation mechanism can drive the grabbing mechanism to move up and down, and the grabbing mechanism is used for grabbing and releasing the optical element.

[0007] Preferably, the first translation mechanism comprises a first motor and a first transmission structure, the second translation mechanism is arranged on a mounting plate, the mounting plate is in sliding connection with a first guide rail in the upper loading clean box, and the first motor drives the mounting plate and the second translation mechanism to move up and down along the first guide rail through the first transmission structure.

[0008] Preferably, the first transmission structure comprises a first gear, a second gear, a first transmission rod, a first bevel gear and a second bevel gear, the first gear is in transmission connection with a power output end of the first motor, the first transmission rod is in rotational connection with the upper loading clean box, the first gear is in meshing with the second gear sleeved on the first transmission rod, two ends of the first transmission rod are respectively provided with a first bevel gear, each first bevel gear is in meshing with a second bevel gear, each second bevel gear is arranged at one end of a first lead screw, the first lead screw is arranged in the upper loading clean box, first nuts at two ends of the mounting plate are respectively in threaded connection with the first lead screws, each first nut is in connection with a first sliding block, and the first sliding block is in sliding connection with the first guide rail.

[0009] Preferably, the second translation mechanism comprises a second motor and a second transmission structure, the grabbing mechanism is in sliding connection with a second guide rail on the mounting plate, and the second motor drives the grabbing mechanism to move up and down along the second guide rail through the second transmission structure.

[0010] Preferably, the second transmission structure comprises a second lead screw, a second nut, a first pulley, a second pulley and a traction rope, a power output end of the second motor is in transmission connection with the second lead screw, the second lead screw is arranged perpendicularly to the first lead screw, the second lead screw is in rotational connection with the mounting plate, the second nut is in threaded connection with the second lead screw, the second motor drives the second lead screw to rotate, thereby driving the second nut to move along the length direction of the second lead screw, the first pulley is arranged on a support seat of the second lead screw, the second pulley is arranged on the mounting plate, one end of the traction rope is connected with the second nut, and the traction rope is sequentially wound around the first pulley and the second pulley and then connected with the grabbing mechanism.

[0011] Preferably, two sides of each second guide rail are in rolling connection with rollers on the grabbing mechanism.

[0012] Preferably, the grabbing mechanism comprises a steering wheel, a third transmission structure and a grabbing hook, the grabbing hook is used for grabbing optical elements, and the steering wheel drives the grabbing hook to grab and release optical elements through the third transmission structure.

[0013] Preferably, the third transmission structure comprises a third gear, a fourth gear, a fifth gear and a second transmission rod, the third gear is in transmission connection with the power output end of the steering gear, the third gear is in meshing with the fourth gear sleeved on the second transmission rod, the two ends of the second transmission rod are respectively sleeved with the fifth gears, each of the fifth gears is in meshing with the first rack and the second rack, the fifth gears can drive the first rack and the second rack to move reversely, the first rack is connected with the first jaw of the grab hook, and the second rack is connected with the second jaw of the grab hook.

[0014] Preferably, the first translation mechanism is located at the top of the upper loading clean box, and the bottom of the upper loading clean box is the entrance of the upper loading clean box.

[0015] The application also provides an optical element dismounting method for the clean transfer device, and the dismounting of the optical element comprises the following steps:

[0016] Step one: use the lifting equipment to suspend the upper loading clean box to a predetermined position, and ensure that the entrance of the upper loading clean box is in butt joint with the interface of the terminal optical element;

[0017] Step two: send the second translation mechanism and the grabbing mechanism to the entrance of the upper loading clean box;

[0018] Step three: align the grabbing mechanism with the handle of the optical element;

[0019] Step four: use the grabbing mechanism to grab the optical element;

[0020] Step five: use the second translation mechanism to send the grabbing mechanism and the optical element to the entrance of the upper loading clean box;

[0021] Step six: use the first translation mechanism to send the second translation mechanism and the optical element into the upper loading clean box;

[0022] Step seven: after all the treatments are completed, dismount the upper loading clean box from the lifting equipment and transfer it;

[0023] The installation of the optical element comprises the following steps:

[0024] Step one: use the lifting equipment to lift the upper loading clean box with the optical element to a predetermined position, open the entrance of the upper loading clean box, and make the entrance of the upper loading clean box in butt joint with the interface of the terminal optical element;

[0025] Step two: start the first translation mechanism, and send the second translation mechanism, the grabbing mechanism and the optical element to the entrance of the upper loading clean box;

[0026] Step three: start the second translation mechanism, and send the grabbing mechanism and the optical element to the working position;

[0027] Step 4: Use the gripping mechanism to release the optical element so that it can be removed from the upper cleanroom.

[0028] Step 5: Send the second translation mechanism and gripping mechanism to the entrance of the upper clean box;

[0029] Step 6: Send the second translation mechanism and gripping mechanism into the upper cleanroom box;

[0030] Step 7: After all processing is completed, disassemble the upper clean box and transfer it.

[0031] The present invention achieves the following technical effects compared to the prior art:

[0032] This invention enables convenient lifting of optical components in complex environments and facilitates the assembly and disassembly of optical components at different positions on a target sphere. Employing a first translation mechanism, a second translation mechanism, and a gripping mechanism, this invention allows for rapid and accurate assembly and disassembly of optical components, improving installation efficiency. Furthermore, the cleanroom design of the upper casing allows for assembly and disassembly of optical components in a clean environment, effectively reducing contamination and dust interference and ensuring the quality and performance of the optical components. The mechanical operation of this invention is easy for operators to master, reducing the impact of human factors on assembly quality and improving operational stability and repeatability. In addition, this invention features a compact structure, convenient operation, and flexible mobility, making it suitable for the assembly and disassembly of optical components in complex environments. Attached Figure Description

[0033] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0034] Figure 1 This is a front cross-sectional view of the internal structure of the online disassembly and assembly clean transfer device for optical components according to the present invention;

[0035] Figure 2 This is a reverse cross-sectional view of the internal structure of the online disassembly and assembly clean transfer device for optical components of the present invention.

[0036] Figure 3 for Figure 1 Enlarged view of a portion at point A;

[0037] Figure 4 for Figure 1 A magnified view of section B;

[0038] Figure 5 is a local enlarged view of C in FIG. 8; Figure 2 is a local enlarged view of C in FIG. 8;

[0039] Figure 6 is a detail view of the grabbing mechanism of the application;

[0040] Figure 7 is an external schematic view of the optical element online dismounting and cleaning transfer device of the application;

[0041] Wherein: 100-optical element online dismounting and cleaning transfer device, 1-upper cleaning box, 2-first motor, 3-mounting plate, 4-first guide rail, 5-first gear, 6-second gear, 7-first transmission rod, 8-first bevel gear, 9-second bevel gear, 10-first lead screw, 11-first nut, 12-first sliding block, 13-second motor, 14-second lead screw, 15-second nut, 16-first pulley, 17-second pulley, 18-pulling rope, 19-second guide rail, 20-roller, 21-third gear, 22-fourth gear, 23-fifth gear, 24-first rack, 25-second rack, 26-steering wheel. DETAILED DESCRIPTION

[0042] The technical solutions in the embodiments of the application will be described clearly and completely below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments of the application. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative effort belong to the protection scope of the application.

[0043] The purpose of the application is to provide an optical element online dismounting and cleaning transfer device and an optical element dismounting method. The first translation mechanism, the second translation mechanism and the grabbing mechanism are used to realize the precise positioning and adjustment of the position of the optical element, so as to solve the problems of precise installation and online cleaning replacement of the optical element.

[0044] In order to make the above-mentioned purposes, characteristics and advantages of the application more obvious and easy to understand, the application will be further described in detail below with reference to the drawings and specific embodiments.

[0045] Embodiment one

[0046] As Figures 1 to 7The embodiment provides an online dismounting and cleaning transfer device 100 of an optical element, which comprises an upper cleaning box 1, a first translation mechanism, a second translation mechanism and a grabbing mechanism. The upper cleaning box 1 is a cuboid. The first translation mechanism is located at the top of the upper cleaning box 1. The upper cleaning box 1 is a closed structure. The bottom of the upper cleaning box 1 is an openable inlet of the upper cleaning box 1. The second translation mechanism and the grabbing mechanism are both located in the interior of the cleaning box. The first translation mechanism can drive the second translation mechanism and the grabbing mechanism to move up and down. The second translation mechanism can drive the grabbing mechanism to move up and down. The grabbing mechanism is used for grabbing and releasing the optical element.

[0047] Specifically, in the embodiment, the first translation mechanism comprises a first motor 2 and a first transmission structure. The second translation mechanism is arranged on a mounting plate 3. The mounting plate 3 is in sliding connection with a first guide rail 4 in the upper cleaning box 1. The first motor 2 drives the mounting plate 3 and the second translation mechanism to move up and down along the first guide rail 4 through the first transmission structure.

[0048] In the embodiment, the first transmission structure comprises a first gear 5, a second gear 6, a first transmission rod 7, a first bevel gear 8 and a second bevel gear 9. The first gear 5 is in transmission connection with the power output end of the first motor 2. The first transmission rod 7 is in rotary connection with a bearing seat on the upper cleaning box 1. The first gear 5 is in meshing connection with the second gear 6 which is sleeved on the first transmission rod 7. The two ends of the first transmission rod 7 are respectively provided with a first bevel gear 8. Each first bevel gear 8 is in meshing connection with a second bevel gear 9. Each second bevel gear 9 is arranged at one end of a first lead screw 10. The first lead screw 10 is arranged in the upper cleaning box 1 and is in rotary connection with the upper cleaning box 1 through a bearing. First nuts 11 at the two ends of the mounting plate 3 are respectively in threaded connection with a first lead screw 10. Each first nut 11 is connected with a first sliding block 12. The first sliding block 12 is in sliding connection with the first guide rail 4. The first motor 2 drives the first gear 5. The first gear 5 is in meshing transmission with the second gear 6. Then the first transmission rod 7 drives the first bevel gear 8 to rotate. The first bevel gear 8 is in meshing transmission with the second bevel gear 9. Then the first lead screw 10 rotates. The first nut 11 moves up and down along the first lead screw 10. Then the second translation mechanism and the grabbing mechanism on the mounting plate 3 move up and down along the first guide rail 4.

[0049] In the embodiment, the second translation mechanism comprises a second motor 13 and a second transmission structure. The grabbing mechanism is in sliding connection with second guide rails 19 on the mounting plate 3. The second motor 13 drives the grabbing mechanism to move up and down along the second guide rails 19 through the second transmission structure. The two sides of each second guide rail 19 are in rolling connection with rollers 20 on the grabbing mechanism.

[0050] In the embodiment, the second transmission structure comprises a second lead screw 14, a second nut 15, a first pulley 16, a second pulley 17 and a traction rope 18. The power output end of the second motor 13 is in transmission connection with the second lead screw 14. The second lead screw 14 is arranged perpendicularly to the first lead screw 10. The second lead screw 14 is in rotational connection with the mounting plate 3. The second nut 15 is in threaded connection with the second lead screw 14. The second motor 13 drives the second lead screw 14 to rotate, thereby driving the second nut 15 to move along the length direction of the second lead screw 14. The first pulley 16 is arranged on the support seat of the second lead screw 14. The second pulley 17 is arranged on the mounting plate 3. The second nut 15 is connected with one end of the traction rope 18. The traction rope 18 is preferably a steel wire rope. The traction rope 18 is sequentially wound around the first pulley 16 and the second pulley 17 and then connected with the grabbing mechanism. The second motor 13 drives the second lead screw 14 to rotate. The second nut 15 moves along the length direction of the second lead screw 14. The second nut 15 drives the grabbing mechanism to move up and down along the second guide rail 19 through the traction rope 18.

[0051] In the embodiment, the second translation mechanism further comprises a guide rod and a second sliding block. The guide rod is arranged in parallel to the second lead screw 14. The second sliding block is connected with the second nut 15 through a screw. The second sliding block is in sliding connection with the guide rod. The guide rod plays a guiding role in the movement of the second nut 15 along the length direction of the second lead screw 14.

[0052] In the embodiment, the grabbing mechanism comprises a steering wheel 26, a third transmission structure and a grab hook. The grab hook is used for grabbing the optical element. The steering wheel 26 drives the grab hook to grab and release the optical element through the third transmission structure.

[0053] In the embodiment, the third transmission structure comprises a third gear 21, a fourth gear 22, a fifth gear 23 and a second transmission rod. The third gear 21 is in transmission connection with the power output end of the steering wheel 26. The third gear 21 is in meshing connection with the fourth gear 22 which is sleeved on the second transmission rod. The two ends of the second transmission rod are respectively sleeved with a fifth gear 23. Each fifth gear 23 is in meshing connection with the first rack 24 and the second rack 25 respectively. The fifth gear 23 can drive the first rack 24 and the second rack 25 to move reversely. The first rack 24 is connected with the first jaw of the grab hook. The second rack 25 is connected with the second jaw of the grab hook. The length directions of the first rack 24 and the second rack 25 are respectively perpendicular to the length directions of the first lead screw 10 and the second lead screw 14. The steering wheel 26 drives the third gear 21 to rotate. The third gear 21 is in meshing transmission with the fourth gear 22. Then the second transmission rod drives the fifth gear 23 to rotate. The fifth gear 23 is in meshing transmission with the first rack 24 and the second rack 25. Then the first rack 24 and the second rack 25 are driven to grab and release the optical element.

[0054] The embodiment realizes accurate positioning and adjustment of the position of the optical element through the first translation mechanism, the second translation mechanism and the grabbing mechanism, so as to solve the problems of precise installation and online clean replacement of the optical element. The embodiment provides an online disassembly and transfer device for the optical element, which is efficient, reliable and clean, and has important significance for the development of precise installation and online clean replacement of the optical element.

[0055] The embodiment can realize convenient lifting of the optical element in a complex environment and can complete the disassembly of the optical element at different positions on the target ball. The embodiment adopts the first translation mechanism, the second translation mechanism and the grabbing mechanism, so that the assembly and disassembly operations of the optical element can be quickly and accurately completed, and the installation efficiency is improved. At the same time, the design of the upper clean box 1 enables the optical element to be assembled and disassembled in a clean environment, effectively reducing the interference of pollution and dust and ensuring the quality and performance of the optical element. The embodiment adopts mechanical operation and guide rail design, which can be easily mastered by the operator, reduces the influence of human factors on the assembly quality, and improves the stability and repeatability of the operation. In addition, the embodiment has the characteristics of compact structure, convenient operation and flexible movement, and is suitable for disassembly of the optical element in a complex environment.

[0056] Embodiment two

[0057] The embodiment provides an optical element disassembly method using the online disassembly and clean transfer device 100 for the optical element of the embodiment one, and the disassembly of the optical element includes the following steps:

[0058] Step one, use the lifting equipment to suspend the upper clean box 1 to the predetermined position, and ensure that the inlet of the upper clean box 1 is docked with the interface of the terminal optical element;

[0059] Step two, send the second translation mechanism and the grabbing mechanism to the inlet of the upper clean box 1, and ensure that they are accurately sent to the position where the optical element is located;

[0060] Step three, align the grabbing mechanism with the handle of the optical element to ensure correct position;

[0061] Step four, use the grabbing mechanism to grab the optical element for subsequent processing and transfer;

[0062] Step five, use the second translation mechanism to send the grabbing mechanism and the optical element to the inlet of the upper clean box 1, so as to ensure that the optical element is safely placed in the upper clean box 1;

[0063] Step six, use the first translation mechanism to send the second translation mechanism and the optical element to the deepest part of the upper clean box 1 (the uppermost end inside the upper clean box 1), so as to ensure that the optical element is completely placed inside the upper clean box 1;

[0064] Step seven, after all the processing is completed, the upper clean box 1 is detached from the lifting device and transported;

[0065] The installation of the optical element includes the following steps:

[0066] Step one, use the lifting device to lift the upper clean box 1 with the optical element to the predetermined position, open the entrance of the upper clean box 1, and make the entrance of the upper clean box 1 butt joint with the interface of the terminal optical element;

[0067] Step two, start the first translation mechanism, send the second translation mechanism, the grabbing mechanism and the optical element to the entrance of the upper clean box 1, and ensure that the optical element is accurately sent to the working position;

[0068] Step three, start the second translation mechanism, send the grabbing mechanism and the optical element to the working position, and ensure that the optical element is in the correct working position;

[0069] Step four, use the grabbing mechanism to loosen the optical element, so that the optical element can be taken out of the upper clean box 1;

[0070] Step five, send the second translation mechanism and the grabbing mechanism to the entrance of the upper clean box 1 for the next installation or operation of the optical element in the future;

[0071] Step six, send the second translation mechanism and the grabbing mechanism to the deepest part of the upper clean box 1;

[0072] Step seven, after all the processing is completed, detach the upper clean box 1 and transport it.

[0073] The principles and implementation manners of the present application are described in the specification by applying specific examples, and the above description of the examples is only for helping to understand the method of the present application and its core idea; meanwhile, for those skilled in the art, according to the idea of the present application, the specific implementation manners and application ranges will have changes. In conclusion, the content of the specification should not be understood as the limitation of the present application.

Claims

1. An optical element online dismounting, cleaning and transferring device, characterized in that: The device comprises an upper clean box, a first translation mechanism, a second translation mechanism and a grabbing mechanism, the first translation mechanism is located outside the upper clean box, the second translation mechanism and the grabbing mechanism are located inside the upper clean box, the first translation mechanism can drive the second translation mechanism and the grabbing mechanism to move up and down, the second translation mechanism can drive the grabbing mechanism to move up and down, and the grabbing mechanism is used for grabbing and releasing optical elements. The first translation mechanism comprises a first motor and a first transmission structure, the second translation mechanism is arranged on a mounting plate, the mounting plate is slidably connected with a first guide rail in the upper clean box, and the first motor drives the mounting plate and the second translation mechanism to move up and down along the first guide rail through the first transmission structure. The first transmission structure comprises a first gear, a second gear, a first transmission rod, a first bevel gear and a second bevel gear, the first gear is in transmission connection with a power output end of the first motor, the first transmission rod is rotatably connected with the upper clean box, the first gear is in mesh with the second gear sleeved on the first transmission rod, the two ends of the first transmission rod are respectively provided with the first bevel gears, each first bevel gear is in mesh with the second bevel gear, each second bevel gear is arranged at one end of a first lead screw, the first lead screw is arranged in the upper clean box, first nuts at the two ends of the mounting plate are respectively in threaded connection with the first lead screws, each first nut is connected with a first sliding block, and the first sliding block is slidably connected with the first guide rail. The second translation mechanism comprises a second motor and a second transmission structure, the grabbing mechanism is slidably connected with a second guide rail on the mounting plate, and the second motor drives the grabbing mechanism to move up and down along the second guide rail through the second transmission structure. The second transmission structure comprises a second lead screw, a second nut, a first pulley, a second pulley and a traction rope, a power output end of the second motor is in transmission connection with the second lead screw, the second lead screw is arranged perpendicularly to the first lead screw, the second lead screw is rotatably connected with the mounting plate, the second nut is in threaded connection with the second lead screw, the second motor drives the second lead screw to rotate, thereby driving the second nut to move along the length direction of the second lead screw, the first pulley is arranged on a support seat of the second lead screw, the second pulley is arranged on the mounting plate, one end of the traction rope is connected with the second nut, and the traction rope is sequentially wound around the first pulley and the second pulley and then connected with the grabbing mechanism.

2. The online cleaning and transfer device for optical elements according to claim 1, characterized in that The two sides of each second guide rail are in rolling connection with rollers on the grabbing mechanism.

3. The online cleaning and transfer device of optical elements according to claim 1, characterized in that: The grabbing mechanism comprises a rudder, a third transmission structure and a grabbing hook, the grabbing hook is used for grabbing optical elements, and the rudder drives the grabbing hook to grab and release optical elements through the third transmission structure.

4. The online cleaning and transfer device of optical elements according to claim 3, characterized in that: The third transmission structure comprises a third gear, a fourth gear, a fifth gear and a second transmission rod, the third gear is in transmission connection with the power output end of the steering engine, the third gear is in engagement with the fourth gear sleeved on the second transmission rod, the two ends of the second transmission rod are respectively sleeved with the fifth gears, each fifth gear is in engagement with the first rack and the second rack, the fifth gears can drive the first rack and the second rack to move reversely, the first rack is connected with the first jaw of the grab hook, and the second rack is connected with the second jaw of the grab hook.

5. The online cleaning and transfer device of optical elements according to claim 1, characterized in that: The first translation mechanism is located at the top of the upper clean box, and the bottom of the upper clean box is the entrance of the upper clean box.

6. An optical element dismounting method using the online dismounting and cleaning transfer device of any one of claims 1-5, characterized in that: The dismounting of the optical element comprises the following steps: Step one, use the lifting equipment to suspend the upper clean box to the predetermined position, and ensure that the entrance of the upper clean box is in butt joint with the interface of the terminal optical element; Step two, send the second translation mechanism and the grabbing mechanism to the entrance of the upper clean box; Step three, align the grabbing mechanism with the handle of the optical element; Step four, use the grabbing mechanism to grab the optical element; Step five, use the second translation mechanism to send the grabbing mechanism and the optical element to the entrance of the upper clean box; Step six, use the first translation mechanism to send the second translation mechanism and the optical element into the upper clean box; Step seven, after all the processes are completed, dismount the upper clean box from the lifting equipment and transfer it; The installation of the optical element comprises the following steps: Step one, use the lifting equipment to lift the upper clean box with the optical element to the predetermined position, open the entrance of the upper clean box, and make the entrance of the upper clean box in butt joint with the interface of the terminal optical element; Step two, start the first translation mechanism, and send the second translation mechanism, the grabbing mechanism and the optical element to the entrance of the upper clean box; Step three, start the second translation mechanism, and send the grabbing mechanism and the optical element to the working position; Step four, use the grabbing mechanism to loosen the optical element, so that the optical element can be taken out of the upper clean box; Step five, send the second translation mechanism and the grabbing mechanism to the entrance of the upper clean box; Step six, send the second translation mechanism and the grabbing mechanism into the upper clean box; Step seven, after all the processes are completed, dismount the upper clean box and transfer it.

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