Adjustment mechanism of infrared laser optical mirror

Abstract

The present invention discloses an adjustment mechanism for an infrared laser optical mirror, comprising a vacuum chamber, a translation adjustment unit, a rotation adjustment unit, and an optical mirror assembly. The translation adjustment unit comprises a horizontal adjustment unit and a vertical adjustment unit. The optical mirror assembly, the rotation adjustment unit, and the horizontal adjustment unit are all located within the vacuum chamber. In the present invention, four-dimensional adjustment of the optical mirror assembly can be achieved by providing the translation adjustment unit and the rotation adjustment unit. The rotation assembly and the horizontal adjustment unit, as well as the rotation assembly and the optical mirror assembly, are both provided with a rotational connection, and the rotation axis of the rotation assembly and the rotation axis of the optical mirror assembly are cross-connected, so that the two rotation axes of the pitch angle and the rolling glue intersect at the center of the optical mirror assembly. During rotational adjustment, no additional translation is generated and no other rotation is affected. The center position of the mirror surface remains unchanged, and the optical path length remains unchanged, greatly simplifying the adjustment process.

Description

Technical Field

[0001] The present invention relates to the technical field of optical equipment, and more particularly to an adjustment mechanism for an infrared laser optical mirror. Background Art

[0002] Infrared light is easily absorbed by the air when it is transmitted in the air, and the transmission efficiency is low. Generally, the infrared light path over long distances is within 10 -2 Transmission is performed in a Pa-level vacuum or dry nitrogen atmosphere, so all optical components in the optical path are installed in a vacuum container. Infrared light has a long wavelength and exhibits significant divergence during propagation. To reduce this divergence, a beam expansion and convergence transmission method is typically employed. This involves using a pair of off-axis parabolic mirrors at the front end of the optical path to appropriately expand the beam diameter, and another pair at the end to narrow the infrared beam diameter to the required parallel beam. However, the expanded beam spot size is large, and the infrared optical mirrors are also relatively large, potentially up to 50 cm. To achieve real-time online optical path adjustment, each optical component must be capable of automated, remote adjustment. Planar mirrors typically require two angular actuators to adjust the beam direction. In addition to two angular steering actuators, an off-axis parabolic mirror assembly also requires one to three translational adjustments to adjust the focal points of the two parabolic mirrors. Translational adjustment involves three X, Y, and Z movements to align the mirror center with the light, followed by two rotational adjustments to adjust the light's direction.

[0003] The existing patent document with patent publication number CN215954841U discloses an optical mirror adjustment mechanism suitable for ultra-high vacuum and strong magnetic conditions, including a support plate, a radial rotation support seat and a traction member, wherein the radial rotation support seat is rotatably connected to a radial rotation axis, and polar rotation support seats are provided at both ends of the radial rotation axis, and the plane mirror is rotatably arranged on the polar rotation support seat; the traction member is arranged on the plane mirror and the polar rotation support seat, and the upper end of the traction member extends upward out of the antenna cavity, and is connected to a driving mechanism arranged above the antenna cavity, and under the drive of the driving mechanism, drives the plane mirror to rotate in the polar direction, or drives the polar rotation support seat to rotate the plane mirror in the radial direction; it can be suitable for the adjustment needs of optical mirrors in ultra-high vacuum and strong magnetic field environments, has the ability to maintain high vacuum, and has the ability to resist the influence of electromagnetic forces caused by changes in the strong magnetic field environment on the plane mirror steering structure.

[0004] However, its translational adjustment will change the relative position of the rotation axis and the center of the mirror, and the additional translation will also affect the other rotation. The change in the center position of the mirror causes the optical path length to change, which greatly increases the difficulty of adjustment. Summary of the Invention

[0005] The technical problem to be solved by the present invention is how to simplify the adjustment of the optical mirror.

[0006] The present invention solves the above-mentioned technical problems through the following technical means: an adjustment mechanism of an infrared laser optical mirror, comprising a vacuum chamber, a translation adjustment unit, a rotation adjustment unit, and an optical mirror assembly, wherein the translation adjustment unit comprises a horizontal adjustment unit and a vertical adjustment unit, the optical mirror assembly, the rotation adjustment unit, and the horizontal adjustment unit are all located in the vacuum chamber, the vertical adjustment unit is located outside the vacuum chamber, and its output end is transmission-connected to the horizontal adjustment unit, the rotation adjustment unit is fixedly connected to the output end of the horizontal adjustment unit, the rotation adjustment unit comprises a rotating assembly, the rotating assembly is rotationally connected to the horizontal adjustment unit, the rotating assembly is rotationally connected to the optical mirror assembly, and the rotation axis of the rotating assembly is cross-intersected with the rotation axis of the optical mirror assembly, the midlines of the short side and the long side of the optical mirror assembly coincide with the rotation axis of the rotating assembly and the rotation axis of the optical mirror assembly, respectively, and a rangefinder is provided on the translation adjustment unit and the rotation adjustment unit.

[0007] By setting up the translation adjustment unit and the rotation adjustment unit, the four-dimensional adjustment of the optical mirror assembly can be completed. The rotation assembly and the horizontal adjustment unit, as well as the rotation assembly and the optical mirror assembly are all set to be rotationally connected, and the rotation axis of the rotation assembly and the rotation axis of the optical mirror assembly are cross-intersected, so that the two rotation axes of the projection angle and the rolling glue intersect at the center of the optical mirror assembly. During the rotation adjustment, no additional translation will be generated and the other rotation will not be affected. The center position of the mirror surface remains unchanged, and the optical path length remains unchanged, which greatly simplifies the adjustment process.

[0008] As a preferred technical solution, the rotating assembly includes a rotating frame, a lower support of the mirror base, and a first adapter bracket. The lower support of the mirror base is fixedly connected to the top of the output end of the horizontal adjustment unit, and the rotating frame is rotatably connected to the top of the lower support of the mirror base. The lower support of the mirror base is also connected to a roll angle linear driver through the first adapter bracket. The output end of the roll angle linear driver is transmission-connected to the rotating frame and can drive the rotating frame to rotate with the midline of its long side as the axis of rotation.

[0009] As a preferred technical solution, the optical mirror assembly includes an infrared optical mirror, an optical mirror seat, and a bracket. The optical mirror seat is rotatably connected to the rotating frame. One end of the optical mirror seat is fixedly connected to the infrared optical mirror, and the other end is fixedly connected to the bracket. The bracket is connected to the rotating frame through a projection angle linear driver. The output end of the projection angle linear driver is transmission-connected to the rotating assembly and can drive the optical mirror seat to rotate with the midline of its short side as the axis of rotation.

[0010] As a preferred technical solution, the vacuum chamber includes an upper flange, a lower flange, a vacuum chamber wall, and an optical path outlet. The vacuum chamber wall is T-shaped, and the top and bottom of the vertical section of the vacuum chamber wall are respectively fixed with the upper flange and the lower flange, and the horizontal section of the vacuum chamber wall is provided with an optical path outlet.

[0011] As a preferred technical solution, the vertical adjustment unit includes a vertical drive assembly, which includes a top plate, a bottom plate, a vertical platform, and a vertical drive motor. The vertical platform is fixedly connected to the bottom of the top plate, and the output end of the vertical platform is connected to the bottom plate. The bottom plate is connected to the horizontal adjustment unit through a vertical column. The top plate is fixed to the bottom of the vacuum chamber, and the vertical column passes through the top plate. The end of the vertical column located outside the vacuum chamber is wrapped with a bellows.

[0012] As a preferred technical solution, the horizontal adjustment unit includes a horizontal drive assembly, which includes a horizontal top plate, a horizontal bottom plate, and a horizontal drive motor. The horizontal top plate is slidably connected to the top of the horizontal bottom plate, and a horizontal drive motor is fixed at one end of the horizontal bottom plate. The output end of the horizontal drive motor is transmission-connected to the horizontal top plate and drives the horizontal top plate to move relative to the horizontal bottom plate.

[0013] As an optimal technical solution, the roll angle linear driver includes a roll angle stepper motor, a travel switch, a travel switch lever, a head elastic pin, an adapter head, a motor adapter bracket, and a tail elastic pin. The first adapter bracket is rotatably connected to the motor adapter bracket through the tail elastic pin. One end of the motor adapter bracket is fixedly connected to the roll angle stepper motor. The output end of the roll angle stepper motor is transmission-connected to the adapter head. The adapter head is provided with a head elastic pin. A second adapter bracket is fixed on the rotating frame. The second adapter bracket is rotatably connected to the head elastic pin. The end of the motor adapter bracket facing away from the roll angle stepper motor is fixedly connected to the third travel switch through the third travel switch seat. The adapter head is provided with a third travel switch lever that is adapted to the third travel switch.

[0014] As an optimal technical solution, second elastic pins are fixed on both sides of the rotating frame, and the second elastic pins are rotatably engaged with the lower support of the mirror base. A fourth grating scale is provided on the lower support of the mirror base, and a fourth grating scale paddle adapted to the fourth grating scale is provided on the rotating frame.

[0015] As a preferred technical solution, the optical mirror seat is rotatably connected to the rotating frame through two first elastic pins, a first grating scale is fixed to the outer wall of the optical mirror seat, and a first grating scale paddle adapted to the first grating scale is provided on the rotating frame.

[0016] As a preferred technical solution, the infrared mirror is tilted.

[0017] The advantages of the present invention are:

[0018] (1) In the present invention, the four-dimensional adjustment of the optical mirror assembly can be completed by setting the translation adjustment unit and the rotation adjustment unit. The rotation assembly and the horizontal adjustment unit, and the rotation assembly and the optical mirror assembly are all set to be rotationally connected, and the rotation axis of the rotation assembly and the rotation axis of the optical mirror assembly are cross-intersected, that is, the two rotation axes of the projection angle and the rolling glue intersect at the center of the optical mirror assembly. During the rotation adjustment, no additional translation will be generated and the other rotation will not be affected. The center position of the mirror surface remains unchanged, and the optical path length remains unchanged, which greatly simplifies the adjustment process.

[0019] (2) In the present invention, by setting the driving parts of the roll angle linear actuator and the pitch angle linear actuator as stepping linear motors, close adjustment of the optical mirror assembly can be achieved, and the structure can be simplified. By setting elastic pins at all rotation points and pre-twisting the elastic pins during installation, the rebound force can be used to eliminate the transmission return clearance of the drive system. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram of the internal structure of a vacuum chamber provided in an embodiment of the present invention;

[0021] Figure 2 A schematic diagram of the vacuum chamber structure provided by an embodiment of the present invention;

[0022] Figure 3 A schematic diagram of a top view of the optical mirror assembly provided in an embodiment of the present invention;

[0023] Figure 4 A schematic diagram of the bottom-up structure of the optical mirror assembly provided by an embodiment of the present invention;

[0024] Figure 5 A schematic diagram of the structure of a horizontal drive assembly provided in an embodiment of the present invention;

[0025] Figure 6 A schematic diagram of the structure of a vertical drive assembly provided in an embodiment of the present invention;

[0026] Figure 7 A schematic diagram of the pitch linear actuator structure provided by an embodiment of the present invention;

[0027] Figure 8 A schematic diagram of the roll angle linear actuator structure provided by an embodiment of the present invention;

[0028] Figure 9 A schematic side view of the structure of a rotating assembly provided in an embodiment of the present invention;

[0029] Figure 10 A schematic diagram of the rear view structure of a rotating assembly provided in an embodiment of the present invention;

[0030] Figure 11A schematic diagram of a top view of the rotating assembly provided in an embodiment of the present invention;

[0031] Figure 12 A schematic diagram of a rectangular frame structure provided by an embodiment of the present invention;

[0032] Figure 13 A schematic diagram of rotation angles provided by an embodiment of the present invention;

[0033] Figure 14 A graph of experimental data provided by an embodiment of the present invention;

[0034] Figure 15 A schematic diagram of an absolute error curve provided by an embodiment of the present invention;

[0035] Figure Number:

[0036] 1. Vacuum chamber; 101. Upper flange; 102. Lower flange; 103. Vacuum chamber wall; 104. Observation window; 105. Light path exit;

[0037] 2. Optical mirror assembly; 201. Infrared optical mirror; 202. Optical mirror base; 203. First elastic pin; 204. Pressure strip; 205. Set screw; 206. Bracket; 207. First grating ruler;

[0038] 3. Horizontal drive assembly; 301. Horizontal base plate; 302. Horizontal top plate; 303. Cross-ball linear guide; 304. First travel switch; 305. First travel switch lever; 306. Horizontal drive motor; 307. Anti-backlash nut; 308. Adapter head; 309. Second grating scale; 310. Scale fixing base; 311. Second grating scale paddle; 312. Motor adapter plate;

[0039] 4. Vertical drive assembly; 401. Top plate; 402. Bottom plate; 403. Vertical platform; 404. Bellows; 405. Third grating scale; 406. Vertical column; 407. Vertical drive motor; 408. Electrode flange; 409. Target hole;

[0040] 5. Pitch linear actuator; 501. Pitch stepping motor; 502. Second travel switch; 503. Second travel switch lever; 504. Head rotation elastic pin; 505. Adapter head; 506. Second travel switch base; 507. Motor adapter bracket; 508. Tail elastic pin;

[0041] 6. Roll angle linear actuator; 601. Roll angle stepping motor; 602. Third travel switch; 603. Third travel switch lever; 604. Head elastic pin; 605. Adapter head; 606. Third travel switch base; 607. Motor adapter bracket; 608. Tail elastic pin;

[0042] 7. Rotating assembly; 701. Rotating frame; 702. Mirror mount lower support; 703. Second elastic pin; 704. First adapter bracket; 705. Fourth grating scale; 706. Fourth grating scale paddle; 707. First grating scale paddle; 708. Adapter; 709. Second adapter bracket. DETAILED DESCRIPTION

[0043] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0044] See Figure 1 , an adjustment mechanism for an infrared laser optical mirror, comprising a vacuum chamber 1, a translation adjustment unit, a rotation adjustment unit, and an optical mirror assembly 2, wherein the translation adjustment unit comprises a horizontal adjustment unit and a vertical adjustment unit, the optical mirror assembly 2, the rotation adjustment unit, and the horizontal adjustment unit are all located in the vacuum chamber 1, the vertical adjustment unit is located outside the vacuum chamber 1, and its output end is transmission-connected to the horizontal adjustment unit, the rotation adjustment unit is fixedly connected to the output end of the horizontal adjustment unit, the rotation adjustment unit comprises a rotation assembly 7, the rotation assembly 7 is rotationally connected to the horizontal adjustment unit, the rotation assembly 7 is rotationally connected to the optical mirror assembly 2, and the rotation axis of the rotation assembly 7 is cross-intersected with the rotation axis of the optical mirror assembly 2, the midlines of the short side and the long side of the optical mirror assembly 2 coincide with the rotation axis of the rotation assembly 7 and the rotation axis of the optical mirror assembly 2, respectively, and a rangefinder is provided on the translation adjustment unit and the rotation adjustment unit;

[0045] In this embodiment, the rangefinder can be a grating ruler, and a Heidenham grating ruler can be selected. The limit switch can be an Omron limit switch. The horizontal adjustment unit includes a horizontal drive component 3, and the vertical adjustment unit includes a vertical drive component 4. The optical mirror component 2 is connected to the rotating component 7 through the pitch angle linear driver 5. The pitch angle linear driver 5 can drive the optical mirror component 2 to rotate relative to the rotating component 7 with the short side center line of the optical mirror component 2 as the rotating axis. The rotating component 7 can rotate relative to the horizontal adjustment unit. Elastic pins are provided at the rotating connections. By pre-twisting the elastic pins during installation, the rebound force can be used to eliminate the return clearance of the drive system transmission.

[0046] See Figure 3 The midline of the long side of the optical mirror assembly 2 is the Pitch axis, and the midline of the short side is the Roll axis. The driving motors in this implementation are all linear stepping motors with a motion resolution of 2 microns / step. When using subdivision drive, the resolution can reach 0.2 microns / microstep.

[0047] See Figure 2 The vacuum chamber 1 includes an upper flange 101, a lower flange 102, a vacuum chamber wall 103, an observation window 104, and an optical path outlet 105. The vacuum chamber wall 103 is T-shaped, and the top and bottom of the vertical section of the vacuum chamber wall 103 are respectively provided with openings, wherein the top opening is used to allow light to enter, the bottom opening is used to connect the vertical drive component 4, and the horizontal section opening is used to ensure that light can be emitted. The top and bottom of the vertical section of the vacuum chamber wall 103 are respectively fixed with an upper flange 101 and a lower flange 102, and the horizontal section of the vacuum chamber wall 103 is provided with an optical path outlet 105, and the vacuum chamber wall 103 is also provided with an observation window 104. The lower flange 102 is circumferentially provided with multiple target holes 409. In this embodiment, four are taken as an example, which are distributed at equal angles and are used for the installation and positioning of the vacuum chamber 1. Among them, common vacuum elements such as the vacuum degree measuring port and the inflation port in the vacuum chamber 1 are not described in detail.

[0048] See Figure 6 , the vertical drive assembly 4 includes a top plate 401, a bottom plate 402, a vertical platform 403, a bellows 404, a third grating scale 405, a vertical column 406, a vertical drive motor 407, an electrode flange 408, and a target hole 409. The vertical platform 403 is fixedly connected to the bottom of the top plate 401, and the output end of the vertical platform 403 is connected to the bottom plate 402. The vertical platform 403 is a commercial vertical platform, and the vertical platform model ZA10A-W202 of Japan KOHZU Company can be selected, but it is not limited to this; the vertical drive motor 407 is the driving part of the vertical platform 403, and a docking flange and a sealing ring connected to the lower flange 102 are fixed on the top plate 401. The top plate 401 is sealed and fixed to the vacuum chamber 1, and the bottom plate 402 is connected to the bottom plate 402 through four A vertical column 406 is connected to the horizontal adjustment unit (i.e., fixedly connected to the horizontal bottom plate 301), and the vertical column 406 passes through the top plate 401. One end of the vertical column 406 located on the outside of the vacuum chamber 1 is provided with a bellows 404 to ensure the sealing of the entire vacuum chamber 1. Four target holes 409 are opened circumferentially on the top plate 401. Two electrode flanges 408 are fixedly connected to the bottom of the top plate 401. A third grating scale 405 is fixedly connected to the outside of the bottom plate 402 to measure the distance between the bottom plate 402 and the top plate 401. The vertical drive motor 407 drives the output end of the vertical platform 403 to move vertically, thereby driving the bottom plate 402 to move vertically, thereby realizing the vertical movement of the horizontal adjustment unit. The vertical drive assembly 4 can obtain vertical adjustment with micron precision and repeatability.

[0049] See Figure 5The horizontal drive assembly 3 includes a horizontal top plate 302, a horizontal bottom plate 301, a cross ball linear guide 303, a first travel switch 304, a first travel switch lever 305, a horizontal drive motor 306, an anti-backlash nut 307, a first adapter head 308, a second grating scale 309, a grating scale fixing seat 310, a grating scale paddle 311, and a motor adapter plate 312. The horizontal top plate 302 is slidably connected to the top of the horizontal bottom plate 301 through the cross ball linear guide 303. A horizontal drive motor 306 is fixed at one end of the horizontal bottom plate 301. The output end of the horizontal drive motor 306 is transmission-connected to the horizontal top plate 302 and drives the horizontal top plate 302 to move relative to the horizontal bottom plate 301. When the top plate 302 moves, a first travel switch 304 is fixedly connected to one side of the horizontal top plate 302, and a first travel switch lever 305 adapted to the first travel switch 304 is fixedly connected to the top of the horizontal bottom plate 301 in turn. A second grating scale paddle 311 is fixedly connected to the other side of the horizontal top plate 302, and a second grating scale 309 adapted to the second grating scale paddle 311 is fixedly connected to the other side of the top of the horizontal bottom plate 301. The second grating scale 309 is fixed to the horizontal bottom plate 301 through a grating scale fixing seat 310. When the top plate 302 moves to the set stroke, the first travel switch lever 305 triggers the contact of the first travel switch 304, causing the control system to cut off the power to the horizontal drive motor 306 to stop the movement ( Figure 5 The top plate 302 has moved to the farthest end, and the corresponding travel switch is triggered. The second grating ruler 309 reading head reads the movement amount and actual position of the top plate 302, and is connected with the control part of the horizontal drive motor 306 to form a closed-loop feedback control system to ensure that the horizontal drive assembly 3 can obtain micron accuracy and repeatability.

[0050] The horizontal base plate 301 is fixed to the horizontal drive motor 306 through the motor adapter plate 312. The horizontal drive motor 306 is provided with an anti-backlash nut 307, which is used to eliminate the return clearance of the drive thread pair. The output end of the horizontal drive motor 306 is fixedly connected to the first adapter head 308, and the first adapter head 308 is fixedly connected to the horizontal top plate 302 through bolts.

[0051] See Figure 3 、 Figure 4, the mirror assembly 2 includes an infrared mirror 201, a mirror seat 202, a first elastic pin 203, a pressure strip 204, a set screw 205, a bracket 206, and a first grating ruler 207. The mirror seat 202 is rotatably connected to the rotating frame 701. In this embodiment, the infrared mirror 201 is tilted, the mirror seat 202 is rectangular, and one end of the mirror seat 202 is fixedly connected to the infrared mirror 201 through a plurality of set screws 205 and the pressure strip 204. The pressure strip 204 is located at the connection surface between the mirror seat 202 and the infrared mirror 201, and the other end is fixedly connected to the bracket 206. The bracket 206 is connected to the infrared mirror 201 through the projection angle line. The linear driver 5 is connected to the rotating frame 701, and the output end of the pitch linear driver 5 is in transmission connection with the rotating assembly 7, and can drive the optical mirror seat 202 to rotate with the midline of its short side as the rotating axis. The optical mirror seat 202 is rotatably connected to the rotating frame 701 through two first elastic pins 203. A first grating scale 207 is fixed to the outer wall of the optical mirror seat 202, and a first grating scale paddle 707 adapted to the first grating scale 207 is provided on the rotating frame 701. The first grating scale 207 is used to read the axial relative motion amount, and the angle of rotation is obtained by dividing it by the radius (the length from the contact point to the axis of the first elastic pin 203).

[0052] See Figure 9 、 Figure 10 The rotating assembly 7 includes a rotating frame 701, a lower support 702 of the mirror base, a second elastic pin 703, a first adapter bracket 704, a fourth grating scale 705, a fourth grating scale paddle 706, a first grating scale paddle 707, an adapter 708, and a second adapter bracket 709. The first adapter bracket 704 is fixedly connected to the lower support 702 of the mirror base, and the lower support 702 of the mirror base is fixedly connected to the top of the horizontal top plate 302. The rotating frame 701 is rotatably connected to the top of the lower support 702 of the mirror base. The second elastic pin 703 is fixedly connected to both sides of the rotating frame 701. The second elastic pin 703 is rotatably engaged with the lower support 702 of the mirror base. The lower support 702 of the mirror base is provided with a fourth grating scale 705. The rotating frame 701 is provided with a fourth grating scale paddle 706 adapted to the fourth grating scale 705. The lower support 702 of the mirror base is also connected to the roll angle linear driver 6 through the first adapter bracket 704. The output end of the roll angle linear driver 6 is transmission-connected to the rotating frame 701 and can drive the rotating frame 701 to rotate with the midline of its long side as the axis of rotation. The output end of the roll angle linear driver 6 is rotatably connected to the second adapter bracket 709.

[0053] See Figure 7 、 Figure 8The roll angle linear actuator 6 includes a roll angle stepping motor 601, a travel switch 602, a travel switch lever 603, a head elastic pin 604, an adapter head 605, a motor adapter bracket 607, and a tail elastic pin 608. The first adapter bracket 704 is rotatably connected to the motor adapter bracket 607 through the tail elastic pin 608. One end of the motor adapter bracket 607 is fixedly connected to the roll angle stepping motor 601. The output end of the roll angle stepping motor 601 is transmission-connected to the adapter head 605. The adapter head 605 is provided with a head elastic pin 604. The rotating frame 701 A second adapter bracket 709 is fixed on it, and the second adapter bracket 709 is rotatably connected to the head elastic pin 604. The end of the motor adapter bracket 607 facing away from the roll angle stepper motor 601 is fixedly connected to the third travel switch 602 through the third travel switch seat 606. The adapter head 605 is provided with a third travel switch lever 603 adapted to the third travel switch 602. The roll angle stepper motor 601 is a linear stepper motor in the prior art, which can drive the adapter head 605 to move along its layout direction, thereby driving the entire rotating frame 701 to rotate around the lower support 702 of the mirror seat.

[0054] It should be noted that the pitch angle linear actuator 5 and the roll angle linear actuator 6 have the same structure, see Figure 10 The difference is that the pitch angle linear actuator 5 is used to drive the optical mirror assembly 2 to rotate relative to the rotating frame 701, wherein the motor adapter bracket of the pitch angle linear actuator 5 is rotatably connected to the bracket 206 through the tail elastic pin, and the head rotating elastic pin at the adapter head end of the pitch angle linear actuator 5 is rotatably connected to the adapter 708. The two ends of the elastic pin can generate relative rotation with the fastened components and have a certain rebound force. The rigid fastening of the pin and the mounting hole can avoid the uncertainty of force and gap brought by traditional rotary fastening; the rebound force can eliminate the return gap of the drive system.

[0055] In this embodiment, a precision nut is integrated into the rotor of the linear motor used, and a precision screw is placed in the center. The motor nose supports the central screw to prevent rotation. When the nut rotates, the screw generates axial linear motion and guides with the motor nose. The tail of the motor is equipped with an anti-backlash nut. Compared with ordinary linear actuators, the structure is simpler. Generally, the rotary motion is installed with an arc guide rail, and the rotation of the motor shaft is reduced to form a rotary drive. This device uses a driving triangle and linear drive to obtain rotary motion. See the schematic diagram. Figure 11 、 Figure 12 、 Figure 13 The three vertices A, B, and C represent the center points of the elastic pins; the AC side represents the frame; the AB side represents the optical mirror to be driven; and the BC side represents the linear actuator. Due to the properties of the elastic pins, each side can produce a certain amount of rotation around the vertex. When the length of the linear actuator changes, that is, when the length of the BC side changes, the AB side will also rotate. In the figure, when the BC side shortens to B'C, the AB side rotates to AB', and the rotation angle is θ.

[0056] θ=BB' / AB≈(BC-B'C) / AB

[0057] When the linear drive length change (BC-B'C) is used to represent the angle to calculate the change in chord length BB', a certain error will occur. See Figure (), when the rotation angle is within 1.5°, the absolute error is less than 2.2μrad, and the relative error is less than 0.008%. Generally, the precision adjustment range of the infrared mirror drive is between -1.5° and +1.5°, and the finest rotation step is required to be 10μrad. This error of 2.2μrad is much smaller than the minimum adjustment step and can be ignored. When the adjustment angle increases, the absolute error increases, but the relative error percentage is still small. For example, when adjusting from 0° to -5°, the absolute error is 74.6μrad and the relative error is 0.085%. The present invention can also be used for preliminary adjustment and fine adjustment.

[0058] In this embodiment, the entire device is connected to a vacuum flange for easy commissioning and installation. The device is designed with four degrees of freedom, but this allows for flexible application. For example, for a plane mirror, the two linear adjustments at the bottom can be omitted, retaining only the two rotational adjustments, simplifying the mechanism and saving costs. For an off-axis parabolic mirror assembly, one parabolic mirror can retain four-dimensional actuation, while the other retains three-dimensional actuation (eliminating the vertical actuation). This also allows for sufficient adjustment to align the focal points of the two mirrors. This device is described with the mirrors tilted upward, but in practice, any angle is possible. This is not a limitation.

[0059] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. An adjustment mechanism for an infrared laser optical mirror, characterized in that: The invention comprises a vacuum chamber (1), a translation adjustment unit, a rotation adjustment unit, and an optical mirror assembly (2); the translation adjustment unit comprises a horizontal adjustment unit and a vertical adjustment unit; the optical mirror assembly (2), the rotation adjustment unit, and the horizontal adjustment unit are all located in the vacuum chamber (1); the vertical adjustment unit is located outside the vacuum chamber (1), and its output end is transmission-connected to the horizontal adjustment unit; the rotation adjustment unit is fixedly connected to the output end of the horizontal adjustment unit; the rotation adjustment unit comprises a rotation assembly (7); the rotation assembly (7) is rotationally connected to the horizontal adjustment unit; the rotation assembly (7) is rotationally connected to the optical mirror assembly (2); the rotation axis of the rotation assembly (7) and the rotation axis of the optical mirror assembly (2) are cross-intersected; the midlines of the long side and the short side of the optical mirror assembly (2) coincide with the rotation axis of the rotation assembly (7) and the rotation axis of the optical mirror assembly (2) respectively; and the translation adjustment unit and the rotation adjustment unit are both provided with a rangefinder.

2. The adjustment mechanism of the infrared laser optical mirror according to claim 1, characterized in that: The rotating assembly (7) comprises a rotating frame (701), a mirror base lower support (702), and a first adapter bracket (704); the mirror base lower support (702) is fixedly connected to the top of the output end of the horizontal adjustment unit; the rotating frame (701) is rotatably connected to the top of the mirror base lower support (702); the mirror base lower support (702) is further connected to a roll angle linear driver (6) via the first adapter bracket (704); the output end of the roll angle linear driver (6) is transmission-connected to the rotating frame (701) and is capable of driving the rotating frame (701) to rotate with the midline of its long side as a rotation axis.

3. The adjustment mechanism of the infrared laser optical mirror according to claim 2, characterized in that: The optical mirror assembly (2) comprises an infrared optical mirror (201), an optical mirror seat (202), and a bracket (206); the optical mirror seat (202) is rotatably connected to a rotating frame (701); one end of the optical mirror seat (202) is fixedly connected to the infrared optical mirror (201), and the other end is fixedly connected to the bracket (206); the bracket (206) is connected to the rotating frame (701) via a projection angle linear driver (5); the output end of the projection angle linear driver (5) is transmission-connected to the rotating assembly (7), and can drive the optical mirror seat (202) to rotate with the midline of its short side as the rotation axis.

4. The adjustment mechanism of the infrared laser optical mirror according to claim 1, characterized in that: The vacuum chamber (1) comprises an upper flange (101), a lower flange (102), a vacuum chamber wall (103), and an optical path outlet (105); the vacuum chamber wall (103) is T-shaped; the upper flange (101) and the lower flange (102) are fixedly connected to the top and bottom of the vertical section of the vacuum chamber wall (103), respectively; and the optical path outlet (105) is opened on the horizontal section of the vacuum chamber wall (103).

5. The adjustment mechanism of the infrared laser optical mirror according to claim 1, characterized in that: The vertical adjustment unit comprises a vertical drive assembly (4), the vertical drive assembly (4) comprises a top plate (401), a bottom plate (402), a vertical platform (403), and a vertical drive motor (407), the vertical platform (403) is fixedly connected to the bottom of the top plate (401), the output end of the vertical platform (403) is connected to the bottom plate (402), the bottom plate (402) is connected to the horizontal adjustment unit via a vertical column (406), the top plate (401) is fixed to the bottom of the vacuum chamber (1), and the vertical column (406) passes through the top plate (401), and one end of the vertical column (406) located outside the vacuum chamber (1) is provided with a bellows (404).

6. The adjustment mechanism of the infrared laser optical mirror according to claim 1, characterized in that: The horizontal adjustment unit comprises a horizontal drive assembly (3), the horizontal drive assembly (3) comprising a horizontal top plate (302), a horizontal bottom plate (301), and a horizontal drive motor (306), the horizontal top plate (302) being slidably connected to the top of the horizontal bottom plate (301), a horizontal drive motor (306) being fixed to one end of the horizontal bottom plate (301), an output end of the horizontal drive motor (306) being transmission-connected to the horizontal top plate (302), and driving the horizontal top plate (302) to move relative to the horizontal bottom plate (301).

7. The adjustment mechanism of the infrared laser optical mirror according to claim 2, characterized in that: The roll angle linear actuator (6) comprises a roll angle stepping motor (601), a travel switch (602), a travel switch lever (603), a head elastic pin (604), an adaptor head (605), a motor adaptor bracket (607), and a tail elastic pin (608); the first adaptor bracket (704) is rotatably connected to the motor adaptor bracket (607) via the tail elastic pin (608); one end of the motor adaptor bracket (607) is fixedly connected to the roll angle stepping motor (601); the output end of the roll angle stepping motor (601) is transmission-connected to the adaptor bracket (608); A matching head (605) is provided on the matching head (605), a head elastic pin (604) is fixed on the rotating frame (701), the second matching bracket (709) is rotatably connected to the head elastic pin (604), one end of the motor matching bracket (607) facing away from the roll angle stepping motor (601) is fixedly connected to the third travel switch (602) through the third travel switch seat (606), and the matching head (605) is provided with a third travel switch lever (603) adapted to the third travel switch (602).

8. The adjustment mechanism of the infrared laser optical mirror according to claim 2, characterized in that: Second elastic pins (703) are fixedly connected to both sides of the rotating frame (701), and the second elastic pins (703) are rotatably matched with the lower support (702) of the mirror base. A fourth grating scale (705) is provided on the lower support (702) of the mirror base, and a fourth grating scale paddle (706) adapted to the fourth grating scale (705) is provided on the rotating frame (701).

9. The adjustment mechanism of the infrared laser optical mirror according to claim 3, characterized in that: The optical mirror seat (202) is rotatably connected to the rotating frame (701) via two first elastic pins (203); a first grating ruler (207) is fixedly connected to the outer wall of the optical mirror seat (202); and a first grating ruler paddle (707) adapted to the first grating ruler (207) is provided on the rotating frame (701).

10. The adjustment mechanism of the infrared laser optical mirror according to claim 1, characterized in that: The infrared mirror (201) of the optical mirror assembly (2) is arranged tilted.

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