A silicon material exhaust fan processing method based on high-pressure water jet technology

Abstract

The application discloses a kind of based on high-pressure water jet technology's silicon material exhaust fan processing method, this processing method includes the following steps: S1, using mechanical milling to the fan body of cylindrical silicon material is processed;S2, the middle hollow mounting groove of cylindrical silicon material is processed to obtain exhaust fan profile product;S3, surface exhaust groove processing is carried out to the product obtained in step S2;S4, the product processed in step S3 is carried out size full inspection;S5, using ultrasonic cleaning equipment to remove the water stain on the surface of the product processed in step S4;S6, remove the oxide on the surface of the product in step S5.The present application can shorten product processing time, reduce product surface damage, improve the processing efficiency and pass rate of product.

Description

Technical Field

[0001] This invention relates to the field of silicon material processing technology, specifically a silicon material exhaust fan processing method based on high-pressure water jet technology. Background Technology

[0002] In the semiconductor chip industry, integrated circuit capacitively coupled (CCP) chip etching machines are the main etching equipment. Multi-slot exhaust fans are key components in chip etching machines, connecting the spray head and the silicon wafer. During dry etching, the silicon wafer is etched by reactive gases and plasma. The plasma reacts with the surface film to form volatile substances, or the plasma directly bombards the silicon wafer surface for etching. The resulting etching products and plasma are discharged through the multi-slot exhaust fan.

[0003] As is well known, silicon is a good semiconductor material, characterized by high brittleness and high hardness. Most existing multi-slot exhaust fan products are manufactured using traditional mechanical milling. Specific tools are selected and CNC machining is used to mill all the exhaust slots in one go. While this process can produce the product, traditional mechanical milling is not only inefficient but also prone to material breakage, surface damage, and chipping, resulting in a low yield rate.

[0004] Therefore, there is an urgent need for a processing method that can improve processing efficiency, reduce product surface damage, and increase product qualification rate when performing multi-groove processing on silicon materials. Summary of the Invention

[0005] In order to solve at least one of the technical problems mentioned in the background art, the present invention aims to provide a silicon material exhaust fan processing method based on high-pressure water jet technology, which can shorten the product processing time, reduce product surface damage, and improve product processing efficiency and pass rate.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] A method for processing a silicon material exhaust fan based on high-pressure water jet technology. The exhaust fan processed by this method includes a cylindrical fan body. The fan body has a convex mounting groove formed from the top surface inwards. Multiple exhaust grooves are arranged in a circular array around the fan body axis on the top surface. The processing method includes the following steps:

[0008] S1. Using mechanical milling, the square silicon material is rough-machined to obtain a cylindrical silicon material that conforms to the size of the fan body.

[0009] S2. A mounting groove is made by hollowing out the middle of a cylindrical silicon material using a cutting tool, thereby obtaining the exhaust fan-shaped product.

[0010] S3. Adjust the parameters of the high-pressure water jet equipment, such as cutter offset, taper compensation, sand feed rate, water outlet diameter, and distance between the water jet cutter head and the product, and perform surface venting groove processing on the product obtained in step S2.

[0011] S4. Perform a full dimensional inspection on the products processed in step S3, mainly checking the dimensions of groove length, groove width, positional accuracy, and groove spacing.

[0012] S5. Use ultrasonic cleaning equipment to remove water stains from the surface of the product after processing in step S4.

[0013] S6. Use a mixed solution of hydrofluoric acid, nitric acid and acetic acid in a ratio of 3:7:8 to remove the oxides on the surface of the product in step S5.

[0014] Preferably, the distance between the waterjet cutter head and the product in step S3 is 1mm to 5mm.

[0015] Preferably, the sand feeding rate in step S3 is 0.308 g / min.

[0016] Preferably, a protective fixture is installed in the mounting groove of the fan body after processing in step S2. The protective fixture is used to prevent the high-pressure water flow from puncturing the bottom of the fan body.

[0017] Preferably, the protective fixture includes multiple first fixture modules and multiple second fixture modules, which are spliced ​​together to form a ring. Each of the first fixture modules and the multiple second fixture modules includes a base plate and connecting plates extending from both sides of the base plate.

[0018] Preferably, the connecting plate of the first fixture module has a positioning ridge, and the connecting plate of the second fixture module has a positioning groove that matches the positioning ridge.

[0019] Preferably, the protective fixture is made of high-speed steel.

[0020] Preferably, the etching temperature in step S6 is 47°C and the etching time is 30s.

[0021] Preferably, the method also includes step S7: performing a full dimensional inspection on the product from step S6 again to verify whether the final data of the product is qualified.

[0022] Preferably, the process also includes step S8: packaging the qualified products from step S7 to complete the entire processing.

[0023] Compared with the prior art, the beneficial effects of the present invention are:

[0024] In summary, a cylindrical fan body and mounting slots are obtained through machining. Then, high-pressure water jet technology is used to process all exhaust slots sequentially on the top surface of the fan body, improving the processing efficiency of the exhaust fan. Compared to mechanical milling, high-pressure water jet processing of silicon material exhaust fans does not create a surface damage layer, effectively extending the lifespan of multi-slot exhaust fans. Furthermore, ultrasonic cleaning equipment removes residual water stains from the product surface, and a mixture of hydrofluoric acid, nitric acid, and acetic acid in a 3:7:8 ratio removes surface oxides. Overall, this process improves the processing efficiency and product yield of silicon material exhaust fans. Attached Figure Description

[0025] Figure 1 This is a flowchart of the exhaust fan manufacturing process of the present invention;

[0026] Figure 2 A schematic diagram of a silicon-based exhaust fan;

[0027] Figure 3 This is a schematic diagram of the protective fixture of the present invention;

[0028] Figure 4 This is a schematic diagram of the first fixture module structure;

[0029] Figure 5 This is a schematic diagram of the second fixture module.

[0030] In the figure: 1. Protective fixture; 11. First fixture module; 12. Second fixture module; 2. Base plate; 3. Connecting plate; 4. Positioning ridge; 5. Positioning groove; 6. Exhaust fan; 61. Fan body; 62. Mounting groove; 63. Exhaust groove. Detailed Implementation

[0031] The technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] To facilitate understanding, this section introduces the processing of exhaust grooves on silicon material exhaust fans in the market. Currently, the main method used in the market is to process exhaust grooves using milling machines. This requires milling the groove shape of the exhaust groove bit by bit on the surface to be processed with a milling cutter. The processing time is relatively long and the processing efficiency is relatively low. Currently, the complete processing cycle for machining all exhaust grooves using mechanical milling is at least two weeks, resulting in low production efficiency. In addition, as is well known, silicon material is a brittle and hard material. Therefore, during the milling process of exhaust grooves, it is easy to cause material breakage, surface damage, and material chipping. The probability of material damage is even higher when the milling cutter and silicon material are just in contact or when the milling cutter and silicon material are about to separate. Therefore, the product qualification rate is relatively low.

[0033] Please see Figure 2 The exhaust fan 6 product to be processed by the present invention includes a cylindrical fan body 61. A convex mounting groove 62 is formed from the top surface of the fan body 61 inwards. The top surface of the fan body 61 is annular. Multiple exhaust slots are formed in a circular array around the axis of the fan body 61 on the top surface of the fan body 61. In the art, the slot shape of the exhaust slots 63 of the silicon material exhaust fan 6 is generally referred to as "Slots": that is, a rectangle with semicircles at both ends, the diameter of the semicircles being equal to the width of the rectangle. To obtain this exhaust fan 6 product, refer to... Figure 1 This embodiment provides a method for processing silicon material exhaust fans based on high-pressure water jet technology. The processing method includes the following steps:

[0034] S1. Take a square silicon material, start the milling machine, use mechanical milling to rough process the square silicon material, and cut it to obtain a cylindrical silicon material with a diameter and height that conform to the dimensions of the fan body 61.

[0035] S2. Hollowing out the middle of a cylindrical silicon material to obtain an installation groove 62, thereby obtaining the exhaust fan 6 product.

[0036] S3. Turn on the high-pressure water jet cutting equipment and set the parameters of tool offset, taper compensation, sand feed, water outlet diameter, and distance between the water jet cutter head and the product. Then, place the product obtained in step S2 into the fixture of the high-pressure water jet cutting equipment and process the surface venting groove 63. Processing with high-pressure water jet technology will not cause damage to the product surface, which improves the protection of product quality during the processing of the venting groove 63.

[0037] S4. Perform a full dimensional inspection on the products processed in step S3, specifically checking the dimensions of the groove length, groove width, positional accuracy, and groove spacing.

[0038] S5. Use ultrasonic cleaning equipment to remove water stains from the surface of the product after processing in step S4.

[0039] S6. Use a mixed solution of hydrofluoric acid, nitric acid and acetic acid in a ratio of 3:7:8 to remove the oxides on the surface of the product in step S5.

[0040] Further, in step S7: the product from step S6 is subjected to a full dimensional inspection again to verify whether the final data of the product is qualified.

[0041] Further, step S8: Package the qualified products from step S7 to complete the entire processing.

[0042] In summary, a cylindrical fan body 61 and mounting groove 62 are obtained through machining. Then, high-pressure water jet technology is used to sequentially process all exhaust grooves 63 on the top surface of the fan body 61, improving the processing efficiency of the exhaust fan 6. Compared to mechanical milling, high-pressure water jet processing of the silicon material exhaust fan 6 does not result in a surface damage layer, effectively extending the lifespan of the multi-groove exhaust fan 6. Furthermore, ultrasonic cleaning removes residual water stains and surface impurities, and a mixture of hydrofluoric acid, nitric acid, and acetic acid in a 3:7:8 ratio removes surface oxides. Overall, this improves the processing efficiency and product yield of the silicon material exhaust fan.

[0043] In one specific implementation of this application, the distance between the waterjet cutter head and the product in step S3 is 1mm to 5mm.

[0044] Considering the specific application scenario, if the distance between the waterjet cutter head and the product has a significant impact on the processing accuracy and safety, let's define the distance as H. If H is greater than 5mm, the water jet closer to the product during high-pressure waterjet cutting will spread out more, resulting in greater error. Conversely, if H is less than 1mm, the cutter head is prone to colliding with the product, damaging it. Therefore, strictly controlling the distance H between the waterjet cutter and the product within 1mm to 5mm ensures minimal cutting error, guarantees cutting feasibility, and prevents cutter collisions, thus improving the processing stability of the exhaust fan 6 product.

[0045] In one specific implementation of this application, the sand feeding rate in step S3 is 0.308 g / min.

[0046] Depending on the specific application scenario, the amount of sand applied is an important equipment parameter that affects the appearance of the product. The coarser the sand and the greater the amount of sand applied, the more likely the product will have burrs or even chipping. On the other hand, the finer the sand, the longer the processing time. This invention sets the amount of sand applied to 0.308 g / min, which not only makes it less likely to cause burrs and chipping on the product, but also maintains the processing efficiency at a relatively high value, thereby improving product quality and processing efficiency.

[0047] As a specific embodiment of this application, a protective fixture 1 is installed in the mounting groove 62 of the fan body 61 after processing in step S2. The protective fixture 1 is used to prevent the high-pressure water flow from puncturing the bottom of the fan body 61.

[0048] In specific application scenarios, when processing the exhaust groove 63 feature, after the high-pressure water flow cuts the required groove shape on the processing surface, the water flow will shoot to the bottom of the fan body 61, which is a non-processed surface. At this time, by adding a protective fixture 1, when the water flow penetrates the processing surface, it will spray onto the protective fixture 1, thereby preventing the bottom of the fan body 61 from being penetrated, and further improving the product yield and quality.

[0049] Reference Figures 3-5 As a specific embodiment of this application, the protective fixture 1 includes a plurality of first fixture modules 11 and a plurality of second fixture modules 12. The plurality of first fixture modules 11 and second fixture modules 12 are spliced ​​together to form a ring. The first fixture module 11 and the second fixture module 12 both include a base plate 2 and a connecting plate 3 extending from both sides of the base plate 2.

[0050] Considering the specific application scenario, since the mounting groove 62 inside the fan body 61 is a convex groove, and the top surface of the fan body 61 is annular, while the exhaust groove 63 is located on the annular part of the top surface of the fan body 61, the projection area of ​​the annular part of the top surface of the exhaust fan 6 onto the bottom surface is the area that needs to be protected during cutting. This necessitates that the protective fixture 1 must be a split type; otherwise, the protective fixture 1 cannot be installed. Therefore, the protective fixture 1 is divided into multiple first fixture modules 11 and multiple second fixture modules 12. Both the first fixture module 11 and the second fixture module 12... The system includes a base plate 2 and connecting plates 3 extending from both sides of the base plate 2. During installation, a first fixture module 11 is first placed in the mounting groove 62 of the exhaust fan 6, and then a second fixture module 12 is placed. The connecting plate 3 of the second fixture module 12 is attached to the connecting plate 3 of the first fixture module 11. All the first fixture modules 11 and second fixture modules 12 are placed in the mounting groove 62 in sequence, and then multiple first fixture modules 11 and second fixture modules 12 are spliced ​​together to form a circular protective fixture 1.

[0051] Reference Figure 4 and Figure 5 As a specific implementation of this application, the connecting plate 3 of the first fixture module 11 has a positioning ridge 4, and the connecting plate 3 of the second fixture module 12 has a positioning groove 5 that matches the positioning ridge 4.

[0052] Based on specific application scenarios, the connection area of ​​the first fixture module 11 and the second fixture module 12 is further increased by utilizing the cooperation of the positioning ridge 4 and the positioning groove 5. This ensures the connection stability of adjacent first fixture modules 11 and second fixture modules 12, thereby improving the overall integrity of the protective fixture 1. It can prevent the protective fixture 1 from falling off or being washed away by the water jet when it is impacted by the water jet, thus improving the stability and reliability of the protective fixture 1.

[0053] As one specific embodiment of this application, the protective fixture 1 is made of high-speed steel.

[0054] In light of specific application scenarios, high-speed steel possesses a series of excellent properties such as high hardness, wear resistance, and good strength and toughness. In particular, its high hardness and wear resistance remain essentially unchanged even at high temperatures. Choosing high-speed steel as the material for protective fixture 1 can improve the reliability of protective fixture 1, ensure the protection of the bottom of the product during processing, and thus improve the processing reliability of the product.

[0055] In one specific implementation of this application, the etching temperature in step S6 is 47°C and the etching time is 30s.

[0056] In specific application scenarios, if the etching process is too hot or the etching time is too long, it will lead to excessive etching, resulting in pits on the product surface, which will affect the product quality. On the other hand, if the temperature is too low or the etching time is too short, the etching degree on the product surface will be insufficient, and the oxides and other impurities on the product surface cannot be completely removed. This invention has been found through experiments to achieve the optimal etching effect on the product surface when the etching temperature is maintained at 47°C and the etching time is 30 seconds, thereby improving the product quality.

[0057] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within the present invention.

Claims

1. A method for processing a silicon material exhaust fan based on high-pressure water jet technology, wherein the exhaust fan (6) processed by this method includes a cylindrical fan body (61), the fan body (61) having a convex mounting groove (62) extending inward from the top surface, and multiple exhaust grooves (63) arranged in a circular array around the axis of the fan body (61) on the top surface; characterized in that, The processing method includes the following steps: S1. The square silicon material is rough machined by mechanical milling to obtain a cylindrical silicon material that conforms to the size of the fan body (61). S2. Using a cutting tool, the cylindrical silicon material is hollowed out in the middle to obtain the exhaust fan (6) shape product; S3. Adjust the parameters of the high-pressure water jet equipment, such as the tool offset, taper compensation, sand feed, water outlet diameter, and distance between the water jet head and the product, and process the surface venting groove (63) on the product obtained in step S2. S4. Perform a full dimensional inspection on the products processed in step S3, specifically inspecting the dimensions of groove length, groove width, positional accuracy, and groove spacing. S5. Use ultrasonic cleaning equipment to remove water stains from the surface of the product after processing in step S4. S6. Use a mixed solution of hydrofluoric acid, nitric acid and acetic acid in a ratio of 3:7:8 to remove the oxides on the surface of the product in step S5.

2. The method for processing silicon material exhaust fans based on high-pressure water jet technology according to claim 1, characterized in that, In step S3, the distance between the waterjet cutter head and the product is 1mm to 5mm.

3. The method for processing silicon material exhaust fans based on high-pressure water jet technology according to claim 1, characterized in that, The sand feeding rate in step S3 is 0.308 g / min.

4. The method for processing silicon material exhaust fans based on high-pressure water jet technology according to claim 1, characterized in that, A protective fixture (1) is installed in the mounting groove (62) of the fan body (61) after processing in step S2. The protective fixture (1) is used to prevent the high-pressure water flow from puncturing the bottom of the fan body (61).

5. A method for processing silicon material exhaust fans based on high-pressure water jet technology according to claim 4, characterized in that, The protective fixture (1) includes multiple first fixture modules (11) and multiple second fixture modules (12). The multiple first fixture modules (11) and multiple second fixture modules (12) are spliced ​​together to form a ring. The first fixture module (11) and the second fixture module (12) each include a base plate (2) and a connecting plate (3) extending from both sides of the base plate (2).

6. A method for processing silicon material exhaust fans based on high-pressure water jet technology according to claim 5, characterized in that, The first fixture module (11) has a positioning ridge (4) on its connecting plate (3), and the second fixture module (12) has a positioning groove (5) that matches the positioning ridge (4) on its connecting plate (3).

7. A method for processing silicon material exhaust fans based on high-pressure water jet technology according to claim 4, characterized in that, The protective fixture (1) is made of high-speed steel.

8. A method for processing silicon material exhaust fans based on high-pressure water jet technology according to claim 1, characterized in that, The etching temperature in step S6 is 47°C and the etching time is 30 seconds.

9. A method for processing silicon material exhaust fans based on high-pressure water jet technology according to claim 1, characterized in that, It also includes step S7: to perform a full dimensional inspection on the product from step S6 again to check whether the final data of the product is qualified.

10. A method for processing silicon material exhaust fans based on high-pressure water jet technology according to claim 9, characterized in that, It also includes step S8: packaging the qualified products from step S7, thereby completing the entire processing.

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