A silicon material exhaust fan processing method based on high-pressure water jet technology
By combining high-pressure water jet technology and ultrasonic cleaning equipment, the problems of low processing efficiency and surface damage in multi-slot exhaust fans of silicon materials have been solved, achieving efficient and damage-free processing results and improving product quality and pass rate.
CN117506735BActive Publication Date: 2026-02-03HANGZHOU DUNYUANJUXIN SEMICON TECH CO LTD
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Patent Information
- Application Number
- CN202311409383.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-10-27
- Publication Date
- 2026-02-03
- Estimated Expiration
- 2043-10-27
AI Technical Summary
Technical Problem
In the existing technology, the processing efficiency of multi-slot exhaust fans made of silicon materials is low and it is easy to cause damage to the product surface, resulting in a low pass rate.
Method used
High-pressure water jet technology is used in combination with mechanical milling and ultrasonic cleaning equipment to process the exhaust groove of the exhaust fan through high-pressure water jet, and a specific solution is used to remove oxides, while protective fixtures are used to prevent surface damage.
Benefits of technology
It improves processing efficiency and product qualification rate, reduces surface damage, extends product life, and removes processing residues.
✦ Generated by Eureka AI based on patent content.
Abstract
The application discloses a kind of based on high-pressure water jet technology's silicon material exhaust fan processing method, this processing method includes the following steps: S1, using mechanical milling to the fan body of cylindrical silicon material is processed;S2, the middle hollow mounting groove of cylindrical silicon material is processed to obtain exhaust fan profile product;S3, surface exhaust groove processing is carried out to the product obtained in step S2;S4, the product processed in step S3 is carried out size full inspection;S5, using ultrasonic cleaning equipment to remove the water stain on the surface of the product processed in step S4;S6, remove the oxide on the surface of the product in step S5.The present application can shorten product processing time, reduce product surface damage, improve the processing efficiency and pass rate of product.
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