Rotating workpiece disc and method of controlling the same, vacuum apparatus

Abstract

The application relates to a rotating workpiece disc, a control method thereof and a vacuum equipment; the rotating workpiece disc comprises a rotating mechanism, a workpiece disc and a rotating shaft, the rotating mechanism is connected with the workpiece disc through the rotating shaft; a rotating mechanism is arranged on the rotating shaft and is located at an upper position of the workpiece disc; the rotating mechanism is connected with a guide component, the guide component extends along a diameter direction of the workpiece disc above the workpiece disc, a counterweight is arranged on the guide component; the rotating mechanism drives the guide component to rotate around an axis of the rotating shaft, so that the guide component rotates to a set angular position on a plane of the workpiece disc; the guide component pushes the counterweight to move along the diameter direction of the workpiece disc, so that the counterweight moves to a position with a set distance from the axis of the rotating shaft. According to the technical scheme, the automatic balancing of the feeding operation process is realized, the feeding operation work efficiency is improved, the balance of the rotating workpiece disc is ensured, the working stability of the vacuum equipment is enhanced, and the quality of workpiece coating or etching is improved.

Description

Technical Field

[0001] This application relates to the field of vacuum technology, and in particular to a rotating workpiece disk and its control method, and vacuum equipment. Background Technology

[0002] Vacuum equipment, such as vacuum coating equipment and vacuum etching equipment, is usually equipped with a rotating workpiece disk for loading and fixing the workpieces to be coated or etched. The rotating workpiece disk generally adopts a horizontal rotation method or a vertical rotation method. Its structure mainly includes a rotating mechanism, a workpiece disk and a rotating shaft. The rotating mechanism outputs power to rotate the workpiece disk. The rotating mechanism can be located inside or outside the vacuum chamber.

[0003] In vacuum equipment, the workpieces to be processed need to be manually installed onto the workpiece tray before use. In order to maintain overall balance, users often need to constantly adjust the position of each workpiece, which seriously reduces work efficiency and makes it difficult to ensure the balance of the rotating workpiece tray. In addition, when performing some more precise processing in vacuum equipment, the entire cavity needs a stable working environment. Since the rotating workpiece tray cannot be kept in overall balance, it is prone to vibration during rotation, which affects the working stability of the vacuum equipment and reduces the quality of workpiece coating or etching.

[0004] It is evident that conventional workpiece installation methods are inefficient and struggle to achieve overall balance, thus affecting the processing performance of vacuum equipment. Summary of the Invention

[0005] The purpose of this application is to address one of the aforementioned technical deficiencies by providing a rotating workpiece disk and its control method, as well as a vacuum device, thereby improving the efficiency of workpiece installation and the processing effect of the vacuum device.

[0006] A rotating workpiece disk, disposed in a vacuum device, includes a rotating mechanism, a workpiece disk, and a rotating shaft. The rotating mechanism is connected to the workpiece disk via the rotating shaft. A rotation mechanism is provided on the rotating shaft and is located at the upper part of the workpiece disk.

[0007] The rotating mechanism is connected to a guide component, which extends above the workpiece disk along the diameter direction of the workpiece disk and is provided with a counterweight.

[0008] The rotating mechanism drives the guide component to rotate around the axis of rotation, so that the guide component rotates to a set angular position relative to the workpiece disk plane;

[0009] The guide component pushes the counterweight block to move along the diameter direction of the workpiece disk, so that the counterweight block moves to a position at a set distance from the axis of rotation.

[0010] In one embodiment, the rotating mechanism includes a rotating base, a first gear, a second motor, and a second gear;

[0011] The first gear is fixed around the rotating shaft, the rotating base is connected to the guide component, and the second motor is fixed on the rotating base;

[0012] The second motor is connected to the second gear, and the second gear meshes with the first gear;

[0013] The second motor drives the second gear to rotate relative to the first gear, thereby driving the rotating seat to rotate about the axis of rotation.

[0014] In one embodiment, the guiding component includes a guide rail assembly and a sliding assembly; wherein the sliding assembly moves on the guide rail assembly, and the counterweight is disposed on the sliding assembly;

[0015] The sliding assembly has a built-in third motor and a connected third gear, and the guide rail assembly is provided with a rack, the third gear meshing with the rack;

[0016] The third motor drives the third gear to move on the rack, thereby driving the sliding assembly to move the counterweight to a set position.

[0017] In one embodiment, the rotating base is further connected to a balancing component at the position opposite to the guide component; wherein the shape and weight of the balancing component are consistent with the guide rail assembly.

[0018] In one embodiment, the rotating workpiece disk further includes a controller connected to the rotating mechanism, the turning mechanism, and the guide component respectively; wherein the controller is configured to detect the output power of the rotating mechanism and obtain an output power curve, and control the turning mechanism to rotate the guide component to a target angle and move the counterweight to a target position through the guide component according to the minimum power value of the output power curve.

[0019] In one embodiment, the rotating mechanism has a built-in first motor; wherein the first motor, the second motor, and the third motor are respectively connected to the controller.

[0020] A control method for a rotating workpiece disk, applied to the rotating workpiece disk, includes the following steps:

[0021] After the workpiece is installed on the workpiece tray, the counterweight is moved to the initial position by the guide component, and the workpiece tray is rotated by the rotating mechanism.

[0022] With the workpiece disk in a rotating state, the guide component is rotated and the guide component is rotated to the target angle according to the first output power of the rotating mechanism;

[0023] At the target angle, the counterweight is moved and moved to the target position according to the second output power of the rotating mechanism;

[0024] The vacuum equipment is activated to coat or etch the workpiece on the rotating workpiece disk.

[0025] In one embodiment, rotating the guide component and turning it to the target angle according to the first output power of the rotating mechanism while the workpiece disk is rotating includes:

[0026] The guide component is driven to rotate by a rotating mechanism, the first output power of the rotating mechanism is detected, and the first output power curve of the guide component rotating one revolution is generated.

[0027] The target angle of the guide component is determined based on the minimum value of the first output power curve, and the guide component is rotated to the target angle by a rotating mechanism.

[0028] The step of moving the counterweight at the target angle and moving it to the target position according to the second output power of the rotating mechanism includes:

[0029] At the target angle, the counterweight is moved through a full stroke by the guide component, the second output power of the rotating mechanism is detected, and a second output power curve of the counterweight moving through the full stroke is generated.

[0030] The target position of the counterweight is determined based on the minimum value of the second output power curve, and the counterweight is moved to the target position by the guide component.

[0031] In one embodiment, the control method for the rotating workpiece disk further includes:

[0032] During the coating or etching process in a vacuum device, the real-time output power change of the rotating mechanism is detected;

[0033] When the change value exceeds a set threshold, the counterweight is moved by the guide component until the change value is less than the set threshold.

[0034] A vacuum device for coating or etching workpieces, characterized in that it comprises: a vacuum chamber and a rotating workpiece disk; wherein the rotating workpiece disk is used to mount the workpiece to be processed.

[0035] As described in the above embodiments, a rotating mechanism and a counterweight are provided on the rotating shaft. The rotating mechanism drives the guide component to rotate around the axis of the rotating shaft to adjust the angle and position of the counterweight. The guide component adjusts the position of the counterweight along the diameter direction of the workpiece disk. This technical solution realizes automated balancing of the feeding operation, improves the efficiency of the feeding operation, ensures the balance of the rotating workpiece disk, enhances the working stability of the vacuum equipment, and improves the quality of workpiece coating or etching.

[0036] Furthermore, by configuring the controller to detect the output power of the rotating mechanism and obtain the output power curve, and controlling the rotating mechanism to rotate the guide component to the target angle and move the counterweight to the target position through the guide component according to the minimum power value of the output power curve, a low-cost and high-accuracy balancing process is achieved without adding equipment.

[0037] Furthermore, by rotating the workpiece disk after the workpiece is mounted before coating or etching, and by detecting the real-time output power of the first motor of the rotating mechanism, the output power curve is fitted. The minimum value of the output power curve is used to determine the optimal target angle and target position of the counterweight, and then the balancing process is automatically performed. This technical solution can reduce equipment costs and obtain accurate measurement results, thereby improving work efficiency and the coating or etching quality and effect of vacuum equipment.

[0038] Furthermore, by fine-tuning the counterweight during the coating or etching process in the vacuum equipment, the entire workpiece disk can be kept in an optimal balance state, thereby maintaining the balance of the entire vacuum equipment and improving the quality and effect of coating or etching.

[0039] Additional aspects and advantages of this application will be set forth in part in the description which follows, and will become apparent from the description or may be learned by practice of this application. Attached Figure Description

[0040] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the following description of the embodiments taken in conjunction with the accompanying drawings, wherein:

[0041] Figure 1 This is a schematic diagram of an example rotating workpiece disk;

[0042] Figure 2 This is a schematic diagram of a rotating workpiece disk structure according to one embodiment;

[0043] Figure 3 yes Figure 2 A schematic diagram of the AA direction;

[0044] Figure 4 This is a schematic diagram of a rotating mechanism according to one embodiment;

[0045] Figure 5 This is a schematic diagram of a guide component in one embodiment;

[0046] Figure 6 This is a schematic diagram of an example balanced component structure;

[0047] Figure 7 This is a schematic diagram of the control section of an example rotating workpiece disk;

[0048] Figure 8 This is a flowchart of a control method for a rotating workpiece disk according to one embodiment;

[0049] Figure 9 This is a schematic diagram of an example vacuum device.

[0050] Figure 10 This is an example electrical connection diagram for a vacuum device. Detailed Implementation

[0051] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0052] Those skilled in the art will understand that, unless otherwise stated, the singular forms “a,” “an,” “the,” and “the” used herein may also include the plural forms. It should be further understood that the word “comprising” as used in this application’s specification means the presence of the stated feature, integer, step, or operation, but does not preclude the presence or addition of one or more other features, integers, steps, or operations.

[0053] For the horizontally rotating workpiece disk 01 in the vacuum equipment 100, refer to Figure 1 As shown, Figure 1This is a schematic diagram of an example rotating workpiece disk. The rotating workpiece disk 01 shown in the figure is suspended, and the figure is a cross-sectional view. For example, the rotating workpiece disk 01 is located in a vacuum device 100 and includes a rotating mechanism 11, a workpiece disk 12, and a rotating shaft 13. The rotating mechanism 11 is connected to the workpiece disk 12 via the rotating shaft 13. The workpiece disk 12 can hold various workpieces to be processed. The vacuum chamber 101 also contains a coating device 02 or an etching device 03, an ion source 04, and other components. As shown in the figure, after each workpiece is mounted on the workpiece disk 12, its own weight can easily cause imbalance. Therefore, when mounting the workpieces, the user needs to adjust it to a balanced state as much as possible. In some high-requirement vacuum devices 100, when imbalance occurs during the coating or etching process, the workpiece disk 12 will vibrate during rotation, thus affecting the quality of the coating or etching.

[0054] Therefore, this embodiment designs a rotating workpiece disk 01, such as... Figure 2 As shown, Figure 2 This is a schematic diagram of a rotating workpiece disk structure according to an embodiment. The diagram is a cross-sectional view. A rotating mechanism 14 is provided on the rotating shaft 13, located at the upper part of the workpiece disk 12. The rotating mechanism 14 is connected to a guide component 15. The guide component 15 extends above the workpiece disk 12 along the diameter direction of the workpiece disk 12. A counterweight 16 is provided on the guide component 15.

[0055] like Figure 3 As shown, Figure 3 yes Figure 2 The diagram shows the AA direction, with the xy coordinate plane shown. The rotating mechanism 14 drives the guide component 15 to rotate around the axis of the rotating shaft 13, so that the guide component 15 rotates to a set angle position relative to the plane of the workpiece disk 12. The guide component 15 pushes the counterweight block 16 to move along the diameter direction of the workpiece disk 12, so that the counterweight block 16 moves to a position at a set distance from the axis of the rotating shaft 13, so as to counteract the offset of the weight of the workpiece disk 12, so that the workpiece disk 12 reaches balance during rotation.

[0056] In the above embodiment, after the workpiece is installed on the workpiece disk 12, if the workpiece is unbalanced due to uneven weight distribution, an additional downward gravity m is generated at a position p at an angle θ within a 360-degree range on the plane of the workpiece disk 12. To balance this additional gravity m, after the workpiece loading operation and before the formal coating or etching begins, the guide component 15 is rotated to a position at an angle θ+180° opposite to position p, and then the counterweight 16 is moved to a certain position to offset the additional gravity m. This achieves the final overall balance of the entire workpiece disk 12 during rotation, and then coating or etching is performed. This realizes the automated balancing of the loading operation, improves the efficiency of the loading operation, ensures the balance of the rotating workpiece disk, enhances the working stability of the vacuum equipment, and improves the quality of workpiece coating or etching.

[0057] For example, the counterweight 16 may include multiple counterweight pieces; preferably, the counterweight pieces may be designed as thin sheets and close to the upper surface of the workpiece disk 12, so that the overall center can be close to the workpiece disk 12, which is more conducive to balance. The number of counterweight pieces in the counterweight 16 can be increased or decreased according to actual needs, so that it can be applied to different workpieces of different weights to be processed.

[0058] In one embodiment, such as Figure 4 As shown, Figure 4 This is a schematic diagram of a rotating mechanism according to one embodiment. The rotating mechanism 14 may include a rotating base 141, a first gear 142, a second motor 143, and a second gear 144. The first gear 142 is fixed around the rotating shaft 13. The rotating base 141 is connected to a guide component 15. The second motor 143 is fixed to the rotating base 141. The second motor 143 is connected to the second gear 144, and the second gear 144 meshes with the first gear 142. The second motor 143 drives the second gear 144 to rotate relative to the first gear 142, thereby driving the rotating base 141 to rotate 360° around the axis of the rotating shaft 13, rotating the counterweight 16 to a set angular position, such as... Figure 3 The angular position is α = θ + 180°.

[0059] In the above embodiment, the rotation of the rotating seat is achieved through a simple structure. By controlling the rotation of the second motor, the guide component can be rotated 360°, thereby placing the counterweight at the optimal angle.

[0060] In one embodiment, such as Figure 5 As shown, Figure 5This is a schematic diagram of a guide component according to one embodiment. The guide component 15 may include a guide rail assembly 151 and a sliding assembly 152. The sliding assembly 152 moves on the guide rail assembly 151, and a counterweight 16 is disposed on the sliding assembly 152. The sliding assembly 152 has a built-in third motor 153 and a connected third gear 154. The guide rail assembly 151 has a rack 155, and the third gear 154 meshes with the rack 155. The third motor 153 drives the third gear 154 to move on the rack 155, thereby driving the sliding assembly 152 to move the counterweight 16 to a set position, such as... Figure 2 The position q is at the mid-distance rotation axis 13, with axis L as its axis.

[0061] In the above embodiment, the guide component moves the counterweight through a simple structure, and the counterweight can be positioned at the optimal location by controlling the rotation of the third motor.

[0062] In one embodiment, such as Figure 6 As shown, Figure 6 This is a schematic diagram of an example balancing component structure. The rotating seat is also connected to the balancing component 17 at the position opposite to the guide component 15. The shape and weight of the balancing component 17 are the same as those of the guide rail component. The main function of the balancing component 17 is to balance and lift the center of gravity of the guide component 15, so that the ballasted workpiece disk 12 can maintain balance in the horizontal direction, thereby improving the stability during rotation.

[0063] In one embodiment, such as Figure 7 As shown, Figure 7 This is a schematic diagram of the control section of an example rotating workpiece disk. The rotating mechanism 11, the rotating mechanism 14, and the guide component 15 can be controlled by the controller 18. For example, the controller 18 can be the industrial computer of the vacuum equipment 100, or it can be a separate controller 18. In this embodiment, the first motor 111 built into the rotating mechanism 11, the second motor 143 built into the rotating mechanism 14, and the third motor 153 of the guide component 15 are controlled by the controller 18.

[0064] During the balancing process of adjusting the counterweight 16, accurate measurement of its target angle and position is crucial. Conventional balancing techniques typically employ multiple sensors to measure the forces acting on the rotating shaft 13 in various directions. However, this increases equipment costs and makes it difficult to guarantee accuracy. Therefore, this embodiment provides a low-cost, high-accuracy balancing solution that eliminates the need for additional sensors. The controller 18 is configured to detect the output power of the rotating mechanism 11 and acquire its output power curve. Based on the minimum power value of the output power curve, the rotating mechanism 14 is controlled to rotate the guide component 15 to the target angle and move the counterweight 16 to the target position via the guide component 15.

[0065] Specifically, after the workpiece is installed on the workpiece disk 12, the counterweight 16 is moved to its initial position by the guide component 15, and the workpiece disk 12 is rotated by the rotating mechanism 11. While the workpiece disk 12 is rotating, the guide component 15 is driven to rotate by the rotating mechanism 14, which can be driven by the second motor 143. At the same time, the first output power of the first motor 111 of the rotating mechanism 11 is detected to generate a first output power curve for the guide component 15 rotating 360°, that is, the relationship curve between the rotation angle α and the output power P. The target angle of the guide component 15 is determined according to the minimum value of the first output power curve, and the guide component 15 is rotated by the rotating mechanism 14. The counterweight 16 is rotated to the target angle by the guide component 15; then, at the target angle, the counterweight 16 is moved through a full stroke by the guide component 15, which can be driven by the third motor 153; the second output power of the first motor 111 of the rotating mechanism 11 is continuously detected, and a second output power curve for the full stroke movement of the counterweight 16 is generated, that is, the relationship curve between distance L and output power P; the target position of the counterweight 16 is determined according to the minimum value of the second output power curve, and the counterweight 16 is moved to the target position by the guide component 15; the detailed process of this embodiment can be referred to the following embodiment of the control method of the rotating workpiece disk 01.

[0066] As described above, based on the rotating workpiece disk 01 provided in this application, a control method for the rotating workpiece disk 01 is also provided, see reference. Figure 8 As shown, Figure 8 This is a flowchart of a control method for a rotating workpiece disk according to an embodiment, which mainly includes the following steps:

[0067] Step S1: After the workpiece is installed on the workpiece disk, the counterweight is moved to the initial position by the guide component, and the workpiece disk is rotated by the rotating mechanism.

[0068] For example, the user mounts the workpiece to be coated or etched onto the workpiece disk 12. After the workpiece is mounted, the controller 18 drives the third motor 153 on the guide component 15 to move the counterweight 16 to the initial position, which may be a position close to the rotating shaft 13. Then the controller 18 controls the first motor 111 of the rotating mechanism 11 to start rotating the entire workpiece disk 12.

[0069] Step S2: With the workpiece disk in a rotating state, rotate the guide component and rotate the guide component to the target angle according to the first output power of the rotating mechanism.

[0070] Specifically, while the workpiece disk 12 is rotating, the output power of the first motor 111 of the rotating mechanism 11 is detected, and the guide component 15 is rotated to the target angle according to the first output power.

[0071] In one embodiment, step S2 may specifically include the following:

[0072] S201, the guide component is driven to rotate by the rotating mechanism, the first output power of the rotating mechanism is detected, and the first output power curve of the guide component rotating one revolution is generated.

[0073] Specifically, the controller 18 can control the second motor 143 of the rotating mechanism 14 to drive the guide component 15 to rotate, while simultaneously detecting the first output power of the first motor 111 in real time. After completing a 360° rotation, the controller can generate the first output power curve of the guide component 15 within a 360° rotation range through fitting, i.e., the relationship curve between the rotation angle α and the output power P.

[0074] S202, determine the target angle of the guide component based on the minimum value of the first output power curve, and rotate the guide component to the target angle through the rotation mechanism.

[0075] Since the first output power of the first motor 111 will be different under different torque conditions during the 360° rotation of the guide component 15, the torque is the minimum when the additional gravity generated is the minimum, and the first output power is also the minimum. At this time, the target angle of the guide component 15 can be determined according to the minimum value of the first output power curve, and then the guide component 15 is rotated to the target angle by the rotation mechanism 14.

[0076] Step S3: At the target angle, move the counterweight block and move it to the target position according to the second output power of the rotating mechanism.

[0077] Specifically, after the guide component 15 is rotated to the target angle, the counterweight 16 is moved along the stroke of the guide component 15, and the target position of the counterweight 16 is determined by detecting the second output power of the first motor 111 of the rotating mechanism 11 during the movement.

[0078] In one embodiment, step S3 may specifically include the following:

[0079] S301, at the target angle, the counterweight is moved through a full stroke by the guide component, the second output power of the rotating mechanism is detected, and the second output power curve of the counterweight moving through the full stroke is generated.

[0080] Specifically, when the counterweight 16 is at the target angle, the third motor of the guide component 15 is controlled by the controller 18 to move the counterweight 16 through a full stroke. At the same time, the second output power of the first motor 111 of the rotating mechanism 11 is detected in real time throughout the process. The second output power curve of the counterweight 16 during the full stroke movement can be generated by fitting, that is, the relationship curve between distance L and output power P.

[0081] S302, determine the target position of the counterweight based on the minimum value of the second output power curve, and move the counterweight to the target position using the guide component.

[0082] During a full stroke of the counterweight 16, the change in the position of the counterweight 16 will cause the center of gravity to shift. When the center of gravity position cancels out the position of the additional gravity m the most, the second output power is also the minimum. At this time, the target position of the counterweight 16 can be determined according to the minimum value of the second output power curve. Then, the third motor of the guide component 15 moves the counterweight 16 to the target position.

[0083] Step S4: Start the vacuum equipment to coat or etch the workpiece on the rotating workpiece disk.

[0084] Specifically, after completing the above-mentioned rotation to the target angle and movement to the target position, the entire workpiece disk 12 reaches an optimal equilibrium state. Then, the relevant components of the vacuum equipment 100 can be started and the process of coating or etching the workpiece on the rotating workpiece disk 01 can be initiated.

[0085] As described in the above embodiment, by rotating the workpiece disk 12 after the workpiece is mounted before coating or etching, the output power curve is fitted by detecting the real-time output power of the first motor 111 of the rotating mechanism 11. The minimum value of the output power curve is used to determine the optimal target angle and target position of the counterweight 16, and then the balancing process is automatically performed. By adopting this technical solution, the equipment cost can be reduced, and accurate measurement results can be obtained, thereby improving work efficiency and the coating or etching quality and effect of the vacuum equipment.

[0086] In one embodiment, considering that the overall balance of the workpiece disk 12 may change due to changes in workpiece weight or other factors during the coating or etching process, this embodiment also provides a balance fine-tuning scheme during coating or etching.

[0087] Based on this, the control method of the rotating workpiece disk in this embodiment can also detect the change value of the real-time output power of the rotating mechanism during the coating or etching process in the vacuum equipment; when the change value exceeds a set threshold, the counterweight is moved by the guide component until the change value is less than the set threshold.

[0088] Specifically, a threshold is preset, and the real-time output power change of the first motor 111 of the rotating mechanism 11 is detected in real time during the coating or etching process of the vacuum equipment 100. When the change value exceeds a certain set threshold, the controller 18 can control the third motor 153 of the guide component 15 to move the counterweight 16. Under normal circumstances, the counterweight 16 is moved away from the rotating axis 13 until the change value is less than the set threshold.

[0089] As described in the above embodiments, the counterweight can be finely adjusted during the coating or etching process in the vacuum equipment, thereby keeping the entire workpiece disk in an optimal balance state, thus maintaining the balance of the entire vacuum equipment and improving the quality and effect of coating or etching.

[0090] The following describes an embodiment of the vacuum equipment.

[0091] This application provides a vacuum device 100, with reference to... Figure 9 As shown, Figure 9 This is a schematic diagram of an example vacuum device structure. The vacuum device 100 of this application can be a vacuum coating device 02 or a vacuum etching device 03, including: a vacuum chamber 101, a coating device 02 or an etching device 03 built into the vacuum chamber 101, and a rotating workpiece disk 01 as described in the previous embodiment; in addition, it also includes an ion source 04 and an industrial control computer 05. Preferably, the industrial control computer 05 can realize the function of the controller 18; wherein, the rotating workpiece disk 01 is used to install the workpiece to be coated or etched, the coating device 02 can be used to coat the workpiece to be coated, and the etching device 03 can be used to etch the workpiece to be coated; the rotating workpiece disk 01 is suspended in the vacuum chamber 101, and in use, the rotating mechanism 11 rotates the workpiece disk 12 through the rotating shaft 13.

[0092] like Figure 10 middle, Figure 10 This is an example electrical connection diagram of a vacuum device, including an industrial computer 05, an ion source 04, and a coating / etching device 02; wherein, the industrial computer can be used as a controller 18 to control the first motor 111, the second motor 143 and the third motor 153, etc.; the vacuum device 100 can use the ion source 04 to assist in coating / etching, and before the coating / etching begins, it automatically performs balancing processing on the entire workpiece disk 12 by rotating the workpiece disk 01.

[0093] The vacuum equipment in this embodiment can reduce equipment costs and obtain accurate measurement results, thereby improving work efficiency and the coating or etching quality and effect of the vacuum equipment.

[0094] It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the same meaning as in the context of the prior art, and should not be interpreted in an idealized or overly formal sense unless specifically defined as herein.

[0095] The above description is only a partial embodiment of this application. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this application, and these improvements and modifications should also be considered within the scope of protection of this application.

Claims

1. A rotating workpiece disk, disposed in a vacuum device, comprising a rotating mechanism, a workpiece disk, and a rotating shaft, wherein the rotating mechanism is connected to the workpiece disk via the rotating shaft; characterized in that, A rotating mechanism is provided on the rotating shaft, and the rotating mechanism is located at the upper part of the workpiece disk; The rotating mechanism is connected to a guide component, which extends above the workpiece disk along the diameter direction of the workpiece disk and is provided with a counterweight. The rotating mechanism drives the guide component to rotate around the axis of rotation, so that the guide component rotates to a set angular position relative to the workpiece disk plane; The guide component pushes the counterweight block to move along the diameter direction of the workpiece disk, so that the counterweight block moves to a position at a set distance from the axis of rotation.

2. The rotating workpiece disk according to claim 1, characterized in that, The rotating mechanism includes a rotating base, a first gear, a second motor, and a second gear; The first gear is fixed around the rotating shaft, the rotating base is connected to the guide component, and the second motor is fixed on the rotating base; The second motor is connected to the second gear, and the second gear meshes with the first gear; The second motor drives the second gear to rotate relative to the first gear, thereby driving the rotating seat to rotate about the axis of rotation.

3. The rotating workpiece disk according to claim 2, characterized in that, The guiding component includes a guide rail assembly and a sliding assembly; wherein, the sliding assembly moves on the guide rail assembly, and the counterweight is disposed on the sliding assembly; The sliding assembly has a built-in third motor and a connected third gear, and the guide rail assembly is provided with a rack, the third gear meshing with the rack; The third motor drives the third gear to move on the rack, thereby driving the sliding assembly to move the counterweight to a set position.

4. The rotating workpiece disk according to claim 3, characterized in that, The rotating base is also connected to a balancing component at the opposite position of the guide component; wherein the shape and weight of the balancing component are the same as those of the guide rail component.

5. The rotating workpiece disk according to claim 4, characterized in that, Also includes: A controller is connected to the rotating mechanism, the turning mechanism, and the guide component respectively; wherein the controller is configured to detect the output power of the rotating mechanism and obtain the output power curve, and control the turning mechanism to rotate the guide component to the target angle and move the counterweight to the target position through the guide component according to the minimum power value of the output power curve.

6. The rotating workpiece disk according to claim 5, characterized in that, The rotating mechanism has a built-in first motor; wherein the first motor, the second motor and the third motor are respectively connected to the controller.

7. A method for controlling a rotating workpiece disk, characterized in that, The application of the rotating workpiece disk according to any one of claims 1 to 6 includes the following steps: After the workpiece is installed on the workpiece tray, the counterweight is moved to the initial position by the guide component, and the workpiece tray is rotated by the rotating mechanism. With the workpiece disk in a rotating state, rotating the guide component and turning the guide component to a target angle according to the first output power of the rotating mechanism includes: driving the guide component to rotate through the rotating mechanism, detecting the first output power of the rotating mechanism, and generating a first output power curve for one rotation of the guide component; determining the target angle of the guide component based on the minimum value of the first output power curve, and turning the guide component to the target angle through the rotating mechanism. At the target angle, moving the counterweight and moving it to the target position according to the second output power of the rotating mechanism includes: at the target angle, moving the counterweight through a guide component to complete one full stroke; detecting the second output power of the rotating mechanism and generating a second output power curve for the full stroke movement of the counterweight; determining the target position of the counterweight based on the minimum value of the second output power curve; and moving the counterweight to the target position through the guide component. The vacuum equipment is activated to coat or etch the workpiece on the rotating workpiece disk.

8. The control method for the rotating workpiece disk according to claim 7, characterized in that, Also includes: During the coating or etching process in a vacuum device, the real-time output power change of the rotating mechanism is detected; When the change value exceeds a set threshold, the counterweight is moved by the guide component until the change value is less than the set threshold.

9. A vacuum apparatus for coating or etching workpieces, characterized in that, include: A vacuum chamber, and a rotating workpiece disk according to any one of claims 1-6; wherein the rotating workpiece disk is used to mount the workpiece to be processed.

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