Material box positioning tooling and wafer detection device

Abstract

The present application relates to the field of wafer detection technology, and in particular to a material box positioning tool and a wafer detection device. The material box positioning tool includes a tooling platform, and a first positioning component and a second positioning component arranged on the tooling platform, the first positioning component is installed on the outside of the second positioning component; the first positioning component has a first supporting surface and a first clamping portion arranged at an angle, the second positioning component has a second supporting surface and a second clamping portion arranged at an angle, the first supporting surface and the second supporting surface are arranged on the same side of the thickness direction of the tooling platform and are not coplanar, the first clamping portion and part of the second clamping portion are arranged on the opposite sides of the thickness direction of the tooling platform, and the clamping end of the second clamping portion can pass through the tooling platform and extend to the same side of the second supporting surface. The material box positioning tool is easy to be compatible with different types of material boxes, so there is no need to set up corresponding positioning tooling for each type of material box separately, while simplifying the structure, reducing costs and operating procedures.

Description

Technical Field

[0001] The present application relates to the field of wafer detection technology, and in particular to a material box positioning tool and a wafer detection device. Background Art

[0002] To ensure that the wafers are not polluted by the external environment during transportation, each type of wafer is matched with a corresponding material box. During wafer inspection, the material box that holds the wafers needs to be positioned to ensure that the material box is stable and facilitates accurate placement of wafers.

[0003] Due to the variety of wafer models, there are also many corresponding material box models, and different types of material boxes are not universal. This means that each time different types of material boxes are positioned, it is necessary to match the corresponding positioning structure, and the positioning structures corresponding to different models are not compatible. Therefore, in the positioning process for different types of material boxes, not only is the operation process complicated and prone to interference, but the overall equipment cost is too high, making it difficult to popularize and practice. Summary of the invention

[0004] Based on this, it is necessary to provide a material box positioning tool that is not only compatible with different types of wafer material boxes, but also reduces operational interference and reduces costs.

[0005] A material box positioning tool comprises a tooling platform, and a first positioning component and a second positioning component arranged on the tooling platform, the first positioning component is installed on the outside of the second positioning component; the first positioning component has a first supporting surface and a first clamping portion arranged at an angle, the second positioning component has a second supporting surface and a second clamping portion arranged at an angle, the first supporting surface and the second supporting surface are arranged on the same side of the thickness direction of the tooling platform and are not coplanar, the first clamping portion and part of the second clamping portion are arranged on different sides of the thickness direction of the tooling platform, and the clamping end of the second clamping portion can pass through the tooling platform and extend to the same side of the second supporting surface.

[0006] It can be understood that the setting of the tooling platform is used to support the first positioning component and the second positioning component, and since the first positioning component is installed on the outside of the second positioning component, it is convenient for the first positioning component and the second positioning component to correspond to different types of material boxes respectively, and reduce positioning interference. In this process, the setting of the first support surface and the second support surface are both used to support the material box. Since the first support surface and the second support surface are both set on the same side, it is not necessary to adjust the material box positioning tooling to meet the support positioning of different types of material boxes; and since the first support surface and the second support surface are not coplanar, the support positions corresponding to different types of material boxes do not interfere. At the same time, the separation of the first clamping part and the second clamping part relative to the tooling platform along the thickness direction thereof not only avoids the assembly interference of the first clamping part and the second clamping part and the respective operation interference, but also avoids the assembly interference of the material box when positioning different types of material boxes.

[0007] In some embodiments, a height of the first supporting surface along the vertical direction is greater than a height of the second supporting surface along the vertical direction.

[0008] In some embodiments, a height of the clamping end of the second clamping portion is not greater than a height of the first supporting surface.

[0009] In some embodiments, the tooling platform includes a first platform and a second platform, and the second platform is movably connected to the inner side of the first platform; wherein the first clamping portion is installed on the first platform; the second supporting surface is formed on the surface of the second platform, and the second clamping portion is installed on the second platform.

[0010] In some embodiments, the first positioning assembly includes at least one pair of clamping seats, the two clamping seats in each pair are arranged opposite to each other and spaced apart along a first direction, each of the clamping seats includes a supporting portion and the first clamping portion arranged at an angle, the first clamping portion in each pair is located on the opposite side of the corresponding supporting portion, and a side wall of the supporting portion facing away from the first platform forms the first supporting surface.

[0011] In some embodiments, the first positioning assembly includes at least two pairs of the clamping seats arranged at intervals along the second direction, among the at least two pairs of the clamping seats, one pair of the clamping seats serves as positioning clamping seats, and the remaining clamping seats serve as auxiliary clamping seats; wherein each of the positioning clamping seats also includes a first limiting portion, the first limiting portion is connected to the supporting portion and the first clamping portion, and the three are arranged at an angle in pairs, and the first limiting portion is located on the side of the corresponding supporting portion away from the auxiliary clamping seat on the same side.

[0012] In some embodiments, the second positioning assembly includes a positioning base arranged on the second supporting surface, and the positioning base has a plurality of second limiting portions arranged in sequence along the second direction; among the plurality of second limiting portions, the limiting dimensions of the second limiting portions along the first direction decrease in sequence in the second direction, and the first direction is arranged at an angle to the second direction; wherein the plurality of second limiting portions can selectively define a second positioning space together with the second clamping portion and the second supporting surface.

[0013] In some embodiments, among the plurality of second limiting portions, the limiting dimensions of the second limiting portions along the first direction show a trend of stepwise reduction in the second direction.

[0014] In some embodiments, the positioning base is constructed with an adjustment long hole, and the positioning base can move relative to the tooling platform along the length direction of the adjustment long hole; the second positioning assembly also includes a fastener, which is used to pass through the adjustment long hole to lock the positioning base to the tooling platform.

[0015] In some embodiments, multiple groups of the first positioning components are provided, and the multiple groups of the first positioning components are arranged to avoid each other; in each group of the first positioning components, the first supporting surface and the first clamping portion jointly define a first positioning space, the projection area of ​​each first positioning space along the vertical direction at least partially overlaps, and are arranged in sequence from small to large and from inside to outside, and the second positioning components are arranged to avoid the first positioning space.

[0016] In some embodiments, a height of the first positioning component near the interior is smaller than a height of the first positioning component near the exterior.

[0017] In some embodiments, the first clamping portion and the first supporting surface are arranged on the same side of the tooling platform, and the driving end of the second clamping portion and the second supporting surface are arranged on different sides of the tooling platform; the tooling platform is constructed with a through hole penetrating along its own thickness direction, and the clamping end of the second clamping portion extends through the through hole to the same side of the second supporting surface.

[0018] In some embodiments, the second clamping portion includes at least two clamping arms that are arranged opposite to each other and at intervals, and each of the clamping arms is connected to at least one clamping column; wherein the clamping arms are arranged on the opposite side of the tooling platform relative to the second supporting surface, and a portion of the clamping column extends through the through hole to one side of the first supporting surface and is defined as the clamping end.

[0019] In some embodiments, the tooling platform includes a first platform, a second platform and a material picking positioning assembly, the second platform is slidably connected to the first platform, and the material picking positioning assembly is connected between the first platform and the second platform; the material picking positioning assembly includes a positioning pin and a positioning plate, the positioning plate is connected to the second platform and is configured with a second positioning hole, the first platform is configured with a plurality of first positioning holes arranged at intervals along the conveying direction of the material box, the positioning pin is used to pass through the second positioning hole and selectively plug and lock with one of the plurality of first positioning holes; the material picking positioning assembly also includes a plurality of positioning sensors arranged at intervals along the conveying direction of the material box, a plurality of the positioning sensors are installed on the first platform and correspond one-to-one to the plurality of the first positioning holes, and each of the positioning sensors is configured to be triggered in response to the movement of the positioning pin; the first positioning assembly is installed on the first platform, and the second positioning assembly is installed on the second platform.

[0020] In some embodiments, the first positioning assembly includes at least one pair of clamping seats, and the two clamping seats in each pair are arranged opposite to each other and spaced apart in a first direction; wherein each of the clamping seats includes a fixture block, and the first supporting surface and the first clamping portion are both formed on the fixture block, and each of the fixture blocks can move relative to the tooling platform along the first direction and / or the second direction; each of the clamping seats also includes a locking member, and the locking member is used to lock the fixture block relative to the tooling platform.

[0021] In some embodiments, each of the clamping seats also includes an adjustment block; the adjustment block is installed on the tooling platform, and the adjustment block is constructed with a first waist-shaped hole with a length along the first direction, the clamp block is protrudingly provided with a first guide protrusion, the first guide protrusion is inserted into the corresponding first waist-shaped hole, and can move in the first waist-shaped hole; and / or, the tooling platform is constructed with a second waist-shaped hole with a length along the second direction at a position corresponding to some of the clamping seats, the adjustment block is protrudingly provided with a second guide protrusion, the second guide protrusion is inserted into the corresponding second waist-shaped hole, and can move in the second waist-shaped hole.

[0022] In some embodiments, the material box positioning tooling also includes multiple groups of first detection components, each group of the first detection components is installed on the tooling platform and is adapted to the installation positions of the first positioning components and the second positioning components, and the first detection components are used to detect the size and / or type of the material; the material box positioning tooling includes an offset detection component, and the offset detection component is installed on at least one side of the tooling platform along the second direction, and the offset detection component is used to detect the material position.

[0023] The present application also provides a wafer inspection device, which includes the above-mentioned material box positioning tool, and the material box positioning tool is used to position the wafer material box. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the conventional technology, the drawings required for use in the embodiments or the conventional technology descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0025] Figure 1 A first schematic diagram of the material box positioning tooling provided in this application;

[0026] Figure 2 A second schematic diagram of the material box positioning tool provided in this application;

[0027] Figure 3 A first partial schematic diagram of the material box positioning tooling provided in the present application;

[0028] Figure 4 A second partial schematic diagram of the material box positioning tooling provided in this application;

[0029] Figure 5 A partial side view of the material box positioning tool provided in this application;

[0030] Figure 6 for Figure 4 A partial enlarged view of the middle A;

[0031] Figure 7 for Figure 4 A partial enlarged view of point B in the middle;

[0032] Figure 8 for Figure 4 A partial enlarged view of point C in the middle;

[0033] Fig. 9 A schematic diagram of the second clamping portion in the material box positioning tool provided in the present application;

[0034] Fig.10 for Figure 1 A first partial cross-sectional view of a clamping seat and a tooling platform in a provided material box positioning tooling;

[0035] Fig.11 for Figure 1 A second partial cross-sectional view of the clamping seat and the tooling platform in the provided material box positioning tooling;

[0036] Fig.12 for Figure 1 A third partial cross-sectional view of the clamping seat and the tooling platform in the provided material box positioning tooling;

[0037] Fig.13 for Figure 1 A first partial cross-sectional view of a first detection component and a tooling platform in a provided material box positioning tooling;

[0038] Fig.14 for Figure 1 A second partial cross-sectional view of the first detection component and the tooling platform in the provided material box positioning tooling;

[0039] Fig.15 for Figure 1 A third partial cross-sectional view of the first detection component and the tooling platform in the provided material box positioning tooling;

[0040] Fig.16 for Figure 1 A cross-sectional view of the second detection component and the support block in the provided magazine positioning tooling;

[0041] Fig.17 A schematic diagram of the cooperation between the material box positioning tooling provided in this application and the A-type material box;

[0042] Fig.18 for Fig.17 A cross-sectional view of the provided magazine positioning fixture and the A-type magazine;

[0043] Fig.19 This is a schematic diagram of the cooperation between the material box positioning tooling provided in this application and the B-type material box.

[0044] Reference numerals: 100, material box positioning tool; 210, A-type material box; 230, first bottom plate; 240, second bottom plate; 220, B-type material box; 10, tooling platform; 101, second assembly cavity; 11, first platform; 111, first assembly cavity; 1111, first limiting end surface; 1110, second waist-shaped hole; 1112, sink; 112, assembly notch; 113, first positioning hole; 12, second platform; 1201, penetration hole; 1202, second support surface; 13, material picking positioning assembly; 131, positioning pin; 132, positioning plate; 1321, second positioning hole; 133, positioning sensor; 134, protective plate; 1341, viewing window; 14, positioning member; 15, guide rail; 16, slider; 20, first positioning assembly; 21, clamping seat; 21a, positioning clamping seat; 21b, auxiliary clamping seat; 211, fixture block; 2111, first guide protrusion; 212, adjustment block; 2120, first waist hole; 2121, second guide protrusion; 2122, first limiting boss; 213, locking block; 2130, third Waist-shaped hole; 214, fixing block; 2141, second limiting boss; 215, sealing cover plate; 2101, first supporting surface; 2102, first clamping part; 2103, first limiting part; 30, second positioning assembly; 31, positioning base; 3101, adjusting long hole; 311, second limiting part; 3111, sub-step; 32, second clamping part; 34, third limiting part; 341, limiting convex; 321, clamping arm; 322, clamping column; 323, power source; 33, support block; 3301, third assembly cavity; 4 1. First detection component; 42. Second detection component; 401. Transmission member; 402. First sensor; 403. Elastic member; 404. Detection sealing plate; 405. Axial sleeve; 50. Offset detection component; 51. Mounting substrate; 51a. Upper mounting substrate; 51b. Lower mounting substrate; 52. Second sensor; 521. Transmitter; 522. Receiving end; 53. Adjustment column; 53a. First adjustment column; 53b. Second adjustment column; 53c. Third adjustment column; 53d. Fourth adjustment column; 5101. Counter-shooting hole. DETAILED DESCRIPTION

[0045] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0046] It should be noted that when a component is referred to as being "fixed to" or "disposed on" another component, it may be directly on the other component or there may also be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of this application are for illustrative purposes only and do not represent the only implementation method.

[0047] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0048] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first feature is directly in contact with the second feature, or the first feature and the second feature are indirectly in contact through an intermediate medium. Moreover, a first feature being “above”, “above” or “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below” or “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0049] Unless otherwise defined, all technical and scientific terms used in the specification of this application have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in the specification of this application includes any and all combinations of one or more related listed items.

[0050] The embodiment of the present application provides a wafer inspection device (not shown), which specifically includes a wafer material box (hereinafter referred to as the material box), a material box positioning tool 100, a manipulator and a detection module. Among them, the material box positioning tool 100 is used to position the wafer material box, the manipulator is used to transfer the wafer between the wafer material box and the detection module, and the detection module is used to perform appearance defect detection, electrical performance detection, surface profile detection or size measurement on the wafer.

[0051] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Fig.17 and Fig.19As shown, an embodiment of the present application provides the above-mentioned material box positioning tool 100, including a tooling platform 10, and a first positioning assembly 20 and a second positioning assembly 30 arranged on the tooling platform 10, and the first positioning assembly 20 is installed on the outside of the second positioning assembly 30. The first positioning assembly 20 has a first supporting surface 2101 and a first clamping portion 2102 arranged at an angle, and the second positioning assembly 30 has a second supporting surface 1202 and a second clamping portion 32 arranged at an angle, the first supporting surface 2101 and the second supporting surface 1202 are arranged on the same side of the thickness direction of the tooling platform 10 and are not coplanar, the first clamping portion 2102 and the second clamping portion 32 are arranged on different sides of the thickness direction of the tooling platform 10, and the clamping end of the second clamping portion 32 can pass through the tooling platform 10 and extend to the same side of the second supporting surface 1202.

[0052] It can be understood that the setting of the tooling platform 10 is not only used to support the first positioning component 20 and the second positioning component 30 to ensure stability, but also to integrate the first positioning component 20 and the second positioning component 30. Since the first positioning component 20 is installed on the outside of the second positioning component 30, the first positioning component 20 and the second positioning component 30 respectively correspond to different types of material boxes for support and positioning. For example, the first positioning component 20 located on the outside is used to position the A-type material box 210, and the A-type material box 210 can choose a frame wafer material box. The second positioning component 30 located on the inside is used to position the B-type material box 220, and the B-type material box 220 can choose a whole wafer material box. In this way, the positioning operation of different types of material boxes can be realized; and, such a setting makes it possible that there is no cross problem in the positioning parts of the two, reducing the interference between the two when they are used.

[0053] Among them, the first support surface 2101 and the second support surface 1202 are both used to support the material box. Since the first support surface 2101 and the second support surface 1202 are both arranged on the same side, it is not necessary to adjust the material box positioning tool 100 to meet the support positioning of different types of material boxes; and, since the first support surface 2101 and the second support surface 1202 are not arranged in the same plane, the support positions corresponding to different types of material boxes do not interfere. At the same time, the first clamping part 2102 and the second clamping part 32 are arranged relative to the tooling platform 10 along its thickness direction, which not only avoids the assembly interference of the first clamping part 2102 and the second clamping part 32, but also avoids the assembly interference of the material box when positioning different types of material boxes. In this process, the clamping end of the second clamping part 32 can pass through the tooling platform 10 along the thickness direction of the tooling platform 10, so that the clamping end extends to the same side of the second support surface 1202, and cooperates with it to perform the positioning operation of the B-type material box 220.

[0054] Among them, the A-type box 210 is a larger frame wafer box, which is used to store large-sized wafers, and in the A-type box 210, its size has a variety of different sizes from large to small. The B-type box 220 is a smaller whole wafer box, which is significantly different from the A-type box 210. It is used to store small-sized wafers and also has different sizes from large to small. In the related art, due to the obvious size difference between the A-type box 210 and the B-type box 220, the A-type box 210 often corresponds to one tooling and the B-type box 220 corresponds to another tooling, and the two toolings are not compatible. This results in a wafer detection device that requires at least two tooling systems. When one of the tooling systems is in use, the other tooling system needs to be removed or offset. In this way, not only are the operating procedures complicated and prone to interference, but the overall equipment cost is too high, which is not convenient for popularization and practical use.

[0055] In view of this, the material box positioning tool 100 provided in this embodiment utilizes the tooling platform 10 to integrate the first positioning component 20 and the second positioning component 30, and utilizes the arrangement position relationship between each group of positioning components and the setting mode of the corresponding support surface and clamping part, that is: the two support surfaces are on the same side and not coplanar, and the two clamping parts are set on different sides. In this way, it is convenient to be compatible with material boxes of different models, especially the positioning of type A material box 210 and type B material box 220, and there is no need to set up corresponding positioning tooling for each type of material box separately, which simplifies the structure while reducing costs and operating procedures.

[0056] It is worth noting that the term "suitable for different types of material boxes" here means that the material box positioning tool 100 can meet the clamping and positioning requirements of different types of material boxes, not that it can simultaneously position different types of material boxes. The material box positioning tool 100 supports and clamps one type of material box at a time, and different types of material boxes need to be positioned in batches.

[0057] like Figure 1 , Figure 4 , Figure 5 and Figure 6 As shown, illustratively, the height of the first support surface 2101 along the vertical direction is greater than the height of the second support surface 1202 along the vertical direction. The thickness direction of the tooling platform 10 is the same as the vertical direction, so the height of the first support surface 2101 along the vertical direction is the distance between the first support surface 2101 and the upper surface of the tooling platform 10, which can also be understood as the length of the vertical line between the two surfaces. The height of the second support surface 1202 is similar.

[0058] Since the first positioning assembly 20 is installed on the outside of the second positioning assembly 30, that is, the positioning size of the first positioning assembly 20 is larger than the positioning size of the second positioning assembly 30, so that the first positioning assembly 20 corresponds to the A-type material box 210, and the second positioning assembly 30 corresponds to the B-type material box 220. At this time, if the height of the second support surface 1202 is larger than the size of the first support surface 2101, when the A-type material box 210 is positioned, the second support surface 1202 located on the inner side will lift the A-type material box 210, or touch the wafer in the A-type material box 210, thereby causing interference. Therefore, the height of the first support surface 2101 needs to be larger than the height of the second support surface 1202, so as to avoid support interference as much as possible and improve the safety of use.

[0059] In actual use, the first clamping portion 2102 and the first supporting surface 2101 are arranged on the same side of the tooling platform 10, and the driving end of the second clamping portion 32 and the second supporting surface 1202 are arranged on different sides of the tooling platform 10. The clamping end of the second clamping portion 32 passes through the tooling platform 10 and extends to the same side of the second supporting surface 1202, and the height of the clamping end of the second clamping portion 32 is not greater than the height of the first supporting surface 2101.

[0060] Such a setting further reduces the support and positioning interference between the first positioning assembly 20 and the second positioning assembly 30. The height of the clamping end of the second clamping portion 32 refers to the height of the plane where the clamping end is located at the highest point in the vertical direction from the upper surface of the tooling platform 10. Therefore, such a setting avoids the interference caused by the second clamping portion 32 contacting the A-type material box 210. At the same time, the driving end of the second clamping portion 32 is set on the opposite side, which can avoid the first clamping portion 2102 and the first supporting surface 2101, further reducing the interference between the second clamping portion 32 and the A-type material box 210.

[0061] like Figures 1 to 4 As shown, in an optional embodiment, the tooling platform 10 includes a first platform 11 and a second platform 12, and the second platform 12 is movably connected to the inner side of the first platform 11. Among them, the first clamping portion 2102 is installed on the first platform 11, the second clamping portion 32 is installed on the second platform 12, and the second support surface 1202 is formed on the surface of the second platform 12. It can be understood that by respectively setting corresponding platforms and matching positions for the first positioning component 20 and the second positioning component 30, the first positioning component 20 is relatively surrounded by the second positioning component 30; and, due to the relative movement of the second platform 12 to the first platform 11, it is convenient to adjust the position of the second platform 12, and further reduce the interference of the first positioning component 20 and the second positioning component 30 when positioning the corresponding material box. Among them, since the upper surface of the second platform 12 can be used as the second support surface 1202, there is no need to specially set a structure for supporting the B-type material box 220, which simplifies the structure.

[0062] Furthermore, the first platform 11 is U-shaped to be configured with an assembly notch 112 for accommodating the second platform 12. The second platform 12 is slidably connected to the first platform 11, so that the second platform 12 can be moved into or out of the assembly notch 112. A guide rail 15 is connected to the side of the first platform 11 away from the first support surface 2101, and a slider 16 is connected to the side of the second platform 12 away from the second support surface 1202, so that the movement of the second platform 12 is realized by the cooperation between the slider 16 and the guide rail 15.

[0063] In some embodiments, the clamping end of the second clamping portion 32 may extend to the same side of the second supporting surface 1202 through the assembly notch 112 to facilitate clamping and positioning of the B-type material box 220 .

[0064] like Figure 3 As shown, further, a material picking positioning component 13 is connected between the first platform 11 and the second platform 12, and the material picking positioning component 13 is used to limit the position of the second platform 12 relative to the first platform 11 to ensure that the second platform 12 moves into place; and, the setting of the material picking positioning component 13 can also be used to determine whether the second platform 12 has reached a predetermined position, and can be used to detect the current position of the second platform 12, thereby corresponding to the model of the material box placed on the second platform 12.

[0065] Specifically, the material picking positioning assembly 13 includes a positioning pin 131 and a positioning plate 132. The positioning plate 132 is connected to the second platform 12 and is configured with a second positioning hole 1321. The first platform 11 is configured with a plurality of first positioning holes 113 arranged at intervals along the material box conveying direction. The positioning plate 132 can move synchronously with the second platform 12. The positioning pin 131 is used to pass through the second positioning hole 1321 and selectively plug and lock with one of the plurality of first positioning holes 113. In this way, the second platform 12 can be locked in place relative to the first platform 11. In this process, it is precisely because the first positioning hole 113 and the second positioning hole 1321 need to be aligned and matched that the positioning pin 131 can pass through. Therefore, even if the positioning plate 132 moves out of position, the positioning pin 131 can be used for correction to ensure that the second platform 12 is accurately positioned.

[0066] Please combine Figure 2 and Figure 3As shown, in actual use, the material picking and positioning assembly 13 also includes a plurality of positioning sensors 133 arranged at intervals along the material box conveying direction, and the plurality of positioning sensors 133 are installed on the first platform 11 and correspond to the plurality of first positioning holes 113 one by one. When the positioning pin 131 is inserted into one of the first positioning holes 113, the corresponding positioning sensor 133 can be triggered. Through such a setting, not only the positioning operation of the second platform 12 relative to the first platform 11 is satisfied, but also the corresponding positioning sensor 133 can be used to identify the current position of the second platform 12, and then determine whether the predetermined position is reached. Among them, when the size of the material box placed on the second platform 12 is different, the positioning position of the second platform 12 compared with the first platform 11 will also be different; therefore, by using the cooperation of the positioning sensor 133 and the positioning pin 131, the material box currently placed on the second platform 12 can also be correspondingly identified, so as to facilitate the movement of the robot to carry out wafer handling. Among them, each first positioning hole 113 and the corresponding positioning sensor 133 can correspond to the size of one of the B-type material boxes 220.

[0067] Furthermore, the material taking and positioning assembly 13 also includes a protective plate 134 connected to the second platform 12, and the protective plate 134 is configured with a third positioning hole for the positioning pin 131 to pass through. The protective plate 134 is covered on the top of the positioning plate 132 and covers the first platform 11, and the protective plate 134 moves synchronously with the second platform 12. The protective plate 134 is also configured with a viewing window 1341 arranged at intervals with the third positioning hole along the Y-axis direction, so that the in-position mark located on the first platform 11 can be observed through the viewing window 1341. Each first positioning hole 113 corresponds to an in-position mark.

[0068] It is worth noting that, with respect to the tooling platform 10, one side of the tooling platform 10 along the material box conveying direction is the starting feeding side, and the other side is the ending positioning side. The starting feeding side is the side where the material box is fed in for support and positioning, and the ending positioning side is the side where the material box is moved into position. Therefore, both the first platform 11 and the second platform 12 have a starting feeding side and an ending positioning side, and the two are used for the same direction of material box conveying.

[0069] like Figure 3 As shown, in an optional embodiment, a positioning member 14 is further provided on the tooling platform 10 at the starting feeding side, and two positioning members 14 are arranged opposite and spaced apart along the Y-axis direction to facilitate limiting the position of the material box along the conveying direction of the material box, thereby facilitating the robot arm to pick up the wafers in the material box.

[0070] The first positioning assembly 20 and the second positioning assembly 30 are described below.

[0071] like Figure 1 , Figure 3 , Figure 4 , Figure 6 and Figure 7 As shown, in an optional embodiment, the first positioning assembly 20 includes at least one pair of clamping seats 21, and the two clamping seats 21 in each pair are arranged oppositely and spaced along the first direction. Each clamping seat 21 includes a support portion and a first clamping portion 2102, and the support portion and the first clamping portion 2102 are arranged at an angle. The first clamping portion 2102 in each pair is located on the opposite side of the corresponding support portion, and a side wall of the support portion away from the first platform 11 forms a first support surface 2101. The first direction is arranged at an angle to the material box conveying direction.

[0072] It should be noted in advance that the vertical direction is the Z-axis direction, the conveying direction of the material box is the X-axis direction, and the first direction is the Y-axis direction.

[0073] That is to say, at least one pair of clamping seats 21 is provided so as to clamp the material box from two opposite sides along the Y-axis direction. At the same time, since each clamping seat 21 includes a support portion and a first clamping portion 2102, the first support surface 2101 is provided on the support portion, and the first clamping portion 2102 is used to clamp the side wall of the material box. In this way, each pair of clamping seats 21 can not only meet the needs of clamping the material box, but also meet the needs of supporting the material box, so as to achieve multiple uses of one object, and there is no need to set up a structure specifically for supporting the material box, which further simplifies the structure and reduces costs. In addition, it is precisely because of the provision of the support portion that the first support surface 2101 can be raised compared to the second support surface 1202 to meet the need of reducing interference.

[0074] like Figure 1 , Figure 3 , Figure 4 , Figure 6 and Figure 7 As shown, in some specific embodiments, the first positioning assembly 20 includes at least two pairs of clamping seats 21 arranged at intervals along the second direction, wherein the second direction is arranged at an angle to the first direction, i.e., the conveying direction of the material box. Among the at least two pairs of clamping seats 21, one pair of clamping seats 21 is used as a positioning clamping seat 21a, and the remaining clamping seats 21 are used as auxiliary clamping seats 21b. In actual use, the positioning clamping seat 21a is located on the termination positioning side of the tooling platform 10, and while satisfying the support and clamping of the material box, it also plays a role in limiting the movement of the material box. Specifically, each positioning clamping seat 21a also includes a first limiting portion 2103, the first limiting portion 2103 is connected to the support portion and the first clamping portion 2102, and the three are arranged at an angle in pairs, the first limiting portion 2103 is located on the side of the corresponding support portion away from the auxiliary clamping seat 21b on the same side, and the first limiting portion 2103 can abut against the side wall of the material box along the conveying direction to meet the limit of the movement of the material box. The auxiliary clamping seats 21b are arranged at intervals from the positioning clamping seat 21a along the material box input direction.

[0075] like Figure 1 , Figure 3and Figure 4 As shown, in an optional embodiment, a plurality of first positioning assemblies 20 are provided, and the plurality of first positioning assemblies 20 are arranged away from the first platform 11. In each group of first positioning assemblies 20, the first support surface 2101 and the first clamping portion 2102 jointly define a first positioning space, and the projection area of ​​each first positioning space along the vertical direction at least partially overlaps, and is arranged in sequence from small to large and from inside to outside. The second positioning assembly 30 is arranged away from each first positioning space.

[0076] It is understandable that each group of first positioning components 20 corresponds to a first positioning space, and the range of each first positioning space is different. Therefore, the setting of multiple groups of first positioning components 20 can be used to be compatible with the support and positioning of multiple A-type material boxes 210 of different sizes, thereby improving applicability. At the same time, at least partial overlap of first positioning spaces of different sizes reduces the occupied space along the X-axis direction; and, since the first positioning spaces of different sizes are arranged in sequence from small to large and from inside to outside, the occupied space along the Y-axis direction can also be reduced. In this way, the material box positioning tool 100 reduces the occupied space of the entire material box positioning tool 100 while meeting the support and fixation of A-type material boxes 210 of different sizes, and is more suitable for integrated assembly with the second positioning component 30.

[0077] Among them, the starting feeding side and the ending positioning side are respectively located on both sides of the first positioning space along the X-axis direction, the starting feeding side is one end of the A-type material box 210 being fed into the first positioning space, and the ending positioning side is the side where the A-type material box 210 is moved into position relative to the first positioning space. Because the ending positioning side and the starting feeding side of the first positioning space of each size are arranged from small to large along the X-axis direction, and the starting feeding side of the small-sized first positioning space is located on the outside of the starting feeding side of the large-sized first positioning space. In this way, the projection areas of positioning spaces of different sizes can be partially overlapped. Of course, it is also possible that the starting feeding side of the small-sized first positioning space is located on the inner side of the starting feeding side of the large-sized first positioning space, then the projection area of ​​the small-sized first positioning space is completely located within the projection area of ​​the large-sized first positioning space, that is, the projection areas of the first positioning spaces of different sizes are completely overlapped.

[0078] like Figure 1 , Figure 3 and Figure 4 As shown, in some specific embodiments, each group of first positioning components 20 includes two pairs of clamping seats 21, one pair of which is a positioning clamping seat 21a, located at the end positioning side of the corresponding positioning space, and the other pair is an auxiliary clamping seat 21b, which is arranged with the positioning clamping seat 21a along the X-axis direction. In this way, each first positioning space is defined by four clamping seats 21, so as to support and clamp the A-type material box 210 at four points to ensure the clamping stability.

[0079] Please combine Figure 4 and Figure 5 , illustratively, the height of the first positioning assembly 20 near the inside is less than the height of the first positioning assembly 20 near the outside. Since the first positioning assembly 20 near the inside corresponds to the smaller-sized A-type material box 210, and the first positioning assembly 20 near the outside corresponds to the larger-sized A-type material box 210. Therefore, such a setting can avoid the interference between the A-type material box 210 and the first positioning assembly 20 inside when clamping the larger-sized A-type material box 210, thereby improving the stability of supporting and clamping the A-type material boxes 210 of different sizes.

[0080] Specifically, the height of the clamping seat 21 corresponding to the first positioning assembly 20 near the inside is less than the height of the clamping seat 21 corresponding to the first positioning assembly 20 near the outside. Since each clamping seat 21 has a support portion and a first clamping portion 2102, the bottom edge of the A-type material box 210 can be placed on the support portion, and its side wall is clamped by the first clamping portion 2102. The height of the first clamping portion 2102 relative to the support portion in the vertical direction determines the size of the contact area with the side wall of the A-type material box 210. Therefore, the height of the clamping seat 21 mentioned here includes not only the height of the first supporting surface 2101 from the first platform 11, but also the height of the top of the first clamping portion 2102 from the first platform 11, that is, the height of the first positioning assembly 20.

[0081] like Figure 5 As shown, in some specific embodiments, taking two sets of first positioning components 20 as an example, for the first positioning components 20 close to the inside, the first distance between its support portion and the first platform 11 is h1, and the second distance between the first clamping portion 2102 and the first platform 11 is h2; for the first positioning components 20 close to the outside, the third distance between its support portion and the first platform 11 is h3, and the fourth distance between the first clamping portion 2102 and the first platform 11 is h4. Then, h1<h2, h3<h4, and h2<h3.

[0082] It is worth noting that the above-mentioned close to the inside and close to the outside refer to the relative positions of any two adjacent groups of first positioning components 20. Since the first positioning spaces defined by each group of first positioning components 20 are arranged from small to large and from inside to outside, the first positioning spaces corresponding to any two adjacent groups of first positioning components 20 are bound to have different sizes.

[0083] like Figure 1 , Figure 3 , Figure 4 and Figure 8As shown, in an optional embodiment, the second positioning assembly 30 includes a positioning base 31 disposed on the second supporting surface 1202, and the positioning base 31 has a plurality of second limiting portions 311 sequentially disposed along the X-axis direction. Among the plurality of second limiting portions 311, the limiting dimensions of the second limiting portions 311 along the Y-axis direction are sequentially reduced in the X-axis direction. Among them, the plurality of second limiting portions 311 can selectively define a second positioning space together with the second clamping portion 32 and the second supporting surface 1202.

[0084] It can be understood that by setting the second limiting portion 311 on the positioning base 31, the limiting of the B-type material box 220 is met, ensuring that the B-type material box 220 can be positioned at a specific position; at the same time, the second limiting portion 311 cooperates with the second clamping portion 32 to achieve the clamping and fixing of the B-type material box 220. In this process, it is precisely because there are multiple groups of second limiting portions 311 on the positioning base 31, and each group of second limiting portions 311 can cooperate with the second clamping portion 32 to form a second positioning space for clamping and positioning the B-type material box 220, thereby corresponding to multiple second positioning spaces of different sizes, and each size of the second positioning space can correspond to a size of the B-type material box 220, so as to achieve the clamping of compatible B-type material boxes 220 of different sizes. At the same time, since the limiting size of the second limiting portion 311 decreases successively in the X-axis direction, B-type material boxes 220 of different sizes can correspond to different limiting positions, reducing the clamping interference between B-type material boxes 220 of different sizes. In addition, the material box positioning tool 100 can meet the positioning requirements of B-type material boxes 220 of different sizes only by setting multiple groups of second limiting parts 311 with different sizes. No new structure is required, the structure is simple, and the manufacturing cost is reduced.

[0085] In actual use, the second clamping portion 32 passes through the tooling platform 10 and extends to the part on the same side of the first supporting surface 2101 as the clamping end, and the positioning base 31 and the clamping end are arranged at intervals along the X-axis direction, so the limiting dimensions of the plurality of second limiting portions 311 along the Y-axis direction decrease in sequence from the positioning base 31 toward the clamping end. Therefore, the closer to the clamping end, the smaller the limiting dimension of the corresponding second limiting portion 311 on the positioning base 31. It can be understood that when the size of the B-type material box 220 is smaller, the spacing between the clamping end and the positioning base 31 is smaller. Therefore, such a setting is just adapted to the size changes of multiple B-type material boxes 220, so that the second positioning space corresponding to the small-sized B-type material box 220 is inside the second positioning space corresponding to the large-sized B-type material box 220, avoiding the risk of unstable clamping positioning caused by the mismatch of the position of the second clamping portion 32 relative to the second limiting portion 311. In addition, such a configuration can ensure that the installation position of the clamping end of the second clamping portion 32 in the X-axis direction will not be easily changed, thereby improving the clamping stability. In this way, the projection areas of the second positioning spaces corresponding to each second limiting portion 311 along the vertical direction can overlap, and the projection area of ​​the second positioning space corresponding to the small size is located within the projection area of ​​the second positioning space corresponding to the large size.

[0086] like Figure 8 As shown, for example, the limiting dimensions of the plurality of second limiting portions 311 along the Y-axis direction show a step-wise reduction trend in the X-axis direction. It can be understood that, by using a step-wise reduction method, the limiting dimensions between any two adjacent second limiting portions 311 along the X-axis direction have a relatively obvious difference; in this way, the limiting stability of the material box can be improved, and there is no fluctuation of the B-type material box 220 caused by a smooth transition of the size. In addition, the step-wise setting method allows a step surface to be provided between any two adjacent second limiting portions 311, and the end of the B-type material box 220 can abut against the step surface, further improving the limiting stability.

[0087] like Fig.17 and Fig.18 As shown, in an optional embodiment, each type of material box has a bottom plate at the bottom to maintain structural strength. Specifically, the A-type material box 210 includes a first bottom plate 230 and a second bottom plate 240 arranged at intervals along the X-axis direction, and the B-type material box 220 has a third bottom plate located in the middle. The cross-section of the first bottom plate 230 and the second bottom plate 240 along the vertical direction is "T"-shaped, including a horizontal portion and a vertical portion connected to the horizontal portion; and the vertical portion of the first bottom plate 230 has a first side wall, which is located on the side of the vertical portion facing the second bottom plate 240.

[0088] At the same time, the second platform 12 has a near-limit position relative to the first platform 11 in the X-axis direction; and, among the multiple groups of first positioning components 20, the group of first positioning components 20 with the lowest height in the vertical direction is the limit positioning component. At this time, at the near-limit position, the spacing S1 between the first limit portion 2103 and the positioning base 31 in the limit positioning component in the X-axis direction is not less than the spacing S2 between the first side wall and the end of the A-type material box 210 close to the first limit portion 2103; and the thickness S3 of the positioning base 31 in the vertical direction is not greater than the bottom surface height S4 of the horizontal portion of the first bottom plate 230 in the limit positioning component. Such a setting further reduces the interference between the first positioning component 20 and the second positioning component 30.

[0089] The structures of the clamping seat 21 , the positioning base 31 and the second clamping portion 32 are described in detail below.

[0090] like Figure 1 , Figure 6 , Figure 7 , Fig.10 , Fig.11 and Fig.12 As shown, exemplarily, each clamping seat 21 includes a clamp block 211 and a locking piece. The clamp block 211 is installed on the first platform 11 and can move relative to the first platform 11 along the Y-axis direction. The support portion and the first clamping portion 2102 are both arranged on the side of the clamp block 211 away from the first platform 11. The locking piece is used to lock the clamp block 211 relative to the first platform 11 when the clamp block 211 moves into place, so as to meet the requirements of the clamp block 211 for stable support and clamping of the A-type material box 210.

[0091] That is to say, by moving the clamp block 211 relative to the first platform 11 along the Y-axis direction, the installation position of the clamp block 211 relative to the first platform 11 can be adjusted, so that the clamping force of each clamping seat 21 on the A-type material box 210 can be adjusted. If the distance between the two clamping seats 21 in a pair is smaller than the size of the A-type material box 210 along the Y-axis direction, or is substantially equal to the size of the A-type material box 210, the two clamping seats 21 will be squeezed when the A-type material box 210 slides in, so the clamping force of the clamping seat 21 on the material box is large, and wear will also occur. Therefore, it is necessary to adjust the distance between the two clamping seats 21 to be slightly larger than the size of the A-type material box 210 to ensure no wear.

[0092] In actual use, each clamping seat 21 further includes an adjustment block 212, which is mounted on the first platform 11 and is configured with a first waist-shaped hole 2120 whose length extends along the Y-axis direction. A first guide protrusion 2111 is convexly provided on the side of the corresponding clamp block 211 away from the support portion, and the first guide protrusion 2111 is inserted into the first waist-shaped hole 2120 and can move in the first waist-shaped hole 2120 along the first direction, and then is fastened by a locking member to meet the adjustment of the installation position of the clamp block 211.

[0093] like Figure 1 , Fig.10 , Fig.11 and Fig.12 As shown, further, the first platform 11 is constructed with a first assembly cavity 111, each clamping seat 21 corresponds to a first assembly cavity 111, and the arrangement of the multiple first assembly cavities 111 is adapted to the partial arrangement of each clamping seat 21. At this time, part of the adjustment block 212 in each clamping seat 21 extends into the corresponding first assembly cavity 111 to connect with the first platform 11. Specifically, the first assembly cavity 111 is arranged in a stepped shape, including a large diameter section and a small diameter section, so as to form a first limiting end face 1111 between the large diameter section and the small diameter section. Part of the adjustment block 212 extends into the small diameter section, and the adjustment block 212 is constructed with a first limiting boss 2122 to be pressed on the upper surface of the first platform 11 to achieve assembly limiting of the adjustment block 212 and the first platform 11. At the same time, each clamping seat 21 also includes a fixing block 214, which is installed in the large diameter section, and one end of the fixing block 214 can be inserted into the first waist-shaped hole 2120, and the other end of the fixing block 214 is convexly provided with a second limiting boss 2141. The locking member passes through the fixing block 214 and is connected to the clamp block 211, and causes the second limiting boss 2141 to be pressed against the first limiting end surface 1111. In this way, the clamp block 211 can be fastened relative to the first platform 11. Among them, the fixing block 214 can move synchronously with the clamp block 211 in the large diameter section in the first assembly cavity 111.

[0094] In an optional embodiment, at least part of the fixture blocks 211 can also move relative to the first platform 11 along the X-axis direction to adjust the spacing between any two adjacent fixture blocks 211. It is worth noting that the any two adjacent fixture blocks 211 mentioned here refer to the fixture blocks 211 in the same group of first positioning components 20. Such a setting can adjust the spacing between the two fixture blocks 211 according to the size of the A-type material box 210 to ensure balanced force, especially the installation position of the positioning clamping seat 21a along the material box conveying direction (i.e., the X-axis direction) can be adjusted accordingly.

[0095] Taking the positioning clamping seat 21a as an example, the positioning clamping seat 21a can move along the X-axis direction on the basis of moving along the Y-axis direction. The small diameter section of the first assembly cavity 111 can be set as a waist-shaped hole whose length extends along the X-axis direction, that is, the second waist-shaped hole 1110. At this time, the adjustment block 212 is provided with a second guide protrusion 2121 on the side away from the clamp block 211, and the second guide protrusion 2121 is inserted into the second waist-shaped hole 1110, and can move in the second waist-shaped hole 1110 along its length direction, thereby driving the clamp block 211 to move synchronously.

[0096] like Fig.10 As shown, in actual use, the positioning clamping seat 21a also includes a locking block 213, which is installed in the large diameter section of the first assembly cavity 111, and the locking block 213 can move along the X-axis direction with the adjustment block 212 in the large diameter section to reduce the interference with the movement of the clamp block 211. The locking block 213 is constructed with a third waist-shaped hole 2130 whose length extends along the Y-axis direction. At this time, one end of the fixed block 214 passes through the third waist-shaped hole 2130 and the small diameter section in sequence, and extends into the first waist-shaped hole 2120. When the locking member passes through the fixed block 214 and is connected to the clamp block 211, the second limiting boss 2141 on the fixed block 214 can be pressed on the locking block 213, and the locking block 213 is pressed on the first limiting end face 1111 in the first assembly cavity 111 to achieve fastening.

[0097] It should be added that the first assembly cavity 111 penetrates along the thickness direction of the first platform 11. The fixture block 211 is located on the upper surface of the first platform 11, and such a configuration facilitates the disassembly and assembly of the locking member from the bottom of the fixture block 211.

[0098] like Figures 10 to 12 As shown, in some embodiments, due to the through-setting of the first assembly cavity 111, the material box positioning tool 100 further includes a sealing cover plate 215, which is pressed on the side of the first assembly cavity 111 away from the fixture block 211. Specifically, a sink 1112 is configured on the side of the first assembly cavity 111 away from the fixture block 211 to form a pressed end face, and the sealing cover plate 215 can be pressed on the pressed end face, and then the sealing cover plate 215 can be fastened relative to the first platform 11 using fasteners such as screws. It can be understood that the setting of the sealing cover plate 215 can play a protective and dustproof role.

[0099] Each first assembly cavity 111 may correspond to one sealing cover plate 215 , or multiple first assembly cavities 111 may correspond to one sealing cover plate 215 , as long as the packaging of each first assembly cavity 111 can be achieved.

[0100] Furthermore, the locking member is a screw, which is threadedly connected to the clamp block 211 to facilitate disassembly and assembly.

[0101] It is worth noting that the clamp block 211 in each clamp seat 21 can move relative to the first platform 11 along the X-axis direction and the Y-axis direction, or the clamp blocks 211 in some clamp seats 21 can move relative to the first platform 11 along the Y-axis direction, and the other part can move along the X-axis direction and the Y-axis direction. The specific arrangement is adjusted according to the actual situation. In an alternative embodiment, when the clamp block 211 in the clamp seat 21 only moves in the X-axis direction or the Y-axis direction, a waist-shaped hole compatible with the movement direction can be directly constructed on the first platform 11 to meet the movement.

[0102] In some specific embodiments, in each group of first positioning components 20, the clamp block 211 in the positioning clamp seat 21a can move relative to the first platform 11 along the X-axis direction and the Y-axis direction, and the clamp block 211 in the auxiliary clamp seat 21b can move relative to the first platform 11 along the Y-axis direction.

[0103] like Figure 1 and Figure 8 As shown, in an optional embodiment, both sides of each second limiting portion 311 along the Y-axis direction are arranged in a stepped structure, and the stepped structure includes a sub-step 3111; thus, the two sub-steps 3111 opposite to each other along the second direction are jointly limited to form a group of limiting steps, that is, the second limiting portion 311 includes two sub-steps 3111 arranged opposite to each other along the Y-axis direction, and the widths of the multiple groups of limiting steps along the Y-axis direction are successively reduced in the X-axis direction. Among them, each group of limiting steps, the second supporting surface 1202 and the second clamping portion 32 jointly define a second positioning space.

[0104] Since each sub-step 3111 includes a transverse surface arranged along the Y-axis direction and a longitudinal surface arranged along the X-axis direction, the end of the B-type material box 220 can just abut against the transverse surface of the corresponding sub-step 3111, and the inner side wall of the B-type material box 220 at the end can be limited to the longitudinal surface of the sub-step 3111, so that the B-type material box 220 is limited along the Y-axis direction and the X-axis direction, so as to cooperate with the second clamping part 32 for clamping and positioning, thereby improving stability. Among them, the length of the longitudinal surface of each sub-step 3111 along the X-axis direction is greater than the length of the corresponding transverse surface along the Y-axis direction. Such a setting reduces the occupied size of each group of limiting steps along the Y-axis direction on the basis of satisfying the stable limiting of the material box, thereby reducing the size of the entire second platform 12 along the Y-axis direction, which is more convenient for sliding with the first platform 11.

[0105] In a replaceable embodiment, the step structure may also include a plurality of adjacent sub-steps 3111, and two sub-steps 3111 opposite to each other along the Y-axis direction are collectively defined as a set of limiting steps. In this way, it is equivalent to that each second limiting portion 311 includes multiple sets of limiting steps, which can correspond to positioning spaces of multiple different sizes. Therefore, through such a setting, the applicability of the material box positioning tool 100 is further increased, so that it is suitable for material boxes of more different sizes. In actual use, the size of the material box can be divided into a range of slightly smaller size, small size and smaller size, and each range corresponds to a plurality of different size B-type material boxes 220. In this way, the setting of multiple adjacent sub-steps 3111 provided in this embodiment can be used for different sizes in different ranges.

[0106] In other embodiments, the second limiting portion 311 includes two limiting blocks that are opposite and spaced in the Y-axis direction, and the two limiting blocks are correspondingly abutted against one B-type material box 220 to meet the limiting. Alternatively, both sides of the positioning base 31 along the second direction are arranged in an inclined plane, so that the positioning base 31 is arranged in an isosceles trapezoidal structure, and each B-type material box 220 can be sleeved on the outside of the positioning base 31 to be limited by the two inclined planes; in this case, a convex protrusion can also be provided on each inclined plane to assist in limiting and improve stability.

[0107] like Figure 1 and Figure 8 As shown, in an optional embodiment, a pair of limiting protrusions 341 are provided on one side of the positioning base 31 facing the second clamping portion 32, and the two limiting protrusions 341 in the pair are arranged on both sides of the positioning base 31 along the second direction, and the two limiting protrusions 341 and the side wall of the positioning base 31 facing the second clamping portion 32 jointly limit the third limiting portion 34. In other words, the side of the positioning base 31 facing the second clamping portion 32 can also be used for positioning the B-type material box 220, and the end of the B-type material box 220 can abut against the side wall of the positioning base 31, and the two limiting protrusions 341 in the pair can be limited to the side wall of the B-type material box 220. In addition, it is precisely because of the setting of the pair of limiting protrusions 341 that a step structure can be formed between each limiting protrusion 341 and the side wall of the positioning base 31, so it can also be used here to position a B-type material box 220 of a corresponding size.

[0108] In an alternative embodiment, there are multiple pairs of limiting protrusions 341, and the two limiting protrusions 341 in each pair jointly define a first size, then each first size gradually increases from the inside to the outside along the Y-axis direction, and the limiting protrusions 341 of smaller size are located inside the limiting protrusions 341 of larger size. Each pair of limiting protrusions 341 can correspond to a size of a B-type material box 220, and multiple pairs of limiting protrusions 341 correspond to multiple B-type material boxes 220 of different sizes. Moreover, since the multiple pairs of limiting protrusions 341 are all convexly arranged on the same side wall of the positioning base 31, it is ensured that the limiting reference of each B-type material box 220 is the same.

[0109] like Figure 1 and Figure 8 As shown, in an optional embodiment, the positioning base 31 is configured with an adjustment long hole 3101, and the positioning base 31 can move relative to the second platform 12 along the length direction of the adjustment long hole 3101. The second positioning assembly 30 also includes a fastener, which is used to pass through the adjustment long hole 3101 to lock the positioning base 31 to the second platform 12. Through such an arrangement, it is also convenient to adjust the installation position of the positioning base 31 relative to the second platform 12. In some specific embodiments, the second platform 12 is provided with a through hole 1201 for the second clamping portion 32 to penetrate, and the position of the through hole 1201 determines the position of the clamping end on the second clamping portion 32. At this time, adjusting the position of the positioning base 31 is equivalent to adjusting the spacing between the positioning base 31 and the through hole 1201.

[0110] Furthermore, the driving ends of the positioning base 31 and the second clamping part 32 are arranged on both sides of the second platform 12 along the thickness direction of the second platform 12, and the second platform 12 is constructed with a through hole 1201 that penetrates along its thickness direction. The clamping end of the second clamping part 32 extends to the same side of the positioning base 31 through the through hole 1201, so as to cooperate with the positioning base 31 to realize the clamping and positioning of the material box. Through such a setting, the interference of the second clamping part 32 on the movement of the material box is reduced; and, precisely because the driving end of the second clamping part 32 is arranged at the lower part of the second platform 12, the occupied space on the upper part of the second platform 12 is reduced, and other arrangements reserved on the second platform 12 can also be provided with other structures to improve the utilization rate of the second platform 12. At this time, it is only necessary to adjust the extension length of the clamping end of the second clamping part 32 relative to the through hole 1201. Among them, the second clamping part 32 can clamp from both sides of the B-type material box 220 along the Y-axis direction.

[0111] In an optional embodiment, the through hole 1201 is a long hole extending along the Y-axis direction, so that the clamping end of the second clamping portion 32 can move in the through hole 1201 to adapt to different sizes of boxes. The second clamping portion 32 includes clamping arms 321 arranged oppositely and spaced along the Y-axis direction, and each clamping arm 321 is connected to at least one clamping column 322; the clamping arm 321 can serve as the driving end of the second clamping portion 32, and the clamping arm 321 is arranged on the opposite side of the second platform 12 relative to the second support surface 1202, and a portion of the clamping column 322 passes through the through hole 1201 and extends to the same side of the second support surface 1202, and is defined as a clamping end. The clamping column 322 can move in the through hole 1201 along the Y-axis direction to meet the clamping of B-type boxes 220 of different sizes.

[0112] like Figure 1 and Fig. 9 As shown, in actual use, the second clamping part 32 also includes a power source 323 for driving the two clamping arms 321 to move. The power source 323 can be a two-way cylinder to meet the two clamping arms 321 to move closer and farther. Among them, the two clamping arms 321 are arranged in an "eight" shape, with the narrower end used to connect the power source 323 and the wider end used to connect the clamping column 322 to ensure sufficient spacing to achieve the clamping of the B-type material box 220. At this time, the two clamping arms 321 and the power source 323 can be set below the second platform 12 as the driving end of the second clamping part 32.

[0113] Furthermore, each clamping arm 321 is connected with two clamping columns 322 arranged at intervals along the X-axis direction, and each clamping column 322 corresponds to a through hole 1201, so the number of through holes 1201 is two, and they are arranged at intervals along the X-axis direction. In this way, each through hole 1201 is penetrated with a clamping column 322 on both sides along its own length direction to meet the clamping of the B-type material box 220; and, by using the setting of the two clamping columns 322, a double-point fixation is formed to improve the clamping stability of the B-type material box 220. Among them, each clamping column 322 extends from the lower surface of the second platform 12 to the upper surface, and protrudes from the upper surface of the second platform 12; and, the portion of the clamping arm 321 corresponding to the connection of the clamping column 322 is a straight section extending along the X-axis direction to ensure that the two clamping columns 322 are parallel.

[0114] It should be noted that the height of each clamping column 322 extending from the corresponding through hole 1201 to the upper surface of the second platform 12 is less than the height of the first supporting surface 2101 .

[0115] like Figure 1 , Figure 3 and Figure 4As shown, further, a support block 33 is also provided on the second platform 12, and the support block 33 and the positioning base 31 are arranged at intervals along the X-axis direction, and the support block 33 can be used to support the B-type material box 220. In some specific embodiments, the support block 33 is located between the two penetration holes 1201 to ensure that part of each B-type material box 220 can fall on the support block 33. Among them, the middle parts of the two penetration holes 1201 can be connected, and the support block 33 is installed at the connection, and avoids the moving path of each clamping column 322, and the support block 33 is connected to the second platform 12 by screws. In order to reduce the interference with the B-type material box 220, it can be assembled from the bottom of the second platform 12. Among them, the height of the support block 33 from the second platform 12 is slightly greater than the height of the top of each clamping column 322 from the second platform 12, but less than the height of the first support surface 2101, while meeting the stable support, reducing interference.

[0116] like Figures 1 to 4 As shown, in some embodiments, the material box positioning tool 100 also includes multiple groups of first detection components 41, each group of first detection components 41 is installed on the tooling platform 10, and is adapted to the installation positions of the first positioning component 20 and the second positioning component 30, and the first detection component 41 is used to detect the size and type of the material. Specifically, each group of first detection components 41 is adapted to the installation position of the clamping seat 21 in each group of first positioning components 20 and the position of each second limit portion 311 in the second positioning component 30, so as to ensure that each first positioning space and each second positioning space correspond to at least one group of first detection components 41, so as to detect the size of the material box, and then judge the material boxes of different models and sizes.

[0117] As for the first positioning assembly 20, in each group of the first positioning assembly 20, there is a first connecting line between the supporting parts of the clamping seat 21 on the same side along the X-axis direction. Each group of the first positioning assembly 20 is correspondingly provided with two groups of first detection assemblies 41, and the two groups of first detection assemblies 41 are a pair, and the two groups of first detection assemblies 41 in a pair are arranged oppositely and at intervals along the Y-axis direction, and each group of first detection assemblies 41 is located on the corresponding first connecting line. In this way, it can be satisfied that each size of the A-type material box 210 has multiple detection positions, thereby improving the detection accuracy. As for the second positioning assembly 30, with the transverse surface of the sub-step 3111 in each group of limiting steps as the reference, each group of the first detection assembly 41 is arranged at intervals from the corresponding transverse surface along the first direction to ensure the detection accuracy. Therefore, the multiple groups of first detection assemblies 41 located on the second platform 12 can also be arranged in a stepped and spaced manner.

[0118] like Figures 13 to 15As shown, in an optional embodiment, each group of first detection components 41 includes a transmission member 401 and a first sensor 402, the first sensor 402 is configured to be triggered in response to the movement of the transmission member 401, and the transmission member 401 has a movement tendency to reset.

[0119] Specifically, the tooling platform 10 is configured with a second assembly cavity 101 for installing a transmission member 401, and the second assembly cavity 101 is arranged to penetrate along the thickness direction of the tooling platform 10. The first sensor 402 is installed on the side of the tooling platform 10 away from the positioning base 31, and part of the transmission member 401 is inserted into the second assembly cavity 101, and the top part of the transmission member 401 protrudes from the second assembly cavity 101 to facilitate contact with the material box. A detection sealing plate 404 is installed on the side of the second assembly cavity 101 away from the positioning base 31 to achieve blocking of the second assembly cavity 101; at this time, a trigger rod for connecting the first sensor 402 is provided at one end of the transmission member 401 facing the detection sealing plate 404, and the detection sealing plate 404 is configured with a through hole, and the trigger rod is penetrated through the through hole to facilitate triggering the first sensor 402. At the same time, an elastic member 403 is arranged between the detection sealing plate 404 and the transmission member 401, so as to facilitate the reset of the transmission member 401 after the B-type material box 220 is removed; and a second limiting end face is arranged in the second assembly cavity 101, and an abutting protrusion is convexly provided on the outer side of the transmission member 401, which can abut against the second limiting end face to limit the reset movement of the transmission member 401 and prevent the transmission member 401 from detaching from the second platform 12.

[0120] In some specific embodiments, the elastic member 403 is a spring, which is sleeved on the outer side of the trigger rod. The first sensor 402 may be a photoelectric switch.

[0121] In an alternative embodiment, the second assembly cavity 101 may be formed by being recessed downward from the upper surface of the tooling platform 10 and not being provided through. In this case, it is only necessary to construct a through hole through the bottom of the second assembly cavity 101 so that the trigger rod can extend into and trigger the first sensor 402.

[0122] like Fig.14 As shown, further, the first detection assembly 41 also includes an axial collar 405 partially mounted on the second assembly cavity 101, and the axial collar 405 is sleeved on the outer side of the transmission member 401 to reduce the wear between the transmission member 401 and the cavity wall of the second assembly cavity 101. It should be supplemented that the first platform 11 and the second platform 12 are respectively mounted with the first detection assembly 41 in a substantially similar manner.

[0123] like Figure 1 and Fig.16As shown, in an optional embodiment, the material box positioning tool 100 also includes a second detection component 42, and the second detection component 42 and the positioning base 31 are arranged at intervals along the X-axis direction, and the second detection component 42 is used to detect that the material is in place. Specifically, the second detection component 42 is installed on the support block 33. Therefore, when each B-type material box 220 moves to the support block 33, the second detection component 42 can be triggered. The structure of the second detection component 42 is basically similar to that of the first detection component 41. During actual assembly, the support block 33 is constructed with a third assembly cavity 3301 to facilitate the installation of the second detection component 42, and a third limit end face is provided in the third assembly cavity 3301 to meet the movement limit of the transmission member 401.

[0124] In an alternative embodiment, the second detection component 42 may adopt a reflective photoelectric switch, and when the light is blocked by the B-type material box 220, it indicates that the movement is in place.

[0125] like Figure 1 , Figure 2 , Fig.17 and Fig.19 As shown, in an optional embodiment, the magazine positioning tool 100 further includes a deviation detection component 50, which is installed on the tooling platform 10 at a side of the starting feeding side. In other words, the deviation detection component 50 is arranged to detect whether the wafer in the magazine slides out relative to the magazine. When the wafer slides out, the deviation detection component 50 is triggered to issue an alarm.

[0126] Furthermore, the offset detection component 50 includes a mounting substrate 51 and a second sensor 52 mounted on the mounting substrate 51, and the second sensor 52 is a photoelectric sensor. Among them, the mounting substrate 51 includes an upper mounting substrate 51a and a lower mounting substrate 51b, which are arranged at intervals in the vertical direction. The upper mounting substrate 51a can be connected to the wafer detection device, and the lower mounting substrate 51b is connected to the bottom of the first platform 11 and avoids the moving path of the second platform 12. The second sensor 52 includes a transmitting end 521 and a receiving end 522, which are opposite and spaced in the vertical direction, and are respectively installed with the upper mounting substrate 51a and the lower mounting substrate 51b. Further, the upper mounting substrate 51a and the lower mounting substrate 51b are both provided with a corresponding hole 5101, so that the light emitted by the transmitting end 521 is transmitted to the receiving end 522. Therefore, when a wafer slides out of the material box, it will block the light between the transmitting end 521 and the receiving end 522. The receiving end 522 cannot receive the light and is triggered to feedback to the controller for an alarm.

[0127] like Figure 1 , Figure 2 , Fig.17 and Fig.19As shown, further, both sides of the upper mounting substrate 51a and the lower mounting substrate 51b along the Y-axis direction are connected with adjustment columns 53, and each adjustment column 53 can drive the mounting substrate 51 to move in the vertical direction. In other words, the adjustment columns 53 are provided to facilitate the adjustment of the mounting posture of the mounting substrate 51 to which they correspond, so as to achieve the adjustment of the mounting position of the emitting end and the receiving end 522 of the second sensor 52, thereby improving the detection accuracy of the second sensor 52. At the same time, since the mounting substrate 51 is assembled relative to the first platform 11 or other structures through the adjustment columns 53, the adjustment columns 53 can also be used to adjust the position of the mounting substrate 51 along the X-axis direction, so as to adapt to different types of material boxes and wafers.

[0128] Specifically, the first adjustment column 53a and the second adjustment column 53b are respectively installed on both sides of the upper mounting substrate 51a along the Y-axis direction, and the third adjustment column 53c and the fourth adjustment column 53d are respectively installed on both sides of the lower mounting substrate 51b along the Y-axis direction. Taking the upper mounting substrate 51a as an example, the first adjustment column 53a and the second adjustment column 53b are both threadedly connected to the upper mounting substrate 51a, and rotating the first adjustment column 53a can cause the same side of the upper mounting substrate 51a to move up or down, so as to meet the installation posture adjustment of the upper mounting substrate 51a.

[0129] The third adjustment column 53c and the fourth adjustment column 53d are both connected to the first platform 11. Of course, they can also be installed at the bottom of the second platform 12, or installed on other structures of the wafer detection device, as long as they can realize the assembly of the receiving end 522 in the second sensor 52.

[0130] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0131] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the scope of patent protection of the present application shall be subject to the attached claims.

Claims

1. A material box positioning tool, characterized in that: The material box positioning tool (100) comprises a tool platform (10), and a first positioning component (20) and a second positioning component (30) arranged on the tool platform (10), wherein the first positioning component (20) is installed on the outer side of the second positioning component (30); The first positioning component (20) has a first supporting surface (2101) and a first clamping portion (2102) arranged at an angle, and the second positioning component (30) has a second supporting surface (1202) and a second clamping portion (32) arranged at an angle, the first supporting surface (2101) and the second supporting surface (1202) are arranged on the same side of the thickness direction of the tooling platform (10) and are not coplanar, the first clamping portion (2102) and a portion of the second clamping portion (32) are arranged on different sides of the thickness direction of the tooling platform (10), and the clamping end of the second clamping portion (32) can pass through the tooling platform (10) and extend to the same side of the second supporting surface (1202); The tooling platform (10) comprises a first platform (11) and a second platform (12), wherein the second platform (12) is movably connected to the inner side of the first platform (11); the first positioning component is arranged on the first platform, and the second positioning component is arranged on the second platform; The first positioning assembly (20) comprises at least one pair of clamping seats (21), the two clamping seats (21) in each pair are arranged opposite to each other and spaced apart along a first direction, each clamping seat (21) comprises a support portion and the first clamping portion (2102) arranged at an angle, the first clamping portion (2102) in each pair is located on a side opposite to the corresponding support portion, and a side wall of the support portion facing away from the first platform (11) forms the first supporting surface (2101); The second supporting surface (1202) is formed on the surface of the second platform (12), the second clamping portion (32) is installed on the second platform (12), the height of the first supporting surface (2101) along the vertical direction is greater than the height of the second supporting surface (1202) along the vertical direction, and the height of the clamping end of the second clamping portion (32) is not greater than the height of the first supporting surface (2101); The first positioning components (20) are provided in a plurality of groups, and the plurality of groups of the first positioning components (20) are arranged in a avoidance manner; in each group of the first positioning components (20), the first supporting surface (2101) and the first clamping portion (2102) jointly define a first positioning space, and the projection areas of each of the first positioning spaces in the vertical direction at least partially overlap, and are arranged in sequence from small to large and from inside to outside; the second positioning components (30) are arranged in a avoidance manner from the first positioning space, and the height of the clamping seat (21) corresponding to the first positioning component (20) close to the inside is less than the height of the clamping seat (21) corresponding to the first positioning component (20) close to the outside.

2. The material box positioning tool according to claim 1, characterized in that: The first positioning assembly (20) comprises at least two pairs of clamping seats (21) arranged at intervals along the second direction, and among the at least two pairs of clamping seats (21), one pair of the clamping seats (21) serves as a positioning clamping seat (21a), and the remaining clamping seats (21) serve as auxiliary clamping seats (21b); Wherein, each of the positioning clamping seats (21a) further comprises a first limiting portion (2103), the first limiting portion (2103) being connected to the supporting portion and the first clamping portion (2102), and the three are arranged in pairs at an angle, and the first limiting portion (2103) is located on the side of the corresponding supporting portion away from the auxiliary clamping seat (21b) on the same side.

3. The material box positioning tool according to claim 1, characterized in that: The second positioning assembly (30) comprises a positioning base (31) arranged on the second supporting surface (1202), and the positioning base (31) has a plurality of second limiting portions (311) arranged in sequence along the second direction; Among the plurality of second limiting portions (311), the limiting dimensions of the second limiting portions (311) along the first direction are sequentially reduced in the second direction, and the first direction and the second direction are arranged at an angle; Wherein, a plurality of the second limiting portions (311) can selectively define a second positioning space together with the second clamping portion (32) and the second supporting surface (1202).

4. The material box positioning tool according to claim 3, characterized in that: The positioning base (31) is configured with an adjustment long hole (3101), and the positioning base (31) is capable of moving relative to the tooling platform (10) along the length direction of the adjustment long hole (3101); the second positioning assembly also includes a fastener, and the fastener is used to pass through the adjustment long hole (3101) to lock the positioning base (31) to the tooling platform (10).

5. The material box positioning tool according to claim 1, characterized in that: The first clamping portion (2102) and the first supporting surface (2101) are arranged on the same side of the tooling platform (10); The driving end of the second clamping portion (32) and the second supporting surface (1202) are arranged on different sides of the tooling platform (10); the tooling platform (10) is constructed with a through hole (1201) penetrating along the thickness direction of the tooling platform (10), and the clamping end of the second clamping portion (32) passes through the through hole (1201) and extends to the same side of the second supporting surface (1202).

6. The material box positioning tool according to claim 5, characterized in that: The second clamping portion (32) comprises at least two clamping arms (321) arranged opposite to each other and spaced apart, and each of the clamping arms (321) is connected to at least one clamping column (322); Wherein, the clamping arm (321) is arranged on the opposite side of the tooling platform (10) relative to the second supporting surface (1202), and a portion of the clamping column (322) passes through the through hole (1201) and extends to the same side of the first supporting surface (2101), and is defined as the clamping end.

7. The material box positioning tool according to claim 1, claim 3 or claim 5, characterized in that: The tooling platform (10) comprises a first platform (11), a second platform (12) and a material taking and positioning assembly (13), wherein the second platform (12) is slidably connected to the first platform (11), and the material taking and positioning assembly (13) is connected between the first platform (11) and the second platform (12); The material picking positioning assembly (13) comprises a positioning pin (131) and a positioning plate (132); the positioning plate (132) is connected to the second platform (12) and is provided with a second positioning hole (1321); the first platform (11) is provided with a plurality of first positioning holes (113) arranged at intervals along the material box conveying direction; the positioning pin (131) is used to pass through the second positioning hole (1321) and selectively connect and lock with one of the plurality of first positioning holes (113); The material picking and positioning assembly (13) further comprises a plurality of positioning sensors (133) arranged at intervals along the material box conveying direction, the plurality of positioning sensors (133) being mounted on the first platform (11) and corresponding one-to-one to the plurality of first positioning holes (113), and each of the positioning sensors (133) being configured to be triggered in response to the movement of the positioning pin (131); The first positioning component (20) is installed on the first platform (11), and the second positioning component (30) is installed on the second platform (12).

8. The material box positioning tool according to claim 1, characterized in that: The first positioning assembly (20) comprises at least one pair of clamping seats (21), and the two clamping seats (21) in each pair are arranged opposite to each other and spaced apart along a first direction; Wherein, each of the clamping seats (21) comprises a clamp block (211), the first supporting surface (2101) and the first clamping portion (2102) are both formed on the clamp block (211), and each of the clamp blocks (211) can move relative to the tooling platform (10) along the first direction and / or the second direction; each of the clamping seats (21) also comprises a locking member, and the locking member is used to lock the clamp block (211) relative to the tooling platform (10).

9. The material box positioning tool according to claim 8, characterized in that: Each of the clamping seats (21) further comprises an adjustment block (212); The adjustment block (212) is installed on the tooling platform (10), and the adjustment block (212) is constructed with a first waist-shaped hole (2120) whose length is along the first direction, and the clamp block (211) is convexly provided with a first guide protrusion (2111), and the first guide protrusion (2111) is inserted in the corresponding first waist-shaped hole (2120) and can move in the first waist-shaped hole (2120); and / or, the tooling platform (10) is constructed with a second waist-shaped hole (1110) whose length is along the second direction at a position corresponding to part of the clamping seat (21), and the adjustment block (212) is convexly provided with a second guide protrusion (2121), and the second guide protrusion (2121) is inserted in the corresponding second waist-shaped hole (1110) and can move in the second waist-shaped hole (1110).

10. The material box positioning tool according to claim 1, characterized in that: The material box positioning tool (100) further comprises a plurality of groups of first detection components (41), each group of the first detection components (41) is installed on the tooling platform (10) and is adapted to the installation positions of the first positioning component (20) and the second positioning component (30), and the first detection component (41) is used to detect the size and / or type of the material; The material box positioning tool (100) comprises a deviation detection component (50), the deviation detection component (50) is installed on at least one side of the tool platform (10) along the second direction, and the deviation detection component (50) is used to detect the position of the material.

11. A wafer inspection device, characterized in that: It comprises the material box positioning tool as claimed in any one of claims 1 to 10, wherein the material box positioning tool (100) is used for positioning a wafer material box.

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