Wafer carrying inspection machine

Abstract

The invention discloses a wafer carrying inspection machine. Comprising a main machine shell, a wafer stock bin, a stock bin lifting driving device, a bin entering and exiting arm, a bin entering and exiting arm translation driving device, a center suction cup, a suction cup lifting driving device, a suction cup horizontal adjusting mechanism, a suction cup turn-over driving device, a suction cup rotation driving device, an edge searching sensor, an edge searching sensor advancing and retreating driving device and a turn-over arm. The full-automatic wafer micro-detection device is compact in structure, small in size and high in efficiency, can be placed on a table or a workbench to be matched with a microscope to perform micro-detection on wafers, and is high in detection precision, high in detection precision and high in detection efficiency. The wafer surface detection device can complete operations such as automatic feeding, automatic overturning, automatic edge searching, automatic carrying of microscopic detection, automatic discharging and the like of wafers, and can assist an operator in carrying out wafer surface detection, wafer back edge detection, wafer back center detection and microscope microscopic detection on the wafers.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer inspection equipment, and more specifically, to a wafer carrier inspection machine. Background Art

[0002] In the wafer production process, it is necessary to check the defects on the surface and back of the wafer, otherwise the defects on the wafer will affect the final performance of the chip. Among them, the defect inspection of the wafer can be carried out by manual visual inspection. The operator can manually place the wafer in the material box under the light source for visual macroscopic inspection, and manually place the wafer in the material box under a microscope for microscopic re-judgment. However, this inspection method has low inspection efficiency, is prone to bumps, increases the damage rate, and is easy to dirty the surface of the wafer, affecting the quality of the wafer.

[0003] Although there are some wafer automated visual inspection equipment on the market, these automated visual inspection equipment are expensive, complex in structure, large in size, and occupy a large amount of space. They cannot be placed on a table or workbench to perform microscopic inspection with a microscope. Summary of the invention

[0004] The purpose of the present invention is to overcome the above-mentioned defects in the prior art and to provide a wafer carrier inspection machine with a compact structure, small size, easy operation, high efficiency, which can complete a series of automated operations such as automatic loading, automatic flipping, automatic edge finding, automatic transportation for microscopic inspection, automatic unloading of wafers, and can assist operators in performing wafer surface inspection, wafer back edge inspection, wafer back center inspection and microscope microscopic inspection on wafers.

[0005] To achieve the above-mentioned purpose, the present invention provides a wafer carrier inspection machine, including a main body shell, in which a wafer hopper for placing multiple wafers in layers is arranged, a hopper lifting drive device for driving the wafer hopper to rise and fall, an in-and-out hopper arm for taking out the wafers to be inspected in the wafer hopper to the central suction cup and returning the inspected wafers to the wafer hopper, an in-and-out hopper arm translation drive device for driving the in-and-out hopper arm to move, a central suction cup for sucking the middle of the back side of the wafer, a suction cup lifting drive device for driving the central suction cup to rise and fall, a suction cup horizontal adjustment device for adjusting the horizontal position of the wafer sucked by the central suction cup, a suction cup flipping drive device for driving the wafer sucked by the central suction cup to flip the front and back sides, and a suction cup flipping drive device for driving the wafer sucked by the central suction cup to flip the front and back sides. A suction cup rotation drive device for rotating the wafer sucked by the suction cup during the edge finding process and / or after flipping the back side, an edge finding sensor for detecting the position of the target alignment point on the edge of the wafer, an edge finding sensor advance and retreat drive device for driving the edge finding sensor to move forward and backward, a flipping arm for sucking the back edge of the wafer and flipping it on the back side and placing the flipped wafer back on the center suction cup, a flipping arm lifting and flipping drive device for driving the flipping arm to lift and flip, a first inspection transport arm and a second inspection transport arm for alternately transporting the front and rear wafers placed on the flipping arm back to the center suction cup to the microscope inspection area and alternately transporting the front and rear wafers from the microscope observation area back to the center suction cup, used to drive the first inspection transport arm The inspection and handling arm lifting drive device is used to lift and lower the first inspection and handling arm and the second inspection and handling arm, and the inspection and handling arm translation drive device is used to drive the first inspection and handling arm and the second inspection and handling arm to perform alternating horizontal movement. The silo lifting drive device, the in-and-out silo arm translation drive device, the flip arm lifting and flipping drive device and the edge-finding sensor advance and retreat drive device are respectively arranged around the central suction cup. The wafer silo is installed on the silo lifting drive device, the in-and-out silo arm is installed on the in-and-out silo arm translation drive device, the flip arm is installed on the flip arm lifting and flipping drive device, the edge-finding sensor is installed on the edge-finding sensor advance and retreat drive device, and the suction cup lifting drive device is transmission-connected to the suction cup horizontal adjustment device and can drive the suction cup The horizontal adjustment device moves up and down, the suction cup horizontal adjustment device is connected with the suction cup flipping drive device and can drive the suction cup flipping drive device to swing, the suction cup flipping drive device is connected with the suction cup rotation drive device and can drive the suction cup rotation drive device to flip, the suction cup rotation drive device is connected with the center suction cup and can drive the center suction cup to rotate, the inspection and handling arm lifting drive device is located on one side of the flipping arm lifting and flipping drive device, the inspection and handling arm translation drive device is installed on the inspection and handling arm lifting drive device, the first inspection and handling arm and the second inspection and handling arm are respectively installed on the inspection and handling arm translation drive device, the height of the first inspection and handling arm is higher than the height of the second inspection and handling arm,The in-and-out bin arm, the flipping arm, the first inspection and handling arm, and the second inspection and handling arm are respectively provided with arm suction cups for sucking the wafers.

[0006] Preferably, the host housing is provided with a touch display screen, a control handle and / or control buttons, and the bottom of the host housing is provided with supporting feet.

[0007] In addition, a microscope, a stage and a stage moving drive device for driving the stage to move the XY axis are provided on one side of the main body housing. The stage is installed on the stage moving drive device. A stage suction cup for sucking the wafer is provided on the stage. The lens part of the microscope is located above the stage.

[0008] Compared with the prior art, the present invention has the following beneficial effects:

[0009] The present invention is provided with a mainframe shell, a wafer silo, a silo lifting drive device, an in-and-out silo arm, an in-and-out silo arm translation drive device, a center suction cup, a suction cup lifting drive device, a suction cup horizontal adjustment mechanism, a suction cup flipping drive device, a suction cup rotation drive device, an edge-finding sensor, an edge-finding sensor advance and retreat drive device, a flipping arm, a flipping arm lifting and flipping drive device, a first inspection and conveying arm, a second inspection and conveying arm, an inspection and conveying arm lifting drive device and an inspection and conveying arm translation drive device. The present invention has a compact structure, a small size, and saves space. It can be placed on a table or a workbench and cooperate with a microscope to perform microscopic inspection of wafers. It can complete a series of automated operations such as automatic loading, automatic flipping, automatic edge finding, automatic conveying for microscopic inspection, and automatic unloading of wafers. It can assist operators in performing wafer surface inspection, wafer back edge inspection, wafer back center inspection and microscope microscopic inspection on wafers. It is easy to operate and runs stably and reliably. During the movement of the wafer, problems such as wafer falling and bumping will not occur, which greatly improves production efficiency and reduces production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0011] Figure 1 is a schematic structural diagram of a wafer carrier inspection machine provided by an embodiment of the present invention;

[0012] Figure 2 It is a schematic diagram of the internal structure of a wafer carrier inspection machine provided by an embodiment of the present invention;

[0013] Figure 3 It is a schematic structural diagram of a wafer silo and a silo lifting drive device provided in an embodiment of the present invention;

[0014] Figure 4 The structure of the in-and-out warehouse arm and the in-and-out warehouse arm translation drive device provided by the embodiment of the present invention is schematically shown. Figure 1 ;

[0015] Figure 5 The structure of the in-and-out warehouse arm and the in-and-out warehouse arm translation drive device provided by the embodiment of the present invention is schematically shown. Figure 2 ;

[0016] Figure 6 The structure diagram of the central suction cup, the suction cup lifting drive device, the suction cup horizontal adjustment device, the suction cup flipping drive device and the suction cup rotation drive device provided in the embodiment of the present invention is shown in FIG. Figure 1 ;

[0017] Figure 7 The structure diagram of the central suction cup, the suction cup lifting drive device, the suction cup horizontal adjustment device, the suction cup flipping drive device and the suction cup rotation drive device provided in the embodiment of the present invention is shown in FIG. Figure 2 ;

[0018] Figure 8 The structure diagram of the central suction cup, the suction cup lifting drive device, the suction cup horizontal adjustment device, the suction cup flipping drive device and the suction cup rotation drive device provided in the embodiment of the present invention is shown in FIG. Figure 3 ;

[0019] Fig. 9 It is a structural schematic diagram of a central suction cup, a suction cup flipping driving device and a suction cup rotation driving device provided by an embodiment of the present invention;

[0020] Fig.10 It is a structural schematic diagram of an edge-finding sensor and an edge-finding sensor advance and retreat drive device provided by an embodiment of the present invention;

[0021] Fig.11 The structure diagram of the flipping arm and the flipping arm lifting and flipping driving device provided by the embodiment of the present invention is Figure 1 ;

[0022] Fig.12 The structure diagram of the flipping arm and the flipping arm lifting and flipping driving device provided by the embodiment of the present invention is Figure 2 ;

[0023] Fig.13 The structure diagram of the flipping arm and the flipping arm lifting and flipping driving device provided by the embodiment of the present invention is Figure 3 ;

[0024] Fig.14The present invention provides a first inspection and handling arm, a second inspection and handling arm, an inspection and handling arm lifting drive device, and an inspection and handling arm translation drive device. Figure 1 ;

[0025] Fig.15 The present invention provides a first inspection and handling arm, a second inspection and handling arm, an inspection and handling arm lifting drive device, and an inspection and handling arm translation drive device. Figure 2 ;

[0026] Fig.16 It is a partial structural schematic diagram of the inspection and handling arm lifting drive device provided in an embodiment of the present invention;

[0027] Fig.17 is a structural schematic diagram of another wafer carrier inspection machine provided by an embodiment of the present invention;

[0028] Fig.18 It is a schematic structural diagram of a microscope inspection portion of a wafer carrier inspection machine provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] Please refer to Figure 1 , Figure 2 and Figure 6The embodiment of the present invention provides a wafer carrier inspection machine, including a mainframe housing 1, in which a wafer bin 2, a bin lifting drive device 3, a bin entry and exit arm 4, a bin entry and exit arm translation drive device 5, a central suction cup 6, a suction cup lifting drive device 7, a suction cup horizontal adjustment device 8, a suction cup flipping drive device 9, a suction cup rotation drive device 10, an edge-finding sensor 11, an edge-finding sensor advance and retreat drive device 12, a flipping arm 13, a flipping arm lifting and flipping drive device 14, a first inspection and handling arm 15, a second inspection and handling arm 16, an inspection and handling arm lifting drive device 17 and an inspection and handling arm translation drive device 18 are arranged respectively around the central suction cup 6, the wafer bin 2 is installed on the bin lifting drive device 3, the bin entry and exit arm 4 is installed on the bin entry and exit arm translation drive device On the device 5, the flipping arm 13 is installed on the flipping arm lifting and flipping drive device 14, the edge-finding sensor 11 is installed on the edge-finding sensor forward and backward drive device 12, the suction cup lifting drive device 7 is transmission-connected with the suction cup horizontal adjustment device 8 and can drive the suction cup horizontal adjustment device 8 to move up and down, the suction cup horizontal adjustment device 8 is transmission-connected with the suction cup flipping drive device 9 and can drive the suction cup flipping drive device 9 to swing, the suction cup flipping drive device 9 is transmission-connected with the suction cup rotation drive device 10 and can drive the suction cup rotation drive device 10 to flip, the suction cup rotation drive device 10 is transmission-connected with the center suction cup 6 and can drive the center suction cup 6 to rotate, the inspection and handling arm lifting drive device 17 is located on one side of the flipping arm lifting and flipping drive device 14, the inspection and handling arm translation drive device 18 is installed on the inspection and handling arm lifting drive device 17, and the first inspection and handling arm 15 and the second inspection and handling arm 16 are respectively installed on the inspection and handling arm translation drive device 18.

[0031] The various components of this embodiment are described in detail below in conjunction with the accompanying drawings.

[0032] like Figure 3 As shown, the wafer silo 2 may include a silo body 21, the front of which is provided with a silo inlet and outlet, and the inside of the silo body 21 is provided with a plurality of wafer placement slots 211 arranged in sequence from bottom to top on both sides. Multiple wafers may be placed in layers in sequence from bottom to top inside the wafer silo 2, and the two ends of each wafer may be inserted into the corresponding wafer placement slots 211.

[0033] like Figure 3As shown, the silo lifting drive device 3 may include a silo lifting motor 31, a silo lifting screw 32 and a lifting platform 33. The output shaft of the silo lifting motor 31 is connected to the silo lifting screw 32 through a transmission assembly. The screw nut 321 on the silo lifting screw 32 is connected to the lifting platform 33. The wafer silo 2 is installed on the lifting platform 33. The silo lifting motor 31 can drive the lifting platform 33 to move up and down through the silo lifting screw 32, thereby driving the wafer silo 2 to rise and fall, so as to facilitate the wafers located on different layers to enter and exit the silo.

[0034] like Figure 4 and Figure 5 As shown, the in-and-out warehouse arm translation drive device 5 may include an in-and-out warehouse translation bracket 51, a first in-and-out warehouse translation drive motor 52, an in-and-out warehouse translation transmission belt 53, an in-and-out warehouse translation transmission wheel 54, an in-and-out warehouse translation guide rail 55, an in-and-out warehouse transmission belt connecting seat 56, a second in-and-out warehouse translation drive motor 57, a translation drive screw 58, a nut seat 59, a movable slide 510 and an in-and-out warehouse arm connecting bracket 511. The in-and-out warehouse translation transmission wheels 54 are respectively located at both ends of the in-and-out warehouse translation bracket 51, the output shaft of the first in-and-out warehouse translation drive motor 52 is connected to one of the in-and-out warehouse translation transmission wheels 54, the in-and-out warehouse translation transmission belt 53 is mounted between the two in-and-out warehouse translation transmission wheels 54, and the movable slide 510 is connected to the in-and-out warehouse translation bracket 511. The in-and-out warehouse translation guide rail 55 is slidingly connected to the in-and-out warehouse translation bracket 51, the lower base of the mobile slide 510 is connected to the in-and-out warehouse translation transmission belt 53 through the in-and-out warehouse transmission belt connecting seat 56, the second in-and-out warehouse translation drive motor 57 is installed on the lower base of the mobile slide 510, the horizontal installation direction of the second in-and-out warehouse translation drive motor 57 is perpendicular to the length direction of the in-and-out warehouse translation guide rail 55, the nut seat 59 is installed on the upper sliding part of the mobile slide 510, the output shaft of the second in-and-out warehouse translation drive motor 57 is transmission-connected to the nut seat 59 through the translation drive screw 58, and the in-and-out warehouse arm 4 is installed on the upper sliding part of the mobile slide 510 through the in-and-out warehouse arm connecting bracket 511.

[0035] like Figure 5 As shown, the in-and-out arm 4 is provided with a plurality of arm suction cups 41 for sucking wafers.

[0036] When the wafer in the wafer bin 2 needs to be transferred to the central suction cup 6, the first in-and-out translation drive motor 52 can drive the in-and-out arm 4 to move to the inside of the wafer bin 2, and the arm suction cup 41 on the in-and-out arm 4 can suck the wafer, and under the drive of the first in-and-out translation drive motor 52, the in-and-out arm 4 can transfer the wafer to the central suction cup 6. Among them, the second in-and-out translation drive motor 57 can drive the moving slide 510 to move through the translation drive lead screw 58 and the nut seat 59, so as to fine-tune the position of the in-and-out arm 4.

[0037] like Figure 6 and Figure 7 As shown, the suction cup lifting drive device 7 may include a suction cup lifting back plate 71, a suction cup lifting drive motor 72, a reducer 73, a suction cup lifting transmission belt 74, a suction cup lifting transmission wheel 75, a suction cup lifting transmission belt connecting seat 76, a suction cup lifting seat 77 and a suction cup lifting guide rail 78. The suction cup lifting transmission wheel 75 is installed at the upper and lower ends of the suction cup lifting back plate 71. The output shaft of the suction cup lifting drive motor 72 can be connected to the input shaft of the reducer 73 through a transmission assembly of a transmission belt+transmission wheel. The suction cup lifting drive motor 72 is transmission-connected to the suction cup lifting transmission wheel 75 located at the lower end of the suction cup lifting back plate 71 through the reducer 73. The suction cup lifting transmission belt 74 is sleeved between the two suction cup lifting transmission wheels 75. The suction cup lifting seat 77 is slidingly connected to the suction cup lifting back plate 71 through the suction cup lifting guide rail 78. The suction cup lifting seat 77 is connected to the suction cup lifting transmission belt 74 through the suction cup lifting transmission belt connecting seat 76. The suction cup lifting drive motor 72 can drive the suction cup lifting seat 77 to move up and down.

[0038] like Figure 6 and Figure 8 As shown, the suction cup horizontal adjustment device 8 may include a motor mounting plate 81, a horizontal adjustment motor 82, a horizontal adjustment encoder 83, a first adjustment swing block 84, a second adjustment swing block 85, an adjustment transmission rod 86 and a horizontal adjustment swing plate 87. The horizontal adjustment motor 82 and the horizontal adjustment encoder 83 are both mounted on the suction cup lifting seat 77 through the motor mounting plate 81. The output shaft of the horizontal adjustment motor 82 is connected to one end of the first adjustment swing block 84, and the other end of the first adjustment swing block 84 is rotatably connected to the adjustment transmission rod 86. The shaft of the horizontal adjustment encoder 83 is connected to one end of the second adjustment swing block 85, and the other end of the second adjustment swing block 85 is rotatably connected to the adjustment transmission rod 86. The upper end of the adjustment transmission rod 86 is rotatably connected to a side edge of the horizontal adjustment swing plate 87, and the horizontal adjustment swing plate 87 is rotatably connected to the upper end of the suction cup lifting seat 77.

[0039] The horizontal adjustment motor 82 can drive the adjustment transmission rod 86 to rise and fall through the first adjustment swing block 84, and drive the horizontal adjustment swing plate 87 to swing through the adjustment transmission rod 86, so as to adjust the horizontal position of the center suction cup 6 and the wafer sucked by the center suction cup 6. When the adjustment transmission rod 86 rises and falls, the second adjustment swing block 85 can also be driven to swing, and at this time, the second adjustment swing block 85 can drive the shaft of the horizontal adjustment encoder 83 to rotate, so that the horizontal adjustment encoder 83 can accurately detect the swing angle of the horizontal adjustment swing plate 87 (i.e., the swing angle of the center suction cup).

[0040] like Figure 8 and Fig. 9As shown, the suction cup flipping drive device 9 may include a suction cup flipping mounting frame 91, a suction cup flipping drive motor 92, a suction cup flipping encoder 93, a suction cup flipping transmission belt 94 and a suction cup flipping transmission wheel 95. The suction cup flipping mounting frame 91 is mounted on the horizontal adjustment swing plate 87, the suction cup flipping drive motor 92 and the suction cup flipping encoder 93 are both mounted on the suction cup flipping mounting frame 91, the suction cup flipping transmission wheel 95 are respectively mounted on the output shaft of the suction cup flipping drive motor 92, the shaft body of the suction cup flipping encoder 93 and one side of the suction cup rotation drive device 10, the suction cup flipping transmission belt 94 is sleeved between the three suction cup flipping transmission wheels 95, the suction cup rotation drive device 10 is rotatably connected to the suction cup flipping mounting frame 91, the suction cup flipping drive motor 92 can drive the suction cup rotation drive device 10 to flip through the suction cup flipping transmission belt 94 and the suction cup flipping transmission wheel 95, and the suction cup flipping encoder 93 can accurately detect the flipping angle of the center suction cup.

[0041] like Figure 8 and Fig. 9 As shown, the suction cup rotation drive device 10 may include a suction cup rotation drive motor 101, a suction cup rotation mounting seat 102 and a suction cup rotation coupling 103. The suction cup rotation mounting seat 102 is rotatably connected to the suction cup flip mounting frame 91, the suction cup rotation drive motor 101 is installed at the bottom of the suction cup rotation mounting seat 102, the center suction cup 6 is rotatably connected to the top of the suction cup rotation mounting seat 102, and the output shaft of the suction cup rotation drive motor 101 is connected to the lower end rotating shaft of the center suction cup 6 through the suction cup rotation coupling 103.

[0042] As a preferred embodiment, Figure 7 and Figure 8 As shown, the other end of the first adjustment swing block 84 can also be provided with a first limit bearing 88, and the side of the first limit bearing 88 is provided with a longitudinally arranged horizontal adjustment limit block 89. When the first limit bearing 88 rolls in contact with the side of the horizontal adjustment limit block 89, the horizontal adjustment limit block 89 can limit the first adjustment swing block 84 from swinging, thereby preventing the center suction cup 6 from unnecessary deflection. When the suction cup lifting drive device 7 drives the suction cup lifting seat 77 and the suction cup horizontal adjustment device 8 to move upward, the first limit bearing 88 can move upward therewith, breaking away from the restriction of the horizontal adjustment limit block 89, and at this time, the suction cup horizontal adjustment device 8 can drive the center suction cup 6 to swing to adjust the position.

[0043] Similarly, if Figure 8 and Fig. 9As shown, the suction cup flipping transmission wheel 95 on the shaft of the suction cup flipping encoder 93 can also be connected to a limit bearing mounting block 96, on which a second limit bearing 97 is provided, and a longitudinally arranged flipping limit block 98 is provided on the side of the second limit bearing 97. When the second limit bearing 97 rolls in contact with the side of the flipping limit block 98, the flipping limit block 98 can limit the rotation of the suction cup flipping transmission wheel 95 connected to the shaft of the suction cup flipping encoder 93, thereby preventing the center suction cup 6 from being flipped unnecessarily. When the suction cup lifting drive device 7 drives the suction cup lifting seat 77 and the suction cup flipping drive device 9 to move upward, the second limit bearing 97 can move upward accordingly, breaking away from the restriction of the flipping limit block 98, and at this time, the suction cup flipping drive device 9 can drive the center suction cup 6 to flip forward and backward.

[0044] like Fig.10 As shown, the edge-finding sensor advance and retreat drive device 12 may include an edge-finding bracket 121, an advance and retreat drive motor 122, an advance and retreat transmission belt 123, an advance and retreat transmission wheel 124, an advance and retreat drive guide rail 125, an advance and retreat transmission belt connecting seat 126 and an edge-finding sensor mounting seat 127. The advance and retreat transmission wheels 124 are located at both ends of the edge-finding bracket 121, the output shaft of the advance and retreat drive motor 122 is connected to one of the advance and retreat transmission wheels 124, the advance and retreat transmission belt 123 is sleeved between the two advance and retreat transmission wheels 124, the advance and retreat transmission belt connecting seat 126 is slidably connected to the edge-finding bracket 121 through the advance and retreat drive guide rail 125, the advance and retreat transmission belt connecting seat 126 is connected to the advance and retreat transmission belt 123 through the advance and retreat transmission belt connecting seat 126, and the edge-finding sensor 11 is mounted on the edge-finding sensor mounting seat 127. The edge-finding sensor 11 can detect the position of the target alignment point (i.e., the centerline groove) on the edge of the wafer. When working, the edge-finding sensor 11 finds the target alignment point on the edge of the wafer, which facilitates the wafer to be placed in the warehouse according to the specified angle direction and to be transferred to the microscope detection area according to the specified angle direction.

[0045] like Fig.11 , Fig.12 and Fig.13As shown, the flip arm lifting and flipping driving device 14 may include a lifting and flipping bracket 141, a flipping driving back plate 142, a flipping arm lifting and flipping driving motor 143, a flipping arm lifting and flipping transmission belt 144, a flipping arm lifting and flipping transmission wheel 145, an arm lifting and flipping transmission belt connecting seat 146, a flipping arm lifting seat 147, a flipping arm lifting and flipping guide rail 148, a flipping driving active wheel 149, a flipping driving driven wheel 1410, a flipping driving belt 1411, a flipping driving bearing 1412, a flipping bearing mounting block 1413 and a flipping arm flipping mounting seat 141 4. The flip driving back plate 142 is installed on the back of the lifting flip bracket 141. A flip driving track groove 1421 is provided on the flip driving back plate 142. The lower end of the flip driving track groove 1421 extends longitudinally downward, and the upper end of the flip driving track groove 1421 is bent to one side. The flip arm lifting driving motor 143 is installed on the lifting flip bracket 141. The flip arm lifting transmission wheel 145 is installed on the back of the lifting flip bracket 141 and the output shaft of the flip arm lifting driving motor 143. The flip arm lifting transmission belt 144 is installed on all the flip arm lifting driving motors 143. The arm lifting transmission wheel 145 is between the arm lifting transmission wheel 145, the flip arm lifting seat 147 is slidably connected to the back of the lifting and flipping bracket 141 through the flip arm lifting guide rail 148 and is located between the lifting and flipping bracket 141 and the flip driving back plate 142, the flip arm lifting seat 147 is connected to the flip arm lifting transmission belt 144 through the arm lifting transmission belt connecting seat 146, the flip arm flip mounting seat 1414 is rotatably connected to the upper end of the flip arm lifting seat 147, the flip driving driving wheel 149 is installed at the lower end of the flip arm lifting seat 147, and the flip driving driven wheel 1 410 is installed on the flip arm flip mounting seat 1414, the flip drive belt 1411 is installed between the flip drive active wheel 149 and the flip drive driven wheel 1410, the flip drive bearing 1412 is installed on the flip drive active wheel 149 through the flip bearing mounting block 1413, the flip drive bearing 1412 is movably installed in the flip drive track groove 1421 of the flip drive back plate 142, the flip arm 13 is installed on the flip arm flip mounting seat 1414, and the flip arm 13 is respectively provided with a plurality of arm suction cups 131 for sucking the wafer.

[0046] The flipping arm lifting drive motor 143 can drive the flipping arm lifting seat 147 to move up and down through the flipping arm lifting transmission belt 144 and the flipping arm lifting transmission wheel 145. The flipping drive bearing 1412 can drive the flipping drive active wheel 149 to rotate under the guidance of the flipping drive track groove 1421 during the process of following the flipping arm lifting seat 147 to rise and fall, thereby driving the flipping arm 13 installed on the flipping arm flipping mounting seat 1414 to flip through the flipping drive belt 1411 and the flipping drive driven wheel 1410.

[0047] The arm flipping and lifting operations of the flip arm lifting and turning driving device 14 of this embodiment can be realized by using only one motor, which greatly reduces energy consumption and production cost of the equipment.

[0048] like Fig.14 , Fig.15 and Fig.16 As shown, the inspection and handling arm lifting drive device 17 may include an inspection and handling arm lifting motor 171, a lifting base 172, a lifting movable seat 173, a lifting drive pendulum block 174 and a lifting drive bearing 175. The lifting movable seat 173 is slidably mounted on the lifting base 172 through a slide rail assembly 176. The inspection and handling arm lifting motor 171 is mounted on the lifting base 172. The output shaft of the inspection and handling arm lifting motor 171 is connected to one end of the lifting drive pendulum block 174. The lifting drive bearing 175 is mounted on the other end of the lifting drive pendulum block 174, and the lifting drive bearing 175 is movably mounted in a bearing movable groove 177 (a waist-shaped groove arranged horizontally) provided at the lower end of the lifting movable seat 173. The inspection and handling arm lifting motor 171 can drive the lifting drive pendulum block 174 to swing, thereby driving the lifting movable seat 173 to move up and down through the lifting drive bearing 175 on the lifting drive pendulum block 174.

[0049] like Fig.14 and Fig.15As shown, the inspection and handling arm translation drive device 18 may include an arm translation mounting frame 181, an inspection and handling arm translation drive motor 182, an arm translation transmission belt 183, an arm translation transmission wheel 184, a first arm translation guide rail 185, a first inspection and handling arm mounting seat 186, a first arm translation transmission belt connecting seat 187, a second arm translation guide rail 188, a second inspection and handling arm mounting seat 189 and a second arm translation transmission belt connecting seat 1810, the arm translation mounting frame 181 is installed on the top of the lifting movable seat 173, the arm translation transmission wheel 184 is located at both ends of the arm translation mounting frame 181, the output shaft of the inspection and handling arm translation drive motor 182 is connected to one of the arm translation transmission wheels 184, the arm translation transmission belt 183 is sleeved between the two arm translation transmission wheels 184, and the first inspection and handling arm mounting seat 186 is connected to the arm translation mounting frame 1 through the first arm translation guide rail 185. 81 is slidably connected to a surface of the arm translation belt 183, the first inspection and handling arm mounting seat 186 is connected to one side of the arm translation belt 183 through the first arm translation belt connecting seat 187, the second inspection and handling arm mounting seat 189 is slidably connected to the other surface of the arm translation mounting frame 181 through the second arm translation guide rail 188, the second inspection and handling arm mounting seat 189 is connected to the other side of the arm translation belt 183 through the second arm translation belt connecting seat 1810, the first inspection and handling arm 15 is installed on the first inspection and handling arm mounting seat 186, the second inspection and handling arm 16 is installed on the second inspection and handling arm mounting seat 189, the height of the first inspection and handling arm 15 is higher than the height of the second inspection and handling arm 16, the first inspection and handling arm 15 is provided with a plurality of arm suction cups 151 for sucking wafers, and the second inspection and handling arm 16 is provided with a plurality of arm suction cups 161 for sucking wafers.

[0050] The inspection and handling arm translation drive motor 182 can drive the first inspection and handling arm 15 installed on the first inspection and handling arm mounting seat 186 and the second inspection and handling arm 16 installed on the second inspection and handling arm mounting seat 189 to move up and down alternately through the arm translation transmission belt 183. In this embodiment, the alternating double inspection and handling arm design can greatly improve the wafer handling efficiency.

[0051] like Figure 1 As shown, the host housing 1 may also be provided with a touch display screen 19 , a control handle 20 and control buttons 30 , and a supporting foot 40 is provided at the bottom of the host housing 1 .

[0052] like Fig.17 and Fig.18As shown, a microscope 50, a stage 60 and a stage moving drive device 70 for driving the stage to move in the XY axis can also be provided on one side of the main body housing 1. The stage 60 is installed on the stage moving drive device. The stage 60 is provided with a stage suction cup 601 for sucking the wafer. The lens part of the microscope 50 is located above the stage 60.

[0053] The working principle of the wafer carrier inspection machine of the present invention is as follows:

[0054] Before work, the operator can place the wafer silo 2 filled with wafers to be inspected on the silo lifting drive device 3 .

[0055] When working, the wafer carrier inspection machine is started, and the in-and-out warehouse arm translation drive device 5 can drive the in-and-out warehouse arm 4 to take out the wafer to be inspected from the wafer bin 2 and transfer it to the central suction cup 6, so that the central suction cup 6 sucks the middle of the back side of the wafer, and then the suction cup lifting drive device 7 drives the central suction cup 6 and the wafer sucked by the central suction cup 6 to move upward, and the suction cup flipping drive device 9 drives the wafer in a horizontal state to flip to a set angle to realize front flip detection (i.e. wafer surface detection) and back flip detection (i.e. wafer back edge detection) for easy operation. The personnel visually inspect the defects on the front and back of the wafer (except the middle part) from a macroscopic perspective. Then, the suction cup flipping drive device 9 drives the wafer to flip to a horizontal state. The suction cup lifting drive device 7 drives the wafer to descend and reset. The edge finding sensor advance and retreat drive device 12 drives the edge finding sensor 11 to approach the edge of the wafer. The suction cup rotation drive device 10 drives the wafer to rotate in the horizontal direction to assist the edge finding sensor in the edge finding operation. Subsequently, the arm lifting and flipping drive device 14 drives the flipping arm 13 to move upward, and the flipping arm 13 sucks the wafer. When the flip arm 13 continues to rise to its position, the flip arm lifting and flipping driving device 14 drives the wafer sucked by the flip arm 13 to flip to a set angle to realize reverse flipping detection (i.e. wafer back center detection) to facilitate the operator to macroscopically visually inspect the defects in the middle of the reverse side of the wafer. After that, the flip arm lifting and flipping driving device 14 drives the wafer on the flip arm 13 to be horizontally placed back on the center suction cup 6. Furthermore, under the drive of the inspection and handling arm lifting driving device 17 and the inspection and handling arm translation driving device 18, the first The inspection and handling arm 15 transports the wafer to the stage suction cup 601 of the stage 60. At this time, the operator sitting at the microscope inspection station can observe the defects of the wafer through the microscope 50. During the operator's microscope inspection, the in-and-out warehouse arm translation drive device 5 can drive the in-and-out warehouse arm 4 to take out the next wafer to be inspected from the wafer bin 2 and transfer it to the center suction cup 6. The above operation needs to be repeated for the next wafer. When it needs to be transported to the microscope inspection station, it is transported by the second inspection and handling arm 16 instead.

[0056] After the inspection of the current wafer is completed, the first inspection and handling arm 15 takes the previous wafer off the stage suction cup 601 of the stage 60. Driven by the inspection and handling arm lifting drive device 17 and the inspection and handling arm translation drive device 18, the first inspection and handling arm 15 drives the previous wafer to move back to the center suction cup 6, and the second inspection and handling arm 16 drives the next wafer to be transported to the stage suction cup 601 of the stage 60. At this time, the previous wafer and the next wafer can move up and down alternately.

[0057] After the current wafer returns to the center suction cup 6, the edge-finding sensor advance and retreat drive device 12 drives the edge-finding sensor 11 to approach the edge of the wafer again, and the suction cup rotation drive device 10 drives the wafer to rotate in the horizontal direction. After the edge-finding operation is completed, the in-and-out warehouse arm translation drive device 5 can drive the in-and-out warehouse arm 4 to send the inspected wafer back to the wafer silo 2, and drive the in-and-out warehouse arm 4 to continue to go to the next wafer to be inspected.

[0058] To sum up, the present invention has a compact structure, small size, and saves space. It can be placed on a table or workbench and used with a microscope to perform microscopic inspection of wafers. It can complete a series of automated operations such as automatic loading, automatic flipping, automatic edge finding, automatic transportation for microscopic inspection, and automatic unloading of wafers. It can assist operators in performing wafer surface inspection, wafer back edge inspection, wafer back center inspection, and microscope microscopic inspection on wafers. It is easy to operate and runs stably and reliably. During the movement of the wafer, there will be no problems such as wafer falling or bumping, which greatly improves production efficiency and reduces production costs.

[0059] The above embodiments are preferred implementation modes of the present invention, but the implementation modes of the present invention are not limited to the above embodiments. Any other changes, modifications, substitutions, combinations, and simplifications that do not deviate from the spirit and principles of the present invention should be equivalent replacement methods and are included in the protection scope of the present invention.

Claims

1. A wafer carrier inspection machine, comprising a mainframe housing, characterized in that: The main engine housing is provided with a wafer hopper for placing multiple wafers in layers, a hopper lifting drive device for driving the wafer hopper to rise and fall, an in-and-out hopper arm for taking out the wafers to be tested in the wafer hopper to the central suction cup and returning the tested wafers to the wafer hopper, an in-and-out hopper arm translation drive device for driving the in-and-out hopper arm to move, a central suction cup for sucking the middle of the reverse side of the wafer, a suction cup lifting drive device for driving the central suction cup to rise and fall, a suction cup horizontal adjustment device for adjusting the horizontal position of the wafer sucked by the central suction cup, a suction cup flipping drive device for driving the wafer sucked by the central suction cup to flip over both sides, and a suction cup flipping drive device for driving the wafer sucked by the central suction cup to flip over during edge finding and / or after flipping over the reverse side. A rotating suction cup rotation drive device, an edge-finding sensor for detecting the position of the target alignment point on the edge of the wafer, an edge-finding sensor advance and retreat drive device for driving the edge-finding sensor to move forward and backward, a flipping arm for sucking the reverse edge of the wafer and flipping the reverse side and placing the flipped wafer back on the central suction cup, a flipping arm lifting and flipping drive device for driving the flipping arm to lift and flip, a first inspection and transporting arm and a second inspection and transporting arm for alternately transporting the front and rear wafers placed on the flipping arm back to the central suction cup to the microscope inspection area and alternately transporting the front and rear wafers from the microscope observation area back to the central suction cup, and an inspection and transporting arm for driving the first inspection and transporting arm and the second inspection and transporting arm to lift and lower. The arm lifting drive device is used to drive the first inspection and handling arm and the second inspection and handling arm to perform alternating horizontal movement. The inspection and handling arm translation drive device, the silo lifting drive device, the in-and-out silo arm translation drive device, the flip arm lifting and flipping drive device and the edge-finding sensor advance and retreat drive device are respectively arranged around the central suction cup. The wafer silo is installed on the silo lifting drive device, the in-and-out silo arm is installed on the in-and-out silo arm translation drive device, the flip arm is installed on the flip arm lifting and flipping drive device, the edge-finding sensor is installed on the edge-finding sensor advance and retreat drive device, and the suction cup lifting drive device is transmission-connected to the suction cup horizontal adjustment device and can drive the suction cup horizontal adjustment device up and down. The suction cup horizontal adjustment device is connected with the suction cup flipping drive device and can drive the suction cup flipping drive device to swing. The suction cup flipping drive device is connected with the suction cup rotation drive device and can drive the suction cup rotation drive device to flip. The suction cup rotation drive device is connected with the central suction cup and can drive the central suction cup to rotate. The lifting drive device of the inspection and handling arm is located on one side of the lifting and flipping drive device of the flipping arm. The translation drive device of the inspection and handling arm is installed on the lifting drive device of the inspection and handling arm. The first inspection and handling arm and the second inspection and handling arm are respectively installed on the translation drive device of the inspection and handling arm. The height of the first inspection and handling arm is higher than that of the second inspection and handling arm.The in-and-out bin arm, the flipping arm, the first inspection and handling arm, and the second inspection and handling arm are respectively provided with arm suction cups for sucking the wafers.

2. The wafer carrier inspection machine according to claim 1, characterized in that: The wafer silo comprises a silo body, the front of which is provided with a silo inlet and outlet, and the inside of the silo body is provided with a plurality of wafer placement slots arranged in sequence from bottom to top on both sides; The silo lifting drive device includes a silo lifting motor, a silo lifting screw and a lifting platform. The output shaft of the silo lifting motor is connected to the silo lifting screw through a transmission assembly. The nut on the silo lifting screw is connected to the lifting platform. The silo lifting motor can drive the lifting platform up and down through the silo lifting screw. The wafer silo is installed on the lifting platform.

3. The wafer carrier inspection machine according to claim 1, characterized in that: The in-and-out warehouse arm translation drive device includes an in-and-out warehouse translation bracket, a first in-and-out warehouse translation drive motor, an in-and-out warehouse translation transmission belt, an in-and-out warehouse translation transmission wheel, an in-and-out warehouse translation guide rail, an in-and-out warehouse transmission belt connecting seat, a second in-and-out warehouse translation drive motor, a translation drive lead screw, a nut seat, a movable slide and an in-and-out warehouse arm connecting bracket, the in-and-out warehouse translation transmission wheels are respectively located at both ends of the in-and-out warehouse translation bracket, the output shaft of the first in-and-out warehouse translation drive motor is connected to one of the in-and-out warehouse translation transmission wheels, the in-and-out warehouse translation transmission belt is sleeved between the two in-and-out warehouse translation transmission wheels, and the movable slide is connected to the in-and-out warehouse translation bracket. The shift guide rail is slidably connected to the in-and-out warehouse translation bracket, the lower base part of the mobile slide is connected to the in-and-out warehouse translation transmission belt through the in-and-out warehouse transmission belt connecting seat, the second in-and-out warehouse translation drive motor is installed on the lower base part of the mobile slide, the horizontal installation direction of the second in-and-out warehouse translation drive motor is perpendicular to the length direction of the in-and-out warehouse translation guide rail, the nut seat is installed on the upper sliding part of the mobile slide, the output shaft of the second in-and-out warehouse translation drive motor is transmission-connected to the nut seat through the translation drive screw, and the in-and-out warehouse arm is installed on the upper sliding part of the mobile slide through the in-and-out warehouse arm connecting bracket.

4. The wafer carrier inspection machine according to claim 1, characterized in that: The suction cup lifting drive device comprises a suction cup lifting back plate, a suction cup lifting drive motor, a reducer, a suction cup lifting transmission belt, a suction cup lifting transmission wheel, a suction cup lifting transmission belt connecting seat, a suction cup lifting seat and a suction cup lifting guide rail. The suction cup lifting transmission wheel is installed at the upper and lower ends of the suction cup lifting back plate. The suction cup lifting drive motor is connected to the suction cup lifting transmission wheel at the lower end of the suction cup lifting back plate through the reducer. The suction cup lifting transmission belt is sleeved between the two suction cup lifting transmission wheels. The suction cup lifting seat is slidably connected to the suction cup lifting back plate through the suction cup lifting guide rail. The suction cup lifting seat is connected to the suction cup lifting transmission belt through the suction cup lifting transmission belt connecting seat. The suction cup lifting drive motor can drive the suction cup lifting seat to move up and down. The suction cup horizontal adjustment device comprises a motor mounting plate, a horizontal adjustment motor, a horizontal adjustment encoder, a first adjustment swing block, a second adjustment swing block, an adjustment transmission rod and a horizontal adjustment swing plate, wherein the horizontal adjustment motor and the horizontal adjustment encoder are both mounted on the suction cup lifting seat through the motor mounting plate, the output shaft of the horizontal adjustment motor is connected to one end of the first adjustment swing block, the other end of the first adjustment swing block is rotatably connected to the adjustment transmission rod, the shaft body of the horizontal adjustment encoder is connected to one end of the second adjustment swing block, the other end of the second adjustment swing block is rotatably connected to the adjustment transmission rod, the upper end of the adjustment transmission rod is rotatably connected to one side edge of the horizontal adjustment swing plate, the horizontal adjustment swing plate is rotatably connected to the upper end of the suction cup lifting seat, and the horizontal adjustment motor can drive the horizontal adjustment swing plate to swing through the first adjustment swing block and the adjustment transmission rod; The suction cup flipping drive device comprises a suction cup flipping mounting frame, a suction cup flipping drive motor, a suction cup flipping encoder, a suction cup flipping transmission belt and a suction cup flipping transmission wheel, the suction cup flipping mounting frame is mounted on a horizontal adjustment swing plate, the suction cup flipping drive motor and the suction cup flipping encoder are both mounted on the suction cup flipping mounting frame, the suction cup flipping transmission wheel is respectively mounted on an output shaft of the suction cup flipping drive motor, a shaft body of the suction cup flipping encoder and a side surface of the suction cup rotation driving device, the suction cup flipping transmission belt is sleeved between the three suction cup flipping transmission wheels, the suction cup rotation driving device is rotatably connected to the suction cup flipping mounting frame, and the suction cup flipping drive motor can drive the suction cup rotation driving device to flip through the suction cup flipping transmission belt and the suction cup flipping transmission wheel; The suction cup rotation drive device includes a suction cup rotation drive motor, a suction cup rotation mounting seat and a suction cup rotation coupling. The suction cup rotation mounting seat is rotatably connected to the suction cup flip mounting frame, the suction cup rotation drive motor is installed at the bottom of the suction cup rotation mounting seat, the center suction cup is rotatably connected to the top of the suction cup rotation mounting seat, and the output shaft of the suction cup rotation drive motor is connected to the lower end rotating shaft of the center suction cup through the suction cup rotation coupling.

5. The wafer carrier inspection machine according to claim 4, characterized in that: A first limit bearing is provided at the other end of the first adjustment swing block, a side of the first limit bearing is provided with a longitudinally arranged horizontal adjustment limit stopper, and the first limit bearing can be in rolling contact with the side of the horizontal adjustment limit stopper; The suction cup flipping transmission wheel on the shaft body of the suction cup flipping encoder is connected to the limit bearing mounting block, and the limit bearing mounting block is provided with a second limit bearing. The side edge of the second limit bearing is provided with a longitudinally arranged flipping limit block, and the second limit bearing can be in rolling contact with the side of the flipping limit block.

6. The wafer carrier inspection machine according to claim 1, characterized in that: The edge-finding sensor advance and retreat drive device includes an edge-finding bracket, an advance and retreat drive motor, an advance and retreat transmission belt, an advance and retreat transmission wheel, an advance and retreat drive guide rail, an advance and retreat transmission belt connecting seat and an edge-finding sensor mounting seat. The advance and retreat transmission wheels are located at both ends of the edge-finding bracket, the output shaft of the advance and retreat drive motor is connected to one of the advance and retreat transmission wheels, the advance and retreat transmission belt is sleeved between the two advance and retreat transmission wheels, the advance and retreat transmission belt connecting seat is slidably connected to the edge-finding bracket through the advance and retreat drive guide rail, the advance and retreat transmission belt connecting seat is connected to the advance and retreat transmission belt through the advance and retreat transmission belt connecting seat, and the edge-finding sensor is installed on the edge-finding sensor mounting seat.

7. The wafer carrier inspection machine according to claim 1, characterized in that: The flip arm lifting and flipping driving device comprises a lifting and flipping bracket, a flipping driving back plate, a flip arm lifting and flipping driving motor, a flip arm lifting and flipping transmission belt, a flip arm lifting and flipping transmission wheel, an arm lifting and flipping transmission belt connecting seat, a flip arm lifting seat, a flip arm lifting guide rail, a flipping driving active wheel, a flipping driving driven wheel, a flipping driving belt, a flipping driving bearing, a flipping bearing mounting block and a flipping arm flipping mounting seat, the flipping driving back plate is installed on the back of the lifting and flipping bracket, a flipping driving track groove is provided on the flipping driving back plate, the lower end of the flipping driving track groove extends longitudinally downward, and the upper end of the flipping driving track groove is bent to one side, the flip arm lifting and flipping driving motor is installed on the lifting and flipping bracket, the flip arm lifting and flipping transmission wheel is installed on the back of the lifting and flipping bracket and the output shaft of the flip arm lifting and flipping driving motor, the flip arm lifting and flipping transmission belt is sleeved between all the flip arm lifting and flipping transmission wheels, the flip arm lifting seat is slidably connected with the back of the lifting and flipping bracket through the flip arm lifting guide rail and is located between the lifting and flipping bracket and the flipping driving back plate, The flip arm lifting seat is connected with the flip arm lifting transmission belt through the arm lifting transmission belt connecting seat, the flip arm flip mounting seat is rotatably connected with the upper end of the flip arm lifting seat, the flip driving active wheel is installed at the lower end of the flip arm lifting seat, the flip driving driven wheel is installed on the flip arm flip mounting seat, the flip driving belt is sleeved between the flip driving active wheel and the flip driving driven wheel, the flip driving bearing is installed on the flip driving active wheel through the flip bearing mounting block, the flip driving bearing is movably installed in the flip driving track groove of the flip driving back plate, the flip arm is installed on the flip arm flip mounting seat, the flip arm lifting drive motor can drive the flip arm lifting seat to move up and down through the flip arm lifting transmission belt and the flip arm lifting transmission wheel, and the flip driving bearing can drive the flip driving active wheel to rotate under the guidance of the flip driving track groove in the process of following the flip arm lifting seat to lift, thereby driving the flip arm installed on the flip arm flip mounting seat to flip through the flip driving belt and the flip driving driven wheel.

8. The wafer carrier inspection machine according to claim 1, characterized in that: The inspection and handling arm lifting drive device comprises an inspection and handling arm lifting motor, a lifting base, a lifting movable base, a lifting drive pendulum block and a lifting drive bearing. The lifting movable base can be slidably mounted on the lifting base through a slide rail assembly. The inspection and handling arm lifting motor is mounted on the lifting base. The output shaft of the inspection and handling arm lifting motor is connected to one end of the lifting drive pendulum block. The lifting drive bearing is mounted on the other end of the lifting drive pendulum block, and the lifting drive bearing is movably mounted in a bearing movable groove provided at the lower end of the lifting movable base. The inspection and handling arm lifting motor can drive the lifting movable base to move up and down through the lifting drive pendulum block and the lifting drive bearing. The inspection and handling arm translation drive device includes an arm translation mounting frame, an inspection and handling arm translation drive motor, an arm translation transmission belt, an arm translation transmission wheel, a first arm translation guide rail, a first inspection and handling arm mounting seat, a first arm translation transmission belt connecting seat, a second arm translation guide rail, a second inspection and handling arm mounting seat and a second arm translation transmission belt connecting seat. The arm translation mounting frame is installed on the top of the lifting movable seat, and the arm translation transmission wheel is located at both ends of the arm translation mounting frame. The output shaft of the inspection and handling arm translation drive motor is connected to one of the arm translation transmission wheels, and the arm translation transmission belt is sleeved between the two arm translation transmission wheels. The first inspection and handling arm mounting seat is slidably connected to a surface of the arm translation mounting frame through the first arm translation guide rail. The first inspection and carrying arm mounting seat is connected to one side belt body of the arm translation transmission belt through the first arm translation transmission belt connecting seat, the second inspection and carrying arm mounting seat is slidably connected to the other surface of the arm translation mounting frame through the second arm translation guide rail, the second inspection and carrying arm mounting seat is connected to the other side belt body of the arm translation transmission belt through the second arm translation transmission belt connecting seat, the first inspection and carrying arm is installed on the first inspection and carrying arm mounting seat, the second inspection and carrying arm is installed on the second inspection and carrying arm mounting seat, and the inspection and carrying arm translation drive motor can drive the first inspection and carrying arm installed on the first inspection and carrying arm mounting seat and the second inspection and carrying arm installed on the second inspection and carrying arm mounting seat to move alternately through the arm translation transmission belt.

9. The wafer carrier inspection machine according to claim 1, characterized in that: The host housing is provided with a touch display screen, a control handle and / or control buttons, and the bottom of the host housing is provided with supporting feet.

10. The wafer carrier inspection machine according to any one of claims 1 to 9, characterized in that: A microscope, a stage and a stage moving drive device for driving the stage to move along the XY axis are provided on one side of the main body housing. The stage is installed on the stage moving drive device. A stage suction cup for sucking the wafer is provided on the stage. The lens portion of the microscope is located above the stage.

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