An experimental apparatus for vacuum metal evaporation

Abstract

The application provides an experimental device for vacuum metal evaporation, and belongs to the technical field of metal evaporation experiments. The device specifically comprises a vacuum experiment box, a cavity structure for placing a metal to be heated, and a nozzle communicating with the vacuum experiment box arranged on the cavity structure. A support frame is installed in the vacuum experiment box, and a plurality of slit plates are slidably installed on the support frame. The slit plates are slidably arranged on the support frame to change the distance between the slit plates and the nozzle. Different metals condense on different slit plates when metal vapor passes through the plurality of slit plates. A collection plate is slidably installed on the support frame and located on the side of the slit plates away from the nozzle. The collection plate is slidably arranged on the support frame to change the distance between the collection plate and the nozzle. The metal vapor ejected from the nozzle is sequentially left on the collection plate after passing through a plurality of slit plates. Through the processing scheme, the same device can cope with metal evaporation experiments under different conditions by quickly adjusting the positions of various structures of the device.

Description

Technical Field

[0001] This application relates to the field of metal evaporation experiments, and in particular to an experimental apparatus for vacuum metal evaporation. Background Technology

[0002] Vacuum evaporation purification of metals is a common purification method. Different types of metals require different distances between the slit plate and the evaporation source. Current technology requires the fabrication of various devices to be used in evaporation experiments of different types of metals, and various experimental devices need to be made. Summary of the Invention

[0003] In view of this, this application provides an experimental apparatus for vacuum metal evaporation, which solves the problems in the prior art. By quickly adjusting the position of each structure of the apparatus, the same apparatus can cope with metal evaporation experiments under different conditions.

[0004] The experimental apparatus for vacuum metal evaporation provided in this application adopts the following technical solution:

[0005] An experimental apparatus for vacuum metal evaporation, comprising:

[0006] Vacuum test chamber;

[0007] A cavity structure for placing metal to be heated, the cavity structure is installed on one side of a vacuum test chamber, and the cavity structure is provided with a nozzle communicating with the vacuum test chamber and a switch assembly for controlling the opening and closing of the nozzle.

[0008] A support frame, which is installed inside a vacuum test chamber;

[0009] A plurality of slit plates are slidably mounted on a support frame. The plurality of slit plates are arranged sequentially along the spray direction of the metal vapor ejected from the nozzle. The slit plates slide on the support frame to change the distance between the slit plates and the nozzle. When the metal vapor passes through the plurality of slit plates, different metals condense on different slit plates.

[0010] A collecting plate is slidably mounted on a support frame. The collecting plate is located on the side of the slit plate away from the nozzle. The collecting plate slides on the support frame to change the distance between the collecting plate and the nozzle. The metal vapor ejected from the nozzle passes through multiple slit plates in sequence and then remains on the collecting plate.

[0011] Optionally, the experimental apparatus further includes at least one set of electromagnetic focusing plates and an angle adjustment assembly. The set of electromagnetic focusing plates includes electromagnetic focusing plates arranged opposite each other. The electromagnetic focusing plates are mounted on the output end of the angle adjustment assembly. The angle adjustment assembly is slidably mounted on a support frame. The electromagnetic focusing plates are located between the collecting plate and the slit plate. The electromagnetic focusing plates are used to scatter or focus charged metal atoms in the vacuum experimental chamber. The angle adjustment assembly slides on the support frame to change the distance between the electromagnetic focusing plates and the nozzle. The angle adjustment assembly is used to adjust the included angle between the electromagnetic focusing plates and the slit plate.

[0012] Optionally, the support frame includes at least one set of guide rails, each set including two opposing guide rails. The guide rails are fixedly installed in the vacuum chamber. The length direction of the guide rails is arranged along the spray direction of the metal vapor ejected from the nozzle. The guide rails are provided with T-shaped grooves and several sliders that mate with the T-shaped grooves. The sliders are threaded with fastening bolts, which pass through the sliders and abut against the guide rails. The slit plate, the collecting plate, and the angle adjustment assembly are mounted on the guide rails via different sliders.

[0013] Optionally, the angle adjustment assembly includes mounting rods spaced apart along the sliding direction of the electromagnetic focusing plate. Each mounting rod has a slotted groove. The mounting rod is mounted on a slider via adjusting bolts. The bolt head passes through the slot and is pressed against the mounting rod. A rotating rod is rotatably mounted on one end of the mounting rod facing the center of the vacuum chamber. The electromagnetic focusing plate is fixedly mounted on the rotating rod. Changing the angles of different mounting rods and altering the position of the adjusting bolts pressing against different mounting rods are used to change the tilt angle of the electromagnetic focusing plate.

[0014] Optionally, the mounting rod has a hook at one end facing the center of the vacuum chamber, and the rotating rod cooperates with the hook to hook the rotating rod onto the mounting rod.

[0015] Optionally, the mounting rod and the rotating rod are made of insulating material.

[0016] Optionally, the adjustment assembly further includes an insulating shielding layer that wraps around all the rotating rods within the same set of adjustment assemblies and is in contact with the rotating rods.

[0017] Optionally, a number of sides of the guide rail 22 are provided with T-shaped grooves arranged along the length of the guide rail 22.

[0018] Optionally, the guide rail is provided with a scale along the length of the guide rail.

[0019] In summary, this application includes the following beneficial technical effects:

[0020] This application allows for adjustment of the distances between multiple slit plates and the nozzle, the distance between the electromagnetic focusing plate and the nozzle, the angle of the electromagnetic focusing plate, and the distance between the collecting plate and the nozzle, as needed. This enables control of the temperature of the slit plates and the collecting plate during the experiment, thus meeting the requirements for metal purification under different conditions.

[0021] This application uses an electromagnetic focusing plate to scatter or focus charged metal atoms in some of the vapor, causing the target metal to condense on a slit plate below the nozzle, thereby achieving metal purification for different requirements; the pitch angle of the electromagnetic focusing plate can be adjusted by adjusting the components to control the magnetic field angle. Attached Figure Description

[0022] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the vacuum experimental chamber and cavity structure of this application;

[0024] Figure 2 This is a schematic diagram of the overall structure of the experimental apparatus for vacuum metal evaporation in this application;

[0025] Figure 3 This is a schematic diagram of the electromagnetic focusing plate and adjustment components within the city.

[0026] Figure 4 This is a schematic diagram of the structure of the mounting rod in this application;

[0027] Figure 5 This is a schematic diagram of the rotating rod, electromagnetic shielding assembly, and insulating shielding layer of this application.

[0028] Figure 6 This is a schematic diagram of the guide rail structure in this application;

[0029] Figure 7 This is a schematic diagram of the scale structure of this application.

[0030] Explanation of reference numerals in the attached drawings: 1. Cavity structure; 11. Nozzle; 2. Vacuum test chamber; 21. Support frame; 22. Guide rail; 23. T-shaped slide; 3. Slit plate; 4. Slider; 41. Fastening hole; 5. Collection plate; 6. Electromagnetic focusing plate; 7. Adjustment assembly; 71. Mounting rod; 72. Strip groove; 73. Adjusting bolt; 74. Hook; 75. Rotating rod; 76. Insulating shielding layer; 8. Scale. Detailed Implementation

[0031] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0032] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0033] It should be noted that various aspects of embodiments within the scope of the appended claims are described below. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number of aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0034] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0035] Furthermore, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that the described aspects can be practiced without these specific details.

[0036] This application provides an experimental apparatus for vacuum metal evaporation.

[0037] like Figure 1 and Figure 2 As shown, an experimental apparatus for vacuum metal evaporation includes:

[0038] Vacuum chamber 2 provides a vacuum environment for experiments. In this embodiment, the vacuum level is maintained at 10 during the experiment. -3Pa.

[0039] A cavity structure 1 for placing metal to be heated is installed on one side of a vacuum chamber 2. The cavity structure 1 is provided with a nozzle 11 that communicates with the vacuum chamber 2 and a switch assembly for controlling the opening and closing of the nozzle 11. The cavity structure 1 is a crucible with an opening that can be closed. The switch assembly is an electric baffle that controls the position of the electric baffle to close or open the nozzle 11.

[0040] Support frame 21 is installed inside vacuum test chamber 2.

[0041] A plurality of slit plates 3 are slidably mounted on a support frame 21. The plurality of slit plates 3 are arranged sequentially along the spray direction of the metal vapor ejected from the nozzle 11. The slit plates 3 slide on the support frame 21 to change the distance between the slit plates 3 and the nozzle 11. When the metal vapor passes through the plurality of slit plates 3, different metals condense on different slit plates 3.

[0042] The collecting plate 5 is slidably mounted on the support frame 21. The collecting plate 5 is located on the side of the slit plate 3 away from the nozzle 11. The collecting plate 5 slides on the support frame 21 to change the distance between the collecting plate 5 and the nozzle 11. The metal vapor ejected from the nozzle 11 passes through multiple slit plates 3 in sequence and then remains on the collecting plate 5.

[0043] In this embodiment, the cavity structure 1 is located at the top of the vacuum chamber 2. In other embodiments, the cavity structure 1 may be located at the bottom or side wall of the vacuum chamber. In this embodiment, during the experiment, a vacuum holding system is used to evacuate the air from the vacuum chamber 2, achieving a vacuum level of 10⁻⁶ inside the chamber. -3 When the crucible is heated, the metal inside the crucible begins to evaporate. After the nozzle 11 is opened, the metal vapor is evaporated from the nozzle 11 of the crucible through the collimation structure. Due to the different evaporation rates of the metal, when the metal vapor passes through multiple slit plates 3, the metal vapor can condense impurities in a designated area when passing through areas of different temperatures. That is, by controlling the temperature of the crucible and the relative distance between the multiple slit plates 3 and the collecting plate 5, the relative temperature of the multiple slit plates 3 and the collecting plate 5 can be controlled, thereby achieving the goal of preliminary purification.

[0044] like Figure 3As shown, the experimental apparatus further includes at least one set of electromagnetic focusing plates 6 and an angle adjustment assembly 7. Each set of electromagnetic focusing plates 6 comprises two opposing electromagnetic focusing plates 6. The electromagnetic focusing plates 6 are mounted on the output end of the angle adjustment assembly 7, which is slidably mounted on a support frame 21. The electromagnetic focusing plates 6 are located between the collecting plate 5 and the slit plate 3. The electromagnetic focusing plates 6 are used to scatter or focus charged metal atoms in the vacuum experimental chamber 2. The angle adjustment assembly 7 slides on the support frame 21 to change the distance between the electromagnetic focusing plates 6 and the nozzle 11. The angle adjustment assembly 7 is used to adjust the angle between the electromagnetic focusing plates 6 and the slit plate 3. In this embodiment, a set of two opposing electromagnetic focusing plates 6 and a set of two opposing adjustment assemblies 7 are provided. One electromagnetic focusing plate 6 is mounted on each adjustment assembly 7, and the two electromagnetic focusing plates 6 in the set are arranged opposite each other. In other embodiments, there may be multiple sets of electromagnetic focusing plates 6. Specifically, multiple electromagnetic focusing plates 6 may be installed on one angle adjustment component 7 and multiple electromagnetic focusing plates 6 may be installed on another angle adjustment component 7. The electromagnetic focusing plates 6 on different angle adjustment components 7 are in one-to-one correspondence, thereby forming multiple sets of electromagnetic focusing plates 6. Alternatively, there may be multiple sets of adjustment components, with one electromagnetic focusing plate 6 installed on one adjustment component 7. Multiple adjustment components 7 are in one-to-one correspondence, thereby forming multiple sets of one-to-one corresponding electromagnetic focusing plates 6.

[0045] This application uses an electromagnetic focusing plate 6 to scatter or focus some charged metal atoms in the vapor, causing the target metal to condense on the slit plate 3 below the nozzle 11, thereby achieving metal purification for different requirements. The pitch angle of the electromagnetic focusing plate 6 is adjusted by the adjusting component 7 to control the magnetic field angle and adjust the scattering or focusing angle. At the same time, the type of charged metal atoms is determined, that is, whether the charged metal atoms carry positive or negative charges. The electromagnetic focusing plate is adjusted to carry a positive or negative voltage according to the type of charge of the charged metal atoms to achieve the function of scattering or focusing charged metal atoms.

[0046] This application allows for adjustment of the distances between multiple slit plates 3 and nozzles 11, the distance between electromagnetic focusing plates 6 and nozzles 11, the angle of electromagnetic focusing plates 6, and the distance between collecting plates 5 and nozzles 11, as needed. This enables control of the temperature of slit plates 3 and collecting plates 5 during experiments, thus meeting the requirements for metal purification under different conditions.

[0047] like Figure 2 and Figure 6As shown, the support frame 21 includes at least one set of guide rails 22, and the set of guide rails 22 includes two opposing guide rails 22. The guide rails 22 are fixedly installed in the vacuum test chamber 2. The length direction of the guide rails 22 is set along the spray direction of the metal vapor ejected from the nozzle 11. The guide rails 22 are provided with T-shaped grooves 23. The guide rails 22 are provided with a plurality of sliders 4 that cooperate with the T-shaped grooves. The sliders 4 are threaded with fastening bolts. The sliders 4 are provided with fastening holes 41 that are threaded with the fastening bolts. The fastening bolts pass through the fastening holes 41 of the sliders 4 and abut against the guide rails 22. The slit plate 3, the collecting plate 5 and the angle adjustment assembly 7 are installed on the guide rails 22 through different sliders 4. In this embodiment, the crucible is located at the top of the vacuum chamber 2, and the nozzle 11 sprays metal vapor downwards. Therefore, the guide rail 22 is arranged vertically. The support frame 21 in this embodiment includes two sets of guide rails 22, each set including two guide rails, for a total of four guide rails 22. The four guide rails 22 are arranged in a rectangular shape, located at the four corners of the rectangle. The four corners of the slit plate 3 and the collecting plate 5 are mounted on the guide rails 22 via sliders 4, stabilizing their installation. In this embodiment, one electromagnetic focusing plate 6 within one set is mounted on two guide rails 22 in a different set via adjusting components 7 and sliders 4. In other embodiments, when the crucible is located at the bottom of the vacuum chamber 2, the nozzle 11 sprays metal vapor upwards, and the guide rail 22 is arranged vertically; when the crucible is located on the side wall of the vacuum chamber 2, the metal vapor is sprayed horizontally at the nozzle 11, and the guide rail 22 is arranged horizontally. In other embodiments, only one set of guide rails 22 may be provided. The set of guide rails 22 includes two guide rails 22. The opposite sides of the slit plate 3 are mounted on the guide rails 22 by sliders 4. The opposite sides of the collecting plate 5 are mounted on the guide rails 22 by sliders 4. One of the electromagnetic focusing plates 6 in the set is mounted on one guide rail 22 by an adjustment component 7 and sliders 4. The other electromagnetic focusing plate 6 in the set is mounted on another guide rail 22 by another adjustment component 7 and sliders 4.

[0048] In this embodiment, the slit plate 3, angle adjustment component 7, and collecting plate 5 are mounted on different sliders 4 using bolts. By sliding the slider 4 along the guide rail 22, the positions of the slit plate 3, angle adjustment component 7, and collecting plate 5 can be adjusted. After the adjustment of the slit plate 3, angle adjustment component 7, and collecting plate 5 is completed, the fastening bolts are tightened. The fastening bolts are pressed against the bottom of the T-shaped slide groove 23, and the slider 4 is fixed on the guide rail 22, realizing the quick adjustment and fixation of the slit plate 3, angle adjustment component 7, and collecting plate 5 on different sliders 4.

[0049] like Figure 6 and Figure 7As shown, in one embodiment, multiple sides of the guide rail 22 are provided with T-shaped grooves 23 arranged along the length of the guide rail 22. These T-shaped grooves allow the slider 4 to be installed on different sides of the guide rail 22, preventing interference between the slider 4 required for installing the slit plate 3, angle adjustment assembly 7, and collecting plate 5.

[0050] like Figure 3 , Figure 4 and Figure 5 As shown, the angle adjustment assembly 7 includes mounting rods 71 ​​spaced apart along the sliding direction of the electromagnetic focusing plate 6. Each mounting rod 71 has a strip groove 72. The mounting rods 71 ​​are mounted on the slider 4 via adjusting bolts 73. The rod of the adjusting bolt 73 passes through the strip groove 72, and the screw head of the adjusting bolt 73 is pressed against the mounting rod 71. A rotating rod 75 is rotatably mounted on one end of the mounting rod 71 facing the center of the vacuum chamber 2. The electromagnetic focusing plate 6 is fixedly mounted on the rotating rod 75. Changing the angle of different mounting rods 71 ​​and changing the position of the adjusting bolts 73 pressing different mounting rods 71 ​​are used to change the tilt angle of the electromagnetic focusing plate 6. In this embodiment, an adjustment assembly includes two mounting rods 71. When the angle of the electromagnetic focusing plate 6 needs to be adjusted, the adjusting bolt 73 is loosened. At this time, the mounting rods 71 ​​can rotate and slide under the constraint of the slot 72 and the adjusting bolt 73. Rotating the electromagnetic focusing plate 6 makes different mounting rods 71 ​​present the same or different angles, and the lengths of different mounting rods 71 ​​located inside the guide rail 22 are the same or different. Then, the adjusting bolt 73 is tightened to fix the adjusted electromagnetic focusing plate 6. Multiple electromagnetic focusing plates 6 can be mounted on the two rotating rods 75 in one adjustment assembly 7 of this application.

[0051] The mounting rod 71 has a hook 74 at one end facing the center of the vacuum chamber 2, and the rotating rod 75 cooperates with the hook 74 to hook the rotating rod 75 onto the mounting rod 71. In other embodiments, the mounting rod 71 and the rotating rod 75 can also be connected by a bearing.

[0052] The mounting rod 71 and the rotating rod 75 are made of insulating material. The adjustment assembly 7 also includes an insulating shielding layer 76, which encloses all the rotating rods 75 within the same group of adjustment assemblies 7 and is in contact with the rotating rods 75. In experiments requiring the electromagnetic focusing plate 6, insulation is necessary because the electromagnetic focusing plate 6 needs to maintain a certain voltage; therefore, the mounting rod 71 and the rotating rod 75 are made of insulating material. To ensure the service life of the mounting rod 71 and the rotating rod 75, shielding is required on the outside of the mounting rod 71 and the rotating rod 75, by adding an insulating shielding layer 76.

[0053] like Figure 7As shown, the guide rail 22 is provided with a scale 8 along its length. When adjusting the position of the slit plate 3, the electromagnetic focusing plate 6, and the collecting plate 5 from the crucible, the scale 8 provides a distance reference, facilitating accurate distance adjustment of the slit plate 3, the angle adjustment assembly 7, and the collecting plate 5.

[0054] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. An experimental apparatus for vacuum metal evaporation, characterized in that, include: Vacuum test chamber (2); A cavity structure (1) for placing the metal to be heated is installed on one side of a vacuum test chamber (2), and the cavity structure (1) is provided with a nozzle (11) communicating with the vacuum test chamber (2) and a switch assembly for controlling the opening and closing of the nozzle (11). A support frame (21) is installed inside a vacuum test chamber (2); A plurality of slit plates (3) are slidably mounted on a support frame (21). The plurality of slit plates (3) are arranged sequentially along the spray direction of metal vapor ejected from the nozzle (11). The distance between the slit plates (3) and the nozzle (11) is changed by sliding on the support frame (21). When the metal vapor passes through the plurality of slit plates (3), different metals condense on different slit plates (3). A collecting plate (5) is slidably mounted on a support frame (21). The collecting plate (5) is located on the side of the slit plate (3) away from the nozzle (11). The collecting plate (5) slides on the support frame (21) to change the distance between the collecting plate (5) and the nozzle (11). The metal vapor ejected from the nozzle (11) passes through multiple slit plates (3) in sequence and then remains on the collecting plate (5). The experimental apparatus also includes at least one set of electromagnetic focusing plates (6) and an angle adjustment assembly (7). The set of electromagnetic focusing plates (6) includes electromagnetic focusing plates (6) arranged opposite to each other. The electromagnetic focusing plates (6) are mounted on the output end of the angle adjustment assembly (7). The angle adjustment assembly (7) is slidably mounted on the support frame (21). The electromagnetic focusing plates (6) are located between the collecting plate (5) and the slit plate (3). The electromagnetic focusing plates (6) are used to scatter or focus charged metal atoms in the vacuum experimental chamber (2). The angle adjustment assembly (7) slides on the support frame (21) to change the distance between the electromagnetic focusing plates (6) and the nozzle (11). The angle adjustment assembly (7) is used to adjust the angle between the electromagnetic focusing plates (6) and the slit plate (3). The support frame (21) includes at least one set of guide rails (22), and the set of guide rails (22) includes two opposing guide rails (22). The guide rails (22) are fixedly installed in the vacuum test chamber (2). The length direction of the guide rails (22) is set along the spray direction of the metal vapor ejected from the nozzle (11). The guide rails (22) are provided with T-shaped grooves (23). The guide rails (22) are provided with a plurality of sliders (4) that cooperate with the T-shaped grooves. The sliders (4) are threaded with fastening bolts. The fastening bolts pass through the sliders (4) and abut against the guide rails (22). The slit plate (3), the collecting plate (5) and the angle adjustment component (7) are installed on the guide rails (22) through different sliders (4). The angle adjustment assembly (7) includes mounting rods (71) spaced apart along the sliding direction of the electromagnetic focusing plate (6). The mounting rods (71) are provided with strip grooves (72). The mounting rods (71) are mounted on the slider (4) by adjusting bolts (73). After the rod of the adjusting bolt (73) passes through the strip groove (72), the screw head of the adjusting bolt (73) is pressed against the mounting rod (71). A rotating rod (75) is mounted on one end of the mounting rod (71) that rotates toward the center of the vacuum test chamber (2). The electromagnetic focusing plate (6) is fixedly mounted on the rotating rod (75). Changing the angle of different mounting rods (71) and changing the position of the adjusting bolts (73) pressing different mounting rods (71) are used to change the tilt angle of the electromagnetic focusing plate (6). The mounting rods (71) and the rotating rods (75) are made of insulating material.

2. The experimental apparatus for vacuum metal evaporation according to claim 1, characterized in that, The mounting rod (71) has a hook (74) at one end facing the center of the vacuum test chamber (2), and the rotating rod (75) cooperates with the hook (74) to hang the rotating rod (75) on the mounting rod (71).

3. The experimental apparatus for vacuum metal evaporation according to claim 1, characterized in that, The adjustment assembly (7) further includes an insulating shielding layer (76), which wraps around all the rotating rods (75) in the same set of adjustment assemblies (7) and is in contact with the rotating rods (75).

4. The experimental apparatus for vacuum metal evaporation according to claim 1, characterized in that, The guide rail (22) has T-shaped grooves (23) arranged along the length of the guide rail (22) on multiple sides.

5. The experimental apparatus for vacuum metal evaporation according to claim 1, characterized in that, The guide rail (22) is provided with a scale (8) along the length of the guide rail (22).

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