Fabrication process of high aspect ratio tubular tools with conductive annular light-guiding films

Abstract

This invention discloses a process for fabricating a large aspect ratio tubular tool with a conductive annular light-guiding film, comprising the following steps: S100: Using a mixed gas with high infrared spectral transmittance as raw material, a hollow tool mother tube is prepared. S200: The hollow tool mother tube is softened and shrunk under negative pressure to obtain the target hollow tool mother tube. S300: The target hollow tool mother tube is subjected to pressure-holding drawing, and the inner and outer diameters of the hollow tubular light guide tube obtained by pressure-holding drawing are fed back through real-time online measurement, and the drawing pressure is adjusted in real time to finally obtain the finished hollow tubular light guide tube of the target size. S400: A metal layer is deposited on the inner wall of the finished hollow tubular light guide tube, and an optical exit structure is processed on the tube end face of the finished hollow tubular light guide tube, thereby obtaining a large aspect ratio tubular tool. This invention can fabricate a large aspect ratio tubular tool with a conductive annular light-guiding film of the target size, and during the fabrication process, the size of the large aspect ratio tubular tool can be quantitatively controlled and is not prone to cracking.

Description

Technical Field

[0001] This invention relates to the field of special processing technology, and in particular to a process for preparing a large aspect ratio tubular tool with an annular light-guiding film that conducts electricity. Background Technology

[0002] Lightweight alloys, high-temperature alloys, and composite materials are widely used in medical devices, aerospace, and automotive industries, and the demand for efficient and non-destructive machining of deep, small-diameter groove structures in their key components is increasing daily. Laser-electrolytic composite machining, based on conventional laser machining, synergistically couples flow fields, electric fields, and other energy fields to jointly complete the composite energy field machining process of the processed material. Compared with traditional single machining technologies, it can better meet the high-quality machining requirements of large aspect ratio structures on difficult-to-machine materials.

[0003] Water-guided laser processing uses a jet of water with a diameter of up to 100 μm to guide and constrain the propagation path of the laser. It is often used for cutting the low heat-affected zone of special alloys and multilayer composite materials. However, due to flow field interference, it cannot achieve deep hole and deep groove processing. Laser-electrolytic composite processing using tubular electrodes relies on the tubular electrode to transmit the laser and introduce electric and flow fields to the processing gap at the end of the electrode, promising efficient and non-destructive processing of structures with large aspect ratios. To integrate the functional structure of coaxial propagation of photoelectric and fluid, existing tubular electrodes are mostly fabricated by coaxial assembly of various structural components. However, due to limitations in assembly gaps and clamping methods, it is currently difficult to achieve deep hole and groove processing with feature dimensions less than 1 mm. Therefore, the structure and fabrication process of the tubular electrode are key factors restricting the capability of laser-electrolytic composite processing.

[0004] A novel photoelectric-fluid coupled conduction tube electrode exists, which achieves low-loss conduction of pulsed laser light through a ring-shaped light guide structure, suitable for laser-electrolytic composite processing of microstructures with large aspect ratios. However, current processes still struggle to fabricate such high aspect ratio multilayer light guide tubular tools (i.e., the aforementioned novel photoelectric-fluid coupled conduction tube electrode). First, ensuring the inner and outer roundness of the ring-shaped light guide structure during its drawing process is difficult; second, quantitatively controlling the inner and outer diameters of the ring-shaped light guide structure is challenging; furthermore, problems such as easy cracking during the fabrication of multilayer tubular structures exist. Summary of the Invention

[0005] The present invention aims to at least solve one of the technical problems existing in the prior art. To this end, one object of the present invention is to propose a fabrication process for a large aspect ratio tubular tool with a conductive annular light guide film, which can fabricate a large aspect ratio tubular tool with a conductive annular light guide film of the target size. Moreover, during the fabrication process, the size of the large aspect ratio tubular tool can be quantitatively controlled and is not prone to cracking.

[0006] According to a process for fabricating a large aspect ratio tubular tool with an annular light-guiding film conductive material, the present invention includes the following steps:

[0007] S100: Using a mixed gas with high infrared spectral transmittance as raw material, a hollow tool mother tube with the same waveguide structure characteristics as the tubular tool with a large aspect ratio is prepared.

[0008] S200: The hollow tool tube is softened and shrunk under negative pressure to obtain a target hollow tool tube with low hydroxyl content.

[0009] S300: The target hollow tool tube is subjected to pressure holding and drawing, and the inner diameter, outer diameter and wire diameter of the hollow tubular light guide tube obtained by pressure holding and drawing are fed back through real-time online measurement, and the drawing pressure is adjusted in real time to finally obtain the hollow tubular light guide tube of the target size.

[0010] S400: A metal layer is plated on the inner wall of the hollow tubular light guide tube finished product, and an optical exit structure is processed on the tube end face of the hollow tubular light guide tube finished product, thereby obtaining the tubular tool with a large length-to-diameter ratio.

[0011] In summary, the fabrication process of the high aspect ratio tubular tool with conductive annular light-guiding film according to the embodiments of the present invention firstly uses a mixed gas with high infrared spectral transmittance as raw material to prepare a hollow tool mother tube with the same waveguide structure characteristics as the high aspect ratio tubular tool; then, the hollow tool mother tube is softened and shrunk under negative pressure to further reduce the hydroxyl content of the hollow tool mother tube and avoid cracking; after softening and shrinking, the target hollow tool mother tube is obtained; then, the target hollow tool mother tube is subjected to pressure holding and drawing, and the inner and outer diameters of the hollow tubular light guide tube obtained by pressure holding and drawing are fed back by real-time online measurement, and the drawing pressure is adjusted in real time to finally obtain the finished hollow tubular light guide tube of the target size; finally, a metal layer is deposited on the inner wall of the finished hollow tubular light guide tube, and an optical exit structure is processed on the tube end face of the finished hollow tubular light guide tube, thereby obtaining a high aspect ratio tubular tool with conductive annular light-guiding film of the target size.

[0012] The fabrication process of a large aspect ratio tubular tool with conductive annular light guide film according to an embodiment of the present invention can produce a large aspect ratio tubular tool with conductive annular light guide film of target size. In the fabrication process of the large aspect ratio tubular tool, the inner diameter, outer diameter and wire diameter of the large aspect ratio tubular tool can be quantitatively controlled to ensure the inner and outer roundness of the large aspect ratio tubular tool during the pressure holding and drawing process, and to avoid the problem of cracking of the large aspect ratio tubular tool during the fabrication process.

[0013] In some embodiments, in step S100, the hollow tool tube comprises, from the outside to the inside, a prefabricated protective layer, a buffer layer, a prefabricated outer reflective layer, a first transition layer, a prefabricated light guide layer, a second transition layer, and a prefabricated inner reflective layer.

[0014] In some embodiments, the thickness of the prefabricated light guide layer is more than 10 times the thickness of the prefabricated inner reflective layer and the thickness of the prefabricated outer reflective layer, and the thickness of the prefabricated light guide layer accounts for not less than 60% of the thickness of the sidewall of the hollow tool tube.

[0015] In some embodiments, the relative refractive index of the prefabricated inner reflective layer ranges from -0.95% to -1.2%, the relative refractive index of the prefabricated outer reflective layer ranges from -0.95% to -1.2%, and the relative refractive index of the prefabricated light guide layer ranges from 1.02% to 1.28%.

[0016] In some embodiments, a mixed gas consisting of O2 gas, GeCl4 gas, SiCl4 gas, and C2F6 gas with an infrared spectral transmittance of not less than 94.5% is used as raw material. By adjusting the content of O2 gas, GeCl4 gas, SiCl4 gas, and C2F6 gas in the mixed gas, plasma chemical vapor deposition is used to sequentially prepare the buffer layer, the prefabricated outer reflective layer, the first transition layer, the prefabricated light guide layer, the second transition layer, and the prefabricated inner reflective layer on the inner wall of a low-hydroxyl quartz base tube. The low-hydroxyl quartz base tube serves as the prefabricated protective layer.

[0017] In some embodiments, in step S200, Cl2 is introduced into the negative pressure environment.

[0018] In some embodiments, after step S200 and before step S300, the target hollow tool tube is subjected to heating straightening and acid washing and drying treatment in sequence.

[0019] In some embodiments, in step S300, coherent light interferometry is used to visually detect the inner diameter, outer diameter, and wire diameter of the hollow tubular light guide tube. Based on the outer diameter error and inner diameter error of the hollow tubular light guide tube, the pressure value of the target hollow tool mother tube currently being pressure-held and drawn is adjusted online, and finally the finished hollow tubular light guide tube of the target size is obtained.

[0020] In some embodiments, in step S300, by comparing the outer and inner diameters of the hollow tubular light guide tube obtained by drawing with the target hollow tool mother tube, the feeding speed and traction speed are optimized offline; the size of the hollow tubular light guide tube and the pressure holding and drawing parameters are recorded to form a manufacturing process database.

[0021] In some embodiments, the outer diameter of the high aspect ratio tubular tool ranges from 200 to 1500 μm, and the sidewall thickness of the high aspect ratio tubular tool accounts for 50% to 80% of the tube radius.

[0022] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0023] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0024] Figure 1 This is a schematic flowchart of the manufacturing process of a tubular tool with a large aspect ratio according to an embodiment of the present invention;

[0025] Figure 2 This is a schematic diagram of the structure of a hollow tool mother tube according to an embodiment of the present invention;

[0026] Figure 3 This is a schematic diagram of the hollow tool mother tube deposition preparation process according to an embodiment of the present invention;

[0027] Figure 4 This is a schematic diagram of the deposition process of the outer reflective layer of the hollow tool mother tube according to an embodiment of the present invention;

[0028] Figure 5 This is a schematic diagram of the deposition process of the light guide layer in the hollow tool mother tube according to an embodiment of the present invention;

[0029] Figure 6 This is a schematic diagram of the deposition process of the reflective layer inside the hollow tool mother tube according to an embodiment of the present invention;

[0030] Figure 7 This is a schematic diagram of the welding preparation process during the heating and straightening of the target hollow tool mother tube according to an embodiment of the present invention;

[0031] Figure 8 This is a schematic diagram of the tail tube welding process during the heating and straightening process of the target hollow tool mother tube according to an embodiment of the present invention;

[0032] Figure 9 This is a schematic diagram of the heating and straightening process of the welding assembly in the heating and straightening process of the target hollow tool mother tube according to an embodiment of the present invention;

[0033] Figure 10 This is a schematic diagram of the pressure-holding drawing process of a hollow tubular light guide tube according to an embodiment of the present invention, and the principle of online detection of the inner and outer diameters of the hollow tubular light guide tube;

[0034] Figure 11 This is a schematic diagram of the structure of a tubular tool with a large length-to-diameter ratio according to an embodiment of the present invention.

[0035] Figure label:

[0036] Hollow tool mother tube 100; target hollow tool mother tube 100a; prefabricated protective layer 101; buffer layer 102; prefabricated outer reflective layer 103; first transition layer 104; prefabricated light guide layer 105; second transition layer 106; prefabricated inner reflective layer 107; O2 gas 201; SiCl4 gas 202; C2F6 gas 203; GeCl4 gas 204; deposition fixture 205; microwave emitting device 206; quartz tail tube 301; ring torch 302; premixed H2 valve 303; premixed O2 valve 304; welding assembly 305; Graphite pressure plate; 306; Sealing and pressure control device; 401; Pressure holding and drawing chuck; 402; Drawing assembly; 403; Drawing furnace; 404; Coherent light source; 405; Beam splitter; 406; Reflector; 407; CCD camera; 408; Interference fringes; 409; Process database; 410; Pressure reducing valve; 411; Metal cathode; 501; Inner reflective layer; 502; Light guide layer; 503; Outer reflective layer; 504; Protective layer; 505; Optical exit structure; 506; Elliptical optical exit; 5061; Circular optical exit; 5062; Parabolic optical exit; 5063. Detailed Implementation

[0037] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0038] The following is combined Figures 1 to 11 This invention describes the fabrication process of a high aspect ratio tubular tool with an annular light-guiding film that conducts electricity according to an embodiment of the present invention.

[0039] like Figure 1 As shown, the fabrication process of the high aspect ratio tubular tool with conductive annular light-guiding film according to an embodiment of the present invention includes the following steps:

[0040] S100: A hollow tool mother tube 100 with the same waveguide structure characteristics as a large aspect ratio tubular tool is prepared using a mixed gas with high infrared spectral transmittance as raw material. Here, high infrared spectral transmittance means that the infrared spectral transmittance of each component gas in the mixed gas is not less than 94.5%. The waveguide structure of the hollow tool mother tube 100 is prepared by using a mixed gas with high infrared spectral transmittance as raw material, so that the waveguide structure characteristics of the hollow tool mother tube 100 are the same as the waveguide structure characteristics of the finally prepared large aspect ratio tubular tool, so as to meet the light guiding requirements of the finally prepared large aspect ratio tubular tool.

[0041] S200: The hollow tool mother tube 100 is softened and shrunken under negative pressure to obtain the target hollow tool mother tube 100a. This step can reduce the hydroxyl content and prevent the target hollow tool mother tube 100a from cracking.

[0042] S300: The target hollow tool tube 100a is subjected to pressure-holding drawing, and the inner diameter, outer diameter, and wire diameter of the hollow tubular light guide obtained by pressure-holding drawing are fed back through real-time online measurement. The drawing pressure is also adjusted in real time to finally obtain the finished hollow tubular light guide of the target size. In other words, during the pressure-holding drawing process of the target hollow tool tube 100a, the argon pressure inside the target hollow tool tube 100a is adjusted in real time based on the inner diameter, outer diameter, and wire diameter of the hollow tubular light guide obtained by pressure-holding drawing through real-time online measurement. This allows for real-time quantitative control of the size of the hollow tubular light guide during the pressure-holding drawing process, ultimately obtaining the finished hollow tubular light guide of the target size.

[0043] S400: A metal layer is deposited on the inner wall of the hollow tubular light guide tube, and an optical exit structure 506 is machined on the end face of the hollow tubular light guide tube to obtain a tubular tool with a large aspect ratio. In this step, the hollow tubular light guide tube can be cleaned, roughened, sensitized, and activated sequentially. Then, a metal layer, such as silver, is deposited on the inner wall of the hollow tubular light guide tube as a cathode electrode. Next, an optical exit structure is machined on the end face of the metal-plated hollow tubular light guide tube to meet the light emission requirements. When machining the optical exit structure 506 on the end face, a five-axis precision grinding platform can be used. The optical exit structure 506 can be a planar, conical, or arc-shaped optical exit that rotates around the axis of the hollow tubular light guide tube machining tool. The optical exit structure 506 can achieve laser focusing or divergence. After this step is completed, a high aspect ratio tubular tool with a conductive annular light-guiding film of the target size can be obtained.

[0044] Experiments have shown that the preparation process of this invention can obtain a large aspect ratio tubular tool with a conductive annular light guide film. The outer diameter of the large aspect ratio tubular tool ranges from 200 to 1500 μm, the sidewall thickness of the large aspect ratio tubular tool accounts for 50% to 80% of the tube radius, and the thickness of the light guide layer accounts for not less than 50% of the sidewall thickness.

[0045] In summary, the fabrication process of the high aspect ratio tubular tool with conductive annular light-guiding film according to the embodiments of the present invention firstly uses a mixed gas with high infrared spectral transmittance as raw material to prepare a hollow tool mother tube 100 with the same waveguide structure characteristics as the high aspect ratio tubular tool; then, the hollow tool mother tube 100 is softened and shrunk under negative pressure to further reduce the hydroxyl content of the hollow tool mother tube 100 and avoid cracking; after softening and shrinking, the target hollow tool mother tube 100a is obtained; then, the target hollow tool mother tube 100a is subjected to pressure holding and drawing, and the inner and outer diameters of the hollow tubular light guide tube obtained by pressure holding and drawing are fed back by real-time online measurement, and the drawing pressure is adjusted in real time to finally obtain the finished hollow tubular light guide tube of the target size; finally, a metal layer is deposited on the inner wall of the finished hollow tubular light guide tube, and an optical exit structure 506 is processed on the tube end face of the finished hollow tubular light guide tube, thereby obtaining a high aspect ratio tubular tool with conductive annular light-guiding film of the target size.

[0046] The fabrication process of a large aspect ratio tubular tool with conductive annular light guide film according to an embodiment of the present invention can produce a large aspect ratio tubular tool with conductive annular light guide film of target size. In the fabrication process of the large aspect ratio tubular tool, the inner diameter, outer diameter and wire diameter of the large aspect ratio tubular tool can be quantitatively controlled to ensure the inner and outer roundness of the large aspect ratio tubular tool during the pressure holding and drawing process, and to avoid the problem of cracking of the large aspect ratio tubular tool during the fabrication process.

[0047] In some embodiments, in step S100, the hollow tool tube 100 comprises, from the outside to the inside, a prefabricated protective layer 101, a buffer layer 102, a prefabricated outer reflective layer 103, a first transition layer 104, a prefabricated light guide layer 105, a second transition layer 106, and a prefabricated inner reflective layer 107. The prefabricated protective layer 101 and buffer layer 102 protect the hollow tool tube 100. The prefabricated light guide layer 105 guides light. The prefabricated outer reflective layer 103 and prefabricated inner reflective layer 107 enable low-loss light transmission within the prefabricated light guide layer 105. The first transition layer 104 reliably connects the prefabricated outer reflective layer 103 to the prefabricated light guide layer 105. The second transition layer 106 reliably connects the prefabricated inner reflective layer 107 to the prefabricated light guide layer 105. Thus, the hollow tool tube 100 possesses waveguide structure characteristics.

[0048] In some embodiments, the thickness of the prefabricated light guide layer 105 is more than 10 times the thickness of the prefabricated inner reflective layer 107 and the prefabricated outer reflective layer 103, and the thickness of the prefabricated light guide layer 105 accounts for not less than 60% of the sidewall thickness of the hollow tool mother tube 100, so as to meet the light guiding requirements of the final large aspect ratio tubular tool.

[0049] In some embodiments, the relative refractive index of the prefabricated inner reflective layer 107 is in the range of -0.95% to -1.2%, the relative refractive index of the prefabricated outer reflective layer 103 is in the range of -0.95% to -1.2%, and the relative refractive index of the prefabricated light guide layer 105 is in the range of 1.02% to 1.28%, in order to meet the light guiding requirements of the final fabricated high aspect ratio tubular tool.

[0050] In some embodiments, a mixed gas formed by O2 gas 201, GeCl4 gas 204, SiCl4 gas 202 and C2F6 gas 203 is used as raw material. By adjusting the content of O2 gas 201, GeCl4 gas 204, SiCl4 gas 202 and C2F6 gas 203 in the mixed gas, a buffer layer 102, a pre-fabricated outer reflective layer 103, a first transition layer 104, a pre-fabricated light guide layer 105, a second transition layer 106 and a pre-fabricated inner reflective layer 107 are sequentially prepared on the inner wall of a low-hydroxyl quartz tube using a plasma chemical vapor deposition process. The low-hydroxyl quartz tube serves as the pre-fabricated protective layer 101.

[0051] For details, please refer to the following: Figure 2 The structural configuration of the hollow tool mother tube according to an embodiment of the present invention is described.

[0052] The hollow tool tube 100 comprises seven layers from the outside in: a prefabricated protective layer 101, a buffer layer 102, a prefabricated outer reflective layer 103, a first transition layer 104, a prefabricated light guide layer 105, a second transition layer 106, and a prefabricated inner reflective layer 107. The thickness of the prefabricated light guide layer 105 is more than 10 times that of the prefabricated inner and outer reflective layers 103 and 107, and its thickness accounts for no less than 60% of the sidewall thickness of the hollow tool tube 100. The buffer layer 102, the first transition layer 104, and the second transition layer 106 of the hollow tool tube 100 are used to match the viscosity differences between different doped quartz materials, allowing the deposited material after the reaction to fully adhere to the inner wall. The relative refractive index ranges between the prefabricated inner and outer reflective layers 103 and 107 from -0.95% to -1.2%, and the relative refractive index range of the prefabricated light guide layer 105 from 1.02% to 1.28%.

[0053] Reference Figures 2 to 6 The manufacturing process of the hollow tool mother tube 100 in the embodiments of the present invention is described.

[0054] S101: Preparation process for deposition in hollow tool mother tube 100.

[0055] A hollow tool tube 100 is prepared by plasma chemical vapor deposition (PCVDC) using a four-component mixed gas as raw material. This four-component mixed gas includes O2 gas 201, SiCl4 gas 202, C2F6 gas 203, and GeCl4 gas 204. In this step, the impurity content in O2 gas 201, GeCl4 gas 204, SiCl4 gas 202, and C2F6 gas 203 is detected to ensure that the infrared spectral transmittance of the four gases is greater than 94.5%. In the subsequent PCVDC processes S102, S103, and S104, the deposition fixture 205 clamps the low-hydroxyl quartz base tube and rotates it around its axis. The microwave transmitting device 206 can reciprocate along the axial direction of the low-hydroxyl quartz base tube, directly coupling microwave power into the working area to complete the reciprocating deposition of the material.

[0056] In detail, the water content in O2 gas 301 must be less than 10 ppb, the water content in the other reaction gases must be less than 100 ppb, the hydroxyl content in the prefabricated protective layer 201 must be less than 1 ppm, and the insulation temperature range must be controlled between 1020 and 1250℃.

[0057] S102: Deposition process of the outer reflective layer.

[0058] Adjust the content of each component in the mixed gas to prepare a buffer layer 102, a pre-fabricated external reflective layer 103, and a first transition layer 104.

[0059] First, a mixture of O2 gas 201, SiCl4 gas 202, and C2F6 gas 203 is used as raw material to repeatedly deposit 30 to 60 layers on the prefabricated protective layer 101 to form a buffer layer 102.

[0060] Then, the flow rate of C2F6 gas 203 is increased and the flow rate of SiCl4 gas 202 is decreased, and 320 to 390 layers are repeatedly deposited on the buffer layer 102 to form the prefabricated external reflective layer 103.

[0061] Finally, the flow rate of C2F6 gas 203 is reduced while the flow rate of SiCl4 gas 202 is maintained, so that the deposition refractive index is close to that of pure quartz. 150-190 layers are then deposited repeatedly on the prefabricated outer reflective layer 103. Then, the flow rates of both C2F6 gas 203 and SiCl4 gas 202 are simultaneously reduced, and the supply valve for GeCl4 gas 204 is opened. 25-60 layers are then deposited repeatedly to form the first transition layer 104.

[0062] S103: Light guide layer deposition process.

[0063] Adjust the flow rates of each gas in the mixed gas to prepare the prefabricated light guide layer 105.

[0064] Deposition is performed by maintaining a low flow rate of SiCl4 gas 202 and C2F6 gas 203 and a high flow rate of GeCl4 gas 204. 2650 to 2900 layers are deposited repeatedly on the first transition layer 104 to obtain the prefabricated light guide layer 105.

[0065] S104: Deposition process of inner reflective layer.

[0066] Adjust the flow rates of each gas in the mixed gas to prepare the second transition layer 106 and the prefabricated inner reflective layer 107.

[0067] First, gradually increase the flow rates of SiCl4 gas 202 and C2F6 gas 203, close the valve of GeCl4 gas 204, reduce the refractive index of the material to match the refractive index of the prefabricated outer reflective layer 103, and repeatedly deposit 80 to 115 layers on the prefabricated light guide layer 105 to obtain the second transition layer 106.

[0068] Then, the flow rates of SiCl4 gas 202 and C2F6 gas 203 are increased to a stable level, and 200-230 layers are repeatedly deposited on the second transition layer 106 to obtain the prefabricated inner reflective layer 107.

[0069] The hollow tool mother tube 100 can be obtained by following the above steps.

[0070] In some embodiments, in step S200, the introduction of Cl2 into the negative pressure environment can further reduce the hydroxyl content in the hollow tool mother tube 100 and prevent the hollow tool mother tube 100 from cracking, thus protecting the hollow tool mother tube 100.

[0071] The negative compression process of the hollow tool mother tube 100 is described in detail below. Quartz tail tubes 301 are welded to both ends of the hollow tool mother tube 100 obtained in step S100, and the tube is then heated and shrunk in an electric furnace. The two ends of the welded integral tube are connected to a vacuum pumping system, and Cl2 is introduced into the welded integral tube to create a negative pressure environment, further eliminating hydroxyl groups within the tube and reducing water peak-related losses. The purpose of welding the quartz tail tubes 301 here is to facilitate the connection of the hollow tool mother tube 100 to the vacuum system and to facilitate clamping in subsequent processes.

[0072] In some embodiments, after step S200 and before step S300, the target hollow tool tube 100a is further subjected to heating straightening and pickling and drying treatments in sequence. The pickling and drying treatment can clean the oil film on the tube wall of the welding assembly 305, as well as the particulate impurities molten on the surface and the metal particles introduced by the metal oxyhydrogen torch. After cleaning, it is dried for later use.

[0073] For details, please refer to the following: Figures 7 to 9 This describes the heating and straightening process of the target hollow tool mother tube 100a.

[0074] Welding preparation process. Select a quartz tail tube 301 with an inner and outer diameter specification similar to that of the target hollow tool mother tube 100a, measure the runout at each end, and ensure that the runout value is not greater than 0.3mm.

[0075] Tail tube welding process. The target for welding is a hollow tool mother tube 100a quartz tail tube 301. During the welding process, a ring-shaped blowtorch 302 is used to preheat the welding end face while ensuring that the molten end face is always at the softening temperature, avoiding the cooling of the far end of the blowtorch due to rotation, which would affect the joint quality.

[0076] In detail, to avoid mutual diffusion between the layers in the hollow tool tube 100a and the formation of accumulated bubbles on the tube wall, the burning time and flame size should be controlled. In this embodiment, the premixed H2 valve 303 controls the high flame flow rate to 120 L / min and the premixed O2 valve 304 controls the high flame flow rate to 60 L / min.

[0077] The heating and straightening process for welding assembly 305 involves using a graphite pressure plate 306 to flatten the welding assembly 305, ensuring that pipe diameter fluctuations are not caused by airflow turbulence during subsequent preparation. The joint runout is checked to be no greater than 0.5 mm. Otherwise, the welding assembly 305 is subjected to secondary heating and straightening until the runout standard is met.

[0078] The following describes the pickling and drying process for welding assembly 305. Pickling and drying are performed to remove the oil film on the pipe wall, molten particulate impurities on the surface, and metal particles introduced by the metal-oxygen torch. After cleaning, the assembly is dried for later use. The pickling process consists of the following five steps:

[0079] The first step is to use deionized water to clean and remove floating dust and impurities from the inner and outer walls of the welding assembly 305.

[0080] The second step is to use AR-grade alkaline solution for alkaline washing to remove any grease or oil film that may adhere to the pipe wall.

[0081] The third step is to thoroughly rinse away any residual alkali solution from the previous step with deionized water.

[0082] The fourth step involves acid washing with a mixture of AR-grade HF and HNO3 to remove particulate impurities and metal particles from the shallow surface of the pipe wall.

[0083] The fifth step is to repeatedly rinse the pipe walls with deionized water to remove residual acid, controlling the pH value within the range of 6.5 to 7.0.

[0084] After pickling with 305 acid, the welded components need to be dried and then stored properly for the next use.

[0085] In some embodiments, in step S300, coherent light interferometry is used to visually inspect the inner diameter, outer diameter, and wire diameter of the hollow tubular light guide tube. The inner and outer diameters of the hollow tubular light guide tube drawn under pressure can be measured online, and the internal pressure value can be adjusted online according to the error, thereby achieving geometric dimension control of the hollow tubular light guide tube.

[0086] In some embodiments, in step S300, the feeding speed and traction speed are optimized offline by comparing the outer diameter and inner diameter of the hollow tubular light guide tube obtained by drawing with the target hollow tool mother tube; the size of the hollow tubular light guide tube and the pressure holding drawing parameters are recorded to form a manufacturing process database 410.

[0087] The following is for reference. Figure 10 This invention describes the pressure holding and drawing process in the fabrication process of the hollow tubular light guide tube in the embodiments of the present invention, and the principle of online detection of the inner and outer diameters of the hollow tubular light guide tube during drawing.

[0088] First, the dry and clean drawing assembly 403 is clamped and suspended in the pressure-holding drawing chuck 402. The top of the pressure-holding drawing chuck 402 is fitted with a sealing pressure control device 401 to ensure that both ends are sealed. This ensures that during the drawing process, the pressure control device at the top of the drawing assembly can pump Ar gas into the tube and maintain a constant pressure.

[0089] Secondly, after the drawing furnace 404 is preheated to the standby temperature K1=1400℃, the above-mentioned components are lowered into the furnace. After the lower tube is suspended in the hot zone of the drawing furnace 404, the temperature is raised to K2=2100℃.

[0090] Next, after heating for 10 minutes (T), the molten cone material is cut off at the lower opening of the drawing furnace 404, while the furnace temperature is reduced to K3=2000℃.

[0091] Then, when the outer diameter of the material is reduced to 2000μm, speed control is performed, and the traction speed is controlled within the range of 2~5m / min. By comparing with the outer diameter of the target hollow tool tube, the initial bar feeding speed and traction speed are calculated and preset.

[0092] Next, the inner diameter, outer diameter, and wire diameter of the hollow tubular light guide tube obtained by pressure holding and drawing are monitored in real time. The pressure value inside the tube is adjusted appropriately by adjusting the pressure reducing valve 411, and finally the finished hollow tubular light guide tube that meets the size requirements is obtained.

[0093] Finally, the dimensions and pressure-holding pulling parameters of the hollow tubular light guide tube were recorded to form a fabrication process database 410.

[0094] In detail, to avoid diameter roundness errors in the hollow tubular light guide tube caused by material stress, the furnace temperature of the drawing furnace 404 is appropriately reduced to 1960℃ to ensure that the roundness error is no more than 3%.

[0095] In detail, in this embodiment, the inner and outer diameters of the electrodes of the hollow tubular light guide are measured online using interference fringes 409. The output laser from the coherent light source 405 is split into two coherent beams by a beam splitter 406. One beam wraps around and passes through the hollow tubular light guide, and coherently interferes with the other laser beam reflected by a reflector 407. The interference fringes 409 are captured using a CCD camera 408, and calibration calculations are performed on an industrial computer to obtain the real-time inner diameter, outer diameter, and wire diameter of the hollow tubular light guide.

[0096] In some embodiments, the outer diameter of the tubular tool with a large aspect ratio ranges from 200 to 1500 μm, and the sidewall thickness of the tubular tool with a large aspect ratio accounts for 50% to 80% of the tube radius.

[0097] For details, please refer to the following: Figure 1 and Figure 11 The invention describes the metal cathode 501 and optical exit structure 506 of the tubular tool with a large aspect ratio in an embodiment of the invention, and their fabrication process.

[0098] like Figure 11 As shown, the tubular tool with a large aspect ratio is provided with a protective layer 505, an outer reflective layer 504, a light guide layer 503, an inner reflective layer 502, and a metal cathode 501 from the outside to the inside. An optical exit structure 506 is processed at the exit. The longitudinal section of the optical exit structure 506 can be a plane, a cone, or a non-spherical arc surface, or it can be an elliptical optical exit 5061, a circular optical exit 5062, or a parabolic optical exit 5063.

[0099] In detail, a metal cathode 501 with a large aspect ratio tubular tool is prepared in a chemical silver plating solution, with a thickness of not less than 15 μm. The outer diameter of the tubular tool with a large aspect ratio ranges from 200 to 1500 μm, the sidewall thickness accounts for 50% to 80% of the tube radius, and the thickness of the light guide layer accounts for not less than 50% of the sidewall thickness.

[0100] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0101] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A process for fabricating a large aspect ratio tubular tool with an annular light-guiding thin film for conductive transmission, characterized in that, Includes the following steps: S100: Using a mixed gas with high infrared spectral transmittance as raw material, a hollow tool mother tube with the same waveguide structure characteristics as the tubular tool with a large aspect ratio is prepared. S200: The hollow tool tube is softened and shrunk under negative pressure to obtain a target hollow tool tube with low hydroxyl content. S300: The target hollow tool tube is subjected to pressure holding and drawing. The inner diameter, outer diameter and wire diameter of the hollow tubular light guide tube obtained by pressure holding and drawing are fed back through real-time online measurement, and the drawing pressure is adjusted in real time to finally obtain the finished hollow tubular light guide tube of the target size. S400: A metal layer is plated on the inner wall of the hollow tubular light guide tube finished product, and an optical exit structure is processed on the tube end face of the hollow tubular light guide tube finished product, thereby obtaining the tubular tool with a large length-to-diameter ratio. In step S100, the hollow tool tube comprises, from the outside to the inside, a prefabricated protective layer, a buffer layer, a prefabricated outer reflective layer, a first transition layer, a prefabricated light guide layer, a second transition layer, and a prefabricated inner reflective layer.

2. The fabrication process of the high aspect ratio tubular tool with conductive annular light-guiding film according to claim 1, characterized in that, The thickness of the prefabricated light guide layer is more than 10 times the thickness of the prefabricated inner reflective layer and the thickness of the prefabricated outer reflective layer, and the thickness of the prefabricated light guide layer accounts for no less than 60% of the thickness of the sidewall of the hollow tool tube.

3. The fabrication process of the high aspect ratio tubular tool with conductive annular light-guiding film according to claim 1, characterized in that, The relative refractive index range of the prefabricated inner reflective layer is -0.95% to -1.2%, the relative refractive index range of the prefabricated outer reflective layer is -0.95% to -1.2%, and the relative refractive index range of the prefabricated light guide layer is 1.02% to 1.28%.

4. The fabrication process of the high aspect ratio tubular tool with conductive annular light-guiding film according to claim 1, characterized in that, Using a mixed gas of O2, GeCl4, SiCl4, and C2F6 with an infrared spectral transmittance of not less than 94.5% as raw material, the buffer layer, the pre-fabricated outer reflective layer, the first transition layer, the pre-fabricated light guide layer, the second transition layer, and the pre-fabricated inner reflective layer are sequentially prepared on the inner wall of a low-hydroxyl quartz base tube by adjusting the content of O2, GeCl4, SiCl4, and C2F6 in the mixed gas, wherein the low-hydroxyl quartz base tube serves as the pre-fabricated protective layer.

5. The fabrication process of the high aspect ratio tubular tool with conductive annular light-guiding film according to claim 1, characterized in that, In step S200, Cl2 is introduced into the negative pressure environment.

6. The fabrication process of the high aspect ratio tubular tool with conductive annular light-guiding film according to claim 1, characterized in that, After step S200 and before step S300, the target hollow tool tube is subjected to heating, straightening, pickling and drying treatments in sequence.

7. The fabrication process of the high aspect ratio tubular tool with conductive annular light-guiding film according to claim 1, characterized in that, In step S300, coherent light interferometry is used to visually detect the inner diameter, outer diameter, and wire diameter of the hollow tubular light guide tube. Based on the outer diameter error and inner diameter error of the hollow tubular light guide tube, the pressure value of the target hollow tool mother tube currently being pressure-held and drawn is adjusted online, and finally the finished hollow tubular light guide tube of the target size is obtained.

8. The fabrication process of the high aspect ratio tubular tool with conductive annular light-guiding film according to claim 1, characterized in that, In step S300, the feeding speed and traction speed are optimized offline by comparing the outer diameter and inner diameter of the hollow tubular light guide tube obtained by drawing with the target hollow tool mother tube; the size of the hollow tubular light guide tube and the pressure holding drawing parameters are recorded to form a manufacturing process database.

9. The fabrication process of a high aspect ratio tubular tool with conductive annular light-guiding film according to any one of claims 1-8, characterized in that, The outer diameter of the tubular tool with a large aspect ratio ranges from 200 to 1500 μm, and the sidewall thickness of the tubular tool with a large aspect ratio accounts for 50% to 80% of the tube radius.

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