A smart wafer cassette storage device

Abstract

This invention discloses a smart wafer cassette storage and retrieval device, relating to the field of smart warehousing technology. It includes: a storage cabinet with a clearance opening at its central position, a first conveying mechanism installed along the outer edge of the clearance opening, the first conveying mechanism having a first conveying surface; a diversion mechanism having a second conveying surface, and the diversion mechanism being able to accurately position and convey the wafer cassette; and a vision detection module installed at the upper outer edge of the clearance opening.

Description

Technical Field

[0001] This invention relates to the field of intelligent warehousing technology, specifically to an intelligent wafer cassette storage and retrieval device. Background Technology

[0002] In the development of the semiconductor industry, wafers are a key component used to manufacture various semiconductor devices, such as integrated circuits, diodes, and transistors. A wafer cassette is a container used to hold and transport wafers, typically made of plastic or metal. It protects wafers from contamination and damage and improves production and transportation efficiency. Wafer cassettes are widely used to transfer wafers from one production stage to another, or from the production workshop to warehouses. However, existing wafer cassette specifications, due to the varying sizes of wafers and their matching requirements, result in inefficient use of storage space. Furthermore, using simple push-cylinder structures for wafer cassette storage makes them prone to collisions with the internal storage and retrieval equipment, leading to wafer damage. Additionally, the ease of access to wafer cassettes within existing storage and retrieval equipment is also poor.

[0003] Therefore, it is necessary to provide a smart wafer cassette access device to solve the problems mentioned in the background art. Summary of the Invention

[0004] To achieve the above objectives, the present invention provides the following technical solution: a wafer cassette intelligent access device, comprising:

[0005] A storage cabinet has a clearance opening at its central position, and a first conveying mechanism is installed along the outer edge of the clearance opening. The first conveying mechanism has a first conveying surface.

[0006] A shunting mechanism having a second conveying surface, and the shunting mechanism being capable of precisely positioning and conveying wafer cassettes; and

[0007] The visual inspection module is installed at the upper outer side of the clearance opening.

[0008] Furthermore, as a preferred embodiment, the storage cabinet is divided into two areas, namely a distribution area and an access area. The distribution area is equipped with the distribution mechanism, and the access area consists of multiple cabinets.

[0009] Furthermore, as a preferred embodiment, the clearance opening is equipped with an automatically opening and closing sealing plate, which is used for sealing inside the storage cabinet.

[0010] Furthermore, preferably, the diversion mechanism includes:

[0011] A transverse guide rail is fixedly installed in the distribution area of ​​the storage cabinet, and a longitudinal guide rail that moves along the direction of the second conveying surface is provided on the transverse guide rail.

[0012] A screw rod is fixed on the longitudinal guide rail, and a limiting plate driven by a power device and movable in the vertical direction is provided on the screw rod. A second conveying mechanism is installed on the limiting plate.

[0013] Furthermore, as a preferred embodiment, the second conveying mechanism includes a positioning plate fixed in the middle of the limiting plate, the positioning plate being provided with a plurality of rollers driven by corresponding motors, and the mounting outer diameter of the rollers extending out of the positioning plates on both sides.

[0014] Furthermore, as a preferred embodiment, the cabinet frame is composed of multiple compartments, and the bottom of each of the multiple compartments is composed of extension plates symmetrically fixed to the cabinet frame, and each extension plate is equipped with a buffer storage component.

[0015] Furthermore, preferably, the width of the positioning plate is equal to the distance between any two of the extension plates.

[0016] Furthermore, preferably, the buffer storage component includes:

[0017] A U-shaped plate is fixedly installed inside the extension plate. Two longitudinal guide grooves are opened in the U-shaped plate. Two rotating rollers are rotatably installed in the guide grooves, and the rotating rollers do not have a power system.

[0018] A drive roller with an outer diameter of Rcm is self-rotatingly mounted within the U-shaped plate, and its central axis is offset from the center of gravity. cm;

[0019] The buffer positioning roller is connected to the U-shaped plate at both ends by a return spring, and a pressure sensor is provided at the lower end of the return spring.

[0020] Furthermore, preferably, the outer diameter of the buffer positioning roller is 3-5 cm higher than the outer diameter of the rotating roller.

[0021] Compared with the prior art, the present invention provides a smart wafer cassette access device, which has the following advantages:

[0022] In this invention, the first conveying mechanism, in conjunction with the diversion mechanism, precisely positions and conveys the uniformly shaped wafer boxes to the storage and retrieval area, and then transfers the wafer boxes to the extension plate space for storage via the second conveying mechanism. A benchmark system is then established, which stores the wafer box numbers and corresponding storage location numbers, facilitating the subsequent retrieval of the wafer boxes.

[0023] In this invention, during the wafer cassette storage process, when the drive roller rotates to the far end, the second conveying mechanism, in conjunction with the rotating roller, positions and distributes the wafer cassette according to coordinates until the pressure sensor detects a value and stops conveying the wafer cassette. That is, the wafer cassette contacts the buffer positioning roller and the rotating roller stops rotating to prevent the wafer cassette from colliding with the inner wall of the storage cabinet and damaging the wafer. Simultaneously, the second conveying mechanism withdraws from the storage and retrieval area. During the wafer cassette retrieval process, when the drive roller rotates to the far end, the second conveying mechanism extends into the corresponding numbered cabinet. When the drive roller rotates to the near end, the second conveying mechanism contacts the wafer cassette and carries the wafer cassette away from the storage and retrieval area, effectively increasing the convenience of wafer cassette retrieval. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the overall structure of a smart wafer cassette access device.

[0025] Figure 2 This is a schematic diagram of a shunt mechanism in a wafer cassette intelligent access device;

[0026] Figure 3 for Figure 2 Schematic diagram of the second conveying mechanism;

[0027] Figure 4 This is a schematic diagram of the internal structure of a storage cabinet in a wafer cassette intelligent access device.

[0028] Figure 5 for Figure 4 Enlarged structural diagram at point A in the middle;

[0029] Figure 6 This is a schematic diagram of the structure of a buffer storage component in a wafer cassette intelligent access device;

[0030] Figure 7 for Figure 6 A schematic diagram showing the horizontal installation positions of the drive roller, rotating roller, and buffer positioning roller.

[0031] In the diagram: 1. Storage cabinet; 2. First conveying mechanism; 3. Diverting mechanism; 4. Vision inspection module; 11. Clearance opening; 12. Cabinet frame; 13. Extension plate; 14. Buffer storage assembly; 141. U-shaped plate; 142. Drive roller; 143. Rotary roller; 144. Buffer positioning roller; 31. Transverse guide rail; 32. Longitudinal guide rail; 33. Power unit; 34. Screw rod; 35. Second conveying mechanism; 351. Positioning plate; 352. Roller. Detailed Implementation

[0032] The invention will now be described in further detail with reference to the accompanying drawings.

[0033] Please see Figures 1 to 7 In this embodiment of the invention, a wafer cassette intelligent access device includes:

[0034] Storage cabinet 1, with an opening 11 in the middle position, and a first conveying mechanism 2 is installed along the outer edge of the opening 11. The first conveying mechanism 2 has a first conveying surface, which can convey wafer cassettes in both directions.

[0035] The shunting mechanism 3 has a second conveying surface, and the shunting mechanism 3 can accurately position and transport wafer cassettes. The second conveying surface rotates in both directions along the Y-axis, and the second conveying surface has three degrees of freedom.

[0036] The visual inspection module 4 is installed at the upper outer side of the clearance opening 11;

[0037] It should be noted that the first conveying mechanism 2, the diversion mechanism 3, and the vision inspection module 4 are all controlled independently or in parallel by the control module. When storing wafers of different specifications, selecting wafer boxes with a uniform shape is beneficial for the rational planning and utilization of the space inside the storage cabinet 1.

[0038] That is, in actual use, the first conveying mechanism 2 first supplies wafer boxes of uniform shape into the storage cabinet 1. After the vision detection module 4 identifies the relevant information of the wafer box, the control module establishes a coordinate system position that stores the wafer box number and the corresponding storage location number, and stores the wafer box in the corresponding area through the diversion mechanism 3. The control module establishes a database. During the wafer box retrieval process, relevant personnel select the required wafer box model. The control system retrieves the wafer box according to the positioning coordinate system position that is compatible with the selected model in the database, and through the cooperation of the diversion mechanism 3 and the first conveying mechanism 2.

[0039] As a preferred embodiment, such as Figure 4 As shown, the storage cabinet 1 is divided into two areas, namely a distribution area and a storage area. The distribution area is equipped with the distribution mechanism 3, and the storage area consists of multiple cabinets 12.

[0040] In a preferred embodiment, the clearance opening 11 is equipped with an automatically opening and closing sealing plate, which is used for sealing inside the storage cabinet 1, and can protect the wafer box from external pollution and damage.

[0041] Please see Figure 2 In this embodiment, the diversion mechanism 3 includes:

[0042] A transverse guide rail 31 is fixedly installed in the diversion area of ​​the storage cabinet 1, and a longitudinal guide rail 32 that moves along the direction of the second conveying surface is provided on the transverse guide rail 31.

[0043] The spiral rod 34 is fixed on the longitudinal guide rail 32, and a limiting plate driven by the power device 33 is provided on the spiral rod 34 to move vertically. A second conveying mechanism 35 is installed on the limiting plate.

[0044] It should be explained that the origin of the second conveying mechanism 35 is level with that of the first conveying mechanism 2, and it is directly opposite the clearance opening 11.

[0045] Specifically, the second conveying mechanism 35 can receive the wafer cassette on the first conveying mechanism 2 and then precisely move it on the horizontal guide rail 31, the vertical guide rail 32, and the limiting plate through parameters provided by the control module. It should be noted that the displacement distance of the second conveying mechanism 35 on the horizontal guide rail 31 is fixed, that is, the distance of movement along the Y-axis is fixed. The movement distance of the second conveying mechanism 35 along the X-axis and Z-axis is controlled by the coordinate system set by the control system.

[0046] As a preferred embodiment, such as Figure 3 As shown, the second conveying mechanism 35 includes a positioning plate 351 fixed in the middle of the limiting plate. The positioning plate 351 is provided with a plurality of rollers 352 driven by corresponding motors, and the mounting outer diameter of the rollers 352 extends out of the positioning plates 351 on both sides. That is to say, the outer dimensions of the wafer box should generally be greater than the length between the rollers 352.

[0047] Please see Figure 5 In this embodiment, the cabinet 12 is composed of multiple compartments, and the bottom of each of the multiple compartments is composed of an extension plate 13 symmetrically fixed on the cabinet 12. Each extension plate 13 is equipped with a buffer storage component 14.

[0048] In a preferred embodiment, the width of the positioning plate 351 is equal to the distance between the two extension plates 13, and the second conveying mechanism 35 can extend into the cabinet 12 and effectively place the wafer box between the symmetrical extension plates 13.

[0049] Please see Figure 6 In this embodiment, the buffer storage component 14 includes:

[0050] A U-shaped plate 141 is fixedly installed inside the extension plate 13. Two longitudinal guide grooves are opened in the U-shaped plate 141. Two rotating rollers 143 are rotatably installed in the guide grooves, and the rotating rollers 143 do not have a power system.

[0051] A drive roller 142, with an outer diameter of Rcm, is self-rotatingly mounted within the U-shaped plate 141, and its central axis is offset from the center of gravity. cm;

[0052] The buffer positioning roller 144 is connected to the U-shaped plate 141 at both ends by a reset spring, and a pressure sensor is provided at the lower end of the reset spring.

[0053] That is, during the storage and retrieval process of the wafer cassette, the drive roller 142 has corresponding far and near ends when it rotates. The near end is based on 0° to 90°, and the far end is 90° to 360°. It should be noted that when the drive roller 142 rotates at an angle of 0° to 90°, the rotating roller 143 remains in a fixed position. The upper limit height of the rotating roller 143 during the rotation of the drive roller 142 at an angle of 180° to 270° is consistently higher than the height of the second conveying mechanism 35 when it extends into the cabinet 12. In other words, the storage process includes the rising of the rotating roller 143. (The drive roller 142 rotates at an angle of 90° to 180°) and is higher than the second conveying mechanism 35 (the drive roller 142 rotates at an angle of 180° to 270°). The second conveying mechanism 35 feeds the wafer cassette into the cabinet 12 (the drive roller 142 rotates at an angle of 90° to 180°), and the second conveying mechanism 35 withdraws from the storage area (the drive roller 142 rotates at an angle of 180° to 270°). When the drive roller 142 rotates at an angle of 270° to 360°, it returns to its initial position and stores the wafer cassette on the extension plate 13.

[0054] The wafer cassette retrieval process includes the rising of the rotary roller 143 above the second conveying mechanism 35 (the driving roller 142 rotates at an angle of 90° to 270°), the second conveying mechanism 35 extending into the cabinet 12 (the driving roller 142 rotates at an angle of 180° to 270°), and the second conveying mechanism 35 carrying the wafer cassette away from the wafer cassette storage and retrieval area (the driving roller 142 rotates at an angle of 270° to 360°).

[0055] As a preferred embodiment, such as Figure 7 As shown, the outer diameter of the buffer positioning roller 144 is 3-5 cm higher than the outer diameter of the rotating roller 143. When the wafer cassette is conveyed along the second conveying mechanism 35 and comes into contact with the buffer positioning roller 144, the pressure sensor detects the value and the second conveying mechanism 35 stops rotating. At this time, the wafer cassette is placed on the extension plate 13, so that the wafer cassette can be effectively buffered to prevent the wafer cassette from colliding with the inner wall of the storage cabinet 1 and to protect the wafers stored inside.

[0056] In specific implementation, during the wafer box storage process, the first conveying mechanism 2 supplies wafer boxes of uniform shape to the storage cabinet 1. After the vision detection module 4 identifies the relevant information of the wafer box, the control module establishes a benchmark system position corresponding to the wafer box number and the storage location number, and transfers the wafer box to the second conveying mechanism 35. The drive roller 142 rotates to the far end, and the diversion mechanism 3 transfers the wafer box to the extension plate 13 for storage through the second conveying mechanism 35 until the buffer positioning roller 144 contacts the wafer box and stops conveying. The second conveying mechanism 35 then leaves the storage and retrieval area.

[0057] During the wafer cassette retrieval process, the control module moves the second conveying mechanism 35 to the corresponding position according to the selected wafer cassette specifications and model. When the drive roller 142 rotates to the far end, the position of the wafer cassette rises, and the second conveying mechanism 35 extends into the cabinet 12 with the corresponding number. When the drive roller 142 rotates to the near end, the wafer cassette contacts the second conveying mechanism 35 and moves the wafer cassette away from the storage and retrieval area to the initial position, and synchronously conveys the wafer cassette to the first conveying mechanism 2.

[0058] The above description is merely a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A FOUP intelligent access device, characterized by: The utility model relates to a kind of wafer box storage cabinet, including: Storage cabinet (1), wherein the position of the part is provided with the gap (11), the first conveying mechanism (2) is arranged outside the gap (11) along line, and the first conveying mechanism (2) has first conveying surface; Shunt mechanism (3) has second conveying surface, and the shunt mechanism (3) can accurately position wafer box; Visual inspection module (4) is installed and arranged at the outside upper end position of the gap (11); The storage cabinet (1) is divided into two areas, which are shunt area and access area respectively, the shunt mechanism (3) is arranged in the shunt area, and the access area is configured by a plurality of cabinet racks (12). The cabinet rack (12) is composed of a plurality of compartments, and the bottom of each compartment is composed of an extension plate (13) symmetrically fixed on the cabinet rack (12), and a buffer storage assembly (14) is arranged in the extension plate (13). The buffer storage assembly (14) includes: A U-shaped plate (141) is fixedly arranged in the extension plate (13), two longitudinal guide grooves are formed in the U-shaped plate (141), two rotating rollers (143) are rotatably arranged in the guide grooves, and the rotating rollers (143) have no power system. a driving roller (142) with an outer diameter of Rcm, which is arranged in the U-shaped plate (141) and has a center axis deviated from the gravity center position of the U-shaped plate (141) cm; A buffer positioning roller (144) is connected to the U-shaped plate (141) by a return spring at both ends, a pressure sensor is arranged at the lower end of the return spring, and the outer diameter position of the buffer positioning roller (144) is 3-5 cm higher than the outer diameter position of the rotating roller (143). The shunt mechanism (3) includes: A horizontal guide rail (31) is fixedly installed in the shunt area of the storage cabinet (1), and a longitudinal guide rail (32) moving in the direction of the second conveying surface is arranged on the horizontal guide rail (31). A screw rod (34) is fixed on the longitudinal guide rail (32), and a limiting plate driven by a power device (33) to move in the vertical direction is arranged on the screw rod (34), and a second conveying mechanism (35) is arranged on the limiting plate. During the access process of the wafer box, the driving roller (142) has a corresponding far end and near end when rotating, the near end is based on 0°-90°, and the far end is 90°-360°, when the driving roller (142) rotates at an angle of 0°-90°, the rotating roller (143) remains unchanged, the upper limit height of the rotating roller (143) during the rotation of the driving roller (142) at an angle of 180°-270° is continuously higher than the height when the second conveying mechanism (35) extends into the cabinet rack (12), and the driving roller (142) returns to the initial position during the process of rotating at an angle of 270°-360° and stores the wafer box on the extension plate (13).

2. The wafer boat intelligent access device of claim 1, wherein: The gap (11) is provided with a sealing plate which is automatically opened and closed, and is used for sealing in the storage cabinet (1).

3. The FOUP intelligent access device of claim 1, wherein: The second conveying mechanism (35) includes a positioning plate (351) fixedly arranged in the middle of the limiting plate, a plurality of rollers (352) driven by corresponding motors are arranged on the positioning plate (351), and the mounting outer diameter of the rollers (352) extends beyond the positioning plate (351) on both sides.

4. The FOUP intelligent access device of claim 3, wherein: The width of the positioning plate (351) is equal to the distance between the two symmetrical extension plates (13).

Images