A modular integrated optical device and inertial navigation system

Abstract

The present invention provides a modular integrated optical device and an inertial navigation system. The modular integrated optical device includes a modular integrated optical chip and an optical fiber ring. The modular integrated optical chip includes a light-emitting module, a detection module, a multifunctional integrated module and a modulation module. The modulation module is connected to the optical fiber ring through an output pigtail. The light-emitting module includes an isolator, a first coupler and a light source chip. The detection module includes a detection chip, a second coupler and a transimpedance amplifier circuit. The multifunctional integrated module includes a light-emitting detection end coupling waveguide, a modulation end coupling waveguide, a light-emitting detection end beam splitting / combining waveguide, a steering waveguide, a mode filtering waveguide, a polarization / polarization waveguide and a modulation end beam splitting / combining waveguide. The modulation module includes a transmission waveguide and a modulation electrode. Compared with the prior art, the technical solution of the present invention can solve the technical problems in the prior art that the optical path of the optical fiber gyroscope is a discrete device, the volume is too large, and the inability to meet the miniaturization of the inertial navigation system.

Description

Technical Field

[0001] The present invention relates to the technical field of fiber optic gyroscopes, and in particular to a modular integrated optical device and an inertial navigation system. Background Art

[0002] Fiber optic gyroscope is a sensor of angular velocity of sensitive carrier based on Sagnac effect. It has the advantages of no moving parts, fast startup time and wide precision coverage. It has received extensive attention and application in the fields of aviation, aerospace, navigation and land precision navigation, weapon precision guidance and automatic control. In order to better meet the development needs of miniaturization and low cost of inertial navigation system, the next generation of fiber optic gyroscope urgently needs to develop towards miniaturization. The optical path volume accounts for more than 70% of the volume of the fiber optic gyroscope, which is the primary challenge to achieve miniaturization. It is urgent to explore technical solutions for miniaturization of the optical path.

[0003] The single-axis fiber optic gyroscope is sensitive to the angular rate information of a certain dimension in space and is a typical architectural form of a fiber optic gyroscope. The optical path of a traditional single-axis fiber optic gyroscope consists of a light source, a detector, a coupler, a multifunctional modulator, and a fiber optic ring. Each optical device has an independent package, which makes it difficult to reduce the size and cost of the gyroscope. The fiber optic ring is the core sensitive component of the fiber optic gyroscope, and the volume is highly related to the accuracy. Therefore, the light source, detector, coupler, and multifunctional modulator are the primary objects of optical path miniaturization. How to miniaturize the four discrete devices and then encapsulate them in the same structure while ensuring the integrity of the functions and performance of each device is the primary challenge facing the current miniaturization of the fiber optic gyroscope optical path. Modular integrated optical devices are an ideal solution for miniaturizing the optical path of a fiber optic gyroscope. The fiber optic gyroscope based on modular integrated optical devices has a smaller size and better comprehensive performance, and is an important development direction for future fiber optic gyroscopes. Summary of the invention

[0004] The present invention provides a modular integrated optical device and an inertial navigation system, which can solve the technical problems in the prior art that the optical path of the fiber optic gyroscope is a discrete device, the volume is too large, and the inability to meet the miniaturization of the inertial navigation system.

[0005] According to one aspect of the present invention, a modular integrated optical device is provided, the modular integrated optical device comprising a modular integrated optical chip A and an optical fiber ring B, the modular integrated optical chip A comprising a light emitting module AA, a detection module AB, a multifunctional integrated module AC and a modulation module AD, the light emitting module AA, the detection module AB and the modulation module AD are all connected to the multifunctional integrated module AC by direct coupling, and the modulation module AD is connected to the optical fiber ring B by an output pigtail;

[0006] The light-emitting module AA includes an isolator AA1, a first coupler AA2 and a light source chip AA3, the detection module AB includes a detection chip AB1, a second coupler AB2 and a transimpedance amplifier circuit AB3, the multifunctional integrated module AC includes a light-emitting detection end coupling waveguide AC1, a modulation end coupling waveguide AC2, a light-emitting detection end beam splitting / combining waveguide AC3, a steering waveguide AC4, a mode filtering waveguide AC5, a polarizing / polarization waveguide AC6 and a modulation end beam splitting / combining waveguide AC7, the modulation module AD includes a transmission waveguide AD1 and a modulation electrode AD2, the transmission waveguide AD1 is a double straight-through waveguide, and the optical fiber ring B includes an optical fiber ring body B1, a ring input end B2 and a ring output end B3;

[0007] The light beam emitted by the light source chip AA3 is shaped by the first coupler AA2, and the isolator AA1 blocks the shaped light beam to make it propagate in the reverse direction. The reverse propagating light beam is received by the light-emitting detection end coupling waveguide AC1 and combined and steered by the steering waveguide AC4 and the light-emitting detection end beam splitting / combining waveguide AC3. After that, it passes through the mode filtering waveguide AC5 and the polarization / polarization waveguide AC6 and is split by the modulation end beam splitting / combining waveguide AC7. Then, it is output to the transmission waveguide AD1 through the steering waveguide AC4 and the modulation end coupling waveguide AC2. During the transmission process, the split light beam receives the phase modulation information of the modulation electrode AD2 and passes through the loop The input end B2 enters the optical fiber ring body B1 for transmission. The light beam returned through the optical fiber ring body B1 passes through the ring output end B3 and sequentially passes through the modulation electrode AD2 and the transmission waveguide AD1 to enter the multifunctional integrated module AC, passes through the modulation end coupling waveguide AC2, the steering waveguide AC4, the modulation end splitting / combining waveguide AC7, the mode filtering waveguide AC5, the polarization / polarization waveguide AC6 and the luminous detection end splitting / combining waveguide AC3, and then enters the detection module AB, and is further received by the detection chip AB1 through the second coupler AB2 to form a photocurrent signal. The photocurrent signal is converted into a voltage signal by the transimpedance amplifier circuit AB3 and then demodulated as a gyro signal.

[0008] Furthermore, the light emitting detection end beam splitting / combining waveguide AC3 and the modulation end beam splitting / combining waveguide AC7 are both selected from one of a Y-branch waveguide, a multimode interference waveguide, an adiabatic coupling waveguide and a directional coupling waveguide.

[0009] Further, the mode filtering waveguide AC5 is selected from one of a straight waveguide, an S-bend waveguide and a spiral waveguide.

[0010] Furthermore, the polarization waveguide AC6 is a straight waveguide or an S-bend waveguide.

[0011] Furthermore, the substrate of the multifunctional integrated module AC is selected from Si, LNOI, Si x N yand SiO2, and the substrate of the modulation module AD is selected from LNOI or LN.

[0012] Furthermore, the light source chip AA3 adopts a superluminescent diode, whose central wavelength is 850nm, 1310nm or 1550nm.

[0013] Furthermore, the detection chip AB1 and the transimpedance amplifier circuit AB3 both use PIN-FET components or PIN-TIA components.

[0014] Furthermore, the integrated optical device also includes a packaging structure, which includes a device substrate E1, a semiconductor bidirectional cooler E2, a heat sink E3, a transition heat sink E4, a height pad E5 and a thermistor E6. The semiconductor bidirectional cooler E2, the heat sink E3, the transition heat sink E4 and the thermistor E6 are stacked in sequence on one side of the device substrate E1, the height pad E5 is arranged on the other side of the device substrate E1, the light-emitting module AA is arranged on the transition heat sink E4, the detection module AB, the multi-functional integrated module AC and the modulation module AD are arranged on the height pad E5 to maintain a height consistent with the light-emitting module AA, and the thermistor E6 is respectively connected to the semiconductor bidirectional cooler E2 and the light source chip AA3 for current closed-loop feedback.

[0015] Furthermore, the light source chip AA3 and the thermistor E6 are welded together with the transition heat sink E4 by adding solder, the detection chip AB1 is welded together with the height spacer E5 by adding solder, and a fixing seat is provided on the transition heat sink E4 and the height spacer E5. The second coupler AB2, the transimpedance amplifier circuit AB3, the isolator AA1 and the first coupler AA2 are fixed on the fixing seat by glue dispensing.

[0016] Furthermore, the output pigtail of the integrated optical device is output through the nozzle to avoid the output pigtail from breaking, and the optical fiber loop is formed by winding a polarization-maintaining optical fiber.

[0017] According to another aspect of the present invention, an inertial navigation system is provided. The inertial navigation system includes the aforementioned modular integrated optical device of the present invention.

[0018] By applying the technical solution of the present invention, a modular integrated optical device and an inertial navigation system are provided. The modular integrated optical device is provided with four module chips, namely, a light emitting module, a detection module, a mode control module and a phase modulation module, and the internal optical devices of the four modules are reasonably designed and laid out, and the optical devices other than the optical fiber ring are integrated on one chip, so that the entire optical device is composed of only two devices, the modular integrated optical chip and the optical fiber ring. The volume of the device can be greatly reduced while realizing the functions required by the single-axis fiber optic gyroscope. The overall assembly is simple and the consistency is good. At the same time, there is no need for optical fiber connection between the modules on the chip, and a fiber-free structure can be realized, which further simplifies the structure, reduces the volume, and improves the reliability. In addition, the four modules on the chip are realized based on the photolithography process, and the modules and the internal implementation forms of the modules can be flexibly designed and laid out according to the requirements of the gyroscope and the modules. It has the advantages of good consistency, low cost, flexible layout, and suitability for mass production. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The included drawings are used to provide a further understanding of the embodiments of the present invention, which constitute a part of the specification, are used to illustrate the embodiments of the present invention, and together with the text description, explain the principles of the present invention. Obviously, the drawings in the following description are only some embodiments of the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0020] Figure 1 A schematic diagram of the overall structure of a modular integrated optical device provided according to a specific embodiment of the present invention is shown;

[0021] Figure 2 The figure shows the composition and layout diagram of the modular integrated optical device provided according to the specific embodiment of the present invention (same side);

[0022] Figure 3 The figure shows the composition and layout diagram of the modular integrated optical device provided according to the specific embodiment of the present invention (on the other side);

[0023] Figure 4 A schematic diagram of packaging of a modular integrated optical device according to a specific embodiment of the present invention is shown;

[0024] Figure 5 A schematic diagram of the structure of a modular integrated optical device according to the first embodiment of the present invention is shown (the beam splitting / combining waveguide AC3 at the light emitting detection end is in a vertical direction, and the input and output are on the same side);

[0025] Figure 6A schematic diagram of the structure of a modular integrated optical device according to the first embodiment of the present invention is shown (the beam splitting / combining waveguide AC3 at the light emitting detection end is in a vertical direction, and the input and output are on opposite sides);

[0026] Figure 7 A schematic diagram of the structure of a modular integrated optical device provided according to the second embodiment of the present invention is shown (the beam splitting / combining waveguide AC3 at the light emitting detection end is in the horizontal direction, and the input and output are on the same side);

[0027] Figure 8 A schematic diagram of the structure of a modular integrated optical device provided according to the second embodiment of the present invention is shown (the beam splitting / combining waveguide AC3 at the light emitting detection end is in the horizontal direction, and the input and output are on opposite sides);

[0028] Fig. 9 A schematic diagram of the structure of a modular integrated optical device according to the third embodiment of the present invention is shown (the beam splitting / combining waveguide AC3 at the light emitting detection end is in a vertical direction, and the input and output are on the same side);

[0029] Fig.10 A schematic diagram of the structure of a modular integrated optical device according to the third embodiment of the present invention is shown (the beam splitting / combining waveguide AC3 at the light emitting detection end is in a vertical direction, and the input and output are on opposite sides);

[0030] Fig.11 A schematic diagram of the structure of a modular integrated optical device provided according to the fourth embodiment of the present invention is shown (the beam splitting / combining waveguide AC3 at the light emitting detection end is in the horizontal direction, and the input and output are on the same side);

[0031] Fig.12 A schematic diagram of the structure of a modular integrated optical device according to Embodiment 4 of the present invention is shown (the beam splitting / combining waveguide AC3 at the light emitting detection end is in a horizontal direction, and the input and output are on opposite sides);

[0032] Fig.13 A schematic diagram of the structure of a modular integrated optical device according to Embodiment 5 of the present invention is shown (the beam splitting / combining waveguide AC3 at the light emitting detection end is in a vertical direction, and the input and output are on the same side);

[0033] Fig.14 A schematic diagram of the structure of a modular integrated optical device according to Embodiment 5 of the present invention is shown (the beam splitting / combining waveguide AC3 at the light emitting detection end is in a vertical direction, and the input and output are on opposite sides);

[0034] Fig.15 A schematic diagram of the structure of a modular integrated optical device according to Embodiment 6 of the present invention is shown (the beam splitting / combining waveguide AC3 at the light emitting detection end is in a horizontal direction, with the input and output on the same side);

[0035] Fig.16A schematic structural diagram of a modular integrated optical device provided according to Embodiment 6 of the present invention is shown (the beam splitting / combining waveguide AC3 at the light emitting detection end is in a horizontal direction, with the input and output on opposite sides). DETAILED DESCRIPTION

[0036] It should be noted that, in the absence of conflict, the embodiments in this application and the features in the embodiments can be combined with each other. The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is by no means intended to limit the present invention and its application or use. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0038] Unless otherwise specifically stated, the relative arrangement of the parts and steps described in these embodiments, numerical expressions and numerical values ​​do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, method and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, method and equipment should be regarded as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0039] like Figure 1As shown, according to a specific embodiment of the present invention, a modular integrated optical device is provided, the modular integrated optical device includes a modular integrated optical chip A and an optical fiber ring B, the modular integrated optical chip A includes a light emitting module AA, a detection module AB, a multifunctional integrated module AC and a modulation module AD, the light emitting module AA, the detection module AB and the modulation module AD are all connected to the multifunctional integrated module AC by direct coupling, and the modulation module AD is connected to the optical fiber ring B through an output pigtail;

[0040] The light-emitting module AA includes an isolator AA1, a first coupler AA2 and a light source chip AA3, the detection module AB includes a detection chip AB1, a second coupler AB2 and a transimpedance amplifier circuit AB3, the multifunctional integrated module AC includes a light-emitting detection end coupling waveguide AC1, a modulation end coupling waveguide AC2, a light-emitting detection end beam splitting / combining waveguide AC3, a steering waveguide AC4, a mode filtering waveguide AC5, a polarizing / polarization waveguide AC6 and a modulation end beam splitting / combining waveguide AC7, the modulation module AD includes a transmission waveguide AD1 and a modulation electrode AD2, the transmission waveguide AD1 is a double straight-through waveguide, and the optical fiber ring B includes an optical fiber ring body B1, a ring input end B2 and a ring output end B3;

[0041] The light beam emitted by the light source chip AA3 is shaped by the first coupler AA2, and the isolator AA1 blocks the shaped light beam to make it propagate in the reverse direction. The reverse propagating light beam is received by the light-emitting detection end coupling waveguide AC1 and combined and steered by the steering waveguide AC4 and the light-emitting detection end beam splitting / combining waveguide AC3. After that, it passes through the mode filtering waveguide AC5 and the polarization / polarization waveguide AC6 and is split by the modulation end beam splitting / combining waveguide AC7. Then, it is output to the transmission waveguide AD1 through the steering waveguide AC4 and the modulation end coupling waveguide AC2. During the transmission process, the split light beam receives the phase modulation information of the modulation electrode AD2 and passes through the loop The input end B2 enters the optical fiber ring body B1 for transmission. The light beam returned through the optical fiber ring body B1 passes through the ring output end B3 and sequentially passes through the modulation electrode AD2 and the transmission waveguide AD1 to enter the multifunctional integrated module AC, passes through the modulation end coupling waveguide AC2, the steering waveguide AC4, the modulation end splitting / combining waveguide AC7, the mode filtering waveguide AC5, the polarization / polarization waveguide AC6 and the luminous detection end splitting / combining waveguide AC3, and then enters the detection module AB, and is further received by the detection chip AB1 through the second coupler AB2 to form a photocurrent signal. The photocurrent signal is converted into a voltage signal by the transimpedance amplifier circuit AB3 and then demodulated as a gyro signal.

[0042] Among them, the light beam emitted by the light source chip AA3 is a low-bias incoherent light beam. The mode filtering waveguide AC5 and the polarizing / polarization waveguide AC6 are used to filter out non-transmission modes. The two light waves formed by beam splitting carry interference information after passing through the optical fiber ring and return to the modulation module AD. After modulation, they enter the multi-functional integrated module AC and the detection module AB in turn, are received by the detection chip AB1, and are amplified and recorded.

[0043] Through this configuration, a modular integrated optical device and an inertial navigation system are provided. The modular integrated optical device is provided with four module chips, namely, a light emitting module, a detection module, a mode control module and a phase modulation module, and the internal optical devices of the four modules are reasonably designed and laid out, and the optical devices other than the optical fiber ring are integrated on one chip, so that the entire optical device is composed of only two devices, namely, the modular integrated optical chip and the optical fiber ring, which can greatly reduce the volume of the device under the premise of realizing the functions required by the single-axis fiber optic gyroscope, and the overall assembly is simple and consistent. At the same time, there is no need for optical fiber connection between the modules on the chip, and the fiber-free structure can be realized, which further simplifies the structure, reduces the volume, and improves the reliability. In addition, the four modules on the chip are realized based on the photolithography process, and the modules and the internal realization forms of the modules can be flexibly designed and laid out according to the requirements of the gyroscope and the modules, and have the advantages of good consistency, low cost, flexible layout, and suitable for mass production. Compared with the prior art, the technical solution of the present invention can solve the technical problems in the prior art that the optical path of the fiber optic gyroscope is a discrete device, the volume is too large, and the miniaturization of the inertial navigation system cannot be met.

[0044] That is to say, the modular integrated optical chip in the modular integrated optical device of the present invention is realized based on the modular concept, combining the advantages of different devices, and integrating multiple devices and modules into one by hybrid integration. It has the functions of light emission, detection, polarization, beam splitting / combining, and phase modulation, thereby realizing the full integration of all optical devices of the fiber optic gyroscope except the fiber optic ring. Among them, the light emitting module AA includes a light source chip, an isolator, a coupler, etc., and has functions such as light emission and isolation; the detection module AB includes a detection chip, a coupler, a transimpedance amplifier circuit, etc., and has functions such as light detection reception, amplification, and current conversion; the multifunctional integrated module AC includes a coupling waveguide, a beam splitting / combining waveguide, a steering waveguide, a mode filtering waveguide, a polarization / polarization waveguide, etc., and has coupling input / output, beam splitting / combining, mode filtering, and polarization / polarization functions; the modulation module AD includes a dual straight-through waveguide with polarization / polarization functions, a modulation electrode, etc., and has functions such as polarization / polarization and phase modulation. On the basis of the modular integrated optical chip, the complete device function is realized by packaging, and the packaged modular integrated optical device is directly connected to the fiber optic ring to form a complete gyroscope optical path.

[0045] In the embodiment of the present invention, the light-emitting detection end beam splitting / combining waveguide AC3 and the modulation end beam splitting / combining waveguide AC7 are both implemented based on a light splitting waveguide, and are selected from one of a Y-branch waveguide, a multimode interference waveguide, an adiabatic coupling waveguide and a directional coupling waveguide. The multifunctional integrated module AC can be provided with a mode filtering waveguide and a polarizing / polarization waveguide, respectively, or a waveguide can be used to simultaneously realize the mode filtering function and the polarizing / polarization function. For example, a mode filtering waveguide with a polarizing / polarization function can be selected, so that a special polarizing / polarization waveguide can be omitted. As a specific embodiment of the present invention, the mode filtering waveguide AC5 is selected from one of a straight waveguide, an S-bend waveguide and a spiral waveguide, and the polarizing / polarization waveguide AC6 is a straight waveguide or an S-bend waveguide. In addition, in the embodiment of the present invention, the light source chip AA3 adopts a superluminescent diode (SLD), and its central wavelength is 850nm, 1310nm or 1550nm. The detection chip AB1 and the transimpedance amplifier circuit AB3 both adopt PIN-FET components or PIN-TIA components.

[0046] Furthermore, if Figure 4 As shown, in the embodiment of the present invention, the integrated optical device also includes a packaging structure, which includes a device substrate E1, a semiconductor bidirectional cooler E2, a heat sink E3, a transition heat sink E4, a height pad E5 and a thermistor E6. The semiconductor bidirectional cooler E2, the heat sink E3, the transition heat sink E4 and the thermistor E6 are stacked on one side of the device substrate E1 in sequence, the height pad E5 is arranged on the other side of the device substrate E1, the light emitting module AA is arranged on the transition heat sink E4, the detection module AB, the multifunctional integrated module AC and the modulation module AD are arranged on the height pad E5 to keep the same height as the light emitting module AA, and the thermistor E6 is respectively connected to the semiconductor bidirectional cooler E2 and the light source chip AA3 for current closed-loop feedback. The semiconductor bidirectional cooler E2 is a structural part connecting the heat sink E3 and the substrate E1. According to the information fed back by the thermistor E6, the temperature control of the light source chip AA3 can be achieved by adjusting the voltage of the bidirectional cooler. According to the different wavelengths of the light source chip AA3, this structure can be omitted. As a specific embodiment of the present invention, the transition heat sink E4 is made of ceramic material, which is in direct contact with the light emitting module AA, and carries the functions of fixing the light source chip AA3 and directional conduction of the heat of the light source. Depending on the wavelength of the light source chip, this structure can be omitted. In addition, as a specific embodiment of the present invention, the detection chip AB1 and the second coupler AB2 in the detection module AB are directly arranged on the height pad E5, and the transimpedance amplifier circuit AB3 is arranged on the detection chip AB1 and the second coupler AB2.

[0047] Based on the above embodiments, the modular integrated optical device provided by the present invention has a flexible layout feature. According to the requirements of the gyroscope and the requirements of a single module, the module position and the waveguide structure and output form inside the module can be flexibly arranged. Figure 2 As shown, the light emitting module AA, the detection module AB, and the modulation module AD are all located on the same side of the multifunctional integrated module AC; Figure 3 As shown, the light emitting module AA and the detection module AB are located on one side of the mode control module AD, and the modulation module AD is located on the other side of the multifunctional integration module AC.

[0048] Furthermore, in the embodiment of the present invention, the substrate of the multifunctional integrated module AC is selected from Si, LNOI, Si x N y and SiO2, the base material of the modulation module AD is selected from LNOI or LN. In addition, during packaging, the light source chip AA3 and the thermistor E6 are welded together with the transition heat sink E4 by adding solder, the detection chip AB1 is welded together with the height pad E5 by adding solder, the transition heat sink E4 and the height pad E5 are both provided with a fixing seat, and the second coupler AB2, the transimpedance amplifier circuit AB3, the isolator AA1 and the first coupler AA2 are all fixed on the fixing seat by glue dispensing. The entire modular integrated optical chip is realized based on the photolithography process, and has the advantages of large batch, good consistency and low cost.

[0049] Furthermore, in order to protect the output fiber pigtail of the chip, in the embodiment of the present invention, the output fiber pigtail of the integrated optical device is output through the nozzle to avoid the output fiber pigtail from breaking, and the fiber ring is wound with polarization-maintaining fiber.

[0050] That is to say, the packaging form of the modular integrated optical device proposed in the present invention is a multi-layer packaging form that combines two-dimensional and three-dimensional. The outside of the device is a metal package, and the inside is composed of three layers. The first layer is the optical device in the four modules; the second layer includes a transition heat sink, a heat sink, a refrigerator, a fixing seat, a fixing structure, etc.; the third layer is the substrate layer, that is, the base. The device is surrounded by a metal tube shell, and has pins, nozzles (tail pipes) and pigtails. The first layer is the main layer that realizes the function of the device; the second layer is the structural layer that ensures the normal operation of the device; the third layer is the external output and fixed structural layer. Depending on the working wavelength of the light-emitting chip, the components in the second layer can be deleted.

[0051] In order to better understand the modular integrated optical device proposed in the present invention, Figures 5 to 16 The structure is further illustrated with reference to a specific embodiment of the present invention.

[0052] Embodiment 1:

[0053] According to one embodiment of the present invention, the modular integrated optical chip in the modular integrated optical device includes a light emitting module AA, a detection module AB, a multifunctional integrated module AC and a modulation module AD. The light emitting module AA includes an isolator AA1, a first coupler AA2 and a light source chip AA3. The detection module AB includes a detection chip AB1, a second coupler AB2 and a transimpedance amplifier circuit AB3. The multifunctional integrated module AC includes a light emitting detection end coupling waveguide AC1, a modulation end coupling waveguide AC2, a light emitting detection end beam splitting / combining waveguide AC3, a steering waveguide AC4, a mode filtering waveguide AC5, a polarizing / polarization waveguide AC6 and a modulation end beam splitting / combining waveguide AC7, wherein the steering waveguide AC4 uses a curved waveguide, and the mode filtering waveguide AC5 and the polarizing / polarization waveguide AC6 are both realized by a straight waveguide. The modulation module AD includes a transmission waveguide AD1 and a modulation electrode AD2. Among them, the light-emitting detection end beam splitter / combiner waveguide AC3 and the modulation end beam splitter / combiner waveguide AC7 are implemented based on splitter waveguides, and the forms include but are not limited to Y-branch waveguides, multi-mode interference (MMI) waveguides, adiabatic coupling waveguides, and directional coupling waveguides. The transmission waveguide AD1 is a double straight through waveguide, and the modulation electrode AD2 is a push-pull electrode. The detection module AB is a PIN-FET component or a PIN-TIA component. There are two implementation forms of the straight-through waveguide. The first is a normal mode, which is composed only of a straight-through waveguide and has a transmission function; the second is a polarization mode, which is composed of a specific waveguide and has a polarization / polarization function. The direction of the light-emitting detection end beam splitter / combiner waveguide AC3 is a vertical direction. In terms of chip layout, the output direction of the light-emitting detection end beam splitter / combiner waveguide AC3 close to one end of the light-emitting detection end coupling waveguide AC1 can be in two horizontal directions, namely the CR side and the CL side. Accordingly, the placement and internal arrangement of the light emitting module AA and the detection module AB are changed, and the transimpedance amplifier circuit AB3 in the detection module AB (i.e., the dotted line in the figure) is placed above the multifunctional integrated module AC. Figure 5 and Figure 6 As shown, the modular integrated optical chip A and the optical fiber ring B are connected by direct coupling technology.

[0054] Embodiment 2:

[0055] This embodiment has the same composition structure and functions as the first embodiment, and only the layout is different. Specifically, the modular integrated optical chip includes a light-emitting module AA, a detection module AB, a multifunctional integrated module AC and a modulation module AD. The light-emitting module AA includes an isolator AA1, a coupler AA2 and a light source chip AA3. The detection module AB includes a detection chip AB1, a first coupler AB2 and a transimpedance amplifier circuit AB3. The multifunctional integrated module AC includes a light-emitting detection end coupling waveguide AC1, a modulation end coupling waveguide AC2, a light-emitting detection end beam splitting / combining waveguide AC3, a steering waveguide AC4, a mode filtering waveguide AC5, a polarizing / polarization waveguide AC6 and a modulation end beam splitting / combining waveguide AC7, wherein the steering waveguide AC4 uses a curved waveguide, and the mode filtering waveguide AC5 and the polarizing / polarization waveguide AC6 are both realized by a straight waveguide. The modulation module AD includes a transmission waveguide AD1 and a modulation electrode AD2. The light-emitting detection end beam splitting / combining waveguide AC3 and the modulation end beam splitting / combining waveguide AC7 are implemented based on splitting waveguides, and the forms include but are not limited to Y-branch waveguides, multi-mode interference (MMI) waveguides, adiabatic coupling waveguides, and directional coupling waveguides. The transmission waveguide AD1 is a double straight-through waveguide, and the modulation electrode AD2 is a push-pull electrode. The detection module AB is a PIN-FET component or a PIN-TIA component.

[0056] The layout of the beam splitting / combining waveguide AC3 at the light emitting detection end and the beam splitting / combining waveguide AC7 at the modulation end are different from those of AC3 and AC7 in Example 1. The splitting waveguide appears in the horizontal direction, and the bending waveguide appears between the two splitting waveguides. There are two implementation forms of the straight waveguide. The first is the normal mode, which is composed of only the straight waveguide and has a transmission function; the second is the polarization mode, which is composed of a specific waveguide and has a polarization / polarization function. The output direction of the beam splitting / combining waveguide AC3 near one end of the coupling waveguide AC1 at the light emitting detection end can be in two horizontal directions, namely the CR side and the CL side. Accordingly, the placement position and internal arrangement of the light emitting module AA and the detection module AB are changed. The transimpedance amplifier circuit AB3 in the detection module AB (i.e., the rectangular dotted line in the figure) is placed above the multi-functional integrated module AC. The gyroscope optical path based on the modular integrated optical chip is as follows: Figure 7 and Figure 8 As shown, the modular integrated optical chip A and the optical fiber ring B are connected by direct coupling technology.

[0057] Embodiment three:

[0058] On the basis of Example 1 and Example 2, in order to further improve the performance of integrated optical devices, the multifunctional integrated module AC is optimized and upgraded. According to one embodiment of the present invention, the modular integrated optical chip includes a light-emitting module AA, a detection module AB, a multifunctional integrated module AC and a modulation module AD. The light-emitting module AA includes an isolator AA1, a first coupler AA2 and a light source chip AA3. The detection module AB includes a detection chip AB1, a second coupler AB2 and a transimpedance amplifier circuit AB3. The multifunctional integrated module AC includes a light-emitting detection end coupling waveguide AC1, a modulation end coupling waveguide AC2, a light-emitting detection end beam splitting / combining waveguide AC3, a steering waveguide AC4, a mode filtering waveguide AC5, a polarization / polarization waveguide AC6 and a modulation end beam splitting / combining waveguide AC7, wherein the steering waveguide AC4 uses a curved waveguide. The modulation module AD includes a transmission waveguide AD1 and a modulation electrode AD2.

[0059] Among them, the light-emitting detection end beam splitting / combining waveguide AC3 and the modulation end beam splitting / combining waveguide AC7 are implemented based on splitting waveguides, and the forms include but are not limited to Y-branch waveguides, multi-mode interference (MMI) waveguides, adiabatic coupling waveguides, and directional coupling waveguides. The transmission waveguide AD1 is a double straight through waveguide. In this embodiment, the light-emitting detection end beam splitting / combining waveguide AC3 is implemented by a vertical beam splitting waveguide, the transmission waveguide AD1 is a double straight through waveguide, and the modulation electrode AD2 is a push-pull electrode. The detection module AB is a PIN-FET component or a PIN-TIA component.

[0060] The mode filtering waveguide AC5 is implemented by an S-bend waveguide, which can realize the attenuation function of a specific mode. The polarizing / polarizing waveguide AC6 can be implemented by the above-mentioned S-bend waveguide, or by an S-bend with different parameters or other waveguides with polarizing / polarization functions, that is, AC5 / AC6 can be implemented by the same form of waveguide, or by waveguides of different forms. The output direction of the light-emitting detection end beam splitting / combining waveguide AC3 near one end of the light-emitting detection end coupling waveguide AC1 can be in two horizontal directions, namely the CR side and the CL side. Accordingly, the placement position and internal arrangement of the light-emitting module AA and the detection module AB are changed, and the transimpedance amplifier circuit AB3 in the detection module AB (i.e., the rectangular dotted line in the figure) is placed above the multifunctional integrated module AC, and the gyro optical path based on the modular integrated optical chip is as follows: Fig. 9 and Fig.10 As shown, the modular integrated optical chip A and the optical fiber ring B are connected by direct coupling technology.

[0061] It should be noted that the number and specific parameters of the S-bends cannot be used as criteria for differences with the present invention. The specific implementation form of the polarization / polarization waveguide cannot be used as a criterion for differences with the present invention.

[0062] Embodiment 4:

[0063] This embodiment has the same structure and function as the third embodiment, and only the layout is different.

[0064] According to one embodiment of the present invention, a modular integrated optical chip includes a light emitting module AA, a detection module AB, a multifunctional integrated module AC and a modulation module AD. The light emitting module AA includes an isolator AA1, a first coupler AA2 and a light source chip AA3. The detection module AB includes a detection chip AB1, a second coupler AB2 and a transimpedance amplifier circuit AB3. The multifunctional integrated module AC includes a light emitting detection end coupling waveguide AC1, a modulation end coupling waveguide AC2, a light emitting detection end beam splitting / combining waveguide AC3, a steering waveguide AC4, a mode filtering waveguide AC5, a polarization / polarization waveguide AC6 and a modulation end beam splitting / combining waveguide AC7, wherein the steering waveguide AC4 uses a curved waveguide. The modulation module AD includes a transmission waveguide AD1 and a modulation electrode AD2.

[0065] The light-emitting detection end beam splitting / combining waveguide AC3 and the modulation end beam splitting / combining waveguide AC7 are implemented based on splitting waveguides, and the forms include but are not limited to Y-branch waveguides, multi-mode interference (MMI) waveguides, adiabatic coupling waveguides, and directional coupling waveguides. The transmission waveguide AD1 is a double straight-through waveguide, and the modulation electrode AD2 is a push-pull electrode. The detection module AB is a PIN-FET component or a PIN-TIA component.

[0066] The mode filtering waveguide AC5 is implemented by an S-bend waveguide, which can realize the attenuation function of a specific mode. The polarizing / polarizing waveguide AC6 can be implemented by the above-mentioned S-bend waveguide, or by an S-bend with different parameters or other waveguides with polarizing / polarization functions, that is, AC5 / AC6 can be implemented by the same form of waveguide, or by waveguides of different forms. The layout of the light-emitting detection end splitting / combining waveguide AC3 is different from that of AC3 in Example 3, and the splitting waveguide appears in the horizontal direction. The output direction of the light-emitting detection end splitting / combining waveguide AC3 near one end of the light-emitting detection end coupling waveguide AC1 can be in two horizontal directions, namely the CR side and the CL side. Accordingly, the placement position and internal arrangement of the light-emitting module AA and the detection module AB are changed, and the transimpedance amplifier circuit AB3 in the detection module AB (i.e., the rectangular dotted line in the figure) is placed above the multi-functional integrated module AC, and the gyro optical path based on the modular integrated optical chip is as follows. Fig.11 and Fig.12 As shown, the modular integrated optical chip A and the optical fiber ring B are connected by direct coupling technology.

[0067] It should be noted that the number and specific parameters of the S-bends cannot be used as criteria for differences with the present invention. The specific implementation form of the polarization / polarization waveguide cannot be used as a criterion for differences with the present invention.

[0068] Embodiment five:

[0069] On the basis of Example 1 and Example 2, in order to further improve the performance of the integrated optical device, the multifunctional integrated module AC is optimized and upgraded. According to one embodiment of the present invention, the modular integrated optical device includes a light-emitting module AA, a detection module AB, a multifunctional integrated module AC and a modulation module AD. The light-emitting module AA includes an isolator AA1, a first coupler AA2 and a light source chip AA3. The detection module AB includes a detection chip AB1, a second coupler AB2 and a transimpedance amplifier circuit AB3. The multifunctional integrated module AC includes a light-emitting detection end coupling waveguide AC1, a modulation end coupling waveguide AC2, a light-emitting detection end beam splitting / combining waveguide AC3, a steering waveguide AC4, a mode filtering waveguide AC5, a polarization / polarization waveguide AC6 and a modulation end beam splitting / combining waveguide AC7, wherein the steering waveguide AC4 uses a curved waveguide. The modulation module AD includes a transmission waveguide AD1 and a modulation electrode AD2.

[0070] The light-emitting detection end beam splitting / combining waveguide AC3 and the modulation end beam splitting / combining waveguide AC7 are implemented based on splitting waveguides, and the forms include but are not limited to Y-branch waveguides, multi-mode interference (MMI) waveguides, adiabatic coupling waveguides, and directional coupling waveguides. The transmission waveguide AD1 is a double straight-through waveguide, and the modulation electrode AD2 is a push-pull electrode. The detection module AB is a PIN-FET component or a PIN-TIA component.

[0071] The mode filtering waveguide AC5 is implemented by a spiral curve waveguide, which can realize the attenuation function of a specific mode. The polarization / polarization waveguide AC6 can be implemented by an S-bend with different parameters or other waveguides with polarization / polarization functions. In this embodiment, AC6 can be increased or decreased according to actual needs. The output direction of the light-emitting detection end beam splitting / combining waveguide AC3 near one end of the light-emitting detection end coupling waveguide AC1 can be in two horizontal directions, namely the CR side and the CL side. Accordingly, the placement position and internal arrangement of the light-emitting module AA and the detection module AB are changed, and the transimpedance amplifier circuit AB3 in the detection module AB (i.e., the rectangular dotted line in the figure) is placed above the multifunctional integrated module AC, and the gyro optical path based on the modular integrated optical chip is in the form of a Fig.13 and Fig.14 As shown, the modular integrated optical chip A and the optical fiber ring B are connected by direct coupling technology.

[0072] It should be noted that the number of turns and length of the spiral curve cannot be used as a criterion for review of differences with the present application. The specific implementation form of the polarization / polarization waveguide cannot be used as a criterion for review of differences with the present application.

[0073] Embodiment six:

[0074] This embodiment has the same structure and function as the fifth embodiment, and only the layout is different. According to one embodiment of the present invention, the modular integrated optical chip includes a light-emitting module AA, a detection module AB, a multifunctional integrated module AC and a modulation module AD. The light-emitting module AA includes an isolator AA1, a first coupler AA2 and a light source chip AA3. The detection module AB includes a detection chip AB1, a second coupler AB2 and a transimpedance amplifier circuit AB3. The multifunctional integrated module AC includes a light-emitting detection end coupling waveguide AC1, a modulation end coupling waveguide AC2, a light-emitting detection end splitting / combining waveguide AC3, a steering waveguide AC4, a mode filtering waveguide AC5, a polarization / polarization waveguide AC6 and a modulation end splitting / combining waveguide AC7, wherein the steering waveguide AC4 uses a curved waveguide. The modulation module AD includes a transmission waveguide AD1 and a modulation electrode AD2.

[0075] The light-emitting detection end beam splitting / combining waveguide AC3 and the modulation end beam splitting / combining waveguide AC7 are implemented based on splitting waveguides, and the forms include but are not limited to Y-branch waveguides, multi-mode interference (MMI) waveguides, adiabatic coupling waveguides, and directional coupling waveguides. The transmission waveguide AD1 is a double straight-through waveguide, and the modulation electrode AD2 is a push-pull electrode. The detection module AB is a PIN-FET component or a PIN-TIA component.

[0076] The mode filtering waveguide AC5 is implemented by a spiral curve waveguide, which can realize the attenuation function of a specific mode. The polarization / polarization waveguide AC6 can be implemented by an S-bend with different parameters or other waveguides with polarization / polarization functions. In this embodiment, AC6 can be increased or decreased according to actual needs. The layout of the light-emitting detection end splitting / combining waveguide AC3 is different from that of AC3 in Example 5. The splitting waveguide appears in the horizontal direction, and the bending waveguide appears between the two splitting waveguides. The output direction of the light-emitting detection end splitting / combining waveguide AC3 near one end of the light-emitting detection end coupling waveguide AC1 can be in two horizontal directions, namely the CR side and the CL side. Accordingly, the placement position and internal arrangement of the light-emitting module AA and the detection module AB change, and the transimpedance amplifier circuit AB3 in the detection module AB (i.e., the rectangular dotted line in the figure) is placed above the multi-functional integrated module AC. The gyroscope optical path based on the modular integrated optical chip is as shown in FIG. Fig.15 and Fig.16 As shown, the modular integrated optical chip A and the optical fiber ring B are connected by direct coupling technology.

[0077] It should be noted that the number of turns and length of the spiral curve cannot be used as a criterion for review of differences with the present application. The specific implementation form of the polarization / polarization waveguide cannot be used as a criterion for review of differences with the present application.

[0078] According to another aspect of the present invention, an inertial navigation system is also provided, and the inertial navigation system includes the modular integrated optical device proposed in the present invention. Since the modular integrated optical device proposed in the present invention can greatly reduce the volume of the optical path while realizing the functions required by the single-axis fiber optic gyroscope, the overall assembly is simple, the consistency is good, the cost is low, the layout is flexible, and it is suitable for mass production, so applying it to the inertial navigation system can meet the development needs of miniaturization and low cost of the inertial navigation system.

[0079] In summary, the present invention provides a modular integrated optical device and an inertial navigation system. The modular integrated optical device is provided with four module chips, namely, a light emitting module, a detection module, a mode control module and a phase modulation module, and the internal optical devices of the four modules are reasonably designed and laid out, and the optical devices other than the optical fiber ring are integrated on one chip, so that the entire optical device is composed of only two devices, namely, the modular integrated optical chip and the optical fiber ring, which can greatly reduce the volume of the device under the premise of realizing the functions required by the single-axis fiber optic gyroscope, and the overall assembly is simple and consistent. At the same time, there is no need for optical fiber connection between the modules on the chip, and the fiber-free structure can be realized, which further simplifies the structure, reduces the volume, and improves the reliability. In addition, the four modules on the chip are realized based on the photolithography process, and the modules and the internal implementation forms of the modules can be flexibly designed and laid out according to the requirements of the gyroscope and the modules, and have the advantages of good consistency, low cost, flexible layout, and suitability for mass production. Compared with the prior art, the technical solution of the present invention can solve the technical problems in the prior art that the optical path of the fiber optic gyroscope is a discrete device, the volume is too large, and the miniaturization of the inertial navigation system cannot be met.

[0080] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the devices or elements referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention. The directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0081] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0082] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.

[0083] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A modular integrated optical device, characterized in that: The modular integrated optical device comprises a modular integrated optical chip A and an optical fiber ring B. The modular integrated optical chip A comprises a light emitting module AA, a detection module AB, a multifunctional integrated module AC and a modulation module AD. The light emitting module AA, the detection module AB and the modulation module AD are all connected to the multifunctional integrated module AC by direct coupling. The modulation module AD is connected to the optical fiber ring B by an output pigtail. The light emitting module AA includes an isolator AA1, a first coupler AA2 and a light source chip AA3, the detection module AB includes a detection chip AB1, a second coupler AB2 and a transimpedance amplifier circuit AB3, the multifunctional integrated module AC includes a light emitting detection end coupling waveguide AC1, a modulation end coupling waveguide AC2, a light emitting detection end beam splitting / combining waveguide AC3, a steering waveguide AC4, a mode filtering waveguide AC5, a polarizing / polarization waveguide AC6 and a modulation end beam splitting / combining waveguide AC7, the modulation module AD includes a transmission waveguide AD1 and a modulation electrode AD2, the transmission waveguide AD1 is a double straight-through waveguide, and the optical fiber ring B includes an optical fiber ring body B1, a ring input end B2 and a ring output end B3; The light beam emitted by the light source chip AA3 is beam shaped by the first coupler AA2, and the isolator AA1 prevents the shaped light beam from propagating in the reverse direction. The reverse propagating light beam is received by the light emitting detection end coupling waveguide AC1 and is combined and steered by the steering waveguide AC4 and the light emitting detection end beam splitting / combining waveguide AC3. Then, it passes through the mode filtering waveguide AC5 and the polarizing / polarization waveguide AC6 and is split by the modulation end beam splitting / combining waveguide AC7. Then, it is output to the transmission waveguide AD1 through the steering waveguide AC4 and the modulation end coupling waveguide AC2. During the transmission process, the split light beam receives the phase modulation information of the modulation electrode AD2 and is input through the loop. The optical beam returns from the optical fiber ring body B1 through the ring output end B3, passes through the modulation electrode AD2 and the transmission waveguide AD1 in sequence, enters the multifunctional integrated module AC, passes through the modulation end coupling waveguide AC2, the steering waveguide AC4, the modulation end beam splitting / combining waveguide AC7, the mode filtering waveguide AC5, the polarization / polarization waveguide AC6 and the light emitting detection end beam splitting / combining waveguide AC3, and then enters the detection module AB, and is further received by the detection chip AB1 through the second coupler AB2 to form a photocurrent signal, and the photocurrent signal is converted into a voltage signal by the transimpedance amplifier circuit AB3, and then the gyro signal is demodulated.

2. The modular integrated optical device according to claim 1, characterized in that: The light emitting detection end beam splitting / combining waveguide AC3 and the modulation end beam splitting / combining waveguide AC7 are both selected from one of a Y-branch waveguide, a multimode interference waveguide, an adiabatic coupling waveguide and a directional coupling waveguide.

3. The modular integrated optical device according to claim 2, characterized in that: The mode filtering waveguide AC5 is selected from one of a straight waveguide, an S-bend waveguide and a spiral waveguide.

4. The modular integrated optical device according to claim 2, characterized in that: The polarizing / deflecting waveguide AC6 is a straight waveguide or an S-bend waveguide.

5. The modular integrated optical device according to claim 4, characterized in that: The substrate of the multifunctional integrated module AC is selected from Si, LNOI, Si x N y and SiO2, and the substrate of the modulation module AD is selected from LNOI or LN.

6. The modular integrated optical device according to claim 5, characterized in that: The light source chip AA3 adopts a superluminescent diode, and its central wavelength is 850nm, 1310nm or 1550nm.

7. The modular integrated optical device according to claim 6, characterized in that: The detection chip AB1 and the transimpedance amplifier circuit AB3 both adopt PIN-FET components or PIN-TIA components.

8. The modular integrated optical device according to claim 6, characterized in that: The integrated optical device also includes a packaging structure, which includes a device substrate E1, a semiconductor bidirectional cooler E2, a heat sink E3, a transition heat sink E4, a height pad E5 and a thermistor E6. The semiconductor bidirectional cooler E2, the heat sink E3, the transition heat sink E4 and the thermistor E6 are stacked in sequence on one side of the device substrate E1, the height pad E5 is arranged on the other side of the device substrate E1, the light-emitting module AA is arranged on the transition heat sink E4, the detection module AB, the multifunctional integrated module AC and the modulation module AD are arranged on the height pad E5 to maintain a height consistent with the light-emitting module AA, and the thermistor E6 is respectively connected to the semiconductor bidirectional cooler E2 and the light source chip AA3 for current closed-loop feedback.

9. The modular integrated optical device according to claim 8, characterized in that: The light source chip AA3 and the thermistor E6 are welded together with the transition heat sink E4 by adding solder, and the detection chip AB1 is welded together with the height pad E5 by adding solder. The transition heat sink E4 and the height pad E5 are both provided with a fixing seat, and the second coupler AB2, the transimpedance amplifier circuit AB3, the isolator AA1 and the first coupler AA2 are all fixed on the fixing seat by glue dispensing.

10. The modular integrated optical device according to claim 9, characterized in that: The output pigtail of the integrated optical device is output through a nozzle to prevent the output pigtail from breaking, and the optical fiber ring is formed by winding a polarization-maintaining optical fiber.

11. An inertial navigation system, characterized in that: The inertial navigation system comprises the modular integrated optical device according to any one of claims 1 to 10.

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