A portable combined spectrum detection system

Abstract

The present invention discloses a portable joint spectral detection system, including: an excitation light module, a probe module, a signal transmission module and a signal processing and control module; wherein the excitation light module is used to generate and adjust the excitation light, and couple the generated excitation light into the probe module; the probe module is used to irradiate the excitation light onto the sample to be tested, and collect the optical signals of Raman scattering and laser-induced breakdown plasma from the sample to be tested, and transmit the collected signals to the signal transmission module; the signal transmission module is used to transmit the signals collected by the probe module to the signal processing and control module; the signal processing and control module is used to realize spectral detection according to the signals collected by the probe module. The system can be transported in a portable manner and can be quickly installed and used at the experimental site through modular design, and can simultaneously measure Raman spectroscopy and laser-induced breakdown spectroscopy. It can be applied in scenes such as geological exploration and archaeological analysis, and can provide strong technical support for related scientific research.

Description

Technical Field

[0001] The present invention relates to the technical field of spectrum detection, and in particular to a portable combined spectrum detection system. Background Art

[0002] Nowadays, laser-induced breakdown spectroscopy (LIBS) is a widely accepted technique in analytical chemistry and is often considered as an important next-generation multi-element analysis method due to its fast response and long-range detection capabilities.

[0003] Laser-induced plasmas contain electron-excited atoms, ions, and molecules in the sample. These excited particles emit radiation related to the sample material composition through their unique spectral signatures. The luminescence of the plasma can be detected and analyzed at a specific delay time after its formation. Laser-induced breakdown spectroscopy (LIBS) enables rapid acquisition of qualitative and quantitative multi-element information from any physical phase without the need for complex sample preparation as in methods such as atomic absorption spectroscopy (AAS), inductively coupled plasma atomic emission spectroscopy (ICP-AES), X-ray fluorescence spectroscopy (XRF), and X-ray diffraction (XRD). LIBS technology has evolved significantly over the years and, in addition to being a tool for elemental identification, has become a complementary tool for other applications by combining it with other sensitive analytical techniques such as Raman spectroscopy.

[0004] Raman spectroscopy provides information about the molecular composition of a sample in a non-invasive manner. It is based on inelastic scattering of monochromatic light and obtains information by detecting the frequency shift caused by the energy exchange between the incident light and the analyte molecules. Raman spectroscopy provides information about the composition of the sample through external (lattice) and internal (molecular) vibration bands, the number of bands in the spectrum, and the relative intensity of the bands. Therefore, the combination of LIBS and Raman techniques can provide more detailed information about the sample, including elemental and molecular composition. Together, the two techniques provide complementary information about the sample and help reveal the complexity of its inherent properties.

[0005] In short, LIBS has better sensitivity for detecting metallic elements than non-metallic elements. This deficiency can be overcome by adding the characteristics of Raman technology, which can identify anionic species from crystals and determine the crystal phase from Raman-active internal / lattice patterns.

[0006] Although both technologies can be realized by monochromatic laser excitation and collecting spectral signals, their application in field detection such as geological survey and archaeology is theoretically very simple, but the demand for in-situ and remote analysis on site, and the requirements for the portability and compactness of the overall system have prompted the need to integrate these two technologies into one instrument. However, due to differences in basic requirements such as spectral range, resolution, power density, light collection efficiency, response time, etc., there are conflicting requirements in designing a single instrument. Therefore, there is still a lack of portable spectral measurement equipment that can simultaneously collect Raman spectroscopy and LIBS. Summary of the invention

[0007] The present invention provides a portable combined spectrum detection system to solve the technical problem that there is still a lack of portable spectrum measurement equipment that can simultaneously realize the synchronous acquisition of Raman spectrum and LIBS.

[0008] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0009] A portable combined spectrum detection system includes: an excitation light module, a probe module, a signal transmission module, and a signal processing and control module; wherein:

[0010] The excitation light module is used to generate and adjust the excitation light, and couple the generated excitation light into the probe module;

[0011] The probe module is used to irradiate the excitation light onto the sample to be tested, collect the Raman scattering and laser-induced breakdown plasma optical signals from the sample to be tested, and transmit the collected signals to the signal transmission module;

[0012] The signal transmission module is used to transmit the signal collected by the probe module to the signal processing and control module;

[0013] The signal processing and control module is used to realize spectrum detection according to the signal collected by the probe module.

[0014] Furthermore, the excitation light module includes: a laser, a laser beam splitter, a laser pulse stretcher, a laser pulse delayer and a Y-shaped transmission optical fiber; wherein,

[0015] The laser is used to generate laser light;

[0016] The two input ends of the Y-shaped transmission optical fiber are respectively connected to the output end of the laser pulse stretcher and the output end of the laser pulse delayer, and the output end of the Y-shaped transmission optical fiber is connected to the probe module;

[0017] The laser generated by the laser is divided into a first laser and a second laser with equal energy by the laser beam splitter. The first laser enters one input end of the Y-shaped transmission optical fiber after the pulse width is changed to 50ns after passing through the laser pulse stretcher; the second laser enters the other input end of the Y-shaped transmission optical fiber after a 60ns transmission delay is generated by the laser pulse delay device; the first laser and the second laser are merged into the excitation light through the Y-shaped transmission optical fiber, and enter the probe module through the output end of the Y-shaped transmission optical fiber.

[0018] Furthermore, the laser is a Nd:YAG pulse laser with an output laser wavelength of 532nm, a pulse width of 8ns, and a single pulse energy of 50mJ;

[0019] The laser pulse stretcher uses a Pockels cell to control the laser input, so that the laser oscillates in the resonant cavity and is emitted through a 2.5% transmittance lens at the other end, and the output light pulse width is stretched to 50ns;

[0020] The laser pulse delay device causes the incident light to generate a 60ns delay by providing an 18m optical path.

[0021] Furthermore, the probe module includes: an incident collimator, a first dichroic mirror, a second dichroic mirror, a focusing lens, a first exit collimator and a second exit collimator; wherein,

[0022] The incident collimator is connected to the output end of the Y-shaped transmission optical fiber;

[0023] The first output collimator and the second output collimator are both connected to the signal transmission module;

[0024] The excitation light is converted into a collimated light beam by the incident collimator, the collimated excitation light is reflected by the second dichroic mirror, and is focused on the sample by the focusing lens after being transmitted by the first dichroic mirror;

[0025] The sample is irradiated by the focused excitation light to generate Raman scattered light and a laser-induced breakdown plasma luminescence signal. The signal generated by the sample is collected by the focusing lens to become a collimated signal light. When the collimated signal light reaches the first dichroic mirror, the signal light with a wavelength less than 520nm is reflected by the first dichroic mirror and then enters the signal transmission module through the first output collimator. The signal light with a wavelength greater than 520nm is transmitted through the first dichroic mirror and then reaches the second dichroic mirror. The signal light with a wavelength greater than 540nm is transmitted through the second dichroic mirror and then enters the signal transmission module through the second output collimator. The signal light with a wavelength less than 540nm is reflected by the second dichroic mirror and then discarded.

[0026] Further, the first dichroic mirror is a 520nm high-wavelength-pass dichroic mirror;

[0027] The second dichroic mirror is a 540nm high-wavelength dichroic mirror;

[0028] The focusing lens can adjust the focal length according to the distance between the probe module and the sample to be measured.

[0029] Furthermore, the signal transmission module is a fiber bundle composed of a total of 8 optical fibers, which has four ports, namely: a first optical fiber input end, a second optical fiber input end, a first optical fiber output end, and a second optical fiber output end; wherein,

[0030] The first optical fiber input end is connected to the first output collimator;

[0031] The second optical fiber input end is connected to the second output collimator;

[0032] The first optical fiber output end and the second optical fiber output end are both connected to the signal processing and control module;

[0033] The first optical fiber input end comprises a first optical fiber;

[0034] The second optical fiber input end includes a second optical fiber, a third optical fiber, a fourth optical fiber, a fifth optical fiber, a sixth optical fiber, a seventh optical fiber and an eighth optical fiber;

[0035] The first optical fiber output end includes a first optical fiber and a second optical fiber;

[0036] The second optical fiber output end includes a third optical fiber, a fourth optical fiber, a fifth optical fiber, a sixth optical fiber, a seventh optical fiber and an eighth optical fiber.

[0037] Further, in the second optical fiber input end, the second optical fiber is located at the center, and the third optical fiber, the fourth optical fiber, the fifth optical fiber, the sixth optical fiber, the seventh optical fiber and the eighth optical fiber are closely arranged in a circle around the second optical fiber;

[0038] In the second optical fiber output end, the third optical fiber, the fourth optical fiber, the fifth optical fiber, the sixth optical fiber, the seventh optical fiber and the eighth optical fiber are closely arranged along a straight line.

[0039] Further, the first output collimator couples signal light less than 520nm into the first optical fiber through the first optical fiber input end; the second output collimator couples signal light greater than 540nm into the second optical fiber, the third optical fiber, the fourth optical fiber, the fifth optical fiber, the sixth optical fiber, the seventh optical fiber and the eighth optical fiber through the second optical fiber input end; the first optical fiber and the second optical fiber output signal light greater than 540nm and signal light less than 520nm to the signal processing and control module through the first optical fiber output end; the third optical fiber, the fourth optical fiber, the fifth optical fiber, the sixth optical fiber, the seventh optical fiber and the eighth optical fiber output signal light greater than 540nm to the signal processing and control module through the second optical fiber output end.

[0040] Furthermore, the signal processing and control module includes: a Raman spectrometer, a LIBS spectrometer, a timing controller and a computer; wherein,

[0041] The incident end of the LIBS spectrometer is connected to the output end of the first optical fiber, and the signal light emitted from the output end of the first optical fiber enters the LIBS spectrometer to collect LIBS data;

[0042] The incident end of the Raman spectrometer is connected to the output end of the second optical fiber, and the signal light emitted from the output end of the second optical fiber enters the Raman spectrometer to collect Raman scattering spectrum data;

[0043] The detection start time of the Raman spectrometer is aligned with the leading edge of the signal light through the timing controller, and the shutter time is 50ns; the detection start time of the LIBS spectrometer is 150ns after the detection start time of the Raman spectrometer, and the shutter time is 500ns;

[0044] The start and end of the measurement are controlled by the computer.

[0045] Furthermore, the Raman spectrometer is a fixed grating spectrometer, the spectrum detection range is 540nm to 590nm, and the detector adopts an enhanced charge coupled device ICCD with a time shutter;

[0046] The LIBS spectrometer is a rotatable grating spectrometer, the spectrum detection range is from 200nm to 900nm, and the detector adopts an ICCD with a time shutter.

[0047] The beneficial effects brought about by the technical solution provided by the present invention include at least:

[0048] The present invention provides a new design scheme combining Raman spectroscopy with laser induced breakdown spectroscopy measurement systems, and designs a portable joint spectral detection system. The system is modularly designed, and the joint measurement system of the two spectra is lightweight by optimizing the transmission of excitation light and signal light, thereby realizing the portable function of being easy to transport and can be quickly installed and used on site. Using this portable joint spectral detection system, Raman spectroscopy and laser induced breakdown spectroscopy can be measured simultaneously. The combination of the two technologies can provide more detailed information about the sample, including elemental and molecular composition. The two technologies together provide complementary information about the sample and help to reveal the complexity of its inherent properties. In particular, it can be used in fields such as geological exploration and archaeological analysis, which can provide strong support for related scientific research. Thereby providing an efficient, convenient and accurate solution for related on-site component detection work. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0050] Figure 1 is a schematic structural diagram of a portable joint spectral detection system provided by an embodiment of the present invention;

[0051] Figure 2 is a schematic structural diagram of an excitation light module provided in an embodiment of the present invention;

[0052] Figure 3 is a schematic diagram of the structure of a probe module provided by an embodiment of the present invention;

[0053] Figure 4a is a schematic diagram of the structure of a signal transmission module and a signal processing and control module provided in an embodiment of the present invention;

[0054] Figure 4b is a schematic cross-sectional view of a first optical fiber input end provided by an embodiment of the present invention;

[0055] Figure 4c is a schematic cross-sectional view of a second optical fiber input end provided by an embodiment of the present invention;

[0056] Figure 4d is a schematic cross-sectional view of a first optical fiber output end provided by an embodiment of the present invention;

[0057] Figure 4e is a schematic cross-sectional view of a second optical fiber output end provided by an embodiment of the present invention;

[0058] Figure 5 It is the Raman spectrum of SiO2-SiC obtained by using the portable combined spectrum detection system of the present invention;

[0059] Figure 6 The present invention discloses a laser induced breakdown spectrum of SiO2-SiC obtained by using the portable combined spectrum detection system of the present invention.

[0060] Description of reference numerals:

[0061] 1. Excitation light module; 2. Probe module; 3. Signal transmission module;

[0062] 4. Signal processing and control module; 5. Laser; 6. Laser beam splitter;

[0063] 7. Laser pulse stretcher; 8. Laser pulse delayer; 9. Y-shaped transmission optical fiber;

[0064] 10. Incident collimator; 11. First dichroic mirror; 12. Second dichroic mirror; 13. Focusing lens;

[0065] 14. sample; 15. first output collimator; 16. second output collimator;

[0066] 17. First optical fiber input end; 18. Second optical fiber input end; 19. First optical fiber output end;

[0067] 20. Second optical fiber output end; 21. LIBS spectrometer; 22. Raman spectrometer;

[0068] 23. Timing controller; 24. Computer. DETAILED DESCRIPTION

[0069] In order to make the objectives, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0070] This embodiment provides a portable combined spectrum detection system, such as Figure 1 As shown, the system includes: an excitation light module 1, a probe module 2, a signal transmission module 3 and a signal processing and control module 4. The excitation light module 1 is used to generate and adjust the excitation light, and couple the generated excitation light into the probe module 2; the probe module 2 is used to irradiate the excitation light onto the sample to be tested, and collect the Raman scattering and laser-induced breakdown plasma optical signals from the sample to be tested, and then transmit the collected signals to the signal transmission module 3; the signal transmission module 3 is used to transmit the signal collected by the probe module 2 to the signal processing and control module 4; the signal processing and control module 4 is used to realize spectral detection according to the signal collected by the probe module 2.

[0071] Specifically, the excitation light module 1 is as follows Figure 2 As shown, it includes: a laser 5, a laser beam splitter 6, a laser pulse stretcher 7, a laser pulse delay 8 and a Y-shaped transmission optical fiber 9; wherein, the laser 5 is used to emit laser, which is a Nd:YAG pulse laser, the emitted laser wavelength is 532nm, the pulse width is 8ns, and the single pulse energy is preferably 50mJ; the laser beam splitter 6 divides the emitted laser into two laser beams with an energy ratio of 1:1; the laser pulse stretcher 7 controls the laser incident with a Pockels cell, so that the laser oscillates in the resonant cavity and is emitted through a 2.5% transmittance lens at the other end, and the pulse width of the emitted light is widened to 50ns; the laser pulse delay 8 causes the incident light to generate a 60ns delay by providing an 18m optical path; the two input ends of the Y-shaped transmission optical fiber 9 are respectively connected to the output end of the laser pulse stretcher 7 and the output end of the laser pulse delay 8, and the output end of the Y-shaped transmission optical fiber 9 is connected to the probe module 2.

[0072] The working process of the excitation light module 1 is as follows: the laser light generated by the laser 5 is divided into a first laser light and a second laser light of equal energy by the laser beam splitter 6. The pulse width of the first laser light changes to 50ns after passing through the laser pulse stretcher 7 and enters the Y-shaped transmission optical fiber 9; the second laser light passes through the laser pulse delay 8 and generates a 60ns transmission delay and enters the Y-shaped transmission optical fiber 9. The first laser light and the second laser light merge into the excitation light through the Y-shaped transmission optical fiber 9 and enter the probe module 2 through the output end of the Y-shaped transmission optical fiber.

[0073] The probe module is as follows Figure 3 As shown, it includes: an incident collimator 10, a first dichroic mirror 11, a second dichroic mirror 12, a focusing lens 13, a first exit collimator 15 and a second exit collimator 16; wherein the incident collimator 10 is connected to the output end of the Y-shaped transmission optical fiber 9 of the excitation light module 1; the first dichroic mirror 11 is a 520nm high-wavelength pass dichroic mirror; the second dichroic mirror 12 is a 540nm high-wavelength pass dichroic mirror; the focusing lens 13 can adjust the focal length according to the distance between the probe module and the sample to be measured; the first exit collimator 15 and the second exit collimator 16 are both connected to the signal transmission module 3.

[0074] The working process of the probe module 2 is as follows: the excitation light is converted into a collimated light beam through the incident collimator 10, the collimated excitation light is reflected by the second dichroic mirror 12, transmitted through the first dichroic mirror 11 and focused on the sample 14 through the focusing lens 13, the sample 14 is irradiated by the focused excitation light to generate Raman scattered light and laser-induced breakdown plasma luminescence signal, the generated signal is collected by the focusing lens 13 and becomes collimated signal light, when the collimated signal light reaches the first dichroic mirror 11, the signal light with a wavelength less than 520nm is reflected by the first dichroic mirror 11 and then enters the signal transmission module 3 through the first output collimator 15, the signal light with a wavelength greater than 520nm is transmitted through the first dichroic mirror 11 and then reaches the second dichroic mirror 12, the signal light with a wavelength greater than 540nm is transmitted through the second dichroic mirror 12 and then enters the signal transmission module 3 through the second output collimator 16, and the signal light with a wavelength less than 540nm is reflected by the second dichroic mirror 12 and then discarded.

[0075] The signal transmission module is a fiber bundle composed of a total of 8 optical fibers. Figure 4a As shown, it has four ports, namely: a first optical fiber input end 17, a second optical fiber input end 18, a first optical fiber output end 19 and a second optical fiber output end 20; the first optical fiber input end 17 is connected to the first output collimator 15 of the probe module; the second optical fiber input end 18 is connected to the second output collimator 16 of the probe module; the first optical fiber output end 19 and the second optical fiber output end 20 are connected to the signal processing and control module 4.

[0076] Furthermore, the first optical fiber input end 17 comprises a first optical fiber, the cross section of which is as follows: Figure 4b As shown; the second optical fiber input end 18 includes the second optical fiber to the eighth optical fiber, wherein, at the second optical fiber input end, the second optical fiber is located at the center, and the third optical fiber to the eighth optical fiber are closely arranged in a circle around the second optical fiber, and its cross section is as shown Figure 4c The first optical fiber output end 19 includes a first optical fiber and a second optical fiber, and its cross section is as shown in Figure 4d The second optical fiber output end 20 includes the third optical fiber to the eighth optical fiber, and the third optical fiber to the eighth optical fiber are closely arranged along a straight line, and the cross section thereof is as shown Figure 4e shown.

[0077] The working process of the signal transmission module 3 is as follows: the first output collimator 15 of the probe module 2 couples the signal light less than 520nm into the first optical fiber through the first optical fiber input end 17; the second output collimator 16 of the probe module 2 couples the signal light greater than 540nm into the second optical fiber to the eighth optical fiber through the second optical fiber input end 18; the first optical fiber and the second optical fiber output the signal light greater than 540nm and the signal light less than 520nm to the signal processing and control module 4 through the first optical fiber output end 19; the third optical fiber to the eighth optical fiber output the signal light greater than 540nm to the signal processing and control module 4 through the second optical fiber output end 20.

[0078] like Figure 4a As shown, the signal processing and control module 4 includes: a Raman spectrometer 22, a LIBS spectrometer 21, a timing controller 23 and a computer 24. Among them, the Raman spectrometer 22 used to collect Raman signals is a fixed grating spectrometer, the spectrum detection range is 540nm to 590nm, the detector uses an enhanced charge coupled device (ICCD) with a time shutter, and the incident end of the Raman spectrometer 22 is connected to the second optical fiber output end 20 of the signal transmission module 3; the LIBS spectrometer 21 used to collect LIBS signals is a rotatable grating spectrometer, the spectrum detection range is from 200nm to 900nm, the detector uses an ICCD with a time shutter, and the incident end of the LIBS spectrometer 21 is connected to the first optical fiber output end 19 of the signal transmission module 3.

[0079] The working process of the signal processing and control module 4 is as follows: the signal light emitted from the first optical fiber output end 19 of the signal transmission module 3 enters the LIBS spectrometer 21, and LIBS data is collected; the signal light emitted from the second optical fiber output end 20 of the signal transmission module 3 enters the Raman spectrometer 22, and Raman scattering spectrum data is collected; the detection start time of the Raman spectrometer 22 is aligned with the leading edge of the signal light through the timing controller 23, and the shutter time is 50ns, and the detection start time of the LIBS spectrometer 21 is 150ns after the detection start time of the Raman spectrometer, and the shutter time is 500ns; the start and end of the measurement are controlled by the computer 24.

[0080] The results of the spectrum detection test on surface oxidized silicon carbide ceramics in the laboratory using the system of the present invention are as follows: Figure 5 and Figure 6 shown. Figure 5 This is the collected Raman spectrum. The accumulation time of spectrum collection is 2 seconds. The Raman peaks of SiO2 and SiC are clearly visible. Figure 6The laser induced breakdown spectra are collected synchronously with the Raman spectra. The collection time of each spectrum is 0.5 seconds. From the obtained series of spectra, the detected components of Si, C, and O can be seen, and the intensity of the characteristic spectral peaks (397, 407nm) of the O element decreases with depth, which successfully verifies the analytical detection capability of the portable combined spectral detection system of the present invention from the surface to the inside.

[0081] In addition, it should be noted that, in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. The terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or terminal device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or terminal device. In the absence of further restrictions, the elements defined by the sentence "comprise one..." do not exclude the existence of other identical elements in the process, method, article or terminal device including the elements.

[0082] Finally, it should be noted that the above is a preferred embodiment of the present invention. It should be pointed out that although the preferred embodiment of the present invention has been described, for those skilled in the art, once the basic creative concept of the present invention is known, several improvements and modifications can be made without departing from the principles of the present invention, and these improvements and modifications should also be regarded as the protection scope of the present invention. Therefore, the attached claims are intended to be interpreted as including the preferred embodiment and all changes and modifications that fall within the scope of the embodiments of the present invention.

Claims

1. A portable joint spectrum detection system, characterized in that: The system includes: an excitation light module, a probe module, a signal transmission module and a signal processing and control module; wherein, The excitation light module is used to generate and adjust the excitation light, and couple the generated excitation light into the probe module; The probe module is used to irradiate the excitation light onto the sample to be tested, collect the Raman scattering and laser-induced breakdown plasma optical signals from the sample to be tested, and transmit the collected signals to the signal transmission module; The signal transmission module is used to transmit the signal collected by the probe module to the signal processing and control module; The signal processing and control module is used to realize spectrum detection according to the signal collected by the probe module; The excitation light module includes: a laser, a laser beam splitter, a laser pulse stretcher, a laser pulse delayer and a Y-shaped transmission optical fiber; wherein, The laser is used to generate laser light; The two input ends of the Y-shaped transmission optical fiber are respectively connected to the output end of the laser pulse stretcher and the output end of the laser pulse delayer, and the output end of the Y-shaped transmission optical fiber is connected to the probe module; The laser light generated by the laser is divided into a first laser light and a second laser light with equal energy through the laser beam splitter. The first laser light enters one input end of the Y-shaped transmission optical fiber after the pulse width of the first laser light passes through the laser pulse stretcher and becomes 50ns; the second laser light enters the other input end of the Y-shaped transmission optical fiber after the second laser light passes through the laser pulse delay device and generates a 60ns transmission delay; the first laser light and the second laser light merge into the excitation light through the Y-shaped transmission optical fiber, and enter the probe module through the output end of the Y-shaped transmission optical fiber; The laser is a Nd:YAG pulse laser with an output laser wavelength of 532nm, a pulse width of 8ns, and a single pulse energy of 50mJ; The laser pulse stretcher uses a Pockels cell to control the laser input, so that the laser oscillates in the resonant cavity and is emitted through a 2.5% transmittance lens at the other end, and the output light pulse width is stretched to 50ns; The laser pulse delay device provides an 18m optical path to cause the incident light to generate a 60ns delay; The probe module includes: an incident collimator, a first dichroic mirror, a second dichroic mirror, a focusing lens, a first exit collimator and a second exit collimator; wherein, The incident collimator is connected to the output end of the Y-shaped transmission optical fiber; The first output collimator and the second output collimator are both connected to the signal transmission module; The excitation light is converted into a collimated light beam by the incident collimator, the collimated excitation light is reflected by the second dichroic mirror, and is focused on the sample by the focusing lens after being transmitted by the first dichroic mirror; The sample is irradiated by the focused excitation light to generate Raman scattered light and laser induced breakdown plasma luminescence signal. The signal generated by the sample is collected by the focusing lens to become collimated signal light. When the collimated signal light reaches the first dichroic mirror, the signal light with a wavelength less than 520nm is reflected by the first dichroic mirror and then enters the signal transmission module through the first output collimator. The signal light with a wavelength greater than 520nm is transmitted through the first dichroic mirror and then reaches the second dichroic mirror. The signal light with a wavelength greater than 540nm is transmitted through the second dichroic mirror and then enters the signal transmission module through the second output collimator. The signal light with a wavelength less than 540nm is reflected by the second dichroic mirror and then discarded. The first dichroic mirror is a 520nm high-wavelength dichroic mirror; The second dichroic mirror is a 540nm high-wavelength dichroic mirror; The focusing lens can adjust the focal length according to the distance between the probe module and the sample to be measured; The signal transmission module is a fiber bundle composed of a total of 8 optical fibers, which has four ports, namely: a first optical fiber input end, a second optical fiber input end, a first optical fiber output end, and a second optical fiber output end; wherein, The first optical fiber input end is connected to the first output collimator; The second optical fiber input end is connected to the second output collimator; The first optical fiber output end and the second optical fiber output end are both connected to the signal processing and control module; The first optical fiber input end comprises a first optical fiber; The second optical fiber input end includes a second optical fiber, a third optical fiber, a fourth optical fiber, a fifth optical fiber, a sixth optical fiber, a seventh optical fiber and an eighth optical fiber; The first optical fiber output end includes a first optical fiber and a second optical fiber; The second optical fiber output end includes a third optical fiber, a fourth optical fiber, a fifth optical fiber, a sixth optical fiber, a seventh optical fiber and an eighth optical fiber; In the second optical fiber input end, the second optical fiber is located at the center, and the third optical fiber, the fourth optical fiber, the fifth optical fiber, the sixth optical fiber, the seventh optical fiber and the eighth optical fiber are closely arranged in a circle around the second optical fiber; At the second optical fiber output end, the third optical fiber, the fourth optical fiber, the fifth optical fiber, the sixth optical fiber, the seventh optical fiber and the eighth optical fiber are closely arranged along a straight line; The first output collimator couples the signal light of less than 520nm into the first optical fiber through the first optical fiber input end; the second output collimator couples the signal light of greater than 540nm into the second optical fiber, the third optical fiber, the fourth optical fiber, the fifth optical fiber, the sixth optical fiber, the seventh optical fiber and the eighth optical fiber through the second optical fiber input end; the first optical fiber and the second optical fiber output the signal light of greater than 540nm and the signal light of less than 520nm to the signal processing and control module through the first optical fiber output end; the third optical fiber, the fourth optical fiber, the fifth optical fiber, the sixth optical fiber, the seventh optical fiber and the eighth optical fiber output the signal light of greater than 540nm to the signal processing and control module through the second optical fiber output end; The signal processing and control module includes: a Raman spectrometer, a LIBS spectrometer, a timing controller and a computer; wherein, The incident end of the LIBS spectrometer is connected to the output end of the first optical fiber, and the signal light emitted from the output end of the first optical fiber enters the LIBS spectrometer to collect LIBS data; The incident end of the Raman spectrometer is connected to the output end of the second optical fiber, and the signal light emitted from the output end of the second optical fiber enters the Raman spectrometer to collect Raman scattering spectrum data; The detection start time of the Raman spectrometer is aligned with the leading edge of the signal light through the timing controller, and the shutter time is 50ns; the detection start time of the LIBS spectrometer is 150ns after the detection start time of the Raman spectrometer, and the shutter time is 500ns; Controlling the start and end of measurement by the computer; The Raman spectrometer is a fixed grating spectrometer, the spectrum detection range is 540nm to 590nm, and the detector adopts an enhanced charge coupled device ICCD with a time shutter; The LIBS spectrometer is a rotatable grating spectrometer, the spectrum detection range is from 200nm to 900nm, and the detector adopts an ICCD with a time shutter.

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