Installation jig for soft membrane clamp

Abstract

An installation jig for a soft film clamp includes a platform, a retaining wall, and a plurality of fasteners. A surface of the platform has a first fastening portion, a second fastening portion, and a third fastening portion opposite the first fastening portion. The first fastening portion, the second fastening portion, and the third fastening portion are respectively provided for a first rod member, a second rod member, and a third rod member of the soft film clamp. The retaining wall is disposed on the surface of the platform and is between the second fastening portion and the third fastening portion. The retaining wall has at least one passage to accommodate at least one elastic element of the soft film clamp. Opposite ends of the at least one elastic element are respectively disposed on the second rod member and the third rod member. The fasteners are disposed on the surface of the platform and are configured to fasten the first rod member and the third rod member on the surface of the platform. The installation jig uses two connecting rods to correspondingly connect two ends of the first rod member and two ends of the third rod member, so that the soft film can be flatly fixed on the clamp with a required tension. Therefore, the soft film can be easily moved and disposed on a processing device.

Description

[0001] This application is a divisional application of the patent application filed on March 24, 2021, with application number 202110313789.6 and invention title "Soft Membrane Clamp and Installation Fixture Thereof". Technical Field

[0002] This disclosure relates to a technique for fixing and separating PVC membranes. More particularly, it relates to a PVC membrane clamp and its mounting fixture. Background Technology

[0003] The flexible film used in the embossing process is held by a frame. Generally, the frame consists of four rods, which are connected to each other to form a rectangular frame. The four sides of the flexible film are fixed to these rods of the frame.

[0004] After the imprinting process is completed, the flexible film needs to be separated from the wafer. During the film release operation, the flexible film can only be separated from the wafer by raising one side of the frame. This release operation causes considerable impact on the pattern structure on the active area of ​​the flexible film. The pattern structure is easily damaged by the tensile forces during the release operation. Summary of the Invention

[0005] Therefore, one object of this disclosure is to provide a flexible film clamping device that uses a first rod and a second rod to clamp two opposite sides of a flexible film. During the film removal operation, the first rod is fixed, and the second rod moves upward or toward the first rod to pull the flexible film, thus allowing the flexible film to be gradually separated from the wafer. Therefore, a variety of removal actions can be used to perform the film removal operation.

[0006] Another object of this disclosure is to provide a PVC membrane clamp that includes a third rod connected to the second rod via at least one elastic element, such that the elastic element can provide PVC membrane tension buffering during membrane removal operation, thereby protecting the PVC membrane from damage.

[0007] Another objective of this disclosure is to provide a mounting fixture for a flexible membrane clamp, which positions the first and third rods of the clamp on a platform to provide the required tension for the flexible membrane. By using a two-bar linkage to connect the two ends of the first and third rods respectively, the flexible membrane can be flatly fixed to the clamp with the required tension. Therefore, the flexible membrane can be easily moved and placed on the processing equipment.

[0008] To achieve the above objectives, this disclosure provides a flexible membrane clamp. This flexible membrane clamp includes a first rod, a second rod, a third rod, and at least one elastic element. The first rod is configured to fix a first side portion of the flexible membrane. The second rod is configured to fix a second side portion of the flexible membrane, wherein the second side portion is opposite to the first side portion. The third rod is adjacent to the second rod, wherein the third rod and the first rod are respectively located on opposite sides of the second rod, and the third rod is configured to pull the flexible membrane from the second side portion of the flexible membrane through the second rod. The at least one elastic element has a first end and a second end opposite to each other respectively disposed on the second rod and the third rod, wherein this at least one elastic element is configured to provide tension cushioning for the flexible membrane.

[0009] According to one embodiment of the present disclosure, the above-mentioned at least one elastic element comprises a plurality of springs.

[0010] According to one embodiment of the present disclosure, the spring is disposed between the second and third rods at a fixed interval.

[0011] According to one embodiment of this disclosure, the aforementioned diaphragm clamp further includes at least one tension sensor disposed on the third rod.

[0012] According to one embodiment of the present disclosure, each of the first and third rods described above has a first through hole and a second through hole at its first end and a second end opposite to the first end, respectively.

[0013] According to one embodiment of this disclosure, the aforementioned flexible membrane clamp further includes a first connecting rod and a second connecting rod. The two opposite ends of the first connecting rod are respectively inserted into the first through holes of the first member and the third member. The two opposite ends of the second connecting rod are respectively inserted into the second through holes of the first member and the third member.

[0014] According to one embodiment of this disclosure, the sidewalls of both the first through hole and the second through hole have a first locking portion. Each end of the first connecting rod and the second connecting rod has a second locking portion, wherein these second locking portions are configured to engage with the first locking portions.

[0015] According to one embodiment of the present disclosure, the above-mentioned soft film is an embossed soft film.

[0016] To achieve the above objectives, this disclosure also provides a mounting fixture for a flexible membrane clamp. This mounting fixture includes a platform, a retaining wall, and several fixing members. A first fixing portion, a second fixing portion, and a third fixing portion opposite to the first fixing portion are provided on one surface of the platform. The first fixing portion, the second fixing portion, and the third fixing portion are respectively provided for a first rod, a second rod, and a third rod of the flexible membrane clamp. The retaining wall is provided on the surface of the platform and is located between the second fixing portion and the third fixing portion. The retaining wall has at least one channel for receiving at least one elastic element of the flexible membrane clamp. The two opposite ends of this at least one elastic element are respectively provided on the second rod and the third rod. The fixing members are provided on the surface of the platform and configured to fix the first rod and the third rod to the surface of the platform.

[0017] According to one embodiment of this disclosure, the mounting fixture further includes a support platform protruding from the surface of the platform and located between the first fixing portion and the second fixing portion. The support platform is configured to support the PVC membrane to be mounted on the PVC membrane clamp.

[0018] According to one embodiment of this disclosure, the aforementioned support platform is further provided with several vacuum channels configured to provide suction to the PVC membrane.

[0019] According to one embodiment of this disclosure, the mounting fixture further includes a first fixing block and a second fixing block. The first fixing block is disposed on the surface of the platform and adjacent to the first fixing portion. The first fixing block is configured to position the first rod. The second fixing block is disposed on the surface of the platform and adjacent to the third fixing portion. The second fixing block is configured to form a groove with the retaining wall to serve as the third fixing portion.

[0020] According to one embodiment of this disclosure, the platform further includes a first recess recessed in the first fixing block and the first fixing portion, and a second recess recessed in the second fixing block and the third fixing portion. When the PVC membrane clamp is placed on the platform, the first rod and the third rod are respectively located on the first recess and the second recess.

[0021] According to one embodiment of the present disclosure, the at least one channel comprises a plurality of channels, and the at least one elastic element comprises a plurality of elastic elements. The number of channels is the same as the number of elastic elements, and these channels are arranged at a fixed interval.

[0022] According to one embodiment of this disclosure, the aforementioned retaining wall is movably disposed on the surface of the platform toward the second and third fixing parts.

[0023] According to one embodiment of this disclosure, each of the above-described fasteners includes a caliper.

[0024] According to one embodiment of the present disclosure, each of the first rods and the third rods described above has a first through hole and a second through hole at their respective first and second ends.

[0025] According to one embodiment of this disclosure, the aforementioned diaphragm clamp further includes a first connecting rod and a second connecting rod. When the opposite sides of the diaphragm are respectively clamped onto the first and second rods on the mounting fixture, the opposite ends of the first connecting rod pass through the first through holes of the first and third rods, respectively, and the opposite ends of the second connecting rod pass through the second through holes of the first and third rods, respectively.

[0026] According to one embodiment of this disclosure, each of the first through holes and the sidewalls of the second through holes has a first locking portion. Each end of the first connecting rod and the second connecting rod has a second locking portion. These second locking portions are configured to engage with the first locking portions.

[0027] According to one embodiment of the present disclosure, the above-described soft film clamp is configured to fix the imprinted soft film using a first rod and a second rod.

[0028] It should be understood that the foregoing general description and the following detailed description are examples and are intended to provide further explanation of the invention as claimed. Attached Figure Description

[0029] A fuller understanding of the invention can be gained from the following detailed description of embodiments with reference to the accompanying drawings, which are described below:

[0030] Figure 1 This is a top view schematic diagram illustrating a flexible membrane clamp according to one embodiment of the present disclosure;

[0031] Figures 2A to 2D This is a partially enlarged schematic diagram illustrating a flexible membrane clamp according to one embodiment of the present disclosure;

[0032] Figure 3 This is a schematic diagram illustrating a flexible membrane clamp mounted on a mounting fixture according to one embodiment of the present disclosure;

[0033] Figure 4 This is a schematic diagram illustrating the removal of a flexible membrane clamp from a mounting fixture according to one embodiment of the present disclosure;

[0034] Figure 5 It is a drawing Figure 3 An enlarged schematic diagram of part A; and

[0035] Figure 6 This is a schematic diagram illustrating a soft film clamp disposed on an imprinting device according to an embodiment of the present disclosure.

[0036] [Symbol Explanation]

[0037] 100: Fixture

[0038] 110: Soft membrane

[0039] 112: Active Zone

[0040] 114: First side

[0041] 116: Second side

[0042] 120: First member

[0043] 122: First end

[0044] 124: Second end

[0045] 126: First through hole

[0046] 126e: First Card Control Department

[0047] 128: Second through hole

[0048] 128e: First Card Control Department

[0049] 130: Second member

[0050] 140: Third member

[0051] 142: First end

[0052] 144: Second end

[0053] 146: First through hole

[0054] 146e: First Card Control Department

[0055] 148: Second through hole

[0056] 148e: First Card Control Department

[0057] 150: Elastic element

[0058] 152: First End

[0059] 154: Second End

[0060] 160: First Link

[0061] 162: End

[0062] 162e: Second card control section

[0063] 164: End

[0064] 164e: Second card control section

[0065] 170: Second Link

[0066] 172: End

[0067] 172e: Second Card Section

[0068] 174: End

[0069] 174e: Second Card Section

[0070] 180: Tension sensor

[0071] 200: Install fixture

[0072] 210: Platform

[0073] 210a: Surface

[0074] 212: First fixing part

[0075] 214: Second fixing part

[0076] 216: Third fixing part

[0077] 218a: first concave part

[0078] 218b: Second concave portion

[0079] 220: Retaining Wall

[0080] 222: Channel

[0081] 230a: Fastener

[0082] 230b: Fastener

[0083] 230c: Fastener

[0084] 230d: Fastener

[0085] 240: Supporting platform

[0086] 240a: Surface

[0087] 242: Vacuum Channel

[0088] 250: First fixed block

[0089] 260: Second fixing block

[0090] 300: Imprinting equipment

[0091] 310: Carrier disk

[0092] 320: Workbench

[0093] 330: Fixed base

[0094] 340: Drive shaft

[0095] 350: Roller

[0096] G: Spacing Detailed Implementation

[0097] Reference will now be made in detail to present embodiments of the invention, examples of which are illustrated in the accompanying drawings. The same reference numerals are used as far as possible in the drawings and description to denote the same or similar parts.

[0098] Figure 1 This is a top view schematic diagram illustrating a flexible film jig according to one embodiment of the present disclosure. The jig 100 is configured to uniformly clamp a flexible film 110 for transfer and loading onto a process equipment. After completing a process, such as an imprinting process, the jig 100 is configured to gradually separate the flexible film 110 from the wafer by pulling one side of the flexible film 110 upwards or toward an opposite side of the flexible film 110. In some examples, the flexible film 110 is an imprinted flexible film and includes a plurality of imprinted pattern structures on its active region 112. The flexible film 110 includes a first side portion 114 and a second side portion 116, which are respectively located on opposite sides of the flexible film 110.

[0099] Please refer to Figure 1 The clamp 100 may primarily include a first rod 120, a second rod 130, a third rod 140, and at least one elastic element 150. The first rod 120, second rod 130, and third rod 140 may be made of high-strength plastic material or metal, such as aluminum or stainless steel. The first rod 120 is configured to secure a first side 114 of the flexible membrane 110. For example, the first side 114 of the flexible membrane 110 may be secured to the first rod 120 using screws or magnetism.

[0100] The first rod 120 has a first end 122 and a second end 124 opposite to each other. In some examples, the first rod 120 has a first through hole 126 and a second through hole 128, wherein the first through hole 126 passes through the first end 122 and the second through hole 128 passes through the second end 124. In some exemplary examples, the sidewalls of the first through hole 126 and the second through hole 128 have first locking portions 126e and 128e, respectively. For example, the first locking portions 126e and 128e may be protrusions protruding from the sidewalls of the first through hole 126 and the second through hole 128.

[0101] The second rod 130 is configured to clamp the second side 116 of the flexible membrane 110, thus the second rod 130 and the first rod 120 respectively fix two opposite sides of the flexible membrane 110. Similarly, the second side 116 of the flexible membrane 110 can be fixed to the second rod 130 by screws or magnetism. Therefore, the clamp 100 can fix the flexible membrane 110 by means of the first rod 120 and the second rod 130.

[0102] The third member 140 is adjacent to and connected to the second member 130. The third member 140 is separated from the second member 130 by a distance G. The third member 140 is movable or rotatable relative to the second member 130. The third member 140 and the first member 120 are located on two opposite sides of the second member 130, respectively. The third member 140 is configured to pull the second member 130, thereby pulling the PVC membrane 110 from the second side 116 through the second member 130.

[0103] The third member 140 has a first end 142 and a second end 144 relative to the first end 142. In some examples, the third member 140 has a first through hole 146 and a second through hole 148. The first through hole 146 extends through the first end 142, and the second through hole 148 extends through the second end 144. In some exemplary examples, the sidewalls of the first through hole 146 and the second through hole 148 have first locking portions 146e and 148e, respectively. The first locking portions 146e and 148e may, for example, be protrusions extending from the sidewalls of the first through hole 146 and the second through hole 148.

[0104] exist Figure 1 In the examples shown, the number of at least one elastic element 150 is greater than one. In some examples, the elastic element 150 is a spring. Each elastic element 150 has a first end 152 and a second end 154 opposite to each other. The first end 152 and the second end 154 of the elastic element 150 are located on the second member 130 and the third member 140, respectively. The elastic elements 150 are configured to provide tension cushioning for the diaphragm 110. In some exemplary examples, these elastic elements 150 are disposed between the second member 130 and the third member 140 at a fixed spacing to provide uniform tension cushioning for the diaphragm 110.

[0105] In some examples, the clamp 100 may further include a first link 160 and a second link 170. The first link 160 has two opposing ends 162 and 164. Ends 162 and 164 of the first link 160 are respectively disposed in a first through hole 126 of the first member 120 and a first through hole 146 of the third member 140. Ends 162 and 164 of the first link 160 can be moved upward or downward from the first member 120 and the third member 140. In some exemplary examples, such as Figure 2A and Figure 2B As shown, ends 162 and 164 of the first link 160 have second locking portions 162e and 164e, respectively. The second locking portions 162e and 164e can engage with the first locking portions 126e and 146e, thus fixing the first link 160 between the first member 120 and the third member 140.

[0106] Similarly, the second link 170 has two opposing ends 172 and 174. Ends 172 and 174 of the second link 170 are respectively located in the second through hole 128 of the first link 120 and the second through hole 148 of the third link 140. Ends 172 and 174 of the second link 170 can also be moved upwards or downwards from the first link 120 and the third link 140. Figure 2C and Figure 2D As shown, the ends 172 and 174 of the second link 170 may each have a second locking portion 172e and 174e. The second locking portions 172e and 174e can engage with the first locking portions 128e and 148e respectively, thus the second link 170 is fixed between the first member 120 and the third member 140.

[0107] When the first side 114 and the second side 116 of the flexible film 110 are clamped by the first rod 120 and the second rod 130 respectively, the first connecting rod 160 and the second connecting rod 170 connected between the first rod 120 and the third rod 140 can unfold the flexible film 110, so that the flexible film 110 can be clamped flat by the fixture 100. When the flexible film 110 is used in the process, the first rod 120 is fixed on the process machine, and the first connecting rod 160 and the second connecting rod 170 are removed. In this way, by moving the third rod 140 to pull the second rod 130, the second side 116 of the flexible film 110 can be pulled upward or towards the first side 114. Therefore, the flexible film 110 can be detached from the wafer in different ways. The detachment angle of the flexible film 110 can range from greater than 0 degrees to 180 degrees.

[0108] In some examples, the clamp 100 may further include at least one tension sensor 180. Figure 1 In the example shown, the clamp 100 includes two tension sensors 180, which are mounted on the third member 140. These tension sensors 180 can be located at two opposite ends of the third member 140. The tension sensors 180 measure and display changes in the tension applied to the diaphragm 110 in real time, allowing the operator to adjust the tension based on the measurement results.

[0109] Figure 3 This is a schematic diagram illustrating a flexible membrane clamp mounted on a mounting fixture according to one embodiment of the present disclosure. Figure 4 This is a schematic diagram illustrating the removal of a flexible membrane clamp from a mounting fixture according to one embodiment of the present disclosure. The flexible membrane 110 can be mounted on the clamp 100 using the mounting fixture 200. The mounting fixture 200 may mainly include a platform 210, a retaining wall 220, and several fasteners 230a to 230d.

[0110] Platform 210 has a plate-like structure. Platform 210 may be made of metal, such as stainless steel. Platform 210 can be configured to support and fix clamp 100 during the setting of the flexible membrane 110. Platform 210 has a surface 210a. In some examples, platform 210 includes a first fixing portion 212, a second fixing portion 214, and a third fixing portion 216 provided on the surface 210a of platform 210. The second fixing portion 214 and the third fixing portion 216 are opposite to the first fixing portion 212. A first rod 120, a second rod 130, and a third rod 140 are respectively provided on the first fixing portion 212, the second fixing portion 214, and the third fixing portion 216.

[0111] In some examples, such as Figure 4 As shown, the mounting fixture 200 also includes a support platform 240. The support platform 240 is located between the first fixing part 212 and the second fixing part 214, and protrudes from the surface 210a of the platform 210. The support platform 240 can support the soft membrane 110 during the placement of the soft membrane 110 onto the clamp 100.

[0112] In some exemplary cases, such as Figure 4 As shown, the support platform 240 has several vacuum channels 242. These vacuum channels 242 are recessed in the surface 240a of the support platform 240. By connecting a vacuum pumping device (not shown), the vacuum channels 242 can provide a vacuum to the soft membrane 110 disposed on the surface 240a of the support platform 240.

[0113] like Figure 4 As shown, the retaining wall 220 is provided on the surface 210a of the platform 210. The second fixing part 214 is located between the retaining wall 220 and the support platform 240, and therefore the second fixing part 214 is a slot defined by the retaining wall 220 and the support platform 240. The retaining wall 220 is located between the second fixing part 214 and the third fixing part 216.

[0114] Please refer to Figure 5 , Figure 5 It is a drawing Figure 3 A magnified schematic diagram of part A. The second rod 130 and the third rod 140 are located on opposite sides of the retaining wall 220, and the first end 152 and the second end 154 of each elastic element 150 are respectively disposed on the second rod 130 and the third rod 140. Therefore, the retaining wall 220 has at least one channel 222 passing through it to accommodate at least one elastic element 150 of the clamp 100. Figure 5In the example shown, the retaining wall 220 has a plurality of channels 222, and the number of channels 222 may be the same as the number of elastic elements 150 to accommodate the elastic elements 150. In some examples, these channels 222 are formed in the retaining wall 220 at a fixed interval. The retaining wall 220 is movably disposed on the surface 210a of the platform 210, so that the retaining wall 220 can move toward the second fixing part 214 and the third fixing part 216, that is, the retaining wall 220 can move between the second fixing part 214 and the third fixing part 216.

[0115] In some examples, such as Figure 4 As shown, the mounting fixture 200 may optionally include a first fixing block 250 and a second fixing block 260. The first fixing block 250 is disposed on the surface 210a of the platform 210. The first fixing block 250 is adjacent to the first fixing portion 212, and the first fixing portion 212 is located between the first fixing block 250 and the support platform 240. Therefore, the first fixing portion 212 is a slot defined by the first fixing block 250 and the support platform 240. Thus, the first fixing block 250 can be used to position the first rod 120 in the first fixing portion 212.

[0116] The second fixing block 260 is disposed on the surface 210a of the platform 210. The second fixing block 260 is adjacent to the third fixing part 216, and the third fixing part 216 is located between the second fixing block 260 and the retaining wall 220. Therefore, the third fixing part 216 is a slot formed by the second fixing block 260 and the retaining wall 220.

[0117] Please refer to Figure 3 and Figure 4 Platform 210 may optionally include a first recess 218a and a second recess 218b. The first recess 218a and the second recess 218b are located on opposite sides of platform 210. The first recess 218a is recessed in the first fixing block 250 and the first fixing part 212. The second recess 218b is recessed in the second fixing block 260 and the third fixing part 216. Therefore, when clamp 100 is placed on surface 210a of platform 210, the first rod 120 and the third rod 140 are located on the first recess 218a and the second recess 218b, respectively. In this way, the operator can easily pick up clamp 100 and the soft membrane 110 held by clamp 100 through the first recess 218a and the second recess 218b.

[0118] like Figure 3As shown, fasteners 230a to 230d are provided on the surface 210a of platform 210. In some exemplary embodiments, fasteners 230a and 230b are respectively adjacent to and press against the first end 122 and the second end 124 of the first rod 120 to secure the first rod 120 to the surface 210a of platform 210. Furthermore, fasteners 230c and 230d are respectively adjacent to and press against the first end 142 and the second end 144 of the third rod 140 to secure the third rod 140 to the surface 210a of platform 210. Fasteners 230a to 230d can be any fastener capable of securing the first rod 120 and the third rod 140 to the surface 210a of platform 210. For example, each fastener 230a to 230d may include a caliper, thus allowing for easy and quick fastening and release of the first rod 120 and the third rod 140.

[0119] Please refer to Figure 1 , Figure 3 ,and Figure 4 When setting the flexible membrane 110, the clamp 100 is placed on the surface 210a of the platform 210. The first rod 120, the second rod 130, and the third rod 140 are respectively positioned on the first fixing part 212, the second fixing part 214, and the third fixing part 216. The first rod 120 and the third rod 140 are fixed to the surface 210a of the platform 210 using fixing members 230a and 230b, and fixing members 230c and 230d, respectively. The flexible membrane 110 is provided, and the first side portion 114 of the flexible membrane 110 is fixed to the first rod 120. Next, a vacuum operation is performed via the vacuum channel 242 on the surface 240a of the support platform 240 to suction the flexible membrane 110 onto the surface 240a of the support platform 240. Then, the second side portion 116 is fixed to the second rod 130. In some examples, the retaining wall 220 can be moved toward the second member 130 or toward the third member 140 to adjust the tension of the diaphragm 110.

[0120] Next, ends 162 and 164 of the first connecting rod 160 are respectively inserted into the first through hole 126 of the first rod 120 and the first through hole 146 of the third rod 140, so that the first connecting rod 160 is positioned between the first rod 120 and the third rod 140. Similarly, ends 172 and 174 of the second connecting rod 170 are respectively inserted into the second through hole 128 of the first rod 120 and the second through hole 148 of the third rod 140, so that the second connecting rod 170 is positioned between the first rod 120 and the third rod 140. The clamp 100 holds the soft membrane 110 flat, and the fixing members 230a to 230d are opened to release the first rod 120 and the third rod 140.

[0121] like Figure 4 As shown, the operator can remove the clamp 100 with the soft film 110 from the mounting fixture 200 via the first recess 218a and the second recess 218b. In some examples, the soft film 110 is an embossed soft film, and when the clamp 100 is mounted on the mounting fixture 200, the embossed pattern structure in the active area 112 faces upward.

[0122] Figure 6 This is a schematic diagram illustrating a flexible film fixture disposed on an imprinting apparatus according to an embodiment of the present disclosure. When the flexible film 110 is applied to the imprinting process performed on the imprinting apparatus 300, the fixture 100 is flipped to rotate the active area 112 so that it faces the wafer (not shown), wherein the wafer is carried by the carrier 310 of the imprinting apparatus 300. The imprinting apparatus 300 mainly includes the carrier 310, the worktable 320, the mounting base 330, the drive shaft 340, and the rollers 350. The wafer can be fixed on the carrier 310 by vacuum adsorption or electrostatic adsorption. The mounting base 330, the drive shaft 340, and the rollers 350 are disposed on the worktable 320. The carrier 310 is disposed in the worktable 320 and is located between the mounting base 330 and the drive shaft 340.

[0123] The first rod 120 can be fixed to the mounting base 330, and the third rod 140 can be fixed to the drive shaft 340, so that the soft membrane 110 can be positioned above the carrier 310. The drive shaft 340 can be used to drive the third rod 140 upwards or toward the first rod 120. The roller 350 can roll above the carrier 310.

[0124] During the imprinting process, a wafer (not shown) is fixed on a carrier 310, and the jig 100 is flipped so that the active area 112 of the flexible film 110 faces the wafer. The first link 160 and the second link 170 of the jig 100 are removed. Next, a roller 350 rolls on the flexible film 110 to press the active area 112 of the flexible film 110 onto the wafer, thereby transferring the pattern structure on the active area 112 to the wafer. The roller 350 can roll on the flexible film 110 from the first link 120 to the second link 130.

[0125] After the patterned structure on the active region 112 of the flexible film 110 is transferred to the wafer, the wafer is cured using, for example, ultraviolet light. Next, a decoupling operation of the flexible film 110 is performed. During the decoupling operation, the roller 350 gradually rolls over the flexible film 110 from the second rod 130 toward the first rod 120, and the drive shaft 340 moves to drive the third rod 140 to pull the second rod 130, thereby separating the flexible film 110 from the wafer. In some examples, as the roller 350 rolls toward the first rod 120, the third rod 140 is pulled upwards and bent toward the first rod 120. In other examples, the third rod 140 is pulled upwards during the decoupling operation. In still other examples, the third rod 140 is pulled toward the first rod 120 and then passes over the roller 350. The decoupling rate of the flexible film 110 can be controlled using the roller 350 and the drive shaft 340.

[0126] According to the above-described embodiments, one advantage of this disclosure is that the flexible film clamp uses a first rod and a second rod to respectively clamp two opposite sides of the flexible film. During the film removal operation, the first rod is fixed, and the second rod moves upward or toward the first rod to pull the flexible film, thus allowing the flexible film to be gradually separated from the wafer. Therefore, a variety of removal actions can be used to perform the film removal operation.

[0127] According to the above-described embodiments, another advantage of this disclosure is that the clamp includes a third rod connected to the second rod via at least one elastic element, such that the elastic element can provide tension cushioning for the soft membrane during the membrane removal operation, thereby protecting the soft membrane from damage.

[0128] According to the above-described embodiments, another advantage of this disclosure is that the mounting fixture for the flexible membrane clamp can position the first and third rods of the clamp on a platform to provide the required tension for the flexible membrane. By using a two-bar linkage to correspondingly connect the two ends of the first and third rods, the flexible membrane can be flatly fixed to the clamp with the required tension. Therefore, the flexible membrane can be easily moved and placed on the process equipment.

[0129] While the invention has been described in considerable detail with reference to specific embodiments thereof, other embodiments are possible. Therefore, the spirit and scope of the appended claims should not be limited to the description of the embodiments contained herein.

[0130] It will be apparent to those skilled in the art that various modifications and alterations can be made to the structure of the invention without departing from its scope or spirit. In view of the foregoing, it is intended that the invention encompasses any modifications and alterations to the invention provided, provided they fall within the scope of the appended claims.

Claims

1. A mounting jig for a soft membrane clamp, characterized by comprising: The mounting jig of the soft film clamp comprises: a platform configured to carry and fix the soft film clamp during setting of a soft film on the soft film clamp, wherein the platform comprises a first fixing portion provided on a surface of the platform, and a second fixing portion and a third fixing portion opposite to the first fixing portion, the first fixing portion, the second fixing portion, and the third fixing portion are respectively provided for a first rod, a second rod, and a third rod of the soft film clamp, wherein the first rod is configured to fix a first side of the soft film, the second rod is configured to fix a second side of the soft film opposite to the first side, and the third rod is adjacent to the second rod; a retaining wall provided on the surface of the platform and between the second fixing portion and the third fixing portion, wherein the retaining wall has at least one passage to accommodate at least one elastic element of the soft film clamp, and opposite ends of the at least one elastic element are respectively provided on the second rod and the third rod; and a plurality of fixing members provided on the surface of the platform and configured to fix the first rod and the third rod on the surface of the platform.

2. The installation jig for the soft film clamp according to claim 1, wherein The mounting jig of the soft film clamp further comprises a supporting table provided on the surface of the platform and between the first fixing portion and the second fixing portion, wherein the supporting table is configured to support the soft film to be installed on the soft film clamp.

3. The mounting jig for a soft film clamp according to claim 2, wherein The supporting table is further provided with a plurality of vacuum channels configured to provide suction force to the soft film.

4. The mounting jig for the soft film clamp according to claim 1, wherein The mounting jig of the soft film clamp further comprises: a first fixing block provided on the surface of the platform and adjacent to the first fixing portion, wherein the first fixing block is configured to position the first rod; and a second fixing block provided on the surface of the platform and adjacent to the third fixing portion, wherein the second fixing block is configured to form a clamping groove with the retaining wall as the third fixing portion.

5. The mounting jig for the soft film clamp according to claim 4, wherein The platform further comprises: a first recessed portion recessed in the first fixing block and the first fixing portion; and a second recessed portion recessed in the second fixing block and the third fixing portion, wherein when the soft film clamp is placed on the platform, the first rod and the third rod are respectively located on the first recessed portion and the second recessed portion.

6. The mounting jig for the soft film clamp according to claim 1, wherein The at least one passage comprises a plurality of passages, and the at least one elastic element comprises a plurality of elastic elements, the number of the plurality of passages is the same as the number of the plurality of elastic elements, and the plurality of passages are provided at a fixed interval.

7. The mounting jig for the soft film clamp according to claim 1, wherein The retaining wall is movably provided on the surface of the platform towards the second fixing portion and the third fixing portion.

8. The mounting jig for the soft film clamp according to claim 1, wherein Each of the fixing members comprises a clamp.

9. The mounting jig for the soft film clamp according to claim 1, wherein Opposite first end and second end of each of the first rod and the third rod respectively have a first through hole and a second through hole.

10. The mounting jig for the soft film clamp according to claim 9, wherein The soft film clamp further comprises: a first connecting rod; and a second connecting rod, wherein when the first side and the second side of the soft film are respectively clamped on the first rod and the second rod of the mounting jig, opposite ends of the first connecting rod are respectively threaded into the first through holes of the first rod and the third rod, and opposite ends of the second connecting rod are respectively threaded into the second through holes of the first rod and the third rod.

11. The mounting jig for a soft membrane clamp according to claim 10, wherein: each of the first through holes has a first clamping portion on a side wall of the second through hole; and each of the ends of the first link and the second link has a second clamping portion configured to correspondingly clamp with the first clamping portion.

12. The mounting jig for the soft film clamp according to claim 1, wherein The soft membrane is an embossed soft membrane.

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