Adsorption column, adsorption device and treatment method of purified product

Abstract

The present invention provides an adsorption column, an adsorption device and a method for treating a purified product. The adsorption column is mainly composed of a tank body with a cavity, a plurality of partition members that divide the cavity into a plurality of independent cavities, a first pipeline connected to each cavity, a second pipeline connected to each cavity, a first valve assembly provided on each first pipeline, a second valve assembly provided on each second pipeline, and an exchange device connected to each first pipeline and the second pipeline. Each cavity is used to fill and set a purification material. The partition member is provided with a through hole for allowing the material to flow. The exchange device is used to transfer the purification material extracted from the corresponding cavity to a different cavity, and to separate the extracted material from the purification material and then flow it back into the cavity. The purification material in this embodiment is preferably resin. Compared with the prior art, the present invention can simplify the internal structure, and realize the rapid replacement of failed purification materials, as well as the utilization of re-divided purification materials.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor electronic chemicals, and in particular to an adsorption column, an adsorption device and a method for processing purified products. Background Art

[0002] In the prior art, the adsorption device used for purifying products for semiconductors contains dynamic equipment and a complex structure. This can easily lead to confusion between new and old resins and other purification materials used for purification during the continuous addition of materials, that is, between materials of different levels of purification. Therefore, it cannot meet the purification requirements of high-purity chemicals for semiconductors.

[0003] Moreover, the adsorption device of the flap-type multi-stage fluidized bed disclosed in the patent application document CN87203964U is very prone to dead corners due to its complex internal structure and the use of flap-type and porous baffles. Therefore, it is difficult to achieve a low level of roughness of the EP polishing (electropolishing,, electrochemical polishing process) of the baffle surface, and it is very easy for resin and other purification materials to remain, such as the confusion between the resin in the previous stage and the resin in the next stage, for example. Figure 1 The resin is mixed between two adjacent compartments shown.

[0004] Therefore, how to provide an adsorption device for semiconductor purification products to simplify the internal structure and achieve rapid replacement of failed purification materials and reuse of re-purification materials is a technical problem that the present invention urgently needs to solve. Summary of the Invention

[0005] The object of the present invention is to provide an adsorption device for a purified product of a semiconductor, so as to simplify the internal structure and realize the rapid replacement of failed purification materials and the utilization of the re-purification materials.

[0006] In order to achieve the above object, the present invention provides an adsorption column comprising:

[0007] a tank body having a cavity;

[0008] The partition member is disposed in the cavity and is used to divide the cavity into a plurality of independent cavities; wherein the partition member is provided with a through hole for allowing the material to flow, and each cavity is used to be filled with a purification material;

[0009] a first pipeline communicating with each cavity;

[0010] a second pipeline communicating with each cavity;

[0011] a first valve assembly disposed on each first pipeline;

[0012] a second valve assembly disposed on each second pipeline;

[0013] an exchange device connected to each of the first and second pipelines, for transferring the purified material extracted from the corresponding cavity to a different cavity, and for separating the extracted material from the purified material and then re-flowing it into the cavity;

[0014] The material flows into one end of the tank structure, passes through each cavity in sequence, is processed by the purification material, and then flows out from the other end.

[0015] Further preferably, the exchange device includes: a first exchange pipeline connected to each first pipeline, a second exchange pipeline connected to each second pipeline, and a delivery pipeline for connecting the first exchange pipeline and the second exchange pipeline; wherein a delivery pump is provided on the delivery pipeline to realize fluid delivery between the first exchange pipeline and the second exchange pipeline.

[0016] Further preferably, the exchange device further includes: a first fluid channel connected to the first exchange pipeline, a second fluid channel connected to the second exchange pipeline, a first valve arranged on the first fluid channel, and a second valve arranged on the second fluid channel.

[0017] Further preferably, the pipe opening of the first pipeline is located below the pipe opening of the second pipeline, and the pipe opening of the first pipeline penetrates into the interior of the cavity; the pipe opening of the second pipeline is opened on the side wall of the tank body.

[0018] Further preferably, it further comprises: a speaker cover body connected to the pipe openings of each first pipeline and / or the second pipeline; wherein, the speaker cover body can be rotatably or fixedly arranged on the pipe opening.

[0019] Further preferably, the partition members are arranged in sequence from top to bottom; the material flows into and out of the lower end of the cavity; and the number of the cavities is at least three.

[0020] Further preferably, it further includes: a control device electrically connected to the first valve assembly, the second valve assembly and the exchange device.

[0021] Further preferably, the exchange device also includes: a regeneration tower, used to regenerate the purification material adsorbed by the first pipeline and / or the second pipeline and reaching a preset failure level, and transport the regenerated purification material to the corresponding cavity through the first pipeline and / or the second pipeline, wherein one end of the regeneration tower is connected to the first fluid channel, and the other end is connected to the second fluid channel.

[0022] Further preferably, the first fluid channel is a regeneration discharge channel; the second fluid channel is a recovery feed channel; the first pipeline is an extraction pipeline; and the second pipeline is a release pipeline.

[0023] Further preferably, it also includes: a buffer tank connected to the regeneration tower and used to store the separated materials, and a vacuum pump connected to the buffer tank, and a reflux channel connected to the buffer tank and the tank body at opposite ends respectively; wherein, there is a filter plate in the regeneration tower; the vacuum pump is used to extract the corresponding materials and purification materials into the regeneration tower by vacuuming, and after separating the materials through the filter plate, the purification material remains in the regeneration tower for regeneration.

[0024] Further preferably, the purification material is resin.

[0025] Further preferably, the delivery pump is a diaphragm pump.

[0026] The present invention also provides a method for treating a purified product for semiconductors, wherein the method comprises the following steps:

[0027] After the material flows into the cavity, the purification time of the material by the purification material in each cavity is obtained;

[0028] Determining the priority and expiration time according to the purification order of each chamber for the purification material;

[0029] After the purification materials that have reached their expiration time are extracted and discharged from the corresponding cavities, and after the purification materials that have not reached their expiration time are extracted, they are released into the corresponding cavities of the next priority level in order of priority.

[0030] Further preferably, after extracting and discharging the purification material that has reached its expiration time from the corresponding cavity, and extracting the purification material that has not reached its expiration time, releasing them into the corresponding cavity of the next higher priority in order of priority includes the following steps:

[0031] The purification material that has reached its expiration time is extracted from the corresponding cavity and discharged into the regeneration tower for regeneration treatment to obtain regenerated purification material;

[0032] After the purification materials that have not reached the expiration time are extracted, they are released into the corresponding cavities of the next priority level in order of priority;

[0033] The regenerated purification materials are released into the corresponding cavity of the previous priority level in reverse order of priority.

[0034] Compared with the prior art, the adsorption device for semiconductor purification products provided by the present invention simplifies the internal structure and realizes the rapid replacement of failed purification materials and the reuse of purification materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 Schematic diagram of the internal structure of the adsorption column in the first embodiment of the present invention;

[0036] Figure 2 Schematic diagram of the structure of the extraction pipeline of the adsorption column in the first embodiment of the present invention;

[0037] Figure 3 Schematic diagram of the structure of the reflux pipeline of the adsorption column in the first embodiment of the present invention;

[0038] Figure 4 Schematic diagram of the structure of the partition member in the first embodiment of the present invention;

[0039] Figure 5 Schematic diagram of the working process of the regeneration tower in the first embodiment of the present invention;

[0040] Figure 6 A schematic diagram of the flow direction of the path for extracting the purification material in the first embodiment of the present invention;

[0041] Figure 7 A schematic diagram of the flow direction of the path for replenishing the purification material in the first embodiment of the present invention;

[0042] Figure 8 Schematic diagram of the internal structure of the adsorption column in the second embodiment of the present invention;

[0043] Figure numerals: 1-tank body, 1a-cavity, 1b-cavity, 1c-cavity, 1d-cavity, 1e-cavity, 10-horn cover, 3-delivery pump, 5-regeneration tower, 7-vacuum pump, 6-buffer tank, 101-first valve assembly, 102-first valve assembly, 103-first valve assembly, 104-first valve assembly, 105-first valve assembly, 201-first pipeline, 202-first pipeline, 203-first pipeline, 204-first pipeline , 205-first pipeline, 701-second pipeline, 702-second pipeline, 703-second pipeline, 704-second pipeline, 705-second pipeline, 901-second valve assembly, 902-second valve assembly, 903-second valve assembly, 904-second valve assembly, 905-second valve assembly, 500-delivery pipeline, 600-first fluid channel, 400-second fluid channel, 300-first exchange pipe, 700-second exchange pipe. DETAILED DESCRIPTION

[0044] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention. Specific implementation method:

[0046] Example 1

[0047] refer to Figure 1 and Figure 4 This embodiment provides an adsorption column for purifying semiconductor products, which is mainly composed of a tank body 1 having a cavity, a plurality of partition members 11 that divide the cavity into a plurality of independent cavities, a first pipeline connected to each cavity, a second pipeline connected to each cavity, a first valve assembly provided on each first pipeline, a second valve assembly provided on each second pipeline, and an exchange device connected to each first pipeline and second pipeline. Figure 1 As shown, the cavities in this embodiment are briefly described by taking cavity 1a, cavity 1b, cavity 1c, cavity 1d, and cavity 1e as examples, and the first pipelines corresponding to the respective cavities are respectively as follows: Figure 1 The first pipeline 201 , the first pipeline 202 , the first pipeline 203 , the first pipeline 204 , the first pipeline 205 , etc., and the second pipeline 701 , the second pipeline 702 , the second pipeline 703 , the second pipeline 704 , the second pipeline 705 are shown.

[0048] Each cavity is filled with purification material. The partition member 11 is provided with through-holes (not shown) for material circulation. The exchange device is used to transfer the purification material extracted from a corresponding cavity to a different cavity, and to separate the extracted material from the purification material before re-flowing it into the cavity. The purification material in this embodiment is preferably resin.

[0049] like Figure 1 As shown, the material to be processed flows into one end of the tank body 1, passes through each cavity in turn and is processed by the purification material, and then flows out from the other end, for example, Figure 1 Flows in from the direction A shown in the figure and flows from Figure 1 Flow out in direction B as shown.

[0050] From the above content, it can be seen that: no dynamic equipment is set in the tank body 1 structure of this embodiment, but through the cooperation of the first pipeline, the second pipeline and the exchange device, the purification material in the cavity that is about to expire is extracted through the first pipeline or the second pipeline to the outside for regeneration or discharge, and the purification material in the cavity that has not expired or has expired for a long time, such as the cavity passed by the material, is extracted from the cavity with a later sorting and flows into the cavity with a front sorting relative to the cavity, thereby realizing the rapid replacement of the expired purification material and the reuse of the purification material while simplifying the internal structure. In addition, the partition member 11 can be used to isolate the purification materials in different cavities, and the purification materials can be transported to the outside for regeneration, and the new and old purification materials in each cavity can be updated through external pipelines, thereby avoiding to the greatest extent the mixing of new and old purification materials and making it difficult to fully distinguish them, so that they cannot be fully utilized and have to be replaced all at once, resulting in unnecessary waste, etc., thereby ensuring that the purification materials can be replaced step by step or across levels to eliminate residues, and thus ensuring that the purity of the material to be treated reaches 99.999% to 99.99999% (5N to 7N) after purification, and the inner surface of the tank body 1 can be fully EP polished, and the surface roughness Ra is less than 0.15, that is, less than 0.15μm.

[0051] For example, the number of cavities in the tank body 1 of this embodiment is only five for illustration, and the specific number of cavities is not limited. Figure 1As shown, in chambers 1a on the first layer, 1b on the second layer, 1c on the third layer, 1d on the fourth layer, and 1e on the fifth layer, materials to be processed, such as pure chemicals used in semiconductor processing, such as ethylene glycol and propylene glycol, flow from the bottom of tank 1 and sequentially through chambers 1a, 1b, 1c, 1d, and 1e. After fully exchanging with the purification materials in each chamber, they flow out of the top of tank 1. Because the lower chamber, chamber 1a, is the first to come into contact with the materials, the purification materials within it are also the most likely to expire given the same exchange time. Therefore, when the purification materials in chamber 1a expire, for example, when the exchange time is determined to be greater than a preset time, the valve assembly of the corresponding pipeline is opened, and the exchange device is activated to discharge the expired or nearly expired purification materials to the outside for regeneration. Simultaneously, the purification materials in chamber 1b are transported to chamber 1a through the corresponding pipeline. Furthermore, the purification material in cavity 1c is transported to cavity 1b via corresponding pipelines, and similarly, the purification material in cavity 1e is transported to cavity 1d via corresponding pipelines. Cavity 1e is filled with regenerable purification material or external purification material. The exchange time corresponding to each cavity, i.e., the purification time, is preferably 24-48 hours to achieve the replacement of the purification material in each layer of the cavity. Obviously, this purification time can also be selected as other time periods based on actual needs, and no specific limitation or elaboration is given here. In addition, as a preferred method, the exchange time corresponding to each layer of the cavity decreases from the material inflow end toward the material outflow end.

[0052] Specifically, the above-mentioned exchange device includes: a first exchange pipeline 300 connected to each first pipeline, a second exchange pipeline 700 connected to each second pipeline, and a delivery pipeline for connecting the first exchange pipeline 300 and the second exchange pipeline 700. Among them, a delivery pump 3 is provided on the delivery pipeline to realize fluid delivery between the first exchange pipeline 300 and the second exchange pipeline 700. Among them, the delivery pump 3 in this embodiment is preferably a diaphragm pump. In addition, the delivery pump can be selected according to actual needs to adopt a one-way delivery pump or a two-way delivery pump, etc., so as to realize the material in the cavity with a lower sorting, such as the material still in an effective state, after being extracted from the corresponding cavity, without being processed through the regeneration tower 5, and can flow into the cavity with a higher sorting, such as transporting the purification material in cavity 1c to cavity 1b through the corresponding pipeline.

[0053] Further preferably, the exchange device further includes: a first fluid channel 600 communicating with the first exchange line 300, a second fluid channel 400 communicating with the second exchange line 700, a first valve disposed on the first fluid channel 600, and a second valve disposed on the second fluid channel 400. The coordination of the corresponding pipelines and valves of the first fluid channel 600 and the second fluid channel 400 enables the drainage of spent purification material and the replenishment of new purification material, such as regenerated purification material.

[0054] Further preferably, in order to achieve rapid transfer and regeneration of purification materials during the process of continuously adding materials and purifying the materials, so as to achieve energy saving and cost saving, the above-mentioned exchange device also includes: a regeneration tower 5, which is used to regenerate the purification material adsorbed by the first pipeline and reaching a preset failure level, and transport the regenerated purification material to the corresponding cavity through the second pipeline, wherein one end of the regeneration tower 5 is connected to the first fluid channel 600, and the other end is connected to the second fluid channel 400.

[0055] Furthermore, preferably, to achieve automatic control of the valve assemblies and the exchange device, the adsorption column further includes a control device electrically connected to the first valve assembly, the second valve assembly, and the exchange device. Obviously, the valve assemblies and valves in this embodiment are preferably two-way manual valves and / or electrically controlled solenoid valves, and are not further described here. The control device can preferably be an industrial computer, a host computer, or a PLC controller, and is not further described here.

[0056] Further preferably, the adsorption column further includes: a trumpet cover 10 connected to the pipe mouth of each first pipeline. The trumpet cover 10 can enhance the adsorption force of the corresponding pipeline in the process of absorbing materials and purification materials, so as to enhance the transfer rate of the purification material. The trumpet cover in this embodiment can be connected to the pipe mouth in a fixed or rotating manner. In addition, it is worth mentioning that the trumpet cover in this embodiment can also adopt a structure connected to the pipe mouth of the second pipeline according to design requirements, and no further detailed description and explanation will be given here.

[0057] As a further preferred embodiment, the above-mentioned exchange device further includes: a buffer tank 6 connected to the regeneration tower 5 and used to store the separated materials, and a vacuum pump 7 connected to the buffer tank 6, and a reflux channel with two opposite ends connected to the buffer tank 6 and the tank body 1 respectively. Among them, there is a filter plate (not shown in the figure) in the regeneration tower 5; the vacuum pump 7 is used to extract the corresponding materials and purification materials into the regeneration tower 5 by vacuuming, and separate the materials such as Figure 5After flowing out in the direction C shown, the purification material remains within the regeneration tower 5 for regeneration. The suction cup formed by the speaker housing enhances the adsorption force at the corresponding pipe opening and enables multi-angle adsorption, thereby improving adsorption efficiency. Furthermore, the internal structure of the regeneration tower 5 in this embodiment can utilize existing technologies to process spent purification material, generate regenerated purification material, and separate the raw material from the purification material, etc., and will not be further described here.

[0058] Further preferably, the first fluid channel 600 serves as a regeneration discharge channel, while the second fluid channel 400 serves as a recovery feed channel. By opening the second valve 601 on the second fluid channel 400 and the valve assembly on the first pipeline corresponding to the corresponding cavity, and closing the valve assemblies and valves on other pathways, the delivery pump 3 is activated to transport the purified material in the cavity through the second fluid channel 400 to the regeneration tower 5 for recycling. By opening the first valve 601 on the first fluid channel 600 and closing the valve assemblies on other pathways, the delivery pump 3 is activated to transport the recovered, regenerated purified material to the cavity 1a or another cavity, thereby replenishing the purified material.

[0059] Further preferably, in order to meet actual design and extraction requirements, the pipe mouth of the above-mentioned first pipeline is located below the pipe mouth of the second pipeline, and the pipe mouth of the first pipeline penetrates into the interior of the cavity; the pipe mouth of the second pipeline is opened on the side wall of the tank body.

[0060] Furthermore, preferably, the partition members 11 are sequentially spaced from top to bottom; the material flows into the cavity from the lower end and flows out from the lower end of the cavity. Obviously, in this embodiment, the tank body 1 can also be arranged horizontally, with the partition members 11 sequentially spaced from left to right, to control the material to flow into the tank body 1 from the left end and out of the tank body 1 from the right end. This will not be described in detail here.

[0061] Further preferably, the purification material is resin.

[0062] In addition, the partition in this embodiment can also be a filter component such as a filter membrane that is used to isolate and purify materials and can filter the materials to be processed. No specific limitation is given here.

[0063] In order to illustrate the working principle of the adsorption column in this embodiment, a brief description is given below:

[0064] When the purification material in the cavity 1a fails, Figure 6As shown, the valves on the path formed by the first pipeline 201, the delivery pipeline 500, the second exchange pipeline 700, and the second fluid channel 400 can be opened, for example, the first valve component 101 and the second valve 401 are opened, and the delivery pump 3 is started, and the valve components and valves on other paths are closed at the same time, so that the failed or about to fail purification material is delivered to the regeneration tower 3 or the outside, and then the first valve component 202 and the second valve component 701 corresponding to the path formed by the first pipeline 201, the partial section of the first exchange 300, the delivery pipeline 500 and the second pipeline 700 are opened, and the valve components and valves on other paths are closed, so that the non-expired purification material in the cavity 1b is delivered to the cavity 1b for replenishment.

[0065] In sequence, the first valve assembly 202 and the second valve 402 can be opened, and the delivery pump 3 can be started, while the valve assemblies and valves on other paths are closed, so that the expired or about to expire purification material can be delivered from the cavity 1b to the regeneration tower 3 or the outside for regeneration treatment.

[0066] Similarly, by opening the first valve assembly 302 and the second valve 402, starting the delivery pump 3 and closing the valve assemblies and valves on other paths, the purified material in the cavity 1c can be delivered to the regeneration tower 3 or externally for regeneration treatment.

[0067] Similarly, by opening the first valve assembly 402 and the second valve 402 and starting the delivery pump 3, while closing the valve assemblies and valves on other paths, the purified material in the cavity 1d can be delivered to the regeneration tower 3 or outside for regeneration treatment.

[0068] Similarly, by opening the first valve assembly 502 and the second valve 402, starting the delivery pump 3, and closing the valve assemblies and valves on other paths, the purified material in the cavity 1e can be delivered to the regeneration tower 3 or outside for regeneration treatment.

[0069] Furthermore, after the purification material in the cavity 1a is discharged, Figure 7 As shown, by opening the first valve assembly 102 and the second valve assembly 901 on the path formed by the first pipeline 201, a partial section of the first exchange 300, the delivery pipeline 500 and the second pipeline 700, and closing the valve assemblies on other paths, the delivery pump 3 can be started to deliver the purification material in the cavity 1b to the cavity 1a for replenishment.

[0070] By analogy, when the purification material in cavity 1b is discharged, by opening the first valve assembly 103 and the second valve assembly 902 and closing the valve assemblies on other paths, the delivery pump 3 can be started to deliver the purification material in cavity 1c to cavity 1b for replenishment.

[0071] Similarly, when the purification material in cavity 1c is discharged, by opening the first valve assembly 104 and the second valve assembly 903 and closing the valve assemblies on other paths, the delivery pump 3 can be started to deliver the purification material in cavity 1d to cavity 1b for replenishment.

[0072] Similarly, when the purification material in cavity 1d is discharged, by opening the first valve assembly 105 and the second valve assembly 904 and closing the valve assemblies on other paths, the delivery pump 3 can be started to deliver the purification material in cavity 1e to cavity 1c for replenishment.

[0073] After the purification material in the cavity 1e is discharged, by opening the first valve 601 and closing the valve components on other paths, the delivery pump 3 can be started to deliver the obtained regenerated purification material cavity to the cavity 1a for replenishment.

[0074] Example 2

[0075] The second embodiment further provides an adsorption device. This embodiment is a further improvement of the first embodiment. The improvement is as follows: Figure 8 As shown, the first exchange pipeline in this embodiment is connected in parallel with each first pipeline through a tee.

[0076] With this arrangement, when the purification material in a certain cavity becomes ineffective, it passes through the corresponding pipelines in sequence. For example, the purification material in cavity 1a passes through the path formed by the first pipeline 201, the delivery pipeline 500, the second exchange pipeline 700, and the second fluid channel 400 in sequence, and the valves and delivery pump on the path are opened, while the valves on other paths are closed. This allows the ineffective or soon-to-be-ineffective purification material to be delivered to the regeneration tower 3 or the outside. Before the ineffective purification material is delivered to cavity 1a through other cavities, such as cavity 1b, through the path formed by the first pipeline 201, a partial section of the first exchange 300, the delivery pipeline 500, and the second pipeline 700, the delivery pump can be turned on and the delivery pipeline 500 can be pre-cleaned through cavity 1b to remove residual ineffective purification material, thereby minimizing the possibility that the ineffective purification material extracted from cavity 1a is mixed with the purification material extracted from cavity 1b and then flows into cavity 1a again.

[0077] Example 3

[0078] The third embodiment further provides an adsorption device, including: the adsorption column for semiconductor purification products in the first embodiment.

[0079] Specifically, the adsorption device in this embodiment includes at least two adsorption columns, which are arranged in series or in parallel.

[0080] Example 4

[0081] This embodiment further provides a method for processing a purified product for semiconductors, wherein the material is purified using the adsorption column for the purified product for semiconductors provided in the first or second embodiment above, and the method comprises the following steps:

[0082] Step S1: After the material flows into the cavity, the purification time of the material by the purification material in each cavity is obtained. The material can be introduced into the cavity of the tank body by nitrogen pressure delivery. The purification time can be determined based on the opening and closing time of each second valve assembly to input the material into the corresponding cavity, or based on the start time after the cavity is filled with material recorded by the user, etc.

[0083] Step S2: Determine the priority and expiration time based on the purification order of each cavity for the purification material. The expiration time corresponding to each layer of cavity increases from the material inflow end to the material outflow end. For example, the purification time of cavity 1a is 24 hours, the purification time of cavity 1b is 28 hours, the purification time of cavity 1c is 32 hours, the purification time of cavity 1d is 36 hours, and the purification time of cavity 1e is 48 hours. The above examples are only for illustrative purposes, and the purification time of each cavity may not be increasing or decreasing, but may be sorted across layers to facilitate the priority treatment of purification materials of different types or volumes. No specific limitation or explanation is given here. Obviously, the expiration time in this embodiment may also be limited to the initial cavity. For example, when the purification time of the purification material in cavity 1a is greater than or equal to 24 hours, it is determined that the purification material in cavity 1a has reached the expiration time, and the next step is entered.

[0084] Step S3: After the purification materials that have reached their expiration time are extracted and discharged from the corresponding cavities, the purification materials that have not reached their expiration time are extracted and released into the corresponding cavities of the next priority level in order of priority.

[0085] Through the above steps, it can be ensured that the purification materials in each cavity can be continuously extracted according to the order of priority and expiration time, and replenished with the purification materials in the next level cavity, so that the purification materials in each cavity can be updated and replaced to achieve maximum utilization of the purification materials in each cavity.

[0086] Specifically, the first valve assembly and the second valve assembly corresponding to each cavity are bound and numbered to obtain numbering information, and the control device binds and processes the numbering information according to the numbering information, as well as the preset extraction path and replenishment path to obtain a group numbering sequence. Then, after processing the group numbering sequence according to the order of priority, an opening signal or a closing signal is sent to the corresponding valve assembly to execute the opening and closing sequence of the valve assembly and valve involved in the above-mentioned embodiment 1, thereby realizing the release and replenishment of the purification material in the corresponding cavity.

[0087] Further preferably, the step of extracting and discharging the purification material that has reached its expiration time from the corresponding cavity and extracting the purification material that has not reached its expiration time and releasing them into the corresponding cavity of the next higher priority in order of priority, i.e., step S3, specifically includes the following steps:

[0088] Step S31: extracting the purification material that has reached its expiration time from the corresponding cavity and discharging it into a regeneration tower for regeneration to obtain regenerated purification material;

[0089] Step S32: After extracting the purification materials that have not reached the expiration time, release them into the corresponding cavities of the next priority level in order of priority;

[0090] Step S33: releasing the regenerated purification materials into the corresponding cavities of the previous priority level in reverse order of priority.

[0091] Through the above steps, it can be ensured that the purification materials in each cavity can be continuously extracted according to the order of priority and expiration time, and replenished by the purification materials in the cavity of the next level. After the purification materials in the cavity with the lowest priority level are extracted, they can be replenished with regenerated purification materials, so that the purification materials in each cavity can be cyclically updated and replaced to achieve maximum utilization of the purification materials in each cavity.

[0092] The present invention has been described in detail above with reference to the embodiments of the accompanying drawings. A person skilled in the art can make various modifications to the present invention based on the above description. Therefore, certain details in the embodiments should not be construed as limiting the present invention. The scope of protection of the present invention shall be determined by the scope defined in the appended claims.

Claims

1. An adsorption column, characterized in that: include: a tank body having a cavity; a partition member disposed in the cavity and used to separate the cavity into a plurality of independent cavities; wherein the partition member is provided with through holes for allowing material to flow, and each cavity is used to be filled with purification material; a first pipeline communicating with each cavity; a second pipeline communicating with each cavity; a first valve assembly disposed on each first pipeline; a second valve assembly disposed on each second pipeline; an exchange device connected to each of the first and second pipelines, for transferring the purified material extracted from the corresponding cavity to a different cavity, and for separating the extracted material from the purified material and then re-flowing it into the cavity; The material flows into one end of the tank structure, passes through each cavity in turn and is processed by the purification material before flowing out from the other end. The exchange device further includes: a regeneration tower, configured to regenerate the purification material adsorbed by the first pipeline and / or the second pipeline and reaching a preset failure level, and transport the regenerated purification material into the corresponding cavity through the first pipeline and / or the second pipeline, wherein one end of the regeneration tower is connected to the first fluid channel, and the other end is connected to the second fluid channel; The exchange device includes: a first exchange pipeline connected to each first pipeline, a second exchange pipeline connected to each second pipeline, and a delivery pipeline for connecting the first exchange pipeline and the second exchange pipeline; wherein a delivery pump is provided on the delivery pipeline to achieve fluid delivery between the first exchange pipeline and the second exchange pipeline; a control device electrically connected to the first valve assembly, the second valve assembly, and the exchange device, wherein the first valve assembly and the second valve assembly corresponding to each cavity are bound and numbered to obtain number information, and the control device is configured to bind and process the number information according to the number information and the preset extraction path and supplementary path to obtain a group number sequence, and then, after processing the group number sequence according to the order of priority, send an opening signal or a closing signal to the corresponding valve assembly to execute the opening and closing sequence of the valve assembly and the valve; The order of priority is determined according to the order in which each chamber purifies the purification material.

2. The adsorption column according to claim 1, characterized in that The exchange device further includes: a first fluid channel connected to the first exchange pipeline, a second fluid channel connected to the second exchange pipeline, a first valve provided on the first fluid channel, and a second valve provided on the second fluid channel.

3. The adsorption column according to claim 2, characterized in that The pipe opening of the first pipe is located below the pipe opening of the second pipe, and the pipe opening of the first pipe is deep into the cavity; The pipe opening of the second pipeline is opened on the side wall of the tank body.

4. The adsorption column according to claim 1, characterized in that Also includes: A speaker cover body connected to the pipe openings of each first pipeline and / or the second pipeline; wherein the speaker cover body can be rotatably or fixedly arranged on the pipe opening; The partition members are arranged in sequence from top to bottom; the material flows into and out of the lower end of the cavity; and the number of the cavities is at least three.

5. The adsorption column according to any one of claims 1 to 4, characterized in that: And / or the first fluid channel is a regeneration discharge channel; the second fluid channel is a recovery feed channel; the first pipeline is an extraction pipeline; the second pipeline is a release pipeline; the purification material is resin; and the delivery pump is a diaphragm pump.

6. The adsorption column according to any one of claims 1 to 4, characterized in that: Also includes: A buffer tank connected to the regeneration tower and used to store separated materials, a vacuum pump connected to the buffer tank, and a reflux channel connected to the buffer tank and the tank body at opposite ends respectively; wherein, a filter plate is provided in the regeneration tower; the vacuum pump is used to extract the corresponding materials and purification materials into the regeneration tower by vacuuming, and after separating the materials through the filter plate, the purification material remains in the regeneration tower for regeneration.

7. An adsorption device, characterized in that: include: The adsorption column according to any one of claims 1 to 6 is characterized in that there are two or more adsorption columns, which are arranged in series or in parallel.

8. A method for treating a purified product for semiconductors, characterized in that: The purification process is carried out by the adsorption column according to any one of claims 1 to 6, comprising the following steps: After the material flows into the cavity, the purification time of the material by the purification material in each cavity is obtained; Determining the priority and expiration time according to the purification order of each chamber for the purification material; After the purification materials that have reached their expiration time are extracted and discharged from the corresponding cavities, and after the purification materials that have not reached their expiration time are extracted, they are released into the corresponding cavities of the next priority level in order of priority.

9. The method for processing a purified product for semiconductors according to claim 8, characterized in that: The method comprises the following steps: extracting and discharging the purification materials that have reached the expiration time from the corresponding cavity, and extracting the purification materials that have not reached the expiration time, and releasing them into the corresponding cavity of the next priority in order of priority: The purification material that has reached its expiration time is extracted from the corresponding cavity and discharged into the regeneration tower for regeneration treatment to obtain regenerated purification material; After the purification materials that have not reached the expiration time are extracted, they are released into the corresponding cavities of the next priority level in order of priority; The regenerated purification materials are released into the corresponding cavity of the previous priority level in reverse order of priority.

Images