A method and laser etching equipment for improving laser etching accuracy

Abstract

This invention provides a method and equipment for improving the precision of laser etching, belonging to the field of battery technology. It solves the problems of low etching precision and small effective utilization area of ​​solar cells in existing laser etching equipment. The method includes: providing a solar cell; etching the solar cell using at least one galvanometer device of the laser etching equipment to obtain multiple sets of positioning points; controlling the rotation or translation of the worktable of the laser etching equipment according to the coordinates of the multiple sets of positioning points to perform splicing etching on the solar cell fixed on the worktable, and correcting the positional deviation of the solar cell. The technical solution of this invention has high etching precision, increases the effective etching area of ​​the solar cell, and improves the conversion efficiency of the solar cell.

Description

Technical Field

[0001] This invention relates to the field of battery technology, and in particular to a method and equipment for improving the precision of laser etching. Background Technology

[0002] Currently, the patterning process for perovskite solar cells, as described in patent documents (CN105576135B, CN113370654B), typically requires designing a patterned stencil before printing. This printing method suffers from low printing efficiency and significant loss of effective illuminated area in the module. Laser etching, as described in patent document (CN114335355A), offers rapid processing. Due to the high precision of lasers, dead zones in non-illuminated areas can be reduced to the micrometer level, significantly improving the effective utilization area of ​​the solar cell compared to printing. However, existing laser etching processes are only suitable for small-area module etching. In larger square meter-scale modules, the small processing area of ​​a single laser necessitates laser splicing etching using galvanometers. The increased number of splicing operations during large-area module production leads to a drastic decrease in etching precision, reducing photovoltaic solar cell module performance and lowering product yield. Furthermore, the splicing process also results in slower etching speeds, reducing production capacity. Summary of the Invention

[0003] This invention provides a method and equipment for improving the precision of laser etching, which solves the problem that existing laser etching equipment requires simultaneous control of two axial motors when etching thin films, resulting in low etching precision and a small effective utilization area of ​​the battery.

[0004] To solve the above-mentioned technical problems, the technical solution of the present invention is as follows:

[0005] A method for improving the precision of laser etching includes:

[0006] Provide one battery cell;

[0007] The battery cell is etched using at least one galvanometer device of a laser etching equipment to obtain multiple sets of positioning points;

[0008] The laser etching equipment's worktable is rotated or translated according to the coordinates of the multiple sets of positioning points to perform splicing etching on the battery cells fixed on the worktable and to correct the positional deviation of the battery cells.

[0009] Optionally, the solar cell includes:

[0010] substrate;

[0011] A conductive layer is formed on the substrate;

[0012] A dense layer is formed above the conductive layer;

[0013] A functional layer is formed above the dense layer;

[0014] A counter electrode layer is formed above the functional layer.

[0015] Optionally, in the plurality of sets of positioning points, a set of positioning points includes at least four positioning points, namely a first positioning point, a second positioning point, a third positioning point, and a fourth positioning point;

[0016] Wherein, the line connecting the first positioning point and the second positioning point is perpendicular to the line connecting the third positioning point and the fourth positioning point;

[0017] The coordinates of the first and second positioning points are used to control the rotation or translation of the worktable, and the coordinates of the third and fourth positioning points are used to control the etching position of the laser beam emitted by the galvanometer device.

[0018] Optionally, the battery cells fixed on the worktable are spliced ​​and etched, including:

[0019] The conductive layer and the dense layer are etched to obtain a first etched trench;

[0020] The dense layer and the functional layer are etched to obtain a second etched groove;

[0021] The dense layer, the functional layer, and the counter electrode layer are etched to obtain a third etched trench.

[0022] Optionally, the area etched on the solar cell each time by the laser etching equipment is determined by the focal length of the lens of the laser etching equipment, and the laser etching equipment achieves etching of the entire solar cell through multiple stitching etching processes.

[0023] A laser etching apparatus, comprising:

[0024] Base;

[0025] A worktable motor is provided on the first surface of the base;

[0026] A worktable movably connected to the worktable motor, the worktable rotating or translating along the first surface of the base under the drive of the worktable motor;

[0027] The bracket is fixedly connected to the base;

[0028] At least one of the galvanometer devices is provided on the top surface of the support near the base;

[0029] The galvanometer device is equipped with multiple axial motors, and a lens is fixedly connected to one end of the galvanometer device near the base.

[0030] The laser etching equipment etches multiple sets of positioning points on the battery cell; the worktable of the laser etching equipment is rotated or translated according to the coordinates of the multiple sets of positioning points to perform splicing etching on the battery cell fixed on the worktable to form splicing etching grooves.

[0031] Optionally, the stage motor drives the stage of the laser etching equipment to rotate or translate according to the coordinates of the multiple sets of positioning points. Each galvanometer device controls at most one axial motor to change the etching position of the laser beam, and performs splicing etching on the battery cells fixed on the stage to form splicing etching grooves.

[0032] Optionally, the conductive layer and the dense layer are etched to obtain a first etched trench;

[0033] The dense layer and the functional layer are etched to obtain a second etched groove;

[0034] The dense layer, the functional layer, and the counter electrode layer are etched to obtain a third etched trench.

[0035] Optionally, the first etching groove is parallel to the line connecting the first positioning point and the second positioning point, the first etching groove is adjacent to and parallel to the second etching groove, and the second etching groove is adjacent to and parallel to the third etching groove.

[0036] A solar cell, the solar cell being manufactured by the method described above, wherein the functional layer comprises:

[0037] A nanocrystalline layer having a mesoporous structure;

[0038] An insulating layer having a mesoporous structure, and the insulating layer being disposed on the side of the nanocrystalline layer away from the substrate;

[0039] A perovskite layer, which fills the mesoporous structure of the nanocrystalline layer and the insulating layer.

[0040] The technical solution of the present invention has at least the following effects:

[0041] This invention provides a method for improving the precision of laser etching, comprising: providing a solar cell; etching the solar cell using at least one galvanometer device of a laser etching apparatus to obtain multiple sets of positioning points; controlling the rotation or translation of the worktable of the laser etching apparatus according to the coordinates of the multiple sets of positioning points to perform splicing etching on the solar cell fixed on the worktable, and correcting the positional deviation of the solar cell. The technical solution of this invention has high etching precision, increases the effective etching area of ​​the solar cell, and improves the conversion efficiency of the solar cell. Attached Figure Description

[0042] Figure 1 This is a flowchart of a method for improving laser etching accuracy according to an embodiment of the present invention;

[0043] Figure 2 This is a schematic diagram of the structure of the laser etching equipment according to an embodiment of the present invention;

[0044] Figure 3 This is a schematic diagram of the galvanometer device structure of the laser etching apparatus according to an embodiment of the present invention;

[0045] Figure 4 This is a schematic diagram of the structure of a solar cell according to an embodiment of the present invention;

[0046] Figure 5 This is a schematic diagram of the stage movement of the laser etching equipment according to an embodiment of the present invention;

[0047] The components include: 1. base; 2. support; 3. galvanometer device; 4. lens; 5. worktable; 6. first worktable motor; 7. second worktable motor; 8. substrate; 9. conductive layer; 10. dense layer; 11. functional layer; 12. counter electrode layer; 13. first axial motor; 14. second axial motor; 15. laser beam; and 16. solar cell. Detailed Implementation

[0048] Exemplary embodiments of the invention will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this invention will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

[0049] like Figure 1 As shown, an embodiment of the present invention proposes a method for improving laser etching accuracy, comprising:

[0050] Step 101, provide a battery cell 16;

[0051] Step 102: The battery cell 16 is etched by at least one galvanometer device 3 of the laser etching equipment to obtain multiple sets of positioning points;

[0052] Step 103: Control the worktable 5 of the laser etching equipment to rotate or translate according to the coordinates of the multiple sets of positioning points, perform splicing etching on the battery cell 16 fixed on the worktable 5, and correct the positional deviation of the battery cell 16.

[0053] In this embodiment, the battery cell 16 includes a substrate 8, which can be made of glass. Glass has good light transmittance and dimensional stability, and can maintain stable performance in environments with large temperature variations. A multi-layer structure is provided on the top of the substrate 8 to form the battery cell 16. The battery cell 16 can be fixed on the stage 5 of the laser etching equipment by a clamp. By translating the stage 5, the battery cell 16 is transferred to the area below the galvanometer device 3 where etching can be performed. The laser etching equipment includes at least one galvanometer device 3, through which a laser beam 15 is emitted to etch multiple sets of positioning points on the battery cell 16. The CCD system of the laser etching equipment... The coordinates of multiple sets of positioning points are identified to obtain the coordinate values ​​of multiple sets of positioning points. Based on the coordinate values, the worktable 5 of the laser etching equipment is controlled to continue rotating or translating. Each galvanometer device 3 controls at most one axial motor to change the etching position of the laser beam 15, and performs splicing etching on the battery cell 16 fixed on the worktable 5. During etching, the positional deviation of the battery cell 16 can be compensated and corrected by the rotation or translation of the worktable 5, thereby improving the etching accuracy of the laser etching equipment. Through multiple small-area splicing etchings, the laser etching equipment can achieve high-precision etching of battery cells 16 at the square meter level.

[0054] The technical solution of this invention has high etching precision, increases the effective etching area of ​​solar cells, and improves the conversion efficiency of solar cells.

[0055] An optional embodiment of the present invention, such as Figure 4 As shown, in step 101, the battery cell 16 includes:

[0056] Step 1011, provide a substrate 8;

[0057] Step 1012: A conductive layer 9 is formed on the substrate 8;

[0058] Step 1013: A dense layer 10 is formed over the conductive layer 9;

[0059] Step 1014: Form a functional layer 11 above the dense layer 10;

[0060] Step 1015 forms a counter electrode layer 12 above the functional layer 11.

[0061] In this embodiment, a conductive layer 9 is formed on the substrate 8; a dense layer 10 is formed above the conductive layer 9; a functional layer 11 is formed above the dense layer 10; and a counter electrode layer 12 is formed above the functional layer 11. The substrate, as the basic structure of the battery, provides mechanical support and also supports and protects other components. The conductive layer primarily collects current, guiding it from the positive and negative electrodes to an external circuit. The performance of the conductive layer directly affects the battery's conductivity. The dense layer acts as a barrier, preventing direct contact between the electrolyte and the functional layer, reducing the risk of short circuits. The functional layer contains active materials capable of electrochemical reactions, thereby storing and releasing energy; these typically include positive and negative electrode materials such as graphite and metal oxides. The electrode layer is responsible for the electrochemical reactions. A potential difference exists between the positive and negative electrodes, generating current when connected to an external circuit.

[0062] In an optional embodiment of the present invention, step 102, when etching the battery cell 16 using at least one galvanometer device 3 of a laser etching apparatus to obtain multiple sets of positioning points, includes:

[0063] One set of positioning points includes at least four positioning points, namely, the first positioning point, the second positioning point, the third positioning point, and the fourth positioning point;

[0064] The line connecting the first positioning point and the second positioning point is perpendicular to the line connecting the third positioning point and the fourth positioning point.

[0065] In this embodiment, the laser etching equipment emits a laser beam 15 through the galvanometer device 3 to etch multiple sets of positioning points on the surface of the battery cell 16. By determining and referring to the coordinates of the positioning points, the laser etching equipment can correct the emission direction of the laser beam 15 in real time during etching, thereby improving the etching accuracy. Each set of positioning points includes at least four positioning points, namely a first positioning point, a second positioning point, a third positioning point, and a fourth positioning point. The line connecting the first positioning point and the second positioning point is perpendicular to the line connecting the third positioning point and the fourth positioning point.

[0066] In an optional embodiment of the present invention, in step 103, when the worktable 5 of the laser etching equipment is rotated or translated according to the coordinates of the multiple sets of positioning points to perform splicing etching on the battery cell 16 fixed on the worktable 5 to form a splicing etching groove, the method includes:

[0067] Step 1031: Etch the conductive layer 9 and the dense layer 10 to obtain the first etched trench;

[0068] Step 1032: Etch the dense layer 10 and the functional layer 11 to obtain a second etched groove;

[0069] Step 1033: Etch the dense layer 10, the functional layer 11 and the counter electrode layer 12 to obtain a third etched trench;

[0070] The second etching trench penetrates the functional layer 11 and the dense layer 10; the first etching trench is parallel to the line connecting the first positioning point and the second positioning point, and the first etching trench is adjacent to and parallel to the second etching trench; the second etching trench is adjacent to and parallel to the third etching trench.

[0071] In this embodiment, the first etching groove is parallel to the line connecting the first positioning point and the second positioning point, and the first etching groove and the second etching groove are adjacent to each other and parallel to each other; the second etching groove and the third etching groove are adjacent to each other and parallel to each other; the second etching groove penetrates the functional layer 11 and the dense layer 10; the etching groove can increase the surface area of ​​the solar cell, thereby enhancing the photovoltaic effect. The larger the surface area of ​​the solar cell, the stronger its ability to absorb sunlight, and the greater the current generated.

[0072] In an optional embodiment of the present invention, in step 103, when controlling the rotation or translation of the worktable 5 of the laser etching equipment according to the coordinates of the multiple sets of positioning points to perform splicing etching on the battery cells 16 fixed on the worktable 5 to form splicing etching grooves, the method further includes:

[0073] The area etched on the battery cell 16 by the laser etching equipment each time is determined by the focal length of the lens 4 of the laser etching equipment. The laser etching equipment achieves etching of the entire battery cell 16 through multiple stitching etching processes.

[0074] In this embodiment, the area etched by the laser etching equipment on the battery cell 16 each time is determined by the focal length of the lens 4 of the laser etching equipment. The laser etching equipment etches within this area each time; beyond this area, the lens 4 cannot accurately focus the laser beam 15, thus failing to complete the etching operation. Through splicing etching, the laser etching equipment can achieve etching of large-format battery cells 16. The specific implementation process is as follows: the battery cell 16 can be fixed on the worktable 5 of the laser etching equipment by a clamp; the worktable 5 is moved to the area below the galvanometer device 3 where etching can be performed. The laser etching equipment includes at least one galvanometer device 3, through which a laser beam 15 is emitted to etch multiple sets of positioning points on the battery cell 16; the CCD system of the laser etching equipment identifies the coordinates of the multiple sets of positioning points, obtains the coordinate values ​​of the multiple sets of positioning points, and controls the worktable 5 of the laser etching equipment to continue etching based on the coordinate values. The device continues to rotate or translate to perform one etching operation on the battery cell 16 fixed on the worktable 5, forming an etching groove on the battery cell 16. After completing one etching operation on the battery cell 16, the area to be etched on the battery cell 16 is transferred to the etching range of the laser etching equipment by translating the worktable 5. The area to be etched on the battery cell 16 is then etched, and the etching grooves at the junction of the areas are spliced ​​and etched together, so that the etching grooves in the two areas are connected, thereby achieving large-area etching of the battery cell 16.

[0075] In an optional embodiment of the present invention, in step 103, when controlling the rotation or translation of the worktable 5 of the laser etching equipment according to the coordinates of the multiple sets of positioning points to perform splicing etching on the battery cells 16 fixed on the worktable 5 to form splicing etching grooves, the method further includes:

[0076] Each of the galvanometer devices 3 in the laser etching equipment controls at most one axial motor to change the etching position of the laser beam 15 and etch the battery cell 16.

[0077] In this embodiment, the galvanometer device 3 of the laser etching equipment includes two axial motors, namely a first axial motor 13 and a second axial motor 14. Adjusting the rotation angle of the two axial motors can change the emission direction of the laser beam 15. By controlling the translation and rotation of the worktable 5, the position of the solar cell 16 can be adjusted, so that each galvanometer device 3 of the laser etching equipment can control at most one axial motor to perform etching. At the same time, controlling the translation and rotation of the worktable 5 can also correct the positional deviation of the solar cell 16 in real time during the laser etching process, thereby improving the etching accuracy, improving the splicing accuracy of the etching grooves in the adjacent etching areas, increasing the effective utilization area of ​​the solar cell, and improving the photovoltaic conversion efficiency.

[0078] An embodiment of the present invention provides a laser etching apparatus, such as... Figure 2 , Figure 3 and Figure 5 As shown, it includes:

[0079] A base 1; a worktable motor is provided on the first surface of the base 1; a worktable 5 is movably connected to the worktable motor, and the worktable 5 rotates or translates along the first surface of the base 1 under the drive of the worktable motor; a bracket 2 is fixedly connected to the base 1; at least one galvanometer device 3 is provided on the top surface of the bracket 2 near the base 1; a lens 4 is fixedly connected to one end of the galvanometer device 3 near the base 1.

[0080] In this embodiment, the laser etching equipment includes a plate-shaped base 1; a stage motor is provided on the first surface of the base 1, the stage motor includes two linear motors and one rotary motor, wherein the two linear motors are a first stage motor 6 and a second stage motor 7, used to drive the stage 5 to translate along the first surface of the base 1, and the rotary motor is used to drive the stage 5 to rotate around its central axis; the stage 5 is movably connected to the stage motor, and the stage 5 rotates or translates along the first surface of the base 1 under the drive of the stage motor, and the position of the battery cell 16 can be adjusted in real time by the rotation or translation of the stage 5; a bracket 2 is fixedly connected to the base 1; at least one galvanometer device 3 is provided on the top surface of the bracket 2 near the base 1; a lens 4 is fixedly connected to one end of the galvanometer device 3 near the base 1; each galvanometer device 3 includes two axial motors, namely a first axial motor 13 and a second axial motor 14, and a scanning lens is fixedly connected to the end of each of the two axial motors, and the laser beam 15 is reflected by the two scanning lenses and then shot towards the lens 4; the lens 4 is threaded. The laser beam 15, focused by the lens 4, is directed onto the solar cell 16 after being connected and fixed to one end of the galvanometer device 3 near the base 1. In use, the solar cell 16 is first fixed to the surface of the worktable 5. The first worktable motor 6 and the second worktable motor 7 drive the worktable 5 to translate along the first surface of the base 1, while the rotary motor drives the worktable 5 to rotate around its central axis, moving the solar cell 16 to the position to be etched. The first axial motor 13 and the second axial motor 14 in the galvanometer device 3 rotate to deflect the scanning lens, thereby adjusting the reflection direction of the laser beam 15. The laser beam 15, focused by the lens 4, is directed onto the solar cell 16 for etching. By controlling the translation and rotation of the worktable 5, the position of the solar cell 16 can be adjusted at any time, allowing the device to perform etching with a maximum of one axial motor. Simultaneously, controlling the translation and rotation of the worktable 5 can also correct the positional deviation of the solar cell 16 during etching, thereby improving etching accuracy, resulting in better splicing of etching grooves in adjacent etching areas, increasing the effective utilization area of ​​the solar cell, and improving photovoltaic conversion efficiency.

[0081] The above description represents the preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A method for improving the precision of laser etching, characterized in that, include: Provide a battery cell (16); The battery cell (16) is etched by at least one galvanometer device (3) of the laser etching equipment to obtain multiple sets of positioning points; The CCD system of the laser etching equipment identifies the coordinates of multiple sets of positioning points to obtain the coordinates of multiple sets of positioning points; The worktable (5) of the laser etching equipment is rotated or translated according to the coordinates of the multiple sets of positioning points. Each galvanometer device (3) controls at most one axial motor to change the etching position of the laser beam (15), splicing and etching the battery cell (16) fixed on the worktable (5), and correcting the position deviation of the battery cell (16). Among the multiple sets of positioning points, each set of positioning points includes at least four positioning points, namely, the first positioning point, the second positioning point, the third positioning point, and the fourth positioning point. The line connecting the first positioning point and the second positioning point is perpendicular to the line connecting the third positioning point and the fourth positioning point. The coordinates of the first positioning point and the second positioning point are used to control the rotation or translation of the worktable (5), and the coordinates of the third positioning point and the fourth positioning point are used to control the etching position of the laser beam (15) of the galvanometer device (3). The area etched by the laser etching device on the battery cell (16) each time is determined by the focal length of the lens (4) of the laser etching device. The laser etching device etches the entire battery cell (16) by multiple splicing etching operations.

2. The method for improving laser etching accuracy according to claim 1, characterized in that, The battery cell (16) includes: base(8); A conductive layer (9) is formed on the substrate (8); A dense layer (10) is formed above the conductive layer (9); A functional layer (11) is formed above the dense layer (10); An electrode layer (12) is formed above the functional layer (11).

3. The method for improving laser etching accuracy according to claim 2, characterized in that, The splicing etching of the battery cell (16) fixed on the worktable (5) includes: The conductive layer (9) and the dense layer (10) are etched to obtain a first etched trench; The dense layer (10) and the functional layer (11) are etched to obtain a second etched groove; The dense layer (10), the functional layer (11) and the counter electrode layer (12) are etched to obtain a third etched groove.

4. The method for improving laser etching accuracy according to claim 3, characterized in that, The first etching groove is parallel to the line connecting the first positioning point and the second positioning point. The first etching groove is adjacent to and parallel to the second etching groove. The second etching groove is adjacent to and parallel to the third etching groove.

5. A laser etching apparatus, characterized in that, The method for improving laser etching accuracy according to any one of claims 1 to 3, wherein the laser etching apparatus comprises: Base (1); A worktable motor is provided on the first surface of the base (1); The worktable (5) is movably connected to the worktable motor, and the worktable (5) rotates or translates along the first surface of the base (1) under the drive of the worktable motor. The bracket (2) is fixedly connected to the base (1); At least one galvanometer device (3) is provided on the top surface of the support (2) near the base (1). The galvanometer device (3) is equipped with multiple axial motors, and a lens (4) is fixedly connected to one end of the galvanometer device (3) near the base (1). The laser etching equipment etches multiple sets of positioning points on the battery cell (16); the worktable (5) of the laser etching equipment is rotated or translated according to the coordinates of the multiple sets of positioning points, and the battery cell (16) fixed on the worktable (5) is spliced ​​and etched to form a spliced ​​etching groove.

6. The laser etching apparatus according to claim 5, characterized in that, The stage motor drives the stage (5) of the laser etching equipment to rotate or translate according to the coordinates of the multiple sets of positioning points. Each galvanometer device (3) controls at most one axial motor to change the etching position of the laser beam (15) and perform splicing etching on the battery cell (16) fixed on the stage (5) to form a splicing etching groove.

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