A temperature control system and a temperature control method

Abstract

The present invention discloses a temperature control system and a temperature control method, relating to the field of semiconductor technology. The temperature control system includes a coolant pipeline, a process water pipeline and a refrigerant pipeline. The coolant pipeline includes a coolant return pipe and a coolant supply pipe. A first heat exchanger and a second heat exchanger are sequentially arranged on the coolant return pipe. The first heat exchanger is connected to the process water pipeline, and the second heat exchanger is connected to the refrigerant pipeline. Both the first heat exchanger and the second heat exchanger are used for cooling the coolant. A third heat exchanger and a heating device are sequentially arranged on the coolant supply pipe. The third heat exchanger is connected to the refrigerant pipeline and is arranged in series with the second heat exchanger. The third heat exchanger is used for preheating the coolant. The temperature control system provided by the present invention can achieve low-energy consumption temperature regulation of the coolant and improve the temperature regulation accuracy.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular, to a temperature control system and a temperature control method. Background Art

[0002] In the process of semiconductor wafer manufacturing, a large amount of heat is generated in various processes including etching, and it is necessary to timely remove the heat through a coolant to avoid adverse effects on the wafer.

[0003] For the accuracy requirement of the coolant temperature is extremely high. Currently, on the market, the combination of a refrigerant system and an electric heating is usually adopted to realize the regulation of the coolant temperature. The refrigerant system is used to cool the high-temperature coolant output by the etching machine, and the heating device is used to heat the coolant supplied to the etching machine to the target temperature.

[0004] In practical applications, on the one hand, the load of the refrigerant system is large and the energy consumption is too high. On the other hand, the heating accuracy of heating the coolant to the target temperature is poor, which affects the process effect. Summary of the Invention

[0005] The purpose of the present invention is to provide a temperature control system, which can realize the low-energy consumption temperature regulation of the coolant and can improve the temperature regulation accuracy.

[0006] Another purpose of the present invention is to provide a temperature control method, which can realize the low-energy consumption temperature regulation of the coolant and can improve the temperature regulation accuracy.

[0007] An embodiment of the present invention provides a technical solution:

[0008] A temperature control system includes a coolant pipeline, a process water pipeline and a refrigerant pipeline. The coolant pipeline includes a coolant return pipe and a coolant supply pipe;

[0009] A first heat exchanger and a second heat exchanger are sequentially arranged on the coolant return pipe. The first heat exchanger is connected to the process water pipeline, and the second heat exchanger is connected to the refrigerant pipeline. Both the first heat exchanger and the second heat exchanger are used to cool the coolant;

[0010] A third heat exchanger and a heating device are sequentially arranged on the coolant supply pipe. The third heat exchanger is connected to the refrigerant pipeline and is serially arranged with the second heat exchanger. The third heat exchanger is used to preheat the coolant.

[0011] The temperature control system provided in this embodiment introduces a process water pipeline, enabling the workshop process cooling water to pre-cool the coolant before the refrigerant pipeline, thereby reducing the load on the refrigerant pipeline and energy consumption. Moreover, the third heat exchanger pre-heats the coolant before the heating device, reducing the load on the heating device while improving the temperature accuracy of the coolant. It can be seen that the temperature control system provided in this embodiment realizes two-stage cooling during the reflux process of high-temperature coolant and two-stage heating during the output process of low-temperature coolant, and can significantly improve the temperature control accuracy of the coolant.

[0012] In an alternative embodiment, the refrigerant pipeline includes a refrigerant main pipeline, a compressor, a fourth heat exchanger, and an expansion valve. The compressor, the fourth heat exchanger, the expansion valve, and the second heat exchanger are sequentially arranged on the refrigerant main pipeline, and the fourth heat exchanger is connected to the process water pipeline.

[0013] The fourth heat exchanger, as the condenser in the refrigerant main pipeline, exchanges heat with the process cooling water input from the process water pipeline. The refrigerant output from the fourth heat exchanger is cooled to a low temperature state at the expansion valve, and the refrigerant in the low temperature state cools the coolant at the second heat exchanger and then returns to the compressor, thus completing a temperature adjustment cycle.

[0014] In an alternative embodiment, the refrigerant pipeline further includes a first branch pipeline. One end of the first branch pipeline is connected to the output end of the compressor, and the other end is connected to the refrigerant input end of the third heat exchanger. The refrigerant output end of the third heat exchanger is connected to the input end of the expansion valve.

[0015] For the refrigerant pipeline provided in this embodiment, the compressor, the third heat exchanger, the expansion valve, and the second heat exchanger form a refrigerant circulation flow path; the compressor, the fourth heat exchanger, the expansion valve, and the second heat exchanger form another refrigerant circulation flow path.

[0016] In practical applications, by guiding the refrigerant to flow in any one or both of the aforementioned two refrigerant circulation flow paths, it is possible to adjust the temperature and flow rate of the refrigerant flowing into the second heat exchanger and the third heat exchanger, thereby meeting the precise temperature adjustment requirements under different working conditions.

[0017] In an alternative embodiment, the refrigerant pipeline further includes a second branch pipeline. One end of the second branch pipeline is connected to the refrigerant output end of the fourth heat exchanger, and the other end of the second branch pipeline is connected to the refrigerant input end of the third heat exchanger.

[0018] The refrigerant pipeline provided by this embodiment mode, the compressor, the third heat exchanger, the expansion valve and the second heat exchanger form a refrigerant circulation flow path; the compressor, the fourth heat exchanger, the expansion valve and the second heat exchanger form another refrigerant circulation flow path; the compressor, the fourth heat exchanger, the third heat exchanger, the expansion valve and the second heat exchanger form yet another refrigerant circulation flow path.

[0019] In practical applications, by guiding the refrigerant to flow simultaneously in any one or more of the aforementioned three refrigerant circulation flow paths, it is possible to adjust the temperature and flow rate of the refrigerant flowing into the second heat exchanger and the third heat exchanger, so as to meet the precise temperature adjustment requirements under different working conditions.

[0020] In an alternative embodiment mode, a liquid storage tank is further provided on the refrigerant pipeline. The liquid storage tank is arranged on the main refrigerant pipeline, and the output end of the liquid storage tank is communicated with the input end of the expansion valve.

[0021] The liquid storage tank can adjust the refrigerant flow rate to adapt to different working conditions.

[0022] In an alternative embodiment mode, a coolant circulation pump is further provided on the coolant return pipe or the coolant supply pipe.

[0023] The coolant circulation pump provides power for the circulating flow of the coolant.

[0024] An embodiment of the present invention further provides a temperature control method, which is applied to a temperature control system. The temperature control system includes a coolant pipeline, a process water pipeline and a refrigerant pipeline. The coolant pipeline includes a coolant return pipe and a coolant supply pipe; a first heat exchanger and a second heat exchanger are sequentially arranged on the coolant return pipe. The first heat exchanger is connected to the process water pipeline, and the second heat exchanger is connected to the refrigerant pipeline; a third heat exchanger and a heating device are sequentially arranged on the coolant supply pipe. The third heat exchanger is connected to the refrigerant pipeline and is arranged in series with the second heat exchanger; the temperature control method includes:

[0025] Adjust the flow rate and / or temperature of the process cooling water input into the first heat exchanger by the process water pipeline to perform the first cooling of the coolant;

[0026] Adjust the flow rate and / or temperature of the refrigerant input into the second heat exchanger by the refrigerant pipeline to perform the secondary cooling of the coolant;

[0027] Adjust the flow rate and / or temperature of the refrigerant input into the third heat exchanger by the refrigerant pipeline to preheat the coolant;

[0028] Adjust the power of the heating device so that the heating device heats the coolant to the target temperature.

[0029] The temperature control method provided in this embodiment introduces a process water pipeline, enabling the workshop process cooling water to pre-cool the coolant before the refrigerant pipeline, thereby reducing the load on the refrigerant pipeline and energy consumption. Moreover, the third heat exchanger pre-heats the coolant before the heating device, reducing the load on the heating device while improving the temperature accuracy of the coolant. It can be seen that the temperature control system provided in this embodiment realizes two-stage cooling during the reflux process of the high-temperature coolant and two-stage heating during the output process of the low-temperature coolant, and can significantly improve the temperature control accuracy of the coolant.

[0030] In an alternative embodiment, the refrigerant pipeline includes a refrigerant main pipeline, a compressor, an expansion valve, a first branch pipeline, the third heat exchanger, and a fourth heat exchanger. The compressor, the fourth heat exchanger, the expansion valve, and the second heat exchanger are sequentially arranged on the refrigerant main pipeline, and the fourth heat exchanger is connected to the process water pipeline; one end of the first branch pipeline is communicated with the output end of the compressor, and the other end is connected to the refrigerant input end of the third heat exchanger. The refrigerant output end of the third heat exchanger is communicated with the input end of the expansion valve; the temperature control method further includes at least one of the following features:

[0031] (1) The step of adjusting the flow rate and / or temperature of the refrigerant input into the second heat exchanger by the refrigerant pipeline includes:

[0032] Adjusting the flow rate of the refrigerant diverted from the refrigerant main pipeline into the first branch pipeline, and / or adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger by the process water pipeline;

[0033] (2) The step of adjusting the flow rate and / or temperature of the refrigerant input into the third heat exchanger by the refrigerant pipeline includes:

[0034] Adjusting the flow rate of the refrigerant diverted from the refrigerant main pipeline into the first branch pipeline.

[0035] Since the second heat exchanger is on the refrigerant main pipeline and is connected in series with the third heat exchanger and the fourth heat exchanger respectively, therefore, by adjusting the flow rate of the refrigerant diverted from the refrigerant main pipeline into the first branch pipeline, or adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger by the process water pipeline, the temperature of the refrigerant in the refrigerant main pipeline can be adjusted, so as to achieve the purpose of adjusting the temperature of the refrigerant input into the second heat exchanger. And in the case of only adjusting the flow rate of the refrigerant diverted from the refrigerant main pipeline into the first branch pipeline, the adjustment of the refrigerant flow rate flowing into the third heat exchanger can be realized.

[0036] In an alternative embodiment, the refrigerant pipeline includes a main refrigerant pipeline, a compressor, an expansion valve, the third heat exchanger, the fourth heat exchanger, and a second branch pipeline. The compressor, the fourth heat exchanger, the expansion valve, and the second heat exchanger are sequentially arranged on the main refrigerant pipeline, and the fourth heat exchanger is connected to the process water pipeline; one end of the second branch pipeline is communicated with the refrigerant output end of the fourth heat exchanger, the other end of the second branch pipeline is communicated with the refrigerant input end of the third heat exchanger, and the refrigerant output end of the third heat exchanger is communicated with the input end of the expansion valve; the temperature control method further includes at least one of the following features:

[0037] (1) The step of adjusting the flow rate and / or temperature of the refrigerant input into the second heat exchanger in the refrigerant pipeline includes:

[0038] Adjusting the flow rate of the refrigerant diverted from the main refrigerant pipeline into the second branch pipeline, and / or adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger in the process water pipeline;

[0039] (2) The step of adjusting the flow rate and / or temperature of the refrigerant input into the third heat exchanger in the refrigerant pipeline includes:

[0040] Adjusting the flow rate of the refrigerant diverted from the main refrigerant pipeline into the second branch pipeline;

[0041] (3) The step of adjusting the flow rate and temperature of the refrigerant input into the third heat exchanger in the refrigerant pipeline includes:

[0042] Adjusting the flow rate of the refrigerant diverted from the main refrigerant pipeline into the second branch pipeline, and adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger in the process water pipeline.

[0043] Since the second heat exchanger is on the main refrigerant pipeline and is connected in series with the third heat exchanger and the fourth heat exchanger respectively, therefore, by adjusting the flow rate of the refrigerant diverted from the main refrigerant pipeline into the second branch pipeline, or adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger in the process water pipeline, the temperature of the refrigerant in the main refrigerant pipeline can be adjusted, so as to achieve the purpose of adjusting the temperature of the refrigerant input into the second heat exchanger. In the case of only adjusting the flow rate of the refrigerant diverted from the main refrigerant pipeline into the second branch pipeline, the adjustment of the refrigerant flow rate flowing into the third heat exchanger can be realized; in the case of simultaneously adjusting the flow rate of the refrigerant diverted from the main refrigerant pipeline into the second branch pipeline and adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger in the process water pipeline, the adjustment of the refrigerant flow rate and temperature flowing into the third heat exchanger can be realized.

[0044] In an alternative embodiment, the refrigerant pipeline includes a main refrigerant pipeline, a compressor, an expansion valve, a fourth heat exchanger, a first branch pipeline, the third heat exchanger, and a second branch pipeline. The compressor, the fourth heat exchanger, the expansion valve, and the second heat exchanger are sequentially arranged on the main refrigerant pipeline, and the fourth heat exchanger is connected to the process water pipeline. One end of the first branch pipeline is communicated with the output end of the compressor, and the other end is communicated with the refrigerant input end of the third heat exchanger. The refrigerant output end of the third heat exchanger is communicated with the input end of the expansion valve. One end of the second branch pipeline is communicated with the refrigerant output end of the fourth heat exchanger, and the other end of the second branch pipeline is communicated with the refrigerant input end of the third heat exchanger. The temperature control method further includes at least one of the following features:

[0045] (1) The step of adjusting the flow rate and / or temperature of the refrigerant input into the second heat exchanger in the refrigerant pipeline includes:

[0046] Adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger in the process water pipeline, and / or, adjusting the flow rate of the refrigerant diverted from the main refrigerant pipeline into the first branch pipeline, and / or, adjusting the flow rate of the refrigerant diverted from the main refrigerant pipeline into the second branch pipeline;

[0047] (2) The step of adjusting the flow rate and / or temperature of the refrigerant input into the third heat exchanger in the refrigerant pipeline includes:

[0048] Adjusting the flow rate of the refrigerant diverted from the main refrigerant pipeline into the first branch pipeline, and / or, adjusting the flow rate of the refrigerant diverted from the main refrigerant pipeline into the second branch pipeline;

[0049] (3) The step of adjusting the flow rate and temperature of the refrigerant input into the third heat exchanger in the refrigerant pipeline includes: adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger in the process water pipeline, and adjusting the flow rate of the refrigerant diverted from the main refrigerant pipeline into the first branch pipeline;

[0050] (4) The step of adjusting the flow rate and temperature of the refrigerant input into the third heat exchanger in the refrigerant pipeline includes: adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger in the process water pipeline, and adjusting the flow rate of the refrigerant diverted from the main refrigerant pipeline into the second branch pipeline;

[0051] (5) The steps of adjusting the flow rate and temperature of the refrigerant input into the third heat exchanger through the refrigerant pipeline include: adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger through the process water pipeline, adjusting the flow rate of the refrigerant branched from the main refrigerant pipeline into the first branch pipeline, and adjusting the flow rate of the refrigerant branched from the main refrigerant pipeline into the second branch pipeline.

[0052] In practical applications, by adjusting the flow rate of the refrigerant flowing through the first branch pipeline or the second branch pipeline, or by adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger through the process water pipeline, the heat exchange situation at the third heat exchanger and the temperature of the refrigerant in the main refrigerant pipeline can be changed, so as to realize the adjustment of the temperature of the refrigerant flowing into the second heat exchanger. Due to the existence of the first branch pipeline and the second branch pipeline, the third heat exchanger and the fourth heat exchanger can be connected in series or in parallel. Therefore, when only adjusting the flow rate of the refrigerant flowing into the first branch pipeline or the second branch pipeline, the adjustment of the flow rate of the refrigerant flowing into the third heat exchanger can be realized; on this basis, combined with the adjustment of the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger through the process water pipeline, the adjustment of the flow rate and temperature of the refrigerant flowing into the third heat exchanger can be realized, so as to meet the precise temperature control requirements under different working conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0053] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required in the embodiments. It should be understood that the following drawings only show some embodiments of the present invention, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.

[0054] Figure 1 Structural schematic diagram of the temperature control system provided by the first embodiment of the present invention;

[0055] Figure 2 A flowchart of a temperature control method provided by the first embodiment of the present invention;

[0056] Figure 3 Shown as Figure 2 A sub-step flowchart of step S102 in;

[0057] Figure 4 Shown as Figure 2 A sub-step flowchart of step S103 in;

[0058] Figure 5 Structural schematic diagram of the temperature control system provided by the second embodiment of the present invention;

[0059] Figure 6Flow chart of a sub-step of step S102 in the temperature control method provided for the second embodiment of the present invention;

[0060] Figure 7 Flow chart of a sub-step of step S103 in the temperature control method provided for the second embodiment of the present invention;

[0061] Figure 8 Schematic structural diagram of the temperature control system provided for the third embodiment of the present invention;

[0062] Figure 9 Flow chart of a sub-step of step S102 in the temperature control method provided for the third embodiment of the present invention;

[0063] Figure 10 Flow chart of a sub-step of step S103 in the temperature control method provided for the third embodiment of the present invention.

[0064] Icon: 100 - Temperature control system; 110 - Coolant pipeline; 111 - Coolant return pipe; 112 - Coolant tank; 113 - Coolant supply pipe; 114 - Coolant circulation pump; 120 - Process water pipeline; 130 - Refrigerant pipeline; 131 - Compressor; 132 - Expansion valve; 133 - Liquid storage tank; 134 - Eyepiece; 135 - Refrigerant main pipeline; 136 - First branch pipeline; 137 - Second branch pipeline; 140 - First heat exchanger; 150 - Second heat exchanger; 160 - Heating device; 170 - Third heat exchanger; 171 - Third control valve; 180 - Fourth heat exchanger; 181 - Fourth control valve; 190 - Three-way valve. Detailed implementation manners

[0065] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. The components of the embodiments of the present invention usually described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0066] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed present invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0067] It should be noted that: like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0068] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "inner", "outer", "left", "right", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the inventive product is customarily placed during use, or the orientation or positional relationship commonly understood by those skilled in the art. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the present invention.

[0069] In addition, the terms "first", "second", etc. are only used for distinguishing descriptions and should not be construed as indicating or implying relative importance.

[0070] In the description of the present invention, it should also be noted that unless otherwise clearly defined and limited, terms such as "set", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0071] The specific embodiments of the present invention will be described in detail below with reference to the drawings.

[0072] Embodiment

[0073] Please refer to Figure 1 , Figure 1 which shows a schematic structural diagram of a temperature control system 100 provided by the first embodiment of the present invention.

[0074] The temperature control system 100 provided in this embodiment includes a coolant pipeline 110, a process water pipeline 120, and a refrigerant pipeline 130. Along the flow direction of the coolant, a first heat exchanger 140, a second heat exchanger 150, a third heat exchanger 170, and a heating device 160 are sequentially arranged on the coolant pipeline 110. The first heat exchanger 140 is connected to the process water pipeline 120, and the second heat exchanger 150 and the third heat exchanger 170 are connected in series to the refrigerant pipeline 130.

[0075] It should be noted that in this embodiment, the second heat exchanger 150 acts as an evaporator in the refrigerant pipeline 130. In other words, the low-temperature refrigerant cools the coolant at the second heat exchanger 150. The third heat exchanger 170 selectively exchanges heat between the high-temperature refrigerant and the low-temperature coolant, that is, the high-temperature refrigerant selectively flows to the third heat exchanger 170 to heat the coolant.

[0076] The temperature control system 100 provided in this embodiment introduces the process water pipeline 120 in the workshop and makes full use of the cooling efficiency of the process cooling water. Before the refrigerant pipeline 130, the coolant is cooled by the first heat exchanger 140, so that the load of the refrigerant pipeline 130 is reduced, achieving the effect of reducing energy consumption.

[0077] Moreover, before the heating device 160, the refrigerant pipeline 130 also selectively heats the coolant through the third heat exchanger 170, which can reduce the load of the heating device 160 and achieve hierarchical temperature adjustment of the coolant, significantly improving the temperature adjustment accuracy of the coolant, thereby improving the etching process effect. In fact, the refrigerant pipeline 130 includes a refrigerant main pipeline 135, a compressor 131, a fourth heat exchanger 180 and an expansion valve 132. The compressor 131, the fourth heat exchanger 180, the expansion valve 132 and the second heat exchanger 150 are sequentially arranged on the refrigerant main pipeline 135, and the fourth heat exchanger 180 is connected to the process water pipeline. The output end of the compressor 131, the fourth heat exchanger 180, the expansion valve 132, the second heat exchanger 150 and the input end of the compressor 131 are sequentially connected end to end to form a circulation flow path for the refrigerant to circulate.

[0078] The fourth heat exchanger 180 is equivalent to a condenser. In practical applications, the high-temperature refrigerant flowing out of the output end of the compressor 131 first reaches the fourth heat exchanger 180, where it exchanges heat with the process water input by the process water pipeline 120, and the refrigerant is cooled. The refrigerant flowing out of the fourth heat exchanger 180 flows to the expansion valve 132, and after being adjusted by the expansion valve 132, it is converted into low-temperature refrigerant and flows to the second heat exchanger 150. At the second heat exchanger 150, the low-temperature refrigerant exchanges heat with the returned coolant to achieve the cooling process of the coolant. Then the refrigerant flows to the input end of the compressor to complete one cycle.

[0079] In this embodiment, the third heat exchanger 170 and the fourth heat exchanger 180 are arranged in parallel. Specifically, the refrigerant pipeline 130 further includes a first branch pipeline 136. One end of the first branch pipeline 136 is communicated with the output end of the compressor 131, and the other end is communicated with the refrigerant input end of the third heat exchanger 170. The refrigerant output end of the third heat exchanger 170 is communicated with the input end of the expansion valve 132.

[0080] In practical applications, by controlling the refrigerant flow rate diverted from the refrigerant main pipeline 135 into the first branch pipeline 136, the control of the refrigerant flow rate and temperature flowing into the third heat exchanger 170 can be realized, and the control of the refrigerant temperature flowing into the second heat exchanger 150 can also be realized, so that the second heat exchanger 150 and the third heat exchanger 170 can meet the heat exchange requirements under different working conditions, and further meet the accurate temperature adjustment requirements under different working conditions.

[0081] It can be understood that after the high-temperature refrigerant output by the compressor 131 is shunted into the first branch pipeline 136, it can heat the coolant at the third heat exchanger 170. After the heat exchange is completed, the refrigerant is then merged into the refrigerant main pipeline 135 and flows towards the expansion valve 132.

[0082] In this embodiment, a third control valve 171 is provided at the refrigerant input end of the third heat exchanger 170, and a fourth control valve 181 is provided at the refrigerant input end of the fourth heat exchanger 180. The third control valve 171 controls the on-off of the first branch pipeline 136, that is, controls the on-off of the third heat exchanger 170, and the fourth control valve 181 controls the on-off of the refrigerant input end of the fourth heat exchanger 180.

[0083] In practical applications, by coordinately controlling the opening degrees of the third control valve 171 and the fourth control valve 181 respectively, the regulation of the refrigerant flow rate flowing from the refrigerant main pipeline 135 into the first branch pipeline 136 can be achieved.

[0084] In the state where both the third control valve 171 and the fourth control valve 181 are open, both the third heat exchanger 170 and the fourth heat exchanger 180 are working. That is, a part of the high-temperature refrigerant output by the compressor 131 flows through the fourth heat exchanger 180 to exchange heat with the process cooling water, and the other part flows into the first branch pipeline 136 and flows through the third heat exchanger 170 to exchange heat with the coolant, which is applicable to the situation where the initial temperature of the coolant is relatively low.

[0085] In the state where the third control valve 171 is open and the fourth control valve 181 is closed, the refrigerant flowing out from the output end of the compressor 131 flows through the third heat exchanger 170, the expansion valve 132, and the second heat exchanger 150 in sequence and then flows into the input end of the compressor 131. At this time, the third heat exchanger 170 and the second heat exchanger 150 are involved in the work, which is applicable to the situation where the initial temperature of the coolant is too low, achieving the purpose of reducing the load of the heating device 160.

[0086] In the state where the third control valve 171 is closed and the fourth control valve 181 is open, at this time, the refrigerant flowing out from the output end of the compressor 131 flows through the fourth heat exchanger 180, the expansion valve 132, and the second heat exchanger 150 in sequence and then flows into the input end of the compressor 131. At this time, the fourth heat exchanger 180 and the second heat exchanger 150 are involved in the work, and the third heat exchanger 170 does not work, which is applicable to the situation where the initial temperature of the coolant is too high, and there is no need for the third heat exchanger 170 to preheat the coolant.

[0087] A liquid storage tank 133 and an eyepiece 134 are also provided on the refrigerant pipeline 130. The refrigerant output ends of the third heat exchanger 170 and the fourth heat exchanger 180 are both connected to the input end of the liquid storage tank 133. The liquid storage tank 133 can adjust the refrigerant flow rate to meet the requirements of different working conditions. The eyepiece 134 can observe the internal situation of the pipeline, facilitating maintenance and repair.

[0088] The coolant pipeline 110 includes a coolant return pipe 111, a coolant tank 112, and a coolant supply pipe 113 that are connected in sequence. The first heat exchanger 140 and the second heat exchanger 150 are both disposed on the coolant return pipe 111, and the third heat exchanger 170 and the heating device 160 are disposed on the coolant supply pipe 113.

[0089] It can be understood that the coolant return pipe 111 is used to introduce the high-temperature coolant flowing out of the etching machine into the coolant tank 112 for storage, and the coolant supply pipe 113 is used to direct the coolant stored in the coolant tank 112 to the etching machine. The first heat exchanger 140 and the second heat exchanger 150 are both disposed on the coolant return pipe 111, so as to perform two-stage cooling on the returned high-temperature coolant, and then enter the coolant tank 112 for storage after reaching the storage standard.

[0090] It should be noted that the aforementioned initial temperature of the coolant refers to the temperature when the coolant flows out of the coolant tank 112. The third heat exchanger 170 and the heating device 160 are disposed on the coolant supply pipe 113 to perform two-stage heating on the coolant flowing out of the coolant tank 112, so that the temperature of the coolant reaching the etching machine meets the process requirements.

[0091] In addition, a coolant circulation pump 114 is further disposed on the coolant supply pipe 113, and the coolant circulation pump 114 provides power for the circulation of the coolant in the coolant supply pipe 113.

[0092] Please refer to Figure 2 for Figure 2 a flowchart of a temperature control method provided by the first embodiment of the present invention.

[0093] The temperature control method provided in this embodiment is applied to Figure 1 the temperature control system 100 shown in

[0094] Step S101: Adjust the flow rate and / or temperature of the process cooling water input into the first heat exchanger 140 by the process water pipeline 120 to perform the first-stage cooling on the coolant;

[0095] Step S102: Adjust the flow rate and / or temperature of the refrigerant input into the second heat exchanger 150 by the refrigerant pipeline 130 to perform the second-stage cooling on the coolant;

[0096] Step S103: Adjust the flow rate and / or temperature of the refrigerant input into the third heat exchanger 170 by the refrigerant pipeline 130 to preheat the coolant;

[0097] Step S104: Adjust the power of the heating device 160 so that the heating device 160 heats the coolant to the target temperature.

[0098] Please refer to Figure 3 corresponding to Figure 1 the temperature control system 100 shown in, step S102 of the temperature control method provided in this embodiment may include the following sub-steps:

[0099] Sub-step S1021, adjust the flow rate of the refrigerant flowing from the main refrigerant pipeline 135 into the first branch pipeline 136, and / or adjust the flow rate and / or temperature of the process cooling water input by the process water pipeline 120 into the fourth heat exchanger 180.

[0100] Please refer to Figure 4 corresponding to Figure 1 the temperature control system 100 shown in, step S103 of the temperature control method provided in this embodiment may include the following sub-steps:

[0101] Sub-step S1031, adjust the flow rate of the refrigerant flowing from the main refrigerant pipeline 135 into the first branch pipeline 136.

[0102] Since the second heat exchanger 150 is provided on the main refrigerant pipeline 135 and is downstream of the expansion valve 132, and the refrigerant flowing out of the third heat exchanger 170 and the fourth heat exchanger 180 converges and then reaches the second heat exchanger 150, therefore, the heat exchange conditions of the third heat exchanger 170 and the fourth heat exchanger 180 respectively will affect the refrigerant flow rate flowing into the second heat exchanger 150.

[0103] It can be understood that for the adjustment of the flow rate of the refrigerant flowing from the main refrigerant pipeline 135 into the first branch pipeline 136, in this embodiment, it can be achieved by coordinately adjusting the opening degrees of the third control valve 171 and the fourth control valve 181.

[0104] Please refer to Figure 5 , Figure 5 which shows a schematic structural diagram of the temperature control system 100 provided by the second embodiment of the present invention.

[0105] The temperature control system 100 provided in this embodiment is different from the first embodiment in that the first branch pipeline 136 is discarded and a second branch pipeline 137 is additionally configured. Specifically, one end of the second branch pipeline 137 is communicated with the refrigerant output end of the fourth heat exchanger 180, and the other end of the second branch pipeline 137 is communicated with the refrigerant input end of the third heat exchanger 170.

[0106] It can be seen that in this embodiment, through the configuration of the second branch pipeline 137, the third heat exchanger 170 and the fourth heat exchanger 180 are selectively connected in series. Specifically, a three-way valve 190 is provided at the connection position between the input end of the second branch pipeline 137 and the refrigerant main pipeline 135. By controlling the three-way valve 190, the flow rate of the refrigerant flowing from the refrigerant main pipeline 135 into the second branch pipeline 137 is adjusted, so as to adjust the flow rate of the refrigerant flowing into the third heat exchanger 170.

[0107] It can be understood that since the second branch pipeline 137 in this embodiment can be connected in series with the fourth heat exchanger 180, therefore, in the case where the two are connected in series, that is, when the second branch pipeline 137 is turned on, by adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger 180 through the process water pipeline 120, the temperature of the refrigerant flowing into the third heat exchanger 170 can be correspondingly adjusted.

[0108] The second embodiment of the present invention also provides a temperature control method, corresponding to Figure 5 the temperature control system 100 shown. This temperature control method also includes steps S101 to S104, and the difference from the temperature control method provided in the first embodiment lies in the sub-steps of step S102 and the sub-steps of step S103.

[0109] Specifically, please refer to Figure 6 corresponding to Figure 5 the temperature control system 100 shown, step S102 may include:

[0110] Sub-step S1022, adjusting the flow rate of the refrigerant flowing from the refrigerant main pipeline 135 into the second branch pipeline 137, and / or adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger 180 through the process water pipeline 120.

[0111] Please refer to Figure 7 corresponding to Figure 5 the temperature control system 100 shown, step S103 may include:

[0112] Sub-step S1032, adjusting the flow rate of the refrigerant flowing from the refrigerant main pipeline 135 into the second branch pipeline 137.

[0113] Sub-step S1033, adjusting the flow rate of the refrigerant flowing from the refrigerant main pipeline 135 into the second branch pipeline 137, and adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger 180 through the process water pipeline 120.

[0114] Similarly, since the second heat exchanger 150 is disposed on the refrigerant main pipeline 135 and downstream of the expansion valve 132, and the refrigerant flowing out of the third heat exchanger 170 and the fourth heat exchanger 180 converges and then reaches the second heat exchanger 150, the heat exchange conditions of the third heat exchanger 170 and the fourth heat exchanger 180 respectively will affect the refrigerant flow rate flowing into the second heat exchanger 150.

[0115] Therefore, by adjusting the flow rate of the refrigerant diverted from the refrigerant main pipeline 135 into the second branch pipeline 137, or by adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger 180 through the process water pipeline 120, the temperature of the refrigerant flowing into the second heat exchanger 150 can be adjusted.

[0116] When the three-way valve 190 conducts the second branch pipeline 137 and the opening degree remains unchanged, by adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger 180 through the process water pipeline 120, the temperature of the refrigerant flowing into the third heat exchanger 170 can be adjusted independently.

[0117] Please refer to Figure 8 , Figure 8 which shows a schematic structural diagram of the temperature control system 100 provided by the third embodiment of the present invention.

[0118] The temperature control system 100 provided in this embodiment is additionally provided with a second branch pipeline 137 on the basis of the first embodiment. Specifically, one end of the second branch pipeline 137 is communicated with the refrigerant output end of the fourth heat exchanger 180, and the other end of the second branch pipeline 137 is communicated with the refrigerant input end of the third heat exchanger 170. In fact, it is communicated with the first branch pipeline 136.

[0119] Similarly, in this embodiment, a third control valve 171 is provided at the refrigerant input end of the third heat exchanger 170, and a fourth control valve 181 is provided at the refrigerant input end of the fourth heat exchanger 180. The third control valve 171 controls the on-off of the refrigerant input end of the third heat exchanger 170, and the fourth control valve 181 controls the on-off of the refrigerant input end of the fourth heat exchanger 180. By jointly controlling the opening degrees of the third control valve 171 and the fourth control valve 181, the refrigerant flow rate diverted from the refrigerant main pipeline 135 into the first branch pipeline 136 can be adjusted.

[0120] In this embodiment, a three-way valve 190 is provided at the position where the second branch pipeline 137 is connected to the refrigerant main pipeline 135 corresponding to the refrigerant output end of the fourth heat exchanger 180. By controlling the three-way valve 190, the refrigerant flow rate diverted from the refrigerant main pipeline 135 into the second branch pipeline 137 can be adjusted.

[0121] It can be understood that when the third control valve 171 is open and the fourth control valve 181 is closed, the refrigerant flowing out of the output end of the compressor 131 sequentially passes through the third heat exchanger 170, the expansion valve 132, and the second heat exchanger 150 and then flows into the input end of the compressor 131. At this time, the third heat exchanger 170 and the second heat exchanger 150 are involved in the operation, which is applicable to the situation where the initial temperature of the coolant is too low, and the purpose of reducing the load of the heating device 160 is achieved.

[0122] When the third control valve 171 is closed and the fourth control valve 181 is open, by adjusting the three-way valve 190, the second branch pipeline 137 can be disconnected. At this time, the refrigerant flowing out of the output end of the compressor 131 sequentially passes through the fourth heat exchanger 180, the expansion valve 132, and the second heat exchanger 150 and then flows into the input end of the compressor 131. At this time, the fourth heat exchanger 180 and the second heat exchanger 150 are involved in the operation, which is applicable to the situation where the initial temperature of the coolant is too high, and it is not necessary for the third heat exchanger 170 to preheat the coolant in advance.

[0123] It can be understood that when the third control valve 171 is closed, the fourth control valve 181 is open, and the second branch pipeline 137 is disconnected, the fourth heat exchanger 180 serves as a condenser in the refrigerant pipeline 130, and the heat exchange object is the process cooling water. The reuse of the process cooling water in the workshop is realized, and additional energy consumption is avoided.

[0124] When the third control valve 171 is closed and the fourth control valve 181 is open, by adjusting the three-way valve 190, all the refrigerant output by the fourth heat exchanger 180 can flow into the second branch pipeline 137, and then flow into the first branch pipeline 136 through the second branch pipeline 137 and enter the third heat exchanger 170. In this case, the refrigerant flowing out of the output end of the compressor 131 sequentially flows through the fourth heat exchanger 180 and the third heat exchanger 170, and then sequentially flows through the expansion valve 132 and the second heat exchanger 150 and then flows into the input end of the compressor 131.

[0125] In this case, both the fourth heat exchanger 180 and the third heat exchanger 170 serve as condensers. The fourth heat exchanger 180 pre-cools all the high-temperature refrigerant flowing out of the compressor 131, which is applicable to the situation where the initial temperature of the coolant is relatively high, and can significantly improve the preheating accuracy.

[0126] When the third control valve 171 is closed and the fourth control valve 181 is open, by adjusting the three-way valve 190, part of the refrigerant output by the fourth heat exchanger 180 can flow into the second branch pipeline 137, and the remaining part of the refrigerant directly flows to the expansion valve 132. In this case, the further precise control of the refrigerant flow rate flowing into the third heat exchanger 170 can be further improved, thereby further improving the preheating accuracy of the third heat exchanger 170 for the coolant.

[0127] When both the third control valve 171 and the fourth control valve 181 are opened, by adjusting the three-way valve 190, part or all of the refrigerant output from the fourth heat exchanger 180 can flow into the second branch pipeline 137, which can further improve the preheating accuracy of the third heat exchanger 170 for the coolant.

[0128] When the third control valve 171 and the fourth control valve 181 are opened simultaneously, the refrigerant flowing out of the output end of the compressor 131 is divided into two flow paths, and the two flow paths respectively flow through the third heat exchanger 170 and the fourth heat exchanger 180. In this case, by adjusting the three-way valve 190, the further adjustment of the refrigerant diversion effect can be realized, so as to realize the further precise adjustment of the temperature and flow rate of the refrigerant flowing into the third heat exchanger 170, and further improve the preheating accuracy of the third heat exchanger 170 for preheating the coolant.

[0129] The third embodiment of the present invention further provides a temperature control method corresponding to Figure 8 the temperature control system 100 shown. This temperature control method also includes steps S101 to S104, and the difference from the temperature control method provided by the first embodiment lies in the sub-steps of step S102 and the sub-steps of step S103.

[0130] Specifically, please refer to Figure 9 corresponding to Figure 8 the temperature control system 100 shown, step S102 may include:

[0131] Sub-step S1023, adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger 180 through the process water pipeline 120, and / or adjusting the flow rate of the refrigerant diverted from the refrigerant main pipeline 135 into the first branch pipeline 136, and / or adjusting the flow rate of the refrigerant diverted from the refrigerant main pipeline 135 into the second branch pipeline 137.

[0132] Please refer to Figure 10 corresponding to Figure 8 the temperature control system 100 shown, step S103 may include:

[0133] Sub-step S1034, adjusting the flow rate of the refrigerant diverted from the refrigerant main pipeline 135 into the first branch pipeline 136, and / or adjusting the flow rate of the refrigerant diverted from the refrigerant main pipeline 135 into the second branch pipeline 137.

[0134] Sub-step S1035, adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger 180 through the process water pipeline 120, and adjusting the flow rate of the refrigerant diverted from the refrigerant main pipeline 135 into the first branch pipeline 136.

[0135] Sub-step S1036: Adjust the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger 180 through the process water pipeline 120, and adjust the flow rate of the refrigerant that is branched from the main refrigerant pipeline 135 and enters the second branch pipeline 137.

[0136] Sub-step S1037: Adjust the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger 180 through the process water pipeline 120, adjust the flow rate of the refrigerant that is branched from the main refrigerant pipeline 135 and enters the first branch pipeline 136, and adjust the flow rate of the refrigerant that is branched from the main refrigerant pipeline 135 and enters the second branch pipeline 137.

[0137] Similarly, by adjusting the flow rate of the refrigerant that is branched from the main refrigerant pipeline 135 and enters the first branch pipeline 136 and / or the second branch pipeline 137, or by adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger 180 through the process water pipeline 120, the temperature of the refrigerant flowing into the second heat exchanger 150 can be adjusted.

[0138] The temperature control method provided in this embodiment can adjust the flow rate of the refrigerant flowing into the first branch pipeline 136 and the second branch pipeline 137 by adjusting the opening degrees of the third control valve 171 and the fourth control valve 181 and controlling the three-way valve 190, so as to adjust the temperature and flow rate of the refrigerant flowing into the third heat exchanger 170, and adjust the temperature of the refrigerant flowing into the second heat exchanger 150. Thus, the precision adjustment of the stepwise cooling adjustment and the stepwise heating adjustment can be achieved to meet the temperature adjustment precision requirements under different working conditions, and different working conditions include the cases where the confluence temperature and the initial temperature of the coolant are respectively in different numerical ranges.

[0139] It can be seen that the temperature control method provided in this embodiment realizes the full utilization of the process cooling water in the workshop and effectively reduces the load of the compressor 131 in the refrigerant pipeline 130. Moreover, the refrigerant pipeline 130 preheats the coolant before the heating device 160, so that while the load of the heating device 160 is effectively reduced, the stepwise heating makes the temperature adjustment precision of the coolant higher, improving the etching effect.

[0140] Therefore, the temperature control system 100 and the temperature control method provided in this embodiment can achieve low-energy consumption and high-precision temperature control of the coolant under various different working conditions.

[0141] The above are only the preferred embodiments of the present invention and are not used to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A temperature control system, characterized in that, It includes a coolant pipeline (110), a process water pipeline (120) and a refrigerant pipeline (130). The coolant pipeline (110) includes a coolant return pipe (111) and a coolant supply pipe (113). A first heat exchanger (140) and a second heat exchanger (150) are sequentially arranged on the coolant return pipe (111). The first heat exchanger (140) is connected to the process water pipeline (120), and the second heat exchanger (150) is connected to the refrigerant pipeline (130). Both the first heat exchanger (140) and the second heat exchanger (150) are used to cool the coolant. A third heat exchanger (170) and a heating device (160) are sequentially arranged on the coolant supply pipe (113). The third heat exchanger (170) is connected to the refrigerant pipeline (130) and is arranged in series with the second heat exchanger (150). The third heat exchanger (170) is used to preheat the coolant. The refrigerant pipeline (130) includes a refrigerant main pipeline (135), a compressor (131), a fourth heat exchanger (180) and an expansion valve (132). The compressor (131), the fourth heat exchanger (180), the expansion valve (132) and the second heat exchanger (150) are sequentially arranged on the refrigerant main pipeline (135), and the fourth heat exchanger (180) is connected to the process water pipeline (120).

2. The temperature control system according to claim 1, characterized in that, The refrigerant pipeline further includes a first branch pipeline (136). One end of the first branch pipeline (136) is communicated with the output end of the compressor (131), and the other end is communicated with the refrigerant input end of the third heat exchanger (170). The refrigerant output end of the third heat exchanger (170) is communicated with the input end of the expansion valve (132).

3. The temperature control system according to claim 1 or 2, characterized in that, The refrigerant pipeline further includes a second branch pipeline (137). One end of the second branch pipeline (137) is communicated with the refrigerant output end of the fourth heat exchanger (180), and the other end of the second branch pipeline (137) is communicated with the refrigerant input end of the third heat exchanger (170).

4. The temperature control system according to claim 1, wherein The refrigerant pipeline (130) further includes a liquid storage tank (133). The liquid storage tank (133) is arranged on the refrigerant main pipeline (135), and the output end of the liquid storage tank (133) is communicated with the input end of the expansion valve (132).

5. The temperature control system according to claim 1, characterized in that, A coolant circulation pump (114) is further arranged on the coolant return pipe (111) or the coolant supply pipe (113).

6. A temperature control method, applied to a temperature control system (100), characterized in that, The temperature control system includes a coolant pipeline (110), a process water pipeline (120), and a refrigerant pipeline (130). The coolant pipeline (110) includes a coolant return pipe (111) and a coolant supply pipe (113). The first heat exchanger (140) and the second heat exchanger (150) are sequentially arranged on the coolant return pipe (111). The first heat exchanger (140) is connected to the process water pipeline (120), and the second heat exchanger (150) is connected to the refrigerant pipeline (130). The third heat exchanger (170) and the heating device (160) are sequentially arranged on the coolant supply pipe (113). The third heat exchanger (170) is connected to the refrigerant pipeline (130) and is arranged in series with the second heat exchanger (150). The refrigerant pipeline (130) includes a refrigerant main pipeline (135), a compressor (131), a fourth heat exchanger (180), and an expansion valve (132). The compressor (131), the fourth heat exchanger (180), the expansion valve (132), and the second heat exchanger (150) are sequentially arranged on the refrigerant main pipeline (135), and the fourth heat exchanger (180) is connected to the process water pipeline (120). The temperature control method includes: Adjusting the flow rate and / or temperature of the process cooling water input into the first heat exchanger (140) by the process water pipeline (120) to perform the first cooling of the coolant; Adjusting the flow rate and / or temperature of the refrigerant input into the second heat exchanger (150) by the refrigerant pipeline (130) to perform the secondary cooling of the coolant; Adjusting the flow rate and / or temperature of the refrigerant input into the third heat exchanger (170) by the refrigerant pipeline (130) to preheat the coolant; Adjusting the power of the heating device (160) so that the heating device (160) heats the coolant to the target temperature.

7. The temperature control method according to claim 6, characterized in that The refrigerant pipeline (130) further includes a first branch pipeline (136) and the third heat exchanger (170). One end of the first branch pipeline (136) is communicated with the output end of the compressor (131), and the other end is connected to the refrigerant input end of the third heat exchanger (170). The refrigerant output end of the third heat exchanger (170) is communicated with the input end of the expansion valve (132). The temperature control method further includes at least one of the following features: (1) The step of adjusting the flow rate and / or temperature of the refrigerant input into the second heat exchanger (150) by the refrigerant pipeline (130) includes: adjusting the flow rate of the refrigerant shunted from the refrigerant main pipeline (135) into the first branch pipeline (136), and / or, adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger (180) by the process water pipeline (120); (2) The step of adjusting the flow rate and / or temperature of the refrigerant input into the third heat exchanger (170) by the refrigerant pipeline (130) includes: adjusting the flow rate of the refrigerant shunted from the refrigerant main pipeline (135) into the first branch pipeline (136).

8. The temperature control method according to claim 6, wherein The refrigerant pipeline (130) further includes the third heat exchanger (170) and the second branch pipeline (137). One end of the second branch pipeline (137) is communicated with the refrigerant output end of the fourth heat exchanger (180), and the other end of the second branch pipeline (137) is communicated with the refrigerant input end of the third heat exchanger (170). The refrigerant output end of the third heat exchanger (170) is communicated with the input end of the expansion valve (132). The temperature control method further includes at least one of the following features: (1) The step of adjusting the flow rate and / or temperature of the refrigerant input into the second heat exchanger (150) of the refrigerant pipeline (130) includes: adjusting the flow rate of the refrigerant flowing from the refrigerant main pipeline (135) into the second branch pipeline (137), and / or adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger (180) by the process water pipeline (120); (2) The step of adjusting the flow rate and / or temperature of the refrigerant input into the third heat exchanger (170) of the refrigerant pipeline (130) includes: adjusting the flow rate of the refrigerant flowing from the refrigerant main pipeline (135) into the second branch pipeline (137); (3) The step of adjusting the flow rate and temperature of the refrigerant input into the third heat exchanger (170) of the refrigerant pipeline (130) includes: adjusting the flow rate of the refrigerant flowing from the refrigerant main pipeline (135) into the second branch pipeline (137), and adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger (180) by the process water pipeline (120).

9. The temperature control method according to claim 6, wherein The refrigerant pipeline (130) further includes a first branch pipeline (136), the third heat exchanger (170) and the second branch pipeline (137). One end of the first branch pipeline (136) is communicated with the output end of the compressor (131), and the other end is communicated with the refrigerant input end of the third heat exchanger (170). The refrigerant output end of the third heat exchanger (170) is communicated with the input end of the expansion valve (132). One end of the second branch pipeline (137) is communicated with the refrigerant output end of the fourth heat exchanger (180), and the other end of the second branch pipeline (137) is communicated with the refrigerant input end of the third heat exchanger (170). The temperature control method further includes at least one of the following features: (1) The step of adjusting the flow rate and / or temperature of the refrigerant input into the second heat exchanger (150) of the refrigerant pipeline (130) includes: adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger (180) by the process water pipeline (120), and / or adjusting the flow rate of the refrigerant flowing from the refrigerant main pipeline (135) into the first branch pipeline (136), and / or adjusting the flow rate of the refrigerant flowing from the refrigerant main pipeline (135) into the second branch pipeline (137); (2) The step of adjusting the flow rate and / or temperature of the refrigerant input into the third heat exchanger (170) through the refrigerant pipeline (130) includes: adjusting the flow rate of the refrigerant flowing from the main refrigerant pipeline (135) into the first branch pipeline (136), and / or adjusting the flow rate of the refrigerant flowing from the main refrigerant pipeline (135) into the second branch pipeline (137); (3) The step of adjusting the flow rate and temperature of the refrigerant input into the third heat exchanger (170) through the refrigerant pipeline (130) includes: adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger (180) through the process water pipeline (120), and adjusting the flow rate of the refrigerant flowing from the main refrigerant pipeline (135) into the first branch pipeline (136); (4) The step of adjusting the flow rate and temperature of the refrigerant input into the third heat exchanger (170) through the refrigerant pipeline (130) includes: adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger (180) through the process water pipeline (120), and adjusting the flow rate of the refrigerant flowing from the main refrigerant pipeline (135) into the second branch pipeline (137); (5) The step of adjusting the flow rate and temperature of the refrigerant input into the third heat exchanger (170) through the refrigerant pipeline (130) includes: adjusting the flow rate and / or temperature of the process cooling water input into the fourth heat exchanger (180) through the process water pipeline (120), adjusting the flow rate of the refrigerant flowing from the main refrigerant pipeline (135) into the first branch pipeline (136), and adjusting the flow rate of the refrigerant flowing from the main refrigerant pipeline (135) into the second branch pipeline (137).

Images