A transport device for air-sensitive samples

Abstract

The application discloses a kind of transport devices of air-sensitive sample, including transport rod, transport cavity, first sealing valve and second sealing valve;First sealing valve is used to be arranged on the side wall of target cavity, second sealing valve is fixed at the front end of transport cavity, first sealing valve and second sealing valve are detachably connected, the front end of transport rod is from the rear end of transport cavity into transport cavity, and can be sequentially passed through second sealing valve and first sealing valve from transport cavity, into target cavity;Transport rod includes first push rod and second push rod, the front end of first push rod is fixed with sample support, the rear end of first push rod is detachably connected with the front end of second push rod, and can be connected or separated by controlling second push rod first push rod and second push rod, sample support is located in transport cavity, and at least part of first push rod is located in transport cavity.The transport device has the advantages of simple transport operation and high transport efficiency, and can effectively reduce the risk of air exposure of sample during transport.

Description

Technical Field

[0001] This invention belongs to the field of sealed transport technology, and specifically relates to a transport device for air-sensitive samples. Background Technology

[0002] When air-sensitive samples are prepared and then subjected to characterization analysis, the samples need to be transferred from the preparation equipment to the characterization equipment. Since it is required that the samples not come into contact with air, to avoid damage to the samples by gaseous components such as oxygen in the air, which could affect the conclusions of the test analysis, the entire transfer process needs to be carried out in an inert gas environment or a vacuum environment. For example, if the sample preparation is completed in a glove box in a nitrogen environment and the sample observation and analysis is completed in the vacuum chamber of an electron microscope, the sample needs to be transferred from the glove box to the vacuum chamber of the electron microscope.

[0003] Currently, the transport of air-sensitive samples mainly utilizes a transport box method. Specifically, sample preparation is completed inside a glove box, then the sample is placed in an airtight transport box, which is sealed. The transport box is then placed inside the electron microscope's vacuum chamber using standard procedures. After the vacuum chamber is closed, nitrogen gas is introduced, and finally, the transport box is opened via electronic or mechanical control, thus transferring the sample between the glove box and the electron microscope's vacuum chamber. However, the transport box method suffers from operational complexity, low transport efficiency, and the risk of air exposure during sample transport. Summary of the Invention

[0004] To address the aforementioned problems, this invention discloses a transfer device for air-sensitive samples, which overcomes or at least partially solves the problems.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] The present invention provides a transfer device for air-sensitive samples, including a transfer rod, a transfer chamber, a first sealing valve and a second sealing valve;

[0007] The first sealing valve is installed on the side wall of the target cavity, and the second sealing valve is fixed at the front end of the transfer cavity. The first sealing valve and the second sealing valve are detachably connected. The front end of the transfer rod enters the transfer cavity from the rear end of the transfer cavity and can pass through the second sealing valve and the first sealing valve in sequence from the transfer cavity to enter the target cavity.

[0008] The transfer rod includes a first push rod and a second push rod. A sample holder is fixed to the front end of the first push rod, and the sample holder is used to carry the sample. The rear end of the first push rod is detachably connected to the front end of the second push rod, and the first push rod and the second push rod can be connected or separated by operating the second push rod. The sample holder is located in the transfer cavity, and at least part of the first push rod is located in the transfer cavity.

[0009] Furthermore, the rear end of the first push rod is connected to the front end of the second push rod via a threaded structure or a screw thread structure.

[0010] Furthermore, when the rear end of the first push rod and the front end of the second push rod are connected by a threaded structure, the rear end of the first push rod has a threaded hole, and the front end of the second push rod has an external thread that mates with the threaded hole.

[0011] The rear end of the threaded hole is formed with a trumpet-shaped guide hole, which is used to guide the front end of the second push rod when it is inserted into the threaded hole.

[0012] Furthermore, a positioning hole is formed at the front end of the threaded hole, and a positioning protrusion that mates with the positioning hole extends axially from the front end of the second push rod.

[0013] Furthermore, the first push rod is provided with a vent hole, one end of which is connected to the threaded hole, and the other end of which extends to the outer peripheral surface of the first push rod.

[0014] Furthermore, the second push rod is fitted with a push rod housing, and the second push rod can move axially within the push rod housing. The front end of the push rod housing is detachably connected to the rear end of the transfer cavity. A guide groove is formed on the push rod housing, and a pull button is fixed on the second push rod. The pull button passes through the guide groove and exits the push rod housing.

[0015] The guide groove includes a head groove, a straight groove, and a tail groove. The head groove is located on the front side of the push rod housing and extends circumferentially along the push rod housing. The tail groove is located on the rear side of the push rod housing and extends circumferentially along the push rod housing. The straight groove extends axially along the push rod housing, and the front end of the straight groove communicates with the first end of the head groove. The rear end of the straight groove communicates with the first end of the tail groove. When the pull button is located at the first end of the head groove, the first end of the straight groove, and the first end of the tail groove, the external thread of the front end of the second push rod and the threaded hole are tightened and fixed. When the pull button is located at the second end of the head groove and the second end of the tail groove, the external thread of the front end of the second push rod and the threaded hole are separated.

[0016] Furthermore, the rear end of the second push rod is provided with an adapter post, the pull button is fixed on the adapter post, the adapter post and the second push rod are arranged on the same axis, the axis of the adapter post is provided with a mounting hole, and the adapter post and the second push rod are fixedly connected through the mounting hole and screws / bolts.

[0017] Furthermore, the rear end of the transfer cavity is provided with an adapter sleeve, the adapter sleeve has a through hole, so that the second push rod can pass through the through hole and connect with the first push rod. The outer periphery of the adapter sleeve is fixedly connected to the transfer cavity through an adapter pressure plate, and the adapter sleeve can rotate axially relative to the transfer cavity. The adapter sleeve is connected to the push rod housing through a threaded structure.

[0018] Furthermore, the sample holder has positioning edges extending on both sides, and a first spring is provided in the transfer cavity so that when the sample holder is located in the transfer cavity, the first spring presses and fixes the positioning edges along a direction perpendicular to the movement direction of the sample holder.

[0019] Furthermore, it also includes a sample stage;

[0020] The sample stage is used to be placed in the target cavity. Each side of the sample stage is provided with a pressure seat, and each pressure seat is provided with a second spring. When the sample holder moves to the sample stage, the second spring presses and fixes the positioning edge in a direction perpendicular to the movement of the sample holder.

[0021] Furthermore, the front end of the sample stage is provided with a limiting protrusion, which is used to limit the sample holder when it moves onto the sample stage, and the rear end of the sample stage is formed with a guide slope.

[0022] Furthermore, the upper end face of the sample holder has a nail stage hole for inserting a nail stage, and the sample holder on the side of the nail stage hole has a set screw hole that communicates with the nail stage hole for fixing the nail stage.

[0023] Furthermore, the rear end of the first sealing valve is connected to the front end of the second sealing valve via a first quick-connect flange, and the rear end of the second sealing valve is connected to the front end of the transfer chamber via a second quick-connect flange.

[0024] A sealing ring is provided between the transfer rod and the transfer cavity.

[0025] Furthermore, it also includes a display unit;

[0026] The display unit is used to display the status of the first sealing valve and / or the second sealing valve.

[0027] Furthermore, it also includes a pressure detection unit;

[0028] The pressure detection unit is used to detect the air pressure inside the transfer chamber.

[0029] The advantages and beneficial effects of this invention are:

[0030] In the air-sensitive sample transfer device of the present invention, a transfer rod and a transfer chamber are provided, and a first sealing valve is provided on the target chamber, and a second sealing valve is provided on the transfer chamber. The first sealing valve and the second sealing valve are detachably connected, so that the transfer chamber can communicate with the target chamber through the first sealing valve and the second sealing valve. This allows the sample holder at the front end of the transfer rod to carry the sample and move between the transfer chamber and the target chamber, realizing the transfer of the sample between the transfer chamber and the target chamber. In addition, the transfer rod adopts a split and detachable structure, which allows the transfer chamber to directly enter the glove box for sample loading, improving the sample loading efficiency, making the loading process simpler and more convenient, and effectively avoiding contact between the sample and air, as well as preventing the sample from colliding during loading. This air-sensitive sample transfer device has the advantages of simple transfer operation and high transfer efficiency, and can effectively reduce the risk of air exposure of the sample during the transfer process. Attached Figure Description

[0031] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the invention. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0032] Figure 1 This is a front view of a transfer device for air-sensitive samples in one embodiment of the present invention;

[0033] Figure 2 This is a top view of a transfer device for air-sensitive samples in one embodiment of the present invention;

[0034] Figure 3 for Figure 2 A cross-sectional view of the air-sensitive sample transport device along AA;

[0035] Figure 4 This is a connection structure diagram of the target cavity and the first sealing valve in one embodiment of the present invention;

[0036] Figure 5 This is a perspective view of the second sealing valve in one embodiment of the present invention;

[0037] Figure 6 This is a top view of the transfer cavity in one embodiment of the present invention;

[0038] Figure 7 for Figure 6 A cross-sectional view of the transfer chamber along BB;

[0039] Figure 8 This is an assembly structure diagram of the second push rod and the push rod housing in one embodiment of the present invention;

[0040] Figure 9 This is a route diagram of the pull button moving within the guide groove in one embodiment of the present invention;

[0041] Figure 10 This is a perspective view of the connection structure between the second push rod and the pull button in one embodiment of the present invention;

[0042] Figure 11 This is a front view of the connection structure between the second push rod and the pull button in one embodiment of the present invention;

[0043] Figure 12 for Figure 11 A cross-sectional view along CC of the connection structure between the second push rod and the pull button;

[0044] Figure 13 This is a three-dimensional structure of a sample holder in one embodiment of the present invention;

[0045] Figure 14 This is a top view of the sample holder in one embodiment of the present invention;

[0046] Figure 15 This is a three-dimensional structure of the sample stage in one embodiment of the present invention.

[0047] In the diagram: 1. Transfer rod; 1-1. First push rod; 1-2. Second push rod; 2. Transfer chamber; 3. First sealing valve; 4. Second sealing valve; 5. Target chamber; 6. Sample holder; 7. Threaded hole; 8. External thread; 9. Guide hole; 10. Positioning hole; 11. Positioning protrusion; 12. Vent hole; 13. Push rod housing; 14. Guide groove; 14-1. Head groove; 14-2. Straight groove; 14-3. Tail groove; 15. Pull button; 16. Adapter post 17. Screw; 18. Adapter sleeve; 19. Adapter pressure plate; 20. Positioning edge; 21. First spring; 22. Sample stage; 23. Pressure seat; 24. Second spring; 25. Limiting protrusion; 26. Guide slope; 27. Screw hole; 28. Set screw hole; 29. ​​First quick-connect flange; 30. Second quick-connect flange; 31. Sealing ring; 32. Display unit; 33. Pressure detection unit; 34. Sealing plate; 35. Spring base; 36. Adapter; 37. Fixing hole. Detailed Implementation

[0048] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this invention, and not all of them. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0049] To clearly describe the structure of the air-sensitive sample transport device in this invention, the term "front end" or "front side" in the following embodiments is designated as follows: Figure 1 The left end or left side, in each embodiment, "rear end" or "rear side" is Figure 1 The right end or right side.

[0050] The technical solutions provided by the various embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0051] One embodiment of the present invention discloses a transfer device for air-sensitive samples, such as... Figures 1 to 3 As shown, the air-sensitive sample transfer device includes a transfer rod 1, a transfer chamber 2, a first sealing valve 3, and a second sealing valve 4.

[0052] Specifically, the first sealing valve 3 is installed on the side wall of the target cavity 5, meaning the first sealing valve 3 is connected to the target cavity 5 and can enter the target cavity 5 through the first sealing valve 3; wherein, the target cavity can be the main chamber of an electron microscope or a micro / nano laser processing chamber. The second sealing valve 4 is fixed to the front end of the transfer cavity 2, meaning the second sealing valve 4 is connected to the transfer cavity 2. The first sealing valve 3 and the second sealing valve 4 are detachably connected, and the first sealing valve 3 and the second sealing valve 4 can be assembled or disassembled as needed, so that the transfer cavity 2 and the target cavity 5 are connected when the first sealing valve 3 and the second sealing valve 4 are assembled and both are open, and are separated when the first sealing valve 3 and the second sealing valve 4 are closed and disassembled; the front end of the transfer rod 1 enters the transfer cavity 2 from the rear end of the transfer cavity 2 and can move axially within the transfer cavity 2. When the first sealing valve 3 and the second sealing valve 4 are assembled and both are open, the front end of the transfer rod 1 can pass through the second sealing valve 4 and the first sealing valve 3 sequentially from the transfer cavity 2 and enter the target cavity 5. The first and second sealing valves can be manual valves, which can be operated manually, making them simpler and easier to implement.

[0053] Additionally, the transfer rod 1 includes a first push rod 1-1 and a second push rod 1-2. A sample holder 6 is fixed to the front end of the first push rod 1-1, which is used to hold the sample. The rear end of the first push rod 1-1 is detachably connected to the front end of the second push rod 1-2, meaning that the first push rod 1-1 and the second push rod 1-2 can be in a connected state or a separated state. These two states can be switched by manipulating the second push rod 1-2. The sample holder 6 is located inside the transfer cavity 2, and at least part of the first push rod 1-1 is located inside the transfer cavity 2, while the second push rod 1-2 is located outside the transfer cavity 2. Thus, when the front end of the transfer rod 1 enters the target cavity 5 from the transfer cavity 2, the second push rod 1-2 is manipulated to move axially, thereby pushing the sample holder 6 into the target cavity 5, thus transferring the sample from the transfer cavity 2 to the target cavity 5.

[0054] The working process of the air-sensitive sample transfer device in this embodiment is as follows:

[0055] ① Sample loading process

[0056] When a sample needs to be transferred from the sample preparation chamber to the transfer chamber 2, taking the sample preparation chamber as a glove box as an example, first manipulate the second push rod 1-2 to separate it from the first push rod 1-1, and place the transfer chamber 2 in the transition chamber of the glove box. Alternatively, the transfer chamber 2 can be placed in the transition chamber of the glove box first, and then the second push rod 1-2 can be separated from the first push rod 1-1. Then, move the transfer chamber 2 to the main chamber of the glove box. In an inert gas environment (e.g., nitrogen), open the second sealing valve 4 and load the sample in the main chamber of the glove box onto the sample holder 6. To facilitate sample loading, a shorter third push rod can also be placed in the main chamber of the glove box. The front end of the third push rod can be detachably connected to the rear end of the first push rod 1-1. By assembling and connecting the third push rod with the first push rod 1-1 and axially pushing the third push rod, the sample holder 6 is moved out of the transfer chamber 2. Finally, close the second sealing valve 4 and remove the transfer chamber 2 from the glove box.

[0057] In this way, the detachable and modular design of the transfer rod allows the transfer chamber to directly enter the glove box for sample loading, which improves the sample loading speed and makes the loading process simpler and more convenient. It effectively avoids contact between the sample and the air and prevents the sample from colliding during loading. In addition, no modification to the glove box is required, saving costs.

[0058] ② Sample delivery process

[0059] When a sample needs to be transferred from the transfer chamber 2 to the target chamber 5, firstly, manipulate the second push rod 1-2 to connect its front end to the rear end of the first push rod 1-1. The operator can then use the second push rod 1-2 to control the axial movement of the first push rod 1-1, thus moving the sample holder 6 back and forth. Next, connect and open the first sealing valve 3 and the second sealing valve 4 to connect the transfer chamber 2 to the target chamber 5. At this time, the target chamber 5 is in an inert gas environment. Then, push the second push rod 1-2 so that the sample holder 6, carrying the sample, passes through the second sealing valve 4 and the first sealing valve 3 into the target chamber 5. Subsequently, manipulate the second push rod 1-2 to separate it from the first push rod 1-1, removing the second push rod 1-2 from the target chamber 5, while the sample holder 6 and the first push rod 1-1 remain inside the target chamber 5. Finally, close the first sealing valve 3 and the second sealing valve 4, and disassemble them. The target chamber 5 is then evacuated.

[0060] ③ Sampling process

[0061] When a sample needs to be retrieved from the target cavity 5 into the transfer cavity 2, firstly, the first sealing valve 3 and the second sealing valve 4 are connected and opened to connect the transfer cavity 2 with the target cavity 5, creating a vacuum environment inside the target cavity 5. Next, the second push rod 1-2 is axially pushed, allowing its front end to enter the target cavity 5. The second push rod 1-2 is then manipulated to assemble its front end with the rear end of the first push rod 1-1. Then, the second push rod 1-2 is pulled backward, allowing the sample holder 6 to pass from the target cavity 5 through the first sealing valve 3 and the second sealing valve 4 back into the transfer cavity 2. Finally, the first sealing valve 3 and the second sealing valve 4 are closed and disassembled, allowing the transfer cavity 2 and the target cavity 5 to move independently. This decoupling of the transfer cavity 2 and the target cavity 5 is achieved without disrupting their environments. When the first sealing valve and the second sealing valve are disassembled, blind plates can be installed at the first sealing valve and the second sealing valve respectively to protect the first sealing valve and the second sealing valve; in addition, the second sealing valve is preferably a vacuum valve.

[0062] In summary, the air-sensitive sample transfer device of this embodiment, by setting a transfer rod and a transfer chamber, and by setting a first sealing valve on the target chamber and a second sealing valve on the transfer chamber, with the first and second sealing valves being detachably connected, allows the transfer chamber to communicate with the target chamber through the first and second sealing valves. This enables the sample holder at the front end of the transfer rod to carry the sample between the transfer chamber and the target chamber, thus realizing the transfer of the sample between them. Furthermore, the transfer rod adopts a split, detachable structure, allowing the transfer chamber to directly enter the glove box for sample loading, improving sample loading efficiency, simplifying the loading process, effectively preventing sample contact with air, and preventing collisions during loading. This air-sensitive sample transfer device has the advantages of simple operation and high efficiency, effectively reducing the risk of sample exposure to air during transfer.

[0063] In this embodiment, the rear end of the first push rod and the front end of the second push rod are connected by a threaded structure; thus, when connecting and separating the first and second push rods, it is only necessary to rotate the second push rod relative to the first push rod, making the operation simpler. Of course, in other embodiments, the rear end of the first push rod and the front end of the second push rod can also be connected by a snap-fit ​​structure.

[0064] Furthermore, such as Figure 7 , Figure 8 , Figure 11 and Figure 12As shown, the rear end of the first push rod 1-1 has a threaded hole 7, and the front end of the second push rod 1-2 has an external thread 8 that mates with the threaded hole 7. Of course, the threaded hole can also be located at the front end of the second push rod, and the external thread can be located at the rear end of the first push rod.

[0065] In addition, such as Figure 7 As shown, a trumpet-shaped guide hole 9 is formed at the rear end of the threaded hole 7, that is, the front end of the guide hole 9 is connected to the rear end of the threaded hole 7, so that the front end of the second push rod 1-2 enters the threaded hole 7 through the guide hole 9. The guide hole 9 is used to guide the front end of the second push rod 1-2 when it is inserted into the threaded hole 7, so that the front end of the second push rod 1-2 can enter the threaded hole 7 more accurately.

[0066] And, as Figure 7 As shown, a positioning hole 10 is formed at the front end of the threaded hole 7, that is, the front end of the threaded hole 7 and the rear end of the positioning hole 10 are connected. The front end of the second push rod 1-2 extends axially with a positioning protrusion 11 that mates with the positioning hole 10. When the external thread 8 mates with the threaded hole 7, the positioning protrusion 11 is inserted into the positioning hole 10. Through the mate between the positioning protrusion 11 and the positioning hole 10, the first push rod 1-1 and the second push rod 1-2 can be radially supported and fixed, so that the first push rod 1-1 and the second push rod 1-2 cannot move radially, thus ensuring the stability and firmness of the connection between the first push rod 1-1 and the second push rod 1-2.

[0067] In addition, such as Figure 7 As shown, the first push rod 1-1 is provided with a vent hole 12. One end of the vent hole 12 communicates with the threaded hole 7, and the other end of the vent hole 12 extends to the outer circumferential surface of the first push rod 1-1. In this way, when the front end of the second push rod 1-2 is inserted into the threaded hole 7, the gas in the threaded hole 7 can be completely discharged through the vent hole 12. This not only makes it easier for the front end of the second push rod 1-2 to be inserted into the threaded hole 7, but also prevents residual air in the threaded hole 7 from entering the transfer chamber 2 and damaging the sample when the first push rod 1-1 moves axially.

[0068] In this embodiment, as Figure 8 and Figure 9 As shown, a push rod housing 13 is fitted onto the second push rod 1-2. The second push rod 1-2 can move axially within the push rod housing 13. The front end of the push rod housing 13 is detachably connected to the rear end of the transfer cavity 2, specifically through a threaded connection. A guide groove 14 is provided on the push rod housing 13. A pull button 15 is fixed on the second push rod 1-2. The pull button 15 extends out of the push rod housing 13 through the guide groove 14. That is, one end of the pull button 15 is fixedly connected to the second push rod 1-2, and the other end of the pull button 15 extends out of the push rod housing 13 through the guide groove 14. In this way, the movement of the second push rod 1-2 can be controlled by the pull button 15.

[0069] Specifically, the guide groove 14 includes a head groove 14-1, a straight groove 14-2, and a tail groove 14-3. The head groove 14-1 is located on the front side of the push rod housing 13 and extends circumferentially along the push rod housing 13. The tail groove 14-3 is located on the rear side of the push rod housing 13 and extends circumferentially along the push rod housing 13. The straight groove 14-2 is located between the head groove 14-1 and the tail groove 14-3, and extends axially along the push rod housing 13. The head groove 14-1 and the tail groove 14-3 are located between the straight groove 14-1. On the same side of -2, and with the front end of the straight groove 14-2 connected to the first end of the head groove 14-1, and the rear end of the straight groove 14-2 connected to the first end of the tail groove 14-3, when the pull button 15 is located at the first end of the head groove 14-1, the first end of the straight groove 14-2 and the first end of the tail groove 14-3, the external thread 8 and the threaded hole 7 at the front end of the second push rod 1-2 are tightened and fixed. When the pull button 15 is located at the second end of the head groove 14-1 and the second end of the tail groove 14-3, the external thread 8 and the threaded hole 7 at the front end of the second push rod 1-2 are separated. It should be noted that when the pull button moves in the head groove and the tail groove, the second push rod rotates axially relative to the push rod housing; when the pull button moves in the straight groove, the second push rod moves axially relative to the push rod housing.

[0070] Thus, as Figure 9 As shown, when the sample holder 6 and the first push rod 1-1 are located in the transfer cavity 2, and the first push rod 1-1 and the second push rod 1-2 are not connected, the pull button 15 is located at the second end of the tail groove 14-3. At this time, the external thread 8 and the threaded hole 7 at the front end of the second push rod 1-2 are separated. During sample delivery, first move the pull button 15 from the second end of the tail groove 14-3 to the first end of the tail groove 14-3. At this time, the external thread 8 and threaded hole 7 at the front end of the second push rod 1-2 are tightened and fixed, and the second push rod 1-2 is connected to the first push rod 1-1. Next, move the pull button 15 forward along the straight groove 14-2 to the connection point between the straight groove 14-2 and the head groove 14-1. At this time, the second push rod 1-2 pushes the sample holder 6 from the transfer cavity 2 into the target cavity 5 through the first push rod 1-1. Then, move the pull button 15 from the first end of the head groove 14-1 to the second end of the head groove 14-1. At this time, the external thread 8 and threaded hole 7 at the front end of the second push rod 1-2 are separated, and the second push rod 1-2 is separated from the first push rod 1-1. The operation is the reverse of the above when taking samples, and will not be described again here. The structural design of the push rod housing 13 and the guide groove 14 makes the connection and separation of the first push rod 1-1 and the second push rod 1-2 controllable, and ensures that the transfer rod 1 does not rotate when moving axially, which can effectively prevent the sample from falling off the sample holder 6.

[0071] And, as Figures 10 to 12As shown, the rear end of the second push rod 1-2 is provided with an adapter post 16, and the pull button 15 is fixed on the adapter post 16. The adapter post 16 and the second push rod 1-2 are arranged coaxially. A mounting hole is opened on the axis of the adapter post 16, and the adapter post 16 and the second push rod 1-2 are fixedly connected through the mounting hole and screw 17. When the screw 17 is not tightened, the adapter post 16 can rotate axially relative to the second push rod 1-2, thereby adjusting the specific circumferential position of the pull button 15 relative to the second push rod 1-2. This ensures that when the second push rod 1-2 is separated from the first push rod 1-1, the pull button 15 is exactly located at the second end of the head groove 14-1 or the second end of the tail groove 14-3. When the second push rod 1-2 is connected to the first push rod 1-1, the pull button 15 is exactly located at the first end of the head groove 14-1, the first end of the straight groove 14-2, or the first end of the tail groove 14-3. The screw can also be replaced with a bolt.

[0072] In addition, such as Figure 6 and Figure 7 As shown, the rear end of the transfer cavity 2 is provided with an adapter sleeve 18. The adapter sleeve 18 has a through hole, allowing the second push rod 1-2 to pass through the through hole and connect with the first push rod 1-1. The outer circumference of the adapter sleeve 18 is fixedly connected to the transfer cavity 2 via an adapter pressure plate 19, and the adapter sleeve 18 can rotate axially relative to the transfer cavity 2. The adapter sleeve 18 is connected to the push rod housing 13 via a threaded structure, allowing the push rod housing 13 to connect to the transfer cavity 2 via the adapter sleeve 18. This eliminates the need to hold the push rod housing 13 during sample transfer, making operation more convenient. Since the starting point of the thread on the push rod housing 13 is random during processing, rotating the adapter sleeve 18 allows the threaded structure on the adapter sleeve 18 to smoothly connect with the threaded structure on the push rod housing 13.

[0073] In this embodiment, as Figure 7 , Figure 13 and Figure 14 As shown, the sample holder 6 has positioning edges 20 extending from both sides, and a first spring piece 21 is provided in the transfer cavity 2. The first spring piece 21 is specifically fixed to the lower end of the spring piece base 35. The spring piece base 35 is fixedly connected to the transfer cavity 2. When the sample holder 6 is located in the transfer cavity 2, the first spring piece 21 presses the fixed positioning edge 20 along the direction perpendicular to the movement of the sample holder 6, thereby preventing the sample holder 6 from rotating in the transfer cavity 2 and causing the sample to spill. Furthermore, the first push rod 1-1 and the second push rod 1-2 are threadedly connected. When the second push rod 1-2 rotates relative to the sample holder 6, the first spring piece 21 can also provide support for the sample holder 6.

[0074] In addition, such as Figure 15 As shown, the air-sensitive sample transfer device also includes a sample stage 22.

[0075] The sample stage 22 is used to be set inside the target cavity 5. The sample stage 22 is provided with pressure seats 23 on both sides. Each pressure seat 23 is provided with a second spring 24. When the sample holder 6 moves to the sample stage 22, the second spring 24 presses the fixed positioning edge 20 in a direction perpendicular to the movement of the sample holder 6, so that the sample holder 6 is fixed in the target cavity 5 by the sample stage 22. The first push rod 1-1 and the second push rod 1-2 are threaded together. When the second push rod 1-2 rotates relative to the sample holder 6, the second spring 24 can also provide support force for the sample holder 6.

[0076] Furthermore, such as Figure 15 As shown, the front end of the sample stage 22 is provided with a limiting protrusion 25, which is used to limit the sample holder 6 when it moves onto the sample stage 22, preventing the sample holder 6 from moving excessively. In addition, the rear end of the sample stage 22 is formed with a guide slope 26, which facilitates the sample holder 6 to move onto the sample stage 22 and is located exactly between the two pressure seats 23.

[0077] In addition, such as Figure 13 and Figure 14 As shown, the upper end face of the sample holder 6 has a nail stage hole 27 for inserting nail stages. A set screw hole 28 is located on the side of the sample holder 6 near the nail stage hole 27, communicating with the nail stage hole 27. When a screw is screwed into the set screw hole 28, the screw presses against the nail stage in the nail stage hole 27, thus fixing the nail stage. Conductive adhesive can be applied to the nail stage to support the sample. Alternatively, in other embodiments, the conductive adhesive can be directly applied to the sample holder.

[0078] And, as Figure 14 As shown, the sample holder 6 has a fixing hole 37 at its rear end, through which the sample holder 6 is fixedly connected to the first push rod 1-1. Of course, the sample holder and the first push rod can also be an integral structure, which simplifies the structure of the air-sensitive sample transfer device.

[0079] In this embodiment, as Figure 5 As shown, the rear end of the first sealing valve 3 is connected to the front end of the second sealing valve 4 via the first quick-connect flange 29, and the rear end of the second sealing valve 4 is connected to the front end of the transfer chamber 2 via the second quick-connect flange 30. This makes the connection between the first sealing valve 3 and the second sealing valve 4, and between the second sealing valve 4 and the transfer chamber 2, more convenient; wherein, as Figure 4 As shown, the rear end of the first sealing valve 3 is provided with an adapter 36, and the first quick-connect flange 29 is fixedly connected to the first sealing valve 3 through the adapter 36.

[0080] In addition, such as Figure 7As shown, a sealing ring 31 is provided between the transfer rod 1 and the transfer cavity 2 to achieve a seal between the transfer rod 1 and the transfer cavity 2. It should be noted that when the sample holder 6 is located in the transfer cavity 2, the sealing ring 31 is in contact with the outer peripheral surface of the first push rod 1-1, and when the sample holder 6 is located in the target cavity 5, the sealing ring 31 is in contact with the outer peripheral surface of the second push rod 1-2.

[0081] Furthermore, such as Figure 7 As shown, the rear end of the transfer chamber 2 is provided with a sealing plate 34, the transfer rod 1 passes through the sealing plate 34 and enters the transfer chamber 2, and the sealing ring 31 is provided between the sealing plate 34 and the transfer rod 1; of course, a sealing ring is also provided between the sealing plate 34 and the transfer chamber 2.

[0082] In this embodiment, as Figure 4 As shown, the air-sensitive sample transfer device also includes a display unit 32, which is an indicator light.

[0083] The display unit 32 is disposed on the first sealing valve 3 and is used to display the status of the first sealing valve 3, allowing the operator to intuitively understand the status of the first sealing valve 3 through the display unit 32, thus avoiding the situation where the sample collidees with the sealing valve when it is manually fed when it is closed. Of course, in other embodiments, the display unit can be used to display the status of the second sealing valve, or to display the status of the first sealing valve and the second sealing valve; wherein, the display unit can also be a display screen.

[0084] Furthermore, such as Figures 1 to 3 , Figures 6 to 7 As shown, the air-sensitive sample transport device also includes a pressure detection unit 33.

[0085] The pressure detection unit 33 is specifically installed on the transfer chamber 2 to detect the air pressure inside the transfer chamber 2, so that the operator can understand the changes in air pressure inside the transfer chamber 2 and prevent sample damage caused by air leakage inside the transfer chamber 2; wherein, the pressure detection unit can be a vacuum gauge.

[0086] In addition, the air-sensitive sample transfer device also includes a control unit (not shown in the figure). The control unit is electrically connected to the first sealing valve and the second sealing valve respectively, and is able to control the state of the first sealing valve and the second sealing valve.

[0087] The above description is merely a specific embodiment of the present invention. Under the teachings of the present invention, those skilled in the art can make other improvements or modifications based on the above embodiments. Those skilled in the art should understand that the above specific description is only to better explain the purpose of the present invention, and the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A transfer device for air-sensitive samples, characterized in that, Includes a transfer rod, a transfer chamber, a first sealing valve, and a second sealing valve; The first sealing valve is installed on the side wall of the target cavity, and the second sealing valve is fixed at the front end of the transfer cavity. The first sealing valve and the second sealing valve are detachably connected. The front end of the transfer rod enters the transfer cavity from the rear end of the transfer cavity and can pass through the second sealing valve and the first sealing valve in sequence from the transfer cavity to enter the target cavity. The transfer rod includes a first push rod and a second push rod. A sample holder is fixed to the front end of the first push rod. The sample holder is used to carry the sample. The rear end of the first push rod is detachably connected to the front end of the second push rod. The first push rod and the second push rod can be connected or separated by manipulating the second push rod. The sample holder is located in the transfer cavity, and at least part of the first push rod is located in the transfer cavity. The transfer chamber and the target chamber are connected when the first sealing valve and the second sealing valve are assembled and both are open; the transfer chamber and the target chamber are separated when the first sealing valve and the second sealing valve are both closed and disassembled. The rear end of the first push rod is connected to the front end of the second push rod by a threaded structure or a screw thread structure; When the rear end of the first push rod and the front end of the second push rod are connected by a threaded structure, the rear end of the first push rod has a threaded hole, and the front end of the second push rod has an external thread that mates with the threaded hole. The rear end of the threaded hole is formed with a trumpet-shaped guide hole, which is used to guide the front end of the second push rod when it is inserted into the threaded hole.

2. The air-sensitive sample transfer device according to claim 1, characterized in that, The front end of the threaded hole is formed with a positioning hole, and the front end of the second push rod extends axially with a positioning protrusion that cooperates with the positioning hole.

3. The air-sensitive sample transfer device according to claim 1, characterized in that, The first push rod is provided with a vent hole, one end of which is connected to the threaded hole, and the other end of which extends to the outer circumferential surface of the first push rod.

4. The air-sensitive sample transfer device according to claim 1, characterized in that, The second push rod is fitted with a push rod housing, and the second push rod can move axially within the push rod housing. The front end of the push rod housing is detachably connected to the rear end of the transfer cavity. The push rod housing has a guide groove, and a pull button is fixed on the second push rod. The pull button passes through the guide groove and exits the push rod housing. The guide groove includes a head groove, a straight groove, and a tail groove. The head groove is located on the front side of the push rod housing and extends circumferentially along the push rod housing. The tail groove is located on the rear side of the push rod housing and extends circumferentially along the push rod housing. The straight groove extends axially along the push rod housing, and the front end of the straight groove communicates with the first end of the head groove. The rear end of the straight groove communicates with the first end of the tail groove. When the pull button is located at the first end of the head groove, the first end of the straight groove, and the first end of the tail groove, the external thread of the front end of the second push rod and the threaded hole are tightened and fixed. When the pull button is located at the second end of the head groove and the second end of the tail groove, the external thread of the front end of the second push rod and the threaded hole are separated.

5. The air-sensitive sample transfer device according to claim 4, characterized in that, The rear end of the second push rod is provided with an adapter post, and the pull button is fixed on the adapter post. The adapter post and the second push rod are arranged on the same axis. The axis of the adapter post is provided with a mounting hole. The adapter post and the second push rod are fixedly connected through the mounting hole and screws / bolts.

6. The air-sensitive sample transfer device according to claim 4, characterized in that, The rear end of the transfer cavity is provided with an adapter sleeve, which has a through hole so that the second push rod can pass through the through hole and connect with the first push rod. The outer periphery of the adapter sleeve is fixedly connected to the transfer cavity through an adapter pressure plate, and the adapter sleeve can rotate axially relative to the transfer cavity. The adapter sleeve is connected to the push rod housing through a threaded structure.

7. The air-sensitive sample transfer device according to claim 1, characterized in that, The sample holder has positioning edges extending on both sides, and a first spring is provided in the transfer cavity so that when the sample holder is located in the transfer cavity, the first spring presses and fixes the positioning edges along a direction perpendicular to the moving direction of the sample holder.

8. The air-sensitive sample transfer device according to claim 7, characterized in that, It also includes a sample stage; The sample stage is used to be placed in the target cavity. Each side of the sample stage is provided with a pressure seat, and each pressure seat is provided with a second spring. When the sample holder moves to the sample stage, the second spring presses and fixes the positioning edge in a direction perpendicular to the movement of the sample holder.

9. The air-sensitive sample transfer device according to claim 8, characterized in that, The front end of the sample stage is provided with a limiting protrusion, which is used to limit the sample holder when it moves onto the sample stage. The rear end of the sample stage is formed with a guide slope.

10. The air-sensitive sample transfer device according to claim 1, characterized in that, The sample holder has a nailing hole on its upper end face for inserting a nailing device. The sample holder on the side of the nailing hole has a set screw hole that communicates with the nailing hole for fixing the nailing device.

11. The air-sensitive sample transfer device according to claim 1, characterized in that, The rear end of the first sealing valve is connected to the front end of the second sealing valve via a first quick-connect flange, and the rear end of the second sealing valve is connected to the front end of the transfer chamber via a second quick-connect flange. A sealing ring is provided between the transfer rod and the transfer cavity.

12. The air-sensitive sample transfer device according to any one of claims 1 to 11, characterized in that, It also includes a display unit; The display unit is used to display the status of the first sealing valve and / or the second sealing valve.

13. The transfer device for air-sensitive samples according to any one of claims 1 to 11, characterized in that, It also includes a pressure detection unit; The pressure detection unit is used to detect the air pressure inside the transfer chamber.

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