An energy-saving multi-stage turbine vacuum pump fluid structure and assembly method

Abstract

The present invention relates to the technical field of vacuum pump design, and specifically to an energy-saving multi-stage turbine vacuum pump fluid structure, which includes a first pump body. The first pump body is assembled by a first connecting seat, a second connecting seat, a third connecting seat, a fourth connecting seat, and a fifth connecting seat that are fixedly clamped to each other from top to bottom to form an internal flow channel, and the internal flow channel forms a four-stage vacuum pumping structure with four turbine discs arranged in the first pump body. The energy-saving multi-stage turbine vacuum pump fluid structure and assembly method proposed by the present invention can form the first pump body in the form of assembling multiple components and form an internal flow channel structure convenient for multi-stage vacuum pumping, solve the problem of unreasonable structure design of existing multi-stage vacuum pumps, reduce the production and assembly difficulty of multi-stage vacuum pumps, and improve the working performance.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum pump design, and specifically to an energy-saving multi-stage turbine vacuum pump fluid structure and an assembly method thereof. Background Art

[0002] A vacuum pump is a device that evacuates the inside of a container through mechanical, physical, or chemical methods to create a vacuum or near-vacuum state inside the container. Vacuum pumps are widely used in fields such as metallurgy, chemical industry, food, and electronic coating.

[0003] Due to technical limitations, most vacuum pumps cannot completely evacuate the inside of the container to a vacuum state, and thus there are performance differences in the degree of vacuum pumping among different types of vacuum pumps. The traditional form of using a single-stage operation to pump vacuum is difficult to achieve a high degree of vacuum, and directly connecting multiple vacuum pumps in series will not be able to improve the vacuum pumping performance due to poor coordination between the devices. Therefore, the industry is seeking ways to improve the vacuum pumping ability of vacuum pumps. One way is to set the inside of the vacuum pump as a multi-stage pump body, which can improve the vacuum pumping performance by optimizing the flow form of the gas flow inside the vacuum pump. At the same time, this can also obtain better vacuum pumping performance with fewer motors and working power, and thus is more energy-efficient.

[0004] However, the structures of multi-stage vacuum pumps on the current market are relatively complex, and generally do not adopt a reasonable multi-component assembly form, resulting in complex processing and difficult assembly of the parts used to form the multi-stage vacuum pump.

[0005] Therefore, we need an energy-saving multi-stage turbine vacuum pump fluid structure and an assembly method to solve the problem of unreasonable structural design of existing multi-stage vacuum pumps, which can reduce the production and assembly difficulty of multi-stage vacuum pumps and improve the working performance. Summary of the Invention

[0006] The purpose of the present invention is to solve the problem of unreasonable structural design of existing multi-stage vacuum pumps. The present application provides an energy-saving multi-stage turbine vacuum pump fluid structure and an assembly method, which can reduce the production and assembly difficulty of multi-stage vacuum pumps and improve the working performance.

[0007] To achieve the above purpose, the present invention provides the following technical solution: An energy-saving multi-stage turbine vacuum pump fluid structure, including a first pump body. The first pump body is assembled and formed by a first connection seat, a second connection seat, a third connection seat, a fourth connection seat, and a fifth connection seat that are fixedly connected to each other from top to bottom to form an internal flow channel. The internal flow channel and four turbine disks arranged in the first pump body form a four-stage vacuum pumping structure. The four turbine disks are fixed on a first rotating shaft, and the end of the first rotating shaft is driven by a first driving motor to rotate. The upper and lower ends of the internal flow channel are respectively connected to a total intake pipe and a first exhaust main pipe.

[0008] Preferably, a top plate fixed to the first connection seat is provided above the first pump body, and a bottom plate is provided below the first pump body. The first driving motor is fixedly installed on the top plate, and a second driving motor is fixed on the bottom plate. The top plate and the bottom plate are fixed by a first connection device. A middle connection housing is fixedly installed at the bottom of the fifth connection seat. A second pump body is provided between the middle connection housing and the bottom plate. The second pump body includes an installation sleeve, and a second inlet flow ring and a second outlet flow ring are integrally formed at the upper and lower ends of the installation sleeve respectively. The second inlet flow ring is communicated with the internal flow channel through an intermediate connection pipe, and the second outlet flow ring is communicated with the second exhaust main pipe. The output end of the second driving motor drives a second rotating shaft inserted into the second pump body, and at least three high-speed turbines are equidistantly fixed on the second rotating shaft. A matching device for cooperating with the high-speed turbine is fixedly installed at the middle position of the installation sleeve corresponding to the high-speed turbine. An annular cooling cavity is arranged inside the middle connection housing, and the left and right sides of the annular cooling cavity are respectively connected to an external coolant circulation supply device through a cooling inlet pipe and a cooling outlet pipe to cool the first rotating shaft and the second rotating shaft.

[0009] Preferably, a second connection device for fixing the first pump body is provided on the first pump body. The second connection device includes a second connecting rod fixedly installed on the first connection seat. A connecting arm sleeved on the second connecting rod is fixedly installed on the fourth connection seat, and the connecting arm is fixed to the second connecting rod by a second fixing screw.

[0010] Preferably, the first connection device includes a first fixing rod fixed to the bottom plate, and the end of the first fixing rod is fixedly installed on the top plate by a first fixing screw installed by screwing. A positioning seat is integrally formed on the first fixing screw, and the positioning seat is fixed to the top plate by a limit screw. A connecting frame is fixedly installed on the outer side of the middle connection housing, and the connecting frame is fixedly connected to the first fixing rod by a third fixing screw.

[0011] Preferably, fixing brackets are fixedly installed on both the top plate and the bottom plate, and the fixing brackets are fixedly installed on an external connection device through bolts.

[0012] Preferably, the high-speed turbine includes a rotating mating ring that is rotationally sealed with the inner wall of the installation sleeve. The high-speed turbine further includes a rotating inner ring fixedly installed on the second rotating shaft. The rotating mating ring is fixedly connected to the rotating inner ring through at least sixteen inclined turbine blades arranged in a circumferential array. The matching device includes a support ring fixedly installed on the installation sleeve. The matching device further includes an inner sealing ring that is rotationally sealed with the second rotating shaft, and the support ring and the inner sealing ring are connected by inclined baffles that are the same as the inclined turbine blades.

[0013] Preferably, annular fitting grooves are provided below both the rotation fitting ring and the rotation inner ring, and annular sealing protrusions installed in a sliding manner are provided in the annular fitting grooves at corresponding positions on both the support ring and the inner sealing ring. The inclination angle of the inclined turbine blade in the rotation plane along the rotation direction is 20 degrees to 40 degrees, and the inclination direction of the inclined baffle is opposite to and has the same inclination angle as that of the inclined turbine blade.

[0014] Preferably, a first inlet flow ring and a first exhaust flow ring are respectively provided on the first connection seat and the fourth connection seat. The first inlet flow ring is communicated with the main inlet air pipe, and the first exhaust flow ring is communicated with the first exhaust main pipe. Working cavities for forming an internal flow path are respectively provided between the first connection seat and the second connection seat, between the second connection seat and the third connection seat, between the third connection seat and the fourth connection seat, and between the fourth connection seat and the fifth connection seat. The turbine disk is arranged to rotate in the working cavity, and isolation guiding plates for isolating adjacent turbine disks and rotationally sealing with the first rotating shaft are fixedly installed at the bottoms of the first connection seat, the second connection seat, and the third connection seat. A main inlet air flow path for connecting the first inlet flow ring and the working cavity at the topmost part in the first pump body is provided in the first connection seat, and a main exhaust air flow path for connecting the first exhaust flow ring and the working cavity at the bottommost part is provided in the fourth connection seat. Oblique exhaust air flow paths for connecting the working cavities inside themselves are provided at the lower ends of the first connection seat, the second connection seat, and the third connection seat, and oblique inlet air flow paths for connecting the working cavities at their lower ends and the oblique exhaust air flow paths at their upper ends are provided at the upper ends of the second connection seat, the third connection seat, and the fourth connection seat. Annular air cavities for connecting their own oblique inlet air flow paths are provided on the second connection seat, the third connection seat, and the fourth connection seat.

[0015] Preferably, a main inlet valve and a first exhaust valve are respectively installed on the main inlet air pipe and the first exhaust main pipe, an intermediate valve is installed on the intermediate connecting pipe, a second exhaust valve is installed on the second exhaust main pipe, and both the first driving motor and the second driving motor are three-phase stepping motors. A controller is fixedly installed on the intermediate connecting housing, and the controller is electrically connected to the main inlet valve, the first exhaust valve, the intermediate valve, the second exhaust valve, the first driving motor, and the second driving motor respectively.

[0016] An assembly method for a fluid structure of an energy-saving multi-stage turbine vacuum pump includes the following steps:

[0017] Step 1: First, fix the first connecting seat to the top plate. Then, fixedly install the first rotating shaft on the top plate and secure it to the first driving motor. Subsequently, fix the topmost turbine disk to the first rotating shaft. Then, fix an isolation guide plate to the bottom of the first connecting seat and properly mate it with the topmost turbine disk. Next, snap the second connecting seat into the bottom of the first connecting seat. Then, sequentially install the turbine disk and another isolation guide plate in their respective positions. Subsequently, fix the third connecting seat, the fourth connecting seat, and their corresponding turbine disks and isolation guide plates in sequence according to this installation order. Finally, tightly fasten the fifth connecting seat to the bottom of the fourth connecting seat to complete the assembly of the first pump body.

[0018] Step 2: Place the second rotating shaft at the center of the installation sleeve. Then, fix the topmost high-speed turbine to the second rotating shaft. Next, align a matching device with the high-speed turbine and fix it to the installation sleeve. Repeat this installation order until all the high-speed turbines and matching devices are installed in the second pump body. Subsequently, fix the second pump body to the bottom plate and fix the second rotating shaft to the output end of the second driving motor.

[0019] Step 3: Connect the bottom of the first rotating shaft to the upper end of the intermediate connecting housing through a magnetic bearing. Then, connect the top of the second rotating shaft to the bottom of the intermediate housing through a magnetic bearing. At the same time, adjust the position of the intermediate connecting pipe to correctly connect it to the internal flow channel. Then, use the first connecting device to completely fix the top plate and the bottom plate.

[0020] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0021] An energy-saving multi-stage turbine vacuum pump fluid structure and assembly method proposed by the present invention can form the first pump body in the form of assembling multiple components and form an internal flow channel structure convenient for multi-stage vacuum pumping, solve the problem of unreasonable structural design of existing multi-stage vacuum pumps, and can reduce the production and assembly difficulty of multi-stage vacuum pumps and improve the working performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a schematic structural diagram of the present invention;

[0023] Figure 2 is a side view of the structure of the present invention;

[0024] Figure 3 is a sectional view of the intermediate connecting housing of the present invention;

[0025] Figure 4 is a connection diagram of the top plate and the bottom plate of the present invention;

[0026] Figure 5 is a sectional view of the second pump body of the present invention;

[0027] Figure 6 It is a sectional view of the first pump body of the present invention;

[0028] Figure 7 It is a structural diagram of the internal flow channel in the first pump body of the present invention;

[0029] Figure 8 It is a structural diagram of the first pump body of the present invention.

[0030] In the figure: 1. Controller; 2. High-speed turbine; 201. Annular fitting groove; 202. Rotating fitting ring; 203. Obliquely arranged turbine blades; 204. Rotating inner ring; 3. Second pump body; 301. Second inlet flow ring; 302. Mounting sleeve; 303. Second discharge flow ring; 4. Fitting device; 401. Support ring; 402. Obliquely arranged baffle; 403. Inner sealing ring; 5. First connecting device; 501. Limit screw; 502. Positioning seat; 503. First fixing screw; 504. First fixing rod; 6. First pump body; 601. First connecting seat; 602. First inlet flow ring; 603. Second connecting seat; 604. Third connecting seat; 605. Fourth connecting seat; 606. First discharge flow ring; 607. Fifth connecting seat; 7. Second connecting device; 701. Second connecting rod; 702. Second fixing screw; 703. Connecting arm; 8. Internal flow channel; 801. Total inlet air flow channel; 802. Obliquely arranged exhaust air flow channel; 803. Annular air cavity; 804. Working cavity; 805. Obliquely arranged inlet air flow channel; 806. Total exhaust air flow channel; 9. First driving motor; 10. Top plate; 11. Total inlet air pipe; 12. Intermediate valve; 13. Intermediate connecting pipe; 14. Bottom plate; 15. Second driving motor; 16. Intermediate connecting housing; 17. Fixed bracket; 18. First exhaust main pipe; 19. Second exhaust main pipe; 20. Cooling discharge pipe; 21. Annular cooling cavity; 22. Cooling inlet pipe; 23. Third fixing screw; 24. Connecting frame; 25. Total inlet air valve; 26. First exhaust valve; 27. First rotating shaft; 28. Turbine disk; 29. Isolation guide plate; 30. Second exhaust valve; 31. Second rotating shaft. Detailed implementation manners

[0031] In order to clearly and completely describe the purpose, technical solution of the present invention and make the advantages more clear, the following further details the embodiments of the present invention with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are part of the embodiments of the present invention, rather than all of the embodiments, and are only used to explain the embodiments of the present invention, not to limit the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0032] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "middle", "upper", "lower", "left", "right", "inner", "outer", "top", "bottom", "side", "vertical", "horizontal", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present invention. In addition, the terms "one", "first", "second", "third", "fourth", "fifth", "sixth" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0033] In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, the terms "mounted", "connected", "coupled" shall be construed broadly. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] For the sake of simplicity and illustration, the principles of the embodiments are mainly described by reference to examples. In the following description, many specific details are set forth to provide a thorough understanding of the embodiments. However, it is obvious that for those of ordinary skill in the art, these embodiments may not be limited to these specific details in practice. In some instances, well-known methods and structures are not described in detail to avoid unnecessarily obscuring these embodiments. Additionally, all embodiments can be used in combination with each other. Embodiment 1

[0035] Please refer to Figure 1 、 Figure 2 、 Figure 6 、 Figure 7 and 8, the present invention provides a technical solution: an energy-saving multi-stage turbine vacuum pump fluid structure, which includes a first pump body 6. The first pump body 6 is assembled and formed by a first connecting seat 601, a second connecting seat 603, a third connecting seat 604, a fourth connecting seat 605 and a fifth connecting seat 607 that are fixedly clamped to each other from top to bottom to form an internal flow channel 8. The internal flow channel 8 and four turbine disks 28 arranged in the first pump body 6 form a four-stage vacuum pumping structure. The four turbine disks 28 are fixed on a first rotating shaft 27, and the end of the first rotating shaft 27 is driven by a first driving motor 9 to rotate. The upper and lower ends of the internal flow channel 8 are respectively connected with a total intake pipe 11 and a first exhaust main pipe 18. The designed multi-stage turbine vacuum pump fluid structure of the present invention can form the first pump body 6 through the first connecting seat 601, the second connecting seat 603, the third connecting seat 604, the fourth connecting seat 605 and the fifth connecting seat 607, so as to perform multi-stage vacuum pumping. And the special assembling structure can also help to quickly complete the assembly of the first pump body 6. At the same time, since the first connecting seat 601, the second connecting seat 603, the third connecting seat 604, the fourth connecting seat 605 and the fifth connecting seat 607 are separately manufactured, the production difficulty can be effectively reduced. Embodiment 2

[0036] Please refer to Figures 1 to 8, on the basis of the first embodiment, a top plate 10 fixed to the first connection seat 601 is provided above the first pump body 6, and a bottom plate 14 is provided below the first pump body 6. The first driving motor 9 is fixedly installed on the top plate 10, and a second driving motor 15 is fixed on the bottom plate 14. The top plate 10 and the bottom plate 14 are fixed by a first connecting device 5. Fixed brackets 17 are fixedly installed on both the top plate 10 and the bottom plate 14, and the fixed brackets 17 are fixedly installed with external connecting devices through bolts. A middle connecting housing 16 is fixedly installed at the bottom of the fifth connection seat 607. A second pump body 3 is provided between the middle connecting housing 16 and the bottom plate 14. The second pump body 3 includes an installation sleeve 302, and a second inlet ring 301 and a second outlet ring 303 are integrally formed at the upper and lower ends of the installation sleeve 302 respectively. The second inlet ring 301 is communicated with the internal flow channel 8 through an intermediate connecting pipe 13, and the second outlet ring 303 is communicated with the second exhaust main pipe 19. The output end of the second driving motor 15 drives a second rotating shaft 31 inserted into the second pump body 3, and at least three high-speed turbines 2 are equidistantly fixed on the second rotating shaft 31. A matching device 4 used in cooperation with the high-speed turbines 2 is fixedly installed at the middle position of the installation sleeve 302 corresponding to the high-speed turbines 2. An annular cooling cavity 21 is provided inside the middle connecting housing 16, and the left and right sides of the annular cooling cavity 21 are respectively connected to an external coolant circulation supply device through a cooling inlet pipe 22 and a cooling outlet pipe 20 to cool the first rotating shaft 27 and the second rotating shaft 31. Cooling through the annular cooling cavity 21 can prevent the first rotating shaft 27 and the second rotating shaft 31 from generating large deformations due to high temperature, thereby affecting the rotation accuracy, and further improving the service life of the equipment;

[0037] Please refer to Figure 6 , a second connecting device 7 for fixing the first pump body 6 is provided on the first pump body 6. The second connecting device 7 includes a second connecting rod 701 fixedly installed on the first connection seat 601. A connecting arm 703 sleeved on the second connecting rod 701 is fixedly installed on the fourth connection seat 605, and the connecting arm 703 is fixed to the second connecting rod 701 through a second fixing knob 702. The second connecting device 7 can effectively fix the first pump body 6 tightly, thereby preventing the internal moving parts of the first pump body 6 from being misaligned and worn due to loosening during use. Therefore, the service life of the equipment can be improved;

[0038] Please refer to Figure 1 and Figure 4, the first connecting device 5 includes a first fixing rod 504 fixed to the bottom plate 14, and the end of the first fixing rod 504 is fixedly installed on the top plate 10 by a first fixing screw button 503 installed by screwing. A positioning seat 502 is integrally formed on the first fixing screw button 503, and the positioning seat 502 is fixed to the top plate 10 by a limit screw button 501. A connecting frame 24 is fixedly installed on the outer side of the intermediate connecting housing 16, and the connecting frame 24 is fixedly connected to the first fixing rod 504 by a third fixing screw button 23. The first connecting device 5 can achieve the rapid fixation of the top plate 10 and the bottom plate 14;

[0039] Please refer to Figure 5 , the high-speed turbine 2 includes a rotating mating ring 202 that is rotationally sealed with the inner wall of the mounting sleeve 302, and the high-speed turbine 2 further includes a rotating inner ring 204 fixedly installed with the second rotating shaft 31. The rotating mating ring 202 is fixedly connected to the rotating inner ring 204 by at least sixteen obliquely arranged turbine fan blades 203 arranged in a circumferential array. The mating device 4 includes a support ring 401 fixedly installed on the mounting sleeve 302, and the mating device 4 further includes an inner sealing ring 403 that is rotationally sealed with the second rotating shaft 31. The support ring 401 and the inner sealing ring 403 are connected by an oblique baffle 402 that is the same as the oblique turbine fan blade 203. Annular mating grooves 201 are provided below both the rotating mating ring 202 and the rotating inner ring 204, and annular sealing protrusions that are slidably installed are provided in the annular mating grooves 201 at corresponding positions on both the support ring 401 and the inner sealing ring 403. The inclination angle of the oblique turbine fan blade 203 in the rotation plane along the rotation direction is from twenty degrees to forty degrees, and the inclination direction of the oblique baffle 402 is opposite to and has the same inclination angle as that of the oblique turbine fan blade 203. The high-speed turbine 2, the second pump body 3, and the mating device 4 can be assembled to form a turbomolecular pump, thereby effectively improving the vacuum pumping capacity of the equipment;

[0040] Please refer to Figure 6 and Figure 7, a first connection seat 601 and a fourth connection seat 605 are respectively provided with a first inlet flow ring 602 and a first exhaust flow ring 606. The first inlet flow ring 602 is communicated with the total inlet air pipe 11, and the first exhaust flow ring 606 is communicated with the first exhaust main pipe 18. Between the first connection seat 601 and the second connection seat 603, between the second connection seat 603 and the third connection seat 604, between the third connection seat 604 and the fourth connection seat 605, and between the fourth connection seat 605 and the fifth connection seat 607, working chambers 804 for forming an internal flow path 8 are respectively provided. A turbine disk 28 is arranged in the working chamber 804 for rotation. The bottoms of the first connection seat 601, the second connection seat 603, and the third connection seat 604 are all fixedly installed with isolation guiding plates 29 for isolating adjacent turbine disks 28 and rotationally sealing with the first rotating shaft 27. A total inlet air flow path 801 for connecting the first inlet flow ring 602 and the working chamber 804 at the topmost part in the first pump body 6 is arranged in the first connection seat 601, and a total exhaust air flow path 806 for connecting the first exhaust flow ring 606 and the working chamber 804 at the bottommost part is arranged in the fourth connection seat 605. Oblique exhaust air flow paths 802 for connecting the working chambers 804 inside themselves are arranged at the lower ends of the first connection seat 601, the second connection seat 603, and the third connection seat 604, and oblique inlet air flow paths 805 for connecting the working chambers 804 at their lower ends and the oblique exhaust air flow paths 802 at their upper ends are arranged at the upper ends of the second connection seat 603, the third connection seat 604, and the fourth connection seat 605. Annular air cavities 803 for connecting their own oblique inlet air flow paths 805 are opened on the second connection seat 603, the third connection seat 604, and the fourth connection seat 605. During the working process, the gas sent through the total inlet air pipe 11 will sequentially pass through each working chamber 804 along the internal flow path 8, and then be sent into the first exhaust pipe 18 or the second pump body 3 under the step-by-step vacuum extraction of each working chamber 804. The interior of the second pump body 3 of the present invention adopts a design form convenient for assembly, and at the same time, the first pump body 6 and the second pump body 3 can be quickly assembled together. Therefore, the assembly is more convenient, and it is also convenient for subsequent disassembly and maintenance of the equipment;

[0041] Please refer to Figure 1 , Figure 2 , Figure 5 , Figure 6 and Figure 7 , a total inlet air valve 25 and a first exhaust air valve 26 are respectively installed on the total inlet air pipe 11 and the first exhaust main pipe 18, an intermediate valve 12 is installed on the intermediate connecting pipe 13, a second exhaust air valve 30 is installed on the second exhaust main pipe 19, and the first driving motor 9 and the second driving motor 15 are both three-phase stepping motors. A controller 1 is fixedly installed on the intermediate connecting housing 16, and the controller 1 is respectively electrically connected to the total inlet air valve 25, the first exhaust air valve 26, the intermediate valve 12, the second exhaust air valve 30, the first driving motor 9, and the second driving motor 15;

[0042] When the fluid structure of the multi-stage turbine vacuum pump designed by the present invention is working, first, the gas in the equipment to be evacuated is sent into the internal flow path 8 of the first pump body 6 through the main intake pipe 10. At this time, the first driving motor 9 starts to work, and the multi-stage evacuation structure provided by the first pump body 6 is used to evacuate the corresponding equipment to be evacuated. At this time, the gas extracted during evacuation is directly discharged through the first exhaust main pipe 18. A vacuum sensor electrically connected to the controller 1 is installed on the main intake pipe 10 to detect the internal vacuum degree of the equipment to be evacuated. When the evacuation of the equipment to be evacuated reaches the specified degree, the first exhaust valve 26 on the first exhaust main pipe 18 closes. At this time, the intermediate valve 12 opens, and at the same time, the second driving motor 15 starts to work. Thus, the gas in the first pump body 6 is sent into the second pump body 6 through the intermediate connecting pipe 13. Since the second pump body 6 can form a turbo molecular pump with stronger evacuation ability, the gas can be further extracted from the second exhaust main pipe 19, thus meeting the evacuation requirements. Using this step-by-step evacuation method, on the one hand, it is not necessary for the second driving motor 15 to participate when evacuating to a lower vacuum degree in the early stage, which is more energy-saving. Secondly, the equipment inside the second pump body 3 is more precise and has a higher rotation speed. If gas with a higher density is directly sent into the second pump body 3, it is easy to damage the second pump body. And using this step-by-step operation method can effectively improve the service life of the equipment. Embodiment 3

[0043] On the basis of Embodiment 2, the present invention also provides an assembly method for an energy-saving multi-stage turbine vacuum pump fluid structure, including the following steps:

[0044] Step 1: First, fix the first connecting seat 601 to the top plate 10, then fixedly install the first rotating shaft 27 on the top plate 10 and fix it to the first driving motor 9. Subsequently, fix the topmost turbine disk 28 on the first rotating shaft 27. Then, fix an isolation guiding plate 29 to the bottom of the first connecting seat 601 and properly cooperate it with the topmost turbine disk 28. Then, snap the second connecting seat 603 into the bottom of the first connecting seat 601. Then, install the turbine disk 28 and another isolation guiding plate 29 at the corresponding positions in sequence. Subsequently, fixedly install the third connecting seat 604, the fourth connecting seat 605, and the corresponding turbine disks 28 and isolation guiding plates 29 in this installation sequence. Then, clamp and fix the fifth connecting seat 607 to the bottom of the fourth connecting seat 605 to complete the assembly of the first pump body 6;

[0045] Step 2: Place the second rotating shaft 31 at the center of the mounting sleeve 302. Then, fix the high-speed turbine 2 at the topmost position on the second rotating shaft 31. Next, align a matching device 4 with the high-speed turbine 2 and fix it on the mounting sleeve 302. Repeat this installation sequence until all the high-speed turbines 2 and matching devices 4 are installed in the second pump body 3. Subsequently, fix the second pump body 3 on the bottom plate 14 and fix the second rotating shaft 31 to the output end of the second drive motor 15.

[0046] Step 3: Connect the bottom of the first rotating shaft 27 to the upper end of the intermediate connection housing 16 through a magnetic bearing. Then, connect the top of the second rotating shaft 31 to the bottom of the intermediate housing 16 through a magnetic bearing. At the same time, adjust the position of the intermediate connection pipe 13 to correctly connect it to the internal flow channel 8. Then, use the first connection device 5 to completely fix the top plate 10 and the bottom plate 14.

[0047] Although the above-described illustrative specific embodiments of the present application have been described to enable those skilled in the art to understand the present application, the present application is not limited to the scope of the specific embodiments. For those of ordinary skill in the art, as long as various changes are within the spirit and scope of the present application defined and determined by the appended claims, all applications and creations using the concept of the present application are within the scope of protection.

Claims

1. An energy-saving multi-stage turbine vacuum pump fluid structure, characterized in that, It includes a first pump body (6). The first pump body (6) is assembled by a first connecting seat (601), a second connecting seat (603), a third connecting seat (604), a fourth connecting seat (605) and a fifth connecting seat (607) which are fixedly clamped with each other from top to bottom to form an internal flow channel (8). And the internal flow channel (8) and four turbine discs (28) arranged in the first pump body (6) form a four-stage vacuum pumping structure. The four turbine discs (28) are fixed on a first rotating shaft (27), and the end of the first rotating shaft (27) is driven by a first driving motor (9) to rotate. The upper and lower ends of the internal flow channel (8) are respectively connected with a total intake pipe (11) and a first exhaust main pipe (18); A top plate (10) fixed to the first connecting seat (601) is arranged above the first pump body (6), and a bottom plate (14) is arranged below the first pump body (6). The first driving motor (9) is fixedly installed on the top plate (10), and a second driving motor (15) is fixed on the bottom plate (14). The top plate (10) and the bottom plate (14) are fixed by a first connecting device (5). And the bottom of the fifth connecting seat (607) is fixedly installed with an intermediate connecting housing (16). A second pump body (3) is arranged between the intermediate connecting housing (16) and the bottom plate (14). The second pump body (3) includes an installation sleeve (302), and a second inlet flow ring (301) and a second outlet flow ring (303) are integrally formed at the upper and lower ends of the installation sleeve (302) respectively. The second inlet flow ring (301) is communicated with the internal flow channel (8) through an intermediate connecting pipe (13). The second outlet flow ring (303) is communicated with a second exhaust main pipe (19). The output end of the second driving motor (15) drives a second rotating shaft (31) inserted into the second pump body (3), and at least three high-speed turbines (2) are fixedly arranged on the second rotating shaft (31) at equal intervals. A matching device (4) used in cooperation with the high-speed turbine (2) is fixedly installed at the middle position of the installation sleeve (302) corresponding to the high-speed turbine (2). An annular cooling cavity (21) is arranged inside the intermediate connecting housing (16). The left and right sides of the annular cooling cavity (21) are respectively connected with an external coolant circulation supply device through a cooling inlet pipe (22) and a cooling outlet pipe (20) to cool the first rotating shaft (27) and the second rotating shaft (31); A second connecting device (7) for fixing the first pump body (6) is arranged on the first pump body (6). And the second connecting device (7) includes a second connecting rod (701) fixedly installed on the first connecting seat (601). A connecting arm (703) sleeved on the second connecting rod (701) is fixedly installed on the fourth connecting seat (605), and the connecting arm (703) is fixed to the second connecting rod (701) by a second fixing knob (702).

2. The fluid structure of an energy-saving multi-stage turbine vacuum pump according to claim 1, wherein: The first connecting device (5) includes a first fixing rod (504) fixed to the bottom plate (14), and the end of the first fixing rod (504) is fixedly installed on the top plate (10) by a first fixing screw button (503) installed by screwing. A positioning seat (502) is integrally formed on the first fixing screw button (503), and the positioning seat (502) is fixed to the top plate (10) by a limit screw button (501). A connecting frame (24) is fixedly installed on the outer side of the intermediate connecting housing (16), and the connecting frame (24) is fixedly connected to the first fixing rod (504) by a third fixing screw button (23).

3. The fluid structure of an energy-saving multi-stage turbine vacuum pump according to claim 1, characterized in that: Fixed brackets (17) are fixedly installed on both the top plate (10) and the bottom plate (14), and the fixed brackets (17) are fixedly installed with external connecting devices through bolts.

4. A fluid structure of an energy-saving multi-stage turbine vacuum pump according to claim 1, characterized in that: The high-speed turbine (2) includes a rotating mating ring (202) that is rotationally sealed with the inner wall of the mounting sleeve (302), and the high-speed turbine (2) further includes a rotating inner ring (204) fixedly installed with the second rotating shaft (31). The rotating mating ring (202) is fixedly connected to the rotating inner ring (204) by at least sixteen obliquely arranged turbine blades (203) arranged in a circumferential array. The matching device (4) includes a support ring (401) fixedly installed with the mounting sleeve (302). The matching device (4) further includes an inner sealing ring (403) that is rotationally sealed with the second rotating shaft (31), and the support ring (401) and the inner sealing ring (403) are connected by an obliquely arranged baffle (402) that is the same as the obliquely arranged turbine blades (203).

5. A fluid structure of an energy-saving multi-stage turbine vacuum pump according to claim 4, characterized in that: Circular mating grooves (201) are provided below both the rotating mating ring (202) and the rotating inner ring (204), and circular sealing protrusions that are slidably installed are provided in the circular mating grooves (201) at corresponding positions on both the support ring (401) and the inner sealing ring (403). The inclination angle of the obliquely arranged turbine blades (203) in the rotation plane along the rotation direction is from twenty degrees to forty degrees, and the inclination direction of the obliquely arranged baffle (402) is opposite to that of the obliquely arranged turbine blades (203) and the inclination angles are the same.

6. The fluid structure of an energy-saving multi-stage turbine vacuum pump according to claim 1, wherein: The first connection seat (601) and the fourth connection seat (605) are respectively provided with a first inlet flow ring (602) and a first exhaust flow ring (606). The first inlet flow ring (602) is communicated with the total inlet air pipe (11), and the first exhaust flow ring (606) is communicated with the first exhaust main pipe (18). Between the first connection seat (601) and the second connection seat (603), between the second connection seat (603) and the third connection seat (604), between the third connection seat (604) and the fourth connection seat (605), and between the fourth connection seat (605) and the fifth connection seat (607), working cavities (804) for forming an internal flow channel (8) are respectively provided. The turbine disk (28) is arranged in the working cavity (804) for rotation. The bottoms of the first connection seat (601), the second connection seat (603), and the third connection seat (604) are all fixedly installed with isolation guiding plates (29) for isolating adjacent turbine disks (28) and rotationally sealing with the first rotating shaft (27). A total inlet air flow channel (801) for connecting the first inlet flow ring (602) and the working cavity (804) at the topmost part in the first pump body (6) is arranged in the first connection seat (601), and a total exhaust air flow channel (806) for connecting the first exhaust flow ring (606) and the working cavity (804) at the bottommost part is arranged in the fourth connection seat (605). Oblique exhaust air flow channels (802) for connecting the working cavities (804) inside themselves are arranged at the lower ends of the first connection seat (601), the second connection seat (603), and the third connection seat (604), and oblique inlet air flow channels (805) for connecting the working cavities (804) at their lower ends and the oblique exhaust air flow channels (802) at their upper ends are arranged at the upper ends of the second connection seat (603), the third connection seat (604), and the fourth connection seat (605). Annular air cavities (803) for connecting their own oblique inlet air flow channels (805) are arranged on the second connection seat (603), the third connection seat (604), and the fourth connection seat (605).

7. The fluid structure of an energy-saving multi-stage turbine vacuum pump according to claim 1, characterized in that: A total inlet air valve (25) and a first exhaust air valve (26) are respectively installed on the total inlet air pipe (11) and the first exhaust main pipe (18), an intermediate valve (12) is installed on the intermediate connecting pipe (13), a second exhaust air valve (30) is installed on the second exhaust main pipe (19), the first driving motor (9) and the second driving motor (15) are both three-phase stepping motors, a controller (1) is fixedly installed on the intermediate connecting housing (16), and the controller (1) is electrically connected with the total inlet air valve (25), the first exhaust air valve (26), the intermediate valve (12), the second exhaust air valve (30), the first driving motor (9), and the second driving motor (15) respectively.

8. The assembling method of an energy-saving multi-stage turbine vacuum pump fluid structure according to claim 6, characterized in that Including the following steps: Step 1: First, fix the first connecting seat (601) to the top plate (10), then fixedly install the first rotating shaft (27) on the top plate (10) and fix it to the first driving motor (9). Subsequently, fix the turbine disk (28) at the topmost position on the first rotating shaft (27). Then, fix an isolation guide plate (29) to the bottom of the first connecting seat (601) and properly mate it with the turbine disk (28) at the topmost position. Then, snap the second connecting seat (603) into the bottom of the first connecting seat (601). Then, install the turbine disk (28) and another isolation guide plate (29) in their corresponding positions in sequence. Subsequently, fix the third connecting seat (604), the fourth connecting seat (605), and their corresponding turbine disks (28) and isolation guide plates (29) in sequence. Then, tightly fix the fifth connecting seat (607) to the bottom of the fourth connecting seat (605) to complete the assembly of the first pump body (6). Step 2: Place the second rotating shaft (31) at the center of the mounting sleeve (302). Subsequently, fix the high-speed turbine (2) at the topmost position on the second rotating shaft (31). Then, align a matching device (4) with the high-speed turbine (2) and fix it to the mounting sleeve (302). Repeat this installation sequence until all the high-speed turbines (2) and matching devices (4) are installed into the second pump body (3). Then, fix the second pump body (3) to the bottom plate (14) and fix the second rotating shaft (31) to the output end of the second driving motor (15). Step 3: Connect the bottom of the first rotating shaft (27) to the upper end of the intermediate connecting housing (16) through a magnetic bearing, and connect the top of the second rotating shaft (31) to the bottom of the intermediate connecting housing (16) through a magnetic bearing. At the same time, adjust the position of the intermediate connecting pipe (13) to correctly connect it to the internal flow channel (8). Then, use the first connecting device (5) to completely fix the top plate (10) and the bottom plate (14).

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