A flow controller

Abstract

This application provides a flow controller, including a valve assembly, a flow detection assembly, and a control circuit board. The valve assembly includes a valve body, a valve core, and a motor for driving the valve core to rotate. The valve body has a flow channel inside. The valve core includes a valve core body and a connecting body. The valve core body is installed inside the flow channel, and the connecting body extends outside the flow channel and connects to the motor. The flow detection assembly includes an impeller and a magnetic induction chip for detecting the impeller speed. The impeller is installed inside the flow channel and located on the side of the valve core body near the flow channel inlet. The magnetic induction chip is installed outside the flow channel. The control circuit board is communicatively connected to the magnetic induction chip and the motor to control the motor to drive the valve core to rotate based on the detection signal from the magnetic induction chip. This application can quickly and accurately control the liquid flow rate. Additionally, it can restore the sealing pressure by moving a one-way check washer a predetermined distance closer to the valve core body.

Description

Technical Field

[0001] This application relates to the field of semiconductor wafer dicing technology, and in particular to a flow controller. Background Technology

[0002] The semiconductor wafer dicing process requires control of the liquid flow rate, and the accuracy of this control significantly impacts the processing precision of the semiconductor wafers. How to accurately control the liquid flow rate is a technical problem that requires the expertise of those skilled in the art to solve. Summary of the Invention

[0003] To address the aforementioned technical problems, this application provides a flow controller, the flow controller comprising:

[0004] A valve assembly includes a valve body, a valve core, and a motor for driving the valve core to rotate. The valve body has a flow channel inside. The valve core includes a valve core body and a connecting body. The valve core body is installed in the flow channel, and the connecting body extends out of the flow channel and is connected to the motor.

[0005] A flow detection component, comprising an impeller and a magnetic induction chip for detecting the rotational speed of the impeller, wherein the impeller is installed inside the flow channel and located on the side of the valve core body near the inlet of the flow channel, and the magnetic induction chip is installed outside the flow channel;

[0006] A control circuit board is communicatively connected to the magnetic induction chip and the motor to control the motor to drive the valve core to rotate according to the detection signal of the magnetic induction chip.

[0007] In one embodiment of the flow controller, the valve body is provided with a mounting groove corresponding to the region where the impeller is located, a thin wall is formed between the mounting groove and the flow channel, and the magnetic induction chip is installed in the mounting groove to detect the rotational speed of the impeller through the thin wall.

[0008] In one embodiment of the flow controller, the flow detection component includes a guide tube and a turbine. The guide tube is installed inside the flow channel and located on the side of the valve core body near the inlet of the flow channel. The impeller is installed inside the guide tube, and the turbine is installed on the side of the guide tube near the inlet of the flow channel. A guide hole is provided on the side of the guide tube away from the inlet of the flow channel. Each of the turbine and the guide tube has a connecting hole. The two ends of the impeller shaft are respectively inserted into the two connecting holes.

[0009] In one embodiment of the flow controller, the flow detection component includes a rectifier block installed inside the flow channel and located on the side of the turbine near the flow channel inlet. The rectifier block has a rectification channel inside, and the rectification channel includes a tapering channel whose inner diameter gradually decreases in the direction gradually moving away from the flow channel inlet.

[0010] In one embodiment of the flow controller, the connector includes multiple parts, each part having a groove. The parts are assembled together, and the grooves of the parts align to form a motor connection hole. The output shaft of the motor extends into the motor connection hole, and the sidewall of the groove of each part holds the output shaft of the motor tightly.

[0011] In one embodiment of the flow controller, the valve assembly includes a sensing magnet, the connector has a sensing magnet connection hole, the sensing magnet is assembled in the sensing magnet connection hole, and the control circuit board has a fully open magnetic sensing chip and a fully closed magnetic sensing chip. The fully open magnetic sensing chip and the fully closed magnetic sensing chip are arranged at 90-degree intervals on the circumference of the rotation center line surrounding the valve core. When the valve core rotates to the fully open position, the sensing magnet is facing the fully open magnetic sensing chip, and when the valve core rotates to the fully closed position, the sensing magnet is facing the fully closed magnetic sensing chip.

[0012] In one embodiment of the flow controller, the valve assembly includes an inlet connector, an outlet connector, an inlet sealing ring, and an outlet sealing ring. The inlet connector is connected to the inlet of the flow channel, and the inlet sealing ring is compressed between one end face of the inlet connector and the inlet end face of the valve body. The outlet connector is connected to the outlet of the flow channel, and the outlet sealing ring is compressed between one end face of the outlet connector and the outlet end face of the valve body.

[0013] One embodiment of the flow controller includes a housing, which is assembled with a valve body. The housing and the valve body together enclose a receiving cavity, and the main body of the motor, the magnetic induction chip, the control circuit board, and the end of the connector away from the flow channel are all located within the receiving cavity.

[0014] In one embodiment of the flow controller, the valve assembly includes two sealing portions installed within the flow channel. The two sealing portions are located on opposite sides of the valve core body. Each sealing portion includes a sealing valve seat and a one-way check washer. The one-way check washer is located on the side of the sealing valve seat away from the valve core body. The one-way check washer presses against the sealing valve seat, causing the sealing valve seat to press tightly against the valve core body. The one-way check washer is unidirectionally movable within the flow channel to approach the valve core body.

[0015] In one embodiment of the flow controller, each of the two sealing portions includes one or more elastic rings compressed between the one-way check washer and the sealing valve seat, and spacer gaskets are provided between adjacent elastic rings and between the elastic rings and the one-way check washer.

[0016] This application has the following technical advantages: it can quickly and accurately control the flow rate of the liquid; it can restore the sealing pressure by moving the one-way check washer a predetermined distance closer to the valve core body, which effectively reduces the cost compared to restoring the sealing pressure by replacing related parts in the past; it can ensure the sealing effect by maintaining a certain sealing pressure between the sealing valve seat and the valve core body during the valve opening and closing process; it has a high degree of overall integration; and it has low processing cost. Attached Figure Description

[0017] Figure 1 A cross-sectional view of one embodiment of the flow controller provided in this application;

[0018] Figure 2 for Figure 1 Enlarged view of part of the flow detection component in the diagram;

[0019] Figure 3 for Figure 1 Enlarged view of part of the central valve assembly;

[0020] Figure 4 A perspective view of one embodiment of a one-way anti-reverse washer;

[0021] The annotations in the attached figures are explained as follows:

[0022] 10 Valve assembly, 101 Valve body, A Flow channel, B Mounting groove, C Thin wall, 102 Valve core, 1021 Valve core body, 1022 Connector, 1022a Split body, 103 Motor, 1031 Output shaft, 1032 Main body, 104 Inlet pipe, 105 Inlet sealing ring, 106 Outlet pipe, 107 Outlet sealing ring, 108 Induction magnet, 109 Sealing part, 1091 Sealing valve seat, 1092 One-way anti-reverse washer, 1092a Washer body, 1092b Protruding tooth, 1093 Elastic ring, 1094 Barrier washer;

[0023] 20 Flow detection component, 201 Impeller, 2011 Blade, 2012 Shaft, 202 Magnetic induction chip, 203 Flow guide tube, 2031 Flow guide hole, 204 Fan-shaped turbine, 205 Rectifier block, 2051 Gradient channel, 2052 Equal diameter channel, 206 Elastic compensation ring.

[0024] 30. Control circuit board;

[0025] 40 casing;

[0026] 50 light guide columns. Detailed Implementation

[0027] To enable those skilled in the art to better understand the technical solution of the present invention, the technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0028] like Figure 1 As shown, this application provides a flow controller, which includes a valve assembly 10, a flow detection assembly 20, and a control circuit board 30.

[0029] The valve assembly 10 includes a valve body 101, a valve core 102, and a motor 103 for driving the valve core 102 to rotate. The valve body 101 has a flow channel A inside. The valve core 102 includes a valve core body 1021 and a connecting body 1022. The valve core body 1021 is installed inside the flow channel A. The connecting body 1022 extends outside the flow channel A and is connected to the motor 103, so that the motor 103 drives the valve core 102 to rotate, thereby changing the opening degree of the valve assembly 10.

[0030] The flow detection component 20 includes an impeller 201 and a magnetic induction chip 202. The impeller 201 is installed inside the flow channel A and located on the side of the valve core body 1021 near the inlet of the flow channel A. The magnetic induction chip 202 is installed outside the flow channel A and is used to detect the rotational speed of the impeller 201. More specifically, when the impeller 201 rotates, it generates pulse signals on the magnetic induction chip 202. The number of pulse signals generated on the magnetic induction chip 202 for each revolution of the impeller 201 is constant, so the number of revolutions of the impeller 201 can be obtained from the number of pulse signals, and thus the rotational speed of the impeller 201 can be obtained. Since the rotational speed of the impeller 201 is positively correlated with the flow rate, the speed of the impeller 201 reflects the magnitude of the flow rate.

[0031] The control circuit board 30 is communicatively connected to the magnetic induction chip 202 to receive detection signals from the magnetic induction chip 202, thereby generating control commands based on these signals. The control circuit board 30 is also communicatively connected to the motor 103 to transmit the control commands to the motor 103 for control. If the current liquid flow rate is less than the target flow rate, the control circuit board 30 controls the motor 103 to drive the valve core 102 to rotate in the opening direction, increasing the opening degree of the valve assembly 10. If the current liquid flow rate is greater than the target flow rate, the control circuit board 30 controls the motor 103 to drive the valve core 102 to rotate in the closing direction, decreasing the opening degree of the valve assembly 10 or closing the valve assembly 10.

[0032] The flow controller with the above structure can detect the liquid flow rate in real time and adjust the liquid flow rate in real time according to the detection results, thus realizing closed-loop control of the liquid flow rate.

[0033] In the flow controller with the above structure, since the impeller 201 is located on the side of the valve core body 1021 near the inlet of the flow channel A, the liquid flow is not disturbed by the valve core body 1021 when it flows through the impeller 201. Furthermore, since the magnetic induction chip 202 is installed outside the flow channel A, the magnetic induction chip 202 is not disturbed by the liquid flow. Therefore, the detection accuracy of the impeller 201 rotation speed is high, and correspondingly, the control accuracy of the liquid flow rate is high.

[0034] In one embodiment, such as Figure 1 As shown, the valve body 101 has a mounting groove B corresponding to the area where the impeller 201 is located, and a thin wall C is formed between the mounting groove B and the flow channel A. A magnetic induction chip 202 is installed in the mounting groove B to detect the rotational speed of the impeller 201 through the thin wall C. With this design, the magnetic induction chip 202 can respond sensitively to the rotation of the impeller 201; therefore, the detection speed of the impeller 201's rotational speed is relatively fast, meaning the magnetic induction chip 202 can detect the impeller 201's rotational speed relatively quickly.

[0035] In one embodiment, such as Figure 2 As shown, the blades 2011 of the impeller 201 are straight blades that extend radially. Compared with helical blades, straight blades are simpler to process and are more conducive to improving the accuracy of impeller 201 rotation speed detection.

[0036] In one embodiment, such as Figure 1 and Figure 2 As shown, the flow detection assembly 20 further includes a guide tube 203 and a turbine 204. The guide tube 203 is installed inside the flow channel A and located on the side of the valve core body 1021 near the inlet of the flow channel A. The turbine 204 is installed on the side of the guide tube 203 near the inlet of the flow channel A. The impeller 201 is installed inside the guide tube 203, and a guide hole 2031 is provided on the side of the guide tube 203 away from the inlet of the flow channel A. The guide tube 203 and the turbine 204 each have a connecting hole, and the two ends of the impeller shaft 2012 of the impeller 201 are inserted into these two connecting holes. More specifically, the turbine 204 can be a fan-shaped turbine. The turbine 204 can guide the liquid flow into a spiral flow in advance, so that when the liquid flow passes through the impeller 201, it can impact the rotation of the impeller 201 more, thereby making the rotational speed of the impeller 201 more accurately reflect the liquid flow rate. The guide hole 2031 guides the liquid flow through the impeller 201 into a horizontal flow, so that the liquid flow can flow smoothly towards the valve core body 1021 without easily impacting it, which helps to extend the service life of the valve core body 1021. In addition, the guide tube 203 and the turbine 204 also provide support for the impeller 201, so that the impeller 201 can be reliably installed in the flow channel A in a rotatable manner.

[0037] In one embodiment, such as Figure 1 and Figure 2As shown, the flow detection assembly 20 further includes a rectifier block 205. The rectifier block 205 is installed within the flow channel A and located on the side of the turbine 204 near the inlet of flow channel A. The rectifier block 205 has a rectifier channel inside, which includes a tapering channel 2051. The inner diameter of the tapering channel 2051 gradually decreases in the direction gradually moving away from the inlet of flow channel A. This allows the liquid flow to be concentrated towards the central region of the turbine 204, thus enabling it to be better guided by the turbine 204 into a spiral flow, thereby further improving the accuracy of liquid flow detection. More specifically, the rectifier channel may also include a constant-diameter channel 2052, which is connected to the small-diameter end of the tapering channel 2051, and the diameter of the constant-diameter channel 2052 is equal to the minimum diameter of the tapering channel 2051.

[0038] In one embodiment, the valve body 101 is formed by 3D printing. This forming process has low processing cost, but the dimensional deviation is larger than that of precision machining. Therefore, in order to compensate for the dimensional deviation, an elastic compensation ring 206 can be set between the guide tube 203 and the stepped surface of the guide tube 203 in the flow channel A of the valve body 101, as well as between the rectifier block 205 and the turbine 204.

[0039] In one embodiment, such as Figure 1 As shown, the connector 1022 includes multiple parts 1022a (two are shown in the figure, but not limited to two). Each part 1022a has a groove. The parts 1022a are assembled together, which can be done using threaded fasteners, but is not limited to this method. The grooves of the parts 1022a align to form a motor connection hole. The output shaft 1031 of the motor 103 extends into the motor connection hole, and is held tightly by the sidewalls of the grooves of the parts 1022a. With this design, there is no gap between the output shaft 1031 of the motor 103 and the connector 1022. Therefore, the rotation of the output shaft 1031 of the motor 103 can be completely converted into the rotation of the valve core 102, thereby improving the accuracy of fluid flow control.

[0040] In one embodiment, such as Figure 1 As shown, the valve assembly 10 includes an inlet pipe 104, an outlet pipe 106, an inlet sealing ring 105, and an outlet sealing ring 107. The inlet pipe 104 is connected to the inlet of the flow channel A. The inlet sealing ring 105 is compressed between one end face of the inlet pipe 104 and the inlet end face of the valve body 101. The outlet pipe 106 is connected to the outlet of the flow channel A. The outlet sealing ring 107 is compressed between one end face of the outlet pipe 106 and the outlet end face of the valve body 101.

[0041] In one embodiment, such as Figure 1As shown, the valve assembly 10 includes a sensing magnet 108, and the connector 1022 has a sensing magnet connection hole, in which the sensing magnet 108 is assembled. The control circuit board 30 has a fully open magnetic sensing chip and a fully closed magnetic sensing chip. The fully open and fully closed magnetic sensing chips are arranged at 90-degree intervals on the circumference surrounding the rotation center line of the valve core 102. When the valve core 102 rotates to the fully open position, the sensing magnet 108 faces the fully open magnetic sensing chip; when the valve core 102 rotates to the fully closed position, the sensing magnet 108 faces the fully closed magnetic sensing chip. This design allows the position of the valve core 102 to be determined through magnetic induction, ensuring that the valve core 102 rotates within the fully open and fully closed position range. Furthermore, because the sensing magnet 108 is assembled with the valve core 102, the sensed position of the valve core 102 is very accurate, thereby improving the accuracy of fluid flow control.

[0042] In one embodiment, such as Figure 1 As shown, the flow controller includes a housing 40, which is assembled with the valve body 101. The housing 40 and the valve body 101 together form a receiving cavity. The main body 1032 of the motor 103, the magnetic induction chip 202, the control circuit board 30, and the end of the connector 1022 away from the flow channel A (lower end in the figure) are all located within the receiving cavity. It should be noted that the space inside the mounting slot B where the magnetic induction chip 202 is installed is also part of the receiving cavity. This design results in a high degree of integration of the flow controller and makes it more convenient to use.

[0043] In one embodiment, such as Figure 1 As shown, the flow controller includes a light guide post 50. The control circuit board 30 is provided with an indicator light for indicating the current switching status of the valve assembly 10. One end of the light guide post 50 is inserted into the housing 40 and faces the indicator light. The other end of the light guide post 50 extends out of the housing 40 to guide the light of the indicator light to the outside of the housing 40, so that the current switching status of the valve assembly 10 can be seen intuitively from the outside, making it more convenient to use.

[0044] In one embodiment, such as Figure 1 As shown, the valve assembly 10 includes two sealing parts 109, which are installed in the flow channel A and are located on opposite sides of the valve core body 1021.

[0045] like Figure 3 As shown, both sealing parts 109 include a sealing valve seat 1091 and a one-way check washer 1092. The one-way check washer 1092 is located on the side of the sealing valve seat 1091 away from the valve core body 1021. The one-way check washer 1092 presses against the sealing valve seat 1091, causing the sealing valve seat 1091 to press tightly against the valve core body 1021, thereby achieving a seal.

[0046] The one-way check washer 1092 can move unidirectionally in the flow channel A to approach the valve core body 1021. That is, the one-way check washer 1092 can only move along the flow channel A towards the valve core body 1021, but cannot move along the flow channel A away from the valve core body 1021.

[0047] Because the one-way check washer 1092 cannot move along the flow channel A away from the valve core body 1021, it can reliably press against the sealing valve seat 1091, preventing the sealing valve seat 1091 from moving away from the valve core body 1021, thus ensuring sealing reliability. Since the one-way check washer 1092 can move along the flow channel A towards the valve core body 1021, when wear occurs in the contact area between the sealing valve seat 1091 and the valve core body 1021, causing the sealing pressure to fall below the lower limit, the sealing pressure can be restored by moving the one-way check washer 1092 a predetermined distance towards the valve core body 1021. Compared to the previous method of restoring sealing pressure by replacing related parts, this effectively reduces operating costs.

[0048] In one embodiment, such as Figure 4 As shown, the one-way anti-reverse washer 1092 includes a washer body 1092a and a protrusion 1092b. The protrusion 1092b protrudes from the outer peripheral edge of the washer body 1092a. The protrusion 1092b contacts the sidewall of the flow channel A. The protrusion 1092b is inclined relative to the washer body 1092a towards the side away from the valve core body 1021. Thus, when the one-way anti-reverse washer 1092 tends to move away from the valve core body 1021, the inclination angle of the protrusion 1092b decreases, the radial dimension of the anti-reverse washer increases, and therefore the protrusion 1092b contacts the sidewall of the flow channel A more tightly, thereby preventing the one-way anti-reverse washer 1092 from moving away from the valve core body 1021. When the one-way check washer 1092 tends to move closer to the valve core body 1021, the inclination angle of the protrusion 1092b increases, and the radial dimension of the one-way check washer 1092 decreases. Consequently, the protrusion 1092b disengages from the sidewall of the flow channel A, allowing the one-way check washer 1092 to move closer to the valve core body 1021. This type of one-way check washer 1092 has a simple structure and low manufacturing cost.

[0049] In one embodiment, such as Figure 3As shown, both sealing portions 109 include one or more elastic rings 1093. The elastic ring 1093 is compressed between the one-way check washer 1092 and the sealing valve seat 1091; that is, the elastic ring 1093 is located between the one-way check washer 1092 and the sealing valve seat 1091 and has a certain amount of compression. In the figure, both sealing portions 109 include two elastic rings 1093, but this is not limited to two. Furthermore, the number of elastic rings 1093 in the two sealing portions 109 can be the same or different. More specifically, the elastic ring 1093 can be an O-ring, which has good elastic properties.

[0050] An elastic ring 1093 is compressed and installed between the one-way anti-reverse washer 1092 and the sealing valve seat 1091. In this way, the elastic force of the elastic ring 1093 acts on the sealing valve seat 1091, so that the sealing valve seat 1091 and the valve core body 1021 always maintain a certain sealing pressure during the valve opening and closing process, thereby ensuring the sealing effect.

[0051] In one embodiment, spacer washers 1094 are provided between adjacent elastic rings 1093 and between the elastic ring 1093 and the one-way anti-reverse washer 1092. In the figure, each sealing part 109 is provided with two spacer washers 1094: one spacer washer 1094 is positioned between adjacent elastic rings 1093, and the other spacer washer 1094 is positioned between the elastic ring 1093 and the one-way anti-reverse washer 1092. The spacer washers 1094 provide support for the elastic rings 1093, improving the installation reliability of the elastic rings 1093.

[0052] The above embodiments can be freely combined without conflict.

[0053] In summary, this application has the following technical advantages: it can quickly and accurately control the flow rate of the liquid; it can restore the sealing pressure by moving the one-way check washer a predetermined distance closer to the valve core body, which effectively reduces the cost compared to restoring the sealing pressure by replacing related parts in the past; it can maintain a certain sealing pressure between the sealing valve seat and the valve core body during the valve opening and closing process, thereby ensuring the sealing effect; it has a high degree of overall integration; and it has low processing cost.

[0054] The above examples illustrate the principles and implementation methods of this application. The descriptions of these embodiments are merely for the purpose of helping to understand the method and core ideas of this application. It should be noted that those skilled in the art can make various improvements and modifications to this application without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of this application.

Claims

1. A flow controller, the flow controller comprising: A valve assembly (10) includes a valve body (101), a sensing magnet (108), two sealing parts (109), a valve core (102), and a motor (103) for driving the valve core (102) to rotate. The valve body (101) has an internal flow channel (A). The valve core (102) includes a valve core body (1021) and a connecting body (1022). The valve core body (1021) is installed inside the flow channel (A), and the connecting body (1022) extends outside the flow channel (A) and connects to the motor (103). The connecting body (1022) has a sensing magnet connection hole, and the sensing magnet (108) is assembled inside the sensing magnet connection hole. The two sealing parts (109) are... Both sealing parts (109) are installed in the flow channel (A). The two sealing parts (109) are located on opposite sides of the valve core body (1021). Both sealing parts (109) include a sealing valve seat (1091) and a one-way check washer (1092). The one-way check washer (1092) is located on the side of the sealing valve seat (1091) away from the valve core body (1021). The one-way check washer (1092) presses against the sealing valve seat (1091) so that the sealing valve seat (1091) presses against the valve core body (1021). The one-way check washer (1092) can move unidirectionally in the flow channel (A) to approach the valve core body (1021). A flow detection component (20) includes an impeller (201) and a magnetic induction chip (202) for detecting the rotational speed of the impeller (201). The impeller (201) is installed in the flow channel (A) and located on the side of the valve core body (1021) near the inlet of the flow channel (A). The magnetic induction chip (202) is installed outside the flow channel (A). A control circuit board (30) is communicatively connected to the magnetic induction chip (202) and the motor (103) to control the motor (103) to drive the valve core (102) to rotate according to the detection signal of the magnetic induction chip (202). The control circuit board (30) is provided with a fully open magnetic induction chip and a fully closed magnetic induction chip. When the valve core (102) rotates to the fully open position, the induction magnet (108) is facing the fully open magnetic induction chip. When the valve core (102) rotates to the fully closed position, the induction magnet (108) is facing the fully closed magnetic induction chip.

2. The flow controller of claim 1, wherein, The valve body (101) is provided with a mounting groove (B) corresponding to the area where the impeller (201) is located. A thin wall (C) is formed between the mounting groove (B) and the flow channel (A). The magnetic induction chip (202) is installed in the mounting groove (B) to detect the rotational speed of the impeller (201) through the thin wall (C).

3. The flow controller of claim 1, wherein, The flow detection assembly (20) includes a guide tube (203) and a turbine (204). The guide tube (203) is installed in the flow channel (A) and located on the side of the valve core body (1021) near the inlet of the flow channel (A). The impeller (201) is installed in the guide tube (203). The turbine (204) is installed on the side of the guide tube (203) near the inlet of the flow channel (A). The guide tube (203) is provided with a guide hole (2031) on the side away from the inlet of the flow channel (A). The turbine (204) and the guide tube (203) are each provided with a connecting hole. The two ends of the impeller (201) shaft (2012) are respectively inserted into the two connecting holes.

4. The flow controller of claim 3, wherein, The flow detection component (20) includes a rectifier block (205), which is installed in the flow channel (A) and located on the side of the turbine (204) near the inlet of the flow channel (A). The rectifier block (205) has a rectifier channel inside, which includes a tapering channel (2051). The inner diameter of the tapering channel (2051) gradually decreases in the direction away from the inlet of the flow channel (A).

5. The flow controller of claim 1, wherein, The connector (1022) includes multiple parts (1022a), each of which has a groove. The parts (1022a) are assembled together, and the grooves of each part (1022a) are aligned to form a motor connection hole. The output shaft (1031) of the motor (103) extends into the motor connection hole, and the output shaft (1031) of the motor (103) is held tightly by the sidewall of the groove of each part (1022a).

6. The flow controller of claim 1, wherein, The fully open magnetic induction chip and the fully closed magnetic induction chip are arranged at 90-degree intervals on the circumference of the rotation center line surrounding the valve core (102).

7. The flow controller of claim 1, wherein, The valve assembly (10) includes an inlet pipe (104), an outlet pipe (106), an inlet sealing ring (105), and an outlet sealing ring (107). The inlet pipe (104) is connected to the inlet of the flow channel (A). The inlet sealing ring (105) is compressed between one end face of the inlet pipe (104) and the inlet end face of the valve body (101). The outlet pipe (106) is connected to the outlet of the flow channel (A). The outlet sealing ring (107) is compressed between one end face of the outlet pipe (106) and the outlet end face of the valve body (101).

8. The flow controller according to claim 1, characterized in that, The flow controller includes a housing (40), which is assembled with the valve body (101). The housing (40) and the valve body (101) together form a receiving cavity. The main body (1032) of the motor (103), the magnetic induction chip (202), the control circuit board (30), and the end of the connector (1022) away from the flow channel (A) are all located in the receiving cavity.

9. The flow controller according to any one of claims 1-8, characterized in that, Both of the sealing portions (109) include one or more elastic rings (1093), which are compressed between the one-way check washer (1092) and the sealing valve seat (1091). A spacer washer (1094) is provided between adjacent elastic rings (1093) and between the elastic ring (1093) and the one-way check washer (1092).

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