Dynamic visualization display and evaluation method, system and medium for wafer dispatch strategy

Abstract

The present invention provides a method, system and medium for dynamic visualization display and evaluation of wafer dispatching strategy, and relates to the technical field of methods and equipment for manufacturing semiconductor devices. The method comprises obtaining a parameter set required for executing the wafer dispatching strategy, wherein the parameter set comprises a custom input parameter set or a slice data snapshot generated by executing a historical strategy; inputting the parameter set into the dispatching strategy to debug the dispatching strategy; and performing dynamic visualization display and effect evaluation based on the debugging process of the parameter set in the dispatching strategy. The present invention saves the slice data snapshots of the historical dispatching scenarios, thereby laying a foundation for truly reproducing the historical dispatching scenarios, and the credibility of the strategy effect evaluation results is higher.

Description

Technical Field

[0001] The present application relates to the technical field of methods and equipment for manufacturing semiconductor devices, and in particular to a method, system and medium for dynamically visualizing and evaluating wafer dispatching strategies. Background Art

[0002] The price of a single wafer in a wafer fab is high. If abnormal dispatching occurs, the economic losses will be serious. Therefore, the manufacturing department of the wafer fab needs to continuously verify the accuracy of the dispatching rules. When production anomalies have occurred, they need analysis tools that can quickly locate the dispatching anomalies.

[0003] However, traditional dispatching systems do not have simple and intuitive strategy effect analysis tools. The results of dispatching strategy execution are returned as static parameters. Analysts need to spend a lot of time on data analysis to confirm the effectiveness of dispatching, and are unable to quickly locate problems. Analysts must also master appropriate database knowledge, and the threshold for use is high.

[0004] In view of this, the present invention is proposed. Summary of the invention

[0005] One purpose of the present application is to provide a method, system and medium for dynamically visualizing and evaluating a wafer dispatching strategy, so as to dynamically and visually display the operating effect of the dispatching strategy.

[0006] To achieve the above objectives, some embodiments of the present application provide the following aspects:

[0007] In a first aspect, the present application provides a method for dynamically visualizing and evaluating wafer dispatching strategies, including:

[0008] Obtaining a parameter set required for wafer dispatch strategy execution, the parameter set including a custom input parameter set or a historical slice data snapshot generated by historical strategy execution;

[0009] Inputting the parameter set into a work dispatching strategy to debug the work dispatching strategy;

[0010] Based on the debugging process of the parameter set in the work dispatching strategy, dynamic visualization display and effect evaluation are performed, and the display content includes the execution route, process nodes and corresponding parameters of the work dispatching strategy.

[0011] Optionally, the historical strategy includes a historical work assignment strategy and a historical version of the current work assignment strategy.

[0012] Optionally, when the dispatching strategy has at least two execution routes, the debugging process based on the parameter set in the dispatching strategy is dynamically visualized and evaluated, including:

[0013] Based on the debugging process, the execution routes of the dispatching strategy at different times are determined, and the currently executed route is highlighted.

[0014] Optionally, when the dispatching strategy has at least two process nodes, the debugging process based on the parameter set in the dispatching strategy is dynamically visualized and evaluated, including:

[0015] Determine the required parameters and operation results of the dispatching strategy at different process nodes based on the debugging process;

[0016] When the current process node is executed, only the required parameters and running results of the current process node are displayed.

[0017] Optionally, when the current process node is executed, only the required parameters and operation results of the current process node are displayed, including:

[0018] When the current process node is executed, a template is determined according to the characteristics of the current process node;

[0019] The required parameters and operation results of the current process node are displayed based on the template.

[0020] Optionally, when the dispatching strategy has at least two process nodes, the debugging process based on the parameter set in the dispatching strategy is dynamically visualized and evaluated, including:

[0021] Determine changes in the dispatching strategy between different process nodes based on the debugging process, and highlight the changed parameters;

[0022] Based on the debugging process, the abnormal process nodes of the dispatching strategy are determined, and the abnormal process nodes are highlighted.

[0023] Optionally, the debugging process based on the parameter set in the dispatching strategy is dynamically visualized and evaluated, including:

[0024] Evaluate the effects based on the dynamic visualization display results and standard results.

[0025] In a second aspect, the present application also provides a method for dynamically visualizing and evaluating wafer dispatching strategies, including:

[0026] Input the initial parameters into the dispatch strategy;

[0027] Generating a slice data snapshot during the execution of the work dispatching strategy;

[0028] Dynamic visualization and effect evaluation are performed based on the slice data snapshot, and the display content includes the execution route, process nodes and corresponding parameters of the dispatch strategy.

[0029] In a third aspect, the present application also provides a wafer dispatch strategy dynamic visualization display and evaluation system, including:

[0030] The server is used to obtain a parameter set required for the execution of a wafer dispatching strategy, wherein the parameter set includes a custom input parameter set or a historical slice data snapshot generated by the execution of a historical strategy; input the parameter set into the dispatching strategy to debug the dispatching strategy; or input the initial parameter into the dispatching strategy to generate a slice data snapshot during the execution of the dispatching strategy;

[0031] The front end is used to perform dynamic visualization and effect evaluation based on the debugging process of the parameter set in the dispatching strategy or the slice data snapshot generated during the execution of the dispatching strategy. The display content includes the execution route, process nodes and corresponding parameters of the dispatching strategy.

[0032] In a fourth aspect, the present application also provides a computer-readable storage medium having computer program instructions stored thereon, wherein the computer program instructions can be executed by a processor to implement any of the dynamic visualization display and evaluation methods for wafer dispatching strategies as described above.

[0033] Compared with traditional dispatching systems that only provide static strategy operation parameters, the present invention provides a convenient and efficient display and evaluation system that can display strategy effects. Dispatching strategy analysts can analyze strategy operation effects in multiple dimensions before and after the event, thereby improving the accuracy and precision of the dispatching strategy.

[0034] Compared with the traditional dispatching system that selectively records relevant parameters and cannot completely restore the historical dispatching scenarios, the present invention saves the slice data snapshots of the historical dispatching scenarios through the flow log, laying the foundation for the true reproduction of the historical dispatching scenarios, and the credibility of the strategy effect evaluation results is higher.

[0035] When users are evaluating the effectiveness of a strategy, they are no longer faced with static data but clickable and dynamically changing node information, which intuitively displays the results of the dispatch strategy operation. Ordinary business personnel can also perform effect analysis, reducing the technical requirements for analysts. In addition, since it is no longer an analysis of massive data, it can help analysts quickly locate problems, reduce the negative impact of abnormal situations on factory production capacity, and create economic benefits. An efficient strategy effect evaluation system also shortens the dispatch strategy effect analysis cycle, thereby speeding up strategy optimization and rapidly improving the dispatch quality of the dispatch system, ultimately helping wafer fabs increase production capacity and bring in higher profits. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 A flowchart of a method for dynamically visualizing and evaluating wafer dispatching strategies provided by an embodiment of the present invention;

[0037] Figure 2 A schematic diagram of an item dispatching strategy provided by an embodiment of the present invention;

[0038] Figure 3 It is a schematic diagram of two parallel execution routes of the item dispatching strategy;

[0039] Figure 4 It is a visual display diagram of the filtering nodes in the dispatching strategy;

[0040] Figure 5 It is a visual display diagram of the grouping nodes in the dispatching strategy;

[0041] Figure 6 It is a visual display diagram of the sorting node;

[0042] Figure 7 This is a schematic diagram of the distinction between abnormal nodes and normal nodes. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0044] Embodiment 1

[0045] The present invention provides a method for dynamically visualizing and evaluating wafer dispatching strategies, which is applicable to displaying and evaluating dispatching strategies for machines and wafers in wafer production scenarios, especially to debugging dispatching strategies before they are formally implemented, referred to as pre-analysis. Figure 1 , the method comprising:

[0046] S11. Obtain a set of parameters required for executing the wafer dispatch strategy.

[0047] Since the dispatching strategy does not need to be actually executed, a full set of parameters needs to be entered for it. The parameter set includes a custom input parameter set or a snapshot of historical slice data generated by the execution of a historical strategy. Among them, the custom parameter set is simulated data, which can be compiled by business personnel. The parameter set includes parameter names and parameter values. When the historical dispatching strategy is executed in the dispatching system, a flow record will be automatically generated to save the snapshot of slice data generated by the strategy execution, from which the parameters in the execution process of the wafer dispatching strategy are obtained, and the flow of the old dispatching strategy is imported into the new dispatching strategy to analyze whether the new dispatching strategy is better than the old strategy.

[0048] If the dispatch strategy has at least two execution routes and at least two process nodes, the execution routes, process nodes and parameters need to be matched for corresponding display.

[0049] S12: Input the parameter set into the work dispatching strategy to debug the work dispatching strategy.

[0050] S13. Perform dynamic visualization and effect evaluation based on the debugging process of the parameter set in the dispatching strategy, where the displayed content includes the execution route, process nodes and corresponding parameters of the dispatching strategy.

[0051] During the debugging process, the dispatch strategy will run the parameter set on its own process, thereby performing process operations such as sorting and filtering on the parameter set.

[0052] On the interface, the execution route, process nodes and corresponding parameters of the work dispatch strategy are dynamically highlighted according to the execution order of the work dispatch strategy.

[0053] Furthermore, the effectiveness is evaluated based on the dynamic visualization display results and standard results, so that analysts can intuitively locate the operation process and parameters of the strategy, saving analysis time.

[0054] Embodiment 2

[0055] The embodiment of the present invention is applicable to the post-analysis scenario of evaluating the effect of the dispatching strategy after the dispatching strategy is executed in the dispatching system, that is, the pipeline playback scenario. Specifically, the initial parameter is input into the dispatching strategy; a slice data snapshot is generated during the execution of the dispatching strategy; a dynamic visualization display and effect evaluation are performed based on the slice data snapshot, and the display content includes the execution route, process nodes and corresponding parameters of the dispatching strategy.

[0056] It should be noted that when the dispatch strategy is executed in the dispatch system, a flow record will be automatically generated, including the complete slice data snapshot required for the strategy execution, storing all data such as parameter sets (including strategy parameters and parameters and parameter values ​​required during the strategy execution process), execution routes, process nodes, operation results and time. Compared with the traditional dispatch system that can only selectively record some parameter logs, this is an innovation. The slice data snapshot is a prerequisite for the present invention to dynamically present the strategy operation effect.

[0057] Specifically, after the wafer dispatch strategy is executed, a slice data snapshot in any historical flow record is obtained; dynamic visualization and effect evaluation are performed based on the slice data snapshot. The historical flow record here is generated during the execution of the online dispatch strategy. By analyzing the flow of historical specific dispatch strategies, the accuracy of the dispatch strategy can be verified and the effect can be evaluated.

[0058] Referring to Example 1, further, the effect evaluation is performed based on the dynamic visualization display results and the standard results; on the interface, the execution route, process nodes and corresponding parameters of the dispatching strategy are dynamically highlighted according to the execution order of the dispatching strategy.

[0059] Although the traditional dispatching system can also analyze the effect of the strategy, it can only input the strategy parameters for effect verification when creating the strategy, which is relatively simple. Based on the first and second embodiments, the present invention can perform multi-dimensional analysis of the dispatching strategy before and after.

[0060] Embodiment 3

[0061] This embodiment refines the process of dynamic visualization display based on the above embodiment.

[0062] In general, the dispatching strategy cannot be dynamically visualized during operation. The dynamic display is as follows:

[0063] ① Pre-analysis can be visualized based on the debugging process of the parameter set in the dispatch strategy. The parameter set includes a custom input parameter set or a historical slice data snapshot generated by the historical strategy execution.

[0064] ② For post-analysis, you can click on the historical flow for a visual display.

[0065] For the convenience of description, this embodiment is explained by a specific dispatching strategy. Figure 2 , is to assign tasks to items. This assignment strategy uses three indicators: indicator A, indicator B, and indicator C.

[0066] The logic of the dispatch strategy is as follows:

[0067] Step 1: ItemList passes through the filter node and filters out the items whose index A is equal to false.

[0068] Step 2: itemList passes through the sorting node and sorts the items in descending order according to the value of index B.

[0069] Step 3: After the grouping node, the items are grouped according to the value of indicator C. One possible result is that the items are divided into four groups: A / B / C / D.

[0070] Step 4: Enter the conditional node to determine how many groups itemList is currently divided into and whether it is greater than 1 group.

[0071] Step 5: If the number of groups is greater than 1, sort the groups and then output them. If the number of groups is equal to 1, output them directly.

[0072] Assume that an analyst uses the present invention to perform effect analysis on historical flow (i.e., post-analysis). In the selected flow, the input parameters of the dispatching strategy and the parameters required for strategy execution are shown in Table 1 below:

[0073]

[0074] At this point, the above pipeline will be imported into the dispatch strategy for debugging, and the execution route, the parameters required for each process node, and the node operation results will be recorded. The above information will then be visualized.

[0075] The first implementation mode: when the dispatching strategy has at least two execution routes, the execution routes of the dispatching strategy at different times are determined based on the debugging process, and the currently executed route is highlighted. Figure 3 Two parallel execution routes of the item dispatch strategy are shown. The upper-level execution route is marked with a wide arrow or other highlighting methods. Analysts can intuitively locate the operation process of the strategy. When the strategy routes are parallel and complicated, analysts can use this visual display to easily lock the process to be analyzed and reduce unnecessary branch search time.

[0076] The second implementation method: when the dispatching strategy has at least two process nodes, the required parameters and operation results of the dispatching strategy at different process nodes are determined based on the debugging process; when the current process node is executed, only the required parameters and operation results of the current process node are displayed. Preferably, when the current process node is executed, a template is determined according to the characteristics of the current process node; and the required parameters and operation results of the current process node are displayed based on the template. Exemplarily, personalized display is performed according to the execution logic and parameters used of each node, including only displaying the required parameters and operation logic of the current node. Figure 4This is a visual display diagram of the filtering node in the dispatching strategy. Currently, it displays the information of the filtering node, and only displays the indicator A used in the filtering and the running results. Only the parameters required by the current node are accurately displayed, and analysts do not need to search for data, saving analysis time. Figure 4 Intuitively and clearly understand the dynamic changes of the dispatch object itemList at the current process node, including the execution results of the filter: item7 is filtered out because it does not meet the conditions. Through the remarks of the reason, analysts can immediately know the reason why item7 is filtered out. Figure 5 It is a visualization diagram of the grouping nodes in the dispatching strategy. Currently, it shows the information of the grouping nodes, which intuitively shows the operation logic of the current node, that is, itemList is grouped according to indicator C, and the operation results are also visualized, that is, itemList is divided into four groups: Group1, Group2, Group3, and Group4. By clicking Group1, you can also see the members of Group1: item001, itm003. This visualization clearly shows the node operation logic, which greatly simplifies the strategy effect analysis process compared to static parameters.

[0077] A third implementation manner: when the work dispatching strategy has at least two process nodes, the changes of the work dispatching strategy between different process nodes are determined based on the debugging process, and the changed parameters are highlighted. Figure 6 It is a visual display diagram of the sorting node. Business personnel click on the sorting node to compare the current sequence number with the previous node sorting. They can clearly perceive the change in the sequence number of the item after passing the current sorting node, and whether it is rising or falling is clear at a glance, which intuitively displays the dynamic changes between nodes.

[0078] A fourth implementation method is to determine the abnormal process nodes of the dispatching strategy based on the debugging process, and highlight the abnormal process nodes. Figure 7 This is a schematic diagram to distinguish abnormal nodes from normal nodes. If a group sorting node is executed incorrectly, the node will be made red. When the salesperson clicks on the playback, he can clearly understand the abnormal nodes in the process and quickly locate them, greatly reducing the analysis time. In short, through this dynamic visual analysis tool, salespeople can intuitively, concisely and efficiently analyze the debugging effect of the dispatching strategy.

[0079] It should be noted that the dynamic visualization of the pre-analysis is similar to the visualization after the fact. Specifically, when the dispatching strategy has at least two execution routes, the execution routes of the dispatching strategy at different times are determined based on the slice data snapshot generated during the execution of the dispatching strategy, and the currently executed route is highlighted. When the dispatching strategy has at least two process nodes, the required parameters and operation results of the dispatching strategy at different process nodes are determined based on the aforementioned slice data snapshot; when the current process node is executed, only the required parameters and operation results of the current process node are displayed. Specifically, when the current process node is executed, a template is determined according to the characteristics of the current process node; the required parameters and operation results of the current process node are displayed based on the template. When the dispatching strategy has at least two process nodes, the changes in the dispatching strategy between different process nodes are determined based on the aforementioned slice data snapshot, and the changed parameters are highlighted; the abnormal process nodes of the dispatching strategy are judged based on the aforementioned slice data snapshot, and the abnormal process nodes are highlighted.

[0080] Embodiment 4

[0081] An embodiment of the present invention also provides a wafer dispatching strategy dynamic visualization display and evaluation system, including a server and a front end, wherein the server is connected to the dispatching system.

[0082] The server is used to obtain the parameter set required for the execution of the wafer dispatching strategy, wherein the parameter set includes a custom input parameter set or a historical slice data snapshot generated by the historical strategy execution; input the parameter set into the dispatching strategy to debug the dispatching strategy; or input the initial parameter into the dispatching strategy to generate a slice data snapshot during the execution of the dispatching strategy.

[0083] The front end is used to perform dynamic visualization and effect evaluation based on the debugging process of the parameter set in the dispatching strategy or the slice data snapshot generated during the execution of the dispatching strategy. The display content includes the execution route, process nodes and corresponding parameters of the dispatching strategy.

[0084] As another aspect, the embodiments of the present application further provide a computer-readable storage medium, which may be included in the device described in the above embodiments; or may exist independently without being assembled into the device. The above computer-readable storage medium carries one or more computer-readable instructions, which may be executed by a processor to implement the steps of the wafer dispatch strategy dynamic visualization display and evaluation method and / or technical solution of the above multiple embodiments of the present application.

[0085] In a typical configuration of the present application, the terminal and the equipment of the service network each include one or more processors (CPU), input / output interface, network interface and memory.

[0086] Memory may include non-permanent storage in a computer-readable storage medium, random access memory (RAM) and / or non-volatile memory in the form of read-only memory (ROM) or flash RAM. Memory is an example of a computer-readable storage medium.

[0087] The flow chart or block diagram in the accompanying drawings shows the possible architecture, function and operation of the equipment, method and computer program product according to various embodiments of the present application. In this regard, each square box in the flow chart or block diagram can represent a module, a program segment or a part of a code, and the module, the program segment or a part of the code contains one or more executable instructions for realizing the specified logical function. It should also be noted that in some implementations as replacements, the functions marked in the square box can also occur in a sequence different from that marked in the accompanying drawings. For example, two square boxes represented in succession can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each square box in the block diagram and / or flow chart, and the combination of the square boxes in the block diagram and / or flow chart can be implemented with a dedicated system for hardware that performs a specified function or operation, or can be implemented with a combination of dedicated hardware and computer instructions.

[0088] It is obvious to those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and that the present application can be implemented in other specific forms without departing from the spirit or basic features of the present application. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-restrictive, and the scope of the present application is limited by the attached claims rather than the above description, so it is intended to include all changes that fall within the meaning and scope of the equivalent elements of the claims in the present application. Any figure mark in the claims should not be regarded as limiting the claims involved. In addition, it is obvious that the word "comprising" does not exclude other units or steps, and the singular does not exclude the plural. Multiple units or devices stated in the device claim can also be implemented by one unit or device through software or hardware. The words first, second, etc. are used to indicate names, and do not indicate any particular order.

Claims

1. A method for dynamic visualization and evaluation of wafer dispatch strategy, characterized in that: include: Obtaining a parameter set required for wafer dispatch strategy execution, the parameter set including a custom input parameter set or a historical slice data snapshot generated by historical strategy execution; Inputting the parameter set into a work dispatching strategy to debug the work dispatching strategy; Based on the debugging process of the parameter set in the dispatching strategy, dynamic visualization and effect evaluation are performed, and the display content includes the execution route, process nodes and corresponding parameters of the dispatching strategy; When the dispatching strategy has at least two process nodes, the required parameters and operation results of the dispatching strategy at different process nodes are determined based on the historical slice data, and the changes of the dispatching strategy between different process nodes are determined based on the snapshot of the historical slice data, and the changed parameters are highlighted; Among them, when the dispatching strategy has at least two execution routes, the debugging process based on the parameter set in the dispatching strategy is dynamically visualized and the effect is evaluated, including: determining the execution routes of the dispatching strategy at different times based on the debugging process, and highlighting the currently executed route.

2. The method according to claim 1, characterized in that: The historical strategy includes the historical work assignment strategy and the historical version of the current work assignment strategy.

3. The method according to claim 1, characterized in that When the dispatching strategy has at least two process nodes, the debugging process based on the parameter set in the dispatching strategy is dynamically visualized and evaluated, including: When the current process node is executed, only the required parameters and running results of the current process node are displayed.

4. The method according to claim 3, characterized in that When the current process node is executed, only the required parameters and operation results of the current process node are displayed, including: When the current process node is executed, a template is determined according to the characteristics of the current process node; The required parameters and operation results of the current process node are displayed based on the template.

5. The method according to claim 1, characterized in that When the dispatching strategy has at least two process nodes, the debugging process based on the parameter set in the dispatching strategy is dynamically visualized and evaluated, including: Based on the debugging process, the abnormal process nodes of the dispatching strategy are determined, and the abnormal process nodes are highlighted.

6. The method according to any one of claims 1 to 5, characterized in that: The debugging process based on the parameter set in the dispatching strategy is dynamically visualized and evaluated, including: Evaluate the effects based on the dynamic visualization display results and standard results.

7. A method for dynamic visualization and evaluation of wafer dispatch strategy, characterized in that: include: Input the initial parameters into the dispatch strategy; Generating a slice data snapshot during the execution of the work dispatching strategy, wherein the slice data snapshot includes a historical slice data snapshot; Perform dynamic visualization and effect evaluation based on the slice data snapshot, where the display content includes the execution route, process nodes and corresponding parameters of the dispatch strategy; When the dispatching strategy has at least two process nodes, the required parameters and operation results of the dispatching strategy at different process nodes are determined based on the historical slice data snapshot, and the changes of the dispatching strategy between different process nodes are determined based on the historical slice data snapshot, and the changed parameters are highlighted; Among them, when the dispatching strategy has at least two execution routes, dynamic visualization display and effect evaluation are performed based on the debugging process of the parameter set in the dispatching strategy, including: determining the execution routes of the dispatching strategy at different times based on the debugging process, and highlighting the currently executed route.

8. A wafer dispatch strategy dynamic visualization display and evaluation system, characterized in that: include: The server is used to obtain a parameter set required for executing a wafer dispatching strategy, wherein the parameter set includes a custom input parameter set or a historical slice data snapshot generated by executing a historical strategy; and input the parameter set into the dispatching strategy to debug the dispatching strategy; Alternatively, it is used to input the initial parameter transmission into the work dispatching strategy, and generate a slice data snapshot during the execution of the work dispatching strategy; The server is further used for determining the required parameters and operation results of the dispatching strategy at different process nodes based on the historical slice data snapshot when the dispatching strategy has at least two process nodes, and determining the changes of the dispatching strategy between different process nodes based on the historical slice data snapshot, and highlighting the changed parameters through the front end; The front end is used to perform dynamic visualization and effect evaluation based on the debugging process of the parameter set in the dispatching strategy or the slice data snapshot generated during the execution of the dispatching strategy, and the display content includes the execution route, process nodes and corresponding parameters of the dispatching strategy; Among them, the front end is also used for dynamic visualization and effect evaluation of the debugging process based on the parameter set in the work dispatching strategy when there are at least two execution routes of the work dispatching strategy, including: determining the execution route of the work dispatching strategy at different times based on the debugging process, and highlighting the currently executed route.

9. A computer-readable storage medium having computer program instructions stored thereon, wherein the computer program instructions can be executed by a processor to implement the method according to any one of claims 1 to 7.

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