A tool trolley for transporting a vertical furnace inner tube and a transportation method thereof

Abstract

The application discloses a tool trolley for transporting an inner tube of a vertical furnace, which comprises a trolley body, a fixing device, an inner tube support ring and a driving device, the top of the trolley body is provided with a lower supporting seat and a push handle, the bottom of the trolley body is provided with a moving roller, the lower supporting seat is slidably provided with an upper supporting seat, the two ends of the lower supporting seat are both provided with a first positioning piece, the upper supporting seat is provided with a locking piece matched with the first positioning piece, the upper supporting seat is provided with an installation gap matched with the inner tube support ring, the inner tube support ring is used for bearing a quartz inner tube and connecting with a vertical furnace body, the fixing device is used for connecting with a vertical furnace base, and the driving device is used for driving the lower supporting seat to connect with the fixing device. The application has the advantages of not needing to rely on manual carrying, saving time and effort, improving the transportation efficiency and reducing the pollution to the quartz inner tube.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and more specifically to a tooling trolley for transporting the inner tube of a vertical furnace and its transportation method. Background Technology

[0002] A chip is a 3D structure composed of stacked active and passive circuit components, and thin film deposition is one of the core processes in chip front-end manufacturing. Thin film deposition is crucial in determining the performance of thin films, and thin film deposition processes are mainly divided into two categories: physical and chemical methods. Chemical methods include chemical vapor deposition (CVD) and epitaxy (EPI), etc. CVD can be further classified according to different reaction conditions into atmospheric pressure CVD (APCVD), low pressure CVD (LPCVD), and plasma-enhanced CVD (PECVD), etc. LPCVD deposition has advantages such as high thin film step coverage, controllable growth rate, good uniformity, and high yield. Currently, LPCVD equipment is widely used in major wafer fabs both domestically and internationally.

[0003] LPCVD equipment is mainly divided into two types based on its structure: vertical and horizontal. Vertical LPCVD equipment has advantages such as small footprint, compact structure, and high degree of automation, and is currently the mainstream LPCVD equipment. The reaction chamber of a vertical LPCVD equipment mainly consists of an inner tube and an outer tube. Since a thin film inevitably deposits on the tube wall during the deposition process, after multiple consecutive growth cycles, a large number of particles will remain inside the tube, degrading the quality of the grown film. Therefore, a comprehensive cleaning of the system is generally required after several dozen growth cycles to ensure a suitable deposition environment.

[0004] The maintenance of vertical LPCVD mainly involves the replacement and cleaning of quartz components. The disassembly and assembly of the quartz inner tube must be done with the help of tooling. Currently, many six-inch and eight-inch wafer production lines replace the quartz inner tube by having equipment personnel carry the quartz inner tube out of the clean cabinet and then into the equipment for installation. This transportation method is inefficient, time-consuming, labor-intensive, and can easily contaminate the quartz inner tube. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to overcome the shortcomings of the prior art and provide a tooling trolley for transporting vertical furnace inner tubes, which does not require manual handling, saves time and labor, improves transportation efficiency, and reduces contamination of quartz inner tubes, as well as its transportation method.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0007] A tooling trolley for transporting inner tubes of a vertical furnace includes a trolley body, a fixing device, an inner tube support ring, and a driving device. The trolley body has a lower support seat and a pusher at the top and movable rollers at the bottom. An upper support seat slides on the lower support seat. Both ends of the lower support seat are provided with first positioning elements. The upper support seat is provided with locking elements that cooperate with the first positioning elements for positioning. The upper support seat is provided with an installation notch that matches the inner tube support ring. The inner tube support ring is used to carry the quartz inner tube and connect to the furnace body of the vertical furnace. The fixing device is used to connect to the base of the vertical furnace. The driving device is used to drive the lower support seat to connect with the fixing device.

[0008] As a further improvement to the above technical solution:

[0009] The installation notch is provided with a first installation stop, and a positioning ring is placed on the first installation stop. The inner tube support ring is placed on the positioning ring.

[0010] The inner tube support ring is equipped with a rotating handle.

[0011] The moving drive device includes a lead screw rotatably mounted on the lower support base, the fixing device includes a fixing seat, the fixing seat is detachably connected to the vertical furnace base, the fixing device is provided with a fixing nut seat, and one end of the lead screw is used to connect to the fixing nut seat.

[0012] A knob is provided at the other end of the lead screw.

[0013] The fixed base is provided with a second positioning element for positioning the lower support base.

[0014] The lower support is equipped with a leveling component for adjusting the levelness of the upper support.

[0015] The horizontal adjustment assembly includes a plurality of adjusting nuts that are threadedly connected to the lower support seat. The plurality of adjusting nuts are arranged at intervals on the lower support seat, and the top of each adjusting nut is in contact with the upper support seat.

[0016] The lower support is provided with a guide rail, the upper support is slidably mounted on the guide rail, and the upper support is provided with a reinforcing rib on one side of the mounting notch.

[0017] A method for transporting the inner tubes of a vertical furnace includes the following steps:

[0018] S1. Place the inner tube support ring on the installation notch, and then place the quartz inner tube on the inner tube support ring;

[0019] S2. The fixed seat is connected to the vertical furnace base. The trolley body is pushed close to the fixed seat by the pusher until the screw on the lower support seat is aligned with the fixed nut seat on the fixed seat.

[0020] S3. Turn the knob to connect the lead screw to the fixed nut seat until the lower support seat is pressed against the second positioning part;

[0021] S4. Push the upper support seat to slide on the lower support seat so that the installation notch is above the vertical furnace support platform and concentric with the vertical furnace support platform. Then the locking part is locked with the first positioning part near the vertical furnace, and the upper support seat no longer slides.

[0022] S5. The vertical furnace lifting module drives the support platform to rise. The support platform carries the positioning ring and the inner tube support ring through the installation gap and continues to rise, so that the quartz inner tube enters the furnace body of the vertical furnace.

[0023] S6. When the inner tube support ring enters the furnace opening of the furnace body, rotate the handle to turn the inner tube support ring so that the inner tube support ring is engaged with the furnace opening of the furnace body.

[0024] S7. The lifting module drives the support platform and positioning ring to descend until the positioning ring falls back onto the installation notch.

[0025] S8. Release the locking mechanism and reset the upper support seat. At this time, the locking mechanism is locked to the first positioning part away from the vertical furnace. Then, turn the screw to separate it from the fixed nut seat.

[0026] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0027] This invention discloses a tooling trolley for transporting inner tubes of a vertical furnace. A fixing device is connected and fixed to the base of the vertical furnace. An inner tube support ring is placed on an installation notch, and the quartz inner tube is placed on the inner tube support ring. A pusher pushes the trolley body closer to the fixing device. A drive device drives the lower support seat to connect to the fixing device, and then pushes the upper support seat to slide on the lower support seat until the installation notch is above the vertical furnace support platform and concentric with it. Then, a locking component locks the upper support seat to its position near the vertical furnace, preventing further sliding and completing the positioning of the quartz inner tube. The vertical furnace lifting module then raises the support platform. The inner tube support ring passes through the installation gap and continues to rise, allowing the quartz inner tube to enter the vertical furnace body. Then, the inner tube support ring is connected to the furnace body, thus completing the installation of the quartz inner tube. This eliminates the need for manual handling, saving time and labor, improving transportation efficiency, and reducing contact between the human body and the quartz inner tube, thereby reducing contamination. After the quartz inner tube is installed, the lifting module drives the support platform to descend and reset. Then, the locking device is released, and after the upper support seat is reset, the locking device is locked to the first positioning device away from the vertical furnace. Finally, the connection between the lower support seat and the fixing device is released, and the trolley body can be pushed away for the next transport of quartz inner tubes.

[0028] The vertical furnace inner tube transportation method disclosed in this invention can complete the installation of quartz inner tubes without relying on manual handling, saving time and labor, improving transportation efficiency, and reducing human contact with quartz inner tubes, thereby reducing contamination of quartz inner tubes. Attached Figure Description

[0029] Figure 1 This is a front view schematic diagram of the transportation process of the tooling trolley used for transporting the inner tube of a vertical furnace according to the present invention.

[0030] Figure 2 This is a three-dimensional structural diagram of the tooling trolley used for transporting the inner tubes of a vertical furnace according to the present invention.

[0031] Figure 3 This is a three-dimensional structural diagram of the hidden inner tube support ring of the present invention.

[0032] Figure 4 This is a three-dimensional structural diagram of the hidden upper support base of the present invention.

[0033] Figure 5 This is a three-dimensional structural diagram of the inner tube support ring and positioning ring in this invention.

[0034] Figure 6 This is a three-dimensional structural diagram of the fixing device in this invention.

[0035] The labels in the diagram represent: 1. Cart body; 2. Fixing device; 21. Fixing seat; 211. Second positioning component; 22. Fixing nut seat; 3. Inner tube support ring; 31. Positioning ring; 32. Rotating handle; 4. Lower support seat; 41. First positioning component; 42. Guide rail; 5. Push handle; 6. Moving roller; 7. Upper support seat; 71. Mounting notch; 711. First mounting stop; 72. Locking component; 73. Reinforcing rib; 8. Drive device; 81. Lead screw; 811. Knob; 9. Horizontal adjustment assembly; 91. Adjusting nut; 10. Vertical furnace body; 11. Vertical furnace base; 12. Quartz inner tube; 13. Vertical furnace support platform; 14. Vertical furnace lifting module. Detailed Implementation

[0036] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0037] In the description of this invention, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0039] In this invention, unless otherwise explicitly specified and limited, the terms "assembly," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0040] Example 1

[0041] Figures 1 to 6 An embodiment of the present invention is shown. The tooling trolley for transporting the inner tube of a vertical furnace in this embodiment includes a trolley body 1, a fixing device 2, an inner tube support ring 3, and a driving device 8. The trolley body 1 is provided with a lower support seat 4 and a pusher 5 at the top and a movable roller 6 at the bottom. An upper support seat 7 is slidably mounted on the lower support seat 4. Both ends of the lower support seat 4 are provided with first positioning members 41. The upper support seat 7 is provided with a locking member 72 that cooperates with the first positioning member 41 for positioning. The upper support seat 7 is provided with an installation notch 71 that matches the inner tube support ring 3. The inner tube support ring 3 is used to connect with the furnace body 10 of the vertical furnace. The fixing device 2 is used to connect with the base 11 of the vertical furnace. The driving device 8 is used to drive the lower support seat 4 to connect with the fixing device 2.

[0042] The tooling trolley used for transporting the inner tube of the vertical furnace has a fixing device 2 connected and fixed to the vertical furnace base 11. The inner tube support ring 3 is placed on the mounting notch 71, and the quartz inner tube 12 is placed on the inner tube support ring 3. The trolley body 1 is pushed close to the fixing device 2 by the pusher 5. The drive device 8 drives the lower support seat 4 to connect with the fixing device 2, and then pushes the upper support seat 7 to slide on the lower support seat 4 until the mounting notch 71 is above the vertical furnace support platform 13 and concentric with the vertical furnace support platform 13. Then the locking part 72 is locked with the first positioning part 41 near the vertical furnace, and the upper support seat 7 no longer slides, completing the positioning of the quartz inner tube 12. The vertical furnace lifting module 14 drives the support platform 13 to rise, and the support platform 13 carries... The inner tube support ring 3 passes through the installation notch 71 and continues to rise, allowing the quartz inner tube 12 to enter the furnace body 10 of the vertical furnace. Then, the inner tube support ring 3 is connected to the furnace body 10, thus completing the installation of the quartz inner tube 12. This eliminates the need for manual handling, saving time and effort, improving transportation efficiency, and reducing contact between the human body and the quartz inner tube 12, thereby reducing contamination of the quartz inner tube 12. After the quartz inner tube 12 is installed, the lifting module 14 drives the support platform 13 to descend and reset. Then, the locking member 72 is released, and after the upper support seat 7 is reset, the locking member 72 is locked to the first positioning member 41 away from the vertical furnace. Then, the connection between the lower support seat 4 and the fixing device 2 is released, and the trolley body 1 can be pushed away for the next transport of the quartz inner tube 12. Preferably, the first positioning member 41 is a positioning post, and the locking member 72 is a knob plunger.

[0043] Furthermore, in this embodiment, a first mounting stop 711 is provided on the mounting notch 71, and a positioning ring 31 is placed on the first mounting stop 711. The inner tube support ring 3 is placed on the positioning ring 31. The positioning ring 31 is placed on the first mounting stop 711 and is concentric with the mounting notch 71, providing a base for the placement of the inner tube support ring 3, and at the same time playing a certain protective role for the mounting notch 71.

[0044] Furthermore, in this embodiment, the inner tube support ring 3 is provided with a rotating handle 32. In actual installation of the quartz inner tube 12, it is necessary to rotate the inner tube support ring 3 to engage with the furnace opening of the vertical furnace body 10. Therefore, the rotating handle 32 is provided to facilitate the rotation of the inner tube support ring 3.

[0045] Furthermore, in this embodiment, the moving drive device 8 includes a lead screw 81 rotatably mounted on the lower support base 4, and the fixing device 2 includes a fixing base 21, which is detachably connected to the vertical furnace base 11. The fixing device 2 is provided with a fixing nut seat 22, and one end of the lead screw 81 is used to connect with the fixing nut seat 22. The fixing base 21 is connected to the vertical furnace base 11. When the entire trolley approaches the fixing base 21, the lead screw 81 on the lower support base 4 is aligned with the fixing nut seat 22 on the fixing base 21. Then, the lead screw 81 is screwed so that one end of the lead screw 81 is connected to the fixing nut seat 22. The trolley body 1 is then connected to the vertical furnace base 11 through the fixing device 2, and the trolley body 1 no longer moves. At this time, pushing the upper support base 7 will be more stable.

[0046] Furthermore, in this embodiment, a knob 811 is provided at the other end of the lead screw 81. This facilitates the screw 81 to be turned so as to assemble and disassemble it from the fixed nut seat 22.

[0047] Furthermore, in this embodiment, the fixed base 21 is provided with a second positioning element 211 for positioning the lower support base 4. When the screw 81 is connected to the fixed nut seat 22, the lower support base 4 will gradually move closer to the fixed base 21. When the lower support base 4 abuts against the second positioning element 211 on the fixed base 21, it indicates that it has been connected in place and there is no need to tighten the screw 81 further. Preferably, the second positioning element 211 is a set screw, and the fixed base 21 is provided at both ends.

[0048] Furthermore, in this embodiment, the lower support 4 is provided with a leveling component 9 for adjusting the level of the upper support 7. The leveling component 9 adjusts the level of the upper support 7, which facilitates the placement and installation of the quartz inner tube 12 and prevents the quartz inner tube 12 from tilting and collapsing.

[0049] Furthermore, in this embodiment, the leveling component 9 includes two adjusting nuts 91 threadedly connected to the lower support 4. The two adjusting nuts 91 are spaced apart on both sides of the lower support 4, and the tops of both adjusting nuts 91 are in contact with the upper support 7. The levelness of the upper support 7 can be adjusted by adjusting the height of the adjusting nuts 91 on both sides, which is simple and convenient.

[0050] Furthermore, in this embodiment, the lower support 4 is provided with a guide rail 42, and the upper support 7 is slidably mounted on the guide rail 42. The upper support 7 is provided with a reinforcing rib 73 on one side of the mounting notch 71. The guide rail 42 provides guidance for the sliding of the upper support 7, and the reinforcing rib 73 can reduce deformation at the mounting notch 71.

[0051] Example 2

[0052] The method for transporting the vertical furnace inner tube in this embodiment includes the following steps:

[0053] S1. Place the inner tube support ring 3 on the installation notch 71, and then place the quartz inner tube 12 on the inner tube support ring 3;

[0054] S2, the fixed seat 21 is connected to the vertical furnace base 11. The trolley body 1 is pushed close to the fixed seat 21 by the pusher 5 until the screw 81 on the lower support seat 4 is aligned with the fixing nut seat 22 on the fixed seat 21.

[0055] S3. Turn the knob 811 to connect the lead screw 81 with the fixed nut seat 22 until the lower support seat 4 abuts against the second positioning part 211;

[0056] S4. Push the upper support seat 7 to slide on the lower support seat 4 so that the installation notch 71 is located above the vertical furnace support platform 13 and is concentric with the vertical furnace support platform 13. Then the locking member 72 is locked with the first positioning member 41 near the vertical furnace, and the upper support seat 7 no longer slides.

[0057] S5, the vertical furnace lifting module 14 drives the support platform 13 to rise, the support platform 13 carries the positioning ring 31 and the inner tube support ring 3 through the installation gap 71 and continues to rise, so that the quartz inner tube 12 enters the furnace body 10 of the vertical furnace.

[0058] S6. When the inner tube support ring 3 enters the furnace opening of the furnace body 10, the inner tube support ring 3 is turned by rotating the handle 32 to make the inner tube support ring 3 engage with the furnace opening of the furnace body 10.

[0059] S7, the lifting module 14 drives the support platform 13 and the positioning ring 31 to descend until the positioning ring 31 falls back onto the installation notch 71;

[0060] S8. Release the locking member 72 and reset the upper support seat 7. At this time, the locking member 72 is locked with the first positioning member 41 away from the vertical furnace. Then, turn the screw 81 to separate it from the fixed nut seat 22.

[0061] The method of transporting the vertical furnace inner tube eliminates the need for manual handling to install the quartz inner tube 12, saving time and effort, improving transportation efficiency, and reducing human contact with the quartz inner tube 12, thereby reducing contamination of the quartz inner tube 12.

[0062] While the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the invention. Any person skilled in the art can make many possible variations and modifications to the technical solutions of the present invention, or modify them into equivalent embodiments, without departing from the scope of the present invention. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention, without departing from the scope of the present invention, should fall within the protection scope of the present invention.

Claims

1. A tooling trolley for transporting vertical furnace inner tubes, characterized in that: The device includes a trolley body (1), a fixing device (2), an inner tube support ring (3), and a driving device (8). The trolley body (1) has a lower support seat (4) and a pusher (5) on its top and a moving roller (6) on its bottom. An upper support seat (7) is slidably mounted on the lower support seat (4). The lower support seat (4) has a first positioning element (41) at both ends. The upper support seat (7) has a locking element (72) that cooperates with the first positioning element (41) for positioning. The upper support seat (7) has a locking element (72) that cooperates with the inner tube support ring (3). The matching installation notch (71) is used to support the quartz inner tube (12) and connect to the vertical furnace body (10). The fixing device (2) is used to connect to the vertical furnace base (11). The driving device (8) is used to drive the lower support seat (4) to connect to the fixing device (2). The installation notch (71) is provided with a first installation stop (711). A positioning ring (31) is placed on the first installation stop (711). The inner tube support ring (3) is placed on the positioning ring (31).

2. The tooling trolley for transporting vertical furnace inner tubes according to claim 1, characterized in that: The inner tube support ring (3) is provided with a rotating handle (32).

3. The tooling trolley for transporting vertical furnace inner tubes according to claim 2, characterized in that: The driving device (8) includes a lead screw (81) rotatably mounted on the lower support (4), the fixing device (2) includes a fixing seat (21), the fixing seat (21) is detachably connected to the vertical furnace base (11), the fixing device (2) is provided with a fixing nut seat (22), and one end of the lead screw (81) is used to connect to the fixing nut seat (22).

4. The tooling trolley for transporting vertical furnace inner tubes according to claim 3, characterized in that: The other end of the lead screw (81) is provided with a knob (811).

5. The tooling trolley for transporting vertical furnace inner tubes according to claim 4, characterized in that: The fixed base (21) is provided with a second positioning element (211) for positioning the lower support base (4).

6. The tooling trolley for transporting vertical furnace inner tubes according to any one of claims 1 to 5, characterized in that: The lower support (4) is provided with a horizontal adjustment component (9) for adjusting the level of the upper support (7).

7. The tooling trolley for transporting vertical furnace inner tubes according to claim 6, characterized in that: The horizontal adjustment assembly (9) includes a plurality of adjusting nuts (91) threadedly connected to the lower support (4). The plurality of adjusting nuts (91) are spaced apart on the lower support (4), and the top of each adjusting nut (91) is in contact with the upper support (7).

8. The tooling trolley for transporting vertical furnace inner tubes according to any one of claims 1 to 5, characterized in that: The lower support (4) is provided with a guide rail (42), the upper support (7) is slidably mounted on the guide rail (42), and the upper support (7) is provided with a reinforcing rib (73) on one side of the mounting notch (71).

9. A method for transporting vertical furnace inner tubes using a tooling trolley for transporting vertical furnace inner tubes as described in claim 5, characterized in that: Includes the following steps: S1. Place the inner tube support ring (3) on the installation notch (71), and then place the quartz inner tube (12) on the inner tube support ring (3); S2. The fixed seat (21) is connected to the vertical furnace base (11). The trolley body (1) is pushed close to the fixed seat (21) by the pusher (5) until the screw (81) on the lower support seat (4) is aligned with the fixing nut seat (22) on the fixed seat (21). S3. Turn the knob (811) to connect the lead screw (81) with the fixed nut seat (22) until the lower support seat (4) abuts against the second positioning part (211). S4. Push the upper support seat (7) to slide on the lower support seat (4) so ​​that the installation notch (71) is above the vertical furnace support platform (13) and concentric with the vertical furnace support platform (13). Then the locking part (72) is locked with the first positioning part (41) near the vertical furnace, and the upper support seat (7) no longer slides. S5. The vertical furnace lifting module (14) drives the vertical furnace support platform (13) to rise. The vertical furnace support platform (13) carries the positioning ring (31) and the inner tube support ring (3) through the installation gap (71) and continues to rise, so that the quartz inner tube (12) enters the vertical furnace body (10). S6. When the inner tube support ring (3) enters the furnace opening of the vertical furnace body (10), the inner tube support ring (3) is turned by rotating the handle (32) so that the inner tube support ring (3) is engaged with the furnace opening of the vertical furnace body (10). S7. The vertical furnace lifting module (14) drives the vertical furnace support platform (13) and positioning ring (31) to descend until the positioning ring (31) falls back onto the installation notch (71); S8. Release the locking part (72) and reset the upper support seat (7). At this time, the locking part (72) is locked with the first positioning part (41) away from the vertical furnace. Then turn the screw (81) to separate it from the fixed nut seat (22).

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