Testing equipment

Abstract

This invention relates to the field of chip testing technology, specifically disclosing a testing device. The device includes a worktable, a rotating assembly, a carrier, and an imaging assembly. Several rotating assemblies are arranged on the worktable. The carrier carries a workpiece, and the rotating assemblies are connected to it. The rotating assemblies drive the carrier to rotate, thus rotating the workpiece and ensuring that each surface of the workpiece faces upwards sequentially. The imaging assembly is located on the worktable, with its imaging end positioned above the workpiece, and is used to capture images of each surface of the workpiece downwards. This structural arrangement, where one imaging assembly corresponds to several rotating assemblies, reduces the overall cost of the testing device. Furthermore, the use of only one imaging assembly reduces the floor space required.

Description

Technical Field

[0001] This invention relates to the field of chip testing technology, and more particularly to a testing device. Background Technology

[0002] During the chip packaging process, after all processes are completed, the chip's appearance must be inspected, focusing on surface contamination, defects, and copper leaks. The inspection involves all six sides of the chip.

[0003] In current production processes, chips are typically picked up and flipped manually, with each surface visually inspected. This method is inefficient and requires a large workforce. To address this, some existing technologies use multiple cameras to photograph and inspect each surface of the chip. However, cameras are the most expensive component of the entire device, and the use of multiple cameras leads to excessively high overall costs. Furthermore, the different camera placements require a significant amount of floor space.

[0004] Therefore, there is an urgent need to develop a testing device to solve the above problems. Summary of the Invention

[0005] The purpose of this invention is to provide a detection device to solve the problems of high cost and large area occupation caused by too many detection cameras in the prior art.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] This invention provides a testing device, which includes:

[0008] Workbench;

[0009] A plurality of rotating components are provided, and all of the rotating components are disposed on the worktable.

[0010] A carrier component is used to carry a workpiece. A rotating assembly is connected to the carrier component. The rotating assembly can drive the carrier component to rotate and drive the workpiece to rotate, so that each surface of the workpiece faces upward in sequence.

[0011] A camera assembly is provided on the worktable, with its camera end positioned above the workpiece and used to take downward images of various surfaces of the workpiece.

[0012] In some embodiments, the rotating assembly includes a first flipping assembly and a second flipping assembly, wherein the first flipping assembly is used to drive the workpiece to rotate about the X direction, and the second flipping assembly is used to drive the workpiece to rotate about the Y direction, wherein the X direction is perpendicular to the Y direction.

[0013] In some embodiments, the first flipping assembly includes a first support assembly and a first driving assembly. The first support assembly is disposed on the worktable and has a first rotating groove. The carrier has a first rotating shaft rotatably disposed in the first rotating groove. The first driving assembly is disposed on the worktable and is used to drive the first rotating shaft to rotate about the X direction; and / or

[0014] The second flipping assembly includes a second support assembly and a second drive assembly. The second support assembly is disposed on the worktable and has a second rotating groove. The carrier has a second rotating shaft that is rotatably disposed in the second rotating groove. The second drive assembly is disposed on the worktable and is used to drive the second rotating shaft to rotate around the Y direction.

[0015] In some embodiments, the first driving assembly includes a first driving lifting member and a first driving member. The first driving lifting member is disposed on the worktable, and the first driving member is disposed at the output end of the first driving lifting member. The first driving lifting member is used to drive the first driving member to move between a first driving position and a first clearance position. The first driving member located at the first driving position is drive-connected to the first rotating shaft; and / or

[0016] The second drive assembly includes a second drive lifting member and a second drive member. The second drive lifting member is disposed on the worktable, and the second drive member is disposed at the output end of the second drive lifting member. The second drive lifting member is used to drive the second drive member to move between a second drive position and a second avoidance position. The second drive member located in the second drive position is connected to the second rotating shaft via a transmission.

[0017] In some embodiments, the output end of the first driving member is provided with a first driving gear, and a first driven gear is sleeved on the first rotating shaft. When the first driving member is in the first driving position, the first driving gear and the first driven gear mesh; and / or

[0018] The output end of the second driving member is provided with a second driving gear, and a second driven gear is sleeved on the second rotating shaft. When the second driving member is in the second driving position, the second driving gear and the second driven gear mesh.

[0019] In some embodiments, the first support assembly includes a first support member, a first support drive member, and two first clamping members. The first support member is disposed on the worktable, the first support drive member is disposed on the first support member, and the two first clamping members are respectively disposed on two output ends of the first support drive member. Each first clamping member has a first groove. The first support drive member is used to drive the two first clamping members to close or open. When the two first clamping members are closed, the two first grooves surround the first rotating groove; and / or

[0020] The second support assembly includes a second support member, a second support drive member, and two second clamping members. The second support member is disposed on the worktable, the second support drive member is disposed on the second support member, and the two second clamping members are respectively disposed on the two output ends of the second support drive member. The second clamping member has a second groove. The second support drive member is used to drive the two second clamping members to close or open. When the two second clamping members are closed, the two second grooves surround the second rotating groove.

[0021] In some embodiments, the carrier has a carrier adsorption section for adsorbing the workpiece, and the rotating assembly has an air supply section for supplying air to the carrier adsorption section.

[0022] In some embodiments, the rotating assembly includes a transfer assembly, which includes a transfer bracket, a first transfer drive, a second transfer drive, and a third transfer drive. The transfer bracket is disposed on the worktable, and the first transfer drive is disposed on the transfer bracket. The output end of the first transfer drive is connected to the second transfer drive and drives the second transfer drive to move along the Z direction. The output end of the second transfer drive is connected to the third transfer drive and drives the third transfer drive to rotate around the Z direction. The output end of the third transfer drive can be connected to the upper surface of the workpiece and drives the workpiece to rotate around the Y direction.

[0023] In some embodiments, the testing device includes a lifting assembly, which includes a lifting bracket, a lifting component, and a lifting seat. The lifting bracket is disposed on the worktable, the lifting component is disposed on the lifting bracket, and the lifting seat is disposed at the output end of the lifting component and is used to support the carrier component.

[0024] In some embodiments, a plurality of the rotating components are arranged in a matrix on the worktable; and / or

[0025] The imaging component includes:

[0026] The first shooting drive unit, there are two of them, and they are arranged at intervals along the Y direction on the worktable, and are located on both sides of all the rotating components;

[0027] The second shooting driver is disposed between the two first shooting drivers, and its two ends are respectively connected to the output ends of the two first shooting drivers. The first shooting drivers are used to drive the second shooting driver to move along the X direction.

[0028] The third shooting driver is located at the output end of the second shooting driver, and the second shooting driver is used to drive the third shooting driver to move along the Y direction;

[0029] A camera is located at the output end of the third shooting driver, which is used to drive the camera to move along the Z direction.

[0030] The beneficial effects of this invention are as follows:

[0031] This invention provides a testing device, which includes a rotating assembly for rotating a carrier holding a workpiece and driving the workpiece to rotate, so that each surface of the workpiece faces upward in sequence; and an imaging assembly disposed on a worktable for imaging the upward-facing surfaces of the workpiece. The rotating assembly is provided in multiple units to complete the simultaneous rotation of multiple workpieces. The setting of one imaging assembly corresponding to multiple rotating assemblies reduces the cost of the entire testing device, and the footprint is reduced because there is only one imaging assembly. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the detection device from a first-view perspective in an embodiment of the present invention;

[0033] Figure 2 This is a schematic diagram of the detection device from a second perspective in an embodiment of the present invention;

[0034] Figure 3 This is a schematic diagram of the rotating component from a first-view perspective in an embodiment of the present invention;

[0035] Figure 4 This is a structural schematic diagram of the rotating component (excluding the transfer component) from a second perspective in an embodiment of the present invention;

[0036] Figure 5 for Figure 4 Cross-sectional view along the AA direction;

[0037] Figure 6 This is a partial structural diagram of the rotating component in an embodiment of the present invention;

[0038] Figure 7 This is a schematic diagram of the structure of the carrier and the chip in an embodiment of the present invention;

[0039] Figure 8 This is a schematic diagram of the internal structure of the support component in an embodiment of the present invention.

[0040] In the picture:

[0041] 1000, Chip; 1100, Top Surface; 1200, Left Surface; 1300, Back Surface;

[0042] 100. Workbench;

[0043] 200. Rotating assembly; 210. First flipping assembly; 211. First support assembly; 2111. First support member; 2112. First support drive member; 2113. First clamping member; 2114. First rotating groove; 2115. First vacuum drive member; 2116. First vacuum tube; 212. First drive assembly; 2121. First drive lifting member; 2122. First drive member; 2123. First drive gear; 2124. First drive bracket;

[0044] 220. Second flipping component; 221. Second support component; 222. Second drive component;

[0045] 230. Transfer assembly; 231. Transfer bracket; 232. First transfer drive; 233. Second transfer drive; 234. Third transfer drive; 235. Transfer head;

[0046] 300, Supporting component; 310, First rotating shaft; 311, First channel; 312, First driven gear; 320, Second rotating shaft; 321, Second channel; 322, Second driven gear; 331, First suction hole; 332, Second suction hole;

[0047] 400. Shooting component; 410. First shooting drive; 420. Second shooting drive; 430. Third shooting drive; 440. Camera;

[0048] 500. Lifting assembly; 510. Lifting bracket; 520. Lifting component; 530. Lifting seat. Detailed Implementation

[0049] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0050] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions. Furthermore, "above," "on top of," and "over" the first feature in relation to the second feature includes the first feature directly above and diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature includes the first feature directly below and diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0051] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0052] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0053] like Figures 1 to 8As shown, this embodiment provides a detection device, which includes a worktable 100, a rotating assembly 200, a carrier 300, and an imaging assembly 400. Several rotating assemblies 200 are provided, all disposed on the worktable 100. The carrier 300 carries the workpiece, and the rotating assemblies 200 are connected to the carrier 300. The rotating assemblies 200 drive the carrier 300 to rotate, thereby rotating the workpiece and causing each surface of the workpiece to face upwards sequentially. The imaging assembly 400 is disposed on the worktable 100, with its imaging end positioned above the workpiece, and is used to capture images of each surface of the workpiece downwards. The controller can analyze the surface quality of the workpiece based on the images captured by the imaging assembly 400. It should be noted that the specific imaging and analysis methods are well known to those skilled in the art and are not the focus of this invention; therefore, they will not be described in detail here.

[0054] With the above-described structure, one imaging component 400 corresponds to several rotating components 200, which reduces the cost of the entire detection equipment. Furthermore, since there is only one imaging component 400, the footprint is reduced.

[0055] In some embodiments, the workpiece can be a chip 1000. The chip 1000 has six surfaces that need to be inspected; therefore, the chip 1000 needs to be flipped multiple times to ensure that all six surfaces are facing upwards. In this embodiment, the rotating assembly 200 can complete five flips of the carrier 300. For ease of description and understanding, the six surfaces of the chip 1000 are defined as a first surface, a second surface, a third surface, a fourth surface, a fifth surface, and a sixth surface. Specifically, the first surface is the upper surface 1100, the second surface is the lower surface, the third surface is the left surface 1200, the fourth surface is the right surface, the fifth surface is the front surface, and the sixth surface is the rear surface 1300. The first and second surfaces are positioned opposite each other along the Z-direction, the third and fourth surfaces are positioned opposite each other along the X-direction, and the fifth and sixth surfaces are positioned opposite each other along the Y-direction.

[0056] When chip 1000 is in its initial position, its upper surface 1100 faces upwards. In some embodiments, the rotating assembly 200 includes a first flipping assembly 210 and a second flipping assembly 220. The first flipping assembly 210 drives chip 1000 to rotate around the X direction, and the second flipping assembly 220 drives chip 1000 to rotate around the Y direction, where the X direction is perpendicular to the Y direction. In this embodiment, when chip 1000 rotates around the Y direction, its left surface 1200 and right surface can face upwards respectively. When chip 1000 rotates around the X direction, its front surface and rear surface 1300 can face upwards respectively. Specifically, if chip 1000 in its initial position rotates +90° around the Y direction, its left surface 1200 faces upwards; if chip 1000 in its initial position rotates -90° around the Y direction, its right surface faces upwards; if chip 1000 in its initial position rotates +90° around the X direction, its rear surface 1300 faces upwards; and if chip 1000 in its initial position rotates -90° around the X direction, its front surface faces upwards.

[0057] In some embodiments, the first flipping assembly 210 includes a first support assembly 211 and a first drive assembly 212. The first support assembly 211 is disposed on the worktable 100 and has a first rotating groove 2114. The carrier 300 has a first rotating shaft 310, which is rotatably disposed in the first rotating groove 2114. The first drive assembly 212 is disposed on the worktable 100 and is used to drive the first rotating shaft 310 to rotate around the X direction. The second flipping assembly 220 includes a second support assembly 221 and a second drive assembly 222. The second support assembly 221 is disposed on the worktable 100 and has a second rotating groove. The carrier 300 has a second rotating shaft 320, which is rotatably disposed in the second rotating groove. The second drive assembly 222 is disposed on the worktable 100 and is used to drive the second rotating shaft 320 to rotate around the Y direction. The above configuration enables rotational driving action of the carrier 300 in two directions.

[0058] To improve rotational stability, two first flipping assemblies 210 are provided, spaced apart along the X-direction. The support member 300 has two first rotation axes 310, located on both sides of the support member 300 along the X-direction. Two second flipping assemblies 220 are provided, spaced apart along the Y-direction. The support member 300 has two second rotation axes 320, located on both sides of the support member 300 along the Y-direction.

[0059] In some embodiments, the first drive assembly 212 includes a first drive lifting member 2121 and a first drive member 2122. The first drive lifting member 2121 is mounted on the worktable 100 via a first drive bracket 2124, and the first drive member 2122 is located at the output end of the first drive lifting member 2121. The first drive lifting member 2121 drives the first drive member 2122 to move between a first drive position and a first avoidance position. The first drive member 2122 in the first drive position is driveably connected to the first rotating shaft 310. The second drive assembly 222 includes a second drive lifting member and a second drive member. The second drive lifting member is mounted on the worktable 100 via a second drive bracket, and the second drive member is located at its output end. The second drive lifting member drives the second drive member to move between a second drive position and a second avoidance position. The second drive member in the second drive position is driveably connected to the second rotating shaft 320. With the above-described structure, the driving and avoidance of the support member 300 can be achieved. Specifically, the first drive member 2122, located in the first clearance position, is below the carrier member 300 and outside the trajectory generated when the carrier member 300 rotates around the Y direction. The second drive member, located in the second clearance position, is below the carrier member 300 and outside the trajectory generated when the carrier member 300 rotates around the X direction. The first drive position is above the first clearance position along the Z direction. The second drive position is above the second clearance position along the Z direction.

[0060] To improve the stability of the drive, two first drive assemblies 212 are provided, spaced apart along the X direction. Two second drive assemblies 222 are provided, spaced apart along the Y direction. Specifically, when the support member 300 rotates about the X direction, it rotates about the axis of the first rotation axis 310; when the support member 300 rotates about the Y direction, it rotates about the axis of the second rotation axis 320.

[0061] Regarding the specific transmission relationship between the first driving member 2122 and the first rotating shaft 310, in this embodiment, the first driving member 2122 and the first rotating shaft 310 are driven by gear meshing. The output end of the first driving member 2122 is provided with a first driving gear 2123, and the first driven gear 312 is fitted onto the first rotating shaft 310. When the first driving member 2122 is in the first driving position, the first driving gear 2123 and the first driven gear 312 mesh. This driving structure ensures both the driving of the first driving member 2122 onto the first rotating shaft 310 and the avoidance of the first driving member 2122 from the first rotating shaft 310, and is simple in structure and highly stable.

[0062] Regarding the specific transmission relationship between the second driving member and the second rotating shaft 320, in this embodiment, the output end of the second driving member is provided with a second driving gear, and the second rotating shaft 320 is fitted with a second driven gear 322. When the second driving member is in the second driving position, the second driving gear and the second driven gear 322 mesh. The above-mentioned driving structure can both ensure the driving of the second driving member on the second rotating shaft 320 and ensure that the second driving member avoids the second rotating shaft 320, and the structure is simple and has high stability.

[0063] The first support assembly 211 includes a first support member 2111, a first support drive member 2112, and two first clamping members 2113. The first support member 2111 is disposed on the worktable 100, the first support drive member 2112 is disposed on the first support member 2111, and the two first clamping members 2113 are respectively disposed on the two output ends of the first support drive member 2112. The first clamping member 2113 has a first groove. The first support drive member 2112 is used to drive the two first clamping members 2113 to close or open. When the two first clamping members 2113 are closed, the two first grooves form a first rotating groove 2114. The second support assembly 221 includes a second support member, a second support drive member, and two second clamping members. The second support member is disposed on the worktable 100, the second support drive member is disposed on the second support member, and the two second clamping members are respectively disposed on the two output ends of the second support drive member. The second clamping members have second grooves. The second support drive member is used to drive the two second clamping members to close or open. When the two second clamping members are closed, the two second grooves form a second rotating groove.

[0064] With the above-described structure, rotational connection and avoidance of the support member 300 can be achieved. Specifically, when the two first clamping members 2113 are open, they are located on one side of the first rotation axis 310 and outside the trajectory generated when the support member 300 rotates around the Y direction. When the two second clamping members are open, they are located on one side of the second rotation axis 320 and outside the trajectory generated when the support member 300 rotates around the X direction. Specifically, when the two first clamping members 2113 move from the open position to the closed position, each first clamping member 2113 rotates 90°. When the two second clamping members move from the open position to the closed position, each second clamping member rotates 90°.

[0065] In this embodiment, taking the first clamping member 2113 as an example, its rotation structure is described. The first support assembly 211 includes a first connecting rod. One end of the first clamping member 2113 is provided with a first sliding groove. Both first clamping members 2113 are rotatably mounted on the first support member 2111. The middle position of the first connecting rod is fixed to the output end of the first support drive member 2112. The two ends of the first connecting rod are respectively slidably mounted in the two sliding grooves of the two first clamping members 2113 through pins. During the extension and retraction of the output end of the first support drive member 2112, it drives the two first clamping members 2113 to rotate. In this embodiment, the first support drive member 2112 is a telescopic cylinder.

[0066] In some embodiments, the carrier 300 has a carrier adsorption section for adsorbing the chip 1000, and the rotating assembly 200 has an air supply section for supplying air to the carrier adsorption section. With the above-described structure, the chip 1000 can be stably fixed, preventing slippage during the flipping process.

[0067] Specifically, the first support assembly 211 includes a first vacuum drive 2115 and a first vacuum tube 2116. The first vacuum drive 2115 is disposed on the first support assembly 2111, and the first vacuum tube 2116 is disposed at the output end of the first vacuum drive 2115. The first vacuum drive 2115 is used to drive the first vacuum tube 2116 to move between a first vacuum docking position and a first vacuum clearance position. The bearing adsorption part includes a first adsorption hole 331. A first rotating shaft 310 has a first channel 311 in the middle. The first vacuum tube 2116 located at the first vacuum docking position is docked with the first rotating shaft 310, and the first channel 311 connects the first adsorption hole 331 and the first vacuum tube 2116. The other end of the first vacuum tube 2116 is connected to a vacuum supply device.

[0068] The second support assembly 221 includes a second vacuum drive and a second vacuum tube. The second vacuum drive is disposed on the second support assembly, and the second vacuum tube is disposed at the output end of the second vacuum drive. The second vacuum drive is used to drive the second vacuum tube to move between a second vacuum docking position and a second vacuum clearance position. The bearing adsorption part includes a second adsorption hole 332, and a second channel 321 is provided in the middle of a second rotating shaft 320. The second vacuum tube located at the second vacuum docking position is docked with the second rotating shaft 320, and the second channel 321 connects the second adsorption hole 332 and the second vacuum tube. The other end of the second vacuum tube is connected to a vacuum supply device. The gas supply part consists of a first vacuum tube 2116 and a second vacuum tube.

[0069] In this configuration, the outer diameter of the end of the first vacuum tube 2116 that connects to the first rotating shaft 310 is larger than the diameter of the first channel 311, while the inner diameter of the first vacuum tube 2116 is smaller than the diameter of the first channel 311. This arrangement makes the connection between the first vacuum tube 2116 and the first rotating shaft 310 easier, reduces the precision requirements, and lowers costs.

[0070] In some embodiments, when the carrier 300 rotates about the X direction, the first vacuum tube 2116 and the first rotating shaft 310 rotate relative to each other.

[0071] In some embodiments, when the carrier 300 rotates about the X direction, the first vacuum tube 2116 and the first rotating shaft 310 rotate synchronously. In this embodiment, the first vacuum tube 2116 includes a first tube and a second tube, which rotate and are sealed together, and the first tube is fixed to the output end of the first vacuum drive 2115.

[0072] To ensure the adsorption effect of the first adsorption hole 331 and the second adsorption hole 332, in some embodiments, the first adsorption hole 331 is annular, the second adsorption hole 332 is annular, and the first adsorption hole 331 and the second adsorption hole 332 are concentrically arranged. This arrangement ensures that both the first adsorption hole 331 and the second adsorption hole 332 of the carrier 300 can adsorb the center position of the chip 1000. Preferably, the second adsorption hole 332 is provided with a notch to avoid the passage connecting to the first adsorption hole 331.

[0073] In some embodiments, the rotating assembly 200 includes a transfer assembly 230, which includes a transfer bracket 231, a first transfer drive 232, a second transfer drive 233, and a third transfer drive 234. The transfer bracket 231 is disposed on the worktable 100, and the first transfer drive 232 is disposed on the transfer bracket 231. The output end of the first transfer drive 232 is connected to the second transfer drive 233 and drives the second transfer drive 233 to move along the Z direction. The output end of the second transfer drive 233 is connected to the third transfer drive 234 and drives the third transfer drive 234 to rotate around the Z direction. The output end of the third transfer drive 234 can be connected to the upper surface 1100 of the chip 1000 and drives the chip 1000 to rotate around the Y direction. In this embodiment, when the chip 1000 rotates around the Y direction, the lower surface of the chip 1000 can face upwards. Specifically, if the chip 1000 in its initial position rotates 180° around the Y direction, then the lower surface faces upwards. The output end of the third transfer drive 234 is provided with a transfer head 235, and the transfer head 235 is provided with a suction nozzle, which is used to adsorb the upper surface 1100 of the chip 1000.

[0074] To facilitate the handling of chip 1000, in some embodiments, the testing device includes a lifting assembly 500. The lifting assembly 500 includes a lifting bracket 510, a lifting member 520, and a lifting seat 530. The lifting bracket 510 is disposed on the worktable 100, the lifting member 520 is disposed on the lifting bracket 510, and the lifting seat 530 is disposed at the output end of the lifting member 520 and is used to support the carrier member 300. The lifting seat 530 is movable between a first raised position and a first lowered position. The lifting seat 530 in the first raised position can support chip 1000 in its initial position, and the lifting seat 530 in the first lowered position is located below chip 1000 in its initial position, outside the trajectory generated by chip 1000 rotating around the X direction and also outside the trajectory generated by chip 1000 rotating around the Y direction.

[0075] In some embodiments, a plurality of rotating components 200 are arranged in a matrix on the worktable 100. This arrangement helps to improve the neatness of the chip 1000 placement and facilitates the planning of the imaging path of the imaging component 400.

[0076] In some embodiments, the shooting assembly 400 includes a first shooting driver 410, a second shooting driver 420, a third shooting driver 430, and a camera 440. Two first shooting drivers 410 are provided and spaced apart along the Y direction on the worktable 100, located on opposite sides of all rotating assemblies 200. The second shooting driver 420 is disposed between the two first shooting drivers 410 and its two ends are respectively connected to the output ends of the two first shooting drivers 410. The first shooting driver 410 drives the second shooting driver 420 to move along the X direction. The third shooting driver 430 is disposed at the output end of the second shooting driver 420, and the second shooting driver 420 drives the third shooting driver 430 to move along the Y direction. The camera 440 is disposed at the output end of the third shooting driver 430, and the third shooting driver 430 drives the camera 440 to move along the Z direction.

[0077] Among them, the first shooting driver 410, the second shooting driver 420 and the third shooting driver 430 can all be linear modules.

[0078] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A testing device, characterized in that, include: Workbench (100); A rotating assembly (200) is provided, and a plurality of rotating assemblies (200) are provided on the worktable (100). The carrier (300) is used to carry the workpiece. The rotating assembly (200) is connected to the carrier (300). The rotating assembly (200) can drive the carrier (300) to rotate and drive the workpiece to rotate, and make each surface of the workpiece face upward in sequence. A camera assembly (400) is disposed on the worktable (100), and the camera end of the camera assembly (400) is located above the workpiece and is used to take downward photos of each surface of the workpiece. The rotating assembly (200) includes a first flipping assembly (210) and a second flipping assembly (220). The first flipping assembly (210) is used to drive the workpiece to rotate around the X direction, and the second flipping assembly (220) is used to drive the workpiece to rotate around the Y direction, wherein the X direction is perpendicular to the Y direction. The first flipping assembly (210) includes a first support assembly (211) and a first drive assembly (212). The first support assembly (211) is disposed on the worktable (100) and has a first rotating groove (2114). The carrier (300) has a first rotating shaft (310), which is rotatably disposed in the first rotating groove (2114). The first drive assembly (212) is disposed on the worktable (100) and is used to drive the first rotating shaft (310) to rotate about the X direction; and / or The second flipping assembly (220) includes a second support assembly (221) and a second drive assembly (222). The second support assembly (221) is disposed on the worktable (100) and has a second rotating groove. The carrier (300) has a second rotating shaft (320) which is rotatably disposed in the second rotating groove. The second drive assembly (222) is disposed on the worktable (100) and is used to drive the second rotating shaft (320) to rotate around the Y direction. The first drive assembly (212) includes a first drive lifting member (2121) and a first drive member (2122). The first drive lifting member (2121) is disposed on the worktable (100), and the first drive member (2122) is disposed at the output end of the first drive lifting member (2121). The first drive lifting member (2121) is used to drive the first drive member (2122) to move between a first drive position and a first clearance position. The first drive member (2122) located in the first drive position is connected to the first rotating shaft (310) in a transmission connection; and / or The second drive assembly (222) includes a second drive lifting member and a second drive member. The second drive lifting member is disposed on the worktable (100), and the second drive member is disposed at the output end of the second drive lifting member. The second drive lifting member is used to drive the second drive member to move between a second drive position and a second avoidance position. The second drive member located in the second drive position is connected to the second rotating shaft (320) in a transmission connection.

2. The detection device according to claim 1, characterized in that, The first driving member (2122) has a first driving gear (2123) at its output end, and a first driven gear (312) is sleeved on the first rotating shaft (310). When the first driving member (2122) is in the first driving position, the first driving gear (2123) and the first driven gear (312) mesh; and / or The output end of the second driving member is provided with a second driving gear, and the second driven gear (322) is sleeved on the second rotating shaft (320). When the second driving member is in the second driving position, the second driving gear and the second driven gear (322) mesh.

3. The detection device according to claim 1, characterized in that, The first support assembly (211) includes a first support member (2111), a first support drive member (2112), and two first clamping members (2113). The first support member (2111) is disposed on the worktable (100), the first support drive member (2112) is disposed on the first support member (2111), and the two first clamping members (2113) are respectively disposed on the two output ends of the first support drive member (2112). The first clamping member (2113) has a first groove. The first support drive member (2112) is used to drive the two first clamping members (2113) to close or open. When the two first clamping members (2113) are closed, the two first grooves surround the first rotating groove (2114); and / or The second support assembly (221) includes a second support member, a second support drive member, and two second clamping members. The second support member is disposed on the worktable (100), the second support drive member is disposed on the second support member, and the two second clamping members are respectively disposed on the two output ends of the second support drive member. The second clamping member has a second groove. The second support drive member is used to drive the two second clamping members to close or open. When the two second clamping members are closed, the two second grooves surround the second rotating groove.

4. The testing equipment according to any one of claims 1-3, characterized in that, The carrier (300) has a carrier adsorption section for adsorbing the workpiece, and the rotating assembly (200) has an air supply section for supplying air to the carrier adsorption section.

5. The testing equipment according to any one of claims 1-3, characterized in that, The rotating assembly (200) includes a transfer assembly (230), which includes a transfer bracket (231), a first transfer drive (232), a second transfer drive (233), and a third transfer drive (234). The transfer bracket (231) is disposed on the worktable (100), and the first transfer drive (232) is disposed on the transfer bracket (231). The output end of the first transfer drive (232) is connected to the second transfer drive (233) and drives the second transfer drive (233) to move along the Z direction. The output end of the second transfer drive (233) is connected to the third transfer drive (234) and drives the third transfer drive (234) to rotate around the Z direction. The output end of the third transfer drive (234) can be connected to the upper surface (1100) of the workpiece and drives the workpiece to rotate around the Y direction.

6. The testing equipment according to any one of claims 1-3, characterized in that, The testing equipment includes a lifting assembly (500), which includes a lifting bracket (510), a lifting component (520), and a lifting seat (530). The lifting bracket (510) is located on the workbench (100), the lifting component (520) is located on the lifting bracket (510), and the lifting seat (530) is located at the output end of the lifting component (520) and is used to support the carrier component (300).

7. The testing equipment according to any one of claims 1-3, characterized in that, Several of the said rotating components (200) are arranged in a matrix on the worktable (100); and / or The shooting component (400) includes: Two first shooting drive units (410) are provided and are spaced apart along the Y direction on the worktable (100) and located on both sides of all the rotating components (200); The second shooting driver (420) is disposed between the two first shooting drivers (410), and its two ends are respectively connected to the output ends of the two first shooting drivers (410). The first shooting driver (410) is used to drive the second shooting driver (420) to move along the X direction. The third shooting driver (430) is disposed at the output end of the second shooting driver (420), and the second shooting driver (420) is used to drive the third shooting driver (430) to move along the Y direction; A camera (440) is located at the output end of the third shooting driver (430), which is used to drive the camera (440) to move along the Z direction.

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