A method of promoting the binding of a target material

Abstract

The application discloses a target material binding combination promoting method and belongs to the technical field of target materials. The target material binding combination promoting method comprises the following steps: (1) taking a stainless steel pipe as an inner lining pipe, cleaning the inner lining pipe, and performing sand blasting treatment on the stainless steel pipe to form a sand blasting layer; (2) spraying alloy wires onto the sand blasting layer by adopting an electric arc spraying method to form an alloy layer; (3) performing plasma treatment on the stainless steel pipe; and (4) heating the stainless steel pipe, coating solder on the alloy layer to form a solder layer, and performing ultrasonic treatment. The sand blasting layer, the alloy layer and the solder layer are formed on the stainless steel pipe, and the plasma treatment and the ultrasonic treatment are performed on the stainless steel pipe, so that the binding between the inner lining pipe and the target material base body is effectively improved, and the binding combination rate of the target material is effectively improved.

Description

Technical Field

[0001] This invention relates to the field of target technology, and more specifically to a method for promoting target bonding. Background Technology

[0002] Sputtering targets are experiencing rapid development due to their high utilization rate and ease of large-area coating. The outer layer of a spinning target structure is the target substrate material, while the inner layer is a stainless steel liner or a Ti back tube. During sputtering, argon ion bombardment of the target substrate material causes a rapid temperature rise in the target, potentially leading to cracking or melting. Therefore, cooling water is circulated within the stainless steel liner to dissipate heat. However, poor bonding between the liner and the target substrate material can still cause sputtering abnormalities.

[0003] Therefore, how to improve the bonding between the inner liner tube and the target matrix has become a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0004] The purpose of this invention is to overcome the shortcomings of the existing technology and provide a target bonding promotion method, which effectively improves the bonding between the inner liner tube and the target substrate, and effectively improves the bonding rate of the target.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0006] A method for promoting target bonding includes the following steps:

[0007] (1) Use stainless steel pipe as inner lining pipe, clean the inner lining pipe, and sandblast the stainless steel pipe to form a sandblasted layer.

[0008] (2) The alloy wire is sprayed onto the sandblasted layer by electric arc spraying to form an alloy layer;

[0009] (3) Plasma treatment of stainless steel pipes;

[0010] (4) Heat the stainless steel pipe, apply the solder to the alloy layer to form an alloy solder layer, and then ultrasonically treat it.

[0011] This invention uses a stainless steel pipe as the inner lining tube. The stainless steel pipe is sandblasted to effectively increase the surface roughness and adhesion. Then, an alloy layer is formed by arc spraying, which can effectively increase the bonding force. Plasma treatment can effectively activate the alloy layer and reduce its surface tension. Finally, by applying solder and ultrasonic treatment, the surface tension of the coating can be reduced and the wettability of the solder to the stainless steel pipe can be increased. This invention creatively forms a sandblasted layer, an alloy layer and a solder layer on the stainless steel pipe, and then performs plasma treatment and ultrasonic treatment on it, which effectively improves the bonding between the inner lining tube and the target substrate, and effectively improves the bonding rate of the target.

[0012] It should be noted that the present invention does not limit the spraying parameters of the arc spraying method, as long as it can form an alloy layer and achieve the required thickness.

[0013] As a preferred embodiment of the present invention, the surface roughness of the stainless steel pipe after sandblasting is 5 to 15 μm.

[0014] In a preferred embodiment of the present invention, the thickness of the sandblasting layer is 0.1 to 0.3 mm, and the material of the sandblasting layer is steel shot.

[0015] In a preferred embodiment of the present invention, the alloy wire is a Ni-based alloy wire, such as a nickel-aluminum alloy, wherein the nickel content in the nickel-aluminum alloy is 40-60%.

[0016] In a preferred embodiment of the present invention, the thickness of the alloy layer is 0.2 to 0.5 mm.

[0017] In a preferred embodiment of the present invention, the flame temperature during plasma treatment is 180–220°C.

[0018] It should be noted that, in this invention, the plasma treatment can be performed using a conventional plasma flame generator.

[0019] In a preferred embodiment of the present invention, the heating temperature is 170–200°C.

[0020] In a preferred embodiment of the present invention, the thickness of the solder layer is 0.1 to 0.5 mm.

[0021] In a preferred embodiment of the present invention, the solder is In or InSn.

[0022] In a preferred embodiment of the present invention, the frequency of the ultrasonic treatment is 18-22 kHz and the ultrasonic time is 1-4 min.

[0023] The beneficial effects of this invention are as follows: This invention uses a stainless steel pipe as the inner lining pipe, and performs sandblasting on the stainless steel pipe to effectively increase the surface roughness and adhesion of the stainless steel pipe. Then, an alloy layer is formed by arc spraying, which can effectively increase the bonding force. Then, plasma treatment can effectively activate the alloy layer and reduce the surface tension of the alloy layer. Then, by applying solder and ultrasonic treatment, the surface tension of the coating can be reduced and the wettability of the solder and the stainless steel pipe can be increased. This invention creatively forms a sandblasting layer, an alloy layer and a solder layer on the stainless steel pipe, and performs plasma treatment and ultrasonic treatment on it, which effectively improves the bonding between the inner lining pipe and the target substrate, and effectively improves the bonding rate of the target. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0025] In this application, the technical features described in an open-ended manner include both closed technical solutions consisting of the listed features and open technical solutions that include the listed features.

[0026] In this application, numerical ranges are referred to as continuous unless otherwise specified, and include the minimum and maximum values ​​of the range, as well as every value between the minimum and maximum values. Furthermore, when the range refers to integers, it includes every integer between the minimum and maximum values ​​of the range. Additionally, when multiple ranges are provided to describe a feature or characteristic, the ranges may be merged. In other words, unless otherwise specified, all ranges disclosed herein should be understood to include any and all subranges to which they are incorporated.

[0027] In this application, there are no particular restrictions on the specific dispersion and mixing methods.

[0028] Unless otherwise specified, all components, raw materials, or instruments used in the embodiments and comparative examples of this invention are commercially available, and the components and raw materials used in each parallel experiment are the same.

[0029] Example 1

[0030] A method for promoting target bonding includes the following steps:

[0031] (1) Using stainless steel pipe as inner lining pipe, the inner lining pipe is cleaned with isopropanol, and the stainless steel pipe is sandblasted with 30 mesh to form a thickness of 0.2mm and a surface roughness of 10μm.

[0032] (2) The stainless steel pipe after sandblasting is wiped with isopropanol and dust-free paper to remove dust and other dirt. Nickel-aluminum alloy wire (nickel content of 50%) is sprayed onto the sandblasted layer by electric arc spraying to form an alloy layer with a thickness of 0.4mm.

[0033] (3) The stainless steel pipe is subjected to plasma treatment using a plasma flame machine, wherein the plasma treatment flame temperature is 200℃.

[0034] (4) Place the stainless steel pipe on a coating machine, rotate and heat it to 180°C, apply solder (In) onto the alloy layer to form a solder layer with a thickness of 0.4 mm, and perform ultrasonic treatment at an ultrasonic frequency of 20 kHz for 2 min.

[0035] (5) The zinc-magnesium alloy (magnesium content 5%) melt was directly poured into the inner liner tube of step (4), and after cooling, C scan was performed. The bonding rate was 99.8%.

[0036] Example 2

[0037] A method for promoting target bonding includes the following steps:

[0038] (1) Using stainless steel pipe as inner lining pipe, the inner lining pipe is cleaned with isopropanol, and the stainless steel pipe is sandblasted with 30 mesh to form a thickness of 0.1mm and a surface roughness of 10μm.

[0039] (2) The stainless steel pipe after sandblasting is wiped with isopropanol and dust-free paper to remove dust and other dirt. Nickel-aluminum alloy wire (nickel content of 50%) is sprayed onto the sandblasted layer by electric arc spraying to form an alloy layer with a thickness of 0.2mm.

[0040] (3) The stainless steel pipe is subjected to plasma treatment using a plasma flame machine, wherein the plasma treatment flame temperature is 180℃.

[0041] (4) Place the stainless steel pipe on a coating machine, rotate and heat it to 180°C, apply solder (In) onto the alloy layer to form a solder layer with a thickness of 0.1 mm, and perform ultrasonic treatment at an ultrasonic frequency of 20 kHz for 2 min.

[0042] (5) The zinc-magnesium alloy (magnesium content 5%) melt was directly poured into the inner liner tube of step (4), and after cooling, C scan was performed. The bonding rate was 98.8%.

[0043] Example 3

[0044] A method for promoting target bonding includes the following steps:

[0045] (1) Using stainless steel pipe as inner lining pipe, the inner lining pipe is cleaned with isopropanol, and the stainless steel pipe is sandblasted with 30 mesh to form a thickness of 0.3mm and a surface roughness of 10μm.

[0046] (2) The stainless steel pipe after sandblasting is wiped with isopropyl alcohol and dust-free paper to remove dust and other dirt. The nickel-aluminum alloy wire (nickel content of 50%) is sprayed onto the sandblasted layer by electric arc spraying to form an alloy layer with a thickness of 0.5mm.

[0047] (3) The stainless steel pipe is subjected to plasma treatment using a plasma flame machine, wherein the plasma treatment flame temperature is 220℃.

[0048] (4) Place the stainless steel pipe on a coating machine, rotate and heat it to 180°C, apply solder (In) onto the alloy layer to form a solder layer with a thickness of 0.5 mm, and perform ultrasonic treatment at an ultrasonic frequency of 20 kHz for 2 min.

[0049] (5) The zinc-magnesium alloy (magnesium content 5%) melt was directly poured into the inner liner tube of step (4), and after cooling, C scan was performed. The bonding rate was 99.2%.

[0050] Example 4

[0051] A method for promoting target bonding includes the following steps:

[0052] (1) Using stainless steel pipe as inner lining pipe, the inner lining pipe is cleaned with isopropanol, and the stainless steel pipe is sandblasted with 30 mesh to form a thickness of 0.25mm and a surface roughness of 10μm.

[0053] (2) The stainless steel pipe after sandblasting is wiped with isopropanol and dust-free paper to remove dust and other dirt. The nickel-aluminum alloy wire (nickel content of 50%) is sprayed onto the sandblasted layer by electric arc spraying to form an alloy layer with a thickness of 0.35mm.

[0054] (3) The stainless steel pipe is subjected to plasma treatment using a plasma flame machine, wherein the plasma treatment flame temperature is 190℃.

[0055] (4) Place the stainless steel pipe on a coating machine, rotate and heat it to 180°C, apply solder (In) onto the alloy layer to form a solder layer with a thickness of 0.3 mm, and perform ultrasonic treatment at an ultrasonic frequency of 180KHz for 3 minutes.

[0056] (5) The zinc-magnesium alloy (magnesium content 5%) melt was directly poured into the inner liner tube of step (4), and after cooling, C scan was performed. The bonding rate was 99.5%.

[0057] Example 5

[0058] A method for promoting target bonding includes the following steps:

[0059] (1) Using stainless steel pipe as inner lining pipe, the inner lining pipe is cleaned with isopropanol, and the stainless steel pipe is sandblasted with 30 mesh to form a thickness of 0.15mm and a surface roughness of 10μm.

[0060] (2) The stainless steel pipe after sandblasting is wiped with isopropanol and dust-free paper to remove dust and other dirt. Nickel-aluminum alloy wire (nickel content of 50%) is sprayed onto the sandblasted layer by electric arc spraying to form an alloy layer with a thickness of 0.25mm.

[0061] (3) The stainless steel pipe is subjected to plasma treatment using a plasma flame machine, wherein the plasma treatment flame temperature is 210℃.

[0062] (4) Place the stainless steel pipe on a coating machine, rotate and heat it to 180°C, apply solder (In) onto the alloy layer to form a solder layer with a thickness of 0.4 mm, and perform ultrasonic treatment at an ultrasonic frequency of 22 kHz for 1 min.

[0063] (5) The zinc-magnesium alloy (magnesium content 5%) melt was directly poured into the inner liner tube of step (4), and after cooling, C scan was performed. The bonding rate was 99.2%.

[0064] Example 6

[0065] A method for promoting target bonding includes the following steps:

[0066] (1) Using stainless steel pipe as inner lining pipe, the inner lining pipe is cleaned with isopropanol, and the stainless steel pipe is sandblasted with 30 mesh to form a thickness of 0.2mm and a surface roughness of 10μm.

[0067] (2) The stainless steel pipe after sandblasting is wiped with isopropanol and dust-free paper to remove dust and other dirt. Nickel-aluminum alloy wire (nickel content of 50%) is sprayed onto the sandblasted layer by electric arc spraying to form an alloy layer with a thickness of 0.4mm.

[0068] (3) The stainless steel pipe is subjected to plasma treatment using a plasma flame machine, wherein the plasma treatment flame temperature is 200℃.

[0069] (4) Place the stainless steel pipe on a coating machine, rotate and heat it to 180°C, apply solder (In) onto the alloy layer to form a solder layer with a thickness of 0.4 mm, and perform ultrasonic treatment at an ultrasonic frequency of 20 kHz for 2 min.

[0070] (5) The CdSn alloy (4% tin content) melt was directly poured into the inner liner tube of step (4), and after cooling, C scan was performed. The bonding rate was 99.6%.

[0071] Comparative Example 1

[0072] A method for promoting target bonding includes the following steps:

[0073] (1) Using stainless steel pipe as inner lining pipe, the inner lining pipe is cleaned with isopropanol, and the stainless steel pipe is sandblasted with 30 mesh to form a thickness of 0.05mm and a surface roughness of 10μm.

[0074] (2) The stainless steel pipe after sandblasting is wiped with isopropyl alcohol and dust-free paper to remove dust and other dirt. Nickel-aluminum alloy wire (nickel content of 50%) is sprayed onto the sandblasted layer by electric arc spraying to form an alloy layer with a thickness of 0.05mm.

[0075] (3) The stainless steel pipe is subjected to plasma treatment using a plasma flame machine, wherein the plasma treatment flame temperature is 200℃.

[0076] (4) Place the stainless steel pipe on a coating machine, rotate and heat it to 180°C, apply solder (In) onto the alloy layer to form a solder layer with a thickness of 0.06 mm, and perform ultrasonic treatment at an ultrasonic frequency of 20 kHz for 2 min.

[0077] (5) The zinc-magnesium alloy (magnesium content 5%) melt was directly poured into the inner liner tube of step (4), and after cooling, C scan was performed. The bonding rate was 92.1%.

[0078] Comparative Example 2

[0079] A method for promoting target bonding includes the following steps:

[0080] (1) Using stainless steel pipe as inner lining pipe, the inner lining pipe is cleaned with isopropanol, and the stainless steel pipe is sandblasted with 30 mesh to form a thickness of 0.4 mm and a surface roughness of 10 μm.

[0081] (2) The stainless steel pipe after sandblasting is wiped with isopropyl alcohol and dust-free paper to remove dust and other dirt. Nickel-aluminum alloy wire (nickel content of 50%) is sprayed onto the sandblasted layer by electric arc spraying to form an alloy layer with a thickness of 0.8mm.

[0082] (3) The stainless steel pipe is subjected to plasma treatment using a plasma flame machine, wherein the plasma treatment flame temperature is 200℃.

[0083] (4) Place the stainless steel pipe on a coating machine, rotate and heat it to 180°C, apply solder (In) onto the alloy layer to form a solder layer with a thickness of 0.5 mm, and perform ultrasonic treatment at an ultrasonic frequency of 20 kHz for 2 min.

[0084] (5) The zinc-magnesium alloy (magnesium content 5%) melt was directly poured into the inner liner tube of step (4), and after cooling, C scan was performed. The bonding rate was 91.5%.

[0085] Comparative Example 3

[0086] A method for promoting target bonding includes the following steps:

[0087] (1) Using stainless steel pipe as inner lining pipe, the inner lining pipe is cleaned with isopropanol, and the stainless steel pipe is sandblasted with 30 mesh to form a thickness of 0.2mm and a surface roughness of 10μm.

[0088] (2) The stainless steel pipe after sandblasting is wiped with isopropanol and dust-free paper to remove dust and other dirt. Nickel-aluminum alloy wire (nickel content of 50%) is sprayed onto the sandblasted layer by electric arc spraying to form an alloy layer with a thickness of 0.4mm.

[0089] (3) The stainless steel pipe is subjected to plasma treatment using a plasma flame machine, wherein the plasma treatment flame temperature is 200℃.

[0090] (4) The zinc-magnesium alloy (magnesium content 5%) melt was directly poured into the inner liner tube of step (3), and after cooling, C scan was performed. The bonding rate was 91.0%.

[0091] Comparative Example 4

[0092] A method for promoting target bonding includes the following steps:

[0093] (1) Using stainless steel pipe as inner lining pipe, the inner lining pipe is cleaned with isopropanol, and the stainless steel pipe is sandblasted with 30 mesh to form a thickness of 0.2mm and a surface roughness of 10μm.

[0094] (2) The stainless steel pipe is subjected to plasma treatment using a plasma flame machine, wherein the plasma treatment flame temperature is 200℃.

[0095] (3) Place the stainless steel pipe on a coating machine, rotate and heat it to 180°C, apply solder (In) onto the alloy layer to form a solder layer with a thickness of 0.4 mm, and perform ultrasonic treatment at an ultrasonic frequency of 20 kHz for 2 min.

[0096] (4) The zinc-magnesium alloy (magnesium content 5%) melt was directly poured into the inner liner tube of step (3), and after cooling, C scan was performed. The bonding rate was 90.8%.

[0097] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit the scope of protection of the present invention. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the essence and scope of the technical solutions of the present invention.

Claims

1. A method for promoting target bonding, characterized in that, Includes the following steps: (1) A stainless steel pipe is used as the inner lining pipe. The inner lining pipe is cleaned and the stainless steel pipe is sandblasted to form a sandblasted layer. The thickness of the sandblasted layer is 0.1~0.3mm and the material of the sandblasted layer is steel shot. (2) The alloy wire is sprayed onto the sandblasted layer by arc spraying to form an alloy layer; the thickness of the alloy layer is 0.2~0.5mm; (3) Plasma treatment of stainless steel pipes; (4) Heat the stainless steel tube, apply solder to the alloy layer to form a solder layer, and ultrasonically treat it; the thickness of the solder layer is 0.1~0.5mm, and the solder is In or InSn.

2. The target bonding promotion method according to claim 1, characterized in that, The surface roughness of the stainless steel pipe after sandblasting is 5~15μm.

3. The target bonding promotion method according to claim 1, characterized in that, The alloy wire is a Ni-based alloy wire.

4. The target bonding promotion method according to claim 1, characterized in that, The flame temperature during plasma treatment is 180~220℃.

5. The target bonding promotion method according to claim 1, characterized in that, The heating temperature is 170~200℃.

6. The target bonding promotion method according to claim 1, characterized in that, The ultrasonic treatment frequency is 18~22KHz, and the ultrasonic time is 1~4min.