Graphical permanent magnetic film magnetic code disk device based on co-directional magnetization and preparation method

Abstract

The present invention provides a magnetic code disk device based on a patterned permanent magnetic film of the same direction magnetization and a preparation method thereof, which relates to the technical field of magnetic materials and devices, and includes: a magnetic code disk body, wherein a plurality of patterned films composed of permanent magnetic film materials are arranged on the outer surface of the magnetic code disk body; the shapes, sizes and spacings of the plurality of patterned films are the same, and the magnetization directions of the plurality of patterned films are in the same orientation relationship with the magnetic code disk body. Compared with the traditional magnetic code disk that magnetizes at intervals on continuous magnetic materials (which requires the use of expensive magnetizing equipment for precise and complex magnetizing operations, and the shape, size and domain wall boundaries of the magnetic domains after magnetization are irregular), the present invention does not require alternating magnetization based on the patterned thin film magnetic code disk device of the same direction magnetization, and has the advantages of simple magnetization, uniform magnetic pole signal, and high magnetic pole density.

Description

Technical Field

[0001] The invention relates to the technical field of magnetic materials and devices, and in particular to a patterned permanent magnetic film magnetic code disk device based on isotropic magnetization and a preparation method thereof. Background Art

[0002] In the past, commonly used magnetic code disks were made of continuous magnetic alloys or thin film materials, and expensive magnetizing equipment was required to perform alternating N-pole and S-pole magnetization operations. This magnetization operation is highly precise and complex, and the shape, size, and boundaries (domain walls) between the magnetic poles after magnetization are difficult to achieve uniformity. The above problems seriously affect the accuracy and consistency of magnetic code disk products. Summary of the invention

[0003] In order to solve the above technical problems existing in the prior art, the embodiment of the present invention provides a patterned permanent magnetic thin film magnetic code disk device based on isotropic magnetization and a preparation method thereof. The technical solution is as follows:

[0004] On the one hand, a patterned permanent magnetic film magnetic code disk device based on unidirectional magnetization is provided, comprising: a magnetic code disk body, a plurality of patterned films composed of permanent magnetic film materials are arranged on the outer surface of the magnetic code disk body; wherein the shapes, sizes and spacings of the plurality of patterned films are the same, and the magnetization directions of the plurality of patterned films are the same as the orientation relationship between the magnetic code disk body.

[0005] Optionally, the magnetic code disk body comprises a ring-shaped magnetic code disk, and a plurality of the patterned films are arranged on a circumferential plane of the ring-shaped magnetic code disk.

[0006] Optionally, the magnetization directions of the plurality of patterned films include:

[0007] The magnetization directions of the multiple patterned films are radial in the circumferential plane, including two situations: inward and outward;

[0008] Alternatively, the magnetization directions of the plurality of patterned films are along the tangent direction of the circumferential contour, including clockwise and counterclockwise directions;

[0009] Alternatively, the magnetization directions of the plurality of patterned films are along the normal direction of the circumferential plane, that is, perpendicular to the circumferential plane, including both inward and outward directions.

[0010] Optionally, the magnetic code disk body comprises a ring-shaped magnetic code disk, and the plurality of patterned films are arranged on an outer side wall curved surface of the ring-shaped magnetic code disk.

[0011] Optionally, the magnetization directions of the plurality of patterned films include:

[0012] The magnetization directions of the plurality of patterned films are all along the vertical direction of the outer wall curved surface, that is, perpendicular to the circumferential plane, including two directions, upward or downward;

[0013] Alternatively, the magnetization directions of the plurality of patterned films are along the tangent direction of the circumferential contour, including clockwise and counterclockwise directions;

[0014] Alternatively, the magnetization directions of the plurality of patterned films are perpendicular to the outer side wall curved surface, including both inward and outward directions.

[0015] Optionally, the magnetic code disk body comprises a planar magnetic code scale, and a plurality of the patterned films are arranged on the planar magnetic code scale.

[0016] Optionally, the magnetization directions of the plurality of patterned films include:

[0017] The magnetization directions of the multiple patterned films are all along the width direction of the planar magnetic code scale, including upward and downward directions;

[0018] Alternatively, the magnetization directions of the plurality of patterned films are all along the length direction of the planar magnetic code scale, including leftward and rightward directions;

[0019] Alternatively, the magnetization directions of the plurality of patterned films are perpendicular to the plane where the planar magnetic code scale is located, including two directions, inward or outward.

[0020] Optionally, the permanent magnetic film material is any one of the following: a hard magnetic material, a semi-hard magnetic material, and a multilayer film composed of the hard magnetic material and / or the semi-hard magnetic material.

[0021] On the other hand, a method for preparing a patterned permanent magnetic thin film magnetic code disk device based on isotropic magnetization is provided, comprising:

[0022] Based on the micro-nano processing technology, a plurality of patterned films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body; wherein the shapes, sizes and spacings of the plurality of patterned films are the same;

[0023] The plurality of patterned films are magnetized so that the magnetization directions of the plurality of patterned films are in the same orientation relationship as the magnetic code disk body.

[0024] Optionally, the micro-nano processing technology adopts one or more of the following processes: photolithography process, thin film deposition process, laser engraving process, mechanical cutting process, and hard mask process.

[0025] Optionally, the method of manufacturing a plurality of patterned films composed of permanent magnetic film materials on the outer surface of the magnetic code disk body based on the micro-nano processing technology includes:

[0026] A plurality of preset patterns are produced on the outer surface of the magnetic code disk body based on a photolithography process;

[0027] Based on the thin film deposition process and degumming, a plurality of patterned thin films are formed on a plurality of preset patterns.

[0028] Optionally, the method of manufacturing a plurality of patterned films composed of permanent magnetic film materials on the outer surface of the magnetic code disk body based on the micro-nano processing technology includes:

[0029] Depositing a permanent magnetic film on the outer surface of the magnetic code disk body based on a thin film deposition process;

[0030] A plurality of patterned films are formed on the permanent magnetic film based on a photolithography process.

[0031] Optionally, the method of manufacturing a plurality of patterned films composed of permanent magnetic film materials on the outer surface of the magnetic code disk body based on the micro-nano processing technology includes:

[0032] Depositing a permanent magnetic film on the outer surface of the magnetic code disk body based on a thin film deposition process;

[0033] Based on a laser engraving process or a mechanical cutting process, the permanent magnetic films other than the required patterned films are removed to obtain a plurality of patterned films.

[0034] Optionally, the method of manufacturing a plurality of patterned films composed of permanent magnetic film materials on the outer surface of the magnetic code disk body based on the micro-nano processing technology includes:

[0035] Based on the hard mask process, a plurality of patterned films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body.

[0036] The beneficial effects brought about by the technical solution provided by the embodiment of the present invention include at least: compared with the traditional magnetic code disk that magnetizes at intervals on continuous magnetic materials (which requires the use of expensive magnetizing equipment to perform precise and complex magnetizing operations, and the shape, size and domain wall boundaries of the magnetic domains after magnetization are irregular), the graphic thin film magnetic code disk device based on the same-direction magnetization of the present invention does not require alternating magnetization, and has the advantages of simple magnetization, uniform magnetic pole signals, and high magnetic pole density. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0038] Figure 1 This is one of the schematic diagrams of a patterned permanent magnetic thin film magnetic code disk device based on isotropic magnetization provided by an embodiment of the present invention;

[0039] Figure 2 This is the second schematic diagram of a patterned permanent magnetic thin film magnetic code disk device based on isotropic magnetization provided by an embodiment of the present invention;

[0040] Figure 3 This is a third schematic diagram of a patterned permanent magnetic thin film magnetic code disk device based on isotropic magnetization provided by an embodiment of the present invention;

[0041] Figure 4 It is a flow chart of a method for preparing a patterned permanent magnetic thin film magnetic code disk device based on isotropic magnetization provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0042] The technical solution of the present invention is described below in conjunction with the accompanying drawings.

[0043] In the embodiments of the present invention, words such as "exemplarily" and "for example" are used to indicate examples, illustrations or explanations. Any embodiment or design described as "example" in the present invention should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of the word "example" is intended to present the concept in a specific way. In addition, in the embodiments of the present invention, the meaning expressed by "and / or" can be both, or it can be either of the two.

[0044] In order to make the technical problems, technical solutions and advantages to be solved by the present invention more clear, a detailed description will be given below with reference to the accompanying drawings and specific embodiments.

[0045] The embodiment of the present invention provides a patterned permanent magnetic film magnetic code disk device based on the same direction magnetization, referring to Figure 1-Figure 3 As shown, the magnetic code disk device comprises: a magnetic code disk body 1, and a plurality of patterned films 2 composed of permanent magnetic film materials are arranged on the outer surface of the magnetic code disk body 1. The shapes, sizes and spacings of the plurality of patterned films 2 are the same, and the magnetization directions of the plurality of patterned films 2 are in the same orientation relationship with the magnetic code disk body 1.

[0046] Alternatively, if Figure 1 As shown, the magnetic code disk body 1 includes a ring-shaped magnetic code disk, and a plurality of patterned films 2 are arranged on the circumferential plane of the ring-shaped magnetic code disk.

[0047] Specifically, if a plurality of patterned films 2 are disposed on the circumferential plane of the annular magnetic code disk, the magnetization directions of the plurality of patterned films 2 may be as follows:

[0048] (1.1) The magnetization directions of the multiple patterned films 2 are radial in the circumferential plane, including both inward and outward directions. Figure 1 The large arrow in the middle shows the situation that radiates outward.

[0049] (1.2) The magnetization directions of the multiple patterned films 2 are along the tangent direction of the circumferential contour, including clockwise and counterclockwise directions. Figure 1 The small and medium arrows indicate the clockwise direction.

[0050] (1.3) The magnetization directions of the plurality of patterned films 2 are along the normal direction of the circumferential plane (i.e. perpendicular to the circumferential plane), including both inward and outward directions. Figure 1 The dot in the middle shows that the plane is perpendicular to the circumference and faces outward. It can also be all forks, which means the plane is perpendicular to the circumference and faces inward.

[0051] Alternatively, if Figure 2 As shown, the magnetic code disk body 1 includes a circular ring-shaped magnetic code disk, and a plurality of patterned films 2 are arranged on the outer side wall curved surface of the circular ring-shaped magnetic code disk.

[0052] Specifically, if a plurality of patterned films 2 are disposed on the outer wall curved surface of the annular magnetic code disk, the magnetization directions of the plurality of patterned films 2 may be as follows:

[0053] (2.1) The magnetization directions of the multiple patterned films 2 are all along the vertical direction of the outer wall surface (i.e., perpendicular to the circumferential plane), including upward or downward directions. Figure 2 The large arrow in the middle shows the situation of moving vertically upward along the curved surface of the outer wall.

[0054] (2.2) The magnetization directions of the multiple patterned films 2 are along the tangent direction of the circumferential contour, including clockwise and counterclockwise directions. Figure 2 The small and medium arrows indicate the counterclockwise direction.

[0055] (2.3) The magnetization directions of the multiple patterned films 2 are perpendicular to the outer wall surface, including both inward and outward directions. Figure 2 The dot in the middle shows that the vertical outer wall curved surface faces outward. It can also be all round forks, which means that the vertical outer wall curved surface faces inward.

[0056] Alternatively, if Figure 3 As shown, the magnetic code disk body 1 includes a planar magnetic code scale 3 ; a plurality of patterned films 2 are arranged on the planar magnetic code scale 3 .

[0057] Specifically, if a plurality of patterned films 2 are disposed on the planar magnetic code scale 3, the magnetization directions of the plurality of patterned films 2 may be as follows:

[0058] (3.1) The magnetization directions of the multiple patterned films 2 are all along the width direction of the planar magnetic code scale 3, including both upward and downward directions. Figure 3 As shown by the large arrow in the middle, it is the situation along the width direction of the planar magnetic code scale 3 upward.

[0059] (3.2) The magnetization directions of the multiple patterned films 2 are all along the length direction of the planar magnetic code scale 3, including left and right directions. Figure 3 As shown by the small and medium arrows, it is the situation to the right along the length direction of the planar magnetic code scale 3.

[0060] (3.3) The magnetization directions of the multiple patterned films 2 are perpendicular to the plane where the planar magnetic code scale 3 is located, including two directions: inward or outward. Figure 3 Middle dot. Figure 3 The dot in the middle indicates that the plane where the vertical plane magnetic code ruler 3 is located is facing outwards. It can also be all round forks, which means that the plane where the vertical plane magnetic code ruler 3 is located is facing inwards.

[0061] The present invention does not limit the specific shape of the patterned film 2. For example, it can be Figure 1 The sectors shown in the figure are evenly distributed on the circumferential plane of the annular magnetic code disk. Or they can be set in a long strip shape, such as Figure 2 and Figure 3 As shown, they are evenly distributed on the outer wall surface of the annular magnetic code disk or on the planar magnetic code scale.

[0062] Optionally, in an embodiment of the present invention, the permanent magnetic film material is any one of the following: a hard magnetic material, a semi-hard magnetic material, and a multilayer film mainly composed of a hard magnetic material and / or a semi-hard magnetic material.

[0063] Optionally, the semi-hard magnetic material includes but is not limited to: aluminum nickel cobalt AlNiCo, iron chromium cobalt FeCrCo; the hard magnetic material includes but is not limited to: neodymium iron boron NdFeB, samarium cobalt SmCo.

[0064] It should be noted that the permanent magnetic film material used in the present invention may also be other permanent magnetic materials or a combination of multiple permanent magnetic materials, and the present invention does not make any specific limitation.

[0065] Figure 4 FIG. 1 is a flow chart of a method for preparing a patterned permanent magnetic thin film magnetic code disk device based on isotropic magnetization provided by an embodiment of the present invention. Figure 4 As shown, the method specifically comprises the following steps:

[0066] Step S101, based on the micro-nano processing technology, a plurality of patterned films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body; wherein the shapes, sizes and spacings of the plurality of patterned films are the same;

[0067] Step S102 , performing a magnetization operation on the plurality of patterned films, so that the magnetization directions of the plurality of patterned films are aligned with the orientation relationship between the magnetic code disk body.

[0068] In the embodiment of the present invention, the micro-nano processing technology includes but is not limited to: photolithography technology, thin film deposition technology, laser engraving technology, mechanical cutting technology, hard mask technology, etc., or a combination of multiple processing technologies.

[0069] As an optional embodiment of the present invention, the method of manufacturing a plurality of patterned films composed of permanent magnetic film materials on the outer surface of the magnetic code disk body based on the micro-nano processing technology includes:

[0070] A plurality of preset patterns are produced on the outer surface of the magnetic code disk body based on a photolithography process;

[0071] Based on the thin film deposition process and degumming, a plurality of patterned thin films are formed on a plurality of preset patterns.

[0072] Specifically, a preset pattern is first produced by a graphic process, and then a graphic film is formed by thin film deposition and degumming.

[0073] As an optional embodiment of the present invention, the method of manufacturing a plurality of patterned films composed of permanent magnetic film materials on the outer surface of the magnetic code disk body based on the micro-nano processing technology includes:

[0074] Depositing a permanent magnetic film on the outer surface of the magnetic code disk body based on a thin film deposition process;

[0075] A plurality of patterned films are formed on the permanent magnetic film based on a photolithography process.

[0076] Specifically, a permanent magnetic film is first deposited, and then an exposure and etching process is used to form a patterned film.

[0077] In the embodiment of the present invention, the thin film deposition process includes: magnetron sputtering, electronic book evaporation, physical vapor deposition, and chemical vapor deposition.

[0078] The photolithography process includes exposure process and etching process; among them, the exposure process includes: UV exposure, laser exposure, electron beam exposure, nanoimprinting; the etching process includes: dry etching, wet etching, chemical etching.

[0079] As an optional embodiment of the present invention, the method of manufacturing a plurality of patterned films composed of permanent magnetic film materials on the outer surface of the magnetic code disk body based on the micro-nano processing technology includes:

[0080] Depositing a permanent magnetic film on the outer surface of the magnetic code disk body based on a thin film deposition process;

[0081] Based on a laser engraving process or a mechanical cutting process, the permanent magnetic films other than the required patterned films are removed to obtain a plurality of patterned films.

[0082] Since photolithography is not easy to implement on curved surfaces, laser engraving or mechanical cutting is sometimes required for processing patterned films on curved surfaces.

[0083] As an optional embodiment of the present invention, the method of manufacturing a plurality of patterned films composed of permanent magnetic film materials on the outer surface of the magnetic code disk body based on the micro-nano processing technology includes:

[0084] Based on the hard mask process, a plurality of patterned films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body.

[0085] Compared with the traditional magnetic code disk that magnetizes at intervals on continuous magnetic materials (which requires the use of expensive magnetizing equipment to perform precise and complex magnetizing operations, and the shape, size and domain wall boundaries of the magnetic domains after magnetization are irregular), the graphic thin film magnetic code disk device based on the same-direction magnetization of the present invention does not require alternating magnetization and has the advantages of simple magnetization, uniform magnetic pole signals and high magnetic pole density.

[0086] From the above description, it can be seen that the present invention provides a patterned permanent magnetic thin film magnetic code disk device based on unidirectional magnetization and a preparation method. Compared with the prior art, the patterned thin film magnetic code disk device based on unidirectional magnetization of the present invention does not require alternating magnetization, and has the advantages of simple magnetization, uniform magnetic pole signal, and high magnetic pole density.

[0087] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or terminal device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or terminal device. In the absence of further restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, article or terminal device including the elements.

[0088] References in the specification to "one embodiment", "an embodiment", "an exemplary embodiment", "some embodiments", etc. indicate that the described embodiments may include a particular feature, structure, or characteristic, but not every embodiment may include the particular feature, structure, or characteristic. In addition, when a particular feature, structure, or characteristic is described in conjunction with an embodiment, it should be within the knowledge of a person skilled in the relevant art to implement such feature, structure, or characteristic in conjunction with other embodiments (whether or not explicitly described).

[0089] It should be understood that the term "and / or" in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. A and B can be singular or plural. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship, but it may also indicate an "and / or" relationship. Please refer to the context for specific understanding.

[0090] In the present invention, "at least one" means one or more, and "more than one" means two or more. "At least one of the following" or similar expressions refers to any combination of these items, including any combination of single or plural items. For example, at least one of a, b, or c can be represented by: a, b, c, ab, ac, bc, or abc, where a, b, c can be single or multiple.

[0091] It should be understood that in various embodiments of the present invention, the size of the serial numbers of the above-mentioned processes does not mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present invention.

[0092] In the several embodiments provided by the present invention, it should be understood that the disclosed devices, apparatuses and methods can be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another device, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0093] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0094] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0095] If the functions are implemented in the form of software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention can be essentially or partly embodied in the form of a software product that contributes to the prior art. The computer software product is stored in a storage medium and includes several instructions for enabling a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the methods described in various embodiments of the present invention. The aforementioned storage media include: various media that can store program codes, such as USB flash drives, mobile hard disks, read-only memories (ROM), random access memories (RAM), magnetic disks or optical disks.

[0096] The present invention covers any substitution, modification, equivalent method and scheme made on the essence and scope of the present invention. In order to make the public have a thorough understanding of the present invention, specific details are described in detail in the following preferred embodiments of the present invention, but those skilled in the art can fully understand the present invention without the description of these details. In addition, in order to avoid unnecessary confusion about the essence of the present invention, well-known methods, processes, procedures, components and circuits are not described in detail.

[0097] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A patterned permanent magnetic thin film magnetic code disk device based on isotropic magnetization, characterized in that: include: A magnetic code disk body, wherein the outer surface of the magnetic code disk body is provided with a plurality of patterned films composed of permanent magnetic film materials; The shapes, sizes and spacings of the plurality of patterned films are the same, and the magnetization directions of the plurality of patterned films have the same orientation relationship with the magnetic code disk body; The structure of the magnetic code disk device adopts any one of the following: (1) The magnetic code disk body includes a circular magnetic code disk, and a plurality of the patterned films are arranged on a circumferential plane of the circular magnetic code disk; The magnetization directions of multiple patterned films include: The magnetization directions of the multiple patterned films are radial in the circumferential plane, including two situations: inward and outward; Alternatively, the magnetization directions of the plurality of patterned films are along the tangent direction of the circumferential contour, including clockwise and counterclockwise directions; Alternatively, the magnetization directions of the plurality of patterned films are along the normal direction of the circumferential plane, that is, perpendicular to the circumferential plane, including both inward and outward directions; (2) The magnetic code disk body includes a circular magnetic code disk, and a plurality of the patterned films are arranged on the outer wall curved surface of the circular magnetic code disk; The magnetization directions of multiple patterned films include: The magnetization directions of the plurality of patterned films are all along the vertical direction of the outer wall curved surface, that is, perpendicular to the circumferential plane, including two directions, upward or downward; Alternatively, the magnetization directions of the plurality of patterned films are along the tangent direction of the circumferential contour, including clockwise and counterclockwise directions; Alternatively, the magnetization directions of the plurality of patterned films are perpendicular to the outer side wall curved surface, including both inward and outward directions; (3) The magnetic code disk body includes a planar magnetic code scale, and a plurality of the patterned films are arranged on the planar magnetic code scale; The magnetization directions of multiple patterned films include: The magnetization directions of the multiple patterned films are all along the width direction of the planar magnetic code scale, including upward and downward directions; Alternatively, the magnetization directions of the plurality of patterned films are all along the length direction of the planar magnetic code scale, including leftward and rightward directions; Alternatively, the magnetization directions of the plurality of patterned films are perpendicular to the plane where the planar magnetic code scale is located, including two directions, inward or outward; The permanent magnetic film material is any one of the following: a hard magnetic material, a semi-hard magnetic material, or a multilayer film composed of the hard magnetic material and / or the semi-hard magnetic material; The method for preparing the patterned permanent magnetic thin film magnetic code disk device based on isotropic magnetization comprises the following steps: Based on the micro-nano processing technology, a plurality of patterned films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body; wherein the shapes, sizes and spacings of the plurality of patterned films are the same; Performing a magnetization operation on the plurality of patterned films so that the magnetization directions of the plurality of patterned films have the same orientation relationship as the magnetic code disk body; The micro-nano processing technology adopts one or more of the following processes: photolithography process, thin film deposition process, laser engraving process, mechanical cutting process, hard mask process; Based on the micro-nano processing technology, a plurality of patterned films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body, including: A plurality of preset patterns are produced on the outer surface of the magnetic code disk body based on a photolithography process; a plurality of patterned thin films are formed on the plurality of preset patterns based on a thin film deposition process and a degumming process; Alternatively, a permanent magnetic film is deposited on the outer surface of the magnetic code disk body based on a thin film deposition process; and a plurality of patterned films are formed on the permanent magnetic film based on a photolithography process; Alternatively, a permanent magnetic film is deposited on the outer surface of the magnetic code disk body based on a thin film deposition process; based on a laser engraving process or a mechanical cutting process, the permanent magnetic films other than the required patterned films are removed to obtain a plurality of patterned films; Alternatively, based on a hard mask process, a plurality of patterned films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body.

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