Processing machine and method for manufacturing a workpiece

Abstract

In the processing machine (1) of the present application, the Z-axis motor (39) moves the spindle (37) in the Z direction. The Z-axis position sensor (69) detects the position of the spindle (37) in the Z direction. The rotation sensor (71) detects the rotation of the spindle (37). When the spindle (37) is processing the workpiece (103) with the tool (101) in a state of rotation, the control section (5) controls the Z-axis motor (39) based on the detection value of the Z-axis position sensor (69) to move the spindle (37) in the Z direction to a relative position set with respect to a prescribed reference position. In a state where the spindle (37) is rotating and the spindle (37) is moving in the Z direction while the tool (101) is in contact with the workpiece (103) in the Z direction, when the rotation of the spindle (37) is detected by the rotation sensor (71) to stop, the control section (5) acquires the position detected by the Z-axis position sensor (69) as the above-mentioned reference position.

Description

Technical Field

[0001] This invention relates to a processing machine and a method for manufacturing a workpiece. Background Technology

[0002] Processing machines that use tools to process workpieces (e.g., cutting) have been disclosed (e.g., Patent Documents 1 and 2 below). Patent Documents 1 and 2 disclose cutting devices (processing machines) that use blades (tools) with cutting edges on their outer periphery to slit wafers (workpieces). Such processing machines, for example, achieve desired cutting depths by moving the cutting edge toward a relative position set with respect to a predetermined reference position.

[0003] Positional information for the aforementioned reference position is obtained, for example, by bringing the cutting edge close to the workpiece or the machining platform used to hold the workpiece, and detecting the position of the cutting edge when contact between the two is detected. The background art of Patent Documents 1 and 2 discloses techniques that utilize the conductivity of the contact between the cutting edge and the machining platform, both of which are conductive, to detect contact between them.

[0004] When the cutting edge comes into contact with the machining platform, either of them may experience deterioration or other problems. Therefore, the technical solution provided in Patent Document 1 involves applying a high-frequency voltage to both the cutting edge and the machining platform, and then detecting their proximity based on changes in their electrostatic capacitance. The technical solution provided in Patent Document 2 uses a near-cutting edge that mimics the cutting edge to replace it, thereby obtaining positional information as a reference position.

[0005] Existing technical documents

[0006] Patent documents

[0007] Patent Document 1: Japanese Patent Application Publication No. 61-071967.

[0008] Patent Document 2: Japanese Patent Application Publication No. 2015-103693. Summary of the Invention

[0009] The technical problem that the invention aims to solve

[0010] In the technology of Patent Document 1, a conductive object must be used as the cutting edge. This reduces the freedom of choice in selecting the cutting edge. In the technology of Patent Document 2, in addition to the cutting edge, a similar cutting edge must be used. Furthermore, errors arise due to the difference between the cutting edge and the similar cutting edge. Therefore, there is a need for a machining machine and a method for manufacturing the workpiece that can optimally obtain positional information as a reference position.

[0011] Technical solutions for solving technical problems

[0012] One embodiment of the processing machine of the present invention has:

[0013] The spindle used to hold the tool and workpiece together;

[0014] A holding part for holding the tool and the workpiece on the other side;

[0015] A drive unit for moving one of the main shaft and the retaining part, i.e., the movable part, in a predetermined first direction;

[0016] A position sensor used to detect the position of the movable part in the first direction;

[0017] A rotation sensor for detecting the rotation of the spindle; and

[0018] The control unit controls the drive unit based on the detection value of the position sensor when the spindle is rotating and the tool is used to process the workpiece, so that the movable part moves in the first direction to a relative position set relative to a predetermined reference position.

[0019] When the workpiece or a component that does not move relative to the workpiece is used as a reference component, and the spindle is rotating while the movable part moves in the first direction and the tool is in contact with the reference component in the first direction, when the rotation sensor detects that the spindle has stopped rotating, the control unit obtains the position detected by the position sensor as the reference position.

[0020] One method for manufacturing a workpiece according to the present invention involves using the aforementioned processing machine and the aforementioned tools to process the aforementioned workpiece to obtain the workpiece.

[0021] The effects of the invention

[0022] Based on the above structure or steps, information on the reference position when the workpiece and tool move relative to each other can be optimally obtained. Attached Figure Description

[0023] Figure 1 This is a schematic perspective view showing important parts of the processing machine according to an embodiment of the present invention.

[0024] Figure 2 It is Figure 1 A magnified 3D diagram showing a portion of the processing machine.

[0025] Figure 3 It is a display Figure 1 A cross-sectional view of the bearing of the spindle of the machining center.

[0026] Figure 4 It is a display Figure 1 A schematic block diagram of the signal processing system of the machining machine.

[0027] Figure 5 (a) and Figure 5 (b) is used to explain the... Figure 1 A schematic diagram of the operation of a machining machine to obtain reference position information.

[0028] Figure 6 It is a display Figure 1 A flowchart illustrating an example of the steps involved in obtaining reference position information in a machining machine. Detailed Implementation

[0029] First, an overview of the processing machine according to one embodiment of the present invention will be described, and then details of the processing machine will be described.

[0030] (Overview of the machining machine)

[0031] Figure 1 This is a schematic perspective view showing important parts of the processing machine 1 according to one embodiment of the present invention. Figure 2 It means to Figure 1 A magnified schematic perspective view of a portion of the processing machine 1.

[0032] The relationship between the orientations of the various components in the illustration and the vertical direction is not defined. However, in the following explanation, for ease of illustration, the relationship between the orientations of the various components and the vertical direction is presented based on the example shown in the illustration. For ease of understanding, an orthogonal coordinate system XYZ is indicated in the illustration. The Z direction is, for example, a direction parallel to the vertical direction, and the +Z side is, for example, upward.

[0033] The machining machine 1 uses tool 101 to process (e.g., cut) workpiece 103. Tool 101 and workpiece 103 are processed using... Figure 1 The mechanical body 3 shown is used for support and drive. The mechanical body 3 is controlled by the control unit 5 (see reference). Figure 4 Controlled by [the relevant component]. In the illustrated example, tool 101 is a cutting edge with a cutting edge on its outer periphery, held by a spindle 37 parallel to the Y direction. The spindle 37 then rotates about an axis parallel to the Y direction while moving towards the -Z side to cut the workpiece 103. Specifically, for example, although not specifically illustrated, a groove extending in the X direction is formed on the upper surface of the workpiece 103. A machining fluid (not shown; e.g., cutting fluid) is supplied from nozzle 7 relative to the area being machined.

[0034] The control unit 5 obtains, for example, the position of the spindle 37 in the Z direction when the tool 101 is moved towards the -Z side so that the tool 101 abuts against the workpiece 103 (as described later, or other components) as a reference position. Then, the spindle 37 is moved to a position in the Z direction relative to the reference position. In this way, the depth of the groove formed on the upper surface of the workpiece 103 can be cut to the desired size (i.e., the relative distance between the reference position and the aforementioned relative position).

[0035] Figure 5 (a) and Figure 5 (b) is a schematic diagram illustrating the method of obtaining information about the location of the aforementioned reference position. Figure 6 This is a flowchart illustrating an example of the steps involved in obtaining position information used as a reference position. It should be noted that... Figure 6 This is a flowchart illustrating an example of the processing steps performed by the display control unit 5.

[0036] It should be noted that, for the sake of simplicity, the information of the reference position will sometimes be referred to as "reference position" in the following explanation. Furthermore, the information of obtaining the position used as the reference position will be referred to as "obtaining the reference position".

[0037] First, such as Figure 5 Arrow a1 in (a) and Figure 6 As shown in step ST1, with the tool 101 separated from the workpiece 103 towards the +Z side, the tool 101 (or, from another perspective, the spindle 37) is rotated about the rotation axis CL. Furthermore, as... Figure 5 Arrow a2 in (a) and Figure 6 As shown in step ST2, while the tool 101 is rotating, the tool 101 is brought close to the workpiece 103.

[0038] The rotational speed of tool 101 at this time is lower than that of tool 101 when cutting workpiece 103, for example. In other words, the torque used to drive tool 101 at this time (external torque and / or inertial torque. The same applies in the following description.) is less than the torque used to drive tool 101 during machining.

[0039] Various methods can be used to rotate tool 101. In the illustrated example, tool 101 is rotated by supplying fluid from nozzle 7 toward the outer periphery of tool 101 in a tangential direction toward that outer periphery.

[0040] Then, as Figure 5As shown in (b), when tool 101 comes into contact with workpiece 103, tool 101 receives frictional forces from workpiece 103, causing tool 101 to stop rotating. Figure 6 As shown in step ST3, the control unit 5 will detect the stop of this rotation. Furthermore, when the control unit 5 detects the stop of rotation (in step ST3) and makes a positive determination, as shown in step ST4, it detects the position of the spindle 37 in the Z direction at this time and uses the detected position in the Z direction as the reference position.

[0041] Thus, in this embodiment, the contact between the tool 101 and the workpiece 103 is detected based on the phenomenon that the rotating tool 101 stops rotating when it comes into contact with the workpiece 103. Therefore, the tool 101 or the reference component (here, the workpiece 103) in contact with the tool 101 does not need to be conductive. Furthermore, it is not necessary to use a blade-like material. Moreover, by simply reducing the rotational speed of the tool 101 (reducing the torque), the possibility of deterioration of the tool 101 and / or the reference component is also reduced.

[0042] (Detailed description of the processing machine)

[0043] As described above, for example, the machining machine 1 has a mechanical body 3 including a spindle 37 and a control unit 5 for controlling the mechanical body 3. Furthermore, the machining machine 1 also has a fluid supply unit 9 including a nozzle 7 (see reference). Figure 4 The control unit 5 can also be used to control the fluid supply unit 9. Furthermore, the fluid supply unit 9 may be a separate device from the processing machine 1, unlike the description above.

[0044] In the following description, the structure of the processing machine 1 will be briefly explained in the order listed below.

[0045] Tools 101 Figure 1 and Figure 2 )

[0046] ·Workpiece 103 ( Figure 1 and Figure 2 )

[0047] ·Mechanical body 3 ( Figure 1 , Figure 2 and Figure 3 )

[0048] Fluid Supply Department 9 ( Figure 1 , Figure 2 and Figure 4 )

[0049] • Control Unit 5 ( Figure 4 )

[0050] • Steps for obtaining location information as a reference position ( Figure 5 (a) Figure 5 (b) and Figure 6 )

[0051] Summary of implementation methods

[0052] (tool)

[0053] Tool 101 can be any tool used in various machining processes. For example, tool 101 can be a cutting tool for cutting, a grinding tool for lapping, or a grinding tool for grinding. The cutting tool can be, for example, a rotary tool (rotary tool, example shown in the illustration) that rotates itself to cut the workpiece 103, or a turning tool that cuts the rotating workpiece 103. Examples of rotary tools include, for example, end mills, drills, and reamers. The grinding or polishing tool can use fixed abrasive particles fixed to the tool, or it can use free abrasive particles contained in mortar.

[0054] Unlike the illustrated example, when tool 101 is used as a turning tool to obtain a reference position, for example, the turning tool and workpiece 103 are brought close together while the spindle holding workpiece 103 is rotating. Then, the workpiece 103 stops rotating due to contact between the two, and the detected position of tool 101 or workpiece 103 at this time can be obtained and used as the reference position. It should be noted that in this embodiment, unless otherwise stated, the illustrated example is described or presented with tool 101 as a turning tool.

[0055] First, consider the case where tool 101 or workpiece 103 (tool 101 in the illustrated example) is moved in a first direction (Z direction in the illustrated example) for machining, and / or used to obtain a reference position in the first direction. In this case, the portion of tool 101 that contacts workpiece 103 in the first direction is not limited. In other words, the relationship between the direction of tool 101 and the first direction is not limited. For example, if tool 101 is a rotary tool, the contact portion could be the outer periphery (the portion outside the rotating shaft, as illustrated) or the front end.

[0056] As illustrated in the example, when the outer periphery of the cutting tool contacts the workpiece 103 in a first direction, for example, when a reference position is obtained, the contact between the tool 101 and the workpiece 103 makes it easier to stop the rotation of the tool 101. This effect is, for example, greater with a larger diameter. Regarding this viewpoint, the diameter of the tool 101 can be set to, for example, more than one, two, or more than five times, the maximum length (or, more than, the maximum thickness) of the tool 101 in the direction of rotation.

[0057] exist Figure 1 and Figure 2 In the illustration, tool 101 is exemplified as a turning tool. More specifically, the tool 101 in the illustrated example has a cutting edge 101a (reference numeral) on its outer periphery. Figure 5 (a) and Figure 5 (b) The cutting edge. The cutting edge is generally plate-shaped (disc-shaped or annular) with a circular outer edge. The cutting edge rotates about its axis of rotation (in the illustrated example, an axis of rotation parallel to the Y direction) to form a groove relative to the workpiece 103 and / or to cut (divide) the workpiece 103. The processing machine 1 may have a single cutting edge (as illustrated in the example) or multiple cutting edges spaced apart in a direction parallel to the axis of rotation. It should be noted that the following description, as shown in the illustrated example, assumes a configuration with only one cutting edge.

[0058] (Workpiece)

[0059] As can be seen from the above description, the processing performed by tool 101 can be of various types, and the workpiece 103 can also be of various types. For example, the material of workpiece 103 can be various materials, such as metal, ceramic, resin, wood, chemical wood, or composite materials (e.g., carbon fiber reinforced plastic). The shape and size of workpiece 103 before and / or after processing are not limited. The required dimensional accuracy of the processed workpiece 103 is also not limited. For example, in cases requiring high accuracy, the accuracy (tolerance) can be set to below 10 μm, below 1 μm, or below 100 nm.

[0060] Consider the situation where the tool 101 or workpiece 103 (tool 101 in the illustrated example) is moved in a first direction (Z direction in the illustrated example) for machining and / or a reference position is obtained in the first direction. In this case, the portion of the workpiece 103 that contacts the tool 101 in the first direction is not limited. From another perspective, the relationship between the orientation of the component used to hold the workpiece 103 (machining platform 25 described later in the illustrated example) and the first direction is not limited.

[0061] For example, in the embodiment where tool 101 is a turning tool (the illustrated example), the contacting part described above can be the upper surface of workpiece 103 (the side opposite to the machining platform 25, as shown in the illustrated example), or it can be a different example, such as the side surface of workpiece 103 (the side facing the machining platform 25). Furthermore, although not specifically illustrated, in the embodiment where tool 101 is a turning tool, the contacting part described above can be the outer peripheral surface of workpiece 103 (the surface located outside the rotation axis), or it can be the end face (the surface facing the direction parallel to the rotation axis).

[0062] exist Figure 1 and Figure 2 In this example, workpiece 103 is illustrated as a plate-shaped workpiece (substrate). The shape of the plate-shaped workpiece 103 before processing is not limited; for example, it can be rectangular (the example shown) or circular. As described above, when the tool 101 is in the form of a disc-shaped cutting edge with a cutting edge 101a on its outer periphery, it is advantageous for the cutting edge to form a groove on the upper surface (the face on the +Z side) of the plate-shaped workpiece 103 that extends in a direction orthogonal to the rotation axis of the tool 101 (X direction), or to divide the workpiece 103 in the Y direction.

[0063] (Main body of the machine)

[0064] In the description of the mechanical body 3, it will be briefly described in the following order.

[0065] • The mechanical body 3 that can be used in this embodiment

[0066] · Figure 1 The illustrated mechanical body 3

[0067] • An example of the structure of the bearing of spindle 37

[0068] (Main body of the machine)

[0069] The machine body 3 is used to support and drive the tool 101 and the workpiece 103. That is, the machine body 3 is the main part responsible for machining. The structure of the machine body 3 can take various forms; for example, a known structure can also be used.

[0070] For example, machinery used for processing can be categorized into: machine tools and industrial robots (the dividing line is not clearly defined). In this categorization, the machine body 3 (or processing machine 1) can be classified into either category. It should be noted that in this embodiment, the example used is a machine tool classified as general machine tools.

[0071] Furthermore, as can be seen from the above description of tool 101, the target machining performed by the machine body 3 (or machining machine 1) can be set to various machining processes such as cutting, grinding, and / or lapping. Moreover, the machine body 3 used for cutting, etc., can be used to rotate tool 101 or to rotate workpiece 103.

[0072] The machine body 3 may or may not be a composite machine. The machine body 3 may be a machine that drives one tool 101 (as illustrated in the example), or it may be a multi-axis or multi-head machine that drives multiple tools 101 simultaneously. The machine body 3 (machine 1) that rotates the tool 101 (rotary cutting tool) may be, for example, a milling machine, a drilling machine, a boring machine, or a machining center.

[0073] The machine body 3, for example, is one that moves the tool 101 and the workpiece 103 relative to each other along mutually orthogonal X, Y, and Z axes. The machine body 3 can also be one that moves the tool 101 and the workpiece 103 relative to each other along axes other than the three axes described above. For example, the machine body 3 (machine 1) can also be capable of rotating about at least one axis parallel to any of the three axes described above (e.g., a five-axis machining center). The relative movement of the tool 101 and the workpiece 103 along each axis, as is known from known machine tools, can be achieved by moving the tool 101 or by moving the workpiece 103.

[0074] It should be noted that the description of this embodiment is based primarily on the premise that the orientations of various components such as the spindle 37 and the machining platform 25 remain unchanged, and the description focuses on the orientations of these components. This description can be applied to situations where the orientation of a component can be changed; for example, it can be applied to the standard orientation of the component, or to a specific orientation different from the standard orientation. The standard orientation of the component can also be reasonably determined by referring to common technical knowledge.

[0075] When tool 101 is a turning tool, the relative relationships between the direction of the spindle 37, the direction of the machining platform 25, the vertical direction, and the first direction used to obtain the reference position (the Z direction in the illustrated example) are not limited. Similarly, when tool 101 is a turning tool, the relative relationships between the direction of the spindle 37, the direction of the tool table, the vertical direction, and the first direction are not limited.

[0076] For example, the spindle 37 (i.e., its axis of rotation) can be parallel (as illustrated in the example) or intersecting (e.g., orthogonal) with respect to the upper surface of the machining platform 25. Similarly, the first direction relative to the spindle 37 can be intersecting (e.g., orthogonal, as illustrated in the example) or parallel.

[0077] (The mechanical body of the example shown in the illustration)

[0078] Figure 1 The example shown is a cutting machine that uses a disc-shaped tool 101 with a cutting edge 101a on its outer periphery as the main body of the machine to perform cutting work by rotating the tool 101.

[0079] Specifically, for example, Figure 1 The illustrated machine body 3, as a structural element supporting the workpiece 103, comprises the following components: a base 21 provided on a factory floor or similar surface; an X-axis stage 23 fixed to the base 21; a machining platform 25 supported on the X-axis stage 23 and movable in the X direction (horizontal direction); and a suction head 27 fixed to the machining platform 25 and detachably holding the workpiece 103. Although not specifically shown, the machine body 3 may also be configured to allow the machining platform 25 to rotate about an axis parallel to the Z-axis.

[0080] And, for example, Figure 1 The illustrated mechanical body 3, as a structural element for supporting and driving the tool 101, has the following components: the base 21; a Y-axis platform 29 fixed on the base 21; a Y-axis moving part 31 supported on the Y-axis platform 29 and movable in the Y direction (horizontal direction); a Z-axis moving part 33 supported on the Y-axis moving part 31 and movable in the Z direction (vertical direction); a spindle head 35 (excluding the spindle 37) fixed on the Z-axis moving part 33; and a spindle 37 (reference symbol) supported on the spindle head 35, capable of rotating about a rotation axis parallel to the Y direction, and detachably holding the tool 101. Figure 2 ).

[0081] Driving force from a drive source (not shown, e.g., an electric motor) is transmitted to the machining platform 25, which moves in the X direction. As a result, the workpiece 103 supported on the machining platform 25 moves relative to the tool 101 in the X direction. Driving force from a drive source (not shown, e.g., an electric motor) is transmitted to the Y-axis moving part 31, which moves in the Y direction. As a result, the tool 101 supported on the Y-axis moving part 31 moves relative to the workpiece 103 in the Y direction. Driving force from a predetermined drive source (e.g., described later)... Figure 4The driving force of the Z-axis motor 39 (shown) is transmitted to the Z-axis moving part 33, which moves in the Z direction. As a result, the tool 101, supported on the Z-axis moving part 33, moves relative to the workpiece 103 in the Z direction. The driving force comes from a predetermined drive source (e.g., Figure 4 The driving force of the spindle motor 41 shown is transmitted to the spindle 37, which rotates about its axis of rotation, thereby causing the tool 101 held on the spindle 37 to rotate about the axis of rotation.

[0082] Figure 1 and Figure 2 These are schematic diagrams. The shapes of the components (21, 23, 25, 27, 29, 31, 33, 35, and 37) shown in the diagrams are merely illustrative. The actual shapes and dimensions of the components may differ from those shown in the diagrams. Furthermore, the materials used for the components are not limited. Additionally, the guides (labels omitted) used to guide the moving parts (25, 31, or 33) to move parallel to the support parts (23, 29, or 31) are also shown schematically, and their shapes may differ from those shown in the diagrams.

[0083] The guide used to guide the moving part (25, 31, or 33) to move parallel to the support part (23, 29, or 31) can be any suitable guide. For example, the guide can be a sliding guide that allows the support part to slide against the moving part; it can be a rolling guide that allows the rolling elements to roll between the support part and the moving part; it can be a hydrostatic guide that allows air or oil to be introduced between the support part and the moving part; or it can be a combination of two or more of the above guides. Similarly, the bearing of the main shaft 37 can be a sliding bearing, a rolling bearing, a hydrostatic bearing, or a combination of two or more of these bearings.

[0084] The drive source associated with parallel movement is, for example, an electric motor. This electric motor can be a rotary motor or a linear motor. It is sufficient to convert the rotational motion of the rotary motor into linear motion using a suitable mechanism such as a screw mechanism (e.g., a ball screw mechanism). Furthermore, the drive source associated with parallel movement can also be a hydraulic (oil-pressure) or pneumatic drive source. Similarly, the drive source associated with the rotation of the spindle 37 is, for example, a rotary electric motor (spindle motor 41). However, the drive source associated with the rotation of the spindle 37 can also be a hydraulic (oil-pressure) or pneumatic drive source. The specific structure of each electric motor can adopt the original structure of the various electric motors. The electric motor can be a DC motor or an AC motor. The AC motor can be a synchronous motor or an induction motor.

[0085] The rotor (not shown) of the spindle motor 41 and the spindle 37 are, for example, fixed together to rotate (in a configuration where some components are shared). However, a clutch and / or a speed changer may be provided between the rotor (partial or complete of the rotor) and the spindle 37. When a clutch is provided, the connection between the rotor and the spindle 37 can be disengaged first during the operation to obtain a reference position, thereby reducing the inertial torque. It should be noted that, unless otherwise stated, this description of the embodiment is based on the premise that the rotor and spindle 37 rotate as a single unit.

[0086] In the configuration where the spindle motor 41 is a synchronous motor including a permanent magnet, for example, when no power is supplied and it is in a torque-free state, the permanent magnet will generate an attractive force that stops the spindle 37 from rotating. Therefore, for example, when obtaining a reference position, the possibility of unexpected rotation can be reduced. Furthermore, from another perspective, rotating the tool 101 by supplying fluid is also an effective method. On the other hand, in the configuration where the spindle motor 41 is an induction motor, for example, when no power is supplied and it is in a torque-free state, no attractive force will be generated that stops the spindle 37 from rotating. Therefore, for example, even if the force applied to the tool 101 by the fluid is small, the spindle 37 can still rotate.

[0087] The suction head 27 is made of, for example, a vacuum suction head or an electrostatic suction head, and is mounted on the machining platform 25 using a suitable tool such as a vise (not shown). It should be noted that the suction head 27 may also be an integral, inseparable structure from the machining platform 25, unlike the description above. Furthermore, the suction head 27 may be omitted, and other suitable clamps (e.g., a vise) may be used to fix the workpiece 103 to the machining platform 25.

[0088] Alternatively, a combination of the machining platform 25 and the suction head 27 can be used as the machining platform, different from the method described in this embodiment. When defining the holding surface of the machining platform used to hold the workpiece 103, the holding surface can be the holding surface 25a (see symbol) of the machining platform 25 that indirectly holds the workpiece 103 by holding the suction head 27. Figure 2 It can also be the holding surface 27a of the suction head 27 used to directly hold the workpiece 103 (please refer to the symbol). Figure 2 ).

[0089] The spindle 37 can hold the tool 101 using its own mechanism (e.g., a clamping mechanism), or it can use a tool including screws to mount the tool 101 onto the spindle 37. The cutting edge (tool 101) can be fixed to the spindle 37 using, for example, a component (not specifically shown) having a shaft portion through which a hole formed in the center of the cutting edge is inserted, a component that overlaps with the cutting edge in the axial direction of the spindle 37, and a screw that passes through these components and is screwed onto the spindle 37. In this configuration, the cutting edge can be used as the tool 101, or the entire tool 101 can be the cutting edge and the tool used to mount the cutting edge onto the spindle 37.

[0090] The spindle 37 is located on the side facing the holding surface 27a of the machining platform 25, and the axis of rotation is along the holding surface 27a (e.g., kept parallel). Then, the spindle 37 moves in the Z direction, which is taken as the first direction, thereby allowing the outer periphery of the cutting edge of the tool 101 to contact the upper surface of the workpiece 103 for machining or to obtain a reference position.

[0091] (An example of the structure of a spindle bearing)

[0092] As mentioned above, the structure of the bearing for spindle 37 is not particularly limited. Here, as an example of the bearing for spindle 37, the structure of a hydrostatic bearing will be described.

[0093] Figure 3 This is a schematic cross-sectional view showing an example of the structure of the bearing 43 of the spindle 37, corresponding to... Figure 2 Section III-III in the middle.

[0094] A gap is formed between the outer peripheral surface of the spindle 37 and the inner peripheral surface of the spindle head 35. Gas (e.g., air) or liquid (e.g., oil or water) is supplied into this gap at a specified pressure using a pump 45 or the like. It should be noted that, in the former configuration, the bearing 43 is an air bearing.

[0095] (Fluid Supply Department)

[0096] Figure 4 This is a block diagram showing the structure of the processing machine 1 with the structure of the signal processing system as the center.

[0097] The fluid supply unit 9 includes a nozzle 7 and a supply unit body 47 for supplying fluid to the nozzle 7. As described above, the fluid supply unit 9 is the area (hereinafter sometimes referred to as the processing area) where the workpiece 103 is processed using the tool 101. Furthermore, when obtaining a reference position, the fluid supply unit 9 causes the tool 101 to rotate by supplying fluid from the nozzle 7 toward the tool 101.

[0098] The following description will be presented in a general order.

[0099] Processing fluid

[0100] • Fluid supplied during the acquisition of reference position

[0101] • Components impacted by fluid during the acquisition of reference positions

[0102] Nozzle 7

[0103] Supply Department Main Body 47

[0104] (Processing fluid)

[0105] As can be seen from the description of tool 101 above, the machining fluid (not shown) can be any type of machining fluid used for various machining processes. For example, in the case of cutting, the machining fluid can be a cutting fluid (or cutting oil). The main component of the cutting fluid can be oil or water. Furthermore, the machining fluid can also be a grinding fluid for lapping or a polishing fluid for grinding. The grinding fluid or polishing fluid (suspension) may or may not contain free abrasive particles. Regardless of the type of machining, even water can be used as the machining fluid. Furthermore, the machining fluid can also be a coolant used solely for cooling or primarily for cooling.

[0106] (The fluid supplied when obtaining the reference position)

[0107] In the operation of obtaining a reference position, the type (composition) of the fluid supplied to the tool 101 to rotate the tool 101 is not particularly limited. For example, the fluid can be a processing fluid, a liquid different from a processing fluid, or a gas. If it is a gas, examples include air and inert gases (e.g., nitrogen). In the description of this embodiment, the form of supplying air is basically used as an example. And unless otherwise stated, air is presented as the fluid supplied for obtaining the reference position.

[0108] (Components impacted by fluid during the process of obtaining a reference position)

[0109] In the above description, during the operation of obtaining the reference position, the component impacted by the fluid to rotate the spindle 37 is designated as tool 101. However, if the workpiece 103 is held by the spindle 37, the component impacted by the fluid can also be designated as workpiece 103. It should be noted that, regardless of the configuration, the component impacted by the fluid can be referred to as the rotating object held by the spindle 37.

[0110] Furthermore, regardless of whether the rotating object is tool 101 or workpiece 103, the fluid can be impacted onto the spindle 37 instead of impacting the rotating object, or the fluid can be impacted onto the spindle 37 in addition to impacting the rotating object. A component that increases torque through the impact of the fluid can also be mounted on the spindle 37. Such a component can also be part of the spindle 37 or part of the rotating object.

[0111] The fluid impacts the outer surface of the rotating object (tool 101 or workpiece 103) or the exposed outer surface of the spindle 37. The limitation here is to the exposed outer surface of the spindle 37 to distinguish it from the technique of using fluid inside the spindle head 35 to apply torque to the spindle 37 for machining (the technique of using fluid instead of spindle motor 41).

[0112] It should be noted that in the description of this embodiment, sometimes the component that is impacted by the fluid in order to rotate the spindle 37 during the operation of obtaining the reference position is presented as the tool 101. The term "tool 101" as the component impacted by the fluid can be appropriately replaced with the term "workpiece 103" or "spindle 37" as long as there is no contradiction.

[0113] (nozzle)

[0114] Figure 2 The nozzle 7 shown is used to supply machining fluid to the machining area when the workpiece 103 is machined using the tool 101. The machining area, in other words, is the area within the workpiece 103 that is machined by the tool 101. For example, in the case where the tool 101 is a cutting tool, the machining area is the position where the cutting edge abuts against the workpiece 103 and the area adjacent to it. In the case where the tool 101 is a grinding or polishing tool, for example, the machining area is the position where the tool 101 abuts against the workpiece 103 and the area adjacent to it, or the area where they abut against each other; the abutment may be indirect, with free abrasive particles intervening between them.

[0115] The supply of machining fluid to the machining area can be carried out in various ways. For example, nozzle 7 can be directed toward the machining area to allow the machining fluid to flow out, or it can be directed toward a location in tool 101 or workpiece 103 that is separate from the machining area to allow the machining fluid to pass through tool 101 or workpiece 103 and reach the machining area. Nozzle 7 can spray the machining fluid, or it can allow the machining fluid to flow out at a flow rate that cannot be called spraying. Nozzle 7 can be directed to flow out (e.g., spray) the machining fluid in a stream with a suitable profile, or it can be directed to flow out (e.g., spray) the machining fluid in a shower-like manner, or it can be directed to spray the machining fluid in a mist.

[0116] Furthermore, when obtaining the reference position, the nozzle 7 ejects fluid relative to the outer surface of the tool 101 in a direction that can apply a torque about the rotation axis to the spindle 37. By rotating the spindle 37 in this manner, the position (area) where the tool 101 is impacted by the fluid can be set in various positions, and the direction in which the fluid impacts this position (or, from another perspective, the direction of fluid ejection) can be set in various directions. Conceptually, for example, the tool 101 can be rotated as long as an imaginary line extending from the point of application of the resultant force of the fluid applied to the tool 101 in the direction of the resultant force is separate from the rotation axis. In other words, the tool 101 will rotate as long as the fluid impacts the outer surface of the tool 101, which is offset relative to the rotation axis of the tool 101.

[0117] Specifically, for example, when viewing tool 101 from a direction parallel to its rotation axis, the direction of fluid impact can be set such that an imaginary line extending from the point of fluid impact (or area, or the center of that area) in the direction of fluid impact is separate from the rotation axis of the main shaft 37. It should be noted that this direction can be a tangent to a circle of any radius centered on the rotation axis. Furthermore, for example, when viewing tool 101 from a direction parallel to its rotation axis, the direction of fluid impact can be set to a tangent to the circle passing through the point of fluid impact. It should be noted that the tangent to the direction of fluid impact (and / or the direction of fluid ejection) can have a relatively large permissible deviation; for example, it can be set within a range of 60° or 30° centered on a precise tangent.

[0118] Furthermore, for example, the direction in which the fluid impacts can be orthogonal to the rotation axis of tool 101 in a torsional position, or it can be inclined to the direction parallel to the rotation axis (the Y direction in the illustrated example). Also, for example, the location where the fluid impacts can be the outer periphery of tool 101 (the portion outside the rotation axis), or it can be a surface facing the direction along the rotation axis of tool 101 (the +Y side and / or -Y side in the illustrated example), or both of the latter.

[0119] When the fluid used to rotate the spindle 37 and impact the tool 101 is liquid, the way the fluid is ejected from the nozzle 7 can be varied. For example, the description of the supply method (e.g., ejecting in a single columnar stream or ejecting in a shower-like manner) in the description of supplying machining fluid can be applied to the supply method of the fluid used to rotate the spindle 37. Furthermore, when the fluid is liquid, it can be supplied to the tool 101 in a manner that cannot be described as ejection, or the force of the liquid falling can be used to rotate the tool 101.

[0120] The nozzle 7 can have various structures, including those similar to those known to the public. The structure of the nozzle used to achieve the flow of liquid (e.g., spraying out a single stream of water or spraying out in a shower-like manner) is a known structure. Furthermore, the nozzle 7 can be a nozzle capable of switching the flow of liquid, or it can be a nozzle that cannot switch the flow of liquid. In the former case, the switching state of the nozzle 7 can be the same when supplying processing fluid and when supplying fluid that causes the spindle 37 to rotate, or it can be a different state.

[0121] Various structures can be used for the installation and positioning of the nozzle 7, such as those known to the public. Specifically, for example, the nozzle 7 can be installed and removed from the machine body 3. It should be noted that in this case, the nozzle 7, like the tool 101 and workpiece 103, can be a separate element from the machining machine 1. The nozzle 7 can be movable during machining or positioned in a fixed location. The positioning of the nozzle 7 relative to a predetermined element (e.g., the spindle 37) can be performed manually or by a robot. In the latter case, positioning can be performed automatically by the control unit 5 or by operation relative to an unshown operating unit on the machining machine 1. When the position of the nozzle 7 can be changed, the position of the nozzle 7 can be the same or different when supplying machining fluid and when supplying fluid to rotate the spindle 37 during the operation to obtain a reference position.

[0122] exist Figure 2In the example shown, nozzle 7 is located at the front end of a bellows (symbol omitted) that can maintain its shape. The end of the bellows located on the opposite side of nozzle 7 is connected to a block (label omitted) having a flow path. The block is fixed to the spindle head 35 using a suitable tool. Therefore, nozzle 7 can move relative to workpiece 103 together with tool 101 (except for rotation about the axis of tool 101), and its specific position and orientation can be determined by manually deforming the bellows. Figure 2 In this configuration, the nozzle 7 is positioned such that the machining fluid and the fluid used to rotate the spindle 37 can be ejected in the tangential direction relative to the cutting edge 101a, which is the cutting edge of the tool 101.

[0123] (Main body of the supply department)

[0124] The supply unit body 47 includes a machining fluid supply source 49 for supplying machining fluid, and an air supply source 51 for supplying fluid (here, air) to rotate the spindle 37 when a reference position is obtained. Furthermore, the supply unit body 47 also includes a control valve 53 that can selectively connect the machining fluid supply source 49 and the air supply source 51 to the nozzle 7. Thus, the fluid supply unit 9 can selectively dispense machining fluid and air from the nozzle 7.

[0125] The structure of the processing fluid supply system in the main body 47 of the supply unit can be appropriately configured to suit the type of processing fluid. For example, when the processing fluid is in the form of cutting fluid, grinding fluid, or polishing fluid, the processing fluid supply system can adopt the same structure as the device used to supply these processing fluids in general machine tools, or a structure that applies such a structure. Furthermore, when the processing fluid is in the form of water, the processing fluid supply system can adopt a structure that allows water to be supplied from the factory equipment and has valves that can supply the water to the nozzle 7 and prevent the water from being supplied to the nozzle 7.

[0126] When the machining fluid is a cutting fluid, grinding fluid, or polishing fluid, or a similar substance, although not specifically shown in the diagram, for example, the machining fluid supply source 49 only needs to have a reservoir for storing the machining fluid and a pump for discharging the machining fluid from the reservoir. The machining fluid supply system only needs to have a valve for controlling the flow of the machining fluid at a suitable location (e.g., between the pump and the control valve 53). Figure 4 The illustration shows a processing fluid valve 55 that opens and closes according to instructions from the control unit 5. Furthermore, the supply of processing fluid, the flow rate, and / or the pressure of the processing fluid can be controlled by the pump and / or the processing fluid valve 55.

[0127] The structure of the air supply system in the main body 47 of the supply unit can be any suitable structure. For example, a known processing fluid supply device is one that mixes processing fluid with compressed air and sprays out a mist of processing fluid. The structure used to supply this compressed air can be applied to an air supply system or used as a combined air supply system. For example, although not specifically shown, the air supply source 51 only needs to have an air compressor for delivering air. The air supply system only needs to have a valve for controlling the flow of air at a suitable location (e.g., between the air compressor and the control valve 53). Figure 4 In the example shown, the air valve 57 is opened and closed according to the command from the control unit 5. Furthermore, the supply of air, the air flow rate, and / or the air pressure can be controlled by using an air compressor and / or the air valve 57.

[0128] It should be noted that when the fluid used to rotate the spindle 37 during the operation of obtaining the reference position is a liquid, the description of the machining fluid supply system can be applied to that liquid supply system as long as there is no contradiction. Furthermore, when the fluid used to rotate the spindle 37 is a machining fluid, for example, the supply system used to supply machining fluid during machining can be used to supply machining fluid during the operation of obtaining the reference position. In other words, it is not necessary to provide a separate supply system and control valve 53 in addition to the machining fluid supply system.

[0129] The structure of control valve 53 is also unrestricted. Figure 4 For simplicity, only the symbol for a three-port, two-position switching valve is shown as control valve 53. However, control valve 53 can also be other types of valves. For example, control valve 53 can also be a valve capable of preventing the flow of both processing fluid and air. Control valve 53 can also function as a flow control valve or a pressure control valve. Control valve 53 can be opened and closed according to instructions from control unit 5.

[0130] It should be noted that the control valve 53, the fluid valve 55, and the air valve 57 can also be combined into a single valve. Furthermore, the control valve 53 can be omitted, and the fluid valve 55 and air valve 57 can be used to selectively supply the fluid and air to the nozzle 7. Conversely, the control valve 53 can also prevent the flow of both fluid and air, thus eliminating the need for the fluid valve 55 and air valve 57.

[0131] In this embodiment, the fluid supply unit 9 is described as part of the processing machine 1. In this case, the fluid supply unit 9 can be configured to appear as part of the processing machine 1, or it can be configured to not be part of the processing machine 1. For example, part or all of the fluid supply unit 9 can be integrated with... Figure 1 The mechanical body 3 shown is housed together in a frame (not shown), or it can be housed separately in another frame. Alternatively, part or all of the fluid supply unit 9 can be disposed within or on the base 21 of the mechanical body 3.

[0132] (Control Department)

[0133] Figure 4 The control unit 5 shown may be configured to include, for example, a computer. Although not specifically shown, a computer includes, for example, a CPU (Central Processing Unit), ROM (Read-Only Memory), RAM (Random Access Memory), and external storage devices. Figure 4 In this context, RAM and / or external storage devices are designated as storage unit 67. The CPU constructs various functional units (59, 61, 63, and 65) for control and other purposes by executing programs stored in ROM and / or external storage devices. It should be noted that the control unit 5 may also include logic circuits capable of performing only certain processing.

[0134] Control unit 5 is a conceptualized control unit for the overall control of the processing machine 1. Control unit 5 can be centralized in one location using a hardware architecture, or it can be distributed across multiple locations. For example, the control unit for controlling the main mechanical body 3 and the control unit for controlling the fluid supply unit 9 can be configured with different hardware structures. The two can be controlled synchronously or asynchronously. Synchronous control can be achieved by one party acting based on a signal from the other, or it can be achieved by setting up a higher-level control unit for both.

[0135] The control unit 5 includes functional units (59, 61, and 63) for controlling the main machine body 3, and a fluid control unit 65 for controlling the fluid supply unit 9. More specifically, the former includes a movement control unit 59 for controlling the relative movement of the spindle 37 and the machining platform 25 during machining, a rotation control unit 61 for controlling the rotation of the spindle 37 during machining, and a reference position acquisition unit 63 for controlling the action when acquiring a reference position. It should be noted that some of these various functional units may also be shared.

[0136] The motion control unit 59 controls the drive source used to drive the moving parts based on, for example, the detection values ​​of position sensors used to detect the position of the moving parts (25, 31, or 33) on each axis (e.g., the X-axis, Y-axis, or Z-axis). It should be noted that position sensors may not be provided on axes other than the axis associated with the first direction used to obtain the reference position (in the illustrated example, the Z-axis). Alternatively, for other axes, feedback control based on position sensors may not be performed; open-loop control is sufficient.

[0137] Figure 4 The example shown is an example of a three-axis structure in which the Z-axis motor 39 is controlled based on a Z-axis position sensor 69 used to sense the position of the Z-axis moving part 33 in the Z direction. The position of the Z-axis moving part 33 in the Z direction, as referred to here, is, for example, the position in the Z direction in an absolute coordinate system (or, in other words, a mechanical coordinate system), and more precisely, for example, the position in the Z direction relative to a component (e.g., the Y-axis moving part 31) that is intentionally set to be stationary in the Z direction.

[0138] The position sensor described above can be a position sensor that directly detects the position of the moving part (as illustrated in the example), or it can be a position sensor that detects the amount of motion of the drive source used to drive the moving part (e.g., the rotation of a rotary electric motor). Alternatively, feedback control based on the position sensor's detection value can be a fully closed-loop feedback control (as illustrated in the example) or a semi-closed-loop feedback control. The specific structure of the position sensor can be various, and can include, for example, a linear encoder (as illustrated in the example) or a laser rangefinder. The linear encoder can be optical or magnetic, and can be absolute or incremental.

[0139] The rotation control unit 61 controls the spindle motor 41 that drives the spindle 37 based on the detection value of the rotation sensor 71 used to detect the rotation (more specifically, the rotational speed) of the spindle 37. The rotation sensor 71 can be a rotation sensor that directly detects the rotation of the spindle 37, or it can be a rotation sensor used to detect the rotation of the spindle motor 41. Alternatively, the spindle 37 and the spindle motor 41 can share a portion of each other, thus eliminating the need for such differentiation. The specific structure of the rotation sensor 71 can be varied, and it can be, for example, an encoder or a rotation angle sensor. The encoder can be an optical or magnetic encoder, and it can be an absolute or incremental encoder.

[0140] The control performed by the motion control unit 59 and the rotation control unit 61 is based on, for example, an NC program D1 stored in the storage unit 67 (RAM and / or external storage device). The NC program D1, for example, is at least one of the following: the absolute coordinates (mechanical coordinates) of the target position, the relative coordinates of the target position, the target movement amount, and the target rotational speed, and specifies one or more values. Then, the motion control unit 59 and the rotation control unit 61 control the drive source (39 and 41, etc.) based on the detection values ​​of the position sensor (69, etc.) and the rotation sensor 71 to achieve the aforementioned target values.

[0141] The obtained reference position information D3 is stored in the storage unit 67 (RAM and / or external storage device). During control based on the aforementioned NC program D1, information D3 is appropriately utilized. The form in which it is utilized can be various.

[0142] For example, NC program D1 contains a program (or more than one block) that allows the spindle 37 (tool 101) to move in the Z-axis direction to a relative position (target position) set relative to a reference position. Thus, the reference position can be utilized.

[0143] The relative position with respect to a reference position, within one or more blocks, can be defined either based on the relative coordinates with respect to the reference position or based on the amount of movement from the reference position. Furthermore, the aforementioned movement of the relative position in the Z-axis direction may or may not be accompanied by movement on other axes.

[0144] In the above-described application method, the relationship between the movement based on the reference position and the machining content is not limited. For example, a groove of a predetermined depth can be formed by moving the cutting edge (tool 101) towards the -Z side from the reference position or from a position set closer to the +Z side than the reference position, towards the -Z side. In other words, the reference position can be used as a position that determines the cutting depth from the upper surface of the workpiece 103.

[0145] Alternatively, the reference position can be utilized in a manner different from the above, where no reference position is specified in the NC program. For example, the reference position can be utilized by first detecting the deviation between the actual position of the tool 101 and / or workpiece 103 and the position of the tool 101 and / or workpiece 103 as envisioned in the machine coordinate system, and then correcting the overall position specified in the NC program or detected by the position sensor. It should be noted that, as a result, this method of utilization can also move the spindle 37 to a relative position set relative to the reference position.

[0146] The reference position acquisition unit 63 controls the mechanical body 3 (more specifically, the Z-axis motor 39) and the fluid supply unit 9 to achieve the action of acquiring the reference position. Figure 4 The illustration of the arrow used to represent this control is omitted. When controlling the Z-axis motor 39, the reference position acquisition unit 63 can utilize the movement control unit 59, and when controlling the fluid supply unit 9, it can utilize the fluid control unit 65. Alternatively, the reference position acquisition unit 63 can share a portion of the movement control unit 59 and the fluid control unit 65.

[0147] The reference position acquisition unit 63 acquires the position of the spindle 37 in the Z-axis direction when the stop rotation of the spindle 37 is detected, and uses this position as the reference position. The sensor used to detect the position of the spindle 37 at this time is, for example, the Z-axis position sensor 69 used by the movement control unit 59 for feedback control. Therefore, the reference position and the relative position set to the reference position are specifically defined based on the detection value of the same sensor, thereby improving the machining accuracy.

[0148] Although not specifically shown in the diagram, the steps for obtaining the reference position, for example, differ from the steps during machining and are defined in a separate program different from the NC program. For example, this separate program is included in a program executed by the CPU to construct the reference position acquisition unit 63. The program for constructing the reference position acquisition unit 63 may be pre-stored in the storage unit 67 by the manufacturer of the machining machine 1, or it may be installed into the existing machining machine 1 by the operator. Unlike the above description, a portion of the steps for obtaining the reference position may also be defined in a program created in the same manner as the NC program.

[0149] The sensor used to detect when rotation stops can be the rotation sensor 71 used by the rotation control unit 61 for feedback control (as shown in the example), or it can be other sensors. In the former case, the structure is simpler, for example. In the latter case, for example, by providing a sensor that is more capable of detecting minute changes in the rotation angle than the rotation sensor 71, the stop of rotation can be detected with high precision. It should be noted that in the description of this embodiment, sometimes the former case is presented for ease of explanation.

[0150] The fluid control unit 65 controls the fluid supply unit 9, for example, by supplying processing fluid during processing and supplying air when a reference position is obtained. Specific controlled objects include, for example, the control valve 53, the processing fluid valve 55, the air valve 57, the processing fluid supply source 49 (e.g., a pump not shown), and the air supply source 51 (e.g., a pneumatic compressor not shown).

[0151] (Steps for obtaining the reference position)

[0152] For Figure 5 (a) Figure 5 (b) and Figure 6 The summary description is as described above.

[0153] The actions for obtaining the reference position shown in these figures can either begin when the operator performs a prescribed operation on an operating unit (not shown) of the machining machine 1, or they can be initiated automatically by the control unit 5 without the need for operator intervention. In the latter case, the control unit 5 automatically determines the timing for obtaining the reference position, for example, when a series of machining operations prescribed by the NC program begins, when a specific machining operation begins within the aforementioned series of machining operations, and when a sensor (not shown) used to sense the wear of the tool 101 detects that the wear amount has exceeded a predetermined threshold.

[0154] When obtaining the reference position, the control unit 5 controls the fluid supply unit 9 to blow air from the nozzle 7 relative to the tool 101. At this time, the control unit 5, for example, puts the spindle motor 41 in a no-torque state; that is, no power is supplied to the spindle motor 41. Thus, the spindle 37 rotates as shown by arrow a1. Furthermore, the control unit 5 controls the Z-axis motor 39, causing the spindle 37 to move towards the machining platform 25 as shown by arrow a2.

[0155] In the process of obtaining the reference position, the rotation and movement of the spindle 37 can begin simultaneously, or one can begin before the other. Furthermore, the action of ejecting air from the nozzle 7 can either continue ejecting air until the stop rotation of the spindle 37 is detected, or stop ejecting air before the stop rotation of the spindle 37 is detected. In the former case, for example, the spindle 37 can reliably rotate from the moment it contacts the workpiece 103 until it stops rotating. In the latter case, for example, the possibility of tool 101 and / or workpiece 103 deteriorating can be reduced by decreasing the rotational speed of the spindle 37 when it contacts the workpiece 103.

[0156] The spindle speed 37 when acquiring the reference position (or, from another perspective, the air pressure, etc.) simply needs to be set within a suitable range. For example, the speed at this time can be set much lower than the speed when the tool 101 is machining. Alternatively, the inertial torque of the spindle 37 and the tool 101, and / or the torque applied to the tool 101 by the air, can be set to be less than the torque during machining.

[0157] The specific rotational speed or torque used for machining or obtaining a reference position can be appropriately set according to the specific structure of the machine body 3 to which this embodiment applies, the type of tool 101, the type of workpiece 103, etc. For example, the rotational speed during machining (more specifically, when the tool 101 is about to contact or is in contact with the workpiece 103) is 2000 rpm or more, while the rotational speed during the action of obtaining a reference position (more specifically, when the tool 101 is about to contact the workpiece 103) is 100 rpm or less or 10 rpm or less. Alternatively, the rotational speed during the action of obtaining a reference position can be set to 1 / 10 or less or 1 / 100 or less of the rotational speed during machining.

[0158] It should be noted that the machining speed is set by the operator of the machining machine 1, for example. Alternatively, the machining speed is specified by the NC program. Therefore, when considering the machining machine 1 in the distribution stage, the relative relationship between the machining speed and the speed used to obtain the reference position can be disregarded as a constituent element of the machining machine 1. However, regarding the machining speed, if a lower limit that can be set by the operator is set within the machining machine 1, or if the manufacturer specifies a recommended lower limit in the product specifications, etc., it is sufficient to compare the speed used to obtain the reference position with the aforementioned lower limit to determine whether the relationship holds true. When referring to the machining speed specified by the NC program, if the speed specified in the NC program is not constant, it is sufficient to compare the minimum speed with the speed used to obtain the reference position.

[0159] The rotational speed used to obtain the reference position can be set by the manufacturer of the machining machine 1 or by the operator of the machining machine 1. Alternatively, the information regarding the rotational speed used to obtain the reference position can be pre-stored in the storage unit 67 or input to the control unit 5 through operation of an operating unit (not shown) on the machining machine 1. It should be noted that if the rotational speed used to obtain the reference position is set by the operator, when considering the machining machine 1 in the flow stage, the rotational speed used to obtain the reference position can be excluded as a component of the machining machine 1, and treated the same as the rotational speed used for machining.

[0160] Simply set the spindle speed 37, which is used to obtain the reference position, to an appropriate speed. This speed can be constant or variable (it can be adjusted). For example, in the latter case, the speed can be reduced when approaching the predicted position of the reference position. This predicted position can be preset by the NC program or input to the control unit 5 by the operator's operation on an operating unit (not shown). Furthermore, the speed at which the tool 101 contacts the workpiece 103 to obtain the reference position can be slower, the same, or faster than the speed at which the tool 101 contacts the workpiece 103 for machining. The speed can be set by the manufacturer of the machining machine 1 or by the operator of the machining machine 1. Alternatively, the speed information can be pre-stored in the storage unit 67 or input to the control unit 5 by the operator's operation on an operating unit (not shown) of the machining machine 1.

[0161] The control unit 5 only needs to control the Z-axis motor 39 to move the spindle 37 to a target position closer to the -Z side than the predicted position of the reference position. Then, the spindle 37 only needs to stop in the Z direction according to the force received from the workpiece 103. The control unit 5 only needs to control the Z-axis motor 39 to generate appropriate torque so that the force of the tool 101 pushing the workpiece 103 towards the -Z side becomes too large. Furthermore, the control unit 5 can also detect the deceleration or stopping of the spindle 37 in the Z direction based on the detection value of a suitable sensor, and stop the drive of the Z-axis motor 39 based on the sensing result. Examples of the aforementioned sensors include, for example, the Z-axis position sensor 69, a sensor for detecting the power supplied to the Z-axis motor 39, and a sensor for detecting that the spindle 37 has stopped rotating (e.g., a rotation sensor 71).

[0162] As described above, when the control unit 5 is performing the action of rotating the tool 101 using air from the nozzle 7 while simultaneously bringing the tool 101 closer to the workpiece 103, when the rotation sensor 71 (or other sensor) detects that the rotation has stopped, it stores the detection value of the Z-axis position sensor 69 at this time as a reference position in the storage unit 67.

[0163] It should be noted that, for ease of explanation, this is illustrated by the rotation sensor 71 detecting that rotation has stopped. Strictly speaking, for example, when the rotational speed (or, in other words, the rotational velocity) detected by the rotation sensor 71 is below a predetermined threshold, the control unit 5 determines that rotation has stopped. The threshold can be set by the manufacturer of the machining machine 1 or by the operator of the machining machine 1. Alternatively, the threshold information can be pre-stored in the storage unit 67 or input to the control unit 5 by the operator's operation of an unshown operating part of the machining machine 1.

[0164] It should be noted that, Figure 5 (a) and Figure 5 (b) Some of the actions shown can be performed manually or by an operator operating an unshown control part of the machining machine 1. Examples of such actions include, for instance, rotation of the spindle 37 and / or movement of the spindle 37 in the -Z direction.

[0165] In the above description, workpiece 103 is used as an example as the reference component that abuts against the tool 101 when obtaining the reference position. However, the reference component can also be other components that do not move relative to workpiece 103. For example, the reference component can be the machining platform 25 or the suction head 27, or it can be a dedicated component that is detachably fixed to the machining platform 25 or the suction head 27 for obtaining the reference position. However, the aforementioned dedicated component can also be a part of the machining platform 25 or the suction head 27. In the descriptions related to obtaining the reference position in this specification, the term "workpiece 103" can be replaced with the term "other reference component" as described above, provided that there is no contradiction.

[0166] (A summary of implementation methods)

[0167] As described above, the machining machine 1 includes: a spindle 37, a holding unit (machining platform 25), a drive unit (Z-axis motor 39), a position sensor (Z-axis position sensor 69), a rotation sensor 71, and a control unit 5. The spindle 37 is used to hold one of the tool 101 and the workpiece 103 (in the illustrated example, the tool 101). The holding unit (machining platform 25) is used to hold the other of the tool 101 and the workpiece 103 (in the illustrated example, the workpiece 103). The Z-axis motor 39 moves one of the spindle 37 and the machining platform 25, i.e., the movable part (spindle 37), in a predetermined first direction (Z direction). The Z-axis position sensor 69 is used to detect the position of the spindle 37 in the Z direction. The rotation sensor 71 is used to sense the rotation of the spindle 37. When the spindle 37 is rotating and the tool 101 is machining the workpiece 103, the control unit 5 controls the Z-axis motor 39 based on the detection value of the Z-axis position sensor 69, so that the spindle 37 moves in the Z direction toward a position set relative to a predetermined reference position. Furthermore, when the workpiece 103 or a component stationary relative to the workpiece 103 (e.g., the machining platform 25) is used as a reference component, the control unit 5, while the spindle 37 is rotating and moving in the Z direction, and the tool 101 is in contact with the reference component in the Z direction, obtains the position detected by the Z-axis position sensor 69 when the rotation sensor 71 detects that the spindle 37 has stopped rotating, and uses this position as the aforementioned reference position.

[0168] Furthermore, from another perspective, the method for manufacturing the workpiece in this embodiment uses the aforementioned processing machine 1 and uses the tool 101 to process the workpiece 103 to obtain the workpiece (e.g., the cut workpiece 103).

[0169] Therefore, for example, as described above, the tool 101 and the reference component (here, the workpiece 103) that comes into contact with the tool 101 may not be conductive. Furthermore, it is not necessary to replace the tool 101 with a conductive approximation tool.

[0170] The first direction (Z direction) used to obtain the aforementioned reference position can also be a direction that intersects (e.g., is orthogonal) the rotation axis of the spindle 37. Alternatively, as shown in the illustrated example, when tool 101 is a turning tool, obtaining the reference position simply requires contacting the outer periphery of the turning tool with the reference component (e.g., workpiece 103). Or, unlike the illustrated example, when tool 101 is a turning tool, obtaining the reference position simply requires contacting the outer periphery of the reference component (e.g., workpiece 103) against tool 101.

[0171] In this case, for example, although it varies depending on the structure of the turning tool (tool 101), compared to the form in which the front end of the turning tool contacts the workpiece 103 (which is also included in the technology of this invention), it is easier to stop the rotation of the turning tool by contacting the workpiece 103. The reasons for this can be cited as follows: the distance from the rotation axis of the turning tool to the contact position between the turning tool and the workpiece 103 is easier to increase, and / or the contact area between the outer periphery of the turning tool and the workpiece 103 is easier to increase.

[0172] The spindle 37, used to hold both the tool 101 and the workpiece 103, need only hold the tool 101. The holding part, used to hold both the tool 101 and the workpiece 103, need only be a machining platform (machining platform 25 and / or suction head 27) located further in the first direction (Z direction) than the spindle 37, and used to hold the workpiece 103. The tool 101 only needs to have a cutting edge 101a on its outer periphery. The reference position only needs to be the position where the cutting edge 101a abuts against the workpiece 103 or the machining platform (more specifically, the surface of the workpiece 103 or the machining platform on the other side (+Z side) in the Z direction).

[0173] In this case, for example, because a large distance (the radius of the cutting edge) can be ensured from the rotation axis CL of tool 101 to the point where tool 101 contacts workpiece 103, it is easier to stop the rotation of tool 101. As a result, the method for obtaining the reference position according to this embodiment can be easily applied. Furthermore, because the position where the cutting edge 101a abuts is used as the reference position, the cutting depth (groove depth) measured from the surface of workpiece 103 can be controlled with high precision. When the cutting edge 101a wears down, the accuracy of the cutting depth can be maintained simply by obtaining the reference position again.

[0174] The processing machine 1 may also include a fluid supply unit 9. Here, the tool 101 or workpiece 103 (in the illustrated example, the tool 101) held by the spindle 37 is referred to as the rotating object. In this case, the fluid supply unit 9 only needs to be able to make the spindle 37 rotate during the operation of obtaining a reference position by impacting the fluid onto at least one of the outer surface of the rotating object and the outer surface of the spindle 37 exposed to the outside.

[0175] In this case, for example, a different drive source than the drive source (spindle motor 41) used to drive the spindle 37 for machining can be used to rotate the spindle 37 to obtain a reference position. Therefore, for example, compared to the configuration where the spindle 37 is rotated using the spindle motor 41 to obtain a reference position (which is also included within the scope of this invention), it is not necessary to set the rotational speed for obtaining the reference position based on the performance of the spindle motor 41. Furthermore, for example, it is easier to reduce the rotational speed for obtaining the reference position.

[0176] The fluid supply unit 9 can achieve the rotation of the spindle 37 in the action of obtaining the reference position simply by having the fluid impact the outer surface of the rotating object (tool 101 or workpiece 103).

[0177] In this case, for example, compared to the configuration where fluid is only impacted onto the outer surface of the spindle 37 (which is also included within the technology of this invention), it is easier to use the device for supplying machining fluid relative to the tool 101 or workpiece 103 during machining as a device for obtaining a reference position. From another perspective, by utilizing the device for supplying machining fluid during machining in the configuration for obtaining a reference position, the structure of the device can be simplified. It should be noted that while the example given is a device for supplying machining fluid, other devices such as a device for supplying cleaning air can also be used to obtain a reference position.

[0178] Tool 101 can simply be a cutting edge with a cutting edge 101a on its outer periphery. The fluid supply unit 9 can simply rotate the spindle 37 during the operation of obtaining the reference position by impacting the fluid in the tangential direction of the cutting edge 101a relative to the cutting edge 101a.

[0179] In this case, for example, the aforementioned effect of easily utilizing the device for supplying the processing fluid to obtain a reference position can be achieved. Furthermore, because the fluid is impacted at a position a considerable distance from the rotation axis of the tool 101, the tool 101 can be easily rotated. As a result, for example, the burden on the fluid supply unit 9 when obtaining a reference position can be easily reduced.

[0180] The fluid supply unit 9 only needs to include: a nozzle 7, a processing fluid supply source 49 for supplying processing fluid to the nozzle 7, a gas supply source (air supply source 51) for supplying gas to the nozzle 7, and a valve (control valve 53) that selectively connects the processing fluid supply source 49 and the air supply source 51 to the nozzle 7. The fluid supply unit 9 only needs to supply gas (air) from the air supply source 51 to the nozzle 7 to achieve the rotation of the spindle 37 during the operation of obtaining the reference position.

[0181] In this case, for example, compared to the method of supplying processing fluid when obtaining a reference position (which is also included in the technology of the present invention), the consumption of processing fluid can be reduced. Furthermore, for example, if the processing fluid is not water and air is used instead of water, the cost incurred in obtaining the reference position can be more easily reduced. And, for example, compared to the method of supplying liquid to tool 101 (which is also included in the technology of the present invention), the force applied to tool 101 can be easily reduced.

[0182] The spindle speed of the spindle 37 when the tool 101 is about to contact the reference component (e.g., workpiece 103) during the operation of obtaining the reference position is lower than the spindle speed of the spindle 37 when the tool 101 is machining the workpiece 103.

[0183] In this case, for example, the possibility of tool 101 and / or reference components deteriorating during the acquisition of the reference position can be reduced. It should be noted that, as described above, the rotational speed used for machining is set by the operator; therefore, this feature may not be limited in the processing machine 1 used in the flow stage.

[0184] The spindle speed 37 when machining workpiece 103 can be set to 2000 rpm or higher. The spindle speed 37 when the tool 101 is about to contact the reference component (e.g., workpiece 103) during the operation of obtaining the reference position can be set to 100 rpm or lower. Furthermore, from another perspective, the spindle speed 37 when the tool 101 is about to contact the reference component during the operation of obtaining the reference position can be set to 1 / 100 or lower than the spindle speed 37 when machining workpiece 103.

[0185] In these cases, for example, the rotational speed during the action of obtaining the reference position is very low compared to the rotational speed used for machining. Therefore, the possibility that at least one of the two will deteriorate due to contact between the tool 101 and the reference component during the action of obtaining the reference position can be reduced.

[0186] Spindle 37 can also utilize air bearings ( Figure 3 The illustrated bearing 43) is used for support.

[0187] In this case, for example, compared to other types of bearings, the frictional force causing the spindle 37 to stop is smaller, and only a small torque is required to rotate the spindle 37. As a result, for example, when performing the action of obtaining a reference position, the torque applied to the spindle 37 from the outside and / or the inertial torque of the spindle 37 can be reduced. Furthermore, the torque applied by the tool 101 to the workpiece 103 when the tool 101 contacts the workpiece 103 can be reduced. As a result, the possibility of deterioration of the tool 101 and / or reference components caused by obtaining a reference position can be reduced.

[0188] It should be noted that in the above embodiments, the machining platform 25 is one example of a holding part used to hold the tool and the workpiece. The Z-direction is one example of a first direction. The spindle 37 is one example of a movable part. The Z-axis motor 39 is one example of a drive part. The Z-axis position sensor 69 is one example of a position sensor. The workpiece 103, the suction head 27, and the machining platform 25 are all examples of reference components. The air supply source 51 is one example of a gas supply source. The control valve 53 is one example of a valve. Air is one example of a gas and a fluid.

[0189] The technology of the present invention is not limited to the above-described embodiments, and can be implemented in various ways.

[0190] In the description of the implementation, the reference position is set as the position of the movable part (one of the spindle and the holding part) in the first direction (Z direction) of the absolute coordinate system. However, the reference position can also be set as the relative position of the movable part with respect to other components (the other of the spindle and the holding part) in the first direction. In this case, the position sensor used to detect the position of the movable part in the first direction can be any sensor used to detect the relative position of the movable part with other components, or it can be a combination of a sensor used to detect the absolute position of the movable part and a sensor used to detect the absolute position of other components.

[0191] Furthermore, for example, the fluid supply unit that supplies fluid relative to a rotating object (tool or workpiece) to obtain a reference position and the fluid supply unit that supplies the processing fluid can be set as two completely different units.

[0192] Explanation of reference numerals in the attached figures

[0193] 1: Machining machine, 3: Machine body, 5: Control unit, 7: Nozzle, 9: Fluid supply unit, 25: Machining platform (holding unit), 37: Spindle, 39: Z-axis motor (drive unit), 69: Z-axis position sensor (position sensor), 71: Rotation sensor, 101: Tool, 101a: Cutting blade, 103: Workpiece (reference component).

Claims

1. A processing machine, comprising: The spindle used to hold the tool and workpiece together; A holding part for holding the tool and the workpiece on the other side; A spindle motor for rotating the spindle; A drive unit for moving one of the main shaft and the retaining part, i.e., the movable part, in a predetermined first direction; A position sensor used to detect the position of the movable part in the first direction; A rotation sensor used to detect the rotation of the spindle; as well as The control unit, when the spindle motor rotates the spindle and the tool is used to process the workpiece, controls the drive unit based on the detection value of the position sensor, so that the movable part moves in the first direction to a relative position set relative to a predetermined reference position. When the workpiece or a component that does not move relative to the workpiece is used as a reference component, and the spindle is rotating while the movable part moves in the first direction and the tool contacts the reference component in the first direction, causing the spindle to stop rotating, when the rotation sensor detects that the spindle has stopped rotating, the control unit obtains the position detected by the position sensor as the reference position. The machining machine also has a fluid supply unit that, when the tool or workpiece held by the spindle is used as a rotating object, achieves the rotation of the spindle in the operation of obtaining the reference position by impinging fluid on at least one of the outer surface of the rotating object and the outer surface exposed outside the spindle.

2. The processing machine as described in claim 1, wherein, The first direction is the direction that intersects the rotation axis of the main shaft.

3. The processing machine as described in claim 2, wherein, The spindle is used to hold the tool. The holding part is located on a side closer to the spindle in the first direction, and is used to hold the workpiece on the machining platform. The tool is a blade with a cutting edge on its outer periphery. The reference position is the position where the cutting edge contacts the workpiece or the processing platform.

4. The processing machine as described in claim 1, wherein, The fluid supply unit achieves the rotation of the spindle in the action of obtaining the reference position by impinging the fluid on the outer surface of the rotating object.

5. The processing machine as described in claim 4, wherein, The tool is a blade with a cutting edge on its outer periphery. The fluid supply unit rotates the spindle during the operation of obtaining the reference position by impacting the fluid with the tangential direction of the cutting blade relative to the cutting blade.

6. The processing machine according to any one of claims 1 to 5, wherein, The fluid supply unit has: nozzle; A processing fluid supply source for supplying processing fluid to the nozzle; A gas supply source for supplying gas to the nozzle; as well as A valve for selectively connecting the processing fluid supply source and the gas supply source to the nozzle; The fluid supply unit supplies gas from the gas supply source as the fluid through the nozzle, thereby enabling the rotation of the main shaft during the operation of obtaining the reference position.

7. The processing machine according to any one of claims 1 to 5, wherein, During the action of obtaining the reference position, the spindle speed when the tool is about to contact the reference component is lower than the spindle speed when the tool is used to process the workpiece.

8. The processing machine as described in claim 7, wherein, The spindle rotates at a speed of 2000 rpm or higher when machining the workpiece. During the action of obtaining the reference position, the spindle speed is below 100 rpm when the tool is about to contact the reference component.

9. The processing machine as described in claim 7, wherein, During the operation of obtaining the reference position, the spindle speed when the tool is about to contact the reference component is less than 1 / 100 of the spindle speed when machining the workpiece.

10. The processing machine according to any one of claims 1 to 5, wherein, The main shaft is supported by air bearings.

11. A method for manufacturing a workpiece, comprising using a processing machine as described in any one of claims 1 to 10, and processing the workpiece using the tool to obtain the workpiece.

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