A laser synchronously controlled micro-nanostructure liquid phase printing forming method and device

Abstract

The present invention discloses a method and apparatus for laser-synchronized liquid-phase jet printing of micro-nanostructures. The method comprises: setting an initial processing horizontal plane; at least one jet nozzle ejecting an ink jet in a first direction; simultaneously, at least one laser radiating infrared laser light along an optical path in a second direction to form a first focal point; and at least one laser solidifying the ink jet based on the second focal point to form a three-dimensional structure supported by the processing horizontal plane. This invention improves upon traditional molding methods, mitigating the Marangoni effect and enhancing molding precision and speed.

Description

Technical Field

[0001] The present invention relates to the technical field of micro-nano structure liquid phase jet printing and forming, and in particular to a laser synchronously controlled micro-nano structure liquid phase jet printing and forming method and device thereof. Background Art

[0002] Micro-nano additive manufacturing is one of the important development directions of future manufacturing technology. The continuous improvement of product performance has put forward higher demands on additive manufacturing technology. Currently, commonly used additive manufacturing processes include selective laser sintering (SLS), stereolithography (SLA), digital light processing (DLP) and liquid printing, but they have defects in material selection, molding structure shape and size, and the need for sacrificial layer materials. For example, the surface of the structure prepared by SLS is rough and the processing time is long; SLA and DLP are suitable for solutions containing photosensitive materials and require sacrificial layers. Liquid printing technology has obvious advantages in material universality and multi-material printing capabilities, but this method has defects such as rapid three-dimensional prototyping of ink space and shape control: (1) Liquid printing technology usually requires long post-processing processes such as curing, cross-linking, and sintering after ink printing. The long-term curing behavior in this state is prone to ink flow and deformation, resulting in large errors between the printed structure and the design target. In particular, liquid printing is generally difficult to directly manufacture suspended structures without a supporting layer; (2) After the solution, especially the precursor solution containing micro-nanostructure materials, is printed onto the substrate, it forms a coffee ring due to the Marangoni effect, resulting in deterioration of the structure and performance. Real-time solidification and characterization of liquid-printed structures has always been a problem for academia and industry. Existing methods include external field-assisted printing technologies such as thermal assisted curing (heating table) and light assisted curing (ultraviolet light, blue light), but the effect still cannot meet the requirements. For example, heating table-assisted thermal curing generally has high temperature and strong heat radiation, low temperature and slow molding speed. In particular, when molding components with large size or volume, due to the limited heat conduction rate of the heating table, the degree of ink curing in the area away from the heating table is still limited, and the microstructure is still prone to collapse, coffee rings and other phenomena. Traditional inkjet printing and photocuring cure the structure after it is printed on the substrate. This method can reduce curing time and improve molding accuracy to a certain extent, but when processing large-scale lines, the core of the wire may not cure at a high level, resulting in reduced mechanical properties. When printing spatial structures as a whole, the structure is also prone to collapse. The residual photoinitiator also has potential biotoxicity, which restricts its effective application. However, these solutions still lack the ability to quickly cure in situ, especially when constructing more complex three-dimensional spatial structures or special-shaped structures without auxiliary support structures. Summary of the Invention

[0003] In view of this, the purpose of the present invention is to propose a laser synchronously controlled micro-nanostructure liquid phase printing forming method and device, which can solve at least one technical problem mentioned in the background technology.

[0004] According to one aspect of the present invention, a method for liquid-phase printing of micro-nano structures using laser synchronous control is provided, the method comprising:

[0005] Set the initial processing level;

[0006] At least one jet nozzle ejects an ink jet along a first direction; simultaneously, at least one laser radiates infrared laser light along an optical path in a second direction to form a first focus; wherein the first direction and the second direction are located in a first plane, and the first plane is perpendicular to the processing horizontal plane, and the two directions intersect to form a second focus, and the second focus is located below the first direction and the second direction; the distance between the first focus and the second focus is -200 mm to 200 mm; the laser spot radius r at the second focus and the ink jet diameter d at the second focus satisfy the following relationship: 2r>d; the ink used in the ink jet satisfies the following relationship: loss modulus G">storage modulus G';

[0007] At least one laser solidifies the ink jet according to the second focal position to form a three-dimensional structure with the processing horizontal plane as a support base.

[0008] In the above-mentioned technical solution, the inventors discovered that while conventional inkjet printing and light curing methods, which cure the structure after printing onto the substrate, can reduce curing time and improve molding accuracy to a certain extent, they can also lead to lower curing of the core portion of the droplet when processing large-scale lines. This is due to the shorter wavelength and weaker penetration of ultraviolet or blue light, which further leads to the Marangoni effect. Liquids move on the surface when a surface tension gradient exists. This gradient is typically caused by a non-uniform distribution of temperature or component concentration. In temperature gradients, high-temperature areas have low surface tension, while low-temperature areas have high surface tension, causing the liquid to flow from high-temperature areas to low-temperature areas. Furthermore, in the case of a component gradient, the liquid flows from low-concentration areas to high-concentration areas. When a liquid containing solute evaporates, the solute concentration is unevenly distributed on the droplet surface, forming a surface tension gradient. During the evaporation process, the solute evaporates faster at the edges and slower at the center. Due to the Marangoni effect of internal flow, the solute in the center continuously migrates to the edges and deposits, resulting in uneven film formation and the coffee ring effect.

[0009] To this end, the following improvements are made to this case:

[0010] (1) Replace traditional ultraviolet light or blue light with infrared light to improve the penetration ability of laser during processing, slow down the Marangoni effect, and improve the forming accuracy.

[0011] (2) Regulating the spatial relationship of the laser focus. The laser focal length can control the focusing degree of the light beam, thereby controlling the energy of the light beam acting on the liquid. The energy at the focus is the largest, and as the defocus distance increases, the laser energy gradually decreases. By adjusting the distance between the focus and the printing solution (first focus), the local effect from the microscale to the millimeter scale (20μm~10mm) can be controlled, achieving precise local temperature control of the solution and effectively suppressing the Marangoni effect. Furthermore, the transfer of laser energy is affected by controlling the laser power. By adjusting the power, the effect of the temperature field is directly affected, which affects the surface tension gradient. Increasing the power helps to quickly cure the solution, avoid changes in the liquid surface tension gradient, and effectively suppress the Marangoni effect. Different powers are required for different materials to determine the appropriate curing temperature field.

[0012] (3) The spot diameter determines the area of ​​laser irradiation on the printing liquid surface and is directly related to the range of influence. By adjusting the spot diameter, precise and localized surface temperature control can be achieved. A smaller spot diameter helps to achieve precise control at the microscale (20μm to 10mm) and improve the Marangoni effect. At the same time, by controlling the laser irradiation position (i.e., the first direction) during the printing process, the size of the printing jet can be effectively controlled.

[0013] (4) As inkjet printing ink, the above-mentioned material components need to meet the rheological requirements of inkjet printing, and the ink viscosity range is 1 to 10,000 Pa.s. When printing suspended or three-dimensional structures, it must comply with shear thinning behavior, that is, the ink's loss modulus G"> storage modulus G'.

[0014] In some embodiments, the jet nozzle ejects an ink jet in a first direction; simultaneously, the laser radiates infrared laser light in a second direction along an optical path to form a first focus, and the laser is used to solidify the ink jet to form a three-dimensional structure with the processing horizontal surface as a support base surface, further comprising:

[0015] When curing the ink jet, the processing horizontal plane is rotated and / or moved in any direction so that the structure after the ink is initially cured at the second focus is attached to the processing horizontal plane. By rotating and / or moving the processing horizontal plane, the subsequent ink curing path is adjusted.

[0016] In the above technical solution, the forming direction can be controlled by processing the horizontal surface, and micro-nano structures with different structures can be prepared according to the controlled path.

[0017] In some embodiments, the first direction is perpendicular to the processing horizontal plane;

[0018] The vertical distance M from the jet orifice to the processing horizontal plane, and the distance H from the jet orifice to the second focus respectively satisfy:

[0019] H≤Mr

[0020] H>2r.

[0021] In the aforementioned technical solution, the jet always remains perpendicular to the processing surface, and the relationship between the two is determined by adjusting the laser's incident angle. In this solution, the angle between the laser and the jet is defined based on the position of the laser impacting the jet: the position of the laser impacting the jet (i.e., the distance H from the jet orifice to the secondary focal point) must be greater than the diameter of the laser spot (H>2r) to prevent the laser from irradiating the needle tip and causing clogging of the needle tube.

[0022] In some embodiments, the method further comprises:

[0023] ① During suspended machining (2r<H<Mr), the angle between the first direction and the second direction is

[0024] θ is: 45°≤θ<90°;

[0025] ② During plane machining (when H=Mr), the angle θ between the first direction and the second direction is 90°.

[0026] In the above technical solution,

[0027] (1) When the laser is acting on the jet in the air (2r<H<Mr), the angle between the laser and the jet can be adjusted to 45°~90°. Among them, when the direction of movement is opposite to the direction of the laser, the laser can irradiate the jet. At this time, different angles affect the deformation of the light spot on the laser-acting jet and different energy distributions; when the direction of movement is the same as the direction of the laser, if the angle between the laser and the jet is 90°, the laser cannot directly irradiate the jet, so it is necessary to adjust the angle between the laser and the jet (45°≤θ<90°).

[0028] In this state, the angle between the laser and the jet can be approximated as:

[0029]

[0030] Furthermore, when the laser acts on an air jet (2r<H<Mr), its main function is to regulate the viscosity and jet pattern of the jet. By controlling the laser power range (0~10W) and different laser irradiation times (0~1s), the viscosity of the jet can be regulated and switched quickly (liquid phase-solid / liquid two-phase-solid phase: liquid viscosity changes from 1~10000Pa.s to solid). Through precise control of the laser power, the viscosity of the liquid phase jet can be regulated in situ. As the power increases, the action time is prolonged and the viscosity increases rapidly. In addition, the jet pattern can also be controlled by regulating the power and action time. Increasing the power can switch from continuous jet printing mode to droplet printing mode.

[0031] When lasers act on thermosetting materials, the phase change caused by thermal curing causes changes in viscosity, which can be controlled. When the solution contains volatile solvents, the laser action promotes the volatilization of the solution, which accelerates the volatilization when it acts on the air jet, causing the size to change, thereby controlling the size. When the solution viscosity is very low (1-1000 Pa.s), the laser exerts an optical field force on the jet. At this time, changing the laser power can change the jet pattern. Through the action of the optical field force, the continuous jet can be switched to droplets.

[0032] In addition, the rapid switching function of the laser galvanometer can achieve rapid switching of the control mode within <0.5s, and the jet and droplet can be controlled simultaneously.

[0033] (2) The laser acts on the jet position on the base (when H = Mr). At this time, the angle between the laser and the jet is 90°, ensuring that the laser is perpendicular to the jet, which is beneficial to suppressing the Marangoni effect on the substrate.

[0034] In some embodiments,

[0035] At least one jet nozzle ejects an ink jet along a first direction, specifically comprising:

[0036] A plurality of liquid supply devices are provided, each comprising a syringe and a syringe pump. The plurality of liquid supply devices respectively store a plurality of ink materials, and the syringe of at least one liquid supply device is controlled to spray along a first direction.

[0037] In the above technical solution, multiple material conversion during the processing is achieved by setting multiple syringes.

[0038] In some embodiments, at least one jet nozzle ejects an ink jet along a first direction, specifically comprising:

[0039] A liquid supply device is provided, which includes a syringe and a syringe pump. Multiple inks are mixed and sequentially added to the syringe to form layers. The syringe pump drives the syringe to spray in a first direction.

[0040] The mixed liquid obtained by mixing the multiple inks satisfies the following conditions: the viscosity ranges from 1 to 10,000 Pa.s, and the loss modulus G'> the storage modulus G'.

[0041] In the above technical solution, by forming multiple ink layers in one syringe, the conversion of multiple inks can be completed in one process.

[0042] In some embodiments, at least one laser radiates infrared laser light in a second direction along an optical path to form a first focus, specifically comprising:

[0043] A plurality of lasers are provided, wherein at least one laser radiates infrared laser light to the second focus along an optical path in a second direction, and the other lasers radiate laser light to the jet along the optical path.

[0044] In the above technical solution, the use of multiple lasers of the same wavelength can achieve a better control effect. Under single laser irradiation, there will be a blind area that cannot be irradiated due to the relationship between the needle and the motion platform, so the motion platform needs to avoid this problem through coordinate transformation and other methods. If multiple lasers of the same type are used, all-round irradiation of the jet can be achieved, which will lead to a better and more comprehensive control effect. As an optional example, lasers of different wavelengths can be arranged, and infrared wavelength lasers are used to control the jet, while another laser of a different wavelength, such as ultraviolet light, is arranged in the vertical direction of the jet. It can induce reactions in situ on the jet to generate sensitive structures such as graphene. Furthermore, multiple lasers can be split and do not need to irradiate the same position. For example, a laser can be set above and below the second focus. The upper laser is used to control the viscosity, size, and jet morphology, and the lower laser is used to control solidification. This state is suitable for the state where the laser-controlled jet has not formed a solid.

[0045] According to another aspect of the present invention, a laser synchronously controlled micro-nanostructure liquid phase printing forming device is provided, the device comprising:

[0046] Electric processing platform;

[0047] At least one liquid supply device, wherein the jet of at least one of the liquid supply devices converges to a first direction and is ejected along the first direction through a jet port;

[0048] At least one laser generator, the at least one laser generator radiating laser light to a second direction along a preset optical path of the laser generator, the at least one laser generator comprising at least one infrared laser generator;

[0049] The first direction and the second direction are located in a first plane, and the two directions intersect to form a second focus, which is located below the first direction and the second direction; the distance between the first focus and the second focus is -200 mm to 200 mm; the laser spot radius r at the second focus and the ink jet diameter d at the second focus satisfy the following relationship: 2r>d; the ink used in the ink jet satisfies: loss modulus G”>storage modulus G'.

[0050] In the above technical solution, (1) the traditional ultraviolet light or blue light is replaced with infrared light to improve the penetration ability of the laser during processing, slow down the Marangoni effect, and improve the molding accuracy. By regulating the spatial relationship of the laser focus, the laser focal length can control the focusing degree of the light beam, thereby controlling the energy of the light beam acting on the liquid. The energy at the focus is the largest, and as the defocus distance increases, the laser energy gradually decreases. By adjusting the distance between the focus and the printing solution (first focus), the local effect from microscale to millimeter scale (20μm~10mm) can be controlled to achieve precise local temperature control of the solution and effectively suppress the Marangoni effect. Furthermore, the transfer of laser energy is affected by controlling the laser power. By adjusting the power, the effect of the temperature field is directly affected, which affects the surface tension gradient. Increasing the power helps to quickly solidify the solution, avoid changes in the liquid surface tension gradient, and effectively suppress the Marangoni effect. Different powers are required for different materials to determine the appropriate curing temperature field. The spot diameter determines the irradiation area of ​​the laser on the printing liquid surface, which is directly related to the range of influence. Adjusting the spot diameter allows for precise, localized surface temperature control. A smaller spot diameter facilitates precise control at the microscale (20μm to 10mm), improving the Marangoni effect. Furthermore, controlling the laser irradiation position (i.e., the primary direction) during printing effectively controls the size of the printed jet.

[0051] (4) As inkjet printing ink, the above-mentioned material components need to meet the rheological requirements of inkjet printing, and the ink viscosity range is 1 to 10,000 Pa.s. When printing suspended or three-dimensional structures, it must comply with shear thinning behavior, that is, the ink's loss modulus G"> storage modulus G'.

[0052] In some embodiments, the apparatus further comprises:

[0053] The electric processing platform includes: a three-axis displacement platform and a rotating platform arranged on the three-axis displacement platform; the rotating platform serves as a processing horizontal surface.

[0054] In the above technical solution, the forming direction can be controlled by processing the horizontal surface, and micro-nano structures with different structures can be prepared according to the controlled path.

[0055] In some embodiments, each of the liquid supply devices further comprises at least one first rotating device; each of the laser generators further comprises: at least one shaping lens assembly, at least one focusing lens module, and at least one XYZ laser 3D galvanometer;

[0056] The liquid supply device is provided on the first rotating device, and the liquid supply device controls the first direction angle through the first three-axis movable platform;

[0057] The laser generator is equipped with a shaping lens group, a focusing lens module, and an XYZ laser 3D galvanometer in sequence along a preset optical path; wherein the shaping lens group is used to adjust the laser shape, the focusing lens module is used to focus the laser; and the XYZ laser 3D galvanometer is used to adjust the XYZ three-axis position and spot size of the laser.

[0058] In the above technical solution, the jet angle can be adjusted arbitrarily by installing a rotating device. The XYZ laser 3D galvanometer is used to adjust the laser's XYZ three-axis position and spot size, facilitating process path control during the processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0059] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0060] Figure 1 is a schematic diagram of a method flow chart of an embodiment of the present invention;

[0061] Figure 2 is a schematic diagram of the directions of the jet and the laser according to an embodiment of the present invention;

[0062] Figure 3 is a schematic diagram of the three-dimensional structure of an embodiment of the present invention;

[0063] Figure 4 It is a front structural schematic diagram of an embodiment of the present invention;

[0064] Figure 5 Schematic diagram of the preparation steps of one embodiment of the present invention;

[0065] Figure 6 This is a trajectory algorithm conversion process according to an embodiment of the present invention;

[0066] Figure 7 1 is a Fourier transform infrared spectrum of different powers according to an embodiment of the present invention;

[0067] Figure 8 Schematic diagram of the changes in characteristic absorption / exothermic peaks of thermal differential scanning at different powers according to one embodiment of the present invention;

[0068] Figure 9 Schematic diagram of the Marangoni effect and size effect of micro-nanostructures synchronously controlled by laser according to an embodiment of the present invention;

[0069] Figure 10 is a schematic diagram of a three-dimensional magnetically driven soft robot according to an embodiment of the present invention;

[0070] Figure 11 is a schematic diagram of a micro-channel printing mode according to an embodiment of the present invention;

[0071] Figure 12 Schematic diagram of a sacrificial layer-free microfluidic channel with different configurations according to an embodiment of the present invention;

[0072] Figure 13 Schematic diagram of a sacrificial microchannel structure with different configurations according to an embodiment of the present invention;

[0073] Figure 14 It is a schematic diagram of the collapse of an unsupported suspended structure in a space without infrared laser-assisted in-situ curing according to an embodiment of the present invention. DETAILED DESCRIPTION

[0074] The present invention will be described in further detail below with reference to the accompanying drawings and examples. It is particularly noted that the following examples are intended only to illustrate the present invention and are not intended to limit the scope of the present invention. Similarly, the following examples are only some embodiments of the present invention and are not intended to be exhaustive. All other embodiments obtained by those of ordinary skill in the art without creative effort are intended to fall within the scope of protection of the present invention.

[0075] The present invention provides a laser synchronously controlled micro-nanostructure liquid phase jet printing forming method and device thereof, which can solve at least one technical problem mentioned in the background technology.

[0076] Example 1

[0077] See also Figure 1 、 Figure 2 A method for forming micro-nanostructure liquid phase printing by laser synchronous control, the method comprising:

[0078] S1. Set the initial processing level;

[0079] S2, at least one jet nozzle ejects an ink jet along a first direction A; at the same time, at least one laser radiates infrared laser light along an optical path in a second direction B to form a first focus;

[0080] In which, the first direction A and the second direction B are located in a first plane, and the first plane is perpendicular to the processing horizontal plane. The two directions intersect to form a second focus, and the second focus is located below the first direction A and the second direction B; the straight-line distance between the first focus and the second focus is -200 mm to -200 mm; the laser spot radius r at the second focus and the ink jet diameter d at the second focus satisfy the following relationship: 2r>d; the ink used for the ink jet satisfies: loss modulus G”>storage modulus G'.

[0081] In this embodiment, the diameter of the jet nozzle (needle tube diameter) ranges from 20 μm to 10 mm, the laser spot diameter ranges from 20 μm to 10 mm, the upper and lower limits of the defocus amount are ± 200 mm, the range from the needle tube outlet to the focus is 0 to 200 mm, and the laser energy range is (0 to 30 W / cm 2 ), controllable temperature range: 25℃~300℃.

[0082] In this example, as an optional embodiment, the ink comprises the following components: thermosetting materials such as polydimethylsiloxane (10:1-5:1), TPU, thermosetting resin (2:1-1:1), ECOFLEX (5:1-3:1), and DragonSki n (5:1-3:1). Other modifiers may also be included, such as fumed silica (thixotropic agent, 0%-5%) and conductive fillers (carbon nanotubes, carbon black, silver nanoparticles, etc., 0%-5%). The essential components are primarily thermosetting materials, including polydimethylsiloxane, TPU, thermosetting resin, ECOFLEX, and DragonSki n. Thermosetting materials gradually cure under heat. Therefore, the laser's action on the thermosetting material triggers a photothermal effect, causing the temperature to rise and harden the material. Polydimethylsiloxane is currently the most commonly used of these materials. The remaining materials are supplementary functional fillers. As inkjet printing inks, the aforementioned material components only need to meet the rheological requirements for inkjet printing, with an ink viscosity range of 1 to 10,000 Pa.s. When printing suspended or three-dimensional structures, the ink must exhibit shear-thinning behavior, meaning the ink's loss modulus (G") must be greater than its storage modulus (G').

[0083] In this embodiment, an optical path radiates infrared laser light in a second direction B to form a first focal point. The laser is used to solidify the ink jet to form a three-dimensional structure with the processing horizontal plane as a support base. The process also includes rotating the processing horizontal plane and / or moving the processing horizontal plane in any direction during the ink jet solidification process so that the structure initially solidified at the second focal point adheres to the processing horizontal plane. The subsequent ink solidification path is adjusted by rotating and / or moving the processing horizontal plane. The processing horizontal plane can be used to control the molding direction, and micro-nanostructures with different structures can be prepared based on the controlled path.

[0084] In this embodiment, the first direction A is perpendicular to the processing horizontal plane;

[0085] The vertical distance M from the jet orifice to the processing horizontal plane, and the distance H from the jet orifice to the second focus respectively satisfy: H ≤ Mr, H > 2r. The jet always remains vertically fixed to the processing plane, and the relationship between the two is determined by adjusting the incident angle of the laser. In this scheme, the angle between the laser and the jet is defined according to the position of the laser acting on the jet: the position of the laser acting on the jet (i.e., the distance H from the jet orifice to the second focus) must be greater than the diameter of the light spot (H > 2r) to prevent the laser from irradiating the needle tip and causing the needle tube to be blocked.

[0086] S3. At least one laser solidifies the ink jet according to the second focal position to form a three-dimensional structure with the processing horizontal plane as the support base.

[0087] In this embodiment, the inventors discovered that while conventional inkjet printing and light curing methods, which cure the structure after printing onto the substrate, can reduce curing time and improve molding accuracy to a certain extent, they can also lead to lower curing of the core portion of the droplet when processing large-scale lines. This is due to the shorter wavelength and weaker penetration of ultraviolet or blue light, which further contributes to the Marangoni effect. Liquids move on their surfaces when a surface tension gradient exists. This gradient is typically caused by uneven distribution of temperature or component concentration. In temperature gradients, high-temperature regions have lower surface tension, while low-temperature regions have higher surface tension, leading to liquid flow from high-temperature to low-temperature regions. In component gradients, liquids flow from low-concentration regions to high-concentration regions. When a liquid containing solute evaporates, the solute concentration at the droplet surface is unevenly distributed, forming a surface tension gradient. During the evaporation process, the solute evaporates faster at the edges and slower at the center. Due to the Marangoni effect, solutes in the center continuously migrate to the edges and deposit, resulting in uneven film formation and the coffee ring effect.

[0088] In this embodiment, the method further includes:

[0089] ① During suspended machining (2r<H<Mr), the angle θ between the first direction A and the second direction B is: 45°≤θ<90°;

[0090] ② When machining the plane (H=Mr), the angle θ between the first direction A and the second direction B is 90°.

[0091] See also Figure 2 The above configuration has the following beneficial effects:

[0092] (1) When the laser is acting on the jet in the air (2r<H<Mr), the angle between the laser and the jet can be adjusted to 45°~90°. Among them, when the direction of movement is opposite to the direction of the laser, the laser can irradiate the jet. At this time, different angles affect the deformation of the light spot on the laser-acting jet and different energy distributions; when the direction of movement is the same as the direction of the laser, if the angle between the laser and the jet is 90°, the laser cannot directly irradiate the jet, so it is necessary to adjust the angle between the laser and the jet (45°≤θ<90°).

[0093] Furthermore, when the laser acts on an air jet (2r<H<Mr), its main function is to regulate the viscosity and jet pattern of the jet. By controlling the laser power range (0~10W) and different laser irradiation times (0~1s), the viscosity of the jet can be regulated and switched quickly (liquid phase-solid / liquid two-phase-solid phase: liquid viscosity changes from 1~10000Pa.s to solid). Through precise control of the laser power, the viscosity of the liquid phase jet can be regulated in situ. As the power increases, the action time is prolonged and the viscosity increases rapidly. In addition, the jet pattern can also be controlled by regulating the power and action time. Increasing the power can switch from continuous jet printing mode to droplet printing mode.

[0094] Furthermore, when the laser acts on thermosetting materials, the phase change caused by thermal curing will cause a change in viscosity, thereby regulating the viscosity; when the solution contains a volatile solvent, the laser action will promote the volatilization of the solution, and when it acts on the jet in the air, it will accelerate the volatilization, thereby causing the size to change, thereby regulating the size. When the viscosity of the solution is very low (1 to 1000 Pa.s), the laser has an optical field force on the jet. At this time, changing the laser power can change the jet pattern. Through the action of the optical field force, the continuous jet can be switched to droplets. In addition, the rapid switching function of the laser galvanometer can achieve rapid switching of the control mode within <0.5s, and the jet and droplets can be controlled simultaneously. By regulating the spatial relationship of the laser focus, the laser focal length can control the focusing degree of the light beam, thereby controlling the energy of the light beam acting on the liquid. The energy is the highest at the focus, and the laser energy gradually decreases as the defocus distance increases. By adjusting the distance between the focus and the printing solution (first focus), the local effect from the microscale to the millimeter scale (20μm ~ 10mm) can be controlled, and precise local temperature control of the solution can be achieved, effectively suppressing the Marangoni effect. Furthermore, the transfer of laser energy is affected by controlling the laser power. By adjusting the power, the effect of the temperature field is directly affected, which affects the surface tension gradient. Increasing the power helps to quickly solidify the solution, avoid changes in the liquid surface tension gradient, and effectively suppress the Marangoni effect. Different powers are required for different materials to determine the appropriate curing temperature field.

[0095] (2) The laser acts on the jet position on the processing horizontal plane (when H = Mr). At this time, the angle between the laser and the jet is 90°, ensuring that the laser is perpendicular to the jet, which is beneficial to suppressing the Marangoni effect during processing on the processing plane.

[0096] In this embodiment, at least one jet nozzle ejects an ink jet along a first direction A, specifically including: providing multiple liquid supply devices, the liquid supply devices including syringes and syringe pumps, the multiple liquid supply devices respectively storing multiple ink materials, and controlling the syringe of at least one liquid supply device to eject along a first direction A. By setting multiple syringes, multiple material conversion in the processing process is achieved. The conditions to be met when multiple different materials are ejected from different syringes and mixed include: (1) material compatibility. When different materials are mixed, a certain compatibility is required to ensure that they do not repel each other during mixing; (2) fluidity: the materials need to have a certain fluidity (viscosity, density, etc.) to ensure that they can be mixed quickly and without stratification; (3) printing conditions: when printing, it is necessary to ensure that the flow rates of the jets generated by different needles are close to ensure uniform mixing and sufficient mixing. In this solution, the replacement method of multiple liquid supply devices can be adopted by fixing the syringes containing different materials to the same moving table with a turntable, and driving the turntable to move by rotating the motor to achieve the replacement of different materials, while driving the syringe pump to form a jet.

[0097] In this embodiment, as an optional embodiment, at least one jet nozzle ejects an ink jet along a first direction A, specifically including: providing a liquid supply device, the liquid supply device including a syringe and a syringe pump, mixing multiple inks and adding them into the syringe in sequence to form layers, and the syringe pump drives the syringe to eject along a first direction A; wherein, the mixed liquid after the multiple inks are mixed meets: a viscosity range of 1 to 10,000 Pa.s, loss modulus G">storage modulus G'. By forming multiple ink layers in a syringe, the conversion of multiple inks can be completed in one processing.

[0098] It should be noted that the liquid supply device is a conventional mechanical device. Generally, the liquid supply device consists of two parts: a syringe and a syringe pump. Those skilled in the art can select a suitable liquid supply device according to actual needs. The specific principles and specific schematic diagrams will not be described in detail here.

[0099] In this embodiment, at least one laser radiates infrared laser along the optical path in a second direction B to form a first focus, specifically including: providing multiple lasers, at least one laser radiates infrared laser along the optical path in a second direction to the second focus, and the other lasers radiate laser along the optical path direction to the jet. Using multiple lasers of the same wavelength can make the control effect better. Under single laser irradiation, due to the relationship between the needle and the motion platform, there will be a blind area that cannot be irradiated, so the motion platform needs to avoid this problem through coordinate transformation and other methods. If multiple lasers of the same type are used, all-round irradiation of the jet can be achieved, which will lead to better and more comprehensive control effects. As an optional example, lasers of different wavelengths can be arranged, and infrared wavelength lasers are used to control the jet, while another laser of a different wavelength, such as ultraviolet light, is arranged in the vertical direction of the jet. In situ reactions can be induced on the jet to generate sensitive structures such as graphene. Furthermore, multiple lasers can be split and do not need to irradiate the same position. For example, a laser can be set above and below the second focus. The upper laser is used to control the viscosity, size, and jet morphology, and the lower laser is used to control solidification. This state is suitable for the state where the laser-controlled jet has not formed a solid.

[0100] Example 2

[0101] See also Figure 3 、 Figure 4 This embodiment will start from the principle, device, and method. Specifically:

[0102] (1) Concept of Marangoni Effect

[0103] When there is a gradient in the surface tension of a liquid, the liquid will move on the surface. This gradient is usually caused by a non-uniform distribution of temperature or component concentration. Under a temperature gradient, the surface tension of the liquid in the high-temperature area is low, and the surface tension in the low-temperature area is high, causing the liquid to flow from the high-temperature area to the low-temperature area; secondly, in the case of a component gradient, the liquid flows from the low-concentration area to the high-concentration area.

[0104] When a liquid containing solute evaporates, the concentration of the solute on the surface of the droplet becomes unevenly distributed, forming a surface tension gradient. During the evaporation process, the edge evaporates quickly and the center evaporates slowly. Due to the Marangoni effect of internal flow, the central solute continuously migrates to the edge and deposits, resulting in uneven film formation and the formation of a coffee ring effect.

[0105] (2) Marangoni effect suppression

[0106] The inventors discovered that the photothermal effect of laser (local, adjustable, rapid) can quickly change the surface tension distribution and viscosity change (solidification) of the solution. The following advantages can be achieved when the laser is applied:

[0107] Precisely control the temperature distribution of the liquid on a microscale to promote rapid solidification: Control the convection movement of the liquid through temperature distribution to improve the Marangoni effect;

[0108] Dynamically adjust the surface tension gradient: The adjustability of laser parameters dynamically adjusts the surface tension of the liquid, allowing the liquid to solidify quickly, restricting the movement of the liquid on the surface, maintaining uniform solute distribution, and inhibiting the formation of coffee rings;

[0109] Controllable size effect: By adjusting the laser irradiation position, the size of the cured line can be adjusted, and the cured size can be customized as needed;

[0110] (3) Device part

[0111] See also Figure 3 , Figure 3 This device is a laser-controlled, synchronized liquid-phase jet printing device for micro-nanostructure formation. It comprises a laser generator 1, a reflector assembly 2, a support platform 3, a shaping lens assembly 4, a focusing lens module 5, a three-axis mobile platform 6, a syringe 7, a printing needle 8, a support platform base 9, an XYZ three-axis mobile platform 10, a rotating platform 11, a printing jet 12, a high-voltage power supply 13, and an XYZ laser 3D galvanometer 14. The laser is generated by the generator 1. The reflector assembly 2 allows for arbitrary change of the laser's direction. The shaping lens assembly 4 allows for the modification of the laser's shape, from a traditional Gaussian distribution to a flat-top Gaussian distribution to improve laser energy distribution. The focusing lens assembly 5 allows for the adjustment of the laser's focal distance. The syringe 8 and printing needle 7 are hermetically connected, and the three-axis mobile platform 6 allows for arbitrary adjustment of the jet's angle. A control program controls the movement and stationary motion of the mobile platform 10 and the rotating platform 11, as well as the activation and deactivation of the pressure controller. The high voltage power supply 13 is used to generate an electric field-induced jet by applying voltage to the needle 7, which is conducive to the formation of smaller micro-nano structures. The XYZ laser 3D galvanometer 14 is used to adjust the XYZ three-axis position and spot size of the laser.

[0112] (3) Methods

[0113] The steps for preparing flexible three-dimensional micro-nanostructures assisted by infrared laser in situ are as follows: Figure 5 shown

[0114] Step 1: Printing model construction: Create a three-dimensional model of the flexible material and obtain the initial model G code [x n ,y n ,z n ]( Figure 6 A)

[0115] Step 2: Trajectory algorithm conversion: Use motion control equation algorithm conversion to convert the initial model G code [x n ,y n ,zn ] is converted into trajectory motion code suitable for infrared laser in-situ assisted three-dimensional space micro-nanostructure printing platform[X n ,Y n ,Z n ,θ n ], the specific steps include:

[0116] (1) Upload the initial model code [x n ,y n ,z n ];( Figure 6 B)

[0117] (2) Figure 6 C. Divide the printing trajectory into n straight line segments, where point O is defined as the center of the rotating platform, point P is the positive projection of the needle on the rotating platform, dS is the straight line segment tangent to the printing trajectory at the instant, and the instantaneous velocity of the segment is v p ,Therefore, when the trajectory is printed, the following relationship exists:

[0118] dS=v p dt (1)

[0119] (3) At this time, the instantaneous curvature κ of the printed trajectory on the xy plane xy It can be defined as:

[0120]

[0121] Among them, θ represents the current angle of the rotating platform. Therefore, in order to rotate at a speed v p Print curvature κ xy The rotating platform needs to rotate at the same speed:

[0122]

[0123] (4) Finally, as the turntable rotates, the projection point P of the printing needle on the platform also moves. Define r as the connection vector between the rotation center point O of the turntable and point P. Then the motion trajectory of the xyz three-axis motion platform is controlled by the following motion equation: xyz To perform translational motion:

[0124]

[0125] in, Represents the unit vector of the rotating stage along the rotation axis

[0126] By solving the equations of motion (3) and (4), any configuration of the three-dimensional model can be generated by the G code command [x n ,y n ,z n] is converted into a new four-dimensional command suitable for infrared laser in-situ assisted three-dimensional space micro-nanostructure printing platform [X n ,Y n ,Z n ,θ n ].

[0127] Step 3: Preparation of flexible printing ink, which may include the following thermosetting flexible materials: polydimethylsiloxane (10:1-5:1), TPU, thermosetting resin (2:1-1:1), ECOFLEX (5:1-3:1), Dragon Skin (5:1-3:1) and other thermosetting materials, and may also include other modifiers: such as fumed silica (thixotropic agent, 0%-5%), conductive fillers (carbon nanotubes, carbon black, silver nanoparticles, etc., 0%-5%)

[0128] The preparation process is as follows:

[0129] (1) Weighing a flexible material in proportion, mixing the flexible material with a thixotropic agent (if necessary) and a conductive filler (if necessary), and stirring at room temperature for 2 to 5 hours to obtain a uniform prepolymer;

[0130] (2) placing the ink in the extrusion syringe of a near-infrared light-assisted direct writing 3D printer, centrifuging to remove bubbles, and connecting the syringe to a pressure controller after degassing, using the pressure controller to push gas to achieve ink printing;

[0131] Step 4: Laser parameter adjustment:

[0132] (1) First, determine the required focusing distance of the laser according to the size of the printed component, select the appropriate focusing module, and determine the spot diameter.

[0133] (2) Adjust the relative position of the needle and the laser spot on the printing platform to ensure that the spot irradiation point (second focal point diameter 2r) covers the jet diameter d of the printing ink extrusion position (2r>d);

[0134] (3) Connect the positive electrode of the power supply to the needle position as needed, connect the negative electrode of the power supply to the motion platform, and adjust the voltage (0kV to 30kV) according to the size of the required printing jet;

[0135] (4) Adjust the laser rapid curing parameters: laser power (wavelength 1064nm, power range 0-30W), frequency (0-100Hz) and needle diameter (0.05-4mm), platform movement / rotation speed (0mm / s-50mm / s) and air pressure parameters (0-10bar) to achieve rapid curing printing of 3D microstructures and suppress the Marangoni effect;

[0136] Step 5: During laser-assisted in-situ curing printing, the infrared laser spot and the needle remain stationary, and infrared laser-assisted direct writing 3D printing is performed according to the conversion code in step 2 to print three-dimensional space / special-shaped structural parts in situ;

[0137] Step 6: Perform corresponding post-processing on the corresponding embodiments. The magnetically driven soft robot can be magnetized to obtain diverse motion modes; the microfluidic chip can undergo corresponding structural testing to verify its performance.

[0138] Based on the above technical methods and devices, this embodiment completes the following tests:

[0139] The ink is composed of the following components by weight: 10 parts of polydimethylsiloxane component A, 1 part of component B, 0.1 parts of multi-walled carbon nanotubes, and 1.46 parts of silicon dioxide.

[0140] (1) mixing the polydimethylsiloxane component A, multi-walled carbon nanotubes and silicon dioxide, stirring for 2 hours under a stirrer, then adding the polydimethylsiloxane component B, stirring for 30 minutes under a stirrer to obtain a prepolymer printing ink;

[0141] (2) The ink was injected into the barrel of the printer, and the barrel was centrifuged at 6000 rpm for 30 minutes to remove bubbles; the ink was extruded by gas, and the extrusion pressure was controlled to 8 bar. The ink was extruded through a 0.06 mm direct writing nozzle, and the movement speed of the extrusion nozzle was 1.25 mm / s. The laser emission wavelength was 1064 nm, the power was 0-4.5 W, and the frequency was 80 Hz;

[0142] (3) Controlling the laser power can obtain lines with different curing degrees, and measuring the characteristic absorption peak changes by Fourier transform infrared spectroscopy ( Figure 7 ), when the power reaches 3.0-4.5W, the characteristic peak of the line is close to that of the heated cured sample, proving that the composition of the sample does not change significantly after in-situ assisted curing with infrared laser.

[0143] (4) Determination of characteristic absorption / exothermic peak changes by thermal differential scanning calorimetry ( Figure 8 ), when the power reaches 3.0-6.0W, the characteristic peak of the line is close to that of the heated cured sample, proving that the penetration of infrared laser can achieve in-situ uniform curing;

[0144] (5) Through real-time control of the laser curing area, effective control of the Marangoni effect and size control for printing lines of different sizes can be achieved. Figure 9 )

[0145] Application Example 1: 3D magnetically driven soft robot

[0146] The ink consists of the following components by weight: 10 parts of polydimethylsiloxane component A, 1 part of component B, 16.5 parts of magnetic particles NdFeB (5 μm), and 1.46 parts of silicon dioxide.

[0147] (1) Component A of polydimethylsiloxane, NdFeB and silicon dioxide were mixed and stirred for 2 hours under a stirrer, and then component B of polydimethylsiloxane was added and stirred for 30 minutes under a stirrer to obtain a prepolymer printing ink.

[0148] (2) The ink was injected into the barrel of the printer, and the barrel was centrifuged at 6000 rpm for 30 minutes to remove bubbles. The extrusion was driven by gas, and the extrusion pressure was controlled to be 5 bar. The ink was extruded through a 0.5 mm direct writing nozzle. The movement speed of the extrusion nozzle was 1.0 mm / s. The laser emitted a light beam with a wavelength of 1064 nm, a laser power of 7.5 W, and a frequency of 80 Hz.

[0149] (3) The printing parameters are adjusted according to the structural design requirements, and the designed three-dimensional spring and butterfly structures are printed using a computer program. The printing process is assisted by infrared laser, and the high penetrability and controllability of infrared laser are used to promote the rapid in-situ curing of ink. After infrared laser-assisted curing, three-dimensional springs, butterflies and other spatial components are obtained.

[0150] (4) The formed space soft spring and butterfly robot components are magnetized by origami method to obtain a three-dimensional magnetically driven soft robot that can produce different morphological changes under the action of a magnetic field ( Figure 10 ).

[0151] Application Example 2: Microfluidic Chip without Sacrificial Layer

[0152] The ink is composed of the following components by weight: 10 parts of component A of polydimethylsiloxane, 1 part of component B, and 1.46 parts of silicon dioxide.

[0153] (1) The polydimethylsiloxane component A is mixed with silicon dioxide and stirred for 2 hours under a stirrer, and then the polydimethylsiloxane component B is added and stirred for 30 minutes under a stirrer to obtain a prepolymer printing ink.

[0154] (2) The ink was injected into the barrel of the printer, and the barrel was centrifuged at 6000 rpm for 30 minutes to remove bubbles. The extrusion was driven by gas, and the extrusion pressure was controlled to be 6 bar. The ink was extruded through a 0.3 mm direct writing nozzle. The movement speed of the extrusion nozzle was 1.0 mm / s. The laser emitted a light beam with a wavelength of 1064 nm, a power of 15 W, and a frequency of 80 Hz.

[0155] (3) Adjust the printing parameters according to the structural design requirements, and use the computer program to control the printing of the designed microfluidic structure. The printing process is assisted by infrared laser. The high penetration and controllability of infrared laser promote the rapid in-situ curing of ink. Unsupported overhang printing can be achieved on the microfluidic structure layer, eliminating the need for sacrificial layers and the problem of incomplete removal of sacrificial layers in the traditional microfluidic chip manufacturing process. After infrared laser assisted in-situ curing, printing can be carried out in two different modes ( Figure 11 ): Mode 1: By printing high-viscosity ink, a flow channel can be formed in the middle of the printed line. By controlling the shape of the printed line, flow channels of different sizes and shapes can be formed; Mode 2: By printing low-viscosity ink, real-time curing can be achieved to form flow channels in the middle of different lines. By controlling the motion program, a variety of different flow channel designs can be achieved ( Figure 12 ), including circular flow channels, rectangular flow channels, 2D single-layer flow channels, 3D multi-layer flow channels, as well as microfluidic chip components such as valves, switches, microfluidic sensors, etc.

[0156] (4) The formed microfluidic chip structure was tested to verify that the formed component had a good flow channel structure ( Figure 13 )

[0157] Comparative Example 1

[0158] Extensive experiments have demonstrated that only by rationally controlling printing parameters (needle diameter, speed, and air pressure) and laser parameters (power and frequency) can rapid in-situ curing printing of multi-scale, unsupported spatial and shaped structures be achieved. In this embodiment, the process parameters range as follows: needle diameter 0-10 mm; motion speed 0-2 mm / s; air pressure 0-10 bar; power density 0-25 W / cm²; exposure time 0-0.5 s; and frequency 80 Hz.

[0159] By way of illustration, Example 1:

[0160] The ink is composed of the following components by weight: 10 parts of component A of polydimethylsiloxane, 1 part of component B, and 1.46 parts of silicon dioxide.

[0161] (1) The polydimethylsiloxane component A is mixed with silicon dioxide and stirred for 2 hours under a stirrer, and then the polydimethylsiloxane component B is added and stirred for 30 minutes under a stirrer to obtain a prepolymer printing ink.

[0162] (2) The ink was injected into the barrel of the printer, and the barrel was centrifuged at 6000 rpm for 30 minutes to remove bubbles. The extrusion was driven by gas, and the extrusion pressure was controlled to be 6 bar. The ink was extruded through a 0.3 mm direct writing nozzle, and the movement speed of the extrusion nozzle was 1.0 mm / s. The laser emitted a light beam with a wavelength of 1064 nm, a laser power of 0 W, and a frequency of 0 Hz.

[0163] (3) Adjust the printing parameters according to the structural design requirements, and use the computer program to control the printing of the designed unsupported suspended structure. Figure 14 It can be seen that without infrared laser-assisted in-situ curing, the unsupported suspended structure in space collapsed and printing failed.

[0164] The above descriptions are only some embodiments of the present invention and do not limit the scope of protection of the present invention. Any equivalent device or equivalent process transformation made by using the contents of the description and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A laser synchronously controlled micro-nanostructure liquid phase printing forming method, characterized in that: The method comprises: Set the initial processing level; At least one jet nozzle ejects an ink jet along a first direction; at the same time, at least one laser radiates infrared laser light along an optical path toward a second direction to form a first focus; The first direction and the second direction are located in a first plane, and the first plane is perpendicular to the processing horizontal plane. The two directions intersect to form a second focus, and the second focus is located below the first direction and the second direction. The straight-line distance between the first focus and the second focus is -200 mm to 200 mm. The laser spot radius r at the second focus and the ink jet diameter d at the second focus satisfy the following relationship: 2r>d. The ink used in the ink jet satisfies the following relationship: loss modulus G''>storage modulus G'. At least one laser solidifies the ink jet according to the second focal position to form a three-dimensional structure with the processing horizontal surface as a support base surface; The vertical distance M from the jet orifice to the processing horizontal plane, and the distance H from the jet orifice to the second focus respectively satisfy: H≤Mr;H>2r.

2. The method for forming micro-nanostructure liquid phase printing by laser synchronous control according to claim 1, characterized in that: The jet nozzle ejects an ink jet in a first direction; at the same time, the laser radiates infrared laser light in a second direction along an optical path to form a first focus. The laser is used to solidify the ink jet to form a three-dimensional structure with the processing horizontal surface as a support base surface. The invention also includes: When curing the ink jet, the processing horizontal plane is rotated and / or moved in any direction so that the structure after the ink is initially cured at the second focus is attached to the processing horizontal plane. By rotating and / or moving the processing horizontal plane, the subsequent ink curing path is adjusted.

3. The method for forming micro-nanostructure liquid phase printing by laser synchronous control according to claim 1, characterized in that: The first direction is perpendicular to the processing horizontal plane.

4. The method for forming micro-nanostructure liquid phase printing by laser synchronous control according to claim 3, characterized in that: The method further includes: during suspended machining (2r<H<Mr), an angle θ between the first direction and the second direction is: 45°≤θ<90°.

5. The method for forming micro-nanostructure liquid phase printing by laser synchronous control according to claim 1, characterized in that: At least one jet nozzle ejects an ink jet along a first direction, specifically comprising: A plurality of liquid supply devices are provided, each comprising a syringe and a syringe pump. The plurality of liquid supply devices respectively store a plurality of ink materials, and the syringe of at least one liquid supply device is controlled to spray along a first direction.

6. The method for forming micro-nanostructure liquid phase printing by laser synchronous control according to claim 1, characterized in that: A liquid supply device is provided, which includes a syringe and a syringe pump. Multiple inks are mixed and sequentially added to the syringe to form layers. The syringe pump drives the syringe to spray in a first direction. The mixed liquid obtained by mixing the plurality of inks satisfies the following conditions: the viscosity ranges from 1 to 10,000 Pa.s; and the loss modulus G''> the storage modulus G'.

7. The method for forming micro-nanostructure liquid phase printing by laser synchronous control according to claim 1, characterized in that: At least one laser radiates infrared laser light in a second direction along an optical path to form a first focus, specifically comprising: A plurality of lasers are provided, wherein at least one laser radiates infrared laser light to the second focus along an optical path in a second direction, and the other lasers radiate laser light to the jet along the optical path.

8. A laser synchronously controlled micro-nanostructure liquid phase printing device, characterized in that: Based on the method according to any one of claims 1 to 7, the device comprises: An electric machining platform, the table of which serves as a machining level surface; At least one liquid supply device, wherein the jet of at least one of the liquid supply devices converges to a first direction and is ejected along the first direction through a jet port; At least one laser generator, the at least one laser generator radiating laser light to a second direction along a preset optical path of the laser generator, the at least one laser generator comprising at least one infrared laser generator; In which, the first direction and the second direction are located in a first plane, and the two directions intersect to form a second focus, which is located below the first direction and the second direction; the distance between the first focus and the second focus is -200mm-200mm; the laser spot radius r at the second focus and the ink jet diameter d at the second focus satisfy the following relationship: 2r>d; the ink used for the ink jet satisfies: loss modulus G''>storage modulus G'.

9. The laser synchronously controlled micro-nanostructure liquid phase printing device according to claim 8, characterized in that: The electric processing platform includes: a three-axis displacement platform and a rotating platform arranged on the three-axis displacement platform; the rotating platform serves as a processing horizontal surface.

10. The laser synchronously controlled micro-nanostructure liquid phase printing device according to claim 8, characterized in that: Each of the liquid supply devices further comprises at least one first rotating device; each of the laser generators further comprises: at least one shaping lens assembly, at least one focusing lens module and at least one XYZ laser 3D galvanometer; The liquid supply device is provided on the first rotating device, and the liquid supply device controls the first direction angle through the first rotating device; The laser generator is equipped with a shaping lens group, a focusing lens module, and an XYZ laser 3D galvanometer in sequence along a preset optical path; wherein the shaping lens group is used to adjust the laser shape, the focusing lens module is used to focus the laser; and the XYZ laser 3D galvanometer is used to adjust the XYZ three-axis position and spot size of the laser.

Images