Fully automatic exposure equipment

Abstract

The present application relates to the technical field of exposure machines, and in particular to a fully automatic exposure device including: a device body, a first moving mechanism, a first loading mechanism, and a second loading mechanism. The device body is provided with a first working area and a second working area. Among them, the first moving mechanism drives at least one of the first loading mechanism and the second loading mechanism to move between the first working area and the second working area. The moving path of the first loading mechanism is located above the path of the second loading mechanism. The parts to be exposed are loaded and unloaded in the first working area, and the parts to be exposed are exposed in the second working area. The first loading mechanism and the second loading mechanism are used to carry the parts to be exposed, so that the loading and unloading of the parts to be exposed and the exposure process can be carried out synchronously, thereby improving production efficiency. The first loading mechanism and the second loading mechanism are arranged up and down, so as to reduce the plane area occupied by the exposure device. In this way, the space occupied by the exposure device meets the expected requirements while ensuring that the production efficiency of the exposure device meets the expected requirements.

Description

Technical Field

[0001] The present application relates to the technical field of exposure machines, and in particular to a fully automatic exposure device. Background Art

[0002] At present, scientific and technological activities are becoming increasingly active, economic development is becoming increasingly prosperous, the space cost of factory buildings is also increasing, and the material cost of equipment is also restricting the development of enterprises.

[0003] In order to improve their competitiveness, companies are increasingly inclined to choose equipment with small size, high efficiency and high reliability.

[0004] The current exposure machine is too large due to its function and the size of the processed products, which is not conducive to the spatial layout of the equipment, increases the space cost of the enterprise, and reduces the competitiveness of the enterprise.

[0005] It can be seen that how to make the space occupied by the exposure equipment meet the expected requirements while ensuring that the production efficiency of the exposure equipment meets the expected requirements is a technical problem that needs to be solved urgently. Summary of the invention

[0006] The present application provides a fully automatic exposure device, which aims to solve the technical problem in the prior art of how to make the space occupied by the exposure device meet the expected requirements while ensuring that the production efficiency of the exposure device meets the expected requirements.

[0007] The present application provides a fully automatic exposure device, comprising:

[0008] A device body, wherein the device body is provided with a first working area and a second working area;

[0009] a first moving mechanism, the first moving mechanism being mounted on the device body;

[0010] a first loading mechanism, the first loading mechanism being connected to the first moving mechanism;

[0011] a second loading mechanism, the second loading mechanism being connected to the first moving mechanism;

[0012] A transport mechanism, the transport mechanism is arranged in the first working area, and the transport mechanism is used to load or unload the workpiece to be exposed in the first working area;

[0013] Wherein, the first loading mechanism and the second loading mechanism are both used for loading the workpiece to be exposed;

[0014] The first moving mechanism drives at least one of the first loading mechanism and the second loading mechanism to move between the first working area and the second working area;

[0015] A height of a moving path of the first loading mechanism between the first working area and the second working area is higher than a height of a moving path of the second loading mechanism between the first working area and the second working area.

[0016] Furthermore, the first moving mechanism includes:

[0017] A driving device, the driving device is installed on the device body;

[0018] A transmission device, the transmission device is installed at the power output end of the driving device, the driving device drives the transmission device to operate, one end of the transmission device extends at least to the first working area, and the other end of the transmission device extends at least to the second working area;

[0019] Wherein, the first loading mechanism and the second loading mechanism are both connected to the transmission device, so that the moving direction of the first loading mechanism is opposite to the moving direction of the second loading mechanism.

[0020] Furthermore, the first working area is provided with a first lifting mechanism, and the first lifting mechanism is used to raise or lower the first loading mechanism or the second loading mechanism located in the first working area.

[0021] Furthermore, the second working area is provided with a second lifting mechanism, and the second lifting mechanism is used to raise or lower the object to be exposed located in the second working area.

[0022] Furthermore, the second working area is provided with:

[0023] A visual mechanism, the visual mechanism is arranged in the second working area, and the visual mechanism is used to obtain image information of the workpiece to be exposed;

[0024] An exposure mechanism, wherein the exposure mechanism is arranged in the second working area, and the exposure mechanism is used to expose the workpiece to be exposed.

[0025] Furthermore, the visual mechanism comprises:

[0026] a second moving mechanism, the second moving mechanism being mounted on the device body;

[0027] A visual component, the visual component is installed at the power output end of the second moving mechanism;

[0028] Wherein, the second moving mechanism drives the visual component to move, so that the visual component obtains image information of each part of the workpiece to be exposed.

[0029] Furthermore, the exposure mechanism comprises:

[0030] a third moving mechanism, the third moving mechanism being installed on the device body;

[0031] An exposure assembly, the exposure assembly being mounted on a power output end of the third moving mechanism;

[0032] The third moving mechanism drives the exposure assembly to move, so that the exposure assembly completes the exposure of the workpiece to be exposed.

[0033] Furthermore, the number of the transport mechanisms is two, and the transport mechanisms are arranged side by side.

[0034] Furthermore, the transport mechanism comprises:

[0035] A first pick-and-place device, wherein the first pick-and-place device is provided with a first material picking component, and the first material picking component is used to pick and place the to-be-exposed object;

[0036] A fourth moving mechanism, wherein the fourth moving mechanism is used to drive the first picking and placing device to move.

[0037] Furthermore, the transport mechanism further comprises:

[0038] A first rotating device, the first rotating device is installed at the power output end of the fourth moving mechanism, and the first rotating device is used to drive the first picking and placing device to rotate;

[0039] The first rotating device rotates the first picking and placing device so that the first picking component faces the adjacent conveying mechanism, so that the adjacent conveying mechanisms can pick up the to-be-exposed parts from each other.

[0040] The beneficial effects achieved by this application are:

[0041] The present application proposes a fully automatic exposure device, which loads and unloads the exposed parts in the first working area, and exposes the exposed parts in the second working area. In the process of exposing the exposed parts, the first loading mechanism is driven by the first moving mechanism to reach the first working area, and then the exposed parts are automatically loaded in the first working area by the conveying mechanism. At this time, the second loading mechanism is outside the first working area. The first moving mechanism drives the first loading mechanism loaded with the exposed parts to move to the second working area, and then the exposed parts in the first loading mechanism are exposed in the second working area. At this time, the first moving mechanism drives the second loading mechanism to reach the first working area, and then the exposed parts in the first loading mechanism are automatically loaded in the first working area by the conveying mechanism. The second loading mechanism loads the exposed parts, and after the exposed parts in the first loading mechanism are exposed in the second working area, the first moving mechanism drives the second loading mechanism to move to the second working area, and drives the first loading mechanism to move to the first working area. When the second loading mechanism arrives at the second working area, the exposed parts are exposed in the second working area; when the first loading mechanism arrives at the first working area, the exposed parts are unloaded in the first working area, and the unexposed parts are loaded to the first loading mechanism. Then, the parts to be exposed are automatically loaded and unloaded by the conveying mechanism, and the parts to be exposed are carried by the first loading mechanism and the second loading mechanism, so that the loading and unloading of the parts to be exposed and the exposure process can be carried out synchronously, thereby improving production efficiency. The first loading mechanism and the second loading mechanism are arranged up and down, thereby reducing the width of the exposure equipment, thereby reducing the plane area occupied by the exposure equipment. In this way, the space occupied by the exposure equipment meets the expected requirements while ensuring that the production efficiency of the exposure equipment meets the expected requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 Schematic diagram of the three-dimensional structure of the exposure device in the embodiment of the present invention Figure 1 ;

[0043] Figure 2 is a cross-sectional view of an exposure apparatus according to an embodiment of the present invention;

[0044] Figure 3 Schematic diagram of the three-dimensional structure of the exposure device in the embodiment of the present invention Figure 3 ;

[0045] Figure 4 It is a schematic diagram of a three-dimensional structure in which a first loading mechanism and a second loading mechanism are installed on a device body in an embodiment of the present invention;

[0046] Figure 5 It is a schematic diagram of a three-dimensional structure in which a first moving mechanism drives a first loading mechanism and a second loading mechanism in an embodiment of the present invention;

[0047] Figure 6 is a cross-sectional view of the positioning mechanism in the embodiment of the present invention when realizing the positioning function;

[0048] Figure 7 is a schematic diagram of the three-dimensional structure of the positioning mechanism in an embodiment of the present invention;

[0049] Figure 8 It is a schematic diagram of the three-dimensional structure of an exposure machine in an embodiment of the present invention.

[0050] Description of main component symbols:

[0051] 100, exposure machine; 200, exposure equipment; 210, equipment body; 211, first working area; 212, first lifting mechanism; 213, second working area; 214, second lifting mechanism; 220, mounting seat assembly; 230, positioning mechanism; 231, adjusting device; 232, seat body; 233, first mounting surface; 234, second mounting surface; 235, driving assembly; 236, pushing assembly; 237, inclined plane; 238, positioning assembly; 240, visual mechanism; 241, visual assembly; 242, second moving mechanism; 250, exposure mechanism; 251, exposure assembly; 252, third moving mechanism; 300, first moving mechanism; 310, first moving device; 311, first driving motor; 312, first gear member; 313, first gear condition; 320, second moving device; 321, second driving motor; 322, second gear member; 323, second gear member; 330, driving device; 331, electric motor; 340, transmission device; 341, synchronous belt transmission assembly; 342, driven synchronous belt assembly; 400, first loading mechanism; 410, first carrier platform; 420, first lifting device; 430, first loading platform; 500, second loading mechanism; 510, second carrier platform; 520, second lifting device; 530, second loading platform; 600, conveying mechanism; 610, fourth moving mechanism; 620, first pick-up and placement device; 630, first material picking assembly; 640, first rotating device; 700, flipping mechanism; 710, second pick-up and placement device; 720, second material picking assembly; 730, fifth moving mechanism; 740, second rotating device; 800, piece to be exposed. DETAILED DESCRIPTION

[0052] In order to make the purpose, technical scheme and advantages of the present invention clearer, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention. In addition, it should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0053] In the description of the present invention, it is necessary to understand that the terms "length", "width", "up", "down", "left", "right", "horizontal", "top", "bottom", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0054] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0055] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or mutual communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0056] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0057] The disclosure below provides many different embodiments or examples to realize different structures of the present invention. In order to simplify the disclosure of the present invention, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present invention. In addition, the present invention can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the examples of various specific processes and materials provided by the present invention, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.

[0058] Embodiment 1

[0059] See also Figure 1 to Figure 2 In some embodiments of the present application, an exposure device 200 proposed in the present application includes: a device body 210, a mounting seat assembly 220, a positioning mechanism 230, a first moving mechanism 300, a first loading mechanism 400, and a second loading mechanism 500.

[0060] The device body 210 is provided with a first working area 211 and a second working area 213. The first moving mechanism 300 is installed on the device body 210. The first loading mechanism 400 is installed on the first power output part of the first moving mechanism 300. The second loading mechanism 500 is installed on the second power output part of the first moving mechanism 300. The visual mechanism 240 is provided in the second working area 213, and the visual mechanism 240 is used to obtain image information of the to-be-exposed workpiece 800. The exposure mechanism 250 is provided in the second working area 213, and the exposure mechanism 250 is used to expose the to-be-exposed workpiece 800.

[0061] The first loading mechanism 400 and the second loading mechanism 500 are both used to load the workpiece to be exposed 800. The first moving mechanism 300 drives at least one of the first loading mechanism 400 and the second loading mechanism 500 to move between the first working area 211 and the second working area 213. The height of the moving path of the first loading mechanism 400 between the first working area 211 and the second working area 213 is higher than the height of the moving path of the second loading mechanism 500 between the first working area 211 and the second working area 213.

[0062] The workpiece 800 to be exposed is loaded by the first loading mechanism 400 and the second loading mechanism 500. The first moving mechanism 300 drives the first loading mechanism 400 and the second loading mechanism 500 to move between the first working area 211 and the second working area 213.

[0063] When the first loading mechanism 400 arrives at the first working area 211, the workpiece 800 to be exposed is loaded onto the first loading mechanism 400. After the first moving mechanism 300 loads the workpiece 800 to be exposed, the first moving mechanism 300 drives the first moving mechanism 300 to move to the second working area 213, and positions the workpiece 800 to be exposed through the positioning mechanism 230 to ensure the exposure effect of the workpiece 800 to be exposed. By installing the positioning mechanism 230 on the mounting seat assembly 220, the reliability and effectiveness of the positioning function of the positioning mechanism 230 are improved, and the positioning accuracy is ensured. At the same time, the first moving mechanism 300 drives the second loading mechanism 500 to enter the first working area 211, so that the second loading mechanism 500 loads the workpiece 800 to be exposed in the first working area 211.

[0064] After the exposure workpiece 800 loaded by the first loading mechanism 400 is completed in the second working area 213, the first moving mechanism 300 drives the first loading mechanism 400 to move toward the first working area 211. At the same time, the first moving mechanism 300 drives the second loading mechanism 500 loaded with unexposed exposure workpiece 800 to move to the second working area 213.

[0065] When the first loading mechanism 400 reaches the first working area 211, it unloads the exposed workpiece 800 and loads the exposed workpiece 800. When the second loading mechanism 500 reaches the second working area 213, it exposes the workpiece 800 in the second loading mechanism 500 in the second working area 213.

[0066] By arranging the first loading mechanism 400 and the second loading mechanism 500 in upper and lower layers, it is avoided that the movement trajectories of the first loading mechanism 400 and the second loading mechanism 500 do not interfere with each other.

[0067] In this way, the loading and unloading and exposure of the workpiece 800 to be exposed can be performed synchronously through the alternating operation of the first loading mechanism 400 and the second loading mechanism 500 , thereby improving the production efficiency of the exposure device 200 .

[0068] It should be noted that the first working area 211 refers to a space area in the exposure device 200 where various automatic or manual processing (such as loading, unloading, turning over, etc.) can be performed on the exposure member 800, and the exposure member 800 can be positioned, lifted, lowered, moved, and turned over in the first working area 211. The second working area 213 refers to a space area in the exposure device 200 where various automatic or manual processing (such as positioning, alignment, exposure, etc.) can be performed on the exposure member 800, and the exposure member 800 can be positioned, lifted, lowered, moved, and turned over in the second working area 213.

[0069] The moving path of the first loading mechanism 400 between the first working area 211 and the second working area 213 is defined as the first path; the moving path of the second loading mechanism 500 between the first working area 211 and the second working area 213 is defined as the second path.

[0070] The first path refers to the path of the first loading mechanism 400 when it moves back and forth between the first working area 211 and the second working area 213, and the first path includes but is not limited to the path of the first loading mechanism 400 when it moves horizontally; the second path refers to the path of the second loading mechanism 500 when it moves back and forth between the first working area 211 and the second working area 213, and the second path includes but is not limited to the path of the second loading mechanism 50 when it moves horizontally. The height of the first loading mechanism 400 after reaching the first working area 211 can be higher than the height of the second loading mechanism 500 after reaching the first working area 211; the height of the first loading mechanism 400 after reaching the second working area 213 can be higher than the height of the second loading mechanism 500 after reaching the second working area 213.

[0071] See also Figure 1 to Figure 2 In some embodiments of the present application, the second working area 213 is provided with a visual mechanism 240 and an exposure mechanism 250. The visual mechanism 240 is provided in the second working area 213, and is used to obtain image information of the to-be-exposed workpiece 800. The exposure mechanism 250 is provided in the second working area 213, and is used to expose the to-be-exposed workpiece 800.

[0072] When the first moving mechanism 300 drives the first loading mechanism 400 or the second loading mechanism 500 to arrive at the first working area 211, the workpiece 800 to be exposed is loaded onto the first loading mechanism 400 or the second loading mechanism 500. After the first moving mechanism 300 or the second loading mechanism 500 loads the workpiece 800 to be exposed, the first moving mechanism 300 drives the first moving mechanism 300 or the second loading mechanism 500 to move to the second working area 213, and obtains the image information of the workpiece 800 to be exposed through the visual mechanism 240, so as to align the workpiece 800 to be exposed, optimize the target position of the workpiece 800 to be exposed, and improve the exposure efficiency. The workpiece 800 to be exposed is exposed by the exposure mechanism 250. After the workpiece 800 to be exposed is exposed, the first moving mechanism 300 drives the first loading mechanism 400 or the second loading mechanism 500 to move to the first working area 211, so that the workpiece 800 to be exposed that has been exposed is unloaded in the first working area 211, and the workpiece 800 to be exposed that has not been exposed is loaded. In this cycle, the first loading mechanism 400 and the second loading mechanism 500 are operated alternately and cyclically, thereby improving the production efficiency of the exposure device 200.

[0073] In some embodiments of the present application, a three-layer or multi-layer loading mechanism may be provided, and a cache working area may be provided between the first working area 211 and the second working area 213 .

[0074] Since the exposure processing of the workpiece 800 to be exposed consumes a long time, while the time for loading and unloading the workpiece 800 to be exposed is short, the workpiece 800 to be exposed will have a long waiting time in the first working area 211. Multiple layers of loading mechanisms are arranged in the equipment body 210, and the multiple layers of loading mechanisms are alternately operated to improve the carrying efficiency of the exposure equipment 200 for the workpiece 800 to be exposed. By setting a cache working area, the loading mechanisms of each layer are cached, and the loading mechanisms after loading or the loading mechanisms loaded with the workpiece 800 to be exposed after exposure can stay in the cache working area, so as to avoid the loading mechanisms staying in the first working area 211 or the second working area 213 for too long, and improve the efficiency of loading and unloading the workpiece 800 to be exposed.

[0075] In some embodiments of the present application, the visual mechanism 240 obtains image information of the workpiece 800 to be exposed in the buffer working area.

[0076] After the loading mechanism loads the workpiece 800 to be exposed in the first working area 211, if the exposure process in the second working area 213 has not been completed, the loading mechanism stays in the buffer working area. Since the visual mechanism 240 is in an idle state at this time, the image information of the workpiece 800 to be exposed can be obtained in the buffer working area through the visual mechanism 240. In this way, when the second working area 213 is in an empty state, the loading mechanism in the buffer working area can enter the second working area 213 and perform exposure processing without obtaining the image information of the workpiece 800 to be exposed again, thereby improving the production efficiency of the exposure device 200.

[0077] See also Figure 1 to Figure 2 In some embodiments of the present application, the first moving mechanism 300 includes a first moving device 310 and a second moving device 320. The first moving device 310 is used to drive the first loading mechanism 400 to move. The second moving device 320 is used to drive the second loading mechanism 500 to move.

[0078] The first loading mechanism 400 is driven to move by the first moving device 310, so that the first loading mechanism 400 can move back and forth between the first working area 211 and the second working area 213. The second loading mechanism 500 is driven to move by the second moving device 320, so that the second loading mechanism 500 can move back and forth between the first working area 211 and the second working area 213. The height of the first loading mechanism 400 is higher than the height of the second loading mechanism 500, and the moving path of the first loading mechanism 400 is above the moving path of the second loading mechanism 500, so as to avoid mutual interference between the first loading mechanism 400 and the second loading mechanism 500 during the movement process, thereby ensuring the effectiveness and reliability of the operation of the exposure device 200.

[0079] See also Figure 1 to Figure 2 and Figure 4 In some embodiments of the present application, the first moving device 310 includes a first driving motor 311 , a first gear member 312 , and a first rack member 313 .

[0080] The first drive motor 311 is fixedly installed on the first loading mechanism 400, the first gear member 312 is installed on the power output end of the first drive motor 311, the first gear member 313 is fixedly installed on the equipment body 210, one end of the first gear member 313 at least reaches the first working area 211, and the other end of the first gear member 313 at least reaches the second working area 213, and the first gear member 312 and the first gear member 313 are meshed with each other.

[0081] During the operation of the first driving motor 311, the first gear member 312 is driven to rotate, thereby driving the first loading mechanism 400 to move relative to the first rack member 313 according to the meshing action. In addition, the first rack member 313 is fixedly installed on the equipment body 210, one end of the first rack member 313 at least reaches the first working area 211, and the other end of the first rack member 313 at least reaches the second working area 213, so the first moving device 310 can drive the first loading mechanism 400 to move back and forth between the first working area 211 and the second working area 213. Through the drive mode of the gear rack, the structure of the first moving device 310 is simpler, and the reliability of the moving process of the first loading mechanism 400 is guaranteed. The structure of the gear rack is also relatively compact, which can effectively reduce the size of the exposure device 200, reduce the occupied space of the exposure device 200, and reduce the space cost.

[0082] In some embodiments of the present application, the first moving mechanism 300 may further include a first guiding device for guiding the first loading mechanism 400. The first moving mechanism 310 may be disposed on one side of the first loading mechanism 400, and the first guiding device may be disposed on the other side of the first loading mechanism 400.

[0083] In some embodiments of the present application, the first guide device may include a first linear guide rail assembly.

[0084] When the first moving device 310 drives the first loading mechanism 400 to move, the first loading mechanism 400 is guided by the first guiding device, so that the movement process of the first loading mechanism 400 is smoother.

[0085] By arranging the first moving device 310 and the first guiding device on both sides of the first loading mechanism 400 respectively, the first moving device 310 and the first guiding device can be prevented from affecting the second loading mechanism 500, thereby reducing the risk of collision accidents of the second loading mechanism 500.

[0086] The linear guide rail is used as a guide structure to make the movement process of the first loading mechanism 400 smoother. In addition, the linear guide rail has a compact structure, which can effectively reduce the size of the exposure device 200, reduce the occupied space of the exposure device 200, and reduce the space cost.

[0087] See also Figure 1 to Figure 2 and Figure 4 In some embodiments of the present application, the second moving device 320 includes a second driving motor 321 , a second gear member 322 , and a second rack member 323 .

[0088] The second drive motor 321 is fixedly installed on the second loading mechanism 500, the second gear member 322 is installed on the power output end of the second drive motor 321, and the second gear member 323 is fixedly installed on the equipment body 210. One end of the second gear member 323 at least reaches the first working area 211, and the other end of the second gear member 323 at least reaches the second working area 213. The second gear member 322 and the second gear member 323 are meshed with each other.

[0089] During the operation of the second driving motor 321, the second gear member 322 is driven to rotate, thereby driving the second loading mechanism 500 to move relative to the second rack member 323 according to the meshing action. In addition, the second rack member 323 is fixedly installed on the equipment body 210, one end of the second rack member 323 at least reaches the first working area 211, and the other end of the second rack member 323 at least reaches the second working area 213, so the second moving device 320 can drive the second loading mechanism 500 to move back and forth between the first working area 211 and the second working area 213. Through the drive mode of the gear rack, the structure of the second moving device 320 is simpler, and the reliability of the movement process of the second loading mechanism 500 is guaranteed. The structure of the gear rack is also relatively compact, which can effectively reduce the size of the exposure device 200, reduce the occupied space of the exposure device 200, and reduce the space cost.

[0090] In some embodiments of the present application, the first moving mechanism 300 may further include a second guiding device for guiding the second loading mechanism 500. The second moving device 320 may be disposed on one side of the second loading mechanism 500, and the second guiding device may be disposed on the other side of the second loading mechanism 500.

[0091] In some embodiments of the present application, the second guide device may include a second linear guide rail assembly.

[0092] When the second moving device 320 drives the second loading mechanism 500 to move, the second guiding device guides the second loading mechanism 500, so that the movement process of the second loading mechanism 500 is smoother.

[0093] By arranging the second moving device 320 and the second guiding device on both sides of the second loading mechanism 500 respectively, the second moving device 320 and the second guiding device can be prevented from affecting the first loading mechanism 400, thereby reducing the risk of collision accidents of the first loading mechanism 400.

[0094] The linear guide rail is used as a guide structure to make the movement process of the second loading mechanism 500 smoother. In addition, the linear guide rail has a compact structure, which can effectively reduce the size of the exposure device 200, reduce the space occupied by the exposure device 200, and reduce the space cost.

[0095] See also Figure 1 to Figure 2 In some embodiments of the present application, the visual mechanism includes a second moving mechanism 242 and a visual component 241. The second moving mechanism 242 is installed on the device body 210. The visual component 241 is installed on the power output end of the second moving mechanism 242. The second moving mechanism 242 drives the visual component 241 to move, so that the visual component 241 obtains image information of each part of the exposed workpiece 800.

[0096] After the workpiece 800 to be exposed is driven to move to the second working area 213, the second moving mechanism 242 drives the visual component 241 to move to the area of ​​the workpiece 800 to be exposed, and then the visual component 241 performs visual scanning to obtain image information of the workpiece 800 to be exposed and capture the alignment mark on the workpiece 800 to be exposed. The image information is accurately processed and analyzed by the processing module, and the precise position of the mark point on the workpiece 800 to be exposed is identified through the image processing algorithm, and compared with the preset reference position. If there is a deviation in the position of the workpiece 800 to be exposed, the control module controls the motion system of the exposure device 200 to fine-tune the relevant structure to improve the exposure accuracy of the workpiece 800 to be exposed.

[0097] In some embodiments of the present application, the visual component 241 may include a CCD visual system, which acquires image information of the workpiece 800 to be exposed and processes and analyzes the image information.

[0098] In some embodiments of the present application, the second moving mechanism 242 can be a three-axis drive structure, that is, the visual component 241 is driven to move in the three directions of the X-axis direction, the Y-axis direction and the Z-axis direction through three electric screw drive structures, so that the visual component 241 can move within the spatial range, thereby improving the movement dimension of the visual component 241 and expanding the movement range of the visual component 241.

[0099] See also Figure 1 to Figure 2 In some embodiments of the present application, the exposure mechanism 250 includes a third moving mechanism 252 and an exposure assembly 251. The third moving mechanism 252 is installed on the device body 210. The exposure assembly 251 is installed on the power output end of the third moving mechanism 252. The third moving mechanism 252 drives the exposure assembly 251 to move, so that the exposure assembly 251 completes the exposure of the object 800 to be exposed.

[0100] After the visual mechanism 240 obtains the image information of the workpiece 800 to be exposed, the processing module accurately processes and analyzes the image information, and identifies the precise position of the marking point on the workpiece 800 to be exposed through the image processing algorithm, and compares it with the preset reference position. If there is a deviation in the position of the workpiece 800 to be exposed, the control module controls the third moving mechanism 252 to move, and drives the exposure assembly 251 to move according to the image information, so as to ensure that the positions of the workpieces 800 to be exposed and the workpieces 800 to be exposed remain stable, thereby improving the exposure accuracy of the exposure mechanism 250 on the workpiece 800 to be exposed.

[0101] In some embodiments of the present application, the exposure assembly 251 may include an exposure head. The exposure head emits ultraviolet light or laser light, which is passed through the focusing lens of the optical system to obtain a smaller focal spot size and accurately irradiates the mask. When the light source irradiates the mask, the light beam is transmitted in the transparent area of ​​the mask and blocked in the opaque area. In this way, the image or pattern on the mask is projected onto the photosensitive material below, and then the exposure of the to-be-exposed part 800 is completed through subsequent processes.

[0102] In some embodiments of the present application, the third moving mechanism 252 may include an electric screw drive assembly and a linear guide assembly. The electric screw drive assembly provides power to drive the exposure assembly 251 to move under the guidance of the linear guide assembly, thereby moving the exposure assembly 251 in the second working area 213.

[0103] The second moving mechanism 242 drives the visual component 241 to move, and then the visual component 241 performs visual scanning on the to-be-exposed object 800. At this time, the third moving mechanism 252 drives the exposure component 251 to move out of the second working area 213 to avoid interference and collision between the exposure component 251 and the visual component 241. When the visual component 241 completes the visual scanning, the second moving mechanism 242 drives the visual component 241 to move out of the second working area 213, and the third moving mechanism 252 drives the exposure component 251 to enter the second working area 213, so that the exposure component 251 can expose the to-be-exposed object 800. In this way, the safety and reliability of the exposure device 200 are guaranteed.

[0104] See also Figure 1 to Figure 2 and Figure 6 In some embodiments of the present application, the first loading mechanism 400 includes a first carrier 410, a first lifting device 420 and a first loading platform 430. The first carrier 410 is installed at the first power output part. The first lifting device 420 is installed at the first carrier 410. The first loading platform 430 is installed at the power output end of the first lifting device 420, and the first loading platform 430 is used to load the exposed workpiece 800. Among them, the first lifting device 420 is used to drive the first loading platform 430 to rise or fall.

[0105] The first moving mechanism 300 drives the first carrier 410 to move through the first power output part, and then drives the first lifting device 420 and the first loading platform 430 to move. The first loading platform 430 is loaded with the workpiece 800 to be exposed, and the first lifting device 420 drives the first loading platform 430 to move up and down.

[0106] During the operation of the exposure device 200, the first moving mechanism 300 drives the first carrier 410 to move to the first working area 211, and the first lifting device 420 drives the first loading platform 430 to rise to a specified height, so as to load the workpiece 800 to be exposed onto the first loading platform 430 in the first working area 211. After the first loading platform 430 is loaded with the workpiece 800 to be exposed, the first lifting device 420 drives the first loading platform 430 to descend to a specified height, thereby avoiding collision with nearby structures during the movement of the first loading mechanism 400, thereby improving the safety and reliability of the exposure device 200.

[0107] After the first loading mechanism 400 completes loading the to-be-exposed workpiece 800 in the first working area 211, the first moving mechanism 300 drives the first loading mechanism 400 to move to the second working area 213. At this time, if the second working area 213 is vacant, the first moving mechanism 300 drives the first loading mechanism 400 to enter the second working area 213; if the second loading mechanism 500 is located in the second working area 213, the first moving mechanism 300 makes the first loading mechanism 400 stay outside the second working area 213 until the second loading mechanism 500 moves out of the second working area 213, and the first moving mechanism 300 drives the first loading mechanism 400 to enter the second working area 213.

[0108] After the first loading mechanism 400 enters the second working area 213, the first lifting device 420 drives the first loading platform 430 to rise, so that the first loading platform 430 is in contact with the positioning component 238, thereby limiting the height of the first loading platform 430 through the positioning component 238, so that the rising height of the first loading platform 430 after entering the second working area 213 each time remains consistent, and the rising height of the first loading platform 430 in the second working area 213 meets the expected requirements, so that the visual mechanism 240 can obtain the image information of the to-be-exposed part 800 in the first loading platform 430, and the exposure effect of the to-be-exposed part 800 by the exposure mechanism 250 meets the expected requirements.

[0109] After the exposure of the exposed object 800 is completed, the first lifting device 420 drives the first loading platform 430 to descend to a specified height, thereby avoiding collision with nearby structures during the movement of the first loading mechanism 400, thereby improving the safety and reliability of the exposure equipment 200.

[0110] In some embodiments of the present application, the first lifting device 420 may include a first cylinder assembly.

[0111] The first cylinder assembly provides power to drive the first loading platform 430 to rise or fall.

[0112] The first lifting device 420 is disposed on the first carrier platform 410 , and the first loading platform 430 is lifted and lowered by the first lifting device 420 , thereby preventing the first loading mechanism 400 from interfering with or colliding with nearby structures.

[0113] If the first lifting device 420 is arranged on the side of the first loading mechanism 400, this will not only increase the width dimension of the exposure device 200, but also cause the first lifting device 420 to interfere with the second loading mechanism 500, making it difficult for the first loading mechanism 400 and the second loading mechanism 500 to achieve alternating circulation operation.

[0114] If the first lifting device 420 is disposed on the side of the first loading mechanism 400, if the first loading mechanism 400 is to be prevented from interfering with the second loading mechanism 500, the first loading mechanism 400 needs to be disposed as a cantilever structure so that the second loading mechanism 500 can smoothly pass over the first loading mechanism 400. If the first loading mechanism 400 is disposed as a cantilever structure, uneven force will be applied to the first loading mechanism 400, reducing the structural strength of the first loading mechanism 400, and it will be difficult to keep the workpiece 800 to be exposed horizontally, thus affecting the exposure effect of the workpiece 800 to be exposed.

[0115] By setting the first lifting device 420 on the first carrier platform 410 and driving the first loading platform 430 to rise and fall through the first lifting device 420, the two sides of the first loading mechanism 400 can be left empty, so that the second loading mechanism 500 can smoothly pass over the first loading mechanism 400, avoiding interference between the first loading mechanism 400 and the second loading mechanism 500, and the width dimension of the exposure device 200 will not be increased.

[0116] The number of the first lifting devices 420 can be set to four, and the first lifting devices 420 are arranged in a matrix with the central axis of the first carrier platform 410, and then the first carrier platform 410 is driven to rise or fall by the four first lifting devices 420, ensuring that the angle between the first carrier platform 410 and the horizontal direction is within the expected range, thereby improving the exposure effect of the exposed piece 800.

[0117] See also Figure 1 to Figure 2 In some embodiments of the present application, the second loading mechanism 500 includes: a second carrier 510, a second lifting device 520, and a second loading platform 530. The second carrier 510 is installed on the second power output part. The second lifting device 520 is installed on the second carrier 510. The second loading platform 530 is installed on the power output end of the second lifting device 520, and the second loading platform 530 is used to load the exposed workpiece 800. Among them, the second lifting device 520 is used to drive the second loading platform 530 to rise or fall.

[0118] The first moving mechanism 300 drives the second carrier 510 to move through the second power output part, and then drives the second lifting device 520 and the second loading platform 530 to move. The second loading platform 530 loads the exposed workpiece 800, and the second lifting device 520 drives the first loading platform 430 to move up and down.

[0119] During the operation of the exposure device 200, the first moving mechanism 300 drives the second carrier 510 to move to the second working area 213, and the second lifting device 520 drives the second loading platform 530 to rise to a specified height, so as to load the workpiece 800 to be exposed to the second loading platform 530 in the first working area 211. After the second loading platform 530 is loaded with the workpiece 800 to be exposed, the second lifting device 520 drives the second loading platform 530 to descend to a specified height, thereby avoiding collision with nearby structures during the movement of the second loading mechanism 500, thereby improving the safety and reliability of the exposure device 200.

[0120] After the second loading mechanism 500 completes loading the to-be-exposed workpiece 800 in the first working area 211, the first moving mechanism 300 drives the second loading mechanism 500 to move to the second working area 213. At this time, if the second working area 213 is empty, the first moving mechanism 300 drives the second loading mechanism 500 to enter the second working area 213; if the first loading mechanism 400 is located in the second working area 213, the first moving mechanism 300 makes the second loading mechanism 500 stay outside the second working area 213 until the first loading mechanism 400 moves out of the second working area 213, and the first moving mechanism 300 drives the second loading mechanism 500 to enter the second working area 213.

[0121] After the second loading mechanism 500 enters the second working area 213, the second lifting device 520 drives the second loading platform 530 to rise, so that the second loading platform 530 is in contact with the positioning component 238, thereby limiting the height of the second loading platform 530 through the positioning component 238, so that the rising height of the second loading platform 530 after entering the second working area 213 each time remains consistent, and the rising height of the second loading platform 530 in the second working area 213 meets the expected requirements, so that the visual mechanism 240 can obtain the image information of the to-be-exposed part 800 in the second loading platform 530, and the exposure effect of the to-be-exposed part 800 by the exposure mechanism 250 meets the expected requirements.

[0122] Since the second loading mechanism 500 is located below the first loading mechanism 400, if the first loading mechanism 400 is located in the second working area 213, the first moving mechanism 300 can also move the second loading mechanism 500 to the bottom of the first loading mechanism 400. When the first loading mechanism 400 moves out of the second working area 213, the second lifting device 520 will raise the second loading platform 530 to a specified height, thereby improving production efficiency.

[0123] After the exposure of the exposed object 800 is completed, the second lifting device 520 drives the second loading platform 530 to descend to a specified height, thereby avoiding collision with nearby structures during the movement of the second loading mechanism 500, thereby improving the safety and reliability of the exposure equipment 200.

[0124] In some embodiments of the present application, the second lifting device 520 may include a second cylinder assembly.

[0125] The second cylinder assembly provides power to drive the first loading platform 430 to rise or fall.

[0126] The second lifting device 520 is disposed on the second carrier platform 510 , and the second loading platform 530 is lifted and lowered by the second lifting device 520 , thereby preventing the first loading mechanism 400 from interfering with or colliding with nearby structures.

[0127] If the second lifting device 520 is arranged on the side of the second loading mechanism 500, this will not only increase the width dimension of the exposure equipment 200, but also cause interference between the first lifting device 420 and the second loading mechanism 500, making it difficult for the first loading mechanism 400 and the second loading mechanism 500 to achieve alternating circulation operation.

[0128] If the second lifting device 520 is disposed at the side of the second loading mechanism 500, if the first loading mechanism 400 and the second loading mechanism 500 are not to interfere with each other, the second loading mechanism 500 needs to be disposed as a cantilever structure so that the first loading mechanism 400 can smoothly pass over the second loading mechanism 500. If the second loading mechanism 500 is disposed as a cantilever structure, the force on the second loading mechanism 500 will be uneven, the structural strength of the second loading mechanism 500 will be reduced, and it will be difficult to keep the workpiece 800 to be exposed horizontally, which will affect the exposure effect of the workpiece 800 to be exposed.

[0129] By setting the second lifting device 520 on the second carrier platform 510 and driving the second loading platform 530 to rise and fall by the second lifting device 520, the two sides of the second loading mechanism 500 can be left empty, so that the first loading mechanism 400 can smoothly pass over the second loading mechanism 500, avoiding interference between the first loading mechanism 400 and the second loading mechanism 500, and will not increase the width dimension of the exposure equipment 200.

[0130] The number of the second lifting devices 520 can be set to four, and the second lifting devices 520 are arranged in a matrix with the central axis of the second carrier platform 510, and then the second carrier platform 510 is driven to rise or fall by the four second lifting devices 520, ensuring that the angle between the second carrier platform 510 and the horizontal direction is within the expected range, thereby improving the exposure effect of the exposed piece 800.

[0131] In some embodiments of the present application, the positioning mechanism 230 includes an adjusting device 231 and a positioning assembly 238. The adjusting device 231 is installed on the mounting seat assembly 220. The positioning assembly 238 is connected to the adjusting device 231. The first loading mechanism 400 and the second loading mechanism 500 are both provided with positioning members, and the positioning members are located on both sides of the first loading mechanism 400 and the second loading mechanism 500. The adjusting device 231 is used to adjust the distance between the positioning assembly 238 and the positioning member.

[0132] See also Figure 1 to Figure 2 and Figure 6 to Figure 7 In some embodiments of the present application, the mounting seat assembly 220 may be disposed above the motion track of the first loading mechanism 400, the positioning mechanism 230 may be installed at the bottom of the mounting seat assembly 220, and the positioning assembly 238 may face downward. The positioning member may be fixedly installed on both sides of the first carrier 410 and the second carrier 510. When the first loading mechanism 400 or the second loading mechanism 500 enters the second working area 213, the positioning member is located below the positioning assembly 238.

[0133] When the first loading mechanism 400 enters the second working area 213, the first lifting device 420 drives the first loading platform 430 to rise until the positioning piece abuts against the positioning assembly 238, thereby preventing the first loading platform 430 from continuing to rise through the positioning assembly 238. The positioning assembly 238 limits the rising height of the first loading platform 430, so that the rising height of the first loading platform 430 in the second working area 213 remains consistent each time.

[0134] Similarly, when the second loading mechanism 500 enters the second working area 213, the second lifting device 520 drives the second loading platform 530 to rise until the positioning piece abuts against the positioning assembly 238, thereby preventing the second loading platform 530 from continuing to rise through the positioning assembly 238, and limiting the rising height of the second loading platform 530 through the positioning assembly 238, so that the rising height of the second loading platform 530 in the second working area 213 remains consistent each time.

[0135] Since the thickness of the same type of workpiece 800 or different types of workpiece 800 to be exposed is inconsistent, and the optimal exposure distance range of the exposure head is narrow, it is necessary to adjust the height of the first loading platform 430 or the second loading platform 530 at the second working area 213 so that the exposure surface of the workpiece 800 to be exposed is within the optimal exposure range of the exposure head. The distance between the positioning component 238 and the positioning component is adjusted by the adjustment device 231, so that the height of the first loading platform 430 or the second loading platform 530 at the second working area 213 is adjustable, so that the exposure surface of the workpiece 800 to be exposed can be raised to within the optimal exposure range of the exposure head, thereby improving the exposure effect of the exposure device 200.

[0136] See also Figure 6 to Figure 7 In some embodiments of the present application, the adjusting device 231 includes: a seat body 232, a driving assembly 235, and a pushing assembly 236. The seat body 232 is provided with a first mounting surface 233 and a second mounting surface 234, and the first mounting surface 233 and the second mounting surface 234 are perpendicular to each other. The driving assembly 235 is installed on the seat body 232. The pushing assembly 236 is installed at the power output end of the driving assembly 235, and the pushing assembly 236 is slidably connected to the first mounting surface 233, and the pushing assembly 236 is provided with an inclined surface 237. Among them, the pushing assembly 236 is slidably connected to the positioning assembly 238 through the inclined surface 237, the positioning assembly 238 is slidably connected to the second mounting surface 234, and the inclined surface 237 intersects with the first mounting surface 233 and the second mounting surface 234.

[0137] In the process of adjusting the height of the positioning assembly 238, the driving assembly 235 operates, thereby driving the pushing assembly 236 to slide along the first mounting surface 233. In the process of the pushing assembly 236 sliding, the positioning assembly 238 is pushed to slide along the second mounting surface 234 through the inclined surface 237. Since the positioning assembly 238 is slidably connected to the pushing assembly 236 through the inclined surface 237, and the positioning assembly 238 is slidably connected to the second mounting surface 234, the height of the positioning assembly 238 changes under the joint action of the inclined surface 237 and the second mounting surface 234, and thus the height of the positioning assembly 238 is adjusted.

[0138] In some embodiments of the present application, the positioning assembly 238 is connected to the pushing assembly 236 via a first linear slide rail, the positioning assembly 238 is installed on the second mounting surface 234 via a second linear slide rail, and the pushing assembly 236 is installed on the first mounting surface 233 via a third linear slide rail.

[0139] In this way, the pushing component 236 is slidably connected to the first mounting surface 233 , the pushing component 236 is slidably connected to the positioning component 238 via the inclined surface 237 , and the positioning component 238 is slidably connected to the second mounting surface 234 .

[0140] In some embodiments of the present application, the driving assembly 235 may include an electric lead screw driving component, and the electric lead screw component drives the pushing component 236 to move.

[0141] In some embodiments of the present application, the positioning assembly 238 is provided with a guide surface, and the guide surface is used to guide and position the positioning member from both sides of the positioning member.

[0142] When the first loading mechanism 400 reaches the second working area 213, the first loading platform 430 is raised by the first lifting device 420. When the positioning members on both sides of the first loading platform 430 are in contact with the positioning assembly 238, the positioning members are guided and positioned from both sides by the guide surfaces. Therefore, while the first loading mechanism 400 is positioned in the height direction by the positioning mechanism 230, the first loading mechanism 400 is also positioned from both sides, thereby improving the positioning accuracy of the first loading mechanism 400 and improving the exposure effect of the exposed part 800.

[0143] Similarly, when the second loading mechanism 500 reaches the second working area 213, the second loading platform 530 is raised by the second lifting device 520. In the process of the positioning members on both sides of the second loading platform 530 abutting against the positioning assembly 238, the positioning members are guided and positioned from both sides of the positioning members by the guide surfaces. Therefore, while the second loading mechanism 500 is positioned in the height direction by the positioning mechanism 230, the second loading mechanism 500 is also positioned from both sides, thereby improving the positioning accuracy of the second loading mechanism 500 and improving the exposure effect of the exposed part 800.

[0144] Embodiment 2

[0145] See also Figure 1 to Figure 2 In some embodiments of the present application, the first moving mechanism 300 includes a first moving device 310 and a second moving device 320. The first moving device 310 is used to drive the first loading mechanism 400 to move. The second moving device 320 is used to drive the second loading mechanism 500 to move.

[0146] The first loading mechanism 400 is driven to move by the first moving device 310, so that the first loading mechanism 400 can move back and forth between the first working area 211 and the second working area 213. The second loading mechanism 500 is driven to move by the second moving device 320, so that the second loading mechanism 500 can move back and forth between the first working area 211 and the second working area 213. The height of the first loading mechanism 400 is higher than the height of the second loading mechanism 500, and the moving path of the first loading mechanism 400 is above the moving path of the second loading mechanism 500, so as to avoid mutual interference between the first loading mechanism 400 and the second loading mechanism 500 during the movement process, thereby ensuring the effectiveness and reliability of the operation of the exposure device 200.

[0147] In some embodiments of the present application, the first moving device 310 includes a first motor assembly, a first active synchronous wheel, a first synchronous belt, and a first driven synchronous wheel. The first motor assembly is mounted on the device body 210, the first active synchronous wheel is mounted on the power output end of the first motor assembly, the first driven synchronous wheel is mounted on the device body 210, the first active synchronous wheel and the first driven synchronous wheel are simultaneously adapted to the first synchronous belt, and the first synchronous belt is tensioned. The first loading mechanism 400 is connected to the first synchronous belt.

[0148] When the first moving device 310 drives the first loading mechanism 400 to move, the first motor assembly operates, thereby driving the first active synchronous wheel to operate, and the first active synchronous wheel drives the first synchronous belt to operate through meshing, thereby driving the first loading mechanism 400 to move through the first synchronous belt.

[0149] In some embodiments of the present application, the second mobile device 320 includes a second motor assembly, a second active synchronous wheel, a second synchronous belt, and a second driven synchronous wheel. The second motor assembly is installed on the equipment body 210, the second active synchronous wheel is installed on the power output end of the second motor assembly, the second driven synchronous wheel is installed on the equipment body 210, the second active synchronous wheel and the second driven synchronous wheel are adapted to the second synchronous belt at the same time, and the second synchronous belt is tensioned. The first mobile device 310 and the second mobile device 320 are arranged side by side, and the first mobile device 310 and the second mobile device 320 are respectively located on both sides of the first loading mechanism 400 and the second loading mechanism 500. The second loading mechanism 500 is connected to the second synchronous belt.

[0150] When the second moving device 320 drives the second loading mechanism 500 to move, the second motor assembly operates, thereby driving the second active synchronous wheel to operate, and the second active synchronous wheel drives the second synchronous belt to operate through meshing, thereby driving the second loading mechanism 500 to move through the second synchronous belt.

[0151] In some embodiments of the present application, the first moving device 310 further includes a first guide assembly, and the first guide assembly is disposed on a side of the first loading mechanism 400 away from the first moving device 310 .

[0152] During the movement of the first loading mechanism 400, the first guide assembly guides the first loading mechanism 400, so that the movement of the first loading mechanism 400 is smoother. By arranging the first moving device 310 and the first guide assembly on both sides of the first loading mechanism 400, the first moving device 310 and the first guide assembly are prevented from affecting the second loading mechanism 500, thereby reducing the risk of collision accidents of the second loading mechanism 500.

[0153] The first loading mechanism 400 is supported from a side away from the first moving device 310 by the first guide assembly to avoid the first loading mechanism 400 from forming a cantilever structure, thereby ensuring the horizontality of the first loading mechanism 400 and improving the exposure effect of the exposed workpiece 800.

[0154] In some embodiments of the present application, the second moving device 320 further includes a second guide assembly, and the second guide assembly is disposed on a side of the second loading mechanism 500 away from the second moving device 320 .

[0155] During the movement of the second loading mechanism 500, the second guide assembly guides the second loading mechanism 500, so that the movement of the second loading mechanism 500 is smoother. By arranging the second moving device 320 and the second guide assembly on both sides of the second loading mechanism 500, the second moving device 320 and the second guide assembly are prevented from affecting the first loading mechanism 400, thereby reducing the risk of collision accidents of the first loading mechanism 400.

[0156] The second loading mechanism 500 is supported from a side away from the second moving device 320 by the second guide assembly to avoid the second loading mechanism 500 from forming a cantilever structure, thereby ensuring the horizontality of the second loading mechanism 500 and improving the exposure effect of the exposed piece 800.

[0157] In some embodiments of the present application, the first loading mechanism 400 is connected to the upper side of the first synchronous belt, and the second loading mechanism 500 is connected to the lower side of the second synchronous belt.

[0158] Since the first loading mechanism 400 is located above the second loading mechanism 500, and the first moving device 310 and the second moving device 320 are arranged side by side, if the first loading mechanism 400 is connected to the lower side of the first synchronous belt, the connection between the first loading mechanism 400 and the first synchronous belt will interfere with the second guide assembly; if the second loading mechanism 500 is connected to the upper side of the second synchronous belt, the connection between the second loading mechanism 500 and the second synchronous belt will interfere with the first guide assembly. Connecting the first loading mechanism 400 to the upper side of the first synchronous belt and the second loading mechanism 500 to the lower side of the second synchronous belt can avoid interference between the first loading mechanism 400 and the second loading mechanism 500, and make the structure of the exposure device 200 more compact.

[0159] It should be noted that the first moving device 310 and the second moving device 320 can also be a gear chain drive structure or a belt drive structure, and the working principle is the same as that of the synchronous belt drive structure, so it will not be described here.

[0160] Embodiment 3

[0161] See also Figure 1 to Figure 2 and Figure 5 In some embodiments of the present application, a fully automatic exposure device 200 provided in the present application includes a device body 210, a first moving mechanism 300, a first loading mechanism 400, a second loading mechanism 500 and a transport mechanism 600.

[0162] The device body 210 is provided with a first working area 211 and a second working area 213. The first moving mechanism 300 is installed on the device body 210. The first loading mechanism 400 is connected to the first moving mechanism 300. The second loading mechanism 500 is connected to the first moving mechanism 300. The transport mechanism 600 is provided in the first working area 211, and the transport mechanism 600 is used to load or unload the to-be-exposed member 800 in the first working area 211.

[0163] The first loading mechanism 400 and the second loading mechanism 500 are both used to load the workpiece to be exposed 800. The first moving mechanism 300 drives at least one of the first loading mechanism 400 and the second loading mechanism 500 to move between the first working area 211 and the second working area 213. The moving path of the first loading mechanism 400 between the first working area 211 and the second working area 213 is located above the path of the second loading mechanism 500 between the first working area 211 and the second working area 213.

[0164] The workpiece 800 to be exposed is loaded and unloaded in the first working area 211 , and the workpiece 800 to be exposed is exposed in the second working area 213 .

[0165] During the exposure process of the workpiece 800 to be exposed, the first loading mechanism 400 is driven by the first moving mechanism 300 to arrive at the first working area 211, and then the workpiece 800 to be exposed is automatically loaded by the conveying mechanism 600 in the first working area 211. At this time, the second loading mechanism 500 is outside the first working area 211. The first moving mechanism 300 drives the first loading mechanism 400 loaded with the workpiece 800 to be exposed to move to the second working area 213, and then the workpiece 800 to be exposed in the first loading mechanism 400 is exposed in the second working area 213. At this time, the first moving mechanism 300 drives the second loading mechanism 500 to arrive at the first working area 211, and then the conveying mechanism 600 automatically loads the workpiece 800 to be exposed in the first working area 211.

[0166] After the second loading mechanism 500 loads the exposed pieces 800 and the exposed pieces 800 in the first loading mechanism 400 are exposed in the second working area 213 , the first moving mechanism 300 drives the second loading mechanism 500 to move toward the second working area 213 and drives the first loading mechanism 400 to move toward the first working area 211 .

[0167] When the second loading mechanism 500 arrives at the second working area 213, the exposed workpiece 800 is exposed in the second working area 213; when the first loading mechanism 400 arrives at the first working area 211, the exposed workpiece 800 is unloaded in the first working area 211, and the unexposed workpiece 800 is loaded to the first loading mechanism 400. Then, the workpiece 800 is automatically loaded and unloaded by the transport mechanism 600, and the workpiece 800 is transported by the first loading mechanism 400 and the second loading mechanism 500, so that the loading and unloading of the workpiece 800 can be carried out synchronously with the exposure process, thereby improving production efficiency.

[0168] The first loading mechanism 400 and the second loading mechanism 500 are arranged up and down, thereby reducing the width of the exposure device 200, thereby reducing the plane footprint of the exposure device 200.

[0169] In this way, the space occupied by the exposure device 200 meets the expected requirements while ensuring that the production efficiency of the exposure device 200 meets the expected requirements.

[0170] See also Figure 1 to Figure 2 and Figure 5 In some embodiments of the present application, the first moving mechanism 300 includes a driving device 330 and a transmission device 340. The driving device 330 is installed on the device body 210. The transmission device 340 is installed at the power output end of the driving device 330, and the driving device 330 drives the transmission device 340 to operate. One end of the transmission device 340 extends at least to the first working area 211, and the other end of the transmission device 340 extends at least to the second working area 213. Among them, the first loading mechanism 400 and the second loading mechanism 500 are both connected to the transmission device 340, so that the moving direction of the first loading mechanism 400 is opposite to the moving direction of the second loading mechanism 500.

[0171] The driving device 330 drives the transmission device 340 to operate, and then the transmission device 340 drives the first loading mechanism 400 and the second loading mechanism 500 to move in opposite directions. When the first loading mechanism 400 enters the first working area 211, the second loading mechanism 500 enters the second working area 213; when the first loading mechanism 400 enters the second working area 213, the second loading mechanism 500 enters the first working area 211. In this way, the first loading mechanism 400 and the second loading mechanism 500 are operated alternately, that is, when the first loading mechanism 400 loads and unloads materials in the first working area 211, the second loading mechanism 500 performs exposure operation in the second working area 213; when the first loading mechanism 400 performs exposure operation in the second working area 213, the second loading mechanism 500 performs loading and unloading in the first working area 211. In this way, the loading and unloading of the exposed workpiece 800 and the exposure process can be carried out synchronously, thereby improving production efficiency.

[0172] See also Figure 5 In some embodiments of the present application, the driving device 330 includes an electric motor 331, and the transmission device 340 includes a synchronous belt transmission assembly 341. The first loading mechanism 400 is connected to the upper synchronous belt of the synchronous belt transmission assembly 341, and the second loading mechanism 500 is connected to the lower synchronous belt of the synchronous belt transmission assembly 341.

[0173] When the electric motor 331 drives the synchronous belt transmission assembly 341 to operate, the movement direction of the upper synchronous belt of the synchronous belt transmission assembly 341 is opposite to the movement direction of the lower synchronous belt of the synchronous belt transmission assembly 341, so that the first moving mechanism 300 can drive the first moving mechanism 300 and the second moving mechanism 242 to move in opposite directions.

[0174] In some embodiments of the present application, the first moving mechanism 300 may be disposed on one side of the first loading mechanism 400 and the second loading mechanism 500 , and a guiding mechanism may be disposed on the other side of the first loading mechanism 400 and the second loading mechanism 500 .

[0175] The first loading mechanism 400 and the second loading mechanism 500 are supported and guided by the guiding mechanism, so as to avoid the first loading mechanism 400 and the second loading mechanism 500 from forming a cantilever structure, ensure the structural stability of the first loading mechanism 400 and the second loading mechanism 500, and ensure the horizontality of the first loading mechanism 400 and the second loading mechanism 500, thereby improving the exposure effect of the exposure equipment 200 on the exposure part 800.

[0176] In some embodiments of the present application, the guide mechanism may include a first linear guide device and a second linear guide device, and the first loading mechanism 400 is supported and guided by the first linear guide device.

[0177] The second loading mechanism 500 is supported and guided by a second linear guide device, thereby preventing the first loading mechanism 400 and the second loading mechanism 500 from forming a cantilever structure, ensuring the structural stability of the first loading mechanism 400 and the second loading mechanism 500, and ensuring the horizontality of the first loading mechanism 400 and the second loading mechanism 500, thereby improving the exposure effect of the exposure equipment 200 on the exposure part 800.

[0178] See also Figure 5In some embodiments of the present application, the first moving mechanism 300 may further include a driven synchronous belt assembly 342, the synchronous belt transmission assembly 341 may be disposed on one side of the first loading mechanism 400 and the second loading mechanism 500, and the driven synchronous belt assembly 342 may be disposed on the other side of the first loading mechanism 400 and the second loading mechanism 500. The first loading mechanism 400 is connected to the upper synchronous belt of the driven synchronous belt assembly 342, and the second loading mechanism 500 is connected to the lower synchronous belt of the driven synchronous belt assembly 342.

[0179] The first loading mechanism 400 is supported and guided by the upper synchronous belt of the driven synchronous belt assembly 342, and the second loading mechanism 500 is supported and guided by the lower synchronous belt of the driven synchronous belt assembly 342, thereby avoiding the first loading mechanism 400 and the second loading mechanism 500 from forming a cantilever structure, ensuring the structural stability of the first loading mechanism 400 and the second loading mechanism 500, and ensuring the horizontality of the first loading mechanism 400 and the second loading mechanism 500, thereby improving the exposure effect of the exposure equipment 200 on the exposure part 800.

[0180] In some embodiments of the present application, a motor-driven power source may be provided to drive the driven synchronous belt assembly 342 to operate, thereby causing the driven synchronous belt assembly 342 to operate synchronously with the first moving mechanism 300, so that the forces on both sides of the first loading mechanism 400 and the second loading mechanism 500 are more balanced, thereby ensuring the smooth operation of the exposure device 200.

[0181] In some embodiments of the present application, the transmission device 340 may also be a belt transmission device 340 or a chain transmission device 340 .

[0182] See also Figures 1 to 3 In some embodiments of the present application, the first working area 211 is provided with a first lifting mechanism 212, and the first lifting mechanism 212 is used to raise or lower the first loading mechanism 400 or the second loading mechanism 500 located in the first working area 211.

[0183] When the first loading mechanism 400 arrives at the first working area 211, the first lifting mechanism 212 drives the first loading mechanism 400 to rise to a specified height so that the conveying mechanism 600 can place the exposed object 800 into the first loading mechanism 400 in the first working area 211, or take out the exposed object 800 from the first loading mechanism 400.

[0184] When the second loading mechanism 500 arrives at the first working area 211, the first lifting mechanism 212 drives the second loading mechanism 500 to rise to a specified height so that the conveying mechanism 600 can place the exposed workpiece 800 into the second loading mechanism 500 in the first working area 211, or take out the exposed workpiece 800 from the second loading mechanism 500.

[0185] The first loading mechanism 400 and the second loading mechanism 500 are raised to the same height in the first working area 211 by the first lifting mechanism 212, so that the conveying mechanism 600 is at the same height each time it takes in and places the workpiece 800 to be exposed. The conveying mechanism 600 does not need to identify the first loading mechanism 400 and the second loading mechanism 500, thereby simplifying the process of loading and unloading the workpiece 800 to be exposed and improving production efficiency.

[0186] When the first lifting mechanism 212 is at the low point, the height of the first lifting mechanism 212 is lower than the height of the second loading mechanism 500 , so that both the first loading mechanism 400 and the second loading mechanism 500 can reach above the first lifting mechanism 212 .

[0187] When the first lifting mechanism 212 is at a high point, the height of the first lifting mechanism 212 is higher than the height of the first loading mechanism 400, so that the rising height of the first loading mechanism 400 is consistent with that of the second loading mechanism 500, and the stroke of the first lifting mechanism 212 is consistent each time it is lifted or lowered, thereby avoiding the first lifting mechanism 212 from identifying the first loading mechanism 400 and the second loading mechanism 500, simplifying the lifting process, and improving production efficiency.

[0188] See also Figures 1 to 3 In some embodiments of the present application, the second working area 213 is provided with a second lifting mechanism 214, and the second lifting mechanism 214 is used to raise or lower the to-be-exposed workpiece 800 located in the second working area 213.

[0189] When the first loading mechanism 400 reaches the second working area 213, the second lifting mechanism 214 drives the first loading mechanism 400 to rise to a specified height, so that the workpiece 800 to be exposed is exposed at the specified height, thereby ensuring that the exposure effect meets the expected requirements.

[0190] When the second loading mechanism 500 reaches the second working area 213, the second lifting mechanism 214 drives the second loading mechanism 500 to rise to a specified height, so that the workpiece 800 to be exposed is exposed at the specified height, thereby ensuring that the exposure effect meets the expected requirements.

[0191] The first loading mechanism 400 and the second loading mechanism 500 are raised to the same height in the second working area 213 by the second lifting mechanism 214, so that when the exposure device 200 exposes the workpiece 800 to be exposed, all the workpieces 800 to be exposed are within the effective exposure range when being exposed, and the position repeatability of the workpiece 800 to be exposed in the second working area 213 is improved, thereby ensuring the consistency of the exposure effect of the workpiece 800 to be exposed.

[0192] When the second lifting mechanism 214 is at the low point, the height of the second lifting mechanism 214 is lower than the height of the second loading mechanism 500 , so that both the first loading mechanism 400 and the second loading mechanism 500 can reach above the second lifting mechanism 214 .

[0193] When the second lifting mechanism 214 is at a high point, the height of the second lifting mechanism 214 is higher than the height of the first loading mechanism 400, so that the rising heights of the first loading mechanism 400 and the second loading mechanism 500 are consistent, and the end points of the second lifting mechanism 214 are consistent each time it is lifted or lowered, thereby avoiding the second lifting mechanism 214 from identifying the first loading mechanism 400 and the second loading mechanism 500, simplifying the lifting process, and improving production efficiency.

[0194] In some embodiments of the present application, the first loading mechanism 400 includes a first carrier frame and a first loading assembly. The first carrier frame is provided with a first positioning protrusion, and the first loading assembly is provided with a first positioning groove. The first positioning protrusion is adapted to the first positioning groove. The first carrier frame is connected to the first moving mechanism 300, and the first loading assembly is placed on the first carrier frame. The first loading assembly is used to load the exposed part 800. The first carrier frame is provided with a first avoidance groove, and the first loading assembly is at least partially within the range of the first avoidance groove.

[0195] When the first lifting mechanism 212 or the second lifting mechanism 214 raises the first loading mechanism 400, the first lifting mechanism 212 or the second lifting mechanism 214 passes over the first carrying frame from the first avoidance groove, thereby pushing the first loading assembly upward and away from the first carrying frame, so that the first loading assembly reaches a specified height.

[0196] When the first lifting mechanism 212 or the second lifting mechanism 214 lowers the first loading mechanism 400, the first lifting mechanism 212 or the second lifting mechanism 214 drives the first loading assembly to move downward, and then under the guidance of the first positioning protrusion, the first loading assembly reaches the first carrying frame. Through the cooperation between the first positioning protrusion and the first positioning groove, the first loading assembly maintains the same relative position with the first loading frame after reaching the first carrying frame, thereby ensuring the position repeatability accuracy of the first loading assembly.

[0197] By designing the first transport frame and the first loading assembly separately, the first loading mechanism 400 is always connected to the first moving mechanism 300 during the rising or falling process, thereby ensuring the repeatability of the position of the part to be exposed 800, improving the exposure performance of the exposure device 200, and improving the exposure effect of the exposure device 200 on the part to be exposed 800.

[0198] In some embodiments of the present application, the second loading mechanism 500 includes a second carrier frame and a second loading assembly. The second carrier frame is provided with a second positioning protrusion, and the second device assembly is provided with a second positioning groove. The second positioning protrusion is adapted to the second positioning groove. The second carrier frame is connected to the first moving mechanism 300, and the second loading assembly is placed on the second carrier frame. The second loading assembly is used to load the exposed piece 800. The second carrier frame is provided with a second avoidance groove, and the second loading assembly is at least partially within the range of the second avoidance groove.

[0199] When the first lifting mechanism 212 or the second lifting mechanism 214 raises the second loading mechanism 500, the first lifting mechanism 212 or the second lifting mechanism 214 passes over the second carrying frame from the second avoidance groove, thereby pushing the second loading assembly upward and away from the second carrying frame, so that the second loading assembly reaches a specified height.

[0200] When the first lifting mechanism 212 or the second lifting mechanism 214 lowers the second loading mechanism 500, the first lifting mechanism 212 or the second lifting mechanism 214 drives the second loading assembly to move downward, and then under the guidance of the second positioning protrusion, the second loading assembly reaches the second carrying frame. Through the cooperation between the second positioning protrusion and the second positioning groove, the second loading assembly maintains the same relative position with the second loading frame after reaching the second carrying frame, thereby ensuring the position repeatability accuracy of the second loading assembly.

[0201] By designing the second transport frame and the second loading assembly separately, the second loading mechanism 500 is always connected to the first moving mechanism 300 during the rising or falling process, thereby ensuring the repeatability of the position of the part to be exposed 800, improving the exposure performance of the exposure device 200, and improving the exposure effect of the exposure device 200 on the part to be exposed 800.

[0202] See also Figures 1 to 3 In some embodiments of the present application, the number of the transport mechanisms 600 is two, and the transport mechanisms 600 are arranged side by side.

[0203] When the first loading mechanism 400 or the second loading mechanism 500 arrives at the first working area 211, one of the transport mechanisms 600 takes the exposed workpiece 800 from the first loading mechanism 400 or the second loading mechanism 500. At this time, the other transport mechanism 600 brings the unexposed workpiece 800 to the first working area 211. Then, one of the transport mechanisms 600 is provided to complete the unloading work, and the other transport mechanism 600 is used to complete the loading work, so that the loading action and the unloading action have a long overlapping time. In this way, the workpiece 800 to be exposed is loaded and unloaded by two transport mechanisms 600, which improves the handling efficiency of the workpiece 800 to be exposed, and further improves the working efficiency of the exposure device 200.

[0204] In some embodiments of the present application, the transport mechanism 600 includes a first pick-and-place device 620 and a fourth moving mechanism 610. The first pick-and-place device 620 is provided with a first material picking assembly 630, which is used to pick and place the exposed component 800. The fourth moving mechanism 610 is used to drive the first pick-and-place device 620 to move.

[0205] The first pick-and-place device 620 is driven to move by the fourth moving mechanism 610 , so that the first pick-and-place device 620 is moved close to or away from the first working area 211 , so that the first pick-and-place device 620 can pick up and place the to-be-exposed component 800 in the first working area 211 .

[0206] In some embodiments of the present application, the first material picking assembly 630 may include a vacuum suction cup assembly, and the vacuum suction cup assembly sucks the workpiece 800 to be exposed, so that the first picking and placing device 620 can pick and place the workpiece 800 to be exposed.

[0207] See also Figure 1 to Figure 2 In some embodiments of the present application, the fourth moving mechanism 610 may include a two-axis moving device. The two-axis moving device may be a device in which two electric screw drive assemblies are arranged vertically, so that the fourth moving mechanism 610 can drive the first pick-and-place device 620 to move in the up-down direction and the left-right direction.

[0208] When the first pick-and-place device 620 moves up and down, the first pick-and-place device 620 approaches or moves away from the first working area 211 in the vertical direction, so that the first pick-and-place device 620 can take out the to-be-exposed workpiece 800 from the first loading mechanism 400 or the second loading mechanism 500. When the first pick-and-place device 620 moves left and right, the first pick-and-place device 620 approaches or moves away from the first working area 211 in the horizontal direction, so that the transport mechanism 600 can move the to-be-exposed workpiece 800 into or out of the first working area 211. In this way, the transport mechanism 600 can drive the to-be-exposed workpiece 800 to move through the fourth moving mechanism 610, so as to complete the loading and unloading of the to-be-exposed workpiece 800.

[0209] In some embodiments of the present application, the transport mechanism 600 further includes a first rotating device 640. The first rotating device 640 is installed at the power output end of the fourth moving mechanism 610, and the first rotating device 640 is used to drive the first pick-up and placement device 620 to rotate. The first rotating device 640 rotates the first pick-up and placement device 620 so that the first material picking assembly 630 faces the adjacent transport mechanism 600, so that the adjacent transport mechanisms 600 can pick up the exposed parts 800 from each other.

[0210] When one of the first loading mechanism 400 and the second loading mechanism 500 arrives at the first working area 211 from the second working area 213, one of the transport mechanisms 600 absorbs the object 800 to be exposed from one side of the object 800 to be exposed, and then takes out the object 800 to be exposed from the first working area 211, and drives the first pick-and-place device 620 to rotate through the first rotating device 640, so that the taken-out object 800 to be exposed faces the other transport mechanism 600. The other transport mechanism 600 approaches the object 800 to be exposed, and absorbs the object 800 to be exposed from the other side of the object 800 to be exposed, so as to take the object 800 to be exposed from the adjacent transport mechanism 600, and then the first rotating device 640 of the transport mechanism 600 rotates to make the object 800 to be exposed horizontal, and then puts the object 800 to be exposed into the first working area 211. In this way, the turning over of the object 800 to be exposed is completed. After the workpiece 800 to be exposed is turned over, the first loading mechanism 400 or the second loading mechanism 500 of the blank material moves out of the first working area 211. When the other of the first loading mechanism 400 and the second loading mechanism 500 arrives at the first working area 211 from the second working area 213, the transport mechanism 600 of the blank material takes out the workpiece 800 to be exposed from the first working area 211, and the transport mechanism 600 loaded with the turned-over workpiece 800 to be exposed puts the turned-over workpiece 800 to be exposed into the first working area 211. The first loading mechanism 400 or the second loading mechanism 500 brings the turned-over workpiece 800 to be exposed to the second working area 213, and then exposes the other side of the workpiece 800 to be exposed. In this way, the double-sided exposure of the workpiece 800 to be exposed is completed by the exposure device 200.

[0211] In some embodiments of the present application, after the transport mechanism 600 turns over the workpiece 800 to be exposed, the turned over workpiece 800 to be exposed can also be placed into the original loading mechanism, and the turned over workpiece 800 to be exposed can be driven by the original loading mechanism to reach the second working area 213, so that the exposure equipment 200 completes double-sided exposure of the workpiece 800 to be exposed.

[0212] In some embodiments of the present application, the transport mechanism 600 includes a first transport component and a second transport component.

[0213] The first transport assembly includes a first pick-and-place assembly, a first rotating assembly, and a first moving assembly. The first pick-and-place assembly is provided with a first vacuum suction cup device, and the first vacuum suction cup device is used to pick up and place the exposed workpiece 800. The first moving assembly is used to drive the first transport assembly to move. The first rotating assembly is installed at the power output end of the first moving assembly, and the first rotating assembly is used to drive the first vacuum suction cup device to rotate.

[0214] The second transport assembly includes a second pick-and-place assembly, a second rotating assembly, and a second moving assembly. The second pick-and-place assembly is provided with a second vacuum suction cup device, and the second vacuum suction cup device is used to pick up and place the exposed part 800. The second moving assembly is used to drive the second transport assembly to move. The second rotating assembly is installed at the power output end of the second moving assembly, and the second rotating assembly is used to drive the second vacuum suction cup device to rotate.

[0215] During the process of exposing the object to be exposed 800 , the first moving mechanism 300 drives the first loading mechanism 400 and the second loading mechanism 500 to operate alternately between the first working area 211 and the second working area 213 .

[0216] When the first loading mechanism 400 loaded with the first exposed workpiece arrives at the first working area 211, the first moving assembly drives the first pick-and-place assembly to move to the top of the first working area 211, and sucks the first exposed workpiece through the first vacuum suction cup device. The first moving assembly drives the first vacuum suction cup device sucking the first exposed workpiece to rise to a specified height, and the first rotating assembly drives the first vacuum suction cup device to rotate, so that the exposed workpiece 800 faces the second transport assembly.

[0217] The second rotating assembly drives the second vacuum suction cup device to rotate so that the second vacuum suction cup device faces the first exposed part to be exposed. The second moving assembly drives the second pick-and-place assembly to approach the first exposed part to be exposed so that the second vacuum suction cup device can absorb the first exposed part to be exposed from the first vacuum suction cup device. After the second vacuum suction cup device absorbs the first exposed part to be exposed, the second rotating assembly drives the vacuum suction cup device to rotate so that the first exposed part to be exposed rotates to a horizontal position. At this time, the first transport assembly is empty, the second transport assembly is loaded with the turned-over first part to be exposed, and the first loading mechanism 400 is empty. The empty first loading mechanism 400 moves out of the first working area 211.

[0218] When the second loading mechanism 500 loaded with the second workpiece to be exposed after exposure arrives at the first working area 211, since the first transport assembly is empty at this time and the second transport assembly is loaded with the flipped first workpiece to be exposed, the first transport assembly takes out the second workpiece to be exposed after exposure from the second loading mechanism 500 to make the second loading mechanism 500 empty. The second transport assembly puts the flipped first workpiece to be exposed into the empty second loading mechanism 500. In this way, the flipping of the workpiece to be exposed 800 is completed, so that the exposure device 200 can perform double-sided exposure of the workpiece to be exposed 800.

[0219] If the status of the second piece to be exposed is that double-sided exposure has been completed, the first conveying component unloads the second piece to be exposed; if the second piece to be exposed has only completed exposure on one side, the second piece to be exposed is turned over in the same manner as the first piece to be exposed, and the first loading mechanism 400 for empty materials is moved into the first working area 211, and then the turned over second piece to be exposed is placed in the first loading mechanism 400 through the second conveying component.

[0220] In some embodiments of the present application, after the exposed workpiece 800 is turned over, the turned over workpiece 800 can be directly placed in the original loading mechanism, and the turned over workpiece 800 is driven by the original loading mechanism to reach the second working area 213, so that the exposure device 200 completes the double-sided exposure of the workpiece 800.

[0221] Embodiment 4

[0222] See also Figure 8 In some embodiments of the present application, the present application further provides a double-sided exposure machine 100, comprising an exposure device 200 and a flip mechanism 700 provided in the present application. The number of exposure devices 200 is at least two, and the exposure devices 200 are arranged side by side. The flip mechanism 700 is used to take and place the to-be-exposed workpiece 800 in the first working area 211, and drive the to-be-exposed workpiece 800 to move or rotate, and the movement range of the flip mechanism 700 at least spans two exposure devices 200.

[0223] The workpiece 800 to be exposed is exposed by the exposure device 200, and the workpiece 800 to be exposed is transported between the exposure devices 200 or loaded and unloaded by the flipping mechanism 700. When the flipping mechanism 700 transports the workpiece 800 to be exposed between the exposure devices 200, the workpiece 800 to be exposed is flipped by the flipping mechanism 700, and then the two sides of the workpiece 800 to be exposed are exposed by different exposure devices 200.

[0224] The working efficiency of the exposure machine 100 is improved by the coordinated operation of the multiple exposure devices 200 .

[0225] During the operation of the exposure device 200 , the first loading mechanism 400 and the second loading mechanism 500 are used to load the exposed object 800 . The first moving mechanism 300 drives the first loading mechanism 400 and the second loading mechanism 500 to move between the first working area 211 and the second working area 213 .

[0226] When the first loading mechanism 400 arrives at the first working area 211, the workpiece 800 to be exposed is loaded onto the first loading mechanism 400. After the first moving mechanism 300 loads the workpiece 800 to be exposed, the first moving mechanism 300 drives the first moving mechanism 300 to move to the second working area 213, and positions the workpiece 800 to be exposed through the positioning mechanism 230 to ensure the exposure effect of the workpiece 800 to be exposed. By installing the positioning mechanism 230 on the mounting seat assembly 220, the reliability and effectiveness of the positioning function of the positioning mechanism 230 are improved, and the positioning accuracy is ensured. At the same time, the first moving mechanism 300 drives the second loading mechanism 500 to enter the first working area 211, so that the second loading mechanism 500 loads the workpiece 800 to be exposed in the first working area 211.

[0227] After the exposure workpiece 800 loaded by the first loading mechanism 400 is completed in the second working area 213, the first moving mechanism 300 drives the first loading mechanism 400 to move toward the first working area 211. At the same time, the first moving mechanism 300 drives the second loading mechanism 500 loaded with unexposed exposure workpiece 800 to move to the second working area 213.

[0228] When the first loading mechanism 400 reaches the first working area 211, it unloads the exposed workpiece 800 and loads the exposed workpiece 800. When the second loading mechanism 500 reaches the second working area 213, it exposes the workpiece 800 in the second loading mechanism 500 in the second working area 213.

[0229] By arranging the first loading mechanism 400 and the second loading mechanism 500 in upper and lower layers, it is avoided that the movement trajectories of the first loading mechanism 400 and the second loading mechanism 500 do not interfere with each other.

[0230] In this way, the loading and unloading and exposure of the workpiece 800 to be exposed can be performed synchronously through the alternating operation of the first loading mechanism 400 and the second loading mechanism 500 , thereby improving the production efficiency of the exposure device 200 .

[0231] In some embodiments of the present application, the number of the flipping mechanisms 700 is at least two, and the flipping mechanisms 700 are arranged side by side along the arrangement direction of the exposure device 200 .

[0232] The workpiece 800 to be exposed is transferred between the exposure devices 200 by at least two flipping mechanisms 700 , thereby improving the working efficiency of the exposure machine 100 .

[0233] See also Figure 8 In some embodiments of the present application, the number of the flipping mechanisms 700 is two.

[0234] When the first loading mechanism 400 or the second loading mechanism 500 arrives at the first working area 211, one of the flipping mechanisms 700 takes the exposed workpiece 800 from the first loading mechanism 400 or the second loading mechanism 500, and at this time, the other flipping mechanism 700 brings the unexposed workpiece 800 to the first working area 211. Then, one of the flipping mechanisms 700 is provided to complete the unloading work, and the other flipping mechanism 700 is used to complete the loading work, so that the loading action and the unloading action have a long overlapping time. In this way, the workpiece 800 to be exposed is loaded and unloaded by two flipping mechanisms 700, which improves the handling efficiency of the workpiece 800 to be exposed, and further improves the working efficiency of the exposure device 200.

[0235] In some embodiments of the present application, the flip mechanism 700 includes a second pick-and-place device 710 and a fifth moving mechanism 730. The second pick-and-place device 710 is used to pick-and-place the exposed member 800. The fifth moving mechanism 730 is used to drive the second pick-and-place device 710 to move between at least adjacent exposure devices 200.

[0236] The second pick-and-place device 710 is driven to move between the exposure devices 200 by the fifth moving mechanism 730 , so that the second pick-and-place device 710 can pick up and place the to-be-exposed component 800 in the first working area 211 of each exposure device 200 .

[0237] In some embodiments of the present application, the second picking component 720 may include a vacuum suction cup component, which sucks the to-be-exposed workpiece 800 , thereby enabling the second picking and placing device 710 to pick and place the to-be-exposed workpiece 800 .

[0238] In some embodiments of the present application, the fifth moving mechanism 730 may include a two-axis moving device. The two-axis moving device may be a device with two electric screw drive assemblies arranged vertically, so that the fifth moving mechanism 730 can drive the second pick-and-place device 710 to move in the up-down direction and the left-right direction.

[0239] When the second pick-and-place device 710 moves up and down, the second pick-and-place device 710 approaches or moves away from the first working area 211 in the vertical direction, so that the second pick-and-place device 710 can take out the to-be-exposed piece 800 from the first loading mechanism 400 or the second loading mechanism 500. When the second pick-and-place device 710 moves left and right, the second pick-and-place device 710 approaches or moves away from the first working area 211 in the horizontal direction, so that the flipping mechanism 700 can move the to-be-exposed piece 800 into or out of the first working area 211. In this way, the flipping mechanism 700 can drive the to-be-exposed piece 800 to move through the fifth moving mechanism 730, so as to complete the loading and unloading of the to-be-exposed piece 800.

[0240] In some embodiments of the present application, the flipping mechanism 700 further includes a second rotating device 740. The second rotating device 740 is installed at the power output end of the fifth moving mechanism 730, and the second rotating device 740 is used to drive the second pick-up and placement device 710 to rotate. The second pick-up and placement device 710 is provided with a second material picking assembly 720, and the second material picking assembly 720 is used to pick up materials from the to-be-exposed part 800. The second rotating device 740 rotates the second pick-up and placement device 710 so that the second material picking assembly 720 faces the adjacent flipping mechanism 700, so that the adjacent flipping mechanisms 700 can pick up materials from each other for the to-be-exposed part 800.

[0241] When one of the first loading mechanism 400 and the second loading mechanism 500 arrives at the first working area 211 from the second working area 213, one of the flipping mechanisms 700 sucks the object 800 to be exposed from one side of the object 800 to be exposed, and then takes out the object 800 to be exposed from the first working area 211, and drives the second pick-and-place device 710 to rotate through the second rotating device 740, so that the taken-out object 800 to be exposed faces the other flipping mechanism 700. The other flipping mechanism 700 approaches the object 800 to be exposed, and sucks the object 800 to be exposed from the other side of the object 800 to be exposed, so as to take the object 800 to be exposed from the flipping mechanism 700 adjacent thereto, and then the second rotating device 740 of the flipping mechanism 700 rotates to make the object 800 to be exposed horizontal, and then puts the object 800 to be exposed into the first working area 211. In this way, the flipping of the object 800 to be exposed is completed.

[0242] After the workpiece 800 to be exposed is turned over, the other turning mechanism 700 drives the turned workpiece 800 to move to the nearest exposure device 200, and the first working area 211 of the exposure device 200 has a second loading mechanism 500 of an empty material. Then, the other turning mechanism 700 puts the turned workpiece 800 to be exposed into the second loading mechanism 500 of the empty material, and the turned workpiece 800 to be exposed is exposed by the exposure device 200 of the second loading mechanism 500. In this way, the double-sided exposure of the workpiece 800 to be exposed is completed.

[0243] In some embodiments of the present application, at least adjacent exposure devices 200 share a frame, so that the exposure devices 200 form a whole, thereby ensuring the stability of the structure of the exposure machine 100.

[0244] In some embodiments of the present application, at least adjacent exposure devices 200 share a visual mechanism 240 and an exposure mechanism 250. The visual mechanism 240 and the exposure mechanism are driven to move between the exposure devices 200 by a powered moving shaft, thereby improving the utilization of the visual mechanism 240 and the exposure mechanism 250 and reducing production costs.

[0245] The production rhythm of loading and unloading, turning over, visual inspection and exposure of the exposed part 800 can be set so that each process of the exposed part 800 can be carried out simultaneously, thereby improving production efficiency.

[0246] In the description of this specification, the description with reference to the terms "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiments or examples are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0247] In addition, the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modification, equivalent replacement and improvement made within the spirit and principle of the present invention shall be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A fully automatic exposure device, characterized in that: include: A device body, wherein the device body is provided with a first working area and a second working area; a first moving mechanism, the first moving mechanism being mounted on the device body; a first loading mechanism, the first loading mechanism being connected to the first moving mechanism; a second loading mechanism, the second loading mechanism being connected to the first moving mechanism; A transport mechanism, the transport mechanism is arranged in the first working area, and the transport mechanism is used to load or unload the workpiece to be exposed in the first working area; Wherein, the first loading mechanism and the second loading mechanism are both used for loading the workpiece to be exposed; The first moving mechanism drives at least one of the first loading mechanism and the second loading mechanism to move between the first working area and the second working area; The height of the moving path of the first loading mechanism between the first working area and the second working area is higher than the height of the moving path of the second loading mechanism between the first working area and the second working area; The first loading mechanism includes a first carrier platform, a first lifting device and a first loading platform; the first lifting device is used to drive the first loading platform to rise or fall; The second loading mechanism comprises: a second carrier platform, a second lifting device and a second loading platform; the second lifting device is used to drive the second loading platform to rise or fall; The positioning mechanism includes an adjusting device and a positioning assembly; the first loading mechanism and the second loading mechanism are both provided with positioning members, and the positioning members are located on both sides of the first loading mechanism and the second loading mechanism; the adjusting device is used to adjust the distance between the positioning assembly and the positioning member; When the first loading mechanism reaches the second working area, the first loading platform is raised by the first lifting device. In the process that the positioning members on both sides of the first loading platform abut against the positioning assembly, the positioning members are guided and positioned from both sides of the positioning members by the guide surface, so that the first loading mechanism is positioned in the height direction by the positioning mechanism and is also positioned from both sides. Similarly, when the second loading mechanism reaches the second working area, the second loading platform is raised by the second lifting device. When the positioning members on both sides of the second loading platform abut against the positioning assembly, the positioning members are guided and positioned from both sides of the positioning members by the guide surfaces. Thus, the second loading mechanism is positioned in the height direction by the positioning mechanism, and is also positioned from both sides. The second working area is provided with: A visual mechanism, the visual mechanism is arranged in the second working area, and the visual mechanism is used to obtain image information of the workpiece to be exposed; An exposure mechanism, the exposure mechanism is arranged in the second working area, and the exposure mechanism is used to expose the workpiece to be exposed; The visual mechanism comprises: a second moving mechanism, the second moving mechanism being mounted on the device body; A visual component, the visual component is installed at the power output end of the second moving mechanism; Wherein, the second moving mechanism drives the visual component to move so that the visual component obtains image information of each part of the object to be exposed; The exposure mechanism comprises: a third moving mechanism, the third moving mechanism being installed on the device body; An exposure assembly, the exposure assembly being mounted on a power output end of the third moving mechanism; The third moving mechanism drives the exposure assembly to move, so that the exposure assembly completes the exposure of the workpiece to be exposed.

2. The fully automatic exposure device according to claim 1, characterized in that: The first moving mechanism comprises: A driving device, the driving device is installed on the device body; A transmission device, the transmission device is installed at the power output end of the driving device, the driving device drives the transmission device to operate, one end of the transmission device extends at least to the first working area, and the other end of the transmission device extends at least to the second working area; Wherein, the first loading mechanism and the second loading mechanism are both connected to the transmission device, so that the moving direction of the first loading mechanism is opposite to the moving direction of the second loading mechanism.

3. The fully automatic exposure device according to claim 1, characterized in that: The first working area is provided with a first lifting mechanism, and the first lifting mechanism is used to raise or lower the first loading mechanism or the second loading mechanism located in the first working area.

4. The fully automatic exposure device according to claim 1, characterized in that: The second working area is provided with a second lifting mechanism, and the second lifting mechanism is used to raise or lower the to-be-exposed object located in the second working area.

5. The fully automatic exposure device according to claim 1, characterized in that: The number of the transport mechanisms is two, and the transport mechanisms are arranged side by side.

6. The fully automatic exposure device according to claim 5, characterized in that: The transport mechanism includes: A first pick-and-place device, wherein the first pick-and-place device is provided with a first material picking component, and the first material picking component is used to pick and place the to-be-exposed object; A fourth moving mechanism, wherein the fourth moving mechanism is used to drive the first picking and placing device to move.

7. The fully automatic exposure device according to claim 6, characterized in that: The transport mechanism also includes: A first rotating device, the first rotating device is installed at the power output end of the fourth moving mechanism, and the first rotating device is used to drive the first picking and placing device to rotate; The first rotating device rotates the first picking and placing device so that the first picking component faces the adjacent conveying mechanism, so that the adjacent conveying mechanisms can pick up the to-be-exposed parts from each other.

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