A hydrogen mass spectrometry leak detection system and leak detection method

Abstract

The present invention relates to the field of vacuum leak detection technology, and its purpose is to provide a hydrogen mass spectrometry leak detection system and a leak detection method. This hydrogen mass spectrometry leak detection system uses hydrogen as a leak detection gas, but can reduce the hydrogen ion background and improve the detection accuracy. The above-mentioned hydrogen mass spectrometry leak detection system includes: a leak detection port, a mass spectrometry leak detection module, a front pump and an adsorption module; the mass spectrometry leak detection module is connected to the leak detection port through a first pipeline; the front pump is connected to the mass spectrometry leak detection module through a second pipeline, and the front pump is connected to the leak detection port through a third pipeline; the adsorption module includes: a first adsorption device arranged on the first pipeline, a second adsorption device arranged on the second pipeline, and a third adsorption device arranged on the gas path of the mass spectrometry leak detection module. The present invention solves the problem that when the helium mass spectrometer leak detector in the prior art uses hydrogen as a leak detection gas, it is affected by gases such as water vapor, which will increase the hydrogen ion background and reduce the detection accuracy.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum leak detection, and in particular to a hydrogen mass spectrometry leak detection system and a leak detection method. Background Art

[0002] Helium mass spectrometer leak detector uses helium or hydrogen as leak detector gas, sprays the leak detector gas onto the container to be tested which is connected to a gas analyzer (adjusted to the working state that it only reacts to leak detector gas). If there is a leak in the container, the analyzer will react, so the location of the leak and the amount of leakage can be known. Helium has low background noise, small molecular weight and viscosity coefficient, so it is easy to pass through the leak and diffuse, and helium is an inert gas that will not corrode equipment, so helium is often used as leak detector gas. The process of using helium as the leak indicator gas for leak detection is as follows: first, helium is supplied to the leak detector to mix with the gas leaking from the device being tested. The leak detector extracts the mixed gas from the device being tested through the molecular pump of the vacuum system. Since helium molecules have a strong reverse diffusion effect in the molecular pump, the molecular pump can selectively pass helium molecules while also ensuring the vacuum degree of the mass spectrometer chamber. The helium molecules then enter the mass spectrometer chamber and are ionized by the ionization source. Finally, the mass-to-charge ratio (m / z) of the helium ions is detected by the mass spectrometer, and the leak location and size of the leak in the device being tested can be calculated and analyzed.

[0003] Due to the high cost of helium and the difficulty of preparing it, it is impossible to prepare it on-site in scenes such as ships, vehicles, and scientific research stations, and leak detection cannot be performed. Therefore, hydrogen is also used as a leak indicator gas. The process of using hydrogen as a leak indicator gas for leak detection is similar to the process of using helium as a leak indicator gas for leak detection, and the purpose of leak detection can also be achieved. However, when using hydrogen as a leak indicator gas, hydrogen will be mixed with various gases (such as air) to reduce the concentration of hydrogen to a safe range before it can be used as a leak indicator gas. In addition, when the vacuum system is evacuated, it will also be affected by the atmospheric environment. For example, water vapor and other gases enter the mass spectrometer chamber, and gases such as water vapor and air contain hydrogen ions, so the hydrogen ion background will be increased, thereby affecting the measurement accuracy. Summary of the invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defect that when the helium mass spectrometer leak detector in the prior art uses hydrogen as the leak indicating gas, it is affected by gases such as water vapor, which will increase the hydrogen ion background and reduce the detection accuracy, thereby providing a hydrogen mass spectrometer leak detection system and leak detection method that uses hydrogen as the leak indicating gas but can reduce the hydrogen ion background and improve the detection accuracy.

[0005] In order to solve the above problems, the present invention provides a hydrogen mass spectrometry leak detection system, comprising:

[0006] Leak detection port;

[0007] A mass spectrometer leak detection module, wherein the mass spectrometer leak detection module is connected to the leak detection port through a first pipeline;

[0008] A fore-stage pump, wherein the fore-stage pump is connected to the mass spectrometer leak detection module via a second pipeline, and the fore-stage pump is connected to the leak detection port via a third pipeline;

[0009] The adsorption module comprises: a first adsorption device arranged on the first pipeline, a second adsorption device arranged on the second pipeline, and a third adsorption device arranged on the gas path of the mass spectrometer leak detection module.

[0010] Optionally, the first adsorption device, the second adsorption device and the third adsorption device are all condensation adsorption pumps, and the adsorption module further includes a refrigeration device, which is connected to the first adsorption device, the second adsorption device and the third adsorption device and cools them.

[0011] Optionally, a heating module is further included, and the heating module includes heaters respectively arranged at the first adsorption device, the second adsorption device and the third adsorption device.

[0012] Optionally, the mass spectrometer leak detection module includes a valve group, a molecular pump and a mass spectrometer chamber connected in sequence, two ends of the valve group are respectively connected to the first pipeline and the second pipeline, and the mass spectrometer chamber is connected to the gas circuit of the mass spectrometer leak detection module.

[0013] Optionally, a fourth pipeline and a fifth pipeline are also included, the fourth pipeline is connected to the leak detection port and the first pipeline between the mass spectrometer leak detection module and the first adsorption device, and the fifth pipeline is connected to the third pipeline and the second pipeline between the mass spectrometer leak detection module and the second adsorption device.

[0014] Optionally, the hydrogen mass spectrometry leak detection system also includes a control valve assembly, which includes: a first control valve and a second control valve respectively arranged at both ends of the first adsorption device, a third control valve and a fourth control valve arranged at both ends of the second adsorption device, a fifth control valve arranged on the third pipeline, a sixth control valve arranged on the gas path of the mass spectrometry leak detection module, a seventh control valve arranged on the fourth pipeline, and an eighth control valve arranged on the fifth pipeline.

[0015] Optionally, the hydrogen mass spectrometry leak detection system further includes a control module, which is electrically connected to the mass spectrometry leak detection module, the adsorption module, the heating module and the control valve assembly.

[0016] A hydrogen mass spectrometry leak detection method, applied to the hydrogen mass spectrometry leak detection system, comprises the following steps:

[0017] Pre-extraction step: the interfering gas enters the mass spectrometer leak detection module through the adsorption module adsorption leak detection port, the fore pump reverse diffusion and the mass spectrometer leak detection module gas path;

[0018] In the detection step, the gas to be detected passes through the leak detection port, the first adsorption device, the mass spectrometer leak detection module, the second adsorption device and the front pump in sequence and is detected.

[0019] Optionally, the pre-extraction step includes:

[0020] The first pre-pumping step: pumping air from the leak detection port through the fore pump;

[0021] A second pre-pumping step: evacuating the mass spectrometer leak detection module by using the fore pump;

[0022] The third pre-pumping step: adsorbing the interfering gas entering the mass spectrometer leak detection module from the leak detection port by the first adsorption device, and adsorbing the interfering gas entering the mass spectrometer leak detection module by reverse diffusion of the fore-stage pump by the second adsorption device.

[0023] Optionally, the hydrogen mass spectrometry leak detection method further includes a maintenance step: the heater is started to heat the first adsorption device, the second adsorption device and the third adsorption device.

[0024] The present invention has the following advantages:

[0025] 1. The hydrogen mass spectrometry leak detection system provided by the present invention comprises: a leak detection port, a mass spectrometry leak detection module, a pre-stage pump and an adsorption module. The mass spectrometry leak detection module is connected to the leak detection port through a first pipeline; the pre-stage pump is connected to the mass spectrometry leak detection module through a second pipeline, and the pre-stage pump is connected to the leak detection port through a third pipeline; the adsorption module comprises: a first adsorption device arranged on the first pipeline, a second adsorption device arranged on the second pipeline, and a third adsorption device arranged on the gas path of the mass spectrometry leak detection module. The leak-indicating gas with hydrogen as the main component is combined with the gas leaked from the equipment to be inspected as a mixed gas and enters from the leak detection port, and is detected and analyzed by the mass spectrometry leak detection module. By arranging the first adsorption device, the second adsorption device and the third adsorption device, the interfering gas (such as water vapor, etc.) appearing in all channels connected to the mass spectrometry leak detection module and the outside during the detection process can be adsorbed, thereby reducing the hydrogen ion background in the mass spectrometry leak detection module and improving the detection accuracy.

[0026] 2. The hydrogen mass spectrometry leak detection system provided by the present invention, the adsorption module includes a first adsorption device, a second adsorption device, a third adsorption device and a refrigeration device, the first adsorption device, the second adsorption device and the third adsorption device are preferably a condensation adsorption pump, and the refrigeration device is connected to the first adsorption device, the second adsorption device and the third adsorption device for refrigerating the condensation adsorption pump. The working temperature of the condensation adsorption pump is at the normal cooling temperature (above 150K), and the molecular sieve of the condensation adsorption pump can absorb a large amount of air under normal cooling conditions and can screen molecules of different sizes to selectively adsorb the interfering gas, and the adsorption effect is good.

[0027] 3. The hydrogen mass spectrometry leak detection system provided by the present invention also includes a heating module, and the heating module includes heaters arranged at the first adsorption device, the second adsorption device and the third adsorption device. When the molecular sieve of the condensation adsorption pump is saturated with absorption, it will be inactivated and thus cannot continue to perform adsorption work. By arranging a heater to heat the molecular sieve, the molecular sieve can then discharge the adsorbed gas through the mass spectrometry leak detection module, thereby realizing the recycling of the condensation adsorption pump.

[0028] 4. The hydrogen mass spectrometry leak detection method provided by the present invention includes a pre-pumping step and a detection step. The pre-pumping step can adsorb the interfering gas that is reverse diffused into the mass spectrometry leak detection module from the leak detection port and the front pump, thereby reducing the hydrogen ion background during detection and improving the detection accuracy.

[0029] 5. The hydrogen mass spectrometry leak detection method provided by the present invention further includes a maintenance step, wherein the maintenance step reactivates the first adsorption device, the second adsorption device and the third adsorption device by starting the heater, so that the adsorbed interfering gas is desorbed and discharged, and then adsorbed again. The cyclic operation of the hydrogen mass spectrometry leak detection system is realized, and the working efficiency is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0031] Figure 1 It is a schematic diagram of the hydrogen mass spectrometry leak detection system of the present invention.

[0032] Description of reference numerals:

[0033] 1. Leak detection port;

[0034] 2. Mass spectrometer leak detection module, 201, valve group, 202, molecular pump, 203, mass spectrometer room;

[0035] 3. The first pipeline;

[0036] 4. Fore pump;

[0037] 5. Second pipeline;

[0038] 6. The third pipeline;

[0039] 701, a first adsorption device, 702, a second adsorption device, 703, a third adsorption device;

[0040] 8. Gas path of mass spectrometer leak detection module;

[0041] 9. Refrigeration equipment;

[0042] 10. Heater;

[0043] 11. Fourth pipeline;

[0044] 12. Fifth pipeline;

[0045] 1301, a first control valve, 1302, a second control valve, 1303, a third control valve, 1304, a fourth control valve, 1305, a fifth control valve, 1306, a sixth control valve, 1307, a seventh control valve, 1308, an eighth control valve. DETAILED DESCRIPTION

[0046] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0047] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0048] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0049] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0050] like Figure 1 As shown, it is a preferred embodiment of the hydrogen mass spectrometry leak detection system of the present invention, and the hydrogen mass spectrometry leak detection system includes: a leak detection port 1, a mass spectrometry leak detection module 2, a pre-stage pump 4 and an adsorption module. The mixed gas to be detected enters the system from the leak detection port 1. The mass spectrometry leak detection module 2 is connected to the leak detection port 1 through the first pipeline 3, the pre-stage pump 4 is connected to the mass spectrometry leak detection module 2 through the second pipeline 5, and the pre-stage pump 4 is also connected to the leak detection port 1 through the third pipeline 6. The adsorption module includes: a first adsorption device 701 arranged on the first pipeline 3, a second adsorption device 702 arranged on the second pipeline 5, and a third adsorption device 703 arranged on the gas path 8 of the mass spectrometry leak detection module. The mixed gas to be detected is a mixture of a leak-indicating gas with hydrogen as the main component and a gas leaked from the equipment to be detected. The mixed gas to be detected enters the mass spectrometry leak detection module 2 from the leak detection port 1 for detection, and the leakage position of the equipment to be detected and the size of the leakage can be known. The front stage pump 4 is used for vacuuming and is used as the front stage of multi-stage vacuum, and can exhaust the gas at the mass spectrometer leak detection module 2 into the atmosphere. Since the first adsorption device 701 is arranged on the first pipeline 3 connecting the mass spectrometer leak detection module 2 and the leak detection port 1, the second adsorption device 702 is arranged on the second pipeline 5 connecting the mass spectrometer leak detection module 2 and the front stage pump 4, and the third adsorption device 703 is arranged on the mass spectrometer leak detection module gas path 8 for supplying gas to the mass spectrometer leak detection module 2, it is equivalent to arranging adsorption devices at all the connection ports connecting the mass spectrometer leak detection module 2 with the outside, which can adsorb the interfering gas (such as water vapor) containing hydrogen ions entering the mass spectrometer leak detection module 2, reduce the hydrogen ion background in the mass spectrometer leak detection module 2, and improve the detection accuracy.

[0051] The first adsorption device 701, the second adsorption device 702 and the third adsorption device 703 are all condensation adsorption pumps. The condensation adsorption pump is an adsorption pump that uses an internal molecular sieve to adsorb condensed substances at a working temperature of ordinary cold temperature (above 150K). The molecular sieve is a synthetic zeolite. Its raw material is generally white crystalline powder with a particle size in the range of 1 to 10 μm. The granular or spherical molecular sieves used in actual applications are processed and formed by adding argon as an adhesive to the original powder. The molecular sieve can absorb a large amount of air at low temperatures, and only when the diameter of the gas molecules is smaller than the diameter of the micropores on the molecular sieve can they enter the interior of the molecular sieve, thereby separating certain substances of different molecular sizes and playing a screening role.

[0052] Furthermore, the adsorption module also includes a refrigeration device 9, which is connected to the first adsorption device 701, the second adsorption device 702 and the third adsorption device 703 and refrigerates them, so that the first adsorption device 701, the second adsorption device 702 and the third adsorption device 703 (condensation adsorption pump) are at a normal cooling working temperature to perform adsorption work. Specifically, in this embodiment, the refrigeration device 9 adopts a compression refrigerator, and the motor provides mechanical energy to the compressor, and the compressor works on the refrigeration system. The refrigeration system uses a low-boiling point refrigerant, absorbs vaporization heat during evaporation, and performs refrigeration, thereby reducing the internal temperature of the condensation adsorption pump to a normal cooling temperature (above 150K).

[0053] In other embodiments, the refrigeration device 9 may also be a semiconductor refrigeration sheet, which is composed of two ceramic sheets with N-type and P-type semiconductor materials in between. When a piece of N-type semiconductor material and a piece of P-type semiconductor material are connected to form an electric couple, energy transfer can be generated after a direct current is connected in this circuit. The current flows from the N-type element to the joint of the P-type element to absorb heat and become a cold end, and the current flows from the P-type element to the joint of the N-type element to release heat and become a hot end. When the cold end is connected to a condensation adsorption pump, refrigeration can be achieved.

[0054] Furthermore, the hydrogen mass spectrometry leak detection system also includes a heating module, and the heating module includes a heater 10 respectively arranged at the first adsorption device 701, the second adsorption device 702 and the third adsorption device 703, that is, each condensation adsorption pump is provided with a heater 10. Since the condensation adsorption pump will be saturated and inactivated after absorbing a large amount of gas, it is necessary to heat the condensation adsorption pump at this time so that the molecular sieve can desorb and discharge the adsorbed gas, and the condensation adsorption pump can resume normal adsorption work. Specifically, in this embodiment, the condensation adsorption pump is heated by electric heating, and the heater can be a heating rod, a heating plate, etc. The temperature inside the condensation adsorption pump is increased by the heater to reactivate the molecular sieve.

[0055] The mass spectrometer leak detection module 2 includes a valve group 201, a molecular pump 202 and a mass spectrometer chamber 203 connected in sequence. The valve group 201 controls the opening and closing of the inlet and outlet of the mass spectrometer leak detection module 2. The two ends of the valve group 201 are respectively connected to the first pipeline 3 and the second pipeline 5. The molecular pump 202 is used to extract the mixed gas from the leak detection port 1. The mass spectrometer chamber 203 is connected to the gas path 8 of the mass spectrometer leak detection module. The mass spectrometer chamber 203 is used to ionize the gas and analyze and detect the hydrogen ions to determine the leakage of the equipment to be detected.

[0056] The leak detection port 1 and the first pipeline 3 between the mass spectrometer leak detection module 2 and the first adsorption device 701 are connected through a fourth pipeline 11 , and the third pipeline 6 and the second pipeline 5 between the mass spectrometer leak detection module 2 and the second adsorption device 702 are connected through a fifth pipeline 12 .

[0057] The hydrogen mass spectrometry leak detection system also includes a control valve group 201, which includes: a first control valve 1301 and a second control valve 1302 respectively arranged at both ends of the first adsorption device 701, a third control valve 1303 and a fourth control valve 1304 arranged at both ends of the second adsorption device 702, a fifth control valve 1305 arranged on the third pipeline 6, a sixth control valve 1306 arranged on the gas line 8 of the mass spectrometry leak detection module, a seventh control valve 1307 arranged on the fourth pipeline 11, and an eighth control valve 1308 arranged on the fifth pipeline 12. The on-off of each pipeline is controlled by eight control valves to change different system states.

[0058] The hydrogen mass spectrometry leak detection system also includes a control module, which is electrically connected to the mass spectrometry leak detection module 2, the adsorption module, the heating module and the control valve group 201. The control module is used to remotely control the working state and corresponding working parameters of the mass spectrometry leak detection module 2, the adsorption module and the heating module, and also controls the opening and closing of each control valve in the control valve group 201, which can change the state of the system.

[0059] This embodiment further provides a hydrogen mass spectrometry leak detection method, which is applied to a hydrogen mass spectrometry leak detection system. The specific structure of the hydrogen mass spectrometry leak detection system is the same as that of the hydrogen mass spectrometry leak detection system described in the above embodiment, so it will not be described in detail.

[0060] The hydrogen mass spectrometry leak detection method includes a pre-extraction step and a detection step. The pre-extraction step is to reduce the hydrogen ion background in the system and reduce the error during detection. Therefore, the detection step can only be performed after the pre-extraction step is normal. Before the pre-extraction step, the power-on step and the standby step are required.

[0061] (1) Power-on steps

[0062] The system is powered on, and then the fore pump 4 is started, the eighth control valve 1308 is opened, and the mass spectrometer leak detection module 2 and the refrigeration device 9 are also started synchronously to cool the three condensation adsorption pumps so that the inside of the condensation adsorption pumps is at a normal cooling working temperature. Each device performs a self-test to check whether each device has any faults. After the condensation adsorption pump reaches the specified temperature, the sixth control valve 1306 is opened.

[0063] (2) Standby steps

[0064] When the startup is normal, the system executes the standby step, at which time the eighth control valve 1308 is closed, the third control valve 1303 and the fourth control valve 1304 are opened, and the three condensation adsorption pumps are started.

[0065] (3) Pre-extraction step

[0066] The pre-extraction step includes the following three steps:

[0067] ① The first pre-pumping step: evacuate the leak detection port 1 through the fore pump 4;

[0068] In the standby step, the leak detection port 1 is exposed to the atmosphere, and during detection, the leak detection port 1 needs to be in a vacuum state, so the leak detection port 1 needs to be evacuated by the front pump 4 to reduce the air pressure to a set vacuum degree (setting range 0.01Pa-100Pa).

[0069] In this step, the third control valve 1303 and the fourth control valve 1304 are closed, the fifth control valve 1305 is opened, and air is pumped through the fore-stage pump 4.

[0070] ② The second pre-pumping step: evacuating the mass spectrometer leak detection module 2 through the fore pump 4;

[0071] In the second pre-pumping step, the eighth control valve 1308 is opened, and the mass spectrometer leak detection module 2 is evacuated by the fore-stage pump 4 to reduce the air pressure to a set vacuum degree (setting range 0.01Pa-100Pa).

[0072] ③ The third pre-extraction step: the interfering gas entering the mass spectrometer leak detection module from the leak detection port is adsorbed by the first adsorption device, and the interfering gas entering the mass spectrometer leak detection module through reverse diffusion of the fore-stage pump is adsorbed by the second adsorption device.

[0073] In the third pre-extraction step, the first control valve 1301 and the second control valve 1302 are opened, and the gas at the leak detection port 1 is adsorbed by the first adsorption device 701 to adsorb the interfering gas containing hydrogen ions. The third control valve 1303 and the fourth control valve 1304 are opened synchronously, and the interfering gas that is reversely diffused into the mass spectrometer leak detection module 2 by the fore-stage pump 4 is adsorbed by the second adsorption device 702.

[0074] By performing three pre-extraction steps in sequence, the external gas passing through the mass spectrometer leak detection module 2 is adsorbed in advance, and the hydrogen ion background of the gas entering the mass spectrometer leak detection module 2 is reduced, thereby improving the accuracy of detection.

[0075] (4) Detection steps

[0076] The gas to be tested is sequentially passed through the leak detection port 1, the first adsorption device 701, the mass spectrometer leak detection module 2, the second adsorption device 702 and the front pump 4 for detection. The gas passes through the first adsorption device 701 and the second adsorption device 702 to adsorb the interfering gas containing hydrogen ions, reduce the hydrogen ion background in the mass spectrometer leak detection module 2, and improve the detection accuracy.

[0077] From the third pre-extraction step to the detection step, the fifth control valve 1305 and the eighth control valve 1308 need to be closed, the first control valve 1301, the second control valve 1302, the third control valve 1303, the fourth control valve 1304 and the sixth control valve 1306 are opened, and the mass spectrometer leak detection module 2 extracts the gas to be detected from the leak detection port 1, and performs detection and analysis, and then the gas after detection is extracted from the mass spectrometer leak detection module 2 through the front stage pump 4. During the detection process, the first adsorption device 701, the second adsorption device 702 and the third adsorption device 703 continue to work, adsorbing the gas from the leak detection port 1, the front stage pump 4 and the gas path 8 of the mass spectrometer leak detection module, reducing the hydrogen ion background of the gas to be detected in the mass spectrometer leak detection module 2, so as to improve the detection accuracy.

[0078] In addition, the hydrogen mass spectrometry leak detection method also includes a maintenance step, which is: the heater 10 is started to heat the first adsorption device 701, the second adsorption device 702 and the third adsorption device 703. After the system has been running for a period of time, the molecular sieve in the condensation adsorption pump is saturated and inactivated. At this time, the heater 10 is required to heat the condensation adsorption pump so that the condensation adsorption pump desorbs and discharges the adsorbed interfering gas, and then the condensation adsorption pump can be reactivated so that the condensation adsorption pump can normally adsorb a large amount of interfering gas.

[0079] During the maintenance step, only the second control valve 1302, the third control valve 1303, the fourth control valve 1304 and the sixth control valve 1306 are opened, and the other control valves are closed. The mass spectrometer leak detection module 2 and the heater 10 are started, and the refrigeration device 9 is turned off.

[0080] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A hydrogen mass spectrometry leak detection method, applied to a hydrogen mass spectrometry leak detection system, characterized in that: The hydrogen mass spectrometry leak detection system comprises: Leak detection port (1); A mass spectrometer leak detection module (2), the mass spectrometer leak detection module (2) being in communication with the leak detection port (1) via a first pipeline (3); A fore-stage pump (4), the fore-stage pump (4) being in communication with the mass spectrometer leak detection module (2) via a second pipeline (5), and the fore-stage pump (4) being in communication with the leak detection port (1) via a third pipeline (6); An adsorption module, the adsorption module comprising: a first adsorption device (701) arranged on the first pipeline (3), a second adsorption device (702) arranged on the second pipeline (5), and a third adsorption device (703) arranged on the gas path (8) of the mass spectrometer leak detection module; The hydrogen mass spectrometry leak detection method comprises the following steps: Pre-extraction step: using the adsorption module to absorb the interfering gas from the leak detection port (1), the reverse diffusion of the fore pump (4) and the mass spectrometer leak detection module gas path (8) into the mass spectrometer leak detection module (2); A detection step, wherein the gas to be detected sequentially passes through the leak detection port (1), the first adsorption device (701), the mass spectrometer leak detection module (2), the second adsorption device (702) and the front pump (4) and is detected; The pre-extraction step comprises: A first pre-pumping step: pumping air from the leak detection port (1) through the fore pump (4); A second pre-pumping step: pumping gas from the mass spectrometer leak detection module (2) using the fore pump (4); The third pre-extraction step: the interfering gas entering the mass spectrometer leak detection module (2) through the leak detection port (1) is adsorbed by the first adsorption device (701), and the interfering gas reversely diffused from the front pump (4) into the mass spectrometer leak detection module (2) is adsorbed by the second adsorption device (702).

2. The hydrogen mass spectrometry leak detection method according to claim 1, characterized in that: The first adsorption device (701), the second adsorption device (702) and the third adsorption device (703) are all condensation adsorption pumps, and the adsorption module also includes a refrigeration device (9), and the refrigeration device (9) is connected to the first adsorption device (701), the second adsorption device (702) and the third adsorption device (703) to cool them.

3. The hydrogen mass spectrometry leak detection method according to claim 1, characterized in that: The hydrogen mass spectrometry leak detection system further comprises a heating module, wherein the heating module comprises heaters (10) respectively arranged at the first adsorption device (701), the second adsorption device (702) and the third adsorption device (703).

4. The hydrogen mass spectrometry leak detection method according to claim 1, characterized in that: The mass spectrometer leak detection module (2) comprises a valve group (201), a molecular pump (202) and a mass spectrometer chamber (203) which are connected in sequence, the two ends of the valve group (201) are respectively connected to the first pipeline (3) and the second pipeline (5), and the mass spectrometer chamber (203) is connected to the gas path (8) of the mass spectrometer leak detection module.

5. The hydrogen mass spectrometry leak detection method according to claim 3, characterized in that: The hydrogen mass spectrometry leak detection system further comprises a fourth pipeline (11) and a fifth pipeline (12); the fourth pipeline (11) is connected to the leak detection port (1) and the first pipeline (3) between the mass spectrometry leak detection module (2) and the first adsorption device (701); and the fifth pipeline (12) is connected to the third pipeline (6) and the second pipeline (5) between the mass spectrometry leak detection module (2) and the second adsorption device (702).

6. The hydrogen mass spectrometry leak detection method according to claim 5, characterized in that: The hydrogen mass spectrometry leak detection system further comprises a control valve group (201), which comprises: a first control valve (1301) and a second control valve (1302) respectively arranged at two ends of the first adsorption device (701), a third control valve (1303) and a fourth control valve (1304) arranged at two ends of the second adsorption device (702), a fifth control valve (1305) arranged on the third pipeline (6), a sixth control valve (1306) arranged on the gas path (8) of the mass spectrometry leak detection module, a seventh control valve (1307) arranged on the fourth pipeline (11), and an eighth control valve (1308) arranged on the fifth pipeline (12).

7. The hydrogen mass spectrometry leak detection method according to claim 6, characterized in that: The hydrogen mass spectrometry leak detection system further comprises a control module, wherein the control module is electrically connected to the mass spectrometry leak detection module (2), the adsorption module, the heating module and the control valve assembly (201).

8. The hydrogen mass spectrometry leak detection method according to claim 1, characterized in that: The method further comprises a maintenance step: the heater (10) is started to heat the first adsorption device (701), the second adsorption device (702) and the third adsorption device (703).

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