A deep hole processing jig for silicon products

Abstract

The present invention relates to the technical field of drilling processing auxiliary devices, and specifically to a deep hole processing jig for silicon products, comprising a carrier with a through opening in the middle and a plurality of clamps arranged in sequence along the circumference of the through opening, the jig also comprising a plurality of supporting components, the supporting components being able to extend and retract vertically, and the top surfaces of the supporting components constituting a carrying surface for placing workpieces; a channel for accommodating the supporting components is provided on the carrier corresponding to the position of the supporting component, and in a first position, the supporting component is accommodated in the channel, and the carrying surface is blocked by the top wall of the channel; in a second position, the carrying surface of the supporting component is at least higher than the top surface of the carrier; the jig also comprises a driving mechanism for driving the supporting component to move between the first position and the second position; when the jig is not in use, it can be accommodated in the channel, so that some waste chips and other impurities in the environment will not fall onto the carrying surface, thereby ensuring the cleanliness of the carrying surface, so that there is no need to clean the carrying surface when it is used next time.

Description

Technical Field

[0001] The invention relates to the technical field of drilling processing auxiliary devices, and in particular to a deep hole processing jig for silicon products. Background Art

[0002] For silicon products, it is sometimes necessary to use equipment to perform axial drilling on their surfaces. During drilling, a jig is needed to fix the silicon product (hereinafter referred to as the workpiece) to ensure its stability during drilling.

[0003] In the related art, the fixture used generally includes a loading surface for placing the workpiece flat. The loading surface is flat, and the workpiece is placed flat on the loading surface for testing. Then, the workpiece is clamped on the loading surface using a fixture for subsequent drilling processing.

[0004] In actual use, due to the complex workshop environment and the fact that the carrier surface is generally directly exposed to the outside, it is easy for some debris and other impurities to adhere to the carrier surface when it is idle. If the debris is not cleaned before clamping the workpiece, and the workpiece is directly placed on the carrier surface for clamping, the workpiece will not be able to fit the carrier surface, causing the workpiece to be slightly tilted and difficult to be in a horizontal state. In this way, when drilling later, the drilled hole is not parallel to the axial direction of the workpiece, resulting in an error. Therefore, the carrier surface needs to be cleaned before each use of the fixture, so there is still room for improvement. Summary of the Invention

[0005] In order to solve at least one of the technical problems mentioned in the background technology, the purpose of the present invention is to provide a deep hole processing jig for silicon products.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A deep-hole processing jig for silicon products comprises a carrier with a through opening in the middle and a plurality of clamps arranged in sequence along the circumference of the through opening. The jig further comprises a plurality of supporting assemblies arranged in sequence along the circumference of the through opening, wherein the supporting assemblies are capable of vertical extension and contraction, and the top surfaces of the supporting assemblies constitute a carrying surface for placing workpieces; a channel for accommodating the supporting assemblies is provided on the carrier at positions corresponding to the supporting assemblies, and the supporting assemblies are capable of sliding along the channel between a first position and a second position; in the first position, the supporting assembly is accommodated in the channel, and the carrying surface is blocked by the top wall of the channel; in the second position, the carrying surface of the supporting assembly is at least higher than the top surface of the carrier; the jig further comprises a driving mechanism for driving the supporting assembly to move between the first position and the second position.

[0008] Compared with the existing technology, the advantages of adopting this solution are:

[0009] In this solution, the top surface of the supporting assembly is used as the carrying surface, and the supporting assembly is arranged to be movable between a first position and a second position in the channel. In this way, when the jig is not in use, the supporting assembly can be controlled to move to the first position, and the supporting assembly is then accommodated in the channel, so that the carrying surface is shielded by the top wall of the channel, so that some waste debris and other impurities in the environment will not fall onto the carrying surface, thereby ensuring the cleanliness of the carrying surface. In this way, there is no need to clean the carrying surface when the jig is used next time.

[0010] When a jig is needed to clamp and drill a workpiece, the supporting assembly can be controlled to move to the second position. At this time, the supporting assembly slides out, exposing the loading surface for the workpiece to be placed. The workpiece can then be clamped on the loading surface using a fixture.

[0011] It is worth noting that in this solution, the loading surface is higher than the top surface of the carrier in the second position. The significance of such a setting is that, assuming that the loading surface is lower than or flush with the top surface of the carrier, the workpiece is supported by the top surface of the carrier. In this way, impurities on the top surface of the carrier will also lift up the workpiece, making it impossible to clamp the workpiece horizontally; and after the loading surface is set to be higher than the top surface of the carrier, when clamping the workpiece, the workpiece is lifted up by the loading surface, so that the bottom surface of the workpiece is separated from the top surface of the carrier. In this way, even if there are impurities on the carrier, they will not pad the bottom wall of the workpiece.

[0012] Preferably, the channel is arranged along the radial direction of the through-opening, and an incision is formed on the upper wall of the channel close to the through-opening side for vertical extension and retraction of the supporting assembly. In the first position, the supporting assembly is accommodated in the channel in a contracted state. In the second position, the supporting assembly extends upward at the incision position so that the carrying surface is higher than the top surface of the carrier.

[0013] Preferably, the supporting assembly includes a slider, a carrier head and an elastic member, the carrier head is vertically movably arranged on the slider; the top surface of the carrier head constitutes the carrying surface; the elastic member is arranged between the slider and the carrier head to provide an upward elastic force to push the carrier head; a limiting structure is provided between the carrier head and the platform, and the limiting structure is used to limit the maximum downward position of the carrier head when the supporting assembly is in the second position, and when the carrier head is in the maximum downward position, the carrying surface is higher than the top surface of the platform.

[0014] Preferably, the limiting structure includes a bayonet opened on the side wall of the carrier head, and a limiting block provided on the side wall of the channel corresponding to the bayonet; in the second position, the limiting block is inserted into the bayonet to limit the maximum downward position of the carrier head.

[0015] Preferably, the end wall of the incision away from the channel constitutes a retaining wall, and the side wall of the carrier head close to the retaining wall is inclined to constitute a first guide surface; the inclination direction of the first guide surface is gradually inclined from bottom to top away from the retaining wall.

[0016] Preferably, the lower end of the barrier arm is chamfered to form a second guide surface.

[0017] Preferably, the elastic member is a spring, a sliding cavity is provided on the slider, the carrier head is vertically slidably arranged in the sliding cavity, the spring is vertically arranged in the sliding cavity, and its two ends are respectively fixed or abutted against the bottom wall of the carrier head and the bottom wall of the sliding cavity.

[0018] Preferably, a through slot is provided on the bottom wall of the channel, extending along the length direction of the channel and passing through the bottom wall of the platform; the driving mechanism includes a rotating wheel and a driving member for driving the rotating wheel to rotate, and the bottom of each slider is fixedly connected to a guide column movably arranged in the through slot; an inclined guide slot is provided on the rotating wheel corresponding to each guide column; the guide column vertically passes through the corresponding guide slot.

[0019] Preferably, the driving member includes a motor and a transmission wheel; the rotating wheel and the transmission wheel are both gear structures, and the two are meshed with each other, and the motor is connected to the transmission wheel to drive the transmission wheel to rotate.

[0020] Preferably, the clamp includes a clamping block, a screw and a nut; the screw is vertically fixed on the top surface of the carrier; the clamping block can be vertically movably inserted into the screw; in the clamping state, the clamping block is inserted into the screw, and the nut is threadedly inserted into the screw above the clamping block, so that the clamping block presses the workpiece onto the carrier surface.

[0021] Other advantages and effects of the present invention are explained in detail in the detailed description and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of the supporting assembly of the present invention when it is in the second position;

[0023] Figure 2 It is a structural schematic diagram of the supporting assembly of the present invention when it is in the first position;

[0024] Figure 3 for Figure 1 Enlarged view of part A in the middle;

[0025] Figure 4 for Figure 2 A partial cross-sectional view of the support assembly;

[0026] Figure 5 This is a schematic diagram of the structure of the present invention in a workpiece clamping state;

[0027] Figure 6 for Figure 5 sectional view of ;

[0028] Figure 7 for Figure 6 Enlarged view of middle part B;

[0029] Figure 8 It is a structural diagram of the supporting component;

[0030] Figure 9 It is a schematic diagram of the bottom structure of the present invention. DETAILED DESCRIPTION

[0031] The following is an explanation and description of the technical solutions of the embodiments of the present invention in conjunction with the drawings of the embodiments of the present invention. However, the following embodiments are only preferred embodiments of the present invention and are not exhaustive. Based on the embodiments in the implementation manner, other embodiments obtained by those skilled in the art without creative work are all within the scope of protection of the present invention.

[0032] In the following description, terms such as "inside", "outside", "up", "down", "left", "right", etc. that indicate directions or positional relationships are only used to facilitate the description of the embodiments and simplify the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operate in a specific direction. Therefore, they should not be understood as limiting the present invention.

[0033] See also Figure 1-9 As shown, this embodiment provides a deep hole machining jig for silicon products. This embodiment takes a disc-shaped silicon product as an example for description. For the convenience of subsequent description, the silicon product is referred to as a workpiece M. During drilling, the workpiece M is drilled along its axial direction (ie, vertical direction).

[0034] like Figure 1 and Figure 5 As shown, the fixture provided in this embodiment includes a carrier 1 with a circular opening 11 in the middle and a plurality of clamps arranged in sequence along the circumference of the opening 11. For example, four groups of clamps can be designed, and each clamp is distributed around the opening 11 in a circular array.

[0035] The fixture further includes a plurality of supporting components 2 sequentially arranged along the circumference of the through opening 11 . Specifically, in this embodiment, four groups of supporting components 2 are arranged and distributed around the through opening 11 in a circular array.

[0036] The supporting assembly 2 can be extended and retracted vertically, where the vertical direction can also be understood as the axial direction of the through opening 11 .

[0037] like Figure 3 As shown, the top surface of the supporting assembly 2 constitutes a carrying surface 220 for placing the workpiece M. That is, when clamping, the bottom surface of the workpiece M is flat on the carrying surface 220, and the clamp is used to press the workpiece M on the carrying surface 220 at the top of the workpiece M. Figure 6 、 7 shown.

[0038] like Figure 6 and Figure 7As shown, a channel 12 for receiving the supporting component 2 is provided on the carrier 1 at a position corresponding to the supporting component 2 , wherein the channel 12 extends radially along the through opening 11 .

[0039] The supporting assembly 2 can slide along the channel 12 between a first position and a second position:

[0040] In the first position, Figure 2 and Figure 4 In the state shown, the supporting assembly 2 is received in the channel 12 , and the carrying surface 220 is shielded by the top wall of the channel 12 , thereby preventing waste debris from the environment from falling onto the carrying surface 220 .

[0041] In the second position, Figure 1 and Figure 6 As shown, the carrying surface 220 of the supporting assembly 2 is at least higher than the top surface of the carrier 1 .

[0042] The fixture further includes a driving mechanism for driving the supporting assembly 2 to move between the first position and the second position.

[0043] Through the above arrangement, when the jig is not in use (i.e., idle), the supporting assembly 2 can be controlled to move to the first position. At this time, the supporting assembly 2 is accommodated in the channel 12, so that the carrying surface 220 is blocked by the top wall of the channel 12. In this way, some waste debris and other impurities in the environment will not fall onto the carrying surface 220, ensuring the cleanliness of the carrying surface 220. In this way, there is no need to clean the carrying surface 220 when it is used next time.

[0044] When a jig is needed to clamp and drill the workpiece M, the supporting assembly 2 can be controlled to move to the second position. At this time, the supporting assembly 2 slides out, exposing the carrying surface 220 for the workpiece M to be placed. Subsequently, the workpiece M can be clamped on the carrying surface 220 using a fixture.

[0045] It is worth noting that in the second position, the loading surface 220 is higher than the top surface of the carrier 1. The significance of such a setting is that, assuming that the loading surface 220 is lower than or flush with the top surface of the carrier 1, the workpiece M is supported by the top surface of the carrier 1. In this way, impurities on the top surface of the carrier 1 will also lift up the workpiece M, making it impossible to clamp the workpiece M horizontally; and after the loading surface 220 is set to be higher than the top surface of the carrier 1, when clamping the workpiece M, the loading surface 220 will lift up the workpiece M, so that the bottom surface of the workpiece M is separated from the top surface of the carrier 1. In this way, even if there are impurities on the carrier 1, they will not pad the bottom wall of the workpiece M.

[0046] like Figure 3 and Figure 4As shown, the upper wall of the channel 12 close to the through-port 11 forms a cutout 13 for the supporting component 2 to vertically extend and retract, which is equivalent to cutting off a section of the upper wall of the channel 12 close to the through-port 11 to form the cutout 13, so that the supporting component 2 can vertically extend in the second position, so that the carrying surface 220 is higher than the top surface of the carrier 1. In the first position, the supporting component 2 is accommodated in the channel 12 in a retracted state. In the second position, the supporting component 2 extends upward at the position of the cutout 13, so that the carrying surface 220 is higher than the top surface of the carrier 1.

[0047] The specific structure of the supporting component 2 is as follows:

[0048] like Figure 8 and Figure 7 As shown, the supporting assembly 2 includes a slider 21 , a carrier head 22 and an elastic member. The slider 21 is adapted to the channel 12 and is slidably disposed in the channel 12 .

[0049] The carrying head 22 is vertically movably installed on the slider 21, so that the supporting assembly 2 as a whole forms a telescopic structure.

[0050] The top surface of the loading head 22 is horizontally arranged to form the loading surface 220 .

[0051] The elastic member is provided between the slider 21 and the carrier head 22 to provide an upward elastic force to push the carrier head 22. That is, when the supporting assembly 2 is not subjected to external force, the carrier head 22 extends upward under the elastic force of the elastic member. When the carrier head 22 is pressed downward, the carrier head 22 can overcome the elastic force of the elastic member and slide downward.

[0052] A limit structure is provided between the carrier head 22 and the carrier platform 1. The limit structure is used to limit the maximum downward position of the carrier head 22 when the supporting assembly 2 is in the second position. When the carrier head 22 is in the maximum downward position, the carrying surface 220 is higher than the top surface of the carrier platform 1. The maximum downward position here is Figure 7 As shown, it can also be understood as the lowest point to which the carrier head 22 can drop when the carrier head 22 is in the second position.

[0053] The reason why the maximum downward position of the carrier head 22 is limited in the second position is that, in the second position, the workpiece M needs to be clamped on the carrier surface 220 by the fixture. At this time, if the maximum downward position of the carrier head 22 is not limited, the fixture will continuously press the workpiece M and the carrier head 22 downward, causing the carrier head 22 to continuously move downward, and eventually the bottom surface of the workpiece M will fit into the top surface of the carrier 1. At this time, it is equivalent to the top surface of the carrier 1 supporting the workpiece M, and the carrier surface 220 will basically have no effect.

[0054] In order to enable the limiting structure to limit the carrier head 22 at the second position without affecting the sliding of the supporting assembly 2 in the channel 12, in this embodiment, Figure 7 and Figure 4 As shown, the limiting structure includes a slot 223 opened on the side wall of the carrier head 22, and a limiting block 224 provided on the side wall of the channel 12 corresponding to the slot 223; in the second position, the limiting block 224 is inserted into the slot 223 to limit the maximum downward position of the carrier head 22.

[0055] The bayonet 223 is defined so that when the carrier block slides upward to the highest position relative to the slider 21, the bottom wall of the bayonet 223 is lower than the bottom wall of the limit block 224, and the top wall of the bayonet 223 is higher than the top wall of the limit block 224; this ensures that when the carrier head 22 bounces upward from the cutout 13 position and continues to move toward the second position, the limit block 224 can eventually be inserted into the bayonet 223.

[0056] like Figure 3 and Figure 4 As shown, the end wall of the cutout 13 away from the channel 12 forms a retaining wall 14, and the side wall of the carrier head 22 close to the retaining wall 14 is inclined to form a first guide surface 221; the inclination direction of the first guide surface 221 is as follows: Figure 3 As shown, it gradually inclines from bottom to top in a direction away from the retaining wall 14.

[0057] In this way, when the carrier head 22 slides from the second position to the first position along with the slider 21, when the first guide surface 221 touches the lower edge of the retaining wall 14, as the carrier head 22 continues to slide, the carrier head 22 will be continuously pressed downward by the lower edge of the retaining wall 14 into the slider 21, thereby achieving the contraction of the carrier head 22. In this way, the carrier head 22 and the slider 21 can finally be accommodated in the channel 12.

[0058] In order to better cooperate with the first guide surface 221 in pressing down the carrier head 22 , in this embodiment, the lower end, ie, the lower edge, of the retaining wall is chamfered to form the second guide surface 141 .

[0059] Among them, the elastic member is a spring 23, a sliding cavity is opened on the slider 21, the carrier head 22 is vertically slidably set in the sliding cavity, the spring 23 is vertically set in the sliding cavity, and its two ends are respectively fixed or abutted with the bottom wall of the carrier head 22 and the bottom wall of the sliding cavity.

[0060] In order to prevent the slider 21 from slipping out of the sliding cavity upward, Figure 4 As shown, the lower end of the carrier head 22 is extended outward to form a first protrusion 222, and the second protrusion 211 is formed by protruding inward at the cavity mouth. In this natural state, the spring 23 pushes the carrier head 22 upward, and finally the first protrusion 222 abuts against the lower side of the second protrusion 211, thereby limiting the carrier head 22 from being pushed up further.

[0061] In order to better understand this embodiment, the process of the supporting component 2 moving between the first position and the second position is specifically described below:

[0062] When the supporting assembly 2 moves from the first position to the second position, first, in the first position, as shown in FIG. Figure 2 and Figure 4 As shown, the carrier head 22 and the slider 21 slide into the channel 12, and the top wall of the channel 12 presses the carrier head 22 into the slider 21, so that the entire supporting assembly 2 is in a compressed state and accommodated in the channel 12 to prevent the carrier surface 220 from being exposed.

[0063] When the carrier head 22 slides to the position of the retaining wall 14, as the slider 21 continues to slide toward the second position, the carrier head 22 gradually breaks away from the restriction of the retaining wall 14, and under the push of the spring 23, begins to bounce upward continuously, and finally rises to the highest point (at this time the first protrusion 222 and the second protrusion 211 are at odds with each other), at this time it has not yet reached the second position; then, the carrier head 22 maintains this state and continues to slide toward the second position, and finally the limit block 224 is inserted into the bayonet 223.

[0064] Then the workpiece M can be clamped. Specifically, the workpiece M is placed flat on the carrier surface 220, and the clamp is continuously clamped. Under the downward pressure of the clamp, the workpiece M and the carrier head 22 are lowered together. Figure 7 As shown, the top wall of the limiting block 224 finally presses against the top wall of the clamping hole 223 , so that the carrier head 22 cannot continue to descend. Then the clamp can be tightened, and the clamp clamps the workpiece M on the carrier surface 220 .

[0065] When the supporting assembly 2 moves from the second position to the first position, when the first guide surface 221 touches the lower edge of the retaining wall 14, as the slider 21 continues to move forward, the carrier block is continuously pressed down by the retaining wall 14 under the guidance of the first guide surface 221, and finally retracts into the slider 21 and enters the channel 12 together with the slider 21 to be stored.

[0066] It can be seen that in this solution, the vertical movement of the carrier head 22 is automatically performed by the movement of the slider 21 between the first position and the second position, and the two are coordinated with each other. In this way, it is only necessary to set a power source (i.e., a driving mechanism) for the sliding of the slider 21, and there is no need to set up additional driving components to drive the carrier head 22 to rise and fall vertically, saving a power source.

[0067] In order to be able to drive all the sliders 21 to move synchronously at the same time, in this embodiment, the driving mechanism is improved as follows:

[0068] like Figure 5 and Figure 6 As shown, the bottom wall of the channel 12 is provided with a through slot 15 extending along the length of the channel 12 and penetrating the bottom wall of the carrier 1. A guide post 4 that movably passes through the through slot 15 is fixedly connected to the bottom of each slider 21. When the slider 21 slides in the channel 12, the guide post 4 slides synchronously in the through slot 15.

[0069] like Figure 9 As shown, the driving mechanism includes a rotating wheel 51 and a driving member for driving the rotating wheel 51 to rotate. The rotating wheel 51 is rotatably connected to the bottom of the carrier 1 and is coaxially arranged with the through-port. An inclined guide groove 511 is provided on the rotating wheel 51 corresponding to each guide column 4. All the guide grooves 511 are inclined to the same side along the circumference of the rotating wheel 51, and the guide column 4 vertically passes through the corresponding guide groove 511.

[0070] Thus, when the driving member drives the rotating wheel 51 to rotate, the guide groove 511 changes position as the rotating wheel 51 rotates, thereby generating a thrust on the guide post 4, pushing the guide post 4 to slide along the through groove 15, thereby causing the slider 21 to slide along the channel 12.

[0071] Among them, the driving part includes a motor (not shown in the figure) and a transmission wheel 52; the rotating wheel 51 and the transmission wheel 52 are both gear structures, and the two are meshed with each other. The motor is connected to the transmission wheel 52 to drive the transmission wheel 52 to rotate, and then the transmission wheel 52 drives the rotating wheel 51 to rotate.

[0072] The fixture is constructed as follows: Figure 5 As shown, the clamp includes a clamping block 22, a screw 21, and a nut 23; the screw 21 is vertically fixed on the top surface of the carrier 1; the clamping block 22 can be vertically movably inserted into the screw 21; in the clamping state, the clamping block 22 is inserted into the screw 21, and the nut 23 is threadedly inserted into the screw 21 above the clamping block, so that the clamping block 22 presses the workpiece M onto the carrier surface 220, that is, as long as the nut 23 is tightened, the nut 23 can press the clamping block 22 downward, so that the clamping block 22 presses the workpiece M onto the carrier surface 220 to achieve clamping.

[0073] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations that come within the meaning and range of equivalents of the claims be embraced therein.

Claims

1. A deep hole processing jig for silicon products, comprising a carrier with a through opening in the middle and a plurality of fixtures arranged in sequence along the circumference of the through opening, characterized in that: The jig further comprises a plurality of supporting assemblies sequentially arranged along the circumference of the through opening, the supporting assemblies being capable of vertical extension and contraction, and the top surfaces of the supporting assemblies constituting a loading surface for placing the workpiece; a channel for receiving the supporting assemblies is provided on the carrier corresponding to the position of the supporting assemblies, the supporting assemblies being capable of sliding along the channel between a first position and a second position, in the first position, the supporting assemblies being accommodated in the channel, and the loading surface being shielded by the top wall of the channel; in the second position, the loading surface of the supporting assemblies is at least higher than the top surface of the carrier; the jig further comprises a driving mechanism for driving the supporting assemblies to move between the first position and the second position; The channel is arranged along the radial direction of the through-opening, and a notch is formed on the upper wall of the channel near the through-opening to allow the supporting assembly to vertically extend and retract. In a first position, the supporting assembly is accommodated in the channel in a retracted state. In a second position, the supporting assembly extends upward at the notch position so that the supporting surface is higher than the top surface of the carrier. The supporting assembly includes a slider, a carrier head, and an elastic member. The carrier head is vertically movably arranged on the slider; the top surface of the carrier head constitutes the carrying surface; the elastic member is arranged between the slider and the carrier head to provide an upward elastic force to push the carrier head; a limiting structure is provided between the carrier head and the platform, and the limiting structure is used to limit the maximum downward position of the carrier head when the supporting assembly is in the second position. When the carrier head is in the maximum downward position, the carrying surface is higher than the top surface of the platform; The limiting structure includes a bayonet opening on the side wall of the carrier head and a limiting block provided on the side wall of the channel corresponding to the bayonet opening. In the second position, the limiting block is inserted into the bayonet opening to limit the maximum downward position of the carrier head.

2. A deep hole processing jig for silicon products according to claim 1, characterized in that: The end wall of the cutout away from the channel forms a retaining wall, and the side wall of the carrier head close to the retaining wall is inclined to form a first guide surface; the inclination direction of the first guide surface is gradually inclined from bottom to top away from the retaining wall.

3. A deep hole processing jig for silicon products according to claim 2, characterized in that: The lower end of the retaining wall is chamfered to form a second guide surface.

4. A deep hole processing jig for silicon products according to claim 1, characterized in that: The elastic member is a spring, a sliding cavity is provided on the slider, the carrier head is vertically slidably arranged in the sliding cavity, the spring is vertically arranged in the sliding cavity, and its two ends are respectively fixed or abutted against the bottom wall of the carrier head and the bottom wall of the sliding cavity.

5. The deep hole processing jig for silicon products according to claim 1, characterized in that: A through slot is provided on the bottom wall of the channel, extending along the length of the channel and passing through the bottom wall of the platform; the driving mechanism includes a rotating wheel and a driving member for driving the rotating wheel to rotate, and the bottom of each slider is fixedly connected to a guide column that is movably arranged in the through slot; an inclined guide slot is provided on the rotating wheel corresponding to each guide column; the guide column vertically passes through the corresponding guide slot.

6. A deep hole processing jig for silicon products according to claim 5, characterized in that: The driving member includes a motor and a transmission wheel; the rotating wheel and the transmission wheel are both gear structures, and the two are meshed with each other. The motor is connected to the transmission wheel to drive the transmission wheel to rotate.

7. The deep hole processing jig for silicon products according to claim 1, characterized in that: The clamp includes a clamping block, a screw and a nut; the screw is vertically fixed on the top surface of the carrier; the clamping block can be vertically movably inserted into the screw; in the clamping state, the clamping block is inserted into the screw, and the nut is threadedly inserted into the screw above the clamping block, so that the clamping block presses the workpiece onto the carrier surface.

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