Evaporation coating device and evaporation coating system

Abstract

The application discloses an evaporation coating device and an evaporation coating system, and relates to the technical field of evaporation coating, which comprises an evaporation assembly, a detection assembly and a first rotating mechanism; the evaporation assembly is arranged below a workpiece and is used for heating and evaporating coating materials; the detection assembly is fixedly arranged on the evaporation assembly and is used for detecting the evaporation rate of the coating materials; the first rotating mechanism is connected with the evaporation assembly and is used for driving the evaporation assembly and the detection assembly to synchronously rotate around an axis relative to the workpiece. The evaporation coating device and the evaporation coating system are convenient for controlling the evaporation coating process and are helpful to improving the coating effect.

Description

Technical Field

[0001] This invention relates to the field of evaporation coating technology, and in particular to an evaporation coating apparatus and an evaporation coating system. Background Technology

[0002] Organic light-emitting diode (OLED) devices, compared to traditional liquid crystal displays (LCDs), offer advantages such as self-illumination, thinness, high contrast, wide viewing angle, and vibrant colors. Furthermore, OLED devices are significantly thinner than LCD devices, allowing for various forms such as bending, curvature, and curling, breaking through traditional screen designs and enabling widespread application in wearable devices. In the silicon-based OLED industry, point evaporation sources are frequently used to coat silicon-based or glass-based products. The point evaporation sources in each chamber are typically fixed in position, and coating is achieved by controlling the workpiece rotation. However, simply controlling workpiece rotation can still result in uneven coating, making control difficult and limiting flexibility. Summary of the Invention

[0003] The purpose of this invention is to provide an evaporation coating apparatus and an evaporation coating system to solve the problems existing in the prior art, facilitate the control of the evaporation coating process, and help improve the coating effect.

[0004] To achieve the above objectives, the present invention provides the following solution:

[0005] The present invention provides an evaporation coating apparatus, including an evaporation component, a detection component, and a first rotation mechanism; the evaporation component is disposed below the workpiece and is used to heat and evaporate the coating material; the detection component is fixedly disposed on the evaporation component and is used to detect the evaporation rate of the coating material; the first rotation mechanism is connected to the evaporation component and is used to drive the evaporation component and the detection component to rotate synchronously about an axis relative to the workpiece.

[0006] Preferably, the evaporation assembly is disposed near the circumferential edge of the workpiece; the evaporation assembly includes a support shell and a plurality of evaporation sources, the support shell has an evaporation chamber, and the upper side of the support shell and the circumferential side near the axis of the workpiece are configured as openings communicating with the evaporation chamber; the plurality of evaporation sources are disposed at the bottom of the evaporation chamber, and the detection assembly is fixedly disposed on the side wall of the evaporation chamber and positioned above the evaporation sources; the bottom wall of the support shell is fixedly connected to the first rotating mechanism.

[0007] Preferably, the system further includes an adjustment component disposed within the evaporation chamber. The adjustment component is fixedly connected to the evaporation source and is used to adjust the vertical tilt angle of the evaporation source.

[0008] Preferably, the adjustment component includes multiple telescopic mechanisms, each of the evaporation sources is movably disposed at the bottom of the evaporation chamber, and the evaporation source is provided with multiple telescopic mechanisms along the circumferential direction. The telescopic mechanism is used to adjust its own length to adjust the tilt angle of the corresponding evaporation source in the vertical direction.

[0009] Preferably, the detection component includes at least one crystal oscillator detector.

[0010] Preferably, the first rotating mechanism includes a first driving gear and a first circumferential guide rail disposed directly below the workpiece. The first circumferential guide rail is coaxially sleeved on the outer periphery of the first driving gear. The evaporation assembly is slidably disposed on the circumferential guide rail and fixedly connected to the first driving gear. The first driving gear is used to rotate under the action of external drive and drive the evaporation assembly to rotate under the guidance of the first circumferential guide rail.

[0011] Preferably, the first rotating mechanism includes a second driving gear and a transmission gear. The transmission gear is disposed directly below the workpiece. The second driving gear is meshed with the outer periphery of the transmission gear. The evaporation assembly is fixedly disposed on the transmission gear. The second driving gear is used to rotate under the action of an external drive and drive the transmission gear to drive the evaporation assembly to rotate.

[0012] Preferably, the first rotating mechanism includes a swing arm mechanism and a second circumferential guide rail disposed directly below the workpiece. The second circumferential guide rail is coaxially sleeved on the outer periphery of the swing arm mechanism. The evaporation component is slidably disposed on the second circumferential guide rail, and the movable end of the swing arm mechanism is connected to the evaporation component. The swing arm mechanism is used to drive the evaporation component to rotate under the guidance of the second circumferential guide rail.

[0013] The present invention also provides an evaporation coating system, comprising: a second rotating mechanism for fixing a workpiece and driving the workpiece to rotate; and an evaporation coating apparatus as described above; the evaporation coating apparatus being disposed directly below the workpiece.

[0014] The present invention achieves the following technical effects compared to the prior art:

[0015] The evaporation coating apparatus provided by the present invention drives the evaporation component to rotate around an axis relative to the workpiece below it through a first rotating mechanism, so that the coating material can be uniformly evaporated onto the workpiece. In conjunction with the rotation of the workpiece itself under the action of the second rotating mechanism, both the evaporation component and the workpiece can rotate. In addition, since the detection component is fixedly set on the evaporation component and rotates synchronously with the evaporation component, the evaporation rate of the coating material on the evaporation component can be monitored. The rotation rate of the evaporation component and the rotation rate of the workpiece can be adjusted according to the evaporation rate, which facilitates the control of the coating process and improves the coating effect of the workpiece.

[0016] The evaporation coating system provided by the present invention drives the evaporation component to rotate around an axis relative to the workpiece below the workpiece through a first rotating mechanism, so that the coating material can be uniformly evaporated onto the workpiece. With the workpiece rotating under the action of the second rotating mechanism, and with the detection component, the evaporation rate of the coating material on the evaporation component can be monitored. The rotation rate of the evaporation component and the rotation rate of the workpiece can be adjusted according to the evaporation rate, so as to facilitate the control of the coating process and improve the coating effect of the workpiece. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a top view schematic diagram of the evaporation coating apparatus provided in Embodiment 1;

[0019] Figure 2 This is a front view schematic diagram of the evaporation assembly provided in Embodiment 1;

[0020] Figure 3 This is a schematic diagram of the structure of the adjustment component provided in Embodiment 1;

[0021] Figure 4 This is a top view of the evaporation coating apparatus provided in Example 2;

[0022] Figure 5 This is a top view of the evaporation coating apparatus provided in Example 3;

[0023] Figure 6 This is a schematic diagram showing the positions of the evaporation components and the workpiece in the evaporation coating system provided in Example 4.

[0024] In the figure: 100-Second rotating mechanism; 200-Workpiece; 300-Evaporation coating device; 10-Evaporation component; 11-Support shell; 12-Evaporation source; 13-Evaporation chamber; 20-Detection component; 30-First rotating mechanism; 31-First drive gear; 32-First circumferential guide rail; 33-Second drive gear; 34-Transmission gear; 35-Swing arm mechanism; 36-Second circumferential guide rail; 40-Adjustment component; 41-Telescopic mechanism. Detailed Implementation

[0025] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0026] The purpose of this invention is to provide an evaporation coating apparatus and an evaporation coating system to solve the problems existing in the prior art, facilitate the control of the evaporation coating process, and help improve the coating effect.

[0027] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0028] Example 1

[0029] This invention provides an evaporation coating apparatus 300, please refer to [link / reference]. Figure 1 and Figure 2 The system includes an evaporation assembly 10, a detection assembly 20, and a first rotation mechanism 30. The evaporation assembly 10 is disposed below the workpiece 200 and is used to heat and evaporate the coating material. The detection assembly 20 is fixedly disposed on the evaporation assembly 10 and is used to detect the evaporation rate of the coating material. The first rotation mechanism 30 is connected to the evaporation assembly 10 and is used to drive the evaporation assembly 10 and the detection assembly 20 to rotate synchronously around an axis relative to the workpiece 200.

[0030] The first rotating mechanism 30 drives the evaporation assembly 10 to rotate around an axis below the workpiece 200 relative to the workpiece 200, so that the coating material can be uniformly evaporated onto the workpiece 200. In conjunction with the rotation of the workpiece 200 under the action of the second rotating mechanism 30, both the evaporation assembly 10 and the workpiece 200 can rotate. In addition, since the detection assembly 20 is fixedly set on the evaporation assembly 10 and rotates synchronously with the evaporation assembly 10, the evaporation rate of the coating material on the evaporation assembly 10 can be monitored. The rotation rate of the evaporation assembly 10 and the rotation rate of the workpiece 200 can be adjusted according to the evaporation rate, which facilitates the control of the coating process and improves the coating effect of the workpiece 200.

[0031] In the optional solutions of this embodiment, a more preferred option is described in the following description: Figure 1 , Figure 2 and Figure 6 The evaporation assembly 10 is positioned near the circumferential edge of the workpiece 200. The evaporation assembly 10 includes a support shell 11 and multiple evaporation sources 12. The support shell 11 contains an evaporation chamber 13. The upper side of the support shell 11 and the circumferential side near the axis of the workpiece 200 are configured as openings communicating with the evaporation chamber 13. Multiple evaporation sources 12 are positioned at the bottom of the evaporation chamber 13. A detection assembly 20 is fixedly mounted on the side wall of the evaporation chamber 13 and positioned above the evaporation sources 12 to facilitate the detection of the coating material evaporated from the evaporation sources 12. The bottom wall of the support shell 11 is connected to the first rotating mechanism 30. By connecting the evaporation assembly... Part 10 is set at the circumferential edge of the workpiece, and the upper side of the support shell 11 and the circumferential side near the central axis of the workpiece are open. The coating material in the evaporation chamber 13 can be diffused from the edge and the middle of the workpiece to achieve full coverage coating. Specifically, the evaporation source 12 can be set as a point evaporation source, and multiple evaporation sources 12 can be set to the same size and power or different size and power as required. Specifically, the evaporation source 12 model can be selected from LTC250CC, LTC100CC, LTC40CC, HTC250CC, HTC100CC or 40CC, etc.

[0032] In the optional scheme of this embodiment, more preferably, the evaporation coating device 300 provided in this embodiment further includes an adjustment component 40. The adjustment component 40 is disposed in the evaporation chamber 13. The adjustment component 40 is fixedly connected to the evaporation source 12 and is used to adjust the tilt angle of the evaporation source 12 in the vertical direction. By adjusting the tilt angle of the evaporation source 12, the coating angle can be adjusted to better coat the workpiece 200.

[0033] In the optional solutions of this embodiment, a more preferred option is described in the following description: Figure 3The adjustment assembly 40 includes multiple telescopic mechanisms 41. Each evaporation source 12 is movably disposed at the bottom of the evaporation chamber 13, and multiple telescopic mechanisms 41 are arranged circumferentially around the evaporation source 12. The telescopic mechanisms 41 are used to adjust their own length to adjust the vertical tilt angle of the corresponding evaporation source 12. Specifically, each evaporation source 12 can be provided with two or three telescopic mechanisms 41 circumferentially. The front end of each telescopic mechanism 41 is connected to and clamped to the evaporation source 12 through a hinge joint, and different telescopic mechanisms 41 are connected to different height positions on the evaporation source 12. For example, the telescopic mechanisms 41 circumferentially around the evaporation source 12 can be arranged horizontally at different heights, or the axis of each telescopic mechanism 41 can be tilted and fixed by a support. In this way, the tilt angle of the evaporation source 12 can be adjusted by the telescopic cooperation between the telescopic mechanisms 41. Specifically, the telescopic mechanism 41 can be set as an electric telescopic rod for easy control.

[0034] In the optional embodiments of this example, more preferably, the detection component 20 includes at least one crystal oscillator detector; further, it can be configured with multiple crystal oscillator detectors to improve detection accuracy; specifically, the crystal oscillator detector can be an Inficoncrystal 6 or Crystal 12 detector.

[0035] In the optional solutions of this embodiment, a more preferred option is described in the following description: Figure 1 The first rotating mechanism 30 includes a first driving gear 31 and a first circumferential guide rail 32 disposed directly below the workpiece 200. The first circumferential guide rail 32 is coaxially sleeved on the outer circumference of the first driving gear 31. The evaporation assembly 10 is slidably disposed on the first circumferential guide rail 32 and fixedly connected to the first driving gear 31. The first driving gear 31 is used to rotate under the action of external drive and drive the evaporation assembly 10 to rotate under the guidance of the first circumferential guide rail 32. Specifically, the bottom of the support shell 11 of the evaporation assembly 10 may be provided with a sliding groove that cooperates with the first circumferential guide rail 32. The sliding groove is slidably sleeved on the outer circumference of the first circumferential guide rail 32. Two circumferential tracks are provided on the inner and outer circumferences of the upper surface of the first circumferential guide rail 32. Correspondingly, the bottom of the support shell 11 of the evaporation assembly 10 is provided with two sliding grooves.

[0036] Example 2

[0037] This embodiment provides an evaporation coating apparatus 300. Please refer to [link / reference]. Figure 4The difference between this and the evaporation coating apparatus 300 provided in Embodiment 1 is that: the first rotating mechanism 30 includes a second driving gear 33 and a transmission gear 34. The transmission gear 34 is located directly below the workpiece 200. The second driving gear 33 is meshed with the outer periphery of the transmission gear 34. The evaporation assembly 10 is fixedly mounted on the transmission gear 34. The second driving gear 33 is used to rotate under the action of an external drive, such as an external motor, and drives the transmission gear 34 to rotate the evaporation assembly 10. The transmission gear 34 is rotatably mounted at the bottom of the vacuum chamber, which facilitates the rotation of the evaporation assembly 10.

[0038] The other structures of the evaporation coating apparatus 300 provided in this embodiment are the same as those in Embodiment 1, and will not be described in detail here.

[0039] Example 3

[0040] This embodiment provides an evaporation coating apparatus 300. Please refer to [link / reference]. Figure 5 The difference between this and the evaporation coating apparatus 300 provided in Embodiment 1 is that: the first rotating mechanism 30 includes a swing arm mechanism 35 and a second circumferential guide rail 36 disposed directly below the workpiece 200. The second circumferential guide rail 36 is coaxially sleeved on the outer periphery of the swing arm mechanism 35. The evaporation assembly 10 is slidably disposed on the second circumferential guide rail 36, and the movable end of the swing arm mechanism 35 is connected to the evaporation assembly 10. The swing arm mechanism 35 is used to drive the evaporation assembly 10 to rotate under the guidance of the second circumferential guide rail 36. The evaporation assembly 10 is driven to rotate under the guidance of the second circumferential guide rail 36 by the swing arm mechanism 35. Specifically, the swing arm mechanism 35 is set as a conventional rotating swing arm mechanism. The bottom of the support shell 11 of the evaporation assembly 10 can be provided with a sliding groove that cooperates with the second circumferential guide rail 36. The sliding groove is slidably sleeved on the outer periphery of the second circumferential guide rail 36. The second circumferential guide rail 36 is fixedly disposed at the bottom of the vacuum chamber.

[0041] The other structures of the evaporation coating apparatus 300 provided in this embodiment are the same as those in Embodiment 1, and will not be described in detail here.

[0042] Example 4

[0043] This embodiment provides an evaporation coating system, including a second rotating mechanism 100 and an evaporation coating apparatus 300 as described in any one of claims 1-8. The second rotating mechanism is used to fix the workpiece 200 and drive the workpiece 200 to rotate. The evaporation coating apparatus 300 is disposed directly below the workpiece 200. The entire evaporation coating system can be disposed in a vacuum chamber to facilitate coating of the workpiece. Specifically, the second rotating mechanism 100 can be configured as a rotary motor.

[0044] Furthermore, a control component can be set up to communicate with the entire evaporation coating system and control the evaporation component 10, the detection component 20, the first rotating mechanism 30 and the second rotating mechanism 100, so as to facilitate automatic coating control.

[0045] Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this invention. Furthermore, those skilled in the art will recognize that, based on the ideas of this invention, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this invention.

Claims

1. An evaporation coating apparatus, characterized in that: include: An evaporation assembly (10) is disposed below the workpiece (200) for heating and evaporating the coating material; A detection component (20) is fixedly disposed on the evaporation component (10), and the detection component (20) is used to detect the evaporation rate of the coating material; and A first rotating mechanism (30) is connected to the evaporation assembly (10), and the first rotating mechanism (30) is used to drive the evaporation assembly (10) and the detection assembly (20) to rotate synchronously about an axis relative to the workpiece (200); The evaporation assembly (10) is positioned near the circumferential edge of the workpiece (200); the evaporation assembly (10) includes a support shell (11) and a plurality of evaporation sources (12), the support shell (11) has an evaporation chamber (13), the upper side of the support shell (11) and the circumferential side near the axis of the workpiece (200) are configured as openings communicating with the evaporation chamber (13); the plurality of evaporation sources (12) are disposed at the bottom of the evaporation chamber (13), and the detection assembly (20) is fixedly disposed on the side wall of the evaporation chamber (13) and positioned above the evaporation sources (12); the bottom wall of the support shell (11) is connected to the first rotating mechanism (30); It also includes an adjustment component (40), which is disposed in the evaporation chamber (13). The adjustment component (40) is fixedly connected to the evaporation source (12) and is used to adjust the tilt angle of the evaporation source (12) in the vertical direction. The adjustment component (40) includes a plurality of telescopic mechanisms (41). Each evaporation source (12) is movably disposed at the bottom of the evaporation chamber (13), and the evaporation source (12) is provided with a plurality of telescopic mechanisms (41) in the circumferential direction. The telescopic mechanism (41) is used to adjust its own length to adjust the tilt angle of the corresponding evaporation source (12) in the vertical direction.

2. The evaporation coating apparatus according to claim 1, characterized in that: The detection component (20) includes at least one crystal detector.

3. The evaporation coating apparatus according to claim 1, characterized in that: The first rotating mechanism (30) includes a first driving gear (31) and a first circumferential guide rail (32) disposed directly below the workpiece (200). The first circumferential guide rail (32) is coaxially sleeved on the outer circumference of the first driving gear (31). The evaporation assembly (10) is slidably disposed on the first circumferential guide rail (32) and fixedly connected to the first driving gear (31). The first driving gear (31) is used to rotate under the action of external drive and drive the evaporation assembly (10) to rotate under the guidance of the first circumferential guide rail (32).

4. The evaporation coating apparatus according to claim 1, characterized in that: The first rotating mechanism (30) includes a second driving gear (33) and a transmission gear (34). The transmission gear (34) is located directly below the workpiece (200). The second driving gear (33) meshes with the outer periphery of the transmission gear (34). The evaporation assembly (10) is fixedly mounted on the transmission gear (34). The second driving gear (33) is used to rotate under the action of an external drive and drive the transmission gear (34) to drive the evaporation assembly (10) to rotate.

5. The evaporation coating apparatus according to claim 1, characterized in that: The first rotating mechanism (30) includes a swing arm mechanism (35) and a second circumferential guide rail (36) disposed directly below the workpiece (200). The second circumferential guide rail (36) is coaxially sleeved on the outer periphery of the swing arm mechanism (35). The evaporation assembly (10) is slidably disposed on the second circumferential guide rail (36), and the movable end of the swing arm mechanism (35) is connected to the evaporation assembly (10). The swing arm mechanism (35) is used to drive the evaporation assembly (10) to rotate under the guidance of the second circumferential guide rail (36).

6. An evaporation coating system, characterized in that: include: The second rotating mechanism (100) is used to fix the workpiece (200) and drive the workpiece (200) to rotate; and The evaporation coating apparatus (300) as described in any one of claims 1-5; the evaporation coating apparatus (300) is disposed directly below the workpiece (200).

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