Automatic half-plate guide and loading apparatus

Abstract

The application discloses an automatic half-piece guide piece and piece loading equipment, which comprises an operation platform, an air knife assembly, a substrate conveying device, a piece taking and placing device, a stacked piece box conveying device and a stacked piece box lifting device. The number of air knife assemblies arranged in the first direction on the operation platform is the same as the number of stacked piece boxes arranged in the first direction on the stacked piece box conveying device. Since the stacked piece box has the movement of being conveyed along the first direction and being lifted in the vertical direction, the air knife assembly is arranged at the highest position and does not follow the lifting of the stacked piece box. The loading position and the unloading position of the stacked piece box are both located below the air knife assembly, the conveying of the stacked piece box does not interfere with the air knife assembly, the amount of substrates loaded in the stacked piece box is not restricted, the conveying amount of the substrate conveying device and the amount of substrates taken and placed by the piece taking and placing device can be increased, and the guide piece, the process efficiency and the equipment capacity of the substrate can be effectively improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of photovoltaic cell manufacturing, and particularly to an automatic half-piece guiding and loading device. BACKGROUND

[0002] In a wet tank type texturing / cleaning process, a robot is used to immerse a flower basket loaded with silicon wafers to be processed into a reaction tank for texturing and cleaning. The number of flower baskets carried by the robot is limited, and the amount of silicon wafers processed at the same time is limited, which affects the efficiency of automatic production. When the silicon wafers loaded in the stacking box are loaded into the flower basket, the silicon wafers in the stacking box need to be sucked by a wafer suction mechanism first, and then the silicon wafers are transported to the flower basket by a conveying mechanism for loading. When the wafer is sucked, the air knife needs to blow air flow to the wafer to avoid wafer adhesion. In order to ensure the position matching of the air knife and the stacking box, the air knife usually synchronously rises and falls with the stacking box. In the related art, the flower basket can only load single-layer single-wafer silicon wafers or single-layer double-wafer silicon wafers, which limits the process efficiency of the silicon wafers. The number of silicon wafers arranged in a single layer in the stacking box is consistent with the number of silicon wafers arranged in a single layer in the flower basket. Due to the position distribution of the air knife and the stacking box and the need for the air knife to separate the wafers at different positions in the stacking box, the stacking box transmission and lifting are likely to interfere with the air knife, which restricts the amount of silicon wafers loaded in the stacking box and cannot meet the demand of the equipment for production capacity. SUMMARY

[0003] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application provides an automatic half-piece guiding and loading device, which can improve the process efficiency and equipment productivity.

[0004] According to the automatic half-piece guiding and loading device in the embodiment of the present application, it comprises:

[0005] an operation platform;

[0006] an air knife assembly fixed on the top of the operation platform, the air knife assembly comprising a plurality of air blowing groups, each air blowing group comprising at least one air knife, each air blowing group being configured to blow air flow into a substrate in one of the stacking boxes along a first direction, the air blowing groups being arranged along the first direction and a second direction, and n air blowing groups being arranged along the second direction, wherein n is greater than or equal to 3, and the first direction is perpendicular to the second direction;

[0007] a substrate conveying device for conveying the substrates in the stacking boxes to the loading position of the flower basket, the substrate conveying device being arranged with n substrates in the second direction;

[0008] a wafer picking and placing device for picking up the substrates in the stacking boxes and placing them on the substrate conveying device for conveying;

[0009] a stacking box conveying device for conveying the stacking boxes along the first direction;

[0010] The laminated box lifting device is connected with the laminated box conveying device and is used to drive the laminated box conveying device to lift, the laminated box conveying device has a feeding position, a discharging position and a substrate suction position, the height of the discharging position, the feeding position and the substrate suction position increases gradually, the laminated box conveying device is configured to receive the laminated box full of substrates at the feeding position, and is lifted to the substrate suction position by the driving of the laminated box lifting device, so as to be blown by the airflow of the air knife assembly, and the substrates in the laminated box are taken out by the substrate taking and placing device and placed on the substrate conveying device, and then the laminated box conveying device is lowered to the discharging position by the driving of the laminated box lifting device, and the empty laminated box is conveyed.

[0011] According to the automatic half-substrate guiding and placing device, at least the following beneficial effects are achieved:

[0012] In the present application, the number of air blowing groups arranged on the operation platform in the first direction is the same as the number of laminated boxes arranged on the laminated box conveying device in the first direction, the number of air blowing groups arranged on the operation platform in the second direction, the number of laminated boxes arranged on the laminated box conveying device in the second direction and the number of substrates arranged on the substrate conveying device in the second direction are all greater than 3; since the laminated box has the movement of being conveyed along the first direction and being lifted in the vertical direction, the air knife assembly is arranged at the highest position and is fixed on the operation platform, the air knife assembly does not follow the laminated box to lift, the feeding position and the discharging position of the laminated box are both below the air knife assembly, therefore, the conveying of the laminated box does not interfere with the air knife assembly, the amount of substrates loaded in the laminated box is not restricted, the conveying amount of the substrate conveying device and the amount of substrates taken and placed by the substrate taking and placing device can be increased accordingly, and the guiding and process efficiency of the substrates and the production capacity of the device can be effectively improved.

[0013] According to some embodiments of the present application, the operation platform has a lifting opening vertically penetrating, the laminated box conveying device includes a laminated box transmission mechanism, a substrate and a jacking mechanism, the substrate is placed on the laminated box transmission mechanism and is driven to move along the first direction, the substrate is used to place the laminated box, the jacking mechanism is installed at the bottom of the substrate, and the jacking mechanism is used to connect the bottom of the laminated box and drive the laminated box to lift relative to the substrate.

[0014] According to some embodiments of the present application, the laminated box conveying device further includes a laminated box clamping mechanism, the laminated box clamping mechanism is connected to the laminated box transmission mechanism, the substrate is provided with a plurality of and arranged on the top of the laminated box transmission mechanism along the first direction, and the laminated box clamping mechanism can at least limit the substrate located at the first direction head.

[0015] According to some embodiments of the present application, each of the air blowing groups comprises a plurality of air knives arranged along the first direction and oppositely arranged, and the plurality of air knives can simultaneously blow air flow towards the laminated box.

[0016] According to some embodiments of the present application, a plurality of the substrate conveying devices and the laminated box conveying devices are arranged, and each of the substrate conveying devices is located at the side of the laminated box conveying device;

[0017] The automatic half wafer guiding and loading equipment further comprises a flower basket conveying device, a flower basket lifting device and a first horizontal moving device, the flower basket conveying device is located between adjacent substrate conveying devices and is used for conveying an empty flower basket to the first horizontal moving device along the first direction, the first horizontal moving device extends along the second direction and conveys the empty flower basket to the flower basket lifting device along the second direction, the flower basket lifting device is used for loading and lifting the flower basket, the substrate conveying device can be inserted into the empty flower basket from the opening of the flower basket and load the substrate into the flower basket, and n substrates are arranged in each layer.

[0018] According to some embodiments of the present application, each of the substrate conveying devices comprises n substrate conveying mechanisms arranged side by side along the second direction, the flower basket lifting device comprises a flower basket lifting mechanism and a flower basket clamping mechanism, the flower basket clamping mechanism is used for loading and clamping the flower basket, and the flower basket lifting mechanism is connected with the flower basket clamping mechanism and drives the flower basket clamping mechanism to lift; the end of the n substrate conveying mechanisms of each of the substrate conveying devices in the first direction is inserted into the flower basket, and when the flower basket lifting mechanism drives the flower basket clamping mechanism to lift, n substrates are stacked in the flower basket layer by layer.

[0019] According to some embodiments of the present application, the automatic half wafer guiding and loading equipment further comprises a flower basket overturning device, a pressing rod loading device and a mechanical hand, the flower basket overturning device is used for loading and overturning the flower basket in a vertical plane to make the opening of the flower basket upward, the pressing rod loading device comprises a jacking assembly and a pressing rod clamping assembly, the pressing rod clamping assembly is used for clamping the pressing rod conveyed by the mechanical hand, the jacking assembly is used for driving the pressing rod clamping assembly to lift to clamp the pressing rod conveyed by the mechanical hand, load the pressing rod into the flower basket, make the pressing rod in a placed state, and then drive the pressing rod to rotate to switch the pressing rod to a locked state.

[0020] According to some embodiments of the present application, the pressing rod clamping assembly comprises a plurality of rotatable rotating wheels, the end of the rotating wheel in the axial direction is provided with a locking groove, the locking groove is used for axially inserting with the locking part at the end of the pressing rod, and the rotating wheel can drive the pressing rod to rotate when the rotating wheel rotates, so that the locking part is switched from the placed state arranged vertically to the locked state arranged horizontally.

[0021] According to some embodiments of the present application, the automatic half-plate guiding and loading device further comprises a flower basket rotating device for loading a flower basket and rotating the flower basket in a horizontal plane to change the orientation of the opening of the flower basket, and a flower basket overturning device receiving the flower basket delivered by the flower basket rotating device and overturning the flower basket with the opening facing upward.

[0022] According to some embodiments of the present application, the pressure rod loading device further comprises a flower basket transverse conveying mechanism for conveying the flower basket with the opening facing upward, and a flower basket positioning assembly comprising at least two positioning cones capable of moving towards or being moved towards the flower basket to abut against the end faces of the opposite ends of the flower basket to position the flower basket on the flower basket transverse conveying mechanism.

[0023] According to some embodiments of the present application, the flower basket overturning device comprises an overturning mechanism, a stopping mechanism, a first conveying mechanism, a second conveying mechanism, a basket pressing assembly and an overturning frame, the basket pressing assembly and the first conveying mechanism are respectively installed at the two ends of the overturning frame, the first conveying mechanism is used for receiving the flower basket delivered by the flower basket lifting device, the basket pressing assembly is used for pressing the flower basket, the overturning mechanism is connected with the overturning frame and is used for rotating the overturning frame in a vertical plane, the second conveying mechanism is used for conveying the flower basket with the opening facing upward to the pressure rod loading device, and the stopping mechanism is used for positioning the flower basket.

[0024] According to some embodiments of the present application, the automatic half-plate guiding and loading device further comprises a pressure rod conveying device comprising a pressure rod box for loading pressure rods, the locking portion of the pressure rod can be placed in a vertical state in the pressure rod box and picked up by the robot to load the pressure rod in a vertical state into the flower basket.

[0025] Additional aspects and advantages of the present application will be partially given in the following description, partially will become obvious from the following description, or will be understood by those skilled in the art through the practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0026] The present application will be further described below in conjunction with the drawings and embodiments, wherein:

[0027] Figure 1 It is a layout schematic diagram of an embodiment of the automatic half-plate guiding and loading device of the present application;

[0028] Figure 2 It is an enlarged view of the part A in the figure;

[0029] Figure 3 It is a schematic diagram of an embodiment of the stacker lifting device;

[0030] Figure 4 It is a schematic diagram of an embodiment of the air knife assembly;

[0031] Figure 5 A comparison chart of the arrangement of the stacker and the air knife assembly in the prior art and the present application;

[0032] Figure 6 A schematic diagram of an embodiment of the wafer pick-and-place device;

[0033] Figure 7 A schematic diagram of an embodiment of the wafer conveying device;

[0034] Figure 8 A schematic diagram of an embodiment of the wafer basket;

[0035] Figure 9 A schematic diagram of an embodiment of the wafer basket lifting device;

[0036] Figure 10 A schematic diagram of an embodiment of the wafer basket conveying device;

[0037] Figure 11 A schematic diagram of an embodiment of the first horizontal movement device;

[0038] Figure 12 A schematic diagram of an embodiment of the pressing rod loading device;

[0039] Figure 13 A schematic diagram of an embodiment of the wafer basket positioning assembly;

[0040] Figure 14 A schematic diagram of an embodiment of the wafer basket rotating device;

[0041] Figure 15 A schematic diagram of an embodiment of the wafer basket flipping device;

[0042] Figure 16 A schematic diagram of an embodiment of the grabbing mechanism;

[0043] Figure 17 A schematic diagram of the grabbing mechanism grabbing the pressing rod and the wafer basket.

[0044] Reference signs:

[0045] Stacker 10, stacker column 11, stacker cavity 12, bottom plate 13;

[0046] Wafer basket 20, support column 21, basket plate 22, conveying cavity 23, support tooth 24, mounting groove 25, opening 26, positioning hole 27;

[0047] Pressing rod 30, locking portion 31;

[0048] Operation platform 100;

[0049] Air knife assembly 200, air blowing group 210, air knife 211;

[0050] substrate conveying device 300, substrate transmission mechanism 310, extension section 311;

[0051] substrate taking and placing device 400, adsorption mechanism 410;

[0052] stacked substrate box conveying device 500;

[0053] stacked substrate box lifting device 600, stacked substrate box transmission mechanism 610, base plate 620, jacking mechanism 630, stacked substrate box clamping mechanism 640, stacked substrate lifting mechanism 650;

[0054] flower basket conveying device 700, first belt conveying mechanism 710;

[0055] flower basket lifting device 800, flower basket lifting mechanism 810, flower basket clamping mechanism 820, receiving mechanism 830, blocking piece 840, lifting frame 850, basket pressing mechanism 860;

[0056] first horizontal moving device 900, second belt conveying mechanism 910, horizontal moving mechanism 920;

[0057] flower basket overturning device 1000, overturning mechanism 1010, stopping blocking mechanism 1020, first conveying mechanism 1030, second conveying mechanism 1040, basket pressing assembly 1050, overturning frame 1060, support frame 1070, second horizontal moving mechanism 1080;

[0058] pressing rod loading device 1100, jacking assembly 1110, pressing rod clamping assembly 1120, rotating wheel 1121, locking groove 1122, flower basket horizontal conveying mechanism 1130, flower basket positioning assembly 1140, positioning cone 1141;

[0059] mechanical hand 1200, transfer mechanism 1210, grabbing mechanism 1220, pressing rod gripper 1221, first bottom plate 12211, first clamping part 12212, second bottom plate 12213, second clamping part 12214, flower basket gripper 1222, flower basket clamping part 12221;

[0060] flower basket rotating device 1300, flower basket rotating conveying line 1310, rotating mechanism 1320;

[0061] pressing rod conveying device 1400;

[0062] loading platform 1500. DETAILED DESCRIPTION

[0063] Embodiments of the present application are described below in the detailed description and illustrated in the accompanying drawings by which like or similar elements, structures and / or functions have been given the same reference numerals and functionalities (which are known to those skilled in the art) are not described in detail. The embodiments described below are exemplary only and are not intended to be limiting of the present application.

[0064] In the description of the present application, if the orientation description, such as up, down, front, back, left, right, and the like, is described, the orientation or position relationship based on the orientation or position relationship shown in the drawings is described for the convenience of describing the present application and simplifying the description, and is not intended to indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0065] In the description of the present application, if the meaning of several is more than one, the meaning of multiple is more than two, greater than, less than, more than, and the like are understood as not including the number, above, below, and the like are understood as including the number. If the first, second, and the like are described, they are only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or the order of technical features indicated.

[0066] In the description of the present application, unless otherwise explicitly limited, the words such as setting, installing, connecting, and the like should be broadly understood, and those skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.

[0067] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the exemplary description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0068] Reference Figures 1 to 3In an embodiment of the present invention, an automatic half-sheet guiding and loading device (hereinafter referred to as the device) is provided, comprising an operating platform 100, an air knife assembly 200, a substrate conveying device 300, a sheet picking and placing device 400, a stacking box conveying device 500 and a stacking box lifting device 600; substrates to be processed or processed are carried in a stacking box 10 and are stacked vertically in the stacking box 10. Adjacent substrates are in contact with each other, so that a large number of substrates can be carried in the stacking box 10. 10 includes a plurality of stacking columns 11 arranged at intervals, and the stacking columns 11 are arranged to form a stacking cavity 12. The substrate is placed in the stacking cavity 12, and the external airflow can enter the stacking cavity 12 through the gaps between the stacking columns 11, so that the substrates are separated from each other under the action of the airflow; the equipment in this embodiment guides the substrates in the stacking box 10 and transfers the substrates to the loading position of the flower basket 20, so that the substrates are loaded in the flower basket 20, and the flower basket 20 unloads the substrates for further wet milling / cleaning process.

[0069] The air knife assembly 200 is fixed on the top of the operating platform 100 and keeps a fixed position relative to the operating platform 100. Figure 4 The air knife assembly 200 includes a plurality of air blowing groups 210, each of which includes at least one air knife 211. The air knife 211 is externally connected to an air supply structure and has an air outlet. The air flow is discharged from the air outlet and blown toward the substrates stacked in the vertical direction to separate adjacent substrates, thereby reducing adhesion of the substrates when being picked up by the pick-up and place device 400, so that the pick-up and place device 400 picks up a single layer of substrates; each air blowing group 210 is configured to blow air toward one of the stacking boxes 10, and is used to separate the substrates in one of the stacking boxes 10. The air in each air blowing group 210 The knife 211 is configured to blow air flow toward the substrate in one of the stacking boxes 10 along the first direction and / or the opposite direction of the first direction. Multiple blowing groups 210 are arranged along the first direction and the second direction at the same time, and there are n blowing groups 210 arranged along the second direction, n≥3, the first direction is perpendicular to the second direction, and the first direction and the second direction are both parallel to the horizontal plane. The number of blowing groups 210 arranged in the first direction is not limited. According to the conveying amount of the stacking box 10 by the stacking box conveying device 500, the arrangement amount of the blowing groups 210 in the first direction can be set to be no less than 3 to improve the efficiency of taking out the sheets.

[0070] The pick-and-place device 400 picks up the substrates in the stacker box 10 and places the substrates on the substrate conveying device 300 for transmission, the substrate conveying device 300 transmits the substrates to the loading position of the flower basket 20, and the substrate loading device loads the substrates into the flower basket 20, and the substrate conveying device 300 arranges n substrates in the second direction; in this way, the pick-and-place device 400 can directly transfer the n substrates in the second direction in the stacker box 10 to the substrate conveying device 300, and the substrate conveying device 300 can arrange n substrates in each row and cooperate with the substrate loading device to load n substrates into the flower basket 20 at a time.

[0071] The stacker box conveying device 500 is used for transmitting the stacker box 10 in the first direction or the reverse direction of the first direction, and the stacker box lifting device 600 is connected with the stacker box conveying device 500 and is used for driving the stacker box conveying device 500 to lift. The direction in which the stacker box conveying device 500 transmits the stacker box 10 in the first direction is defined as the feeding direction of the stacker box 10, and the direction in which the stacker box conveying device 500 transmits the stacker box 10 in the reverse direction of the first direction is defined as the discharging direction of the stacker box 10, the front end of the stacker box conveying device 500 in the first direction is defined as the head end, and the rear end of the stacker box conveying device 500 in the first direction is defined as the tail end; for example, the AGV (Automated Guided Vehicle) places the full stacker box 10 at the tail end of the stacker box lifting device 600, and the stacker box 10 is conveyed to the head end of the stacker box conveying device 500 in the first direction, after the pick-and-place mechanism picks up the substrates in the stacker box 10, the stacker box 10 is empty, and the empty stacker box 10 is conveyed to the tail end of the stacker box conveying device 500 in the reverse direction of the first direction, and the AGV takes out the empty stacker box 10, realizing the circulation of the full and empty stacker boxes 10; or, the full stacker box 10 is placed on or taken out from the stacker box lifting device 600 by manual operation.

[0072] The laminated box has an upper feeding position, a lower feeding position and a substrate suction position. The height of the lower feeding position, the upper feeding position and the substrate suction position increases in sequence, that is, the height of the upper feeding position is higher than that of the lower feeding position, and the height of the substrate suction position is higher than that of the upper feeding position. The lower feeding position is a position at which the laminated box conveying device 500 conveys the empty laminated box 10 from the head end to the tail end. The upper feeding position is a position at which the laminated box conveying device 500 conveys the full laminated box 10 from the tail end to the head end. The lower feeding position is a position at which the substrate taking and placing device 400 picks up the substrates in the laminated box 10. The height of the upper feeding position and the lower feeding position can be set as the height of the laminated box conveying device 500. The specific process is as follows: when starting to feed, the laminated box conveying device 500 is located at the upper feeding position and conveys the full laminated box 10 to the laminated box lifting device 600. The laminated box lifting device 600 drives the laminated box to rise to the substrate suction position. In this case, the laminated box 10 is just moved to the height of the operation platform 100. The air blowing group 210 is located at the side of the laminated box 10. The air knife 211 in the air blowing group 210 blows air to the laminated box 10 in the first direction. The adjacent substrates on the top layer are separated by the air flow. The substrate taking and placing device 400 picks up the topmost substrate and transfers the substrate to the substrate conveying device 300. After all the substrates in the laminated box 10 are picked up, the laminated box lifting device 600 drives the laminated box 10 to descend to the lower feeding position. The empty laminated box 10 is conveyed to the laminated box conveying device 500, realizing the circulation of the full and empty laminated box 10.

[0073] It can be understood that in the embodiment, the number of air blowing groups 210 arranged in the first direction on the operation platform 100 is the same as the number of laminated boxes 10 arranged in the first direction on the laminated box conveying device 500. The number n of air blowing groups 210 arranged in the second direction on the operation platform 100, the number of laminated boxes 10 arranged in the second direction on the laminated box conveying device 500 and the number of substrates arranged in the second direction on the substrate conveying device 300 are the same and are greater than 3. Since the laminated box 10 has the movement of being conveyed in the first direction and being lifted in the vertical direction, the air knife assembly 200 is arranged at the highest position in the embodiment, and the air knife assembly 200 is fixed to the operation platform 100 and does not rise and fall with the laminated box 10. Therefore, the upper feeding position and the lower feeding position of the laminated box 10 are below the air knife assembly 200, and the conveying of the laminated box 10 does not interfere with the air knife assembly 200. The amount of substrates loaded in the laminated box 10 is not restricted. The conveying amount of the substrate by the substrate conveying device 300 and the amount of substrates picked up and placed by the substrate taking and placing device 400 can be increased, which can effectively improve the substrate guiding, process efficiency and equipment capacity.

[0074] In addition, in order to facilitate the picking and placing of the substrates and the loading of the substrates into the flower basket 20 by the substrate conveying device 300, the arrangement amount of the laminated box 10 in the second direction, the amount of substrates picked up by the substrate taking and placing device 400 at a time, the amount of substrates arranged in each row of the substrate conveying device 300 and the amount of substrates arranged in each layer of the flower basket 20 are consistent, as shown in Figure 5 Figure 5 ​Figure (a) in the above figure is a schematic diagram of the arrangement of the air knife assembly and the stacked box in the prior art, Figure 5 Figure (b) in the above figure is a schematic diagram of the arrangement of the air knife assembly and the stacked box in the present embodiment, and the arrow points to a schematic diagram of the conveying of the stacked box 10. In order to enable the stacked box 10 to be conveyed and each stacked box 10 to receive the airflow of one air blowing group 210, the existing air blowing group 210 is arranged at the side of the stacked box 10 in the second direction to avoid the moving path of the stacked box 10 and to avoid interference during the conveying of the stacked box 10. However, this arrangement causes the stacked box 10 to be arranged in the second direction at most two times. When multiple stacked boxes 10 are arranged, the airflow of the air blowing group 210 cannot be blown to each stacked box 10, which limits the arrangement number of the stacked box 10 and causes the flower basket 20 to be able to load only a single layer of single wafer or a single layer of double wafer, thereby limiting the process efficiency of the wafer.

[0075] In the present embodiment, the conveying of the stacked box 10 is not limited by the position of the air knife 211. After the stacked box 10 follows the stacked box conveying device 500 to reach the wafer suction position, each stacked box 10 can be subjected to the airflow of one air blowing group 210. The arrangement number of the stacked box 10 in the second direction is not limited, and the arrangement number n of the stacked box 10 is not less than three. Correspondingly, the wafer taking and placing device 400 can pick up all the wafers arranged in the stacked boxes 10 in the second direction at one time and place the wafers on the wafer conveying device 300. The wafer conveying device 300 directly loads each row of placed wafers on each layer of the flower basket 20 at the wafer loading position. In this way, each layer of the flower basket 20 loads at least three wafers, which realizes the loading of single-layer multiple wafers and greatly improves the process efficiency of the wafer.

[0076] Each stacked box 10 is blown by the airflow of one air blowing group 210. The air knife 211 in the air blowing group 210 is arranged at the side of the stacked box 10 in the first direction. In some embodiments, each air blowing group 210 includes multiple air knives 211 arranged in the first direction and oppositely arranged. The air outlets of the air knives 211 located at the opposite sides of the stacked box 10 are oppositely arranged and can simultaneously blow the airflow toward the stacked box 10. Since the opposite sides of the wafer are simultaneously subjected to the airflow, the adjacent wafers are more easily separated, which facilitates the wafer taking and placing device to pick up the wafers in the stacked box 10. In the present embodiment, as shown in Figure 6The wafer picking and placing device 400 includes multiple adsorption mechanisms 410, and the adsorption mechanisms 410 include multiple suction cups. The inner cavity of the suction cup can generate negative pressure, which can adsorb the substrate to the surface of the suction cup to reduce damage to the substrate during the wafer picking and placing process. There are n adsorption mechanisms 410 arranged along the second direction, so the wafer picking and placing device can at least pick up the substrates in n stacking boxes 10 arranged in the second direction at a single time. Of course, the adsorption mechanisms 410 can be arranged along the first direction and the second direction at the same time. The number of adsorption mechanisms 410 arranged along the first direction is the same as the number of stacking boxes 10 arranged in the first direction on the stacking box conveying device 500, so that the wafer picking and placing device can pick up the substrates in all stacking boxes 10 on the stacking box conveying device 500 at a single time.

[0077] like Figure 3 As shown, the operating platform 100 has a vertically penetrating lifting port, so that when the stacking box 10 rises from the loading position to the suction position, it rises to the side of the blowing group 210 through the lifting port, so that the air knife 211 in the blowing group 210 blows air toward the substrate along the first direction. Specifically, the stacking box lifting device 600 includes a stacking box transmission mechanism 610, a base plate 620 and a lifting mechanism 630. The stacking box transmission mechanism 610 can be set as a belt conveyor line. The base plate 620 is placed on the stacking box transmission mechanism 610 and is driven by the stacking box transmission mechanism 610 to move in a first direction or in the opposite direction of the first direction. The base plate 620 is used to place the stacking box 10. The stacking box 10 follows the base plate 620 and is driven by the stacking box transmission mechanism 610 to move. The lifting mechanism 630 is installed at the bottom of the base plate 620. A vertical through hole is provided on the base plate 620 for the lifting mechanism 630 to be connected to the bottom of the stacking box 10. The lifting mechanism 630 is used to drive the stacking box 10 to rise and fall relative to the base plate 620 to change the height of the stacking box 10, so that the air knife 211 can blow air to substrates at different heights, and the wafer picking and placing device 400 can pick up substrates at different heights in the stacking box 10.

[0078] Specifically, when the stacking box is in the sucking position, each blowing group 210 blows air flow toward the substrate in a stacking box 10, and the top-layer substrate is separated from the adjacent substrates. The pick-up and placement device 400 sucks the top-layer substrate and transfers the substrate to the substrate conveying device 300; then, the lifting mechanism 630 drives the stacking box 10 to move upward a preset distance, and the air flow blown by the air knife 211 can always act on the top-layer substrate, so that the top-layer substrate is separated from the adjacent substrates, and the pick-up and placement device 400 does not need to move up and down, that is, it can always pick up the top-layer single-chip substrate, which can shorten the moving path of the pick-up and placement device 400 and improve the transfer efficiency of the substrate.

[0079] Each substrate 620 is arranged with n laminated chip boxes 10 arranged along the second direction, and the substrates 620 are arranged on the laminated chip box conveying device 500 in multiple or all the laminated chip boxes 10 are arranged on one substrate 620. The laminated chip box 10 at least includes a bottom plate 13, the substrate is arranged on the bottom plate 13, the jacking structure is located below the substrate 620 and is connected to the bottom of the bottom plate 13, and the bottom plate 13 can be lifted relative to the substrate 620; the substrate 620 is provided with a plurality of laminated chip columns 11, and the outer periphery of each bottom plate 13 is surrounded by a plurality of laminated chip columns 11, and the laminated chip columns 11 together define a laminated chip cavity 12, so that the laminated chip box 10 is integrated on the substrate 620, and when the laminated chip box 10 is fed or discharged, n laminated chip boxes 10 can be fed or discharged at a time, and the feeding and discharging efficiency of the laminated chip box 10 is high.

[0080] The jacking mechanism 630 can be driven by a screw rod, a pneumatic cylinder, an electric cylinder or the like structure; the laminated chip box lifting device 600 can be driven by a screw rod, and the laminated chip box lifting device 600 can be provided with two laminated chip lifting mechanisms 650 and connected to the opposite sides of the laminated chip box conveying device 500 in the second direction, so that the laminated chip box conveying device 500 is lifted by the two laminated chip lifting mechanisms 650 at the same time, the two sides of the laminated chip box conveying device 500 are kept balanced, and the lifting of the laminated chip box lifting device 600 is more stable.

[0081] The laminated chip box lifting device 600 further includes a laminated chip box clamping mechanism 640 connected to the laminated chip box conveying mechanism 610, and the laminated chip box clamping mechanism 640 can at least limit the substrate 620 located at the first end to achieve the stop of the substrate 620. It can be understood that when the substrate 620 is provided with one, the laminated chip box clamping mechanism 640 limits the front end of the substrate 620 in the first direction, and when the substrate 620 is arranged with multiple in the first direction, the laminated chip box clamping mechanism 640 limits the front side of the substrate 620 located at the first end in the first direction. It can be understood that the laminated chip box clamping mechanism 640 can be provided at both ends of the laminated chip box conveying mechanism 610 at the same time, and the substrates 620 located at the tail end and the head end are limited respectively, so that the substrate 620 is clamped and limited in the predetermined range, and the substrate 620 is prevented from retreating on the premise of achieving the stop of the substrate 620. Further, the laminated chip box clamping mechanism 640 includes a stop piece, the stop piece is arranged on the laminated chip box conveying mechanism 610 in a lifting manner, the stop piece stops and limits the substrate 620 when it is stretched out upward, and the stop piece avoids the movement of the substrate 620 when it is retreated downward; or the stop piece is arranged on the laminated chip box conveying mechanism 610 in a rotating manner, the stop piece stops and limits the substrate 620 when it is rotated to protrude to the top surface of the laminated chip box conveying mechanism 610, and the stop piece avoids the movement of the substrate 620 when it is rotated to retreat below the top surface of the laminated chip box conveying mechanism 610.

[0082] In addition, the substrate conveying device 300 and the stacker conveying device 500 are provided in plurality, each substrate conveying device 300 is located at the side of the stacker conveying device 500, and the substrate can be transferred from the stacker 10 to the substrate conveying device 300 by moving the substrate taking and placing device 400 in the second direction only; each substrate conveying device 300 is used to receive the substrate provided in the stacker conveying device 500, for example Figure 7 The substrate conveying device 300 includes n substrate conveying mechanisms 310 arranged side by side in the second direction, which can be arranged on the belt conveying line. Since the number of the stackers 10 arranged in the second direction is the same as the number of the substrate conveying mechanisms 310 arranged in the second direction, the substrate taking and placing device 400 only needs to move in the second direction to take out the substrates in the n stackers 10 and place the n substrates on the n substrate conveying mechanisms 310 respectively, and each substrate conveying mechanism 310 is arranged with one substrate in the second direction.

[0083] The device further includes a flower basket conveying device 700, a flower basket lifting device 800 and a first transverse moving device 900. The flower basket conveying device 700 is located between the adjacent substrate conveying devices 300 to make full use of the space in the second direction, so that the arrangement of different devices in the device is more compact and the space utilization rate is high. The flower basket conveying device 700 is used to convey the empty flower basket 20 to the first transverse moving device 900 in the first direction. The first transverse moving device 900 extends in the second direction and conveys the flower basket 20 in the second direction after receiving the flower basket 20, and moves the flower basket 20 to different flower basket lifting devices 800. In the embodiment, the area where the flower basket lifting device 800 is located is the loading position of the flower basket 20. The flower basket lifting device 800 is used to load and lift the flower basket 20. The n substrate conveying mechanisms 310 in each substrate conveying device 300 can be inserted into the flower basket 20 from the opening 26 of the flower basket 20 and transmit the substrate into the flower basket 20 to load the substrate into the flower basket 20. Each layer of the flower basket 20 can load n substrates, complete the transfer of the substrate from the stacker 10 to the flower basket 20, and improve the loading capacity of the substrate in the flower basket 20.

[0084] Specifically, referring to Figure 8The flower basket 20 comprises a plurality of support columns 21 arranged at intervals and two vertically arranged backboards 22, the support columns 21 are parallel to each other, and the two ends of the support columns 21 are connected to the two backboards 22 respectively, the plurality of support columns 21 define n conveying cavities 23 with openings 26, each substrate conveying mechanism 310 has a suspended extension section 311, the extension section 311 can extend into the conveying cavity 23 from the opening 26 and convey the substrate into the conveying cavity 23, so that the n substrate conveying mechanisms 310 are inserted into the n conveying cavities 23 of the flower basket 20 respectively and can convey n substrates into the flower basket 20 at the same time; the support column 21 further comprises a plurality of support teeth 24 arranged at intervals in the vertical direction, the support teeth 24 arranged outside the same conveying cavity 23 are arranged protruding towards the conveying cavity 23, and the support teeth 24 located in the same horizontal plane can support the same substrate.

[0085] With reference to Figure 9 The flower basket lifting device 800 further comprises a flower basket lifting mechanism 810 and a flower basket clamping mechanism 820, the flower basket lifting mechanism 810 is used for loading and clamping the flower basket 20, the flower basket lifting mechanism 810 is connected with the flower basket clamping mechanism 820 and drives the flower basket clamping mechanism 820 to lift, the extension section 311 is located at the end of the substrate conveying mechanism 310 in the first direction, the extension section 311 is inserted into the flower basket 20, and when the flower basket clamping mechanism 820 is driven by the flower basket lifting device 800 to ascend, the n substrates are stacked layer by layer in the flower basket 20, and the n substrates of each layer are placed in the n conveying cavities 23 of the flower basket 20 respectively and are supported by the support teeth 24 at different heights.

[0086] The flower basket lifting device 800 further comprises a receiving mechanism 830, the receiving mechanism 830 can be arranged as a belt conveying line, the receiving mechanism 830 is used for receiving the empty flower basket 20 conveyed from the first transverse moving device 900, after the flower basket 20 is received by the receiving mechanism 830, the flower basket 20 is supported by the receiving mechanism 830, the flower basket clamping mechanism 820 comprises a clamping piece, the clamping piece is located at the side of the receiving mechanism 830, the clamping piece is driven to move and can clamp the flower basket 20, so that the flower basket 20 is limited, and the flower basket 20 can be lifted in the clamped state by the flower basket lifting mechanism 810, so that the lifting of the flower basket 20 is more stable.

[0087] The substrate transferring mechanism 310 loads the substrates to the flower basket 20 in the following process: the flower basket 20 is at the lowest position, the extending segments 311 of the n substrate transferring mechanisms 310 first transfer the substrates to the support teeth 24 at the uppermost layer of the flower basket 20, after the n substrates enter the n conveying cavities 23 respectively, the n substrates are supported by the support teeth 24 in the n conveying cavities 23 respectively, so that the n substrates are simultaneously loaded on the support teeth 24 at the uppermost layer of the flower basket 20; then, the flower basket lifting mechanism 810 drives the receiving mechanism 830 to ascend by one lattice, the flower basket 20 ascends by one lattice along with the receiving mechanism, one lattice is the distance between the adjacent support teeth 24 in the vertical direction, the substrates conveyed to the top layer of the support teeth 24 are separated from the extending segments 311, the substrate transferring mechanism 310 continues to transfer the substrates to the support teeth 24 at the next layer, so that the substrates are supported by the support teeth 24 at the next layer, and the loading of the substrates at the next layer is completed, along with the substrates continuously entering the conveying cavities 23 of the substrate conveying device 300, and the flower basket 20 continuously descending by one lattice, the substrate conveying device 300 can load the n substrates on the support teeth 24 at different layers, and the transfer of the substrates from the substrate conveying device 300 to the flower basket 20 is completed.

[0088] It can be understood that the flower basket lifting device 800 further comprises a blocking piece 840, the blocking piece 840 can be driven to move, and is used for stopping the flower basket 20 when the flower basket 20 moves to the preset position after the receiving mechanism 830 receives the empty flower basket 20, so that the flower basket 20 is clamped by the clamping piece, and the flower basket 20 is limited. The flower basket lifting device 800 further comprises a lifting frame 850 and a basket pressing mechanism 860, the receiving mechanism 830 and the flower basket clamping mechanism 820 are installed on the lifting frame 850, the flower basket lifting mechanism 810 is connected with the lifting frame 850, and is used for driving the lifting frame 850 to ascend and descend, so that the receiving mechanism 830, the flower basket clamping mechanism 820 and the flower basket 20 move synchronously along with the lifting frame 850; the basket pressing mechanism 860 is installed on the lifting frame 850, the basket pressing mechanism 860 is located above the receiving mechanism 830, and is used for pressing the top of the flower basket 20, so that the flower basket 20 is pressed by the basket pressing mechanism 860 in the vertical direction, and is limited by the blocking piece 840 and the clamping piece in the horizontal direction, so that the flower basket 20 can be kept stable during the lifting process, and the conveying accuracy of the substrate conveying device 300 loading the substrates to the flower basket 20 is improved. It can be understood that the basket pressing mechanism 860 comprises a pressing piece, the pressing piece is driven to move up and down to press or release the flower basket 20, and the driving mode of the pressing piece is not limited to a cylinder, an electric cylinder or the like, and the driving mode of the flower basket lifting mechanism 810 to the lifting frame 850 is not limited to a lead screw transmission, a cylinder or an electric cylinder.

[0089] As Figure 10 With Figure 11The flower basket conveying device 700 comprises a first belt conveying mechanism 710, and the first traversing device 900 comprises a second belt conveying mechanism 910. The first belt conveying mechanism 710 and the second belt conveying mechanism 910 both convey the flower baskets 20 in the first direction. The first belt conveying mechanism 710 and the second belt conveying mechanism 910 are connected to each other, and the empty flower baskets 20 are conveyed from the flower basket conveying device 700 to the first traversing device 900. The second belt conveying mechanism 910 is connected to the receiving mechanism 830, and the empty flower baskets 20 are transferred to the flower basket lifting device 800. The first belt conveying mechanism 710 and the second belt conveying mechanism 910 are both provided with guide rails for guiding the flower baskets 20. The guide rails are used for limiting and guiding the two sides of the flower baskets 20, thereby improving the stability of the flower baskets 20 during the conveying process.

[0090] The first traversing device 900 further comprises a traversing mechanism 920 extending in the second direction. The second belt conveying mechanism 910 is connected to the traversing mechanism 920. The plurality of flower basket lifting devices 800 are arranged at intervals in the second direction. The traversing mechanism 920 moves the empty flower baskets 20 to different flower basket lifting devices 800, and the flower baskets 20 transferred by the first traversing device 900 are received by the receiving mechanism 830 in the flower basket lifting device 800.

[0091] The device further comprises a flower basket overturning device 1000, a pressing rod loading device 1100 and a mechanical arm 1200. The flower basket overturning device 1000 is used for loading the flower baskets 20 full of substrates and overturning the flower baskets 20 in the vertical plane, so that the opening 26 of the flower basket 20 faces upward. That is, after the flower baskets 20 are loaded with substrates at the flower basket lifting device 800, the flower baskets 20 are conveyed downward to the next process by the receiving mechanism 830. At this time, the flower baskets 20 are in a vertical state, and the opening 26 faces the opposite direction of the first direction. After the flower basket overturning device 1000 receives the full flower baskets 20, the flower baskets 20 are overturned in the vertical plane. The flower baskets 20 are switched from the vertical state to the horizontal state, and the opening 26 faces upward. Figure 12 With Figure 13The pressing rod loading device 1100 is used for loading the pressing rod 30 to the basket 20 with the opening 26 facing upward, and the pressing rod loading device 1100 comprises a jacking assembly 1110 and a pressing rod clamping assembly 1120. After the mechanical hand 1200 transfers the pressing rod 30 to the pressing rod loading device 1100, the pressing rod 30 is located directly above the opening 26 of the basket 20. The jacking assembly 1110 drives the pressing rod clamping assembly 1120 to ascend to a position corresponding to the pressing rod 30 and clamp the two ends of the pressing rod 30 to stabilize the position of the pressing rod 30. The mechanical hand 1200 releases the pressing rod 30 and returns. The jacking assembly 1110 drives the pressing rod clamping assembly 1120 to carry the pressing rod 30 to descend, and the pressing rod 30 is loaded at the opening 26 of the basket 20, so that the pressing rod 30 is in a placed state. The pressing rod 30 is located at the position of the opening 26 of the basket 20, can block the movement of the substrate in the conveying cavity 23, and can prevent the substrate in the conveying cavity 23 from overflowing from the conveying cavity 23 due to buoyancy when the texturing / cleaning process is performed. The pressing rod clamping assembly 1120 can also drive the pressing rod 30 to rotate, so as to switch the pressing rod 30 to a locked state. At this time, the position of the pressing rod 30 in the vertical direction is locked and cannot be separated from the basket 20. When the mechanical hand 1200 transfers the basket 20, the pressing rod 30 can always remain stable in position and in a limiting state of the substrate.

[0092] Specifically, the side of the two basket plates 22 is provided with a mounting groove 25, and the mounting groove 25 is located on the side of the basket 20 provided with the opening 26. When the opening 26 of the basket 20 faces upward, at least one pressing rod 30 is arranged directly above each opening 26. The pressing rod 30 has a locking portion 31. When the pressing rod 30 is in a placed state, the locking portion 31 is vertically arranged. When the pressing rod 30 is in a locked state, the locking portion 31 is horizontally arranged. In the arrangement direction of the opening 26, the width of the locking portion 31 in the placed state is less than the width of the locking portion 31 in the locked state. The mounting groove 25 has a first groove portion and a second groove portion. The second groove portion is communicated to the outside of the basket 20 through the first groove portion. The width of the first groove portion in the arrangement direction of the opening 26 is less than the width of the second groove portion in the arrangement direction of the opening 26. The width of the first groove portion is greater than the width of the locking portion 31 when the locking portion 31 is vertically arranged, and is less than the width of the locking portion 31 when the locking portion 31 is horizontally arranged. In this way, the locking portion 31 of the pressing rod 30 in the vertical state can be inserted into the second groove portion from the first groove portion. Therefore, the locking portion 31 in the vertical state can move in the first groove portion and the second groove portion. After the locking portion 31 is switched to the horizontal state by following the rotation of the pressing rod 30, the locking portion 31 is limited in the second groove portion by the limitation of the top surface of the second groove wall and remains in the locked state.

[0093] The pressing rod clamping assembly 1120 comprises a plurality of rotatable rotating wheels 1121, the rotating axis of the rotating wheel 1121 is parallel to the length direction of the pressing rod 30, the end of the rotating wheel 1121 in the axial direction is provided with a locking groove 1122, the locking groove 1122 is used for being axially inserted with the locking portion 31 at the end of the pressing rod 30, the rotating wheel 1121 is driven to rotate and drives the pressing rod 30 to rotate, so that the locking portion 31 of the pressing rod 30 is switched from the vertical placement state to the horizontal locking state. It can be understood that the locking groove 1122 has a shape matched with the locking portion 31, so that the locking portion 31 can be inserted into the locking groove 1122 and rotate with the rotating wheel 1121; when the pressing rod 30 is clamped by the pressing rod clamping assembly 1120 and not loaded to the flower basket 20, and in the initial state when the pressing rod 30 is loaded to the flower basket 20, the locking groove 1122 and the locking portion 31 are vertically arranged, when the rotating wheel 1121 moves relative to the flower basket 20 along the rotating axis, with the rotation of the rotating wheel 1121, the locking portion 31 is driven by the groove wall of the locking groove 1122 to rotate with the rotating wheel 1121, and is rotated to the horizontal state, at this time, the locking portion 31 is switched to the locking state.

[0094] Further, the pressing rod clamping assembly 1120 is provided with two, the two pressing rod clamping assemblies 1120 are oppositely arranged, and the same number of rotating wheels 1121 as the pressing rods 30 are arranged in each pressing rod clamping assembly 1120. The rotating wheels 1121 in the two pressing rod clamping assemblies 1120 are provided with mounting grooves 25 and are respectively used for being axially inserted with the locking portions 31 at the two ends of the pressing rod 30. The rotating wheels 1121 in the pressing rod clamping assembly 1120 can be synchronously rotated through belt transmission, gear transmission and the like, the driving component is installed in one of the pressing rod clamping assemblies 1120 and provides power for the rotation of the rotating wheel 1121 in the pressing rod clamping assembly 1120, one of the rotating wheels 1121 in the pressing rod clamping assembly 1120 serves as a driving wheel to transmit power to the other rotating wheels 1121, and the rotating wheels 1121 in the other pressing rod clamping assembly 1120 all serve as driven wheels and synchronously rotate with the pressing rod 30. The two pressing rod clamping assemblies 1120 can move towards or away from the flower basket 20, the movement of the pressing rod clamping assembly 1120 can be driven through a cylinder, an electric cylinder, a screw rod transmission and the like, when the pressing rod clamping assembly 1120 moves towards the flower basket 20, the locking groove 1122 of the rotating wheel 1121 is axially inserted with the locking portion 31 of the pressing rod 30, the pressing rod 30 is clamped by the pressing rod clamping assembly 1120 and can rotate with the rotating wheel 1121, when the pressing rod clamping assembly 1120 moves away from the flower basket 20, the locking portion 31 is withdrawn from the locking groove 1122.

[0095] The pressure rod loading device 1100 further comprises a basket transverse conveying mechanism 1130 and a basket positioning assembly 1140. The basket transverse conveying mechanism 1130 can be provided as a belt conveying line and is used to receive the horizontally arranged basket 20 output by the basket overturning device 1000. The basket transverse conveying mechanism 1130 conveys the basket 20. A stopping structure is further provided in the pressure rod loading device 1100 to stop the basket 20, so that the basket 20 stops moving when conveyed to a preset position by the basket transverse conveying mechanism 1130. The basket positioning assembly 1140 comprises at least two positioning cones 1141 which can be driven to move towards or away from the basket plate 22. The basket plate 22 is provided with positioning holes 27 which cooperate with the positioning cones 1141. When the horizontally arranged basket 20 is received and conveyed to the preset position by the basket transverse conveying mechanism 1130, the positioning cones 1141 are driven to extend towards the basket plate 22 and are inserted into the positioning holes 27, thereby positioning the basket 20 and improving the position accuracy of the basket 20. In addition, the cross section of the positioning cone 1141 can be gradually reduced along the moving direction of the positioning cone 1141 towards the basket plate 22. Similarly, the hole wall of the positioning hole 27 can be gradually reduced along the direction away from the positioning cone 1141. Therefore, when the positioning cone 1141 is inserted into the positioning hole 27, the outer wall of the positioning cone 1141 cooperates with the hole wall of the positioning hole 27, thereby centering the positioning hole 27 and finely adjusting the position of the basket 20, improving the position accuracy of the basket 20, and enabling the pressure rod 30 to be accurately inserted into the mounting groove 25 when the basket 20 is jacked up.

[0096] It should be noted that the specific process of loading the pressure rod 30 is as follows. After the horizontally arranged basket 20 is conveyed to the basket transverse conveying mechanism 1130, the basket 20 stops when encountering the stopping structure. The positioning cone 1141 in the basket positioning assembly 1140 moves towards the basket 20 and cooperates with the positioning hole 27 on the basket plate 22 of the basket 20 to achieve clamping and limiting of the basket 20. The mechanical arm 1200 carries the pressure rod 30 and moves the pressure rod 30 above the opening 26 of the basket 20. The jacking assembly 1110 lifts the pressure rod clamping assembly 1120 to enable the locking groove 1122 of the rotating wheel 1121 to align with the locking portion 31 of the pressure rod 30. The pressure rod clamping assembly 1120 moves towards the pressure rod 30, and then the locking portion 31 is inserted into the locking groove 1122. The pressure rod 30 is clamped and limited. The jacking assembly 1110 retreats. The pressure rod clamping assembly 1120 and the pressure rod 30 are driven to descend. The pressure rod 30 is loaded into the mounting groove 25 of the basket 20. The rotating wheel 1121 drives the pressure rod 30 to rotate and enables the locking portion 31 to switch to a locked state. The installation and fixation of the pressure rod 30 to the basket 20 are completed. The pressure rod clamping assembly 1120 and the basket positioning assembly 1140 retreat. The mechanical arm 1200 grabs the basket 20 on which the pressure rod 30 has been loaded and transfers the basket 20 to the next process.

[0097] When the flower basket 20 is transferred downward by the flower basket lifting device 800, the opening 26 of the flower basket 20 faces the reverse direction of the first direction, and the flower basket 20 is in a vertical state. The flower basket 20 can be directly transferred from the flower basket lifting device 800 to the flower basket overturning device 1000. That is, after the flower basket 20 is filled with substrates at the flower basket lifting device 800, the flower basket 20 is directly transported to the flower basket overturning device 1000. The flower basket overturning device 1000 overturns the flower basket 20, so that the opening 26 of the flower basket 20 faces upward, and the flower basket 20 is switched to a horizontal state. In other embodiments, the device further comprises a flower basket rotating device 1300, which is located between the flower basket lifting device 800 and the flower basket overturning device 1000. The flower basket rotating device 1300 is used to rotate the flower basket 20 in a horizontal plane to change the orientation of the opening 26 of the flower basket 20. For example, the flower basket rotating device 1300 receives the full flower basket 20 transported by the receiving mechanism 830. At this time, the flower basket 20 is in a vertical state, and the opening 26 faces the reverse direction of the first direction. The flower basket rotating device 1300 rotates the flower basket 20 and rotates the flower basket 20 in a vertical state, so that the opening 26 of the flower basket 20 faces the second direction or the reverse direction of the second direction. The flower basket overturning device 1000 receives the flower basket 20 transported by the flower basket rotating device 1300 and overturns the flower basket 20 in a vertical plane, so that the opening 26 of the flower basket 20 faces upward, and the flower basket 20 is switched to a horizontal state. Through the rotation of the flower basket rotating device 1300, the moving path of the flower basket 20 during the transportation process to the flower basket overturning device 1000 can be shortened. In addition, the longer end of the flower basket 20 is arranged along the second direction, which can provide sufficient space for the operation of the robot 1200.

[0098] Further, as Figure 14 , the flower basket rotating device 1300 comprises a flower basket rotating conveying line 1310 and a rotating mechanism 1320. The flower basket rotating conveying line 1310 is used to receive the flower basket 20 transported by the receiving mechanism 830. After the flower basket 20 moves to a predetermined position of the flower basket rotating conveying line 1310 and is stopped, the rotating mechanism 1320 lifts the flower basket 20 upward and rotates the flower basket 20. After the rotation is completed, the rotating mechanism 1320 lowers the flower basket 20 and places the flower basket 20 on the flower basket rotating conveying line 1310 again, and then the flower basket 20 is transported to the next process by the flower basket rotating conveying line 1310.

[0099] Referring to Figure 15The flower basket overturning device 1000 comprises an overturning mechanism 1010, a stopping mechanism 1020, a first conveying mechanism 1030, a second conveying mechanism 1040, a pressing basket assembly 1050 and an overturning frame 1060. The pressing basket assembly 1050 and the first conveying mechanism 1030 are respectively installed at two ends of the overturning frame 1060. The first conveying mechanism 1030 is used for receiving the flower basket 20 conveyed by the flower basket lifting device 800 or the flower basket rotating device 1300. After the flower basket 20 is conveyed to a preset position by the first conveying mechanism 1030, the stopping mechanism 1020 stops the flower basket 20. The pressing basket assembly 1050 extends towards the first conveying mechanism 1030 and clamps the flower basket 20 in cooperation with the first conveying mechanism 1030. At this time, the flower basket 20 is fixed. The overturning mechanism 1010 is connected with the overturning frame 1060 and is used for rotating the overturning frame 1060 in a vertical plane. The overturning frame 1060 synchronously drives the first conveying mechanism 1030, the stopping mechanism 1020 and the pressing rod 30 mechanism to overturn, so that the flower basket 20 is switched from a vertical state to a horizontal state with the opening 26 facing upwards. After the flower basket 20 is switched to the horizontal state, the bottom surface of the flower basket 20 is supported by the second conveying mechanism 1040. The second conveying mechanism 1040 is used for conveying the flower basket 20 with the opening 26 facing upwards to the pressing rod loading device 1100.

[0100] It can be understood that the first conveying mechanism 1030 and the second conveying mechanism 1040 are respectively installed at two sides of the overturning frame 1060 perpendicular to each other, so that the flower basket overturning device 1000 can convey the flower basket 20 in the vertical state and the horizontal state respectively. The first conveying mechanism 1030 and the second conveying mechanism 1040 can both adopt a belt conveying line. Taking the case that the flower basket 20 is in the vertical state, the basket plates 22 of the flower basket 20 are respectively located at the top and the bottom of the flower basket 20, and the supporting column 21 is located at the side of the flower basket 20. When the flower basket 20 is in the vertical state, the basket plate 22 at the bottom of the flower basket 20 is supported and conveyed by the first conveying mechanism 1030, and the basket plate 22 at the top of the flower basket 20 is limited by the pressing and holding of the pressing basket assembly 1050. When the flower basket 20 is switched to the horizontal state, the sides of the two basket plates 22 are supported and conveyed by the second conveying mechanism 1040.

[0101] In addition, the stop mechanism 1020 is used to limit the side of the flower basket 20 when the flower basket 20 is moved to a preset position by the first conveying mechanism 1030. On the one hand, the stop mechanism 1020 limits the side of the flower basket 20, and the flower basket 20 can be stopped by the stop mechanism 1020 regardless of the conveying state of the flower basket 20 by the first conveying mechanism 1030 or the second conveying mechanism 1040, without the need to repeatedly set multiple stop mechanisms. On the other hand, the stop mechanism 1020 does not affect the conveying of the flower basket 20 in the horizontal or vertical state when it is in the retracted state. Further, when the stop mechanism 1020 is extended, it can abut and limit a certain support rod of the flower basket 20 to stop the flower basket 20. For different specifications of the flower basket 20 or different installation positions of the support rod, the position of the stop mechanism 1020 can be adjusted to meet the stopping needs of different flower baskets 20. For example, the stop mechanism 1020 can be detachably installed on the turnover frame 1060, and the turnover frame 1060 is provided with a plurality of installation holes for installing the stop mechanism 1020, or the turnover frame 1060 is provided with an installation slot 25 for installing the stop mechanism 1020, and the installation slot 25 extends in multiple directions.

[0102] The flower basket turnover device 1000 further comprises a support frame 1070 and a second horizontal moving mechanism 1080. The turnover frame 1060 is rotationally connected to the support frame 1070. The turnover mechanism 1010 is installed on the support frame 1070 and drives the turnover frame 1060 to turn. The support frame 1070 is connected to the second horizontal moving mechanism 1080. The second horizontal moving mechanism 1080 extends in a second direction and is used to convey the support frame 1070 in the second direction, so that the second conveying mechanism 1040 is connected to different pressure rod loading devices 1100 and the horizontally arranged flower basket 20 is conveyed to the flower basket horizontal conveying mechanism 1130 of the pressure rod loading device 1100. The second horizontal moving mechanism 1080 can be selected as a belt conveying line or a gear and rack conveying line.

[0103] The device further comprises a pressure rod conveying device 1400. The pressure rod conveying device 1400 comprises a pressure rod box for loading the pressure rod 30. The locking portion 31 of the pressure rod 30 can be placed in the pressure rod box in a vertical state, so that the mechanical hand 1200 can pick up the pressure rod 30. When the mechanical hand 1200 transfers the pressure rod 30 to above the opening 26 of the flower basket 20, the locking portion 31 of the pressure rod 30 is in a vertical state, so that it can be clamped by the pressure rod clamping assembly 1120 in a vertical state. When the pressure rod 30 is loaded into the flower basket 20, the locking portion 31 can be inserted into the installation slot 25 in a vertical state.

[0104] It can be understood that the manipulator 1200 can grasp n pressing rods 30 at a time, and the pressing rod clamping assembly 1120 is provided with n rotating wheels 1121, which can load n pressing rods 30 into the flower basket 20 at a time, so that the substrates in the n conveying cavities 23 in the flower basket 20 can be blocked by the pressing rods 30. The pressing rod box is provided with a plug-in slot for inserting the locking part 31 of the pressing rod 30, which limits the locking part 31 to a vertical state; the plug-in slot extends vertically, and each plug-in slot can arrange a plurality of pressing rods 30.

[0105] The pressing rod conveying device 1400 further comprises a pressing rod conveying assembly, the pressing rod box is placed on the pressing rod conveying assembly and conveyed forward by the pressing rod conveying assembly, and the pressing rod conveying assembly can be a belt conveying line. The device further comprises a loading platform 1500, which is used to place the flower basket 20 grasped by the manipulator 1200 at the pressing rod loading device 1100. The loading platform 1500 is arranged opposite to the pressing rod loading device 1100, and the manipulator 1200 is located between the loading platform 1500 and the pressing rod loading device 1100. The pressing rod conveying assembly is arranged on the side of the loading platform 1500 and the pressing rod loading device 1100. In this way, the moving path of the manipulator 1200 between the pressing rod conveying assembly, the pressing rod loading device 1100 and the loading platform 1500 can be shortened, and the process efficiency can be improved.

[0106] Referring to Figure 1 , Figure 16 and Figure 17The mechanical arm 1200 in the application includes a transfer mechanism 1210 and a grabbing mechanism 1220 connected to the end of the transfer mechanism 1210. The grabbing mechanism 1220 includes a pressure rod gripper 1221 and a basket gripper 1222. The pressure rod gripper 1221 is suitable for grabbing the pressure rod 30, and the basket gripper 1222 is suitable for grabbing the basket 20. The grabbing mechanism 1220 is driven by the transfer mechanism 1210 to shift positions. The transfer mechanism 1210 can be provided with rotation and / or movement freedom to enable the grabbing mechanism 1220 to move between the pressure rod loading device 1100 and the feeding platform 1500, and the grabbing mechanism 1220 picks up the basket 20 at the pressure rod loading device 1100 and shifts to the feeding platform 1500. The grabbing mechanism 1220 also moves between the pressure rod conveying device 1400 and the pressure rod loading device 1100 to enable the grabbing mechanism 1220 to pick up the pressure rod 30 at the pressure rod conveying device 1400 and shift the pressure rod 30 to the pressure rod loading device 1100. That is, the mechanical arm 1200 in the application can simultaneously grasp the basket 20 and the pressure rod 30, occupies a small space, and does not affect the position layout of other devices. In the related art, one robot is used to grasp the pressure rod, and another robot is used to grasp the basket. Understandably, the robot needs to consider multiple degrees of freedom of driving, and its operation needs sufficient activity area, which occupies a larger space. In the application, only one mechanical arm can simultaneously grasp the basket and the pressure rod, reducing the space occupied by the robot. Further, the pressure rod gripper 1221 is connected to one end of the basket gripper 1222, and the grasping of the pressure rod 30 and the basket 20 does not affect each other.

[0107] It should be noted that in the related art, a first robot grasps a full load basket conveyed from the basket lifting device 800 or the basket rotating device 1300, and then conveys the basket to the pressure rod loading device 1100. A second robot grasps the pressure rod and loads the pressure rod on the basket at the pressure rod loading device 1100. After the pressure rod loading is completed, the first robot carries the basket to the feeding platform 1500. In the application, the pressure rod and the basket are both grasped by the mechanical arm 1200, and multiple robots are not needed, reducing the space occupied by the robot. In addition, the full load basket at the basket lifting device 800 or the basket rotating device 1300 is directly conveyed to the basket turnover device 1000 for turnover. The basket turnover device 1000 conveys the basket in a horizontal state to the pressure rod loading device 1100 through the second conveying mechanism 1040. The turnover and transfer process of the basket does not need the participation of the robot, reducing the space occupation and making the arrangement between different devices more compact.

[0108] The flower basket gripper 1222 comprises two oppositely arranged flower basket clamping portions 12221, at least one of which is connected with a driving element, which is arranged as a pneumatic cylinder, an electric cylinder, a ball screw, etc., and drives the two flower basket clamping portions 12221 to move towards or away from each other, so as to clamp or release the flower basket 20.

[0109] The pressing rod gripper 1221 comprises a first bottom plate 12211 and at least three first clamping portions 12212, which are mounted on the first bottom plate 12211 and are distributed at intervals, and comprises a second bottom plate 12213 and at least three second clamping portions 12214, which are mounted on the second bottom plate 12213 and are distributed at intervals, and the first bottom plate 12211 and the second bottom plate 12213 are slidably connected in the clamping direction, and each first clamping portion 12212 is provided with a second clamping portion 12214 on the side in the clamping direction, and the first bottom plate 12211 and / or the second bottom plate 12213 is connected with a driving component, which is arranged as an electric cylinder, a pneumatic cylinder or a ball screw, etc., and when the first bottom plate 12211 and the second bottom plate 12213 move relatively in the clamping direction, the first clamping portion 12212 and the second clamping portion 12214 move towards or away from each other, so as to clamp or release the pressing rod 30, and since the first bottom plate 12211 drives multiple first clamping portions 12212 to move at the same time, and the second bottom plate 12213 drives multiple second clamping portions 12214 to move at the same time, each first clamping portion 12212 can cooperate with a second clamping portion 12214 to clamp a pressing rod 30, so that the pressing rod gripper 1221 can grasp multiple pressing rods 30.

[0110] It can be understood that the first clamping portion 12212 and the second clamping portion 12214 are provided with recesses arranged towards each other, and when the first clamping portion 12212 and the second clamping portion 12214 are close to each other, the recesses of the two define a space for accommodating the pressing rod 30, and limit the pressing rod 30, so that the pressing rod 30 is stably clamped between the first clamping portion 12212 and the second clamping portion 12214.

[0111] The embodiments of the application are described in detail above with reference to the drawings, but the application is not limited to the above-described embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the purpose of the application. In addition, the embodiments of the application and the features in the embodiments can be combined with each other without conflict.

Claims

1. Automatic half-plate guiding and loading apparatus, characterized in that, The automatic half wafer guiding and loading device comprises an operation platform, a gas-knife assembly fixed on the top of the operation platform, a wafer conveying device, a wafer stack conveying device, a wafer stack lifting device, a first horizontal moving device, a flower basket conveying device, a flower basket lifting device, and a first horizontal moving device. The gas-knife assembly comprises a plurality of blowing groups, each of which comprises at least one gas-knife, and each blowing group is configured to blow air flow to the substrate in one of the wafer stacks in a first direction, the blowing groups are arranged in the first direction and a second direction, and n blowing groups are arranged in the second direction, where n≥3, the first direction is perpendicular to the second direction. The wafer conveying device is used to convey the substrate in the wafer stack to the loading position of the flower basket, and n wafers are arranged in the second direction. The wafer conveying device is used to pick up the substrate in the wafer stack and place it on the wafer conveying device for transmission. The wafer stack conveying device is used to convey the wafer stack in the first direction. The wafer stack lifting device is connected with the wafer stack conveying device and is used to drive the wafer stack conveying device to lift, the wafer stack conveying device has a feeding position, a discharging position and a wafer sucking position, the height of the discharging position, the feeding position and the wafer sucking position increases, the wafer stack conveying device is configured to receive the wafer stack full of substrates at the feeding position, and is lifted to the wafer sucking position by the driving of the wafer stack lifting device, so as to be blown by the air flow of the gas-knife assembly, and the wafer in the wafer stack is taken out by the wafer picking and placing device and placed on the wafer conveying device, and then the wafer stack conveying device is lowered to the discharging position by the driving of the wafer stack lifting device, and the empty wafer stack is conveyed. The wafer conveying device and the wafer stack conveying device are provided with a plurality of each, and each wafer conveying device is located on the side of the wafer stack conveying device. The automatic half wafer guiding and loading device further comprises a flower basket conveying device, a flower basket lifting device and a first horizontal moving device, the flower basket conveying device is located between adjacent wafer conveying devices and is used to convey the empty flower basket to the first horizontal moving device in the first direction, the first horizontal moving device extends in the second direction and conveys the empty flower basket to the flower basket lifting device in the second direction, the flower basket lifting device is used to load and lift the flower basket, the wafer conveying device can be inserted into the empty flower basket from the opening of the flower basket and load the substrate in the flower basket, and n substrates are arranged in each layer. The operation platform has a lifting opening vertically through, the wafer stack conveying device comprises a wafer stack conveying mechanism, a base plate and a jacking mechanism, the base plate is placed on the wafer stack conveying mechanism and is driven to move in the first direction, the base plate is used to place the wafer stack, and the jacking mechanism is installed on the bottom of the base plate and is used to connect the bottom of the wafer stack and drive the wafer stack to lift relative to the base plate.

2. The automatic half tablet indexing and dosing device of claim 1, wherein, The wafer stack conveying device further comprises a wafer stack clamping mechanism connected to the wafer stack conveying mechanism, the base plate is provided with a plurality of and arranged on the top of the wafer stack conveying mechanism in the first direction, and the wafer stack clamping mechanism can at least limit the base plate located at the first end of the first direction.

3. The automatic half tablet indexing and dosing device of claim 2, wherein, ​ 4. The automatic half tablet indexing and dosing apparatus of claim 1, wherein, Each of the blowing groups comprises a plurality of air knives arranged along the first direction and oppositely arranged, and the plurality of air knives can simultaneously blow air flow towards the laminated box.

5. The automatic half tablet indexing and dosing device of claim 1, wherein, Each of the substrate conveying devices comprises n substrate conveying mechanisms arranged side by side along the second direction, the flower basket lifting device comprises a flower basket lifting mechanism and a flower basket clamping mechanism, the flower basket clamping mechanism is used for loading and clamping the flower basket, the flower basket lifting mechanism is connected with the flower basket clamping mechanism and drives the flower basket clamping mechanism to lift, and the n substrate conveying mechanisms of each of the substrate conveying devices are inserted into the flower basket at the end in the first direction, and when the flower basket lifting mechanism drives the flower basket clamping mechanism to rise, n substrates are stacked in the flower basket layer by layer.

6. The automatic half tablet indexing and dosing apparatus of claim 1, wherein, The automatic half-plate guide and plate loading equipment further comprises a flower basket overturning device, a pressure rod loading device and a mechanical hand, the flower basket overturning device is used for loading and overturning the flower basket in a vertical plane to make the opening of the flower basket face upward, the pressure rod loading device comprises a jacking assembly and a pressure rod clamping assembly, the pressure rod clamping assembly is used for clamping the pressure rod conveyed by the mechanical hand, the jacking assembly is used for driving the pressure rod clamping assembly to lift to clamp the pressure rod conveyed by the mechanical hand and load the pressure rod in the flower basket to make the pressure rod in a placed state, and then drive the pressure rod to rotate to switch the pressure rod to a locked state.

7. The automatic half tablet indexing and dosing device of claim 6, wherein, The pressure rod clamping assembly comprises a plurality of rotatable rotating wheels, the end of the rotating wheel in the axial direction is provided with a locking groove, the locking groove is used for being axially inserted with the locking part at the end of the pressure rod, and when the rotating wheel rotates, the pressure rod can be driven to rotate to switch the locking part from the vertical placed state to the horizontal locked state.

8. The automatic half tablet indexing and dosing device of claim 6, wherein, The automatic half-plate guide and plate loading equipment further comprises a flower basket rotating device, the flower basket rotating device is used for loading the flower basket and rotating the flower basket in a horizontal plane to change the orientation of the opening of the flower basket, the flower basket overturning device receives the flower basket conveyed by the flower basket rotating device and overturns the flower basket to make the opening face upward.

9. The automatic half tablet indexing and dosing device of claim 6, wherein, The pressure rod loading device further comprises a flower basket transverse conveying mechanism and a flower basket positioning assembly, the flower basket transverse conveying mechanism is used for conveying the flower basket with the opening facing upward, and the flower basket positioning assembly comprises at least two positioning cones, the positioning cones can be moved towards the flower basket or away from the flower basket to abut against the end faces of the opposite ends of the flower basket to limit the flower basket located on the flower basket transverse conveying mechanism.

10. The automatic half tablet indexing and dosing device of claim 6, wherein, The flower basket overturning device comprises an overturning mechanism, a stopping mechanism, a first conveying mechanism, a second conveying mechanism, a basket pressing assembly and an overturning frame, the basket pressing assembly and the first conveying mechanism are respectively installed at the two ends of the overturning frame, the first conveying mechanism is used for receiving the flower basket conveyed by the flower basket lifting device, the basket pressing assembly is used for pressing the flower basket, the overturning mechanism is connected with the overturning frame and is used for rotating the overturning frame in a vertical plane, the second conveying mechanism is used for conveying the flower basket with the opening facing upward to the pressure rod loading device, and the stopping mechanism is used for limiting the flower basket.

11. The automatic half tab guiding and tabbing apparatus according to claim 10, wherein The automatic half tablet guiding and loading device further comprises a pressing rod conveying device, which comprises a pressing rod box for loading the pressing rod, the locking part of the pressing rod can be placed in the vertical state in the pressing rod box and is picked up by the mechanical hand, and the pressing rod is loaded in the vertical state in the flower basket.

12. The automatic half tablet indexing and dosing device of claim 6, wherein, The mechanical hand comprises a transfer mechanism and a grabbing mechanism connected to the end of the transfer mechanism, the grabbing mechanism is driven by the transfer mechanism to shift the position, the grabbing mechanism comprises a pressing rod gripper and a flower basket gripper, the pressing rod gripper is connected to one end of the flower basket gripper, the pressing rod gripper is suitable for grabbing the pressing rod, and the flower basket gripper is suitable for grabbing the flower basket.

13. The automatic half tab guiding and tabbing apparatus according to claim 12, wherein, The pressing rod gripper comprises a first bottom plate and at least three first clamping parts, the first clamping parts are mounted on the first bottom plate and are distributed at intervals, the pressing rod gripper comprises a second bottom plate and at least three second clamping parts, the second clamping parts are mounted on the second bottom plate and are distributed at intervals, the first bottom plate and the second bottom plate are slidingly connected in the clamping direction, each side of each first clamping part in the clamping direction is provided with the second clamping part, and the first clamping part and the second clamping part can be relatively moved to clamp or release the pressing rod.

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