Multifunctional transition cabin structure and inkjet printing system

Abstract

The application relates to a multifunctional transition cabin structure and an inkjet printing system, the multifunctional transition cabin structure comprising a cabin body and two groups of communication assemblies, opposite sides of the cabin body are provided with material openings, the two groups of communication assemblies are communicated with the cabin body through the two material openings, and the cabin body is communicated with an external environment or a process cabin through the communication assemblies; the communication assembly comprises a communication box, first and second communication openings are respectively arranged in the two side faces of the communication box, and two door body structures are arranged, the two door body structures are respectively adapted to block or open the first and second communication openings, and the door body structures abut against the inner wall of the communication box. The cabin body is communicated with the external environment and the process cabin through the two groups of communication assemblies, the two door body structures of the communication assembly are respectively resistant to positive pressure environment and negative pressure environment, so that positive pressure treatment of the cabin body is supported, the substrate is preliminarily treated in the form of air supply in the cabin body, and the possibility of air leakage of the cabin body is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of display panel processing, in particular to a multifunctional transition cabin structure and an inkjet printing system. BACKGROUND

[0002] The inkjet printing technology has a wide application prospect in the manufacturing fields of information, energy, medical treatment, national defense and the like, and in recent years, is more and more applied to the fields of OLED, RFID, thin film solar cell, wearable flexible device, PCB, intelligent skin, LED direct display and the like.

[0003] The substrate needs to be processed through multiple processes to be shaped. When the substrate is processed through different processes, the atmosphere environment and pressure environment of the process cabin are adjusted to the requirements of the process, so that the substrate is processed in the process cabin.

[0004] Generally, when the substrate is transported into the process cabin, in order not to destroy the atmosphere environment in the process cabin, a transition cabin is connected at the feeding port of the process cabin. The substrate is first sent into the transition cabin, then the atmosphere environment in the transition cabin is adjusted to be consistent with the atmosphere environment in the process cabin, then the transition cabin and the process cabin are connected, and then the substrate in the transition cabin is transferred into the process cabin by the mechanical hand in the process cabin. Therefore, when the substrate is fed into the process cabin, the influence on the atmosphere environment in the process cabin is very small.

[0005] In the related art, after the substrate is placed in the transition cabin, the cabin door of the transition cabin is abutted against the outer wall of the transition cabin by a gas cylinder, so that the feeding port of the transition cabin is blocked to isolate the transition cabin from the process cabin. Then, the atmosphere environment in the transition cabin is cleaned by vacuumizing the transition cabin, and then the atmosphere environment in the transition cabin is adjusted to be consistent with the atmosphere environment in the process cabin by filling the transition cabin with gas, so that the atmosphere environment in the transition cabin is adjusted to be consistent with the atmosphere environment in the process cabin.

[0006] Since the cabin door of the transition cabin is abutted against the outer wall of the transition cabin, when the transition cabin is in a negative pressure state, the cabin door is tightly attached to the transition cabin due to the gas pressure, so as to ensure the sealing of the transition cabin. However, when the transition cabin is filled with gas, the transition cabin is in a positive pressure state, the gas pressure pushes the cabin door away from the transition cabin, so that the external environment is communicated with the transition cabin, and the process cabin is also communicated with the transition cabin, which is easy to destroy the atmosphere environment in the process cabin. Therefore, the transition cabin cannot support positive pressure processing, and it is also difficult to preliminarily process the substrate in the transition cabin by using the form of gas supply. SUMMARY

[0007] The embodiments of the present application provide a multifunctional transition cabin structure and an inkjet printing system to solve the technical problems that the transition cabin cannot support positive pressure processing in the related art, the atmosphere environment in the process cabin is easy to be destroyed, and it is difficult to preliminarily process the substrate in the transition cabin by using the form of gas supply.

[0008] In a first aspect, a multifunctional transition chamber structure is provided, which includes a chamber body and two sets of communication assemblies, opposite sides of the chamber body are each provided with a material port, the two sets of communication assemblies are respectively communicated with the chamber body through the two material ports, and the chamber body is communicated with an external environment or a process chamber through the communication assemblies; the communication assembly includes:

[0009] a communication box, first and second communication ports are respectively provided on two side faces of the communication box, the first communication port is communicated with the material port to enable the communication box to be communicated with the chamber body, and the communication box is communicated with the external environment or the process chamber through the second communication port;

[0010] two door body structures, the two door body structures are respectively arranged at the first and second communication ports, and the two door body structures are respectively adapted to block or open the first and second communication ports, and the door body structure is abutted against an inner wall of the communication box.

[0011] In some embodiments, the door body structure includes:

[0012] a door plate, the door plate is slidingly arranged on the inner wall of the communication box;

[0013] a sliding driving member, the sliding driving member is drivingly connected with the door plate to drive the door plate to slide; wherein,

[0014] the sliding driving member drives the door plate to slide to block or open the first or second communication port.

[0015] In some embodiments, the door body structure further includes an abutting assembly, and the abutting assembly includes:

[0016] an abutting frame, the abutting frame is slidingly arranged on the inner wall of the communication box, the door plate is connected to the abutting frame, and the sliding driving member is drivingly connected with the abutting frame;

[0017] an abutting driving member, the abutting driving member is mounted on the abutting frame, and the abutting driving member is drivingly connected with the door plate to drive the door plate to abut against or move away from the inner wall of the communication box.

[0018] In some embodiments, the multifunctional transition chamber structure further includes a supporting assembly, and the supporting assembly includes:

[0019] a supporting plate, the supporting plate is fixed in the chamber body;

[0020] a plurality of top rods, the plurality of top rods are spaced apart and are each connected perpendicularly to the supporting plate, and the plurality of top rods are used to support a substrate to leave a distance between the substrate and the supporting plate.

[0021] In some embodiments, the support assembly further includes multiple guide members connected to the top surface of the support plate. The multiple guide members are all disposed near the edge of the support plate. Each guide member includes a guide ramp. When an external robot arm lowers the substrate to a position close to the top rod, the guide member corrects the position of the substrate through the guide ramp.

[0022] In some embodiments, the multifunctional transition chamber structure further includes two sets of positioning components, which act on two opposite corners of the base plate to adjust the position of the base plate within the chamber. The positioning components include:

[0023] A positioning block, one end of which is rotatably connected to the inner wall of the cabin, and the connection point between the positioning block and the cabin is a first hinge point. The positioning block includes a first push-end and a second push-end, which are used to push the adjacent two sides of the substrate respectively.

[0024] A positioning drive assembly includes a positioning linear module and a connecting plate. The positioning linear module is mounted on the outer wall of the cabin, and its drive end extends into the cabin. The drive end of the positioning linear module is hinged to the connecting plate, and the connecting plate is hinged to the positioning block. The connection point between the positioning block and the connecting plate is a second hinge point.

[0025] The angle between the line connecting the first push tip and the second hinge point and the line connecting the second push tip and the second hinge point is no greater than 90 degrees; the angle between the line connecting the first hinge point and the first push tip and the line connecting the second hinge point and the first push tip is an obtuse angle.

[0026] The positioning linear module drives the positioning block to rotate around the first hinge point, so that the first pushing tip approaches and pushes the substrate, and at the same time the second pushing tip approaches and pushes the substrate.

[0027] In some embodiments, the positioning component further includes a sealing structure, the sealing structure including a flexible sleeve, the flexible sleeve being fitted onto the drive end of the positioning linear module, one end of the flexible sleeve being fixed to the drive end of the positioning linear module, and the other end of the flexible sleeve being fixed to the outer wall of the cabin.

[0028] In some embodiments, multiple air vents are provided on the outer walls of both the cabin and the connecting box to allow atmosphere conditioning gas or process gas to be input into the cabin and the connecting box, and the cabin and the connecting box are connected to an external vacuum device through the air vents.

[0029] In some embodiments, the multi-functional transition chamber structure also includes a cleaning valve that is connected to an air vent on the chamber or the connecting box.

[0030] In some embodiments, the two connecting boxes are a first connecting box and a second connecting box, the first connecting box being connected to the external environment and the second connecting box being connected to the process compartment;

[0031] The multifunctional transition chamber structure also includes a first pressure equalization component and a second pressure equalization component. The first pressure equalization component includes a first pressure equalization valve, and the first connecting box, the chamber body, and the external environment are connected through the first pressure equalization valve. The second pressure equalization component includes a second pressure equalization valve, and the second connecting box, the chamber body, and the process chamber are connected through the second pressure equalization valve.

[0032] The beneficial effects of the technical solution provided in this application include:

[0033] This application provides a multifunctional transition chamber structure. The process chamber is connected to the external environment through the chamber body and two connecting boxes. During the process of loading the substrate into the process chamber, the substrate passes through the connecting box into the chamber body, and then passes through another connecting box into the process chamber.

[0034] The compartment is connected to the process compartment or the external environment by using a connecting box. The compartment is only connected to the external environment or the process compartment when both the first and second connecting ports of the connecting box are open. The compartment can be closed and sealed by closing the first and / or second connecting ports through the door structure, thereby isolating the compartment from the external environment or the process compartment.

[0035] When the substrate is delivered from the outside to the chamber, the first and second connecting ports of the connecting box between the chamber and the process chamber are closed. At this time, regardless of whether the air pressure environment inside the process chamber is positive or negative, at least one door structure is pressed against the inner wall of the connecting box to ensure that the chamber is isolated from the process chamber and to avoid disrupting the atmosphere inside the process chamber.

[0036] When the substrate is inside the chamber, if the chamber needs to be in a negative pressure environment, the door structure inside the connecting box on both sides of the chamber will block the first connecting port. At this time, the negative pressure environment inside the chamber will cause the door structure to press further against the inner wall of the connecting box, ensuring that the first connecting port is in a closed state and preventing air leakage from the chamber.

[0037] When the substrate is inside the chamber, and a positive pressure environment is required within the chamber, the door structures of the connecting boxes on both sides of the chamber seal the second connecting port. At this time, the positive pressure environment inside the chamber causes the door structures to further press against the inner wall of the connecting box, ensuring the second connecting port is closed and preventing air leakage. Because the chamber's sealing performance is adapted to a positive pressure environment, process gases can be simultaneously introduced into the chamber for preliminary processing of the substrate within the chamber.

[0038] Therefore, regardless of whether the chamber is under positive or negative pressure, a stable seal can be achieved through the connecting components, minimizing air leakage and allowing for preliminary processing of the substrate within the chamber. Furthermore, the atmosphere within the process chamber is not easily disrupted by air leakage, facilitating the maintenance of a suitable environment and ensuring efficient processing.

[0039] Secondly, an inkjet printing system is provided, including the multi-functional transition chamber structure described above.

[0040] Another embodiment of this application provides an inkjet printing system. Since the inkjet printing system includes the multifunctional transition chamber structure described above, the beneficial effects of the inkjet printing system are consistent with the beneficial effects of the multifunctional transition chamber structure described above, and will not be repeated here. Attached Figure Description

[0041] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0042] Figure 1 A schematic diagram of the multifunctional transition cabin structure provided in the embodiments of this application;

[0043] Figure 2 A schematic diagram of a connectivity component provided in an embodiment of this application;

[0044] Figure 3 A schematic diagram of the supporting components provided in the embodiments of this application;

[0045] Figure 4 A schematic diagram of the cabin and positioning components provided in the embodiments of this application;

[0046] Figure 5 A schematic diagram of the positioning component provided in an embodiment of this application;

[0047] Figure 6 This is a schematic diagram of the substrate and positioning components provided in an embodiment of this application.

[0048] In the diagram: 1. Cabin; 1a. Inlet; 11. Mounting plate; 2. Connecting assembly; 21. Connecting box; 21a. First connecting port; 21b. Second connecting port; 211. First connecting box; 212. Second connecting box; 22. Door structure; 221. Door panel; 222. Sliding drive component; 223. Clamping assembly; 2231. Clamping frame; 2232. Clamping drive component; 3. Support assembly; 31. Support plate; 32. Top rod; 33. Guide component; 33a. Guide slope; 4. Positioning assembly; 41. Positioning block; 41a. First push top; 41b. Second push top; 41c. First hinge point; 41d. Second hinge point; 42. Positioning drive assembly; 421. Positioning linear module; 422. Connecting plate; 43. Sealing structure; 5. Cleaning valve; 6. First pressure equalization assembly; 7. Second pressure equalization assembly; 8. Process chamber; a. Air port. Detailed Implementation

[0049] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0050] This application provides a multifunctional transition chamber structure and an inkjet printing system. The multifunctional transition chamber structure connects the chamber to the external environment and the process chamber via two sets of connecting components. The two door structures of the connecting components are resistant to positive and negative pressure environments, respectively, to support positive pressure treatment of the chamber and to support preliminary substrate treatment using air supply within the chamber, reducing the possibility of air leakage. This application solves the technical problems in related technologies where the transition chamber cannot support positive pressure treatment, the atmosphere in the process chamber is easily disrupted, and it is difficult to perform preliminary substrate treatment using air supply within the transition chamber.

[0051] Reference Figure 1 and Figure 2 A multifunctional transition chamber structure includes a chamber body 1 and two sets of connecting components 2. The chamber body 1 has material inlets 1a on both opposite sides, through which a robotic arm picks up a substrate. The two sets of connecting components 2 are respectively located on opposite sides of the chamber body 1, and are situated at the material inlets 1a. The chamber body 1 communicates with the external environment or a process chamber 8 through the material inlets 1a and the connecting components 2. In this embodiment, the two material inlets 1a of the chamber body 1 are used to connect to the external environment and the process chamber 8, respectively, and the connecting components 2 are used to close or open the material inlets 1a.

[0052] This setup allows for easy opening and closing of the feed port 1a using the connecting component 2. During the process of sending the substrate into the process chamber 8, the connecting component 2 between chamber 1 and process chamber 8 closes feed port 1a, while another connecting component 2 opens the other feed port 1a of chamber 1, connecting chamber 1 to the external environment. The robotic arm then feeds the substrate into chamber 1. Subsequently, both feed ports 1a of chamber 1 are closed, and the atmosphere within chamber 1 is adjusted to match the atmosphere within process chamber 8. Finally, the feed port 1a connecting chamber 1 and process chamber 8 is opened, and the robotic arm transfers the substrate from chamber 1 to process chamber 8. The feed port 1a connecting chamber 1 and process chamber 8 is then closed, completing the substrate loading process. Because the atmosphere within chamber 1 is consistent with that within process chamber 8 when chamber 1 is connected, the atmosphere within process chamber 8 is less likely to be disrupted, ensuring processing efficiency and quality within process chamber 8.

[0053] Reference Figure 1 and Figure 2 Specifically, the connecting component 2 includes a connecting box 21 and two door structures 22. The connecting box 21 is fixed to the side of the cabin 1. The two sides of the connecting box 21 are respectively provided with a first connecting port 21a and a second connecting port 21b. The first connecting port 21a is connected to the material inlet 1a to connect the connecting box 21 to the cabin 1, and the connecting box 21 is connected to the external environment or process cabin 8 through the second connecting port 21b.

[0054] Reference Figure 1 and Figure 2 In this embodiment, the first connecting port 21a and the second connecting port 21b are respectively opened on opposite sides of the connecting box 21. Therefore, the size of the connecting box 21 does not need to accommodate the substrate, and the substrate passes directly through the first connecting port 21a and the second connecting port 21b through the connecting box 21.

[0055] Reference Figure 1 and Figure 2 The two door structures 22 are both located inside the connecting box 21 and are used to block or open the first connecting port 21a and the second connecting port 21b, respectively. Therefore, the compartment 1 is sealed by the door structures 22 at the first connecting port 21a and the second connecting port 21b.

[0056] Specifically, the door structure 22 blocks the first communication port 21a or the second communication port 21b by abutting against the inner wall of the communicating box 21. The door structure 22 can be hinged or slidably connected to the communicating box 21, and the opening and closing state of the first communication port 21a or the second communication port 21b can be changed by changing the position of the door structure 22.

[0057] With this configuration, when the substrate is delivered from the outside to the chamber 1, the first connection port 21a and the second connection port 21b of the connecting box 21 between the chamber 1 and the process chamber 8 are both closed. At this time, regardless of whether the air pressure environment inside the process chamber 8 is positive or negative, at least one door structure 22 is pressed against the inner wall of the connecting box 21, thus ensuring that the chamber 1 and the process chamber 8 are isolated and avoiding damage to the atmosphere inside the process chamber 8.

[0058] When the substrate is inside the chamber 1, if the chamber 1 needs to be in a negative pressure environment, the door structure 22 inside the connecting box 21 on both sides of the chamber 1 will block the first connecting port 21a. At this time, the negative pressure environment inside the chamber 1 will cause the door structure 22 to press further against the inner wall of the connecting box 21, ensuring that the first connecting port 21a is in a closed state and preventing air leakage from the chamber 1.

[0059] When the substrate is inside chamber 1, and chamber 1 needs to be under positive pressure, the door structures 22 of the connecting boxes 21 on both sides of chamber 1 seal the second connecting port 21b. At this time, the positive pressure environment inside chamber 1 causes the door structures 22 to further press against the inner wall of the connecting box 21, ensuring that the second connecting port 21b is closed and preventing air leakage from chamber 1. Since the sealing performance of chamber 1 is adapted to the positive pressure environment, process gases can be simultaneously introduced into chamber 1 to perform preliminary process treatment on the substrate inside chamber 1.

[0060] Therefore, regardless of whether the environment inside chamber 1 is under positive or negative pressure, a stable seal can be achieved through the connecting component 2. The environment inside chamber 1 is not prone to air leakage, which supports preliminary processing of the substrate within chamber 1. In addition, the atmosphere inside process chamber 8 is not easily disrupted by air leakage from chamber 1, making it easier to maintain the atmosphere inside process chamber 8 and ensuring processing efficiency within process chamber 8.

[0061] Reference Figure 1 and Figure 2 The door structure 22 includes a door panel 221 and a sliding drive component 222. The door panel 221 is slidably disposed on the inner wall of the communicating box 21. The sliding drive component 222 is drivenly connected to the door panel 221 to drive the door panel 221 to slide. As the sliding drive component 222 drives the door panel 221 to slide, the relative position of the door panel 221 and the first communicating port 21a or the second communicating port 21b is changed, thereby realizing the opening or blocking of the first communicating port 21a or the second communicating port 21b. In this embodiment, the sliding drive component 222 includes a cylinder.

[0062] This configuration allows the opening and closing of either the first connecting port 21a or the second connecting port 21b to be achieved by sliding the door panel 221. The door panel 221 occupies less space within the connecting box 21, facilitating the miniaturization of the connecting box 21. When the chamber 1 is under positive pressure, the first connecting ports 21a of both connecting boxes 21 are open and connected to the chamber 1, while the chamber 1 is sealed by blocking the second connecting ports 21b of both connecting boxes. It should be noted that because the connecting box 21 is small in size, the time required to make the atmosphere inside the connecting box 21 consistent with the atmosphere of the process chamber 8 is short, minimizing the impact on processing efficiency.

[0063] Reference Figure 1 and Figure 2 Furthermore, the door structure 22 also includes a clamping assembly 223, which is used to press the door panel 221 tightly against the inner wall of the connecting box 21. With this configuration, when the atmosphere inside the compartment 1 is at normal pressure or gradually changes to negative or positive pressure, the clamping assembly 223 presses the door panel 221 tightly against the inner wall of the connecting box 21, thus ensuring the airtightness of the compartment 1.

[0064] Reference Figure 1 and Figure 2 Specifically, the clamping assembly 223 includes a clamping frame 2231 and a clamping drive member 2232. The clamping frame 2231 is slidably disposed on the inner wall of the communicating box 21, the door panel 221 is connected to the clamping frame 2231, and the sliding drive member 222 is drivenly connected to the clamping frame 2231. The sliding drive member 222 drives the clamping frame 2231 and the door panel 221 to slide together on the inner wall of the communicating box 21. The clamping drive member 2232 is installed on the clamping frame 2231 and is drivenly connected to the door panel 221 to drive the door panel 221 to press against or move away from the inner wall of the communicating box 21. In this embodiment, the clamping drive member 2232 includes a cylinder.

[0065] With this configuration, after the door panel 221 slides to block the first connecting port 21a or the second connecting port 21b, the door panel 221 is pressed against the inner wall of the connecting box 21 by the pressing drive member 2232, thereby ensuring the continuous sealing of the first connecting port 21a and the second connecting port 21b and guaranteeing the airtightness of the compartment 1.

[0066] Reference Figure 1 and Figure 3 The multi-functional transition cabin structure also includes a support assembly 3, which includes a support plate 31 and multiple top rods 32. The support plate 31 is fixed inside the cabin 1 and is fixed to the inner bottom surface of the cabin 1 by multiple bolts. A gap is left between the support plate 31 and the inner bottom surface of the cabin 1 to facilitate adjusting the support plate 31 to a horizontal state by adjusting the multiple bolts.

[0067] ReferenceFigure 1 and Figure 3 Multiple push rods 32 are spaced apart and vertically connected to the support plate 31. These push rods 32 support the substrate, ensuring a distance between the substrate and the support plate 31. In this embodiment, the push rods 32 are threaded through the support plate 31. By rotating the push rods 32, the height of their tips can be adjusted, ensuring that the heights of the multiple push rods 32 are consistent. Therefore, the substrate can be stably supported by the multiple push rods 32.

[0068] In addition, since there is a gap between the support plate 31 and the inner bottom surface of the cabin 1, space is also provided for the top rod 32 to be adjusted up and down.

[0069] In this embodiment, the multiple push rods 32 are arranged in a rectangular array, and the substrate is more evenly stressed when supported by the multiple push rods 32. In addition, after the robot places the substrate onto the push rods 32, the spacing between the multiple push rods 32 can accommodate the robot, making it easy for the robot to be pulled away from between the substrate and the support plate 31.

[0070] This configuration, using multiple top rods 32 to support the substrate, allows the substrate to be suspended in the air by multiple supports, exposing the outer surface of the substrate as much as possible, facilitating comprehensive preliminary processing of the substrate within the chamber 1. Furthermore, a gap is left between the substrate and the support plate 31 to accommodate a robotic arm, which can pick up the substrate from the bottom and easily exit between the substrate and the support plate 31.

[0071] Reference Figure 1 and Figure 3 Furthermore, the support assembly 3 also includes multiple guide members 33, which are connected to the top surface of the support plate 31. The multiple guide members 33 are all disposed near the edge of the support plate 31. When the substrate is supported by the top rod 32, the multiple guide members 33 surround the substrate. In this embodiment, the spacing between the guide members 33 along the length of the support plate 31 is greater than the length of the substrate, and the spacing between the guide members 33 along the width of the support plate 31 is greater than the width of the substrate. It is understood that when the substrate is supported by the top rod 32, at least one long side and one short side of the substrate have a gap with the guide members 33 to allow for sufficient clearance and facilitate the substrate's placement among the multiple guide members 33.

[0072] Reference Figure 1 and Figure 3 The guide member 33 includes a guide ramp 33a. When the external robot arm lowers the substrate to near the top rod 32, the guide member 33 corrects the position of the substrate through the guide ramp 33a. In this embodiment, the guide member 33 includes a guide rod, and the top end of the guide rod is shaped like a frustum or a cone. The circumferential side surface of the top end of the guide rod is the guide ramp 33a.

[0073] With this configuration, the robotic arm supports the substrate, which falls onto the top rod 32 as the robotic arm descends. During the descent, the substrate's edges first contact the guide member 33. Guided by the guide ramp 33a, the substrate slides down the guide ramp 33a, thus placing the substrate in the designated position. When the substrate undergoes preliminary processing in the chamber 1, the consistent processing results after each preliminary processing are achieved because the substrate's placement position is fixed. Furthermore, the fixed position of the substrate relative to the support plate 31 facilitates subsequent robotic arm pickup and delivery of the substrate to the process chamber 8.

[0074] Reference Figures 4-6 Furthermore, the multifunctional transition chamber structure also includes two sets of positioning components 4, which act on two opposite corners of the base plate to adjust the position of the base plate within the chamber 1, ensuring that the base plate remains in the same position relative to the support plate 31 each time. The positioning components 4 include positioning blocks 41 and positioning drive components 42.

[0075] Reference Figures 4-6 One end of the positioning block 41 is rotatably connected to the inner wall of the cabin 1. In this embodiment, to facilitate the installation of the positioning component 4, an installation port is provided on the side wall of the cabin 1 corresponding to the installation of the positioning component 4, and a mounting plate 11 is fixed to the installation port by bolts, and the mounting plate 11 seals the installation port. The positioning component 4 is installed on the mounting plate 11 to facilitate the inspection and calibration of the positioning component 4 by removing the mounting plate 11.

[0076] Reference Figures 4-6 In this embodiment, a support plate 31 is fixed to the inner wall of the mounting plate 11. One end of the positioning block 41 is rotatably connected to the support plate 31 to connect to the inner wall of the cabin 1 through the support plate 31, and the connection point between the positioning block 41 and the support plate 31 is the first hinge point 41c. The positioning block 41 includes a first push tip 41a and a second push tip 41b, which are used to push the adjacent two sides of the substrate respectively.

[0077] Preferably, the first push tip 41a and the second push tip 41b include rollers, and the positioning block 41 contacts the substrate through the circumferential side of the rollers. When pushing the substrate, the rollers rotate, thus avoiding hard friction with the substrate and damage to the substrate.

[0078] Reference Figures 4-6 The positioning drive component 42 is used to drive the positioning block 41 to rotate around the first hinge point 41c, so that the first push tip 41a and the second push tip 41b approach and push the two sides of the substrate in sequence.

[0079] Reference Figures 4-6Specifically, the positioning drive assembly 42 includes a positioning linear module 421 and a connecting plate 422. The positioning linear module 421 is mounted on the outer wall of the mounting plate 11, and the drive end of the positioning linear module 421 extends through the mounting plate 11 into the cabin 1. The drive end of the positioning linear module 421 is hinged to the connecting plate 422, and the connecting plate 422 is hinged to the positioning block 41. The connection point between the connecting plate 422 and the positioning block 41 is the second hinge point 41d. In this embodiment, the positioning linear module 421 includes a cylinder, a lead screw mechanism, or a linear motor.

[0080] Reference Figures 4-6 The angle between the line connecting the first push tip 41a and the second hinge point 41d and the line connecting the second push tip 41b and the second hinge point 41d is no greater than 90 degrees. With this configuration, the first push tip 41a and the second push tip 41b of the positioning block 41 can respectively abut against the adjacent two sides of the substrate.

[0081] Reference Figures 4-6 The angle between the line connecting the first hinge point 41c and the first push tip 41a and the line connecting the second hinge point 41d and the first push tip 41a is an obtuse angle. With this configuration, when the positioning block 41 rotates, the first push tip 41a first approaches and pushes one side of the substrate, and then the first push tip 41a gradually approaches and pushes the other side of the substrate.

[0082] Reference Figures 4-6 As the positioning linear module 421 drives the positioning block 41 to rotate around the first hinge point 41c, the first pushing tip 41a approaches and pushes the substrate, while the second pushing tip 41b approaches and pushes the substrate at the same time. In this way, the substrate can be pushed and adjusted to the designated position.

[0083] Two positioning blocks 41 are used to adjust the positions of the substrate at two opposite corners, ensuring that the substrate remains in the same position within the chamber 1 after each loading. This fixed placement of the substrate during initial processing within the chamber 1 results in better consistency of the processing outcomes after each initial processing step. Furthermore, the fixed position of the substrate relative to the chamber 1 facilitates subsequent robotic arm pickup and transfer of the substrate to the process chamber 8.

[0084] Reference Figures 4-6 Furthermore, the positioning component 4 also includes a sealing structure 43, which includes a flexible sleeve. The flexible sleeve is fitted onto the drive end of the positioning linear module 421, with one end of the flexible sleeve fixed to the drive end of the positioning linear module 421 and the other end fixed to the outer wall of the cabin 1. In this embodiment, the flexible sleeve includes a bellows.

[0085] In this embodiment, the flexible sleeve is located outside the outer mounting plate 11. One end of the flexible sleeve is sealed, and the driving end of the positioning linear module 421 passes through the sealed end of the flexible sleeve, and the sealed end of the flexible sleeve is fixed to the driving end of the positioning linear module. The other end of the flexible sleeve is fixed to the outer wall of the mounting plate 11, and the end opening of the flexible sleeve is sealed by the outer wall of the mounting plate 11.

[0086] With this configuration, the position where the drive end of the positioning linear module 421 passes through the outer wall of the cabin 1 is sealed by a flexible sleeve. When the drive end of the positioning linear module 421 moves relative to the cabin 1, the position where the drive end of the positioning linear module 421 passes through the cabin 1 is not prone to air leakage, thus ensuring that the atmosphere inside the cabin 1 is not disrupted.

[0087] Reference Figure 1 Both the outer walls of the chamber 1 and the connecting box 21 are provided with multiple air ports a to allow atmosphere conditioning gases or process gases to be introduced into the chamber 1 and the connecting box 21. The chamber 1 and the connecting box 21 are connected to an external vacuum device through the air ports a.

[0088] This configuration allows for the convenient supply of process gases to the chamber 1 and connecting box 21 via vent a. It also allows for the introduction of gases with the same atmosphere as the process chamber 8 to purge the atmosphere of the chamber 1 and connecting box 21. Furthermore, the chamber 1 and connecting box 21 can be evacuated via vent a using an external vacuum device to meet the different atmosphere and pressure requirements within the chamber 1 and connecting box 21.

[0089] Reference Figure 1 The multi-functional transition chamber structure also includes a cleaning valve 5. The cleaning valve 5 is connected to an air port a on the chamber 1 or the connecting box 21. In this embodiment, the cleaning valve 5 is connected to an air port a on the connecting box 21, which is located away from the process chamber 8.

[0090] With this configuration, when the same atmosphere gas as that in the process chamber 8 is filled into the chamber 1 and the connecting box 21, and when the connecting box 21 and the chamber 1 are cleaned, both connecting boxes 21 are connected to the chamber 1, and the connecting box 21 and the chamber 1 form a sealed space. At this time, the cleaning valve 5 is opened to remove the impurity gas in the connecting box 21 and the chamber 1.

[0091] Reference Figure 1 Furthermore, the two connecting boxes 21 are respectively the first connecting box 211 and the second connecting box 212. The first connecting box 211 is connected to the external environment, and the second connecting box 212 is connected to the process compartment 8.

[0092] Reference Figure 1The multi-functional transition chamber structure also includes a first pressure equalization assembly 6 and a second pressure equalization assembly 7. The first pressure equalization assembly 6 includes a first pressure equalization valve, through which the first connecting box 211, the chamber 1, and the external environment are connected. The second pressure equalization assembly 7 includes a second pressure equalization valve, through which the second connecting box 212, the chamber 1, and the process chamber 8 are connected.

[0093] With this configuration, when the substrate is loaded into the chamber 1, the first equalizing valve opens, connecting the first connecting box 211 and the chamber 1, so that the air pressure of the chamber 1 and the first connecting box 211 is consistent with the external environment. This facilitates the opening of the two door structures 22 of the first connecting box 211, allowing the chamber 1 to connect with the external environment through the first connecting box 211, and then the substrate can be sent into the chamber 1.

[0094] When the substrate is loaded from the chamber 1 to the process chamber 8, the second pressure equalization valve is opened, so that the second connecting box 212 is connected to the chamber 1, so that the air pressure in the chamber 1 and the second connecting box 212 is consistent with that in the process chamber 8, and it is convenient to open the two door structures 22 of the second connecting box 212, so that the chamber 1 is connected to the process chamber 8 through the second connecting box 212, and then the substrate can be sent into the process chamber 8.

[0095] This application provides a multifunctional transition chamber structure. The process chamber 8 is connected to the external environment through the chamber body 1 and two connecting boxes 21. During the process of loading the substrate into the process chamber 8, the substrate passes through the connecting box 21 into the chamber body 1, and then passes through the other connecting box 21 into the process chamber 8.

[0096] The cabin 1 is connected to the process compartment 8 or the external environment by using the connecting box 21. The cabin 1 is connected to the external environment or the process compartment 8 only when both the first connecting port 21a and the second connecting port 21b of the connecting box 21 are open. The cabin 1 can be closed and sealed by closing the first connecting port 21a and / or the second connecting port 21b through the door structure 22, so as to isolate the cabin 1 from the external environment or the process compartment 8.

[0097] When the substrate is delivered from the outside to the chamber 1, the first connection port 21a and the second connection port 21b of the connecting box 21 between the chamber 1 and the process chamber 8 are both closed. At this time, regardless of whether the air pressure environment inside the process chamber 8 is positive or negative, at least one door structure 22 is pressed against the inner wall of the connecting box 21 to ensure that the chamber 1 is isolated from the process chamber 8 and to avoid damaging the atmosphere inside the process chamber 8.

[0098] When the substrate is inside the chamber 1, if the chamber 1 needs to be in a negative pressure environment, the door structure 22 inside the connecting box 21 on both sides of the chamber 1 will block the first connecting port 21a. At this time, the negative pressure environment inside the chamber 1 will cause the door structure 22 to press further against the inner wall of the connecting box 21, ensuring that the first connecting port 21a is in a closed state and preventing air leakage from the chamber 1.

[0099] When the substrate is inside chamber 1, and chamber 1 needs to be under positive pressure, the door structures 22 of the connecting boxes 21 on both sides of chamber 1 seal the second connecting port 21b. At this time, the positive pressure environment inside chamber 1 causes the door structures 22 to further press against the inner wall of the connecting box 21, ensuring that the second connecting port 21b is closed and preventing air leakage from chamber 1. Since the sealing performance of chamber 1 is adapted to the positive pressure environment, process gases can be simultaneously introduced into chamber 1 to perform preliminary process treatment on the substrate inside chamber 1.

[0100] Therefore, regardless of whether the environment inside chamber 1 is under positive or negative pressure, a stable seal can be achieved through the connecting component 2. The environment inside chamber 1 is not prone to air leakage, which supports preliminary processing of the substrate within chamber 1. In addition, the atmosphere inside process chamber 8 is not easily disrupted by air leakage from chamber 1, making it easier to maintain the atmosphere inside process chamber 8 and ensuring processing efficiency within process chamber 8.

[0101] Another embodiment of this application provides an inkjet printing system including the multifunctional transition chamber structure described above.

[0102] Another embodiment of this application provides an inkjet printing system. Since the inkjet printing system includes the multifunctional transition chamber structure described above, the beneficial effects of the inkjet printing system are consistent with the beneficial effects of the multifunctional transition chamber structure described above, and will not be repeated here.

[0103] In the description of this application, it should be noted that the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0104] It should be noted that in this application, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0105] The above description is merely a specific embodiment of this application, enabling those skilled in the art to understand or implement this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A multi-functional transition module structure, characterized by, It includes a cabin and two groups of communication components, the opposite sides of the cabin are provided with material openings, two groups of the communication components are communicated with the cabin through two material openings, and the cabin is communicated with the external environment or the process cabin through the communication components; the communication component includes: A communication box, two sides of the communication box are respectively provided with a first communication opening and a second communication opening, the first communication opening is communicated with the material opening to make the communication box communicated with the cabin, and the communication box is communicated with the external environment or the process cabin through the second communication opening; Two door body structures, two door body structures are respectively arranged at the first communication opening and the second communication opening, and two door body structures are respectively adapted to block or open the first communication opening and the second communication opening, and the door body structure is abutted on the inner wall of the communication box; Two groups of positioning components, two groups of the positioning components are respectively applied to two opposite corners of the substrate to adjust the position of the substrate in the cabin, the positioning component includes a positioning block and a positioning driving component, one end of the positioning block is rotationally connected to the inner wall of the cabin, and the connection point of the positioning block and the cabin is a first hinge point, the positioning block includes a first pushing end and a second pushing end, and the first pushing end and the second pushing end are used for respectively pushing the adjacent two side edges of the substrate; the positioning driving component is used for driving the positioning block to rotate around the first hinge point, so that the first pushing end and the second pushing end are sequentially close to and push the two sides of the substrate.

2. The multi-functional transition module structure of claim 1, wherein, The door body structure includes: A door plate, the door plate is slidingly arranged on the inner wall of the communication box; A sliding driving member, the sliding driving member is drivingly connected with the door plate to drive the door plate to slide; wherein, The sliding driving member drives the door plate to slide to block or open the first communication opening or the second communication opening.

3. The multi-functional transition module structure of claim 2, wherein, The door body structure further includes a abutting assembly, the abutting assembly includes: An abutting frame, the abutting frame is slidingly arranged on the inner wall of the communication box, the door plate is connected to the abutting frame, and the sliding driving member is drivingly connected with the abutting frame; An abutting driving member, the abutting driving member is installed on the abutting frame, and the abutting driving member is drivingly connected with the door plate to drive the door plate to abut or move away from the inner wall of the communication box.

4. The multi-functional transition module structure of claim 1, wherein, Further including a supporting assembly, the supporting assembly includes: A support plate, the support plate is fixed in the cabin; A plurality of top rods, a plurality of the top rods are distributed at intervals and are vertically connected to the support plate, and a plurality of the top rods are used for supporting the substrate to leave a distance between the substrate and the support plate.

5. The multi-functional transition module structure of claim 4, wherein, The supporting assembly further includes a plurality of guide members, the guide members are connected to the top surface of the support plate, a plurality of the guide members are arranged close to the edge of the support plate, the guide member includes a guide inclined surface, when the external mechanical hand drives the substrate to descend close to the top rod, the guide member corrects the position of the substrate through the guide inclined surface.

6. The multi-functional transition module structure according to claim 4 or 5, wherein, The positioning driving assembly comprises a positioning linear module and a connecting plate, the positioning linear module is installed on the outer wall of the cabin, the driving end of the positioning linear module extends into the cabin, the driving end of the positioning linear module is hinged to the connecting plate, and the connecting plate is hinged to the positioning block, the connecting point of the positioning block and the connecting plate is a second hinge point; wherein, The angle between the line connecting the first pushing end and the second hinge point and the line connecting the second pushing end and the second hinge point is not greater than 90 degrees; the angle between the line connecting the first hinge point and the first pushing end and the line connecting the second hinge point and the first pushing end is an obtuse angle; The positioning linear module drives the positioning block to rotate around the first hinge point, so that the first pushing end approaches and pushes the substrate, and at the same time, the second pushing end approaches and pushes the substrate.

7. The multi-functional transition module structure of claim 6, wherein, The positioning assembly further comprises a sealing structure, the sealing structure comprises a flexible sleeve, the flexible sleeve is sleeved on the driving end of the positioning linear module, one end of the flexible sleeve is fixed to the driving end of the positioning linear module, and the other end of the flexible sleeve is fixed to the outer wall of the cabin.

8. The multi-functional transition module structure of claim 1, wherein, The outer wall of the cabin and the communication box is provided with a plurality of gas ports for inputting atmosphere adjusting gas or process processing gas into the cabin and the communication box, and the cabin and the communication box are connected with external vacuum devices through the gas ports.

9. The multi-functional transition module structure of claim 8, wherein, A cleaning valve is further included, which is connected with a gas port on the cabin or the communication box.

10. The multi-functional transition module structure of claim 1, wherein, The two communication boxes are a first communication box and a second communication box, the first communication box is connected with the external environment, and the second communication box is connected with the process cabin. The multifunctional transition cabin structure further comprises a first pressure equalizing assembly and a second pressure equalizing assembly, the first pressure equalizing assembly comprises a first pressure equalizing valve, the first communication box, the cabin and the external environment are connected through the first pressure equalizing valve, the second pressure equalizing assembly comprises a second pressure equalizing valve, the second communication box, the cabin and the process cabin are connected through the second pressure equalizing valve.

11. An inkjet printing system, characterized by, The multifunctional transition cabin structure comprises any one of claims 1 to 10. The multifunctional transition cabin structure comprises any one of claims 1 to 10.

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