A pose and position motion decoupled seven-degree-of-freedom series-parallel hybrid micro-operation mechanism

Abstract

The application relates to a seven-degree-of-freedom series-parallel hybrid micro-operation mechanism with decoupled posture and position motion, which comprises a base, a first series part, a PRRRP parallel part and a second series part for mounting an end effector; the first series part has x and y translational degrees of freedom, is fixed to the base and rotationally connected to one end of the PRRRP parallel part; the second series part is rotationally connected to the other end of the PRRRP parallel part, has one rotational degree of freedom and one z translational redundant degree of freedom for translational motion along the rotational axis. The mechanism is compact in size, high in structural rigidity, and low in cumulative error of end position adjustment; the three translational degrees of freedom of the end position of the micro-operation mechanism and the three rotational degrees of freedom of the end posture are motion-decoupled, so that the decoupling of the posture control and the position control can be realized; the micro-operation mechanism has one more translational redundant degree of freedom at the end, so that the end posture adjustment is more flexible.

Description

Technical Field

[0001] The present invention relates to the field of micro-manipulation technology, and in particular to a seven-degree-of-freedom serial-parallel hybrid micro-manipulation mechanism with decoupling of posture and position motion. Background Art

[0002] Micromanipulation mechanisms have been widely used in various fields, including atomic force scanning microscopy, micromanipulation, micromachining, fiber optic docking and other scientific and technological fields.

[0003] Micromanipulation places high demands on the positioning accuracy, workspace range, and structural rigidity of the mechanism. However, in current research, most micromanipulators are designed based on series or parallel structures. Series mechanisms suffer from cumulative errors and low structural rigidity, while parallel mechanisms suffer from a small workspace and strong coupling. Hybrid mechanisms combine the advantages of parallel mechanisms, such as high precision, strong load-bearing capacity, and fast response speed, with the large workspace, flexible movement, and simple control of series mechanisms. They offer the advantages of both while avoiding the drawbacks of both.

[0004] The prior art discloses two related papers: [1] Glettig W, Vitins M, Schwarb A, et al. First results from PRIGO III, the parallel robotics inspired goniometer for protein crystallography; proceedings of the Proceedings of the euspen 11th international conference, F, 2011[C]. and [2] Waltersperger S, Olieric V, Pradervand C, et al. PRIGo: a new multi-axis goniometer for macromolecular crystallography[J]. J Synchrotron Radiat, 2015, 22: 895-900.

[0005] These two papers propose a compact and high-precision hybrid goniometer (PRIGo) with stick-slip actuation, replacing the traditional three-circle goniometer and Euler mount for sample reorientation in macromolecular crystallography. The design, based on a hybrid mechanism, enables translation in the x, y, and z directions, rotation in the x-direction (0°-90°), and rotation in the φ and ω directions (±∞).

[0006] It has the following technical problems:

[0007] Articles [1] and [2] use compliant hinges in the revolute pairs connecting rods l41, l42, and l43 with the linear stick-slip drive units Slider1, Slider2, and Slider3, respectively, which reduces the working space and posture adjustment capability of the moving platform B1B2B3, especially the movement space range of the end of the mechanism in the x and y directions is relatively small. Summary of the Invention

[0008] In response to the problems existing in the prior art, the purpose of the present invention is to provide a seven-degree-of-freedom serial-parallel hybrid micro-manipulator mechanism with decoupling of posture and position motion, which has compact overall size, increased working space and posture and adjustment capabilities, high structural rigidity and small cumulative error.

[0009] In order to achieve the above object, the present invention adopts the following technical solutions:

[0010] A seven-degree-of-freedom serial-parallel hybrid micro-manipulator with decoupling of attitude and position motion comprises a base, a first serial part, a PRRRP parallel part, and a second serial part for mounting an end effector;

[0011] The first series section has an x-translational degree of freedom and a y-translational degree of freedom, the first series section being fixed to the base and rotatably connected to one end of the PRRRP parallel section;

[0012] The second series part is rotationally connected to the other end of the PRRRP parallel part, and has one rotational degree of freedom and one redundant degree of freedom, namely the z translational degree of freedom for translational motion along its rotational axis.

[0013] Furthermore, the first series part includes a first long linear stick-slip drive unit, a second long linear stick-slip drive unit, a first connecting plate, a second connecting plate, a third connecting plate, and a large rotary stick-slip drive unit; the first connecting plate is fixed to the base, two ends of the first long linear stick-slip drive unit are respectively fixed to the first connecting plate and the second connecting plate, the second long linear stick-slip drive unit is respectively connected to the second connecting plate and the third connecting plate, the large rotary stick-slip drive unit is connected to the third connecting plate, the extension directions of the first long linear stick-slip drive unit and the second long linear stick-slip drive unit are perpendicular to each other, and the parallel mechanism is fixed to the large rotary stick-slip drive unit.

[0014] Furthermore, the PRRRP parallel part includes a first mid-linear stick-slip drive unit and a second mid-linear stick-slip drive unit, respectively fixed to the large rotary stick-slip drive unit, a slider, a first rod, a second rod, and an end moving platform;

[0015] The first and second mid-linear stick-slip drive units are symmetrically arranged about a plane containing the rotation axis of the large rotary stick-slip drive unit and parallel to the xz plane; the slider is fixed on the slide rail of the first mid-linear stick-slip drive unit and is rotatably connected to one end of the first rod; one end of the second rod is fixed to the slide rail of the second mid-linear stick-slip drive unit, and the other ends of the first rod and the second rod are respectively rotatably connected to the end movable platform.

[0016] Furthermore, the PRRRP parallel part includes a parallel mechanism base, which is fixed to the large rotary stick-slip drive unit, and the first mid-linear stick-slip drive unit and the second mid-linear stick-slip drive unit are respectively fixed to the parallel mechanism base.

[0017] Furthermore, the PRRRP parallel part has one degree of freedom of movement and one degree of freedom of rotation, wherein the rotation axis of the rotational freedom is the axis of the rotating shaft at the connection between the second rod and the end moving platform, which intersects with the rotation axis of the large rotary stick-slip drive unit.

[0018] Further, the second series portion includes a small rotary stick-slip drive unit, a series adapter plate, and a short linear stick-slip drive unit;

[0019] The small rotary stick-slip drive unit is connected to the end moving platform, the series adapter plate is connected to the small rotary stick-slip drive unit, and the short linear stick-slip drive unit is fixed on the series adapter plate.

[0020] Furthermore, the second series part is a two-degree-of-freedom series structure, consisting of one rotational degree of freedom and one translational degree of freedom, wherein the translational degree of freedom is a redundant degree of freedom, which can realize translational motion along the rotational degree of freedom axis of the second series part.

[0021] Furthermore, a mounting hole for mounting the actuator is provided on the slide rail of the short linear stick-slip drive unit.

[0022] In general, the present invention has the following advantages:

[0023] The micro-manipulation mechanism adopts a hybrid mechanism layout, which has the advantage of compact size, while increasing the structural rigidity and reducing the cumulative error of the end posture adjustment; the three translational degrees of freedom of the end position of the micro-manipulation mechanism and the three attitude angular degrees of freedom of the end posture are motion-decoupled, which can realize the decoupling of attitude control and position control; the end of the micro-manipulation mechanism has an additional redundant translational degree of freedom, making its end posture adjustment more flexible. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1(a) is a schematic diagram of the micro-manipulation mechanism configuration.

[0025] Figure 1(b) is a schematic diagram of the posture angle of the micro-manipulation mechanism configuration.

[0026] Figure 2 This is the vertical overall structure diagram of the stick-slip drive micro-manipulator.

[0027] Figure 3 This is the vertical structure diagram of the first series part.

[0028] Figure 4 This is the vertical structure diagram of the parallel part of PRRRP.

[0029] Figure 5 This is the vertical structure diagram of the second series part.

[0030] In the picture:

[0031] 11-base, 12-first serial mechanism, 121-first mobile drive pair, 122-first connecting rod, 123-second mobile drive pair, 124-second connecting rod, 125-first rotation drive pair, 13-PRRRP parallel mechanism, 131-parallel mechanism base, 132-third mobile drive pair, 133-fourth mobile drive pair, 134-third connecting rod, 135-fourth connecting rod, 136-fifth connecting rod, 14-second serial mechanism, 141-second rotation drive pair, 142-sixth connecting rod, 143-fifth mobile drive pair, 144-end effector;

[0032] 21-base, 22-first series part, 2201-first connecting plate, 2202-long linear stick-slip drive unit, 2203-second connecting plate, 2204-third connecting plate, 2205-large rotary stick-slip drive unit, 23-PRRRP parallel part, 2301-parallel mechanism base, 2302-medium linear stick-slip drive unit, 2303-slider, 2304-first rod, 2305-second rod, 2306-end moving platform, 24-second series part, 2401-small rotary stick-slip drive unit, 2402-series adapter plate, 2403-short linear stick-slip drive unit. DETAILED DESCRIPTION

[0033] The present invention will be described in further detail below.

[0034] The embodiment of the present invention proposes a schematic diagram of a seven-degree-of-freedom serial-parallel hybrid micro-manipulator with decoupling of posture and position motion, and based on the schematic diagram, proposes an example of a seven-degree-of-freedom hybrid micro-manipulator based on stick-slip drive.

[0035] As shown in Figure 1(a) and Figure 1(b), the micro-manipulator mechanism is a simplified diagram of the configuration. The micro-manipulator mechanism mainly includes a base 11, a first series mechanism 12 consisting of two mobile drive pairs (a first mobile drive pair 121, a second mobile drive pair 123) and a rotation drive pair (a first rotation drive pair 125), an intermediate PRRRP parallel mechanism 13, and a second series mechanism 14 consisting of a mobile drive pair (a fifth mobile drive pair 143) and a rotation drive pair (a second rotation drive pair 141) at the end.

[0036] The micro-manipulation mechanism specifically includes a base 11, a first mobile drive pair 121, a first connecting rod 122, a second mobile drive pair 123, a second connecting rod 124, a first rotation drive pair 125, a parallel mechanism base 131, a third mobile drive pair 132, a fourth mobile drive pair 133, a third connecting rod 134, a fourth connecting rod 135, a fifth connecting rod 136, a second rotation drive pair 141, a sixth connecting rod 142, a fifth mobile drive pair 143, and an end actuator 144.

[0037] Specifically, the first mobile drive pair 121 is fixedly connected to the base 11, and the first mobile drive pair 121 can provide the degree of freedom of movement in the x-direction. The second mobile drive pair 123 is connected to the first mobile drive pair 121 via a first connecting rod 122. The movement direction axis of the second mobile drive pair 123 and the first mobile drive pair 121 are perpendicular to each other, and provide the degree of freedom of movement in the y-direction. The first rotation drive pair 125 is connected to the second mobile drive pair 123 via a second connecting rod 124. The rotation axis of the first rotation drive pair 125 is perpendicular to the plane xy, providing the degree of freedom of rotation around the z-axis. The above structure constitutes the first serial mechanism 12 of the micro-manipulator.

[0038] Specifically, the parallel mechanism base 131 is connected to the first rotation drive pair 125. The third mobile drive pair 132 and the fourth mobile drive pair 133 are arranged symmetrically along the y direction about the rotation axis L1 of the first rotation drive pair 125, and are connected to the parallel mechanism base 131. The third mobile drive pair 132 and the fourth mobile drive pair 133 both provide translational motion along the z-axis. The joint point O1 of the third link 134 is connected to the bearing of the third mobile drive pair 132. The fourth link 135 is fixedly connected to the fourth mobile drive pair 133. The two joint points O2 and O3 of the fifth link 136 are connected to the bearings of the third link 134 and the fourth link 135 respectively. The above structure constitutes the PRRRP parallel mechanism 13 of the micro-manipulator mechanism, wherein the joint point O3 of the fourth link 135 is located on the rotation axis L1 of the first rotation drive pair 125. The PRRRP parallel mechanism 13 can convert the translational motion of the third mobile drive pair 132 and the fourth mobile drive pair 133 along the z direction into two degrees of freedom: translational motion of the O3 joint of the fifth link 136 on L1 and rotational motion around the L2 axis (the L2 axis is perpendicular to the plane formed by the motion axes of the third mobile drive pair 132 and the fourth mobile drive pair 133, and intersects with L1 perpendicularly at O3).

[0039] Specifically, the second rotational drive pair 141 is fixedly connected to the fifth connecting rod 136, and its rotation axis L3 must intersect with L1 and L2 at O3 and be located in the plane formed by the motion axes of the third and fourth mobile drive pairs 132 and 133. The fifth mobile drive pair 143 is connected to the second rotational drive pair 141 via the sixth connecting rod 142, and its translational motion axis is collinear with L3. The fifth mobile drive pair 143 provides redundant degrees of freedom for translational motion along L3. Finally, the end effector 144 is fixedly connected to the fifth mobile drive pair 143. The above structure constitutes the second serial mechanism 14 of the micro-manipulator.

[0040] This micromanipulator has a total of seven degrees of freedom. Regarding the position of the end effector 144, there are three translational degrees of freedom: x, y, and z. The x and y translational degrees of freedom are provided by the first and second mobile drive pairs 121 and 123, respectively, while the z translational degree of freedom is provided by the third and fourth mobile drive pairs 132 and 133. These three translational degrees of freedom provided by these translational drive pairs are kinematically decoupled. Furthermore, the fifth mobile drive pair 143 provides a redundant degree of freedom for translational motion along L3.

[0041] The end effector 144 has three attitude angular degrees of freedom: the α attitude angle about L1, the β attitude angle about L2, and the γ attitude angle about L3. The α attitude angular degree of freedom is provided by the first rotational drive pair 125, the β attitude angular degree of freedom is provided by the third and fourth mobile drive pairs 132 and 133, and the γ attitude angular degree of freedom is provided by the second rotational drive pair 141. These three attitude angular degrees of freedom are kinematically decoupled, significantly reducing the complexity and computational complexity of the mechanism's kinematic model.

[0042] In the micro-manipulation mechanism configuration proposed in the present invention, the driving units of the first mobile driving pair 121, the second mobile driving pair 123, the third mobile driving pair 132, the fourth mobile driving pair 133, the first rotation driving pair 125 and the second rotation driving pair 141 can be selected as: ultrasonic motors, linear motors, stick-slip driving units, and any other drives that can be used as linear drives and rotation drives.

[0043] Based on the micro-manipulation configuration proposed above, this embodiment proposes a serial-parallel hybrid micro-manipulation mechanism with decoupling of posture and position motion based on stick-slip drive, which mainly includes a base 21 (corresponding to the base 11 in the above schematic diagram), a first series part 22 consisting of two linear stick-slip drive unit groups and one rotary stick-slip drive unit at the bottom (corresponding to the first series mechanism 12 in the above schematic diagram), an intermediate PRRRP parallel part 23 (corresponding to the PRRRP parallel mechanism 13 in the above schematic diagram), and a second series part 24 consisting of a linear stick-slip drive unit and a rotary stick-slip drive unit at the end (corresponding to the second series mechanism 14 in the above schematic diagram), hereinafter referred to as the stick-slip drive micro-manipulation mechanism.

[0044] like Figure 2 As shown, the stick-slip drive micro-manipulator mechanism consists of four parts, namely a base 21, a first series part 22, a PRRRP parallel part 23 and a second series part 24.

[0045] like Figure 3 As shown, the first series part 22 includes a first connecting plate 2201 , a long linear stick-slip drive unit 2202 , a second connecting plate 2203 , a third connecting plate 2204 , and a large rotary stick-slip drive unit 2205 .

[0046] In this embodiment, there are four long linear stick-slip drive units 2202, including two first long linear stick-slip drive units and two second long linear stick-slip drive units. The movement directions of the first long linear stick-slip drive unit and the second long linear stick-slip drive unit are perpendicular to each other.

[0047] The first connecting plate 2201 is fixedly connected to the base 21 via bolts. Two first long linear stick-slip drive units are respectively fixedly connected to the first connecting plate 2201 via bolts. The two first long linear stick-slip drive units are arranged in parallel to increase the load. The second connecting plate 2203 is also bolted to the two first long linear stick-slip drive units. The other side of the second connecting plate 2203 is also bolted to the two second long linear stick-slip drive units, while the third connecting plate 2204 is also bolted to the two second long linear stick-slip drive units. Finally, the large rotational stick-slip drive unit 2205 is bolted to the third connecting plate 2204. The first series connection 22 is a three-degree-of-freedom series structure. Each two parallel-arranged long linear stick-slip drive units 2202 constitute one degree of freedom, for a total of two degrees of freedom. The final large rotational stick-slip drive unit 2205 provides one degree of freedom of rotation.

[0048] like Figure 4 As shown, the PRRRP parallel section 23 includes a parallel mechanism base 2301, two mid-linear stick-slip drive units 2302, a slider 2303, a first rod 2304, a second rod 2305, and an end movable platform 2306. The parallel mechanism base 2301 is bolted to the large rotation stick-slip drive unit 2205 of the first series mechanism 12. The two mid-linear stick-slip drive units 2302 are symmetrically arranged about a plane containing the rotation axis of the large rotation stick-slip drive unit 2205 and parallel to the xz plane. They are bolted to the parallel mechanism base 2301, forming the two active pairs of the PRRRP parallel section 23. The slider 2303 is bolted to the slide rail of one mid-linear stick-slip drive unit 2302 and connected to the first rod 2304 via a bearing. The second rod 2305 is directly bolted to the slide rail of the other mid-linear stick-slip drive unit 2302. The other ends of the first rod 2304 and the second rod 2305 are respectively connected to the end movable platform 2306 via bearings. The PRRRP parallel part 23 constructed as described above has one degree of freedom of movement and one degree of freedom of rotation. The rotation axis of the rotational freedom is the axis of the shaft at the connection between the second rod 2305 and the end movable platform 2306, which intersects with the rotation axis of the rotational freedom of the first serial mechanism 12. This design utilizes kinematic analysis and motion control, and its rotation working range is [-100°, 20°] ( Figure 3 When the plane of the middle terminal movable platform 2306 is perpendicular to the rotational axis of the rotational freedom of the first serial mechanism 12, the angle is 0°, with a positive rotation angle being counterclockwise. Compared to a serial mechanism, this structure has greater structural rigidity, resulting in a greater end load, smaller cumulative error, and a more compact layout.

[0049] like Figure 5As shown, the second series connection section 24 comprises a small rotary stick-slip drive unit 2401, a series adapter plate 2402, and a short linear stick-slip drive unit 2403. The small rotary stick-slip drive unit 2401 is bolted to the end movable platform 2306. The series adapter plate 2402 is then bolted to the small rotary stick-slip drive unit 2401. Finally, the short linear stick-slip drive unit 2403 is bolted to the series adapter plate 2402, forming the second series connection section 24. The second series connection section 24 is a two-degree-of-freedom series connection structure consisting of one rotational degree of freedom and one translational degree of freedom. The translational degree of freedom is redundant, enabling translational motion along the rotational axis of the second series connection section 24, making the end-of-mechanism posture adjustment more flexible. The short linear stick-slip drive unit 2403 at the end has threaded mounting holes on its guide rails for mounting actuators for various load types.

[0050] This stick-slip micromanipulator utilizes a stick-slip drive unit, resulting in higher positioning accuracy. The first and second series connections (22, 24) provide a larger working space. Furthermore, the use of a PRRRP parallel connection (23) in the middle and an additional short linear stick-slip drive unit (2403) in series at the end achieves motion redundancy, enhancing the end-stage posture adjustment capability and load capacity of the stick-slip micromanipulator.

[0051] Working process (taking the above stick-slip drive micro-manipulator as an example):

[0052] In the first serial section 22 of the stick-slip micromanipulator, the two long linear stick-slip drive units 2202 fixed to the first connecting plate 2201 simultaneously move in the same direction to achieve x-axis motion of the micromanipulator, with the displacement range determined by the travel of the long linear stick-slip drive units 2202. In the first serial section 22, the two long linear stick-slip drive units 2202 fixed to the second connecting plate 2203 simultaneously move in the same direction to achieve y-axis motion of the micromanipulator, with the displacement range determined by the travel of the long linear stick-slip drive units 2202. The large rotary stick-slip drive unit 2205 in the first serial section 22 enables infinite rotational motion around the z-axis. In the PRRRP parallel section 23 of the stick-slip micromanipulator, the two mid-linear stick-slip drive units 2302 simultaneously move in the same direction to achieve linear motion of the end movable platform 2306 along the z-axis. When the lower mid-line stick-slip drive unit 2302 is fixed and the upper mid-line stick-slip drive unit 2303 is in motion, the PRRRP parallel section 23 is transformed into a slider four-bar linkage, enabling rotation within a range of [-100°, 20°] around the axis of connection between the second rod 2305 and the end movable platform 2306. The rotational movement of the small rotary stick-slip drive unit 2401 of the second series section 24 enables rotation around the central axis of the end platform. The short linear stick-slip drive units 2403 of the second series section 24 can be moved in different directions, enabling translational motion along the rotational axis of the second series section 24.

[0053] Compared with the prior art, the present invention has the following advantages:

[0054] 1. Compact structure and high structural rigidity. This is because the micro-manipulator adopts a hybrid mechanism layout. This configuration layout has the advantages of compact size, while increasing structural rigidity and reducing the cumulative error of end-position adjustment;

[0055] 2. The three translational degrees of freedom of the micromanipulator's end position are kinematically decoupled. This is due to the rational spatial arrangement of the first, second, third, and fourth mobile drive pairs 121, 123, 132, and 133 in the micromanipulator. The third and fourth mobile drive pairs 132, 133 are symmetrically arranged in the y-direction about the rotation axis L1 of the first rotary drive pair 125.

[0056] 3. The three angular degrees of freedom of the micromanipulator's end-position are kinematically decoupled. This is because the O3 joint of the fourth link 135 of the PRRRP parallel mechanism 13 is located on the rotation axis L1 of the first rotary drive pair 125, and L1, L2, and L3 are relative to the O3 joint.

[0057] 4. The micromanipulator end has an additional redundant degree of freedom in translation, making its end position adjustment more flexible. This is because the translation axis of the fifth mobile drive pair 143 is collinear with L3, providing a redundant degree of freedom in translation along L3.

[0058] The above embodiments are preferred implementation modes of the present invention, but the implementation modes of the present invention are not limited to the above embodiments. Any other changes, modifications, substitutions, combinations, and simplifications that do not deviate from the spirit and principles of the present invention should be considered as equivalent replacement methods and are included in the scope of protection of the present invention.

Claims

1. A seven-degree-of-freedom serial-parallel hybrid micromanipulator with decoupling of attitude and position motion, characterized by: It includes a base, a first series part, a PRRRP parallel part, and a second series part for mounting an end effector; The first series section has an x-translational degree of freedom and a y-translational degree of freedom, the first series section being fixed to the base and rotatably connected to one end of the PRRRP parallel section; The second series section is rotationally connected to the other end of the PRRRP parallel section, and has one rotational degree of freedom and one redundant degree of freedom, namely, a z-translational degree of freedom for translational motion along its rotation axis; The first series part includes a large rotary stick-slip drive unit, and the PRRRP parallel part includes a first and a second intermediate linear stick-slip drive unit, respectively fixed to the large rotary stick-slip drive unit, a slider, a first rod, a second rod, and an end movable platform; The first and second central linear stick-slip drive units are symmetrically arranged about a plane containing the rotation axis of the large rotary stick-slip drive unit and parallel to the xz plane; the sliders are respectively fixed to the slide rails of the first and second central linear stick-slip drive units, the sliders are fixed to the slide rails of the first central linear stick-slip drive unit and are rotatably connected to one end of the first rod; one end of the second rod is fixed to the slider of the second central linear stick-slip drive unit, and the other ends of the first and second rods are respectively rotatably connected to the end movable platform; The PRRRP parallel part has one degree of freedom of movement and one degree of freedom of rotation, wherein the rotation axis of the rotational freedom is the axis of the rotating shaft at the connection between the second rod and the end moving platform, which intersects with the rotation axis of the large rotary stick-slip drive unit.

2. The seven-degree-of-freedom serial-parallel hybrid micro-manipulator with decoupling of attitude and position motion according to claim 1, characterized in that: The first series part includes a first long linear stick-slip drive unit, a second long linear stick-slip drive unit, a first connecting plate, a second connecting plate, a third connecting plate, and a large rotary stick-slip drive unit; the first connecting plate is fixed to the base, two ends of the first long linear stick-slip drive unit are respectively fixed to the first connecting plate and the second connecting plate, the second long linear stick-slip drive unit is respectively connected to the second connecting plate and the third connecting plate, the large rotary stick-slip drive unit is connected to the third connecting plate, the extension directions of the first long linear stick-slip drive unit and the second long linear stick-slip drive unit are perpendicular to each other, and the parallel mechanism is fixed to the large rotary stick-slip drive unit.

3. The seven-degree-of-freedom serial-parallel hybrid micro-manipulator with decoupling of attitude and position motion according to claim 1, characterized in that: The PRRRP parallel part includes a parallel mechanism base, which is fixed to the large rotary stick-slip drive unit, and the first mid-linear stick-slip drive unit and the second mid-linear stick-slip drive unit are respectively fixed to the parallel mechanism base.

4. The seven-degree-of-freedom serial-parallel hybrid micro-manipulator with decoupling of attitude and position motion according to claim 1, characterized in that: The second series part includes a small rotary stick-slip drive unit, a series adapter plate, and a short linear stick-slip drive unit; The small rotary stick-slip drive unit is connected to the end moving platform, the series adapter plate is connected to the small rotary stick-slip drive unit, and the short linear stick-slip drive unit is fixed on the series adapter plate.

5. The seven-degree-of-freedom serial-parallel hybrid micro-manipulator with decoupling of attitude and position motion according to claim 4, characterized in that: The second series part is a two-degree-of-freedom series structure, consisting of one rotational degree of freedom and one translational degree of freedom, wherein the translational degree of freedom is a redundant degree of freedom and can realize translational motion along the rotational degree of freedom axis of the second series part.

6. The seven-degree-of-freedom serial-parallel hybrid micro-manipulator with decoupling of attitude and position motion according to claim 4, characterized in that: The slide rails of the short linear stick-slip drive unit are provided with mounting holes for mounting the actuator.

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