Method for manufacturing a polishing liquid mixing tank and structure thereof
CN118322582BActive Publication Date: 2026-08-28CREATIVE SYST TECH LTD
Patent Information
- Application Number
- CN202311572941.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Priority Date
- 2023-01-12
- Filing Date
- 2023-11-23
- Publication Date
- 2026-08-28
- Estimated Expiration
- 2043-11-23
AI Technical Summary
Technical Problem
[0003]本发明日前设计一种研磨液混合槽的搅拌混合方式，此方式是在槽体内安装倾斜状的磁浮式搅拌器，以此获得良好的混合效果，但槽体若为金属材质，加工上较为容易，然而本发明研磨液主要用于半导体制程，为避免槽内化学药剂与槽壁材料反应后溶解渗透至液体中，一般槽体是采用聚丙烯(PP)或聚偏二氟乙烯(PVDF)材料所制成，若要安装磁浮式搅拌器，就必须另安装一转子壳体用以承载转子，由于此次设计的槽体底部呈由上而下渐缩的锥状弧形壁，要将转子壳体形成与所述锥状弧形壁相互对应的锥面且在接合处必须非常平坦，增加了制造上的困难度，另外转子壳体的厚度也不能太厚，以免影响磁力作用，造成转子无法悬浮及转动，为此本发明设计了一种研磨液混合槽的制造方法及其结构
Benefits of technology
[0011]与现有技术相比，本发明提供一个研磨液混合槽的结构，包括槽体及于所述槽体底部呈倾斜方式设置的磁浮式搅拌器，所述槽体底部具有呈圆锥状的锥状弧形壁，所述锥状弧形壁结合着一转子壳体，所述槽体及所述转子壳体皆由聚丙烯或聚偏二氟乙烯所制成，满足研磨液容器须由特定材质制成的要求，如此所构成的研磨液混合槽，在运作时减少剪应力避免凝结成粗粒子，以顺利输出浆液粒子均匀细微的质量优良的研磨液。
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Figure CN118322582B_ABST
Abstract
A manufacturing method of a polishing liquid mixing tank and its structure, the manufacturing method comprising the following steps: using a tank body made of polypropylene or polyvinylidene fluoride, the tank body having a conical arc wall with at least one hole wall at the bottom; using a rotor shell made of polypropylene or polyvinylidene fluoride, the rotor shell comprising a bottom shell wall, a side wall surrounding the bottom shell wall, and a connecting wall connected to the top edge of the side wall, wherein the thickness of the side wall is less than the thickness of the bottom shell wall and the connecting wall; heating the rotor shell to soften it and placing the rotor shell into the hole wall; using a jig to contact the rotor shell and deform the connecting wall to be connected to the hole wall; and welding solder at the joint of the connecting wall and the hole wall to form the tank body, and then installing a magnetic floating stirrer to form the structure of the polishing liquid mixing tank.
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Citation Information
Patent Citations
Multi-angle strip-tube welding jig and system
CN112077507A
Improvements in or relating to rotary electrical machines
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