A metal base material surface treatment process for implementing metal-glass laser welding

Abstract

The application discloses a metal base surface treatment process for realizing metal-glass laser welding, which comprises the following steps: S1: first, metal and glass are cleaned with deionized water for 5-10 minutes, and then cleaned with alcohol for 5-10 minutes; S2: the cleaned materials are dried in a drying box; S3: the metal is subjected to surface treatment to modify the metal surface; S4: the glass and the metal are overlapped together, a light beam generated by a laser is focused on a joint surface of the glass and the metal to perform laser welding, the laser is absorbed by the underlying metal after penetrating through the glass, a heat action zone is formed, the metal and the glass are melted in the heat action zone, and the two are diffused to form a welded joint, and the welding is completed. The metal surface is modified by means of laser surface cleaning or metal surface coating before laser welding, the welding strength between the glass and the metal is effectively improved, the two surface treatment modes can be selectively used or simultaneously used, and the organic adhesive connection is avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of laser welding, in particular to a metal base surface treatment process for realizing metal-glass laser welding. BACKGROUND

[0002] In the prior art, glass materials have unique oxidation resistance, corrosion resistance, high temperature resistance, high strength and wear resistance, high hardness and low specific gravity, and are increasingly widely used in various industrial fields. However, due to poor processability, low ductility and impact toughness, poor heat shock resistance and other defects, glass is difficult to process, and its application in engineering structures is limited to some extent. Therefore, in many cases, glass materials need to be combined with metal materials with high toughness and strong impact resistance, and the product is used in the form of glass and metal composite, which can effectively exert the advantages of each material. Glass and metal composite connectors are widely used in microelectronic packaging, batteries, relays, solar vacuum heat collecting tubes, composite materials and other fields.

[0003] The current common packaging methods of glass and metal include mechanical connection, anodic bonding, adhesive bonding, brazing, ultrasonic welding, semi-solid state connection, laser welding, etc. They usually have the problems of poor joint sealing, easy aging, poor corrosion resistance and low strength. Laser welding has many advantages compared to other connection technologies, such as 1) laser beam is easy to be guided by optical devices, with high flexibility; 2) laser beam can be focused on a very small area, with high precision; 3) can be controlled by computer, easy to realize high-speed automation; 4) no vacuum or heating treatment is needed, can be carried out at room temperature; 5) truly non-contact process, will not cause pollution to the finished product; 6) can realize welding of complex three-dimensional curved surface by cooperating with robots; and the technology has been widely used in industrial production, information processing, military, medical and health care, etc.

[0004] However, the current research on glass and metal laser welding is still in the early stage of exploration and has not been widely used in various industries. Moreover, most of the researches are on the use of short pulse and ultra-short pulse laser for glass and metal laser welding, and such lasers are expensive, which is not conducive to the wide application of laser welding technology in glass and metal sealing.

[0005] The Chinese invention patent with the application number 202111255500.6 discloses a glass and metal laser welding method, which comprises the following steps: step 1: using ultrafast laser to pretreat the glass surface to make a microlens array on the glass surface; step 2: planning the welding path and setting the laser parameters; step 3: stacking the metal and the glass with the microlens array on the surface together, and using laser to irradiate the glass; step 4: after irradiation, the molten metal cools and solidifies. However, the principle of this method is to customize the glass surface structure, and the disadvantage of this method is that it greatly affects the light transmittance of the glass, hinders the absorption of laser energy by the metal, and the glass and metal cannot be effectively melted, the welding strength is not high, which limits its application range and increases the cost; in addition, the glass and metal laser welding method uses short pulse and ultrashort pulse laser for glass and metal laser welding, and such laser is expensive, which is not conducive to the wide application of laser welding technology in glass and metal sealing. SUMMARY

[0006] The purpose of the present application is to provide a metal base surface treatment process for realizing metal-glass laser welding.

[0007] To achieve the above purpose, the technical solution proposed by the present application is:

[0008] A metal base surface treatment process for realizing metal-glass laser welding, comprising the following steps:

[0009] S1: first clean the metal and glass with deionized water for 5-10 minutes, and then clean with alcohol for 5-10 minutes;

[0010] S2: dry the cleaned materials in a drying oven;

[0011] S3: surface treatment is performed on the metal to modify the metal surface;

[0012] S4: overlap the glass and metal together, focus the light beam generated by the laser on the joint surface of the glass and metal for laser welding, the laser is absorbed by the underlying metal after penetrating the glass, forming a heat-affected zone, the metal and glass are melted in the heat-affected zone, and the two are diffused to form a welded joint, and the welding is completed.

[0013] The surface treatment adopts laser surface treatment, the energy density of the laser surface treatment is 30J / cm 2 ~600J / cm 2 , the focal length is 9.5mm-10.5mm, and the cleaning is 1-10 times.

[0014] The surface treatment adopts physical vapor deposition, the physical vapor deposition is magnetron sputtering, thermal evaporation, electron beam evaporation, sputtering or atomic layer deposition, the physical vapor deposition speed is lower than 200nm / min, the power density of magnetron sputtering acting on the target material is lower than 100W / cm 2 , and the deposition completion time is within 20 minutes.

[0015] The surface treatment adopts a treatment mode combining laser surface treatment and physical vapor deposition, the energy density of laser surface treatment is 30J / cm 2 ~600J / cm 2 , the focal length is 9.5mm~10.5mm, the cleaning is 1~10 times, the physical vapor deposition is magnetron sputtering, thermal evaporation, electron beam evaporation, sputtering or atomic layer deposition, the physical vapor deposition speed is lower than 200nm / min, the power density of magnetron sputtering acting on the target material is lower than 100W / cm 2 , and the deposition completion time is within 20 minutes.

[0016] The laser is one of infrared laser, visible light laser, ultraviolet laser, continuous laser and pulse laser.

[0017] The glass is any one of quartz glass, calcium glass and high borosilicate glass.

[0018] The metal is any one of titanium alloy, titanium metal and stainless steel.

[0019] The laser welding process is:

[0020] 1) focal length 9~11mm, speed 0.5~100mm / s, power 1~30w, frequency 30~60khz, scanning times: 1~15 times;

[0021] 2) focal length 9~11mm, speed 5500~8500mm / s, power 1~30w, frequency 30~60khz, scanning time: 1~20min.

[0022] The magnetron sputtering target material is metal aluminum, nickel, titanium, vanadium, molybdenum, cobalt, iron, zinc, magnesium, chromium, indium, tin, bismuth, copper, niobium, zirconium, and target materials containing oxides and alloys of the above elements.

[0023] The raw material for thermal evaporation is metal aluminum, nickel, titanium, vanadium, molybdenum, cobalt, iron, zinc, magnesium, chromium, indium, tin, bismuth, copper, niobium, zirconium, and evaporation raw materials containing oxides and alloys of the above elements.

[0024] The beneficial effects of the present application are:

[0025] The surface of the metal is modified by laser surface cleaning or surface treatment of metal surface coating before laser welding, which can effectively improve the welding strength between the glass and the metal, and the two surface treatment methods can be used alternatively or simultaneously, the welding method can avoid the connection of organic binder, and has the advantages of simple operation, rapid and efficient, long service life, easy control, simple and easy, low cost, green and environmental protection, and is suitable for large-scale production. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 is the overall schematic diagram of the present application;

[0027] Figure 2 is the microscope photo of the connected metal and glass in embodiment one of the present application;

[0028] Figure 3 is the tensile strength data graph of the connected metal and glass in embodiment one of the present application;

[0029] Figure 4 is the microscope photo of the connected metal and glass in embodiment two of the present application;

[0030] Figure 5 is the tensile strength data graph of the connected metal and glass in embodiment two of the present application. DETAILED DESCRIPTION

[0031] The present application will be further described in detail below with reference to the accompanying drawings,

[0032] A metal base surface treatment process for realizing metal-glass laser welding, comprising the following steps:

[0033] S1: the metal and glass are first cleaned with deionized water for 5-10 min, and then cleaned with alcohol for 5-10 min;

[0034] S2: the cleaned materials are dried in a drying oven;

[0035] S3: the metal is surface treated to modify the metal surface;

[0036] S4: the glass and the metal are overlapped together, and the light beam generated by the laser is focused on the joint surface of the glass and the metal to perform laser welding, the laser is absorbed by the underlying metal after penetrating the glass, a heat action zone is formed, the metal and the glass are melted in the heat action zone, and the two are diffused to form a welded joint, and the welding is completed.

[0037] The surface treatment adopts laser surface treatment, the energy density of the laser surface treatment is 30 J / cm 2 600 J / cm 2 , the focal length is 9.5 mm-10.5 mm, and the cleaning is 1-10 times.

[0038] The surface treatment is physical vapor deposition, and the physical vapor deposition is magnetron sputtering, thermal evaporation, electron beam evaporation, sputtering or atomic layer deposition, the physical vapor deposition speed is less than 200 nm / min, the power density of magnetron sputtering acting on the target material is less than 100 W / cm 2 , and the deposition completion time is within 20 minutes.

[0039] The surface treatment is a combination of laser surface treatment and physical vapor deposition, the energy density of laser surface treatment is 30 J / cm 2 ~ 600 J / cm 2 , the focal length is 9.5 mm~10.5 mm, the cleaning is 1~10 times, the physical vapor deposition is magnetron sputtering, thermal evaporation, electron beam evaporation, sputtering or atomic layer deposition, the physical vapor deposition speed is less than 200 nm / min, the power density of magnetron sputtering acting on the target material is less than 100 W / cm 2 , and the deposition completion time is within 20 minutes.

[0040] The laser is one of infrared laser, visible light laser, ultraviolet laser, continuous laser and pulse laser.

[0041] The glass is any one of quartz glass, calcium glass and high borosilicate glass.

[0042] The metal is any one of titanium alloy, titanium metal and stainless steel.

[0043] The laser welding process is:

[0044] 1) focal length 9~11mm, speed 0.5~100mm / s, power 1~30w, frequency 30~60khz, scanning times: 1~15 times;

[0045] 2) focal length 9~11mm, speed 5500~8500mm / s, power 1~30w, frequency 30~60khz, scanning time: 1~20min.

[0046] The magnetron sputtering target material is aluminum, nickel, titanium, vanadium, molybdenum, cobalt, iron, zinc, magnesium, chromium, indium, tin, bismuth, copper, niobium, zirconium, and oxide and alloy containing the above elements.

[0047] The raw material for thermal evaporation is aluminum, nickel, titanium, vanadium, molybdenum, cobalt, iron, zinc, magnesium, chromium, indium, tin, bismuth, copper, niobium, zirconium, and oxide and alloy containing the above elements.

[0048] Wherein, before laser welding, the material is first subjected to special surface treatment, i.e. laser surface treatment or film plating on the metal surface through physical vapor deposition, which can be carried out on the metal surface by using a magnetron sputtering, sputtering, or thermal evaporation device for film plating modification.

[0049] Wherein, the laser welding system is composed of a laser, a collimator, a laser galvanometer, a focusing mirror, and a laser workbench to realize laser welding of metal and glass. When laser welding is performed, the metal is placed on the laser workbench and the glass is placed on the metal for laser welding operation. The overall schematic diagram of the present application is shown in Figure 1 .

[0050] Example One

[0051] Laser welding of nanocalcium glass and stainless steel is selected, and laser surface cleaning is used for surface treatment. The microscope photo of the connected metal and glass in Example One of the present application is shown in Figure 2 .

[0052] A laser welding method for nanocalcium glass and stainless steel using laser surface cleaning includes the following steps:

[0053] 1) First, the nanocalcium glass and stainless steel are ultrasonically cleaned with deionized water for 5-10 min, and then ultrasonically cleaned with alcohol for 5-10 min to effectively remove oil stains on the surface of the material;

[0054] 2) The cleaned material is placed in a drying oven for 30 min;

[0055] 3) The stainless steel is placed on the laser workbench, laser surface treatment is performed, the focal length is adjusted to 9.5-10.5 mm, the scanning speed is 100-1000 mm / s, the power is 30 w, the frequency is 30 khz, and the scanning number is 1-10 times, an oxide layer with a thickness of 15-30 um is formed on the metal surface to improve the wettability of the metal surface. The performance of the oxide layer is between that of the glass and the stainless steel. When the glass contacts the oxide layer, the tension is smaller than when the glass directly contacts the stainless steel. The oxide layer can play a transitional role, thereby improving the bonding force between the stainless steel and the glass;

[0056] 4) The nanocalcium glass and the stainless steel are overlapped together, the welding line form used is circular, triangular, and five welding lines, the light beam generated by the laser is focused on the joint surface of the glass and the stainless steel, the laser is absorbed by the underlying metal after being transmitted through the glass, a heat-affected zone is formed, the metal and the glass are melted in the heat-affected zone, and a welded joint is formed by mutual diffusion. The welding process used is: focal length 9-11 mm, speed 10-100 mm / s, power 1-30 w, frequency 30-60 khz, and scanning number: 1-15 times.

[0057] In the embodiment one of the present application, the tensile strength data graph of the connected metal and glass is shown in the following figure Figure 3 .

[0058] Embodiment two:

[0059] The calcium-nano glass and titanium alloy are selected for laser welding, and the physical vapor deposition surface treatment method is used to modify the metal surface. In the embodiment two of the present application, the microscope photo of the connected metal and glass is shown in the following figure Figure 4

[0060] A laser welding method of calcium-nano glass and titanium alloy uses the physical vapor deposition method, including the following steps:

[0061] 1) The calcium-nano glass and titanium alloy are first cleaned with deionized water for 5-10 min, and then cleaned with alcohol for 5-10 min, so as to effectively remove the oil stains on the surface of the materials;

[0062] 2) The cleaned materials are placed in a drying oven for drying for 30 min;

[0063] 3) The titanium alloy is coated with a thin film of TiO2 by using the magnetron sputtering method, the background vacuum is 10-4 Pa, the direct current sputtering water-cooled TiO2 target (99.995%) is used, the sputtering gas is pure Ar (99.9995%), the working gas pressure is 1.6 Pa, the argon flow rate is 30 sccm, the sputtering voltage is about 300 V, the current is about 0.144 A, and the deposition time is 5-20 min;

[0064] 4) The calcium-nano glass and the metal are overlapped together, the welding line forms are circular, triangular and five welding lines, the light beam generated by the laser is focused on the joint surface of the glass and the metal, the laser is absorbed by the lower metal after passing through the glass, a heat-affected zone is formed, the metal and the glass are melted in the heat-affected zone, and a welded joint is formed by mutual diffusion, and the welding process used is: focal length 9-11 mm, speed 10-100 mm / s, power 1-30 w, frequency 30-60 kHz, and scanning times: 1-15 times.

[0065] In the embodiment two of the present application, the tensile strength data graph of the connected metal and glass is shown in the following figure Figure 5

[0066] Embodiment three:

[0067] The laser surface cleaning and the physical vapor deposition are used to modify the metal surface.

[0068] The laser welding method of the glass and the metal uses the two surface treatment methods, including the following steps:

[0069] ​​1) metal and glass are cleaned with deionized water for 5-10 minutes, and then cleaned with alcohol for 5-10 minutes;

[0070] 2) the cleaned material is dried in a drying oven;

[0071] 3) the metal surface is cleaned using a laser;

[0072] 4) a layer of metal and its oxide film is plated on the metal surface by using a physical vapor deposition method;

[0073] 5) the glass and the metal are overlapped together, a light beam generated by a laser is focused on the joint surface of the glass and the metal, the laser is absorbed by the lower metal after penetrating the glass, a heat action zone is formed, the metal and the glass are melted in the heat action zone, and a welded joint is formed by mutual diffusion.

[0074] The laser welding principle is that the glass and the metal are overlapped together, the laser is absorbed by the lower metal after penetrating the upper glass, heat energy generated at the interface of the two layers makes the upper and lower materials melt and vaporize, the vaporized material is near the material surface and is weakly ionized to form a plasma, the thin plasma is helpful to the absorption of the laser by the material, and the melted part is rapidly cooled to form a weld seam due to the action of pressure, thereby realizing the welding of the two.

[0075] In the application, the titanium alloy and the stainless steel are directly modified, and then directly subjected to laser welding, mainly the ablation connection after the change of the wettability of the metal surface layer and the glass surface layer, the glass and the metal can be effectively melted, a specific glass microstructure is not needed to be customized, the welding strength is high, and the application range is wider.

[0076] Working principle:

[0077] The metal surface is modified by a special surface treatment method, and then the metal and the glass are laser welded. The surface modification methods include laser surface cleaning and metal surface coating by physical vapor deposition. The laser surface cleaning is that the metal surface is cleaned by a laser with a certain energy density. This method can enhance the wettability of the metal surface, thereby improving the bonding force between the metal and the glass. The physical vapor deposition is that the metal surface is modified by physical vapor deposition. When the metal surface forms an oxide, the electric lines can extend from the large spacing formed by the metal cations and the surrounding oxygen ions, and can be combined with the positive and negative ions in the glass. The glass and the oxide can form the maximum bonding force and the minimum repulsive force, thereby improving the bonding force between the metal and the glass. The two metal surface treatment methods can be used alone or together. After the above surface treatment method is used, the glass and the metal are overlapped, the laser is absorbed by the lower metal through the upper glass, the heat energy generated at the interface makes the upper and lower materials melt, the melted part rapidly cools to form a weld, and thus the glass and the metal are tightly combined together.

[0078] The application has the advantages that the metal surface is modified by the laser surface cleaning or the metal surface coating before laser welding, the welding strength between the glass and the metal is effectively improved, the two surface treatment methods can be used alone or together, the welding method can avoid the connection of the organic adhesive, and has the advantages of simple operation, rapid and efficient, long service life, easy control, simple and easy to implement, low cost, green and environmental protection, and suitability for large-scale production.

[0079] The above describes one embodiment of the application in detail, but the description is only the preferred embodiment of the application, and cannot be considered as limiting the implementation range of the application. Any equivalent changes and improvements made according to the application scope should still belong to the patent coverage range of the application.

Claims

1. A surface treatment process for a metal base material for realizing metal-glass laser welding, characterized in that, Includes the following steps: S1: Cleaning treatment: First, clean the metal and glass with deionized water for 5-10 minutes, then clean with alcohol for 5-10 minutes; S2: Drying process: Dry the metal and glass materials that have been cleaned in step S1 in a drying oven; S3: Composite Surface Modification Treatment: The metal substrate dried in step S2 is subjected to laser surface treatment and physical vapor deposition in sequence. The energy density of the laser surface treatment is 30J / cm² to 600J / cm², the focal length is 9.5mm to 10.5mm, and the cleaning is performed 1 to 10 times. The physical vapor deposition is one of magnetron sputtering, thermal evaporation, electron beam evaporation, sputtering, and atomic layer deposition, and the physical vapor deposition rate is less than 200 nm / min; S4: Laser welding: The glass is joined with the metal processed in step S3. The laser beam is focused on the joint surface of the glass and the metal to perform laser welding. The laser passes through the glass and is absorbed by the underlying metal to form a heat zone. In the heat zone, the metal and glass are melted and diffuse into each other to form a weld joint, thus completing the welding.

2. The surface treatment process for metal base material for realizing metal-glass laser welding as described in claim 1, characterized in that, The physical vapor deposition is magnetron sputtering, with a power density on the target material of less than 100 W / cm², and the deposition time is less than 20 minutes.

3. A surface treatment process for metal base material for realizing metal-glass laser welding as described in claim 1 or 2, characterized in that, The parameters of the laser welding process are: focal length 9-11mm, speed 0.5-100mm / s, power 1-30w, frequency 30-60khz, and number of scans 1-15.

4. The surface treatment process for metal base material for realizing metal-glass laser welding as described in claim 2, characterized in that, Magnetron sputtering targets are made of metals such as aluminum, nickel, titanium, vanadium, molybdenum, cobalt, iron, zinc, magnesium, chromium, indium, tin, bismuth, copper, niobium, zirconium, and oxides and alloys containing the above elements.

5. The surface treatment process for metal base material for realizing metal-glass laser welding as described in claim 1, characterized in that, The laser is one of the following: infrared laser, visible light laser, ultraviolet laser, continuous laser, and pulsed laser.

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