Preparation method of mask dustproof film assembly

Abstract

The present invention discloses a method for preparing a mask dustproof film assembly, the preparation method comprising the following steps: S1, applying adhesive to a frame for covering the mask, and applying fluororesin on a substrate at the same time; S2, placing the frame and the substrate in an oven to solidify the adhesive and the fluororesin; S3, peeling off the dustproof film formed by solidifying the fluororesin on the substrate, and adhering the dustproof film to the frame; S4, using a cutting device to cut the excess film on the edge of the frame, and finally encapsulating it. In the present invention, firstly, by controlling the horizontal movement of the sliding frame, the edge-changing cutting of the excess part of the film can be achieved, which is convenient for the staff to operate, simplifies the operation procedure of the equipment, and improves the processing efficiency. Secondly, by controlling the vertical movement of the sliding plate, the frame cutting edge can be adjusted, and the spacing of the cutter can be adaptively adjusted, which is conducive to further improving the cutting efficiency of the excess part of the film.

Description

Technical Field

[0001] The invention relates to the technical field of mask dustproof film processing, and in particular to a method for preparing a mask dustproof film assembly. Background Art

[0002] The mask is a graphic master used in the photolithography process commonly used in micro-nano processing technology. The mask pattern structure is formed on the transparent substrate by an opaque light-shielding film, and then the pattern information is transferred to the product substrate through the exposure process.

[0003] In order to prevent dust particles from falling on the mask and affecting chip production, manufacturers usually use a frame with a dustproof film to cover the outside of the mask, and use a protective film to protect the mask from dust. In order to facilitate the adhesion and coverage of the dustproof film to the frame, the staff usually prepare a dustproof film that is slightly larger than the frame. After the dustproof film and the frame are bonded, a cutting tool is used to cut the excess part of the film extending out of the edge of the frame. In the prior art, when cutting the edge of the dustproof film, manual cutting is usually used. The staff needs to use a cutter to slide and cut along the edge of the frame, which is not conducive to the staff's operation and has low cutting efficiency.

[0004] Based on the above defects, a method for preparing a mask dustproof film assembly is provided. Summary of the invention

[0005] The purpose of the present invention is to provide a method for preparing a mask dustproof film assembly in order to solve the above-mentioned problem.

[0006] In order to achieve the above object, the present invention adopts the following technical solution: a method for preparing a mask dustproof film assembly, the preparation method comprising the following steps:

[0007] S1, coating the frame for covering the mask with adhesive, and coating the substrate with fluororesin;

[0008] S2, placing the frame and substrate into an oven to cure the adhesive and fluororesin;

[0009] S3, peel off the dust-proof film formed by curing the fluororesin on the substrate, and adhere the dust-proof film to the frame;

[0010] S4, using a cutting device to cut the excess film on the edge of the frame, and finally packaging it;

[0011] The cutting device involved in the preparation method comprises: a processing table, the upper end of which is rotatably connected to a support plate for placing a frame with a dustproof film, the upper end of which is rotatably connected to a horizontal shaft through a bracket, the outer sliding sleeve of the horizontal shaft is provided with two sliding sleeves, and the outer side of the horizontal shaft is slidably connected to a cutting knife fixed to the sliding sleeve;

[0012] A slide plate is vertically slidable at the bottom of the processing table, and a first linking member and a second linking member are arranged at the bottom of the processing table. When the processing table moves vertically, the first linking member drives the support plate to rotate, and the second linking member drives the two sliding sleeves to slide along the horizontal axis;

[0013] A sliding frame slides through the processing table, a driving member for driving the sliding frame to rotate is arranged at the bottom of the processing table, and a transmission member and a guide member are arranged on the processing table. When the sliding frame slides away from the support plate, the horizontal axis drives the cutter to cut the film under the action of the transmission member. When the sliding frame slides close to the support plate, after the cutter rotates and rises a certain angle, the slide plate will move vertically under the action of the guide member.

[0014] Preferably, the first linkage comprises a first wheel disc and a second wheel disc rotatably connected to the bottom of the processing table, and a component for driving the second wheel disc to rotate, the second wheel disc is coaxially fixed to the support plate, and the outer engaging sleeves of the first wheel disc and the second wheel disc are provided with a second chain.

[0015] Preferably, the component that drives the second wheel disc to rotate includes an insertion shaft fixed coaxially with the first wheel disc, and the upper end of the slide is fixed with a sleeve that is slidably embedded in cooperation with the insertion shaft. A protrusion is formed on the side wall of the insertion shaft, and a slide rail that slides in cooperation with the protrusion is formed on the inner wall of the sleeve.

[0016] Preferably, the second linkage member comprises two vertical plates penetrating and sliding in the processing table, and the vertical plates are rotatably connected to the sliding sleeve, and a rotary arm is rotatably connected between the sliding plate and the two vertical plates.

[0017] Preferably, a frame plate is fixedly provided at the bottom of the processing table, and the driving member includes a screw rod rotatably connected to the inner side of the frame plate, and the screw rod is screwedly connected to the sliding frame, and a driving motor for controlling the rotation of the screw rod is installed at the outer end of the frame plate.

[0018] Preferably, the transmission member comprises a support arm fixed on the transverse axis, a support rod is fixed on the support arm, and a sliding groove cooperating with the sliding of the support rod is formed in the sliding frame.

[0019] Preferably, the guide member comprises a cam rotatably connected to the inner side of the frame plate, and a component driving the cam to rotate, and a sliding block rotatably connected to the cam is slidably connected in the slide plate.

[0020] Preferably, the component driving the cam to rotate includes a rotary sleeve rotatably connected to the processing table through a bracket, and a coupling member driving the rotary sleeve to rotate. A wheel ring is fixedly provided at the outer end of the rotary sleeve, and a first chain is provided between the wheel ring and the outer engaging sleeve of the driven wheel.

[0021] Preferably, the engaging part driving the rotary sleeve to rotate includes a cross bar fixedly mounted on a sliding frame, a guide rod slidingly passing through the rotary sleeve, a bending frame corresponding to the guide rod fixedly mounted on the side end of the rotary sleeve, a compression spring pressing the guide rod inwardly abutting against the inner side of the bending frame, and a first slideway and a second slideway cooperating with the sliding of the guide rod are formed on the side wall of the cross bar.

[0022] Preferably, the number of the first slideway and the second slideway is two, the first slideway is composed of a straight segment and a spiral segment, the second slideway is a straight groove, and the intersection of the second slideway and two adjacent first slideways forms a step surface for cooperating with the guide rod to bounce off.

[0023] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0024] 1. In the present application, the device can realize the side-changing cutting of the excess part of the film only by controlling the horizontal movement of the sliding frame, which not only facilitates the operation of the staff, but also simplifies the operation procedure of the equipment and improves the processing efficiency.

[0025] 2. In the present application, by controlling the vertical movement of the slide, the support plate drives the frame to rotate ninety degrees under the action of the first linkage, thereby realizing the switching of the cutting edge, and the two sliding sleeves will slide along the horizontal axis under the action of the second linkage, so that the spacing between the two cutters matches the width of the frame that has completed the rotation, thereby realizing the adjustment of the cutting edge of the frame and the adaptive adjustment of the spacing of the cutters, which is conducive to further improving the cutting efficiency of the excess parts of the film. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A front perspective view of a cutting device provided according to an embodiment of the present invention is shown;

[0027] Figure 2 A side perspective view of a cutting device provided according to an embodiment of the present invention is shown;

[0028] Figure 3 A cross-sectional view of a cutting device provided according to an embodiment of the present invention is shown;

[0029] Figure 4 It is shown that according to the present invention Figure 3 A partial enlarged schematic diagram of point A is provided;

[0030] Figure 5 A schematic structural diagram of a crossbar provided according to an embodiment of the present invention is shown.

[0031] Legend:

[0032] 1. Processing table; 2. Support plate; 3. Horizontal axis; 4. Sliding frame; 401. Slide groove; 5. Sliding sleeve; 6. Cutter; 7. Support arm; 8. Support rod; 9. Vertical plate; 901. Swivel arm; 10. Screw rod; 11. Frame plate; 12. Driving motor; 13. Crossbar; 1301. First slideway; 1302. Second slideway; 14. Swivel sleeve; 15. Bending frame; 16. Guide rod; 17. Compression spring; 18. Wheel ring; 19. Driven wheel; 20. First chain; 21. Cam; 22. Slide plate; 23. Sliding block; 24. Sleeve; 2401. Slide rail; 25. Insert shaft; 26. Protrusion; 27. First wheel disc; 28. Second wheel disc; 29. ​​Second chain. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] Embodiment 1:

[0035] See also Figure 1-5 The present invention provides a technical solution: a method for preparing a mask dustproof film assembly, the preparation method comprising the following steps:

[0036] S1, coating the frame for covering the mask with adhesive, and coating the substrate with fluororesin;

[0037] S2, placing the frame and substrate into an oven to cure the adhesive and fluororesin;

[0038] S3, peel off the dust-proof film formed by curing the fluororesin on the substrate, and adhere the dust-proof film to the frame;

[0039] S4, using a cutting device to cut the excess film on the edge of the frame, and finally packaging it;

[0040] The cutting device involved in the preparation method includes: a processing table 1, the upper end of the processing table 1 is rotatably connected to a support plate 2 for placing a frame with a dustproof film, the upper end of the processing table 1 is rotatably connected to a horizontal axis 3 through a bracket, the outer sliding sleeve of the horizontal axis 3 is provided with two sliding sleeves 5, and the outer side of the horizontal axis 3 is slidably connected to a cutting knife 6 fixed to the sliding sleeve 5; the frame is placed on the corresponding position of the support plate 2, and the side of the frame with the dustproof film is facing downward. By controlling the rotation of the horizontal axis 3, the cutting knife 6 cuts the excess part of the film extending from the edge of the frame as the horizontal axis 3 rotates; the inner wall of the sliding sleeve 5 is formed with strip teeth, and the side wall of the horizontal axis 3 is formed with a strip groove that cooperates with the sliding of the strip teeth. Through the matching arrangement of the strip teeth and the strip groove, the sliding sleeve 5 can drive the cutting knife 6 and the horizontal axis 3 to rotate synchronously.

[0041] A slide plate 22 is provided at the bottom of the processing table 1 for vertical sliding. A first linking member and a second linking member are provided at the bottom of the processing table 1. When the processing table 1 moves vertically, the first linking member drives the support plate 2 to rotate, and the second linking member drives the two sliding sleeves 5 to slide along the horizontal axis 3. When the cutter 6 completes cutting of the film on both sides of the frame, the vertical movement of the slide plate 22 is controlled, and the support plate 2 will drive the frame to rotate ninety degrees under the action of the first linking member to achieve switching of the cutting edge, and the two sliding sleeves 5 will slide along the horizontal axis 3 under the action of the second linking member, so that the spacing between the two cutters 6 matches the width of the frame that has completed the rotation, thereby meeting the need to cut the excess film on the other two sides of the frame. By controlling the vertical movement of the slide plate 22, the cutting edge of the frame can be adjusted while the spacing between the cutters 6 can be adaptively adjusted, which is beneficial to improving the cutting efficiency of the excess parts of the film.

[0042] A sliding frame 4 is slidably provided in the processing table 1, a driving member for driving the sliding frame 4 to rotate is provided at the bottom of the processing table 1, and a transmission member and a guide member are provided on the processing table 1. When the sliding frame 4 slides away from the support plate 2, the horizontal shaft 3 drives the cutter 6 to cut the film under the action of the transmission member. When the sliding frame 4 slides close to the support plate 2, as the cutter 6 rotates and lifts a certain angle, the slide plate 22 will move vertically under the action of the guide member; the sliding frame 4 is controlled to slide in the horizontal direction by the driving member, and when the sliding frame 4 slides away from the support plate 2, the support plate 2 keeps relative to the processing table 1. The sliding frame 4 is stationary, and the transverse axis 3 will drive the cutter 6 to rotate under the action of the transmission member to achieve cutting of the film; when the sliding frame 4 slides toward the support plate 2, as the cutter 6 is lifted to a certain angle so that the cutter 6 will not interfere with the rotation of the frame, the slide plate 22 will move vertically under the action of the guide member, thereby achieving synchronous adjustment of the cutting edge of the frame and the spacing of the cutter 6; the device can achieve the side-changing cutting of the excess part of the film only by controlling the horizontal movement of the sliding frame 4, thereby achieving the purpose of simplifying the operation procedure of the equipment and improving the processing efficiency.

[0043] Embodiment 2:

[0044] The technical solution is basically the same as that of the first embodiment, except that Figure 3 As shown, the first linkage includes a first wheel disc 27 and a second wheel disc 28 rotatably connected to the bottom of the processing table 1, and a component driving the second wheel disc 28 to rotate, the second wheel disc 28 is coaxially fixed to the support plate 2, and the outer engaging sleeves of the first wheel disc 27 and the second wheel disc 28 are provided with a second chain 29; when the first wheel disc 27 rotates, the second wheel disc 28 will drive the support plate 2 to rotate synchronously under the action of the second chain 29; the side walls of the first wheel disc 27 and the second wheel disc 28 are both formed with teeth that engage with the second chain 29.

[0045] The component that drives the second wheel disc 28 to rotate includes an insertion shaft 25 coaxially fixed with the first wheel disc 27, a sleeve 24 is fixed on the upper end of the slide plate 22 and is slidably embedded in cooperation with the insertion shaft 25, a protrusion 26 is formed on the side wall of the insertion shaft 25, and a slide rail 2401 is formed on the inner wall of the sleeve 24 and is slidably fitted with the protrusion 26; when the slide plate 22 moves in the vertical direction, the slide rail 2401 will drive the first wheel disc 27 fixed to the insertion shaft 25 to rotate by exerting pressure on the protrusion 26.

[0046] Embodiment three:

[0047] The technical solution is basically the same as that of the first embodiment, except that Figure 1-3 As shown, the second linkage includes two vertical plates 9 that slide through the processing table 1, and the vertical plates 9 are rotatably connected to the sliding sleeve 5, and a swing arm 901 is rotatably connected between the slide plate 22 and the two vertical plates 9; when the vertical plates 9 move in the vertical direction, the two vertical plates 9 will drive the sliding sleeve 5 and the cutting knife 6 to slide along the horizontal axis 3 under the action of the swing arm 901, thereby realizing the adjustment of the distance between the two cutting knives 6.

[0048] Embodiment 4:

[0049] The technical solution is basically the same as that of the first embodiment, except that Figure 3 As shown, a frame plate 11 is fixedly provided at the bottom of the processing table 1, and the driving member includes a screw rod 10 rotatably connected to the inner side of the frame plate 11, and the screw rod 10 is screwed together with the sliding frame 4, and a driving motor 12 for controlling the rotation of the screw rod 10 is installed at the outer end of the frame plate 11; starting the driving motor 12 drives the screw rod 10 to rotate, thereby causing the sliding frame 4 screwed together with the screw rod 10 to slide in the horizontal direction.

[0050] Embodiment five:

[0051] The technical solution is basically the same as that of the first embodiment, except that Figure 1-3As shown, the transmission member includes a support arm 7 fixed on the horizontal axis 3, a support rod 8 is fixed on the support arm 7, and a slide groove 401 is formed in the sliding frame 4 to cooperate with the sliding of the support rod 8; when the sliding frame 4 slides in the horizontal direction, the support rod 8 will slide along the slide groove 401, and the slide groove 401 will compress the support rod 8, driving the support arm 7 to drive the horizontal axis 3 coaxially fixed therewith to rotate.

[0052] Embodiment six:

[0053] The technical solution is basically the same as that of the first embodiment, except that Figure 1-5 As shown, the guide member includes a cam 21 rotatably connected to the inner side of the frame plate 11, and a component driving the cam 21 to rotate. A slider 23 rotatably connected to the cam 21 is slidably connected in the slide plate 22; a transverse groove is formed in the slide plate 22 to cooperate with the sliding of the slider 23. When the cam 21 rotates, the slider 23 will drive the slide plate 22 to move in the vertical direction under the action of the cam 21, and at the same time, the slider 23 will also slide along the transverse groove.

[0054] The component that drives the cam 21 to rotate includes a rotary sleeve 14 rotatably connected to the processing table 1 through a bracket, and a joint that drives the rotary sleeve 14 to rotate. A wheel ring 18 is fixedly provided at the outer end of the rotary sleeve 14, and a first chain 20 is provided on the outer meshing sleeves of the wheel ring 18 and the driven wheel 19; when the rotary sleeve 14 rotates, the wheel ring 18 fixed at the outer end of the rotary sleeve 14 will drive the driven wheel 19 to rotate synchronously with it through the first chain 20, thereby driving the cam 21 coaxially fixed with the driven wheel 19 to rotate.

[0055] The parts driving the rotary sleeve 14 to rotate include a cross bar 13 fixedly mounted on the sliding frame 4, a guide rod 16 slidingly passing through the rotary sleeve 14, a bending frame 15 corresponding to the guide rod 16 fixedly mounted on the side end of the rotary sleeve 14, a compression spring 17 for pressing the guide rod 16 inwardly abutting against the inner side of the bending frame 15, and a first slideway 1301 and a second slideway 1302 for cooperating with the sliding of the guide rod 16 are formed on the side wall of the cross bar 13; the number of the first slideway 1301 and the second slideway 1302 is two, the first slideway 1301 is composed of a straight section and a spiral section, the second slideway 1302 is a straight groove, and the second slideway 1302 and the two adjacent first slideways 1301 are both formed with a step surface for cooperating with the guide rod 16 to bounce off; the end surface of the spiral section of the first slideway 1301 slidingly fits with the guide rod 16 to form a slope surface for pressing the guide rod 16 outwardly.

[0056] When the cross bar 13 slides with the sliding frame 4 in the direction away from the support plate 2, the guide rod 16 will first slide in a straight line along the second slideway 1302. When the guide rod 16 slides out of the second slideway 1302, the guide rod 16 will bounce into the first slideway 1301 under the action of the compression spring 17, and then the guide rod 16 will slide in a straight line along the first slideway 1301. During this process, the cross bar 13 remains stationary relative to the processing table 1; when the cross bar 13 slides toward the support plate 2 with the sliding frame 4, the guide rod 16 will first slide along the straight section of the second slideway 1302. During this process, the cutter 6 will be lifted upward with the rotation of the horizontal axis 3. When the cutter 6 is lifted to a point where it will not interfere with the rotation of the frame, the guide rod 16 will slide into the spiral section of the second slideway 1302. At this time, as the guide rod 16 continues to slide, the cross bar 13 will rotate under the pressure of the guide rod 16 on the second slideway 1302.

[0057] The above description of the embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A method for preparing a mask dustproof film assembly, characterized in that: The preparation method comprises the following steps: S1, coating the frame for covering the mask with adhesive, and coating the substrate with fluororesin; S2, placing the frame and substrate into an oven to cure the adhesive and fluororesin; S3, peel off the dust-proof film formed by curing the fluororesin on the substrate, and adhere the dust-proof film to the frame; S4, using a cutting device to cut the excess film on the edge of the frame, and finally packaging it; The cutting device involved in the preparation method comprises: a processing table (1), the upper end of the processing table (1) is rotatably connected to a support plate (2) for placing a frame with a dustproof film adhered thereto, the upper end of the processing table (1) is rotatably connected to a transverse axis (3) through a bracket, the outer sliding sleeve of the transverse axis (3) is provided with two sliding sleeves (5), and the outer side of the transverse axis (3) is slidably connected to a cutting knife (6) fixed to the sliding sleeve (5); A slide plate (22) is provided at the bottom of the processing table (1) for vertical sliding. A first linking member and a second linking member are provided at the bottom of the processing table (1). When the processing table (1) moves vertically, the first linking member drives the support plate (2) to rotate, and the second linking member drives the two sliding sleeves (5) to slide along the horizontal axis (3); A sliding frame (4) is slidably passed through the processing table (1), a driving member for driving the sliding frame (4) to rotate is arranged at the bottom of the processing table (1), and a transmission member and a guide member are arranged on the processing table (1). When the sliding frame (4) slides away from the support plate (2), the horizontal axis (3) drives the cutter (6) to cut the film under the action of the transmission member. When the sliding frame (4) slides close to the support plate (2), as the cutter (6) rotates and rises to a certain angle, the slide plate (22) will move vertically under the action of the guide member. The first linkage comprises a first wheel disc (27) and a second wheel disc (28) rotatably connected to the bottom of the processing table (1), and a component for driving the second wheel disc (28) to rotate, the second wheel disc (28) being coaxially fixed to the support plate (2), and a second chain (29) being provided on the outer engaging sleeves of the first wheel disc (27) and the second wheel disc (28); The component driving the second wheel disc (28) to rotate comprises an insertion shaft (25) fixed coaxially with the first wheel disc (27); the upper end of the slide plate (22) is fixedly provided with a sleeve (24) slidably embedded in cooperation with the insertion shaft (25); a protrusion (26) is formed on the side wall of the insertion shaft (25); and a slide rail (2401) is formed on the inner wall of the sleeve (24) for sliding cooperation with the protrusion (26); The second linkage comprises two vertical plates (9) which penetrate and slide in the processing table (1), and the vertical plates (9) are rotatably connected to the sliding sleeve (5). A rotary arm (901) is rotatably connected between the sliding plate (22) and the two vertical plates (9).

2. The method for preparing a mask dustproof film assembly according to claim 1, characterized in that: A frame plate (11) is fixedly provided at the bottom of the processing table (1), and the driving member comprises a screw rod (10) rotatably connected to the inner side of the frame plate (11), and the screw rod (10) is screwedly connected to the sliding frame (4), and a driving motor (12) for controlling the rotation of the screw rod (10) is installed at the outer end of the frame plate (11).

3. The method for preparing a mask dustproof film assembly according to claim 1, characterized in that: The transmission member comprises a support arm (7) fixed on the transverse shaft (3), a support rod (8) being fixedly arranged on the support arm (7), and a sliding groove (401) cooperating with the sliding of the support rod (8) being formed in the sliding frame (4).

4. The method for preparing a mask dustproof film assembly according to claim 1, characterized in that: The guide member comprises a cam (21) rotatably connected to the inner side of the frame plate (11), and a component driving the cam (21) to rotate. A sliding block (23) rotatably connected to the cam (21) is slidably connected in the slide plate (22).

5. The method for preparing a mask dustproof film assembly according to claim 4, characterized in that: The assembly for driving the cam (21) to rotate comprises a rotary sleeve (14) rotatably connected to the processing table (1) via a bracket, and a coupling member for driving the rotary sleeve (14) to rotate. A wheel ring (18) is fixedly provided at the outer end of the rotary sleeve (14), and a first chain (20) is provided on the outer engaging sleeve of the wheel ring (18) and the driven wheel (19).

6. The method for preparing a mask dustproof film assembly according to claim 5, characterized in that: The engaging part driving the rotary sleeve (14) to rotate comprises a cross bar (13) fixedly mounted on a sliding frame (4); a guide rod (16) slidingly penetrates the rotary sleeve (14); a bending frame (15) corresponding to the guide rod (16) is fixedly mounted on a side end of the rotary sleeve (14); a compression spring (17) for pressing the guide rod (16) inwardly is abutted against the inner side of the bending frame (15); and a first slideway (1301) and a second slideway (1302) for cooperating with the guide rod (16) to slide are formed on the side wall of the cross bar (13).

7. The method for preparing a mask dustproof film assembly according to claim 6, characterized in that: The number of the first slideway (1301) and the second slideway (1302) is two, the first slideway (1301) is composed of a straight segment and a spiral segment, the second slideway (1302) is a straight groove, and the intersection of the second slideway (1302) and two adjacent first slideways (1301) is formed with a step surface for the guide rod (16) to bounce off.

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