A method of wire-in-tube installation of a target assembly

Abstract

The application provides a wire sleeve mounting method of a target assembly, which comprises drilling and wire sleeve mounting successively; the drilling depth penetrates through a back plate of the target assembly and extends to the inside of a target material of the target assembly; the wire sleeve mounting position is in the inside of the target material, and a blind hole type self-tapping wire sleeve is used; the blind hole type self-tapping wire sleeve comprises a wire sleeve body, an connecting channel is formed in the wire sleeve body along the axial direction, an internal thread is formed on the inner surface of the connecting channel, an external thread is formed on the outer surface of the wire sleeve body, and a blind hole is formed on the surface of the external thread, and the depth of the blind hole is less than the thickness of the wire sleeve body. The wire sleeve mounting method provided by the application avoids that metal chips are stuck in the chip removal groove, reduces the processing cost, shortens the production cycle, improves the production efficiency, and is beneficial to large-scale popularization and application.

Description

Technical Field

[0001] This invention belongs to the field of target sputtering technology, and relates to a method for installing a target assembly, and more particularly to a method for installing a wire sleeve on a target assembly. Background Technology

[0002] During target sputtering, as the amount of target used increases, the target will gradually be worn away. If the backplate fixed below the target is exposed, atoms on the backplate will be sputtered out and deposited on the substrate to be deposited, ultimately adversely affecting the film layer deposited on the substrate. Even worse, if the backplate is also sputtered through, the equipment may be damaged by the high-energy ion beam because the sputtering chamber is still undergoing discharge sputtering, causing serious damage to the equipment.

[0003] Preventive maintenance (PM) plans are crucial for the lifespan of target materials, necessitating timely replacement. However, the target lifespan settings in existing production processes are based solely on production experience. Furthermore, due to variations between different equipment, the established replacement times are only for reference and contain significant errors, often resulting in overuse or underuse of target materials.

[0004] During the entire production process, a target material will be disassembled multiple times for PM. During these disassembly processes, because the target material backing plate is relatively soft, in order to increase the strength of the internal thread, workers will generally use an embedded self-tapping insert to be embedded in the bottom hole to form a high-strength internal thread hole, thereby protecting the non-ferrous metal thread and enabling a tight threaded connection.

[0005] However, in existing self-tapping inserts, metal shavings generated during installation are difficult to expel from the hole. This can lead to the insert being pulled out of the hole by the screw, the screw becoming stuck and unable to be tightened, the insert being completely pulled out under external force, or the screw breaking off inside the insert. These issues ultimately terminate the lifespan of the target material, resulting in unnecessary increases in labor and target material costs. More seriously, loose screw tightening can cause poor sealing, allowing cooling water to enter the equipment and causing severe damage.

[0006] Generally, the backplate substrate used in target material assemblies is made of aluminum or copper. These materials are soft yet highly resilient, making the generated metal shavings difficult to break. Therefore, the existing self-tapping sleeve installation process produces a large amount of aluminum or copper shavings, which are difficult to remove from the shavings groove. To clean the residual aluminum or copper shavings, workers typically use high-pressure water guns, increasing processing costs. Furthermore, due to the high resilient nature of aluminum or copper shavings, some remain stuck in the shavings groove after rinsing, requiring subsequent manual visual inspection and the removal of shavings using metal rods and pliers, further increasing labor costs.

[0007] Therefore, how to provide a method for installing the wire sleeve of the target assembly to avoid metal chips getting stuck in the chip discharge groove, reduce processing costs, shorten the production cycle, and improve production efficiency has become an urgent problem that needs to be solved by those skilled in the art. Summary of the Invention

[0008] The purpose of this invention is to provide a method for installing the wire sleeve of a target assembly. This method avoids metal chips getting stuck in the chip removal groove, reduces processing costs, shortens the production cycle, improves production efficiency, and is conducive to large-scale promotion and application.

[0009] To achieve this objective, the present invention adopts the following technical solution:

[0010] The present invention provides a method for installing a wire sleeve on a target assembly, the method comprising drilling and installing the wire sleeve sequentially.

[0011] The depth of the drill hole extends through the back plate of the target assembly and into the interior of the target material of the target assembly.

[0012] The threaded sleeve is installed inside the target material, and the threaded sleeve used is a blind hole type self-tapping threaded sleeve.

[0013] The blind hole type self-tapping threaded sleeve includes a threaded sleeve body, the threaded sleeve body has a connecting channel along the axial direction, the inner surface of the connecting channel has an internal thread, the outer surface of the threaded sleeve body has an external thread, and the surface of the external thread has a blind hole, the depth of the blind hole being less than the thickness of the threaded sleeve body.

[0014] The threaded sleeve installation method provided by this invention uses a blind hole type self-tapping threaded sleeve. The blind hole on its surface is different from the through hole on the surface of traditional self-tapping threaded sleeves. It plays a role in collecting chips during the installation and subsequent disassembly of the threaded sleeve, preventing metal chips from entering the connection channel. This prevents the screw from getting stuck, the screw from breaking, or the threaded sleeve from being pulled out. At the same time, it eliminates the need for residual chip cleaning, high-pressure water gun washing, and visual inspection through a sight glass, reducing processing and labor costs, shortening the production cycle, improving production efficiency, and extending the service life of the target material assembly, which is conducive to large-scale promotion and application.

[0015] Preferably, the drilling angle is perpendicular to the back plate surface of the target assembly, and the drilling depth extends to 1 / 4-3 / 4 of the thickness inside the target, for example, it can be 1 / 4, 3 / 10, 7 / 20, 2 / 5, 9 / 20, 1 / 2, 11 / 20, 3 / 5, 13 / 20, 7 / 10 or 3 / 4, but is not limited to the listed values, other unlisted values ​​within this range are also applicable.

[0016] In this invention, the drilling depth needs to be controlled within a reasonable range to balance the robustness of the target assembly connection and the yield rate of the deposited film. When the drilling depth extends to less than 1 / 4 of the target's thickness, the subsequent screws cannot penetrate the target, making the target assembly prone to loosening during use. When the drilling depth extends to more than 3 / 4 of the target's thickness, the target thickness gradually decreases as sputtering progresses, prematurely exposing the screws and bushings. This causes the atoms of the screws and bushings to be sputtered out and deposited on the substrate to be deposited, ultimately adversely affecting the film layer deposited on the substrate.

[0017] Preferably, the number of holes is at least two, for example, two, three, four, five, six, seven, eight, nine, ten, eleven or twelve, but is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0018] Preferably, the drill holes are evenly distributed on the back plate surface of the target assembly, which further improves the robustness of the target assembly connection.

[0019] Preferably, the height of the blind hole type self-tapping sleeve is the same as the drilling depth inside the target material, thereby avoiding the sleeve from fixing the back plate in the target material assembly, and facilitating the reuse of the back plate after subsequent disassembly.

[0020] Preferably, the outer diameter of the blind hole type self-tapping screw sleeve exceeds the drilling diameter inside the target material by 0.1-1 mm, for example, it can be 0.1 mm, 0.2 mm, 0.3 mm, 0.4 mm, 0.5 mm, 0.6 mm, 0.7 mm, 0.8 mm, 0.9 mm or 1 mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0021] This invention limits the outer diameter of the threaded sleeve to be slightly larger than the diameter of the drill hole inside the target material, thereby allowing the external thread of the threaded sleeve to embed into the inner wall of the drill hole during installation, which improves the installation firmness and avoids the external thread being squeezed and broken by the inner wall of the drill hole due to the outer diameter of the threaded sleeve being too large, thus preventing the product from being scrapped.

[0022] Preferably, the shape of the blind hole is circular, rhomboid, or elliptical, and more preferably circular.

[0023] Preferably, the equivalent diameter of the blind hole is 1 / 3 to 3 / 4 of the outer diameter of the blind hole type self-tapping sleeve, for example, it can be 1 / 3, 5 / 12, 1 / 2, 7 / 12, 2 / 3 or 3 / 4, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0024] In this invention, the size of the blind hole needs to be controlled within a reasonable range to balance chip collection effectiveness and wire sleeve strength. When the equivalent diameter of the blind hole is less than 1 / 3 of the outer diameter of the wire sleeve, the metal chips generated during the installation and disassembly of the wire sleeve cannot be completely collected inside the blind hole, which can easily cause residual chips to be squeezed out and enter the connection channel. When the equivalent diameter of the blind hole exceeds 3 / 4 of the outer diameter of the wire sleeve, the space occupied by metal chips in the blind hole is too small, and most of the blind hole is in a hollow state, resulting in an unnecessary reduction in the strength of the wire sleeve.

[0025] Preferably, lubricating oil is added during the installation of the threaded sleeve to reduce frictional resistance and heat generation, making the installation process time-saving and labor-saving, and preventing damage to the external thread of the threaded sleeve.

[0026] Preferably, the material hardness of the blind hole self-tapping sleeve is greater than that of the target material in the target assembly, thereby avoiding damage to the external threads caused by the excessively hard inner wall of the target material during the installation process.

[0027] As a preferred technical solution of the present invention, the threaded sleeve installation method includes drilling and threaded sleeve installation performed sequentially.

[0028] The drilling angle is perpendicular to the back plate surface of the target assembly, the depth penetrates the back plate of the target assembly, and extends to 1 / 4-3 / 4 of the thickness of the target material inside the target assembly.

[0029] The number of holes is at least two, and the holes are evenly distributed on the back plate surface of the target assembly.

[0030] The threaded sleeve is installed inside the target material, and the threaded sleeve used is a blind hole type self-tapping threaded sleeve.

[0031] The blind hole type self-tapping threaded sleeve includes a threaded sleeve body, the threaded sleeve body has a connecting channel along the axial direction, the inner surface of the connecting channel has an internal thread, the outer surface of the threaded sleeve body has an external thread, and the surface of the external thread has a blind hole, the depth of the blind hole being less than the thickness of the threaded sleeve body.

[0032] The height of the blind hole type self-tapping sleeve is the same as the drilling depth inside the target material.

[0033] The outer diameter of the blind hole type self-tapping sleeve exceeds the drilling diameter inside the target material by 0.1-1 mm.

[0034] The blind hole is circular in shape, and its diameter is 1 / 3 to 3 / 4 of the outer diameter of the blind hole type self-tapping sleeve.

[0035] The hardness of the blind hole type self-tapping sleeve is greater than the hardness of the target material in the target assembly.

[0036] Lubricating oil is added during the installation of the threaded sleeve.

[0037] The numerical range described in this invention includes not only the point values ​​listed above, but also any point values ​​within the numerical ranges not listed above. Due to space limitations and for the sake of brevity, this invention will not exhaustively list all the specific point values ​​included in the range.

[0038] Compared with the prior art, the present invention has the following beneficial effects:

[0039] The threaded sleeve installation method provided by this invention uses a blind hole type self-tapping threaded sleeve. The blind hole on its surface is different from the through hole on the surface of traditional self-tapping threaded sleeves. It plays a role in collecting chips during the installation and subsequent disassembly of the threaded sleeve, preventing metal chips from entering the connection channel. This prevents the screw from getting stuck, the screw from breaking, or the threaded sleeve from being pulled out. At the same time, it eliminates the need for residual chip cleaning, high-pressure water gun washing, and visual inspection through a sight glass, reducing processing and labor costs, shortening the production cycle, improving production efficiency, and extending the service life of the target material assembly, which is conducive to large-scale promotion and application. Attached Figure Description

[0040] Figure 1 This is a cross-sectional view of the connection of each component in the threaded sleeve installation method provided by the present invention;

[0041] Figure 2 This is a schematic diagram of the structure of the blind hole type self-tapping threaded sleeve in the threaded sleeve installation method provided by the present invention.

[0042] Wherein: 10-backplate; 20-target material; 30-blind hole type self-tapping threaded insert; 31-threaded insert body; 32-connecting channel; 33-internal thread; 34-external thread; 35-blind hole; 40-screw. Detailed Implementation

[0043] The technical solution of the present invention will be further illustrated below through specific embodiments. Those skilled in the art should understand that the embodiments described are merely illustrative of the present invention and should not be construed as limiting the invention in any way.

[0044] The present invention provides a method for installing a wire sleeve on a target assembly, comprising drilling and wire sleeve installation performed sequentially.

[0045] like Figure 1 As shown, the depth of the drilled hole extends through the back plate 10 of the target assembly and into the target 20 of the target assembly; the threaded sleeve is installed inside the target 20, and the threaded sleeve used is a blind hole type self-tapping threaded sleeve 30.

[0046] like Figure 2As shown, the blind hole type self-tapping sleeve 30 includes a sleeve body 31. The sleeve body 31 has a connecting channel 32 along the axial direction. The inner surface of the connecting channel 32 has an internal thread 33. The outer surface of the sleeve body 31 has an external thread 34. The surface of the external thread 34 has a blind hole 35. The depth of the blind hole 35 is less than the thickness of the sleeve body 31.

[0047] In some embodiments, the drilling angle is perpendicular to the surface of the backplate 10 of the target assembly, and the drilling depth extends to 1 / 4 to 3 / 4 of the thickness inside the target 20.

[0048] In some embodiments, the number of holes is at least two, and the holes are evenly distributed on the surface of the backplate 10 of the target assembly.

[0049] In some embodiments, the height of the blind hole type self-tapping sleeve 30 is the same as the drilling depth inside the target material 20.

[0050] In some embodiments, the outer diameter of the blind hole type self-tapping sleeve 30 exceeds the drilling diameter inside the target material 20 by 0.1-1 mm.

[0051] In some embodiments, the shape of the blind hole 35 is circular, rhomboid, or elliptical, and more preferably circular.

[0052] In some embodiments, the equivalent diameter of the blind hole 35 is 1 / 3 to 3 / 4 of the outer diameter of the blind hole self-tapping sleeve 30.

[0053] In some embodiments, lubricating oil is added during the installation of the threaded sleeve.

[0054] In some embodiments, the material hardness of the blind hole type self-tapping sleeve 30 is greater than the hardness of the target material 20 in the target material assembly.

[0055] The threaded sleeve installation method provided by this invention uses a blind hole type self-tapping threaded sleeve 30. The blind hole 35 on its surface is different from the through hole on the surface of traditional self-tapping threaded sleeves. It plays a role in collecting chips during the installation and subsequent disassembly of the threaded sleeve, preventing metal chips from entering the connection channel. This prevents the screw 40 from getting stuck, the screw 40 from breaking, or the threaded sleeve from being pulled out. At the same time, it eliminates the need for chip cleaning, high-pressure water gun washing, and visual inspection through a sight glass, reducing processing and labor costs, shortening the production cycle, improving production efficiency, and extending the service life of the target material assembly, which is conducive to large-scale promotion and application.

[0056] Example 1

[0057] This embodiment provides a method for installing a wire sleeve on a target assembly, including drilling and wire sleeve installation performed sequentially.

[0058] like Figure 1As shown, the angle of the drill hole is perpendicular to the surface of the back plate 10 of the target assembly, the depth penetrates the back plate 10 of the target assembly, and extends to half the thickness of the target 20 inside the target assembly.

[0059] The number of holes is four, and the holes are evenly distributed on the surface of the back plate 10 of the target assembly.

[0060] The threaded sleeve is installed inside the target material 20, and the threaded sleeve used is a blind hole type self-tapping threaded sleeve 30.

[0061] like Figure 2 As shown, the blind hole type self-tapping sleeve 30 includes a sleeve body 31. The sleeve body 31 has a connecting channel 32 along the axial direction. The inner surface of the connecting channel 32 has an internal thread 33. The outer surface of the sleeve body 31 has an external thread 34. The surface of the external thread 34 has a blind hole 35. The depth of the blind hole 35 is 4 / 5 of the thickness of the sleeve body 31.

[0062] The height of the blind hole type self-tapping sleeve 30 is the same as the drilling depth inside the target material 20.

[0063] The outer diameter of the blind hole type self-tapping sleeve 30 exceeds the drilling diameter inside the target material 20 by 0.5 mm.

[0064] The blind hole 35 is circular in shape, and its diameter is 1 / 2 of the outer diameter of the blind hole type self-tapping sleeve 30.

[0065] The blind hole type self-tapping sleeve 35 is made of brass, and its hardness is greater than that of the target material 20 in the target material assembly.

[0066] Lubricating oil is added during the installation of the threaded sleeve.

[0067] The threaded sleeve installation method provided in this embodiment only requires two steps: drilling and threaded sleeve installation. It eliminates the need for debris cleaning, high-pressure water gun rinsing, and visual inspection via a sight glass. This results in a short production cycle, high production efficiency, and low labor costs. During the entire sputtering production process, a single target can be disassembled multiple times for preventative equipment maintenance, and no customer complaints have been reported.

[0068] Example 2

[0069] This embodiment provides a method for installing a wire sleeve on a target assembly, including drilling and wire sleeve installation performed sequentially.

[0070] like Figure 1 As shown, the angle of the drill hole is perpendicular to the surface of the back plate 10 of the target assembly, the depth penetrates the back plate 10 of the target assembly, and extends to 1 / 4 of the thickness of the target 20 inside the target assembly.

[0071] The number of holes is 6, and the holes are evenly distributed on the surface of the back plate 10 of the target assembly.

[0072] The threaded sleeve is installed inside the target material 20, and the threaded sleeve used is a blind hole type self-tapping threaded sleeve 30.

[0073] like Figure 2 As shown, the blind hole type self-tapping sleeve 30 includes a sleeve body 31, the sleeve body 31 has a connecting channel 32 along the axial direction, the inner surface of the connecting channel 32 has an internal thread 33, the outer surface of the sleeve body 31 has an external thread 34, and the surface of the external thread 34 has a blind hole 35, the depth of the blind hole 35 is 3 / 4 of the thickness of the sleeve body 31.

[0074] The height of the blind hole type self-tapping sleeve 30 is the same as the drilling depth inside the target material 20.

[0075] The outer diameter of the blind hole type self-tapping sleeve 30 exceeds the drilling diameter inside the target material 20 by 1 mm.

[0076] The blind hole 35 is circular in shape, and its diameter is 1 / 3 of the outer diameter of the blind hole type self-tapping sleeve 30.

[0077] The blind hole type self-tapping sleeve 35 is made of brass, and its hardness is greater than that of the target material 20 in the target material assembly.

[0078] Lubricating oil is added during the installation of the threaded sleeve.

[0079] The threaded sleeve installation method provided in this embodiment only requires two steps: drilling and threaded sleeve installation. It eliminates the need for debris cleaning, high-pressure water gun rinsing, and visual inspection via a sight glass. This results in a short production cycle, high production efficiency, and low labor costs. During the entire sputtering production process, a single target can be disassembled multiple times for preventative equipment maintenance, and no customer complaints have been reported.

[0080] Example 3

[0081] This embodiment provides a method for installing a wire sleeve on a target assembly, including drilling and wire sleeve installation performed sequentially.

[0082] like Figure 1 As shown, the angle of the drill hole is perpendicular to the surface of the back plate 10 of the target assembly, the depth penetrates the back plate 10 of the target assembly, and extends to 3 / 4 of the thickness of the target 20 inside the target assembly.

[0083] The number of holes is two, and the holes are evenly distributed on the surface of the back plate 10 of the target assembly.

[0084] The threaded sleeve is installed inside the target material 20, and the threaded sleeve used is a blind hole type self-tapping threaded sleeve 30.

[0085] like Figure 2 As shown, the blind hole type self-tapping sleeve 30 includes a sleeve body 31. The sleeve body 31 has a connecting channel 32 along the axial direction. The inner surface of the connecting channel 32 has an internal thread 33. The outer surface of the sleeve body 31 has an external thread 34. The surface of the external thread 34 has a blind hole 35. The depth of the blind hole 35 is 2 / 3 of the thickness of the sleeve body 31.

[0086] The height of the blind hole type self-tapping sleeve 30 is the same as the drilling depth inside the target material 20.

[0087] The outer diameter of the blind hole type self-tapping sleeve 30 exceeds the drilling diameter inside the target material 20 by 0.1 mm.

[0088] The blind hole 35 is circular in shape, and its diameter is 3 / 4 of the outer diameter of the blind hole type self-tapping sleeve 30.

[0089] The blind hole type self-tapping sleeve 35 is made of brass, and its hardness is greater than that of the target material 20 in the target material assembly.

[0090] Lubricating oil is added during the installation of the threaded sleeve.

[0091] The threaded sleeve installation method provided in this embodiment only requires two steps: drilling and threaded sleeve installation. It eliminates the need for debris cleaning, high-pressure water gun rinsing, and visual inspection via a sight glass. This results in a short production cycle, high production efficiency, and low labor costs. During the entire sputtering production process, a single target can be disassembled multiple times for preventative equipment maintenance, and no customer complaints have been reported.

[0092] Example 4

[0093] This embodiment provides a method for installing a wire sleeve on a target assembly. Except for changing the drilling depth to extend to 1 / 5 of the thickness inside the target, the other steps and conditions are the same as in Embodiment 1, so they will not be described in detail here.

[0094] Compared to Example 1, because the drilling in this example is too shallow, the screw 40 cannot penetrate the target material 20, which makes the target material assembly very easy to loosen during use.

[0095] Example 5

[0096] This embodiment provides a method for installing a wire sleeve on a target assembly. Except for changing the drilling depth to extend to 4 / 5 of the thickness inside the target, the other steps and conditions are the same as in Embodiment 1, so they will not be described in detail here.

[0097] Compared to Example 1, because the drilling in this example is too deep, the thickness of the target material 20 gradually decreases as sputtering proceeds, prematurely exposing the screw 40 and the blind hole type self-tapping sleeve 30. This causes the atoms of the screw 40 and the blind hole type self-tapping sleeve 30 to be sputtered out and deposited on the substrate to be formed, ultimately having an adverse effect on the film layer deposited on the substrate.

[0098] Example 6

[0099] This embodiment provides a method for installing a threaded sleeve on a target assembly. Except for changing the diameter of the blind hole 35 to 1 / 4 of the outer diameter of the blind hole self-tapping threaded sleeve 30, the other steps and conditions are the same as in Embodiment 1, so they will not be described in detail here.

[0100] Compared to Embodiment 1, because the blind hole 35 in this embodiment is too small, the metal shavings generated during the installation and disassembly of the threaded sleeve cannot be completely concentrated inside the blind hole 35, which easily causes the residue to be squeezed out and enter the connecting channel 32.

[0101] Example 7

[0102] This embodiment provides a method for installing a threaded sleeve on a target assembly. Except for changing the diameter of the blind hole 35 to 4 / 5 of the outer diameter of the blind hole self-tapping threaded sleeve 30, the other steps and conditions are the same as in Embodiment 1, so they will not be described in detail here.

[0103] Compared to Example 1, in this example, the blind hole 35 is too large, the space occupied by metal chips in the blind hole 35 is too small, and most of the blind hole 35 is in a hollow state, which leads to an unnecessary reduction in the strength of the thread sleeve.

[0104] Comparative Example 1

[0105] This comparative example provides a method for installing a threaded sleeve on a target assembly. Except for replacing the blind hole type self-tapping threaded sleeve 30 with a through hole type self-tapping threaded sleeve of the same specification, that is, replacing the blind hole 35 in the threaded sleeve with a through hole, the other steps and conditions are the same as in Example 1, so they will not be described in detail here.

[0106] Compared to Example 1, since this comparative example uses a through-hole self-tapping threaded sleeve, a large amount of metal shavings enter the connection channel during the installation of the threaded sleeve. This can easily lead to screw jamming, screw breakage, or the threaded sleeve being pulled out. Therefore, it is necessary to carry out steps such as cleaning the residue, rinsing with a high-pressure water gun, and visual inspection through a viewing mirror. This results in a long production cycle, low production efficiency, high labor costs, and a high likelihood of customer complaints.

[0107] Therefore, the threaded sleeve installation method provided by this invention uses a blind hole type self-tapping threaded sleeve. The blind hole on its surface is different from the through hole on the surface of traditional self-tapping threaded sleeves. It plays a role in collecting chips during the installation and subsequent disassembly of the threaded sleeve, preventing metal chips from entering the connection channel. This prevents the screw from getting stuck, the screw from breaking, or the threaded sleeve from being pulled out. At the same time, it eliminates the need for chip cleaning, high-pressure water gun washing, and visual inspection through a sight glass, reducing processing costs and labor costs, shortening the production cycle, improving production efficiency, and extending the service life of the target material assembly, which is conducive to large-scale promotion and application.

[0108] The applicant declares that the above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention fall within the protection and disclosure scope of the present invention.

Claims

1. A method for installing a wire sleeve on a target assembly, characterized in that, The threaded sleeve installation method includes drilling and threaded sleeve installation performed sequentially. The depth of the drill hole extends through the back plate of the target assembly and into the interior of the target material of the target assembly. The threaded sleeve is installed inside the target material, and the threaded sleeve used is a blind hole type self-tapping threaded sleeve; The blind hole type self-tapping threaded sleeve includes a threaded sleeve body, the threaded sleeve body has a connecting channel along the axial direction, the inner surface of the connecting channel has an internal thread, the outer surface of the threaded sleeve body has an external thread, and the surface of the external thread has a blind hole, the depth of the blind hole is less than the thickness of the threaded sleeve body. The equivalent diameter of the blind hole is 1 / 3 to 3 / 4 of the outer diameter of the blind hole type self-tapping sleeve; The blind hole is used to collect chips during the installation and removal of the threaded sleeve.

2. The threaded sleeve installation method according to claim 1, characterized in that, The drilling angle is perpendicular to the back plate surface of the target assembly, and the drilling depth extends to 1 / 4-3 / 4 of the thickness inside the target.

3. The threaded sleeve installation method according to claim 1, characterized in that, The number of holes is at least two, and the holes are evenly distributed on the back plate surface of the target assembly.

4. The threaded sleeve installation method according to claim 1, characterized in that, The height of the blind hole type self-tapping sleeve is the same as the drilling depth inside the target material.

5. The threaded sleeve installation method according to claim 1, characterized in that, The outer diameter of the blind hole type self-tapping sleeve exceeds the drilling diameter inside the target material by 0.1-1 mm.

6. The threaded sleeve installation method according to claim 1, characterized in that, The blind hole can be circular, rhomboid, or elliptical in shape.

7. The threaded sleeve installation method according to claim 6, characterized in that, The blind hole is circular in shape.

8. The threaded sleeve installation method according to claim 1, characterized in that, Lubricating oil is added during the installation of the threaded sleeve.

9. The threaded sleeve installation method according to claim 1, characterized in that, The hardness of the blind hole type self-tapping sleeve is greater than the hardness of the target material in the target assembly.

10. The threaded sleeve installation method according to claim 1, characterized in that, The threaded sleeve installation method includes drilling and threaded sleeve installation performed sequentially. The drilling angle is perpendicular to the back plate surface of the target assembly, the depth penetrates the back plate of the target assembly, and extends to 1 / 4-3 / 4 of the thickness of the target material inside the target assembly. The number of holes is at least two, and the holes are evenly distributed on the back plate surface of the target assembly. The threaded sleeve is installed inside the target material, and the threaded sleeve used is a blind hole type self-tapping threaded sleeve; The blind hole type self-tapping threaded sleeve includes a threaded sleeve body, the threaded sleeve body has a connecting channel along the axial direction, the inner surface of the connecting channel has an internal thread, the outer surface of the threaded sleeve body has an external thread, and the surface of the external thread has a blind hole, the depth of the blind hole is less than the thickness of the threaded sleeve body. The height of the blind hole type self-tapping sleeve is the same as the drilling depth inside the target material; The outer diameter of the blind hole type self-tapping sleeve exceeds the drilling diameter inside the target material by 0.1-1 mm; The blind hole is circular in shape, and its diameter is 1 / 3 to 3 / 4 of the outer diameter of the blind hole type self-tapping sleeve; The hardness of the blind hole type self-tapping sleeve is greater than the hardness of the target material in the target assembly; Lubricating oil is added during the installation of the threaded sleeve.

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