A disassembly device for separating silicon carbide substrate and ceramic disk

Abstract

The present invention relates to the technical field of semiconductor production equipment, and in particular to a disassembly device for separating a silicon carbide substrate sheet and a ceramic disk, comprising a supporting plate having an insertion end for entering the gap between the edge of the silicon carbide substrate sheet and the ceramic disk; a lifting assembly, which is spaced apart on the side of the supporting plate close to the insertion end and is used to lift the edge of the silicon carbide substrate sheet; a driving assembly, connected to the lifting assembly, and used to drive the lifting assembly to lift in sequence to separate the edge of the silicon carbide substrate sheet and the ceramic disk. After the present invention enters the gap between the edge of the silicon carbide substrate sheet and the ceramic disk through the insertion end, the driving assembly is used to drive the lifting assembly to lift in sequence to separate the edge of the silicon carbide substrate sheet and the ceramic disk, thereby avoiding damage to the edge of the silicon carbide substrate sheet and allowing the silicon carbide substrate sheet to be unloaded without heating after polishing, thereby greatly reducing product processing time.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor production equipment, and in particular to a disassembly device for separating a silicon carbide substrate sheet and a ceramic disk. Background Art

[0002] Silicon carbide substrates are the cornerstone of gallium nitride and silicon carbide applications in third-generation semiconductor materials. Limited by technological and process limitations, the large-scale application of gallium nitride as a substrate remains challenging. Gallium nitride devices are primarily manufactured by epitaxially growing gallium nitride on sapphire, silicon wafers, or semi-insulating silicon carbide wafers. These devices are primarily used in the RF field of macro base station communications. Silicon carbide, on the other hand, is primarily developed by epitaxially growing silicon carbide epitaxial layers on conductive silicon carbide substrates. These devices are used in various power devices. In recent years, with the maturation of technological processes and the reduction of manufacturing costs, its application in the new energy sector has continued to penetrate. Silicon carbide materials will be a crucial foundation for silicon carbide and gallium nitride devices in future new energy and 5G communications.

[0003] Silicon carbide production involves two major processes: crystal growth and wafer production. One of these processes involves polishing. Typically, single-sided polishing involves securing one side of the substrate to a ceramic plate with liquid wax, and then polishing the exposed side. After polishing, the ceramic plate is heated to high temperatures to melt the wax between the substrate and the plate. The substrate is then removed from the plate using an external force.

[0004] This unloading method requires heating the ceramic plate with the substrate sheet, and the melting point of the liquid wax used for bonding is 100°C. It takes at least 10 minutes to heat the ceramic plate from room temperature of 20°C to above 100°C, and the flow of the product is stagnant. The heated ceramic plate needs to be left to cool for more than 10 minutes before it can be used for subsequent processing and production, resulting in reduced utilization of the ceramic plate. In addition, when the heating table is used continuously, the heating wire is easily burned and needs to be replaced regularly, resulting in increased production costs. The high-temperature surface of the heating table and the ceramic plate are easily burned after heating. Therefore, a sheet unloading method that does not require heating is urgently needed. Summary of the Invention

[0005] The purpose of the present invention is to solve the above-mentioned shortcomings in the prior art and to propose a disassembly device for separating a silicon carbide substrate sheet and a ceramic disk.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] Design a disassembly device for separating silicon carbide substrate and ceramic disk, including

[0008] an abutment plate having an insertion end for entering a gap between an edge of the silicon carbide substrate and the ceramic disk;

[0009] A lifting assembly is spaced apart and arranged on a side of the holding plate close to the insertion end, and is used to lift the edge of the silicon carbide substrate;

[0010] A driving assembly is connected to the lifting assembly and is used to drive the lifting assembly to lift in sequence to separate the edge of the silicon carbide substrate sheet from the ceramic disk.

[0011] Furthermore, the lifting assembly includes a sunken groove provided on the supporting plate, a lifting airbag provided along the inner wall of the sunken groove, and an air inlet connected to the bottom of the sunken groove.

[0012] Furthermore, the driving assembly includes a channel 1 opened in the supporting plate and connected to the air inlet, an inflation part for inflating one of the channels 1, a channel 2 connected to one side of the channel 1, a channel 3 connected to the channel 2 and the next adjacent channel 1, a blocking part for blocking the channel 2, and a traction part for adjusting the position of the blocking part according to the deformation state of the lifting airbag to control the blocking or conduction of the channel 2.

[0013] Furthermore, the caliber of the channel one is larger than the caliber of the channel two.

[0014] Furthermore, the blocking portion includes a sliding groove and a positioning groove provided on both sides of the second channel, and a blocking block sealingly and slidingly matched with the sliding groove, and one end of the blocking block is inserted into the positioning groove.

[0015] Furthermore, the traction part includes a thickening strip provided on the inner wall of the lifting airbag, a pulling section connecting the blocking block and the thickening strip, a guide groove passing through the supporting plate for the pulling section to pass through, and a resetting part provided in the slide groove for resetting the blocking block.

[0016] Furthermore, the resetting portion includes elastic sheets symmetrically distributed on both sides of the pulling section.

[0017] Furthermore, the elastic sheet is arc-shaped and concave toward the pulling section.

[0018] Furthermore, the inflatable part includes an extension plate connected to the supporting plate, a hand-grip plate provided at the end of the extension plate, a mounting groove opened on one side of the hand-grip plate, a pressing airbag provided in the mounting groove, and a channel four connecting the channel one and the pressing airbag.

[0019] Furthermore, the supporting plate is made of polyoxymethylene (POM) material.

[0020] The present invention proposes a disassembly device for separating a silicon carbide substrate sheet and a ceramic disk, which has the following beneficial effects:

[0021] The present invention inserts the end into the gap between the edge of the silicon carbide substrate sheet and the ceramic disk, and then uses the driving component to drive the lifting component to lift in sequence to separate the edge of the silicon carbide substrate sheet and the ceramic disk, thereby avoiding damage to the edge of the silicon carbide substrate sheet. After polishing, the silicon carbide substrate sheet can be unloaded without heating, which greatly reduces the product processing time. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic structural diagram of a disassembly device for separating a silicon carbide substrate sheet and a ceramic disk proposed in the present invention;

[0023] Figure 2 It is a cross-sectional view of the supporting plate;

[0024] Figure 3 for Figure 2 A in the middle is an enlarged schematic diagram; DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0026] Reference Figure 1-3 , a disassembly device for separating a silicon carbide substrate sheet and a ceramic disk, comprising

[0027] The supporting plate 1 has an insertion end 101 for entering the gap between the edge of the silicon carbide substrate and the ceramic disk. Preferably, the cross section of the supporting plate 1 in this embodiment is a right triangle;

[0028] A lifting assembly 2 is spaced apart and disposed on a side of the supporting plate 1 close to the insertion end 101 and is used to lift the edge of the silicon carbide substrate;

[0029] The driving assembly 3 is connected to the lifting assembly 2 and is used to drive the lifting assembly 2 to lift in sequence to separate the edge of the silicon carbide substrate sheet from the ceramic disk.

[0030] The present invention enters the gap between the edge of the silicon carbide substrate sheet and the ceramic disk through the insertion end 101, and then uses the driving component 3 to drive the lifting component 2 to lift in sequence to separate the edge of the silicon carbide substrate sheet and the ceramic disk, thereby avoiding damage to the edge of the silicon carbide substrate sheet. After polishing, the silicon carbide substrate sheet can be unloaded without heating the ceramic disk, which greatly reduces the product processing time.

[0031] In an optional embodiment of the present invention, the lifting assembly 2 includes a sunken groove 201 provided on the supporting plate 1, a lifting airbag 202 arranged along the inner wall of the sunken groove 201, and an air inlet 203 connected to the bottom of the sunken groove 201. Preferably, the sunken groove 201 in this embodiment is provided on the inclined surface 102 of the supporting plate 1, and the lifting airbag 202 is inflated through the air inlet 203, so that the lifting airbag 202 is deformed and convex toward the edge of the silicon carbide substrate sheet, thereby separating the edge of the silicon carbide substrate sheet from the ceramic disk.

[0032] In an optional embodiment of the present invention, the driving assembly 3 includes a channel 1 301 opened in the supporting plate 1 and connected to the air inlet 203, an inflation portion 306 for inflating one of the channels 1 301, a channel 2 302 connected to one side of the channel 1 301, a channel 3 303 connecting the channel 2 302 and the next adjacent channel 1 301, a blocking portion 304 for blocking the channel 2 302, and a traction portion 305 for adjusting the position of the blocking portion 304 according to the deformation state of the lifting airbag 202 to control the blocking or conduction of the channel 2 302. In this embodiment, the channel After the over-inflation portion 306 inflates one of the channels 1 301 , the lifting airbag 202 bulges to lift part of the edge of the silicon carbide substrate sheet. At the same time, the traction portion 305 drives the blocking portion 304 to move after the lifting airbag 202 bulges, and makes the channel 2 302 conductive. At this time, the gas in the channel 1 301 can enter the channel 3 303 through the rear channel 2 302, and enter the next channel 1 301, bulging the next lifting airbag 202. In this way, multiple lifting airbags 202 can be raised in sequence, separating the edge of the silicon carbide substrate sheet from the ceramic disk, thereby avoiding damage to the edge of the silicon carbide substrate sheet.

[0033] In an optional embodiment of the present invention, the diameter of channel 1 301 is larger than that of channel 2 302 . This arrangement ensures that the lifting airbag 202 bulges first, and then the traction part 305 is used to control the movement of the blocking part 304 .

[0034] In an optional embodiment of the present invention, the blocking portion 304 includes a slide groove 30401 and a positioning groove 30402 opened on both sides of channel two 302, and a blocking block 30403 that is sealed and slidably matched with the slide groove 30401, and one end of the blocking block 30403 is inserted into the positioning groove 30402. Preferably, a sealing gasket can be provided on the inner wall of the positioning groove 30402 in this embodiment, so that the blocking block 30403 enters one end of the positioning groove 30402 and is sealed and matched with the positioning groove 30402, and the slide groove 30401 and channel one 301 can be connected through the through hole 30404; when the blocking block 30403 is separated from the positioning groove 30402 under the action of the traction portion 305, the air can enter channel three 303 through channel two 302, and then bulge the next adjacent lifting airbag 202.

[0035] In an optional embodiment of the present invention, the traction portion 305 includes a thickening strip 30501 provided on the inner wall of the lifting airbag 202, a pulling section 30502 connecting the blocking block 30403 and the thickening strip 30501, a guide groove 30503 penetrating and supporting the plate 1 for the pulling section 30502 to pass through, and a reset portion provided in the slide groove 30401 for resetting the blocking block 30403. Preferably, the guide groove 30503 and the slide in this embodiment are The groove 30401 is connected, the guide groove 30503 is arc-shaped, and there are two thickening strips 30501, which can be made of rubber material; after the lifting airbag 202 is raised, the thickening strip 30501 pulls the pulling section 30502 to move in the guide groove 30503, so that the blocking block 30403 moves toward the inside of the slide groove 30401 and disengages from the positioning groove 30402, so that the air in channel one 301 enters channel three 303 through channel two 302.

[0036] In an optional embodiment of the present invention, the reset portion includes elastic sheets 30504 symmetrically distributed on both sides of the pulling section 30502, the elastic sheets 30504 are arc-shaped, and are recessed toward the pulling section 30502. When the blocking block 30403 moves toward the inside of the slide groove 30401, the elastic sheet 30504 is squeezed and deformed by the blocking block 30403; after the inflation portion 306 stops working, under the elastic action of the elastic sheet 30504, the blocking block 30403 moves toward the positioning groove 30402 and is inserted into the positioning groove 30402, thereby achieving blocking of channel two 302.

[0037] In an optional embodiment of the present invention, the inflation portion 306 includes an extension plate 30601 connected to the supporting plate 1, a grip plate 30602 provided at the end of the extension plate 30601, a mounting groove 30603 opened on one side of the grip plate 30602, a pressing airbag 30604 provided in the mounting groove 30603, and a channel four 30605 connecting channel one 301 and the pressing airbag 30604. By squeezing the pressing airbag 30604, the air inside the pressing airbag 30604 enters channel one 301 through channel four 30605, thereby lifting the airbag 202 in turn.

[0038] In an optional embodiment of the present invention, the supporting plate 1 is made of polyformaldehyde (POM) material. The supporting plate 1 made of polyformaldehyde (POM) material has a Rockwell hardness of 50-100, which is much lower than the Rockwell hardness of 2000-2500 of the silicon carbide substrate. Therefore, when the two come into contact, they will not cause edge collapse or damage to the silicon carbide substrate.

[0039] The above are only preferred specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with this technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solutions and inventive concepts of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A disassembly device for separating a silicon carbide substrate sheet and a ceramic disk, characterized in that: include A supporting plate (1) having an insertion end (101) for entering the gap between the edge of the silicon carbide substrate and the ceramic disk; A lifting assembly (2) is spaced apart and arranged on a side of the supporting plate (1) close to the insertion end (101), and is used for lifting the edge of the silicon carbide substrate; A driving assembly (3) connected to the lifting assembly (2) and used to drive the lifting assembly (2) to lift in sequence to separate the edge of the silicon carbide substrate sheet from the ceramic disk; The lifting assembly (2) comprises a sunken groove (201) provided on the supporting plate (1), a lifting air bag (202) provided along the inner wall of the sunken groove (201), and an air inlet (203) connected to the bottom of the sunken groove (201); The driving assembly (3) includes a channel one (301) opened in the supporting plate (1) and connected to the air inlet (203), an inflation portion (306) for inflating one of the channels one (301), a channel two (302) connected to one side of the channel one (301), a channel three (303) connected to the channel two (302) and the next adjacent channel one (301), a blocking portion (304) for blocking the channel two (302), and a traction portion (305) for adjusting the position of the blocking portion (304) according to the deformation state of the lifting airbag (202) to control the blocking or conduction of the channel two (302).

2. The disassembly device for separating a silicon carbide substrate sheet and a ceramic disk according to claim 1, characterized in that: The caliber of the channel 1 (301) is larger than the caliber of the channel 2 (302).

3. The disassembly device for separating a silicon carbide substrate sheet and a ceramic disk according to claim 1, characterized in that: The blocking portion (304) includes a sliding groove (30401) and a positioning groove (30402) provided on both sides of the second channel (302), and a blocking block (30403) that is sealingly and slidingly matched with the sliding groove (30401), and one end of the blocking block (30403) is inserted into the positioning groove (30402).

4. The disassembly device for separating a silicon carbide substrate sheet and a ceramic disk according to claim 3, characterized in that: The traction portion (305) includes a thickening strip (30501) provided on the inner wall of the lifting airbag (202), a pulling section (30502) connecting the blocking block (30403) and the thickening strip (30501), a guide groove (30503) passing through the supporting plate (1) for the pulling section (30502) to pass through, and a resetting portion provided in the sliding groove (30401) for resetting the blocking block (30403).

5. The disassembly device for separating a silicon carbide substrate sheet and a ceramic disk according to claim 4, characterized in that: The resetting portion comprises elastic sheets (30504) symmetrically distributed on both sides of the pulling section (30502).

6. The disassembly device for separating a silicon carbide substrate sheet and a ceramic disk according to claim 5, characterized in that: The elastic sheet (30504) is arc-shaped and is recessed toward the pulling section (30502).

7. The disassembly device for separating a silicon carbide substrate sheet and a ceramic disk according to claim 1, characterized in that: The inflatable portion (306) includes an extension plate (30601) connected to the supporting plate (1), a gripping plate (30602) provided at the end of the extension plate (30601), a mounting groove (30603) provided on one side of the gripping plate (30602), a pressing airbag (30604) provided in the mounting groove (30603), and a channel four (30605) connecting the channel one (301) and the pressing airbag (30604).

8. The disassembly device for separating a silicon carbide substrate sheet and a ceramic disk according to claim 1, characterized in that: The supporting plate (1) is made of polyoxymethylene (POM) material.

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