Plasma module cleaning apparatus and plasma module cleaning control method

Abstract

The application relates to a kind of plasma module cleaning equipment and plasma module cleaning control method.The equipment includes: drive assembly is arranged outside the plasma module, drive assembly is used to drive laser emission assembly moving being arranged on drive assembly;Laser emission assembly is used to emit laser;Controller is connected with plasma module, drive assembly and laser emission assembly respectively, controller is used to control drive assembly to drive laser emission assembly moving when plasma module satisfies self-cleaning condition, and control laser emission assembly emits laser, and the first discharge electrode piece and the second discharge electrode piece of plasma module are cleaned.Using the equipment and method can effectively remove the impurities on the electrode piece of the plasma module, reduce the failure probability of the plasma module operation, and improve the operation stability of the plasma module.

Description

Technical Field

[0001] This application relates to the field of equipment control technology, and in particular to a plasma module cleaning device and a plasma module cleaning control method. Background Technology

[0002] The plasma module uses the overlapping action of conductive electrodes on two ceramic plates to discharge onto the flowing air, thereby purifying the air.

[0003] However, the air ducts of the purification equipment are easily blocked by a series of objects such as hair or dust in the air, and ozone is inevitably produced when plasma is ionized at high voltage. This can easily lead to an increase in the concentration of oxygen molecules in the operating environment of the plasma module. The electrode plates in the module are prone to oxidation in a high concentration of oxygen molecules, which greatly increases the probability of plasma module failure and may even cause leakage, which is not conducive to the stable operation of the plasma module. Summary of the Invention

[0004] Therefore, it is necessary to provide a plasma module cleaning device and a plasma module cleaning control method that can effectively remove impurities from the electrode plates of the plasma module, reduce the probability of plasma module failure, and improve the operational stability of the plasma module, in order to address the above-mentioned technical problems.

[0005] In a first aspect, this application provides a plasma module cleaning device for use with a plasma module, the plasma module including a first discharge electrode and a second discharge electrode disposed opposite to each other, the device comprising:

[0006] A transmission component is disposed outside the plasma module, and the transmission component is used to drive the laser emitting component disposed on the transmission component to move.

[0007] The laser emitting component is used to emit laser light;

[0008] A controller is connected to the plasma module, the transmission assembly, and the laser emitting assembly respectively. The controller is used to control the transmission assembly to move the laser emitting assembly when the plasma module meets the self-cleaning conditions, and to control the laser emitting assembly to emit laser light to clean the first discharge electrode and the second discharge electrode of the plasma module.

[0009] In one embodiment, the laser emitting assembly includes a first laser emitter and a second laser emitter, the first laser emitter being used to emit laser light to the first discharge electrode for cleaning, and the second laser emitter being used to emit laser light to the second discharge electrode for cleaning.

[0010] In one embodiment, the transmission component is a telescopic component, which includes a telescopic part and a fixed part. The telescopic part is used to drive the first laser emitter and the second laser generator to telescopically move along a preset direction in the discharge region between the first discharge electrode and the second discharge electrode. The preset direction is parallel to the electrode setting direction. The fixed part is used to fix the telescopic part.

[0011] The first laser emitter is positioned at the top of the telescopic portion, facing the extending direction of the first discharge electrode sheet;

[0012] The second laser generator is positioned at the top of the telescopic portion, facing the extension direction of the second discharge electrode.

[0013] In one embodiment, the transmission assembly is a rotating assembly, which includes a rotating part and a driving part; the laser emitting assembly is disposed at the top of the rotating part;

[0014] The driving unit is used to drive the rotating unit to rotate within a preset angle range;

[0015] The rotating part is used to respond to the drive of the driving part and drive the laser emitting assembly to rotate within a preset angle range to clean the first discharge electrode and the second discharge electrode.

[0016] In one embodiment, the device further includes an impurity detection component;

[0017] The impurity detection component is connected to the controller and is used to detect impurities in the first discharge electrode and the second discharge electrode to obtain impurity information of the first discharge electrode and the second discharge electrode.

[0018] The controller acquires the impurity information, determines the laser operating parameters of the laser emitting component based on the impurity information, controls the operation of the laser emitting component according to the laser operating parameters, and cleans the first discharge electrode and the second discharge electrode.

[0019] In one embodiment, the device further includes an impurity cleaning component disposed on the transmission assembly;

[0020] The impurity cleaning component is connected to the controller and is used to clean the separated impurities generated during the cleaning process;

[0021] After the controller controls the laser emitting assembly to clean the laser-acting area on the first and / or second discharge electrode, it controls the impurity cleaning assembly to clean the separated impurities generated in the laser-acting area during the cleaning process.

[0022] Secondly, this application also provides a method for cleaning and controlling a plasma module, the method comprising:

[0023] When the plasma module meets the self-cleaning conditions, the control transmission component drives the laser emitting component mounted on the transmission component to move. The transmission component is located outside the plasma module. The plasma module includes a first discharge electrode and a second discharge electrode that are disposed opposite to each other.

[0024] The laser emitting component is controlled to emit laser light to clean the first and second discharge electrodes of the plasma module.

[0025] In one embodiment, the control transmission assembly drives the laser emitting assembly disposed on the transmission assembly to move, including:

[0026] The transmission assembly is controlled to move the laser emitting assembly mounted on the transmission assembly to the initial position;

[0027] Based on preset working position information, the transmission component is controlled to move the laser emitting component from the initial position to each working position. The preset working position information includes the position information of the working positions corresponding to the laser action areas on the first and second discharge electrodes.

[0028] In one embodiment, controlling the laser emitting assembly to emit laser light to clean the first and second discharge electrodes of the plasma module includes:

[0029] Obtain regional impurity information of the laser action area corresponding to the working position of the laser emitting component;

[0030] Based on the impurity information in the region, laser operating parameters for cleaning the laser-affected area are determined;

[0031] The laser emitting component is controlled to emit laser light according to the laser operating parameters to clean the laser-affected area.

[0032] In one embodiment, the regional impurity information includes the impurity layer thickness, and the laser operating parameters include the number of laser emissions, the laser emission duration for each laser emission, and the heat dissipation duration.

[0033] The step of determining the laser operating parameters for cleaning the laser-affected area based on the regional impurity information includes:

[0034] When the thickness of the impurity layer is greater than or equal to a preset impurity thickness threshold, the single-pass fusible thickness of the regional impurities in the laser-acted region is determined.

[0035] The number of laser emission times for the laser action area and the thickness of impurities to be melted at each laser emission are determined based on the single meltable thickness.

[0036] Based on the thickness of each impurity to be melted and the preset correspondence between thickness and duration, the laser emission duration and heat dissipation duration for each laser emission are determined.

[0037] The aforementioned plasma module cleaning equipment and plasma module cleaning control method include a transmission component installed outside the plasma module, and a laser emitting component installed on the transmission component. A controller is connected to the plasma module, the transmission component, and the laser emitting component. When the plasma module meets the self-cleaning conditions, the controller can control the transmission component to move the laser emitting component and control the laser emitting component to emit laser light to clean the first and second discharge electrodes of the plasma module. The energy concentrated by the laser can effectively melt the impurities attached to the electrodes and peel them off, reducing the probability of the plasma module failing due to excessive impurities and effectively improving the stability of the plasma module operation. Attached Figure Description

[0038] Figure 1 This is a schematic diagram of the structure of a plasma module cleaning device in one embodiment;

[0039] Figure 2 This is a schematic diagram of the structure of the plasma module cleaning device in another embodiment;

[0040] Figure 3 This is a schematic diagram of the structure of the plasma module cleaning device in another embodiment;

[0041] Figure 4 This is a schematic diagram of the structure of the plasma module cleaning device in another embodiment;

[0042] Figure 5 This is a flowchart illustrating a plasma module cleaning control method in one embodiment;

[0043] Figure 6 This is a schematic diagram of the process of controlling the transmission component to move the laser emitting component mounted on the transmission component in one embodiment;

[0044] Figure 7 This is a schematic diagram of a process for controlling the laser emitting component to emit laser light and cleaning the first and second discharge electrode plates of the plasma module in one embodiment.

[0045] Figure 8 This is a flowchart illustrating how laser operating parameters for cleaning a laser-affected area are determined based on regional impurity information in one embodiment.

[0046] Figure 9 This is a flowchart illustrating the plasma module cleaning control method in another embodiment;

[0047] Figure 10 This is a structural block diagram of a plasma module cleaning control device in one embodiment;

[0048] Figure 11 This is an internal structural diagram of a computer device in one embodiment. Detailed Implementation

[0049] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0050] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0051] It should be noted that when one element is considered to be "connected" to another element, it can be directly connected to the other element or connected to the other element through an intermediary element. Furthermore, in the following embodiments, "connection" should be understood as "electrical connection," "communication connection," etc., if there is transmission of electrical signals or data between the connected objects.

[0052] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising / including” or “having,” etc., specify the presence of the stated features, wholes, steps, operations, components, parts, or combinations thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof. Meanwhile, the term “and / or” as used in this specification includes any and all combinations of the associated listed items.

[0053] A plasma module is a purification device, such as a commonly used purification module in air purifiers. It typically includes a pair of opposing discharge plates. When the two plates are energized, an electric field is generated between them, which ionizes the surrounding air molecules and oxygen molecules, converting them into charged ions and highly polar active oxygen. These charged ions and active oxygen can adsorb and neutralize pollutants in the air, such as dust particles, bacteria, viruses, pollen, and odor molecules. The clean air obtained after processing by the plasma module can then be discharged through the air outlet of the purification device.

[0054] However, the air ducts of the purification equipment are easily blocked by a series of objects such as hair or dust in the air, and ozone is inevitably produced when plasma is ionized at high voltage. This can easily lead to an increase in the concentration of oxygen molecules in the operating environment of the plasma module. High concentration of oxygen molecules can cause oxidation of the electrode plates in the module, which greatly increases the probability of plasma module failure and may even cause leakage, which is not conducive to the stable operation of the plasma module.

[0055] Based on this, such as Figure 1 As shown, this application embodiment provides a plasma module cleaning device applied to a plasma module 100. The plasma module 100 includes a first discharge electrode 101 and a second discharge electrode 102 disposed opposite to each other. The plasma module cleaning device includes:

[0056] A transmission assembly 103 is disposed outside the plasma module 100. The transmission assembly 103 is used to drive the laser emitting assembly 104 disposed on the transmission assembly 103 to move.

[0057] The transmission component 103 is a movable component used to move the laser emitting component 104 by moving itself. Through the movement of the transmission component 103, the laser action area of ​​the laser emitting component 104, which itself does not possess motion characteristics, can cover the entire area of ​​the plasma module 100 to be cleaned. It is understood that the transmission component 103 can be any mechanical component capable of enabling the laser action area of ​​the laser emitting component 104 to cover the entire area of ​​the plasma module 100 to be cleaned. For example, the transmission component 103 can be a planar transmission component with extension capability in a preset extension direction; it can also be a spatial rotation component capable of driving the laser emitting component 104 to rotate in a preset rotation direction; or it can be a movable component that simultaneously possesses extension and rotation functions, enabling the laser emitting component 104 to move in both the preset extension and preset rotation directions.

[0058] In one embodiment, the entire area to be cleaned in the plasma module 100 can be the overlapping area of ​​the entire first discharge electrode 101 and the second discharge electrode 102, or it can be the electrode working area that is divided as needed on the first discharge electrode 101 and the second discharge electrode 102 according to the user's cleaning needs.

[0059] Since the working principle of the plasma module 100 is that an electric field is generated between the relatively arranged first discharge electrode 101 and the relatively arranged second discharge electrode 102 after being energized, and the air flowing through the electrode is ionized by the action of the electric field, in order to reduce the impact of adding additional components between the relatively arranged electrodes on the formation of the electric field or the air ionization effect, the laser emitting component 104 and the transmission component 103 that drives the laser emitting component 104 to move can be arranged outside the plasma module 100.

[0060] The laser emitting component 104 is used to emit laser light onto the discharge electrode in the plasma module 100. It can be understood that the laser emitted by the laser emitting component 104 can be considered a high-energy concentrated laser beam. When the laser emitting component 104 emits laser light onto a specific area on the electrode, because the oxide layer on the electrode has a different melting point than the electrode material, and the melting point of the oxide layer is usually lower than that of the electrode material, the oxide layer in that area will first expand due to heat and then melt and peel off from the electrode, thereby achieving cleaning of the plasma module 100.

[0061] It is understood that the laser emitting component 104 can be any component with laser emitting function, such as a laser beam lamp, a miniature laser, etc. The specific number of laser emitting components 104 installed on the device is not limited in this embodiment; designers can install the appropriate number of laser emitting components 104 on the device according to actual cleaning needs.

[0062] The equipment is also equipped with controllers (not shown in the figure) that are connected to the plasma module 100, the transmission assembly 103 and the laser emission assembly 104 respectively.

[0063] The controller is used to control the transmission component 103 to move the laser emitting component 104 when the plasma module 100 meets the self-cleaning conditions, and to control the laser emitting component 104 to emit laser to clean the first discharge electrode 101 and the second discharge electrode 102 of the plasma module 100.

[0064] The self-cleaning condition is a preset judgment condition used to determine whether the plasma module 100 needs to be cleaned. If the plasma module 100 meets the self-cleaning condition, it can be considered that a large number of impurities have been deposited on the electrode of the plasma module 100, which has affected the performance of the plasma module 100. Therefore, the electrode of the plasma module 100 needs to be self-cleaned to remove the impurities on the electrode to improve the operational stability of the plasma module 100 and reduce the probability of operational failure.

[0065] In one embodiment, the self-cleaning condition can be that the cycle running time of the plasma module 100 reaches a preset duration. Specifically, the controller can acquire the cycle running time of the plasma module 100, compare the cycle running time with the preset duration, and determine that the plasma module 100 meets the self-cleaning condition if the cycle running time reaches the preset duration. It is understood that after the plasma module 100 completes self-cleaning, its cycle running time will be cleared and the timing will restart.

[0066] In one embodiment, the self-cleaning condition may be that the ozone concentration of the gas output by the plasma module 100 is greater than or equal to a preset ozone concentration threshold.

[0067] Specifically, the plasma module 100 cleaning device may further include a gas sensor installed at the air outlet of the plasma module 100. The gas sensor can be used to detect the ozone concentration of the gas output by the plasma module 100. The controller is connected to the gas sensor to acquire the ozone concentration detected by the gas sensor, compares the ozone concentration with a preset ozone concentration threshold, and determines that the plasma module 100 meets the self-cleaning conditions if the ozone concentration is greater than or equal to the preset ozone concentration threshold. The preset ozone concentration threshold can be determined by the designer based on the ozone concentration of the gas output by the plasma module 100 under normal operating conditions.

[0068] In one embodiment, the self-cleaning condition can also be the receipt of a cleaning mode initiation command triggered by a user. The user can trigger the cleaning mode initiation command by pressing the manual cleaning button, causing the plasma module 100 to perform a cleaning process. The controller, in response to the user-triggered cleaning mode initiation command, determines that the plasma module 100 meets the self-cleaning condition.

[0069] Specifically, when the plasma module 100 meets the self-cleaning conditions, the controller can generate a transmission command and send it to the transmission component 103. The transmission component 103 moves in response to the transmission command sent by the controller, thereby driving the laser emitting component 104 to move. The controller generates a laser emission command and sends it to the laser emitting component 104. The laser emitting component 104 emits laser light in response to the laser emission command sent by the controller, cleaning the first discharge electrode 101 and the second discharge electrode 102 of the plasma module 100.

[0070] In one embodiment, in order to reduce cleaning risks and operating energy consumption, when the plasma module 100 meets the self-cleaning conditions, the controller can control the transmission component 103 to drive the laser emission component 104 to clean the electrode plates in the plasma module 100 after controlling the plasma module 100 to stop operating.

[0071] The plasma module cleaning device in the above embodiments has a transmission component installed outside the plasma module, and a laser emitting component installed on the transmission component. The controller is connected to the plasma module, the transmission component, and the laser emitting component respectively. When the plasma module meets the self-cleaning conditions, the controller can control the transmission component to drive the laser emitting component to move and control the laser emitting component to emit laser light to clean the first and second discharge electrode plates of the plasma module. The energy concentrated by the laser can effectively melt the impurities attached to the electrode plates and peel the impurities off the electrode plates, reducing the probability of module failure due to excessive impurities and effectively improving the stability of plasma module operation.

[0072] In order to improve the service life of the equipment, in one embodiment, the laser emitting assembly includes a first laser emitter and a second laser emitter, the first laser emitter being used to emit laser light to a first discharge electrode for cleaning, and the second laser emitter being used to emit laser light to a second discharge electrode for cleaning.

[0073] Since the first and second discharge electrodes are positioned relative to each other, if only one laser emitter is used, that laser emitter will need to perform all the cleaning tasks of the first and second discharge electrodes. This places high demands on the transmission components and can also easily reduce the service life of the plasma module cleaning equipment, thus hindering the improvement of the cleaning efficiency of the plasma module cleaning equipment.

[0074] Therefore, by setting a laser emitting assembly including a first laser emitter and a second laser emitter in the plasma module, the first discharge electrode and the second discharge electrode can be cleaned simultaneously or separately based on the first laser emitter and the second laser emitter during cleaning, which reduces the cleaning workload of a single laser emitter and effectively improves the cleaning efficiency and service life of the plasma module cleaning equipment.

[0075] Specifically, when the plasma module meets the self-cleaning conditions, the controller can control the transmission component to drive the first laser generator and the second laser generator to move, control the first laser emitter to emit laser to the first discharge electrode for cleaning, and control the second laser generator to emit laser to the second discharge electrode for cleaning.

[0076] Furthermore, in one embodiment, such as Figure 2 As shown, the transmission assembly 103 is a telescopic assembly, which includes a telescopic part 1031 and a fixing part 1032. The telescopic part 1031 is used to drive the first laser emitter 1041 and the second laser emitter 1042 to telescopically move along a preset direction in the discharge area between the first discharge electrode 101 and the second discharge electrode 102. The fixing part 1032 is used to fix the telescopic part 1031.

[0077] The preset direction is parallel to the electrode setting direction. For example, if the electrode setting direction of the plasma module 100 is horizontal, the telescopic part 1031 can drive the first laser emitter 1041 and the second laser emitter 1042 to move horizontally and telescopically within the discharge region. If the electrode setting direction of the plasma module 100 is vertical, the telescopic part 1031 can drive the first laser emitter 1041 and the second laser emitter 1042 to move vertically and telescopically within the discharge region.

[0078] Since the first laser emitter 1041 is a laser emitter used to clean the first discharge electrode 101 by emitting laser light, it needs to be positioned at the top of the telescopic portion 1031 facing the extending direction of the first discharge electrode 101. Similarly, the second laser emitter 1042 is a laser emitter used to clean the second discharge electrode 102 by emitting laser light; therefore, it needs to be positioned at the top of the telescopic portion 1031 facing the extending direction of the second discharge electrode 102.

[0079] Specifically, in use, the controller can control the telescopic part 1031 in the telescopic assembly to telescopically move along a preset direction toward the discharge area between the first discharge electrode 101 and the second discharge electrode 102. The fixing part 1032 can fix the end of the telescopic part 1041 away from the discharge area. When the telescopic part 1031 extends, it can be considered to telescopically move toward the discharge area in a suspended manner, thereby driving the first laser emitter 1041 and the second laser emitter 1042 set at the top of the telescopic part 1031 to move toward the discharge area. The controller controls the first laser emitter 1041 to emit laser to clean the first discharge electrode 101, and controls the second laser emitter 1042 to emit laser to clean the second discharge electrode 102.

[0080] In one embodiment, after cleaning is completed, the controller can control the telescopic part 1031 to return to its original position, causing the first laser emitter 1041 and the second laser emitter 1042 to move out of the discharge area, thereby reducing the impact on the normal operation of the plasma module.

[0081] In the above embodiments, a first laser emitter and a second laser emitter are provided in the telescopic part of the telescopic component. The first laser emitter and the second laser emitter can be moved within the discharge area by controlling the movement of the telescopic part in a preset direction, so as to effectively clean the first discharge electrode and the second discharge electrode respectively, thereby improving the electrode cleaning effect of the plasma module.

[0082] In one embodiment, the telescopic portion may include a first telescopic portion and a second telescopic portion. A first laser emitter may be disposed at the top end of the first telescopic portion, and a second laser emitter may be disposed at the top end of the second telescopic portion. In actual use, the controller can control the movement of the first telescopic portion in a preset direction to move the first laser emitter within the discharge area to clean the first discharge electrode, and control the movement of the second telescopic portion in a preset direction to move the second laser emitter within the discharge area to clean the second discharge electrode. By separately disposing of the first and second laser emitters on relatively independent first and second telescopic portions, the operational independence of the first and second laser emitters can be improved, effectively enhancing the electrode cleaning efficiency of the plasma module.

[0083] In addition to the telescopic movement method, in one embodiment, such as Figure 3 As shown, the transmission assembly 103 is a rotating assembly, which includes a rotating part 1033 and a driving part 1034. The laser emitting assembly 104 is disposed at the top of the rotating part 1033.

[0084] The drive unit 1034 is used to drive the rotating unit 1033 to rotate within a preset angle range. The rotating unit 1033 is used to respond to the drive of the drive unit 1034, drive the laser emitting assembly 104 to rotate within the preset angle range, adjust the laser emission angle of the laser emitting assembly 104, and clean the first discharge electrode 101 and the second discharge electrode 102.

[0085] The preset angle range is the range within which the rotating part 1033 can move under the drive of the driving part 1034. The preset angle range can be determined by the designer based on the actual structural dimensions of the rotating component. When the rotating part 1033 rotates within the preset angle range, it can drive the laser emitting component 104 to move together, thereby changing the laser emission angle of the laser emitting component 104. The corresponding laser emission angle can cover the areas to be cleaned on the first discharge electrode 101 and the second discharge electrode 102.

[0086] In one embodiment, in order to reduce the performance and energy consumption of the plasma module, when the laser emitting component 104 moves within a preset angle range, the corresponding laser emission angle just covers the areas to be cleaned on the first discharge electrode 101 and the second discharge electrode 102, thereby reducing the probability of laser emission to the non-clean areas, which would cause damage to the non-clean areas.

[0087] Specifically, when the plasma module meets the self-cleaning conditions, the controller can generate a transmission command and send the transmission command to the rotating component. The drive unit 1034 of the rotating component responds to the transmission command and drives the rotating unit 1033 to start rotating, thereby driving the laser emitting component 104 located at the top of the rotating unit 1033 to rotate within a preset angle range. During the rotation, the laser emitting component 104 will also adjust the laser emission angle accordingly, which can cover the areas to be cleaned of the first discharge electrode 101 and the second discharge electrode 102, thereby achieving the cleaning of the first discharge electrode 101 and the second discharge electrode 102.

[0088] In the above embodiments, the laser emitting component is disposed at the top of the rotating part of the rotating component. The laser emission angle of the laser emitting component can be adjusted by controlling the rotating part to rotate within a preset angle range, thereby achieving effective cleaning of the first and second discharge electrodes.

[0089] In one embodiment, when the laser emitting assembly includes a first laser emitter and a second laser emitter, the first and second laser emitters can be respectively arranged opposite each other on both sides of the top end of the rotating part. The first laser emitter emits laser light to clean the first discharge electrode, and the second laser emitter emits laser light to clean the second discharge electrode. Because laser emitters are respectively arranged on both sides of the top end of the rotating part, the range of preset angles can be reduced accordingly. That is, the rotating part only needs to rotate within a small range to ensure that the laser emission angle of the laser emitters can cover the areas to be cleaned on the first and second discharge electrodes, effectively improving the service life and cleaning efficiency of the plasma module cleaning equipment.

[0090] In order to achieve precise control over the cleaning process, in one embodiment, the plasma module cleaning device also includes an impurity detection component.

[0091] The impurity detection component is connected to the controller and is used to detect impurities on the first and second discharge electrodes to obtain impurity information. It is understood that the specific location of the impurity detection component is not limited in this embodiment, as long as it can detect impurities in the areas to be cleaned on the first and second discharge electrodes. The impurity detection component can be an image acquisition component, an infrared measurement component, or a Hall effect sensor component, etc.

[0092] Specifically, the controller can acquire impurity information detected by the impurity detection component, determine the laser operating parameters of the laser emitting component based on the impurity information, control the operation of the laser emitting component according to the laser operating parameters, and clean the first and second discharge electrodes.

[0093] In one embodiment, if the transmission component is a telescopic component, the impurity detection component can also be located at the top of the telescopic part of the telescopic component. When the transmission component drives the laser emitting component to the current working position, the impurity detection component can detect impurities in the laser action area on the electrode corresponding to the current working position, determine the impurity information of the laser action area, and the controller can determine the laser operation parameters of the laser emitting component for the laser action area corresponding to the current working position based on the obtained impurity information. The controller then controls the laser emitting component to operate according to the laser operation parameters, emitting laser light to clean the laser action area. After cleaning the laser action area corresponding to the current working position is completed, the controller will continue to control the transmission component to drive the laser emitting component to the next working position for cleaning.

[0094] In one embodiment, the impurity information is the oxide layer thickness on the electrode. Specifically, the controller acquires the oxide layer thickness detected by the impurity detector, determines laser operating parameters that match the oxide layer thickness based on a preset correspondence between thickness and operating parameters, and controls the operation of the laser emitting component according to the laser operating parameters to clean the electrode.

[0095] In one embodiment, laser operating parameters may include laser running time, laser energy, number of laser emission times, heat dissipation time, etc.

[0096] In the above embodiments, by setting an impurity detection component in the plasma module cleaning equipment, the impurity information covering the discharge electrode sheet can be accurately understood. Based on the impurity information, the corresponding laser operating parameters can be determined, which can improve the cleaning effect of subsequent control of the laser emitting component to clean the discharge electrode sheet according to the laser operating parameters, and reduce the probability of electrode sheet wear due to over-cleaning or the need to start the cleaning program multiple times due to inadequate cleaning.

[0097] In order to further improve the cleaning effect of the electrode during the cleaning process, in one embodiment, the plasma module cleaning device may also include an impurity cleaning component disposed on the transmission component. The impurity cleaning component is connected to the controller and is used to clean the separated impurities generated during the cleaning process.

[0098] The cleaning principle of the plasma module is to melt the impurity layer attached to the electrode by emitting a high-energy laser, so that it can be peeled off from the electrode. However, the impurities in the molten state may be sticky, and the peeling effect is not good. In order to improve the impurity cleaning effect, an impurity cleaning component can be used to clean the separated impurities generated during the cleaning process.

[0099] The laser action area is the area of ​​action corresponding to a single laser emission from the laser emitting component. The laser action area can be a single laser point or the range of action area generated by the linear movement of the laser emitting component driven by the transmission component.

[0100] Specifically, after the controller controls the laser emitting assembly to clean the laser-acting area on the first and / or second discharge electrode, it controls the impurity cleaning assembly to clean the separated impurities generated in the laser-acting area during the cleaning process.

[0101] In one embodiment, the impurity cleaning component includes a high-pressure gas jetting component that can generate coaxial high-pressure gas, i.e., high-pressure gas coaxial with the emitted laser. Specifically, after the controller controls the laser emitting component to clean the laser-affected area on the first and / or second discharge electrode, it can control the high-pressure gas jetting component to jet coaxial high-pressure gas into the laser-affected area, blowing away molten impurities in the laser-affected area on the electrode and improving the impurity cleaning effect.

[0102] In one embodiment, such as Figure 4 As shown, the plasma module 100 employs the interaction of a first discharge electrode 101 and a second discharge electrode 102 to achieve discharge on the flowing air. The first discharge electrode 101 and the second discharge electrode 102 are respectively disposed opposite to each other on two ceramic plates. According to the principle of dielectric discharge, plasma and ozone are generated during the ionization of air. The air flowing through the module, combined with the generated ozone, will oxidize the internal components of the module. The key area for oxidation is the electrode discharge layer. Once the discharge electrode is oxidized, it will affect the uniformity of the discharge and thus the performance of the entire module.

[0103] Based on this, this embodiment provides a plasma module cleaning device applied to a plasma module 100. The device includes a drive shaft 401, a first laser beam lamp 402, a second laser beam lamp 403, a first impurity detection component 404, a second impurity detection component 405, and a high-pressure gas jet component (not shown in the figure) respectively disposed on both sides of the top end of the drive shaft 401, and a controller (not shown in the figure) respectively connected to the plasma module 100, the drive shaft 401, the first laser beam lamp 402, the second laser beam lamp 403, the impurity detection component 404, and the high-pressure gas jet component.

[0104] The drive shaft 401 has both rotation and extension functions, which can drive the first laser beam lamp 402, the second laser beam lamp 403, the first impurity detection component 404 and the second impurity detection component 405 to move and clean the first discharge electrode 101 and the second discharge electrode 102.

[0105] Specifically, the controller acquires the cycle running time of the plasma module 100. When the cycle running time reaches the preset duration, it determines that the plasma module 100 meets the self-cleaning conditions. First, it controls the plasma module 100 to stop running. Then, it controls the drive shaft 401 to move, driving the first laser beam lamp 402, the second laser beam lamp 403, the first impurity detection component 404, and the second impurity detection component 405 to move to the preset starting point. It then controls the first impurity detection component 404 and the second impurity detection component 405 to start, and respectively perform impurity detection on the laser action area on the first discharge electrode plate 101 and the second discharge electrode plate 102 to obtain impurity information of the laser action area.

[0106] Based on the impurity information, the controller determines the laser operating parameters of the first laser beam lamp 402 and the second laser beam lamp 403, and controls the first laser beam lamp 402 and the second laser beam lamp 403 to emit lasers to clean the discharge electrode. After the laser cleaning is completed, the controller controls the high-pressure gas jet assembly to blow away the remaining molten impurities on the electrode.

[0107] Based on the control of the drive shaft 401, the controller can move the lasers of the first laser beam lamp 402 and the second laser beam lamp 403 to slowly and completely scan and cover the entire surface of the discharge electrode. After cleaning is completed, the controller can control the drive shaft 401 to reset, confirming that the self-cleaning process of the plasma module 100 has ended.

[0108] In the above embodiments, by focusing the laser onto the electrode impurities, the impurities can be melted at high temperature. Then, the molten metal is blown away with coaxial high-pressure gas, achieving the effect of separating the oxide layer from the electrode. In addition, the generated high temperature can also sterilize and clean the inside of the module, effectively improving the cleaning effectiveness of the plasma module.

[0109] Based on the same inventive concept, such as Figure 5 As shown in the illustration, this application also provides a plasma module cleaning control method applied to the above-mentioned plasma module cleaning equipment. Taking the application of this method to the controller in the plasma module cleaning equipment as an example, the method includes the following steps:

[0110] S502, when the plasma module meets the self-cleaning conditions, the control transmission component drives the laser emitting component mounted on the transmission component to move. The transmission component is mounted outside the plasma module. The plasma module includes a first discharge electrode and a second discharge electrode mounted opposite each other.

[0111] The self-cleaning condition is a preset condition used to determine whether the plasma module needs to be cleaned. If the plasma module meets the self-cleaning condition, it can be considered that a large number of impurities have been deposited on the electrode of the current plasma module, which has affected the performance of the plasma module. Therefore, the electrode of the plasma module needs to be self-cleaned to remove the impurities on the electrode to improve the operational stability of the plasma module and reduce the probability of operational failure.

[0112] Specifically, once the controller determines that the plasma module meets the self-cleaning conditions, it can generate a transmission command and send it to the transmission component, controlling the movement based on the transmission command. The transmission component responds to the transmission command sent by the controller and moves, thus driving the laser emitting component to move.

[0113] As is understandable, the connection relationships of the various components in the plasma module cleaning equipment have been described above and will not be repeated here.

[0114] S504 controls the laser emitting component to emit laser light to clean the first and second discharge electrodes of the plasma module.

[0115] Specifically, the controller can generate laser emission commands and send them to the laser emission assembly, controlling the assembly to emit laser light towards the discharge electrode plates based on these commands. In response to the laser emission commands from the controller, the laser emission assembly emits laser light to clean the first and second discharge electrode plates of the plasma module.

[0116] The aforementioned plasma module cleaning control method involves setting a transmission component outside the plasma module and a laser emitting component on the transmission component. A controller communicates with the plasma module. When the plasma module meets the self-cleaning conditions, the controller can control the transmission component to move the laser emitting component and emit laser light to clean the first and second discharge electrodes of the plasma module. The concentrated energy of the laser can effectively melt and peel impurities adhering to the electrodes, reducing the probability of module failure due to excessive impurities and effectively improving the operational stability of the plasma module.

[0117] Furthermore, in one embodiment, such as Figure 6 As shown, the control transmission assembly in S502 drives the laser emitting assembly mounted on the transmission assembly to move, including:

[0118] S602, control the transmission assembly to drive the laser emitting assembly mounted on the transmission assembly to move to the initial position.

[0119] The initial position can be considered the initial working position of the laser emitting component, such as the edge point of the area to be cleaned on the discharge electrode. Understandably, the initial position can be determined by the designer based on the user's actual cleaning needs.

[0120] Specifically, once the controller determines that the plasma module meets the self-cleaning conditions, it can first obtain the initial position of the laser emitting component for operation, generate a transmission command based on the initial position, control the transmission component to move, and drive the laser emitting component to the initial position.

[0121] S604, based on preset working position information, controls the transmission component to move the laser emitting component from the initial position to each working position.

[0122] The preset working position information includes the position information of the working positions corresponding to the laser action areas on the first and second discharge electrodes. It can be understood that when the controller controls the transmission component to move the laser emitting component, its movement path can consist of multiple working positions. Designers can divide the areas to be cleaned on the first and second discharge electrodes according to each working position, obtaining a corresponding laser action area for each working position on both electrodes. Based on the correspondence between each working position and the laser action area, the preset working position information is generated.

[0123] In one embodiment, the location information of the working position can be the location coordinates of the working position.

[0124] Specifically, when the controller controls the movement of the transmission component, it does so based on preset working position information. Based on the preset working position information, the controller can control the transmission component to drive the laser emitting component to move sequentially to each working position, and emit lasers to the corresponding laser action areas on the first and second discharge electrodes of each working position for cleaning.

[0125] In the above embodiments, by pre-setting the working position information, the movement process of the transmission component can be precisely controlled, so that its movement process can cover the areas to be cleaned on the first and second discharge electrode plates, effectively improving the cleaning effect of the plasma module.

[0126] In addition to precisely controlling the component movement process in the above embodiments, precisely controlling the laser emission process is also an important way to improve the cleaning effect of the plasma module.

[0127] In one embodiment, such as Figure 7 As shown, S504 controls the laser emitting assembly to emit laser light to clean the first and second discharge electrode plates of the plasma module, including:

[0128] S702, obtain the regional impurity information of the laser action area corresponding to the working position of the laser emitting component.

[0129] Among them, the regional impurity information is information data used to characterize the impurity content in the laser action area. By obtaining the regional impurity information of the laser action area corresponding to the working position of the laser emitting component, the impurity content in the laser action area that the laser emitting component currently needs to clean can be determined.

[0130] Specifically, after the controller controls the transmission component to move the laser emitting component to a certain working position, it can generate an impurity detection command and send the impurity detection command to the impurity detection component set on the transmission component. The controller controls the impurity detection component to perform impurity detection on the laser action area corresponding to the working position of the laser emitting component and obtain the impurity information of the area returned by the impurity detection component.

[0131] S704 determines the laser operating parameters for cleaning the laser-affected area based on regional impurity information.

[0132] Among them, the laser operating parameters are the control parameters used to control the operation of the laser emitting component.

[0133] Specifically, based on the acquired information about regional impurities, the controller can determine the laser operating parameters for cleaning the laser-affected area.

[0134] In one embodiment, the controller has a pre-set correspondence between impurity information and operating parameters. Based on the acquired regional impurity information, the controller can look up the pre-set correspondence and determine the operating parameters that match the regional impurity information as the laser operating parameters for cleaning the laser action area.

[0135] S706 controls the laser emitting component to emit lasers according to the laser operating parameters to clean the laser-affected area.

[0136] Specifically, the controller generates a laser emission command based on the determined laser operating parameters, sends the laser emission command to the laser emission component, and controls the laser emission component to operate according to the laser operating parameters, emit laser light, and clean the laser-affected area.

[0137] In the above embodiments, by acquiring regional impurity information of the laser action area and determining the corresponding laser operating parameters based on the regional impurity information, the cleaning effect of subsequently controlling the operation of the laser emitting component and cleaning the discharge electrode sheet based on the laser operating parameters can be improved, reducing the probability of electrode sheet wear due to over-cleaning or the need to start the cleaning program multiple times due to inadequate cleaning.

[0138] In order to further improve the cleaning effect of the plasma module during the cleaning process, in one embodiment, after controlling the laser emitting component to emit laser according to the laser operating parameters to clean the laser action area in S706, the method further includes: controlling the operation of the impurity cleaning component to clean the separated impurities generated in the laser action area during the cleaning process.

[0139] Since the discharge electrodes in the plasma module are made of metal, it is necessary to avoid prolonged laser contact with the discharge electrodes during the cleaning process to prevent the electrode surface temperature from becoming too high and melting due to prolonged contact.

[0140] Based on this, in one embodiment, the regional impurity information includes the impurity layer thickness, and the laser operating parameters include the number of laser emissions, the laser emission duration for each laser emission, and the heat dissipation duration.

[0141] like Figure 8 As shown, S704, based on regional impurity information, determines the laser operating parameters for cleaning the laser-affected area, including:

[0142] S802, when the impurity layer thickness is greater than or equal to a preset impurity thickness threshold, determine the single-pass fusible thickness of the regional impurities in the laser-acted region.

[0143] The preset impurity thickness threshold is a parameter used to characterize whether the impurity layer meets the conditions for single-pass removal. If the impurity layer thickness is greater than or equal to the preset impurity thickness threshold, it can be considered that the impurity layer thickness in the current laser-acting area is too thick to be removed in one pass. Forcing a single pass may result in electrode wear. Understandably, the preset impurity thickness threshold can be set by the designer based on experimental or empirically determined impurity thickness values ​​that may cause electrode wear.

[0144] The single-pass fusible thickness of regional impurities refers to the thickness of the impurity layer that the laser emitting component can remove by emitting laser light without causing electrode loss.

[0145] Specifically, the controller compares the impurity layer thickness determined by the impurity detection component with a preset impurity thickness threshold. If the impurity layer thickness is greater than or equal to the preset impurity thickness threshold, it can be considered that the impurity layer thickness in the laser action area is too thick and cannot be removed by laser in one go without damaging the electrode. At this time, the controller needs to determine the single-pass fusible thickness of the impurities in the laser action area.

[0146] In one embodiment, the controller can determine the single-batch fusible thickness of regional impurities in the laser-affected region based on a preset safe operating time. The preset safe operating time is an operating parameter used to ensure the safety of the electrode during operation, and can be determined based on the longest laser emission duration that will not cause damage to the electrode. Specifically, the controller can determine the impurity thickness matching the preset safe operating time as the single-batch fusible thickness of the regional impurities in the laser-affected region based on the preset safe operating time and a preset correspondence between duration and thickness.

[0147] In one embodiment, if the impurity layer thickness is less than a preset impurity thickness threshold, it can be considered that the impurity layer thickness in the laser action area is relatively thin, and it can be removed by laser in one go without damaging the electrode. At this time, the controller can directly determine the laser operation parameters for cleaning the laser action area based on the impurity layer thickness. For example, it can find the laser emission duration and heat dissipation duration corresponding to the impurity layer thickness from the preset correspondence between duration and thickness, and determine the laser emission duration and heat dissipation duration as the laser operation parameters for cleaning the laser action area. At this time, the number of laser emission times in the laser operation parameters is 1.

[0148] S804 determines the number of laser emission times for the laser action area based on the single meltable thickness, as well as the thickness of impurities to be melted during each laser emission.

[0149] Specifically, after determining the single-pass fusible thickness of the impurities in the laser-affected area, the controller can determine the number of laser emission times in the laser-affected area based on the impurity layer thickness and the single-pass fusible thickness.

[0150] In one embodiment, the controller can determine the number of laser emission times in the laser-affected region based on the ratio of the impurity layer thickness to the single-pass fusible thickness. For example, if the ratio of the impurity layer thickness to the single-pass fusible thickness is 1.23, then the number of laser emission times in the laser-affected region can be determined to be two.

[0151] Since the thickness of the impurity layer is not necessarily a value divisible by the thickness of the meltable layer in a single laser emission, the controller, after determining the number of laser emission cycles in the laser-affected area, also needs to determine the thickness of the impurity to be melted during each laser emission. Specifically, the controller determines the thickness of the impurity to be melted during each laser emission based on the determined number of laser emission cycles in the laser-affected area and the thickness of the impurity layer.

[0152] In one embodiment, the controller can take the average of the impurity layer thickness based on the number of laser emission cycles to determine the impurity thickness to be melted at each laser emission.

[0153] In one embodiment, the controller can determine the required impurity thickness to be melted during each laser emission based on the single-emission fusible thickness and the impurity layer thickness. For example, if the single-emission fusible thickness is 10 and the impurity layer thickness is 12, then the number of laser emission times can be determined to be two, with the required impurity thickness to be melted being 10 during the first laser emission and 2 during the second laser emission.

[0154] S806 determines the laser emission duration and heat dissipation duration for each laser emission based on the thickness of each impurity to be melted and the preset correspondence between thickness and duration.

[0155] The preset correspondence between thickness and duration can be used to characterize the relationship between the laser emission duration required for the laser emission component to run during melting and the heat dissipation duration required after laser emission is completed for different thicknesses.

[0156] Specifically, after determining the thickness of the impurity to be melted at each laser emission, the controller can look up the preset correspondence between thickness and duration based on the thickness of each impurity to be melted, and determine the laser emission duration and heat dissipation duration that match the thickness of the impurity to be melted as the laser emission duration and heat dissipation duration of the laser emission number corresponding to the thickness of the impurity to be melted.

[0157] In actual operation, after the controller controls the laser emitting component to complete one laser emission based on the laser emission duration, it needs to stop emitting laser light and wait for the corresponding heat dissipation time before executing the next laser emission. Understandably, the heat dissipation time is positively correlated with the corresponding laser emission duration; for example, the longer the laser emission duration, the longer the corresponding heat dissipation time.

[0158] In the above embodiments, by comparing the thickness of the impurity layer in the laser-acting area with a preset impurity layer thickness threshold, the electrode in the laser-acting area can be cleaned multiple times when the impurity layer is thick, which effectively reduces the probability of electrode damage during laser cleaning and improves the reliability of the equipment during cleaning.

[0159] In one embodiment, such as Figure 9 As shown, a method for cleaning and controlling a plasma module is provided, which specifically includes the following steps:

[0160] First, the cycle running time of the plasma module is obtained. When the cycle running time reaches the preset cycle time, it is determined that the plasma module meets the self-cleaning conditions. The controller then controls the transmission component to move the laser emission component to the initial position.

[0161] Subsequently, based on the preset working position information, the controller controls the transmission component to move the laser emitting component from the initial position to each working position in sequence. Each working position has a corresponding laser action area on the first and second discharge electrodes.

[0162] During the movement, for each working position, when the laser emitting component moves to the working position, the controller will control the impurity detection component to detect the thickness of the impurity layer in the laser action area corresponding to that working position, and compare the impurity layer thickness with the preset impurity thickness threshold.

[0163] When the impurity layer thickness is less than the preset impurity thickness threshold, the controller can determine the laser emission duration, the number of laser emission cycles, and the heat dissipation duration of the laser action area based on the impurity layer thickness.

[0164] When the impurity layer thickness is greater than or equal to a preset impurity thickness threshold, the controller can determine the single-time fusible thickness of the impurities in the laser-acting area based on a preset safe duration. Based on this single-time fusible thickness, the controller determines the number of laser emission cycles in the laser-acting area and the required impurity thickness to be melted during each laser emission. Based on the required impurity thickness and the preset correspondence between thickness and duration, the controller determines the laser emission duration and heat dissipation duration for each laser emission.

[0165] After obtaining the number of laser emissions, the duration of each laser emission, and the heat dissipation time in the laser-affected area, the controller controls the laser emitting component to emit laser light into the laser-affected area to clean the electrode in that area.

[0166] After each laser emission, the controller will control the impurity cleaning component on the transmission assembly to clean the remaining impurities in the laser-affected area. For example, the high-pressure gas jet assembly generates coaxial high-pressure gas to blow away the molten metal remaining in the laser-affected area, achieving the effect of separating the oxide layer from the electrode and melting it off. At the same time, it can also cool down the laser-affected area.

[0167] After the controller controls the transmission component to drive the laser emission component through each working position, it can determine that the plasma module cleaning is complete. The controller will then control the transmission component to reset, and the entire self-cleaning process will end.

[0168] It should be understood that although the steps in the flowcharts of the embodiments described above are shown sequentially according to the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless explicitly stated herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some steps in the flowcharts of the embodiments described above may include multiple steps or multiple stages. These steps or stages are not necessarily completed at the same time, but can be executed at different times. The execution order of these steps or stages is not necessarily sequential, but can be performed alternately or in turn with other steps or at least some of the steps or stages of other steps.

[0169] Based on the same inventive concept, this application also provides a plasma module cleaning control device for implementing the plasma module cleaning control method described above. The solution provided by this device is similar to the solution described in the above method; therefore, the specific limitations in one or more embodiments of the plasma module cleaning control device provided below can be found in the limitations of the plasma module cleaning control method described above, and will not be repeated here.

[0170] In one embodiment, such as Figure 10 As shown, a plasma module cleaning control device 1000 is provided, including: a transmission control module 1001 and a cleaning module 1002, wherein:

[0171] The transmission control module 1001 is used to control the transmission component to drive the laser emitting component disposed on the transmission component to move when the plasma module meets the self-cleaning conditions. The transmission component is disposed outside the plasma module. The plasma module includes a first discharge electrode and a second discharge electrode disposed opposite to each other.

[0172] The cleaning module 1002 is used to control the laser emitting component to emit laser light to clean the first discharge electrode and the second discharge electrode of the plasma module.

[0173] In one embodiment, the transmission control module is used to: control the transmission component to move the laser emitting component disposed on the transmission component to an initial position; and control the transmission component to move the laser emitting component from the initial position to various working positions based on preset working position information, wherein the preset working position information includes the position information of the working positions corresponding to the laser action areas on the first discharge electrode and the second discharge electrode.

[0174] In one embodiment, the cleaning module is configured to: acquire regional impurity information of the laser action area corresponding to the working position of the laser emitting component; determine laser operating parameters for cleaning the laser action area based on the regional impurity information; and control the laser emitting component to emit laser according to the laser operating parameters to clean the laser action area.

[0175] In one embodiment, the regional impurity information includes the impurity layer thickness, and the laser operating parameters include the number of laser emissions, the laser emission duration for each laser emission, and the heat dissipation duration. The cleaning module is further configured to: determine the single-pass fusible thickness of the regional impurities in the laser-acting area when the impurity layer thickness is greater than or equal to a preset impurity thickness threshold; determine the number of laser emissions for the laser-acting area and the impurity thickness to be melted for each laser emission based on the single-pass fusible thickness; and determine the laser emission duration and heat dissipation duration for each laser emission based on the impurity thickness to be melted and a preset correspondence between thickness and duration.

[0176] Each module in the aforementioned plasma module cleaning control device can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in or independent of the processor in a computer device, or stored in the memory of a computer device as software, so that the processor can call and execute the corresponding operations of each module.

[0177] In one embodiment, a computer device is provided, which may be a controller, and its internal structure diagram may be as follows: Figure 10 As shown, the computer device includes a processor, memory, and a network interface connected via a system bus. The processor provides computing and control capabilities. The memory includes a non-volatile storage medium and internal memory. The non-volatile storage medium stores the operating system, computer programs, and a database. The internal memory provides an environment for the operation of the operating system and computer programs in the non-volatile storage medium. The database stores data such as self-cleaning conditions. The network interface communicates with external terminals via a network connection. When the computer program is executed by the processor, it implements a plasma module cleaning control method.

[0178] Those skilled in the art will understand that Figure 10 The structure shown is merely a block diagram of a portion of the structure related to the present application and does not constitute a limitation on the computer device to which the present application is applied. Specific computer devices may include more or fewer components than those shown in the figure, or combine certain components, or have different component arrangements.

[0179] In one embodiment, a computer device is provided, including a memory and a processor. The memory stores a computer program, and the processor executes the computer program to implement the specific implementation steps of the plasma module cleaning control method described above.

[0180] In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored, which, when executed by a processor, implements the specific implementation steps of the plasma module cleaning control method described above.

[0181] In one embodiment, a computer program product is provided, including a computer program that, when executed by a processor, implements the specific implementation steps of the plasma module cleaning control method described above.

[0182] It should be noted that the user information (including but not limited to user device information, user personal information, etc.) and data (including but not limited to data used for analysis, stored data, displayed data, etc.) involved in this application are all information and data authorized by the user or fully authorized by all parties. Furthermore, the acquisition, storage, processing, and transmission of the data all comply with relevant laws and regulations.

[0183] Those skilled in the art will understand that all or part of the processes in the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium. When executed, the computer program can include the processes of the embodiments described above. Any references to memory, databases, or other media used in the embodiments provided in this application can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM can take many forms, such as Static Random Access Memory (SRAM) or Dynamic Random Access Memory (DRAM). The databases involved in the embodiments provided in this application may include at least one type of relational database and non-relational database. Non-relational databases may include, but are not limited to, blockchain-based distributed databases. The processors involved in the embodiments provided in this application may be general-purpose processors, central processing units, graphics processing units, digital signal processors, programmable logic devices, quantum computing-based data processing logic devices, etc., and are not limited to these.

[0184] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0185] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this application should be determined by the appended claims.

Claims

1. A plasma module cleaning device, applied to a plasma module, the plasma module comprising a first discharge electrode and a second discharge electrode disposed opposite to each other, characterized in that, The device includes: A transmission component is disposed outside the plasma module, and the transmission component is used to drive the laser emitting component disposed on the transmission component to move. The laser emitting component is used to emit laser light; A controller is connected to the plasma module, the transmission assembly, and the laser emitting assembly respectively. The controller is used to control the transmission assembly to move the laser emitting assembly when the plasma module meets the self-cleaning conditions, and to control the laser emitting assembly to emit laser light to clean the first discharge electrode and the second discharge electrode of the plasma module. The device also includes an impurity detection component; The impurity detection component is connected to the controller and is used to perform impurity detection on the first discharge electrode and the second discharge electrode to obtain impurity information of the first discharge electrode and the second discharge electrode; the impurity information includes the oxide layer thickness on the electrode. The controller acquires impurity information of the laser-affected area corresponding to the working position of the laser emitting component; the impurity information includes the oxide layer thickness on the electrode in the laser-affected area; based on the impurity information, it determines the laser operating parameters for cleaning the laser-affected area; the laser operating parameters include the number of laser emissions, the laser emission duration for each laser emission, and the heat dissipation duration; and controls the laser emitting component to emit laser according to the laser operating parameters to clean the laser-affected area.

2. The device according to claim 1, characterized in that, The laser emitting assembly includes a first laser emitter and a second laser emitter. The first laser emitter is used to emit laser light to the first discharge electrode for cleaning, and the second laser emitter is used to emit laser light to the second discharge electrode for cleaning.

3. The device according to claim 2, characterized in that, The transmission assembly is a telescopic assembly, which includes a telescopic part and a fixed part. The telescopic part is used to drive the first laser emitter and the second laser generator to telescopically move along a preset direction in the discharge region between the first discharge electrode and the second discharge electrode. The preset direction is parallel to the electrode setting direction. The fixed part is used to fix the telescopic part. The first laser emitter is positioned at the top of the telescopic portion, facing the extending direction of the first discharge electrode sheet; The second laser generator is positioned at the top of the telescopic portion, facing the extension direction of the second discharge electrode.

4. The device according to claim 1 or 2, characterized in that, The transmission assembly is a rotating assembly, which includes a rotating part and a driving part; the laser emitting assembly is disposed at the top of the rotating part. The driving unit is used to drive the rotating unit to rotate within a preset angle range; The rotating part is used to respond to the drive of the driving part and drive the laser emitting assembly to rotate within a preset angle range to clean the first discharge electrode and the second discharge electrode.

5. The device according to claim 1, characterized in that, The device also includes an impurity cleaning component disposed on the transmission assembly; The impurity cleaning component is connected to the controller and is used to clean the separated impurities generated during the cleaning process; After the controller controls the laser emitting assembly to clean the laser-acting area on the first and / or second discharge electrode, it controls the impurity cleaning assembly to clean the separated impurities generated in the laser-acting area during the cleaning process.

6. A method for cleaning and controlling a plasma module, characterized in that, The method includes: When the plasma module meets the self-cleaning conditions, the control transmission component drives the laser emitting component mounted on the transmission component to move. The transmission component is located outside the plasma module. The plasma module includes a first discharge electrode and a second discharge electrode that are disposed opposite to each other. The laser emitting component is controlled to emit laser light to clean the first and second discharge electrodes of the plasma module. The step of controlling the laser emitting component to emit laser light to clean the first and second discharge electrodes of the plasma module includes: Obtain regional impurity information of the laser-acting region corresponding to the working position of the laser emitting component; the regional impurity information includes the oxide layer thickness on the electrode in the laser-acting region. Based on the impurity information in the region, laser operating parameters for cleaning the laser-affected area are determined; the laser operating parameters include the number of laser emissions, the duration of each laser emission, and the heat dissipation time. The laser emitting component is controlled to emit laser light according to the laser operating parameters to clean the laser-affected area.

7. The method according to claim 6, characterized in that, The step of determining the laser operating parameters for cleaning the laser-affected area based on the regional impurity information includes: Based on the regional impurity information, a preset correspondence is found, and the operating parameters that match the regional impurity information are determined as the laser operating parameters for cleaning the laser action area.

8. The method according to claim 6, characterized in that, The control transmission assembly drives the laser emitting assembly mounted on the transmission assembly to move, including: The transmission assembly is controlled to move the laser emitting assembly mounted on the transmission assembly to the initial position; Based on preset working position information, the transmission component is controlled to move the laser emitting component from the initial position to each working position. The preset working position information includes the position information of the working positions corresponding to the laser action areas on the first and second discharge electrodes.

9. The method according to claim 6, characterized in that, The step of determining the laser operating parameters for cleaning the laser-affected area based on the regional impurity information includes: When the oxide layer thickness is greater than or equal to a preset impurity thickness threshold, the single-pass fusible thickness of the regional impurities in the laser-acted region is determined. The number of laser emission times for the laser action area and the thickness of impurities to be melted at each laser emission are determined based on the single meltable thickness. Based on the thickness of each impurity to be melted and the preset correspondence between thickness and duration, the laser emission duration and heat dissipation duration for each laser emission are determined.

10. The method according to claim 8, characterized in that, The method further includes: The single-pass fusible thickness of regional impurities in the laser-acting region is determined based on a preset safe operating time; the preset safe operating time is determined based on the longest laser emission duration that will not cause damage to the electrode.

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