Pressurizing device

Abstract

A pressurizing device is provided, which can reduce the workload of the operator when replacing the frame parts, and can also reduce the processing risk of the frame parts when manufacturing the frame parts. The pressurizing device (1) of the present invention has a pair of pressurizing units (2, 3) that clamp the pressurized object (W) for pressurization. One of the pressurizing devices (2) has a pressurizing pad (25) and a frame part (26), the pressurizing pad (25) has a flexible body (251) that deforms to follow the surface shape of the pressurized object when the pressurized object is pressurized, and the frame part (26) holds the pressurizing pad. The frame part has: a first frame part (26a), which is arranged in a manner to surround the entire circumference of the flexible body and holds the flexible body; a second frame part (26b), which is provided for the first frame part to be installed in a detachable manner; and a third frame part (26c), which is arranged in a manner to surround the entire circumference of the first frame part and is detachably installed on the second frame part to fix the first frame part to the second frame part. In the horizontal direction, the third frame member abuts against the first frame member and the second frame member.

Description

Technical Field

[0001] The present invention relates to a pressurizing device. Background Art

[0002] A pressurizing device for pressurizing an object composed of a plurality of electronic components (substrates, circuit elements), etc. is known (for example, see Patent Document 1). The device includes an upper pressurizing unit and a lower pressurizing unit. The object to be pressurized is arranged between the upper pressurizing unit and the lower pressurizing unit. The upper pressurizing unit includes a base member, an upper mold, a pressure pad, a frame member, and a spring member. The base member holds the upper mold and the spring member. The upper mold moves downward together with the base member, and the object to be pressurized is pressurized by the pressure pad. The frame member is held by the spring member so as to be movable relative to the upper mold in the vertical direction. The frame member holds the flexible pressure pad. When the object to be pressurized is pressurized by the upper mold, the pressure pad deforms to follow the shape of the object to be pressurized, and the object to be pressurized is uniformly pressurized. The lower pressurizing unit includes a lower mold. The object to be pressurized is placed on the surface of the lower mold. When the object to be pressurized is pressurized by the upper mold, the object to be pressurized is clamped by the pressure pad and the lower mold and pressurized.

[0003] Prior art literature

[0004] Patent Literature:

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 2007-896 Summary of the Invention

[0006] Problems to be solved by the invention

[0007] When the object to be pressurized is pressurized by the upper mold, the pressure pad applies a roughly uniform pressure in all directions. Therefore, when the object to be pressurized is pressurized with high pressure, the high pressure also acts on the frame member that holds the pressure pad. Therefore, the length of the frame member in the horizontal direction is designed to be a length that can withstand the high pressure. That is, the length of the frame member in the horizontal direction increases as the pressure acting on the frame member increases. As a result, the size of the frame member becomes larger and the weight of the frame member also increases. Since the pressure pad is replaced regularly according to the number of times it is used, if the weight of the frame member increases, the workload of the operator when disassembling the frame member to replace the pressure pad will increase.

[0008] Furthermore, as the horizontal length of the frame member increases, it becomes difficult to maintain the flatness of the frame member's flat surface due to processing risks such as warping and difficulty in ensuring machining accuracy. In particular, if the flatness of the flat surface in contact with the mounting table cannot be ensured, the pressure applied by the pressure pad to the object during the pressurization process cannot be uniform. As a result, the position of the object may shift, making it impossible to maintain the quality of the object. This can lead to technical problems during frame member manufacturing, such as increased processing risks such as warping and difficulty in ensuring machining accuracy.

[0009] The present invention aims to reduce the workload of an operator when replacing a frame member and to reduce processing risks such as warping of the frame member and difficulty in ensuring processing accuracy of the frame member during manufacturing of the frame member.

[0010] Solutions for solving problems

[0011] One embodiment of the present invention is a pressure device, which clamps a pressurized object in a vertical direction for pressurization, and has a pair of pressure units arranged in a manner opposite to each other in the vertical direction, clamping the pressurized object for pressurization, one of the pressure units in the pair of pressure units comprising: a pressure pad, which has a flexible body that deforms to follow the surface shape of the pressurized object when the pressurized object is pressurized; and a frame component that holds the pressure pad, the frame component comprising: a first frame component, which is arranged in a manner to surround the entire circumference of the flexible body in the horizontal direction to hold the flexible body; a second frame component, which is provided for the first frame component to be detachably mounted; and a third frame component, which is arranged in a manner to surround the entire circumference of the first frame component in the horizontal direction and is detachably mounted to the second frame component to fix the first frame component to the second frame component, and in the horizontal direction, the third frame component abuts against the first frame component and the second frame component.

[0012] Effects of the Invention

[0013] According to the present invention, the operator's workload when replacing frame members can be reduced, and processing risks such as warping of frame members and difficulty in ensuring processing accuracy of frame members during manufacturing of frame members can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 These are conceptual diagrams illustrating the process of pressurizing an object in the pressurizing device of the present invention. (a) shows the object placed on the mounting table. (b) shows the pressurizing pad in contact with the object. (c) shows the pressurizing pad deforming to follow the shape of the object.

[0015] Figure 2It is a schematic cross-sectional view showing an embodiment of the pressurizing device of the present invention.

[0016] Figure 3 It shows Figure 2 A partially enlarged cross-sectional schematic diagram of a frame component of a pressurizing device.

[0017] Figure 4 Shows looking up Figure 2 A bottom view of the state of the frame member of the pressurizing device.

[0018] Figure 5 It shows the composition Figure 3 An enlarged sectional schematic diagram of a state in which the first frame member, the second frame member, and the third frame member of the frame member are separated.

[0019] Figure 6 It shows the structure of looking up Figure 4 A bottom view of the state of the first frame component of the frame component.

[0020] Figure 7 It shows the structure of looking up Figure 4 A bottom view of the state of the second frame component of the frame component.

[0021] Figure 8 It shows the structure of looking up Figure 4 A bottom view of the state of the third frame component of the frame component.

[0022] Figure 9 It shows that Figure 2 A schematic cross-sectional view of a state in which an upper press unit of a press device is lowered and a side member of the upper press unit abuts against a mounting table of a lower press unit.

[0023] Figure 10 It is shown from Figure 9 The state shown is a schematic cross-sectional view of a state in which the upper press unit is lowered and the object to be pressurized is pressurized by the upper mold of the upper press unit via the press pad.

[0024] Figure 11 It is shown in Figure 10 An enlarged sectional schematic diagram of a state in which pressure is applied in a state.

[0025] Description of Reference Numerals

[0026] 1: Pressurization device

[0027] 2: Upper pressurizing unit (one of the pressurizing units)

[0028] 3: Lower pressurizing unit (another pressurizing unit)

[0029] 25: Pressure pad

[0030] 251: Flexible body

[0031] 26: Frame components

[0032] 26a: 1st frame part

[0033] a2: 1st outer surface

[0034] 26b: 2nd frame part

[0035] b1: concave part

[0036] b2: convex part

[0037] b3: Mounting surface

[0038] b4: Second inner surface

[0039] 26c: 3rd frame part

[0040] c1: 3rd inner surface

[0041] c2: 3rd outer surface

[0042] 31: mounting table (opposing component)

[0043] 311: Opposite surface

[0044] s: gap

[0045] V: Virtual straight line DETAILED DESCRIPTION

[0046] Below, an embodiment of the pressurizing device of the present invention (hereinafter referred to as "this device") is described. In the following description, reference is made to the accompanying drawings as appropriate. In the following description, elements having the same structure or function are marked with the same reference numerals, and repeated descriptions are omitted. In addition, the dimensional ratios of the various elements are not limited to the ratios shown in the respective drawings.

[0047] In the following description and accompanying drawings, unless otherwise specified, the device is positioned on a horizontal surface. In this device, the horizontal direction refers to the direction parallel to the horizontal plane of the ground, and the vertical direction refers to the direction perpendicular to the horizontal plane. In the vertical direction, downward refers to the direction of the ground relative to the device, and upward refers to the direction opposite to downward. Downward is an example of the third direction within the present invention, and upward is an example of the fourth direction within the present invention.

[0048] ●Pressure device●

[0049] ●Compression welding process of the pressurized object

[0050] First, as an example of pressurization by the present apparatus, a pressurization process of an object to be pressurized in the present apparatus will be described below.

[0051] Figure 1 This device 1 (see Figure 2 . Conceptual diagram of the crimping process of the pressurized object W in (the same below). Figure 1 (a) shows the arrangement on the mounting table 31 (refer to Figure 2 . The state of the pressurized object W). Figure 1 (b) shows a state where the pressure pad 25 is in contact with the object W to be pressurized. Figure 1 (c) shows a state where the pressure pad 25 is deformed to follow the shape of the object W to be pressed.

[0052] The object to be pressurized W is an object to be pressurized by the device 1. The object to be pressurized W is formed by combining a plurality of electronic components. The object to be pressurized W includes, for example, a substrate w1, a circuit element w2, and an adhesive w3.

[0053] It should be noted that, in the present invention, the object to be pressurized W is not limited to being constituted by combining a plurality of electronic components.

[0054] Figure 1 In the example shown, substrate w1 is placed on mounting table 31, circuit element w2 is positioned above substrate w1, and adhesive w3 is applied between substrate w1 and circuit element w2. At this point, wiring w11 on substrate w1 is positioned below and opposite corresponding bumps w21 on circuit element w2.

[0055] When the object W is pressurized by the device 1, the pressurizing pad 25 disposed above the object W is lowered and abuts against the circuit element w2 (see FIG. Figure 1 (b)). Then, the pressure pad 25 follows the shape of the object W and deforms in a manner that surrounds the substrate w1, the circuit element w2, and the side of the adhesive w3, while applying pressure to the object W. At this time, the object W is pressurized from the top and the side while being surrounded by the pressure pad 25. In addition, the adhesive w3 is compressed, and the circuit element w2 approaches the substrate w1. As a result, the wiring w11 approaches the bump w21, and the compressed adhesive w3 between the two is conductive. Then, the pressurized object W is heated, and the adhesive w3 is thermally cured. In this way, the circuit element w2 is pressed against the substrate w1 by the present device 1.

[0056] ●Structure of pressurizing device

[0057] Next, the structure of the present device 1 will be described below.

[0058] Figure 2 It is a schematic cross-sectional view showing an embodiment of the present device 1 .

[0059] Figure 3 It is a partially enlarged schematic cross-sectional view showing the frame member 26 included in the present device 1 .

[0060] Figure 4 It is a bottom view showing a state where the frame member 26 is viewed from below.

[0061] This device 1 pressurizes an object W. This device 1 includes an upper pressurizing unit 2, a lower pressurizing unit 3, a lifting mechanism (not shown, the same below), a vacuum pump P, and a control unit (not shown, the same below). The upper pressurizing unit 2 and the lower pressurizing unit 3 are an example of a pair of pressurizing units in the present invention.

[0062] In the vertical direction, the upper press unit 2 and the lower press unit 3 clamp the object W to be pressurized and pressurize the object W. The upper press unit 2 is arranged above the lower press unit 3. That is, in the vertical direction, the upper press unit 2 is arranged above the lower press unit 3 so as to be opposite to the lower press unit 3. The upper press unit 2 is movable in the vertical direction by a lifting mechanism. The upper press unit 2 includes a base member 21, an upper mold 22, a side member 23, a cylinder 24, a press pad 25, a frame member 26, a spring member 27, and a mounting bolt 28. The upper press unit 2 is an example of a press unit in the present invention.

[0063] The base member 21 holds the upper mold 22, the cylinder 24, and the spring member 27. The base member 21 is held by the lifting mechanism so as to be movable in the vertical direction.

[0064] The upper mold 22 pressurizes the object W from above via the pressure pad 25. The upper mold 22 is arranged on the lower surface of the base member 21 and is held by the base member 21. The upper mold 22 moves integrally with the base member 21. In the horizontal direction, the cross-sectional shape of the upper mold 22 is a rectangle. The shape of the lower surface of the upper mold 22 is a plane. The upper mold 22 is provided with a heating mechanism (not shown. Same below) inside the upper mold 22. The heating mechanism heats the object W. For a detailed description of the heating mechanism, please refer to the following content.

[0065] It should be noted that, in the present invention, the upper mold 22 may not be provided with a heating mechanism inside the upper mold 22 .

[0066] The side member 23 seals the space between the upper pressurizing unit 2 and the lower pressurizing unit 3, in which the pressurized object W is placed. In the horizontal direction, the side member 23 is arranged so as to surround the entire circumference of the enclosed space (hereinafter referred to as the "enclosed space"). When viewed from above, the side member 23 has a rectangular frame shape. That is, when viewed from above, a rectangular internal space is formed in the center of the side member 23. The side member 23 has an exhaust hole 23a that passes from the inside to the outside of the side member 23. The upper mold 22, the pressure pad 25, the frame member 26, and the spring member 27 are arranged in the internal space inside the side member 23. In the horizontal direction, the side member 23 is arranged so as to surround the upper mold 22, the pressure pad 25, the frame member 26, and the spring member 27. The side member 23 is held by the base member 21 via the cylinder 24. The side members 23 come into contact with a placement table 31 to be described later, thereby sealing the space in which the object to be pressurized W is placed, thereby forming a sealed space.

[0067] The "enclosed space" refers to the space defined by the upper mold 22, the side members 23, the frame member 26, and the mounting platform 31 when the side members 23 abut against the mounting platform 31. Seals (not shown, hereinafter the same) are placed between adjacent components to maintain the airtightness of the enclosed space.

[0068] The cylinder 24 is held by the base member 21 and holds the side member 23 so as to be movable. The cylinder 24 lowers the side member 23 and brings the side member 23 into contact with the mounting table 31. The cylinder 24 is, for example, a well-known air cylinder.

[0069] When the object W is pressurized, the pressure pad 25 deforms to follow the surface shape of the object W, thereby uniformly pressurizing the object W. The pressure pad 25 is disposed between the upper mold 22 and the mounting table 31. The pressure pad 25 includes a flexible body 251 and two films 252 and 253.

[0070] When the object W is pressurized, the flexible body 251 applies uniform pressure to the object W. The flexible body 251 is disposed between the upper and lower films 252 and 253. The flexible body 251 is made of, for example, a known elastic material having high fluidity and low rebound modulus.

[0071] The films 252 and 253 hold the flexible body 251 and prevent the object W from shifting due to the horizontal movement of the flexible body 251. The films 252 and 253 are, for example, known silicone rubber films. The ends of the two films 252 and 253 are held horizontally by the frame member 26 over the entire circumference.

[0072] The pressure pad 25 configured in this manner is held by the frame member 26 over its entire circumference in the horizontal direction.

[0073] The frame member 26 holds the pressure pad 25. When viewed from above, the frame member 26 has a rectangular frame shape. That is, when viewed from above, a rectangular internal space is formed in the center of the frame member 26. The frame member 26 has a plurality of holes for inserting bolts and the like. In the horizontal direction, the frame member 26 is arranged so as to surround the upper mold 22. The frame member 26 is held on the base member 21 by the spring member 27 so as to be movable relative to the upper mold 22 in the vertical direction. The frame member 26 is made of, for example, a known steel alloy. The frame member 26 includes a first frame member 26a, a second frame member 26b, and a third frame member 26c. The frame member 26 has a structure that can withstand horizontal pressure as one frame member 26 by combining the first frame member 26a, the second frame member 26b, and the third frame member 26c. The specific structure of the frame member 26 will be described later.

[0074] The first frame member 26a is arranged horizontally to surround the entire circumference of the pressure pad 25, thereby retaining the pressure pad 25. The first frame member 26a includes three retaining members and bolts. The three stacked retaining members are secured by bolts to form a single first frame member 26a. The ends of the membranes 252 and 253 of the pressure pad 25 are clamped between the retaining members. As a result, the pressure pad 25 is retained by the first frame member 26a. The first frame member 26a retaining the pressure pad 25 constitutes a pressure pad unit.

[0075] Here, in the horizontal direction, the direction in which the pressure pad 25 is arranged with respect to the first frame member 26 a is a first direction, and the direction opposite to the first direction is a second direction.

[0076] The first frame member 26a includes a first inner peripheral surface a1, a first outer peripheral surface a2, a first upper surface a3, and a first lower surface a4.

[0077] The first inner peripheral surface a1 faces the first direction and contacts the flexible body 251 .

[0078] The first outer peripheral surface a2 faces the second direction and contacts the third inner peripheral surface c1 described later. The first outer peripheral surface a2 is an inclined surface that is inclined so as to protrude toward the second direction as it goes from the bottom to the top.

[0079] The first upper surface a3 faces upward and contacts a mounting surface b3 described later. The first upper surface a3 is a surface parallel to the horizontal direction.

[0080] The first lower surface a4 faces downward and is opposite to the mounting table 31. The first lower surface a4 is a surface parallel to the horizontal direction. In this embodiment, the angle θ1 formed between the first outer peripheral surface a2 and the first lower surface a4 is an obtuse angle (for example, 120 degrees in this embodiment).

[0081] The second frame member 26b is a member serving as a base of the frame member 26. The first frame member 26a is detachably mounted on the second frame member 26b. The cross-sectional shape of the second frame member 26b when the second frame member 26b is cut from the first direction toward the second direction is approximately L-shaped. In the horizontal direction, the second frame member 26b is arranged so as to surround the entire circumference of the upper mold 22 and the entire circumference of the third frame member 26c. The second frame member 26b is held on the base member 21 by the spring member 27 so as to be movable relative to the upper mold 22 in the vertical direction. The second frame member 26b has a recessed portion b1 (see Figure 5 ), convex portion b2 (refer to Figure 5 ), the mounting surface b3, the second inner peripheral surface b4, the second lower surface b5, and the second upper surface b6.

[0082] The lower portion of the second frame member 26b on the first direction side is formed to be recessed upward along the entire circumference, forming a recess b1. The first frame member 26a and the third frame member 26c are arranged in the recess b1. The recess b1 has a mounting surface b3.

[0083] The lower portion of the second frame member 26b, on the second direction side, protrudes downward from the recessed portion b1, forming a raised portion b2. Specifically, the raised portion b2 is located on the second direction side of the recessed portion b1. Horizontally, the raised portion b2 surrounds the entire circumference of the third frame member 26c. The raised portion b2 has a second inner circumferential surface b4 and a second lower surface b5.

[0084] The mounting surface b3 faces downward and contacts the first upper surface a3. The mounting surface b3 is a surface parallel to the horizontal direction.

[0085] The second inner circumferential surface b4 faces the first direction and abuts against the third outer circumferential surface c2, described later. The second inner circumferential surface b4 is an inclined surface that slopes upward from the bottom, protruding toward the first direction. The second inner circumferential surface b4 is located on the second direction side of the mounting surface b3. In other words, the mounting surface b3 is located on the first direction side of the second inner circumferential surface b4.

[0086] The second lower surface b5 faces downward and is opposite to the mounting table 31. The second lower surface b5 is a surface parallel to the horizontal direction. In this embodiment, the angle θ2 formed between the second inner peripheral surface b4 and the second lower surface b5 is an obtuse angle (for example, 120 degrees in this embodiment).

[0087] The second upper surface b6 faces upward, and is provided with a spring member 27. The second upper surface b6 is a surface parallel to the horizontal direction.

[0088] The third frame member 26c secures the first frame member 26a to the second frame member 26b. The vertical cross-section of the third frame member 26c, when cut from the first direction toward the second direction, is a trapezoid. Horizontally, the third frame member 26c surrounds the entire circumference of the first frame member 26a and is removably attached to the second frame member 26b. The third frame member 26c includes a third inner peripheral surface c1, a third outer peripheral surface c2, a third lower surface c3, and a third upper surface c4.

[0089] The third inner peripheral surface c1 faces the first direction and contacts the first outer peripheral surface a2. The third inner peripheral surface c1 is an inclined surface that is inclined so as to protrude toward the first direction as it goes from the upper side to the lower side.

[0090] The third outer peripheral surface c2 faces the second direction and contacts the second inner peripheral surface b4. The third outer peripheral surface c2 is an inclined surface that is inclined so as to protrude toward the second direction as it goes from the upper side to the lower side.

[0091] The third lower surface c3 faces downward and is parallel to the horizontal direction. The third upper surface c4 faces upward and is parallel to the horizontal direction. In the horizontal direction, the length of the third lower surface c3 is greater than the length of the third upper surface c4. That is, the cross-sectional shape of the third frame member 26c is a trapezoid with a gradually tapering upper portion. In this embodiment, the angle θ3 formed between the third inner peripheral surface c1 and the third lower surface c3 and the angle θ4 formed between the third outer peripheral surface c2 and the third lower surface c3 are acute angles (for example, 60 degrees in this embodiment).

[0092] The frame member 26 is formed by combining the first frame member 26a, the second frame member 26b, and the third frame member 26c. The first frame member 26a is mounted to the second frame member 26b via the third frame member 26c and the first mounting bolts 28a. The third frame member 26c is mounted to the second frame member 26b via the second mounting bolts 28b. The third inner peripheral surface c1 of the third frame member 26c is positioned opposite the first outer peripheral surface a2 of the first frame member 26a. The entire third inner peripheral surface c1 abuts the first outer peripheral surface a2. The third outer peripheral surface c2 of the third frame member 26c is positioned opposite the second inner peripheral surface b4. The entire third outer peripheral surface c2 abuts the second inner peripheral surface b4. That is, in the horizontal direction, the third frame member 26c abuts the protrusion b2 of the first frame member 26a and the second frame member 26b. In other words, in the horizontal direction, the third frame member 26c abuts against the first frame member 26a and the second frame member 26b.

[0093] As previously mentioned, the cross-sectional shape of the third frame member 26c is a trapezoidal shape that tapers at the top. Therefore, when the third inner peripheral surface c1 abuts the first outer peripheral surface a2, the third inner peripheral surface c1 holds the first outer peripheral surface a2 from obliquely below. At this point, the third inner peripheral surface c1 and the first outer peripheral surface a2 are in surface contact. As a result, the first frame member 26a is horizontally held by the third frame member 26c throughout its entire circumference. Furthermore, the first frame member 26a is pressed against the mounting surface b3 by the third frame member 26c.

[0094] In the vertical direction, the length (thickness) of the first frame member 26a is greater than the length (depth) of the recessed portion b1 of the second frame member 26b, while the length (thickness) of the third frame member 26c is less than the length (depth) of the recessed portion b1 of the second frame member 26b. The first upper surface a3 of the first frame member 26a abuts the mounting surface b3 of the second frame member 26b. On a virtual straight line V extending from the flexible body 251 in the second direction, the length (width) of the third frame member 26c is less than the length (width) of both the protrusion b2 of the second frame member 26b and the first frame member 26a.

[0095] In the vertical direction, a gap s is formed between the mounting surface b3 of the second frame member 26b and the third upper surface c4 of the third frame member 26c. This gap s is smaller than the difference between the thickness of the first frame member 26a and the thickness of the third frame member 26c. As previously described, the cross-sectional shape of the third frame member 26c is a trapezoid with the upper portion gradually tapering. Therefore, when the third frame member 26c is pushed upward by the second mounting bolt 28b, the third inner peripheral surface c1 is in close contact with the first outer peripheral surface a2, and the third outer peripheral surface c2 is in close contact with the second inner peripheral surface b4. At this time, the first frame member 26a and the protrusion b2 are subjected to an oblique upward force due to the third frame member 26c. As a result, the first frame member 26a is pushed in the first direction and upward by the third frame member 26c, and is mounted (fixed) to the second frame member 26b. At this time, when the first mounting bolt 28a is loosened, the first frame member 26a is pushed in the horizontal direction (first direction or second direction) by the third frame member 26c, and the position of the first frame member 26a relative to the second frame member 26b in the horizontal direction is determined.

[0096] The force exerted on the first frame member 26a by the third frame member 26c increases as the force exerted by the second mounting bolts 28b on the third frame member 26c (i.e., the tightening force of the second mounting bolts 28b) increases. Assuming that no gap s is formed (i.e., the third upper surface c4 abuts the mounting surface b3), if the manufacturing precision of the first frame member 26a, the second frame member 26b, and the third frame member 26c is not high, this force will be almost nonexistent. As a result, the close contact between the third inner peripheral surface c1 and the first outer peripheral surface a2, and the close contact between the third outer peripheral surface c2 and the second inner peripheral surface b4, may be hindered (i.e., a gap may be formed between the surfaces). In this embodiment, the formation of gap s allows the second mounting bolts 28b to consistently press the third frame member 26c upward with a tightening force greater than a specified value. Therefore, close contact between the third inner peripheral surface c1 and the first outer peripheral surface a2, and close contact between the third outer peripheral surface c2 and the second inner peripheral surface b4 can be maintained at all times. As a result, even when the frame member 26 is composed of the three first frame members 26a, the second frame member 26b, and the third frame member 26c, the frame member 26 has a structure that can withstand high pressure in the horizontal direction.

[0097] The spring member 27 holds the frame member 26 so that the frame member 26 can move relative to the upper mold 22 in the vertical direction. The spring member 27 is attached to the lower surface of the base member 21 and the second upper surface b6 of the second frame member 26b. The spring member 27 is, for example, a known spring.

[0098] The mounting bolts 28 attach the first frame member 26a and the third frame member 26c to the second frame member 26b. The mounting bolts 28 include a first mounting bolt 28a and a second mounting bolt 28b. The first mounting bolt 28a attaches the first frame member 26a to the second frame member 26b, and the second mounting bolt 28b attaches the third frame member 26c to the second frame member 26b. As a result, the first frame member 26a and the third frame member 26c are fixed to the second frame member 26b.

[0099] The lower press unit 3 and the upper press unit 2 vertically sandwich the object W and pressurize the object W. The lower press unit 3 is disposed below the upper press unit 2 so as to face the upper press unit 2. The lower press unit 3 includes a mounting table 31 and a lower mold 32. The lower press unit 3 is an example of another press unit in the present invention.

[0100] The object W is placed on a mounting table 31. The mounting table 31 includes a facing surface 311 and a lower surface 312. The facing surface 311 is parallel to the horizontal direction and faces the side member 23, the pressure pad 25, and the frame member 26. When the object W is being pressurized, the mounting table 31 is positioned below the frame member 26 and the pressure pad 25, facing these members and sandwiching the object W together with the pressure pad 25. The mounting table 31 is an example of a facing member in the present invention.

[0101] The lower mold 32 presses the object W via the mounting table 31. The lower mold 32 is placed on the lower surface 312 of the mounting table 31 and is placed on the ground. The lower mold 32 has a rectangular cross-section in the horizontal direction. The upper surface of the lower mold 32 is flat.

[0102] It should be noted that, in the present invention, the lower mold 32 may also include a heating mechanism and / or a cooling mechanism inside the lower mold 32 .

[0103] The lifting mechanism holds the upper pressurizing unit 2 and moves the upper pressurizing unit 2 up and down to pressurize the object to be pressurized W. The lifting mechanism includes, for example, a known hydraulic cylinder.

[0104] It should be noted that in the present invention, the lifting mechanism may include any mechanism capable of performing a pressurizing operation. That is, the lifting mechanism may include, for example, a known air cylinder.

[0105] The vacuum pump P evacuates the sealed space containing the pressurized object W. The vacuum pump P is connected to the exhaust port 23a via a vacuum pump pipe. The vacuum pump P draws air from the sealed space via the vacuum pump pipe and the exhaust port 23a. The vacuum pump P is, for example, a known vacuum pump device.

[0106] The control unit controls the entire operation of the device 1. The control unit is composed of, for example, a processor such as a CPU (Central Processing Unit), volatile memory such as RAM (Random Access Memory) that functions as a work area for the CPU, and non-volatile memory such as ROM (Read Only Memory) that stores various information such as programs for controlling the device 1 or other control programs.

[0107] ●Frame component disassembly and assembly process

[0108] Next, the process of assembling and disassembling the frame member 26 will be described below. Figures 2 to 4 .

[0109] Figure 5It is a partially enlarged schematic cross-sectional view showing a state in which the first frame member 26 a , the second frame member 26 b , and the third frame member 26 c constituting the frame member 26 are separated.

[0110] Figure 6 It is a bottom view showing a state in which the first frame member 26 a constituting the frame member 26 is viewed from below.

[0111] Figure 7 It is a bottom view showing a state in which the second frame member 26 b constituting the frame member 26 is viewed from below.

[0112] Figure 8 It is a bottom view showing a state in which the third frame member 26 c constituting the frame member 26 is viewed from below.

[0113] The assembly and disassembly process of the first frame member 26a, the second frame member 26b, and the third frame member 26c of the frame member 26 is performed, for example, when maintaining the device 1, mainly for the purpose of replacing the pressure pad 25. Since the pressure pad 25 no longer fully functions after being used thousands to tens of thousands of times, it is necessary to replace the pressure pad 25 regularly. When replacing the pressure pad 25, the third frame member 26c holding the first frame member 26a and the first frame member 26a holding the pressure pad 25 (pressure pad unit) are removed from the second frame member 26b. At this time, since the second frame member 26b is held to the base member 21 by the spring member 27, the second frame member 26b is not removed from the device 1.

[0114] Next, among the steps of attaching and detaching the frame member 26 , a step of disassembling the frame member 26 will be described below.

[0115] The "removal step" is a step of removing the pressure pad unit from the second frame member 26b. In the removal step, after removing the third frame member 26c from the second frame member 26b, the first frame member 26a is removed from the second frame member 26b.

[0116] First, for example, multiple jacks (not shown, the same applies hereinafter) are arranged between the third frame member 26c and the mounting table 31. The multiple jacks are arranged below the third frame member 26c according to the shape of the third frame member 26c to support the third frame member 26c from below.

[0117] Next, the second mounting bolts 28b are removed. At this time, the third frame member 26c is placed on a jack and separated from the second frame member 26b.

[0118] Next, the third frame member 26c is taken out of the device 1. At this time, the third frame member 26c is taken out while being kept horizontal to avoid uneven distribution of force acting on the third frame member 26c.

[0119] Next, the pressure pad unit is removed from the second frame member 26b. That is, the first frame member 26a is removed from the second frame member 26b. The details of this operation will be described below.

[0120] First, for example, a plurality of jacks are placed between the first frame member 26a and the mounting table 31. The plurality of jacks are placed below the first frame member 26a according to the shape of the first frame member 26a, and support the first frame member 26a from below.

[0121] Next, the first mounting bolts 28a are removed. At this time, the first frame member 26a is placed on a jack and separated from the second frame member 26b.

[0122] Next, the first frame member 26a is removed from the device 1. At this time, the first frame member 26a is removed while being kept horizontal to avoid uneven distribution of force acting on the first frame member 26a.

[0123] Next, the installation process of the frame member 26 in the installation and removal process of the frame member 26 will be described below.

[0124] The "installation step" refers to the process of attaching the pressure pad unit to the second frame member 26b. In this installation step, after attaching the first frame member 26a to the second frame member 26b, the third frame member 26c is attached to the second frame member 26b. The operator then further tightens the first mounting bolts 28a to secure the first frame member 26a to the second frame member 26b.

[0125] First, the pressure pad unit is mounted on the second frame member 26b. In other words, the first frame member 26a is mounted on the second frame member 26b. At this time, the plurality of jacks are arranged in the same manner as in the removal process.

[0126] Next, the first frame member 26a is moved horizontally from the outside of the device 1 and placed on the jack. The first frame member 26a is arranged at a lower position facing the mounting surface b3 of the second frame member 26b (see FIG. Figure 5 ).

[0127] Next, the first frame member 26a is brought into contact with the mounting surface b3 of the second frame member 26b. Then, the first frame member 26a is temporarily fixed to the second frame member 26b by the first mounting bolts 28a.

[0128] "Temporary fixing" refers to preliminary fixing performed before formal fixing. The fixing force of temporary fixing is weaker than the fixing force of formal fixing. In this embodiment, when the first frame member 26a is temporarily fixed to the second frame member 26b, the first upper surface a3 of the first frame member 26a abuts the mounting surface b3 of the second frame member 26b. At this point, the first frame member 26a can move horizontally based on the clearance between the first mounting bolt 28a and the hole.

[0129] "Formal fixing" refers to fixing performed after temporary fixing. The fixing force during formal fixing is greater than the fixing force during temporary fixing. In this embodiment, when the first frame member 26a is formally fixed to the second frame member 26b, the first upper surface a3 of the first frame member 26a abuts the mounting surface b3 of the second frame member 26b. At this point, the first frame member 26a cannot move horizontally.

[0130] Next, the third frame member 26c is mounted on the second frame member 26b. At this time, a plurality of jacks are arranged in the same manner as in the removal process.

[0131] Next, the third frame member 26c is moved horizontally from the outside of the device 1 and placed on the jack. The third frame member 26c is arranged between the first frame member 26a and the second frame member 26b and at a lower position facing the mounting surface b3 (see FIG. Figure 5 ).

[0132] Next, the third frame member 26c is inserted between the first frame member 26a and the second frame member 26b. The third frame member 26c is brought close to the mounting surface b3 of the second frame member 26b.

[0133] Next, the third frame member 26c is pressed upward by the second mounting bolts 28b and secured to the second frame member 26b. At this point, the third inner peripheral surface c1 of the third frame member 26c, which is an inclined surface, abuts the first outer peripheral surface a2 of the first frame member 26a, which is also an inclined surface. Therefore, the first frame member 26a is pressed upward in the first direction by the third frame member 26c. As a result, the first frame member 26a is horizontally pressed by the third frame member 26c, and the horizontal position of the first frame member 26a relative to the second frame member 26b is determined. Specifically, when the third frame member 26c is secured, the third inner peripheral surface c1 is in close contact with the first outer peripheral surface a2, and the first frame member 26a is properly positioned relative to the second frame member 26b. Furthermore, when the third frame member 26c is fixed by the second mounting bolts 28b, the first frame member 26a is pressed upward, and the first frame member 26a is fixed to the second frame member 26b.

[0134] Next, the operator further tightens the first mounting bolts 28a, officially securing the first frame member 26a to the second frame member 26b. At this point, the first upper surface a3 is in close contact with the mounting surface b3. Horizontally, the first frame member 26a, the second frame member 26b (protrusion b2), and the third frame member 26c are in close contact with each other, forming a single unit.

[0135] ●Operation of the pressurizing device

[0136] Next, the operation of the device 1 will be described below. Figure 1 as well as Figure 2 .

[0137] Figure 9 It is a schematic cross-sectional view showing a state in which the side member 23 is brought into contact with the mounting table 31 of the lower press unit 3 by the lowering of the upper press unit 2 .

[0138] Figure 10 The upper pressurizing unit 2 is shown Figure 9 The state shown is a schematic cross-sectional view of a state in which the upper mold 22 is lowered and the object W is pressurized via the pressure pad 25 .

[0139] First, the object W is placed at a predetermined position on the mounting table 31. Then, after the control unit confirms that the object W is placed at the predetermined position, the lifting mechanism lowers the upper press unit 2. When the upper press unit 2 has descended to the predetermined position relative to the mounting table 31, the control unit pauses the lowering.

[0140] Next, the control unit extends the cylinder 24 to lower only the side member 23 until it contacts the facing surface 311 of the mounting table 31. At this time, a sealed space is formed.

[0141] Next, the control unit activates the vacuum pump P to evacuate the enclosed space. By evacuating the enclosed space, air around the pressurized object W is removed, thereby preventing problems such as air entrapment caused by softening of the adhesive w3.

[0142] Next, the control unit lowers the upper press unit 2 while the side member 23 is in contact with the mounting table 31, so that the press pad 25 is in contact with the object to be pressurized W (see FIG. 2 ). Figure 1 (b)). Next, the control unit further lowers the upper pressurizing unit 2, causing the first lower surface a4 of the first frame member 26a to abut against the opposing surface 311 of the mounting table 31. As described above, the thickness of the first frame member 26a in the vertical direction is greater than the depth of the recessed portion b1 of the second frame member 26b. Therefore, only the first lower surface a4 of the frame member 26 abuts against the opposing surface 311 of the mounting table 31.

[0143] Next, the control unit lowers the upper mold 22 to temporarily pressurize the object W (see Figure 10 As mentioned above, the frame member 26 can move relative to the upper mold 22 in the vertical direction. Therefore, even if the first lower surface a4 contacts the opposing surface 311, the upper mold 22 can be lowered and the upper mold 22 can pressurize the pressure pad 25 from above. Since the pressurized pressure pad 25 has a flexible body 251 with fluidity, it will deform to follow the surface shape of the object W being pressed (see Figure 1 As a result, the pressure pad 25 surrounds the upper side and the side of the object W to be pressed.

[0144] "Temporary pressurization" refers to preliminary pressurization performed before the main pressurization. The temporary pressurization force is smaller than the main pressurization force. In this embodiment, temporary pressurization applies pressure to the object W to such an extent that the pressure pad 25 deforms to conform to the surface shape of the object W.

[0145] "Main pressurization" refers to the pressurization performed after the temporary pressurization. The force applied during the main pressurization is greater than the force applied during the temporary pressurization. During the main pressurization in this embodiment, pressure is applied to the object W to the extent that the substrate w1 and circuit element w2 are pressed together.

[0146] Next, the control unit further lowers the upper mold 22 to initiate the actual pressurization. At this point, the flexible body 251 deforms in response to the pressure from the upper mold 22 while applying a roughly uniform pressure in all directions. As a result, the pressure pad 25 uniformly pressurizes the object W.

[0147] Here, the influence of the pressure from the flexible body 251 on the frame member 26 will be described below.

[0148] Figure 11 It is shown in Figure 10 A partially enlarged sectional schematic diagram of a state in which pressure is applied in a state.

[0149] The hollow arrows in the figure indicate the direction of pressure.

[0150] As previously described, when the object W is pressurized, the pressure pad 25 applies substantially uniform pressure in all directions via the highly fluid flexible body 251. When the object W is pressurized, uniform pressure also acts horizontally on the frame member 26 that holds the pressure pad 25.

[0151] Here, in the existing pressurizing device, the pressurizing pad 25 is held by a frame member (hereinafter referred to as "existing frame member") consisting only of three stacked retaining members. The horizontal length of the existing frame member is designed to be a length that the existing frame member can withstand the high pressure applied from the pressurizing pad 25 (flexible body 251). Therefore, even if high pressure is applied from the pressurizing pad 25 to the existing frame member, the existing frame member will not be deformed, thereby ensuring the uniformity of the pressure applied by the pressurizing pad 25 to the pressurized object W. On the other hand, as the required pressurizing force of the pressurizing device increases, the size of the existing frame member increases, and the weight of the existing frame member increases.

[0152] In the present device 1, the frame part 26 is composed of three first frame parts 26a, second frame parts 26b, and third frame parts 26c. In addition, the length of the first frame part 26a in the horizontal direction is designed to be smaller than the length of the existing frame parts. Therefore, the first frame part 26a is smaller and lighter than the existing frame parts, but the pressure resistance of the first frame part 26a in the horizontal direction is worse than that of the existing frame parts. In the present invention, since the first frame part 26a, the second frame part 26b, and the third frame part 26c are in close contact with each other in the horizontal direction, the pressure resistance of the first frame part 26a is supplemented by the second frame part 26b (protrusion b2) and the third frame part 26c. As a result, the entire frame part 26 obtains the same pressure resistance as the existing frame parts. That is, even if the frame member 26 is constituted by combining the three first frame members 26 a , the second frame member 26 b , and the third frame member 26 c , the frame member 26 can withstand high pressure.

[0153] Furthermore, conventional pressurizing devices require the entire existing frame assembly to be disassembled when replacing the pressurizing pad 25 (pressurizing pad unit). In contrast, in the present device 1, the first frame assembly 26a (pressurizing pad unit) is disassembled after the third frame assembly 26c. As previously mentioned, the first frame assembly 26a is smaller and lighter than conventional frame assemblies, and the third frame assembly 26c is lighter than the first frame assembly 26a. Therefore, the operator's workload when replacing the pressurizing pad 25 is reduced compared to conventional pressurizing devices.

[0154] Furthermore, because the first frame member 26a is more compact than conventional frame members, the area of the surface that contacts the opposing surface 311 (in this embodiment, the first lower surface a4) is also smaller. Consequently, precision machining of the first lower surface a4 is easier than precision machining of conventional frame members. This reduces the risk of warping of the first lower surface a4 and difficulty ensuring machining accuracy during the manufacture of the first frame member 26a.

[0155] Back to Figure 10 .

[0156] Next, the control unit performs, for example, a heating process on the object to be pressed W while the object to be pressed W is in a state where the object to be pressed W is actually pressed. By heating the object to be pressed W, the adhesive w3 is cured, and the object to be pressed W is pressed and bonded.

[0157] In the present invention, for example, a cooling treatment may be performed after the object W is heated. The heating treatment and the cooling treatment may be appropriately selected according to the characteristics of the object W.

[0158] Then, after each process is completed, the control unit ends the pressurizing operation of the apparatus 1. After the pressurizing operation is completed, the pressurized object W is removed from the apparatus 1.

[0159] Summary

[0160] According to the embodiment described above, the frame member 26 that holds the pressure pad 25 of the device 1 is constructed horizontally by combining a first frame member 26a, a second frame member 26b, and a third frame member 26c. The first frame member 26a is arranged to surround the entire circumference of the flexible body 251 and holds the flexible body 251. The first frame member 26a is detachably attached to the second frame member 26b. The third frame member 26c is arranged to surround the entire circumference of the first frame member 26a and is detachably attached to the second frame member 26b, securing the first frame member 26a to the second frame member 26b. This structure allows the member holding the pressure pad 25 (the first frame member 26a in the present invention) to be smaller than conventional frame members because the frame member 26 is divisible. Consequently, when replacing the pressure pad 25, the weight of the removed first frame member 26a is lighter than that of conventional frame members. As a result, the first frame member 26a can be easily attached and detached from the device 1. Therefore, during maintenance such as replacing the pressure pad 25, the operator's workload when attaching and detaching the first frame member 26a can be reduced. Furthermore, due to the miniaturization of the first frame member 26a, the area of the surface (first lower surface a4) that contacts the mounting table 31 is also reduced, making precision machining of the contact surface easier than with conventional frame members. This reduces the risk of warping of the contact surface and difficulty ensuring machining accuracy during the manufacture of the first frame member 26a.

[0161] Furthermore, according to the embodiment described above, the second frame member 26b includes a recessed portion b1 and a protruding portion b2. The recessed portion b1 is located at the end portion on the first direction side of the lower end portion of the second frame member 26b, and the first frame member 26a and the third frame member 26c are located in the recessed portion b1. Horizontally, the protruding portion b2 is located on the second direction side of the recessed portion b1, surrounding the entire circumference of the third frame member 26c. Horizontally, the third frame member 26c abuts against the first frame member 26a and the protruding portion b2. With this structure, since the first frame member 26a, the second frame member 26b, and the third frame member 26c are in close contact with each other in the horizontal direction, the pressure resistance of the first frame member 26a is supplemented by the second frame member 26b and the third frame member 26c. As a result, in the horizontal direction, the frame member 26 formed by combining the three first frame members 26a, the second frame member 26b, and the third frame member 26c can obtain pressure resistance equivalent to that of a conventional frame member having the same length as the frame member 26.

[0162] Furthermore, according to the embodiment described above, the third frame member 26c is arranged horizontally so as to surround the entire circumference of the first frame member 26a, and has a third inner peripheral surface c1 and a third outer peripheral surface c2. The third inner peripheral surface c1 abuts the first outer peripheral surface a2 of the first frame member 26a. The third outer peripheral surface c2 abuts the second inner peripheral surface b4 of the second frame member 26b. With this structure, since the third frame member 26c is in surface contact with the first frame member 26a and the second frame member 26b in the horizontal direction, the pressure resistance of the first frame member 26a is supplemented by the second frame member 26b (protrusion b2) and the third frame member 26c. As a result, the entire frame member 26 has the same pressure resistance as conventional frame members.

[0163] Furthermore, according to the embodiment described above, the third inner peripheral surface c1 of the third frame member 26c is an inclined surface that slopes downward from the top, projecting toward the first direction. Meanwhile, the first outer peripheral surface a2 of the first frame member 26a is an inclined surface that slopes upward from the bottom, projecting toward the second direction. The third frame member 26c is attached to the second frame member 26b while being pressed upward. With this structure, when the third frame member 26c is secured to the second frame member 26b, the first outer peripheral surface a2 and the third inner peripheral surface c1 are in close contact. Because the first outer peripheral surface a2 and the third inner peripheral surface c1 abut against each other via the inclined surfaces, the first outer peripheral surface a2 and the third inner peripheral surface c1 are in reliable contact. As a result, in the horizontal direction, the integrated structure of the first frame member 26a and the third frame member 26c provides pressure resistance against pressure applied by the flexible body 251. With this structure, the first frame member 26a is pressed in the first direction and upward by the third frame member 26c. Therefore, the first frame member 26a is pressed horizontally by the third frame member 26c, and the first frame member 26a is positioned appropriately horizontally relative to the second frame member 26b. Furthermore, when the third frame member 26c is fixed, the first frame member 26a is pressed upward, and the first frame member 26a is fixed to the second frame member 26b.

[0164] Furthermore, according to the embodiment described above, the third outer peripheral surface c2 of the third frame member 26c is an inclined surface that slopes so as to protrude toward the second direction as it moves from top to bottom. Meanwhile, the second inner peripheral surface b4 of the second frame member 26b is an inclined surface that slopes so as to protrude toward the first direction as it moves from bottom to top. With this structure, when the third frame member 26c is fixed to the second frame member 26b, the second inner peripheral surface b4 can be in surface contact with the third outer peripheral surface c2, achieving close contact.

[0165] Furthermore, according to the embodiment described above, the recessed portion b1 of the second frame member 26b includes a mounting surface b3. The mounting surface b3 faces downward, and the first frame member 26a and the third frame member 26c are mounted to the second frame member 26b. The mounting surface b3 is positioned closer to the first direction side than the second inner circumferential surface b4. With this configuration, the first frame member 26a contacts the mounting surface b3, thereby distributing the horizontal pressure applied by the flexible body 251 upward to the first frame member 26a.

[0166] Furthermore, according to the embodiment described above, the mounting platform 31 includes a facing surface 311 that is parallel to the horizontal direction and faces the frame member 26 and the pressure pad 25. In the vertical direction, the thickness of the first frame member 26a is greater than the depth of the recess b1 of the second frame member 26b, and the thickness of the third frame member 26c is less than the depth of the recess b1. The first frame member 26a abuts the mounting surface b3 of the second frame member 26b, and a gap s is formed between the third frame member 26c and the mounting surface b3 that is smaller than the difference between the thicknesses of the first frame member 26a and the third frame member 26c. With this structure, when the object W is pressurized, the facing surface 311 abuts only the first frame member 26a, of the first frame member 26a, the second frame member 26b, and the third frame member 26c. Therefore, the area of the surface (first lower surface a4) abutting the facing surface 311 can be smaller than that of conventional frame members. As a result, precision machining of the abutting surfaces is also easier than with conventional frame components. That is, the area of the abutting surfaces is smaller than with conventional frame components, thereby reducing processing risks such as warping of the first lower surface a4 and difficulty in ensuring the machining accuracy of the first lower surface a4 during the manufacture of the first frame component 26a. Furthermore, according to this structure, by providing a gap s, the second mounting bolt 28b can always push the third frame component 26c upward with a tightening force greater than a specified value. Therefore, the third inner peripheral surface c1 and the first outer peripheral surface a2, as well as the third outer peripheral surface c2 and the second inner peripheral surface b4, can always be maintained in close contact. At this time, the first frame component 26a is pushed in the first direction and upward by the third frame component 26c. As a result, the first frame component 26a is pushed horizontally (in the first direction) by the third frame component 26c and is positioned appropriately in the horizontal direction relative to the second frame component 26b. When the third frame member 26c is fixed, the first frame member 26a is pressed upward, and the first frame member 26a is fixed to the second frame member 26b.

[0167] Furthermore, according to the embodiment described above, the width of the third frame member 26c is smaller than the widths of the first frame member 26a and the protrusion b2 on the virtual straight line V extending from the flexible body 251 toward the second direction. This configuration improves the efficiency of attaching and detaching the third frame member 26c during the detachment process of the first frame member 26a because the third frame member 26c is smaller than the first frame member 26a and the second frame member 26b.

[0168] ●Other Implementation Methods●

[0169] It should be noted that in the present invention, the shape of the frame member 26 when viewed from below can be appropriately designed according to the shape of the object W and is not limited to a rectangular frame. For example, the shape of the frame member 26 when viewed from below may be annular.

[0170] Furthermore, in the present invention, the material of the frame member 26 is not limited to that of the present embodiment, as long as it can hold the pressure pad 25 and has sufficient strength to maintain its shape under pressure. Specifically, the first frame member 26a, the second frame member 26b, and the third frame member 26c may be made of different materials, for example.

[0171] Furthermore, in the present invention, the angle θ1 formed by the first outer peripheral surface a2 and the first lower surface a4 of the first frame member 26a is not limited to 120 degrees. That is, the angle may be, for example, not less than 90 degrees and not more than 135 degrees.

[0172] In the present invention, the angle θ2 formed by the second inner peripheral surface b4 and the second lower surface b5 of the second frame member 26b is not limited to 120 degrees. That is, the angle may be, for example, not less than 90 degrees and not more than 135 degrees.

[0173] Furthermore, in the present invention, the angle θ3 formed by the third inner circumferential surface c1 and the third lower surface c3, and the angle θ4 formed by the third outer circumferential surface c2 and the third lower surface c3, are not limited to 60 degrees. That is, each of these angles may be, for example, greater than 45 degrees and less than 90 degrees. Furthermore, the angle θ3 formed by the third inner circumferential surface c1 and the third lower surface c3 may be, for example, different from the angle θ4 formed by the third outer circumferential surface c2 and the third lower surface c3.

[0174] In the present invention, the structure of the first frame member 26 a may be any structure as long as the films 252 and 253 can be held by the first frame member 26 a , and is not limited to the present embodiment.

[0175] In the present invention, the length of the width of each of the first frame member 26a, the second frame member 26b, and the third frame member 26c in the horizontal direction can be appropriately set according to the magnitude of the pressure acting on the object W.

[0176] Furthermore, in the present invention, the thickness of the first frame member 26 a in the vertical direction may be the same as the depth of the recessed portion b1 of the second frame member 26 b .

[0177] Furthermore, in the present invention, the first lower surface a4 of the first frame part 26a only needs to abut against the opposite surface 311 of the mounting table 31, and the second lower surface b5 of the second frame part 26b and / or the third lower surface c3 of the third frame part 26c can also abut against the opposite surface 311.

[0178] Furthermore, in the present invention, the third frame member 26c may be formed by combining multiple members as long as it can surround the entire horizontal circumference of the first frame member 26a. That is, the third frame member 26c may be formed by combining four rod-shaped members into a rectangular frame shape, for example.

[0179] Furthermore, in the present invention, the upper mold 22 and the lower mold 32 may include only a cooling mechanism, or may include both a heating mechanism and a cooling mechanism inside each of the upper mold 22 and the lower mold 32 .

[0180] Furthermore, in the present invention, the lower mold 32 may be held by a lifting mechanism different from that of the upper mold 22. According to this structure, when the lower mold 32 is held by the lifting mechanism, the pressurized object W can be pressurized by the upper and lower lifting mechanisms, so the present device 1 can pressurize the pressurized object W with a greater pressure.

[0181] Furthermore, in the present invention, the placement table 31 is not limited to the present embodiment as long as it can place the object W and perform pressurization between the upper press unit 2 and the lower press unit 3. Specifically, the placement table 31 may be, for example, a transport table for transporting the object W. In other words, the apparatus 1 itself may not necessarily include the placement table 31.

[0182] Furthermore, in the present invention, the mounting bolts 28 of the first frame member 26a, the second frame member 26b, and the third frame member 26c and the positions and numbers of the bolts can be appropriately selected according to the size of the frame member 26 and the pressure on the object W.

[0183] Furthermore, in the present invention, as long as the closeness between the third frame member 26c and the first and second frame members 26a and 26b can be ensured, the gap s does not need to be formed between the mounting surface b3 and the third upper surface c4.

[0184] In the present invention, the width of the third frame member 26c on the virtual straight line V extending from the flexible body 251 in the second direction is not limited to that of the present embodiment.

[0185] Furthermore, in the present invention, the frame member 26 only needs to be separable into at least three parts: the first frame member 26a, the second frame member 26b, and the third frame member 26c. It may also be further separable. For example, the protrusion b2 may be separable from the second frame member 26b.

[0186] Furthermore, in the present invention, the upper press unit 2 may function as another press unit in the present invention, and the lower press unit 3 may function as one press unit in the present invention. In this case, the lower press unit 3 may include a press pad 25, and the object W to be pressurized may be placed on the press pad 25.

[0187] ●Embodiment of the present invention●

[0188] Next, the terms and symbols described in each embodiment are cited and the embodiments of the present invention understood from the embodiments described above are described below.

[0189] A first embodiment of the present invention is a pressurizing device (for example, the present device 1), which clamps a pressurized object (for example, a pressurized object W) in a vertical direction to apply pressure, and includes a pair of pressurizing units (for example, an upper pressurizing unit 2 and a lower pressurizing unit 3) arranged in an opposing manner in the vertical direction to clamp the pressurized object to apply pressure, and one of the pressurizing units (for example, the upper pressurizing unit 2) includes: a pressurizing pad (for example, the pressurizing pad 25), which includes a flexible body (for example, the flexible body 251) that deforms to follow the surface shape of the pressurized object when the pressurized object is pressurized; and a frame member (for example, the frame member 26), which holds the pressurizing pad. The frame component includes: a first frame component (for example, the first frame component 26a), which is arranged in a horizontal direction so as to surround the entire circumference of the flexible body to hold the flexible body; a second frame component (for example, the second frame component 26b), which is provided for the first frame component to be installed in a detachable manner; and a third frame component (for example, the third frame component 26c), which is arranged in a horizontal direction so as to surround the entire circumference of the first frame component and is detachably installed on the second frame component to fix the first frame component to the second frame component, and in the horizontal direction, the third frame component abuts against the first frame component and the second frame component.

[0190] According to this configuration, not only can the operator's workload when replacing the frame member be reduced, but also the processing risks such as warping of the frame member and difficulty in ensuring processing accuracy of the frame member during manufacturing of the frame member can be reduced.

[0191] According to the pressurizing device described in the first embodiment, the second embodiment of the present invention is that in the horizontal direction, the direction in which the flexible body is arranged relative to the first frame component is the first direction, and the direction opposite to the first direction is the second direction; in the vertical direction, the direction in which the pressurized object is arranged relative to the pressure pad is the third direction (for example, downward), and the direction opposite to the third direction is the fourth direction (for example, upward); the second frame component has: a recess (for example, recess b1), which is arranged at the end on the first direction side of the end on the third direction side of the second frame component, for the first frame component and the third frame component to be arranged; and a convex portion (for example, convex portion b2), which is arranged in the horizontal direction at a position closer to the second direction side than the recess, and is arranged in a manner to surround the entire circumference of the third frame component, and in the horizontal direction, the third frame component abuts against the first frame component and the convex portion.

[0192] According to this configuration, in the horizontal direction, the frame member formed by combining the first frame member, the second frame member, and the third frame member has pressure resistance equivalent to that of a conventional frame member having the same length as the frame member.

[0193] According to the pressurizing device described in the second embodiment, the third embodiment of the present invention is that the first frame component has a first outer peripheral surface facing the second direction (for example, the first outer peripheral surface a2), and in the horizontal direction, the protrusion is arranged in a manner to surround the entire circumference of the third frame component, and has a second inner peripheral surface facing the first direction (for example, the second inner peripheral surface b4), and the third frame component is arranged in the horizontal direction to surround the entire circumference of the first frame component, and has: a third inner peripheral surface (for example, the third inner peripheral surface c1) opposite to the first outer peripheral surface and in contact with the first outer peripheral surface; and a third outer peripheral surface (for example, the third outer peripheral surface c2) opposite to the second inner peripheral surface and in contact with the second inner peripheral surface.

[0194] According to this configuration, since the third frame member is in contact with the first frame member and the second frame member at its surface in the horizontal direction, the entire frame member can obtain pressure resistance equivalent to that of conventional frame members.

[0195] According to the pressurizing device described in the third embodiment, the fourth embodiment of the present invention is that the third inner peripheral surface is an inclined surface that is inclined so as to protrude toward the first direction as it moves from the fourth direction toward the third direction, the first outer peripheral surface is an inclined surface that is inclined so as to protrude toward the second direction as it moves from the third direction toward the fourth direction, and the third frame component is installed on the second frame component in a state of being pushed toward the fourth direction.

[0196] This structure provides horizontal resistance to pressure from the flexible body due to the integrated structure of the first and third frame members. The first frame member is positioned appropriately relative to the second frame member. When the third frame member is secured, the first frame member is pushed upward, securing the first frame member to the second frame member.

[0197] According to the pressurizing device described in the third embodiment or the fourth embodiment, the fifth embodiment of the present invention is that the third outer peripheral surface is an inclined surface that is inclined in a manner that protrudes toward the second direction side as it moves from the fourth direction toward the third direction, and the second inner peripheral surface is an inclined surface that is inclined in a manner that protrudes toward the first direction side as it moves from the third direction toward the fourth direction.

[0198] According to this configuration, when the third frame member is fixed to the second frame member, the second inner peripheral surface and the third outer peripheral surface are in close contact with each other.

[0199] According to the pressurizing device described in any one of the third to fifth embodiments, the sixth embodiment of the present invention is that the recess has a mounting surface (for example, mounting surface b3), which faces the third direction for mounting the first frame component and the third frame component, and the mounting surface is arranged on the first direction side of the second inner peripheral surface.

[0200] According to this configuration, since the first frame member contacts the mounting surface, the pressure received from the flexible body in the horizontal direction is also dispersed upward in the first frame member.

[0201] According to the pressurizing device described in the sixth embodiment, the seventh embodiment of the present invention is that the object to be pressurized is placed on an opposing member (for example, a placing table 31), and when the object to be pressurized is pressurized, the opposing member is arranged in a manner opposing to the frame member and the pressure pad, and clamps the object to be pressurized together with the pressure pad, and the opposing member has an opposing surface (for example, an opposing surface 311), which is opposed to the frame member and the pressure pad and is parallel to the horizontal direction, in the vertical direction, the thickness of the first frame member is greater than or equal to the depth of the recess, in the vertical direction, the thickness of the third frame member is smaller than the depth of the recess, in the vertical direction, the first frame member abuts against the mounting surface, and in the vertical direction, a gap (for example, a gap s) smaller than the difference between the thickness of the first frame member and the thickness of the third frame member is formed between the third frame member and the mounting surface.

[0202] According to this structure, the area of the surface that contacts the opposing surface is smaller than that of the conventional frame member. In addition, the position of the first frame member relative to the second frame member is determined by the third frame member, and the first frame member is fixed to the second frame member.

[0203] According to the pressurizing device described in any one of the second to seventh embodiments, the eighth embodiment of the present invention is that on a virtual straight line (for example, a virtual straight line V) extending from the flexible body toward the second direction, the width of the third frame part is smaller than the widths of the first frame part and the protrusion respectively.

[0204] According to this configuration, since the third frame member can be reduced in size, the work efficiency of attaching and detaching the third frame member can be improved during the process of attaching and detaching the first frame member.

Claims

1. A pressurizing device that clamps a pressurized object in a vertical direction to apply pressure, characterized in that: A pair of pressurizing units are arranged in a vertically opposed manner to clamp the pressurized object and pressurize it. One of the pair of pressurizing units includes: a pressure pad including a flexible body that deforms to follow the surface shape of the object when the object is pressurized; and a frame member that holds the pressure pad, The frame member comprises: a first frame member arranged to surround the entire circumference of the flexible body in the horizontal direction and to hold the flexible body; a second frame member to which the first frame member is detachably mounted; as well as The third frame member is arranged in a manner to surround the entire circumference of the first frame member in the horizontal direction and is detachably mounted on the second frame member to fix the first frame member to the second frame member. In the horizontal direction, the direction in which the flexible body is arranged relative to the first frame member is a first direction, and the direction opposite to the first direction is a second direction. In the vertical direction, the direction in which the object to be pressed is arranged relative to the pressure pad is a third direction, and the direction opposite to the third direction is a fourth direction. The first frame member includes a first outer peripheral surface facing the second direction, The second frame member includes: a recessed portion disposed at an end portion on the first direction side of an end portion on the third direction side of the second frame member, in which the first frame member and the third frame member are disposed; as well as The convex portion is arranged at a position closer to the second direction side than the concave portion in the horizontal direction and is arranged so as to surround the entire circumference of the third frame member. In the horizontal direction, the convex portion is arranged so as to surround the entire circumference of the third frame member and has a second inner peripheral surface facing the first direction. The third frame member is arranged in a horizontal direction so as to surround the entire circumference of the first frame member, and comprises: a third inner peripheral surface facing the first outer peripheral surface and in contact with the first outer peripheral surface; and a third outer peripheral surface facing the second inner peripheral surface and in contact with the second inner peripheral surface, the third inner peripheral surface being an inclined surface inclined so as to protrude toward the first direction as it approaches from the fourth direction toward the third direction; The first outer peripheral surface is an inclined surface that is inclined so as to protrude toward the second direction as it moves from the third direction toward the fourth direction. The third frame member is attached to the second frame member in a state of being pressed in the fourth direction.

2. The pressurizing device according to claim 1, characterized in that The third outer peripheral surface is an inclined surface that is inclined so as to protrude toward the second direction as it moves from the fourth direction toward the third direction. The second inner peripheral surface is an inclined surface that is inclined so as to protrude toward the first direction as it goes from the third direction toward the fourth direction.

3. The pressurizing device according to claim 1 or 2, characterized in that: The recessed portion includes a mounting surface facing the third direction and for mounting the first frame member and the third frame member. The mounting surface is arranged on the first direction side of the second inner peripheral surface.

4. The pressurizing device according to claim 3, characterized in that The object to be pressed is placed on the opposing member, and when the object to be pressed is pressurized, the opposing member is arranged to face the frame member and the pressure pad, and sandwiches the object to be pressed together with the pressure pad. The opposing member includes an opposing surface that faces the frame member and the pressure pad and is parallel to the horizontal direction. In the vertical direction, the thickness of the first frame member is greater than or equal to the depth of the recess. In the vertical direction, the thickness of the third frame member is smaller than the depth of the recess. In the vertical direction, the first frame member contacts the mounting surface. In the vertical direction, a gap smaller than a difference between a thickness of the first frame member and a thickness of the third frame member is formed between the third frame member and the mounting surface.

5. The pressurizing device according to claim 4, characterized in that On a virtual straight line extending from the flexible body toward the second direction, a width of the third frame member is smaller than a width of each of the first frame member and the protrusion.

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