Raman spectrum test system and test method based on cascade spectrometer

Abstract

The present invention discloses a Raman spectrum test system based on a cascade spectrometer and a test method thereof. The test system includes an excitation unit, a Raman excitation acquisition unit and a spectrum detection unit. The excitation light unit is used to generate a plurality of excitation lights of different wavelengths, and multiple excitation light beams are combined and input into the Raman excitation acquisition unit. The Raman excitation acquisition unit is used to focus the received excitation light onto the sample to be tested and generate stimulated light, and the stimulated light is separated from the excitation light and then input to the spectrum detection unit. The spectrum detection unit switches between a first working mode and a second working mode through a detection mode switching mechanism, and respectively realizes high-sensitivity mode detection, high-resolution mode or low-wavenumber mode detection. The present invention realizes the integration of high-sensitivity mode, high-resolution detection mode and low-wavenumber detection mode into the same system by using cascaded spectrometers for Raman spectrum detection, thereby improving the overall performance of the Raman spectrum system.

Description

Technical Field

[0001] The invention relates to a spectrum analysis device, in particular to a Raman spectrum test system based on a cascade spectrometer, and belongs to the technical field of instrument testing. Background Art

[0002] Raman spectroscopy is a method of optically detecting the composition of a substance. It uses laser light to interact with the chemical bonds inside the sample molecules to stimulate nonlinear effects, thereby revealing the internal structural information of the sample. As a non-destructive and rapid analytical method, Raman spectroscopy is widely used in many fields such as material analysis, biomedicine, and substance identification.

[0003] In Raman spectroscopy technology, resolution and starting wavenumber are the most core technical parameters. The traditional Raman excitation acquisition system uses a long-wave filter to filter out the laser, but due to the starting wavelength of the filter, the low-wavenumber Raman signal will be filtered out and difficult to detect. In addition, due to the limitations of the filter material and film design, it is difficult to apply to the ultraviolet band, and the applicable band is relatively narrow. In the existing Raman spectroscopy testing technology, although it is proposed to use a cascade spectrometer to achieve low-wavenumber measurement, the resolution is low, the measurement mode is single, the application sample detection range is limited, and the applicable types are relatively small. Therefore, the above-mentioned existing Raman testing systems all have the problem of single function, which makes it impossible to integrate low-wavenumber detection mode and high-resolution detection into the same system. Summary of the invention

[0004] In view of the problems existing in the prior art, the present invention provides a Raman spectroscopy testing system based on a cascade spectrometer, which solves the problem that the existing Raman spectroscopy testing devices have single functions and limited types of detected samples.

[0005] The present invention provides a Raman spectrum testing system based on a cascade spectrometer, which comprises an excitation light unit, a Raman excitation light collection unit, and a spectrum detection unit; the excitation light unit comprises a plurality of excitation light sources and an excitation light beam combining mechanism, wherein the plurality of excitation light sources are used to generate a plurality of excitation lights of different wavelengths, and the excitation light beam combining mechanism is used to combine the plurality of excitation light beams and input them into the Raman excitation collection unit; the Raman excitation collection unit comprises an excitation light focusing mechanism and a stimulated light separation mechanism, wherein the excitation light focusing mechanism is used to focus the received excitation light onto a sample to be tested and generate stimulated light, and the stimulated light separation mechanism is used to separate the stimulated light After being separated from the excitation light, it is transmitted to a spectral detection unit; the spectral detection unit includes multiple spectrometers, a detection mode switching mechanism and a detection mechanism, wherein the detection mode switching mechanism can at least switch between a first working mode and a second working mode. When in the first working mode, the detection mode switching mechanism is used to allow the received stimulated light to pass through a selected one of the spectrometers and then enter the detection mechanism, and realize high-sensitivity mode detection; when in the second working mode, the detection mode switching mechanism is used to allow the received stimulated light to pass through multiple spectrometers in sequence and then enter the detection mechanism, and realize high-resolution mode or low-wavenumber mode detection.

[0006] Furthermore, the plurality of excitation light sources are used to generate at least one or more of deep ultraviolet excitation light, visible excitation light, and near infrared excitation light;

[0007] Furthermore, the excitation light is a narrow linewidth laser suitable for Raman excitation;

[0008] Furthermore, the wavelength of the excitation light is 177-1024 nm;

[0009] Furthermore, the excitation photosynthesis mechanism includes a first reflector group, a lens switching mechanism, a second reflector group and a lens angle adjustment mechanism. The lens switching mechanism is used to switch the multiple first reflectors in the first reflector group to corresponding working positions respectively, and the lens angle adjustment mechanism is used to adjust the reflection angles of the multiple first and second reflectors in the first and second reflector groups respectively, so that the multiple excitation lights entering the excitation photosynthesis mechanism pass through the second reflector group and the first reflector group in sequence, are output through the same light output path, and enter the Raman excitation collection unit.

[0010] Furthermore, the lens switching mechanism includes a mechanical translation mechanism, and the mechanical translation mechanism is in transmission cooperation with the first reflector group.

[0011] Furthermore, the Raman excitation collection unit further includes an excitation light intensity adjustment mechanism, which is used to adjust the excitation light input to the Raman excitation collection unit to a set intensity and then transmit it to the excitation light focusing mechanism;

[0012] Furthermore, the excitation light intensity adjustment mechanism includes a neutral attenuation sheet wheel set, and the neutral attenuation sheet wheel set includes at least one rotating wheel and a plurality of neutral attenuation sheets arranged on the rotating wheel;

[0013] Furthermore, the transmittances of the plurality of neutral attenuation sheets are at least 10%, 20%, 30%, 40%, 50%, 60%, 70%, 80%, and 90%, respectively, so that the light intensity can be varied within the range of 10-100%;

[0014] Furthermore, the neutral attenuation sheet wheel set includes two rotating wheels, one of which is provided with neutral attenuation sheets with transmittances of at least 1%, 2%, 5%, and 10%, respectively, and the other rotating wheel is provided with neutral attenuation sheets with transmittances of at least 1%, 10%, 20%, and 50%, respectively. Through the combination of the neutral attenuation sheets on the two rotating wheels, the light intensity can be changed within the range of 0.01-100%.

[0015] Furthermore, the rotating wheel is provided with a driving mechanism for driving it to rotate;

[0016] Furthermore, the Raman excitation collection unit also includes a confocal component, which includes a first lens and a second lens that cooperate with each other, a pinhole is arranged between the first lens and the second lens, and the pinhole is located at the common focus of the first lens and the second lens. The first lens is at least used to focus the excitation light input into the Raman excitation collection unit to the position of the pinhole, and the second lens at least collimates the excitation light passing through the pinhole into parallel light, and transmits it to the excitation light intensity adjustment mechanism.

[0017] Furthermore, the excitation light focusing mechanism comprises a third reflector group and a focusing assembly, wherein the third reflector group is at least used to reflect the excitation light delivered by the excitation light intensity adjustment mechanism to the focusing assembly, and the focusing assembly is at least used to focus the received excitation light onto a sample to be tested, and the sample to be tested receives the excitation light and excites a Raman signal to generate stimulated light.

[0018] Further, the focusing assembly includes an objective lens;

[0019] Furthermore, the Raman excitation collection unit further includes a sample accommodating mechanism, and the sample accommodating mechanism is used to accommodate the sample to be detected;

[0020] Furthermore, the sample accommodating mechanism is arranged on a stage, and the stage can at least move in three-dimensional space to achieve displacement of the sample to be tested and focusing of the laser on the sample surface.

[0021] Further, the stimulated light separation mechanism includes a first separation mirror group, and the first separation mirror group is at least used to reflect the stimulated light into the detection mode switching mechanism;

[0022] Further, the first separation mirror group includes a first separation mirror, the center of the first separation mirror is provided with a through hole, and a reflection area arranged around the through hole, the through hole is at least used for allowing the excitation light to pass through, and the reflection area is at least used for reflecting the stimulated light to the detection mode switching mechanism;

[0023] Furthermore, the first separation mirror is any one of a dichroic mirror, a long-wave pass filter, and a small reflecting mirror.

[0024] Furthermore, the Raman excitation collection unit also includes an illumination light source module, which includes a light source component, a spectroscopic component, a spectroscope moving mechanism and an illumination detection component. The light source component is used to generate illumination light, and the spectroscope moving mechanism is connected to the spectroscopic component and is at least used to drive the spectroscopic component to switch between a third working mode and a fourth working mode. When in the third working mode, the spectroscopic component is used to transmit the illumination light to the sample to be tested and generate scattered illumination light, and the spectroscopic component then transmits the scattered illumination light to the illumination detection component, and the illumination detection component receives the scattered illumination light and realizes microscopic observation and focusing assistance of the sample to be tested. When in the fourth working mode, the spectroscopic component is moved out of the optical path of the excitation light and the stimulated light to ensure that the Raman excitation collection optical path is not affected.

[0025] Furthermore, the light source assembly includes a light source, a light homogenizing device, and a collimating device. The light source generates the illumination light, and the illumination light is sequentially transmitted to the light splitting assembly through the light homogenizing device and the collimating device.

[0026] Further, the spectroscopic component includes a first spectroscopic mirror group and a second spectroscopic mirror group, and the spectroscopic mirror moving mechanism is used to move the second spectroscopic mirror in the second spectroscopic mirror group between a first position and a second position. When in the first position, the spectroscopic component is in a third working state, and the illumination light is sequentially transmitted to the sample to be tested through the first spectroscopic mirror group and the second spectroscopic mirror group, and the scattered illumination light is then sequentially transmitted to the illumination detection component through the second spectroscopic mirror group and the first spectroscopic mirror group. When in the second position, the spectroscopic component is in a fourth working state, and the second spectroscopic mirror is moved out of the optical path of the excitation light and the stimulated light.

[0027] Further, the first beam splitter group includes a first beam splitter lens, and the transmission-reflection ratio of the first beam splitter lens is 10:90, 20:80, 30:70, 40:60, 50:50, 60:40, 70:30, 80:20, 90:10, wherein 50:50 is preferred;

[0028] Furthermore, the first beam splitter lens is any one of a beam splitter prism, a beam splitter flat plate, a beam splitter circular plate, and a beam splitter ellipse;

[0029] Furthermore, the transmittance-reflection ratio of the second beam splitter lens is 10:90, 20:80, 30:70, 40:60, 50:50, 60:40, 70:30, 80:20, 90:10, wherein 10:90 is preferred;

[0030] Furthermore, the second beam splitter lens is a beam splitter prism;

[0031] Furthermore, the illumination detection assembly includes an illumination detector, a linear polarizer and a lens group, the scattered illumination light is sequentially transmitted to the illumination detector through the linear polarizer and the lens group, the linear polarizer at least improves the contrast of illumination imaging by rotation extinction, the lens group at least images the scattered illumination light on the illumination detector, and the illumination detector is used for microscopic observation and focusing assistance of the sample to be tested;

[0032] Furthermore, the lens group is a lens group designed to eliminate aberrations;

[0033] Furthermore, the illumination detector is a camera, an eyepiece, or a combination thereof.

[0034] Further, the detection mode switching mechanism includes a fourth reflector group and a lens moving mechanism, and the lens moving mechanism is used to switch the fourth reflector in the fourth reflector group between a third position and a fourth position, and when in the third position, the detection mode switching mechanism is in a first working mode, and when in the fourth position, the detection mode switching mechanism is in a second working mode;

[0035] Furthermore, the detection mode switching mechanism further comprises a first focusing member and a second focusing member. In the first working mode, the fourth reflector reflects the stimulated light to the first focusing member, and the first focusing member focuses the stimulated light and transmits it to the corresponding spectrometer. In the second working mode, the fourth reflector moves out of the light path, and the second focusing member focuses the stimulated light and transmits it to the corresponding spectrometer.

[0036] Further, the first focusing element includes any one of an off-axis parabolic mirror, a convex lens, and a concave spherical reflector;

[0037] Furthermore, the second focusing element includes any one of an off-axis parabolic mirror, a convex lens, and a concave spherical reflector.

[0038] The present invention also provides a Raman spectrum testing method, which is implemented based on the above-mentioned Raman spectrum testing system, and the method includes:

[0039] The multiple excitation light beams with different wavelengths generated in the excitation light unit are combined and then transmitted to the Raman excitation collection unit;

[0040] The excitation light entering the Raman excitation collection unit is focused onto the sample to be tested and stimulated light is generated, and then the stimulated light is separated from the excitation light and transmitted to the spectrum detection unit;

[0041] Adjust the working mode of the detection mode switching mechanism so that the stimulated light entering the spectral detection unit passes through a selected spectrometer and then enters the detection mechanism to achieve high-sensitivity mode detection, or so that the stimulated light entering the spectral detection unit passes through multiple spectrometers in sequence and then enters the detection mechanism to achieve high-resolution mode or low-wavenumber mode detection.

[0042] Furthermore, the stimulated light entering the spectrum detection unit is passed through a plurality of spectrometers in sequence, wherein each spectrometer has a spectroscopic effect, so that the signal spectrum is cascade-amplified by the plurality of spectrometers and then enters the detection mechanism, thereby obtaining a high-resolution spectrum and realizing high-resolution mode detection;

[0043] Alternatively, the multiple spectrometers are respectively defined as a first spectrometer, a second spectrometer and a third spectrometer, wherein the first spectrometer and the third spectrometer both have a light splitting effect, the second spectrometer has a light combining effect and can prevent the excitation light from passing through, and the stimulated light entering the spectral detection unit passes through the first spectrometer, the second spectrometer and the third spectrometer in sequence before entering the detection mechanism, thereby realizing low wavenumber mode detection.

[0044] Compared with the prior art, the Raman spectroscopy testing system based on cascaded spectrometers of the present invention proposes to use cascaded spectrometers for Raman spectroscopy detection, improve the resolution and realize low-wavenumber measurement, thereby improving the overall performance of the Raman spectroscopy system, and through the coordination of cascade amplification, light splitting and light combination among multiple spectrometers, a single detection mode, a high-resolution detection mode and a low-wavenumber detection mode are integrated into the same system. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0046] Figure 1 It is a schematic diagram of a top view of a Raman spectroscopy testing system based on a cascade spectrometer in one embodiment of the present invention;

[0047] Figure 2 It is a schematic diagram of the working principle of a Raman spectroscopy testing system based on a cascade spectrometer in one embodiment of the present invention;

[0048] Figure 3 is a schematic diagram of a top view of an excitation light unit in an embodiment of the present invention;

[0049] Figure 4 is a schematic diagram of the main structure of an excitation light unit in one embodiment of the present invention;

[0050] Figure 5 is a left-side structural schematic diagram of an excitation light unit in one embodiment of the present invention;

[0051] Figure 6 is a schematic diagram of a top view of a Raman excitation collection unit in an embodiment of the present invention;

[0052] Figure 7 This is a schematic diagram of the main structure of a Raman excitation collection unit in one embodiment of the present invention;

[0053] Figure 8 is a schematic diagram of a top view of a spectrum detection unit in an embodiment of the present invention;

[0054] Fig. 9 is a working principle diagram of a high-resolution detection mode of a spectrum detection unit in one embodiment of the present invention;

[0055] Fig.10 It is a working principle diagram of a low wave number detection mode of a spectrum detection unit in one embodiment of the present invention;

[0056] Fig.11 It is a schematic diagram of the structure of a confocal assembly in one embodiment of the present invention. DETAILED DESCRIPTION

[0057] In view of the deficiencies in the prior art, the inventor of this case has proposed the technical solution of the present invention after long-term research and extensive practice. The technical solution, its implementation process and principle will be further explained as follows.

[0058] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the protection scope of the present invention is not limited to the specific embodiments disclosed below.

[0059] In addition, in the description of the present invention, it should be understood that the terms "upper", "lower", "inside", "outside", "horizontal", "vertical", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0060] In the description of this specification, the description with reference to the terms "one embodiment", "an embodiment", "the embodiment", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0061] See also Figure 1-Figure 11 The present invention provides a Raman spectrum test system based on a cascade spectrometer, which includes an excitation light unit, a Raman excitation collection unit and a spectrum detection unit. The excitation light unit includes a plurality of excitation light sources and an excitation light beam combination mechanism. The plurality of excitation light sources are used to generate a plurality of excitation light beams of different wavelengths. The excitation light beam combination mechanism is used to combine the plurality of excitation light beams and input them into the Raman excitation collection unit. The Raman excitation collection unit includes an excitation light focusing mechanism and a stimulated light separation mechanism. The excitation light focusing mechanism is used to focus the received excitation light onto a sample 14 to be tested and generate stimulated light. The stimulated light separation mechanism is used to separate the stimulated light from the excitation light and then input them to the spectrum detection unit. The spectrum detection unit includes a plurality of spectrometers, a detection mode switching mechanism and a detection mechanism. The detection mode switching mechanism can at least switch between a first working mode and a second working mode. When in the first working mode, the detection mode switching mechanism is used to allow the received stimulated light to enter the detection mechanism after passing through a selected spectrometer and realize high-sensitivity mode detection. When in the second working mode, the detection mode switching mechanism is used to allow the received stimulated light to enter the detection mechanism after passing through a plurality of spectrometers in sequence and realize high-resolution mode or low-wavenumber mode detection. Among them, the multiple excitation light sources are used to generate at least one or more of deep ultraviolet band excitation light, visible band excitation light, and near infrared band excitation light.

[0062] In one embodiment, the excitation light unit is provided with three excitation light sources that can respectively emit different wavelengths, including a first excitation light source 100, a second excitation light source 200 and a third excitation light source 300, wherein the first excitation light source 100 can generate deep ultraviolet band excitation light, the second excitation light source 200 can generate visible band excitation light, and the third excitation light source 300 can generate near infrared band excitation light. Raman excitation in the ultraviolet and infrared bands can effectively avoid fluorescence interference and improve the signal-to-noise ratio of the Raman signal. In addition, since the excitation intensity of the Raman signal is inversely proportional to the fourth power of the wavelength, the use of deep ultraviolet lasers helps to enhance the Raman signal, which is very beneficial for the detection of weak signals. The wavelength range of Raman excitation light is 177-1024nm. Since the three excitation light sources are in different positions, the excitation light generated by the three excitation light sources at different positions is output from the same path to the Raman excitation collection unit through the excitation light beam combining mechanism, so that the Raman excitation collection unit can receive the excitation light conveniently. Afterwards, the excitation light focusing mechanism in the Raman excitation unit focuses the received excitation light and transmits it to the sample to be tested 14. The excitation light irradiates the sample to be tested 14, thereby stimulating the Raman signal of the sample to be tested 14. The sample to be tested 14 generates stimulated light, and the generated stimulated light is collimated and returned to the stimulated light separation mechanism. The stimulated light separation mechanism then separates the excitation light and the stimulated light, and then transmits the stimulated light to the spectral detection unit.

[0063] In this embodiment, the spectrum detection unit includes three spectrometers, which can detect the stimulated light reflected by the sample 14 to be tested in two modes, wherein, in the first detection mode, the detection mode switching mechanism is in the first working mode, the detection mode switching mechanism receives the stimulated light transmitted by the stimulated light separation mechanism and enters the detection mechanism after passing through the third spectrometer 28, so as to realize high-sensitivity mode detection, the high-sensitivity mode detection has a high sensitivity, can obtain a strong Raman signal, and is suitable for detecting samples with weak signals. In the second detection mode, the detection mode switching mechanism is in the second working mode, the detection mode switching mechanism receives the stimulated light transmitted by the stimulated light separation mechanism and enters the detection mechanism through the first spectrometer 26, the second spectrometer 27 and the third spectrometer 28, so as to realize high-resolution mode or low-wavenumber mode detection, the high-resolution mode can obtain spectral data with higher resolution, and the low-wavenumber mode can detect Raman signals of low wavenumbers, so as to obtain sample structure and composition information in the low-wavenumber region.

[0064] In addition, the excitation light is a narrow-linewidth laser suitable for Raman excitation, and includes a narrow-band filter corresponding to the wavelength.

[0065] In the specific structure of the excitation photosynthesis mechanism, the excitation photosynthesis mechanism includes a first reflector group, a lens switching mechanism 7, a second reflector group and a lens angle adjustment mechanism, the lens switching mechanism is used to switch the multiple first reflectors in the first reflector group to the corresponding working positions respectively, and the lens angle adjustment mechanism is used to adjust the reflection angles of the multiple first and second reflectors in the first and second reflector groups respectively, so that the multiple excitation lights entering the excitation photosynthesis mechanism pass through the second reflector group and the first reflector group in sequence, and are output through the same light output path and enter the Raman excitation collection unit. The lens switching mechanism includes a mechanical translation mechanism, which is in transmission cooperation with the first reflector group.

[0066] In one embodiment, the first reflector group includes three first reflectors, which correspond to the first excitation light source, the second excitation light source and the third excitation light source respectively. The lens switching structure includes a mechanical translation mechanism. The first reflector group can be set on the mechanical translation mechanism. The three first reflectors are respectively in corresponding working states by translation along a straight line by the mechanical translation mechanism. The second reflector group also includes at least three second reflectors, which correspond to the three first reflectors one by one. In order to better reflect the excitation light, the second reflector group cooperates with the lens angle adjustment mechanism, so that the lens angle adjustment mechanism adjusts the reflection angle of the second reflector and the reflection angle of the first reflector in the first reflector group according to the position of the excitation light generated by the three excitation light sources. The mechanical translation mechanism can be an electric translation stage or a motor and screw structure to facilitate control of movement.

[0067] In the specific structure of the Raman excitation collection unit, the Raman excitation collection unit also includes an excitation light intensity adjustment mechanism, which is used to adjust the excitation light input to the Raman excitation collection unit to a set intensity and then transmit it to the excitation light focusing mechanism.

[0068] In one embodiment, the excitation light intensity adjustment mechanism includes a neutral attenuation sheet wheel set 10, which includes at least one rotating wheel and a plurality of neutral attenuation sheets arranged on the rotating wheel. The transmittances of the plurality of neutral attenuation sheets are at least 10%, 20%, 30%, 40%, 50%, 60%, 70%, 80%, and 90%, respectively, so that the light intensity can be changed within the range of 10-100%.

[0069] In another embodiment, the neutral attenuation sheet wheel set 10 includes two rotating wheels, one of which is provided with neutral attenuation sheets with transmittances of at least 1%, 2%, 5%, and 10%, respectively, and the other rotating wheel is provided with neutral attenuation sheets with transmittances of at least 1%, 10%, 20%, and 50%, respectively. Through the combination of the neutral attenuation sheets on the two rotating wheels, the light intensity can be varied within the range of 0.01-100%.

[0070] The rotating wheel is provided with a driving mechanism for driving it to rotate.

[0071] The driving mechanism drives the rotating wheel to rotate, so as to replace the neutral attenuation sheets with different transmittances, so as to realize the degree of attenuation of the intensity of the received excitation light according to the required requirements. Alternatively, two rotating wheels are provided, and a plurality of neutral attenuation sheets with different transmittances are provided on each rotating wheel. The two rotating wheels are stacked along the direction of the light path, and the two rotating wheels can rotate separately. When in use, the two rotating wheels can be rotated separately as required, so that the neutral attenuation sheets with different transmittances on the two rotating wheels are combined, so that the excitation light passes through the two neutral attenuation sheets of the above combination in sequence, so as to realize the adjustment of the light intensity of the excitation light.

[0072] In addition, the Raman excitation collection unit also includes a confocal component, which includes a first lens 31 and a second lens 33 that cooperate with each other. A pinhole 32 is arranged between the first lens 31 and the second lens 33. The pinhole 32 is located at the common focus of the first lens 31 and the second lens 33. The first lens 31 is at least used to focus the excitation light input into the Raman excitation collection unit to the position of the pinhole 32. The second lens 33 at least collimates the excitation light passing through the pinhole 32 into parallel light and transmits it to the excitation light intensity adjustment mechanism.

[0073] In one embodiment, if Fig.11 As shown, before the excitation light passes through the excitation light intensity adjustment mechanism, a confocal component is arranged on its optical path, which includes a first lens 31, a second lens 33, and a pinhole 32 between the first lens 31 and the second lens 33. The excitation light first passes through the first lens 31, and the first lens 31 focuses the excitation light on the position of the pinhole 32. The focused excitation light is transmitted to the second lens 33 through the pinhole 32. The second lens 33 collimates the excitation light to make it parallel light, and transmits the parallel light to the excitation light intensity adjustment mechanism. The confocal component is used to realize the shaping of the excitation light beam, thereby reducing the size of the excitation light focus spot, and forming a rapidly divergent focus spot, thereby improving the lateral and axial resolution of the Raman spectroscopy system.

[0074] Alternatively, in another embodiment, the confocal component may also be placed after the excitation light intensity adjustment mechanism.

[0075] In the specific structure of the excitation light focusing mechanism, the excitation light focusing mechanism includes a third reflector group and a focusing assembly, the third reflector group is at least used to reflect the excitation light delivered by the excitation light intensity adjustment mechanism to the focusing assembly, and the focusing assembly is at least used to focus the received excitation light onto the sample to be tested 14, and the sample to be tested 14 receives the excitation light and excites the Raman signal and generates stimulated light. The focusing assembly includes an objective lens 13.

[0076] In one embodiment, the third reflector group includes at least one third reflector lens 11 to adjust the transmission path of the excitation light so that it is transmitted to the objective lens 13. In another embodiment, the focusing assembly includes an objective lens disk and a plurality of objective lenses 13, and the plurality of objective lenses 13 are mounted on the objective lens disk, and the objective lens disk can realize the switching of the plurality of objective lenses 13 by rotating.

[0077] In addition, the Raman excitation acquisition unit further includes a sample accommodating mechanism 15, which is used to accommodate the sample to be tested 14. The sample accommodating mechanism 15 is arranged on a stage, which can move at least in three-dimensional space, and the movement of the stage can achieve the displacement of the sample and the focusing of the laser on the sample surface.

[0078] In one embodiment, the sample accommodating mechanism 15 can be an electric translation stage or a manual translation stage or a cuvette or an in-situ cell. The test system of the present application is designed to irradiate the sample with a laser downward, which is suitable for measuring samples in various states such as solid blocks, powders, liquids, and gases. The sample accommodating platform can move in three dimensions to achieve the focusing function on the sample 14 to be tested.

[0079] The stimulated light separation mechanism includes a first separation mirror group, which is at least used to reflect the stimulated light into the detection mode switching mechanism. The first separation mirror group includes a first separation mirror 12, a through hole is provided at the center of the first separation mirror 12, and a reflection area is arranged around the through hole, the through hole is at least used to allow the excitation light to pass through, and the reflection area is at least used to reflect the stimulated light to the detection mode switching mechanism. The first separation mirror 12 is any one of a dichroic mirror, a long-wave pass filter, and a small reflector.

[0080] In this embodiment, the first separation mirror group includes a first separation mirror 12, which is arranged on the transmission path of the excitation light and the stimulated light, and a through hole is provided in the middle of the first separation mirror 12 for the excitation light to pass through. After the stimulated light is transmitted to the first separation mirror 12, it is reflected by the reflection area of ​​the first separation mirror 12 to the detection mode switching mechanism, thereby separating the excitation light and the stimulated light.

[0081] The Raman excitation collection unit also includes an illumination light source module, which includes a light source component, a spectroscopic component, a spectroscope moving mechanism and an illumination detection component. The light source component is used to generate illumination light. The spectroscope moving mechanism is connected to the spectroscopic component and is at least used to drive the spectroscopic component to switch between a third working mode and a fourth working mode. When in the third working mode, the spectroscopic component is used to transmit the illumination light to the sample to be tested 14 and generate scattered illumination light. The spectroscopic mode switching mechanism then transmits the scattered illumination light to the illumination detection component. The illumination detection component receives the scattered illumination light and realizes microscopic observation and focusing assistance of the sample to be tested 14. When in the fourth working mode, the spectroscopic component is moved out of the optical path of the excitation light and the stimulated light to ensure that the Raman excitation collection optical path is not affected.

[0082] The light source assembly includes a light source 20, a light homogenizing device, and a collimating device. The light source 20 generates illumination light, which is sequentially transmitted to the light splitting assembly through the light homogenizing device and the collimating device. The light source 20 is a white light LED light source; the light homogenizing device is a group of shaping elements, which can be made of frosted glass; the collimating device is a lens or a lens group, which is used to convert the output light source into parallel light.

[0083] The spectroscopic component includes a first spectroscope group and a second spectroscope group. The spectroscope moving mechanism is used to move the second spectroscope 25 in the second spectroscope group between a first position and a second position. When in the first position, the spectroscopic component is in a third working state, and the illumination light is sequentially transmitted to the sample to be tested 14 through the first spectroscope group and the second spectroscope group, and the scattered illumination light is sequentially transmitted to the illumination detection component through the second spectroscope group and the first spectroscope group. When in the second position, the spectroscopic component is in a fourth working state, and the second spectroscope moves out of the optical path of the excitation light and the stimulated light.

[0084] In one embodiment, before performing Raman spectroscopy testing on the sample 14 to be tested, the position of the sample 14 to be tested is first detected by an illumination light source module, and the sample 14 to be tested is illuminated by illumination light to form an image. The illumination detection component can be used to directly observe the sample 14 to be tested, and the image is observed. By moving the stage up and down, the sample can be adjusted to a suitable focusing position, and by moving the stage horizontally, the region of interest of the sample 14 to be tested can be moved to the focusing spot position of the excitation light.

[0085] Specifically, when it is necessary to observe the sample 14 to be tested, illumination light is generated by controlling the light source, and passes through the light homogenizer and the collimator in sequence. The illumination light is processed by the light homogenizer to make the divergence more uniform, and is collimated into parallel light by the collimator. Then, the light splitting mode switching mechanism is controlled to move the second beam splitter lens to the first position. After the illumination light is emitted from the light source assembly, it passes through the first beam splitter group and the second beam splitter lens in sequence to irradiate the sample 14 to be tested, and generates scattered illumination light. Then, the scattered illumination light is collimated and returned and passes through the second beam splitter lens and the first beam splitter lens in sequence to enter the illumination detection assembly, so that the sample 14 to be tested can be observed in the illumination detection assembly.

[0086] In addition, when the second beam splitter is in the first position, the excitation light unit is turned on so that the excitation light is focused on the sample to be tested, and through the reflection of the second beam splitter and the first beam splitter group, the focus of the illumination light and the excitation light can be observed simultaneously in the illumination detection component, thereby facilitating the focus of the excitation light and the sample to be tested 14 and playing a focusing auxiliary role.

[0087] Since the second beam splitter lens needs to be used for reflecting illumination light, scattering illumination light, excitation light and stimulated light when observing the sample to be tested and performing auxiliary focusing, the second beam splitter lens is in the optical path of the excitation light and the stimulated light. When Raman signal spectrum detection is required, the second beam splitter lens will affect the efficiency of Raman signal collection. Therefore, when Raman signal spectrum detection is required for the sample to be tested 14, the beam splitter mode switching mechanism is controlled to move the second beam splitter lens to the second position, at which the second beam splitter lens is moved out of the optical path of the excitation light and the stimulated light.

[0088] The first beam splitter group includes a first beam splitter lens 21, and the transmission-reflection ratio of the first beam splitter lens 21 is 10:90, 20:80, 30:70, 40:60, 50:50, 60:40, 70:30, 80:20, 90:10, among which 50:50 is preferred.

[0089] The first beam splitter lens 21 is any one of a beam splitter prism, a beam splitter flat plate, a beam splitter circular plate, and a beam splitter ellipse.

[0090] The transmission-reflection ratio of the second beam splitter lens 25 is 10:90, 20:80, 30:70, 40:60, 50:50, 60:40, 70:30, 80:20, 90:10, with 10:90 being preferred.

[0091] The second beam splitter lens 25 is a beam splitter prism.

[0092] In one embodiment, the transmittance-reflection ratio of the first beam splitter 21 is 50:50, at which the contrast of illumination detection is the highest. The transmittance of the second beam splitter should be lower, so as to facilitate attenuation of the transmitted excitation light and avoid damage to the illumination detection component. The reflectance of the second beam splitter should be higher, so as to increase the reflectance of the illumination light and the brightness of the illumination imaging. Therefore, the second beam splitter is selected to have a transmittance-reflection ratio of 10:90.

[0093] The illumination detection assembly includes an illumination detector 24, a linear polarizer 22 and a lens group 23. The scattered illumination light is sequentially transmitted to the illumination detector 24 through the linear polarizer 22 and the lens group 23. The linear polarizer 22 at least improves the contrast of the illumination imaging by rotational extinction. The lens group 23 at least images the scattered illumination light on the illumination detector 24. The illumination detector 24 is used for microscopic observation and focusing assistance of the sample 14 to be tested.

[0094] The lens group 23 is a lens group designed to eliminate aberrations.

[0095] The illumination detector 24 is a camera, an eyepiece, or a combination thereof.

[0096] The lighting unit also includes eye-safe components, which can be achieved through optical path design or through a laser shutter.

[0097] In one embodiment, an eye-safe illumination optical path may be used to replace the illumination optical path in this example. The eye-safe optical path separates the eyepiece from the camera optical path to ensure that the laser does not enter the eyepiece under any circumstances, thereby ensuring the safety of the operator. The eye-safe optical path is a prior art, and the specific structure can refer to the detailed contents recorded in the patent document with publication number CN220854654U.

[0098] In another embodiment, a laser shutter may also be provided. The laser shutter is a light-blocking sheet provided in front of or behind the excitation light intensity adjustment mechanism in the excitation light path. The switching of the excitation light passing / blocking can be achieved by controlling its on / off. Specific implementation method 1: When human eye observation is required, open the eyepiece cover and the laser shutter will automatically close. Implementation method 2: Before the second beam splitter lens 25 is moved into the light path, the system control software pops up a safety prompt, and the second beam splitter lens 25 is moved into the light path only after manually clicking to confirm the shutter switch status. .

[0099] The detection mode switching mechanism includes a fourth reflector group and a lens moving mechanism. The lens moving mechanism is used to switch the fourth reflector 17 in the fourth reflector group between the third position and the fourth position. When in the third position, the detection mode switching mechanism is in the first working mode. When in the fourth position, the detection mode switching mechanism is in the second working mode. The detection mode switching mechanism also includes a first focusing member and a second focusing member. In the first working mode, the fourth reflector 17 reflects the stimulated light to the first focusing member, and the first focusing member focuses the stimulated light and transmits it to the corresponding spectrometer. In the second working mode, the fourth reflector 17 moves out of the light path, and the second focusing member focuses the stimulated light and transmits it to the corresponding spectrometer.

[0100] In one embodiment, the lens moving mechanism includes a moving platform, a motor and a screw, wherein the fourth reflector is mounted on the moving platform, the moving platform is connected to the screw and can move relative to the screw, the motor and the screw are connected by transmission and drive the screw to rotate, thereby driving the moving platform to move. The fourth reflector 17 is an elliptical reflector, and the elliptical reflector can fully utilize the aperture of the Raman signal to reflect the Raman signal. In the first working mode, the lens moving mechanism drives the fourth reflector 17 to move to the third position, at which position, the fourth reflector 17 is located on the optical path of the stimulated light, the fourth reflector 17 reflects the stimulated light to the first focusing member, and then transmits the stimulated light to a selected spectrometer through the first focusing member and then enters the detection mechanism to achieve high sensitivity mode detection. In the second working mode, the lens moving mechanism drives the fourth reflector 17 to move to the fourth position, at which position, the fourth reflector 17 moves out of the optical path of the stimulated light, so that the stimulated light passes through the first separation mirror 12, and then is reflected by the second focusing member and passes through multiple spectrometers in sequence and then enters the detection mechanism to achieve high resolution mode or low wave number mode detection.

[0101] In addition, the detection mode switching mechanism also includes a filtering unit, which is arranged between the fourth reflector 17 and the first focusing member, and includes at least three long-wave pass filters corresponding to the wavelength excited by the excitation module, so as to filter out the excitation light while allowing the Raman signal to pass through. In the Raman spectroscopy system, it is a common optical path design to use a long-wave pass filter to replace the first separation mirror 12, but this design is not suitable for the deep ultraviolet band due to the limitation of the filter. Therefore, the present invention uses the first separation mirror 12 to replace the filter as an optical path separation element to achieve efficient Raman signal detection in the deep ultraviolet band. In the low wave number mode, there is no need to use a long-wave pass filter. In the high sensitivity mode, as in the traditional Raman spectroscopy system, at least three long-wave pass filters need to be arranged between the fourth reflector 17 and the first focusing member to filter out the excitation light.

[0102] The first focusing element is any one of an off-axis parabolic mirror, a convex lens, and a concave spherical reflecting mirror.

[0103] The second focusing element is any one of an off-axis parabolic mirror, a convex lens, and a concave spherical reflecting mirror.

[0104] The present invention also provides a Raman spectrum testing method, characterized in that the testing method is implemented based on a Raman spectrum testing system, and the method includes:

[0105] The multiple excitation light beams with different wavelengths generated in the excitation light unit are combined and then transmitted to the Raman excitation collection unit;

[0106] The excitation light entering the Raman excitation collection unit is focused onto the sample to be tested 14 to generate stimulated light, and then the stimulated light is separated from the excitation light and transmitted to the spectrum detection unit;

[0107] Adjust the working mode of the detection mode switching mechanism so that the stimulated light entering the spectral detection unit passes through a selected spectrometer and then enters the detection mechanism to achieve high-sensitivity mode detection, or so that the stimulated light entering the spectral detection unit passes through multiple spectrometers in sequence and then enters the detection mechanism to achieve high-resolution mode or low-wavenumber mode detection.

[0108] Specifically, the stimulated light entering the spectrum detection unit is passed through a plurality of spectrometers in sequence, each of which has a spectroscopic effect, so that the signal spectrum is cascade-amplified by the plurality of spectrometers and then enters the detection mechanism, thereby obtaining a high-resolution spectrum and realizing high-resolution mode detection;

[0109] Alternatively, multiple spectrometers are respectively defined as a first spectrometer, a second spectrometer and a third spectrometer, wherein the first spectrometer and the third spectrometer both have a light-splitting effect, the second spectrometer has a light-combining effect and can prevent the excitation light from passing through, and the stimulated light entering the spectral detection unit passes through the first spectrometer, the second spectrometer and the third spectrometer in sequence before entering the detection mechanism, thereby realizing low wavenumber mode detection.

[0110] Example:

[0111] See also Figure 1-Figure 10 The test system of the present application only takes the installation of CCD on the third spectrometer as an example. CCD or PMT can also be installed on the first and second spectrometers to obtain more detection modes. If CCD is also installed on the first spectrometer, only the first CCD can be used. If CCD is also installed on the second spectrometer, only the second spectrometer can be used, or a sub-high resolution detection mode in which both the first and second spectrometers play a role in spectroscopy can be used.

[0112] The Raman spectrum testing system based on the cascade spectrometer in the above embodiment tests the Raman signals excited by wavelengths 1, 2, and 3 excited by the excitation source, and its working steps are as follows:

[0113] When the control module instructs the first excitation light source 100 to excite wavelength 1, the lens switching mechanism 7 switches the first reflector 7-1 in the first reflector group corresponding to wavelength 1 to the working position, and wavelength 1 is reflected by the second reflector 4 and the first reflector 7-1 in the second reflector group in turn and enters the Raman excitation collection unit.

[0114] When the control module instructs the second excitation light source 200 to excite wavelength 2, the lens switching mechanism 7 switches the first reflector 7-2 corresponding to wavelength 2 to the working position, and wavelength 2 is reflected by the second reflectors 5, 9 and the first reflector 7-2 in turn and enters the Raman excitation collection unit.

[0115] When the control module instructs the third excitation light source 300 to excite wavelength 3, the lens switching mechanism 7 switches the first reflector 7-3 corresponding to wavelength 3 to the working position, and wavelength 3 is reflected by the second reflectors 6, 8 and the first reflector 7-3 in turn and enters the Raman excitation collection unit.

[0116] The wavelengths 1, 2, and 3 mentioned above can be input into the Raman excitation collection unit along the same path after passing through the excitation photosynthesis mechanism.

[0117] The control module instructs the neutral attenuation sheet wheel group 10 to adjust the intensity of the transmitted laser light to be consistent with the set value, and the laser light (i.e. the aforementioned wavelength) is then folded downward by the third reflector lens 11, passes through the through hole in the center of the first separation mirror 12, and enters the objective lens 13. The excitation light is focused by the objective lens 13 on the sample to be tested 14 to excite the Raman signal. If the focus of the sample to be tested 14 is not accurate, the focus can be adjusted by adjusting the sample accommodating mechanism 15 through the control module.

[0118] The control module instructs the illumination light source 20 to turn on, and the emitted illumination light passes through the first beam splitter lens 21, is reflected downward by the second beam splitter lens 25, enters the objective lens 13, and irradiates the sample to be tested 14. The illumination light scattered by the sample to be tested 14 is collimated and returned by the objective lens 13, is reflected by the second beam splitter lens 25 and the first beam splitter lens 2, passes through the linear polarizer 22 and the lens group 23, and enters the illumination detector 24.

[0119] The beam splitter moving mechanism moves the first beam splitter lens 25 to the first position, and the illumination light is reflected by the first beam splitter lens 25, and the illumination light can be observed to assist in focusing. If the laser is turned on at this time, the focus of the illumination light and the laser can be observed at the same time.

[0120] The first beam splitter lens 25 moves to the second position, and the first beam splitter lens 25 moves out of the light path. At this time, it is in the Raman signal detection mode.

[0121] The Raman signal light scattered by the sample 14 to be tested is collimated and returned by the objective lens 13 and reflected by the first separation mirror 12. There are two signal detection optical paths:

[0122] One guides the Raman signal light to the first spectrometer 26, and the signal light passes through the first spectrometer 26, the second spectrometer 27, and the third spectrometer 28 in sequence, and enters the CCD on the third spectrometer 28 for detection;

[0123] The other one directly guides the Raman signal light into the third spectrometer 28 and enters the CCD on the third spectrometer 28 for detection.

[0124] The test system of the present application has three signal detection modes: single-unit mode, high-resolution mode, and low-wavenumber mode.

[0125] The control module instructs the lens moving mechanism to switch the fourth reflector 17 between the third position and the fourth position:

[0126] When the fourth reflector 17 is located at the third position, the Raman signal light scattered by the sample 14 to be tested is reflected by the first separation mirror 12, reflected by the fourth reflector 17, passes through the filter wheel 18, is reflected and focused by the off-axis parabolic mirror 19, and enters the entrance slit of the third spectrometer 28.

[0127] When the fourth reflector 17 is located at the fourth position, the fourth reflector 17 moves out of the light path, and the Raman signal light scattered by the sample 14 is reflected by the first separation mirror 12 , reflected and focused by the off-axis parabolic mirror 2 16 , and enters the entrance slit of the first spectrometer 26 .

[0128] The single-stage mode corresponds to the optical path when the fourth reflector 17 is located at the third position. The signal light is reflected and focused by the off-axis parabolic mirror 19 and directly enters the entrance slit of the third spectrometer 28 .

[0129] The high-resolution mode and the low-wavenumber mode correspond to the optical path when the fourth reflector 17 is located at the fourth position. The signal light is reflected and focused by the off-axis parabolic mirror 16 and enters the entrance slit of the first spectrometer 26 .

[0130] In the high-resolution mode, the three spectrometers 26, 27, and 28 all play a role in spectroscopy, and the signal spectrum is cascade-amplified by the three spectrometers, so that the signal spectrum is cascade-amplified by multiple spectrometers and enters the detection mechanism to obtain a high-resolution spectrum, realize high-resolution mode detection, and obtain a high-resolution spectral line.

[0131] In the low wave number mode, a triple spectrometer is used, the first spectrometer 26 and the third spectrometer 28 play a role of light splitting, and the second spectrometer 27 plays a role of light combining, and the light dispersed by the first spectrometer 26 is recombined into a beam, which enters the slit of the third spectrometer 28. In this mode, the spectral resolution of the system is equivalent to the resolution of the third spectrometer 28. The low wave number mode uses the entrance slit of the second spectrometer 27 to block the excitation laser, while allowing the Raman signal to pass through, realizing the filtering function, which can more accurately filter out the laser spectrum line and realize the detection of low wave number Raman signals.

[0132] In one embodiment, a single spectrometer with a focal length of 750, a grating of 1800g / mm, a slit of 10μm, and a resolution of 0.01nm when measured at a wavelength of 500nm, while three spectrometers with a focal length of 750 are cascaded, with gratings of 1800g / mm, and a slit of 10μm, and a resolution of 0.0033nm when measured at a wavelength of 500nm.

[0133] The various aspects, embodiments, features and examples of the present invention should be considered as illustrative in all aspects and are not intended to limit the present invention, the scope of the present invention is defined only by the claims. Other embodiments, modifications and uses will be apparent to those skilled in the art without departing from the spirit and scope of the claimed invention.

[0134] In addition, the inventors of this case also referred to the aforementioned embodiments and conducted experiments with other raw materials, process operations, and process conditions described in this specification, and obtained relatively ideal results.

[0135] Although the present invention has been described with reference to illustrative embodiments, it will be appreciated by those skilled in the art that various other changes, omissions and / or additions may be made without departing from the spirit and scope of the present invention and that the elements of the embodiments may be replaced by substantial equivalents. In addition, many modifications may be made without departing from the scope of the present invention to adapt specific circumstances or materials to the teachings of the present invention. Therefore, it is not intended herein to limit the present invention to the disclosed specific embodiments for performing the present invention, but it is intended that the present invention will include all embodiments within the scope of the appended claims. In addition, unless specifically stated, any use of the terms first, second, etc. does not indicate any order or importance, but rather uses the terms first, second, etc. to distinguish one element from another.

Claims

1. A Raman spectroscopy testing system based on a cascade spectrometer, characterized in that: include: An excitation light unit, comprising a plurality of excitation light sources and an excitation light beam combining mechanism, wherein the plurality of excitation light sources are used to generate excitation light of a plurality of different wavelengths, and the excitation light beam combining mechanism is used to combine the plurality of excitation light beams and input them into a Raman excitation collection unit; A Raman excitation collection unit, comprising an excitation light focusing mechanism and a stimulated light separation mechanism, wherein the excitation light focusing mechanism is used to focus the received excitation light onto the sample to be tested and generate stimulated light, and the stimulated light separation mechanism is used to separate the stimulated light from the excitation light and transmit the stimulated light to the spectrum detection unit; A spectral detection unit, comprising a plurality of spectrometers, a detection mode switching mechanism and a detection mechanism, wherein the detection mode switching mechanism can at least switch between a first working mode and a second working mode. When in the first working mode, the detection mode switching mechanism is used to allow the received stimulated light to enter the detection mechanism after passing through a selected one of the spectrometers, and to achieve high-sensitivity mode detection. When in the second working mode, the detection mode switching mechanism is used to allow the received stimulated light to enter the detection mechanism after passing through a plurality of the spectrometers in sequence, and to achieve high-resolution mode or low-wavenumber mode detection. Wherein, the excitation photosynthesis mechanism comprises a first reflector group, a lens switching mechanism, a second reflector group and a lens angle adjustment mechanism, wherein the lens switching mechanism is used to switch the plurality of first reflectors in the first reflector group to corresponding working positions respectively, and the lens angle adjustment mechanism is used to adjust the reflection angles of the plurality of first and second reflectors in the first and second reflector groups respectively, so that the plurality of excitation lights entering the excitation photosynthesis mechanism pass through the second reflector group and the first reflector group in sequence, are output through the same light output path, and enter the Raman excitation collection unit; The stimulated light separation mechanism includes a first separation mirror group, which is at least used to reflect the stimulated light into the detection mode switching mechanism; the first separation mirror group includes a first separation mirror, the center of the first separation mirror is provided with a through hole, and a reflection area arranged around the through hole, the through hole is at least used to allow the excitation light to pass through, and the reflection area is at least used to reflect the stimulated light to the detection mode switching mechanism.

2. The Raman spectroscopy testing system according to claim 1, characterized in that: The plurality of excitation light sources are used to generate at least one or more of deep ultraviolet excitation light, visible excitation light, and near infrared excitation light; And / or, the excitation light is a narrow linewidth laser suitable for Raman excitation; And / or, the wavelength of the excitation light is 177-1024nm.

3. The Raman spectroscopy testing system according to claim 2, characterized in that: The lens switching mechanism comprises a mechanical translation mechanism, and the mechanical translation mechanism is in transmission cooperation with the first reflector group.

4. The Raman spectroscopy testing system according to claim 1, characterized in that: The Raman excitation collection unit also includes an excitation light intensity adjustment mechanism, which is used to adjust the excitation light input to the Raman excitation collection unit to a set intensity and then transmit it to the excitation light focusing mechanism; And / or, the excitation light intensity adjustment mechanism comprises a neutral attenuation plate wheel set, and the neutral attenuation plate wheel set comprises at least one rotating wheel and a plurality of neutral attenuation plates arranged on the rotating wheel; And / or, the transmittances of the plurality of neutral attenuation sheets are at least 10%, 20%, 30%, 40%, 50%, 60%, 70%, 80%, 90%, respectively, so that the light intensity can be varied within the range of 10-100%; And / or, the neutral attenuation sheet wheel set includes two rotating wheels, one of which is provided with neutral attenuation sheets with transmittances of at least 1%, 2%, 5%, and 10%, respectively, and the other rotating wheel is provided with neutral attenuation sheets with transmittances of at least 1%, 10%, 20%, and 50%, respectively, and the light intensity can be varied within the range of 0.01-100% by combining the neutral attenuation sheets on the two rotating wheels; And / or, the rotating wheel is provided with a driving mechanism for driving it to rotate; And / or, the Raman excitation collection unit also includes a confocal component, which includes a first lens and a second lens that cooperate with each other, a pinhole is arranged between the first lens and the second lens, and the pinhole is located at the common focus of the first lens and the second lens, the first lens is at least used to focus the excitation light input into the Raman excitation collection unit to the position of the pinhole, and the second lens at least collimates the excitation light passing through the pinhole into parallel light, and transmits it to the excitation light intensity adjustment mechanism.

5. The Raman spectroscopy testing system according to claim 4, characterized in that: The excitation light focusing mechanism comprises a third reflector group and a focusing assembly, wherein the third reflector group is at least used to reflect the excitation light delivered by the excitation light intensity adjustment mechanism to the focusing assembly, and the focusing assembly is at least used to focus the received excitation light onto a sample to be tested, and the sample to be tested receives the excitation light and excites a Raman signal to generate stimulated light. And / or, the focusing assembly includes an objective lens; And / or, the Raman excitation collection unit further includes a sample accommodating mechanism, and the sample accommodating mechanism is used to accommodate the sample to be detected; And / or, the sample accommodating mechanism is arranged on a stage, and the stage can move at least in three-dimensional space to achieve displacement of the sample to be measured and focusing of the laser on the sample surface.

6. The Raman spectroscopy testing system according to claim 1, characterized in that: The first separation mirror is any one of a dichroic mirror, a long-wave pass filter, and a small reflecting mirror.

7. The Raman spectroscopy testing system according to claim 1, characterized in that: The Raman excitation collection unit also includes an illumination light source module, which includes a light source assembly, a spectroscopic assembly, a spectroscope moving mechanism and an illumination detection assembly. The light source assembly is used to generate illumination light. The spectroscope moving mechanism is connected to the spectroscopic assembly and is at least used to drive the spectroscopic assembly to switch between a third working mode and a fourth working mode. When in the third working mode, the spectroscopic assembly is used to deliver the illumination light to the sample to be tested and generate scattered illumination light. The spectroscopic assembly then delivers the scattered illumination light to the illumination detection assembly. The illumination detection assembly receives the scattered illumination light and realizes microscopic observation and focusing assistance of the sample to be tested. When in the fourth working mode, the spectroscopic assembly is moved out of the optical path of the excitation light and the stimulated light to ensure that the Raman excitation collection optical path is not affected. And / or, the light source assembly includes a light source, a light homogenizing device, and a collimating device, the light source generates the illumination light, and the illumination light is sequentially transmitted to the light splitting assembly through the light homogenizing device and the collimating device; And / or, the spectroscopic component includes a first spectroscopic group and a second spectroscopic group, the spectroscopic moving mechanism is used to move the second spectroscopic lens in the second spectroscopic group between a first position and a second position, when in the first position, the spectroscopic component is in a third working state, the illumination light is sequentially transmitted to the sample to be tested through the first spectroscopic group and the second spectroscopic group, and the scattered illumination light is then sequentially transmitted to the illumination detection component through the second spectroscopic group and the first spectroscopic group, and when in the second position, the spectroscopic component is in a fourth working state, and the second spectroscopic lens is moved out of the optical path of the excitation light and the stimulated light; And / or, the first beam splitter group includes a first beam splitter lens, and the transmission-reflection ratio of the first beam splitter lens is 10:90, 20:80, 30:70, 40:60, 50:50, 60:40, 70:30, 80:20, 90:10; And / or, the transmission-reflection ratio of the first beam splitter lens is 50:50; And / or, the first beam splitter lens is any one of a beam splitter prism, a beam splitter flat plate, a beam splitter circular plate, and a beam splitter ellipse; And / or, the transmission-reflection ratio of the second beam splitter lens is 10:90, 20:80, 30:70, 40:60, 50:50, 60:40, 70:30, 80:20, 90:10; And / or, the transmission-reflection ratio of the second beam splitter lens is 10:90; And / or, the second beam splitter lens is a beam splitter prism; And / or, the illumination detection assembly includes an illumination detector, a linear polarizer and a lens group, the scattered illumination light is sequentially transmitted to the illumination detector through the linear polarizer and the lens group, the linear polarizer at least improves the contrast of illumination imaging by rotation extinction, the lens group at least images the scattered illumination light on the illumination detector, and the illumination detector is used for microscopic observation and focusing assistance of the sample to be tested; And / or, the lens group is a lens group designed to eliminate aberrations; And / or, the illumination detector is one or a combination of a camera and an eyepiece.

8. The Raman spectroscopy testing system according to claim 1, characterized in that: The detection mode switching mechanism comprises a fourth reflector group and a lens moving mechanism, wherein the lens moving mechanism is used to switch the fourth reflector in the fourth reflector group between a third position and a fourth position, wherein when the fourth reflector is in the third position, the detection mode switching mechanism is in a first working mode, and when the fourth reflector is in the fourth position, the detection mode switching mechanism is in a second working mode; And / or, the detection mode switching mechanism further comprises a first focusing member and a second focusing member, in the first working mode, the fourth reflector reflects the stimulated light to the first focusing member, the first focusing member focuses the stimulated light and transmits it to the corresponding spectrometer, and in the second working mode, the fourth reflector moves out of the light path, the second focusing member and the second focusing member focus the stimulated light and transmit it to the corresponding spectrometer; And / or, the first focusing element includes any one of an off-axis parabolic mirror, a convex lens, and a concave spherical reflector; And / or, the second focusing element includes any one of an off-axis parabolic mirror, a convex lens, and a concave spherical reflector.

9. A Raman spectroscopy testing method, characterized in that: The testing method is implemented based on the Raman spectroscopy testing system according to any one of claims 1 to 8, and the method comprises: The multiple excitation light beams with different wavelengths generated in the excitation light unit are combined and then transmitted to the Raman excitation collection unit; The excitation light entering the Raman excitation collection unit is focused onto the sample to be tested and stimulated light is generated, and then the stimulated light is separated from the excitation light and transmitted to the spectrum detection unit; Adjusting the working mode of the detection mode switching mechanism so that the stimulated light entering the spectrum detection unit passes through a selected spectrometer and then enters the detection mechanism to achieve high-sensitivity mode detection, or so that the stimulated light entering the spectrum detection unit passes through multiple spectrometers in sequence and then enters the detection mechanism to achieve high-resolution mode or low-wavenumber mode detection; The excitation light unit includes a plurality of excitation light sources and an excitation light beam combining mechanism, and the excitation light beam combining mechanism includes a first reflector group, a lens switching mechanism, a second reflector group, and a lens angle adjustment mechanism; the excitation light beam combining mechanism generates a plurality of different wavelengths in the excitation light unit and transmits them to the Raman excitation collection unit, specifically including: A plurality of excitation light sources generate excitation lights of a plurality of different wavelengths; The lens switching mechanism switches the plurality of first reflectors in the first reflector group to corresponding working positions respectively; The lens angle adjustment mechanism adjusts the reflection angles of the first and second reflectors in the first and second reflector groups respectively, so that the multiple excitation lights entering the excitation light beam combining mechanism are sequentially output through the same light output path after passing through the second reflector group and the first reflector group, and enter the Raman excitation collection unit; The stimulated light is separated from the excitation light and then transmitted to a spectrum detection unit, specifically including: Allowing the excitation light to enter the spectrum detection unit through the through hole; The stimulated light is made to enter the spectrum detection unit through the reflection area arranged around the through hole.

10. The Raman spectroscopy testing method according to claim 9, characterized in that: Specifically include: The stimulated light entering the spectrum detection unit is passed through a plurality of spectrometers in sequence, each of which has a spectroscopic effect, so that the signal spectrum is cascade-amplified by the plurality of spectrometers and then enters the detection mechanism to obtain a high-resolution spectrum and realize high-resolution mode detection; Alternatively, the multiple spectrometers are respectively defined as a first spectrometer, a second spectrometer and a third spectrometer, wherein the first spectrometer and the third spectrometer both have a light splitting effect, the second spectrometer has a light combining effect and can prevent the excitation light from passing through, and the stimulated light entering the spectral detection unit passes through the first spectrometer, the second spectrometer and the third spectrometer in sequence before entering the detection mechanism, thereby realizing low wavenumber mode detection.

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