A chip detection device and a detection method

Abstract

The present invention discloses a chip detection device and a detection method, belonging to the field of chip detection. A chip detection device and a detection method include a base and an electric push rod fixed in the middle of its inner cavity. A detection table is slidably connected to the top of the base. The electric push rod passes through the central hollow groove of the detection table, and the top outer wall of the telescopic end of the electric push rod is fixedly connected with a detection carrier plate. A detection probe is fixedly connected to the end of the detection carrier plate. In the present invention, by compressing the gas in the upper cavity of the compression piston, the flipping gear and the positioning rod are driven to rotate, so that the positioning ring flips one circle, and the other side of the chip can be electrically detected, realizing automatic double-sided detection and effectively improving the detection efficiency. By compressing the gas in the bottom cavity of the compression piston box, the adsorption rod is made to fit with the bottom of the chip, and the negative pressure generated inside is used to realize the adsorption and fixation of the bottom of the chip, improving the stability of the chip during the detection process.

Description

Technical Field

[0001] The present invention relates to the field of chip detection technology, and in particular to a chip detection device and a detection method. Background Art

[0002] Chip generally refers to the carrier of integrated circuits, and is also the result of integrated circuit design, manufacturing, packaging, and testing. It is usually an independent entity that can be used immediately. After the electronic chip equipment produces the electronic chip, it is necessary to conduct comprehensive tests and various current and voltage tests on the electronic chip. The common detection method is to use the detection probes drawn from the detection box to perform electrical detection on the chip, and observe the indicator lights and specific parameters on the detection box to determine whether the chip is qualified.

[0003] The patent with publication number "CN111948518A" is named as electronic chip detection device, including a chip storage mechanism, a rotating tray mechanism, a first driving mechanism, a detection accommodating mechanism, a chip detection mechanism, a chip ejection mechanism, a second driving mechanism, a hexagonal seat plate, a column and a base, the upper and lower ends of the column are respectively fixedly connected to the center of the hexagonal seat plate and the center of the base; the rotating tray mechanism is rotationally connected to the middle of the column; the second driving mechanism is fixedly connected to the base; the second driving mechanism is transmission-connected to the rotating tray mechanism; six detection accommodating mechanisms are evenly arranged on the rotating tray mechanism; the present invention can realize the placement of electronic chips, the detection of electronic chips and the ejection of electronic chips after detection. The invention has more accurate detection accuracy for electronic chips and higher detection efficiency.

[0004] With regard to the above patent, there are still the following shortcomings: in the actual detection process, both sides of a part of the chips need to be detected, while the above device can only realize single-sided detection each time, and the chip needs to be turned over and tested again later, which increases mechanical and labor consumption and reduces detection efficiency; and the surface pins of the chip may be attached to a certain amount of dust during the production and transportation process, which will reduce the contact effect of the detection probe, causing local poor contact and affecting the final detection result. Therefore, a chip detection device and detection method are proposed. Summary of the invention

[0005] The purpose of the present invention is to solve the problem that the prior art cannot automatically realize double-sided chip detection, resulting in low detection efficiency; and the dust attached to the pins on the surface of the chip will reduce the contact effect of the detection probe and affect the final detection result. A chip detection device and detection method are proposed.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] A chip detection device includes a base and an electric push rod fixed in the middle of its inner cavity. A detection table is slidably connected to the top of the base. The electric push rod passes through the central hollow groove of the detection table, and the top outer wall of the telescopic end of the electric push rod is fixedly connected to a detection carrier plate. A detection probe is fixedly connected to the end of the detection carrier plate. It further includes: a positioning and adsorption mechanism arranged on the detection table for positioning and fixing the chip to be detected; a flipping detection component arranged on the detection table for flipping the detection chip to achieve double-sided detection.

[0008] To improve the detection stability, preferably, convex boxes are fixedly connected to both sides of the top of the detection table. Positioning rods are rotatably connected to the side walls of the convex boxes. Two groups of the positioning and adsorption mechanisms are symmetrically arranged along the center of the detection table. Each group of the positioning and adsorption mechanisms includes a positioning ring. The positioning ring is fixedly connected to the end of the positioning rod. A positioning groove is formed on the detection table below the positioning ring. Clamping grooves are formed around the inner wall of the positioning ring. A clamping slider is slidably connected in the clamping groove. A first spring is fixedly connected between the clamping slider and the inner wall of the clamping groove.

[0009] Further, a piston box is fixedly connected to the bottom of the inner cavity of the base. A first slide plate and a second slide plate are sequentially slidably connected in the piston box from top to bottom. A second spring is fixedly connected between the top of the first slide plate and the piston box. A third spring is fixedly connected between the bottom of the second slide plate and the piston box. A trigger rod is fixedly connected to the bottom of the detection carrier plate. The bottom end of the trigger rod penetrates through the first slide plate and extends above the second slide plate. A fixed sleeve is fixedly connected to the bottom of the inner cavity of the base. An adsorption rod is slidably connected in the fixed sleeve. An inflation pipe is communicated with the bottom of the side wall of the fixed sleeve. The other end of the inflation pipe is communicated with the bottom of the inner cavity of the piston box. An adsorption pipe is communicated with the top of the side wall of the fixed sleeve. The other end of the adsorption pipe is communicated with the cavity between the first slide plate and the second slide plate. An adsorption groove is formed inside the adsorption rod.

[0010] Further, the distance from the center of the bottom end of the adsorption groove to the center of the top end of the adsorption pipe is equal to the maximum distance that the adsorption rod slides upward. The maximum distance that the adsorption rod slides upward is equal to the distance from the top end of the adsorption rod to the clamping surface of the clamping slider.

[0011] To improve the detection effect, even further, the four clamping grooves are interconnected through a guide pipe. Blowing pipes are fixedly connected to both sides of the top of the positioning ring. The blowing pipes are connected to the guide pipe, and the output ends of the blowing pipes are arranged to incline downward.

[0012] To achieve double-sided detection, preferably, the flipping detection component includes a flipping gear sleeved and fixed on a positioning rod located inside the convex box. A driving rack is slidably connected to the inner wall of the convex box. The driving rack is meshed with the flipping gear, and the number of teeth of the driving rack is half of that of the flipping gear. Inflating cylinders are fixedly connected to both sides of the convex box. Both ends of the driving rack respectively penetrate and extend into the inflating cylinders on both sides, and piston push blocks are fixedly connected to both ends of the driving rack. The piston push blocks are in sliding fit with the inner walls of the inflating cylinders. An air vent ring is fixedly connected to the outer wall of the fixed end of the electric push rod. A communicating collar is rotatably connected to the middle of the outer wall of the air vent ring, and the communicating collar is communicated with the air vent ring. A first conduit is fixedly connected to the outer wall of the communicating collar. The other end of the first conduit is communicated with the inner cavity of the end of the inflating cylinder. And a second conduit is communicated with the first conduit. The other end of the second conduit is communicated with the inner cavity of the end of the inflating cylinder on the other side. Solenoid valves are arranged in both the first conduit and the second conduit. A third conduit is fixedly connected to the top of the piston box. The other end of the third conduit is communicated with the bottom of the inner cavity of the air vent ring.

[0013] Further, upper and lower pressing plates are respectively fixedly connected to the outer wall of the trigger rod located between the first slide plate and the second slide plate. A limiting strip is fixedly connected to the inner wall of the piston box located below the first slide plate, and a limiting guide rod penetrating through the first slide plate and the second slide plate is fixedly connected inside the piston box.

[0014] To improve the detection efficiency, preferably, a driven gear ring is fixedly connected to the bottom of the detection table. A servo motor is fixedly connected to the bottom of the inner cavity of the base. A driving gear is fixedly connected to the output shaft end of the servo motor. The driving gear is meshed with the driven gear ring.

[0015] Preferably, a limiting chute is opened at the top of the base. Limiting slide rods are fixedly arranged at equal intervals at the bottom of the detection table. The limiting slide rods are inserted into the limiting chute and are in sliding connection with it.

[0016] A chip detection method, the steps of the detection method are as follows:

[0017] S1. Clamp and fix the chip to be detected at the station to be detected;

[0018] S2. Detect the chip at the detection station and achieve positioning and adsorption of the bottom of the chip;

[0019] S3. Flip the chip after single-sided detection to achieve double-sided detection;

[0020] S4. Rotate the station to achieve synchronous feeding and discharging and detection.

[0021] Compared with the prior art, the present invention provides a chip detection device and a detection method, having the following beneficial effects:

[0022] 1. For the chip detection device, by compressing the gas in the upper cavity of the compression piston and adaptively filling this part of the gas into the inflatable cylinder through the first conduit or the second conduit, the flipping gear and the positioning rod are driven to rotate, so that the positioning ring flips one circle, and thus the other side of the chip can be electrically detected, realizing automatic double-sided detection and effectively improving the detection efficiency.

[0023] 2. For the chip detection device, through the setting of the clamping groove, the clamping slider and the first spring, the clamping and positioning of the chip are realized, improving the stability of the chip during movement and detection. And in cooperation with the setting of the air duct and the dust blowing pipe, the floating dust on the surface of the chip is cleaned, ensuring good contact between the detection probe and the pins on the surface of the chip and improving the detection effect.

[0024] 3. For the chip detection device, by compressing the gas in the bottom cavity of the compression piston box and making this part of the gas act on the fixed sleeve and the adsorption rod, the adsorption rod is pushed upward to fit with the bottom of the chip, and by using the negative pressure generated in the piston box, the adsorption and fixation of the bottom of the chip are realized, making the chip more stably fixed on the positioning ring and further improving the stability of the chip during detection.

[0025] 4. For the chip detection device, the servo motor drives the detection table to rotate back and forth by 180°, so as to realize the rotation of the detection station and the station to be detected, and synchronously realize the detection and the loading and unloading processes of the chip, effectively improving the detection efficiency of the chip. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 is the schematic diagram of the overall front view structure of a chip detection device proposed by the present invention;

[0027] Figure 2 is the schematic diagram of the partial cross-sectional top view structure of a chip detection device proposed by the present invention;

[0028] Figure 3 is the schematic diagram of the internal structure of the positioning ring of a chip detection device proposed by the present invention;

[0029] Figure 4 is the schematic diagram of the internal structure of the base of a chip detection device proposed by the present invention;

[0030] Figure 5 is the schematic diagram of the internal structure of the convex box of a chip detection device proposed by the present invention;

[0031] Figure 6 is of a chip detection device proposed by the present invention Figure 5Schematic diagram of a partially enlarged structure;

[0032] Figure 7 Schematic diagram of a side - half - section structure of a chip detection device proposed by the present invention;

[0033] Figure 8 A chip detection device proposed by the present invention Figure 7 Schematic diagram of a partially enlarged structure;

[0034] Figure 9 A chip detection device proposed by the present invention Figure 8 Schematic diagram of an enlarged structure of area A in the middle.

[0035] In the figure: 1. Base; 2. Electric push rod; 21. Detection carrier plate; 22. Detection probe; 23. Trigger rod; 231. Upper pressure plate; 232. Lower pressure plate; 3. Detection table; 31. Convex box; 32. Positioning rod; 33. Driven gear ring; 4. Positioning and adsorption mechanism; 41. Positioning ring; 411. Blowing pipe; 42. Positioning groove; 43. Clamping groove; 431. Air duct; 44. Clamping slider; 45. First spring; 46. Fixed sleeve; 461. Inflation pipe; 462. Adsorption pipe; 47. Adsorption rod; 471. Adsorption groove; 5. Flip - detection assembly; 51. Flip gear; 52. Driving rack; 521. Piston push block; 53. Inflation cylinder; 54. Ventilation ring; 541. Third conduit; 55. Connecting collar; 551. First conduit; 552. Second conduit; 6. Piston box; 61. First slide plate; 611. Second spring; 62. Second slide plate; 621. Third spring; 63. Limit clamping strip; 64. Limit guide rod; 7. Servo motor; 71. Driving gear; 8. Limit sliding groove; 81. Limit sliding rod. Detailed implementation manners

[0036] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments.

[0037] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention.

[0038] Embodiment 1:

[0039] Refer to Figures 1-9, a chip detection device, including a base 1 and an electric push rod 2 fixed in the middle of its inner cavity. A detection table 3 is slidably connected to the top of the base 1. A driven gear ring 33 is fixedly connected to the bottom of the detection table 3. A servo motor 7 is fixedly connected to the bottom of the inner cavity of the base 1. A driving gear 71 is fixedly connected to the output shaft end of the servo motor 7. The driving gear 71 is meshed with the driven gear ring 33. A limiting chute 8 is opened at the top of the base 1. Limiting slide rods 81 are fixedly arranged at equal intervals at the bottom of the detection table 3. The limiting slide rods 81 are inserted into the limiting chute 8 and slidably connected thereto. The electric push rod 2 passes through the central hollow groove of the detection table 3. And the top outer wall of the telescopic end of the electric push rod 2 is fixedly connected with a detection carrier plate 21. A detection probe 22 is fixedly connected to the end of the detection carrier plate 21. The detection probe 22 is electrically connected to an existing detection box, so as to transmit the detection result into the detection box and display it. This belongs to the scope of the existing technology. It further includes: a positioning and adsorption mechanism 4, which is arranged on the detection table 3 and is used for positioning and fixing the chip to be detected; a flipping and detection component 5, which is arranged on the detection table 3 and is used for turning over the detected chip to realize double-sided detection.

[0040] Through the setting of the above structure, the servo motor 7 drives the detection table 3 to rotate 180 degrees back and forth, so as to realize the rotation of the detection station and the station to be detected, and synchronously realize the detection and loading and unloading processes of the chip, effectively improving the detection efficiency of the chip; through the setting of the positioning and adsorption mechanism 4, the stability of the chip during movement and detection is effectively improved, ensuring the detection efficiency; and through the setting of the flipping and detection component 5, the chip is flipped, and double-sided detection is automatically realized, effectively improving the detection efficiency.

[0041] Refer to Figures 1-3 and Figure 8 , wherein, convex boxes 31 are fixedly connected to both sides of the top of the detection table 3. Positioning rods 32 are rotatably connected to the side walls of the convex boxes 31. Two groups of positioning and adsorption mechanisms 4 are symmetrically arranged along the center of the detection table 3. And each group of positioning and adsorption mechanisms 4 includes a positioning ring 41. The positioning ring 41 is fixedly connected to the end of the positioning rod 32. And a positioning groove 42 is opened on the detection table 3 below the positioning ring 41. Clamping grooves 43 are opened around the inner wall of the positioning ring 41. Clamping sliders 44 are slidably connected in the clamping grooves 43. A first spring 45 is fixedly connected between the clamping slider 44 and the inner wall of the clamping groove 43. The four clamping grooves 43 are interconnected through an air duct 431. Blowing pipes 411 are fixedly connected to both sides of the top of the positioning ring 41. The blowing pipes 411 are connected to the air duct 431. And the output ends of the blowing pipes 411 are arranged to incline downward;

[0042] With the above structure set, the chip to be detected is placed into the positioning ring 41 at the detection station manually or by a manipulator, and the chip is pressed downwards so that its side wall squeezes the clamping sliders 44 around, causing the clamping sliders 44 to retract into the clamping grooves 43 until the chip moves to the clamping surface at the bottom of the clamping sliders 44. At this time, due to the rebound of the first spring 45, the clamping sliders 44 around position and clamp the chip, ensuring the stability of the chip during subsequent rotation stations and the detection process; and during the retraction of the clamping sliders 44 into the clamping grooves 43, the air flow in the clamping grooves 43 will be compressed, causing this part of the air flow to flow from the blow-off pipe 411 to the chip surface along the air guide pipe 431, thereby removing the floating dust attached to the chip surface, improving the cleanliness of the chip surface, avoiding obstacles to the electrical detection of the detection probe 22 subsequently, and ensuring the detection effect.

[0043] Refer to Figure 4 , Figure 5 , Figure 7 and Figure 8 , in which, a piston box 6 is fixedly connected to the bottom of the inner cavity of the base 1. A first sliding plate 61 and a second sliding plate 62 are sequentially and slidably connected in the piston box 6 from top to bottom. A second spring 611 is fixedly connected between the top of the first sliding plate 61 and the piston box 6. A third spring 621 is fixedly connected between the bottom of the second sliding plate 62 and the piston box 6. A trigger rod 23 is fixedly connected to the bottom of the detection carrier plate 21. The bottom end of the trigger rod 23 penetrates through the first sliding plate 61 and extends above the second sliding plate 62. A fixed sleeve 46 is fixedly connected to the bottom of the inner cavity of the base 1. An adsorption rod 47 is slidably connected in the fixed sleeve 46. An air charging pipe 461 communicates with the bottom of the side wall of the fixed sleeve 46. The other end of the air charging pipe 461 communicates with the bottom of the inner cavity of the piston box 6. An adsorption pipe 462 communicates with the top of the side wall of the fixed sleeve 46. The other end of the adsorption pipe 462 communicates with the cavity between the first sliding plate 61 and the second sliding plate 62. An adsorption groove 471 is formed inside the adsorption rod 47. The distance from the center of the bottom end of the adsorption groove 471 to the center of the top end of the adsorption pipe 462 is equal to the maximum distance of the upward sliding of the adsorption rod 47. The maximum distance of the upward sliding of the adsorption rod 47 is equal to the distance from the top end of the adsorption rod 47 to the clamping surface of the clamping slider 44;

[0044] Through the setting of the above structure, during the process of detecting the downward movement of the carrier plate 21, the trigger rod 23 provided at its bottom will push the second slide plate 62 downward, thereby compressing the gas in the bottom cavity of the piston box 6 and causing this part of the gas to enter the fixed sleeve 46 along the air filling pipe 461, so as to push the adsorption rod 47 upward. When the adsorption rod 47 moves upward to the maximum distance, its top just fits against the bottom of the chip in the positioning ring 41. When the top of the adsorption rod 47 is about to fit against the bottom of the chip, the adsorption groove 471 and the adsorption pipe 462 will be connected first. At this time, due to the downward movement of the second slide plate 62, the cavity between the first slide plate 61 and the second slide plate 62 becomes larger, reducing the air pressure in this part of the cavity, so a suction force is generated. This suction force will be transmitted along the adsorption pipe 462 to the adsorption groove 471. At this time, a suction force will be generated at the bottom of the chip first to clean the floating dust at the bottom of the chip. Subsequently, the top of the adsorption rod 47 will fit against the bottom of the chip in a short time. At this time, there is still a suction force in the adsorption groove 471, and this suction force will make the chip more stably fixed in the positioning ring 41, improving the stability of the chip during the detection process.

[0045] Refer to Figure 1 , Figure 5 , Figure 6 and Figure 9, wherein, the flipping detection component 5 includes a flipping gear 51, the flipping gear 51 is sleeved and fixed on a positioning rod 32 located inside the convex box 31, a driving rack 52 is slidably connected to the inner wall of the convex box 31, the driving rack 52 is meshed with the flipping gear 51, and the number of teeth of the driving rack 52 is half of that of the flipping gear 51. Inflating cylinders 53 are fixedly connected to both sides of the convex box 31. Both ends of the driving rack 52 respectively penetrate and extend into the inflating cylinders 53 on both sides, and piston push blocks 521 are fixedly connected to both ends of the driving rack 52. The piston push blocks 521 are in sliding fit with the inner walls of the inflating cylinders 53. The outer wall of the fixed end of the electric push rod 2 is fixedly connected with a ventilation ring 54. A communicating collar 55 is rotatably connected to the middle of the outer wall of the ventilation ring 54, and the communicating collar 55 is communicated with the ventilation ring 54. A first conduit 551 is fixedly connected to the outer wall of the communicating collar 55. The other end of the first conduit 551 is communicated with the inner cavity of the end of the inflating cylinder 53. A second conduit 552 is communicated with the first conduit 551. The other end of the second conduit 552 is communicated with the inner cavity of the end of the inflating cylinder 53 on the other side. Solenoid valves are arranged in both the first conduit 551 and the second conduit 552. The solenoid valve in the first conduit 551 is arranged between the second conduit 552 and the inflating cylinder 53. Therefore, when the solenoid valve in the first conduit 551 is opened and the solenoid valve in the second conduit 552 is closed, gas will enter the inflating cylinder 53 connected thereto from the first conduit 551. When the solenoid valve in the first conduit 551 is closed and the solenoid valve in the second conduit 552 is opened, gas will enter the inflating cylinder 53 on the other side from the second conduit 552, thereby realizing inflation switching. A third conduit 541 is fixedly connected to the top of the piston box 6. The other end of the third conduit 541 is communicated with the bottom of the inner cavity of the ventilation ring 54. Upper pressing plates 231 and lower pressing plates 232 are respectively fixedly connected to the outer walls of the trigger rod 23 located between the first slide plate 61 and the second slide plate 62. A limiting strip 63 is fixedly connected to the inner wall of the piston box 6 below the first slide plate 61. A limiting guide rod 64 penetrating through the first slide plate 61 and the second slide plate 62 is fixedly connected to the piston box 6;

[0046] Through the setting of the above structure, after the detection carrier plate 21 is reset, the electric push rod 2 drives it to move upward, and at the same time, the electromagnetic valve in the second conduit 552 near the detection probe 22 is opened (when flipping again, the electromagnetic valve in the first conduit 551 is opened). At this time, the upper pressure plate 231 on the trigger rod 23 will pull the first slide plate 61 upward, thereby compressing the gas in the upper cavity of the piston box 6 and causing this part of the gas to enter the ventilation ring 54 along the third conduit 541, and then enter the inflator 53 through the connecting collar 55, part of the first conduit 551 and the second conduit 552, so as to push the piston push block 521 and the driving rack 52 in the inflator 53 to move, thereby driving the flipping gear 51 and the positioning rod 32 to rotate 180 degrees, making the positioning ring 41 flip one circle, so as to electrically detect the other side of the chip, realizing automatic double-sided detection and effectively improving the detection efficiency.

[0047] Referring to Figures 1-9 , in the present invention, when in use, the chip to be detected is placed in the positioning ring 41 at the detection station by manual or manipulator, and the chip is pressed downward so that its side wall squeezes the surrounding clamping sliders 44, causing the clamping sliders 44 to retract into the clamping grooves 43 until the chip moves to the clamping surface at the bottom of the clamping sliders 44. At this time, due to the rebounding action of the first spring 45, the surrounding clamping sliders 44 clamp and position the chip, ensuring the stability of the chip during subsequent rotating stations and detection processes; and during the process of the clamping sliders 44 retracting into the clamping grooves 43, the airflow in the clamping grooves 43 will be compressed, causing this part of the airflow to flow from the air blowing pipe 411 to the chip surface along the air guide pipe 431, so as to remove the floating dust attached to the chip surface, improving the cleanliness of the chip surface, avoiding obstacles to the electrical detection of the detection probe 22, and ensuring the detection effect;

[0048] Turn on the servo motor 7. Through the meshing relationship between the driving gear 71 and the driven gear ring 33, drive the detection table 3 to rotate forward by 180 degrees. At this time, the to-be-detected station and the detection station are rotated, and the fixed chip will also move to the detection station below the detection probe 22. At this time, the electric push rod 2 drives the detection carrier plate 21 and the detection probe 22 to move downward until the bottom end of the detection probe 22 touches the chip pin and then stops. Then, the electrical detection of the chip can be carried out randomly. During the downward movement of the detection carrier plate 21, the trigger rod 23 provided at its bottom will push the second slide plate 62 downward, thereby compressing the gas in the bottom cavity of the piston box 6 and causing this part of the gas to enter the fixed sleeve 46 along the charging pipe 461, thereby pushing the adsorption rod 47 upward. When the adsorption rod 47 moves upward to the maximum distance, its top just fits with the bottom of the chip in the positioning ring 41. When the top of the adsorption rod 47 is about to fit with the bottom of the chip, the adsorption groove 471 and the adsorption pipe 462 will be connected first. At this time, due to the downward movement of the second slide plate 62, the cavity between the first slide plate 61 and the second slide plate 62 becomes larger, reducing the air pressure in this part of the cavity, so a suction force is generated. This suction force will be transmitted along the adsorption pipe 462 to the adsorption groove 471. At this time, a suction force will be generated at the bottom of the chip first to clean the floating dust at the bottom of the chip, ensuring the contact effect of the detection probe 22. Subsequently, the top of the adsorption rod 47 will fit with the bottom of the chip in a short time. At this time, there is still a suction force in the adsorption groove 471, and this suction force will make the chip more stably fixed in the positioning ring 41, further improving the stability of the chip during the detection process;

[0049] After the detection is completed, the electric push rod 2 drives the detection carrier plate 21 and the detection probe 22 to reset upward to the initial height. At this time, the second slide plate 62 will also reset under the elastic return of the third spring 621, so that the gas charged into the fixed sleeve 46 will return to the piston box 6 again, and thus the positioning effect of the adsorption rod 47 on the chip is released, causing the adsorption rod 47 to retract into the base 1. At this time, the electric push rod 2 drives the detection carrier plate 21 to extend upward, and at the same time, the solenoid valve in the second conduit 552 near the detection probe 22 is opened. At this time, the upper pressure plate 231 on the trigger rod 23 will pull the first slide plate 61 upward, thereby compressing the gas in the upper cavity of the piston box 6, and making this part of the gas enter the ventilation ring 54 along the third conduit 541, and then enter the inflatable cylinder 53 through the connecting collar 55, part of the first conduit 551 and the second conduit 552, so as to push the piston push block 521 and the drive rack 52 in the inflatable cylinder 53 to move, thereby driving the flip gear 51 and the positioning rod 32 to rotate 180 degrees, so that the positioning ring 41 flips one circle, so as to perform electrical detection on the other side of the chip, realizing double-sided detection and effectively improving the detection efficiency; after double-sided detection of the chip is completed, the servo motor 7 is turned on to drive the detection table 3 to rotate 180 degrees in the reverse direction, so that the detection station and the to-be-detected station rotate. At this time, the newly fixed to-be-detected chip will move to the detection station below the detection probe 22 again, and the detected chip will move to the to-be-detected station. At this time, the detection station continues to perform new detection, and the chip loading and unloading work is carried out at the to-be-detected station, so as to synchronously realize the detection and loading and unloading processes of the chip, effectively improving the detection efficiency of the chip.

[0050] Embodiment 2:

[0051] Basically the same as Embodiment 1, on the basis of Embodiment 1, a chip detection method is proposed;

[0052] Referring to Figures 1-9 , a chip detection method, the steps of the detection method are as follows:

[0053] S1. Clamp and fix the to-be-detected chip at the to-be-detected station;

[0054] The chip to be detected is placed into the positioning ring 41 at the detection station manually or by a manipulator, and the chip is pressed downward so that its side wall squeezes the clamping sliders 44 around it, causing the clamping sliders 44 to retract into the clamping grooves 43 until the chip moves to the clamping surface at the bottom of the clamping sliders 44. At this time, due to the rebounding effect of the first spring 45, the clamping sliders 44 around clamp and position the chip, ensuring the stability of the chip during subsequent rotation stations and the detection process. And during the retraction of the clamping sliders 44 into the clamping grooves 43, the air flow in the clamping grooves 43 will be compressed, causing this part of the air flow to flow from the air blowing pipe 411 to the chip surface along the air guide pipe 431, thereby removing the floating dust attached to the chip surface, improving the cleanliness of the chip surface, avoiding obstacles to the electrical detection of the detection probe 22 later, and ensuring the detection effect.

[0055] S2. Detect the chip at the detection station and achieve positioning and adsorption of the bottom of the chip.

[0056] Turn on the servo motor 7, and through the meshing relationship between the driving gear 71 and the driven gear ring 33, drive the detection table 3 to rotate forward by 180 degrees. At this time, the detection station to be detected and the detection station are rotated, and the fixed chip will also move to the detection station under the detection probe 22. At this time, the electric push rod 2 drives the detection carrier plate 21 and the detection probe 22 to move downward until the bottom end of the detection probe 22 touches the chip pin and then stops. Then the chip can be electrically detected. During the downward movement of the detection carrier plate 21, the trigger rod 23 provided at its bottom will push the second slide plate 62 downward, thereby compressing the gas in the bottom cavity of the piston box 6 and causing this part of the gas to enter the fixed sleeve 46 along the air charging pipe 461, thereby pushing the adsorption rod 47 upward. When the adsorption rod 47 moves upward to the maximum distance, its top just fits the bottom of the chip in the positioning ring 41. When the top of the adsorption rod 47 is about to fit the bottom of the chip, the adsorption groove 471 and the adsorption pipe 462 will be connected first. At this time, due to the downward movement of the second slide plate 62, the cavity between the first slide plate 61 and the second slide plate 62 becomes larger, reducing the air pressure in this part of the cavity, so a suction force is generated. This suction force will be transmitted to the adsorption groove 471 along the adsorption pipe 462. At this time, a suction force will first be generated at the bottom of the chip to clean the floating dust at the bottom of the chip, ensuring the contact effect of the detection probe 22. Subsequently, the top of the adsorption rod 47 will fit the bottom of the chip in a short time. At this time, there is still a suction force in the adsorption groove 471, and this suction force will make the chip more stably fixed in the positioning ring 41, further improving the stability of the chip during the detection process.

[0057] S3. After one-sided detection of the chip, flip it to achieve double-sided detection.

[0058] After the detection is completed, the electric push rod 2 drives the detection carrier plate 21 and the detection probe 22 to reset upward to the initial height. At this time, the second slide plate 62 will also reset under the elastic return of the third spring 621, so that the gas filled into the fixed sleeve 46 will return to the piston box 6 again, and the positioning effect of the adsorption rod 47 on the chip is released, so that the adsorption rod 47 retracts into the base 1. At this time, the electric push rod 2 drives the detection carrier plate 21 to extend upward, and at the same time, the solenoid valve in the second conduit 552 near the detection probe 22 is opened. At this time, the upper pressure plate 231 on the trigger rod 23 will pull the first slide plate 61 upward, so as to compress the gas in the upper cavity of the piston box 6, and make this part of the gas enter the ventilation ring 54 along the third conduit 541, and then enter the inflator 53 through the connecting collar 55, part of the first conduit 551 and the second conduit 552, so as to push the piston push block 521 and the driving rack 52 in the inflator 53 to move, thereby driving the turning gear 51 and the positioning rod 32 to rotate 180 degrees, so that the positioning ring 41 turns one circle, so as to perform electrical detection on the other side of the chip, realize double-sided detection, and effectively improve the detection efficiency;

[0059] S4. Rotating workstations to realize the synchronous progress of loading / unloading and detection;

[0060] After the double-sided detection of the chip is completed, the servo motor 7 is started to drive the detection table 3 to rotate 180 degrees in the reverse direction, so that the detection workstation and the to-be-detected workstation rotate. At this time, the newly fixed to-be-detected chip will move to the detection workstation below the detection probe 22 again, and the detected chip will move to the to-be-detected workstation. At this time, the detection workstation continues to perform new detection, and the loading / unloading work of the chip is carried out at the to-be-detected workstation, so as to synchronously realize the detection and loading / unloading processes of the chip, and effectively improve the detection efficiency of the chip.

[0061] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, makes equivalent substitutions or changes, and should be covered by the protection scope of the present invention.

Claims

1. A chip detection device, comprising a base (1) and an electric push rod (2) fixed in the middle of its inner cavity, characterized in that, A detection table (3) is slidably connected to the top of the base (1). The electric push rod (2) passes through the central hollow groove of the detection table (3), and the top outer wall of the telescopic end of the electric push rod (2) is fixedly connected to a detection carrier plate (21). A detection probe (22) is fixedly connected to the end of the detection carrier plate (21). Further included are: A positioning and adsorption mechanism (4) which is arranged on the detection table (3) and is used for positioning and fixing the chip to be detected; A flipping detection component (5) which is arranged on the detection table (3) and is used for flipping the detection chip to realize double-sided detection; Convex boxes (31) are fixedly connected to both sides of the top of the detection table (3). Positioning rods (32) are rotatably connected to the side walls of the convex boxes (31). Two groups of the positioning and adsorption mechanisms (4) are symmetrically arranged along the center of the detection table (3). Each group of the positioning and adsorption mechanisms (4) includes a positioning ring (41). The positioning ring (41) is fixedly connected to the end of the positioning rod (32). A positioning groove (42) is formed in the detection table (3) below the positioning ring (41). Clamping grooves (43) are formed in the four circumferences of the inner wall of the positioning ring (41). Clamping sliders (44) are slidably connected in the clamping grooves (43). A first spring (45) is fixedly connected between the clamping slider (44) and the inner wall of the clamping groove (43); A piston box (6) is fixedly connected to the bottom of the inner cavity of the base (1). A first slide plate (61) and a second slide plate (62) are sequentially slidably connected in the piston box (6) from top to bottom. A second spring (611) is fixedly connected between the top of the first slide plate (61) and the piston box (6). A third spring (621) is fixedly connected between the bottom of the second slide plate (62) and the piston box (6). A trigger rod (23) is fixedly connected to the bottom of the detection carrier plate (21). The bottom end of the trigger rod (23) penetrates through the first slide plate (61) and extends above the second slide plate (62). A fixed sleeve (46) is fixedly connected to the bottom of the inner cavity of the base (1). An adsorption rod (47) is slidably connected in the fixed sleeve (46). An air charging pipe (461) communicates with the bottom of the side wall of the fixed sleeve (46). The other end of the air charging pipe (461) communicates with the bottom of the inner cavity of the piston box (6). An adsorption pipe (462) communicates with the top of the side wall of the fixed sleeve (46). The other end of the adsorption pipe (462) communicates with the cavity between the first slide plate (61) and the second slide plate (62). An adsorption groove (471) is formed inside the adsorption rod (47).

2. The chip detection device according to claim 1, wherein The distance from the center of the bottom end of the adsorption groove (471) to the center of the top end of the adsorption pipe (462) is equal to the maximum distance that the adsorption rod (47) slides upward. The maximum distance that the adsorption rod (47) slides upward is equal to the distance from the top end of the adsorption rod (47) to the clamping surface of the clamping slider (44).

3. A chip detection device according to claim 1, characterized in that, The four groups of the clamping grooves (43) are interconnected through an air guide pipe (431). Both sides of the top of the positioning ring (41) are fixedly connected with soot blowing pipes (411). The soot blowing pipes (411) are communicated with the air guide pipe (431), and the output ends of the soot blowing pipes (411) are arranged to incline downward.

4. A chip detection device according to claim 1, characterized in that, The flipping detection component (5) includes a flipping gear (51). The flipping gear (51) is sleeved and fixed on a positioning rod (32) located in the convex box (31). A driving rack (52) is slidably connected to the inner wall of the convex box (31). The driving rack (52) is meshed with the flipping gear (51), and the number of teeth of the driving rack (52) is half of that of the flipping gear (51). Inflating cylinders (53) are fixedly connected to both sides of the convex box (31). The two ends of the driving rack (52) respectively penetrate and extend into the inflating cylinders (53) on both sides, and piston push blocks (521) are fixedly connected to both ends of the driving rack (52). The piston push blocks (521) are in sliding fit with the inner walls of the inflating cylinders (53). An air vent ring (54) is fixedly connected to the outer wall of the fixed end of the electric push rod (2). A communicating collar (55) is rotatably connected to the middle of the outer wall of the air vent ring (54), and the communicating collar (55) is communicated with the air vent ring (54). A first conduit (551) is fixedly connected to the outer wall of the communicating collar (55). The other end of the first conduit (551) is communicated with the inner cavity of the end of the inflating cylinder (53). A second conduit (552) is communicated with the first conduit (551). The other end of the second conduit (552) is communicated with the inner cavity of the end of the inflating cylinder (53) on the other side. Solenoid valves are arranged in both the first conduit (551) and the second conduit (552). A third conduit (541) is fixedly connected to the top of the piston box (6). The other end of the third conduit (541) is communicated with the bottom of the inner cavity of the air vent ring (54).

5. A chip detection device according to claim 4, characterized in that, Upper and lower pressing plates (231) and (232) are respectively fixedly connected to the outer wall of the trigger rod (23) located between the first sliding plate (61) and the second sliding plate (62). A limiting clamping strip (63) is fixedly connected to the inner wall of the piston box (6) located below the first sliding plate (61), and a limiting guide rod (64) penetrating through the first sliding plate (61) and the second sliding plate (62) is fixedly connected in the piston box (6).

6. The chip detection device according to claim 1, wherein, A driven gear ring (33) is fixedly connected to the bottom of the detection table (3). A servo motor (7) is fixedly connected to the bottom of the inner cavity of the base (1). A driving gear (71) is fixedly connected to the output shaft end of the servo motor (7). The driving gear (71) is meshed with the driven gear ring (33).

7. The chip detection device according to claim 1, characterized in that, A limiting sliding groove (8) is formed in the top of the base (1). Limiting sliding rods (81) are fixedly arranged at equal intervals at the bottom of the detection table (3). The limiting sliding rods (81) are inserted into the limiting sliding groove (8) and are in sliding connection with it.

8. A chip detection method, based on the chip detection device according to any one of claims 1-7, characterized in that, The detection method steps are as follows: S1. Clamp and fix the chip to be detected at the detection station. S2. Detect the chip at the detection station and achieve positioning and adsorption of the bottom of the chip; S3. Flip the chip after single-sided detection to achieve double-sided detection; S4. Rotating station to achieve simultaneous feeding and discharging and detection.

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