Thin film magnesium battery magnesium-aluminum-cobalt cathode target, method of making and thin film magnesium battery
By precisely controlling the proportion of raw materials and process parameters, a magnesium aluminum cobalt oxide cathode target for thin-film magnesium batteries was prepared, solving the practical preparation problem of all-solid-state thin-film magnesium batteries and realizing a high-safety and high-capacity all-solid-state thin-film magnesium battery.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-02-22
- Publication Date
- 2026-03-17
AI Technical Summary
Current technologies have not yet provided the fabrication techniques for the composition and functional structure of all-solid-state thin-film magnesium batteries, which has resulted in their research remaining only at the theoretical stage and lacking practical applications.
Magnesium aluminum cobalt oxide cathode target for thin-film magnesium batteries is prepared by mixing magnesium salt powder, cobalt tetroxide and aluminum oxide powder, ball milling with zirconium oxide balls and dispersant, adding binder, sieving and pressing, and then multi-stage heat preservation and cooling in an atmosphere or vacuum sintering furnace.
The prepared thin-film magnesium battery aluminum cobalt oxide magnesium cathode target has uniform composition and consistent grain size, exhibiting high safety and high capacity. It is also easy to combine multiple batteries to achieve high safety and high capacity retention.
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Figure CN118530006B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of magnesium battery technology, and in particular to a thin-film magnesium battery aluminum cobalt magnesium cathode target, its preparation method, and a thin-film magnesium battery. Background Technology
[0002] Currently, theoretical research on all-solid-state thin-film magnesium batteries has begun. All-solid-state thin-film magnesium batteries utilize solid-state materials for all cell units, including the positive and negative electrodes and the electrolyte. Their structure is simpler than traditional magnesium-ion batteries. The solid electrolyte not only conducts magnesium ions but also acts as a separator, possessing advantages such as high mechanical strength, absence of liquid components, lack of flammable and volatile components, and good temperature resistance. However, research on all-solid-state thin-film magnesium batteries remains theoretical; no technology has yet been developed to provide the actual fabrication techniques and finished products that demonstrate the composition and functional structure of all-solid-state thin-film magnesium batteries. Summary of the Invention
[0003] In view of the above, the present invention aims to provide a preparation technology and application of a magnesium aluminum cobalt oxide cathode target for thin-film magnesium batteries. The present invention can provide a magnesium aluminum cobalt oxide cathode target for all-solid-state thin-film magnesium batteries.
[0004] The objective of this invention is mainly achieved through the following technical solutions:
[0005] On one hand, the present invention provides a method for preparing a magnesium aluminum cobalt oxide cathode target for thin-film magnesium batteries, comprising:
[0006] Step 1: Mix magnesium salt powder with cobalt tetroxide and aluminum oxide powder to obtain a mixed powder, controlling the mass ratio of magnesium salt, cobalt tetroxide and aluminum oxide to be 1.1-1.4:0.8-1:0.05-0.15;
[0007] Step 2: Place the above mixed powder into a ball mill jar and mix it with zirconia balls, then add a dispersant and continue mixing and ball milling;
[0008] Step 3: Then add binder into the ball mill jar and continue ball milling;
[0009] Step 4: After ball milling, the synthetic powder is passed through a 500-mesh sieve. The sieved synthetic powder is poured into a vibrating mold and pressed to form a molded blank.
[0010] Step 5: Place the billet into a cold isostatic press, apply pressure and hold pressure to obtain the cold isostatically pressed aluminum magnesium cobalt oxide cathode target billet.
[0011] Step 6: Place the aluminum magnesium cobalt oxide cathode target blank into an atmosphere sintering furnace or a vacuum sintering furnace, and after multi-stage heat preservation and multi-stage cooling, allow it to cool naturally to room temperature with the furnace to obtain the aluminum magnesium cobalt oxide cathode target for thin-film magnesium batteries.
[0012] Furthermore, step 6, the step of using an atmosphere sintering furnace, includes:
[0013] S601. Place the aluminum magnesium cobalt oxide cathode target blank into an atmosphere sintering furnace, continuously introduce N2+Ar mixed gas, raise the temperature from room temperature to 210-230℃, and hold for 4-5 hours.
[0014] S602, heat up again to 740-760℃, and continuously purge with N2+Ar mixed gas, and keep at this temperature for 7-9 hours;
[0015] S603, heat up again to 1030~1060℃, and continuously purge N2+Ar mixed gas, and keep at this temperature for 9~11h;
[0016] S604, heat up again to 1330~1360℃, and keep N2+Ar mixed gas flowing through it continuously for 7~9h;
[0017] S605, heat up again to 1530~1560℃, and continuously purge N2+Ar mixed gas, and keep at this temperature for 7~9h;
[0018] S606, slowly cool to 490-510℃ in the furnace, and hold for 2-4 hours;
[0019] S607, and then naturally cooled to room temperature in the furnace to obtain the aluminum magnesium cobalt oxide cathode target for thin-film magnesium batteries.
[0020] Furthermore, step 6, which involves using a vacuum sintering furnace, includes:
[0021] S601. Place the aluminum magnesium cobalt oxide cathode target blank into a vacuum sintering furnace, maintaining a vacuum level of 10. -3 Below Pa, the temperature is raised from room temperature to 210-230℃ and held for 4-5 hours;
[0022] S602, raise the temperature again to 740-760℃ and keep it warm for 7-9 hours;
[0023] S603, heat again to 1030~1060℃, and hold for 9~11 hours;
[0024] S604, heat again to 1330~1360℃, and keep warm for 9~11 hours;
[0025] S605, heat again to 1530~1560℃, and keep warm for 7~9 hours;
[0026] S606, slowly cool to 490-510℃ in the furnace, and hold for 2-4 hours;
[0027] S607, and then naturally cooled to room temperature in the furnace to obtain the aluminum magnesium cobalt oxide cathode target for thin-film magnesium batteries.
[0028] Furthermore, in step 4, the pressure is controlled at 1550-1650 tons.
[0029] Furthermore, in step 5, the pressure is controlled to be increased to 300-350 MPa and held for 50-70 minutes.
[0030] Furthermore, in step 2, the ball milling process includes:
[0031] S201. Ball milling in a milling jar at an initial speed of 110-130 rpm for 3-5 hours;
[0032] S202. Grind the balls in a milling jar at a speed of 280-320 rpm for more than 10 hours.
[0033] Furthermore, in step 1, the magnesium salt includes one or more of magnesium oxide, magnesium carbonate, magnesium nitrate, and magnesium hydroxide.
[0034] Furthermore, in step 2, the mass ratio of dispersant to mixed powder is controlled to be 1.4 to 1.8:100.
[0035] The present invention also provides a thin-film magnesium aluminum cobalt oxide positive electrode target for a magnesium battery, which is prepared by the above-described preparation method.
[0036] The present invention also provides an all-solid-state thin-film magnesium battery, wherein the positive electrode of the all-solid-state thin-film magnesium battery is prepared using the above-mentioned aluminum magnesium cobalt oxide positive electrode target for thin-film magnesium batteries.
[0037] Compared with the prior art, the beneficial effects of the present invention are as follows:
[0038] 1) The preparation method of this invention first mixes magnesium salt powder with cobalt tetroxide and alumina powder to obtain a mixed powder. Then, the mixed powder is mixed with zirconia balls, followed by the addition of a dispersant and further mixing and ball milling. A binder is then added, and ball milling continues. The ball-milled synthetic powder is sieved (e.g., 500 mesh), poured into a vibrating mold, and pressed to form a molded blank. The blank is placed in a cold isostatic press and pressed and held to obtain a cold isostatically pressed magnesium aluminum cobalt oxide cathode target blank. Finally, the magnesium aluminum cobalt oxide cathode target blank is placed in an atmosphere sintering furnace or a vacuum sintering furnace for multi-stage heat preservation and cooling, followed by natural cooling to room temperature to obtain a thin-film magnesium battery magnesium aluminum cobalt oxide cathode target. This invention's preparation method ensures the successful preparation of a thin-film magnesium battery magnesium aluminum cobalt oxide cathode target by precisely controlling the proportions of raw materials, the order of addition of each raw material, the ball milling process parameters, the sintering steps, and the process parameters of each step.
[0039] 2) The aluminum magnesium cobalt oxide cathode target of the thin film magnesium battery of the present invention has a uniform composition, no segregation, good grain size consistency, controllable grain deviation, no single phase and defect components, no cracks in the target material, which facilitates thin film deposition.
[0040] 3) The positive electrode layer of the all-solid-state thin-film magnesium battery of the present invention is prepared using the magnesium aluminum cobalt oxide positive electrode target of the present invention. The all-solid-state thin-film magnesium battery of the present invention has high safety and extremely high capacity and capacity retention. In addition, the all-solid-state thin-film magnesium battery of the present invention also has excellent interfacial bonding and coordination, with very low interfacial internal resistance. It can easily realize the direct series connection of multiple single cells, the direct parallel connection of multiple single cells, and the series and parallel combination of multiple single cells, which conveniently achieves the goal of increasing the output voltage of the battery, increasing the single cell capacity of the battery pack, or achieving a perfect combination of voltage boosting and capacity expansion.
[0041] In this invention, the above-described technical solutions can be combined with each other to achieve more preferred combinations. Other features and advantages of this invention will be set forth in the following description, and some advantages may become apparent from the description or be learned by practicing the invention. The objectives and other advantages of this invention can be realized and obtained from what is particularly pointed out in the description. Attached Figure Description
[0042] The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of the invention.
[0043] Figure 1 This is a schematic diagram of the positive electrode target of Embodiment 1 of the present invention;
[0044] Figure 2 This is a schematic diagram of the positive electrode target material according to Embodiment 2 of the present invention;
[0045] Figure 3 This is a schematic diagram of the positive electrode target of Embodiment 3 of the present invention;
[0046] Figure 4 This is a schematic diagram of the positive electrode target of Comparative Example 2 of the present invention. Detailed Implementation
[0047] The preferred embodiments of the present invention are described in detail below, which are mainly used to explain the principles of the present invention and are not intended to limit the scope of the present invention.
[0048] This invention provides a method for preparing a magnesium aluminum cobalt oxide cathode target for thin-film magnesium batteries, comprising:
[0049] Step 1: Mix magnesium salt powder with cobalt tetroxide and aluminum oxide powder to obtain a mixed powder;
[0050] Step 2: Place the above mixed powder into a ball mill jar and mix it with zirconia balls, then add a dispersant and continue mixing and ball milling;
[0051] Step 3: Then add binder into the ball mill jar and continue ball milling;
[0052] Step 4: After ball milling, the synthetic powder is passed through a 500-mesh sieve. The sieved synthetic powder is weighed and then poured into a vibrating mold. Pressure is applied to form a molded blank.
[0053] Step 5: Place the billet into a cold isostatic press, apply pressure and hold pressure to obtain the cold isostatically pressed aluminum magnesium cobalt oxide cathode target billet.
[0054] Step 6: Place the aluminum magnesium cobalt oxide cathode target blank into an atmosphere sintering furnace or a vacuum sintering furnace, and after multi-stage heat preservation and multi-stage cooling, allow it to cool naturally to room temperature with the furnace to obtain the aluminum magnesium cobalt oxide cathode target for thin-film magnesium batteries.
[0055] Specifically, in step 1 above, the magnesium salt may include one or more of magnesium oxide, magnesium carbonate, magnesium nitrate, and magnesium hydroxide.
[0056] Specifically, in step 1 above, the mass ratio of magnesium salt, cobalt tetroxide and aluminum oxide is controlled to be 1.1-1.4:0.8-1:0.05-0.15.
[0057] Specifically, in step 2 above, to ensure uniform mixing of the powders and to control the particle size of the powders by adjusting the size of the zirconia balls, thus ensuring uniform grain size and crystal structure of the sintered magnesium aluminum cobalt oxide product, and to ensure that the powders are broken up and in close contact, reducing the chemical kinetic barrier during synthesis, the particle size of the zirconia balls is controlled to be 0.45 mm to 1.3 mm. When the particle size of the zirconia balls is outside this range, the particle size deviation of the mixed powder is large, the mixing is uneven, many elemental substances are present, and the sintered target material cannot be sputtered.
[0058] Specifically, in step 2 above, the grinding jar is a hard ceramic jar or a stainless steel jar lined with hard ceramic.
[0059] Specifically, in step 2 above, the total volume of the zirconia balls is controlled to be no more than 1 / 3 of the volume of the ball mill jar, and the total volume of the mixed powder is 1 / 5 to 2 / 5 of the volume of the ball mill jar. Preferably, the total volume of the mixed powder is 2 / 5 of the volume of the ball mill jar.
[0060] Specifically, in step 2 above, considering that too much dispersant would be wasteful, while too little dispersant would cause the powder to agglomerate and fail to mix and contact sufficiently, which would be detrimental to synthesis and sintering, the mass ratio of dispersant to mixed powder is controlled at 1.4–1.8:100.
[0061] Specifically, in step 2 above, the dispersant may include isopropanol and isotetracycline. Preferably, the mass ratio of isopropanol to isotetracycline is 1-3:4-6.
[0062] Specifically, in step 2 above, the ball milling process includes:
[0063] S201. Ball milling in the mill jar at an initial speed of 110-130 rpm for 3-5 hours;
[0064] S202. Grind the balls in a milling jar at a speed of 280-320 rpm for more than 10 hours.
[0065] Specifically, in step 2 above, the ball milling process first uses a lower rotation speed and then a higher rotation speed. This ensures that the powder is mixed evenly, facilitating subsequent synthesis reactions. Without using the appropriate ball milling parameters, the mixture will be uneven, containing many elemental substances, and the sintered target material will not be able to be sputtered.
[0066] Specifically, in step 3 above, polyvinyl butyral can be used as the binder. Too much binder will be wasteful, while too little binder will prevent the uniformly mixed raw material powder from fully contacting and rapidly participating in the chemical reaction during sintering. Therefore, the mass ratio of binder to mixed powder should be controlled at (0.5–1.0):100.
[0067] Specifically, in step 3 above, in order to ensure that the powder is mixed evenly, the ball mill speed is controlled at 165-180 rpm and the ball milling time is 5-7 hours.
[0068] Specifically, in step 4 above, to ensure the uniformity of grain size and crystal phase structure of the sintered magnesium aluminum cobalt oxide product, the synthetic powder is controlled to pass through a 500-mesh sieve. If this parameter is not within the specified range, the powder particle size will be dispersed, resulting in large voids in the target compact, preventing complete ceramization after sintering and hindering sputtering deposition.
[0069] Specifically, in step 4 above, considering that excessive pressure would place high demands on the equipment, while insufficient pressure would be ineffective, the pressure is controlled at 1550–1650 tons to form the molded blank.
[0070] Specifically, in step 5 above, considering that excessive pressure during the cold isostatic pressing process places high demands on the equipment, while insufficient pressure renders it ineffective, the pressure is controlled to be increased to 300–350 MPa and held for 50–70 minutes.
[0071] Specifically, step 6 above, which involves using an atmosphere sintering furnace, includes:
[0072] S601. Place the aluminum magnesium cobalt oxide cathode target blank into an atmosphere sintering furnace, continuously introduce N2+Ar mixed gas, raise the temperature from room temperature to 210-230℃, and hold for 4-5 hours; wherein, the volume ratio of N2 to Ar is 5-6:5.
[0073] S602, heat up again to 740-760℃, and continuously purge the N2+Ar mixed gas for 7-9 hours; wherein the volume ratio of N2 to Ar is 6-7:4.
[0074] S603, heat again to 1030-1060℃, and continuously purge N2+Ar mixed gas, and keep at this temperature for 9-11 hours; wherein the volume ratio of N2 to Ar is 6-7:4.
[0075] S604, heat again to 1330~1360℃, and continuously purge N2+Ar mixed gas, and keep at this temperature for 9~11h; wherein, the volume ratio of N2 to Ar is 5~6:5;
[0076] S605, heat again to 1530~1560℃, and continuously purge N2+Ar mixed gas for 7~9h; wherein, the volume ratio of N2 to Ar is 5~6:5;
[0077] S606, slowly cool to 490-510℃ in the furnace, and hold for 2-4 hours;
[0078] S607, and then naturally cooled to room temperature in the furnace to obtain the aluminum magnesium cobalt oxide cathode target for thin-film magnesium batteries.
[0079] Specifically, in S606 and S607 above, in order to ensure the uniformity of the microstructure of the obtained aluminum magnesium cobalt oxide cathode target, it is necessary to first slowly cool it to 490-510℃ in the furnace and hold it for 2-4 hours; then cool it naturally to room temperature in the furnace.
[0080] Specifically, step 6 above, which involves using a vacuum sintering furnace, includes:
[0081] S601. Place the aluminum magnesium cobalt oxide cathode target blank into a vacuum sintering furnace, maintaining a vacuum level of 10. -3 Below Pa, the temperature is raised from room temperature to 210-230℃ and held for 4-5 hours;
[0082] S602, raise the temperature again to 740-760℃ and keep it warm for 7-9 hours;
[0083] S603, heat again to 1030~1060℃, and hold for 9~11 hours;
[0084] S604, heat again to 1330~1360℃, and keep warm for 9~11 hours;
[0085] S605, heat again to 1530~1560℃, and keep warm for 7~9 hours;
[0086] S606, slowly cool to 490-510℃ in the furnace, and hold for 2-4 hours;
[0087] S607, and then naturally cooled to room temperature in the furnace to obtain the aluminum magnesium cobalt oxide cathode target for thin-film magnesium batteries.
[0088] Specifically, in S602-S605 above, the vacuum level is always maintained at 10. -3 Below pa.
[0089] Specifically, in S606 and S607 above, in order to ensure the uniformity of the microstructure of the obtained aluminum magnesium cobalt oxide cathode target, it is necessary to first slowly cool it to 490-510℃ in the furnace and hold it for 2-4 hours; then cool it naturally to room temperature in the furnace.
[0090] Specifically, in step 6 above, the parameters such as temperature, atmosphere, and holding time for each of the multiple heating stages are all taken into account the chemical reaction kinetics requirements of sintering. These parameters are controlled to ensure the uniformity of composition and the required grain structure of the synthesized magnesium aluminum cobalt oxide during the sintering process. Sintering outside this temperature range will result in incomplete ceramization of the target material, leading to over-sintering, under-sintering, porosity, and deformation, rendering the target material unusable.
[0091] Specifically, in step 6 above, the resulting thin-film magnesium aluminum cobalt oxide cathode target has a uniform composition, no segregation, good grain size consistency, controllable grain deviation, no single-phase or defect components, and no cracks within the target, facilitating thin-film deposition. The grain size of the thin-film magnesium aluminum cobalt oxide cathode target is between 330 nm and 410 nm, the flatness of the target after sintering is approximately 0.12–0.16 mm, and the relative density of the sintered target is approximately 93%–95.7%.
[0092] The present invention also provides a thin-film magnesium battery aluminum cobalt oxide positive electrode target, which is prepared by the above method.
[0093] The present invention also provides an all-solid-state thin-film magnesium battery, wherein the positive electrode of the all-solid-state thin-film magnesium battery is prepared using the above-mentioned aluminum magnesium cobalt oxide positive electrode target for thin-film magnesium batteries.
[0094] Specifically, the aforementioned all-solid-state thin-film magnesium battery includes a positive electrode layer, an electrolyte layer, and a negative electrode layer. The positive electrode layer is prepared using the aforementioned magnesium aluminum cobalt oxide positive electrode target material for thin-film magnesium batteries.
[0095] Specifically, the preparation method of the above-mentioned all-solid-state thin-film magnesium battery includes:
[0096] Step 1: Deposit a thin film of magnesium anode on the surface of copper foil;
[0097] Step 2: Next, a solid electrolyte film is deposited on the negative electrode magnesium film;
[0098] Step 3: Deposit a positive electrode film on the solid electrolyte film using the above-mentioned magnesium aluminum cobalt oxide positive electrode target for thin-film magnesium batteries;
[0099] Step 4: After formation, an all-solid-state thin-film magnesium battery is obtained.
[0100] Specifically, the all-solid-state thin-film magnesium battery of the present invention, in addition to high safety, also has high capacity and capacity retention. For example, with a capacity of 17160 mAh or higher (e.g., 17160–50336 mAh), the capacity remains essentially unchanged after more than 10,000 cycles. Furthermore, the all-solid-state thin-film magnesium battery of the present invention also has excellent interfacial bonding and compatibility, with very low interfacial internal resistance, for example, less than 0.01 ohms / cm. 2 It can very easily realize the direct series connection of multiple single cells, the direct parallel connection of multiple single cells, and the series and parallel combination of multiple single cells, which can conveniently increase the output voltage of the battery, increase the single cell capacity of the battery pack, or achieve a perfect combination of voltage boosting and capacity expansion.
[0101] The preparation method and application of the thin-film magnesium aluminum cobalt oxide cathode target for magnesium batteries of the present invention will be further described below with reference to specific embodiments. Unless otherwise specified, all raw materials used are commercially available.
[0102] Example 1
[0103] This embodiment provides a method for preparing a magnesium aluminum cobalt oxide cathode target for thin-film magnesium batteries, including:
[0104] Step 1: Mix magnesium salt powder with cobalt tetroxide and aluminum oxide powder to obtain a mixed powder; the magnesium salt is magnesium oxide, and the mass ratio of magnesium oxide, cobalt tetroxide and aluminum oxide is 1.2:1:0.07;
[0105] Step 2: Place the above mixed powder into a ball mill jar and mix it with zirconia balls with a particle size of 0.45 mm to 1.3 mm. Then add a dispersant and continue mixing and ball milling. The ball mill jar is a hard ceramic jar. The total volume of the zirconia balls accounts for 1 / 3 of the volume of the ball mill jar, and the total volume of the mixed powder accounts for 2 / 5 of the volume of the ball mill jar. The mass ratio of dispersant to mixed powder is 1.5:100.
[0106] Specifically, in step 2, the ball milling process includes:
[0107] S201. The ball mill jar is used to ball mill at an initial speed of 120 rpm for 3 hours.
[0108] S202, ball milling in a milling jar at a speed of 310 rpm for 11 hours;
[0109] Step 3: Then add binder into the ball mill jar and ball mill at 170 rpm for 5.5 hours; the mass ratio of binder to mixed powder is 0.7:100.
[0110] Step 4: After ball milling, the synthetic powder is passed through a 500-mesh sieve. The sieved synthetic powder is weighed and then poured into a vibrating mold. It is then pressed with 1600 tons to form a molded blank.
[0111] Step 5: Place the billet into a cold isostatic press, pressurize it to 330 MPa, hold the pressure for 60 minutes, and obtain the cold isostatically pressed aluminum magnesium cobalt oxide cathode target billet.
[0112] Step 6: Place the aluminum magnesium cobalt oxide cathode target blank into an atmosphere sintering furnace for multi-stage heat preservation and multi-stage cooling, and then allow it to cool naturally to room temperature with the furnace to obtain the aluminum magnesium cobalt oxide cathode target for thin-film magnesium batteries.
[0113] Step 6 includes:
[0114] S601. Place the aluminum magnesium cobalt oxide cathode target blank into an atmosphere sintering furnace and continuously introduce a N2+Ar (5:5 ratio) mixed gas. Raise the temperature from room temperature to 220℃ and hold for 4.5 hours.
[0115] S602, raise the temperature again to 750℃, and keep it at that temperature for 8 hours while continuously purging the N2+Ar (6:4 ratio) mixed gas;
[0116] S603, heat up to 1050℃ again, and continuously pass through a N2+Ar (ratio 6:4) mixed gas, and keep at this temperature for 10 hours;
[0117] S604, raise the temperature again to 1350℃, and continuously introduce a N2+Ar (5:5 ratio) mixed gas, and keep it at this temperature for 10 hours;
[0118] S605, raise the temperature again to 1550℃, and continuously introduce a N2+Ar (5:5 ratio) mixed gas, and keep it at this temperature for 8 hours;
[0119] S606, slowly cool to 500℃ in the furnace and hold for 3 hours;
[0120] S607, and then naturally cooled to room temperature in the furnace to obtain the aluminum magnesium cobalt oxide cathode target for thin-film magnesium batteries.
[0121] The thin-film magnesium battery aluminum cobalt magnesium cathode target obtained in this embodiment is as follows: Figure 1 As shown, the positive electrode target has a uniform composition, no segregation, good grain size consistency, controllable grain deviation, no single phase or defect components, and no cracks within the target, facilitating thin film deposition. Specifically, in this embodiment, the grain size of the aluminum magnesium cobalt oxide positive electrode target for the thin-film magnesium battery is between 360nm and 390nm, the flatness of the target after sintering is approximately 0.17mm, and the relative density of the sintered target is 94.3%.
[0122] Example 2
[0123] This embodiment provides a method for preparing a magnesium aluminum cobalt oxide cathode target for thin-film magnesium batteries, including:
[0124] Step 1: Mix magnesium salt powder with cobalt tetroxide and aluminum oxide powder to obtain a mixed powder; the magnesium salt is magnesium oxide, and the mass ratio of magnesium oxide, cobalt tetroxide and aluminum oxide is 1.3:0.9:0.06;
[0125] Step 2: Place the above mixed powder into a ball mill jar and mix it with zirconia balls with a particle size of 0.5 mm to 1.3 mm. Then add a dispersant and continue mixing and ball milling. The ball mill jar is a hard ceramic jar. The total volume of the zirconia balls accounts for 1 / 3 of the volume of the ball mill jar, and the total volume of the mixed powder accounts for 2 / 5 of the volume of the ball mill jar. The mass ratio of dispersant to mixed powder is 1.7:100.
[0126] Specifically, in step 2, the ball milling process includes:
[0127] S201, the ball mill jar is used to ball mill at an initial speed of 110 rpm for 4.5 hours;
[0128] S202, ball milling in a milling jar at a speed of 300 rpm for 12 hours;
[0129] Step 3: Then add binder into the ball mill jar and ball mill at 175 rpm for 5 hours; the mass ratio of binder to mixed powder is 0.7:100.
[0130] Step 4: After ball milling, the synthetic powder is passed through a 500-mesh sieve. The sieved synthetic powder is weighed and then poured into a vibrating mold. It is then pressed with 1550 tons to form a molded blank.
[0131] Step 5: Place the billet into a cold isostatic press, pressurize it to 310 MPa, hold the pressure for 65 minutes, and obtain the cold isostatically pressed aluminum magnesium cobalt oxide cathode target billet.
[0132] Step 6: Place the aluminum magnesium cobalt oxide cathode target blank into an atmosphere sintering furnace for multi-stage heat preservation and multi-stage cooling, and then allow it to cool naturally to room temperature with the furnace to obtain the aluminum magnesium cobalt oxide cathode target for thin-film magnesium batteries.
[0133] Step 6 includes:
[0134] S601. Place the aluminum magnesium cobalt oxide cathode target blank into an atmosphere sintering furnace and continuously introduce a N2+Ar (ratio 5.3:5) mixed gas. Raise the temperature from room temperature to 230℃ and hold for 4 hours.
[0135] S602, raise the temperature again to 760℃, and continuously purge the mixture of N2+Ar (ratio 6.5:4) gas for 7 hours;
[0136] S603, raise the temperature again to 1055℃, and continuously introduce a N2+Ar (ratio 6.5:3) mixed gas, and keep it at this temperature for 10 hours;
[0137] S604, raise the temperature again to 1340℃, and continuously circulate a N2+Ar (ratio 5.5:5) mixed gas, and keep it at this temperature for 10.5h;
[0138] S605, raise the temperature again to 1545℃, and continuously purge the mixture of N2 + Ar (ratio 5.5:5) gas for 7.5 hours;
[0139] S606, slowly cooled to 495℃ in the furnace, and held for 4 hours;
[0140] S607, and then naturally cooled to room temperature in the furnace to obtain the aluminum magnesium cobalt oxide cathode target for thin-film magnesium batteries.
[0141] The thin-film magnesium battery aluminum cobalt magnesium cathode target obtained in this embodiment is as follows: Figure 2 As shown, the positive electrode target has a uniform composition, no segregation, good grain size consistency, controllable grain deviation, no single phase or defect components, and no cracks within the target, facilitating thin film deposition. Specifically, in this embodiment, the grain size of the aluminum magnesium cobalt oxide positive electrode target for the thin-film magnesium battery is between 330 nm and 360 nm, the flatness of the target after sintering is approximately 0.16 mm, and the relative density of the sintered target is 95.2%.
[0142] Example 3
[0143] This embodiment provides a method for preparing a magnesium aluminum cobalt oxide cathode target for thin-film magnesium batteries. Steps 1-5 are the same as in Example 1 and will not be repeated here. The method also includes:
[0144] Step 6: Place the aluminum magnesium cobalt oxide cathode target blank into a vacuum sintering furnace, perform multi-stage heat preservation and multi-stage cooling, and then allow it to cool naturally to room temperature in the furnace to obtain the aluminum magnesium cobalt oxide cathode target for thin-film magnesium batteries.
[0145] Step 6 includes:
[0146] S601. Place the aluminum magnesium cobalt oxide cathode target blank into a vacuum sintering furnace, maintaining a vacuum level of 10. -3 Below Pa, the temperature is increased from room temperature to 220℃ and held for 4.5 hours;
[0147] S602, raise the temperature again to 750℃ and keep it warm for 8 hours;
[0148] S603, heat up to 1050℃ again and keep warm for 10 hours;
[0149] S604, heat up to 1350℃ again and keep warm for 10 hours;
[0150] S605, heat up to 1550℃ again, and keep warm for 8 hours;
[0151] S606, slowly cool to 500℃ in the furnace and hold for 3 hours;
[0152] S607, and then naturally cooled to room temperature in the furnace to obtain the aluminum magnesium cobalt oxide cathode target for thin-film magnesium batteries.
[0153] Specifically, in S602-S605 above, the vacuum level is always maintained at 10. -3 Below pa.
[0154] The thin-film magnesium battery aluminum cobalt magnesium cathode target obtained in this embodiment is as follows: Figure 3 As shown, the positive electrode target has a uniform composition, no segregation, good grain size consistency, controllable grain deviation, no single phase or defect components, and no cracks within the target, facilitating thin film deposition. Specifically, in this embodiment, the grain size of the aluminum magnesium cobalt oxide positive electrode target for the thin-film magnesium battery is between 375 nm and 410 nm, the flatness of the target after sintering is approximately 0.145 mm, and the relative density of the sintered target is 94.3%.
[0155] Example 4
[0156] This embodiment provides an all-solid-state thin-film magnesium battery. The fabrication method of this embodiment for depositing a single-cell all-solid-state thin-film magnesium battery includes:
[0157] Step 1: Deposit a negative electrode magnesium film on a 1 square meter copper foil surface. The thickness of the negative electrode magnesium film is 4.5 μm.
[0158] Step 2: Next, a solid electrolyte film is deposited on the negative electrode magnesium film, with a thickness of 1.5 μm;
[0159] Step 3: Deposit a positive electrode film on the solid electrolyte film using the aluminum magnesium cobalt oxide positive electrode target of Example 1 above; the thickness of the positive electrode film is 15 μm;
[0160] Step 4: After formation, an all-solid-state thin-film magnesium battery is obtained.
[0161] The interfacial resistance of the all-solid-state thin-film magnesium battery in this embodiment is less than 0.01 ohms / cm. 2 With a capacity of 17160 mAh, the capacity remains essentially unchanged after more than 10,000 cycles.
[0162] Example 5
[0163] This embodiment provides an all-solid-state thin-film magnesium battery. The fabrication method for this embodiment involves depositing two series-connected all-solid-state thin-film magnesium batteries.
[0164] The magnesium anode film thickness of each thin-film magnesium battery was 5.5 μm, deposited on a 1 square meter copper foil surface. The solid electrolyte film thickness of each subsequent battery was 2.0 μm. Using the magnesium aluminum cobalt oxide cathode target from Example 2, the cathode film thickness of the resulting thin-film magnesium battery was 18.5 μm. After formation, the battery achieved a capacity of 21164 mA h; the capacity remained essentially unchanged after more than 10,000 cycles; and the interfacial resistance was less than 0.01 ohms / cm. 2 .
[0165] Example 6
[0166] This embodiment provides an all-solid-state thin-film magnesium battery. This embodiment involves depositing two parallel all-solid-state thin-film magnesium battery cells, and the fabrication method includes:
[0167] The negative electrode magnesium film thickness of each battery cell deposited on a 1 square meter copper foil surface is 6.5 μm. The subsequent solid electrolyte film thickness of each battery cell is 2.5 μm. Using the magnesium aluminum cobalt oxide positive electrode target from Example 3, the positive electrode film thickness of the resulting magnesium battery is 22 μm. After formation, the battery exhibits a capacity of 50336 mA h; the capacity remains essentially unchanged after more than 10,000 cycles; and the interfacial resistance is less than 0.01 ohms / cm. 2 .
[0168] Comparative Example 1
[0169] This comparative example provides a method for preparing a magnesium aluminum cobalt oxide cathode target for thin-film magnesium batteries, as detailed below:
[0170] Step 1: Mix magnesium salt powder with cobalt tetroxide and aluminum oxide powder to obtain a mixed powder; the magnesium salt is magnesium oxide, and the mass ratio of magnesium oxide, cobalt tetroxide and aluminum oxide is 1.2:1:0.07;
[0171] Step 2: Place the above mixed powder into a ball mill jar and mix it with zirconia balls with a particle size of 0.5 mm to 1.3 mm. Then add a dispersant and continue mixing. Ball mill at 150 rpm for 3 hours. The ball mill jar is a hard ceramic jar. The total volume of the zirconia balls occupies 2 / 5 of the volume of the ball mill jar, and the total volume of the mixed powder occupies 1 / 3 of the volume of the ball mill jar. The mass ratio of dispersant to mixed powder is 1.3:100.
[0172] Step 3: Then add binder into the ball mill jar and ball mill at 145 rpm for 5 hours; the mass ratio of binder to mixed powder is 0.5:100.
[0173] Step 4: After ball milling, the synthetic powder is passed through a 500-mesh sieve. The sieved synthetic powder is weighed and then poured into a vibrating mold. It is then pressed with 800 tons to form a molded blank.
[0174] Step 5: Place the billet into a cold isostatic press, pressurize it to 100 MPa, and hold the pressure for 40 minutes. However, a suitable aluminum magnesium cobalt oxide cathode target billet cannot be obtained.
[0175] The process parameters in this comparative example are not suitable, and it is impossible to obtain the magnesium aluminum cobalt oxide cathode target for thin-film magnesium batteries.
[0176] Comparative Example 2
[0177] This comparative example provides a method for preparing a magnesium aluminum cobalt oxide cathode target for thin-film magnesium batteries, as detailed below:
[0178] In step 2 of this comparative example, the particle size of the zirconia spheres is 1.8–2.5 mm; the remaining steps are the same as those in Example 1.
[0179] The positive electrode target of this comparative example is as follows: Figure 4 As shown, the target material has large grain deviations, uneven mixing, and contains many elemental substances, making it impossible to sputter the sintered target material.
[0180] Comparative Example 3
[0181] This comparative example provides a method for preparing a magnesium aluminum cobalt oxide cathode target for thin-film magnesium batteries, as detailed below:
[0182] In step 2 of this comparative example, the ball milling process is directly carried out at 300-350 rpm for more than 12 hours; the remaining steps are the same as those in Example 1.
[0183] In this comparative example, the powder was not mixed evenly and contained many elemental substances, so the sintered target material could not be sputtered.
[0184] Comparative Example 4
[0185] This comparative example provides a method for preparing a magnesium aluminum cobalt oxide cathode target for thin-film magnesium batteries, as detailed below:
[0186] In step 4 of this comparative example, the synthetic powder is controlled to pass through a 300-mesh sieve; the remaining steps are the same as those in Example 1.
[0187] The target blank in this comparative example has large voids, and cannot be completely ceramicized after sintering, thus making sputtering deposition impossible.
[0188] Comparative Example 5
[0189] This comparative example provides a method for preparing a magnesium aluminum cobalt oxide cathode target for thin-film magnesium batteries, as detailed below:
[0190] In step 6 of this comparative example, steps S602-S607 are performed directly; the remaining steps are the same as those in Example 1.
[0191] The target material in this comparative example cannot be fully ceramicized and is therefore unusable.
[0192] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention.
Claims
1. A method for preparing a thin film magnesium battery magnesium aluminum cobalt oxide cathode target material, characterized in that, The application relates to a method for preparing a magnesium-aluminum-cobalt oxide positive electrode target material for a thin-film magnesium battery. The method comprises the following steps: Step 1: mixing a magnesium salt powder with a tricobalt tetraoxide powder and an aluminum oxide powder to obtain a mixed powder, wherein the mass ratio of the magnesium salt, the tricobalt tetraoxide and the aluminum oxide is 1.1-1.4:0.8-1:0.05-0.15; Step 2: placing the mixed powder into a ball mill tank and mixing the mixed powder with zirconium oxide balls, then adding a dispersant and continuing to mix and ball mill; Step 3: then adding a binder into the ball mill tank and continuing to ball mill; Step 4: sieving the synthesized powder after ball milling through a 500-mesh sieve, pouring the sieved synthesized powder into a vibrating mold, and pressing to form a molded blank; Step 5: placing the blank into a cold isostatic pressing machine, pressing and keeping pressure, and obtaining a magnesium-aluminum-cobalt oxide positive electrode target material blank after cold isostatic pressing; Step 6: placing the magnesium-aluminum-cobalt oxide positive electrode target material blank into an atmosphere sintering furnace or a vacuum sintering furnace, performing multi-stage heat preservation and multi-stage temperature reduction, and naturally cooling to room temperature in the furnace to obtain a magnesium-aluminum-cobalt oxide positive electrode target material for a thin-film magnesium battery. In the step 2, the particle size of the zirconium oxide balls is controlled to be 0.45-1.3 mm. In the step 2, the ball milling process comprises the following steps: S201: ball milling the ball mill tank at an initial rotating speed of 110-130 rpm for 3-5 hours; S202: ball milling the ball mill tank at a rotating speed of 280-320 rpm for more than 10 hours; In the step 4, the pressure is controlled to be 1550-1650 tons. In the step 5, the pressure is controlled to be 300-350 MPa, and the pressure keeping time is 50-70 minutes. In the step 6, the steps of using the atmosphere sintering furnace comprise the following steps: S601: placing the magnesium-aluminum-cobalt oxide positive electrode target material blank into the atmosphere sintering furnace, always inputting N2+Ar mixed gas, heating from room temperature to 210-230 DEG C, and keeping heat preservation for 4-5 hours; S602: heating again to 740-760 DEG C, always inputting N2+Ar mixed gas, and keeping heat preservation for 7-9 hours; S603: heating again to 1030-1060 DEG C, always inputting N2+Ar mixed gas, and keeping heat preservation for 9-11 hours; S604: heating again to 1330-1360 DEG C, always inputting N2+Ar mixed gas, and keeping heat preservation for 9-11 hours; S605: heating again to 1530-1560 DEG C, always inputting N2+Ar mixed gas, and keeping heat preservation for 7-9 hours; S606: slowly cooling to 490-510 DEG C in the furnace, keeping heat preservation for 2-4 hours; 2. The production method according to claim 1, characterized by, S607: then naturally cooling to room temperature in the furnace to obtain a magnesium-aluminum-cobalt oxide positive electrode target material for a thin-film magnesium battery. In the step 6, the steps of using the atmosphere sintering furnace comprise the following steps:
3. The preparation method according to claim 1, characterized in that, S601: placing the magnesium-aluminum-cobalt oxide positive electrode target material blank into the atmosphere sintering furnace, always inputting N2+Ar mixed gas, heating from room temperature to 220-230 DEG C, and keeping heat preservation for 4-5 hours. S601. Place the aluminum magnesium cobalt oxide cathode target blank into a vacuum sintering furnace, maintaining a vacuum level of 10. -3 Below Pa, the temperature is raised from room temperature to 210~230℃ and held for 4~5 hours; In the step 6, the steps of using the vacuum sintering furnace comprise the following steps: S602: heating again to 740-760 DEG C, and keeping heat preservation for 7-9 hours; S603: heating again to 1030-1060 DEG C, and keeping heat preservation for 9-11 hours; S604: heating again to 1330-1360 DEG C, and keeping heat preservation for 9-11 hours; S605: heating again to 1530-1560 DEG C, and keeping heat preservation for 7-9 hours; S606, slowly cooling to 490~510℃, holding for 2~4h; S607, then naturally cooling to room temperature, obtaining the thin film magnesium battery aluminum magnesium cobalt oxide anode target material.
4. The method of claim 1, wherein, In the step 4, the pressure is controlled to 1550~1600 tons.
5. The preparation method according to claim 1, characterized in that, In the step 5, the pressure is controlled to 300~330 MPa, and the pressure holding time is 50~70 min.
6. The method of claim 1, wherein, In the step 2, the ball milling process comprises: S201, the ball milling jar is ball milled at an initial rotating speed of 110~120 rpm for 3~5h.
7. The preparation method according to claim 1, characterized in that, In the step 1, the magnesium salt comprises one or more of magnesium oxide, magnesium carbonate, magnesium nitrate and magnesium hydroxide.
8. The method of claim 1, wherein, In the step 2, the mass ratio of the dispersant to the mixed powder is controlled to 1.4~1.8:
100.
9. A thin film magnesium battery magnesium aluminum cobalt oxide cathode target material, characterized by, The thin film magnesium battery aluminum magnesium cobalt oxide anode target material is prepared by the method of any one of claims 1-8.
10. An all-solid-state thin-film magnesium battery, characterized by comprising: The anode of the all-solid-state thin film magnesium battery is prepared by the thin film magnesium battery aluminum magnesium cobalt oxide anode target material of claim 9.
Citation Information
Patent Citations
Aluminum magnesium manganate anode target material of thin-film magnesium battery, preparation method and thin-film magnesium battery
CN118530005A
Aluminum magnesium cobaltate positive target material of thin-film magnesium battery, preparation method and thin-film magnesium battery
CN118530006A