A processing method for helical gear silicon boat and silicon boat

Abstract

A method for processing a beveled silicon boat comprises at least the following steps: groove rod processing A, blanking and shape processing A1, selecting silicon rods of suitable size to cut out the size of rectangular silicon strips required for the groove rods, the size of the silicon strips being basically the same as or slightly larger than the maximum outer size of the groove rods; A2, grinding the outer shape of the silicon strips; B, slotting B1, preparing a slotting jig for straight slot processing; B2, deflecting the tool spindle by a certain angle for bevel slot processing; C, chamfering C1, preparing a chamfering jig; C2, calculating the horizontal rotation angle of the chamfering jig according to the vertical rotation angle of the silicon strip from the slotting step to the chamfering step and rotating the chamfering jig; C3, calculating the tool deflection angle; C4, rotating the tool to the angle obtained in C3, programming the tool for chamfering processing; C5, rotating the chamfering jig on the horizontal plane to restore it to the initial position of step C2, replacing the fillet tool for fillet processing, and the fillet being larger than the chamfer. The top plate and flange are processed by cutting, drilling and chamfering the silicon ingot to obtain the top plate and flange, and assembled together with the groove rod to form a silicon boat.

Description

Technical Field

[0001] The invention belongs to the field of semiconductor material processing, and particularly relates to a processing method of a helical-tooth silicon boat and the silicon boat. Background Art

[0002] A silicon boat is a carrier generally made of silicon material used in processes such as heat treatment of silicon ingots. It plays an indispensable role in the production of silicon products. A silicon boat is generally composed of a top plate, flanges, groove rods, latches, etc. The groove rods are the main components for supporting the silicon ingots, and the processing of the groove rods has become the key to silicon boat processing. According to different usage requirements, the shape of the groove teeth of the groove rods varies, including straight teeth, steps, bevel teeth, etc., and the processing methods include grooving, hooking steps, chamfering, etc. The bevel teeth are generally designed to minimize the contact area between the silicon ingot and the groove rod, but the design of the contact area for silicon ingots of different sizes and thicknesses is also different. However, no matter how the design is made, if the bevel teeth have a small inclination angle, the edges of the bevel teeth are relatively sharp and can easily scratch the silicon ingots. Therefore, bevel teeth with a small inclination angle generally need to be chamfered, and the greater the chamfer depth, the better.

[0003] Silicon material processing generally requires grinding. Due to the large processing volume, a disc-shaped diamond grinding wheel is required for grinding. However, the disc-shaped tool can only move in a plane parallel to the tool, otherwise it may cause damage to the product, tool or machine tool.

[0004] The core of groove rod processing lies in chamfering. The chamfering accuracy determines the smoothness of the contact position between the groove rod and the silicon ingot. If the processing method is unreasonable, a large cross section may be generated, causing the placed silicon ingot to be scratched. Figure 1 、 Figure 2 and Figure 9 As shown, the silicon boat includes a top plate 3, a flange 1, and a groove rod 2. The groove rod 2 is provided with a bevel tooth 4. The head of the bevel tooth 4 is provided with a straight tooth portion 5 for supporting. The straight tooth portion 5 contacts the silicon ingot and therefore needs to be chamfered. Other positions of the bevel tooth 4 may also contact the silicon ingot during heat treatment or other situations when vibration occurs, so they are also chamfered. However, the two positions that need to be chamfered cannot be combined into one processing plane. In this way, under the premise of chamfering one position, the other positions are either overcut or incompletely processed to produce edges. Under high temperature conditions, the silicon ingot may bounce and there is a risk of scratching the silicon ingot. Therefore, if this is to be avoided, a total of two chamfers are required. The processing is relatively tedious and complicated. Because the bevel teeth are not accurately calculated or a reasonable method is not adopted, various problems may occur, such as uneven chamfering on the left and right, different chamfering sizes on the top and bottom, etc., and even manual correction of the tool position is required to ensure normal processing. Under the premise of using existing equipment, how to quickly and efficiently chamfer the bevel teeth on the silicon boat is the technical problem to be solved by the present invention. Summary of the Invention

[0005] In view of the above-mentioned prior art, the purpose of the present invention is to provide a method for chamfering a bevel-toothed silicon boat, a method for processing a bevel-toothed silicon boat, and a silicon boat produced by the method.

[0006] The technical solution of the present invention is implemented as follows: a method for processing a helical gear silicon boat comprises at least the following steps:

[0007] Groove rod processing

[0008] A. Cutting and shape processing

[0009] A1. Select the appropriate size of silicon rod and cut it into the rectangular silicon strips required for the groove rods. The size of the silicon strips should be the same as or slightly larger than the maximum outer size of the groove rods.

[0010] A2. Grinding the silicon strip shape;

[0011] B. Slotting

[0012] B1. Prepare the slotting jig for straight slot processing;

[0013] B2. The tool spindle tilts to a certain angle to process the inclined groove;

[0014] C. Chamfer

[0015] C1. Prepare chamfering jig;

[0016] C2. Calculate the horizontal rotation angle of the chamfering jig based on the vertical rotation angle of the silicon strip from the slotting step to the chamfering step and rotate the chamfering jig;

[0017] C3. Calculate the tool deflection angle;

[0018] C4, rotate the tool to the angle obtained in C3, and program the tool to perform chamfering;

[0019] C5. The chamfering jig is rotated on the horizontal plane to return to the initial position of step C2, and the fillet tool is replaced for fillet processing.

[0020] The top plate and flange are processed by cutting, drilling and chamfering the silicon ingot to obtain the top plate and flange, and assembled together with the groove rod to form a silicon boat.

[0021] The beneficial effect of this design is that different disc-shaped tools can be used on the same machine tool to groove and chamfer silicon bars. After the tool is deflected by a certain angle, even if the machine tool coordinate system changes, long-distance chamfering can be accurately processed, that is, there will be no deflection when processing to the root of the bevel tooth. This solves the problem that some existing silicon rods cannot be deeply chamfered, resulting in the silicon ingot shaking violently during heat treatment in some special cases and causing scratches on the edges of the bevel teeth of the silicon boat. Chamfering first and then rounding can reduce the wear of the rounding tool, making the rounding process more precise, and the arc surface processed by the rounding tool is smoother, which is not easy to scratch the silicon ingot placed on the bevel teeth of the silicon boat. The silicon boat assembled in this way can reduce the scrap rate of silicon ingots in processes such as heat treatment, thereby achieving the purpose of reducing production costs.

[0022] Furthermore, in step A2, the outer shape of the silicon strip is ground to obtain a first reference plane and a second reference plane parallel to each other, the third reference plane is processed, the third reference plane forms an acute angle with the second reference plane, the first side tooth surface and the second side tooth surface are processed, the first side tooth surface forms an obtuse angle with the first reference plane, the second side tooth surface forms an obtuse angle with the second reference plane, the tooth top surface is perpendicular to the first reference plane and the second reference plane, the tooth top surface, the first reference plane and the second reference plane are perpendicular to the upper end surface, the tooth top surface, the first reference plane and the second reference plane are perpendicular to the lower end surface, a rounded transition is used between the tooth top surface and the first side tooth surface and the second side tooth surface, a rounded transition is also used between the first reference plane and the second reference plane and the first side tooth surface and the second side tooth surface, and a rounded transition is also used between the first reference plane and the second reference plane and the third reference plane. Such a design is convenient for processing and positioning, and the first side tooth surface and the second side tooth surface can be symmetrically designed for easy processing.

[0023] Furthermore, in step B1, the slotting jig can make the third reference surface of the silicon strip processed in step A2 in a horizontal position. The slotting jig is provided with at least a first supporting surface and a second supporting surface. The angle between the first supporting surface and the second supporting surface is the same as the angle between the first side tooth surface and the second reference surface. The second supporting surface is parallel to the horizontal plane. The first side tooth surface can be adhered to the first supporting surface by a sticky material such as sticky wax, and the third reference surface can be adhered to the second supporting surface by a sticky material such as sticky wax. The slotting jig is fixed to the processing equipment, and the straight tooth part is first processed by the tool, and the straight groove is cut on the silicon strip. The silicon strip is leaned against the slotting jig, which can improve the efficiency of the helical tooth processing and avoid uneven force cracking of the material or local stress concentration surface collapse during material processing. This can achieve a faster feed speed and reduce the processing time. The sticky wax has both a fixing and a buffering effect.

[0024] Furthermore, in step B2, the tool spindle is tilted at a certain angle to start grinding, cutting and grooving multiple times from the tooth top surface to obtain multiple helical teeth. The helical teeth are processed after all the straight tooth parts are processed. In this way, there is no risk of tooth breakage when processing the straight tooth parts. When processing the helical teeth, the feed speed can be slowed down in the early stage, and the feed speed can be restored after the straight tooth parts are processed until the processing is completed.

[0025] Furthermore, in step C1, the chamfering jig is provided with at least a first limiting surface, a second limiting surface, a third limiting surface and a side limiting surface. The side limiting surface, the first limiting surface and the second limiting surface are perpendicular to the horizontal plane. The first reference surface can be adhered to the first limiting surface by a sticky material such as sticky wax, the second reference surface can be adhered to the second limiting surface by a sticky material such as sticky wax, the third reference surface can be adhered to the third limiting surface by a sticky material such as sticky wax, and the upper end surface or the lower end surface can be adhered to the side limiting surface by a sticky material such as sticky wax, so that the silicon strip can be stably fixed for chamfering processing.

[0026] Furthermore, in step C2, the horizontal rotation angle of the jig is calculated and obtained with the help of computer-aided design software. That is, a groove rod model is made using the software, and a line segment or straight line perpendicular to the first reference plane or the second reference plane is made. The angle between the line segment or straight line and the bevel tooth surface is measured, and the degree of the angle is obtained, that is, the horizontal rotation angle of the jig. The straight line or line segment is parallel to the horizontal plane in the C chamfering step. The amount of calculation is greatly reduced by computer assistance, and calculation errors are not likely to occur, which makes the development of products with different angles faster.

[0027] Furthermore, in step C3, the tool deflection angle is calculated with the help of computer-aided design software. First, the groove bar model is made through the software, and the basic coordinate system X'Y'Z' or auxiliary surface is constructed. The X' axis of the basic coordinate system is perpendicular to the upper end surface, the Y' axis is perpendicular to the first datum plane, the Z' axis is perpendicular to the third datum plane, and the auxiliary surface is parallel to the upper end surface. The basic coordinate system X'Y'Z' or auxiliary surface will no longer rotate after it is determined. At this time, the groove bar first rotates around an axis parallel to the X' axis, and the rotation angle is the same as the complementary angle of the angle between the second datum plane and the third datum plane. Then it rotates around an axis parallel to the Z' axis, and the rotation angle is the same as the rotation angle of the horizontal plane of the chamfering jig calculated in step C2. Finally, the angle measurement tool in the software is used to measure the angle between the rotated bevel tooth 1 surface and the Y'Z' surface or auxiliary surface. This angle is the required deflection angle of the tool. Computer assistance greatly reduces the amount of calculation, and is not prone to calculation errors, making product development for different angles faster.

[0028] Furthermore, in step C4, a disc-shaped tool with two chamfered surfaces is used to chamfer the upper tooth groove surface first. After the chamfering of the upper tooth groove surface edges is completed, the same tool is used to chamfer the lower tooth groove surfaces of all bevel teeth. Alternatively, after the chamfering of the upper tooth groove surface edges is completed, the same tool can be used to chamfer the lower tooth groove surface of the next adjacent bevel tooth. This makes processing convenient and quick, avoids wasting time by changing tools, and the same tool only needs to be positioned once for processing, which is also more efficient. Double-sided chamfering can also provide better protection for silicon ingots.

[0029] Furthermore, in step C5, the fillet tool moves in a vertical plane relative to the groove rod, and the movement trajectory of the fillet tool relative to the groove rod is U-shaped and includes at least a first chamfer line, a first arc line, a tooth top chamfer line, a second arc line and a second chamfer line. The first chamfer line is parallel to the edge of the bevel tooth on the first side tooth surface, and the radius of the first arc line and the second arc line is equal to the sum of the tool radius and the fillet radius. The tooth top chamfer line is parallel to the edge of the tooth top surface, and the second chamfer line is parallel to the edge of the bevel tooth on the second side tooth surface. In this way, a smooth curved surface can be processed, which provides better protection for the silicon ingot.

[0030] A beveled silicon boat is processed and assembled using the above method. The beveled silicon boat processed in this way has a larger chamfer depth and higher chamfer accuracy, which can ensure a smoother chamfer surface and provide better protection for silicon ingots. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a three-dimensional schematic diagram of a helical tooth groove rod;

[0032] Figure 2 It is a three-dimensional schematic diagram of a helical tooth groove rod;

[0033] Figure 3 A schematic diagram of the groove rod of the present invention being installed on a slotting jig;

[0034] Figure 4 This is a side view of the groove rod of the present invention installed on the slotting jig;

[0035] Figure 5 A side view of the groove rod of the present invention installed on a chamfering jig;

[0036] Figure 6 This is a top view schematic diagram of the groove rod of the present invention installed on the chamfering jig;

[0037] Figure 7 This is a top view schematic diagram of the groove rod of the present invention after being installed on the chamfering jig and rotated horizontally;

[0038] Figure 8 This is a three-dimensional schematic diagram of the chamfering jig of the present invention;

[0039] Figure 9This is a three-dimensional schematic diagram of an assembly of a helical gear silicon boat;

[0040] Figure 10 This is a schematic diagram of the movement trajectory of the fillet tool of the present invention. DETAILED DESCRIPTION

[0041] As needed, detailed embodiments of the present invention are disclosed herein, but it should be understood that the disclosed embodiments are merely exemplary of the present invention, and the present invention may be implemented in different and alternative forms. The accompanying drawings are not necessarily drawn to scale, and certain features may be exaggerated or reduced to show the details of a particular component. Therefore, the specific structural and functional details disclosed herein should not be understood as having a limiting meaning, but merely as a representative basis to teach those skilled in the art to adopt the present invention differently. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative work are within the scope of protection of the present invention.

[0042] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 、 Figure 7 、 Figure 8 、 Figure 9 and Figure 10 As shown, a method for processing a helical gear silicon boat includes at least the following steps:

[0043] Groove rod processing

[0044] A. Cutting and shape processing

[0045] A1. Select a silicon rod of suitable size and cut out a rectangular silicon strip of the size required for the groove rod 2. The size of the silicon strip is basically the same as or slightly larger than the maximum outer dimension of the groove rod 2.

[0046] A2. Grind the outer shape of the silicon strip to obtain a first reference plane 11 and a second reference plane 12 that are parallel to each other, process the third reference plane 13, the third reference plane 13 forms an acute angle with the second reference plane 12, process the first side tooth surface 14 and the second side tooth surface 15, the first side tooth surface 14 forms an obtuse angle with the first reference plane 11, the second side tooth surface 15 forms an obtuse angle with the second reference plane 12, the tooth top surface 16 is perpendicular to the first reference plane 11 and the second reference plane 12, the tooth top surface 16, the first reference plane 11 and the second reference plane 12 are perpendicular to the upper end surface 17, the tooth top surface 16, the first reference plane 11 and the second reference plane 12 are perpendicular to the lower end surface 18, and the tooth top surface 16 and the first side tooth surface 14 and the second side tooth surface 15 are perpendicular to each other. Rounded corner transition: a rounded corner transition is also adopted between the first reference plane 11 and the second reference plane 12 and the first side tooth surface 14 and the second side tooth surface 15. A rounded corner transition is also adopted between the first reference plane 11 and the second reference plane 12 and the third reference plane 13. The above rounded corners can be of the same size or slightly different in the range of 2-6 mm. In the embodiment, the rounded corner radius is 4 mm for chamfering. The angle between the second reference plane 12 and the third reference plane 13 can be about 20-90 degrees, and 61 degrees is taken in the embodiment. The angle between the first side tooth surface 14 and the first reference plane 11 can be the same as the angle between the second side tooth surface 15 and the second reference plane 12, and can be in the range of 0-10 degrees. In the embodiment, 4.5 degrees is taken;

[0047] B. Slotting

[0048] B1. Prepare the slotting jig for straight slot processing;

[0049] Prepare a slotting jig 19. The slotting jig 19 can keep the third reference surface 13 of the silicon strip processed in step A2 in a horizontal position. The slotting jig 19 is provided with at least a first supporting surface 21 and a second supporting surface 20. The angle between the first supporting surface 21 and the second supporting surface 20 is the same as the angle between the first side tooth surface 14 and the second reference surface 12. The second supporting surface 20 is parallel to the horizontal plane. The first side tooth surface 14 can be adhered to the first supporting surface 21 by an adhesive material such as adhesive wax, and the third reference surface 13 can be adhered to the second supporting surface 20 by an adhesive material such as adhesive wax. The adhesive wax is paraffin wax. The jig is fixed to the processing equipment. The straight tooth portion 5 is processed first. The tool spindle does not need to be deflected. The straight groove processing can be started by directly setting the tool.

[0050] B2. The tool spindle tilts to a certain angle to process the inclined groove;

[0051] After the straight tooth portion 5 is processed, the tool spindle is tilted at a certain angle through the setting of the machine tool to grind, cut and groove multiple times to obtain multiple bevel teeth 4. The tilt angle of the tool spindle is the same as the angle required for the bevel teeth 4 on the groove rod 2. The angle of the bevel teeth 4 is designed according to the needs of the silicon ingot heat treatment process. Different bevel teeth 4 designs are used for silicon ingots of different thicknesses and sizes and different heat treatment processes. In order to ensure better processing accuracy and strong support, a straight tooth portion 5 is designed at the end of the bevel teeth 4 to obtain more accurate support force, so that the advantages of straight teeth and bevel teeth can be obtained. Figure 3 As shown, in this embodiment, the straight tooth portion 5 is parallel to the Y-axis and the Z-axis and perpendicular to the X-axis, the bevel gear 4 is parallel to the Y-axis, the included angle between the bevel gear 4 and the X-axis is 89 degrees, and the included angle between the bevel gear 4 and the Z-axis is 1 degree. The basic processing method is the same when the included angle is within the range of 0 degrees to 20 degrees depending on the situation. After the tool spindle is rotated and tilted 10 degrees around the Y-axis for tool alignment, CNC processing can be programmed. The sticky wax not only fixes the silicon strip, but also has a good buffering effect to prevent the silicon strip from cracking due to vibration during the processing.

[0052] The tool spindle rotates and tilts 1 degree around the Y axis to grind, cut and groove multiple times from the tooth top surface to obtain multiple helical teeth. After all the straight teeth are processed, the helical teeth are processed.

[0053] C. Chamfer

[0054] C1. Prepare a chamfering jig 23. The chamfering jig 23 is provided with at least a first limiting surface 24, a second limiting surface 25, a third limiting surface 26 and a side limiting surface 27. The side limiting surface 27, the first limiting surface 24 and the second limiting surface 25 are perpendicular to the horizontal plane. The first reference surface 11 can be adhered to the first limiting surface 24 by a sticky material such as sticky wax, the second reference surface 12 can be adhered to the second limiting surface 25 by a sticky material such as sticky wax, the third reference surface 13 can be adhered to the third limiting surface 26 by a sticky material such as sticky wax, and the upper end surface 17 or the lower end surface 18 can be adhered to the side limiting surface 27 by a sticky material such as sticky wax. The initial placement position of the chamfering jig 23 can ensure that the upper end surface 17 of the groove rod is parallel to the upper end surface 17 when the groove jig 19 fixes the groove rod. Chamfering and groove can be processed with the same equipment, and only the tool needs to be replaced;

[0055] C2. Calculate the horizontal rotation angle of the chamfering jig 23. In the slotting step B, since the slotting surface forms a certain angle with the YZ plane of the machine tool coordinate axis, which is 1 degree in the embodiment, the silicon strip must be rotated along the horizontal axis from the slotting step B to the chamfering step C by a certain angle, which is 29 degrees in the embodiment. That is, in the slotting step B, the first reference plane 11 and the second reference plane 12 originally form an angle of 61 degrees with the horizontal plane, and in the chamfering step C, the first reference plane 11 and the second reference plane 12 form an angle of 90 degrees with the horizontal plane. It is necessary to rotate 29 degrees along the axis parallel to the X-axis direction, and the tool rotates along the axis parallel to the Y-axis direction to achieve processing, and can no longer rotate along the X-axis direction. The tool position is adjusted by rotating in a parallel direction. To ensure that the four surfaces of the bevel teeth are parallel to the tool processing plane, the jig must be rotated relative to the tool along an axis perpendicular to the horizontal plane by a certain angle. This calculation can be obtained through complex geometric calculations or with the help of computer-aided design software. That is, a groove rod 2 model is made using software, and a line segment or straight line perpendicular to the first reference plane 11 or the second reference plane 12 is made. The angle between the line segment or straight line and the four surfaces of the bevel teeth is measured, and the degree of the angle is obtained, that is, the horizontal plane rotation angle of the chamfering jig 23. The straight line or line segment is parallel to the horizontal plane in the C chamfering step. The degree measured in the embodiment is 0.485 degrees.

[0056] C3. Calculate the tool deflection angle. This calculation is also cumbersome using geometric methods. It requires drawing many auxiliary lines to help with the calculation, which is time-consuming and laborious. For example, computer-aided design software, such as CAXA solid design software, UG or Solidworks, all have angle measurement functions, but auxiliary surfaces are needed to help with the measurement. First, use the software to make a groove rod 2 model, and construct the basic coordinate system X'Y'Z' or auxiliary surface. The X' axis of the basic coordinate system is perpendicular to the upper end face 17, the Y' axis is perpendicular to the first reference plane 11, the Z' axis is perpendicular to the third reference plane 13, and the auxiliary surface is parallel to the upper end face 17. After the basic coordinate system X'Y'Z' or the auxiliary surface is determined, it will no longer rotate. At this time, the groove rod will first rotate around the axis parallel to the X' axis, and then rotate The angle is the same as the complementary angle of the angle between the second reference plane 12 and the third reference plane 13, which is 29 degrees in the embodiment. Then, it is rotated around an axis parallel to the Z' axis. The rotation angle is the same as the horizontal plane rotation angle of the chamfering jig 23 calculated in step C2, which is 0.485 degrees in the embodiment. Finally, the angle measurement tool in the software is used to measure the angle between the four surfaces of the helical teeth and the Y'Z' surface or the auxiliary surface after rotation. This angle is the required deflection angle of the tool. In the embodiment, it is measured to be 0.875 degrees. This angle can also be measured by a machine tool meter, but the accuracy of the machine tool can only be accurate to two decimal places. In this way, some silicon boats with higher requirements for fillet may be affected by the processing accuracy, resulting in the fillet not being smooth enough, and there is a possibility of scratching the silicon wafer under special conditions.

[0057] C4. Rotate the tool to the angle obtained in C3, i.e. 0.875 degrees, program the tool to perform chamfering 7, use a disc-shaped tool with two chamfered surfaces, first chamfer the upper tooth groove surface 8, generally using a 45-degree chamfer 7, and after all the edges of the upper tooth groove surface 8 are chamfered, use the same tool to chamfer the lower tooth groove surface 9 of all the bevel teeth 4, or directly use the same tool to chamfer the lower tooth groove surface 9 of the next adjacent bevel tooth 4 after the edges of an upper tooth groove surface 8 are chamfered, without the need for multiple positioning or tool replacement.

[0058] C5, the chamfering jig 23 is rotated on the horizontal plane to return to the initial position of step C2, that is, reversed 0.875 degrees, such as Figure 10 The U-shaped dotted line trajectory is the tool movement of the fillet tool 66. In this step, the fillet tool 66 is replaced to perform fillet 6 processing. The fillet tool 66 moves in a vertical plane relative to the groove rod 2. The movement trajectory of the fillet tool 66 relative to the groove rod 2 is U-shaped and includes at least a first chamfer line 61, a first arc line 63, a tooth top chamfer line 65, a second arc line 64 and a second chamfer line 62. The first chamfer line 61 is parallel to the edge of the bevel tooth 4 on the first side tooth surface 14. The radius of the first arc line 63 and the second arc line 64 is equal to the sum of the radius of the fillet tool 66 and the fillet radius. The tooth top chamfer line 65 is parallel to the edge of the tooth top surface 16. The second chamfer line 62 is parallel to the edge of the bevel tooth 4 on the second side tooth surface 15. In this way, the main contact positions can achieve fillet transition, which has a good protective effect on the silicon ingot. Generally speaking, the fillet 6 needs to fully cover the chamfer 7 at the edge of the tooth top surface 16, so that the transition is smoother. Generally, the radius of the fillet 6 is twice or more than that of the chamfer 7. For example, if the chamfer 7 is 0.5mm, the fillet 6 can be 1mm-1.5mm.

[0059] The top plate 3 and the flange 1 are processed by cutting, drilling and chamfering the silicon ingot to obtain the top plate 3 and the flange 1, and are assembled together with the groove rod 2 to form a silicon boat.

[0060] like Figure 9 As shown, a helical gear silicon boat includes a top plate 3, a flange 1 and a groove rod 2, which are processed and assembled using the above method.

Claims

1. A method for processing a helical gear silicon boat, characterized by: At least the following steps are included: Groove rod processing A. Cutting and shape processing A1. Select a silicon rod of suitable size and cut out a rectangular silicon strip of the size required for the groove rod (2). The size of the silicon strip should be the same as or slightly larger than the maximum outer dimension of the groove rod (2); A2. Grinding the silicon strip shape; B. Slotting B1. Prepare a slotting jig (19) for straight slot processing; B2. The tool spindle tilts to a certain angle to process the inclined groove; C. Chamfer C1. Prepare chamfering jig (23); C2. Calculating the horizontal rotation angle of the chamfering jig (23) according to the vertical rotation angle of the silicon strip from the slotting step to the chamfering step and rotating the chamfering jig (23); C3. Calculate the tool deflection angle; C4, rotate the tool to the angle obtained in C3, and program the tool to perform chamfering; C5, the chamfering jig (23) is rotated on the horizontal plane to return to the initial position of step C2, and the fillet tool (66) is replaced to perform fillet processing; Processing the top plate (3) and the flange (1) involves cutting, drilling, and chamfering the silicon ingot to obtain the top plate (3) and the flange (1), and assembling them together with the groove rod (2) to form a silicon boat; In step A2, the outer shape of the silicon strip is ground to obtain a first reference plane (11) and a second reference plane (12) that are parallel to each other, a third reference plane (13) is processed, and the third reference plane (13) forms an acute angle with the second reference plane (12), a first side tooth surface (14) and a second side tooth surface (15) are processed, and the first side tooth surface (14) forms an obtuse angle with the first reference plane (11), and the second side tooth surface (15) forms an obtuse angle with the second reference plane (12), and the tooth top surface (16) is perpendicular to the first reference plane (11) and the second reference plane (12), and the tooth top surface (16), the first reference plane (11) and the second reference plane (12) are perpendicular to each other. 1) and the second reference surface (12) are perpendicular to the upper end surface (17), the tooth top surface (16), the first reference surface (11) and the second reference surface (12) are perpendicular to the lower end surface (18), a fillet transition is adopted between the tooth top surface (16) and the first side tooth surface (14) and the second side tooth surface (15), a fillet transition is also adopted between the first reference surface (11) and the second reference surface (12) and the first side tooth surface (14) and the second side tooth surface (15), and a fillet transition is also adopted between the first reference surface (11) and the second reference surface (12) and the third reference surface (13); In step B2, the tool spindle is tilted at a certain angle to grind, cut and groove multiple times to obtain multiple helical teeth (4); In step C2, the horizontal rotation angle of the chamfering jig (23) is calculated by using computer-aided design software, that is, a groove rod (2) model is made using the software, a line segment or a straight line perpendicular to the first reference plane (11) or the second reference plane (12) is made, and the angle between the line segment or the straight line and the bevel tooth (4) surface is measured to obtain the degree of the angle, which is the horizontal rotation angle of the chamfering jig (23). The straight line or line segment is parallel to the horizontal plane in step C; In step C3, the tool deflection angle is calculated with the aid of computer-aided design software. First, the groove rod (2) model is drawn through the software, and a basic coordinate system X'Y'Z' or an auxiliary surface is constructed. The X' axis of the basic coordinate system is perpendicular to the upper end surface (17), the Y' axis is perpendicular to the first reference surface (11), the Z' axis is perpendicular to the third reference surface (13), and the auxiliary surface is parallel to the upper end surface (17). After the basic coordinate system X'Y'Z' or the auxiliary surface is determined, it will no longer rotate. At this time, the groove rod (2) first rotates around an axis parallel to the X' axis, and the rotation angle is the same as the complementary angle of the angle between the second reference surface (12) and the third reference surface (13). Then, it rotates around an axis parallel to the Z' axis, and the rotation angle is the same as the horizontal plane rotation angle of the chamfering jig 23 calculated in step C2. Finally, the angle measurement tool in the software is used to measure the angle between the helical tooth 4 surface and the Y'Z' surface or the auxiliary surface after rotation. This angle is the required deflection angle of the tool.

2. The method for processing a helical gear silicon boat according to claim 1, characterized in that: In step B1, the slotting jig (19) makes the third reference surface (13) of the silicon strip processed in step A2 be in a horizontal position, and the slotting jig (19) is provided with at least a first supporting surface (21) and a second supporting surface (20), and the angle between the first supporting surface (21) and the second supporting surface (20) is the same as the angle between the first side tooth surface (14) and the second reference surface (12), and the second supporting surface (20) is parallel to the horizontal plane, and the first side tooth surface (14) is adhered to the first supporting surface (21) by means of an adhesive material such as adhesive wax, and the third reference surface (13) is adhered to the second supporting surface (20) by means of an adhesive material such as adhesive wax, and the straight tooth portion (5) is processed by tool setting.

3. The method for processing a helical gear silicon boat according to claim 2, characterized in that: In step C1, the chamfering jig (23) is provided with at least a first limiting surface (24), a second limiting surface (25), a third limiting surface (26) and a side limiting surface (27), the side limiting surface (27), the first limiting surface (24) and the second limiting surface (25) are perpendicular to the horizontal plane, the first reference surface (11) is adhered to the first limiting surface (24) by a sticky material such as sticky wax, the second reference surface (12) is adhered to the second limiting surface (25) by a sticky material such as sticky wax, the third reference surface (13) is adhered to the third limiting surface (26) by a sticky material such as sticky wax, and the upper end surface (17) or the lower end surface (18) is adhered to the side limiting surface (27) by a sticky material such as sticky wax.

4. The method for processing a helical gear silicon boat according to claim 3, characterized in that: In step C4, the tool is rotated to the angle obtained in C3, and the tool is programmed to perform chamfering (7). A disc-shaped tool with two chamfering surfaces is used to first chamfer the upper tooth groove surface (8), and then the same tool is used to chamfer the lower tooth groove surface (9) of the bevel tooth (4).

5. The method for processing a helical gear silicon boat according to claim 4, characterized in that: In step C5, the chamfering jig (23) is rotated on a horizontal plane to return to the initial position of step C2, and a fillet tool (66) is replaced to perform fillet (6) processing. The fillet tool (66) moves in a vertical plane relative to the groove rod (2), and the movement trajectory of the fillet tool (66) relative to the groove rod (2) is U-shaped and includes at least a first chamfer line (61), a first arc line (63), a tooth top chamfer line (65), a second arc line (64) and a second chamfer line (62). The first chamfer line (61) is parallel to the edge of the bevel tooth (4) on the first side tooth surface (14), and the radius of the first arc line (63) and the second arc line (64) is equal to the sum of the radius of the fillet tool (66) and the fillet radius. The tooth top chamfer line (65) is parallel to the edge of the tooth top surface (16), and the second chamfer line (62) is parallel to the edge of the bevel tooth (4) on the second side tooth surface (15).

6. A helical gear silicon boat, characterized by: The invention comprises a top plate (3), a flange (1) and a groove rod (2), wherein the groove rod is processed by any one of the methods of claims 1 to 5.

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