An electroplating solution online sampling and detection device for electroplating equipment
By designing the online sampling detection device for electroplating equipment, the problem of difficulty in the sedimentation rate of electroplating solution is solved, the accurate online detection of the sedimentary rate is achieved, the detection efficiency and accuracy are improved, and the quality control of electroplating processing is ensured.
Patent Information
- Application Number
- CN202411043961.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-31
- Publication Date
- 2025-01-24
- Estimated Expiration
- 2044-07-31
AI Technical Summary
The prior art is difficult to accurately measure the deposition rate of the electroplating solution, which affects the quality control of electroplating processing and production.
A type of electroplating solution online sampling detection device includes detection boxes, detectors, drop detection disks, mobile units, sampling samples and oscillation components. By taking the floating structure of the sample and the cooperation of the photoelectric sensor, the sedimentary rate of the electroplating solution is monitored in real time, and the service life of the filter is extended through an oscillating component.
The accurate online detection of electroplating solution deposition rate is achieved, the detection efficiency and accuracy are improved, and the quality control of electroplating processing is ensured.
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Figure CN118583565B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of electroplating solution detection, and in particular to an electroplating solution online sampling and detection device for electroplating equipment. Background Art
[0002] Products such as electroplated tinplate, electroplated zinc plate, electroplated chrome plate, color-coated plate, stainless steel plate, etc. are lightweight, beautiful and have good corrosion resistance. They are widely used in high-end manufacturing industries such as food, automobiles, and home appliances. In order to ensure the quality of these products, the electroplating solution is often tested and controlled online in real time during the production process.
[0003] The process parameters of the electroplating process include the concentration, pH value, temperature and deposition rate of the electroplating solution. The deposition rate is a very important process parameter, which directly affects the thickness of the coating obtained per unit time during electroplating. At present, the sampling and testing process of the electroplating solution often uses a drop test to test the concentration, pH value and other physical and chemical parameters of the sample solution, but it is impossible to accurately measure the deposition rate of the electroplating solution, which is not conducive to electroplating processing and production. Summary of the invention
[0004] The purpose of the present invention is to provide an online sampling and detection device for electroplating solution of electroplating equipment, aiming to solve the above technical problems.
[0005] The purpose of the present invention can be achieved by the following technical solutions:
[0006] An online sampling and detection device for electroplating solution of electroplating equipment comprises a detection box, a detector is fixedly arranged on one side of the detection box, a drop detection disk is arranged on the end face of the detector, a moving unit is arranged on one side of the detection box, the moving unit is connected to a mounting bracket and drives the mounting bracket to move horizontally and lift, a sampling piece is fixedly arranged on the mounting bracket, a sampling pool is fixedly arranged inside the detection box, oscillation components are arranged on both sides of the sampling pool, an oscillation bracket is arranged above the detection box, the oscillation component is connected to the oscillation bracket, a filter is arranged on the oscillation bracket, the bottom of the filter extends into the sampling pool, and the sampling piece moves between the filter and the drop detection disk to transfer the electroplating solution.
[0007] The sampling component includes a top cover, a fixed cylinder, a control rod and a sampling probe rod. The top cover is assembled and arranged on the upper end of the fixed cylinder, and the fixed cylinder is fixedly arranged on the mounting bracket. The sampling probe rod is coaxially slidably penetrated in the fixed cylinder, and the control rod is slidably arranged in the top cover. The bottom of the control rod axially extends into the sampling probe rod. A piston cavity is arranged inside the sampling probe rod, and a sampling cavity is penetrated at the bottom of the piston cavity. A sliding piston is fixedly arranged at the bottom of the control rod, and the sliding piston is adapted to be slidably installed in the piston cavity. A baffle is arranged on the top end of the sampling probe rod, a locating pin is arranged on the upper end of the baffle, and a sensing block is fixedly arranged on the upper end of the locating pin. A locating hole corresponding to the locating pin is arranged inside the top cover, and a photoelectric sensor is fixedly arranged on the top end of the locating hole, and the photoelectric sensor is directly facing the sensing block.
[0008] As a further solution of the present invention: an accommodating cavity is provided inside the fixing cylinder and the top cover, the baffle is provided in the accommodating cavity, and a floating spring is provided between the bottom of the baffle and the accommodating cavity.
[0009] As a further solution of the present invention: the positioning pin is axially slidably arranged in the positioning hole, and the tail end of the photoelectric sensor is communicatively connected with the detector through a signal lead.
[0010] As a further solution of the present invention: an extension sleeve is provided on the outside of the control rod, a matching sleeve is provided inside the extension sleeve, the inner wall of the matching sleeve is slidingly sealed with the control rod, the outer wall of the matching sleeve is threadedly sealed with the extension sleeve, a piston ring is extended from the bottom of the matching sleeve, and the piston ring is adapted to be slidably installed in the extension sleeve.
[0011] As a further solution of the present invention: an airbag is arranged on the outer wall of the bottom end of the control rod, a ventilation cavity is arranged inside the control rod along the axial direction, and the upper and lower ends of the ventilation cavity are respectively connected to the extension sleeve and the airbag.
[0012] As a further solution of the present invention: the oscillation assembly includes a shell, an oscillation plate, a connecting plate and a dual-axis motor, the shell is fixedly arranged inside the detection box, the oscillation plate is slidably arranged inside the shell, sliding rods are slidably penetrated at both ends of the oscillation plate, the upper and lower ends of the oscillation plate are connected to the shell through a return spring, the upper end of the oscillation plate is connected to the connecting plate through a connecting rod, the upper end of the connecting plate is fixedly connected to the oscillation bracket through a push rod, the dual-axis motor is fixedly arranged inside the detection box, the two output shafts of the dual-axis motor are fixedly sleeved with eccentric wheels, and the bottom end of the oscillation plate rests on the surface of the corresponding eccentric wheel.
[0013] As a further solution of the present invention: a limiting hole is provided through the upper end of the shell, a limiting column is fixedly provided at the bottom of the connecting plate, and the limiting column is adapted to be slidably installed in the limiting hole.
[0014] Beneficial effects of the present invention:
[0015] (1) By setting a sampling piece, during the sampling process, the bottom end of the sampling probe is immersed in the electroplating solution inside the filter. In a static state, the electroplating solution will be deposited on the surface of the sampling probe. The metal deposition will increase the mass of the sampling probe. The sampling probe adopts a floating structure. Its mass change will synchronously cause the induction block on the positioning pin to move up and down. The photoelectric sensor can monitor the slight distance change of the induction block in real time online, so that the deposition rate of the electroplating solution can be intuitively fed back and calculated in real time. After the detection is completed, the control rod is used to drive the sliding piston to move upward, and the electroplating solution will be sucked into the piston cavity through the sampling cavity. The sampling probe is used to realize the sampling of the electroplating solution and the online detection of the deposition rate, which is conducive to improving the detection efficiency.
[0016] (2) By setting a control rod, the control rod is used to drive the sliding piston to move in the piston chamber to achieve the suction and extrusion of the electroplating liquid. When squeezing the electroplating liquid, the matching sleeve is rotated so that the matching sleeve drives the piston ring to move downward in the extension sleeve. Since the extension sleeve is connected to the airbag through the ventilation cavity, the air pressure in the airbag increases and gradually expands until the airbag rests on the inner wall of the piston chamber. As the control rod continues to move downward, the bulging airbag will also scrape and clean the electroplating solution remaining on the inner wall of the piston chamber, thereby avoiding the influence of the quality of the residual solution on the deposition rate detection process and effectively improving the detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] The present invention will be further described below in conjunction with the accompanying drawings.
[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention.
[0019] Figure 2 It is a schematic diagram of the internal structure of the detection box in the present invention.
[0020] Figure 3 It is a schematic diagram of the structure of the sampling member in the present invention.
[0021] Figure 4 It is a schematic diagram of the structural explosion of the sampling piece in the present invention.
[0022] Figure 5 yes Figure 3 A schematic diagram of the enlarged structure at point A in the middle.
[0023] Figure 6 It is a structural schematic diagram of the control rod in the present invention.
[0024] Figure 7It is a structural schematic diagram of the oscillation component in the present invention.
[0025] Figure 8 It is a cross-sectional schematic diagram of the oscillating component in the present invention.
[0026] In the figure: 1, detection box; 2, detector; 3, drop detection plate; 4, mobile unit; 5, mounting bracket; 6, sampling piece; 610, top cover; 611, positioning hole; 612, photoelectric sensor; 613, signal lead; 620, fixed cylinder; 630, control rod; 631, sliding piston; 632, extension sleeve; 633, matching sleeve; 634, piston ring; 635, air bag; 636, ventilation cavity; 640, sampling probe; 641, sampling Sample chamber channel; 642, piston chamber; 643, baffle; 644, floating spring; 645, positioning pin; 646, induction block; 7, oscillation assembly; 710, shell; 711, limiting hole; 720, oscillation plate; 721, return spring; 722, slide rod; 723, connecting rod; 730, connecting plate; 731, limiting column; 732, push rod; 740, dual-axis motor; 741, eccentric wheel; 8, oscillation bracket; 9, filter; 10, sampling pool. DETAILED DESCRIPTION
[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0028] See also Figure 1 and Figure 2 As shown, the present invention is an online sampling and detection device for electroplating solution of electroplating equipment, comprising a detection box 1, a detector 2 is fixedly arranged on one side of the detection box 1, a drop detection disk 3 is arranged on the end face of the detector 2, a moving unit 4 is arranged on one side of the detection box 1, the moving unit 4 is connected to the mounting bracket 5 and drives the mounting bracket 5 to move horizontally and lift, a sampling piece 6 is fixedly arranged on the mounting bracket 5, a sampling pool 10 is fixedly arranged inside the detection box 1, oscillation components 7 are arranged on both sides of the sampling pool 10, an oscillation bracket 8 is arranged above the detection box 1, the oscillation component 7 is connected to the oscillation bracket 8, a filter 9 is arranged on the oscillation bracket 8, the bottom of the filter 9 extends into the sampling pool 10, and the sampling piece 6 moves between the filter 9 and the drop detection disk 3 to transfer the electroplating solution.
[0029] Specifically, in actual applications, a liquid inlet and a liquid outlet are respectively provided on the side walls at both ends of the sampling pool 10 for filling and replenishing the electroplating solution. At the same time, the filter 9 is extended into the electroplating solution. The filter 9 can filter the tiny particle impurities in the electroplating solution, so that the electroplating solution inside the filter 9 is relatively pure, which is beneficial to improve the detection effect. The sampling piece 6 is extended into the filter 9 for sampling, and then transferred to the top of the drip detection plate 3, and the electroplating solution is dripped onto the drip detection plate 3, and the physical and chemical parameters (such as pH value, temperature, component content, etc.) of the electroplating solution are detected using the detector 2.
[0030] It should be noted that the central axis of the sampling piece 6 and the filter 9 in this embodiment is in the same vertical plane as one of the drip ports of the drip detection disk 3, so that the sampling piece 6 can be accurately immersed in the electroplating solution inside the filter 9 during the lifting action, and can be accurately aligned with the drip port during the linear horizontal movement to complete the transfer detection process of the electroplating solution from the filter 9 to the drip detection disk 3.
[0031] It should be noted that the lifting and lowering action and the linear transverse movement of the sampling member 6 are realized by the moving unit 4. The moving unit 4 in this embodiment includes a longitudinal guide rail, a longitudinal slide, a transverse guide rail and a transverse slide. The longitudinal slide is slidably arranged on the longitudinal guide rail, and the transverse guide rail is arranged between the longitudinal slides at both ends. At the same time, the transverse slide is slidably installed on the transverse guide rail, wherein the mounting bracket 5 is fixedly arranged on one side of the transverse slide. By editing the relevant logic control program in advance, the sampling member 6 can complete the transverse displacement and longitudinal displacement of the specified stroke, thereby realizing the sampling process and the dripping process. The specific structural setting and working principle of the moving unit 4 are known in the prior art and will not be described in detail here.
[0032] like Figure 3-Figure 5 As shown, the sampling member 6 includes a top cover 610, a fixed cylinder 620, a control rod 630 and a sampling probe rod 640. The top cover 610 is assembled and arranged on the upper end of the fixed cylinder 620. The fixed cylinder 620 is fixedly arranged on the mounting bracket 5. The sampling probe rod 640 is coaxially slidably penetrated in the fixed cylinder 620. The control rod 630 is slidably arranged in the top cover 610. The bottom of the control rod 630 axially extends into the sampling probe rod 640. A piston cavity 642 is arranged inside the sampling probe rod 640. The bottom of the piston cavity 642 penetrates and is provided with a sampling probe. A sample cavity channel 641, a sliding piston 631 is fixedly provided at the bottom end of the control rod 630, and the sliding piston 631 is adapted to be slidably installed in the piston cavity 642, a baffle 643 is provided at the top end of the sampling probe 640, a positioning pin 645 is provided at the upper end of the baffle 643, and a sensing block 646 is fixedly provided at the upper end of the positioning pin 645, a positioning hole 611 corresponding to the positioning pin 645 is provided inside the top cover 610, and a photoelectric sensor 612 is fixedly provided at the top end of the positioning hole 611, and the photoelectric sensor 612 is directly opposite to the sensing block 646.
[0033] Specifically, by setting the sampling part 6, during the sampling process, the bottom end of the sampling probe 640 is immersed in the electroplating solution inside the filter 9. In a static state, the electroplating solution will be deposited on the surface of the sampling probe 640. The metal deposition will increase the mass of the sampling probe 640. The sampling probe 640 adopts a floating structure, and its mass change will synchronously cause the induction block 646 on the positioning pin 645 to undergo an up and down displacement change. The photoelectric sensor 612 can be used to monitor the slight distance change of the induction block 646 in real time online, so that the deposition rate of the electroplating solution can be intuitively fed back and calculated in real time. After the detection is completed, the control rod 630 is used to drive the sliding piston 631 to move upward, and the electroplating solution will be sucked into the piston cavity 642 through the sampling cavity 641, so that the sampling of the electroplating solution and the deposition rate online detection process are respectively realized by using the sampling probe 640, which is beneficial to improve the detection efficiency.
[0034] like Figure 3 and Figure 4 As shown, a receiving cavity is provided inside the fixing cylinder 620 and the top cover 610, a baffle 643 is provided in the receiving cavity, and a floating spring 644 is provided between the bottom of the baffle 643 and the receiving cavity.
[0035] Furthermore, the positioning pin 645 is axially slidably disposed in the positioning hole 611 , and the tail end of the photoelectric sensor 612 is communicatively connected with the detector 2 via a signal lead 613 .
[0036] Specifically, the baffle 643 can prevent the sampling probe 640 from escaping from the fixed cylinder 620. During the detection process, the mass change of the electroplating solution in the piston chamber 642 and the moving friction between the sliding piston 631 and the piston chamber 642 will cause the floating displacement of the sampling probe 640 in the accommodating chamber. Therefore, when performing the electroplating solution deposition rate detection, it is necessary to keep the sampling piece 6 still in the electroplating solution for a certain period of time. During this period of time, the only thing that can cause the floating displacement of the sampling probe 640 is the gradual deposition process of the metal in the solution on the surface of the sampling probe 640. As the metal is continuously deposited, the sampling probe 640 with a changed mass will drive the positioning pin 645 to move in the positioning hole 611. The photoelectric sensor 612 can monitor the subtle distance changes of the sensing block 646 in real time, and transmit the detection signal to the detector 2 through the signal lead 613.
[0037] It should be noted that the function of the floating spring 644 is to lift up the sampling probe 640 so that it has a certain up and down floating space. In order to improve the detection accuracy, the elastic coefficient of the floating spring 644 in this embodiment is relatively small, that is, the force required to force the floating spring 644 to undergo unit deformation is relatively small. At this time, the metal deposition mass required for the sampling probe 640 to be displaced will also be maintained at a relatively small value, thereby effectively improving the sensitivity to mass changes caused by metal deposition, thereby improving detection accuracy, and effectively expanding the detection range of the deposition rate of the electroplating solution.
[0038] like Figure 6 As shown, an extension sleeve 632 is provided on the outside of the control rod 630, and a matching sleeve 633 is provided inside the extension sleeve 632. The inner wall of the matching sleeve 633 is in sliding sealing cooperation with the control rod 630, and the outer wall of the matching sleeve 633 is in threaded sealing cooperation with the extension sleeve 632. A piston ring 634 is extended from the bottom of the matching sleeve 633, and the piston ring 634 is adapted to be slidably installed in the extension sleeve 632.
[0039] Furthermore, an airbag 635 is provided on the outer wall of the bottom end of the control rod 630 , and a ventilation cavity 636 is provided inside the control rod 630 along the axial direction. The upper and lower ends of the ventilation cavity 636 are respectively connected to the extension sleeve 632 and the airbag 635 .
[0040] Specifically, by setting a control rod 630, the control rod 630 is used to drive the sliding piston 631 to move in the piston chamber 642 to achieve the suction and extrusion action of the electroplating liquid. When squeezing the electroplating liquid, the matching sleeve 633 is rotated so that the matching sleeve 633 drives the piston ring 634 to move downward in the extension sleeve 632. Since the extension sleeve 632 is connected to the airbag 635 through the ventilation cavity 636, the air pressure in the airbag 635 increases and gradually expands until the airbag 635 rests on the inner wall of the piston chamber 642. As the control rod 630 continues to move downward, the bulging airbag 635 will also scrape and clean the electroplating solution remaining on the inner wall of the piston chamber 642, thereby avoiding the influence of the quality of the residual solution on the deposition rate detection process, and effectively improving the detection accuracy.
[0041] like Figure 7 and Figure 8As shown, the oscillation assembly 7 includes a shell 710, an oscillation plate 720, a connecting plate 730 and a dual-axis motor 740. The shell 710 is fixedly arranged inside the detection box 1, and the oscillation plate 720 is slidably arranged inside the shell 710. Slide rods 722 are slidably provided at both ends of the oscillation plate 720. The upper and lower ends of the oscillation plate 720 are connected to the shell 710 through a return spring 721. The upper end of the oscillation plate 720 is connected to the connecting plate 730 through a connecting rod 723. The upper end of the connecting plate 730 is fixedly connected to the oscillation bracket 8 through a top rod 732. The dual-axis motor 740 is fixedly arranged inside the detection box 1. The two output shafts of the dual-axis motor 740 are fixedly sleeved with eccentric wheels 741, and the bottom end of the oscillation plate 720 rests on the surface of the corresponding eccentric wheel 741.
[0042] Furthermore, a limiting hole 711 is provided through the upper end of the shell 710 , and a limiting column 731 is fixedly provided at the bottom of the connecting plate 730 . The limiting column 731 is adapted to be slidably installed in the limiting hole 711 .
[0043] Specifically, by setting up the oscillation component 7, when the bottom of the filter 9 is immersed in the electroplating solution in the sampling tank 10, the dual-axis motor 740 is started, which will drive the eccentric wheels 741 at both ends to start rotating. The eccentric wheels 741 will push the oscillation plate 720 to vibrate up and down during high-speed rotation. The oscillation plate 720 will synchronously transmit the vibration process to the oscillation bracket 8 through the connecting rod 723, the connecting plate 730 and the top rod 732, so that the filter 9 on the oscillation bracket 8 can realize the up and down reciprocating oscillation process, thereby effectively reducing and delaying the particles in the electroplating solution from clogging the filter 9 filter screen, thereby extending the service life of the filter 9.
[0044] The working principle of the present invention is as follows: Figure 1-Figure 8As shown, when in use, the electroplating solution is added to the sampling pool 10, and the bottom of the filter 9 is extended into the electroplating solution. The filter 9 can filter the tiny particle impurities in the electroplating solution, so that the electroplating solution inside the filter 9 is relatively pure. The sampling member 6 is controlled to start sampling and testing, and the bottom end of the sampling probe 640 is immersed in the electroplating solution inside the filter 9. In a static state, the electroplating solution will be deposited on the surface of the sampling probe 640. The metal deposition will increase the mass of the sampling probe 640. The sampling probe 640 adopts a floating structure, and its mass change will synchronously cause the sensor block 646 on the positioning pin 645 to move up and down. The photoelectric sensor 612 can monitor the slight distance change of the sensor block 646 in real time online, so that the deposition rate of the electroplating solution can be intuitively fed back and calculated in real time. After the detection is completed, the control rod 630 is used to drive the sliding piston 631 to move upward, and the electroplating solution will be sucked into the piston cavity 642 through the sampling cavity 641, and then The sampling member 6 is controlled to move to the top of the drop detection plate 3, and the control rod 630 is pushed downward to squeeze the sample solution inside the piston cavity 642. When squeezing the electroplating solution, the matching sleeve 633 is rotated so that the matching sleeve 633 drives the piston ring 634 to move downward in the extension sleeve 632. Since the extension sleeve 632 is connected to the airbag 635 through the ventilation cavity 636, the air pressure in the airbag 635 increases and gradually expands until the airbag 635 abuts against the inner wall of the piston cavity 642. As the control rod 630 continues to move downward, the bulging airbag 635 will also scrape and clean the electroplating solution remaining on the inner wall of the piston cavity 642, thereby avoiding the influence of the quality of the residual solution on the deposition rate detection process, and effectively improving the detection accuracy. The squeezed sample solution is dripped onto the drop detection plate 3, and the physical and chemical parameters (such as pH value, temperature, component content, etc.) of the electroplating solution are detected by the detector 2, thereby realizing the multi-item sampling and detection process of the electroplating solution.
[0045] The above is a detailed description of an embodiment of the present invention, but the content is only a preferred embodiment of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.
Claims
1. An online sampling and detection device for electroplating solution of electroplating equipment, comprising a detection box (1), a detector (2) fixedly arranged on one side of the detection box (1), a drop detection plate (3) arranged on the end surface of the detector (2), characterized in that: A moving unit (4) is provided on one side of the detection box (1), the moving unit (4) is connected to the mounting bracket (5) and drives the mounting bracket (5) to move horizontally and lift up and down, a sampling piece (6) is fixedly provided on the mounting bracket (5), a sampling pool (10) is fixedly provided inside the detection box (1), oscillation components (7) are provided on both sides of the sampling pool (10), an oscillation bracket (8) is provided above the detection box (1), the oscillation component (7) is connected to the oscillation bracket (8), a filter (9) is provided on the oscillation bracket (8), the bottom of the filter (9) extends into the sampling pool (10), and the sampling piece (6) moves between the filter (9) and the drop detection plate (3) to transfer the electroplating solution; The sampling member (6) comprises a top cover (610), a fixed cylinder (620), a control rod (630) and a sampling probe rod (640), wherein the top cover (610) is assembled and arranged on the upper end of the fixed cylinder (620), the fixed cylinder (620) is fixedly arranged on the mounting bracket (5), the sampling probe rod (640) is coaxially slidably penetrated in the fixed cylinder (620), the control rod (630) is slidably arranged in the top cover (610), the bottom of the control rod (630) axially extends into the sampling probe rod (640), a piston cavity (642) is arranged inside the sampling probe rod (640), a sampling cavity (641) is penetrated at the bottom of the piston cavity (642), and the control rod (630) A sliding piston (631) is fixedly arranged at the bottom, and the sliding piston (631) is adapted to be slidably installed in the piston cavity (642); a baffle (643) is arranged at the top end of the sampling probe (640); a positioning pin (645) is arranged at the upper end of the baffle (643); a sensing block (646) is fixedly arranged at the upper end of the positioning pin (645); a positioning hole (611) corresponding to the positioning pin (645) is arranged inside the top cover (610); a photoelectric sensor (612) is fixedly arranged at the top end of the positioning hole (611); the photoelectric sensor (612) is directly facing the sensing block (646); the photoelectric sensor (612) monitors the slight distance change of the sensing block (646) in real time online; An accommodating cavity is provided inside the fixing cylinder (620) and the top cover (610), the baffle (643) is arranged in the accommodating cavity, and a floating spring (644) is provided between the bottom of the baffle (643) and the accommodating cavity.
2. The electroplating solution online sampling and detection device for electroplating equipment according to claim 1, characterized in that: The positioning pin (645) is axially slidably disposed in the positioning hole (611), and the tail end of the photoelectric sensor (612) is communicatively connected to the detector (2) via a signal lead (613).
3. The electroplating solution online sampling and detection device for electroplating equipment according to claim 1, characterized in that: An extension sleeve (632) is arranged on the outside of the control rod (630), and a matching sleeve (633) is arranged inside the extension sleeve (632). The inner wall of the matching sleeve (633) is in sliding sealing cooperation with the control rod (630), and the outer wall of the matching sleeve (633) is in threaded sealing cooperation with the extension sleeve (632). A piston ring (634) is extended from the bottom of the matching sleeve (633), and the piston ring (634) is adapted to be slidably installed in the extension sleeve (632).
4. The electroplating solution online sampling and detection device for electroplating equipment according to claim 3, characterized in that: An airbag (635) is provided on the outer wall of the bottom end of the control rod (630), and a ventilation cavity (636) is provided inside the control rod (630) along the axial direction. The upper and lower ends of the ventilation cavity (636) are respectively connected to the extension sleeve (632) and the airbag (635).
5. The electroplating solution online sampling and detection device for electroplating equipment according to claim 1, characterized in that: The oscillation assembly (7) comprises a housing (710), an oscillation plate (720), a connecting plate (730) and a dual-axis motor (740); the housing (710) is fixedly arranged inside the detection box (1); the oscillation plate (720) is slidably arranged inside the housing (710); sliding rods (722) are slidably arranged at both ends of the oscillation plate (720); the upper and lower ends of the oscillation plate (720) are connected to the housing (710) via return springs (721); the upper end of the oscillation plate (720) is connected to the connecting plate (730) via a connecting rod (723); the upper end of the connecting plate (730) is fixedly connected to the oscillation bracket (8) via a push rod (732); the dual-axis motor (740) is fixedly arranged inside the detection box (1); two output shafts of the dual-axis motor (740) are fixedly sleeved with eccentric wheels (741); and the bottom end of the oscillation plate (720) abuts against the surface of the corresponding eccentric wheel (741).
6. The electroplating solution online sampling and detection device for electroplating equipment according to claim 5, characterized in that: A limiting hole (711) is provided through the upper end of the shell (710), a limiting column (731) is fixedly provided at the bottom of the connecting plate (730), and the limiting column (731) is adapted to be slidably installed in the limiting hole (711).
Citation Information
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