Nozzle mechanism, chip suction device and suction control method

Abstract

The present invention provides a nozzle mechanism, including a rotating shaft, a telescopic airbag, a nozzle piece and an air guide piece. An air guide channel is provided on the rotating shaft, and one end of the rotating shaft is used to connect to an external pressure-regulated air source. The telescopic airbag includes an airbag body, a first connecting piece and a second connecting piece. The airbag body is a hollow and connected multilayer structure. The first connecting piece is installed at one end of the airbag body and connected to the rotating shaft. The first connecting piece connects the air guide channel with the airbag body to provide air to the air guide channel to adjust the air pressure in the airbag body. The second connecting piece is installed at the other end of the airbag body. The second connecting piece is connected to the nozzle piece. The air guide piece is installed on the periphery of the nozzle piece to connect the external suction and discharge air source with the nozzle piece. The nozzle mechanism of the present invention satisfies a wide range of force control requirements when sucking or placing a chip by controlling the change of air pressure in the airbag body. The present invention also provides a chip suction and transfer device and a suction and transfer control method having the nozzle mechanism, thereby improving production and operation efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of electronic component production equipment, and in particular to a nozzle mechanism, a chip suction device and a suction control method. Background Art

[0002] During the automated chip processing of a die bonder or a chip mounter, the chip needs to be moved from one station to another. The transfer of the chip is basically carried out by a suction transfer device. During the transfer, the chip on the previous station is first sucked up by the suction nozzle of the suction transfer device, and then the suction nozzle is lifted and moved horizontally to the next station, and then the suction nozzle is lowered to place the chip on the next station. During the suction, the suction nozzle is pressed against the chip, and then the suction nozzle is started to suck the chip. When placing, the suction nozzle presses the held chip against the corresponding position. , and then the nozzle returns to normal pressure or blows air, and the chip will be separated from the nozzle; because the chip is a high-precision component, it is necessary to avoid damaging the chip as much as possible during operation. For example, when the nozzle is sucking or patching, the pressure on the chip cannot be too large. When the chip is pressed, it will also provide a corresponding rebound force to the nozzle that is equivalent to the pressure. Therefore, during the suction or patching process, it is necessary to ensure that the chip is stably held and the pressure on the chip is kept appropriate. For example, if the chip is placed on the glue-coated surface of the circuit board, a larger pressure is required than when sucking. In this way, the downward pressure required for the same chip when sucking or placing the patch is different; and for different types of chips, there are corresponding downward pressures required when sucking or patching. Usually, the downward pressure during patching is greater than the downward pressure during suction. The existing chip suction and transfer devices do not have a downward pressure that can control the force of the downward pressure when sucking or placing the patch. Summary of the invention

[0003] In view of the above, it is necessary for the present invention to provide a nozzle mechanism to achieve pressure adjustment of the nozzle when sucking or placing a chip, so as to meet a wide range of force control adjustment requirements when sucking and placing the chip.

[0004] To achieve the above objectives, the embodiments of the present invention adopt the following technical solutions:

[0005] A suction nozzle mechanism comprises a rotating shaft, a telescopic airbag, a suction nozzle piece and an air guide piece. An air guide channel is opened on the rotating shaft, and one end of the rotating shaft is used to connect with an external pressure-regulating air source. The telescopic airbag comprises an airbag body, a first connecting piece and a second connecting piece. The airbag body is a hollow and connected multi-layer structure. The first connecting piece is installed at one end of the airbag body and connected to the rotating shaft. The first connecting piece connects the air guide channel with the airbag body to provide air for filling and deflating the air guide channel to adjust the air pressure in the airbag body. The second connecting piece is installed at the other end of the airbag body. The second connecting piece is connected to the suction nozzle piece. The air guide piece is installed on the outer periphery of the suction nozzle piece to connect with the external suction and discharge air source and the suction nozzle piece to realize suction and discharge of the suction nozzle piece.

[0006] Furthermore, the nozzle mechanism includes a motor, the rotating shaft is an output shaft of the motor, and the rotating shaft is provided with the air guide channel penetrating through both ends along the axial direction.

[0007] Furthermore, the suction nozzle mechanism includes a machine base, a motor mounting base and an airbag mounting base, the machine base includes a bottom wall, a through assembly hole is opened on the bottom wall, the motor is fixedly connected to the motor mounting base, the airbag mounting base includes a seat body plate, a socket tube formed at the upper end of the seat body plate, and a receiving tube formed at the lower end of the seat body plate and connected to the socket tube, the motor mounting base is fixedly sleeved on the socket tube, the airbag mounting base is locked to the bottom wall through the seat body plate, the receiving tube is inserted into the assembly hole of the bottom wall, and the rotating shaft of the motor extends into the socket tube.

[0008] Furthermore, the suction nozzle part includes a connecting pipe fitting and a suction nozzle head, the connecting pipe fitting includes a connecting pipe, a guide plate fixedly mounted on the upper end of the connecting pipe, and a suction tip clamp fixedly installed at the lower end of the connecting pipe, the guide plate can be lifted and lowered in the accommodating tube, the suction nozzle head includes an air guide section and a suction tip section, the air guide section is inserted and fixed in the connecting pipe, the suction tip section passes through the suction tip clamp and is plugged into the air guide section and locked by the suction tip clamp.

[0009] Furthermore, a plurality of air inlet holes are formed on the outer peripheral surface of the connecting tube, the air guide component includes an air guide body and a connecting cover formed on the outer peripheral surface of the top of the air guide body, a shaft sleeve hole is provided on the top surface of the air guide body for the air guide body to be sleeved on the connecting tube, an air injection hole is provided on the side of the air guide body, the air injection hole is used to connect to an external air source, an air path is formed in the air guide body to connect to the air injection hole, and is connected to the air inlet holes on the outer peripheral surface of the connecting tube through the air path, and the connecting cover is used to be fixed to the bottom surface of the accommodating cylinder.

[0010] Further, the suction nozzle mechanism includes a coupling, the coupling includes a shaft body, the shaft body has a central channel extending axially, one end of the shaft body is connected to the rotating shaft, and the other end of the shaft body is formed with an external thread, the first connecting member includes a chassis and a barrel formed on the chassis, the chassis is connected to the airbag body, the barrel channel of the barrel passes through the chassis, the barrel is formed with an internal thread, which is threadedly connected to the external thread of the shaft body, and the air guide channel of the rotating shaft is connected to the airbag body through the central channel of the coupling.

[0011] Furthermore, the second connecting member includes a tray and a column connected to the tray, the tray is fixedly connected to the airbag body, the column and the barrel are distributed on the same axis, and the bottom end section of the column is formed with an external thread for threaded connection with the suction nozzle.

[0012] In addition, the present invention provides a chip suction device having the suction nozzle mechanism.

[0013] A chip suction and transfer device comprises a pressure regulating air source, a suction and discharge air source, and a suction nozzle mechanism. The regulating air source is connected to an air guide channel of a rotating shaft. By regulating the air supply and discharge of the air source to the air guide channel, the air pressure intensity in a telescopic airbag is regulated. The suction and discharge air source is connected to an air guide member. By regulating the air supply and discharge of the air source to the air guide member, the suction nozzle member is controlled to suck or place a chip.

[0014] Furthermore, the regulating gas source includes total gas, proportional valve 1, proportional valve 2, pressure regulating valve, solenoid valve 1, solenoid valve 2, solenoid valve 3 and a pressure gauge, the total gas is respectively connected to proportional valve 1, proportional valve 2 and the pressure regulating valve, solenoid valve 1 can be selectively switched to proportional valve 1 or proportional valve 2, solenoid valve 2 can be selectively switched to solenoid valve 1 or pressure regulating valve, solenoid valve 2 is connected to solenoid valve 3, and solenoid valve 3 is connected to the air guide channel of the rotating shaft of the suction nozzle mechanism through a pressure gauge.

[0015] Furthermore, the present invention provides a pipetting control method for the chip pipetting device.

[0016] A method for controlling the pipetting of a chip pipetting device, the operating steps are as follows:

[0017] A: First adjust the parameters of proportional valve 1, proportional valve 2, and pressure regulating valve;

[0018] B: According to the requirements of the process, the required air pressure is input to the telescopic airbag by closing / opening the solenoid valve 1 and the solenoid valve 2;

[0019] C: When the nozzle piece sucks the chip, the solenoid valve 1 switches to the channel connected to the proportional valve 1, the solenoid valve 2 switches to the channel connected to the solenoid valve 1, and the nozzle piece goes down to suck the chip;

[0020] D: After taking the chip, the nozzle needs to move from the material taking position to the patch position, the nozzle is raised, the solenoid valve 2 is switched to connect with the pressure regulating valve, and the nozzle moves on the horizontal plane;

[0021] E: When the nozzle moves to the bonding position, the nozzle is lowered, solenoid valve 1 switches to the channel connected to proportional valve 2, solenoid valve 2 switches to the channel connected to solenoid valve 1, and the nozzle is lowered to bond the chip.

[0022] The beneficial effects of the present invention are:

[0023] The suction nozzle mechanism of the present invention and the chip suction transfer device having the suction nozzle mechanism realize pressure adjustment of the suction nozzle when sucking or placing the chip by controlling the change of air pressure in the airbag body, thereby meeting a wide range of force control requirements when sucking and placing the chip, and improving production operation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1is a three-dimensional diagram of the nozzle mechanism;

[0025] Figure 2 This is an exploded view of the nozzle mechanism;

[0026] Figure 3 for Figure 1 A cross-sectional view of the nozzle mechanism shown;

[0027] Figure 4 It is a cross-sectional view of the connection between the motor of the nozzle mechanism and the telescopic airbag;

[0028] Figure 5 A cross-sectional view of the connection between the telescopic airbag installed in the housing and the nozzle piece;

[0029] Figure 6 It is a cross-sectional view of the connection between the telescopic airbag and the nozzle piece;

[0030] Figure 7 Schematic diagram of a chip pipetting device with a nozzle mechanism.

[0031] Description of reference numerals:

[0032] Base 10; motor 20; telescopic airbag 30; nozzle member 40; air guide member 50; rotating shaft 21; air guide channel 211; airbag body 31; first connecting member 32; second connecting member 33; bottom wall 11; mounting plate 12; motor body 22; fixing plate 23; motor mounting seat 60; airbag mounting seat 70; connecting hole 61; seat plate 71; sleeve tube 72; accommodating tube 73; coupling 80; shaft body 81; disk body 82; center channel 811 ; chassis 321; barrel 322; tray 331; column 332; connecting pipe fitting 41; nozzle head 42; connecting pipe 411; guide plate 412; nozzle fixture 413; air guide section 421; nozzle section 422; air guide body 51; connecting cover 52; sleeve hole 511; air injection hole 512; total air 90; proportional valve one 91; proportional valve two 92; pressure regulating valve 93; solenoid valve one 94; solenoid valve two 95; solenoid valve three 96; pressure gauge 97. DETAILED DESCRIPTION

[0033] The specific implementation of the present application is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described here is only used to illustrate and explain the present application, and is not used to limit the present application.

[0034] like Figure 1-Figure 6As shown, an embodiment of the present invention provides a nozzle mechanism, including a base 10, a motor 20, a telescopic airbag 30, a nozzle piece 40 and an air guide piece 50. The base 10 is used to be installed on an external device, such as a manipulator, and can drive the base as a whole to translate or lift. The motor 20 is installed on the base 10, including a rotating shaft 21, which is the output shaft of the motor 20. An air guide channel 211 that runs through both ends is axially opened on the rotating shaft 21, and one end of the air guide channel 211 is used to connect to an external pressure-regulated air source. The telescopic airbag 30 includes an airbag body 31, a first connecting piece 32 and a second connecting piece 33. The airbag body 31 is a hollow, connected, telescopic and stacked multi-layer structure, one end of which is open and the other end is closed. The first connecting piece 32 is installed at the open end of the airbag body 31, and the first connecting piece 32 is connected to the other end of the rotating shaft 21. The first connecting piece 32 has a hollow pipe, which connects the airbag body 31 with the air guide channel 211 of the rotating shaft 21, so that the pressure-regulated air source can be used to inflate and deflate the airbag body 31, thereby adjusting the change of the air pressure in the airbag body 31; the second connecting piece 33 is installed at the closed end of the airbag body 31, and the second connecting piece 33 is connected to the suction nozzle piece 40; the suction nozzle piece 40 is used to suck and place the chip; the air guide piece 50 is installed on the outer periphery of the suction nozzle piece 40, and forms an air guide channel with the suction nozzle piece 40, and the air guide piece 50 is used to connect to an external suction and discharge air source, and inflate and deflate the suction nozzle piece 40 through the suction and discharge air source, so that the suction nozzle piece 40 can be sucked or exhausted; and when the suction nozzle piece 40 is pressed against the chip surface when taking and placing an object, the reaction force it receives is transmitted to the second connecting piece 33 and the airbag body 31, and the change of the air pressure in the airbag body is adjusted to form different pressing forces on the chip.

[0035] In this embodiment, the base 10 includes a bottom wall 11 and a mounting plate 12 vertically disposed on one side of the bottom wall 11. The bottom wall 11 is provided with a through assembly hole for mounting the motor 20. The mounting plate 12 is provided with a fixing hole for mounting the base 10 to an external device.

[0036] The motor 20 includes a motor body 22 , the rotating shaft 21 mounted on the motor body, and a fixing plate 23 fixedly mounted on the motor body corresponding to the protruding end of the rotating shaft 21 .

[0037] In order to facilitate the installation of the motor 20 and the telescopic airbag 30, the nozzle mechanism further includes a motor mounting seat 60 and an airbag mounting seat 70. The motor mounting seat 60 is sleeve-shaped and has a central sleeve hole for being sleeved on the airbag mounting seat 70; a connecting hole 61 is opened on the top surface of the motor mounting seat 60 to cooperate with the fixing plate 23 of the motor 20, and the fixing plate 23 is locked to the top surface of the motor mounting seat 60 by screws.

[0038] The airbag mounting seat 70 includes a seat plate 71, a sleeve tube 72 formed at the upper end of the seat plate 71, and a receiving tube 73 formed at the lower end of the seat plate 71, and the seat plate 71 is penetrated to connect the sleeve tube 72 with the receiving tube 73. A fixing hole is provided on the seat plate 71 to fix the seat plate 71 to the bottom wall 11 of the base 10; the outer periphery of the sleeve tube 72 is formed with a thread or a step, and the central sleeve hole of the motor mounting seat 60 is sleeved, so that the motor mounting seat 60 is fixedly sleeved on the outer periphery of the sleeve tube 72. The receiving tube 73 is used to accommodate the telescopic airbag 30. The airbag mounting seat 70 is installed on the base 10 by locking the seat plate 71 to the bottom wall 11, and the receiving tube 73 is inserted into the assembly hole of the bottom wall 11, and the rotating shaft 21 of the motor 20 extends into the sleeve tube 72.

[0039] In order to facilitate the connection of the first connecting member 32 to the rotating shaft 21, the suction nozzle mechanism further includes a coupling 80, the coupling 80 includes a shaft body 81 and a disk body 82 installed at one end of the shaft body 81, the shaft body 81 has a central channel 811 extending in the axial direction and passing through the disk body 82, an external thread is formed on the outer peripheral surface of the shaft body 81, and a coupling hole is provided on the disk body 82 for connecting the disk body 82 to one end of the rotating shaft 21. It can be understood that a connecting disk is fixedly installed at one end of the rotating shaft 21 connected to the disk body 82 for fixed connection with the disk body 82, and correspondingly, the air guide channel 211 of the rotating shaft 21 is connected to the central channel 811 of the coupling 80.

[0040] The first connecting member 32 includes a chassis 321 and a barrel portion 322 formed on the chassis 321. The bottom surface of the chassis 321 is connected to the airbag body 31 and is sealedly connected to the open end of the airbag body 31. The barrel portion 322 has a barrel passage that passes through the bottom surface of the chassis 321, and the barrel portion 322 is formed with an internal thread for threaded connection with the external thread of the shaft body 81.

[0041] The second connecting member 33 includes a tray 331 and a column 332 connected to the bottom surface of the tray 331. The tray 331 is fixedly connected to the bottom surface of the telescopic airbag 30. The column 332 and the barrel 322 are distributed on the same axis. The bottom end section of the column 332 is formed with an external thread for threaded connection with the suction nozzle 40.

[0042] The nozzle member 40 includes a connecting pipe member 41 and a nozzle head 42. The connecting pipe member 41 includes a connecting pipe 411, a guide plate 412 fixedly sleeved on the upper end of the connecting pipe 411, and a nozzle fixture 413 fixedly installed on the lower end of the connecting pipe 411. The upper end of the connecting pipe 411 is formed with an internal thread for threading with the external thread of the column 332. A plurality of air inlet holes are formed on the outer circumference of the connecting pipe 411. The guide plate 412 is in the shape of a disk, and its diameter is equivalent to the inner diameter of the accommodating tube 73. After the nozzle member 40 is connected to the second connecting member 33, the guide plate 412 is accommodated in the accommodating tube 73 and can be lifted and lowered along the accommodating tube 73. The nozzle head 42 includes an air guide segment 421 and a suction head segment 422. The air guide segment 421 is inserted and fixed in the connecting tube 411. The suction head segment 422 passes through the suction head clamp 413 and is plugged into the air guide segment 421 and is locked by the suction head clamp 413. When the suction head segment 422 needs to be replaced, the suction head segment 422 can be replaced by loosening the suction head clamp 413.

[0043] The air guide 50 is installed on the suction nozzle 40 to connect to an external suction and discharge air source. The suction and discharge air source is used to inflate and discharge the suction nozzle 40 to achieve suction or exhaust of the suction nozzle 40. The air guide 50 includes an air guide body 51 and a connection cover 52 formed on the outer periphery of the top of the air guide body 51. The top surface of the air guide body 51 is provided with a shaft sleeve hole 511 for the air guide body 51 to be sleeved on the connecting pipe 411. The side of the air guide body 51 is provided with an air injection hole 512. The air injection hole 512 is used to connect to an external air source. An air path is formed in the air guide body 51 to connect the air injection hole 512. The air path is connected to the air inlet hole on the outer periphery of the connecting pipe 411 to achieve suction and discharge of the connecting pipe 411 by the suction and discharge air source, so as to achieve suction and discharge of the suction nozzle head 42. It can be understood that in order to improve air tightness, the opening end of the shaft sleeve hole 511 on the top surface of the air guide body 51 can form a stepped groove for placing a sealing gasket. The connecting cover 52 is used to be fixed to the bottom surface of the accommodating tube 73 by screws to cover the bottom surface of the accommodating tube 73. It can be understood that when installing the air guide 50, the air guide 50 can be first inserted into the connecting tube 411, and then the guide plate 412 is installed on the connecting tube 411, and then the connecting cover 52 is locked to the bottom surface of the accommodating tube 73.

[0044] When the nozzle mechanism is used to suck or place the chip, the air pressure strength in the telescopic airbag 30 can be adjusted by filling and releasing air into the telescopic airbag 30, so that the different pressing forces or reaction forces of the nozzle on the chip when sucking or placing can be adjusted. For example, when sucking the chip, a relatively small downward pressure can be applied to the chip surface, and the gas enters the central channel 811 of the coupling 80 from the air guide channel 211 of the rotating shaft 21, and then enters the airbag body 31 of the telescopic airbag 30; when placing the chip, a relatively large downward pressure can be applied when sucking, and it is necessary to inflate the telescopic airbag 30 to increase the air pressure strength in the telescopic airbag 30. Specifically, when the nozzle head 42 of the nozzle piece 40 is pressed against the chip, the chip exerts a reaction force on the nozzle piece 40, and the reaction force of the compressed nozzle piece 40 will be transmitted to the connecting pipe 41, the second connecting piece 33 and the airbag body 31 in sequence, that is, the connecting pipe 41, the nozzle head 42, the second connecting piece 33 and the airbag body 31 are telescoped as a whole.

[0045] When the suction nozzle 40 needs to rotate according to the suction or placement position of the chip, the rotating shaft 21 rotates, driving the coupling 80, the telescopic airbag 30 and the suction nozzle 40 to rotate integrally, thereby adjusting the rotation angle of the suction nozzle 40.

[0046] The chip suction and transfer device using the nozzle mechanism of the present invention includes a pressure regulating air source, a suction and discharge air source, and the nozzle mechanism. The regulating air source is connected to the end of the air guide channel 211 of the rotating shaft 21 that is opposite to the first connecting member 32. By regulating the air source to inlet and discharge air to the air guide channel 211, the air pressure intensity in the telescopic airbag 30 is regulated. The suction and discharge air source is connected to the air injection hole 512 of the air guide member 50. By inlet and discharge air to the air injection hole 512 by the suction and discharge air source, the nozzle member 40 is controlled to suck or place the chip.

[0047] Specifically, see Figure 7The present invention further provides a regulating air source, which includes total air 90, proportional valve 1 91, proportional valve 2 92, pressure regulating valve 93, solenoid valve 1 94, solenoid valve 2 95, solenoid valve 3 96 and pressure gauge 97. The total air 90 is respectively connected to proportional valve 1 91, proportional valve 2 92 and pressure regulating valve 93, solenoid valve 1 94 can be selectively switched to proportional valve 1 91 or proportional valve 2 92 to be turned on, solenoid valve 2 95 can be selectively switched to solenoid valve 1 94 or pressure regulating valve 93 to be turned on, solenoid valve 2 95 is connected to solenoid valve 3 96, and solenoid valve 3 96 is connected to the air guide channel 211 of the rotating shaft 21 of the suction nozzle mechanism through the pressure gauge 97. According to the operation, proportional valve 1 91 can be regarded as a material taking proportional valve, proportional valve 2 92 can be regarded as a fitting proportional valve, solenoid valve 1 94 can be regarded as a material taking / fitting solenoid valve, solenoid valve 2 95 can be regarded as a holding force solenoid valve, and solenoid valve 3 96 can be regarded as a pressure relief valve; it can be understood that proportional valve 1 91 can be set to a medium air pressure, such as 3 kPa, proportional valve 2 92 can be set to a high air pressure, such as 5 kPa, and pressure regulating valve 93 can be set to a low air pressure, such as 1 kPa.

[0048] When aspirating the chip, the aspiration control method is as follows. Specifically, the operation steps are as follows:

[0049] A: First adjust the parameters of proportional valve 1 91, proportional valve 2 92, and pressure regulating valve 93;

[0050] B: According to the requirements of the process, the required air pressure is input to the telescopic airbag by closing / opening the solenoid valve 1 94 and the solenoid valve 2 95;

[0051] C: When the suction nozzle 40 is used to suck the chip, it can be switched to medium air pressure, so that the solenoid valve 1 94 is switched to the channel connected to the proportional valve 1 91, and the solenoid valve 2 95 is switched to the channel connected to the solenoid valve 1 94, and the suction nozzle descends to suck the chip;

[0052] D: After taking the chip, the suction nozzle 40 needs to move from the material taking position to the chip placement position, and the suction nozzle 40 is raised along the Z axis. At this time, it can be switched to a smaller air pressure to maintain the ability to suck the chip. The use of a smaller air pressure is also conducive to saving air pressure loss. The solenoid valve 95 is switched to the channel connected to the pressure regulating valve 93, and the suction nozzle 40 moves along the XY axis on the horizontal plane;

[0053] E: When the suction nozzle 40 moves to the bonding position, it is necessary to switch to a larger air pressure, lower the suction nozzle 40 along the Z axis, switch the solenoid valve 1 94 to the channel connected to the proportional valve 2 92, switch the solenoid valve 2 95 to the channel connected to the solenoid valve 1 94, and the suction nozzle is lowered to bond the chip.

[0054] In the above process, when the telescopic airbag 30 switches from high pressure to low pressure, it needs to be deflated through the solenoid valve 3 96 , and the pressure gauge 97 monitors the pressure of the telescopic airbag 30 at all times to stabilize the air pressure.

[0055] The chip pipetting device pipetting control method of the present invention adopts airbag force control and combines multiple control modes, and has the following functional advantages:

[0056] 1): Use multiple channels and multiple gas circuits with different pressures for switching, thereby increasing the gas pressure switching speed and meeting the requirements of equipment operation efficiency;

[0057] 2): Using telescopic airbags as elastic elements for force control can meet a wide range of force control requirements;

[0058] 3): The hollow motor is used so that the air path can be directly connected to the telescopic airbag 30, shortening the air path length and improving the response efficiency. Reducing components makes the structure more lightweight;

[0059] 4) The telescopic airbag 30 is equivalent to a flexible coupling, which can play the role of automatic centering, shock mitigation and vibration absorption.

[0060] The above-described embodiments only express the implementation methods of the present invention, but they cannot be understood as limiting the scope of the patent of the present invention. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be based on the attached claims.

Claims

1. A chip aspirating device, comprising a pressure regulating gas source, a suction and discharge gas source, and a suction nozzle mechanism, characterized in that: The suction nozzle mechanism comprises a rotating shaft (21), a telescopic airbag (30), a suction nozzle member (40) and an air guide member (50). The rotating shaft (21) is provided with an air guide channel (211). One end of the rotating shaft (21) is used to connect to an external pressure-regulated air source. The telescopic airbag (30) comprises an airbag body (31), a first connecting member (32) and a second connecting member (33). The airbag body (31) is a hollow and interconnected multi-layer structure. The first connecting member (32) is installed at one end of the airbag body (31) and is connected to the first connecting member (32). The rotating shaft (21) is connected to the first connecting member (32), which connects the air guide channel (211) with the airbag body (31) so as to provide air to the air guide channel (211) to adjust the air pressure in the airbag body (31). The second connecting member (33) is installed at the other end of the airbag body (31). The second connecting member (33) is connected to the suction nozzle member (40). The air guide member (50) is installed on the outer periphery of the suction nozzle member (40) so as to connect an external suction and discharge air source with the suction nozzle member (40) so as to realize suction and discharge of air by the suction nozzle member (40). The pressure regulating air source is connected to the air guide channel (211) of the rotating shaft (21), and the air pressure intensity in the telescopic airbag (30) is regulated by the pressure regulating air source for air intake and exhaust of the air guide channel (211). The suction and exhaust air source is connected to the air guide member (50), and the suction and exhaust air source for air intake and exhaust of the air guide member (50) is used to control the suction nozzle member (40) to suck or place the chip. The pressure regulating gas source comprises a total gas (90), a proportional valve 1 (91), a proportional valve 2 (92), a pressure regulating valve (93), a solenoid valve 1 (94), a solenoid valve 2 (95), a solenoid valve 3 (96) and a pressure gauge (97); the total gas (90) is connected to the proportional valve 1 (91), the proportional valve 2 (92) and the pressure regulating valve (93) respectively; the solenoid valve 1 (94) can be selectively switched to the proportional valve 1 (91) or the proportional valve 2 (92) to be turned on; the solenoid valve 2 (95) can be selectively switched to the solenoid valve 1 (94) or the pressure regulating valve (93) to be turned on; the solenoid valve 2 (95) is connected to the solenoid valve 3 (96); the solenoid valve 3 (96) is connected to the gas guide channel (211) of the rotating shaft (21) of the suction nozzle mechanism through the pressure gauge (97).

2. The chip pipetting device according to claim 1, characterized in that: It comprises a motor (20), the rotating shaft (21) being the output shaft of the motor (20), and the rotating shaft (21) is provided with an air guide channel (211) extending through both ends along the axial direction.

3. The chip pipetting device according to claim 2, characterized in that: The invention comprises a machine base (10), a motor mounting base (60) and an airbag mounting base (70). The machine base (10) comprises a bottom wall (11). A through assembly hole is formed on the bottom wall (11). The motor (20) is fixedly connected to the motor mounting base (60). The airbag mounting base (70) comprises a seat plate (71), a sleeve tube (72) formed at the upper end of the seat plate (71), and a receiving tube (73) formed at the lower end of the seat plate (71) and connected to the sleeve tube (72). The motor mounting base (60) is fixedly sleeved on the sleeve tube (72). The airbag mounting base (70) is locked to the bottom wall (11) through the seat plate (71). The receiving tube (73) is sleeved in the assembly hole of the bottom wall (11). The rotating shaft (21) of the motor (20) extends into the sleeve tube (72).

4. The chip pipetting device according to claim 3, characterized in that: The suction nozzle member (40) comprises a connecting pipe member (41) and a suction nozzle head (42); the connecting pipe member (41) comprises a connecting pipe (411), a guide plate (412) fixedly sleeved on the upper end of the connecting pipe (411), and a suction nozzle clamp (413) fixedly mounted on the lower end of the connecting pipe (411); the guide plate (412) is accommodated in a accommodating cylinder (73) in a liftable manner; the suction nozzle head (42) comprises an air guide section (421) and a suction nozzle section (422); the air guide section (421) is inserted and fixed in the connecting pipe (411); the suction nozzle section (422) passes through the suction nozzle clamp (413) and is plugged into the air guide section (421) and is locked by the suction nozzle clamp (413).

5. The chip pipetting device according to claim 4, characterized in that: A plurality of air inlet holes are formed on the outer circumferential surface of the connecting tube (411); the air guide member (50) comprises an air guide body (51) and a connecting cover (52) formed on the outer circumference of the top of the air guide body (51); a shaft sleeve hole (511) is formed on the top surface of the air guide body (51) so that the air guide body (51) can be sleeved on the connecting tube (411); an air injection hole (512) is formed on the side surface of the air guide body (51); the air injection hole (512) is used to connect to an external air source; an air path is formed in the air guide body (51) to connect to the air injection hole (512) and is connected to the air inlet hole on the outer circumferential surface of the connecting tube (411) through the air path; and the connecting cover (52) is used to be fixedly connected to the bottom surface of the accommodating cylinder (73).

6. The chip pipetting device according to claim 2, characterized in that: The coupling (80) comprises a shaft body (81), the shaft body (81) having a central channel (811) extending in the axial direction, one end of the shaft body (81) being connected to a rotating shaft (21), and the other end of the shaft body (81) being formed with an external thread, a first connecting member (32) comprising a chassis (321) and a barrel portion (322) formed on the chassis (321), the chassis (321) being connected to an airbag body (31), a barrel portion (322) passing through the chassis (321), an internal thread being formed on the barrel portion (322) being threadedly connected to the external thread of the shaft body (81), and an air guide channel (211) of the rotating shaft (21) being connected to the airbag body (31) through the central channel (811) of the coupling (80).

7. The chip pipetting device according to claim 6, characterized in that: The second connecting member (33) comprises a tray (331) and a column (332) connected to the tray (331); the tray (331) is fixedly connected to the airbag body (31); the column (332) and the barrel (322) are arranged on the same axis; and the bottom end section of the column (332) is formed with an external thread for being screwed to the suction nozzle (40).

8. A method for controlling the pipetting of a chip using the chip pipetting device according to claim 1, characterized in that: The operation steps are as follows: A: First, adjust the parameters of proportional valve 1 (91), proportional valve 2 (92), and pressure regulating valve (93); B: According to the requirements of the process, the required air pressure is input to the telescopic airbag (30) by closing / opening the solenoid valve 1 (94) and the solenoid valve 2 (95); C: When the suction nozzle (40) sucks the chip, the solenoid valve 1 (94) switches to the channel connected to the proportional valve 1 (91), the solenoid valve 2 (95) switches to the channel connected to the solenoid valve 1 (94), and the suction nozzle (40) descends to suck the chip; D: After taking the chip, the suction nozzle (40) needs to move from the material taking position to the chip placement position, the suction nozzle (40) is raised, the solenoid valve 2 (95) is switched to be connected with the pressure regulating valve (93), and the suction nozzle (40) moves on the horizontal plane; E: When the suction nozzle (40) moves to the bonding position, the suction nozzle (40) is lowered, the solenoid valve 1 (94) is switched to the channel connected to the proportional valve 2 (92), the solenoid valve 2 (95) is switched to the channel connected to the solenoid valve 1 (94), and the suction nozzle is lowered to bond the chip.

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