A gas path nozzle unit and a gas purging device and a loading port manufactured thereby

Abstract

The application provides a gas path nozzle unit, a gas blowing device and a loading port manufactured by the gas path nozzle unit. The gas path nozzle unit comprises a nozzle piece, a bracket assembly, a shaft shoulder, a shaft neck and a receiving part on the upper part and the bottom of the nozzle piece, and the bracket assembly is arranged on both sides of the nozzle piece in pairs and is elastically connected with the receiving part of the nozzle piece. Each bracket assembly comprises a bracket, a rotating shaft and a torsional spring. One end of the torsional spring extends with a fixed arm, and the other end extends with a force applying arm. The bracket is arranged on both sides of the nozzle piece in a shoulder blade shape and is spaced from the shaft shoulder to form a first tolerance adjustment space between them. The torsional spring is connected with the bracket through the rotating shaft, so that the fixed arm elastically abuts against the inner shoulder surface of the bracket, and the force applying arm elastically supports the receiving part of the nozzle piece respectively, and the nozzle piece is forced to be elastically suspended between the brackets. Thus, the structure is thinned, and the tolerance adjustment and active pressing functions are achieved.

Description

Technical Field

[0001] This invention relates to docking technology for gas transmission, and more particularly to a gas path nozzle unit used in a gas purging device in a similar load port in a semiconductor manufacturing process. Background Technology

[0002] In semiconductor manufacturing processes, wafer handling must be carried out in a cleanroom environment to ensure yield and quality. With technological innovation, the industry has gradually begun to adopt FOUP (Front-Opening Unified Pod) as a high-cleanliness storage container during wafer transfer, thereby maintaining a higher level of cleanliness than the external atmosphere.

[0003] For the storage and retrieval of wafers in FOUP, the existing technology also provides a load port to load semiconductor wafers into or unload wafers from FOUP, and in the process, maintain a clean environment while transporting the semiconductor wafers stored in FOUP to the next process.

[0004] Furthermore, the loading port is also used as an important device for cleaning the FOUP. Although the semiconductor manufacturing equipment maintains a predetermined gas atmosphere suitable for wafer processing, the internal spaces of the FOUP and the semiconductor manufacturing equipment are still interconnected when the wafer is fed out. Therefore, a low cleanliness level inside the FOUP will adversely affect the gas atmosphere inside the semiconductor manufacturing equipment.

[0005] To address this, existing loading ports are typically equipped with a gas purging device. Through its gas nozzle, a predetermined inert gas is injected into the FOUP from the gas interface at the bottom, thereby replacing the FOUP with a predetermined gas atmosphere. In addition, this process can prevent the wafer from oxidizing during the process and maintain a low oxygen concentration inside the FOUP.

[0006] However, the gas path nozzles of existing gas purging devices have some design flaws. For example, patent publication number TW201350220A discloses a structural scheme for a purification nozzle unit. Its structure uses an external air source to drive the nozzle to rise and fall in order to provide the clamping force required for sealing at the joint surface. Therefore, there is no active clamping force to maintain the sealing performance. In addition, this structure requires the addition of an extra air path and sealing ring, so the structure is relatively complex and occupies a lot of vertical space. Moreover, there is no tolerance adjustment structure. When the FOUP interface is skewed, the nozzle cannot adaptively adjust and fit. Summary of the Invention

[0007] Therefore, the main objective of this invention is to provide a gas path nozzle unit and a gas purging device and loading port thereof, so as to achieve a thin-structure design while having tolerance adjustment and active clamping functions.

[0008] To achieve the above objectives, according to one aspect of the present invention, a gas path nozzle unit is provided, comprising: a nozzle element and a support assembly. The nozzle element has a shoulder and a journal on its upper part and a receiving part on its bottom. The support assemblies are arranged in pairs on both sides of the nozzle element and are elastically connected to the receiving part of the nozzle element. Each support assembly includes: a bracket, a rotating shaft, and a torsion spring. One end of the torsion spring extends a fixed arm, and the other end extends a force-applying arm. The bracket is arranged in a shoulder-like shape on both sides of the nozzle element and spaced apart from its shoulder to create a first tolerance adjustment space between them. The torsion spring is connected to the bracket via the rotating shaft so that its fixed arm elastically abuts against the inner shoulder surface of the bracket, and the force-applying arms elastically support the receiving part of the nozzle element, forcing the nozzle element to elastically suspend between the brackets.

[0009] In a possible preferred embodiment, in the air path nozzle unit, the force-applying arm of the torsion spring of at least one side of the support assembly extends from both sides of the spring coil of the torsion spring to form a pair of non-contact force-applying arms. The non-contact force-applying arms on the same side support the receiving portion of the nozzle component from both sides to form at least three points of elastic support for the receiving portion.

[0010] In a possible preferred embodiment, the receiving portion is arranged in the form of a groove on both sides of the bottom of the nozzle component.

[0011] In a possible preferred embodiment, the coils of the torsion spring extend from both ends of the fixed arm and are independent of each other. The force-applying arm extends from one end of each coil and is spaced apart from each other, supporting the nozzle receiving part from both sides respectively. The coils on the same side are connected to the bracket by either sharing the same rotating shaft or being equipped with independent rotating shafts, so that the coils on the same side are arranged coaxially.

[0012] In a possible preferred embodiment, the nozzle component has a barrier wall extending from its bottom to separate the two receiving portions and prevent the force-applying arm from intruding into the opposite side.

[0013] In a possible preferred embodiment, the nozzle is provided with an L-shaped air passage, the air inlet of which is located on the side of the nozzle on the barrier wall, and the air outlet is located on the top of the nozzle.

[0014] In a possible preferred embodiment, the air path nozzle unit further includes a sealing ring, wherein an annular wall is provided at the top air outlet of the nozzle component, the sealing ring is sleeved outside the annular wall, and the sealing ring is higher than the annular wall.

[0015] In a possible preferred embodiment, the air path nozzle unit further includes an opening retaining ring, wherein the two ends of the rotating shaft are provided with annular grooves for engaging with the opening retaining ring, so that the rotating shaft and the bracket are connected in a quick-release manner.

[0016] To achieve the above objectives, according to another aspect of the present invention, a gas purging device is also provided, comprising: a platform base, a gas supply unit, and further comprising: a gas path nozzle unit as described in any of the above examples, wherein the platform base is provided with nozzle holes at positions corresponding to the internal gas inlets of the wafer loading container, and a support assembly of each gas path nozzle unit is connected to the back of the platform base to support the nozzle component so that its shoulder abuts against and limits the platform base surface at the nozzle hole, allowing its journal to elastically expand and contract under pressure at the nozzle hole, wherein the size of the nozzle hole is larger than the journal to create a second tolerance adjustment space between the two, and the gas supply unit is in communication with the nozzle component.

[0017] To achieve the above objectives, according to another aspect of the present invention, a loading port is also provided for receiving a transported wafer loading container for purging and interacting with the wafer loading container to load and unload wafers, comprising: a gas purging device as described above, for injecting a predetermined inert gas into the wafer loading container from a gas passage interface at the bottom of the wafer loading container, thereby replacing the interior of the wafer loading container with a predetermined gas atmosphere.

[0018] The gas nozzle unit and the gas purging device and loading port provided by this invention cleverly design an elastic suspension structure between the support assembly and the nozzle, thus enabling active clamping capability and multi-degree-of-freedom tolerance adjustment function without relying too much on the vertical space of the platform base. This allows the nozzle to support a flat design, reducing the vertical space requirements. In addition, the support assembly adopts a shoulder armor-like structure design, which maintains a certain tolerance adjustment space on both sides of the nozzle while providing elastic support. This allows the nozzle to have a certain elastic sinking space. Combined with the tolerance adjustment space at the nozzle hole of the platform base, the nozzle can achieve active clamping capability to maintain sealing while realizing multi-degree-of-freedom, self-correcting tolerance adjustment function. This allows the nozzle to fit better with the FOUP gas interface in all directions, thereby improving airtightness. Attached Figure Description

[0019] The accompanying drawings, which form part of this application, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings:

[0020] Figure 1 This is a schematic diagram of the overall structure of the air path nozzle unit of the present invention;

[0021] Figure 2This is a schematic diagram of the assembly structure of the air path nozzle unit of the present invention;

[0022] Figures 3 to 4 This is a schematic diagram of the nozzle component in the air path nozzle unit of the present invention;

[0023] Figures 5 to 6 This is a schematic diagram of the torsion spring structure in the air path nozzle unit of the present invention;

[0024] Figure 7 This is a schematic cross-sectional view of the gas path nozzle unit and the platform base assembled in the gas purging device of the present invention.

[0025] Figure 8 This is a schematic cross-sectional view of the gas path nozzle unit and the bottom gas path interface of the FOUP in the gas purging device of the present invention.

[0026] Figure 9 This is a cross-sectional structural diagram of the automatic tolerance adjustment docking of the gas path nozzle unit and the bottom gas path interface of the FOUP in the gas purging device of the present invention.

[0027] Figure 10 This is a side cross-sectional view of the gas path nozzle unit and the FOUP bottom gas path interface automatically adjusted and connected in the gas purging device of the present invention.

[0028] Figure 11 This is a schematic diagram of the structure in the air nozzle unit of the present invention, in which the force-applying arms of the torsion springs form four-point elastic support with the receiving part.

[0029] Figures 12 to 13 This is a schematic diagram showing the connection between the platform base and the FOUP gas path in the gas purging device of the present invention;

[0030] Figure 14 This is a structural diagram of the existing FOUP and its bottom air passage interface;

[0031] Figures 15 to 16 This is a schematic diagram of the assembly structure of the gas path nozzle unit mounted on the platform base in the gas purging device of the present invention.

[0032] Explanation of reference numerals in the attached figures

[0033] Support assembly 1, nozzle component 2, sealing ring 3, second tolerance adjustment space 4, first tolerance adjustment space 5, FOUP 8, support 11, rotating shaft 12, opening retaining ring 13, torsion spring 14, air inlet 21, annular wall 22, journal 23, shoulder 24, air outlet 25, receiving part 26, barrier wall 27, air passage interface 81, platform base 91, fixed arm 141, force application arm 143, shaft hole 111, inner shoulder surface 112, annular groove 121, spring ring 142, nozzle hole 911. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0035] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0036] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0037] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance. The terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion.

[0038] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0039] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set up," "lay out," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances and in conjunction with existing technology. Furthermore, unless otherwise specified, the embodiments and features in the embodiments of this invention can be combined with each other. One or more of the components shown in the figures may be necessary or not, and the relative positional relationships between the components shown in the figures can be adjusted according to actual needs.

[0040] To achieve a thinner design for the air nozzle unit structure, while also providing tolerance adjustment and active clamping functions, such as... Figures 1 to 10 As shown, the present invention provides an example structure of a gas path nozzle unit, which includes: a nozzle component 2 and a support assembly 1, wherein as... Figures 3 to 4 As shown, the nozzle component 2 has a shoulder 24 and a journal 23 on the upper part and a receiving part 26 on the bottom. The shoulder 24 and the journal 23 are stepped. The receiving part 26 is in the form of a groove and is distributed on both sides of the bottom of the nozzle component 2. The bracket assembly 1 is arranged in pairs on both sides of the nozzle component 2 to be elastically connected with the receiving part 26 of the nozzle component 2.

[0041] Among them, such as Figures 1 to 2 As shown, each of the bracket assemblies 1 includes: a bracket 11, a rotating shaft 12, and a torsion spring 14. One end of the torsion spring 14 extends a fixed arm 141, and the other end extends a force-applying arm 143. The force-applying arm 143 may be configured with the same shape as the fixed arm 141. The bracket 11 is arranged in a shoulder-like shape on both sides of the nozzle component 2 and spaced apart from the shoulder 24 of the nozzle component 2 to create a first tolerance adjustment space 5 between them. In order to control the lateral dimension of the air path nozzle unit as much as possible, in an optional embodiment, the inner shoulder surface 112 of the bracket 11 facing the shoulder 24 of the nozzle component 2 has a shape similar to that of the shoulder 24. For example, in this example, the shoulder 24 of the nozzle component 2 is arc-shaped, so the inner shoulder surface 112 is also a similar concave arc surface, so as to be as close as possible to the nozzle component 2 while leaving the first tolerance adjustment space 5, thereby reducing the lateral dimension of the air path nozzle unit.

[0042] Furthermore, the torsion spring 14 is connected to the bracket 11 via the pivot 12. In an optional embodiment, to facilitate the production, assembly, and subsequent maintenance of the bracket assembly 1, the pivot 12 and the bracket 11 can be designed as a quick-release connection, such as... Figure 2As shown, the rotating shaft 12 has annular grooves 121 at both ends for engaging with the open retaining ring 13 and fixing it at the shaft hole 111 of the bracket 11, thereby facilitating quick replacement of the rotating shaft 12 and the torsion spring 14.

[0043] This configuration allows the fixing arm 141 of the torsion spring 14 to elastically abut against the inner shoulder surface 112 of the bracket 11, while its force-applying arms 143 respectively engage in the grooves of the receiving portion 26 of the nozzle component 2, thereby elastically supporting the receiving portion 26 of the nozzle component 2 and forcing the nozzle component 2 to elastically suspend between the brackets 11. This achieves active clamping capability and multi-degree-of-freedom tolerance adjustment function without relying too much on the vertical space of the platform base 91, thus enabling the nozzle component 2 to support a flat design and reduce the vertical space requirements.

[0044] Furthermore, it is worth mentioning that, in order to maximize the degree of freedom in adjusting the tolerance of the nozzle component 2, in an optional embodiment, the spring coil 142 of at least one side of the support assembly 1 torsion spring 14 of the air path nozzle unit is integral, and its force-applying arm 143 extends from both sides of the spring coil 142 of the torsion spring 14, forming a pair of non-contact force-applying arms 143. The two non-contact force-applying arms 143 on the same side are respectively inserted into the grooves of the receiving portion 26 of the nozzle component 2 from both sides, supporting the receiving portion 26 of the nozzle component 2 at two points, so that the non-contact force-applying arms 143 support each other independently without interfering with each other. If the force-applying arm 143 of the torsion spring 14 of a single side of the support assembly 1 is arranged in this way, it can form a three-point elastic support for the receiving portion 26. If the force-applying arms 143 of the torsion spring 14 of both sides of the support assembly 1 are arranged in this way, it can form a three-point elastic support for the receiving portion 26. Figure 11 As shown, four-point elastic support can be formed for the receiving part 26, thereby supporting the nozzle 2 to shift and tilt at multiple support points, thereby increasing the degree of freedom of the nozzle 2 to adjust tolerance.

[0045] Furthermore, to better improve the flexibility of the nozzle component 2 when adjusting its tolerance, in optional embodiments, such as... Figure 5As shown, the spring coils 142 of the torsion spring 14 extend from both ends of the fixed arm 141 and are independent of each other. The force-applying arms 143 extend from one end of each spring coil 142. The force-applying arms 143 on the same side are spaced apart to form a non-contact configuration, supporting the nozzle component 2 receiving part 26 from both sides. The spring coils 142 on the same side are connected to the bracket 11 by either sharing the same rotating shaft 12 or being equipped with independent rotating shafts 12, so that the spring coils 142 on the same side are arranged coaxially. With this configuration, when the top of the nozzle component 2 is subjected to pressure from different directions, the corresponding spring coils 142 on the force-applying arms 143 at each support point at the bottom can provide elastic force to their respective force-applying arms 143 without interfering with the spring coils 142 on other sides. This improves the flexibility of each support point when under pressure adjustment, making the adjustment smoother and less abrupt. Therefore, it is easier to make the nozzle component 2 and the bottom air passage interface 81 of the FOUP 8 fit tightly together, improving the reliability of tolerance adjustment.

[0046] On the other hand, to prevent the force arm 143 from dislodging from the receiving part 26 during the tolerance adjustment process of the nozzle component 2, and also to achieve a flattened design of the nozzle component 2, in this example, as Figures 3 to 4 As shown, the nozzle component 2 has a barrier wall 27 extending from its bottom. The barrier arm extends above the receiving portion 26 to separate the two receiving portions 26, preventing the force-applying arm 143 from intruding into the other side during the tolerance adjustment of the nozzle component 2, thereby improving the reliability of the support assembly 1 in elastically supporting the nozzle component 2.

[0047] Meanwhile, in order to support the flat design of the nozzle component 2, in this example, the nozzle component 2 is provided with an L-shaped air passage. The air inlet 21 of the air passage is located on the side of the nozzle component 2 on the barrier wall 27, and the air outlet 25 is located on the top of the nozzle component 2. Thus, the barrier wall 27 is used to transfer the air passage to the lateral direction. Compared with the traditional solution of setting the air inlet 21 at the bottom of the nozzle component 2, it can avoid the problem of occupying vertical space when connected to the air supply equipment. This allows the gas purging device made with this type of air passage nozzle unit to have a thinner platform base 91, thereby improving the space utilization of the equipment.

[0048] Furthermore, to improve the airtightness of the nozzle component 2 and the bottom air passage interface 81 of the FOUP 8, in an optional embodiment, such as Figure 2 As shown, the air path nozzle unit further includes a sealing ring 3, wherein an annular wall 22 is provided at the air outlet 25 at the top of the nozzle component 2, the sealing ring 3 is fitted over the annular wall 22, and the sealing ring 3 is higher than the annular wall 22. Figure 8 As shown, when the nozzle 2 is connected to the air passage interface 81 at the bottom of the FOUP 8, the sealing ring 3 can make elastic contact with the air passage interface 81 of the FOUP 8 to enhance air tightness.

[0049] On the other hand, corresponding to the above example of the gas path nozzle unit, such as Figures 7 to 16 As shown, the present invention also provides a gas purging device, which includes: a platform base 91, a gas supply unit (not shown in the figure), and a gas path nozzle unit as described in any of the above examples. The platform base 91 is provided with nozzle holes 911 at the positions of the internal gas inlets of the wafer loading container (hereinafter referred to as FOUP 8). The support assembly 1 of each gas path nozzle unit is bolted to the back of the platform base 91 to support the nozzle 2 so that its shoulder 24 elastically abuts against the surface of the platform base 91 at the nozzle hole 911 and forms a limit, so that the journal 23 of the nozzle 2 is elastically expanded and contracted under pressure at the nozzle hole 911. The size of the nozzle hole 911 needs to be larger than the journal 23 to separate a second tolerance adjustment space 4 between the two. The gas supply unit is connected to the nozzle 2.

[0050] Specifically, such as Figures 6 to 8 As shown, after the air nozzle unit is connected to the platform base 91, the torsion spring 14's force-applying arm 143 will change from the unforced position A to the pre-compression state B, thereby elastically supporting the shoulder 24 of the nozzle 2 against the surface of the platform base 91, preventing the nozzle 2 from falling out and preparing for pre-compression. When the nozzle 2 contacts the FOUP 8 air interface 81, due to the pressure of the FOUP 8, the torsion spring 14's force-applying arm 143 will be in the pressurized working state C. At this time, the torsion spring 14's force-applying arm 143 will apply active clamping force to make the nozzle 2 abut against the FOUP 8 air interface 81, thereby improving airtightness.

[0051] Furthermore, such as Figures 9 to 10 As shown, when the FOUP 8 air path interface 81 is offset from the nozzle component 2, the multi-degree-of-freedom tolerance adjustment function of the air path nozzle unit begins to manifest. Because the non-contact torsion spring 14 and its force-applying arm 143 can elastically support the receiving part 26 of the nozzle component 2 from four points, and these points do not interfere with each other, therefore... Figure 10 As shown, in extreme cases, one of the force-applying arms 143 on the left and right sides of the same side can be under force, while the other can be unloaded, thus avoiding elastic interference from other force-applying arms 143. This increases the degree of freedom for tilting and adjusting the nozzle component 2, allowing the nozzle component 2 to better fit with the FOUP 8 air passage interface 81 in all directions, thereby improving airtightness. Furthermore, after the FOUP 8 is removed, it can automatically return to the pre-pressurized state via the torsion spring 14, preparing for the next docking.

[0052] On the other hand, corresponding to the above example, the present invention also provides a loading port for receiving the transported FOUP 8 purging object container and interacting with the FOUP 8 to load and unload wafers, comprising: a gas purging device as described above, for injecting a predetermined inert gas into the FOUP 8 from the gas passage interface 81 at the bottom of the FOUP 8, thereby replacing the FOUP 8 with a predetermined gas atmosphere.

[0053] In summary, the gas nozzle unit and the gas purging device and loading port made from it provided by this invention cleverly design an elastic suspension structure between the support assembly 1 and the nozzle 2. This allows for active clamping capability and multi-degree-of-freedom tolerance adjustment without excessive reliance on the vertical space of the platform base 91. Consequently, the nozzle 2 can support a flat design, reducing the vertical space requirement. Furthermore, the support assembly 1 adopts a shoulder armor-like structure design, maintaining a certain tolerance adjustment space on both sides of the nozzle 2 while providing elastic support. This allows the nozzle 2 to have a certain elastic downward space. Combined with the tolerance adjustment space at the nozzle hole 911 of the platform base 91, the nozzle 2 possesses active clamping capability to maintain sealing while achieving multi-degree-of-freedom, automatically self-aligning tolerance adjustment. This allows the nozzle 2 to better fit with the FOUP 8 gas interface 81 in all directions, thereby improving airtightness.

[0054] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The present invention is limited only by the claims and their full scope and equivalents. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the invention should be included within the protection scope of the invention.

[0055] Furthermore, various different implementations of the present invention can be combined arbitrarily, as long as they do not violate the spirit of the present invention, they should also be regarded as the content disclosed in the present invention.

Claims

1. A gas path nozzle unit, characterized in that... include: The nozzle component and the bracket assembly are provided. The nozzle component has a shoulder and a journal on its upper part and a receiving part on its bottom. The bracket assemblies are arranged in pairs on both sides of the nozzle component and are elastically connected to the receiving part of the nozzle component. Each bracket assembly includes a bracket, a rotating shaft, and a torsion spring. One end of the torsion spring extends into a fixed arm and the other end extends into a force-applying arm. The bracket is arranged in a shoulder shape on both sides of the nozzle component and is spaced apart from its shoulder to create a first tolerance adjustment space. The torsion spring is connected to the bracket via the rotating shaft so that its fixed arm elastically abuts against the inner shoulder surface of the bracket and the force-applying arm elastically supports the receiving part of the nozzle component, forcing the nozzle component to elastically suspend between the brackets.

2. The air path nozzle unit according to claim 1, characterized in that, At least one of the support components has a torsion spring with a lever arm extending from both sides of the torsion spring coil to form a pair of non-contact lever arms. The non-contact lever arms on the same side support the receiving part of the nozzle component from both sides to form at least three points of elastic support for the receiving part.

3. The air path nozzle unit according to claim 1, characterized in that, The receiving part is arranged in the shape of a groove on both sides of the bottom of the nozzle component.

4. The air path nozzle unit according to claim 1, characterized in that, The spring coils of the torsion spring extend from both ends of the fixed arm and are independent of each other. The force-applying arm extends from one end of each spring coil and is spaced apart from each other, supporting the nozzle receiving part from both sides. The spring coils on the same side are connected to the bracket by either sharing the same rotating shaft or being equipped with independent rotating shafts, so that the spring coils on the same side are arranged coaxially.

5. The air path nozzle unit according to claim 1, characterized in that, The nozzle component has a barrier wall extending from its bottom to separate the two receiving parts and prevent the force-applying arm from intruding into the opposite side.

6. The air path nozzle unit according to claim 5, characterized in that, The nozzle component has an L-shaped air passage inside, with the air inlet located on the side of the nozzle component on the barrier wall and the air outlet located on the top of the nozzle component.

7. The air path nozzle unit according to claim 1, characterized in that, Also includes: A sealing ring is provided, wherein the nozzle component has an annular wall at the top air outlet, the sealing ring is fitted over the annular wall, and the sealing ring is higher than the annular wall.

8. The air path nozzle unit according to claim 1, characterized in that, Also includes: An open retaining ring is provided, wherein the two ends of the rotating shaft are provided with annular grooves for mating with the open retaining ring, so that the rotating shaft and the bracket are connected in a quick-release manner.

9. A gas purging device, comprising: A platform base and a gas supply unit are characterized in that they further include: a gas path nozzle unit as described in any one of claims 1 to 8, wherein a nozzle hole is provided on the platform base at the position of the internal gas supply port corresponding to the wafer loading container, and a support assembly of each gas path nozzle unit is connected to the back of the platform base to support the nozzle component so that its shoulder abuts against the platform base surface at the nozzle hole and limits its movement, so that its journal is elastically expanded and contracted under pressure at the nozzle hole, wherein the size of the nozzle hole is larger than the journal to create a second tolerance adjustment space between the two, and the gas supply unit is in communication with the nozzle component.

10. A loading port for receiving a conveyed wafer loading container for purge and for interacting with the wafer loading container to load and unload wafers, characterized in that... include: The gas purging apparatus as described in claim 9 injects a predetermined inert gas into the wafer loading container from the gas passage interface at the bottom of the wafer loading container, thereby replacing the interior of the wafer loading container with a predetermined gas atmosphere.

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