Boat-supported transportation system, processing system, and boat-supported transportation method

Abstract

The present disclosure relates to the technical field of semiconductor or photovoltaic materials, and specifically to a boat support transportation system, a processing system and a boat support transportation method, which solves the problem that the boat support carried by the cantilever paddle is unable to accurately enter and exit the reactor due to the easy deformation of the cantilever paddle, and the boat support transportation accuracy is low. The boat support transportation system includes a track outside the furnace, a transportation track, a boat pushing device, a buffer device and a boat moving device. The track inside the furnace, the track outside the furnace and the transportation track are used to carry the boat support, the boat pushing device transports the boat support between the track inside the furnace, the track outside the furnace and the transportation track, and the boat moving device transports the boat support between the track outside the furnace and the buffer device, realizing the automated transportation of the boat support, replacing the cantilever paddle structure to carry and transport the boat support, avoiding the displacement of the boat support during transportation due to the deformation of the cantilever paddle, so that the boat support can be accurately sent into or out of the reactor, and improving the accuracy of automated transportation.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor or photovoltaic material technology, and in particular to a boat-supported transportation system, a processing system, and a boat-supported transportation method. Background Art

[0002] When transporting sheet materials, the sheet materials are loaded in a boat, and the boat is supported by a boat support, which is placed on the blade support end of the cantilever paddle structure. The cantilever paddle structure is arranged on the boat push assembly. Driven by the boat push assembly, the cantilever paddle structure sends the boat support, the boat, and the sheet materials carried by the boat into or out of the reactor.

[0003] However, as the weight and length of the boat support continue to increase, the paddles of the cantilever paddle structure usually need to be made very long. The blade support end is inevitably deformed and drooped due to the influence of its own gravity and the gravity of the boat support, boat and sheet materials, causing the boat support to shift during transportation, resulting in the boat support being unable to accurately enter and exit the reactor, and the transportation accuracy of the boat support is low. Summary of the Invention

[0004] In view of this, the embodiments of the present disclosure provide a boat-supported transportation system, a processing system and a boat-supported transportation method, which solve the problem that the cantilever paddle is easily deformed, resulting in the boat support being unable to accurately enter and exit the reactor, and the boat support's transportation accuracy is low.

[0005] In a first aspect, an embodiment of the present disclosure provides a boat support transport system, which is applied to at least one reactor, wherein the reactor has a reaction chamber and an in-furnace rail arranged in the reaction chamber, and the in-furnace rail is configured to carry a boat support; wherein the boat support transport system includes: an out-furnace rail, a first end of which can be docked with one end of the in-furnace rail, and the out-furnace rail is configured to carry the boat support; at least one set of transport rails, one end of which can be docked with the second end of the out-furnace rail, and the transport rail is configured to carry the boat support; a boat pushing device, which is configured to drive the boat support to move along the extension direction of the out-furnace rail; a buffer device, which is docked with the out-furnace rail The boat support is arranged adjacent to the track and is configured to cache the boat support; the boat moving device is configured to move the boat support from the track outside the furnace to the cache device, or move the boat support from the cache device to the track outside the furnace; wherein, when the first end of the track outside the furnace is docked with one end of the track inside the furnace, the boat pushing device drives the boat support to move from the track outside the furnace to the track inside the furnace, or from the track inside the furnace to the track outside the furnace; wherein, when one end of the transport track is docked with the second end of the track outside the furnace, the boat pushing device drives the boat support to move from the track outside the furnace to the transport track, or from the transport track to the track outside the furnace.

[0006] In some embodiments, there are multiple cache devices, and the multiple cache devices are arranged at intervals in the vertical direction; the boat moving device transports the boat support in the horizontal direction; the boat support transportation system also includes: a lifting device, connected to the boat moving device, configured to drive the boat moving device to rise and fall, so as to drive the boat support to rise and fall, so that the boat support can be transported by the boat moving device from the outside furnace track to any group of the cache devices, or the boat support can be transported by the boat moving device from any group of the cache devices to the outside furnace track.

[0007] In some embodiments, there are multiple reaction furnaces, and the multiple reaction furnaces are arranged at intervals in the vertical direction; wherein, the lifting device is also connected to the external furnace track, and the lifting device is further configured to drive the external furnace track to rise and fall so that the external furnace track can dock with the internal furnace track of any one of the reaction furnaces.

[0008] In some embodiments, the lifting device is also connected to the boat pushing device, and the lifting device is further configured to drive the boat pushing device to lift and lower, so that the boat pushing device can push the boat support from the external furnace track to the internal furnace track of any one of the reaction furnaces, or from the internal furnace track of any one of the reaction furnaces to the external furnace track.

[0009] In some embodiments, the lifting device includes: a supporting assembly, which is respectively connected to the boat pushing device, the external furnace rail and the boat moving device, and carries the boat pushing device, the external furnace rail and the boat moving device, wherein the supporting assembly has at least one first guide hole passing through the supporting assembly in a vertical direction; a lifting drive, which is connected to the supporting assembly and is configured to drive the supporting assembly to lift and lower; a guide column, which is vertically arranged and penetrates into the first guide hole.

[0010] In some embodiments, the outer furnace rail is slidably connected to the supporting assembly; wherein, the boat-supported transport system further includes: a docking drive device, which is arranged on the supporting assembly and connected to the outer furnace rail, and is configured to drive the outer furnace rail to move along the extension direction of the outer furnace rail so that the outer furnace rail can dock with the inner furnace rail or the transport rail.

[0011] In some embodiments, the boat moving device includes: at least two groups of boat moving components, which are respectively arranged at the first end and the second end of the external furnace track, and are respectively configured to carry the two ends of the boat support.

[0012] In some embodiments, both ends of the boat support have a first clamped part; wherein, the boat moving assembly includes: a vertical support member, which is arranged on the bearing assembly; a horizontal support member, which is connected to the vertical support member; a vertical driving member, which includes a first fixed part and a first movable part, the first fixed part is configured to drive the first movable part to move, and the first fixed part is arranged on the horizontal support member; a horizontal driving member, which includes a second fixed part and a second movable part, the second fixed part is configured to drive the second movable part to move, and the second fixed part is connected to the first movable part so that the horizontal driving member can move in the vertical direction under the drive of the vertical driving member; a first clamping member, which is located above the outer furnace rail, the first clamping member is connected to the second movable part, can move in the horizontal direction under the drive of the horizontal driving member, and can move in the vertical direction with the horizontal driving member under the drive of the vertical driving member, wherein, when the boat support is located between at least two groups of the boat moving assemblies, the projections of the first clamping member and the first clamped part on the horizontal plane can overlap.

[0013] In some embodiments, the vertical support member includes at least one columnar structure extending in a vertical direction, and the columnar structure is arranged on the bearing assembly; wherein, the boat moving assembly also includes: a connecting plate having at least one second guide hole, the top end of the columnar structure passes through the second guide hole and is connected to the horizontal support member, and the connecting plate is configured to connect the first movable part and the second fixed part.

[0014] In some embodiments, both ends of the boat support have a second clamped part; wherein, the boat pushing device includes: at least one second clamping member, configured to clamp the second clamped part; a boat pushing drive assembly, connected to the second clamping member, configured to drive the second clamping member to clamp the second clamped part, and drive the boat support to move along the extension direction of the furnace outer track.

[0015] In some embodiments, the number of the second clamping members is two; wherein, under the drive of the boat push drive assembly, one second clamping member clamps one second clamped portion and drives the boat support to move along the extension direction of the outer furnace track so that the boat support moves between the outer furnace track and the inner furnace track, and another second clamping member clamps another second clamped portion and drives the boat support to move along the extension direction of the outer furnace track so that the boat support moves between the outer furnace track and the transport track.

[0016] In a second aspect, an embodiment of the present disclosure provides a processing system comprising: at least one reaction furnace having a reaction chamber and an in-furnace track arranged in the reaction chamber, wherein the in-furnace track is configured to carry a boat tray; and the boat tray transport system as described in the first aspect is configured to transport the boat tray to the in-furnace track.

[0017] In some embodiments, the extension direction of the furnace track is the same as the extension direction of the reaction chamber, and the reaction furnace also has a furnace mouth, and the plane where the furnace mouth is located is perpendicular to the extension direction of the furnace track; wherein the processing system also includes: a furnace door, configured to close or expose the furnace mouth; a first furnace door drive device, connected to the furnace door, configured to drive the furnace door to move in a first direction, and the first direction is perpendicular to the extension direction of the furnace track; a second furnace door drive device, connected to the first furnace door drive device, configured to drive the first furnace door drive device and the furnace door to move in a second direction, and the second direction is parallel to the extension direction of the furnace track.

[0018] In the second aspect, an embodiment of the present disclosure provides a boat-supported transportation method, which is applied to at least one reactor and the boat-supported transportation system described in the first aspect, wherein the reactor has a reaction chamber and an in-furnace rail arranged in the reaction chamber, and the in-furnace rail is configured to carry a boat support; when the out-furnace rail of the boat-supported transportation system carries the boat support, the boat-supported transportation method includes: the boat-moving device of the boat-supported transportation system moves the boat support from the out-furnace rail to the cache device of the boat-supported transportation system; when the cache device carries the boat support and the out-furnace rail does not carry the boat support, the boat-supported transportation method includes: the boat-moving device moves the boat support from the cache device to the out-furnace rail; the out-furnace rail carries the boat support, and the out-furnace rail is aligned with the in-furnace rail. When the rail outside the furnace is connected, the boat support transportation method includes: the boat pushing device of the boat support transportation system pushes the boat support from the rail outside the furnace to the rail inside the furnace; when the rail outside the furnace carries the boat support and the rail outside the furnace is docked with the transportation rail, the boat support transportation method includes: the boat pushing device pushes the boat support from the rail outside the furnace to the transportation rail; when the rail inside the furnace carries the boat support and the rail inside the furnace is docked with the rail outside the furnace, the boat support transportation method includes: the boat pushing device pushes the boat support from the rail inside the furnace to the rail outside the furnace; when the transportation rail carries the boat support and the transportation rail is docked with the rail outside the furnace, the boat support transportation method includes: the boat pushing device pushes the boat support from the transportation rail to the rail outside the furnace.

[0019] A boat support transportation system provided by an embodiment of the present disclosure is applied to at least one reactor, wherein the reactor has a reaction chamber and a furnace rail arranged in the reaction chamber, and the furnace rail is configured to carry a boat support. The boat support transportation system includes a furnace outer rail, at least one set of transport rails, a boat pushing device, a buffer device, and a boat moving device. The first end of the furnace outer rail can be docked with one end of the furnace inner rail, and the furnace outer rail is configured to carry a boat support. One end of the transport rail can be docked with the second end of the furnace outer rail, and the transport rail is configured to carry a boat support. The boat pushing device is configured to drive the boat support to move along the extension direction of the furnace outer rail, the buffer device is arranged adjacent to the furnace outer rail, and is configured to buffer the boat support, and the boat moving device is configured to move the boat support from the furnace outer rail to the buffer device, or to move the boat support from the buffer device to the furnace outer rail. When the first end of the furnace outer rail is docked with one end of the furnace inner rail, the boat pushing device drives the boat support to move from the furnace outer rail to the furnace inner rail, or from the furnace inner rail to the furnace outer rail. When one end of the transport track docks with the second end of the external furnace track, the boat pushing device drives the boat support to move from the external furnace track to the transport track, or from the transport track to the external furnace track.

[0020] The boat support transport system uses the furnace inner rail, furnace outer rail and transport rail to carry the boat support, and uses the boat pushing device to transport the boat support between the furnace inner rail and furnace outer rail and between the furnace outer rail and transport rail, replacing the cantilever paddle structure to carry and transport the boat support, avoiding the problem of easy deformation of the cantilever paddle structure, thereby avoiding the displacement of the boat support during the transportation by the cantilever paddle structure, so that the boat support can be accurately sent into or out of the reactor, improving the accuracy of the automated transportation of the boat support.

[0021] In addition, the boat support transportation system uses a cache device to cache the boat support, and uses a boat moving device to transport the boat support between the external furnace track and the cache device. There is no need to wait for the external furnace track to dock with the transportation track, and then use a boat pushing device to transport the boat support between the external furnace track and the transportation track, which shortens the time for the boat support to be transported to the external furnace track and the time for the boat support to be moved away from the external furnace track. At the same time, it shortens the time for the external furnace track to dock with the internal furnace track, further improving the transportation efficiency of the boat support. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 Shown is a schematic diagram of an application scenario of a processing system provided by an embodiment of the present disclosure.

[0023] Figure 2 FIG2 is a schematic structural diagram of a processing system provided by another embodiment of the present disclosure that does not include a transport track.

[0024] Figure 3 FIG. 1 is a side view of a processing system according to another embodiment of the present disclosure that does not include a transport track.

[0025] Figure 4Shown is a schematic structural diagram of an outer furnace rail, a boat pushing device, a boat moving device and a supporting assembly provided in one embodiment of the present disclosure.

[0026] Figure 5 Shown is a schematic structural diagram of an outer furnace rail, a bearing assembly and a docking drive device provided in one embodiment of the present disclosure.

[0027] Figure 6 Shown is a side view of a boat support and a boat support transportation system provided by an embodiment of the present disclosure, excluding the transportation track.

[0028] Figure 7 Shown Figure 6 A partial enlarged view of area A is shown.

[0029] Figure 8 Shown is a side view of a boat support and a boat support transportation system provided by another embodiment of the present disclosure, excluding transportation tracks.

[0030] Figure 9 Shown Figure 8 A partial enlarged view of area B is shown.

[0031] Figure 10 The figure shows a side view of a boat-supported transportation system provided by an embodiment of the present disclosure, excluding the transportation track.

[0032] Figure 11 Shown is a schematic structural diagram of an outer furnace rail, a boat pushing device and a boat support provided in one embodiment of the present disclosure.

[0033] Figure 12 Shown Figure 11 A partial enlarged view of region C is shown.

[0034] Figure 13 Shown is a schematic structural diagram of a furnace door, a first furnace door driving device and a second furnace door driving device provided in one embodiment of the present disclosure.

[0035] Figure 14 Shown is a schematic structural diagram of a cache device provided in one embodiment of the present disclosure.

[0036] Figure 15 Shown is a schematic structural diagram of a boat pushing device provided in one embodiment of the present disclosure.

[0037] Figure 16 Shown is a flow chart of a boat transport method provided by an embodiment of the present disclosure.

[0038] Figure 17 Shown is a flow chart of a boat transport method provided by another embodiment of the present disclosure.

[0039] Reference numerals:

[0040] 1. Processing system; 10. Boat-supported transport system; 100. External rail; 101. First end of external rail; 102. Second end of external rail; 200. Transport rail; 210. First end of transport rail; 300. Boat-pushing device; 310. Second clamping member; 320. Boat-pushing drive assembly; 400. Buffering device; 410. Buffering rail; 500. Boat-moving device; 510. Boat-moving assembly; 5110. Vertical support member; 5111. Columnar structure; 5120. Horizontal support member; 5130. Vertical drive member; 5131. First fixed portion; 5132. First movable portion; 5140. Horizontal drive member; 5141. Second fixed portion; 5142. Second movable portion; 5150. First clamping member; 5160. Connecting plate ;5161, second guide hole;511, first group of boat moving components;512, second group of boat moving components;600, lifting device;610, load-bearing component;6101, first guide hole;620, lifting drive;630, guide column;700, docking drive device;800, slide rail assembly;900, furnace door support;1000, support seat;20, reactor;201, reaction chamber;202, rail inside furnace;2020, one end of rail inside furnace;203, furnace mouth;30, furnace door;40, first furnace door drive device;50, second furnace door drive device;60, clean bench;601, frame;2, boat support;2001, first end of boat support;2002, second end of boat support;21, first clamped portion;22, second clamped portion. DETAILED DESCRIPTION

[0041] The following will clearly and completely describe the technical solutions in the embodiments of the present disclosure in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present disclosure without making any creative efforts shall fall within the scope of protection of the present disclosure.

[0042] When transporting sheet materials, the sheet materials are loaded in a boat, and the boat is supported by a boat support, which is placed on the blade support end of the cantilever paddle structure. The cantilever paddle structure is arranged on the boat push assembly. Driven by the boat push assembly, the cantilever paddle structure sends the boat support, the boat, and the sheet materials carried by the boat into or out of the reactor.

[0043] However, as the weight and length of the boat support continue to increase, the paddle of the cantilever paddle structure usually needs to be made very long. The blade support end is inevitably deformed and drooped due to its own gravity and the gravity of the boat support, boat and sheet material, causing the boat support to shift during transportation, resulting in the boat support being unable to be accurately delivered into or taken out of the reactor, and the transportation accuracy of the boat support is low.

[0044] To ensure the boat support can be accurately fed into and removed from the reactor, multiple adjustment mechanisms are required to adjust the position of the boat support and the boat relative to the reactor as they enter and exit the reactor, making adjustment difficult. In particular, when the boat carries different quantities or types of sheet materials, the force applied to the blade support end of the cantilever paddle structure varies, resulting in varying degrees of deformation of the cantilever paddle structure and, in turn, varying degrees of adjustment required for the boat and boat support, further increasing the difficulty, time, and cost of adjustment.

[0045] Furthermore, the cantilever paddle structure vibrates during entry and exit of the reactor, resulting in poor operational stability. This can cause sheet materials to collide with the boat or boat support, damaging them and impacting the yield of the sheet materials. It can also cause the boat or boat support to deform or damage them. Furthermore, due to the deformation of the cantilever paddle structure, the number of sheet materials that the boat support can carry at a time is limited, impacting the overall productivity of the reactor.

[0046] In addition, the boat pusher assembly cannot drive the cantilever paddle structure to transport the boat to other devices, resulting in limited application scenarios for the boat pusher assembly to drive the cantilever paddle structure to move.

[0047] In response to the above problems, an embodiment of the present disclosure provides a boat-support transportation system, which is applied to at least one reactor, wherein the reactor has a reaction chamber and a furnace rail arranged in the reaction chamber, and the furnace rail is configured to carry a boat support. The boat-support transportation system includes a furnace rail, at least one set of transport rails, a boat-pushing device, a buffer device, and a boat-moving device. The first end of the furnace rail can be docked with one end of the furnace rail, and the furnace rail is configured to carry the boat support. One end of the transport rail can be docked with the second end of the furnace rail, and the transport rail is configured to carry the boat support. The boat-pushing device is configured to drive the boat support to move along the extension direction of the furnace rail, the buffer device is arranged adjacent to the furnace rail, and is configured to buffer the boat support, and the boat-moving device is configured to move the boat support from the furnace rail to the buffer device, or to move the boat support from the buffer device to the furnace rail. When the first end of the furnace rail is docked with one end of the furnace rail, the boat-pushing device drives the boat support to move from the furnace rail to the furnace rail, or from the furnace rail to the furnace rail. When one end of the transport track docks with the second end of the external furnace track, the boat pushing device drives the boat support to move from the external furnace track to the transport track, or from the transport track to the external furnace track.

[0048] The boat support transport system uses the furnace inner rail, furnace outer rail and transport rail to carry the boat support, and uses the boat pushing device to transport the boat support between the furnace inner rail and furnace outer rail and between the furnace outer rail and transport rail, replacing the cantilever paddle structure to carry and transport the boat support, avoiding the problem of easy deformation of the cantilever paddle structure, thereby avoiding the displacement of the boat support during the transportation by the cantilever paddle structure, so that the boat support can be accurately sent into or out of the reactor, improving the accuracy of the automated transportation of the boat support.

[0049] In addition, the boat support transportation system uses a cache device to cache the boat support, and uses a boat moving device to transport the boat support between the external furnace track and the cache device. There is no need to wait for the external furnace track to dock with the transportation track, and then use a boat pushing device to transport the boat support between the external furnace track and the transportation track, which shortens the time for the boat support to be transported to the external furnace track and the time for the boat support to be moved away from the external furnace track. At the same time, it shortens the time for the external furnace track to dock with the internal furnace track, further improving the transportation efficiency of the boat support.

[0050] In addition, the boat support transport system uses the furnace internal rails, furnace external rails and transport rails to carry the boat support, replacing the cantilever paddle structure, avoiding the problem of deformation of the cantilever paddle structure, and thus reducing the difficulty of adjusting the position of the boat support relative to the reactor when entering and exiting the reactor.

[0051] Furthermore, the external rails of the furnace do not vibrate during movement, ensuring excellent operational stability. This prevents damage to sheet materials from colliding with the boat or boat support, resulting in a higher yield of sheet materials and preventing deformation or damage to the boat or boat support. Furthermore, since the boat support is no longer restricted by the deformation of the cantilever paddle structure, it can carry a greater number of sheet materials at a time, resulting in higher overall production capacity while maintaining the same overall reactor dimensions.

[0052] In addition, the boat support transportation system uses a boat pushing device to transport the boat support between the track inside the furnace and the track outside the furnace, as well as between the track outside the furnace and the transportation track, meeting the automated transportation needs of the boat support, thereby realizing the transportation of the boat support in different application scenarios.

[0053] The specific structure of the boat-supported transportation system will be described below in conjunction with embodiments.

[0054] Figure 1 The figure shows an application scenario diagram of the boat-supported transportation system provided by an embodiment of the present disclosure. Figure 1 As shown, the boat support transportation system 10 is applied to at least one reaction furnace 20 , and the reaction furnace 20 has a reaction chamber 201 and a furnace rail 202 arranged in the reaction chamber 201 , and the furnace rail 202 is configured to carry the boat support 2 .

[0055] The boat support transport system 10 includes: an external furnace track 100, at least one set of transport tracks 200, a boat pushing device 300, a buffer device 400, and a boat moving device 500. The first end 101 of the external furnace track can dock with one end 2020 of the internal furnace track, and the external furnace track 100 is configured to carry the boat support 2. The first end 210 of the transport track can dock with the second end 102 of the external furnace track, and the transport track 200 is configured to carry the boat support 2. The boat pushing device 300 is configured to drive the boat support 2 to move along the extension direction of the external furnace track 100. The buffer device 400 is arranged adjacent to the external furnace track 100 and is configured to buffer the boat support 2. The boat moving device 500 is configured to move the boat support 2 from the external furnace track 100 to the buffer device 400, or to move the boat support 2 from the buffer device 400 to the external furnace track 100.

[0056] When the first end 101 of the external rail is docked with one end 2020 of the internal rail, the boat pushing device 300 drives the boat support 2 to move from the external rail 100 to the internal rail 202 or from the internal rail 202 to the external rail 100.

[0057] When the first end 210 of the transport track is docked with the second end 102 of the external furnace track, the boat pushing device 300 drives the boat support 2 to move from the external furnace track 100 to the transport track 200 , or from the transport track 200 to the external furnace track 100 .

[0058] Exemplarily, the boat pushing device 300 may include a robotic arm, a cylinder assembly, a screw assembly, or other structures capable of driving the boat support 2 to move along the extension direction of the outer furnace rail 100, which is not specifically limited in the present disclosure.

[0059] Illustratively, the cache device 400 may include at least one cache rail 410, and the cache rail 410 is configured to carry the boat holder 2. Illustratively, the cache device 400 may also include other structures capable of carrying the boat holder 2, which is not specifically limited in the present disclosure.

[0060] Illustratively, the boat moving device 500 may include a linear module, a robotic arm, or other structures capable of moving the outer furnace rail 100 , which is not specifically limited in the present disclosure.

[0061] The boat support transport system 10 provided by the embodiment of the present disclosure utilizes the in-furnace rail 202, the out-furnace rail 100 and the transport rail 200 to carry the boat support 2, and utilizes the boat pushing device 300 to transport the boat support 2 between the in-furnace rail 202 and the out-furnace rail 100 and between the out-furnace rail 100 and the transport rail 200, replacing the cantilever paddle structure to carry and transport the boat support 2, avoiding the problem of easy deformation of the cantilever paddle structure, thereby avoiding the displacement of the boat support 2 during the transportation by the cantilever paddle structure, so that the boat support 2 can be accurately sent into or out of the reactor 20, thereby improving the accuracy of the automated transportation of the boat support 2.

[0062] In addition, the boat support transport system 10 uses a cache device 400 to cache the boat support 2, and uses a boat moving device 500 to transport the boat support 2 between the external furnace track 100 and the cache device 400. There is no need to wait for the external furnace track 100 to dock with the transport track 200, and then use the boat pushing device 300 to transport the boat support 2 between the external furnace track 100 and the transport track 200. This shortens the time for the boat support 2 to be transported to the external furnace track 100 and the time for the boat support 2 to be moved away from the external furnace track 100. At the same time, it shortens the time for the external furnace track 100 to dock with the internal furnace track 202, further improving the transportation efficiency of the boat support 2.

[0063] In addition, the boat support transport system 10 uses the furnace internal rail 202, the furnace external rail 100 and the transport rail 200 to carry the boat support 2, replacing the cantilever paddle structure, avoiding the problem of deformation of the cantilever paddle structure, and thus reducing the difficulty of adjusting the position of the boat support 2 relative to the reactor 20 when entering and exiting the reactor 20.

[0064] Furthermore, the outer furnace rail 100 does not vibrate during movement, ensuring excellent operational stability. This prevents sheet materials from colliding with the boat or boat support 2 and causing damage, resulting in a higher yield of sheet materials and preventing deformation or damage to the boat or boat support 2. Furthermore, since the boat support 2 is no longer subject to the deformation limitations of the cantilever paddle structure, it can carry a greater number of sheet materials at a time. This allows the overall production capacity of the reactor 20 to be higher, while maintaining the same overall dimensions.

[0065] In addition, the boat support transport system 10 uses a boat pushing device 300 to transport the boat support 2 between the furnace track 202 and the furnace external track 100 and between the furnace external track 100 and the transport track 200, meeting the automated transportation requirements of the boat support 2, thereby realizing the transportation of the boat support 2 in different application scenarios.

[0066] Figure 2 FIG2 is a schematic diagram of the structure of a processing system provided by an embodiment of the present disclosure excluding a transport track. Figure 3 FIG. 1 is a side view of a processing system according to an embodiment of the present disclosure, excluding a transport track. Figure 4 The figure shows a schematic diagram of the structure of the outer furnace rail, boat pushing device, boat moving device and bearing assembly provided by an embodiment of the present disclosure. Figures 2 to 4As shown, there are multiple buffering devices 400, which are spaced apart vertically. The boat handling device 500 handles the boat tray 2 horizontally. The boat tray transportation system 10 also includes a lifting device 600, which is connected to the boat handling device 500. The lifting device 600 is configured to drive the boat handling device 500 to move up and down, thereby driving the boat tray 2 to move up and down, so that the boat tray 2 can be transported from the furnace track 100 to any group of buffering devices 400 by the boat handling device 500, or the boat tray 2 can be transported from any group of buffering devices 400 to the furnace track 100 by the boat handling device 500. By providing multiple buffering devices 400, the number of boat trays 2 that can be cached is increased.

[0067] In some embodiments, as Figures 2 to 4 As shown, there are multiple reactors 20, which are spaced apart in the vertical direction. The lifting device 600 is also connected to the external rail 100. The lifting device 600 is further configured to drive the external rail 100 up and down so that the external rail 100 can dock with the internal rail 202 of any reactor 20. By using the lifting device 600 to drive the external rail 100 up and down so that the external rail 100 can dock with the internal rail 202 of any reactor 20, there is no need to install multiple external rails 100 to dock one external rail 100 with the internal rail 202 of one reactor 20. This reduces the number of external rails 100, simplifies the structure of the boat-supported transport system 10, reduces the manufacturing cost of the boat-supported transport system 10, and thus reduces production costs.

[0068] In some embodiments, as Figures 2 to 4 As shown, the lifting device 600 is also connected to the boat pushing device 300. The lifting device 600 is further configured to drive the boat pushing device 300 to move up and down, so that the boat pushing device 300 can push the boat support 2 from the external furnace track 100 to the internal furnace track 202 of any reaction furnace 20, or from the internal furnace track 202 of any reaction furnace 20 to the external furnace track 100. The lifting device 600 is used to drive the boat pushing device 300 to move up and down, so that the boat pushing device 300 can drive the boat support 2 to move between the external furnace track 100 and the internal furnace track 202 of any reaction furnace 20. There is no need to set up multiple boat pushing devices 300, so that each boat pushing device 300 drives the boat support 2 to move between the external furnace track 100 and the internal furnace track 202 of each reaction furnace 20. Therefore, the number of boat pushing devices 300 is reduced, the structure of the boat support transportation system 10 is simplified, the manufacturing cost of the boat support transportation system 10 is reduced, and thus the production cost is reduced.

[0069] Exemplarily, the lifting device 600 may include a robotic arm, which is respectively connected to the boat moving device 500, the external furnace rail 100 or the boat pushing device 300, and the robotic arm moves to drive the boat moving device 500 to move up and down, thereby driving the boat support 2 to move up and down; or, the robotic arm moves to drive the external furnace rail 100 to move up and down, so that the external furnace rail 100 can dock with the internal furnace rail 202 of any reactor 20; or, the robotic arm moves to drive the boat pushing device 300 to move up and down, so that the boat pushing device 300 can drive the boat support 2 to move between the external furnace rail 100 and the internal furnace rail 202 of any reactor 20.

[0070] For example, the lifting device 600 may further include a linear module and a connecting portion connected to the linear module. The connecting portion is respectively connected to the boat moving device 500, the external furnace rail 100, or the boat pushing device 300. The linear module drives the connecting portion to move up and down, thereby respectively driving the boat moving device 500, the external furnace rail 100, or the boat pushing device 300 to move up and down. For example, the lifting device 600 may further include other structures capable of providing driving force, which is not specifically limited in this disclosure.

[0071] In some embodiments, as Figures 2 to 4 As shown, the lifting device 600 includes a supporting assembly 610, a lifting drive 620, and a guide post 630. The supporting assembly 610 is connected to the boat pushing device 300, the external furnace rail 100, and the boat moving device 500, respectively, and supports the boat pushing device 300, the external furnace rail 100, and the boat moving device 500. The supporting assembly 610 has at least one first guide hole 6101 extending vertically through the supporting assembly 610. The lifting drive 620 is connected to the supporting assembly 610 and is configured to drive the supporting assembly 610 up and down. The guide post 630 is vertically arranged and extends through the first guide hole 6101. Because the lifting device 600 has a large vertical movement distance, the guide post 630 is provided to guide the vertical movement of the supporting assembly 610, thereby improving the accuracy and stability of the lifting movement of the supporting assembly 610, thereby improving the accuracy and stability of the lifting movement of the supporting assembly 610, and thus improving the accuracy and stability of the lifting movement of the boat pushing device 300, the external furnace rail 100, and the boat moving device 500.

[0072] Exemplarily, the supporting assembly 610 has four first guide holes 6101 that penetrate the supporting assembly 610 in the vertical direction. The four first guide holes 6101 are respectively located at the four edges of the supporting assembly 610, and the four guide columns 630 are respectively inserted into the four first guide holes 6101 to further improve the accuracy and stability of the lifting and lowering movement of the supporting assembly 610.

[0073] Exemplarily, the lifting drive 620 may include a robotic arm, a linear module, or other structures capable of providing driving force, which is not specifically limited in the present disclosure.

[0074] Illustratively, the reactor 20, the clean bench 60 and the transport track 200 are arranged adjacent to each other in sequence, both ends of the guide column 630 are respectively connected to the rack 601 of the clean bench 60, and multiple cache devices 400 are arranged on the rack 601 at intervals along the vertical direction.

[0075] In some embodiments, the external rail 100 is slidably connected to the support assembly 610. The boat-supported transport system 10 further includes a docking drive device 700, which is disposed on the support assembly 610 and connected to the external rail 100. The docking drive device 700 is configured to drive the external rail 100 to move along the extension direction of the external rail 100 so as to dock the external rail 100 with the internal rail 202 or the transport rail 200. The docking drive device 700 enables automated docking of the external rail 100 with the internal rail 202 or the transport rail 200, thereby improving the automated transport level of the boat-supported transport system 10.

[0076] For example, Figure 5 As shown, the external rail 100 and the carrier assembly 610 are slidably connected via a slide rail assembly 800. There are two external rails 100, two docking drive devices 700, and two slide rail assemblies 800. The slide rail assembly 800 extends in the same direction as the external rail 100. Each external rail 100, each slide rail assembly 800, and each docking drive device 700 is provided in a one-to-one correspondence. The two docking drive devices 700 are symmetrically arranged relative to the external rail 100 to enhance the smooth movement of the external rail 100.

[0077] Exemplarily, the docking drive device 700 may include a cylinder, an oil cylinder or other structures. As long as the docking drive device 700 can provide driving force to drive the external furnace track 100 to move along the extension direction of the external furnace track 100, the present disclosure does not make specific limitations.

[0078] Exemplarily, the docking drive device 700 includes a first cylinder 710 and a second cylinder 720. The barrel of the first cylinder 710 is connected to the bearing assembly 610, the rod of the first cylinder 710 is connected to the barrel of the second cylinder 720, and the rod of the second cylinder 720 is connected to the external rail 100. The extension and retraction directions of the rods of the first and second cylinders 710 and 720 are both the same as the extension direction of the external rail 100. The extension and retraction of the rod of the first cylinder 710 drives the second cylinder 720 to move relative to the first cylinder 710 in the extension direction of the external rail 100, thereby driving the external rail 100 to move relative to the first cylinder 710 in the extension direction of the external rail 100. Furthermore, the extension and retraction of the rod of the second cylinder 720 drives the external rail 100 to move relative to the second cylinder 720 in the extension direction of the external rail 100.

[0079] In some embodiments, the boat handling device 500 includes at least two boat handling assemblies 510, which are respectively disposed at the first end 101 and the second end 102 of the external furnace rail, and are configured to support both ends of the boat support 2. Generally, the boat support 2 is relatively long, and using at least two boat handling assemblies 510 to simultaneously support both ends of the boat support 2 can improve the stability of the boat handling device 500 when handling the boat support 2.

[0080] For example, Figure 4 and Figure 6 As shown, the boat moving device 500 includes two groups of boat moving assemblies 510, namely a first group of boat moving assemblies 511 and a second group of boat moving assemblies 512. The first group of boat moving assemblies 511 is arranged at the first end 101 of the external furnace track, and the second group of boat moving assemblies 512 is arranged at the second end 102 of the external furnace track. The first group of boat moving assemblies 511 is configured to support the first end 2001 of the boat support, and the second group of boat moving assemblies 512 is configured to support the second end 2002 of the boat support.

[0081] In some embodiments, as Figure 4 as well as Figures 6 to 10 As shown, both ends of the boat support 2 have a first clamped portion 21. The boat moving assembly 510 includes a vertical support member 5110, a horizontal support member 5120, a vertical drive member 5130, a horizontal drive member 5140, and a first clamping member 5150. The vertical support member 5110 is disposed on the bearing assembly 610, and the horizontal support member 5120 is connected to the vertical support member 5110. The vertical drive member 5130 includes a first fixed portion 5131 and a first movable portion 5132. The first fixed portion 5131 is configured to drive the first movable portion 5132 to move. The first fixed portion 5131 is disposed on the horizontal support member 5120. The horizontal drive member 5140 includes a second fixed portion 5141 and a second movable portion 5142. The second fixed portion 5141 is configured to drive the second movable portion 5142 to move. The second fixed portion 5141 is connected to the first movable portion 5132 so that the horizontal driving member 5140 can move in the vertical direction under the drive of the vertical driving member 5130. The first clamping member 5150 is located above the outer furnace rail 100. The first clamping member 5150 is connected to the second movable portion 5142. The first clamping member 5150 can move in the horizontal direction under the drive of the horizontal driving member 5140, and can move in the vertical direction along with the horizontal driving member 5140 under the drive of the vertical driving member 5130. When the boat support 2 is located between at least two groups of boat moving assemblies 510, the projections of the first clamping member 5150 and the first clamped portion 21 on the horizontal plane can overlap. The boat moving assembly 510 has a simple structure and is highly efficient in moving the boat support 2.

[0082] Exemplarily, the vertical driving member 5130 includes a cylinder, which includes a cylinder barrel and a cylinder rod. The cylinder barrel forms the first fixed portion 5131 , and the cylinder rod forms the first movable portion 5132 .

[0083] Exemplarily, the horizontal driving member 5140 includes a motor, the motor includes a main body and a power output shaft, the main body forms a second fixed part 5141, the second movable part 5142 includes a power output shaft, and the extension direction of the second movable part 5142 is the same as the movement direction of the first clamping member 5150.

[0084] Exemplarily, the second movable portion 5142 may further include a screw assembly, the second fixed portion 5141 drives the screw assembly to rotate, and the screw assembly drives the first clamping member 5150 to move in the horizontal direction.

[0085] For example, the second movable portion 5142 may further include components such as a conveyor belt and a transmission wheel. The second fixed portion 5141 drives the transmission wheel to rotate, thereby driving the conveyor belt, thereby driving the first clamping member 5150 to move horizontally. The second movable portion 5142 may also include other structures, as long as the second movable portion 5142 can drive the first clamping member 5150 to move horizontally under the drive of the second fixed portion 5141. This disclosure does not specifically limit this.

[0086] Exemplarily, the first clamping member 5150 has a groove, and the first clamped portion 21 has a boss. When the boat support 2 is located between at least two groups of boat moving assemblies 510, the boss is located in the groove to enable the first clamping member 5150 to clamp the first clamped portion 21, thereby enabling the boat moving assembly 510 to move the boat support 2.

[0087] For example, the specific process of the boat moving device 500 moving the boat support 2 from the furnace outer track 100 to the buffer device 400 is as follows:

[0088] When the external rail 100 carries the boat support 2 and is adjacent to any of the buffer devices 400, the first clamping member 5150 clamps the first clamped portion 21, and the vertical driving member 5130 drives the horizontal driving member 5140 to move vertically upward, thereby driving the boat support 2 to move vertically upward, thereby separating the boat support 2 from the external rail 100. The second fixed portion 5141 drives the second movable portion 5142 to move horizontally, and the first clamping member 5150 moves horizontally with the second movable portion 5142 until the boat support 2 is vertically aligned with the buffer device 400. Alternatively, the second movable portion 5142 drives the first clamping member 5150 to continue to move horizontally relative to the second movable portion 5142, thereby driving the boat support 2 to continue to move horizontally until the boat support 2 is vertically aligned with the buffer device 400. The vertical driving member 5130 drives the horizontal driving member 5140 to move downward in the vertical direction, thereby driving the boat support 2 to move downward in the vertical direction, so that the boat support 2 is placed in the cache device 400 .

[0089] In some embodiments, the vertical support member 5110 includes at least one columnar structure 5111 extending in a vertical direction. The columnar structure 5111 is disposed on the supporting assembly 610. The boat moving assembly 510 further includes a connecting plate 5160 having at least one second guide hole 5161. The top end of the columnar structure 5111 passes through the second guide hole 5161 and is connected to the horizontal support member 5120. The connecting plate 5160 is configured to connect the first movable portion 5132 and the second fixed portion 5141. The columnar structure 5111 is used to guide the vertical movement of the connecting plate 5160, thereby guiding the vertical movement of the horizontal driving member 5140, thereby improving the accuracy and stability of the boat moving assembly 510 in moving the boat support 2.

[0090] For example, Figure 4 、 Figure 7 and Figure 10 As shown, the vertical support member 5110 of a boat moving assembly 510 includes two columnar structures 5111 extending in the vertical direction, and the lower ends of the columnar structures 5111 are respectively connected to the bearing assembly 610. The columnar structures 5111 of the two boat moving assemblies 510 are arranged opposite each other to further improve the accuracy and stability of the vertical support member 5110 in guiding the movement of the connecting plate 5160 in the vertical direction.

[0091] In some embodiments, as Figures 10 to 12As shown, both ends of the boat support 2 have a second clamped portion 22. The boat pushing device 300 includes at least one second clamping member 310 and a boat pushing drive assembly 320. The second clamping member 310 is configured to clamp the second clamped portion 22. The boat pushing drive assembly 320 is connected to the second clamping member 310 and is configured to drive the second clamping member 310 to clamp the second clamped portion 22 and drive the boat support 2 to move along the extension direction of the external furnace rail 100. When the boat pushing device 300 drives the boat support 2 to move along the extension direction of the external furnace rail 100, the second clamping member 310 is used to clamp the second clamped portion 22, thereby improving the accuracy and stability of the boat pushing device 300 driving the boat support 2 to move.

[0092] Exemplarily, the boat push drive assembly 320 may include a cylinder, the cylinder rod of the cylinder is connected to the second clamping member 310, the cylinder rod of the cylinder is extended and retracted to drive the second clamping member 310 to clamp the second clamped part 22, and drive the boat support 2 to move along the extension direction of the outer furnace track 100.

[0093] For example, the boat pushing drive assembly 320 may further include a motor and a screw assembly, the screw assembly being connected to the second clamping member 310, and the motor driving the screw assembly to rotate, thereby driving the second clamping member 310 to clamp the second clamped portion 22 and driving the boat support 2 to move along the extension direction of the external furnace rail 100. The boat pushing drive assembly 320 may also include other structures, as long as the boat pushing drive assembly 320 can enable the second clamping member 310 to clamp the second clamped portion 22 and drive the boat support 2 to move along the extension direction of the external furnace rail 100, and this disclosure does not make any specific limitations.

[0094] In some embodiments, as Figure 16 As shown, there are two second clamping members 310 .

[0095] Driven by the boat pushing drive assembly 320, a second clamping member 310 clamps a second clamped portion 22 and drives the boat support 2 to move along the extension direction of the outer furnace rail 100, so that the boat support 2 moves between the outer furnace rail 100 and the inner furnace rail 202. Another second clamping member 310 clamps another second clamped portion 22 and drives the boat support 2 to move along the extension direction of the outer furnace rail 100, so that the boat support 2 moves between the outer furnace rail 100 and the transport rail 200.

[0096] like Figure 1 As shown, an embodiment of the present disclosure provides a processing system 1, which includes the boat support transportation system 10 mentioned in the above embodiment and at least one reaction furnace 20, the reaction furnace 20 has a reaction chamber 201 and an in-furnace rail 202 arranged in the reaction chamber 201, and the in-furnace rail 202 is configured to carry the boat support 2.

[0097] In some embodiments, the extension direction of the furnace rail 202 is the same as that of the reaction chamber 201 . The reaction furnace 20 further has a furnace opening 203 , and the plane where the furnace opening 203 is located is perpendicular to the extension direction of the furnace rail 202 .

[0098] like Figure 1 、 Figure 2 and Figure 13 As shown, the processing system 1 further includes a furnace door 30, a first furnace door driving device 40, and a second furnace door driving device 50. The furnace door 30 is configured to close or expose the furnace opening 203. The first furnace door driving device 40 is connected to the furnace door 30 and is configured to drive the furnace door 30 to move in a first direction X1, which is perpendicular to the extension direction of the furnace rail 202. The second furnace door driving device 50 is connected to the first furnace door driving device 40 and is configured to drive the first furnace door driving device 40 and the furnace door 30 to move in a second direction X2, which is parallel to the extension direction of the furnace rail 202.

[0099] Illustratively, the first furnace door driving device 40 is connected to the furnace door 30 via the furnace door support 900 , and the second furnace door driving device 50 is connected to the reaction furnace 20 and the frame 601 via the support base 1000 .

[0100] For example, Figure 14 As shown, the buffer device 400 includes two buffer rails 410. The extending direction of the buffer rails 410 is the same as the extending direction of the external rail 100.

[0101] Exemplarily, the extension direction of the external furnace track 100 , the transport track 200 , and the cache track 410 of the cache device 400 is the same as the extension direction of the internal furnace track 202 .

[0102] Illustratively, the first furnace door driving device 40 may include a cylinder, a linear module or other structures capable of providing driving force, which is not specifically limited in the present disclosure.

[0103] Illustratively, the second furnace door driving device 50 may include a robotic arm, a linear module, or other structures capable of providing driving force, which is not specifically limited in the present disclosure.

[0104] The embodiment of the present disclosure also provides a boat-supported transportation method, which is applied to at least one reactor 20 and the boat-supported transportation system 10 mentioned in the above embodiment. The reactor 20 has a reaction chamber 201 and an in-furnace rail 202 arranged in the reaction chamber 201. The in-furnace rail 202 is configured to carry a boat-supported transportation method.

[0105] When the outer rail 100 of the boat support transportation system 10 carries the boat support 2, the boat support transportation method includes the boat moving device 500 of the boat support transportation system 10 moving the boat support 2 from the outer rail 100 to the cache device 400 of the boat support transportation system 10.

[0106] When the buffer device 400 carries the boat tray 2 and the external rail 100 does not carry the boat tray 2 , the boat tray transportation method 10 includes the boat moving device 500 moving the boat tray 2 from the buffer device 400 to the external rail 100 .

[0107] When the outer rail 100 carries the boat support 2 and the outer rail 100 is docked with the inner rail 202 , the boat support transportation method includes the boat pushing device 300 of the boat support transportation system 10 pushing the boat support 2 from the outer rail 100 to the inner rail 202 .

[0108] When the outer-furnace track 100 carries the boat support 2 and the outer-furnace track 100 is docked with the transportation track 200 , the boat support transportation method includes using the boat pushing device 300 to push the boat support 2 from the outer-furnace track 100 to the transportation track 200 .

[0109] When the in-furnace rail 202 carries the boat support 2 and the in-furnace rail 202 is docked with the out-furnace rail 100 , the boat support transportation method includes using the boat pushing device 300 to push the boat support 2 from the in-furnace rail 202 to the out-furnace rail 100 .

[0110] When the transport track 200 carries the boat support 2 and the transport track 200 is docked with the external furnace track 100 , the boat support transport method includes using the boat pushing device 300 to push the boat support 2 from the transport track 200 to the external furnace track 100 .

[0111] Figure 16 Shown is a flow chart of a boat transport method provided by an embodiment of the present disclosure. Figure 16 The boat-supported transportation method of the discharging process is shown. The execution subject of the boat-supported transportation system 10 can be a server or a processor. The server can be an independent physical server, or a server cluster or distributed system composed of multiple physical servers. It can also be a cloud server that provides basic cloud computing services such as cloud services, cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communications, middleware services, domain name services, security services, and big data and artificial intelligence platforms. The processor can be a central processing unit (CPU).

[0112] Exemplarily, during the discharging process, the boat-supported transportation method includes the following steps.

[0113] Step 1610, receiving the discharge instruction.

[0114] For example, after the reactor completes processing of the sheet material in the boat support, it can send a discharge instruction to the processor (or server, the processor is used as an example below).

[0115] Step 1620, determine whether the outer rail of the furnace supports the boat support.

[0116] If the outer rail of the furnace does not carry the boat support, continue to step 1630.

[0117] If the outer rail of the furnace carries a boat support, continue to step 1640.

[0118] Exemplarily, the outer furnace rail may be provided with a first sensor for detecting whether the outer furnace rail carries a boat support, and the processor may obtain the detection result of the first sensor to determine whether the outer furnace rail carries a boat support based on the detection result of the first sensor.

[0119] Step 1630: The boat pushing device pushes the boat support from the track inside the furnace to the track outside the furnace.

[0120] Step 1640: Determine whether the cache device supports the boat.

[0121] If the cache device does not carry a boat support, continue to step 1650.

[0122] If the cache device carries a boat tray, continue to step 1660.

[0123] Exemplarily, the cache device may be provided with a second sensor for detecting whether the cache device carries a boat tray, and the processor may obtain the detection result of the second sensor to determine whether the cache device carries a boat tray based on the detection result of the second sensor.

[0124] Step 1650: The boat moving device moves the boat tray from the outer track of the furnace to the buffer device.

[0125] Step 1660, determine whether the transport track is carrying a boat support.

[0126] If the transport track does not carry the boat support, continue to step 1670.

[0127] If the transport track carries a boat support, continue to step 1680.

[0128] Exemplarily, the transport track may be provided with a third sensor for detecting whether the transport track carries a boat support, and the processor may obtain the detection result of the third sensor to determine whether the transport track carries a boat support based on the detection result of the third sensor.

[0129] Step 1670: The boat pushing device pushes the boat support from the furnace outer track to the transport track.

[0130] Step 1680: The processor issues a prompt instruction.

[0131] Specifically, the processor issues a prompt instruction to prompt the staff to move the boat support carried by the transport track away.

[0132] For example, the transport track may be provided with an alarm. The processor may send a prompt instruction to the alarm, and the alarm may remind the staff in the form of sound or light.

[0133] Figure 17 Shown is a flow chart of a boat transport method provided by another embodiment of the present disclosure. Figure 17 The present invention shows a method of transporting materials by boat during the feeding process. Specifically, the method comprises the following steps.

[0134] Step 1710, receiving feeding instructions.

[0135] For example, after the discharge is completed, the reactor may send a feed instruction to the processor (or server, the processor is used as an example below).

[0136] Step 1720, determine whether the outer rail of the furnace supports the boat support.

[0137] If the outer rail of the furnace carries a boat support, continue to step 1730.

[0138] If the outer rail of the furnace does not carry the boat support, continue to step 1740.

[0139] Step 1730: The boat pushing device pushes the boat support from the track outside the furnace to the track inside the furnace.

[0140] Step 1740: Determine whether the cache device supports the boat.

[0141] If the cache device carries a boat tray, continue to step 1750.

[0142] If the cache device does not carry a boat support, continue to step 1760.

[0143] Step 1750: The boat moving device moves the boat tray from the buffer device to the outer track of the furnace.

[0144] After executing step 1750 , continue to execute step 1720 .

[0145] Step 1760, determine whether the transport track is carrying a boat support.

[0146] If the transport track carries a boat support, continue to step 1770.

[0147] If the transport track does not carry the boat support, continue to step 1780.

[0148] Step 1770: The boat pushing device pushes the boat support from the transport track to the track outside the furnace.

[0149] After executing step 1770 , continue to execute step 1720 .

[0150] Step 1780: The processor issues a prompt instruction.

[0151] Specifically, the processor issues a prompt instruction to prompt the staff to move the boat support to the transportation track.

[0152] For example, the transport track may be provided with an alarm. The processor may send a prompt instruction to the alarm, and the alarm may remind the staff in the form of sound or light.

[0153] References in the specification to "one embodiment," "an embodiment," and the like indicate that the described embodiment may include a particular feature, structure, or characteristic, but not every embodiment necessarily includes that particular feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Furthermore, when a particular feature, structure, or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not.

[0154] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” means not only “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” includes not only the meaning of “above” or “over,” but also includes the meaning of “above” or “over” with no intervening features or layers therebetween (i.e., directly on something).

[0155] Additionally, spatially relative terms, such as "below," "beneath," "beneath," "above," and the like, may be used herein for ease of description to describe the relationship of one component or feature relative to other components or features as depicted in the figures. Spatially relative terms are intended to encompass different orientations of a component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein should be interpreted accordingly.

[0156] It should be noted that, in this document, the terms "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus comprising a series of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of other identical elements in the process, method, article, or apparatus comprising the element.

[0157] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the scope of protection of the present disclosure.

Claims

1. A boat-supported transportation system, characterized in that: The invention is applied to at least one reaction furnace, wherein the reaction furnace comprises a reaction chamber and a furnace rail disposed in the reaction chamber, wherein the furnace rail is configured to carry a boat support; Wherein, the boat-supported transportation system includes: An external furnace rail, a first end of which can be docked with one end of the internal furnace rail, and the external furnace rail is configured to carry the boat support; at least one set of transport rails, one end of which is capable of docking with the second end of the outer furnace rail, and the transport rails are configured to carry the boat support; a boat pushing device configured to drive the boat support to move along the extension direction of the outer furnace track; a buffer device, disposed adjacent to the outer furnace rail and configured to buffer the boat support; a boat moving device configured to move the boat support from the external furnace track to the buffer device, or to move the boat support from the buffer device to the external furnace track; Wherein, when the first end of the outer furnace track is docked with one end of the inner furnace track, the boat pushing device drives the boat support to move from the outer furnace track to the inner furnace track, or from the inner furnace track to the outer furnace track; Wherein, when one end of the transport track is docked with the second end of the external furnace track, the boat pushing device drives the boat support to move from the external furnace track to the transport track, or from the transport track to the external furnace track; Wherein, both ends of the boat support have a second clamped portion, and the boat pushing device includes: two second clamping members, wherein the second clamping members are configured to clamp the second clamped portion; The boat push drive assembly is connected to the second clamping member and is configured to drive one of the second clamping members to clamp one of the second clamped parts, and drive the boat support to move along the extension direction of the outer furnace track so that the boat support moves between the outer furnace track and the inner furnace track, or drive another of the second clamping members to clamp another of the second clamped parts, and drive the boat support to move along the extension direction of the outer furnace track so that the boat support moves between the outer furnace track and the transport track.

2. The boat-supported transportation system according to claim 1, characterized in that: There are multiple buffer devices, and the multiple buffer devices are arranged at intervals along the vertical direction; the boat moving device moves the boat support along the horizontal direction; The boat-supported transportation system further includes: A lifting device is connected to the boat moving device and is configured to drive the boat moving device to lift and lower, so as to drive the boat support to lift and lower, so that the boat support can be transported by the boat moving device from the outside furnace track to any group of the cache devices, or so that the boat support can be transported by the boat moving device from any group of the cache devices to the outside furnace track.

3. The boat-supported transportation system according to claim 2, characterized in that: There are multiple reaction furnaces, and the multiple reaction furnaces are spaced apart in the vertical direction; The lifting device is also connected to the outer rail of the furnace, and the lifting device is further configured to drive the outer rail of the furnace to rise and fall, so that the outer rail of the furnace can dock with the inner rail of any one of the reaction furnaces.

4. The boat-supported transportation system according to claim 3, characterized in that: The lifting device is also connected to the boat pushing device, and the lifting device is further configured to drive the boat pushing device to lift and lower, so that the boat pushing device can push the boat support to move from the external furnace track to the internal furnace track of any one of the reaction furnaces, or from the internal furnace track of any one of the reaction furnaces to the external furnace track.

5. The boat-supported transportation system according to claim 4, characterized in that: The lifting device comprises: a bearing assembly connected to the boat pushing device, the furnace outer rail, and the boat moving device, respectively, and carrying the boat pushing device, the furnace outer rail, and the boat moving device, wherein the bearing assembly has at least one first guide hole penetrating the bearing assembly in a vertical direction; A lifting drive, connected to the carrying assembly and configured to drive the carrying assembly to lift; The guide column is vertically arranged and penetrates into the first guide hole.

6. The boat-supported transportation system according to claim 5, characterized in that: The outer rail of the furnace is slidably connected to the bearing assembly; Wherein, the boat-supported transportation system further includes: The docking drive device is arranged on the bearing assembly and connected to the outer furnace rail. It is configured to drive the outer furnace rail to move along the extension direction of the outer furnace rail so that the outer furnace rail can dock with the inner furnace rail or the transport rail.

7. The boat-supported transportation system according to any one of claims 1 to 6, characterized in that: The boat moving device comprises: At least two groups of boat moving assemblies are respectively arranged at the first end of the furnace outer track and the second end of the furnace outer track, and are respectively configured to carry the two ends of the boat support.

8. The boat-supported transportation system according to claim 7, characterized in that: Both ends of the boat support have a first clamped portion; Wherein, the boat moving assembly includes: A vertical support member is provided on the bearing assembly; a horizontal support member connected to the vertical support member; a vertical driving member, comprising a first fixed portion and a first movable portion, wherein the first fixed portion is configured to drive the first movable portion to move, and the first fixed portion is disposed on the horizontal supporting member; a horizontal driving member, comprising a second fixed portion and a second movable portion, wherein the second fixed portion is configured to drive the second movable portion to move, and the second fixed portion is connected to the first movable portion so that the horizontal driving member can move in a vertical direction under the drive of the vertical driving member; The first clamping member is located above the outer furnace track. The first clamping member is connected to the second movable part and can move in the horizontal direction under the drive of the horizontal driving member, and can move in the vertical direction along with the horizontal driving member under the drive of the vertical driving member. When the boat support is located between at least two groups of the boat moving assemblies, the projections of the first clamping member and the first clamped part on the horizontal plane can overlap.

9. The boat-supported transportation system according to claim 8, characterized in that: The vertical support member includes at least one columnar structure extending in a vertical direction, and the columnar structure is arranged on the bearing assembly; Wherein, the boat moving assembly further comprises: The connecting plate has at least one second guide hole, the top end of the columnar structure passes through the second guide hole and is connected to the horizontal support member, and the connecting plate is configured to connect the first movable part and the second fixed part.

10. A processing system, characterized in that include: At least one reaction furnace, the reaction furnace having a reaction chamber and a furnace rail disposed in the reaction chamber, the furnace rail being configured to carry a boat support; The boat-supported transport system according to any one of claims 1 to 9 is configured to transport the boat-supported transport to the in-furnace track.

11. The processing system according to claim 10, characterized in that The extension direction of the furnace rail is the same as the extension direction of the reaction chamber. The reaction furnace further has a furnace opening, and the plane where the furnace opening is located is perpendicular to the extension direction of the furnace rail. Wherein, the processing system further includes: a furnace door configured to close or expose the furnace opening; a first furnace door driving device connected to the furnace door and configured to drive the furnace door to move in a first direction, wherein the first direction is perpendicular to an extension direction of the furnace rail; The second furnace door driving device is connected to the first furnace door driving device and is configured to drive the first furnace door driving device and the furnace door to move along a second direction, and the second direction is parallel to the extension direction of the furnace track.

12. A boat transport method, characterized in that: Applicable to at least one reactor and the boat support transportation system according to any one of claims 1 to 9, wherein the reactor comprises a reaction chamber and an in-furnace rail disposed in the reaction chamber, wherein the in-furnace rail is configured to carry the boat support; In the case where the outer rail of the boat support transportation system carries the boat support, the boat support transportation method includes: the boat moving device of the boat support transportation system moves the boat support from the outer rail to the buffer device of the boat support transportation system; In the case where the buffer device carries the boat tray and the outer furnace track does not carry the boat tray, the boat tray transportation method includes: the boat moving device moves the boat tray from the buffer device to the outer furnace track; In a case where the outer rail of the furnace carries the boat support and the outer rail of the furnace is docked with the inner rail of the furnace, the boat support transportation method includes: a boat pushing device of the boat support transportation system pushes the boat support from the outer rail of the furnace to the inner rail of the furnace; In the case where the outer furnace track carries the boat support and the outer furnace track is docked with the transport track, the boat support transport method includes: the boat pushing device pushes the boat support from the outer furnace track to the transport track; In a case where the in-furnace rail carries the boat support and the in-furnace rail is docked with the out-furnace rail, the boat support transportation method includes: the boat pushing device pushes the boat support from the in-furnace rail to the out-furnace rail; In the case where the transport track carries the boat support and the transport track is docked with the external furnace track, the boat support transport method includes: the boat pushing device pushes the boat support from the transport track to the external furnace track.

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